CN102157424B - Substrate conveying apparatus and substrate conveying method - Google Patents
Substrate conveying apparatus and substrate conveying method Download PDFInfo
- Publication number
- CN102157424B CN102157424B CN201110025022.XA CN201110025022A CN102157424B CN 102157424 B CN102157424 B CN 102157424B CN 201110025022 A CN201110025022 A CN 201110025022A CN 102157424 B CN102157424 B CN 102157424B
- Authority
- CN
- China
- Prior art keywords
- substrate
- mentioned
- objective table
- aforesaid substrate
- suspension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a substrate conveying apparatus and a substrate conveying method which shortens the time for conveying a substrate to a place where the conveying starts in a substrate processing device which horizontally conveys substrates to be processed one by one, and improve production efficiency. The substrate conveying apparatus comprises a suspension objective table for suspending a substrate to be processed; a pair of guide rails parallelly arranged at the left and right sides of the suspension objective table; a plurality of substrate holders movable along the guide rails and absorbing and holding the edges of the substrate to be processed from lower part; an aligning component which is freely movable from a standby position of the substrate being moved to a starting position on the suspension objective table to a prescribed position, and contacts with the substrate to move the substrate to the prescribed position; a substrate supporting component which supports the substrate moved to the prescribed position by the aligning component from the starting position of the suspension objective table; and a control portion which controls actions of the substrate holders, the aligning component and the substrate supporting component.
Description
Technical field
The present invention relates to flatly carry base board delivery device and the substrate carrying method of processed substrate.
Background technology
For example, in the manufacture of FPD (flat-panel monitor), carry out forming by so-called photo-mask process the operation of circuit pattern.
Above-mentioned photo-mask process carries out specifically as follows.
First, form the film of regulation on the processed substrates such as glass substrate, afterwards, coating is as the photoresist (hereinafter referred to as resist) for the treatment of fluid and form resist film.Then, accordingly resist film is exposed with circuit pattern, and the resist film after exposure is carried out to development treatment.
But, in recent years, in this photo-mask process, for the object of boosting productivity, adopt on one side with the state of approximate horizontal posture carried the processed substrate structure to each processing such as processed of this processed substrate coating of implementing resist, dry, heating, cooling processing on one side more.
The structure of carrying as aforesaid substrate, makes substrate floating receive much concern to the height of regulation the suspension conveying carried along substrate throughput direction with the state of approximate horizontal posture.
Adopt the base board delivery device of this suspension conveying, be for example used in resist-coating processing unit as disclosed in patent documentation 1.According to Fig. 8, this configuration example is in the past described.In addition, (a)～Fig. 8 of Fig. 8 (c) means the figure of the operate condition of base board delivery device.
The base board delivery device 200 of Fig. 8 has: suspend with objective table 201, it for example, for the glass substrate G (substrate that LCD uses) as processed substrate along X-direction suspension conveying; Pair of guide rails 202, it is laid on the left and right sides suspending with objective table 201 on the direct of travel of above-mentioned glass substrate G; 4 substrates hold part 203, and it keeps near four angles of glass substrate G from below absorption, and it is mobile on guide rail 202, to slide.
Suspending with being alternately respectively equipped with for a plurality of gas ejection ports 201a of the gas that injection is stipulated upward with for carrying out air-breathing a plurality of air entry 201b with predetermined distance on the upper surface of objective table 201.And, by the pressure load between the gas emitted dose that makes to eject from gas ejection ports 201a and the gas flow that sucks from air entry 201b, be constant, and glass substrate G is floated to the height of stipulating with the surface of objective table 201 from suspending.
In addition, in suspension, with the substrate of objective table 201, move into H place, position, in suspension, with the left and right sides of objective table 201, be provided with 4 corresponding with four angles of the glass substrate G moving into respectively alignment devices 204, by making each alignment device 204 work and glass substrate G being configured in to assigned position.
In addition, for this base board delivery device 200 is applied to be coated with processing unit, as shown in the figure, this base board delivery device 200 has the resist nozzle 205 that the left and right directions across glass substrate G configures (Width), and this resist nozzle 205 is for to being supplied with resist liquid on the surface suspending with the glass substrate G of suspension conveying on objective table 201.
In the base board delivery device 200 forming like this, the glass substrate G transporting for the device of the past operation, carries before starting and carries out contraposition operation (being called aligning) by alignment device 204 at substrate.About this alignment process, according to the flow chart of Fig. 8 (a), (b), (c) and Fig. 9, describe.
First, the substrate that has completed the conveying of 1 glass substrate G along guide rail 202 holds part 203, and in order to receive the glass substrate G that the next one transports, as shown in Fig. 8 (a), turning back to suspends moves into position H place standby (the step SP1 of Fig. 9) with the substrate of objective table 201.
Then, as shown in Fig. 8 (b), when moving into new glass substrate G, the 204a of tentacle portion of alignment device 204 rises at the height suspending with the glass substrate G suspending on objective table 201, and start to glass substrate G side (i.e. inner side) move and with four angles of glass substrate G be close (the step SP2 of Fig. 9).
Thus, the 204a of tentacle portion of alignment device 204 contacts with four angles of glass substrate G, and glass substrate G is pressed and moves to assigned position, carries out contraposition.When this contraposition of glass substrate G completes, the sucker 203a that substrate holds part 203 rises, and adsorbs four angles (the step SP3 of Fig. 9) that keep glass substrate G as shown in Fig. 8 (c).
In addition, while being held part 203 maintenance due to glass substrate G by substrate, the position of glass substrate G can not be offset, and therefore, the 204a of tentacle portion of alignment device 204 leaves and returns to (the step SP4 of Fig. 9) to position of readiness from glass substrate G.
Then, substrate holds part 203 and moves to directions X along guide rail 202, thereby is suspending with carrying glass substrate G on objective table 201, glass substrate G pass through resist nozzle 205 below time, carry out the coating (the step SP5 of Fig. 9) of resist liquid.
Then, after having carried glass substrate G, substrate holds part 203 and is back to substrate and moves into position H, is placed in position of readiness (the step SP1 of Fig. 9).
Patent documentation 1: TOHKEMY 2006-237482 communique
As mentioned above, in the aligning of glass substrate G, utilize the 204a of tentacle portion of alignment device 204 glass substrate G to be remained under the state of assigned position, carrying out the absorption maintenance that substrate holds part 203.Therefore, make the position of glass substrate G just not be offset and can hold part 203 conveying substrates by substrate.
