CN106044225B - Air floating platform, air-floating apparatus and glass substrate conveying device - Google Patents
Air floating platform, air-floating apparatus and glass substrate conveying device Download PDFInfo
- Publication number
- CN106044225B CN106044225B CN201610489329.8A CN201610489329A CN106044225B CN 106044225 B CN106044225 B CN 106044225B CN 201610489329 A CN201610489329 A CN 201610489329A CN 106044225 B CN106044225 B CN 106044225B
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- China
- Prior art keywords
- glass substrate
- air
- air inlet
- gas
- bearing formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
Abstract
The invention discloses a kind of air floating platform, air-floating apparatus and glass substrate conveying devices, wherein air floating platform is for placing glass substrate, including being bonded the air inlet layer (10) stacked and out gas-bearing formation (20) from the bottom to top along short transverse, circumferentially closed groove is formed at the top of air inlet layer, the bottom of the groove is formed with the air inlet (11) for running through air inlet layer along short transverse, to connect air inlet pipe fitting (40), it is equably laid on gas-bearing formation out along short transverse through the venthole (21) for going out gas-bearing formation, venthole is connected to by groove with air inlet.Using airflow supports glass substrate, glass substrate is avoided to contact during transportation with support device, to prevent from causing to scratch and polluting, and then improves the yield rate of glass substrate, improve working efficiency.
Description
Technical field
The present invention relates to glass substrate technical fields, and in particular, to a kind of air floating platform, air-floating apparatus and glass substrate
Transmission device.
Background technique
Currently, the demand with market, the glass substrate breadth of FPD industry constantly expand with the development of technology, thick
Degree is constantly thinning, therefore requires the manufacturing technology of production line higher.Current large-sized glass substrate mostly uses contact to roll
Wheel transmission and belt transport, these ways of contact are easy to cause to scratch to glass substrate and pollute, and easily cause the broken of substrate
It is broken, to seriously affect the quality of product, and then production efficiency.
Summary of the invention
The first purpose of the invention is to provide a kind of air floating platform, which can keep away when placing glass substrate
Exempt to contact with glass substrate, to prevent glass substrate from being scratched and being polluted.
A second object of the present invention is to provide a kind of air-floating apparatus, which can keep away when placing glass substrate
Exempt to contact with glass substrate, to prevent glass substrate from being scratched and being polluted.
Third object of the present invention is to provide a kind of glass substrate conveying devices, and the transmission device is in transmission glass substrate
During can be scratched and be polluted to avoid glass substrate.
To achieve the goals above, the present invention provides a kind of air floating platform, for placing glass substrate, including along height side
To the air inlet layer stacked and out gas-bearing formation is bonded from the bottom to top, it is formed with circumferentially closed groove at the top of the air inlet layer, this is recessed
The bottom of slot is formed with the air inlet for running through the air inlet layer along short transverse, to connect air inlet pipe fitting, it is described go out gas-bearing formation on
It is equably laid with the venthole along short transverse through the gas-bearing formation out, the venthole passes through the groove and the air inlet
Hole connection.
Optionally, the groove is multiple, and the bottom of each groove is formed with the air inlet.
Optionally, the venthole is arranged on the gas-bearing formation out in the form of rectangular array.
Optionally, the groove includes the keyway of multiple strips, which prolongs along the length direction of the air floating platform
Stretch, the groove further includes the interconnecting part between two adjacent in the direction of the width keyways, the air inlet with it is described
Interconnecting part is connected.
Optionally, the air inlet layer and edge of the width direction of gas-bearing formation is evenly provided with multiple through-holes respectively out, with logical
It crosses screw element and fastens the air inlet layer and out gas-bearing formation.
Optionally, the air inlet layer and shunting layer is additionally provided between gas-bearing formation out, the upper and lower ends of the shunting layer are pasted respectively
Gas-bearing formation and the air inlet layer out are closed, the shunting layer is equipped with the tap hole corresponding to the venthole.
Optionally, the aperture of the tap hole is less than the venthole.
Optionally, it is coated with fixed glue between the air inlet layer and shunting layer, the air inlet layer, shunting layer and the width of gas-bearing formation out
The edge in degree direction is evenly provided with multiple through-holes respectively, to fasten the air inlet layer, shunting layer and gas-bearing formation out by screw element.
According to the second aspect of the invention, a kind of air-floating apparatus is provided, for placing glass substrate, including pedestal and is put
Air floating platform on the base is set, the air floating platform is according to above-described air floating platform, and the air floating platform is square
Multiple and adjacent air floating platforms of shape array are bonded setting.
