KR101189269B1 - Manufacturing system of flat panel display - Google Patents

Abstract

A manufacturing system of a flat panel display device according to the present invention is formed of a plurality of shelves, the shelf portion on which the plurality of cassettes are stacked, moving along a running path between the shelf portions, a horizontal frame, a vertical frame perpendicular to the horizontal frame, A traveling part for moving the horizontal and vertical frames along the driving path, and a crane which is installed in the vertical frame and includes a conveying part for carrying and unloading the cassette into the shelf, and one side of the vertical frame includes a streamlined or triangular crane cover. It is preferable that it is provided. Therefore, the manufacturing system of the flat panel display device according to the present invention by installing a streamlined or triangular crane cover on one surface of the vertical frame of the crane to minimize the contact resistance with the airflow when running the crane and to suppress the occurrence of turbulence, foreign matters on the substrate Prevent sticking. Further, by forming a convex or streamlined shape on the surface of the crane cover, it is possible to suppress the generation of turbulence generated when the crane travels.

Large Board, Cassette, Stocker, Airflow, Particle, Foreign Material, Crane Cover, Exhaust Fan

Description

MANUFACTURING SYSTEM OF FLAT PANEL DISPLAY}

1A is a perspective view illustrating a manufacturing system of a flat panel display device according to an exemplary embodiment of the present invention.

1B is a schematic perspective view of a cassette of a manufacturing system of a flat panel display device according to an embodiment of the present invention;

1C is a schematic perspective view of a frame of a shelf of a manufacturing system of a flat panel display device according to an embodiment of the present invention;

2 is a side view of a crane of a manufacturing system of a flat panel display device according to an embodiment of the present invention;

3A-3D are schematic perspective views of cranes of various embodiments,

Figure 3e is a view showing a state in which a plurality of convex shape is formed on the surface of the crane cover,

Figure 3f is a view showing a state in which a plurality of concave shape is formed on the surface of the crane cover,

4 is an enlarged view of the rotary drive unit of the traveling unit and the transfer unit of the crane,

5 and 6 are cross-sectional views of the crane seen from the wind side and the cross-sectional view of the crane seen from the back side,

7A and 7B are an overall plan view and a front view of a manufacturing system of a flat panel display device, respectively;

8 is an overall cross-sectional view of a manufacturing system of a flat panel display device.

<Description of the symbols for the main parts of the drawings>

100: shelf 200: crane

300: driveway

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing system for a flat panel display, and more particularly to a cassette conveying system for loading and conveying a cassette.

There are various types of flat panel displays, such as a liquid crystal display (LCD) and an organic light emitting diode (OLED) display.

Among them, the liquid crystal display is one of the most widely used flat panel display devices. The liquid crystal display includes two display panels on which a field generating electrode is formed and a liquid crystal layer interposed therebetween. A display device which controls light transmittance through a liquid crystal layer by rearranging molecules.

In the display panel of such a liquid crystal display device, a plurality of substrates are conveyed to the process facility of each manufacturing process through a cassette conveyance system, and are completed by a liquid crystal display device.

The cassette transport system accommodates a plurality of substrates in a cassette, loads or unloads these cassettes into a stocker using a crane, and each cassette loaded on the stocker by an indexer. It returns to the process equipment of a manufacturing process.

However, as the substrate becomes larger and heavier, cassettes, cranes and stockers also become larger and heavier, resulting in various problems.

In other words, as the substrate becomes larger, the number of particles increases.

In addition, when the crane loaded with the cassette having an enlarged size moves the traveling path, the air flow around the traveling path and both ends tends to be in the turbulent or vortex state. Therefore, foreign matter in the traveling path flows into the shelf portion in which the cassette is stored due to turbulence or vortex and adheres to the circuit portion of the substrate. This causes a defect of the liquid crystal display device.

The technical problem of the present invention is to provide a manufacturing system of a flat panel display device to prevent foreign matters generated during traveling of a crane from entering the shelf.

A manufacturing system of a flat panel display device according to the present invention is formed of a plurality of shelves, a shelf portion on which a plurality of cassettes are stacked, moving along a traveling path between the shelf portions, a horizontal frame, and perpendicular to the horizontal frame. A frame, a traveling part for moving the horizontal and vertical frames along the driving path, a crane installed on the vertical frame and including a transport part for carrying in and carrying out the cassette to the shelf part, and one surface of the vertical frame. It is desirable that the streamlined or triangular crane cover is installed.