But, in the structure of aforesaid substrate conveying device 200, there is such technical task: substrate hold part 203 turn back to substrate implement before moving into position H the next glass substrate G transporting on time, to substrate, move into the 204a of the tentacle portion interference that substrate that position H returns holds part 203 and alignment device 204.
Therefore, in the past, as the flowchart text of above-mentioned Fig. 9, held part 203 and turned back to the aligning operation that substrate carries out alignment device 204 after moving into position H having completed substrate that substrate carries.
But, in this case, there is such technical task: suspending with after carrying 1 glass substrate G on objective table 201, if do not wait for that substrate holds part 203 and turns back to substrate and move into the time of position H and the time of aligning, just can not start the conveying of next substrate, productivity ratio reduces.
Summary of the invention
The present invention makes in view of the problem points of conventional art as above, and it provides in the substrate board treatment of flatly carrying processed substrate with 11 ground of form of opening and can shorten from substrate and move into and carry productive temp time the base board delivery device of boosting productivity and the substrate carrying method starting.
In order to solve above-mentioned problem, base board delivery device of the present invention is the substrate board treatment of 11 the ground horizontal feed substrate of form to open, it is characterized in that, this base board delivery device has: suspension objective table, and it utilizes the injection of gas that aforesaid substrate is suspended; Guide rail, it is configured in the side that objective table is used in above-mentioned suspension; Substrate holds part, and it is set to move along above-mentioned guide rail, can keep from below absorption the edge part of aforesaid substrate; Aligning parts, it is set to from position of readiness to assigned position, freely be advanced and retreat with the aforesaid substrate that the substrate of objective table is moved into position with respect to moving into above-mentioned suspension, contacts and this substrate is configured in to assigned position with aforesaid substrate; Substrate supporting parts, it is moved into position and support the aforesaid substrate that is configured in assigned position by above-mentioned aligning parts below this substrate with the substrate of objective table in above-mentioned suspension; Control part, it holds the action of part, above-mentioned aligning parts and aforesaid substrate support unit for controlling aforesaid substrate; Above-mentioned control part is controlled, make completed aforesaid substrate that substrate carries hold part turn back to above-mentioned suspension with the substrate of objective table, move into position during in, above-mentioned aligning parts carries out aforesaid substrate to be configured in the contraposition of assigned position, and aforesaid substrate support unit from below supporting by the aforesaid substrate contraposition, and above-mentioned aligning parts turns back to aforesaid substrate and holds the position of readiness that part does not interfere with each other.
Like this, because there are the substrate supporting parts that keep the processed substrate after alignment process for temporary transient, so hold part at substrate, be back to suspend before moving into position with the substrate of objective table and just can implement the aligning of substrate.
; not needing as in the past to hold part at substrate turns back to suspend after moving into position with the substrate of objective table and aims at; substrate holds part and moves into position and can keep substrate at once and start conveying substrate once turning back to substrate, therefore can shorten from substrate and move into and carry the productive temp time starting and boost productivity.
In addition, in order to solve above-mentioned problem, substrate carrying method of the present invention be in base board delivery device with the substrate carrying method of 11 of form ground horizontal feed substrate, this base board delivery device has: suspensions objective table, it utilizes the injection of gas to make substrate suspension; Guide rail, it is configured in the side that objective table is used in above-mentioned suspension; Substrate holds part, and it is set to move along above-mentioned guide rail, can keep from below absorption the edge part of aforesaid substrate; Aligning parts, it is set to from position of readiness to assigned position, freely be advanced and retreat with the aforesaid substrate that the substrate of objective table is moved into position with respect to moving into above-mentioned suspension, contacts and this substrate is configured in to assigned position with aforesaid substrate; Substrate supporting parts, it is moved into position and support the aforesaid substrate that is configured in assigned position by above-mentioned aligning parts below this substrate with the substrate of objective table in above-mentioned suspension; Control part, it holds the action of part, above-mentioned aligning parts and aforesaid substrate support unit for controlling aforesaid substrate; It is characterized in that, this substrate carrying method comprises following operation: along above-mentioned guide rail, completed aforesaid substrate that substrate carries hold part for the substrate that receives the next one and transport, be back to above-mentioned suspension with the substrate of objective table, move into position during in, utilize above-mentioned aligning parts to carry out with the substrate that the substrate on objective table is moved into position, being configured in the contraposition of assigned position by newly moving into above-mentioned suspension; Utilize aforesaid substrate support unit to support by the aforesaid substrate contraposition from below; Utilizing under the state of aforesaid substrate support unit supporting aforesaid substrate, make above-mentioned aligning parts turn back to position of readiness.
Adopt in this way, the processed substrate after utilizing substrate supporting parts can temporarily keep aiming at, therefore, holds part at substrate and turns back to suspend before moving into position with the substrate of objective table and just can implement the aligning of substrate.
; not needing as in the past to hold part at substrate turns back to suspend after moving into position with the substrate of objective table and aims at; substrate holds part and moves into position and can keep substrate at once and start carrying once turning back to substrate, therefore can shorten from substrate and move into and carry the productive temp time starting and boost productivity.
Adopt the present invention, can obtain in the substrate board treatment of 11 the processed substrate of ground horizontal feed of the form to open and can shorten from substrate and move into and carry productive temp time the base board delivery device of boosting productivity and the substrate carrying method starting.
Accompanying drawing explanation
Fig. 1 means the vertical view of whole schematic configuration of the base board delivery device of the 1st execution mode of the present invention.
Fig. 2 means the cutaway view of whole schematic configuration of the base board delivery device of the 1st execution mode of the present invention.
Fig. 3 is that the A-A of base board delivery device of Fig. 2 is to looking cutaway view.
Fig. 4 is that the B-B of base board delivery device of Fig. 2 is to looking cutaway view.
Fig. 5 means the flow chart of action of the base board delivery device of the 1st execution mode of the present invention.
Fig. 6 is for the vertical view of action of the base board delivery device of the 1st execution mode of the present invention is described.
Fig. 7 is for the vertical view of action of the base board delivery device of the 1st execution mode of the present invention is described.
Fig. 8 is for the vertical view of the schematic configuration of base board delivery device is in the past described.
Fig. 9 means the flow chart of flow process of the action of base board delivery device in the past.
Figure 10 is the integrally-built vertical view of the base board delivery device of the 2nd execution mode of the present invention.
Figure 11 is the vertical view of sorter of the present invention.
Figure 12 is the end view of sorter of the present invention.
Figure 13 is the key diagram of the matched tube structure that is connected with sucker of the present invention.
Figure 14 is the vertical view of aligning parts of the present invention.
