CN101734484A - Substrate conveyer - Google Patents
Substrate conveyer Download PDFInfo
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- CN101734484A CN101734484A CN 200910225826 CN200910225826A CN101734484A CN 101734484 A CN101734484 A CN 101734484A CN 200910225826 CN200910225826 CN 200910225826 CN 200910225826 A CN200910225826 A CN 200910225826A CN 101734484 A CN101734484 A CN 101734484A
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Abstract
The invention provides a substrate conveyer, comprising: a grasping and transmitting unit for grasping and arranging at least one area of the substrates parallel to the ground and transmitting the substrates by force application, and an auxiliary transmitting unit adjacent to the grasping and transmitting unit for supporting the transmission of the substrates. Therefore, the structure having more efficiency than the conventional structure is formed, the conveyer can transmit the substrates at high speed, meanwhile, the noise and the particles can be reduced.
Description
The related application cross-reference
The application's case is advocated korean patent application case 10-2008-0116865 number of filing an application in Korea S Department of Intellectual Property based on November 24th, 2008 and korean patent application case 10-2008-0116866 number of filing an application on November 24th, 2008 and the rights and interests of the korean patent application case of filing an application on June 23rd, 2009 10-2009-0055859 number, and whole disclosures of described korean patent application case are incorporated herein with way of reference.
Technical field
The present invention relates to a kind of substrate-transferring, in particular to a kind of can reduce noise and dust granules, compare substrate-transferring more advanced, that can transmit substrate at a high speed with conventional confguration.
Background technology
Generally speaking, substrate comprises: flat-panel monitor (flat panel display; FPD) substrate, for example plasma display (plasma display panel; PDP), Liquid Crystal Display (LCD) (liquid crystal display; LCD), Organic Light Emitting Diode (organic light emitting diode; OLED) substrate or similar substrate; And semiconductor wafer/light shield glass etc.
The substrate and the semiconductor wafer of flat-panel monitor are different at aspects such as material, usages, but very similar on series of processes, for example, exposure, development, etching, peel off, rinsing, cleaning etc.These operations are carried out successively to make substrate.Below, will the substrate of the Liquid Crystal Display (LCD) that is used for flat-panel monitor be described typically by way of example.
The substrate that is used for Liquid Crystal Display (LCD) passes through thin film transistor operation (thin film transistor usually; TFT), liquid crystal cell operation and module operation, substrate is as product turnout in the module operation.
Thin film transistor operation and semi-conductive Fabrication procedure are very similar, and in thin film transistor technology, thin film transistor is arranged on the glass substrate by repeated deposition, photoetching and etching.
In the liquid crystal cell operation: form alignment film with the TFT lower plate that helps to make in the thin film transistor operation with as the liquid crystal alignment between the upper plate of colour filter; Insert liner; And the printing sealing is to engage upper and lower plates.
In the module operation, Polarizer is fixed and will be driven integrated chip (integrated-chip; IC) be installed on the complete panel of LCD, on this panel, assemble printed circuit board (PCB) (printed circuit board; PCB), at its back side back light unit and Connection Element are set.
For carrying out these operations and sub-operation thereof successively, on the conveyor line between these operations, substrate-transferring is set, so that receive substrate and it is passed to subsequent processing from preceding working procedure.For example, in the module operation, carry out Polarizer attaching operation and separate with Polarizer with the protective film of protecting Polarizer, and it is attached on the substrate will be attached to Polarizer.In the polarized panel plastering device of carrying out Polarizer attaching operation, need to transmit the device of substrate.
Widely used substrate-transferring is a kind of horizontal transmission device mostly, horizontal positioned and transmit substrate on this device.As representative type horizontal transmission device, known have conveyer belt type conveyer and a drum-type conveyer.
In substrate-transferring, often the drum-type conveyer that uses comprises contact conveyer and contactless conveyer.In the contact conveyer, the combination of electrical motor and finishing bevel gear cuter or like is used for driving the rotating shaft rotation that is connected in cylinder; In the contactless conveyer, drive the S. A. rotation that is connected in cylinder with the magnetic force of magnet.The contactless conveyer of the latter is compared with the former contact conveyer, has the advantage that produces less noise and particulate.
Yet in the traditional contactless conveyer that utilizes magnet (being maglev type), the productive costs of conveyer increases because of magnet is expensive.Although utilize expensive magnet to adopt the magnetic suspension transfer approach, still be difficult to require the next substrate that transmits at a high speed according to operation.In addition, if rotating shaft since the carrying substrate and sagging, in the substrate transport process, the front end of substrate may bump with the cylinder of adjacency rotating shaft, so substrate may be impaired.
For example, have the various device that length/width is about 3 meters the tenth generation substrate and will introduce the working space if consider to make, just transmit the device of large-sized substrate like this to relevant device, the rotating shaft of cylinder or support substrates may be sagging because of the weight of substrate.When rotating shaft was sagging, in the substrate transport process, the front end of substrate and the cylinder of last rotating shaft can bump, thereby make substrate impaired.In sum, must research stop rotating shaft with the sagging problem of substrate that transmits at a high speed.
Simultaneously, opposite with aforesaid horizontal transmission device, in vertical conveyer, substrate is vertically holded up (in fact, oblique with about 65 to 75 degree angle lappings) and is transmitted.
In vertical conveyer,,,, can reduce area occupied to being located at the device of finite space in the clean room owing to hold up transmission although the area size of substrate is identical with the tenth generation substrate basically.In addition, under the situation about transmitting in that substrate is vertically holded up, all can process in the substrate both sides of holding up, therefore work efficiency improves.Especially the Polarizer of Polarizer attached to the substrate both sides attached in the operation, this vertical conveyer is expected to obtain utilizing more efficiently.Therefore, need more study for vertical conveyer.
Simultaneously, in this special case of electromagnetic levitation type conveyer in level or vertical conveyer, be to solve foregoing problems, promptly transmit substrate at a high speed, propose a kind of substrate is suspended into by the air suspension module and determined the substrate-transferring that transmits behind the height.
The conveyer that is proposed is provided with the air suspension module of a plurality of transmission substrates, and the surface of air suspension module is formed with a plurality of coats that are used for the air jet hole of injection air and are used to prevent surface scratch in the conveyer that proposes.Coat is formed with a plurality of intercommunicating pores, and each intercommunicating pore all has the size identical with air jet hole and is communicated with air jet hole by mode one to one.So the air that is supplied in the air suspension module is expelled to the air jet hole that is formed at air suspension module surface, and then by the intercommunicating pore that is formed on the coat air is outwards sprayed,, substrate determines height so that being suspended in.
