CN106313858B - The manufacturing device and manufacturing method of abutted equipment - Google Patents

The manufacturing device and manufacturing method of abutted equipment Download PDF

Info

Publication number
CN106313858B
CN106313858B CN201610509484.1A CN201610509484A CN106313858B CN 106313858 B CN106313858 B CN 106313858B CN 201610509484 A CN201610509484 A CN 201610509484A CN 106313858 B CN106313858 B CN 106313858B
Authority
CN
China
Prior art keywords
downside
workpiece
upside
holding member
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201610509484.1A
Other languages
Chinese (zh)
Other versions
CN106313858A (en
Inventor
大谷义和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Process Corp
Original Assignee
Shin Etsu Process Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2015132728A external-priority patent/JP5877264B1/en
Priority claimed from JP2015146419A external-priority patent/JP6049820B1/en
Application filed by Shin Etsu Process Corp filed Critical Shin Etsu Process Corp
Publication of CN106313858A publication Critical patent/CN106313858A/en
Application granted granted Critical
Publication of CN106313858B publication Critical patent/CN106313858B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • B32B37/1284—Application of adhesive
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/35—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being liquid crystals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

The manufacturing device and manufacturing method of present invention offer abutted equipment.The local stress that removal remains in downside workpiece is bonded with smooth state with upside workpiece.There is upside holding member upside workpiece to keep irremovable maintaining part.Downside holding member, which includes, floats portion, has the separating pressure that opposite direction is generated between the workpiece of downside and the mechanism close to pressure；And contact maintaining part, have adjustment separating pressure and the mechanism close to pressure.Control unit opposite lower holding member makes downside workpiece keep the separating pressure for floating portion and the balance close to pressure, and downside workpiece floats from downside chuck face non-contactly to be supported.It is switched to contact maintaining part from portion is floated, makes to be gradually increased close to pressure ratio separating pressure, downside workpiece, which is contacted, is maintained at downside chuck face.Upside any one of holding member or downside holding member or the two is set to be relatively close to movement by going up and down driving portion, the upside workpiece for being maintained at upside chuck face by maintaining part is Chong Die with downside workpiece.

Description

The manufacturing device and manufacturing method of abutted equipment
Technical field
The present invention relates to one kind to show relative to such as liquid crystal display (LCD), organic el display (OLED), plasma The flat-panel monitors such as device (PDP), flexible display (FPD) or sensor device or such as such as touch surface board-like FPD or 3D (3 Dimension) plate workpieces such as the Liquid Crystal Modules such as display or e-book (LCM) or flexible printed circuit (FPC) (substrate), patch Close the manufacturing device and patch of the abutted equipments of another plate workpiece (substrate) such as touch panel, coverslip, cover film or FPD Close the manufacturing method of equipment.
Background technique
In the past, as the manufacturing device and manufacturing method of this abutted equipment, just like lower substrate overlapping device, i.e., along setting It is placed in the through hole of upper board holder and lower board holder, by the handover lifter pin of upper board and lower board It is set to move up and down, when moving under atmospheric pressure, the upside that will be kept and transported by the arm of conveying machine people Substrate and lower board by from the surface of upper board holder and lower board holder it is outstanding in a manner of be utilized respectively up and down Mobile upside lifter pin and downside lifter pin receive.Then, upside lifter pin and downside lifter pin are mobile to opposite direction, will be upper Side group plate and lower board are handover to the surface of upper board holder and lower board holder (for example, referenced patent respectively Document 1).
In particular, upside is element surface in lower board, therefore utilize the face on the downside of the arm vacuum suction of conveying machine people And transported, in the position for not interfering the arm by the downside lifter pin vacuum suction lower board of rising, from conveying machine The arm of people is handover to downside lifter pin.Later, it is handover to lower board holder from downside lifter pin by lower board, vacuum is inhaled Random structure is acted, by lower board vacuum suction to lower board holder.
At this point, impartial on lower board holder be equipped with multiple (such as 4) lifter pin through holes, downside lifter pin is logical It crosses elevating mechanism to rise from through hole and receive lower board, declines and lower board is handover to lower board holder, it Afterwards, downside lifter pin further declines and stops in defined position of readiness.
After further joining upper board and lower board, upper board holder and the close shifting of lower board holder It is dynamic, after being set as vacuum state in vacuum tank between the two, it is overlapped upper board and lower board, is fixed temporarily between the two Sealing material the upper board of fitting and lower board are handover to by lifter pin after becoming atmospheric pressure in vacuum tank The arm of conveying machine people, and moved out from vacuum tank.
Patent document 1: Japanese Unexamined Patent Publication 2002-229471 bulletin
However, in the manufacturing device of this previous abutted equipment, used in being bonded of upper board and lower board The surface opening and recess of lower board holder have multiple lift pins through hole and slot etc., therefore a part of lower board Decline because of its self weight, and locality it is flexible and bend to it is concavo-convex, remain stretch because of the locality caused by stress It is bonded under state with upper board.
Finally become the residual stress of substrate before the fitting after being bonded in the local stress that lower board generates, Anawgy accuracy is not only influenced, there is a problem in that, i.e., bubble is generated between upper board and lower board and reduces quality, Lead to decrease in yield.