Figure 15 is the end view of aligning parts of the present invention.
Figure 16 is the end view that substrate of the present invention holds part.
Figure 17 is the key diagram of the matched tube structure that is connected with adsorption element of the present invention.
Figure 18 is the end view that holds part supporting member of the present invention.
Figure 19 is and the key diagram that holds the matched tube structure that part supporting member is connected of the present invention.
Figure 20 is the key diagram of the alignment pin of the 3rd execution mode of the present invention.
Figure 21 is the of the present invention the 1st and the key diagram of the alignment pin of the 2nd execution mode.
Embodiment
The 1st execution mode of base board delivery device of the present invention is described according to Fig. 1～Fig. 7 below.In addition, in the 1st execution mode, the situation that base board delivery device is applied to the glass substrate as processed substrate to carry out the resist-coating processing unit of resist-coating of take describes as example.
This base board delivery device 1 has: the 2A of suspension conveying portion, and it is for 11 ground suspension conveying glass substrate G of the form to open; Roller delivery section 2B, it receives glass substrate G and carries out roller conveying from the above-mentioned suspension conveying 2A of portion; This base board delivery device 1 is configured to so-called horizontal feed glass substrate G.
On the above-mentioned suspension conveying 2A of portion, be provided with the objective table 3 for suspension extending along the directions X as substrate throughput direction.As shown in the figure, suspending with on the upper surface of objective table 3, along directions X and Y-direction, with predetermined distance, be alternately provided with a plurality of gas vent 3a and gas suction inlet 3b, by making from the pressure load between the spray volume of the not active gases of gas vent 3a and the gas flow that sucks from gas suction inlet 3b, be constant, glass substrate G is suspended.In addition, in the 1st execution mode, utilize the ejection of gas and suction that glass substrate G is suspended, but be not limited thereto, also can only utilize the structure of gas ejection that substrate is suspended.
In addition, in above-mentioned suspension, with the side, left and right of the Width (Y-direction) of objective table 3, be provided with the pair of guide rails 5 of extending abreast along directions X.In this pair of guide rails 5, be provided with and from below, adsorb the edge part at four angles that keep glass substrate G and hold part 6 at guide rail 54 mobile substrates.Utilizing these substrates to hold part 6 makes to be suspended in to suspend and moves along throughput direction with the glass substrate G on objective table 3.In addition, in order successfully to carry out transferring substrate from the 2A of suspension conveying portion way roller delivery section 2B, guide rail 5 is not only arranged on the side, left and right suspending with objective table 3, also extends the side that is set to roller delivery section 2B.
As shown in Figure 3, each substrate holds part 6 and comprises: be set to the sliding component 6a that can move along guide rail 5; By attracting, decontrol the adsorption element 6b that action can be adsorbed in the lower surface of glass substrate G; For making the cylinder body drive division 6c of adsorption element 6b lifting moving.
In addition, be connected with suction pump (not shown) on adsorption element 6b, the air in the region contacting with glass substrate G by attraction makes this region approach vacuum state, thereby adsorption element 6b is adsorbed on glass substrate G.
In addition, utilize the control part 50 being formed by computer to control respectively the driving of above-mentioned sliding component 6a, cylinder body drive division 6c and above-mentioned suction pump.
In addition, as shown in Figure 1 and Figure 2, in suspension, with the position (substrate is moved into position H) that the device of the past operation on objective table 3 is moved into glass substrate G, locate, carry out the glass substrate G moving into be configured in the contraposition operation (aligning) of assigned position.Therefore, with the substrate of objective table 3, move into the left and right sides of position H suspending, with four angles with glass substrate G respectively corresponding mode be provided with 4 alignment devices 7.
Each alignment device 7 has the tentacle member 7a (aligning parts) that is set to approach and to contact from side respectively four angles (bight) of glass substrate G.In addition, for above-mentioned tentacle member 7a can be contacted with four angles of glass substrate G, as shown in Figure 4, each alignment device 7 has for making cylinder body drive division 7b and the cylinder body drive division 7c for make tentacle member 7a advance and retreat mobile with respect to glass substrate G level (along Y-direction) of tentacle member 7a lifting.In addition, utilize control part 50 to control the driving of above-mentioned cylinder body drive division 7b, 7c.
In addition, in this base board delivery device 1, have can lifting fulcrum post mechanism 8 (substrate supporting parts), this fulcrum post mechanism 8 is for utilizing the glass substrate G alignment device 7 contrapositions from below supporting.This fulcrum post mechanism 8 is arranged at respectively four angles of the glass substrate G after the H place contraposition of position are moved in suspension with the substrate of objective table 3 near.
Specifically, as shown in Figure 2, Figure 4 shows, each fulcrum post mechanism 8 has that be set to can be from for example suspending, with only giving prominence to upward the fulcrum post 8a of given size (0.5mm) and for making the cylinder body drive division 8b (lifting drive division) of fulcrum post 8a lifting moving in the surface of objective table 3.In addition, utilize control part 50 to control the driving of cylinder body drive division 8b.
In addition, in the suspension of base board delivery device 1 with being provided with on objective table 3 for the nozzle 9 to glass substrate G ejection resist liquid.Nozzle 9 forms along the long for example rectangular shape roughly of Y-direction.In addition, nozzle 9 for example forms longer than the width of the Y-direction of glass substrate G.As shown in Figure 2, in the bottom of nozzle 9, be formed with the ejiction opening 9a of slit-shaped, from resist liquid supply source (not shown), to this nozzle 9, supply with resist liquid.
As shown in Figure 1, in the both sides of nozzle 9, be formed with the guide rail 10 extending along directions X.Utilization mobile nozzle arm 11 on guide rail 10 keeps nozzle 9.This nozzle 9 utilizes the driving mechanism with nozzle arm 11 to directions X, to move along guide rail 10.
In addition, in nozzle arm 11, be provided with elevating mechanism, nozzle 9 can lifting to the height of regulation.By this structure, as shown in Figure 2, nozzle 9 can move in the ejection position to glass substrate G ejection resist liquid and between the rotating roller 12 of this ejection position upstream side and standby portion 14.
Above-mentioned rotating roller 12 can be in axis be contained in clean container 13 rotatably.
In addition, when cleaning the ejiction opening 9a of the nozzle 9 shown in Fig. 2, the ejiction opening 9a of nozzle 9 and the topmost of rotating roller 12 are approached.Then, while make rotating roller 12 rotations from ejiction opening 9a to rotating roller 12 ejection resist liquid, thus the attachment state of the resist liquid in the ejiction opening 9a of nozzle 9 is consistent.Thus, can make the ejection of the resist liquid in the ejiction opening 9a of nozzle 9 in stable condition.