According to the third aspect of the present invention, a kind of glass substrate conveying device is provided, comprising: air-floating apparatus, for putting
Set the glass substrate；Positioning device, for that the glass substrate will be located in the gas before transmitting the glass substrate
On floating device；And mobile device, for driving the glass substrate to move along the air-floating apparatus, the air-floating apparatus is root
According to above-described air-floating apparatus.
Optionally, the positioning device includes the first cylinder for positioning the glass substrate in the longitudinal direction, and
The second cylinder of the glass substrate is positioned in the direction of the width.
Optionally, first cylinder is straight line cylinder, and is four, is respectively used to that the glass substrate is arranged in
Quadrangle.
Optionally, second cylinder is rotary cylinder, and is two, and it is wide in the glass substrate to be respectively used to setting
Spend the side on direction.
Optionally, the mobile device includes the vacuum chuck that the side of the air-floating apparatus width direction is arranged in, with
The glass substrate movement is adsorbed from unilateral side.
Through the above technical solutions, using airflow supports glass substrate, avoid glass substrate during transportation with support
Device contact to prevent from causing to scratch and polluting, and then improves the yield rate of glass substrate, improves working efficiency.
Other features and advantages of the present invention will the following detailed description will be given in the detailed implementation section.
Detailed description of the invention
The drawings are intended to provide a further understanding of the invention, and constitutes part of specification, with following tool
Body embodiment is used to explain the present invention together, but is not construed as limiting the invention.In the accompanying drawings:
Fig. 1 is the explosive view for the air floating platform that an embodiment of the invention provides；
Fig. 2 is the structural schematic diagram for the glass substrate conveying device that an embodiment of the invention provides.
Description of symbols
10 air inlet layer, 11 air inlet
12 keyway, 13 interconnecting part
20 go out 21 venthole of gas-bearing formation
30 shunting layer, 31 tap hole
40 air inlet pipe fitting, 50 first cylinder
60 second cylinder, 70 vacuum chuck
Specific embodiment
Below in conjunction with attached drawing, detailed description of the preferred embodiments.It should be understood that this place is retouched
The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
In the present invention, in the absence of explanation to the contrary, the noun of locality " upper and lower " used typically refers to each component and exists
Upper and lower when normal operating conditions, the length direction of transmission device refers to the direction of transfer of glass substrate, and width direction refers to
Perpendicular to the direction of length direction in glass substrate plane, short transverse refers to the direction perpendicular to glass substrate plane, separately
Outside, the length direction of air floating platform and transmission device, width direction and short transverse are all the same in the present invention.In addition, in Fig. 2
Arrow be oriented to the direction of transfer of glass substrate.
As shown in Figure 1, air floating platform provided by the invention is used to place glass substrate, including from the bottom to top along short transverse
It is bonded the air inlet layer 10 stacked and gas-bearing formation 20, the top of air inlet layer 10 is formed with circumferentially closed groove, the bottom of the groove out
It is formed with the air inlet 11 for running through air inlet layer 10 along short transverse, to connect air inlet pipe fitting 40, equably cloth on gas-bearing formation 20 out
Equipped with along short transverse, through the venthole 21 for going out gas-bearing formation 20, venthole 21 is connected to by groove with air inlet 11.In this way, gas
It is first into groove by gas-tpe fitting, then is entered in venthole 21 via groove, since venthole 21 is uniformly distributed,
Guarantee that the air-flow for being used to support glass substrate equably flows out, glass substrate can be made to be steadily placed above air floating platform.It should
Air floating platform uses airflow supports glass substrate, is particularly suitable for the transmission of glass substrate, maximum by way of air supporting
Directly contacting for glass substrate and support device or transmission device etc. is avoided to limit, to solve to lead to glass because of friction
Scuffing, pollution and the problem on deformation of substrate.
Specifically, above-mentioned groove can be multiple, and each groove is formed with an air inlet 11, and multiple grooves are mutual
The top of air inlet layer 10, each independent type chamber of self-forming are set every ground, it can be ensured that the integral strength of 10 structure of air inlet layer needs
It is noted that each venthole 21 is held in the coverage of groove, i.e. the position of groove opened up according to venthole 21
Set, it is ensured that each venthole 21 can equably outlet, so that stablizing for glass substrate be kept to place.
Preferably, venthole 21 can be arranged on gas-bearing formation 20 out in the form of rectangular array, increase the number of venthole 21
Amount expands the coverage of venthole 21, so as to improve the uniformity of 21 outlet of venthole.