Yet in this substrate-transferring, electrical motor needs bigger rating horsepower to use the air that sprays by the air jet hole with said structure substrate that suspends.Substrate is big more, and the rating horsepower that electrical motor needs is also big more.So, if electrical motor has the air that big rating horsepower sprays the suspension substrate, can cause a lot of complicated problems.As a result, be difficult to the actual electrical motor that utilizes big rating horsepower.On the other hand, if the rating horsepower of electrical motor is not enough to the substrate that suspends, just substrate can not be suspended in desired height.Therefore, need a kind of more efficiently, compare with conventional motors and not increase the substrate of electrical motor rating horsepower suspension structure.
Summary of the invention
One aspect of the present invention aims to provide a kind of substrate-transferring, and this device can reduce noise and particulate, has the structure than the conventional confguration improvement, and transmits substrate at a high speed.
Another aspect of the present invention aims to provide a kind of substrate-transferring, and this device can reduce the area occupied to device, reduces noise and particulate, has high efficiency structure and transmits substrate at a high speed.
One side more of the present invention aims to provide a kind of substrate-transferring, and this device has convenient and simple structure, need not just can strengthen than the remarkable increase electrical motor of conventional confguration rating horsepower the efficient of suspension substrate, and transmits substrate at a high speed.
According to an aspect of the present invention, provide a kind of substrate-transferring, this device comprises: at least a portion zone and the application of force that grasping and delivery unit, grasping are parallel to the substrate of placing on ground transmit substrate; And auxiliary delivery unit, contiguous grasping and delivery unit are also supported the transmission of substrate.
According to a further aspect in the invention, provide a kind of substrate-transferring, this device comprises: grasping and delivery unit, and grasping transmits substrate perpendicular at least a portion zone and the application of force of the substrate that place on ground; And auxiliary delivery unit, contiguous grasping and delivery unit are also supported the transmission of substrate.
In accordance with a further aspect of the present invention, provide a kind of substrate-transferring, this device comprises: the air suspension module, wherein be included in a plurality of air jet holes that its surface forms, and be used for spraying the air of substrate suspension usefulness; And substrate protective layer; the surface that is arranged on the air suspension module is with the protection substrate; this substrate protective layer comprises the expanded hole that is communicated with the air jet hole of air suspension module, and expand to greater than air jet hole in this hole, to increase the blast injection area of blowing perforation towards substrate.
Description of drawings
According to following detailed description, in conjunction with the accompanying drawings, will more be expressly understood exemplary embodiment of the present invention, wherein:
Fig. 1 is the transparent view according to the substrate-transferring of first exemplary embodiment of the present invention;
Fig. 2 is the planar view of Fig. 1;
Fig. 3 is the partial, exploded perspective view of grasping and delivery unit;
Fig. 4 is the generalized section of grasping and delivery unit;
Fig. 5 and Fig. 6 are the section-drawing of Fig. 1, represent the operation of grasping and delivery unit separately;
(a) to (c) schematically operation of substrate-transferring in the presentation graphs 1 among Fig. 7;
Fig. 8 is the generalized section according to grasping in the substrate-transferring of second exemplary embodiment of the present invention and delivery unit;
Fig. 9 is the section-drawing of serviceability in the presentation graphs 8;
Figure 10 is the enlarged drawing of pith among Fig. 9;
Figure 11 is the planar view according to the substrate-transferring of the 3rd exemplary embodiment of the present invention;
Figure 12 is the fragmentary, perspective view according to grasping in the substrate-transferring of the 4th exemplary embodiment of the present invention and delivery unit;
Figure 13 is the decomposition diagram of Figure 12;
Figure 14 is the schematic side view according to the substrate-transferring of the 5th exemplary embodiment of the present invention;
Figure 15 is the lateral plan according to the substrate-transferring of the 6th exemplary embodiment of the present invention;
Figure 16 is the perspective diagram according to the substrate-transferring of the 7th exemplary embodiment of the present invention;
Figure 17 is the section-drawing along the line A-A among Figure 16;
Figure 18 is the perspective diagram according to the substrate-transferring of the 8th exemplary embodiment of the present invention;
Figure 19 is the section-drawing along the line B-B among Figure 18;
Figure 20 is the partial plan layout according to the substrate-transferring of the 9th exemplary embodiment of the present invention; And
Figure 21 is the transparent view according to the substrate-transferring of the tenth exemplary embodiment of the present invention.
The main element description of symbols
1: vertical conveyer 1a: substrate-transferring
100: grasping and delivery unit 100a: grasping and delivery unit
100b: grasping and delivery unit 100c: grasping and delivery unit
110: unit main body 110a: unit main body
110b: assembly unit 110c: unit main body
111: air flow spaces 112: the vacuum slit
113: air draft passage 114: platform
115: track 120: application of force belt conveyor
120c: application of force belt conveyor 121: vacuum hole
125: rail block 126: side sucks the unit
131: driving pulley 132: negative pulley wheel
133: driving motor 140: on/following driver element
151: vacuum cup 151a: safety is born alar part
152: intercommunicating pore 152a: intercommunicating pore
153: ventilation line 154: boiler check valve
154a: axle unit 154b: unit, termination
154c: opened/closed unit, hole 154d: elastic component
155: anti-scatter backplate 200: auxiliary delivery unit
210: air suspension module 211: through hole
220: apparatus body 221: outside frame
300: dropproof unit 310: the contact support roller
320: rolling wheel support 330: actr
400: tilting unit 410: the power cylinder body
420: piston rod 510: the air suspension module
511: roof 520: the air suspension module
521: roof 530: the air suspension module
540: air injection modules 550: the substrate protective layer
551: expanded hole 560: the substrate protective layer
561: expanded hole 570: the substrate protective layer
571: unit expanded hole 580: the substrate protective layer
581: expanded hole A-A: line
B-B: line H: air jet hole
H1: upper end height H 2: surface elevation
Z1: section Z2: section
Z3: section
The specific embodiment
For understanding the present invention and advantage thereof more fully, with reference to the accompanying drawing that is used for the casehistory embodiments of the invention.
Followingly explain embodiments of the invention, describe the present invention in detail with reference to accompanying drawing.Identical Reference numeral is represented identical parts among the figure.
Fig. 1 is the transparent view according to the substrate-transferring of first exemplary embodiment of the present invention; Fig. 2 is the planar view of Fig. 1; Fig. 3 is the partial, exploded perspective view of grasping and delivery unit; Fig. 4 is the generalized section of grasping and delivery unit; Fig. 5 and Fig. 6 are the section-drawing of Fig. 1, represent the operation of grasping and delivery unit respectively; (a) schematically illustrates the operation of the substrate-transferring among Fig. 1 among Fig. 7 to (c).
