JP2007210655A - Storage case - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent particle contamination caused by an outdoor airflow flowing into a storage case which turns negatively pressurized when opening the top cover of the case where a stored object such as a photomask is stored. <P>SOLUTION: This storage case 10 comprising a bottom tray part 1 and a top cover 2 mounted on the tray part 1 so as to be freely openable holds and stores a plate-like stored object 3 on the tray part 1. The tray part 1 is planted with a bottom barrier 11 and hangs a top barrier 21 so as to surround the peripheral edge of the stored object 3. When the cover 2 is closed, the barrier 21 is positioned inside the barrier 11, and the barrier 11 and the barrier 21 superimpose vertically. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a storage case for various thin plate-like members such as masks, glass substrates and semiconductor wafers used in semiconductor device manufacturing processes, and is particularly suitable for photomasks that dislike fine dust (hereinafter referred to as particles). Related to the case to be stored.

  In recent years, the required performance of photomasks has become more severe as semiconductor devices are highly integrated, highly accurate, and have high performance. Under such circumstances, among the remarkable technologies that have been inherited, the problem that has not been interfered with yet is the problem of contamination by particles.

  In particular, since the photomask is used as an original circuit pattern, particle control is the most important issue.

  The photomask is stored in a dedicated storage case for handling, movement, storage and the like. This storage case is required to have a high level of cleanliness, and it is necessary to strictly prevent particles from entering the case.

  FIG. 9 is a partially cutaway perspective view of an example of a photomask storage case. The storage case 10 is made of, for example, a strong engineering plastics injection-molded product such as PPS (polyphenylene sulfide), and includes a lower dish portion 1 and an upper lid 2.

  The storage case 10 is configured such that the diagonal lines of the rectangular photomask 5 as exemplified here can be stored in parallel around the square storage case 10. However, there is a configuration in which the periphery of the rectangular photomask 5 as indicated by the broken line can be stored in parallel with the periphery of the rectangular storage case 10.

  That is, the lower plate member 1 has a lower projection member 15 protruding in a conical shape that holds the lower surface in the vicinity of the four corners of the photomask 5 in point contact in accordance with two storage methods of the object 3 to be stored. It is provided at each of four locations, a central portion of four sides and a portion near the corners of the four corners.

  Further, according to the two methods of storing the photomask 5, the support member 16 that can be positioned by hitting the vicinity of the four corners of the photomask 5 or the central side of the four sides is positioned on the bottom plate 1. It is provided at four places in the central part of the side.

  The upper lid 2 is loosely fitted to the lower pan 1 in a detachable and nearly airtight state. Here, the configuration in which the upper lid 2 is easily opened and closed is illustrated, but there is also a configuration in which the upper lid 2 is opened and closed so as to swing by being locked by a hinge.

  On the inner wall of the top plate of the upper lid 2, upper projection members (not shown) are suspended at four locations so as to face the four lower projection members 15 of the lower dish portion 1. These upper and lower protruding members 15 and the like are made of, for example, a rubber elastic body such as silicon rubber. Therefore, if the upper lid 2 is closed, even if an object to be stored such as the photomask 5 placed on the lower projecting member 15 jumps upward due to an external impact, the upper projecting member is not covered. It is pressed with a weight of 2 and is held down resiliently so as not to play in the vertical direction.

  By the way, in a storage case, a normal storage method, that is, a storage object such as a photomask having a size of about 6 inches □, for example, is stored in parallel to the four sides even when stored in parallel to the diagonal line. Even when an object to be stored having a size of about 7 inches □ is stored, the size of the storage case itself is about 20 cm □. For this reason, when the upper lid is opened and closed, an air flow caused by a pressure difference occurs inside and outside the storage case even if it is performed quietly, and a problem occurs particularly when the upper lid is opened.

  That is, the airflow generated when the upper lid is opened is affected by the differential pressure inside and outside the case because the inside of the case temporarily becomes a negative pressure. FIG. 10 schematically shows the behavior of the airflow when the upper lid of the storage case is opened.

  In FIG. 10, at the moment when the upper lid 2 of the storage case 10 is opened, the inside of the storage case 10 tends to increase in volume, resulting in a negative pressure. As a result, the airflow generated around the storage case 10 includes the atmosphere outside the storage case 10 as schematically shown by the arrows, and the inside of the lower plate part 1 in which the articles 3 are stored from all sides. It flows toward.