Moreover, there are the following problems, i.e., the holding part of the lower board of the arm based on conveying machine people is locality line Shape rather than the entire surface of lower board, and the holding part of the lower board of the vacuum suction based on downside lifter pin is part Property the dotted rather than entire surface of lower board, therefore, under this hold mode, lower board locality due to its self weight is flexible And it bends to concavo-convex.That is, the case where lower board is handover to downside lifter pin from the arm of conveying machine people also becomes difference Occur when keeping because locality it is flexible caused by it is stress-retained in lower board the main reason for, keep Anawgy accuracy further Decline and the problem of decrease in yield.
Also, there is a problem in that the arm of conveying machine people or downside lifter pin are contacted that is, in lower board Position is attached with the foreign matters such as impurity, and unevenness is generated between other positions, can not be bonded in high precision.
In particular, substrate tends to enlargement, slimming, general G8 (2200 × 2500mm) size in LCD in recent years etc. The thickness of liquid crystal glass substrate become 0.2mm, the thickness of G11 (3000 × 3320mm) sized liquid crystal glass substrate becomes 0.5mm is very easy to bending deformation.Also, the plates such as the 3D technology for 4k × 2k plate or fine plate and multi-angle of view, it is desirable that high Fine plate, requires TFT substrate for entire plate face and the bit errors of colour filtering chip basic board are 2 μm of degree precision below.
On the other hand, carrying out the fiducial marker position of the contraposition of laminating apparatus with the camera of its mark position is confirmed is not It carries out in the entire surface of substrate, even if being generally the liquid crystal glass substrate of G8 size, also carries out at 4 in its end position to 8 Locate the alignment of left and right.
Therefore, if the center of glass substrate remains local stress, the end of mark contraposition is carried out using camera On position, although position deviate it is considerably less, on the center of glass substrate, compared with end position substrate each other Opposite position, which is deviateed, to become larger, and the bit errors control of the liquid crystal glass substrate of G8 size is very tired in the precision of sub-micron It is difficult.
Summary of the invention
In order to realize this project, the manufacturing device of abutted equipment according to the present invention be it is as follows, in fitting space Upside workpiece is maintained at upside holding member and downside workpiece is maintained at downside holding member, passes through the upside maintaining part Part and the downside holding member are relatively close to movement, are bonded the upside workpiece and the downside workpiece, the abutted equipment Manufacturing device be characterized in that having: the upside holding member, be configured at the fitting space and have installation freely Keep the upside chuck face of the upside workpiece；The downside holding member is configured at the fitting space and has installation certainly Keep as described in downside workpiece smooth downside chuck face；Go up and down driving portion, make the upside holding member or it is described under Any one of side holding member or the two are relatively close to mobile to be overlapped the upside workpiece and the downside workpiece；And control Portion processed does not carry out action control, the upside to upside chuck face, downside chuck face and the elevation actuating part There is holding member the upside workpiece to be maintained as irremovable maintaining part, and the downside holding member, which includes, floats portion, Has the separating pressure for generating opposite direction respectively between the downside workpiece and close to the mechanism of pressure；And contact is kept Portion has and adjusts the separating pressure and the mechanism close to pressure, and the control unit is controlled as follows, relative to described Downside holding member makes the separating pressure for floating portion described in the downside workpiece holding and the balance close to pressure, institute It states downside workpiece non-contactly to be supported in a manner of floating from downside chuck face, floats portion from described and be switched to described connect Touching maintaining part, makes described be gradually increased close to pressure compared to the separating pressure and the downside workpiece is contacted and is maintained at described Downside chuck face, by the lifting driving portion make any one of the upside holding member or the downside holding member or The two is relatively close to movement, by the maintaining part be maintained at upside chuck face the upside workpiece and it is described under The overlapping of side workpiece.
And the manufacturing method of abutted equipment according to the present invention is following method, by upside workpiece in fitting space Be maintained at upside holding member and by downside workpiece be maintained at downside holding member, by the upside holding member and it is described under Side holding member is relatively close to movement, is bonded the upside workpiece and the downside workpiece, the manufacturing method of the abutted equipment It is characterised by comprising: keeping process, the upside workpiece is maintained to the upside chuck face of the upside holding member, it will The downside workpiece is maintained at the smooth downside chuck face of the downside holding member；And bonding process, by making on described Any one of side holding member or the downside holding member or the two are relatively close to mobile to be overlapped the upside workpiece And the downside workpiece, in the holding process, keep the downside workpiece by floating relative to the downside holding member Separating pressure that the portion of rising is generated to opposite direction respectively between the downside workpiece and close to the balance of pressure, under described The mode that side chuck face floats non-contactly supports the downside workpiece, then, is made by contact maintaining part described close to pressure It is gradually increased compared to the separating pressure, makes the downside workpiece and the downside chuck face contact and remains and can not move, In the bonding process, it is overlapped the upside workpiece and the downside workpiece.
Detailed description of the invention
Fig. 1 is the integrally-built explanation for indicating the manufacturing device of abutted equipment involved in embodiments of the present invention Figure, Fig. 1 (a) are vertical section main view when upside workpiece is moved in, vertical section main view when Fig. 1 (b) is upside work delivery.