The standby portion 14 of nozzle 9 that is more provided with by upstream side in above-mentioned rotating roller 12.This standby portion 14 for example have washer jet 9 function, prevent the function that nozzle 9 is dry.
In addition, as mentioned above, in the rear one-level of the above-mentioned suspension conveying 2A of portion, be provided with roller delivery section 2B.On this roller delivery section 2B, in the rear one-level suspending with objective table 3, be provided with side by side the many roller shafts 16 that rotarilyd actuate by roller drive division 25.A plurality of conveying rollers 17 are installed on each roller shaft 16, utilize the rotation of these conveying rollers 17 to carry glass substrate G.
Then, flow chart and the Fig. 6,7 along Fig. 5 illustrates the alignment process that glass substrate G is carried out in such base board delivery device 1 forming.
In base board delivery device 1, utilize substrate to hold part 6 and glass substrate G is transported to 1 by 1 and is suspended with on objective table 3, the resist liquid to the surface-coated of glass substrate G from nozzle 9 ejections.
Then, to hand on roller delivery section 2B at the glass substrate G suspending with carrying on objective table 3, substrate holds part 6 and is transported to suspension and with the glass substrate G on objective table 3, starts to be back to substrate and move into position H (the step S1 of Fig. 5) in order to receive the next one.
On the other hand, as shown in Fig. 6 (a), in suspension, with the substrate of objective table 3, move into H place, position and newly move into glass substrate G.At this, suspending with spraying not active gases and suck not active gases from gas suction inlet 3b from gas vent 3a on objective table 3, thereby forming the not air-flow of active gases.Utilization is formed on and suspends with the air-flow of the above-mentioned not active gases on objective table 3 from the above-mentioned glass substrate G moving into of below supporting.
Utilize cylinder body drive division 7b to make the tentacle member 7a of alignment device 7 rise to the hoverheight of glass substrate G with respect to the above-mentioned glass substrate G newly moving into, and the mode of utilizing tentacle member 7a that cylinder body drive division 7c makes alignment device 7 to contact with the bight at four angles with glass substrate G move horizontally.Thus, glass substrate G moves to and suspends with the assigned position on objective table 3 and carry out contraposition (being similarly the step S1 of Fig. 5).Like this, in the present embodiment, as shown in Fig. 6 (b), at substrate, hold part 6 and turn back to substrate and implement to aim at before moving into position H.
When completed that glass substrate G to moving into carries out on time, in 4 fulcrum post mechanisms 8, it is mobile that fulcrum post 8a utilizes cylinder body drive division 8b to rise, and utilizes 4 fulcrum post 8a from below supporting glass substrate G (the step S2 of Fig. 5).
When utilizing fulcrum post 8a that glass substrate G is remained on to assigned position, as shown in Fig. 6 (c), utilize cylinder body drive division 7b that the tentacle member 7a of alignment device 7 is declined mobile, the tentacle member 7a that recycling cylinder body drive division 7c makes alignment device 7 moves and makes it to position of readiness, return to (the step S3 of Fig. 5) to the left and right directions of glass substrate G.In addition, the position of readiness of this alignment device 7 is positioned at substrate and holds the position that part 6 does not interfere with each other.
At this, after above-mentioned steps S3, although alignment device 7 turns back to position of readiness, glass substrate G is supported pin 8a and supports from below, so glass substrate G can not move because being formed on the air-flow suspending with the not active gases on objective table 3.That is, glass substrate G can not be maintained to occurrence positions skew assigned position.In addition, glass substrate G supports from below with the air-flow of the not active gases on objective table 3 owing to being formed on above-mentioned suspension, so can be not crooked.
When the tentacle member 7a of alignment device 7 turns back to reliably its position of readiness as described in above-mentioned steps S3, substrate holds part 6 and does not interfere with each other and just complete movement from position H to substrate that move into alignment device 7.
Turn back to substrate and move into adsorption element 6b that the substrate of position H holds part 6 to utilize cylinder body drive division 6c to rise mobile, as shown in Fig. 7 (a), utilize adsorption element 6b from below absorption, to keep the edge part (the step S4 of Fig. 5) of glass substrate G.
In addition, when utilizing substrate to hold part 6 maintenance glass substrate G, it is mobile that control part 50 utilizes cylinder body drive division 8b that the fulcrum post 8a of each fulcrum post mechanism 8 is declined, and removes the bearing state of fulcrum post 8a.
Then, as shown in Fig. 7 (b), utilize substrate to hold part 6 glass substrate G is being suspended with moving (the step S5 of Fig. 5) on objective table 3 along guide rail 5, and from nozzle 9 ejection resist liquid, painting erosion resistant agent liquid on substrate surface.
As mentioned above, adopt the 1st execution mode of the present invention, due to the fulcrum post mechanism 8 having for temporary transient glass substrate G after keeping aiming at, therefore, at substrate, hold part 6 and turn back to suspend and just can implement the aligning of the glass substrate G that the next one moves into before moving into position H with the substrate of objective table 3.
; do not need at substrate, to hold after part 6 turns back to suspension to move into position H with the substrate of objective table 3 and implement again the aligning of the next glass substrate G transporting as in the past; substrate holds part 6 and moves into position H and can utilize immediately substrate to hold part 6 to keep glass substrate G and start carrying, therefore can shorten from substrate and move into and carry the productive temp time starting and boost productivity once turning back to substrate.
The 2nd execution mode of base board delivery device of the present invention then, is described.In addition, for the place identical with above-mentioned the 1st execution mode, description thereof is omitted.
Figure 10 illustrates the base board delivery device 61 of the 2nd execution mode.In Figure 10, along directions X, carry glass substrate G.Previous stage side (upstream side of substrate throughput direction) at the 2A of suspension conveying portion is provided with roller delivery section 2C.Roller delivery section 2C is provided with in the previous stage suspending with objective table 3 the many roller shafts 63 that rotarilyd actuate by roller drive division 62 side by side.On each roller shaft 63, be provided with conveying roller 64.
