CN102157424A - Substrate conveying apparatus and substrate conveying method - Google Patents
Substrate conveying apparatus and substrate conveying method Download PDFInfo
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- CN102157424A CN102157424A CN201110025022XA CN201110025022A CN102157424A CN 102157424 A CN102157424 A CN 102157424A CN 201110025022X A CN201110025022X A CN 201110025022XA CN 201110025022 A CN201110025022 A CN 201110025022A CN 102157424 A CN102157424 A CN 102157424A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a substrate conveying apparatus and a substrate conveying method which shortens the time for conveying a substrate to a place where the conveying starts in a substrate processing device which horizontally conveys substrates to be processed one by one, and improve production efficiency. The substrate conveying apparatus comprises a suspension objective table for suspending a substrate to be processed; a pair of guide rails parallelly arranged at the left and right sides of the suspension objective table; a plurality of substrate holders movable along the guide rails and absorbing and holding the edges of the substrate to be processed from lower part; an aligning component which is freely movable from a standby position of the substrate being moved to a starting position on the suspension objective table to a prescribed position, and contacts with the substrate to move the substrate to the prescribed position; a substrate supporting component which supports the substrate moved to the prescribed position by the aligning component from the starting position of the suspension objective table; and a control portion which controls actions of the substrate holders, the aligning component and the substrate supporting component.
Description
Technical field
The present invention relates to flatly carry the base board delivery device and the substrate carrying method of processed substrate.
Background technology
For example, in the manufacturing of FPD (flat-panel monitor), carry out forming the operation of circuit pattern by so-called photo-mask process.
Above-mentioned photo-mask process carries out specifically as follows.
At first, form the film of regulation on processed substrates such as glass substrate, afterwards, coating is as the photoresist of treatment fluid (below be called resist) and form resist film.Then, accordingly resist film is exposed, and the resist film after the exposure is carried out development treatment with circuit pattern.
But, in recent years, in this photo-mask process, for the purpose of boosting productivity, adopt on one side with the state of approximate horizontal posture carries processed substrate processed of this processed substrate to be implemented the structure of each processing such as coating, drying, heating, cooling processing of resist on one side more.
The structure of carrying as aforesaid substrate makes substrate floating carry to the height of regulation and along the suspension that the substrate throughput direction is carried with the state of approximate horizontal posture and receives much concern.
Adopt this suspension substrate conveying conveying device, as patent documentation 1 disclosed ground, for example be used in the resist-coating processing unit.According to Fig. 8 this configuration example in the past is described.In addition, (a)～Fig. 8 of Fig. 8 (c) is the figure of the operate condition of expression base board delivery device.
The base board delivery device 200 of Fig. 8 has: suspend with objective table 201, it is used for suspending along X-direction and carries glass substrate G as processed substrate (for example LCD use substrate); Pair of guide rails 202, it is laid on the left and right sides that suspends with objective table 201 on the direct of travel of above-mentioned glass substrate G; 4 substrates carry gripping member 203, and it keeps near four angles of glass substrate G from below absorption, and slide on guide rail 202 and move.
The a plurality of gas ejection ports 201a that on suspending, alternately are respectively equipped with the gas that is used for spraying upward regulation with predetermined distance with the upper surface of objective table 201 be used to carry out air-breathing a plurality of air entry 201b.And, be constant by the pressure load between the gas flow that makes the gas blowing amount that ejects from gas ejection ports 201a and suck from air entry 201b, and glass substrate G is floated to the height of stipulating with the surface of objective table 201 from suspending.
In addition, move into H place, position in suspension with the substrate of objective table 201, be provided with in the left and right sides with objective table 201 of suspending respectively and corresponding 4 alignment devices 204 in four angles of the glass substrate G that moves into, by each alignment device 204 being worked and glass substrate G being configured in assigned position.
In addition, for this base board delivery device 200 is applied to be coated with processing unit, as shown in the figure, this base board delivery device 200 has the resist nozzle 205 that the left and right directions across glass substrate G disposes (Width), and this resist nozzle 205 is used for the surface of the glass substrate G that carried with suspending on the objective table 201 to suspending and supplies with resist liquid.
In the base board delivery device 200 that constitutes like this, the glass substrate G at the device of the past operation transports carries out contraposition operation (being called aligning) by alignment device 204 before substrate is carried beginning.About this alignment process, describe according to the flow chart of (a) and (b), (c) and Fig. 9 of Fig. 8.
At first, the substrate conveying of having finished 1 glass substrate G along guide rail 202 is carried gripping member 203, and turning back to like that shown in Fig. 8 (a) in order to receive the glass substrate G that the next one transports suspends moves into position H place standby (the step SP1 of Fig. 9) with the substrate of objective table 201.
Then, shown in Fig. 8 (b), when moving into new glass substrate G, the 204a of tentacle portion of alignment device 204 rises at the height that suspends with the glass substrate G that suspends on the objective table 201, and beginning to glass substrate G side (promptly inboard) mobile and with four angles of glass substrate G be close (the step SP2 of Fig. 9).
Thus, the 204a of tentacle portion of alignment device 204 contacts with four angles of glass substrate G, and glass substrate G is pressed and moves to assigned position, carries out contraposition.When this contraposition of glass substrate G was finished, the sucker 203a that substrate carries gripping member 203 rose, and adsorbs four angles (the step SP3 of Fig. 9) that keep glass substrate G shown in Fig. 8 (c) like that.
In addition, because glass substrate G is carried gripping member 203 when keeping by substrate, the position of glass substrate G can not be offset, and therefore, the 204a of tentacle portion of alignment device 204 leaves and returns (the step SP4 of Fig. 9) to position of readiness from glass substrate G.
Then, substrate carries gripping member 203 and moves to directions X along guide rail 202, thereby is suspending with carrying glass substrate G on the objective table 201, glass substrate G by resist nozzle 205 below the time, carry out the coating (the step SP5 of Fig. 9) of resist liquid.