Fig. 2 is the integrally-built explanation for indicating the manufacturing device of abutted equipment involved in embodiments of the present invention Figure, Fig. 2 (a) are vertical section main view when downside workpiece is moved in, vertical section main view when Fig. 2 (b) is overlapping.
Fig. 3 is the integrally-built explanation for indicating the manufacturing device of abutted equipment involved in embodiments of the present invention Figure, Fig. 3 (a) are the vertical section main views after fitting, and Fig. 3 (b) is vertical section main view when abutted equipment moves out.
Fig. 4 is the integrally-built explanation for indicating the manufacturing device of abutted equipment involved in embodiments of the present invention Figure, Fig. 4 (a) is the cross-sectional top view of Fig. 2 (a), and Fig. 4 (b) is the cross-sectional top view of Fig. 3 (b).
Fig. 5 is the explanatory diagram for indicating the variation of manufacturing device of abutted equipment involved in embodiments of the present invention, Fig. 5 (a) is vertical section main view when upside workpiece is moved in, vertical section main view when Fig. 5 (b) is upside work delivery.
Fig. 6 is the explanatory diagram for indicating the variation of manufacturing device of abutted equipment involved in embodiments of the present invention, Fig. 6 (a) is vertical section main view when downside workpiece is moved in, vertical section main view when Fig. 6 (b) is overlapping.
Fig. 7 is the explanatory diagram for indicating the variation of manufacturing device of abutted equipment involved in embodiments of the present invention, Fig. 7 (a) is the vertical section main view after fitting, and Fig. 7 (b) is vertical section main view when abutted equipment moves out.
The manufacturing device of A- abutted equipment, the upside 1- holding member, the upside 11- chuck face, 11a- maintaining part, 2- are protected downside Component is held, chuck face on the downside of 21-, 21a- contacts maintaining part, and 22- floats portion, and 23- positions guiding element, and 3- goes up and down driving portion, and 4- is moved in Component, 41- move in face, and 43- floats conveying unit, and 44- transports guiding element, and 5- moves out component, and 51- moves out face, 6- chamber, and 61- enters and leaves Mouthful, 7- control unit, S1- is bonded space, S2- exterior space, the upside W1- workpiece, the downside W2- workpiece, W- abutted equipment.
Specific embodiment
Hereinafter, detailed description of embodiments of the present invention with reference to the accompanying drawings.
As shown in FIG. 1 to FIG. 7, the manufacturing device A and manufacturing method of abutted equipment W involved in embodiments of the present invention In, upside holding member 1 with downside holding member 2 is arranged opposite is being bonded space S 1, upside workpiece W1 is maintained at upside and is protected Component 1 is held, downside workpiece W2 is maintained at downside holding member 2.Later, by making upside holding member 1 or downside maintaining part Any one of part 2 or the two relative movement, under air atmosphere or reduced atmosphere, upside workpiece W1 and downside workpiece W2 weight It is folded, (bonding) is bonded with defined gap.
Moreover, preferably after upside workpiece W1 and downside workpiece W2 relative alignment terminate, being carried out in the fitting of the workpiece Upside workpiece W1 is bonded with downside workpiece W2's.In the fitting of the workpiece, preferably the fitting space S 1 that can adjust decompression with Vacuum fitting upside workpiece W1 and downside workpiece W2.
In particular, in the fitting of the workpiece of fitting space S 1, preferably by upside workpiece W1 and downside workpiece W2 to being bonded sky Between S1 move in, and be handover to respectively upside holding member 1 kept with downside holding member 2.Also, it is preferred that empty in fitting Between be bonded the abutted equipment W of end in S1 and moved out from fitting space S 1, later, by repeating aforementioned activities, continuous production is more A abutted equipment W.
At this point, the manufacturing device A of abutted equipment W involved in embodiments of the present invention becomes for making abutted equipment The vacuum workpiece laminating apparatus of W.
If describing in detail, the manufacturing device A of abutted equipment W involved in embodiments of the present invention is wanted as main composition Part has: upside holding member 1, is configured at fitting space S 1 and keeps upside workpiece W1；Downside holding member 2 is configured at patch It closes space S 1 and keeps downside workpiece W2；Driving portion 3 is gone up and down, upside any one of holding member 1 or downside holding member 2 are made Or the two is mobile in a manner of being relatively close to or separate and be overlapped upside workpiece W1 and downside workpiece W2.
In addition to this, it is preferably provided with: moving in component 4, at least move in downside workpiece W2 to fitting space S 1；Component 5 is moved out, The abutted equipment W that fitting terminates is moved out from fitting space S 1 to external space S 2；Chamber 6 is formed with fitting space S 1；And control Portion 7 processed, to upside holding member 1, downside holding member 2, lifting driving portion 3, move in component 4 and move out component 5 etc. respectively into Row action control.
In addition, as shown in FIG. 1 to FIG. 7, upside workpiece W1 and downside workpiece W2 be typically configured to it is opposed in the up-down direction, Direction upside workpiece W1 Chong Die with downside workpiece W2, that is, workpiece fitting direction is known as " Z-direction ".It will intersect along with Z-direction Upside workpiece W1 and downside workpiece W2 binding face direction be known as " direction XY ".
Abutted equipment W is the laminal structure that multiple component parts such as FPD or sensor device are assembled integrally Body.
