Utility model content
First purpose of the present utility model is to provide a kind of air floating platform, and the air floating platform can place glass substrate
When avoid being contacted with glass substrate, so as to prevent glass substrate from being scratched and pollute.
Second purpose of the present utility model is to provide a kind of air-floating apparatus, and the air-floating apparatus can place glass substrate
When avoid being contacted with glass substrate, so as to prevent glass substrate from being scratched and pollute.
3rd purpose of the present utility model is to provide a kind of glass substrate conveying device, and the conveyer is in transmission glass
Glass substrate can be avoided to be scratched and polluted during substrate.
To achieve these goals, the utility model provides a kind of air floating platform, for placing glass substrate, including along height
Degree direction fit from the bottom to top stack enter gas-bearing formation and go out gas-bearing formation, it is described enter gas-bearing formation at the top of be formed with circumferentially closed groove,
The bottom of the groove is formed with the air admission hole for entering gas-bearing formation described in along short transverse, to connect air inlet pipe joint, the outlet
Equably be laid with layer along short transverse through it is described go out gas-bearing formation venthole, the venthole by the groove with it is described
Air admission hole is connected.
Alternatively, the groove is multiple, and the bottom of each groove is formed with an air admission hole.
Alternatively, the venthole be arranged in the form of the rectangular array it is described go out gas-bearing formation on.
Alternatively, the groove includes the keyway of multiple strips, and the keyway prolongs along the length direction of the air floating platform
Stretch, the groove is additionally included in the interconnecting part between two keyways adjacent on width, the air admission hole with it is described
Interconnecting part is connected.
Alternatively, it is described enter gas-bearing formation and the width that goes out gas-bearing formation edge be evenly provided with multiple through holes respectively, with logical
Cross and enter gas-bearing formation described in screw element fastening and go out gas-bearing formation.
Alternatively, described to enter gas-bearing formation and to go out between gas-bearing formation to be additionally provided with shunting layer, the upper and lower ends of the shunting layer are pasted respectively
Go out gas-bearing formation described in closing and enter gas-bearing formation, the shunting layer is provided with the tap hole corresponding to the venthole.
Alternatively, the aperture of the tap hole is less than the venthole.
Alternatively, it is described to enter to scribble fixing glue between gas-bearing formation and shunting layer, it is described to enter gas-bearing formation, shunting layer and to go out the width of gas-bearing formation
The edge for spending direction is evenly provided with multiple through holes respectively, with by entering gas-bearing formation, shunting layer described in screw element fastening and going out gas-bearing formation.
According to second aspect of the present utility model, there is provided a kind of air-floating apparatus, for placing glass substrate, including pedestal
With placement air floating platform on the base, the air floating platform is according to above-described air floating platform, the air floating platform
It is the multiple of rectangular array, and adjacent air floating platform laminating is set.
According to the 3rd aspect of the present utility model, there is provided a kind of glass substrate conveying device, including:Air-floating apparatus, use
In the placement glass substrate;Positioner, it is described for being positioned at the glass substrate before the glass substrate is transmitted
On air-floating apparatus;And mobile device, for driving the glass substrate to be moved along the air-floating apparatus, the air-floating apparatus are
Above-described air-floating apparatus, the positioner includes the first gas for positioning the glass substrate in the longitudinal direction
Cylinder, and the second cylinder of the glass substrate is positioned in the direction of the width, the mobile device includes being arranged on the air supporting dress
The vacuum cup of the side of width is put, is moved with from the one side absorption glass substrate.
Alternatively, first cylinder is straight line cylinder, and is four, is respectively used to be arranged on the glass substrate
Corner.
Alternatively, second cylinder is rotary cylinder, and is two, is respectively used to be arranged on the glass substrate wide
Side on degree direction.
By above-mentioned technical proposal, use airflow supports glass substrate, it is to avoid glass substrate in transportation with support
Device is contacted, and is caused to scratch and is polluted so as to prevent, and then improves the yield rate of glass substrate, improves operating efficiency.
Other feature and advantage of the present utility model will be described in detail in subsequent specific embodiment part.
Specific embodiment
Specific embodiment of the present utility model is described in detail below in conjunction with accompanying drawing.It should be appreciated that herein
Described specific embodiment is merely to illustrate and explains the utility model, is not limited to the utility model.
In the utility model, in the case where opposite explanation is not made, the noun of locality " upper and lower " for using typically refers to each portion
Part is upper and lower in normal operating conditions, and the length direction of conveyer refers to the direction of transfer of glass substrate, width
Refer to that, perpendicular to the direction of length direction in glass substrate plane, short transverse refers to perpendicular to the side of glass substrate plane
To in addition, the length direction of air floating platform and conveyer, width and short transverse all same in the utility model.