Then, after having carried glass substrate G, substrate carries gripping member 203 and is back to substrate and moves into position H, places position of readiness (the step SP1 of Fig. 9).
Patent documentation 1: TOHKEMY 2006-237482 communique
As mentioned above, in the aligning of glass substrate G, glass substrate G is remained under the state of assigned position, carry out the absorption maintenance that substrate carries gripping member 203 at the 204a of tentacle portion that utilizes alignment device 204.Therefore, make the position non-migration of glass substrate G just can carry gripping member 203 conveying substrates by substrate.
But, in the structure of aforesaid substrate conveying device 200, have such technical task: substrate carry gripping member 203 turn back to substrate implement before moving into position H the next glass substrate G that transports on time, move into the 204a of the tentacle portion interference that substrate that position H returns carries gripping member 203 and alignment device 204 to substrate.
Therefore, in the past, as the flowchart text of above-mentioned Fig. 9, carried gripping member 203 and turned back to the aligning operation that substrate carries out alignment device 204 after moving into position H having finished the substrate substrate conveying.
But, in this case, there is such technical task: suspending with after carrying 1 glass substrate G on the objective table 201, if do not wait for that substrate carries gripping member 203 and turns back to substrate and move into the time of position H and the time of aligning, just can not begin the conveying of next substrate, productivity ratio reduces.
Summary of the invention
The present invention makes in view of the problem points of aforesaid conventional art, and it is provided at flatly to carry can shorten from substrate in the substrate board treatment of processed substrate with 11 ground of form of opening moves into productive temp time and base board delivery device of boosting productivity and the substrate carrying method of carrying beginning.
In order to solve above-mentioned problem, base board delivery device of the present invention is the substrate board treatment with 11 ground of the form horizontal feed substrate of opening, it is characterized in that this base board delivery device has: suspend and use objective table, it utilizes the injection of gas that aforesaid substrate is suspended; Guide rail, it is configured in the side of above-mentioned suspension with objective table; Substrate carries gripping member, and it is set to and can moves along above-mentioned guide rail, can keep the edge part of aforesaid substrate from below absorption; Aligning parts, it is set to freely be advanced and retreat from the position of readiness to the assigned position with respect to moving into the aforesaid substrate that above-mentioned suspension moves into the position with the substrate of objective table, contacts with aforesaid substrate and this substrate is configured in assigned position; The substrate supporting parts, it is moved into the position in above-mentioned suspension and support the aforesaid substrate that is configured in assigned position by above-mentioned aligning parts below this substrate with the substrate of objective table; Control part, it is used to control the action that aforesaid substrate carries gripping member, above-mentioned aligning parts and aforesaid substrate support unit; Above-mentioned control part is controlled, make finished aforesaid substrate that substrate carries carry gripping member turn back to above-mentioned suspension move into the substrate of objective table the position during in, above-mentioned aligning parts carries out aforesaid substrate is configured in the contraposition of assigned position, and the aforesaid substrate support unit from below supporting by the aforesaid substrate after the contraposition, and above-mentioned aligning parts turns back to aforesaid substrate and carries the position of readiness that gripping member does not interfere with each other.
Like this, because have the substrate supporting parts that are used for temporarily keeping the processed substrate after the alignment process, be back to suspend and just can implement the aligning of substrate before moving into the position with the substrate of objective table so carry gripping member at substrate.
Promptly, not needing as in the past to carry gripping member at substrate turns back to suspend and aims at after moving into the position with the substrate of objective table again, substrate carries gripping member to be moved into the position and can keep substrate at once and begin conveying substrate once turning back to substrate, therefore can shorten from substrate and move into the productive temp time of carrying beginning and boost productivity.
In addition, in order to solve above-mentioned problem, substrate carrying method of the present invention be in base board delivery device with the substrate carrying method of 11 ground of the form horizontal feed substrate opened, this base board delivery device has: suspend and use objective table, it utilizes the injection of gas to make the substrate suspension; Guide rail, it is configured in the side of above-mentioned suspension with objective table; Substrate carries gripping member, and it is set to and can moves along above-mentioned guide rail, can keep the edge part of aforesaid substrate from below absorption; Aligning parts, it is set to freely be advanced and retreat from the position of readiness to the assigned position with respect to moving into the aforesaid substrate that above-mentioned suspension moves into the position with the substrate of objective table, contacts with aforesaid substrate and this substrate is configured in assigned position; The substrate supporting parts, it is moved into the position in above-mentioned suspension and support the aforesaid substrate that is configured in assigned position by above-mentioned aligning parts below this substrate with the substrate of objective table; Control part, it is used to control the action that aforesaid substrate carries gripping member, above-mentioned aligning parts and aforesaid substrate support unit; It is characterized in that, this substrate carrying method comprises following operation: finished along above-mentioned guide rail aforesaid substrate that substrate carries carry gripping member be back to for the substrate that receives the next one and transport above-mentioned suspension move into the substrate of objective table the position during in, utilize above-mentioned aligning parts to carry out and will newly move into the contraposition that substrate that above-mentioned suspension moves into the position with the substrate on the objective table is configured in assigned position; Utilize the aforesaid substrate support unit to support from the below by the aforesaid substrate after the contraposition; Under the state that utilizes aforesaid substrate support unit supporting aforesaid substrate, make above-mentioned aligning parts turn back to position of readiness.
Adopt this method, utilize the processed substrate after the substrate supporting parts can temporarily keep aiming at, therefore, carry gripping member at substrate and turn back to suspend and just can implement the aligning of substrate before moving into the position with the substrate of objective table.
Promptly, not needing as in the past to carry gripping member at substrate turns back to suspend and aims at after moving into the position with the substrate of objective table again, substrate carries gripping member to be moved into the position and can keep substrate at once and begin carrying once turning back to substrate, therefore can shorten from substrate and move into the productive temp time of carrying beginning and boost productivity.