In the case where example shown in specific such as FIG. 1 to FIG. 7 as abutted equipment W, upside workpiece W1 be by LCM or The rectangular thin plate of the compositions such as FPC.Downside workpiece W2 is by the touch panel or coverslip thinner than upside workpiece W1 or cover film etc. The rectangular thin plate of composition is bonded in a manner of the workpiece W1 of covering upside, constitutes FPD or sensor device etc..
It is preferred that by dispenser etc., quantitatively sealing material (not shown) is applied to upside workpiece W1 and downside work by discharge nozzle By any one of binding faces constituted such as film surface or the two on part W2.It is as the sealing material, it is preferable to use purple by absorbing The light energy of outside line etc. is overlapped and is solidified and the photocuring of UV curability optical clear resin (OCR) for showing caking property etc. Type binder.
Enclosed material (not shown) of the space surrounded by the sealing material filled with liquid crystal etc..
Also, it can also be changed although not shown as other examples, but as follows, that is, be bonded thinner than downside workpiece W2 upper Side workpiece W1, or use and carry out being overlapped cured thermohardening type binder or the mixing cured type of two liquid by the absorption of thermal energy Binder etc. replaces light-cured type binder as the sealing material, or does not include the sealing material or the enclosed material And directly fit workpiece each other.
Upside holding member 1 is with downside holding member 2 such as being formed as to answer due to the steel body because of metal or ceramics The flat surface plate of thickness etc. of power (bending) deformation is constituted, and has these opposed in z-direction upside chuck faces 11 with smooth downside chuck face 21.
Upside holding member 1 and downside holding member 2 are arranged to upside chuck face 11 and are being bonded sky with downside chuck face 21 Between S1 it is parallel to each other.
The upside chuck face 11 of upside holding member 1 has maintaining part 11a, is removed in the maintaining part 11a by aftermentioned Enter the upside workpiece W1 that component 4 is moved in be maintained as installation freely and can not move.
As the maintaining part 11a in upside chuck face 11, using the adsorption capacity based on vacuum suction or based on the viscous of adherency material Attached power or electrostatic adsorption force or these combination etc..It is configured to by being configured to these throughout substantially entire upside chuck face 11 Planar or be distributed respectively in entire upside chuck face 11 it is multiple, can also not even if fitting space S 1 is depressurized to vacuum Upside workpiece W1 is set to fall and continue to keep.
Also, it is preferred that upside holding member 1 other than upside chuck face 11, also has for keeping moving in by aftermentioned Upside workpiece W1 that component 4 is moved in and the connecting mechanism 12 that upside chuck face 11 is handover to from aftermentioned downside chuck face 21.It hands over Connection mechanism 12 is made of lifter pin or other structures body, and have for by the aftermentioned upside workpiece moving in component 4 and moving in W1 is approached and is kept and be handover to the handover driving portion 12a in upside chuck face 11.
As the concrete example of connecting mechanism 12, in the case where example as shown in FIG. 1 to 3, using mobile certainly to Z-direction Lifter pin 12b such as, as shown in Fig. 1 (b), the work on the upside of the front end face installation absorption freely of the lifter pin 12b of decline is kept The non-binding face (above) of part W1.Later, as shown in Fig. 2 (a), made on lifter pin 12b by the movement of handover driving portion 12a It rises, and contacts the non-binding face of upside workpiece W1 with upside chuck face 11.At the same time, it is switched to based on maintaining part 11a's Workpiece is kept, and is able to carry out the handover of upside workpiece W1.
In the case where illustrated example, lifter pin 12b is multiple by the configuration of every specified interval along the direction XY, utilizes connecting member 12c Keep these ends integrated, all lifter pin 12b are configured to through handover driving portion 12a via connecting member 12c to the side Z To back and forth moving freely.
Also, as other examples, connecting mechanism 12 can also be changed to other structures body, thus instead of lifter pin 12b.
The smooth downside chuck face 21 of downside holding member 2, which includes, floats portion 22, is moved in by aftermentioned component 4 of moving in Downside workpiece W2 in a manner of floating from downside chuck face 21 non-contactly bearing can to move；And contact maintaining part 21a, It is contacted with downside chuck face 21 and remains installation freely and can not move.
The ejection power for floating 22 using gas of portion in downside chuck face 21 or ultrasonic wave power etc..Float portion 22 to be configured to, In Opposed space between downside chuck face 21 and the non-binding face of downside workpiece W2 is generated simultaneously from 21 side of downside chuck face respectively To the downside side workpiece W2 separating pressure and it is opposite to that from the downside side workpiece W2 to 21 side of downside chuck face close to pressure. Separating pressure and the mechanism close to pressure are generated that is, floating portion 22 and having, by keeping the separating pressure and the close pressure The balance of power, between downside chuck face 21 and downside workpiece W2 to Z-direction formed air film 22a, maintain downside workpiece W2 from The contactless state that downside chuck face 21 floats.
As the concrete example for floating portion 22, in the case where the example as shown in FIG. 1 to FIG. 7, the plate that is made of porous material The porous layer 22b stacking of shape is formed in the surface in downside chuck face 21.By being sprayed from entire porous layer 22b to downside workpiece W2 Gas and while generate the separating pressure, by from the small multiple suction holes (not shown) for being opened in porous layer 22b It carries out vacuum suction and generates described close to pressure.