Further, groove may include the keyway 12 of multiple strips, length direction of the keyway 12 along air floating platform
Extend, that is, each keyway 12 can extend along the orientation of uniline venthole 21, so that it is guaranteed that each venthole 21 can be with
It is connected to groove, groove further includes the interconnecting part 13 between two adjacent in the direction of the width keyways 12, air inlet 11 and company
Logical portion 13 is connected.Specifically, as shown in Figure 1, two row ventholes 21 can be for example formed on gas-bearing formation 20 out, in air inlet layer 10
On also form the corresponding keyway 12 of two rows, what needs to be explained here is that, keyway 12 in every a line can be one or more,
Specific quantity is not specifically limited, in embodiment shown in fig. 1, together herein according to depending on air floating platform physical length
Keyway 12 in a line is 2, that is, 4 keyways 12 are integrally formed.It is arranged between two adjacent keyways 12 in the direction of the width
Interconnecting part 13, air inlet 11 are connected with the interconnecting part 13, due to venthole 21 correspond to keyway 12 setting, not directly with
Interconnecting part 13 is connected to, and the air-flow that this structure can flow into avoid air inlet 11 directly passes through keyway 12 and is flowed into venthole 21
In, and then biggish impact air-flow is generated, scratch glass substrate.Multiple keyways 12, which are arranged, can minimize opening for air inlet layer 10
Slot region, it is ensured that the integral strength of air inlet layer 10, in addition, the structure can also guarantee that each venthole 21 has gas simultaneously
Body equably flows out, so that stablizing for glass substrate be kept to place.
As shown in Figure 1, air inlet layer 10 and the out edge of the width direction of gas-bearing formation 20 can be evenly provided with multiple lead to respectively
Hole guarantees fitting closely for gas-bearing formation 20 and air inlet layer 10 out, prevents gas to be fastened into gas-bearing formation 10 and out gas-bearing formation 20 by screw element
It lets out in vitro.Specifically, in one embodiment, the through-hole on gas-bearing formation 20 is threaded hole out, and the through-hole on air inlet layer 10 is light
Hole is screwed into out in the threaded hole of gas-bearing formation 20 using screw from the unthreaded hole that 10 bottom of air inlet layer passes through air inlet layer 10, the end of screw
Gas-bearing formation 20 out are not stretched out in portion, so that it be avoided to scratch glass substrate.Air inlet layer 10 and out on gas-bearing formation 20 in another embodiment
Through-hole can be threaded hole, fastening effect can also be realized by screw element.In addition, the through-hole on gas-bearing formation 20 can be with out
For stepped hole, cascaded surface avoids screw element from stretching out gas-bearing formation 20 out for limiting to screw element.The present invention is to above-mentioned through-hole
Concrete form be not specifically limited, as long as meeting technical concept, be within the scope of the invention.
Further, as shown in Figure 1, being also provided with shunting layer 30, shunting layer 30 between air inlet layer 10 and out gas-bearing formation 20
Upper and lower ends be bonded out gas-bearing formation 20 and air inlet layer 10 respectively, shunting layer 30 is equipped with the tap hole 31 corresponding to venthole 21,
That is, initially entering in tap hole 31 from the gas that groove flows out, venthole 21 is entered back into, wherein tap hole 31 corresponds to venthole
21 settings avoid inclination from scratching to make glass substrate be bullied uniformly.
Specifically, the aperture of tap hole 31 is less than venthole 21, though gas in tap hole 31 can be completely into
Into venthole 21, and the aperture of venthole 21 is greater than tap hole 31, can play buffer function, avoid air-flow to glass base
Plate generates excessive impact.
Further, it is coated with fixed glue between air inlet layer 10 and shunting layer 30, such as can be high-intensitive double-sided adhesive, prevents
Only gas leak, air inlet layer 10, shunting layer 30 and out the edge of the width direction of gas-bearing formation 20 can be evenly provided with respectively it is multiple
Through-hole, to be fastened into gas-bearing formation 10, shunting layer 30 and gas-bearing formation 20 out, the concrete form of fastening and above-mentioned fastening by screw element
Air inlet layer 10 is similar with the form of gas-bearing formation 20 out, and details are not described herein again.
In addition, as shown in Fig. 2, glass substrate conveying device provided by the invention, comprising: air-floating apparatus, for placing glass
Glass substrate；Positioning device, for that glass substrate will be located in air-floating apparatus before transmitting glass substrate；And mobile dress
It sets, for driving glass substrate to move along air-floating apparatus.Wherein, air-floating apparatus includes the air bearing of pedestal and placement on the base
Platform, air floating platform are air floating platform provided by the invention, and air floating platform is multiple and adjacent air bearings of rectangular array
Platform fitting setting.The support range that air-floating apparatus can be expanded by the combination of multiple air floating platforms, can be according to different rulers
The air floating platform of very little glass substrate selection different number is combined.
Specifically, by the direction of transfer of glass substrate, i.e. the length direction of transmission device is defined as Y-axis, transmission device
Width direction is defined as X-axis, and positioning device may include the first cylinder 50 for positioning glass substrate in the longitudinal direction, and
The second cylinder 60 of glass substrate is positioned in the direction of the width.Wherein, the first cylinder 50 can be straight line cylinder, and be four
It is a, it is respectively used to that the quadrangle of glass substrate is arranged in, pushes glass substrate to specified Y-axis by the cooperation of four straight line cylinders
Position.Second cylinder 60 is rotary cylinder, and is two, is respectively used to the side being arranged in glass substrate width direction,
Adjust glass substrate arrives specified X-axis position, to ensure that mobile device (example vacuum chuck 70 described as follows) can drive glass
Glass substrate motion.It should be noted that the concrete form of the first cylinder 50 and the second cylinder 60 is common skill in the art
Art means, which is not described herein again.
As shown in Fig. 2, mobile device includes the vacuum chuck 70 that the side of air-floating apparatus width direction is arranged in, with from list
Glass substrate movement is adsorbed in side, and will not scratch glass baseplate surface.Specifically, in one embodiment, glass substrate
By before transmitting, glass substrate is navigated to by designated position by the first cylinder 50 and the second cylinder 60 first, keeps glass base
Plate surface is horizontal, and glass substrate edge is parallel with air floating platform edge, and vacuum chuck 70 adsorbs the side of glass substrate, very
Suction disk 70 drives glass substrate mobile under the action of external pushing meanss, to complete the transmission of glass substrate.
It is described the prefered embodiments of the present invention in detail above in conjunction with attached drawing, still, the present invention is not limited to above-mentioned realities
The detail in mode is applied, within the scope of the technical concept of the present invention, a variety of letters can be carried out to technical solution of the present invention
Monotropic type, these simple variants all belong to the scope of protection of the present invention.
It is further to note that specific technical features described in the above specific embodiments, in not lance
In the case where shield, can be combined in any appropriate way, in order to avoid unnecessary repetition, the present invention to it is various can
No further explanation will be given for the combination of energy.
In addition, various embodiments of the present invention can be combined randomly, as long as it is without prejudice to originally
The thought of invention, it should also be regarded as the disclosure of the present invention.
Claims (11)
1. a kind of air floating platform, for placing glass substrate, which is characterized in that stacked including being bonded from the bottom to top along short transverse
Air inlet layer (10), shunting layer (30) and gas-bearing formation (20) out, be formed with circumferentially closed groove at the top of the air inlet layer (10),
The bottom of the groove is formed with the air inlet (11) for running through the air inlet layer (10) along short transverse, to connect air inlet pipe fitting
(40), the venthole (21) along short transverse through gas-bearing formation (20) out, institute are equably laid on gas-bearing formation (20) out
It states shunting layer (30) and is equipped with the tap hole (31) for corresponding to the venthole (21), the aperture of the tap hole (31) is less than institute
It states venthole (21), the venthole (21) is connected by the tap hole (31) and the groove and the air inlet (11)
It is logical, it is coated with fixed glue between the air inlet layer (10) and shunting layer (30), the air inlet layer (10), shunting layer (30) and gas-bearing formation out
(20) edge of width direction is evenly provided with multiple through-holes respectively, to fasten the air inlet layer (10) by screw element, divide
Fluid layer (30) and out gas-bearing formation (20).
2. air floating platform according to claim 1, which is characterized in that the groove is multiple, the bottom of each groove
Portion is formed with the air inlet (11).
3. air floating platform according to claim 1, which is characterized in that the venthole (21) is set in the form of rectangular array
It sets on gas-bearing formation (20) out.
4. air floating platform according to claim 3, which is characterized in that the groove includes the keyway of multiple strips
(12), which extends along the length direction of the air floating platform, and the groove further includes adjacent in the direction of the width
Interconnecting part (13) between two keyways (12), the air inlet (11) are connected with the interconnecting part (13).
5. air floating platform according to claim 1, which is characterized in that the air inlet layer (10) and the out width of gas-bearing formation (20)
The edge in direction is evenly provided with multiple through-holes respectively, to fasten the air inlet layer (10) and out gas-bearing formation (20) by screw element.
6. a kind of air-floating apparatus, for placing glass substrate, which is characterized in that including the air bearing of pedestal and placement on the base
Platform, the air floating platform are the air floating platform according to any one of claim 1-5, and the air floating platform is rectangle
Multiple and adjacent air floating platforms of array are bonded setting.
7. a kind of glass substrate conveying device characterized by comprising
Air-floating apparatus, for placing the glass substrate；
Positioning device, for that the glass substrate will be located in the air-floating apparatus before transmitting the glass substrate；With
And
Mobile device, for driving the glass substrate to move along the air-floating apparatus,
The air-floating apparatus is according to air-floating apparatus as claimed in claim 6.
8. glass substrate conveying device according to claim 7, which is characterized in that the positioning device includes in length
Degree positions the first cylinder (50) of the glass substrate on direction, and positions the second gas of the glass substrate in the direction of the width
Cylinder (60).
9. glass substrate conveying device according to claim 8, which is characterized in that first cylinder (50) is straight line gas
Cylinder, and be four, it is respectively used to that the quadrangle of the glass substrate is arranged in.
10. glass substrate conveying device according to claim 8, which is characterized in that second cylinder (60) is rotation
Cylinder, and be two, it is respectively used to the side being arranged in the glass substrate width direction.
11. glass substrate conveying device according to claim 7, which is characterized in that the mobile device includes that setting exists
The vacuum chuck (70) of the side of the air-floating apparatus width direction, to adsorb the glass substrate movement from unilateral side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610489329.8A CN106044225B (en) | 2016-06-28 | 2016-06-28 | Air floating platform, air-floating apparatus and glass substrate conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610489329.8A CN106044225B (en) | 2016-06-28 | 2016-06-28 | Air floating platform, air-floating apparatus and glass substrate conveying device |
Publications (2)
| Publication Number | Publication Date |
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| CN106044225A CN106044225A (en) | 2016-10-26 |
| CN106044225B true CN106044225B (en) | 2019-05-31 |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106927258A (en) * | 2017-01-26 | 2017-07-07 | 江苏东旭亿泰智能装备有限公司 | A kind of conveyer and its transfer approach for glass substrate |
| CN106829475A (en) * | 2017-02-20 | 2017-06-13 | 东旭科技集团有限公司 | Glass substrate transmission equipment |
| CN107064175B (en) * | 2017-06-14 | 2019-11-01 | 福州东旭光电科技有限公司 | Off-line type glass substrate conveying device and glass substrate defect detecting device |
| CN108639758A (en) * | 2018-07-04 | 2018-10-12 | 江苏东旭亿泰智能装备有限公司 | A kind of air supporting transition apparatus and liquid crystal display conveying device |
| CN108861590B (en) * | 2018-08-17 | 2020-07-28 | 通彩智能科技集团有限公司 | Non-contact air floating platform |
| CN111747115A (en) * | 2019-03-29 | 2020-10-09 | 汉达精密电子(昆山)有限公司 | Non-contact air floatation positioning transfer jig and use method thereof |
| CN110911335B (en) * | 2019-11-13 | 2022-05-31 | 深圳市华星光电半导体显示技术有限公司 | Air-float supporting platform |
| CN112550807A (en) * | 2020-11-19 | 2021-03-26 | 福州东旭光电科技有限公司 | Glass substrate packaging device and method |
| CN114084648A (en) * | 2021-10-29 | 2022-02-25 | 江苏宏芯亿泰智能装备有限公司 | Substrate bearing device and substrate transfer system |
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| CN106044225A (en) | 2016-10-26 |
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Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Patentee after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Patentee after: WUHU DONGXU OPTOELECTRONIC EQUIPMENT TECHNOLOGY Co.,Ltd. Patentee after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 223800 178 JinJiHu Road, Suqian Economic Development Zone, Jiangsu Province Patentee before: JIANGSU DONGXU YITAI INTELLIGENT EQUIPMENT Co.,Ltd. Patentee before: WUHU DONGXU OPTOELECTRONIC EQUIPMENT TECHNOLOGY Co.,Ltd. Patentee before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20201229 Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Patentee after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Patentee before: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Patentee before: WUHU DONGXU OPTOELECTRONIC EQUIPMENT TECHNOLOGY Co.,Ltd. Patentee before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
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Application publication date: 20161026 Assignee: Sichuan Gaoyu Intelligent Equipment Technology Co.,Ltd. Assignor: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Contract record no.: X2022110000007 Denomination of invention: Air floating platform, air floating device and glass substrate conveyor Granted publication date: 20190531 License type: Common License Record date: 20220308 |
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