Adopt the present invention, can obtain in substrate board treatment, can shorten and move into productive temp time and base board delivery device of boosting productivity and the substrate carrying method of carrying beginning from substrate with the processed substrate of form 11 ground horizontal feed opened.
Description of drawings
Fig. 1 is the vertical view of whole schematic configuration of the base board delivery device of expression the 1st execution mode of the present invention.
Fig. 2 is the cutaway view of whole schematic configuration of the base board delivery device of expression the 1st execution mode of the present invention.
Fig. 3 is that the A-A of base board delivery device of Fig. 2 is to looking cutaway view.
Fig. 4 is that the B-B of base board delivery device of Fig. 2 is to looking cutaway view.
Fig. 5 is the flow chart of action of the base board delivery device of expression the 1st execution mode of the present invention.
Fig. 6 is the vertical view of action that is used to illustrate the base board delivery device of the 1st execution mode of the present invention.
Fig. 7 is the vertical view of action that is used to illustrate the base board delivery device of the 1st execution mode of the present invention.
Fig. 8 is the vertical view that is used to illustrate the schematic configuration of base board delivery device in the past.
Fig. 9 is the flow chart of flow process of representing the action of base board delivery device in the past.
Figure 10 is the integrally-built vertical view of the base board delivery device of the 2nd execution mode of the present invention.
Figure 11 is the vertical view of sorter of the present invention.
Figure 12 is the end view of sorter of the present invention.
Figure 13 is the key diagram of the matched tube structure that is connected with sucker of the present invention.
Figure 14 is the vertical view of aligning parts of the present invention.
Figure 15 is the end view of aligning parts of the present invention.
Figure 16 is the end view that substrate of the present invention carries gripping member.
Figure 17 is the key diagram of the matched tube structure that is connected with adsorption element of the present invention.
Figure 18 is the end view of of the present invention year gripping member supporting member.
Figure 19 is the key diagram of the matched tube structure that is connected with of the present invention year gripping member supporting member.
Figure 20 is the key diagram of the alignment pin of the 3rd execution mode of the present invention.
Figure 21 is the of the present invention the 1st and the key diagram of the alignment pin of the 2nd execution mode.
Embodiment
Below, the 1st execution mode of base board delivery device of the present invention is described according to Fig. 1～Fig. 7.In addition, in the 1st execution mode, be that example describes with the situation that base board delivery device is applied to the glass substrate as processed substrate is carried out the resist-coating processing unit of resist-coating.
This base board delivery device 1 has: suspension delivery section 2A, and it is used for carrying glass substrate G with 11 the ground suspension of form of opening; Roller delivery section 2B, it receives glass substrate G and carries out the roller conveying from above-mentioned suspension delivery section 2A; This base board delivery device 1 constitutes so-called horizontal feed glass substrate G.
On above-mentioned suspension delivery section 2A, be provided with the suspension objective table 3 that extends along directions X as the substrate throughput direction.As shown in the figure, suspending with on the upper surface of objective table 3, alternately be provided with a plurality of gas vent 3a and gas suction inlet 3b along directions X and Y direction with predetermined distance, by making the pressure load between the gas flow that sucks from the spray volume of the not active gases of gas vent 3a and from gas suction inlet 3b is constant, and glass substrate G is suspended.In addition, in the 1st execution mode, utilize the ejection of gas and suction that glass substrate G is suspended, but be not limited thereto, also can only utilize the structure of gas ejection that substrate is suspended.
In addition, be provided with the pair of guide rails 5 of extending abreast in above-mentioned suspension with the side, the left and right sides of the Width (Y direction) of objective table 3 along directions X.On this pair of guide rails 5, be provided with the edge part at four angles of adsorbing maintenance glass substrate G from the below and carry gripping member 6 at guide rail 54 mobile substrates.Utilize these substrates to carry gripping member 6 and make that being suspended in suspends moves along throughput direction with the glass substrate G on the objective table 3.In addition, in order successfully to carry out transferring substrate from suspension delivery section 2A way roller delivery section 2B, guide rail 5 not only is arranged on the side, the left and right sides that suspends with objective table 3, also extends the side that is set to roller delivery section 2B.
As shown in Figure 3, each substrate carries gripping member 6 and comprises: be set to the sliding component 6a that can move along guide rail 5; By attracting, decontrol the adsorption element 6b that action can be adsorbed in the lower surface of glass substrate G; Be used to make the cylinder body drive division 6c of adsorption element 6b lifting moving.
In addition, be connected with suction pump (not shown) on adsorption element 6b, the air by the zone that attracts to contact with glass substrate G makes this zone near vacuum state, thereby adsorption element 6b is adsorbed on the glass substrate G.
In addition, utilize the control part 50 that constitutes by computer to control the driving of above-mentioned sliding component 6a, cylinder body drive division 6c and above-mentioned suction pump respectively.
In addition, as shown in Figure 1 and Figure 2, locate in the position (substrate is moved into position H) that suspension is moved into glass substrate G with the device of the past operation on the objective table 3, the glass substrate G that carries out moving into is configured in the contraposition operation (aligning) of assigned position.Therefore, move into the left and right sides of position H with the substrate of objective table 3 suspending, to be provided with 4 alignment devices 7 with the corresponding respectively mode in four angles of glass substrate G.
Each alignment device 7 have be set to can be respectively from the side near and contact the tentacle member 7a (aligning parts) at four angles (bight) of glass substrate G.In addition, for above-mentioned tentacle member 7a can be contacted with four angles of glass substrate G, as shown in Figure 4, each alignment device 7 has the cylinder body drive division 7b and the cylinder body drive division 7c that is used to make tentacle member 7a advance and retreat mobile with respect to glass substrate G level that is used to make tentacle member 7a lifting (along the Y direction).In addition, utilize control part 50 to control the driving of above-mentioned cylinder body drive division 7b, 7c.