Additionally, the arrow in Fig. 2 is oriented to the direction of transfer of glass substrate.
As shown in figure 1, the air floating platform that the utility model is provided is used to place glass substrate, including along short transverse under
What supreme laminating was stacked enters gas-bearing formation 10 and goes out gas-bearing formation 20, and the top for entering gas-bearing formation 10 is formed with circumferentially closed groove, the groove
Bottom is formed with runs through air admission hole 11 into gas-bearing formation 10 along short transverse, to connect air inlet pipe joint 40, goes out uniform on gas-bearing formation 20
Be laid with the venthole 21 for running through gas-bearing formation 20 along short transverse, venthole 21 is connected by groove with air admission hole 11.So,
Gas is first into groove by gas-tpe fitting, then is entered into venthole 21 via groove, because venthole 21 is uniform
Lay, it is ensured that the air-flow for supporting glass substrate is equably flowed out, and glass substrate can be made to be steadily placed on air floating platform
Side.The air floating platform uses airflow supports glass substrate, is particularly suited for the transmission of glass substrate, by the shape of air supporting
Formula, avoids the directly contact of glass substrate and support meanss or conveyer etc., so as to solve because of friction to greatest extent
Cause scuffing, pollution and the problem on deformation of glass substrate.
Specifically, above-mentioned groove can be multiple, and each groove is formed with an air admission hole 11, and multiple grooves are mutual
It is arranged on into the top of gas-bearing formation 10, the die cavity of each self-forming independence every ground, it can be ensured that enter the bulk strength of the structure of gas-bearing formation 10, is needed
It is noted that each venthole 21 is held in the coverage of groove, i.e. groove is opened up according to the position of venthole 21
Put, it is ensured that each venthole 21 can equably outlet, so as to keep the stabilization placement of glass substrate.
Preferably, venthole 21 can be arranged on out on gas-bearing formation 20 in the form of rectangular array, increase the quantity of venthole 21,
Expand the coverage of venthole 21, such that it is able to improve the uniformity of the outlet of venthole 21.
Further, groove can include the keyway 12 of multiple strips, the keyway 12 along air floating platform length direction
Extend, that is, each keyway 12 can extend along the orientation of single file venthole 21, so that it is guaranteed that each venthole 21 can be with
Connected with groove, groove is additionally included in the interconnecting part 13 between two keyways 12 adjacent on width, air admission hole 11 and company
Logical portion 13 is connected.Specifically, as shown in figure 1, for example two row ventholes 21 can be formed going out on gas-bearing formation 20, gas-bearing formation 10 is being entered
On also form the corresponding keyway 12 of two rows, need exist for explanation, can be one or more per the keyway 12 in a line, its
Specific quantity is not specifically limited, in the implementation method shown in Fig. 1, together herein according to depending on air floating platform physical length
Keyway 12 in a line is 2, that is, 4 keyways 12 are integrally formed.Set between two adjacent in the direction of the width keyways 12
Interconnecting part 13, air admission hole 11 is connected with the interconnecting part 13, due to venthole 21 correspond to keyway 12 setting, not directly with
Interconnecting part 13 is connected, and this structure can avoid the air-flow that air admission hole 11 is flowed into from being directly flowed into venthole 21 by keyway 12
In, and then larger impact air-flow is produced, scratch glass substrate.Setting multiple keyways 12 can reduce opening into gas-bearing formation 10 as far as possible
Groove region, it is ensured that enter the bulk strength of gas-bearing formation 10, additionally, the structure can also simultaneously ensure that each venthole 21 has gas
Body equably flows out, so as to keep the stabilization placement of glass substrate.
As shown in figure 1, the edge for entering gas-bearing formation 10 and the width for going out gas-bearing formation 20 can respectively be evenly provided with multiple leading to
Hole, to be fastened into by screw element gas-bearing formation 10 and going out gas-bearing formation 20, it is ensured that go out gas-bearing formation 20 and enter being brought into close contact for gas-bearing formation 10, prevent gas
Let out in vitro.Specifically, in one embodiment, the through hole gone out on gas-bearing formation 20 is screwed hole, and the through hole entered on gas-bearing formation 10 is light
Hole, passes through the unthreaded hole into gas-bearing formation 10 to be screwed into out in the screwed hole of gas-bearing formation 20, the end of screw using screw from the bottom of gas-bearing formation 10 is entered
Gas-bearing formation 20 does not stretch out in portion, so as to avoid it from scratching glass substrate.Enter gas-bearing formation 10 in another embodiment and go out on gas-bearing formation 20
Through hole can be screwed hole, it is also possible to fastening effect is realized by screw element.Additionally, the through hole gone out on gas-bearing formation 20 can be with
It is shoulder hole, its cascaded surface is spacing for being carried out to screw element, it is to avoid screw element stretches out gas-bearing formation 20.The utility model is to above-mentioned
The concrete form of through hole is not specifically limited, as long as meeting technology design, in protection domain of the present utility model.
Further, as shown in figure 1, entering gas-bearing formation 10 and going out between gas-bearing formation 20 to be also provided with shunting layer 30, shunting layer 30
Upper and lower ends fit out gas-bearing formation 20 and enter gas-bearing formation 10 respectively, shunting layer 30 is provided with the tap hole 31 corresponding to venthole 21,
That is, in initially entering tap hole 31 from the gas of groove outflow, venthole 21 is entered back into, wherein tap hole 31 corresponds to venthole
21 are set so that glass substrate is bullied uniformly, it is to avoid incline and scratch.
Specifically, the aperture of tap hole 31 is less than venthole 21, though gas in tap hole 31 can be completely into
To in venthole 21, and the aperture of venthole 21 is more than tap hole 31, can play cushioning effect, it is to avoid air-flow is to glass base
Plate produces excessive impact.
Further, enter and fixing glue is scribbled between gas-bearing formation 10 and shunting layer 30, for example, can be the double faced adhesive tape of high intensity, prevent
Only gas leak, the edge entered gas-bearing formation 10, shunting layer 30 and go out the width of gas-bearing formation 20 can respectively be evenly provided with multiple
Through hole, by screw element to be fastened into gas-bearing formation 10, shunting layer 30 and go out gas-bearing formation 20, the concrete form of its fastening and above-mentioned fastening
It is similar with the form for going out gas-bearing formation 20 to enter gas-bearing formation 10, and here is omitted.
Additionally, as shown in Fig. 2 the utility model provide glass substrate conveying device, including:Air-floating apparatus, for putting
Put glass substrate;Positioner, for that glass substrate will be positioned at into air-floating apparatus before glass substrate is transmitted;And it is mobile
Device, for driving glass substrate to be moved along air-floating apparatus.Wherein, air-floating apparatus include pedestal and placement gas on the base
Floating platform, the air floating platform that air floating platform is provided for the utility model, air floating platform is the multiple of rectangular array, and adjacent
Air floating platform laminating set.The support scope of air-floating apparatus can be expanded by the combination of multiple air floating platforms, can basis
The air floating platform of various sizes of glass substrate selection varying number is combined.
Specifically, the length direction of the direction of transfer of glass substrate, i.e. conveyer is defined as Y-axis, conveyer
Width is defined as X-axis, and positioner can include the first cylinder 50 for positioning glass substrate in the longitudinal direction, and
The second cylinder 60 of glass substrate is positioned in the direction of the width.Wherein, the first cylinder 50 can be straight line cylinder, and be four
It is individual, it is respectively used to be arranged on the corner of glass substrate, glass substrate to the Y-axis specified is promoted by the cooperation of four straight line cylinders
Position.Second cylinder 60 is rotary cylinder, and is two, is respectively used to the side being arranged on glass substrate width,
Adjustment glass substrate to the X-axis position specified, to ensure that mobile device (example vacuum cup 70 described as follows) can drive glass
Glass substrate motion.It should be noted that the concrete form of the first cylinder 50 and the second cylinder 60 is conventional skill in the art
Art means, repeat no more here.
As shown in Fig. 2 mobile device includes the vacuum cup 70 of the side for being arranged on air-floating apparatus width, with from list
Side absorption glass substrate motion, and glass baseplate surface will not be scratched.Specifically, in one embodiment, glass substrate
Before by transmission, glass substrate is navigated to by specified location by the first cylinder 50 and the second cylinder 60 first, keep glass base
Plate surface level, and glass substrate edge is parallel with air floating platform edge, and vacuum cup 70 adsorbs the side of glass substrate, very
Suction disk 70 drives glass substrate to move in the presence of outside pushing meanss, so as to complete the transmission of glass substrate.
Preferred embodiment of the present utility model is described in detail above in association with accompanying drawing, but, the utility model is not limited
Detail in above-mentioned implementation method, in range of the technology design of the present utility model, can be to skill of the present utility model
Art scheme carries out various simple variants, and these simple variants belong to protection domain of the present utility model.
It is further to note that each particular technique feature described in above-mentioned specific embodiment, in not lance
In the case of shield, can be combined by any suitable means, in order to avoid unnecessary repetition, the utility model is to each
Possible combination is planted no longer separately to illustrate.
Additionally, can also be combined between a variety of implementation methods of the present utility model, as long as it is not disobeyed
Thought of the present utility model is carried on the back, it should equally be considered as content disclosed in the utility model.