As shown in FIG., the substrate-transferring in the present embodiment is the horizontal transmission device.This substrate-transferring comprises: at least one zone and the application of force that grasping and delivery unit 100, grasping horizontal positioned promptly are parallel to ground-surface substrate transmit substrate; And auxiliary delivery unit 200, contiguous grasping and delivery unit 100 and arrange are supported the transmission of substrate.
At first, the auxiliary delivery unit 200 in the present embodiment is arranged to contactless auxiliary delivery unit, and this contactless auxiliary delivery unit utilizes a plurality of air suspension module 210 that substrate is suspended in predetermined altitude.
As depicted in figs. 1 and 2, a plurality of air suspension modules 210 are arranged parallel to each other on apparatus body 220, and are spaced apart of each other at a certain distance, and are suspended in predetermined altitude with the substrate with carrying on it.
For this reason, air suspension module 210 is formed with a plurality of through holes 211 on its surface.When installing main body 220 air supplied certainly when discharging by a plurality of through holes 211, substrate can be suspended in predetermined altitude.With reference to accompanying drawing, on apparatus body 220, be provided with six air suspension modules 210, but be not limited thereto.The quantity of air suspension module in other words, 210 also can be different.In addition, the spacing distance between the air suspension module 210 also can be inconsistent.
In institute's favored area in the zone between air suspension module 210 grasping and delivery unit 100 are set.In the present embodiment, in the centre and the air suspension module 210 of air suspension module 210 grasping and delivery unit 100 are set abreast, but are not limited thereto.
Grasping and delivery unit 100 also are used to transmit substrate in fact with the substrate direct contact that is suspended in predetermined altitude by air suspension module 210.Grasping and delivery unit 100 are included in unit main body 110 and the application of force belt conveyor 120 that inside is formed with air flow spaces 111.
Unit main body 110 is fixed on the relevant position, and application of force belt conveyor 120 contacts substrate in fact and transmits substrate.Application of force belt conveyor 120 is connected into and can moves with respect to unit main body 100 along the substrate direction of transfer on the unit main body 100 with unit main body 100.
In addition, application of force belt conveyor 120 is formed with a plurality of vacuum holes 121 on its surface, and vacuum hole 121 is communicated with to hold substrate with vacuum with the air flow spaces 111 of main body 100.A plurality of vacuum holes 121 are arranged with fixed interval along the length direction of application of force belt conveyor 120, but are not limited thereto.Perhaps, a plurality of vacuum holes 121 also can unfixedly be spaced.
The operation of vacuum hole 121 is such, grasping and delivery unit 100 move on the palpus in transfer operation, so that place the surface of the application of force belt conveyor 120 of grasping and delivery unit 110 at a height, this highly is equal to or less than the height of air suspension module 210, and the surface of this application of force belt conveyor 120 can contact and hold with vacuum the bottom surface that is suspended in the substrate of predetermined altitude from air suspension module 210.
For this reason, also be provided with one be connected to and drive grasping and delivery unit 100 move up and down on/following driver element 140.Promptly, when 100 beginnings of grasping and delivery unit when as shown in Figure 5 dormant state transmits substrate, on/following driver element 140 drives on grasping and the delivery unit 100 and moves on to the air suspension module 210 that is higher than as shown in Figure 6, so that permission application of force belt conveyor 120 holds substrate and support substrates.Herein, can be with power cylinder body, linear motor or allied equipment as last/following actuator 140.
Application of force belt conveyor 120 have as the such closed loop shape of belt conveyor.As shown in Figure 7, grasping and delivery unit 100 comprise: driving pulley 131 is located at an inboard of application of force belt conveyor 120; Negative pulley wheel 132 is located at another inboard of application of force belt conveyor 120; And driving motor 133, be connected in driving pulley 131 and drive 120 rotations of application of force belt conveyor, but the application of force transmits substrate when 120 rotations of application of force belt conveyor.
Unit main body 110 is formed with a plurality of vacuum slits 112 at its end face, be formed on application of force belt conveyor 120 on a plurality of vacuum holes 121 be communicated with.Vacuum slit 112 is formed in the platform 114 of the end face depression of unit main body 110.In addition, air draft passage 113 is formed on the below of the unit main body 110 relative with vacuum slit 112.
In the present embodiment, as shown in Figure 3, the air flow spaces 111 in unit main body 110 is divided into section Z1, Z2, the Z3... of a plurality of vacuum pumpings separately.Each vacuum slit 112 is formed on the end face of unit main body 110, and is corresponding one by one with section Z1, Z2, Z3... respectively.
Therefore, air flow spaces 111 in unit main body 110 comprises and a plurality ofly is divided into respectively one by one under the situation corresponding to section Z1, Z2, Z3... by section Z1, the Z2 of vacuum pumping respectively, Z3 and vacuum slit 112, although in one of them of section Z1, Z2, Z3... vacuum leak can take place, but can provide vacuum by other sections Z1, Z2, Z3..., to prevent the vacuum hold release between application of force belt conveyor 120 and the substrate and to prevent that substrate from transmitting failure.
Yet scope of the present invention is not limited to the above.Opposite with Fig. 3, vacuum slit 112 also can be formed on the end face of unit main body 110 continuously along the length direction of application of force belt conveyor 120.Air flow spaces 111 in the main body 110 also can not be divided into a plurality of section Z1, Z2, Z3 that will distinguish vacuum pumping.
Therefore, during the vacuum pump in being located at apparatus body 220 (not shown) work, form vacuum from the outside of vacuum hole 121 towards the air draft passage 113 in air flow spaces 111 and the unit main body 110 by vacuum hole shown in Fig. 4 arrow 121 and vacuum slit 112, hold substrate with vacuum with surface at application of force belt conveyor 120.Actual tests result shows that the vacuum hold power of application of force belt conveyor 120 is very strong, to such an extent as to but complete at high speed transmits substrate, even substrate is to have length/width to be about 3 meters the tenth generation substrate.
The operation of the substrate-transferring that utilizes this configuration is described with reference to Fig. 7.
At first, when the substrate that will be transmitted offers substrate-transferring in the present embodiment, discharge by a plurality of through holes 211 that form on air suspension module 210 surfaces simultaneously from the air that device main body 220 provides, so that substrate can be suspended in the predetermined altitude shown in (a) among Fig. 7.
When substrate suspended, grasping and delivery unit 100 were operated.Promptly, be in the grasping and the delivery unit 100 of dormant state, its end face is arranged on the height that is equal to or less than air suspension module shown in Figure 5 210 height, move the air suspension module 210 that is higher than as shown in Figure 6 in the operation by last/following actuator 140, to allow application of force belt conveyor 120 touch the bottom surface of substrate.