Moreover, it is preferable that the concave or convex shape is formed in the surface of the said crane cover.

In addition, it is preferable that a plurality of first fan filters are provided at the lower end portion of the vertical frame.

In addition, it is preferable that a plurality of second fan filters are provided inside the vertical frame.

In addition, it is preferable that a plurality of third fan filters are provided on the side surface of the vertical frame.

In addition, it is preferable that a plurality of fourth fan filters are provided in the horizontal frame.

In addition, it is preferable that blocking plates are provided on both side surfaces of the crane.

The conveying unit preferably includes a horizontal support unit and a robot arm provided on the horizontal support unit, and a magnetic seal is provided between the drive shaft and the rotation ring of the rotation drive unit of the robot arm.

In addition, the guide roller installed on the upper portion of the crane is preferably spaced apart from the crane at a predetermined interval and is preferably not in contact with the rail passing through the inside thereof.

Moreover, it is preferable that the drive belt which connects the some drive motor which raises and lowers the conveyance part of the said crane is a dustproof belt.

Then, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

A manufacturing system of a flat panel display device according to an embodiment of the present invention will now be described in detail with reference to the accompanying drawings.

1A is a schematic perspective view of a manufacturing system of a flat panel display device according to an embodiment of the present invention, and FIG. 1B is a schematic perspective view of a cassette of a manufacturing system of a flat panel display device according to an embodiment of the present invention, and FIG. 1C. Is a schematic perspective view of a frame of a shelf of a manufacturing system of a flat panel display device according to an embodiment of the present invention.

As shown in FIG. 1A, a manufacturing system of a flat panel display device according to an exemplary embodiment of the present invention may move along a driving path 300 between a shelf part 100 and a shelf part 100 formed of a plurality of shelves. A crane 200 is included.

In the shelf part 100, a plurality of cassettes 10 are stacked on a plurality of layers formed of a plurality of shelves. The shelf part 100 is formed of a combination of a horizontal frame 110 in a horizontal direction and a vertical frame 120 in a vertical direction.

As shown in Figure 1b, the frame of the cassette 10 is preferably formed of aluminum (Al), the bottom of the cassette 10 is polycarbonate (polycarbonate) or SUS (Steel Use Stainless, stainless steel) ( 11) prevents wear due to contact with the shelf portion 100 during conveyance of the cassette 10. In addition, since the cassette 10 formed on the bottom surface of the SUS is electrically conductive, the cassette 10 is grounded through a frame made of aluminum to prevent static electricity.

In addition, as shown in Figure 1c, by forming the SUS 113 on the cassette contact portion 112 of the shelf portion 100 on which the cassette 10 is loaded to minimize the generation of particles due to contact and wear. And, to prevent foreign substances from entering into the various types of grooves 111 formed in the frame of the shelf part 100 to be stagnant, and to facilitate the cleaning (cleaning) of the frame of the shelf part 100. The groove 111 is preferably covered with a cover 115.

The crane 200 handles the cassette 10 to bring the cassette 10 into and out of the shelf 100.

2 is a side view of the crane 200 of the manufacturing system of the flat panel display device according to an embodiment of the present invention, Figure 3a to 3d is a schematic perspective view of the crane of various embodiments.

As shown in FIG. 2 and FIG. 3A, the crane 200 includes a horizontal frame 210, a vertical frame 220, a conveying unit 230, and a traveling unit 240.

A driving unit 240 for moving the crane 200 along the driving path 300 is installed below the horizontal frame 210, and the vertical frame 220 in the form of a post is mounted on the vertical frame 220. It is installed. The driving unit 240 formed of a driving motor and wheels connected thereto allows the crane 200 to load the cassette 10 and move along the driving path 300.

Carrying unit 230 is preferably formed in the form of a robot arm so that the cassette 10 is carried in and out of the shelf portion (100). The conveyer 230 is composed of a horizontal support 231 and a robot arm 232 provided on the horizontal support 231.

The horizontal support part 231 supports the robot arm 232 and serves to raise and lower the robot arm 232. The robot arm 232 of the transfer unit 230 is in contact with the bottom surface of the cassette 10 serves to carry out and carry in the cassette 10 from the shelf (100).

4, the rotary drive part of the traveling part and the conveyance part of a crane are enlarged.