In addition, in this base board delivery device 1, have can lifting fulcrum post mechanism 8 (substrate supporting parts), this fulcrum post mechanism 8 is used for utilizing glass substrate G after alignment device 7 contrapositions from the below supporting.This fulcrum post mechanism 8 is arranged at respectively near four angles of the glass substrate G after suspension is moved into position H place contraposition with the substrate of objective table 3.
Specifically, as Fig. 2, shown in Figure 4, each fulcrum post mechanism 8 has that be set to can be from suspending with the surface of the objective table 3 fulcrum post 8a of outstanding given size (for example 0.5mm) and be used to make the cylinder body drive division 8b (lifting drive division) of fulcrum post 8a lifting moving only upward.In addition, utilize control part 50 to control the driving of cylinder body drive division 8b.
In addition, be provided with the nozzle 9 that is used for to glass substrate G ejection resist liquid in the suspension of base board delivery device 1 on objective table 3.Nozzle 9 forms along the long for example rectangular shape roughly of Y direction.In addition, nozzle 9 for example forms longer than the width of the Y direction of glass substrate G.As shown in Figure 2, be formed with the ejiction opening 9a of slit-shaped in the bottom of nozzle 9, supply with resist liquid to this nozzle 9 from resist liquid supply source (not shown).
As shown in Figure 1, be formed with the guide rail 10 that extends along directions X in the both sides of nozzle 9.The nozzle arm 11 that utilization is moved on guide rail 10 keeps nozzle 9.This nozzle 9 utilizes the driving mechanism with nozzle arm 11 to move to directions X along guide rail 10.
In addition, on nozzle arm 11, be provided with elevating mechanism, nozzle 9 can lifting to the height of regulation.By this structure, as shown in Figure 2, nozzle 9 can to the ejection position of glass substrate G ejection resist liquid with mobile between the rotation roller 12 of this ejection position upstream side and standby portion 14.
Above-mentioned rotation roller 12 can be in axis be contained in clean container 13 rotatably.
In addition, when cleaning the ejiction opening 9a of nozzle 9 shown in Figure 2, make the ejiction opening 9a of nozzle 9 approaching with the topmost of rotation roller 12.Then, while make 12 rotations of rotation roller spray the resist liquid to rotation roller 12 from ejiction opening 9a, thus the attachment state unanimity of the resist liquid among the ejiction opening 9a of nozzle 9.Thus, can make the ejection of the resist liquid among the ejiction opening 9a of nozzle 9 in stable condition.
The standby portion 14 that more is provided with nozzle 9 at above-mentioned rotation roller 12 by upstream side.This standby portion 14 for example have washer jet 9 function, prevent the function of nozzle 9 dryings.
In addition, as mentioned above, be provided with roller delivery section 2B in the back one-level of above-mentioned suspension delivery section 2A.On this roller delivery section 2B, be provided with the many roller shafts 16 that driven by 25 rotations of roller drive division side by side in the back one-level that suspends with objective table 3.A plurality of conveying rollers 17 are installed on each roller shaft 16, utilize the rotation of these conveying rollers 17 to carry glass substrate G.
Then, the alignment process that glass substrate G is carried out in the base board delivery device 1 that constitutes like this along the flow chart of Fig. 5 and Fig. 6,7 explanations.
In base board delivery device 1, utilize substrate to carry gripping member 6 and 11 ground of glass substrate G is transported to suspends, the surface coated of glass substrate G resist liquid from nozzle 9 ejections with on the objective table 3.
Then, the glass substrate G that will carry on suspending with objective table 3 hands on the roller delivery section 2B, and substrate carries gripping member 6 and is transported to suspension and begins to be back to substrate with the glass substrate G on the objective table 3 and move into position H (the step S1 of Fig. 5) in order to receive the next one.
On the other hand, shown in Fig. 6 (a), move into H place, position in suspension with the substrate of objective table 3 and newly move into glass substrate G.At this, on suspending, spray not active gases and suck not active gases, thereby form the not air-flow of active gases from gas suction inlet 3b from gas vent 3a with objective table 3.Utilization is formed on the air-flow that suspends with the above-mentioned not active gases on the objective table 3 and supports the above-mentioned glass substrate G that moves into from the below.
Utilize cylinder body drive division 7b to make the tentacle member 7a of alignment device 7 rise to the hoverheight of glass substrate G, and utilize tentacle member 7a that cylinder body drive division 7c makes alignment device 7 to move horizontally in the contacted mode in bight with four angles of glass substrate G with respect to the above-mentioned glass substrate G that newly moves into.Thus, glass substrate G moves to and suspends with the assigned position on the objective table 3 and carry out contraposition (similarly being the step S1 of Fig. 5).Like this, in the present embodiment, shown in Fig. 6 (b), carry gripping member 6 at substrate and turn back to substrate and implement to aim at before moving into position H.
When finished to the glass substrate G that moves into carry out on time, in 4 fulcrum post mechanisms 8, fulcrum post 8a utilizes cylinder body drive division 8b rise to move, and utilizes 4 fulcrum post 8a from below supporting glass substrate G (the step S2 of Fig. 5).
When utilizing fulcrum post 8a that glass substrate G is remained on assigned position, shown in Fig. 6 (c), utilize cylinder body drive division 7b that the tentacle member 7a of alignment device 7 descend to be moved, utilize tentacle member 7a that cylinder body drive division 7c makes alignment device 7 to move and make it return (the step S3 of Fig. 5) again to position of readiness to the left and right directions of glass substrate G.In addition, the position of readiness of this alignment device 7 is positioned at substrate and carries the position that gripping member 6 does not interfere with each other.
At this, after above-mentioned steps S3, though alignment device 7 turns back to position of readiness, glass substrate G is supported pin 8a and supports from the below, so glass substrate G can not move because of being formed on the air-flow that suspends with the not active gases on the objective table 3.That is, glass substrate G can not be maintained to the occurrence positions skew assigned position.In addition, glass substrate G supports from the below owing to being formed on the air-flow of above-mentioned suspension with the not active gases on the objective table 3, so can be crooked.