Then, during the vacuum pump in being located at apparatus body 220 (not shown) work, form vacuum from the outside of vacuum hole 121 towards the air draft passage 113 in air flow spaces 111 and the unit main body 110 by vacuum hole shown in Fig. 4 arrow 121 and vacuum slit 112, hold substrate with vacuum with surface at application of force belt conveyor 120 (referring to Fig. 7 (b)).
After application of force belt conveyor 120 usefulness vacuum hold substrate, driving motor 133 drives application of force belt conveyor 120, rotate with closed loop around driving pulley 131 and negative pulley wheel 132, can transmit the substrate that is suspended to predetermined altitude by air suspension module 210 by the application of force belt conveyor 120 shown in (c) among Fig. 7.
So in the present embodiment, available easy configuration is made substrate-transferring, this easy configuration comprises air suspension module 210 and grasping and delivery unit 100, need not traditional expensive components (for example magnet or like), can reduce production costs thus.
At first, the application of force belt conveyor 120 of grasping and delivery unit 100 will by the substrate that air suspension module 210 suspends firmly catch and by and transmit, the speed that transmits substrate can reduce noise and particulate simultaneously faster than conventional speed.Therefore, can transmit substrate at a high speed.Equally, when at a high speed transmitting substrate, the speeding up of each operation of substrate, thus can improve output and capacity rating.
In addition, in the present embodiment, substrate transmits when being suspended by air suspension module 210.So, can prevent that substrate is impaired owing to colliding with cylinder (not shown) or rotating shaft (not shown) in transport process.
Fig. 8 is the generalized section according to grasping in the substrate-transferring of second exemplary embodiment of the present invention and delivery unit; Fig. 9 is the section-drawing of serviceability in the displayed map 8; Figure 10 is the enlarged drawing of pith among Fig. 9.
In the present embodiment, grasping and delivery unit 100 among grasping and delivery unit 100a and the above embodiment have identical functions, but have different configurations.
At first, unit main body 110a has different shapes.Certainly, the shape of unit main body 110a is not limited to scope of the present invention, provides convenience but will can be the assembling substrate-transferring, because this shape is easily by extruding or similar approach manufacturing and have the assembly unit 110b that can assemble at its side and another equipment.
Among grasping in the present embodiment and the delivery unit 100a, the surface of application of force belt conveyor 120 also is provided with vacuum cup 151, and this sucker contacts the also bottom surface of support substrates in fact, protects substrate not to be subjected to cut simultaneously.
As shown in the figure, vacuum cup 151 is provided with the surface that is connected in application of force belt conveyor 120 separably.Perhaps, the mode that also can be used on application of force belt conveyor 120 surface coating films is provided with vacuum cup 151.Under any circumstance, the surface of application of force belt conveyor 120 must comprise intercommunicating pore 152 to be communicated with a plurality of vacuum holes 121 that form at application of force belt conveyor 120, the described ventilation line 153 in intercommunicating pore 152, vacuum hole 121 and back so that air can be flowed through, thus hold substrate with vacuum.
Simultaneously, for making the vacuum efficiency maximization of grasping and delivery unit 100a, in other words, for solving the vacuum leak that caused by vacuum pumping owing to unnecessary zone or the problem of loss, also be provided with boiler check valve 154 among grasping in the present embodiment and the delivery unit 100a, with grasping that is provided with along the operation line and delivery unit 100a only one with definite zone that substrate essence contacts and supports on vacuum pumping.
Therefore, do not contact the state on vacuum cup 151 surfaces as shown in Figure 8 from substrate, if substrate contacts with the surface of vacuum cup 151, and by its support, and substrate is pushed unit, the termination 154b that is arranged on the boiler check valve 154 in Fig. 9 and the vacuum cup shown in Figure 10 151, unit, termination 154b, axle unit 154a and opened/closed unit, hole 154c make intercommunicating pore 152 can open determining section because the weight of substrate moves down so, to form the air flows shown in the arrow among Fig. 9.Therefore, the substrate vacuum available holds on the surface of vacuum cup 151.In this case, elastic component 154d enters compressive state.
On the other hand, if the surface isolation of substrate and vacuum cup 151 as shown in Figure 8, elastic component 154d discharges from compressive state so, so that unit, termination 154b, axle unit 154a and opened/closed unit, hole 154c return its initial position, utilize the determining section in 154c closed communicating hole, opened/closed unit, hole 152 thus, so windstream is hindered.
Have the boiler check valve 154 of this configuration and, only when substrate essence contact vacuum cup 151, produce vacuum, thereby address the above problem effectively by application, such as because unnecessary vacuum and the vacuum leak of formation causes loss the operation of vacuum cup 151.
In the present embodiment, vacuum cup 151 is by ultra-high molecular weight polyethylene (ultra high molecular weightpolyethylene; UHMW-PE) make, boiler check valve 154 is made by PEEK, but is not limited thereto.Perhaps, vacuum cup 151 also can be by containing viton or similar material is made.
In addition, grasping in the present embodiment and delivery unit 100a comprise the anti-scatter backplate 155 that is arranged in the unit main body 110a, this anti-scatter backplate 155 is sandwiched in application of force belt conveyor 120 wherein in the mode of the relative upper area of covering application of force belt conveyor 120, stops the particulate scattering that can produce when transmitting substrate.
With regard to anti-scatter backplate 155, the upper end height H 1 of anti-scatter backplate 155 must be lower than the surface elevation H2 of vacuum cup 151, so that avoid the bottom surface of anti-scatter backplate 155 contact substrates.If there is not the vacuum cup 151 in first exemplary embodiment, then the upper end height H 1 of anti-scatter backplate 155 must be lower than the surface of application of force belt conveyor 120.
Among the grasping of present embodiment and the delivery unit 100a, establish filter (not shown) in addition in a zone of ventilation line 153.By this kind mode, if the zone in ventilation line 153 provides filter, the environment that not only can help the cleaning place, during the air that also can help sucking by grasping and delivery unit 100a, will in air suspension module 210, utilize again in circulation, the foreign matter in the deaeration.Can be for reference be blowing engine to be set so that aspirated air in the back of ventilation line 153.The inlet that filter is connected in separably blowing engine promptly is enough to meet requirements.
Figure 11 is the planar view according to the substrate-transferring of the 3rd exemplary embodiment of the present invention.
In first exemplary embodiment, between six air suspension modules 210, a grasping and delivery unit 100 are set along the direction that transmits substrate.