In addition, base board delivery device 61 has substrate transfer unit, for example sorter (sorter) 65 suspending with on objective table 3 for the glass substrate G on conveying roller 64 is transported to.As shown in Figure 10～12, sorter 65 has the sucker 66 that keeps glass substrate G for adsorbing, for making the sucker Lift Part 67 of sucker 66 liftings, sucker moving-member 68 for sucker 66 and sucker Lift Part 67 are moved along directions X.In addition, as shown in figure 13, sucker 66 is connected with suction pump 86 by pipe arrangement 85.In addition, pipe arrangement 85 be provided with the triple valve 87 for two-way switching stream midway, and, between sucker 66 and triple valve 87, be provided with the two-way valve 88 of freely openable.One end of pipe arrangement 89 is connected with this triple valve 87, and the other end of pipe arrangement 89 is connected with pressurized gas supply source 90.Thereby, by opening two-way valve 88 switch three-way valve 87, can make sucker 66 be connected with suction pump 86 and adsorb maintenance glass substrate G or sucker 66 is connected with pressurized gas supply source 90 and to sucker 66 supply gas-pressurizeds, removes the absorption of glass substrate G.In addition, utilize the control part 50 being formed by computer to control respectively the driving of sucker Lift Part 67, sucker moving-member 68, triple valve 87, two-way valve 88.
In addition, in the present embodiment, suspending with on objective table 3, dispose respectively accordingly respectively for the alignment pin 69,70,71,72 as aligning parts using the glass substrate G contraposition of moving into the position of regulation with four angles of glass substrate G, for each angle at four angles of glass substrate G, configure respectively two aligning parts.
As shown in Figure 10,14, aligning parts has the alignment pin moving-member 73 for alignment pin 69,70,71,72 is moved along the direction of each limit quadrature with glass substrate G.In addition, on the glass substrate G alignment pin 70 relative with alignment pin 69, between alignment pin moving-member 73 and alignment pin 70, be provided with the spring 74 of energy free-extension, to avoid when alignment pin 70 except alignment pin moving-member 73 also contacts with glass substrate G, the load that 73 couples of glass substrate G of alignment pin moving-member apply is excessive.On the glass substrate G alignment pin 72 relative with alignment pin 71, between alignment pin 72 and alignment pin moving-member 73, be provided with spring 74 similarly.
In addition, as shown in figure 15, aligning parts has for making the alignment pin Lift Part 77 of alignment pin 69,70,71,72, spring 74 and 73 liftings of alignment pin moving-member.
And, make 77 actions of alignment pin Lift Part and make alignment pin 69,70,71,72 increase, afterwards, make alignment pin moving-member 73 move and make alignment pin 69,70,71,72 approach and contact with glass substrate G, thus the position that glass substrate G contraposition can stipulated.In addition, utilize the control part 50 being formed by computer to control respectively the driving of alignment pin moving-member 73 and alignment pin Lift Part 77.
In addition, as shown in figure 10, each substrate holds part 6 to be had and is set to the sliding component 6a that can move along guide rail 5 and decontrols by attraction the adsorption element 6b that action can be adsorbed in the lower surface of glass substrate G.In addition, as shown in figure 16, each substrate holds part 6 to be had for making adsorption element 6b with respect to the adsorption element Lift Part 6d of sliding component 6a lifting.
Adsorption element Lift Part 6d can remain on adsorption element 6b 3 height.Position (this position is called to seizure (catch) position) when the position that adsorption element 6b is the highest is absorption, maintenance glass substrate G.The position of (be in the present embodiment to glass substrate G painting erosion resistant agent time) when the position of the intermediate altitude of adsorption element 6b is the processing that glass substrate G is stipulated (this position is called and processes position).Position (this position is called to off-position) when to be adsorption element 6b leave from the lower surface of glass substrate G in the position that adsorption element 6b is minimum.
In addition, as shown in figure 17, suction pump 95 is connected with adsorption element 6b, attracts the air in the region contact with glass substrate G and makes this region approach vacuum state, thereby can adsorb glass substrate G, between adsorption element 6b and suction pump, be provided with the decompression transducer 96 for detection of pressure relief value.In addition, between suction pump 95 and decompression transducer 96, be provided with for opening and closing the two-way valve 97 of stream.
In addition, utilize the control part 50 being formed by computer to control respectively the driving of sliding component 6a, adsorption element Lift Part 6d, two-way valve 97, the measured value of decompression transducer 96 is delivered to control part 50.
In addition, the upper surface of adsorption element 6b (surface of absorption glass substrate G) can be adjusted and rotate around X-axis and Y-axis, and adsorption element 6b can adsorb and keep glass substrate G.
In addition, as shown in figure 10, between the adsorption element 6b of X-direction and adsorption element 6b, have and hold part supporting member sliding component 76 for what adsorb that keep substrate a plurality of hold part supporting member 75 and can make that this holds that part supporting member 75 moves along guide rail 5.As shown in figure 18, also have for making to hold part supporting member 75 and hold part supporting member Lift Part 78 with respect to what hold part supporting member sliding component 76 lifting moving.
In addition, as shown in figure 19, suction pump 101 with hold part supporting member 75 and be connected, attract the air in the region contact with glass substrate G and make this region approach vacuum state, thereby can adsorb glass substrate G, between part supporting member 75 and suction pump, be provided with the decompression transducer 102 for detection of pressure relief value holding.In addition, between suction pump 101 and decompression transducer 102, be provided with for opening and closing the two-way valve 103 of stream.
In addition, the upper surface (surface of absorption glass substrate G) that holds part supporting member 75 can be adjusted and only around X-axis, rotate, and holds part supporting member 75 and can adsorb maintenance glass substrate G.
As mentioned above, adsorption element 6b can adjust and rotate around X-axis and Y-axis, hold part supporting member 75 and can adjust and only around X-axis, rotate, by formation like this, can utilize simple structure by adsorption element 6b and hold part supporting member 75 and adsorb reliably maintenance glass substrate G.
In addition, hold part supporting member Lift Part 78 and can remain on 3 height by holding part supporting member 75.Hold part supporting member 75 the highest positions and be absorption, the position (this position is called to catching position) while keeping glass substrate G.The position of (be in the present embodiment to glass substrate G painting erosion resistant agent time) when the position that holds the intermediate altitude of part supporting member 75 is the processing that glass substrate G is stipulated (this position is called and processes position).Hold position that part supporting member 75 is minimum and be the position (this position is called to off-position) when holding part supporting member 75 and leaving from the lower surface of glass substrate G.
In addition, utilize the control part 50 being formed by computer to control respectively the driving that holds part supporting member sliding component 76, holds part supporting member Lift Part 78, two-way valve 103, the measured value of decompression transducer 102 is delivered to control part 50.
The action of the base board delivery device 61 in the 2nd execution mode then, is described.