When the tentacle member 7a of alignment device 7 turned back to its position of readiness reliably as described in the above-mentioned step S3, substrate carried gripping member 6 and does not interfere with each other just to finish to substrate with alignment device 7 and move into moving of position H.
Turning back to substrate moves into adsorption element 6b that the substrate of position H carries gripping member 6 and utilizes cylinder body drive division 6c to rise to move, shown in Fig. 7 (a), utilize adsorption element 6b to keep the edge part (the step S4 of Fig. 5) of glass substrate G from below absorption.
In addition, when utilizing substrate to carry gripping member 6 maintenance glass substrate G, control part 50 utilizes cylinder body drive division 8b that the fulcrum post 8a of each fulcrum post mechanism 8 is descended and moves, and removes the bearing state of fulcrum post 8a.
Then, shown in Fig. 7 (b), utilize substrate to carry gripping member 6 glass substrate G is being suspended with mobile (the step S5 of Fig. 5) on the objective table 3 along guide rail 5, and from nozzle 9 ejection resist liquid, painting erosion resistant agent liquid on substrate surface.
As mentioned above, adopt the 1st execution mode of the present invention, owing to have the fulcrum post mechanism 8 that is used for temporary transient glass substrate G after keeping aiming at, therefore, carry gripping member 6 at substrate and turn back to suspend and just can implement the aligning of the glass substrate G that the next one moves into before moving into position H with the substrate of objective table 3.
Promptly, do not need as in the past, to carry the aligning of implementing the next glass substrate G that transports after gripping member 6 turns back to suspension to move into position H with the substrate of objective table 3 again at substrate, substrate carries gripping member 6 to be moved into position H and can utilize substrate to carry gripping member 6 immediately to keep glass substrate G and begin carrying once turning back to substrate, therefore can shorten from substrate and move into the productive temp time of carrying beginning and boost productivity.
The 2nd execution mode of base board delivery device of the present invention then, is described.In addition, for the identical place of above-mentioned the 1st execution mode, omit explanation.
Figure 10 illustrates the base board delivery device 61 of the 2nd execution mode.In Figure 10, carry glass substrate G along directions X.Previous stage side (upstream side of substrate throughput direction) at suspension delivery section 2A is provided with roller delivery section 2C.Roller delivery section 2C is provided with the many roller shafts 63 that driven by 62 rotations of roller drive division side by side in the previous stage that suspends with objective table 3.On each roller shaft 63, be provided with conveying roller 64.
In addition, base board delivery device 61 has and is used for the glass substrate G on the conveying roller 64 is transported to substrate transfer unit, for example sorter (sorter) 65 that suspends with on the objective table 3.Shown in Figure 10～12, sorter 65 has and is used to adsorb the sucker 66, the sucker Lift Part 67 that is used to make sucker 66 liftings that keep glass substrate G, is used to sucker moving-member 68 that sucker 66 and sucker Lift Part 67 are moved along directions X.In addition, as shown in figure 13, sucker 66 is connected with suction pump 86 by pipe arrangement 85.In addition, the triple valve 87 that is used for two-way switching stream being provided with of pipe arrangement 85 midway, and, between sucker 66 and triple valve 87, be provided with the two-way valve 88 of freely openable.One end of pipe arrangement 89 is connected with this triple valve 87, and the other end of pipe arrangement 89 is connected with pressurized gas supply source 90.Thereby, by opening two-way valve 88 and switch three-way valve 87, sucker 66 is connected with suction pump 86 and adsorb maintenance glass substrate G or sucker 66 is connected with pressurized gas supply source 90 and removes the absorption of glass substrate G to sucker 66 supply gas-pressurizeds.In addition, utilize the control part 50 that constitutes by computer to control the driving of sucker Lift Part 67, sucker moving-member 68, triple valve 87, two-way valve 88 respectively.
In addition, in the present embodiment, suspending with on the objective table 3, dispose respectively accordingly respectively with four angles of glass substrate G and to be used for the glass substrate G contraposition that to move into alignment pin 69,70,71,72, dispose two aligning parts respectively at each angle at four angles of glass substrate G as aligning parts to the position of regulation.
Shown in Figure 10,14, aligning parts has the alignment pin moving-member 73 that is used to make alignment pin 69,70,71,72 to move along the direction with each limit quadrature of glass substrate G.In addition, on the relative alignment pin 70 of glass substrate G and alignment pin 69, between alignment pin moving-member 73 and alignment pin 70, be provided with the spring 74 that can freely stretch, avoiding when alignment pin 70 except alignment pin moving-member 73 also contacts with glass substrate G, the load that 73 couples of glass substrate G of alignment pin moving-member apply is excessive.On the relative alignment pin 72 of glass substrate G and alignment pin 71, between alignment pin 72 and alignment pin moving-member 73, be provided with spring 74 similarly.
In addition, as shown in figure 15, aligning parts has the alignment pin Lift Part 77 that is used to make alignment pin 69,70,71,72, spring 74 and 73 liftings of alignment pin moving-member.
And, make 77 actions of alignment pin Lift Part and alignment pin 69,70,71,72 is risen, afterwards, make alignment pin moving-member 73 action and make alignment pin 69,70,71,72 and glass substrate G near and contact, thereby the position that glass substrate G contraposition can stipulated.In addition, utilize the control part 50 that constitutes by computer to control the driving of alignment pin moving-member 73 and alignment pin Lift Part 77 respectively.
In addition, as shown in figure 10, each substrate carries gripping member 6 to have and is set to the sliding component 6a that can move along guide rail 5 and by attracting to decontrol the adsorption element 6b that action can be adsorbed in the lower surface of glass substrate G.In addition, as shown in figure 16, each substrate carries gripping member 6 to have and is used to make the adsorption element Lift Part 6d of adsorption element 6b with respect to sliding component 6a lifting.