It contacts maintaining part 21a and uses adsorption capacity or electrostatic adsorption force or these combination etc. based on vacuum suction.Contact Maintaining part 21a has mechanism of the adjustment based on the separating pressure and the balance close to pressure that float portion 22.If in detail Illustrate, contact maintaining part 21a is adjusted by aftermentioned control unit 7 based on the separating pressure and the close pressure for floating portion 22 The balance of power, by compared with the separating pressure it is described be gradually increased close to pressure in a manner of carry out action control.Air as a result, The thickness of film 22a is gradually thinning, and the non-binding face of downside workpiece W2 successfully reaches the surface in downside chuck face 21, by described Downside workpiece W2 is kept close to pressure contact and move it can not.
As the concrete example of contact maintaining part 21a, in the case where the example as shown in FIG. 1 to FIG. 7, gradually decrease from entire Porous layer 22b is to the flow of the downside workpiece W2 gas sprayed and while inhibit the separating pressure, maintains or increases from opening The vacuum suction carried out set on small multiple suction holes of porous layer 22b.
Also, it can also be changed although not shown as other examples, but as follows, i.e. the surface one in downside chuck face 21 The ultrasonic probe of plate is laminated to replace porous layer 22b in body, is carried out the air on the surface of ultrasonic probe based on super by being powered The periodic compression of sound wave and compression release, while thus generating the separating pressure, by from being opened in ultrasonic probe Small multiple suction holes carry out vacuum suction and generate described close to pressure.
Moreover, any of upside holding member 1 or downside holding member 2 or upside holding member 1 and downside are kept The two are movably supported component 2 to Z-direction, make upside holding member 1 and downside maintaining part by going up and down driving portion 3 Part 2 is mobile in a manner of being relatively close to or separate.
Lifting driving portion 3 is made of actuator etc..Lifting driving portion 3 acts as follows control by aftermentioned control unit 7 System, that is, so that upside any one of holding member 1 or downside holding member 2 or the two is relatively close to movement to Z-direction, with Make upside workpiece W1 and downside workpiece W2 via one be coated in these binding faces or the sealing material of the two each other Overlapping.
As the concrete example of lifting driving portion 3, in the case where the example as described in FIG. 1 to FIG. 7, make upside holding member 1 Decline to downside holding member 2.
Also, it can also be changed although not shown as other examples, but as follows, that is, downside holding member 2 is made to rise Instead of upside holding member 1, or make upside holding member 1 and downside holding member 2 the two movements closer to each other, or makes upside 1 moving in rotation of holding member simultaneously inverts and opposed with downside holding member 2 towards Z-direction, make later upside holding member 1 or under Any one of side holding member 2 or the two are relatively close to movement to Z-direction.
Moving in component 4 is that workpiece W1 and the workpiece of downside workpiece W2 are removed on the upside of moving in from exterior space S2 to fitting space S 1 Enter to use transport mechanism.
As component 4 is moved in, have non-contactly to transport upside workpiece W1 in a manner of face 41 floats from its smooth moving in Float conveying mode with downside workpiece W2, utilize conveying machine people conveying upside workpiece W1 and downside workpiece W2 (not shown) Robot transports mode, in the way of workpiece W1 on the upside of conveyer conveying (not shown) and downside workpiece W2 conveyer belt conveying etc.. These float in conveying mode or robot conveying mode or conveyer belt conveying mode etc. with empty from exterior space S2 to fitting Between S1 make to move in that face 41 or the conveying machine people or the conveyer etc. move in a manner of close or separate moves in drive Dynamic portion 42.
In particular, move in component 4 and be when floating conveying mode preferably have it is smooth move in face 41 and with upside workpiece W1 and What downside workpiece W2 was non-contactly transported from the state that face of moving in 41 floats floats conveying unit 43.
Moving in for component 4 is moved in be made of with driving portion 42 actuator etc..It moves in and passes through aftermentioned control with driving portion 42 Portion 7 acts as follows control, that is, when moving in upside workpiece W1 and downside workpiece W2, makes to move in face 41 or the conveying machine people Or described conveyer etc. is moved to the downside chuck face 21 of downside holding member 2 to X-direction or Y-direction etc. are close.Move in upside After workpiece W1 and downside workpiece W2, make to move in face 41 or the conveying machine people or the conveyer etc. from downside holding member 2 downside chuck face 21 is to the separate mobiles such as X-direction or Y-direction.
Moreover, floating the moving in component 4 of conveying mode, smooth face 41 of moving in is supported to the X intersected with Z-direction The reciprocating movements such as direction or Y-direction freely, and have the side for making upside workpiece W1 and downside workpiece W2 to float from face of moving in 41 Formula non-contactly supports as moving in of can moving with floating portion 41a.
It moves in and uses the ejection power for floating portion's 41a using gas or ultrasonic wave power etc., face of moving in 41 and downside workpiece W2's Opposed space between non-binding face, generate simultaneously respectively separating pressure from from 41 side of face of moving in the downside side workpiece W2 and and this On the contrary from the downside side workpiece W2 to face of moving in 41 side close to pressure.It is configured to by keeping these separating pressures and close pressure The balance of power forms air film 41b to Z-direction between face of moving in 41 and downside workpiece W2, keeps downside workpiece W2 from moving in The state that face 41 floats.
As moving in portion 41a is floated for using gas ejection power, there is " Bernouilly type " and " porous type ".
In " Bernouilly type ", upside work is non-contactly kept by the air film 41b of negative pressure and the pressure difference of air atmosphere Part W1 and downside workpiece W2.If describing in detail, in " Bernouilly type ", by from 41 side of face of moving in downside workpiece W2 side spray outlet Body and the pressure difference of the air film 41b of negative pressure and air atmosphere formed, downside workpiece W2 is drawn to 41 side of face of moving in.As it does so, If the narrower intervals of the air film 41b of negative pressure and pressure steeply rises, push away downside workpiece W2, and keep air film 41b's Pressure is balanced.Need to spray a large amount of gas when non-contactly keeping as a result,.
And in " porous type ", by spraying gas from entire porous layer to downside workpiece W2, the separating pressure is generated While, it is generated and progress vacuum suction (not shown) from multiple suction holes for being opened in porous layer described close to pressure.
Therefore, as moving in floating the concrete example of portion 41a, as shown in FIG. 1 to FIG. 7, compared with " Bernouilly type ", It is preferred that air film 41b can at least be formed between upside workpiece W1 and downside workpiece W2 by spraying flow using the moment of gas, And can make upside workpiece W1 and downside workpiece W2 float from face of moving in 41 described in " porous type ".
Float moving in component 4 for conveying mode, float conveying unit 43 have hold with by move in float portion 41a from Move in the operating mechanism (not shown) etc. of upside workpiece W1 and downside workpiece W2 that the mode that face 41 floats non-contactly is supported.
The operating mechanism is configured to movably be supported along the direction XY for moving in face 41 using actuator etc..
It is held in upside workpiece W1 and downside workpiece W2 or part holding moreover, operating mechanism has by the way that attraction etc. is whole The chuck segment (not shown) of the end of side workpiece W1 and downside workpiece W2.Operating mechanism is configured to (floating to float from face of moving in 41 State out) moves and is handover to the downside chuck face 21 of downside holding member 2 to X-direction or Y-direction etc..
As the concrete example for moving in component 4, in the case where the example as shown in FIG. 1 to FIG. 7, driving portion 42 is used by moving in Make to move in face 41 towards the downside chuck face 21 of downside holding member 2 to X-direction close to movement.It will be upper by floating conveying unit 43 Side workpiece W1 and downside workpiece W2 successively float conveying to X-direction, move in the downside chuck face 21 of downside holding member 2.
Also, it can also be changed although not shown as other examples, but as follows, that is, will be based on moving in driving portion 42 The moving direction for moving in face 41 and upside workpiece W1 and downside workpiece W2 the direction moving in direction and being changed to other than X-direction, Or upside workpiece W1 and downside workpiece W2 is not made to float from face of moving in 41 and move in using component 4 is moved in fitting space S 1, or Use the conveying machine people or described conveyer etc. as component 4 is moved in, thus instead of floating conveying mode.
Moving out component 5 is to remove from fitting space S 1 by the abutted equipment W that fitting terminates to the workpiece that external space S 2 moves out Transport mechanism is used out.
As moving out component 5, patch is non-contactly transported in a manner of floating from the face of moving out 51 with moving in the same manner as component 4 to have That closes equipment W floats conveying mode, in the way of the robot conveying of conveying machine people conveying abutted equipment W (not shown), benefit With the conveyer belt conveying mode etc. of conveyer conveying abutted equipment W (not shown).These float conveying mode or robot conveying In mode or conveyer belt conveying mode etc. have from exterior space S2 to fitting space S 1 make the face of moving out 51 or conveying machine people with Close or isolated mode is mobile to move out with driving portion 52.
In particular, move out component 5 and be when floating conveying mode preferably have it is smooth move out face 51, Ji Yicong moves out face 51 The mode floated non-contactly transports the moving out with floating conveying unit 53 of abutted equipment W.
Moving out for component 5 is moved out to be made of with driving portion 52 actuator etc..It moves out and passes through aftermentioned control with driving portion 52 Portion 7 acts as follows control, i.e., after the fitting of upside workpiece W1 and downside workpiece W2, by the face of moving out 51 or the transporter Device people or the conveyer etc. move towards the downside chuck face 21 of downside holding member 2 to X-direction or Y-direction etc. are close.It removes Out after abutted equipment W, make the face of moving out 51 or the conveying machine people or the conveyer etc. from the downside of downside holding member 2 Chuck face 21 is to the separate mobiles such as X-direction or Y-direction.
As the concrete example for moving out component 5, in the case where the example as shown in FIG. 1 to FIG. 7, driving portion 52 is used by moving out Make downside chuck face 21 of the face of moving out 51 from exterior space S2 towards downside holding member 2 to the close movement of X-direction.By moving out Abutted equipment W is floated into conveying from the downside chuck face 21 of downside holding member 2 with conveying unit 53 is floated, towards move out face 51 with It is point-blank moved out with direction is moved in.
Also, it can also be changed although not shown as other examples, but as follows, i.e., it will be based on moving out with driving portion 52 The moving direction in face 51 and the direction for moving out direction and being changed to other than X-direction of abutted equipment W are moved out, or will be based on moving in component 4 workpiece, which moves in direction and moves out direction based on the workpiece for moving out component 5, bends to predetermined angular to the direction XY θ, or will move in Component 4 is integrated with component 5 is moved out and moves out to the opposite direction that workpiece moves in direction, or is changed to not make abutted equipment W from removing It appears 51 to float and move out using moving out component 5, or uses the conveying machine people or the conveyer etc. as moving out component 5, thus instead of floating conveying mode.
Also, it is preferred that fitting space S 1 is formed in the inside of pressure-variable chamber 6, exterior space is divided by the wall of chamber 6 S2, the fitting space S 1 in chamber 6 is equipped with upside holding member 1 and downside holding member 2.
Chamber 6 includes entrance 61, by moving in component 4 and moving out component 5 keeps upside workpiece W1 and downside workpiece W2 logical It crosses；Opening and closing driving portion 62, is opened and closed entrance 61；And decompression driving portion 6a, by for being depressurized to fitting space S 1 Compressor etc. is constituted.
It is labeled in advance moreover, any one of upside holding member 1 or downside holding member 2 or the two have detection The position detection parts (not shown) such as upside workpiece W1 and the camera of mark or corner etc. on the workpiece W2 of downside and make upside keep Any of component 1 or downside holding member 2 relative to another to the direction XY θ relatively move contraposition with driving portion (not Diagram).Act the contraposition with driving portion according to output by the position testeding outleting part, by make upside holding member 1 and under Side holding member 2 is relatively moved to the direction XY θ, aligns upside workpiece W1 and downside workpiece W2 on the direction XY θ.
If describing in detail, under air atmosphere, by moving in fitting space of the component 4 from exterior space S2 into chamber 6 S1 moves in upside workpiece W1 and downside workpiece W2 respectively, workpiece W1 and downside workpiece on the upside of the fitting space S 1 depressurized carries out The contraposition on the direction XY θ is carried out while the overlapping of W2.Later, under air atmosphere, by moving out component 5 for upside workpiece The abutted equipment W that the fitting of W1 and downside workpiece W2 terminates is moved out from fitting space S 1 to external space S 2.
As the concrete example of chamber 6, in the case where the example as shown in FIG. 1 to FIG. 7, it is configured to be equipped in chamber 6 The tegmental wall 63 of upside holding member 1 can be divided relative to the bottom wall 64 for being equipped with downside holding member 2 to Z-direction.By with It is relatively close to Z-direction or isolated mode moves back and forth, fitting space S 1 is configured to opening and closing freely and becomes sealing structure.It is logical When crossing opening and closing driving portion 62 separates the tegmental wall 63 of chamber 6 from bottom wall 64 to Z-direction, make input path as entrance 61 While 61a is with road 61b opening is moved out, keep upside holding member 1 and 2 relative separation of downside holding member mobile.
It is thus possible to enough opening and closing driving portions 62 and lifting driving portion 3 for being constituted chamber 6 with a driving source.
Moreover, downside holding member 2 is movably supported relative to the bottom wall 64 of chamber 6 to the direction XY θ, downside work Part W2 by the movement of the contraposition driving portion and via downside holding member 2 be maintained at the upper of upside holding member 1 Side workpiece W1 is aligned on the direction XY θ.
Also, it can also be changed although not shown as other examples, but as follows, i.e., it is divided to Z-direction by making Any of chamber 6 is configured to opening and closing freely towards another reversion and becomes sealing structure, or a part in chamber 6 The door of opening and closing freely is set, and is configured to be bonded the opening and closing of space S 1 freely and becomes sealing structure, thus instead of the segmentation of chamber 6 Formula, or constitute the opening and closing driving portion 62 of chamber 6 using different driving sources and go up and down driving portion 3, or make upside holding member 1 Upside workpiece W1 and the downside workpiece W2 of downside holding member 2 aligned on the direction XY θ.
Control unit 7 is maintaining part 11a, the handover driving portion 12a of connecting mechanism 12, downside with upside holding member 1 Holding member 2 floats portion 22, lifting driving portion 3, moves in moving in driving portion 42 and floating conveying unit 43, move out for component 4 Component 5 moves out with driving portion 52 and moves out the controller being electrically connected with conveying unit 53 is floated.Moreover, control unit 7 also with The opening and closing driving portion 62 of chamber 6 and the transformation driving portion, for making upside workpiece W1 and downside workpiece W2 to the direction XY θ The contraposition driving portion of relative movement, the electrical connection such as make the cured curing mechanism of the sealing material.
Controller as control unit 7 is according to the program for being pre-set in its control circuit (not shown), to preset Time point successively carry out action control respectively.
If describing in detail, such as shown in Fig. 1 (a) or Fig. 5 (a), control unit 7 acts as follows control, i.e., chamber 6 out Entrance 61 (input path 61a) carries out opening operation with driving portion 62 (lifting driving portion 3) by opening and closing, makes the patch in chamber 6 Closing space S 1 becomes air atmosphere.