If glass substrate G is transported to the assigned position of roller delivery section 2C, makes roller drive division 62 stop, thereby the movement of glass substrate G is stopped.Then, the position declining at the sucker 66 of sorter 65, makes sucker 66 move to the assigned position of the bottom of glass substrate G, afterwards, starts the attraction action of sucker 66.Then, utilize sucker Lift Part 67 to make sucker 66 increase, utilize sucker 66 absorption to keep the lower surface of glass substrate G.
Then, start to spray not active gases from gas vent 3a, start to attract not active gases from gas suction inlet 3b, sorter 65 is moved along X-direction, glass substrate G is delivered to substrate and moves into position H.
Then, from sucker 66 ejection gas-pressurizeds and remove the absorption of glass substrate G is kept, and make 77 actions of alignment pin Lift Part and make alignment pin 69,70,71,72 increase.Afterwards, make alignment pin moving-member 73 action and make alignment pin 69,70,71,72 approach and contact with glass substrate G, by glass substrate G contraposition at assigned position.In addition, now, the balance by the not active gases from gas vent 3a ejection with the not active gases sucking from gas suction inlet 3b, remains on glass substrate G from suspending and floats to the state of the height of regulation with the surface of objective table 3.
Then, stop, from sucker 66 ejection gas-pressurizeds, sucker 66 being declined, sucker 66 is left from the lower surface of glass substrate G.Then, sorter 65 moves to original position in order to prepare to carry next glass substrate G.
Then, make 73 actions of alignment pin moving-member, alignment pin 69 and 70 is moved horizontally and leave from glass substrate G, afterwards, utilize alignment pin Lift Part 77 that alignment pin 69 and 70 is declined.In addition, now, alignment pin 71 does not leave and maintains the state that approaches and contact with glass substrate G from glass substrate G with 72.
By alignment pin 71 and 72 being maintained to the state that approaches and contact with glass substrate G, the position of glass substrate G can not be offset, and glass substrate G can be remained on to the position of regulation.
In addition, because alignment pin 69 and 70 is left from glass substrate G, so can prevent that alignment pin 69,70 and glass substrate G from rubbing mutually and causing producing particulate.
Then, utilize adsorption element Lift Part 6d and hold part supporting member Lift Part 78 and make adsorption element 6b and hold part supporting member 75 to be positioned at off-position, afterwards, make sliding component 6a and hold part supporting member sliding component 76 move and make adsorption element 6b and hold the below that part supporting member 75 moves to glass substrate G.Then, start adsorption element 6b and the attraction action that holds part supporting member 75, make adsorption element Lift Part 6d and hold 78 actions of part supporting member Lift Part, make adsorption element 6b and the height and position that holds part supporting member 75 rise to catching position, utilize adsorption element 6b and hold 75 absorption of part supporting member to keep glass substrate G.
Then, be arranged on adsorption element 6b and hold part supporting member 75 and suction pump (not shown) between decompression transducer reach after the pressure relief value of regulation, make alignment pin moving-member 73 action, alignment pin 71 and 72 is left from glass substrate G along continuous straight runs.
Then, the height that makes adsorption element 6b and hold part supporting member 75 drops to processes position, and alignment pin 71 and 72 is declined.Then, make sliding component 6a and hold 76 actions of part supporting member sliding component, along directions X, carry glass substrate G.
By the 2nd execution mode as above, can shorten glass substrate G and carry the productive temp time starting and boost productivity from moving into.
Then, the 3rd execution mode of the present invention is described.In addition, for the place identical with the 1st and the 2nd execution mode, description thereof is omitted.In the 3rd execution mode, primary study the shape of alignment pin.
As shown in figure 20, the alignment pin 80 of present embodiment is characterised in that, it is truncated conical shape, is provided with the stage portion 81 that approaches and contact with glass substrate G for when glass substrate G being positioned to the position of regulation on the inclined plane part of this round platform.Replace the alignment pin 69,70,71,72 in the 2nd execution mode, also can use the alignment pin 80 of present embodiment.
As shown in figure 21, above-mentioned alignment pin 69,70,71,72 is cylindrical shape, when alignment pin 69,70,71,72 is not during the state in leaving from glass substrate G along continuous straight runs, just can not carry out rise and fall action.That is,, when alignment pin 69,70,71,72 when carrying out rise and fall action from the glass substrate G state that along continuous straight runs does not leave, alignment pin 69,70,71,72 and glass substrate G interference or friction mutually, cause producing substrate crackle or particulate.
But, by adopting the alignment pin 80 of present embodiment, even if carry out the horizontal direction of alignment pin 80 simultaneously, moving and rise and fall action, alignment pin 80 and glass substrate G can not interfere or rub yet, and can further shorten the productive temp time.
In addition, in the above-described embodiment, the situation that base board delivery device of the present invention is applied to resist-coating processing unit of take is illustrated as example, but base board delivery device of the present invention is not limited to this unit, also can suitably be applied in other substrate processing unit etc.
In addition, to those skilled in the art, in the design described in claim, obviously can realize various variation or fixed case, about these examples, certainly also belong to technical scope of the present invention.In addition, above-mentioned execution mode is the example to FPD base plate coating resist liquid, but the present invention also can be applied to substrate for the substrate of the rectangle except FPD substrate, also can be applied to the situation of the liquid except resist liquid to base plate coating.
Claims (7)
1. a base board delivery device, its with 11 ground horizontal feed substrate of form, it is characterized in that, this base board delivery device has:
Suspension objective table, it utilizes the injection of gas that aforesaid substrate is suspended; Guide rail, it is configured in the side that objective table is used in above-mentioned suspension; Substrate holds part, and it is set to move along above-mentioned guide rail, can keep from below absorption the edge part of aforesaid substrate; Aligning parts, it is set to from position of readiness to assigned position, freely advance and retreat with the aforesaid substrate that the substrate of objective table is moved into position with respect to being moved to above-mentioned suspension, contacts and this substrate is configured in to assigned position with aforesaid substrate; Substrate supporting parts, it is moved into position and support the aforesaid substrate that is configured in assigned position by above-mentioned aligning parts below this substrate with the substrate of objective table in above-mentioned suspension; Control part, it holds the action of part, above-mentioned aligning parts and aforesaid substrate support unit for controlling aforesaid substrate;
Above-mentioned control part is controlled, make completed aforesaid substrate that substrate carries hold part turn back to above-mentioned suspension with the substrate of objective table, move into position during in, above-mentioned aligning parts carries out aforesaid substrate to be configured in the contraposition of assigned position, and aforesaid substrate support unit from below supporting by the aforesaid substrate contraposition, and above-mentioned aligning parts turns back to aforesaid substrate and holds the position of readiness that part does not interfere with each other.