  In the former storage case, there was no function to prevent airflow from flowing out of the case when the upper lid was opened and fine foreign matters, so-called particles were mixed, or disturbing the atmosphere in the case. For this reason, particles are entrained due to the inflow of the external air current, and as a result, the problem that the particles adhere to the case and the object to be stored such as the stored photomask frequently occurs.

  Recently, proposals have been made to prevent such a problem that particles adhere to the surface of a storage object when the storage object such as a photomask is taken in and out of the storage case.

  One of them is, for example, a structure capable of sealing the bottom of the storage case and the upper lid so that it can be filled with an inert gas. And a diffusion part is provided in the case so that the inflowing inert gas diffuses in the case (for example, see Patent Document 1).

Alternatively, a filter is provided on the outer wall of the case so that outside air entering when the upper lid is opened flows through the filter. Also, in order to prevent outside air that has flowed in a large amount when the upper lid is opened from being stirred around the case, it is once collided with the control body provided facing the filter to be blocked from the objects to be stored and dispersed. (For example, refer to Patent Document 2).
JP 2001-53136 A ([0013], [FIG. 1]) Japanese Patent Laying-Open No. 2003-170969 ([0019], [FIG. 1])

  As described above, it is necessary to provide a troublesome mechanism in order to prevent an object to be stored such as a photomask from being contaminated with particles by suppressing the airflow flowing into the case when the upper cover of the storage case is opened. For this reason, handling of the storage case becomes complicated, and the original functions of the storage case such as handling, transportation, and storage such as collection / removal of stored objects cannot be fully utilized.

  Therefore, in the present invention, the standing barrier and the drooping barrier on the upper lid are planted so as to cross each other in the lower plate part of the storage case, and the airflow flowing from the outside when the upper lid is opened is blocked and stored by both barriers. It is an object of the present invention to provide a storage case that prevents a stored object from being contaminated with particles.

  The problem described above is the storage according to claim 1, comprising a lower plate part and an upper lid that can be freely opened and closed on the lower plate part, and holding and storing a plate-like object to be stored in the lower plate part The case has a lower barrier planted on the lower plate portion and an upper barrier suspended from the upper lid so as to surround the peripheral portion of the article to be stored, and when the upper lid is closed, The problem is solved by a storage case configured such that the barrier is positioned outside the lower barrier, and the upper barrier and the lower barrier overlap in the vertical direction.

  That is, the storage case of the present invention is provided with the lower barrier on the lower pan and the upper barrier on the upper lid so as to surround the peripheral portion of the storage object. When the upper lid is closed, the upper barrier is positioned outside the lower barrier so that the upper barrier and the lower barrier overlap in the vertical direction to form a shielding wall against the atmosphere inside and outside the storage case. I have to.

  Then, immediately after opening the upper lid, the inside of the temporary storage case suddenly becomes negative pressure, and the flow of external air flowing into the case from the outside of the case surrounds the object to be stored and overlaps vertically Blocked.

  In other words, the external airflow flowing into the storage case first hits the lower barrier and is blocked, then meanders upward, hits the upper barrier, and meanders downward to be decelerated.

  As a result, it is possible to prevent particles contained in the external airflow from being caught and flowing into the storage case, or rolling up the particles in the storage case, and to prevent the stored object from being contaminated.

  Next, according to claim 2, the lower barrier is planted along the inner peripheral edge of the lower pan portion, and the upper barrier is positioned outside the lower barrier along the inner peripheral edge of the upper lid. The storage case according to claim 1, which is configured to hang from the bottom, is solved.

  In other words, the lower barrier is planted along the inner peripheral edge of the lower dish part more greatly than the peripheral part of the storage object. Then, the upper barrier is suspended along the inner periphery of the upper lid so as to be positioned outside the lower barrier.

  When the lower barrier and the upper barrier are configured as described above, the area surrounded by the two barriers can be made full of the storage case. Therefore, the objects to be stored can be stored in the storage case in parallel to the diagonal line or in parallel to the four sides.

  Next, in claim 3, the lower barrier is composed of an inner lower barrier and an outer lower barrier arranged in two rows, and the upper barrier is suspended in the gap between the inner / outer lower barriers. This is solved by the storage case according to claim 1.

  That is, the lower barrier is configured such that two barriers, that is, the inner lower barrier and the outer lower barrier are arranged in parallel, and is hung between the two lower barriers in which the upper barrier is arranged.

  In this way, the external airflow that flows when the top cover is opened first hits the outer lower barrier, then meanders upward, then hits the upper barrier, meanders downward, and then hits the inner lower barrier and rises upward After meandering into the storage case.

  As a result, the flow velocity of the external airflow flowing into the storage case is greatly reduced. Accordingly, it is possible to reduce the amount of particles entrained by the external airflow, and to prevent the stored item from being contaminated by the particles.

  The storage case according to claim 3, wherein the lower barrier is configured such that the outer lower barrier is lower than the inner lower barrier and the upper barrier is suspended toward the outer lower barrier. Solved by.

  That is, of the two barriers arranged side by side, the outer lower barrier has a height that overlaps the upper barrier, but is lower than the inner lower barrier. And the upper barrier is made to hang down near the outer lower barrier.

  In this way, the behavior of the external airflow that flows when the upper lid is opened is such that the airflow meandering up against the outer lower barrier is drawn into the airflow meandering down against the upper barrier. Moreover, since the gap between the upper barrier and the outer lower barrier is narrow, the flow of the external airflow that flows in at the moment when the upper cover is opened is rapidly suppressed.

  As a result, the flow of the airflow flowing from the outer lower barrier against the upper barrier while meandering to the inner lower barrier is gently smoothed, and the effect of suppressing further particle entrainment can be obtained.

  Next, in claim 5, the outer lower barrier and the upper barrier have a plurality of rows of openings formed in a horizontal direction, and the openings are vertically moved by the outer lower barrier and the upper barrier. This is solved by the storage case according to claim 3 configured to be stepped in the direction.

  That is, the opening is formed in the horizontal direction in the outer lower barrier and the upper barrier. And the strong external airflow which flows in in a storage case at the moment of opening an upper cover escapes from the opening part to the back side of a wall side.

  As a result, whether it is the outer lower barrier or the upper barrier, the strong external airflow flowing into the storage case at the moment when the upper lid is opened is shaken by giving a strong impact to the wall surface, thereby preventing the barriers from contacting each other. The contact between the barriers means that particles are generated.

  In the storage case according to the present invention, a lower barrier is planted in the lower dish part so as to surround an object to be stored in the lower dish part, and an upper barrier is provided on the upper cover so as to overlap the inner side of the lower barrier part. It has a configuration that hangs down.

  With this configuration, the upper lid is opened and the inside of the storage case temporarily becomes a negative pressure, and even if an external airflow flows into the case, it is blocked by the upper barrier and the lower barrier and becomes a gentle flow. And it is suppressed that an external air current entrains a particle, or disturbs the atmosphere in a case and winds up a particle.

  As a result, it is possible to prevent the object to be stored such as the photomask stored in the storage case from being contaminated by the particles, which can greatly contribute to the manufacturing efficiency of the semiconductor device or the like for manufacturing the thin film pattern by photolithography.

1 is a schematic partially cutaway perspective view of a first embodiment of the present invention, FIG. 2 is a schematic cross-sectional view taken along line XY of FIG. 1, and FIG. 3 is a schematic cross-section of a second embodiment of the present invention. 4 is a schematic sectional view of a third embodiment of the present invention, FIG. 5 is a schematic sectional view of a fourth embodiment of the present invention, and FIG. 6 is a schematic sectional view of a fifth embodiment of the present invention. Sectional drawing, FIG. 7 is a schematic sectional view of the sixth embodiment of the present invention, and FIG. 8 is an arrangement example of the barrier of the present invention in the storage case.
[Example 1]
FIG. 1 is a schematic partially cutaway perspective view of a first embodiment of the present invention. A storage case 10 is composed of a lower plate portion 1 and an upper lid 2 as in the conventional case, and is covered with a photomask or the like. One stored item 3 can be stored.

  Both the lower pan 1 and the upper lid 2 are made of, for example, an injection molded product of engineering plastics such as PPS. Here, the lower pan 1 and the upper lid 2 are separated from each other. There is a configuration in which the portion 1 and the upper lid 2 are locked, and the upper lid 2 can swing when opening and closing.

  A lower barrier 11 is planted on the inner surface of the lower dish portion 1 so as to surround the article 3 to be stored, and the inner and rear surfaces of the opposed upper lid 2 overlap with the inner side of the lower barrier 11 and hang down. The upper barrier 21 is suspended.

  FIG. 2 is a schematic cross-sectional view taken along the line XX in FIG. 1. FIG. 2 (A) shows that the upper lid 2 of the storage case 10 is closed on the lower pan 1 and the object 3 is stored inside. Shown in the stowed state. The lower barrier 11 is planted in the lower dish part 1 and is suspended so that the upper barrier 21 of the upper lid 2 overlaps the inner side of the lower barrier 11.

  FIG. 2 (B) shows a state at the moment when the upper lid 2 is being opened on the lower dish portion 1 as indicated by a large arrow. The behavior of the external airflow that flows because the inside of the storage case 10 in which the storage object 3 is stored by the opening of the upper lid 2 becomes negative pressure is schematically indicated by arrows.

  The external airflow does not flow directly into the storage case 10; first, it strikes against the lower barrier 11 and meanders upward and descends, while it strikes against the upper barrier 21 and descends. It flows into the storage case 10 from the lower edge of the barrier 21.

That is, the external airflow that is about to flow in at the moment when the upper lid 2 is opened is blocked by the lower barrier 11 and the upper barrier 21 that surround the storage object 3 and flows into the storage case 10 while meandering to weaken the flow velocity. It will be. Therefore, it is possible to suppress contamination of the article 3 by particles as much as possible by entraining particles outside the storage case 10 or raising particles in the storage case 10.
[Example 2]
FIG. 3 is a schematic cross-sectional view of the second embodiment of the present invention. Like FIG. 2, FIG. 3 corresponds to the schematic cross-sectional view taken along the line XX of FIG. The upper lid 2 of the storage case 10 is closed on the lower pan 1 and the storage object 3 is stored inside.

  Two barriers of an inner lower barrier 12 and an outer lower barrier 13 are planted in parallel on the lower plate portion 1 of the storage case 10. The upper lid 2 is suspended so that the upper barrier 21 overlaps a central portion between the two lower barriers 12 and 13.

  FIG. 3B shows a state at the moment when the upper lid 2 is being opened on the lower dish portion 1 as indicated by a large arrow. The behavior of the external airflow that flows because the inside of the storage case 10 in which the storage object 3 is stored due to the opening of the upper lid 2 becomes negative pressure is schematically shown by arrows.

  In other words, the behavior of the external airflow that flows into the storage case 10 includes a thing that first hits the outer lower barrier 13 and meanders downward and a thing that falls and hits the upper barrier 21. Next, the upper barrier 21 rises against the inner lower barrier 12 from the lower edge of the upper barrier 21, and flows into the storage case 10 from the upper edge of the inner lower barrier 12.

Thus, the external airflow that tries to flow at the moment when the upper lid 2 is opened is blocked by the two lower barriers 12 and 13 and the upper barrier 21 that surround the object to be stored 3, and stored at a reduced flow rate while meandering three times. It flows into the inside of the case 10. Therefore, it is possible to further prevent the stored object 3 from being contaminated by particles by entraining particles outside the storage case 10 or raising particles in the storage case 10.
Example 3
FIG. 4 is a schematic sectional view of a third embodiment of the present invention. Similar to FIG. 2, this corresponds to a schematic cross-sectional view taken along the line XX in FIG. 1. The height of the barrier 13 is lower than that of the inner lower barrier 12.

  Although the upper lid 2 is shown in a closed state, the arrow indicates that the external airflow that is to flow in at the moment when the upper lid 2 is opened includes two lower barriers 12 and 13 that surround the storage object 3, and the upper barrier 21. Shows how it behaves.

  The external airflow that is going to flow into the storage case 10 that has become negative pressure first tries to flow in a large amount into the lower outer barrier 13 having a low height, hits the upper barrier 21, is blocked and descends, The lower edge of the upper barrier 21 snakes and hits the inner lower barrier 12, and flows into the storage case 10 in which the article 3 is stored from the upper edge of the inner lower barrier 12.

According to this configuration, the external airflow that is about to flow in immediately after the upper lid 2 is opened is forced to flow without being obstructed, and is then meandered and decelerated. As a result, there is an effect of alleviating a problem of entraining particles outside the storage case 10 or raising particles in the storage case 10.
Example 4
FIG. 5 is a schematic sectional view of a fourth embodiment of the present invention. Similar to FIG. 2, this corresponds to a schematic cross-sectional view taken along the line XX in FIG. 1, and an upper barrier 21 hanging from the upper lid 2 of the storage case 10 is planted in the lower dish 1. It is configured not to be in the center of the gap between the two lower barriers 12 and 13 but closer to the outer lower barrier 13.

  Although the upper lid 2 is shown in a closed state, the arrow indicates that the external airflow that is to flow in at the moment when the upper lid 2 is opened includes two lower barriers 12 and 13 that surround the storage object 3, and the upper barrier 21. Schematically shows how it behaves.

  The external airflow having a high flow velocity that first tries to flow into the storage case 10 that has become negative pressure is first blocked by a narrow gap between the outer lower barrier 13 and the upper barrier 21, and then decelerated. The lower edge portion is meandered and raised, and flows around the upper edge portion of the inner lower barrier 12 into the storage case 10 in which the storage object 3 is stored.

According to this configuration, the external airflow that is about to flow in immediately after the upper lid 2 is opened is strongly blocked and then meandered to decelerate. As a result, there is an effect of further alleviating the problem of entraining particles outside the storage case 10 or raising particles in the storage case 10.
Example 5
FIG. 6 is a schematic sectional view of a fifth embodiment of the present invention. 6A corresponds to a schematic cross-sectional view taken along the line XX in FIG. 1, as in FIG. 2, and is formed on the side surface of the outer lower barrier 13 planted on the lower plate portion 1 of the storage case 10. A plurality of rows of lower openings 14 are formed in the horizontal direction, and a plurality of rows of upper openings 22 are formed in the horizontal direction on the side surface of the upper barrier 21 depending on the upper lid 2. The arrows schematically show the behavior of the external airflow.

  The external airflow that is about to flow in due to the negative pressure in the storage case 10 at the moment when the upper lid 2 is opened rapidly flows through a narrow gap between the outer lower barrier 13 and the upper barrier 21. Therefore, when the gap becomes negative pressure and the barrier surfaces of the outer lower barrier 13 and the upper barrier 21 attract each other and come into contact with each other, foreign matters such as particles are generated. The lower and upper openings 14 and 22 are provided to prevent this problem.

  That is, by the lower opening 14 and the upper opening 22 formed in the side surfaces of the outer lower barrier 13 and the upper barrier 21, a part of the impinging external airflow flows into the openings 14 and 22 to block the barrier. It flows out into the storage case 10 in which the articles to be stored 3 are stored while decelerating. The remaining external airflow is blocked by the three barriers 13, 21, and 12 and flows into the storage case 10 in which the storage object 3 is stored.

  Thus, when the outer airflow flows most strongly at the moment when the upper lid 2 is opened, the flow velocity of the outer airflow flowing into the narrow gap between the outer lower barrier 13 and the upper barrier 21 is reduced. It is more effective to configure the lower opening 14 and the upper opening 22 to be stepped when the upper lid 2 is closed.

  FIG. 6B shows an example in which a plurality of round holes each having a lower opening 14 and an upper opening not shown are arranged in a row, and FIG. 6C shows the lower opening 14 and the figure. The upper opening not shown shows an example in which a plurality of elongated holes are arranged in a plurality of rows.

If comprised in this way, the impact of the external airflow which is going to flow in the storage case 10 from the moment when the upper cover 2 is opened, the three barriers 13, 21, 12 and the two sets of openings 14, 2, Will be greatly relaxed. As a result, the problem of entraining particles outside the storage case 10 due to the flowing external airflow or raising particles in the storage case 10 can be alleviated more greatly.
Example 6
FIG. 7 is a schematic cross-sectional view of a sixth embodiment of the present invention. 7A corresponds to a schematic cross-sectional view taken along the line XX in FIG. The inner lower barrier 12 and the outer lower barrier 13, which are planted in the lower dish part 1, the lower barrier 11 (not shown), the upper barrier 21 which hangs down on the upper cover 2, and the like are formed when the lower dish part 1 and the upper cover 2 are injection molded. It can be formed by integral molding. However, when the ready-made storage case 10 is used, the openings 14 and 22 as shown in FIG. 6 are formed, or when the common use of the storage case 10 is considered, the barrier is manufactured as an individual member. It is better to join them.

  That is, the lower barriers 11, 12, 13, and 21 are used as individual members, for example, by injection molding using various thermoplastic engineering plastics such as PPS, PPO, PC, and PBT similar to the storage case 10.

  Since the thickness of the barrier is about 1 mm at most, in order to perform strong bonding, as shown in FIG. 7, the cross-sectional shape of each barrier is made trapezoidal so that the bonding surface 4 becomes wide. In that case, the slope of the wall surface may be on either the inside or outside of the storage case 10. The adhesive is preferably a chemically stable adhesive that does not cause generation of particles. For example, an epoxy-based room temperature curing adhesive is used.

  FIG. 7B shows a configuration example in which the bonding surface 4 is enlarged so that the barrier can be more firmly bonded when the barrier according to the present invention is provided as an individual member by bonding. Such a configuration can be applied to the lower barriers 11, 12, 13 and the upper barrier 21.