As above summary, can one or more grasping and delivery unit 100 be set the definite zone (at any center or fringe region) between the zone of a plurality of air suspension modules 210.
Yet if the distance that substrate will transmit, air suspension module 210 or grasping are connected along the X-axis line direction that transmits substrate usually with delivery unit 100, because can not make air suspension module 210 or the grasping and the delivery unit 100 of endless.In this case, can successively connect grasping and delivery unit (not shown) along X-axis line direction, or as shown in figure 11, grasping and delivery unit 100b can be with the broken line arranged in patterns between air suspension module 210, then along X-axis line direction to directly.
Under one situation of back, as shown in figure 11, between grasping and delivery unit 110b, with the broken line arranged in patterns lap (O) can be arranged, in its transport process so that the protection substrate is avoided damaging along X-axis line direction.Yet this lap (O) is not essential.
Figure 12 is the fragmentary, perspective view according to grasping in the substrate-transferring of the 4th exemplary embodiment of the present invention and delivery unit; Figure 13 is the decomposition diagram of Figure 12.
As shown in the figure, the grasping in the present embodiment and delivery unit 100c have with the foregoing description in grasping and delivery unit 100,100a and 100b identical functions but the different structure of part.Particularly, the grasping in the present embodiment is structurally similar with delivery unit 100c to the grasping of second embodiment with delivery unit 100c,, is described with grasping and delivery unit 100a mode relatively with second exemplary embodiment for this reason.
Grasping in this exemplary embodiment comprises the vacuum cup 151 similar with delivery unit 100a to the grasping of second exemplary embodiment with delivery unit 100c, bears alar part 151a but also comprise the safety that forms on the vacuum cup 151 of contrast with the vacuum cup of second exemplary embodiment.
It is the position that substrate is placed and supported by safety that safety is born alar part 151a.Safety is born alar part 151, and surface depression is increasing the area of contact with substrate within it, and this bears alar part 151 safely and is made by elastomeric material.
In the present embodiment, safety is born alar part 151a shape approximation in oval and its in-to-in intercommunicating pore 152a shape such as elongated hole, but is not limited thereto.
In addition, also the zone of grasping in the present embodiment and delivery unit 100c is provided with boiler check valve 154, can be with definite zone of only making the grasping that contacts in fact and support with substrate and delivery unit 100a by vacuum pumping, the loss problem that solves vacuum leak thus or caused by vacuum pumping owing to unnecessary zone.Herein, the 26S Proteasome Structure and Function of boiler check valve 154 is equivalent to the 26S Proteasome Structure and Function of boiler check valve in second exemplary embodiment, so its explanation is omitted.
In the present embodiment, parallel stretch out and pair of tracks spaced apart from each other 115 is formed on the surface of unit main body 110c, a plurality of rail blocks 125 from osculating element main body 110c surface, pair of tracks 115 outside are formed in the application of force belt conveyor 120c.
Because of pair of tracks 115 and a plurality of rail block 125 are arranged mutually with the track form, but the application of force transmits substrate when application of force belt conveyor 120c rotates with respect to unit main body 110c.
Except that this configuration, between a plurality of rail blocks 125 of application of force belt conveyor 120c, be provided with the side that is used for aspirated air around grasping and delivery unit 100c and suck unit 126.When a plurality of rail blocks 125 were made with outstanding and the form of pushing, side sucked unit 126 and can form naturally between a plurality of rail blocks 125.This helps side and sucks unit 126 with (this situation takes place when transmitting substrate) in foreign matter or the particulate suction unit main body 110c and outside with its eduction gear.
Figure 14 is the schematic side view according to the substrate-transferring of the 5th exemplary embodiment of the present invention.
Referring to Figure 14, substrate-transferring 1 is vertical conveyer 1 in the present embodiment.Substrate-transferring 1 comprises grasping and delivery unit 100, and being used for vertical placement of grasping is at least one zone and the application of force transmission substrate of the substrate of holding up perpendicular to the ground; And auxiliary delivery unit 200, be adjacent to the transmission that grasping and delivery unit 100 were provided with and supported substrate.
For example, mean substrate perpendicular to the ground placement and tiltedly place with about 80 degree angle lappings, but be not limited thereto with respect to ground.
The detailed structure of grasping and delivery unit 100 and auxiliary delivery unit 200 is described to above structure shown in Figure 13 with reference to Fig. 1.
Different with the described horizontal transmission device of above first to fourth exemplary embodiment, the substrate-transferring 1 in the present embodiment has the wherein structure that tiltedly transmits with about 65 to 75 degree angle lappings of substrate.Therefore, if grasping and delivery unit 100 shut-down operation (being grasping and delivery unit 100 release liners) owing to fault, substrate can fall from respective paths, therefore loss and accident may take place.
In the present embodiment, as shown in figure 14, be provided with dropproof unit 300 and prevent these losses and accident.
As with the parts that contact so that substrate falls by preset distance, contact support roller 310 is preferably to be formed by having certain elastomeric material (for example silicone or urethane).Because Figure 14 is a lateral plan, thus seem only to illustrate a contact support roller 310, but the quantity that in fact contacts support roller 310 can be according to the area of the lower area of substrate and difference.
The actr 330 that can comprise the power cylinder body is operated selectively, so that the amount of jack-up contact support roller 310 and rolling wheel support 320 reaches the amount of falling of substrate, thereby substrate is turned back to its initial position.
Utilize this configuration, substrate with contact support roller 310 under normal condition by a certain distance spaced apart, for example, by several millimeters spaced apart to tens mm distance.Yet if grasping and delivery unit 100 shut-down operation (if i.e. grasping and delivery unit 100 release liners) owing to fault, even substrate falls from respective paths, substrate also can contact with Elastic Contact support roller 310, thereby prevents that substrate is impaired.After contact support roller 310 stoped substrate to fall, actr 330 was operated selectively with jack-up contact support roller 310 and rolling wheel support 320.
Opposite with dropproof unit 300 with above structure, can utilize to be used for part and to bear vee-block (not shown) with the lower end of the substrate that supports vertical placement.Utilizing under the situation of vee-block, even grasping and delivery unit 100 will transmit substrate or prepare transmit under a lot of conditions of substrate because the fault release liners, substrate can be born and be supported by vee-block, thereby prevents the generation of loss and accident.
Figure 15 is the lateral plan according to the substrate-transferring of the 6th exemplary embodiment of the present invention.
As mentioned above, substrate-transferring 1a in the present embodiment is used to transmit vertical placement promptly with the device of about 80 degree bevelled substrates, and therefore can utilize it is tilting unit 400 uses that substrate is used to tilt substrate with being used for holding up in the starting stage.For this reason, provide tilting unit 400.