2. base board delivery device according to claim 1, is characterized in that,
Aforesaid substrate support unit has:
A plurality of fulcrum posts, it is set to can be outstanding upward with the surface of objective table from above-mentioned suspension;
Lifting drive division, it is for making above-mentioned a plurality of fulcrum post lifting,
Above-mentioned lifting drive division makes above-mentioned a plurality of fulcrum post from above-mentioned suspension, with the surface of objective table, rise to the height of regulation, thereby utilizes above-mentioned a plurality of fulcrum post supporting aforesaid substrate.
3. base board delivery device according to claim 2, is characterized in that,
Above-mentioned control part is controlled, makes, when the aforesaid substrate by above-mentioned a plurality of fulcrum post supportings is held part absorption maintenance by above-mentioned a plurality of substrates, to utilize above-mentioned lifting drive division that above-mentioned a plurality of fulcrum post is declined mobile,
Remove the supporting of above-mentioned a plurality of fulcrum post to aforesaid substrate.
4. a substrate carrying method, its in base board delivery device with 11 ground horizontal feed substrate of form, this base board delivery device has: suspensions objective table, it utilizes the injection of gas to make substrate suspension; Guide rail, it is configured in the side that objective table is used in above-mentioned suspension; Substrate holds part, and it is set to move along above-mentioned guide rail, can keep from below absorption the edge part of aforesaid substrate; Aligning parts, it is set to from position of readiness to assigned position, freely be advanced and retreat with the aforesaid substrate that the substrate of objective table is moved into position with respect to moving into above-mentioned suspension, contacts and this substrate is configured in to assigned position with aforesaid substrate; Substrate supporting parts, it is moved into position and support the aforesaid substrate that is configured in assigned position by above-mentioned aligning parts below this substrate with the substrate of objective table in above-mentioned suspension; Control part, it holds the action of part, above-mentioned aligning parts and aforesaid substrate support unit for controlling aforesaid substrate; It is characterized in that, this substrate carrying method comprises following operation:
Along above-mentioned guide rail, completed aforesaid substrate that substrate carries hold part for the substrate that receives the next one and transport, turn back to above-mentioned suspension with the substrate of objective table, move into position during in, utilize above-mentioned aligning parts to carry out with the substrate that the substrate on objective table is moved into position, being configured in the contraposition of assigned position by newly moving into above-mentioned suspension;
Utilize aforesaid substrate support unit to support by the aforesaid substrate contraposition from below;
Utilizing from the state of aforesaid substrate support unit supporting aforesaid substrate, make above-mentioned aligning parts turn back to position of readiness.
5. substrate carrying method according to claim 4, is characterized in that,
Aforesaid substrate support unit has:
A plurality of fulcrum posts, it is set to can be outstanding upward with the surface of objective table from above-mentioned suspension;
Lifting drive division, it is for making above-mentioned a plurality of fulcrum post lifting,
Above-mentioned lifting drive division makes above-mentioned a plurality of fulcrum post from above-mentioned suspension, with the surface of objective table, rise to the height of regulation, thereby utilizes above-mentioned a plurality of fulcrum post supporting aforesaid substrate.
6. substrate carrying method according to claim 5, is characterized in that, this substrate carrying method comprises following operation:
Under the state being supported by aforesaid substrate support unit at aforesaid substrate, after above-mentioned aligning parts turns back to the operation of position of readiness, utilization turns back to above-mentioned suspension and holds part absorption maintenance aforesaid substrate with the aforesaid substrate that the substrate of objective table is moved into position;
Utilize above-mentioned lifting drive division that above-mentioned a plurality of fulcrum post is declined mobile, remove the supporting of above-mentioned a plurality of fulcrum post to aforesaid substrate.
7. a substrate carrying method, its in base board delivery device with 11 ground horizontal feed substrate of form, this base board delivery device has: suspensions objective table, it utilizes the injection of gas to make substrate suspension; Guide rail, it is configured in the side that objective table is used in above-mentioned suspension; Substrate holds part, and it is set to move along above-mentioned guide rail, can keep from below absorption the edge part of aforesaid substrate; Aligning parts, it is set to from position of readiness to assigned position, freely be advanced and retreat with the aforesaid substrate that the substrate of objective table is moved into position with respect to moving into above-mentioned suspension, contacts and this substrate is configured in to assigned position with aforesaid substrate; Control part, it holds the action of part and above-mentioned aligning parts for controlling aforesaid substrate; It is characterized in that, this substrate carrying method comprises following operation:
Along above-mentioned guide rail, completed aforesaid substrate that substrate carries hold part for the substrate that receives the next one and transport, turn back to above-mentioned suspension with the substrate of objective table, move into position during in, utilize above-mentioned aligning parts to carry out with the substrate that the substrate on objective table is moved into position, being configured in the contraposition of assigned position by newly moving into above-mentioned suspension;
The gas that utilization is ejected with objective table from above-mentioned suspension supports by the aforesaid substrate contraposition from below;
Utilizing the state of the gas supporting aforesaid substrate ejecting with objective table from above-mentioned suspension, make above-mentioned aligning parts turn back to position of readiness.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-011078 | 2010-01-21 | ||
| JP2010011078A JP4896236B2 (en) | 2010-01-21 | 2010-01-21 | Substrate transport apparatus and substrate transport method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102157424A CN102157424A (en) | 2011-08-17 |