As shown in FIG. 4, the rotation driving unit 233 of the conveying unit is a driving shaft 2331, a bearing 2322 provided around the driving shaft 2331, and rotation for smoothly rotating the driving shaft 2331. Ring 2333. At this time, in order to reduce the occurrence of foreign matter due to friction in the rotary drive unit 233 of the crane 200, a magnetic seal (Ferro Seal) 2334 is provided to the bonding portion of the drive shaft (2331) and the rotary ring (2333). It is preferable. That is, when the magnetic seal 2334 is attached to the rotation drive unit 243 of the traveling unit 240 and the rotation drive unit 233 of the transport unit 230, foreign matters generated by the rotation drive units 233 and 243 are transferred to the outside. Outflow is blocked and filtered.

In addition, the bearing 2332 provided on the rotation driving unit 233 of the conveying unit 230 may use a bearing containing cleaning grease, and foreign matter generated in the conveying unit 230 may be It is preferable to discharge after filtering by using a separate fan filter unit 234, and to control the differential pressure.

2 and 3A, a crane cover 610 is provided outside the vertical frame 220. The crane cover 610 serves to protect the interior of the vertical frame 220 from the outside.

In one embodiment of the present invention, the crane cover 610 is formed in a streamlined shape. Since the cross section of the vertical frame 220 has a rectangular shape, air flow is delayed and a low pressure is formed at a part of the side and the rear of the vertical frame 220 when the crane 200 is traveling. Therefore, air flows into the rear portion of the vertical frame 220 where the low pressure is formed, and turbulence occurs, and foreign matters are collected by the turbulence, and the foreign matters thus collected are attached to the substrate.

However, by installing the streamlined crane cover 610 on the outside of the vertical frame 220, by dispersing the air that hits the front of the vertical frame 220 and by allowing the air to flow well along the side of the vertical frame 220 By preventing the occurrence of low pressure in the rear portion of the vertical frame 220 to suppress the generation of turbulence.

In addition, the streamlined crane cover 610 reduces the resistance of the air by dispersing the air hitting the front of the vertical frame 220 to reduce the occurrence of turbulence.

In addition, a guide roller 250 is installed at an upper portion of the crane 200. The guide roller 250 is a rail (20) installed in the upper spaced apart from the crane 200 by a predetermined interval penetrates the inside thereof. This serves to guide the crane 200 to move to a predetermined position without leaving the traveling position when the crane 200 travels along the rail 20.

The guide roller 250 is provided so as not to contact the rail 20. This prevents the generation of foreign matter due to the contact of the rail 20 and the guide roller 250 by making contact only in an emergency.

In addition, the drive belt 224 connecting the plurality of drive motors for raising and lowering the conveying unit 230 of the crane 200 prevents the generation of foreign matter by using the anti-vibration belt.

In addition, a first fan filter 223 is installed at the lower end of the vertical frame 220 of the crane 200. The first fan filter 223 cleans the inside of the vertical frame 220 by discharging foreign substances generated in the vertical frame to the floor by the operation of the driving belt 224.

The exhaust groove 221 is formed in the vertical frame 220 under the guide roller 250, and the second fan filter 222 is installed in the vertical frame 220. The second fan filter 222 sucks the foreign matter generated by the contact of the guide roller 250 and the rail 20 into the vertical frame 220, and discharges the foreign matter to the floor through the first fan filter 223. do.

In addition, the foreign matter generated by the operation of the drive belt 224 is also leaked to the conveying unit 230. In order to prevent this, a plurality of third fan filters 225 are installed outside the vertical frame 220. The third fan filter 225 is covered by the crane cover 610, the lower portion of the crane cover 610 is open. The third fan filter 225 maintains the inside of the vertical frame 220 at low pressure by the rotation of the fan to prevent foreign substances generated in the vertical frame 220 from leaking to the conveying unit 230. In addition, the third fan filter 225 allows foreign matters generated in the vertical frame 220 to flow into the crane cover 610, and the crane cover 610 induces foreign matters to be discharged to the floor.

In this way, foreign matter is transferred to the conveying unit 230 by guiding the direction of airflow flowing to the conveying unit 230 by the operation of the drive belt 224 to the floor using the third fan filter 225 and the crane cover 610. To prevent ingress.

And the cover 241 which surrounds the rotation drive part 243 is provided in the rotation drive part 243. As shown in FIG. Therefore, the foreign matter generated by the rotation driving unit 243 of the running unit 240 is prevented from scattering.

In addition, a plurality of fourth fan filters 226 are installed in the horizontal frame 210 of the crane 200. The fourth fan filter 226 removes the foreign matter by flowing the foreign matter attached to the crane 200 to the floor by the strong wind caused by the rotation of the fan.

In addition, as shown in Figure 3b, by installing the triangular crane cover 620, it is possible to minimize the air resistance and to suppress the occurrence of turbulence behind the vertical frame 220.

In addition, as shown in Figure 3c, by forming the upper portion of the crane cover 610 to be inclined to minimize the air resistance and to suppress the occurrence of turbulence behind the vertical frame 220. At this time, the inclination angle θ of the upper portion of the crane cover 610 is preferably 20 degrees to 60 degrees.

3E illustrates a state in which a plurality of convex shapes are formed on the surface of the crane cover, and FIG. 3F illustrates a state in which a plurality of concave shapes are formed on the surface of the crane cover.

As shown in FIGS. 3D and 3E, a plurality of convex shapes 611 may be formed on the surface of the crane cover 610. Due to the plurality of convex shapes 611, a plurality of small turbulences are generated between the convex shapes 611, and these turbulences are small and therefore disappear immediately after occurrence. At this time, since the force of the air flowing to the rear of the vertical frame 220 is weakened by the plurality of small turbulences generated between the convex shapes 611, it is difficult to generate turbulence at the rear of the vertical frame 220.

In addition, as shown in FIG. 3F, even when a plurality of concave shapes 612 are formed on the surface of the crane cover 610, the rear portion of the vertical frame 220 is the same as in the case where a plurality of convex shapes 611 are formed. To prevent turbulence from occurring.

FIG. 7A shows an overall plan view of the manufacturing system of the flat panel display, FIG. 7B shows a front view of the manufacturing system of the flat panel display, and FIG. 8 shows an overall sectional view of the manufacturing system of the flat panel display.

As shown in FIG. 1 and FIG. 8, the shelf part 100 and the crane 200 of the manufacturing system of the flat panel display device are installed in the clean area 1000, and the clean area 1000 has an upper ceiling 1001. And bottom 1002 at the bottom. An interlayer area 2000 is formed below the bottom 1002 of the clean area 1000. In addition, the ceiling 1001 and the bottom 1002 of the clean area 1000 are formed of a plurality of gratings to allow the vertical downward airflow to pass therethrough.

In the manufacturing system of the flat panel display device including the shelf part 100 and the crane 200, when the crane 200 travels along the traveling path 300, a knitting flow is generated and installed on the left and right sides of the crane 200. Vortex or turbulence flows into the shelf part 100.

That is, at the moment when the crane 200 moves along the traveling path 300, the knitting machine flows into the shelf part 100, and immediately after the crane 200 passes, the knitting machine flows vertically downward.

The amount of inflow into the shelf portion 100 of the knitting machine is further increased when the crane 200 runs in a state in which the cassette 10 is loaded, when driving at a high speed, during lifting and lowering operations, and when the first floor shelf is a shelf. Increases.

In order to prevent the inflow of the knitting unit into the shelf part 100, as shown in Figure 1, it is preferable to install the blocking plate 500 on both sides of the crane (200). The blocking plate 500 minimizes the inflow of foreign matters into the shelf part 100 by the air flow by preventing the knitting flow generated by the running of the crane 200 into the shelf part 100.

As shown in FIG. 7A and FIG. 7B, the shelf portion 100 corresponding to the end portion 310 of the traveling direction of the crane 200 among the both ends of the traveling path 300 on which the crane 200 travels has an air velocity ( 190 is formed. The wind degree 190 is an outflow path of gas for releasing the gas pushed by the crane 200 to the outside. Since the turbulence or vortex is generated a lot in the air flow 190, the inclination angle of the downdraft flowing from the ceiling 1001 of the clean region 1000 to the floor 1002 is large, and foreign matter is introduced into the shelf 100. Therefore, in order to prevent this, the open rate of the lattice through which air flow passes in the air flow 190 is preferably formed to be larger than other positions.