As shown in figure 15, tilting unit 400 in the present embodiment comprises the power cylinder body 410 of an end that has on outside frame 221 rotation and expansible and recoverable be connected in power cylinder body 410 and have the piston rod 420 that is rotationally attached to apparatus body 220.In other words, the tilting unit in the present embodiment 400 can realize by the combination of air cylinder, hydraulic actuating cylinder and air cylinder and hydraulic actuating cylinder.
Utilization has the tilting unit 400 of this configuration, can support the apparatus body 220 of grasping and delivery unit 100 and auxiliary delivery unit 200 to hold up with being used for, help improving the efficient that transmits substrate by the restriction that overcomes the manpower operation thus with the about 80 degree angles shown in the two dash lines of Figure 15.
Figure 16 is the perspective diagram according to the substrate-transferring of the 7th exemplary embodiment of the present invention; Figure 17 is the section-drawing along the line A-A among Figure 16.
As shown in the figure, substrate-transferring comprises: air suspension module 510, its surface are formed with a plurality of air jet hole H, by the air of these air jet holes H injection in order to the suspension substrate; And substrate protective layer 550, be arranged on the surface of air suspension module 510 and protect substrate.
As shown in Figure 1, air suspension module 510 likeness in form boxes have the certain space that injects air.
In the present embodiment, make air suspension module 510 with the rectangular box form, but be not limited thereto.Air suspension module 510 is connected in and is used to supply the device (not shown) of air to the air jet hole H of air suspension module 510, for example, is used for pump or electrical motor or the nozzle or the allied equipment of injection air.
The roof 511 that forms air suspension module 510 surfaces is formed with a plurality of air jet hole H.Each hole of a plurality of air jet hole H is set to ring-type on roof 511.Shown many air jet hole H among the figure, be difficult to count because they are the very tiny micropores of diameter but actual air jet hole is too many.
Substrate protective layer 550 is arranged on the surface of air jet hole H, is used to protect substrate.Described air suspension module 510 is made of metal.Therefore, if protective cover of the linerless end 550 and only utilize air suspension module 510 that substrate is suspended, when substrate contact not by suspension and with air suspension module 510, owing to contact with air suspension module 510 surfaces, the substrate that glass is made was possible impaired.Therefore,, establish substrate protective layer 550 in addition on air suspension module 510 surfaces for preventing this situation, impaired to prevent substrate.
Substrate protective layer 550 is selected from the material that can not cause cut and damage when the contact substrate on substrate.In the present embodiment, substrate protective layer 550 is set to be coated on the coat on air suspension module 510 surfaces.For example, will be coated with the surface that method is coated on air suspension module 510 by spray-on process or roller,, thereby form substrate protective layer 550 then with its curing by the applying liquid that urethane or similar material are made.
Simultaneously; substrate protective layer 550 is formed with expanded hole 551; be communicated with the air jet hole H of air suspension unit 510, and the size (being diameter) that each hole all is enlarged to than air jet hole H is big, thereby increases from air jet hole H blast injection area towards substrate.
After to air suspension module 510 surface applied substrate protective layers 550, by perforation can easily form expanded hole 551 to coat.
As mentioned above, expanded hole 551 is enlarged to the size greater than air jet hole H, is used for increasing the blast injection area towards substrate from air jet hole H.In the present embodiment, expanded hole 551 is arranged to one by one corresponding to air jet hole H.
Therefore, expanded hole 551 is formed on the substrate protective layer 550 corresponding to air jet hole H one by one, and greater than air jet hole H, makes air can pass through air jet hole H towards the substrate injection air, to increase projected area and the suspension substrate when expanding.Similar all air jet hole H form structure for this reason, have the effect of increase towards the blast injection area of substrate injection.Therefore, need not significantly to increase the efficient that the electrical motor rating horsepower just can improve the suspension substrate.
Simultaneously, the flow path of the indication of the arrow among Figure 17 air.Shown in the arrow among Figure 17, if can not flowing smoothly, air produces whirlpool in air jet hole H zone, then can reduce the efficient of suspension substrate.
For preventing whirlpool, in the present embodiment, the open area of air jet hole H increases gradually and approaches expanded hole 551.Utilize this configuration, air flows under the situation that does not form whirlpool towards expanded hole 551 smoothly from air jet hole H, thereby can suspend substrate.
Therefore, in the present embodiment, provide the substrate-transferring that can have convenient and simple structure, and need not to improve the efficient that transmits substrate than conventional motors increasing motor rating horsepower.Particularly,, more help transmitting substrate, thereby but at high speed transmits substrate because the efficient of suspension substrate uprises.The high speed of substrate transmits and will describe in further detail in following examples.
Figure 18 is the perspective diagram according to the substrate-transferring of the 8th exemplary embodiment of the present invention; Figure 19 is the section-drawing along Figure 18 center line B-B.
As shown in the figure, in the substrate-transferring of present embodiment, air suspension module 520 comprises a plurality of its surperficial air jet hole H that form on roof 521, and is identical with embodiment among Figure 17 in this.
Yet the embodiment among present embodiment and Figure 17 is different in shape expanded hole 561, and expanded hole 561 is formed on and puts on air suspension module 520 surfaces and protect in the substrate protective layer 560 of substrate.
In the present embodiment, the hole 561 that is formed at the expansion in the substrate protective layer 560 is set to a plurality of unit expanded hole 561, each unit expanded hole is all arranged corresponding to a plurality of air jet hole H.For example, in the present embodiment, one unit expanded hole 561 is set to corresponding to nine air jet holes.
In this case, by air jet hole H being used to of spraying the suspend projected area of air of substrate further increase, promptly towards substrate expansion and mobile, consequently need not significantly to increase rating horsepower than traditional electrical motor is the efficient that comparable conventional motors improves the suspension substrate.
Here, one unit expanded hole 561 only is an exemplary embodiment corresponding to nine air jet hole H, does not limit the scope of the invention.
Figure 20 is the partial plan layout according to the substrate-transferring of the 9th exemplary embodiment of the present invention.
As shown in the figure; substrate-transferring in the present embodiment is similar to the substrate-transferring among the embodiment shown in Figure 180; wherein a plurality of unit expanded hole 571 (circular dashed line) is formed on the surface of the substrate protective layer 570 that puts on air suspension module 530 surfaces; and each unit expanded hole is arranged corresponding to a plurality of air jet holes, and these unit expanded holes 571 are grouped among section Z1, Z2, the Z3... once more by several one group.In other words, Figure 20 has shown that each is grouped among section Z1, Z2, the Z3... by triad once more corresponding to a plurality of unit expanded hole 571 that nine air jet hole H arrange.In this case, the unit expanded hole 571 shown in the circular dashed line is not set in actual product.
In the present embodiment, the length direction that the grouping direction of a plurality of unit expanded hole 571 grouping is transverse to air suspension module 530 promptly transmits the direction of substrate, but is not limited thereto.If desired, the grouping direction can be parallel with the direction that transmits substrate.
By this way, if a plurality of unit expanded hole 571 is used for once more by be grouped into section Z1, Z2, Z3... severally one group, so not only further increased the projected area of air towards substrate, and at each section Z1, Z2, Z3 ... in have select air jet stream selectively opening/closing to reduce energy consumption.That is to say under the situation of Figure 20, to have only section Z1, the Z2, the Z3 that place and transmit substrate in fact ... be controlled to injection air, and that other sections all are controlled to obstruct airflow is moving, thereby reduces because the energy consumption that cooresponding blast injection produces.
Utilize this embodiment, can improve the efficient of suspension substrate, need not to increase the rating horsepower of electrical motor, and can transmit substrate at a high speed than traditional electrical motor by utilizing convenient and simple structure.
Figure 21 is the transparent view according to the substrate-transferring of the tenth exemplary embodiment of the present invention.
As shown in the figure, the substrate-transferring of present embodiment comprises air injection modules 540 and the grasping and the delivery unit 100 of a plurality of substrates that are used to suspend, and at least one zone and the application of force of the substrate that grasping level (promptly parallel with the bottom surface) is placed transmit substrate.
Air injection modules 510,520,530 described in a plurality of air injection modules 540 and the above embodiment has identical functions, but its shape and size difference.That is to say that substrate protective layer 580 is formed at the surface of air suspension module 540, the expanded hole 581 that is arranged on the substrate protective layer 580 forms greater than the air jet hole H that is arranged on the air injection modules 540.In addition, each expanded hole 581 is arranged corresponding to a plurality of air jet hole H.With this form, a plurality of air injection modules 540 are set, consequently need not electrical motor has big rating horsepower just substrate can be suspended to desired height effectively by a plurality of air injection modules 540.Referring to Figure 21, six air suspension modules 540 are set on apparatus body 501, but are not limited thereto.In addition, also air suspension module 540 can be separated with unfixed spacing.
Grasping and delivery unit 100 are used for transmitting in fact the substrate that is suspended by a plurality of air injection modules 540.Grasping and delivery unit 100 are arranged on a zone between the zone that is selected from air injection modules 540.In the present embodiment, a grasping and delivery unit 100 are arranged on the zone line of the air suspension module 540 that is parallel to air suspension module 540, but are not limited thereto.On the other hand, the 26S Proteasome Structure and Function of grasping and delivery unit 100 and auxiliary delivery unit 200 is with reference to the above description based on Fig. 1 to 13.
Obvious from above description, the invention provides a kind of substrate-transferring made from the cost that is starkly lower than conventional apparatus, this device can transmit substrate at a high speed and prevent substrate because when transmitting and the collision of cylinder, rotating shaft etc. and impaired.
In addition, provide a kind of substrate-transferring, this device can reduce the area occupied with respect to device, reduces noise and particulate, can manufacture to have the next substrate that transmits at a high speed of high efficiency structure.
In addition, provide a kind of substrate-transferring, this device has convenient and simple structure, need not can improve the efficient of suspension substrate and transmit substrate at a high speed than the remarkable increase rating horsepower of conventional motors.
Although specified and described the present invention with reference to exemplary embodiment, be to be understood that in the various changes that can make the foregoing description under the situation of the spirit and scope that do not deviate from follow-up claim on form and the details.
Claims (32)
1. substrate-transferring, this device comprises:
At least one zone and the application of force of the substrate that grasping and delivery unit, grasping are placed parallel to the groundly transmit substrate; And
Auxiliary delivery unit, contiguous described grasping and delivery unit are also supported the transmission of substrate.
2. substrate-transferring, this device comprises:
At least one zone and the application of force of the substrate that grasping and delivery unit, grasping are placed perpendicular to the groundly transmit substrate; And
Auxiliary delivery unit, contiguous described grasping and delivery unit are also supported the transmission of described substrate.
3. device as claimed in claim 2 is characterized in that, also comprises the dropproof unit of the lower area of the described substrate of being located at vertical placement, stops substrate to fall from respective paths when described grasping and delivery unit release liners.
4. device as claimed in claim 3 is characterized in that, this dropproof unit comprises:
The contact support roller, contact is also supported the vertically lower end of the substrate of placement;
Rolling wheel support is supported described contact support roller; And
Actr is connected in described rolling wheel support and moves described contact support roller and rolling wheel support by preset distance.
5. device as claimed in claim 2 is characterized in that, also comprises:
Apparatus body is supported described grasping and delivery unit and described auxiliary delivery unit; And
Tilting unit, part is connected to the described apparatus body described apparatus body that tilts.
6. device as claimed in claim 5 is characterized in that, this inclination comprises:
The power cylinder body, the one end pivoting is connected in outside frame;
Piston rod, telescopically are connected in described power cylinder body, and the one end is rotationally attached to described apparatus body.
7. substrate-transferring, this device comprises:
The air suspension module comprises a plurality of its surperficial air jet holes that are formed at, in order to injection be used to the to suspend air of substrate; And
The substrate protective layer, substrate is protected on the surface that is arranged on described air suspension module;
Described substrate protective layer comprises the expanded hole that is communicated with the air jet hole of air suspension module, and this expanded hole is extended to greater than described air jet hole, increases the projected area of blowing perforation towards the air of substrate.
8. device as claimed in claim 7 is characterized in that described expanded hole is arranged corresponding to described air jet hole one by one.
9. device as claimed in claim 7 is characterized in that, described expanded hole is arranged to a plurality of unit expanded hole, and each described unit expanded hole is corresponding to a plurality of described air jet holes.
10. device as claimed in claim 7 is characterized in that, the aperture area of described air jet hole increases gradually along with approaching described expanded hole.
11. device as claimed in claim 7 is characterized in that, described air suspension module is made of metal and described substrate protective layer is made as coat, and
Described expanded hole is by making described coat perforation after applying described coat on air suspension module surface.
12. device as claimed in claim 7 is characterized in that, the described air suspension module that is provided with described substrate protective layer comprises a plurality of being arranged parallel to each other and described air suspension module spaced apart from each other, and
Described device also comprises grasping and transmits, this unit is arranged at least one zone in the zone between a plurality of described air suspension modules, and when under the substrate state that described gas suspension module suspends by a plurality of skies on presumptive area during the described substrate surface of contact the application of force transmit substrate.
13. device as claimed in claim 1 or 2 is characterized in that, described auxiliary delivery unit comprises contactless auxiliary delivery unit, at least one described air suspension module of this unit by using described substrate that on preset distance, suspends, and
Grasping and delivery unit, this unit grasping are suspended into the described substrate of preset distance by described auxiliary delivery unit at least a portion zone and the application of force transmit described substrate.
14. device as claimed in claim 13 is characterized in that, described auxiliary delivery unit comprises a plurality of arrangement in parallels and described air suspension module spaced apart from each other, and
Grasping and delivery unit are arranged at least one zone in the zone between a plurality of described air suspension modules.
15., it is characterized in that described grasping and delivery unit comprise as each described device in the claim 1,2 or 7:
Unit main body, its inside is formed with air flow spaces; And
Application of force belt conveyor, being coupled in the direction that transmits mobile described substrate on the described unit main body can move with respect to described unit main body, and is formed with a plurality of vacuum holes that are communicated with the air flow spaces of described unit main body, with vacuum described substrate is held.
16. device as claimed in claim 15 is characterized in that, the end face of described unit main body is provided with the vacuum slit, is communicated with a plurality of described vacuum hole on being formed at application of force belt conveyor.
17. device as claimed in claim 16 is characterized in that, described vacuum slit forms continuously along the length direction of application of force belt conveyor, or forms corresponding to the dividing plate piecewise on the described unit main body end face.
18. device as claimed in claim 15 is characterized in that, the air flow spaces grouping in the described unit main body and become the section of a plurality of independent vacuum pumpings.
19. device as claimed in claim 15, it is characterized in that, also comprise the vacuum cup that is connected in described application of force belt conveyor surface, contact and support the bottom surface of described substrate in fact with described substrate, and comprise and be located at its surperficial intercommunicating pore, be formed at described application of force belt conveyor on a plurality of described vacuum hole be communicated with.
20. device as claimed in claim 19 is characterized in that, described vacuum cup comprises safety and bears alar part, and its inside face caves in the area of contact of increase with described substrate, bears in described safety and bears and support described substrate in the alar part substantially safely.
21. device as claimed in claim 20 is characterized in that, described safety is born alar part and is made by the rubber-like elastomeric material, and
Described intercommunicating pore is set to elongated hole.
22. device as claimed in claim 15, it is characterized in that the surface of described unit main body is formed with and is parallel to each other and is spaced from each other and outstanding pair of tracks, the inside face of described application of force belt conveyor is formed with a plurality of rail blocks, from the surface of the outside of described pair of tracks osculating element main body, and
Also between described a plurality of rail blocks, be formed with side and suck the unit, with aspirated air around described grasping and delivery unit.
23. device as claimed in claim 19, it is characterized in that, also comprise boiler check valve, be connected in the zone in the described intercommunicating pore of described vacuum cup, and whether contact described vacuum cup surface and allow selectively and stop windstream by described intercommunicating pore according to described substrate.
24. device as claimed in claim 23 is characterized in that, described boiler check valve comprises:
Axle unit, vertical arrangement is in the zone of described intercommunicating pore;
The unit, termination forms the upper end of described axle unit and is exposed to the surface of described vacuum cup;
Opened/closed unit, hole is arranged on the lower end and the determining section of the described intercommunicating pore of opened/closed selectively of the described axle unit opposite with unit, described termination; And
Elastic component is connected in described axle unit and flexibly setovers along the direction that unit, described termination is exposed to described vacuum cup surface.
25. device as claimed in claim 23 is characterized in that, described vacuum cup becomes (UHMW-PE) by ultrahigh molecular weight polyethylene, and described boiler check valve is made by PEEK.
26. device as claimed in claim 15 is characterized in that, described grasping and delivery unit also comprise:
The anti-scatter backplate is arranged in the described unit main body in the mode of the relative upper area that covers described application of force belt conveyor, and described application of force belt conveyor is sandwiched in wherein, prevents the particulate scattering that can produce when transmitting described substrate.
27. device as claimed in claim 26 is characterized in that, the upper end of described anti-scatter backplate is lower than the surface of described vacuum cup.
28. device as claimed in claim 15 is characterized in that, also comprises:
Ventilation line is located at main body one side, and
Filter is arranged on the zone of described ventilation line and removes foreign matter in the air that described unit main body is discharged.
29. device as claimed in claim 15 is characterized in that, described grasping and delivery unit comprise a plurality of individual delivery units of arranging in the X-axis line direction that transmits described substrate of continuing to use, and
The broken line pattern is arranged or be arranged to a plurality of individual delivery units along X-axis line direction continuously.
30. device as claimed in claim 29 is characterized in that, between the described individual delivery unit of a plurality of broken line patterned arrangement, also is included in the lap of crosscut X-axis line on the Y-axis line direction.
31. device as claimed in claim 15 is characterized in that, described application of force belt conveyor forms loop-like, and
Described grasping and delivery unit comprise:
Driving pulley is arranged on an inboard of described application of force belt conveyor;
Negative pulley wheel is arranged on another inboard of described application of force belt conveyor; And
Driving motor is connected in described driving pulley and drives described application of force belt conveyor rotation.
32. device as claimed in claim 15 is characterized in that, also comprises driver element, be connected in described grasping and delivery unit and drive described grasping and delivery unit moves, with near or away from the described substrate that will transmit.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020080116865A KR101033159B1 (en) | 2008-11-24 | 2008-11-24 | Horizontal type apparatus for transferring a substrate |
| KR1020080116866A KR101033160B1 (en) | 2008-11-24 | 2008-11-24 | Vertical type apparatus for transferring a substrate |
| KR10-2008-0116866 | 2008-11-24 | ||
| KR10-2008-0116865 | 2008-11-24 | ||
| KR10-2009-0055859 | 2009-06-23 | ||
| KR1020090055859A KR101157197B1 (en) | 2009-06-23 | 2009-06-23 | Apparatus for transferring a substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101734484A true CN101734484A (en) | 2010-06-16 |
| CN101734484B CN101734484B (en) | 2013-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910225826 Expired - Fee Related CN101734484B (en) | 2008-11-24 | 2009-11-24 | Substrate conveyer |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2010123970A (en) |
| CN (1) | CN101734484B (en) |
| TW (1) | TWI421967B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2010123970A (en) | 2010-06-03 |
| TWI421967B (en) | 2014-01-01 |
| CN101734484B (en) | 2013-10-16 |
| TW201029098A (en) | 2010-08-01 |
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