| CN102157424B true CN102157424B (en) | 2014-09-24 |
Family
ID=44438820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110025022.XA Active CN102157424B (en) | 2010-01-21 | 2011-01-21 | Substrate conveying apparatus and substrate conveying method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4896236B2 (en) |
| KR (1) | KR101577481B1 (en) |
| CN (1) | CN102157424B (en) |
| TW (1) | TWI479592B (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5861365B2 (en) * | 2011-10-05 | 2016-02-16 | 大日本印刷株式会社 | Substrate alignment method and apparatus |
| JP5851271B2 (en) * | 2012-02-15 | 2016-02-03 | 株式会社エヌ・ピー・シー | Alignment apparatus and method, and solar cell module manufacturing apparatus and manufacturing method |
| JP5978937B2 (en) * | 2012-11-13 | 2016-08-24 | 旭硝子株式会社 | Substrate transfer hand and substrate transfer method |
| CN102942062B (en) * | 2012-11-21 | 2016-01-06 | 深圳市华星光电技术有限公司 | For transmitting device and the transmission method of glass substrate |
| JP6045376B2 (en) * | 2013-02-06 | 2016-12-14 | Juki株式会社 | Substrate transfer device and substrate transfer method |
| KR102218382B1 (en) * | 2014-08-21 | 2021-02-23 | 세메스 주식회사 | Transfer unit, substrate treating apparatus including the unit, and substrate treating method |
| TWI699582B (en) * | 2015-07-01 | 2020-07-21 | 日商信越工程股份有限公司 | Manufacturing device and manufacturing method of bonded device |
| CN106409738A (en) * | 2015-07-28 | 2017-02-15 | 细美事有限公司 | Substrate transferring device and substrate transferring method |
| JP6651392B2 (en) * | 2016-03-22 | 2020-02-19 | 東レエンジニアリング株式会社 | Substrate floating transfer device |
| KR102063322B1 (en) | 2016-05-27 | 2020-01-08 | 세메스 주식회사 | Apparatus and Method for treating a substrate |
| CN106081483A (en) * | 2016-06-01 | 2016-11-09 | 中国建材国际工程集团有限公司 | Device for glass location |
| CN106044225B (en) * | 2016-06-28 | 2019-05-31 | 江苏东旭亿泰智能装备有限公司 | Air floating platform, air-floating apparatus and glass substrate conveying device |
| CN106516740B (en) * | 2016-10-27 | 2018-10-19 | 信义玻璃(天津)有限公司 | A kind of bilateral automatic edging system of self-regulation |
| JP6786162B2 (en) * | 2016-12-20 | 2020-11-18 | 東京応化工業株式会社 | Coating device and coating method |
| CN108345136B (en) * | 2018-04-16 | 2023-09-29 | 苏州富强科技有限公司 | LCD adsorbs loading attachment |
| JP7154687B2 (en) * | 2018-06-19 | 2022-10-18 | 株式会社ディスコ | tape expansion unit |
| CN108861595A (en) * | 2018-07-02 | 2018-11-23 | 君泰创新（北京）科技有限公司 | Positioning device |
| CN110718492B (en) * | 2019-09-23 | 2022-11-29 | 苏州均华精密机械有限公司 | Tray body collection module and method thereof |
| US11903302B2 (en) * | 2020-12-16 | 2024-02-13 | Universal Display Corporation | Organic vapor jet printing system |
| CN115818207B (en) * | 2023-02-10 | 2023-06-02 | 季华实验室 | Substrate conveying device, control method and related equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006269498A (en) * | 2005-03-22 | 2006-10-05 | Olympus Corp | Device and method for holding substrate |
| JP2007107945A (en) * | 2005-10-12 | 2007-04-26 | Olympus Corp | Inspection device of substrate |
| WO2008013035A1 (en) * | 2006-07-27 | 2008-01-31 | Tokyo Electron Limited | Coating method and coater |
| JP2008078284A (en) * | 2006-09-20 | 2008-04-03 | Olympus Corp | Substrate carrier |
| CN100407367C (en) * | 2005-02-28 | 2008-07-30 | 东京毅力科创株式会社 | Substrate processing device, method and program |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4305918B2 (en) * | 2004-01-30 | 2009-07-29 | 東京エレクトロン株式会社 | Floating substrate transfer processing equipment |
| JP5315013B2 (en) * | 2008-02-05 | 2013-10-16 | オリンパス株式会社 | Substrate transport apparatus and substrate transport method |
-
2010
- 2010-01-21 JP JP2010011078A patent/JP4896236B2/en not_active Expired - Fee Related
-
2011
- 2011-01-07 KR KR1020110001813A patent/KR101577481B1/en active IP Right Grant
- 2011-01-14 TW TW100101444A patent/TWI479592B/en active
- 2011-01-21 CN CN201110025022.XA patent/CN102157424B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100407367C (en) * | 2005-02-28 | 2008-07-30 | 东京毅力科创株式会社 | Substrate processing device, method and program |
| JP2006269498A (en) * | 2005-03-22 | 2006-10-05 | Olympus Corp | Device and method for holding substrate |
| JP2007107945A (en) * | 2005-10-12 | 2007-04-26 | Olympus Corp | Inspection device of substrate |
| WO2008013035A1 (en) * | 2006-07-27 | 2008-01-31 | Tokyo Electron Limited | Coating method and coater |
| JP2008078284A (en) * | 2006-09-20 | 2008-04-03 | Olympus Corp | Substrate carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4896236B2 (en) | 2012-03-14 |
| KR101577481B1 (en) | 2015-12-14 |
| CN102157424A (en) | 2011-08-17 |
| TWI479592B (en) | 2015-04-01 |
| KR20110085883A (en) | 2011-07-27 |
| JP2011148593A (en) | 2011-08-04 |
| TW201145432A (en) | 2011-12-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102157424B (en) | Substrate conveying apparatus and substrate conveying method | |
| CN102005402B (en) | Substrate transfer apparatus and substrate transfer method | |
| JP4344755B2 (en) | Roller unit for thin plate material conveyance and thin plate material conveyance device | |
| JP4571525B2 (en) | Substrate processing apparatus and substrate processing method | |
| JP2011176086A (en) | Coating apparatus | |
| CN101060066B (en) | Substrate processing apparatus | |
| JP5600624B2 (en) | Coating film forming apparatus and coating film forming method | |
| JP2010034309A (en) | Coating apparatus and substrate processing system | |
| US20160038965A1 (en) | Substrate processing apparatus | |
| KR101069600B1 (en) | Inline type substrate coater apparatus and method thereof | |
| JP6605871B2 (en) | Substrate floating transfer device | |
| JP2006019396A (en) | Substrate processing device | |
| JP2009018917A (en) | Application device, substrate delivery method and application method | |
| JP2009062146A (en) | Coating apparatus and method for cleaning coating apparatus | |
| CN108525941B (en) | Coating apparatus and coating method | |
| JP6595276B2 (en) | Substrate processing apparatus and substrate processing method | |
| JP6961362B2 (en) | Board processing equipment | |
| KR100766115B1 (en) | Coating apparatus for substrate of flat panel display | |
| JP2009040533A (en) | Coating apparatus and coating method | |
| JP2018152441A (en) | Substrate transfer device, substrate transfer method and coating device | |
| CN102372174B (en) | Transport device and transport method for plate-shaped objects | |
| CN111822234B (en) | Coating device and coating method | |
| KR101138314B1 (en) | A Floating Type Film Coating Device and Method, and A Floating Type Film Coating System Having the Same | |
| JP2007098361A (en) | Substrates processing apparatus | |
| JP2008289966A (en) | Slit coater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |