KR20060043647A - Cassette stocking system - Google Patents

Abstract

Cassette stalking system according to the invention is formed of a plurality of shelves, the shelf portion is a plurality of cassettes are stacked, moving along the runway between the shelves, and includes a crane for handling the cassette, both sides of the crane It is preferable that a blocking plate is provided. Therefore, the cassette stalking system according to the present invention prevents the spread of air flow when the crane travels by installing blocking plates on both sides of the crane.

Large Board, Cassette, Stocker, Airflow, Particles, Foreign Objects, Blocking Board, Exhaust Hole

Description

Cassette stalking system {CASSETTE STOCKING SYSTEM}

1A is a schematic perspective view of a cassette stalking system according to one embodiment of the invention,

1B is a schematic perspective view of a cassette of a cassette stalking system according to one embodiment of the invention,

1C is a schematic perspective view of a frame of a shelf portion of a cassette stalking system according to an embodiment of the present invention;

2 is a side view of a crane of a cassette stalking system according to one embodiment of the invention,

3 is a schematic perspective view of a crane,

4 is an enlarged view of the rotary drive unit of the traveling unit and the transfer unit of the crane,

5 and 6 are cross-sectional views of the crane seen from the wind side and the cross-sectional view of the crane seen from the back side,

7A and 7B are full plan and front views, respectively, of a cassette stalking system;

8 is an overall cross sectional view of a cassette stalking system,

FIG. 9 is a view showing a state in which a plurality of exhaust holes are formed in a stocker outer cover provided at both ends of the stocker travel path;

FIG. 10 is a view showing a state in which a plurality of exhaust ducts are formed on a stocker outer cover provided at both ends of the stocker runway;

FIG. 11 is a view showing a state in which a plurality of exhaust dampers are formed on a stocker outer cover provided at both ends of the stocker travel path.

<Description of the symbols for the main parts of the drawings>

100: shelf 200: crane

300: driveway 5000: stalker outer cover

The present invention relates to a cassette stalking system, and more particularly to a cassette stalking system for the manufacture of a liquid crystal display device.

The liquid crystal display is one of the most widely used flat panel display devices. The liquid crystal display includes two display panels on which a field generating electrode is formed and a liquid crystal layer interposed therebetween. It is a display device which controls the transmittance | permeability of the light which passes through a liquid crystal layer by rearranging.

The two display panels of such a liquid crystal display device are conveyed to the process equipment of each manufacturing process through a conveyance system, and are completed by a liquid crystal display device.

Conventionally, a plurality of glass substrates are returned to the process equipment of each manufacturing process by using a cassette, a stocker, and an indexer. In other words, the conveying system of the liquid crystal display device manufacturing process stores up to 20 glass substrates in a cassette, stores the cassette in a stocker, and uses the robot indexer to produce each manufacturing process. It was carried in and out of process equipment of.

However, as the size of the glass substrate increases, the cassette stalk system such as a cassette crane, a cassette conveyor, and a lifter, which handles the cassette due to the increase in the weight of the glass substrate, also increases in size and weight. A problem occurs.

In other words, as the size of the glass substrate increases, the number of stagnant particles increases, and when the crane loaded with the large cassette moves the driving path of the cassette stalking system, the air flow around the driving path and both ends of the air flow becomes turbulent and turbulent. Easy to be Therefore, foreign matter in the traveling path flows into the shelf portion in which the cassette is stored by the vortex and turbulent flow, and foreign matter adheres to the circuit portion of the glass substrate. Therefore, this causes a defect of the liquid crystal display device.

The technical problem of the present invention is to provide a cassette stalking system that prevents the airflow of the traveling path to flow into the shelf when the crane is running.

Cassette stalking system according to the present invention is formed of a plurality of shelves, the shelf portion on which the plurality of cassettes are stacked, moving along the runway between the shelf portion, and includes a crane for handling the cassette, It is preferable that both sides are provided with a blocking plate.

Moreover, it is preferable that the streamlined crane cover is provided on the said crane.

In addition, the crane is installed in a horizontal frame, a vertical frame perpendicular to the horizontal frame, a traveling portion for moving the horizontal and vertical frames along the traveling path, the vertical frame, and carry the cassette into the shelf and It is preferable to include the conveyance part to carry out.

The conveying unit preferably includes a horizontal support unit and a robot arm provided on the horizontal support unit, and a magnetic seal is provided between the drive shaft and the rotation ring of the rotation drive unit of the robot arm.

In addition, the guide roller installed on the upper portion of the crane is preferably spaced apart from the crane at a predetermined interval and is preferably not in contact with the rail passing through the inside thereof.

Moreover, it is preferable that the drive belt which connects the some drive motor which raises and lowers the conveyance part of the said crane is a dustproof belt.

In addition, it is preferable that an exhaust fan is further provided at the lower end of the vertical frame of the crane.

In addition, it is preferable that a small fan is further provided inside the vertical frame of the crane.

In addition, it is preferable that the fan filter unit is further provided on the side of the vertical frame.

In addition, it is preferable that the wind is formed in the shelf part corresponding to the edge part of the running direction of a crane among the both ends of the traveling path which the said crane runs.

Moreover, it is preferable that a wind exhaust fan is provided in the said wind velocity.

Moreover, it is preferable that an interlayer exhaust fan is provided in the interlayer area | region formed under the bottom of the clean area | region where the said shelf part and a crane are installed.

In addition, the servo box of the crane is preferably attached to both sides of the vertical frame.

Moreover, it is preferable that the capacitor box of the said crane is installed lying down in the horizontal direction.

Moreover, it is preferable that SUS is formed in the bottom face of the said cassette, and SUS is formed on the cassette contact part of the said shelf part.

In addition, the groove of the frame of the shelf is preferably covered with a cover.

In addition, it is preferable that a plurality of exhaust holes are formed in the stocker outer cover provided at both ends of the traveling path on which the crane travels.

In addition, it is preferable that a plurality of exhaust ducts are formed on the stocker outer cover provided at both ends of the traveling path on which the crane travels.

In addition, it is preferable that a plurality of exhaust dampers are provided on the stocker outer cover provided at both ends of the traveling path on which the crane travels.

In addition, the exhaust damper preferably blocks air from entering the both ends of the traveling path from the outside of the stocker.

In addition, the exhaust hole, the exhaust duct or the exhaust damper is preferably formed at the lower end of the stocker outer cover.

Then, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

A cassette stalking system according to an embodiment of the present invention will now be described in detail with reference to the drawings.

Figure 1a is a schematic perspective view of a cassette stalking system according to an embodiment of the present invention, Figure 1b is a schematic perspective view of a cassette of a cassette stalking system according to an embodiment of the present invention, Figure 1c is an embodiment of the present invention A schematic perspective view of a frame of a shelf of a cassette stalking system according to an example.

As shown in Figure 1a, the cassette stalking system according to an embodiment of the present invention is a crane 200 that moves along the runway 300 between the shelf portion 100, the shelf portion 100 consisting of a plurality of shelves. ).

In the shelf part 100, a plurality of cassettes 10 are stacked on a plurality of layers formed of a plurality of shelves. The shelf part 100 is formed of a combination of a horizontal frame 110 in a horizontal direction and a vertical frame 120 in a vertical direction.

As shown in Figure 1b, the frame of the cassette 10 is preferably formed of aluminum (Al), the bottom of the cassette 10 is polycarbonate (polycarbonate) or SUS (Steel Use Stainless, stainless steel) ( 11) prevents wear due to contact with the shelf portion 100 during conveyance of the cassette 10. In addition, since the cassette 10 formed on the bottom surface of the SUS is electrically conductive, the cassette 10 is grounded through a frame made of aluminum to prevent static electricity.

In addition, as shown in Figure 1c, by forming the SUS 113 on the cassette contact portion 112 of the shelf portion 100 on which the cassette 10 is loaded to minimize the generation of particles due to contact and wear. And, to prevent foreign substances from entering into the various types of grooves 111 formed in the frame of the shelf part 100 to be stagnant, and to facilitate the cleaning (cleaning) of the frame of the shelf part 100. The groove 111 is preferably covered with a cover 115.

The crane 200 handles the cassette 10 to bring the cassette 10 into and out of the shelf 100.

2 is a side view of the crane 200 of the cassette stalking system according to one embodiment of the invention, and FIG. 3 is a schematic perspective view of the crane.

As shown in FIG. 2 and FIG. 3, the crane 200 includes a horizontal frame 210, a vertical frame 220, a carrier 230, and a traveling part 240.

A driving unit 240 for moving the crane 200 along the driving path 300 is installed below the horizontal frame 210, and the vertical frame 220 in the form of a post is mounted on the vertical frame 220. Is installed. The driving unit 240 formed of a driving motor and wheels connected thereto allows the crane 200 to load the cassette 10 and move along the driving path 300.

Carrying unit 230 is preferably formed in the form of a robot arm so that the cassette 10 is carried in and out of the shelf portion (100). The conveyer 230 is composed of a horizontal support 231 and a robot arm 232 provided on the horizontal support 231.

The horizontal support part 231 supports the robot arm 232 and serves to raise and lower the robot arm 232. The robot arm 232 of the transfer unit 230 is in contact with the bottom surface of the cassette 10 serves to carry out and carry in the cassette 10 from the shelf (100).

4, the rotary drive part of the traveling part and the conveyance part of a crane are enlarged.

As shown in FIG. 4, the rotation driving unit 233 of the conveying unit is a driving shaft 2331, a bearing 2322 provided around the driving shaft 2331, and rotation for smoothly rotating the driving shaft 2331. Ring 2333. At this time, in order to reduce the occurrence of foreign matter due to friction in the rotary drive unit 233 of the crane 200, a magnetic seal (Ferro Seal) 2334 is provided to the bonding portion of the drive shaft (2331) and the rotary ring (2333). It is preferable. That is, when the magnetic seal 2334 is attached to the rotation drive unit 243 of the traveling unit 240 and the rotation drive unit 233 of the transport unit 230, foreign matters generated by the rotation drive units 233 and 243 are transferred to the outside. Outflow is blocked and filtered.

In addition, the bearing 2332 provided on the rotation driving unit 233 of the conveying unit 230 may use a bearing containing cleaning grease, and foreign matter generated in the conveying unit 230 may be It is preferable to discharge after filtering by using a separate fan filter unit 234, and to control the differential pressure.

In addition, a guide roller 250 is installed above the crane 200. The guide roller 250 is a rail (20) installed in the upper spaced apart from the crane 200 by a predetermined interval penetrates the inside thereof. This serves to guide the crane 200 to move to a predetermined position without leaving the traveling position when the crane 200 travels along the rail 20.

The guide roller 250 is provided so as not to contact the rail 20. This prevents the generation of foreign matter by the contact of the rail 20 and the guide roller 250 by making contact only in an emergency.

In addition, the driving belt 224 connecting the plurality of driving motors for raising and lowering the conveying unit 230 of the crane 200 prevents the generation of foreign matter by applying the anti-vibration belt.

In addition, the exhaust fan (Fan) 23 installed at the lower end of the vertical frame 220 of the crane 200 maintains the pressure inside the vertical frame 220 to be negative to allow foreign matter to enter the vertical frame 220. To prevent ingress.

Then, the exhaust groove 221 is formed in the vertical frame 220 under the guide roller 250, and the small fan 222 is installed in the vertical frame so that the guide roller 250 and the rail 20 come into contact with each other. If it occurs, the foreign matter is sucked into the inside of the vertical frame 220, and the foreign matter is discharged again through the exhaust fan 223.

In this case, foreign matters generated at a height of 6 m or more are not suitable to be sucked and discharged into the small fan 222 and the exhaust fan 223, and thus a fan filter unit (FFU) 225 on the side of the vertical frame 220. It is preferable to install additionally.

And it is preferable to provide the cover 241 in the rotation drive part 243 so that the foreign material which arose in the rotation drive part 243 of the running part 240 may not scatter.

By manufacturing the crane 200 as described above to prevent the foreign substances generated in the crane 200 is leaked to the outside.

On the other hand, FIG. 7A shows an overall plan view of the cassette stalking system, FIG. 7B shows a front view of the cassette stalking system, and FIG. 8 shows an overall cross sectional view of the cassette stalking system.

1 and 8, the shelf part 100 and the crane 200 of the cassette stalking system are installed in the clean area 1000, and the clean area 1000 has an upper ceiling 1001 and a lower part. Is defined by the bottom 1002. An interlayer area 2000 is formed below the bottom 1002 of the clean area 1000. In addition, the ceiling 1001 and the bottom 1002 of the clean area 1000 are formed of a plurality of gratings to allow the vertical downward airflow to pass therethrough.

In the cassette stalking system consisting of the shelf part 100 and the crane 200, when the crane 200 travels along the traveling path 300, a knitting flow occurs and the shelves are installed on the left and right sides of the crane 200. Vortex or turbulence flows into the part 100.

That is, at the moment when the crane 200 moves along the travel path 300, the knitting machine flows into the shelf part 100, and immediately after the crane 200 passes, the knitting machine flows vertically downward.

The amount of inflow into the shelf portion 100 of the knitting machine is further increased when the crane 200 runs in a state in which the cassette 10 is loaded, when driving at a high speed, during lifting and lowering operations, and when the first floor shelf is a shelf. Increases.

In order to prevent the inflow of the knitting unit into the shelf part 100, as shown in Figure 1, it is preferable to install the blocking plate 500 on both sides of the crane (200). The blocking plate 500 minimizes the inflow of foreign matters into the shelf part 100 by the air flow by preventing the knitting flow generated by the running of the crane 200 into the shelf part 100.

As shown in FIG. 7A and FIG. 7B, the shelf portion 100 corresponding to the end portion 310 of the traveling direction of the crane 200 among the both ends of the traveling path 300 on which the crane 200 travels has an air velocity ( 190 is formed. The wind degree 190 is an outflow path of gas for releasing the gas pushed by the crane 200 to the outside. Since the turbulence or vortex is generated a lot in the air flow 190, the inclination angle of the downdraft flowing from the ceiling 1001 of the clean region 1000 to the floor 1002 is large, and foreign matter is introduced into the shelf 100. Therefore, in order to prevent this, the open rate of the lattice through which air flow passes in the air flow 190 is preferably formed to be larger than other positions.

Therefore, a large amount of gas is discharged to the outside through the wind degree 190 to reduce the occurrence of turbulence or vortex. Therefore, since the inclination angle of the downdraft becomes small and becomes a vertical downdraft, the probability that foreign matters flow into the shelf 100 is reduced.

In addition, as shown in FIGS. 7A and 7B, by installing the air exhaust fans 150 in the left and right air winds 190, the turbulence caused by the compressed air flow generated in the air winds 190 by the running of the crane 200. Or quickly remove the vortex to prevent foreign matter from entering the shelf (100). In addition, the air duct fan 150 prevents the backflow of the compressed air flow generated when the crane 200 reciprocates both ends of the traveling path 300.

8, a plurality of ceiling fan filter units (FFUs) 1002 are formed in the ceiling 1001 of the cassette stalking system to form a vertical downdraft to prevent foreign matter from scattering in the clean area 1000. Is installed. Such a ceiling fan filter unit 1002 is installed in all regions of the ceiling 1001 to remove the stagnant region of the air flow for each part. That is, it is preferable that the installation rate of the ceiling fan filter unit 1002 is 100%.

As shown in FIG. 8, the main stream flowing from the ceiling 1001 of the clean region 1000 to the floor 1002 by providing the interlayer exhaust fans 2002 and 2003 at the lower end 2001 of the interlayer region 2000. By pre-circulating the air flow, a vertical downdraft is smoothly formed.

5 and 6 show sectional views of the crane seen from the wind side and the sectional views of the crane seen from the back side, respectively.

As illustrated in FIGS. 5 and 6, the servo box 260 of the crane 200 is separated and miniaturized to be installed close to both sides of the vertical frame 220. Then, the capacitor box 280 is laid down in the horizontal direction to reduce the front cross-sectional area of the crane 200. Thus, by reducing the front cross-sectional area of the crane 200, the amount of compressed airflow can be made small, and therefore the amount of turbulence or vortex can be made small.

And, as shown in Figure 3, by forming a streamlined crane cover 600 to protect the inside of the vertical frame of the crane 200 from the outside has the advantage of preventing the flow of air flow due to friction when running the crane.

In addition, a particle count probe may be installed in the vicinity of the driving path 300 of the crane 200 and an upper part of the ceiling to monitor the generation of foreign substances continuously.

On the other hand, both ends of the stocker runway 300 is sealed by the stocker outer cover 5000, so that when the crane 200 moves in both ends, the exhaust of the turbulent air is temporarily blocked, and the airflow flows into the cassette of the adjacent shelf. This will affect the cleanliness of the substrate.

In order to prevent this, in one embodiment of the present invention, a plurality of exhaust holes are formed in the stocker outer cover 5000 provided at both ends of the stocker traveling path 300.

FIG. 9 shows a state in which a plurality of exhaust holes are formed in the stocker outer cover provided at both ends of the stocker travel path.

As shown in FIG. 9, a plurality of exhaust holes 5500 are formed at the lower end of the stocker outer cover 5000. In this case, the plurality of exhaust holes 5500 naturally formed in the stocker outer cover 5000 without the air flow driven by the crane 200 traveling along the traveling path 300 not flowing into the adjacent shelf 100. Exhaust through the stocker.

In this case, the plurality of exhaust holes 5500 may be formed at the lower end of the stocker outer cover 5000. If a plurality of exhaust holes (5500) are formed in all areas of the stocker outer cover (5000), turbulence is complicated, and the discharged air flows again through the upper exhaust hole to easily enter the adjacent shelves. Therefore, in order to prevent this, the plurality of exhaust holes may be formed at the lower end of the stocker outer cover 5000.

10 illustrates a state in which a plurality of exhaust ducts are formed on the stocker outer cover provided at both ends of the stocker traveling path, and FIG. 11 includes a plurality of exhaust dampers at the stocker outer cover provided at both ends of the stocker traveling path. The formed state is shown.

As shown in FIG. 10, the plurality of exhaust ducts 5600 extending in the horizontal direction have the same role as the plurality of exhaust holes 5500 of FIG. 9, and are formed at the lower end of the stocker outer cover 5000. It is preferable.

As illustrated in FIG. 11, the plurality of exhaust dampers 5700 provided in the stocker outer cover 5000 may have air flow driven by the crane 200 traveling along the traveling path 300. The gas is naturally exhausted to the outside of the stocker without being introduced into the adjacent shelf 100, and at the same time, the air is prevented from entering the both ends of the driving path 300 from the outside of the stocker.

The exhaust damper 5700 is preferably formed at the lower end of the stocker outer cover 5000.

Although the preferred embodiments of the present invention have been described in detail above, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Accordingly, the scope of the present invention is not limited thereto, and various modifications and improvements of those skilled in the art using the basic concept of the present invention as defined in the following claims also fall within the scope of the present invention.

The cassette stalking system according to the present invention prevents the spread of airflow by running the crane by installing blocking plates on both sides of the crane.

In addition, the installation of the air exhaust fan prevents backflow of the compressed air flow generated when the crane reciprocates both ends of the travel path.

In addition, by installing a crane cover on the crane to minimize the contact resistance with the airflow when running the crane.

In addition, the cassette is formed by manufacturing SUS and Al, thereby eliminating the source of foreign matter.

In addition, by installing a plurality of exhaust holes, exhaust ducts or exhaust dampers in the outer cover of the stocker, the air flow driven by the crane traveling along the driving path is naturally exhausted to the outside of the stocker without entering the adjacent shelf and at the same time. To prevent air from entering both ends of the road.

Therefore, the defect of the liquid crystal display device resulting from a foreign material is improved.

Claims (22)

Is formed of a plurality of shelves, a shelf portion in which a plurality of cassettes are stacked, A crane moving along the traveling path between the shelves and handling the cassette Including, Cassette stalking system is provided with blocking plates on both sides of the crane. In claim 1, Cassette stalking system is installed on the front or rear of the crane is a streamlined crane cover. In claim 1, The crane is a horizontal frame, A vertical frame perpendicular to the horizontal frame, A driving unit for moving the horizontal and vertical frames along the driving paths; A conveying unit which is provided in the vertical frame and which carries the cassette in and out of the shelf unit; Cassette stalking system comprising a. In claim 3, The conveying part is a horizontal support part, Robot arm installed on the horizontal support Including, Cassette stalking system is provided between the drive shaft and the rotary ring of the rotary drive of the robot arm is a magnetic seal. In claim 1, And a guide roller installed at an upper portion of the crane is spaced apart from the crane at a predetermined interval so that the guide roller is not in contact with the rail passing through the inside thereof. In claim 3, And a drive belt connecting a plurality of drive motors for raising and lowering the conveying part of the crane is a dustproof belt. In claim 3, Cassette stalking system further comprises an exhaust fan at the lower end of the vertical frame of the crane. In claim 3, Cassette stalking system further comprises a small fan is installed inside the vertical frame of the crane. In claim 3, Cassette stalking system further comprises a fan filter unit on the side of the vertical frame. In claim 3, Cassette stalking system, the wind is formed in the shelf portion corresponding to the end of the running direction of the crane of the both ends of the traveling path that the crane is running. In claim 3, Cassette stalking system is provided with a wind exhaust fan in the air flow. In claim 3, An interlayer exhaust fan is provided in the interlayer region formed below the bottom of the clean region where the shelf and the crane are installed. In claim 3, Servo box of the crane is a cassette stalking system is attached to both sides of the vertical frame. In claim 3, The capacitor box of the crane is a cassette stalking system is installed long in the horizontal direction. In claim 1, Cassette stalking system is formed on the bottom surface of the cassette SUS. In claim 1, Cassette stalking system SUS is formed on the cassette contact portion of the shelf portion. In claim 1, And a groove of the frame of the shelf part is covered with a cover. In claim 10, A cassette stalking system, in which a plurality of exhaust holes are formed in a stocker outer cover provided at both ends of a traveling path on which the crane travels. In claim 10, And a plurality of exhaust ducts are formed in a stocker outer cover provided at both ends of a traveling path on which the crane travels. In claim 10, And a plurality of exhaust dampers are provided on the stocker outer cover provided at both ends of the traveling route on which the crane travels. In claim 10, The exhaust damper is a cassette stalking system for blocking the flow of air from the outside of the stocker to both ends of the traveling path. The method of claim 18, 19 or 20, And said exhaust hole, exhaust duct or exhaust damper is formed at the bottom of said stocker outer cover.

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