  FIG. 7C shows an example in which the inner lower barrier 12 and the outer lower barrier 13 can be integrated with each other.

  In other words, if the two lower barriers 12 and 13 are integrally formed using the adhesive surface 4 as a common part, the strength of the barrier is increased and the adhesive surface 4 is enlarged so that the two lower barriers 12 and 13 can be firmly bonded when joined as individual members. .

  FIG. 8 shows an example of the arrangement of the barrier according to the present invention in the storage case. The bottom plate portion 1 of the storage case 10 is schematically viewed from above, and the thick solid line indicates the arrangement of the lower barrier 11. Although not shown, the upper barrier faces the lower barrier 11 when the upper lid is covered. It is arranged inside the upper side.

  FIG. 8A shows the case where the object 3 is stored so that the diagonal line of the object 3 shown in FIG. 1 is parallel to the periphery of the lower plate part 1, and the object 3 is a photomask or the like. This is a storage method frequently used. When the storage case 10 is used in this way, it is arranged in a hexagon so that the lower barrier 11 surrounds the storage object 3.

  FIG. 8B shows a case in which the periphery of the article 3 is stored so that it is parallel to the periphery of the lower dish part 1, and when the storage case 10 is used in this way, the lower barrier 11 is lowered. A square is arranged around the pan 1.

  If the barrier is arranged as shown in FIG. 8B, it can be shared with the arrangement shown in FIG. However, when the object to be stored 3 is stored as shown in FIG. 8A, it is more effective to prevent adhesion of foreign substances such as particles by arranging the barrier so that the object to be stored 3 is surrounded. .

  By the way, the degree of contamination of foreign matter between the conventional storage case and the storage case provided with the barrier according to the present invention was compared. Using a photomask as a sample, the result of comparison of foreign matter adhesion rate = [number of foreign matter adhered / total number of samples] shows that the storage case of the present invention has an average of 1/3 to 1 / month in comparison with the conventional storage case. It was a good result with a small number of 4.

  Here, the detailed specifications of the barrier provided on the lower plate part and the upper lid are not illustrated, but the essence of preventing the contamination of the object to be stored by the barrier is not affected, and various modifications are possible.

  The barrier may be formed integrally with the storage case, or may be formed of a material different from that of the storage case and retrofitted as an individual member, and various modifications are possible. However, the effect of the barrier is not changed.

  Furthermore, even if the storage case is provided with the barrier according to the present invention, it goes without saying that the operation of opening and closing the upper cover of the storage case should be performed carefully.

1 is a schematic partially cutaway perspective view of a first embodiment of the present invention. It is typical sectional drawing of XX of FIG. It is typical sectional drawing of the 2nd Example of this invention. It is typical sectional drawing of the 3rd Example of this invention. It is typical sectional drawing of the 4th Example of this invention. It is typical sectional drawing of the 5th Example of this invention. It is typical sectional drawing of the 6th Example of this invention. It is an example of arrangement | positioning in the storage case of the barrier of this invention. It is a partially cutaway perspective view of an example of a photomask storage case. It is a schematic diagram of the behavior of the airflow when the upper lid of the storage case is opened.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Lower plate part 11 Lower barrier 12 Inner lower barrier 13 Outer lower barrier 14 Lower opening part 2 Upper lid 21 Upper barrier 22 Upper opening part 3 Object 4 Adhesive surface 10 Storage case

Claims (5)

In a storage case that includes a lower plate part and an upper lid that can be freely opened and closed on the lower plate part, and holds and stores a plate-like object to be stored in the lower plate part,
A lower barrier planted in the lower dish and an upper barrier suspended from the upper lid so as to surround the peripheral edge of the storage object;
When the upper lid is closed, the upper barrier is located outside the lower barrier, and the upper barrier and the lower barrier overlap in the vertical direction. 2. The storage case according to claim 1, wherein the lower barrier is planted along the inner peripheral edge of the lower plate portion, and the upper barrier is suspended along the inner peripheral edge of the upper lid. . The lower barrier comprises an inner lower barrier and an outer lower barrier arranged in two rows,
The storage case according to claim 1, wherein the upper barrier is suspended in a gap between the inner / outer lower barriers. The lower barrier is lower on the outer lower barrier than on the inner lower barrier,
The storage case according to claim 3, wherein the upper barrier is suspended toward the outer lower barrier. The outer lower barrier and the upper barrier have a plurality of rows of openings formed in a horizontal direction,
The storage case according to claim 3, wherein the opening is stepped in the vertical direction between the outer lower barrier and the upper barrier.

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