Therefore, a large amount of gas is discharged to the outside through the wind degree 190 to reduce the occurrence of turbulence or vortex. Therefore, since the inclination angle of the downdraft becomes small and becomes a vertical downdraft, the probability that foreign matters flow into the shelf 100 is reduced.

In addition, as shown in FIGS. 7A and 7B, by installing the air exhaust fans 150 in the left and right air winds 190, the turbulence caused by the compressed air flow generated in the air winds 190 by the running of the crane 200. Or quickly remove the vortex to prevent foreign matter from entering the shelf (100). In addition, the air duct fan 150 prevents the backflow of the compressed air flow generated when the crane 200 reciprocates both ends of the traveling path 300.

As illustrated in FIG. 8, a plurality of ceiling fan filter units (FFUs) are formed in the ceiling 1001 of the manufacturing system of the flat panel display device to form a vertical downdraft to prevent foreign matter from scattering in the clean area 1000. 1002 is provided. Such a ceiling fan filter unit 1002 is installed in all regions of the ceiling 1001 to remove the stagnant region of the air flow for each part. That is, it is preferable that the installation rate of the ceiling fan filter unit 1002 is 100%.

As shown in FIG. 8, the main stream flowing from the ceiling 1001 of the clean region 1000 to the floor 1002 by providing the interlayer exhaust fans 2002 and 2003 at the lower end 2001 of the interlayer region 2000. By pre-circulating the air flow, a vertical downdraft is smoothly formed.

5 and 6 show sectional views of the crane seen from the wind side and the sectional views of the crane seen from the back side, respectively.

As illustrated in FIGS. 5 and 6, the servo box 260 of the crane 200 is separated and miniaturized to be installed close to both sides of the vertical frame 220. Then, the capacitor box 280 is laid down in the horizontal direction to reduce the front cross-sectional area of the crane 200. In this way, the amount of compressed airflow can be reduced by reducing the front cross-sectional area of the crane 200, and therefore the amount of turbulence or vortex can be reduced.

In addition, a particle count probe may be installed in the vicinity of the driving path 300 of the crane 200 and an upper part of the ceiling to monitor the generation of foreign substances continuously.

In the manufacturing system of the flat panel display device according to the present invention, by installing a streamlined or triangular crane cover on one surface of the vertical frame of the crane, it minimizes the contact resistance with the airflow while running the crane and suppresses the occurrence of turbulence so that foreign matter adheres to the substrate. prevent.

Further, by forming a convex or streamlined shape on the surface of the crane cover, it is possible to suppress the generation of turbulence generated when the crane travels.

In addition, by installing a plurality of fan filters on the side wall or the horizontal frame of the vertical frame to guide the foreign matter to the floor to prevent contamination of the substrate by the foreign matter.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. Accordingly, the scope of the present invention is not limited thereto, and various modifications and improvements of those skilled in the art using the basic concept of the present invention as defined in the following claims also fall within the scope of the present invention.

Claims (10)

Is formed of a plurality of shelves, a shelf portion in which a plurality of cassettes are stacked, Moving along the driving path between the shelf parts, a horizontal frame, a vertical frame perpendicular to the horizontal frame, a traveling part moving the horizontal and vertical frames along the driving path, and installed on the vertical frame, Crane including a conveying unit to carry in and out of the shelf / RTI &gt; One surface of the vertical frame is a manufacturing system of a flat panel display device is provided with a crane cover of a streamlined or triangular. In claim 1, And a concave or convex shape on a surface of the crane cover. In claim 1, And a plurality of first fan filters are provided at a lower side portion of the vertical frame. In claim 1, And a plurality of second fan filters are provided inside the vertical frame. In claim 1, And a plurality of third fan filters are provided on side surfaces of the vertical frame. In claim 1, And a plurality of fourth fan filters are provided in the horizontal frame. In claim 1, A manufacturing system of a flat panel display device having blocking plates provided on both side surfaces of the crane. In claim 1, The conveying part is a horizontal support part, Robot arm installed on the horizontal support / RTI &gt; And a magnetic seal provided between the drive shaft and the rotary ring of the rotary driver of the robot arm. In claim 1, And a guide roller provided at an upper portion of the crane is spaced apart from the crane at a predetermined interval so that the guide roller is not in contact with a rail passing through the inside of the guide roller. In claim 1, A drive belt for connecting a plurality of drive motors for raising and lowering the conveying part of the crane is a dustproof belt manufacturing system of a flat panel display device.

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