Adsorption element Lift Part 6d can remain on adsorption element 6b 3 height.The position that adsorption element 6b is the highest is absorption, the position (this position is called seizure (catch) position) when keeping glass substrate G.The position of the intermediate altitude of adsorption element 6b is the position (this position is called the processing position) of (being in the present embodiment when glass substrate G painting erosion resistant agent) when glass substrate G is carried out predetermined process.The position (this position is called the off-position) that the position that adsorption element 6b is minimum is adsorption element 6b when the lower surface of glass substrate G leaves.
In addition, as shown in figure 17, suction pump 95 is connected with adsorption element 6b, attracts the air in the zone contact with glass substrate G and makes this zone near vacuum state, thereby can adsorb glass substrate G, between adsorption element 6b and suction pump, be provided with the decompression transducer 96 that is used to detect pressure relief value.In addition, between suction pump 95 and decompression transducer 96, be provided with the two-way valve 97 that is used to open and close stream.
In addition, utilize the control part 50 that constitutes by computer to control the driving of sliding component 6a, adsorption element Lift Part 6d, two-way valve 97 respectively, the measured value of decompression transducer 96 is delivered to control part 50.
In addition, the upper surface of adsorption element 6b (surface of absorption glass substrate G) can rotate around X-axis and Y-axis with adjusting, and adsorption element 6b can adsorb and keep glass substrate G.
In addition, as shown in figure 10, between the adsorption element 6b of X-direction and adsorption element 6b, have and be used to adsorb a plurality of years gripping member supporting members 75 that keep substrate and can make this year gripping member supporting member 75 carry gripping member supporting member sliding component 76 along what guide rail 5 moved.As shown in figure 18, also has year gripping member supporting member Lift Part 78 that is used to make year gripping member supporting member 75 with respect to carrying gripping member supporting member sliding component 76 lifting moving.
In addition, as shown in figure 19, suction pump 101 is connected with a year gripping member supporting member 75, attract the air in the zone contact with glass substrate G and make this zone near vacuum state, thereby can adsorb glass substrate G, between year gripping member supporting member 75 and suction pump, be provided with the decompression transducer 102 that is used to detect pressure relief value.In addition, between suction pump 101 and decompression transducer 102, be provided with the two-way valve 103 that is used to open and close stream.
In addition, the upper surface (surface of absorption glass substrate G) that carries gripping member supporting member 75 can only rotate around X-axis with adjusting, carries gripping member supporting member 75 and can adsorb maintenance glass substrate G.
As mentioned above, adsorption element 6b can rotate around X-axis and Y-axis with adjusting, carrying gripping member supporting member 75 can only rotate around X-axis with adjusting, by formation like this, can utilize simple structure to adsorb reliably by an adsorption element 6b and a year gripping member supporting member 75 and keep glass substrate G.
In addition, carry gripping member supporting member Lift Part 78 and can remain on 3 height carrying gripping member supporting member 75.Carrying gripping member supporting member 75 the highest positions is absorption, the position (this position is called catching position) when keeping glass substrate G.The position of carrying the intermediate altitude of gripping member supporting member 75 is the position of (being in the present embodiment when glass substrate G painting erosion resistant agent) when glass substrate G is carried out predetermined process (this position is called the processing position).Carry gripping member supporting member 75 minimum positions and be and carry the position (this position be called off-position) of gripping member supporting member 75 when the lower surface of glass substrate G leaves.
In addition, the driving of utilize the control part 50 that is made of computer control respectively and carry a gripping member supporting member sliding component 76, carrying gripping member supporting member Lift Part 78, two-way valve 103 is delivered to control part 50 with the measured value of the transducer 102 that reduces pressure.
The action of the base board delivery device 61 in the 2nd execution mode then, is described.
If glass substrate G is transported to the assigned position of roller delivery section 2C, roller drive division 62 is stopped, thereby the mobile of glass substrate G stopped.Then,, make sucker 66 move to the assigned position of the bottom of glass substrate G in the position that the sucker 66 of sorter 65 descends, afterwards, the attraction action of beginning sucker 66.Then, utilize sucker Lift Part 67 that sucker 66 is risen, utilize sucker 66 absorption to keep the lower surface of glass substrate G.
Then, begin to spray not active gases, begin to attract not active gases, sorter 65 is moved along X-direction, glass substrate G is delivered to substrate moves into position H from gas suction inlet 3b from gas vent 3a.
Then, the absorption of removing glass substrate G from sucker 66 ejection gas-pressurizeds keeps, and makes 77 actions of alignment pin Lift Part and alignment pin 69,70,71,72 is risen.Afterwards, make alignment pin moving-member 73 action and make alignment pin 69,70,71,72 and glass substrate G near also contacting, with glass substrate G contraposition at assigned position.In addition, at this moment,, glass substrate G remained on from suspending float to the state of the height of stipulating with the surface of objective table 3 by balance from not active gases with the not active gases that sucks from gas suction inlet 3b of gas vent 3a ejection.
Then, stop sucker 66 being descended, sucker 66 is left from the lower surface of glass substrate G from sucker 66 ejection gas-pressurizeds.Then, sorter 65 moves to original position in order to prepare to carry next glass substrate G.
Then, make alignment pin moving-member 73 action, alignment pin 69 and 70 is moved horizontally and leave, afterwards, utilize alignment pin Lift Part 77 that alignment pin 69 and 70 is descended from glass substrate G.In addition, at this moment, alignment pin 71 and 72 not from glass substrate G leave and keep with glass substrate G near and state of contact.
By alignment pin 71 and 72 being kept the approaching and state of contact with glass substrate G, the position of glass substrate G can not be offset, and glass substrate G can be remained on the position of regulation.
In addition, because alignment pin 69 and 70 is left from glass substrate G, rub mutually with glass substrate G and cause producing particulate so can prevent alignment pin 69,70.
Then, utilizing adsorption element Lift Part 6d and carrying gripping member supporting member Lift Part 78 makes an adsorption element 6b and a year gripping member supporting member 75 be positioned at the off-position, afterwards, make sliding component 6a and carry 76 actions of gripping member supporting member sliding component and make adsorption element 6b and carry the below that gripping member supporting member 75 moves to glass substrate G.Then, beginning adsorption element 6b and the attraction action of carrying gripping member supporting member 75, make adsorption element Lift Part 6d and carry 78 actions of gripping member supporting member Lift Part, make the height and position of adsorption element 6b and year gripping member supporting member 75 rise to catching position, utilize adsorption element 6b and carry 75 absorption of gripping member supporting member to keep glass substrate G.
Then, be arranged on adsorption element 6b and carry gripping member supporting member 75 reach the pressure relief value of regulation with decompression transducer between the suction pump (not shown) after, alignment pin moving-member 73 is moved, alignment pin 71 and 72 is left from glass substrate G along continuous straight runs.
Then, make the height of adsorption element 6b and year gripping member supporting member 75 drop to the processing position, and alignment pin 71 and 72 is descended.Then, make sliding component 6a and carry 76 actions of gripping member supporting member sliding component, carry glass substrate G along directions X.
By aforesaid the 2nd execution mode, can shorten glass substrate G from moving into to the productive temp time of carrying beginning and boosting productivity.
Then, the 3rd execution mode of the present invention is described.In addition, for the identical place of the 1st and the 2nd execution mode, omit explanation.In the 3rd execution mode, primary study the shape of alignment pin.
As shown in figure 20, the alignment pin 80 of present embodiment is characterised in that it is truncated conical shape, be provided with on the inclined plane part of this round platform when being used in the position that glass substrate G is positioned to stipulate with glass substrate G near and the stage portion 81 that contacts.Replace the alignment pin 69,70,71,72 in the 2nd execution mode, also can use the alignment pin 80 of present embodiment.
As shown in figure 21, above-mentioned alignment pin 69,70,71,72 is a cylindrical shape, when alignment pin 69,70,71,72 is not in from state that glass substrate G along continuous straight runs leaves, just can not carry out the rise and fall action.That is, when alignment pin 69,70,71,72 is carrying out rise and fall when action under the glass substrate G state that along continuous straight runs does not leave, alignment pin 69,70,71,72 is with glass substrate G interference or rub mutually, causes producing substrate crackle or particulate.
But, by adopting the alignment pin 80 of present embodiment, moving and the rise and fall action even carry out the horizontal direction of alignment pin 80 simultaneously, alignment pin 80 and glass substrate G can not interfere or rub yet, and can further shorten the productive temp time.
In addition, in the above-described embodiment, with the situation that base board delivery device of the present invention is applied to the resist-coating processing unit is that example is illustrated, but base board delivery device of the present invention is not limited to this unit, also can suitably be applied in other the substrate processing unit etc.
In addition, to those skilled in the art, in the described design of claim, obviously can realize various variation or revise example, also belong to technical scope of the present invention certainly about these examples.In addition, above-mentioned execution mode is the example to FPD base plate coating resist liquid, but the present invention also can be applied to the substrate of substrate for the rectangle except that the FPD substrate, also can be applied to the situation to the liquid of base plate coating except that resist liquid.
Claims (8)
1. base board delivery device, its 11 ground of form horizontal feed substrate to open is characterized in that this base board delivery device has:
Suspend and use objective table, it utilizes the injection of gas that aforesaid substrate is suspended; Guide rail, it is configured in the side of above-mentioned suspension with objective table; Substrate carries gripping member, and it is set to and can moves along above-mentioned guide rail, can keep the edge part of aforesaid substrate from below absorption; Aligning parts, it is set to freely advance and retreat from the position of readiness to the assigned position with respect to being moved to the aforesaid substrate that above-mentioned suspension moves into the position with the substrate of objective table, contacts with aforesaid substrate and this substrate is configured in assigned position; The substrate supporting parts, it is moved into the position in above-mentioned suspension and support the aforesaid substrate that is configured in assigned position by above-mentioned aligning parts below this substrate with the substrate of objective table; Control part, it is used to control the action that aforesaid substrate carries gripping member, above-mentioned aligning parts and aforesaid substrate support unit;
Above-mentioned control part is controlled, make finished aforesaid substrate that substrate carries carry gripping member turn back to above-mentioned suspension move into the substrate of objective table the position during in, above-mentioned aligning parts carries out aforesaid substrate is configured in the contraposition of assigned position, and the aforesaid substrate support unit from below supporting by the aforesaid substrate after the contraposition, and above-mentioned aligning parts turns back to aforesaid substrate and carries the position of readiness that gripping member does not interfere with each other.
2. base board delivery device according to claim 1 is characterized in that,
The aforesaid substrate support unit has:
A plurality of fulcrum posts, it is set to can be outstanding upward with the surface of objective table from above-mentioned suspension;
The lifting drive division, it is used to make above-mentioned a plurality of fulcrum post lifting,
Above-mentioned lifting drive division makes above-mentioned a plurality of fulcrum post rise to the height of regulation from above-mentioned suspension with the surface of objective table, thereby utilizes above-mentioned a plurality of fulcrum post supporting aforesaid substrate.
3. base board delivery device according to claim 2 is characterized in that,
Above-mentioned control part is controlled, and makes when the aforesaid substrate by above-mentioned a plurality of fulcrum post supportings is carried gripping member absorption maintenance by above-mentioned a plurality of substrates, and utilize above-mentioned lifting drive division that above-mentioned a plurality of fulcrum post is descended and move,
Remove of the supporting of above-mentioned a plurality of fulcrum post to aforesaid substrate.
4. substrate carrying method, it is 11 ground of the form horizontal feed substrate to open in base board delivery device, and this base board delivery device has: suspend and use objective table, it utilizes the injection of gas to make the substrate suspension; Guide rail, it is configured in the side of above-mentioned suspension with objective table; Substrate carries gripping member, and it is set to and can moves along above-mentioned guide rail, can keep the edge part of aforesaid substrate from below absorption; Aligning parts, it is set to freely be advanced and retreat from the position of readiness to the assigned position with respect to moving into the aforesaid substrate that above-mentioned suspension moves into the position with the substrate of objective table, contacts with aforesaid substrate and this substrate is configured in assigned position; The substrate supporting parts, it is moved into the position in above-mentioned suspension and support the aforesaid substrate that is configured in assigned position by above-mentioned aligning parts below this substrate with the substrate of objective table; Control part, it is used to control the action that aforesaid substrate carries gripping member, above-mentioned aligning parts and aforesaid substrate support unit; It is characterized in that this substrate carrying method comprises following operation:
Finished along above-mentioned guide rail aforesaid substrate that substrate carries carry gripping member turn back to for the substrate that receives the next one and transport above-mentioned suspension move into the substrate of objective table the position during in, utilize above-mentioned aligning parts to carry out and will newly move into the contraposition that substrate that above-mentioned suspension moves into the position with the substrate on the objective table is configured in assigned position;
Utilize the aforesaid substrate support unit to support from the below by the aforesaid substrate after the contraposition;
Utilizing under the state of aforesaid substrate support unit supporting aforesaid substrate, make above-mentioned aligning parts turn back to position of readiness.
5. substrate carrying method according to claim 4 is characterized in that,
The aforesaid substrate support unit has:
A plurality of fulcrum posts, it is set to can be outstanding upward with the surface of objective table from above-mentioned suspension;
The lifting drive division, it is used to make above-mentioned a plurality of fulcrum post lifting,
Above-mentioned lifting drive division makes above-mentioned a plurality of fulcrum post rise to the height of regulation from above-mentioned suspension with the surface of objective table, thereby utilizes above-mentioned a plurality of fulcrum post supporting aforesaid substrate.
6. substrate carrying method according to claim 5 is characterized in that, this substrate carrying method comprises following operation:
Under the state that aforesaid substrate is supported by the aforesaid substrate support unit, after above-mentioned aligning parts turns back to the operation of position of readiness, utilize to turn back to the aforesaid substrate that above-mentioned suspension moves into the position with the substrate of objective table and carry gripping member absorption maintenance aforesaid substrate;
Utilize above-mentioned lifting drive division that above-mentioned a plurality of fulcrum post is descended and move, remove of the supporting of above-mentioned a plurality of fulcrum post aforesaid substrate.
7. base board delivery device, its 11 ground of form horizontal feed substrate to open is characterized in that this base board delivery device has:
Suspend and use objective table, it utilizes the injection of gas that aforesaid substrate is suspended; Guide rail, it is configured in the side of above-mentioned suspension with objective table; Substrate carries gripping member, and it is set to and can moves along above-mentioned guide rail, can keep the edge part of aforesaid substrate from below absorption; Aligning parts, it is set to freely be advanced and retreat from the position of readiness to the assigned position with respect to moving into the aforesaid substrate that above-mentioned suspension moves into the position with the substrate of objective table, contacts with aforesaid substrate and this substrate is configured in assigned position; Control part, it is used to control aforesaid substrate and carries gripping member and above-mentioned aligning parts;
Above-mentioned control part is controlled, make finished aforesaid substrate that substrate carries carry gripping member turn back to above-mentioned suspension move into the substrate of objective table the position during in, above-mentioned aligning parts carries out aforesaid substrate is configured in the contraposition of assigned position, and above-mentioned aligning parts turns back to aforesaid substrate and carries the position of readiness that gripping member does not interfere with each other.
8. substrate carrying method, it is 11 ground of the form horizontal feed substrate to open in base board delivery device, and this base board delivery device has: suspend and use objective table, it utilizes the injection of gas to make the substrate suspension; Guide rail, it is configured in the side of above-mentioned suspension with objective table; Substrate carries gripping member, and it is set to and can moves along above-mentioned guide rail, can keep the edge part of aforesaid substrate from below absorption; Aligning parts, it is set to freely be advanced and retreat from the position of readiness to the assigned position with respect to moving into the aforesaid substrate that above-mentioned suspension moves into the position with the substrate of objective table, contacts with aforesaid substrate and this substrate is configured in assigned position; Control part, it is used to control the action that aforesaid substrate carries gripping member and above-mentioned aligning parts; It is characterized in that this substrate carrying method comprises following operation:
Finished along above-mentioned guide rail aforesaid substrate that substrate carries carry gripping member turn back to for the substrate that receives the next one and transport above-mentioned suspension move into the substrate of objective table the position during in, utilize above-mentioned aligning parts to carry out and will newly move into the contraposition that substrate that above-mentioned suspension moves into the position with the substrate on the objective table is configured in assigned position;
The gas that utilization is ejected with objective table from above-mentioned suspension supports from the below by the aforesaid substrate after the contraposition;
Under the state that utilizes the gas supporting aforesaid substrate that ejects with objective table from above-mentioned suspension, make above-mentioned aligning parts turn back to position of readiness.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-011078 | 2010-01-21 | ||
| JP2010011078A JP4896236B2 (en) | 2010-01-21 | 2010-01-21 | Substrate transport apparatus and substrate transport method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102157424A true CN102157424A (en) | 2011-08-17 |
| CN102157424B CN102157424B (en) | 2014-09-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110025022.XA Active CN102157424B (en) | 2010-01-21 | 2011-01-21 | Substrate conveying apparatus and substrate conveying method |
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| Country | Link |
|---|---|
| JP (1) | JP4896236B2 (en) |
| KR (1) | KR101577481B1 (en) |
| CN (1) | CN102157424B (en) |
| TW (1) | TWI479592B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201145432A (en) | 2011-12-16 |
| CN102157424B (en) | 2014-09-24 |
| JP4896236B2 (en) | 2012-03-14 |
| TWI479592B (en) | 2015-04-01 |
| JP2011148593A (en) | 2011-08-04 |
| KR20110085883A (en) | 2011-07-27 |
| KR101577481B1 (en) | 2015-12-14 |
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