In this case, control unit 7 acts as follows control, i.e., is made by moving in moving in for component 4 with driving portion 42 Face 41 or conveying machine people etc. are moved in close to the downside chuck face 21 of downside holding member 2, by floating conveying unit 43 or conveying Robot etc. removes upside workpiece W1 towards the downside chuck face 21 under air atmosphere by entrance 61 (input path 61a) Enter.
Later, as shown in Fig. 1 (b) or Fig. 5 (b), control unit 7 acts as follows control, that is, passes through connecting mechanism 12 Upside workpiece W1 is handover to the upside chuck face 11 of upside holding member 1 with driving portion 12a by handover, is protected using maintaining part 11a It holds as that can not move.
Then, as shown in Fig. 2 (a) or Fig. 6 (a), control unit 7 acts as follows control, i.e., by floating conveying unit 43 Or conveying machine people etc. makes downside workpiece W2 while carrying out position limitation from exterior space S2 using conveying guiding element 44 by going out Entrance 61 (input path 61a) is moved in towards the downside chuck face 21 under air atmosphere.
At this point, even if making upside workpiece W1 and downside work using any of conveying unit 43 or conveying machine people etc. is floated Part W2 is moved in the downside chuck face 21 of downside holding member 2, also acts as follows control, i.e. upside workpiece W1 and downside work Part W2 is non-contactly supported to move floating portion 22 in a manner of floating from smooth downside chuck face 21 first.
Next, act as follows control, i.e., from float portion 22 be switched to contact maintaining part 21a, downside workpiece W2 with Downside chuck face 21 contacts and is maintained as not moving.
Later, as shown in Fig. 2 (b) or Fig. 6 (b), control unit 7 acts as follows control, and the entrance 61 of chamber 6 (is removed Enter access 61a) shutoff operation is carried out with driving portion 62 (lifting driving portion 3) by opening and closing, started by decompression driving portion 6a Fitting space S 1 in chamber 6 is depressurized.
Substantially simultaneously with this, upside holding member 1 and downside holding member 2 is made to be relatively close to shifting using lifting driving portion 3 It is dynamic.It is controlled as follows at the time point, i.e., upside holding member 1 or downside holding member is made by the contraposition driving portion Any of 2 adjust movement to XY θ relative to another, carry out the contraposition (alignment) of upside workpiece W1 and downside workpiece W2.
After the contraposition, control unit 7 is controlled as follows, i.e., makes the upper of upside holding member 1 using lifting driving portion 3 Side chuck face 11 and the downside chuck face 21 of downside holding member 2 are maintained at the upper of upside chuck face 11 further to movement Side workpiece W1 with contact be maintained at downside chuck face 21 downside workpiece W2 between each other to Z-direction across the sealing material and The enclosed overlapping material.
It at the end of contraposition above-mentioned, is controlled, i.e., is decompressed to using decompression driving portion 6a by space S 1 is bonded as follows Vacuum or reduced atmosphere close to vacuum make upside workpiece W1 and downside workpiece W2 Chong Die to Z-direction under vacuum.
Then, as shown in Fig. 3 (a) or Fig. 7 (a), control unit 7 acts as follows control, and the entrance 61 of chamber 6 (is removed Outlet 61b) opening operation carried out with driving portion 62 (lifting driving portion 3) by opening and closing, make fitting space S 1 in chamber 6 with outside Headroom S2 is connected to and becomes air atmosphere.
Therefore, being flattened upside workpiece W1 and downside workpiece W2 by atmospheric pressure becomes abutted equipment W at specified gap.
Later, as shown in Fig. 3 (b) or Fig. 7 (b), control unit 7 makes to move out by moving out moving out for component 5 with driving portion 52 Face 51 or conveying machine people etc. are close to the downside chuck face 21 of downside holding member 2.Later, act as follows control, i.e., it is logical Crossing to move out moves out abutted equipment W (by entrance 61 from downside chuck face 21 with floating conveying unit 53 or conveying machine people etc. Road 61b) it is moved out to external space S 2.
Moreover, being illustrated the program for the control circuit for being set in control unit 7 as the manufacturing method of abutted equipment W.
The manufacturing method of abutted equipment W involved in embodiments of the present invention includes: holding process as master operation, Upside workpiece W1 is maintained at the upside chuck face 11 of upside holding member 1 and downside workpiece W2 is maintained at downside maintaining part The smooth downside chuck face 21 of part 2；And bonding process, pass through any one of upside holding member 1 or downside holding member 2 Or the two is relatively close to movement, overlapping upside workpiece W1 and downside workpiece W2.
In addition to this, as keep process preceding process, preferably include to move in process, from exterior space S2 to be configured at patch Upside workpiece W1 is moved in using component 4 is moved in the upside chuck face 11 for closing the upside holding member 1 of space S 1, is bonded to being configured at Downside workpiece W2 is moved in using component 4 is moved in the smooth downside chuck face 21 of the downside holding member 2 of space S 1.
Moreover, keeping in process, relative to downside holding member 2, by floating portion 22 to float from downside chuck face 21 Mode non-contactly support using move in component 4 be moved to fitting space S 1 downside workpiece W2, then, by decompression use Before driving portion 6a terminates the fitting decompression of space S 1, downside workpiece W2 contact is set to be maintained at downside by contacting maintaining part 21a Chuck face 21.
In bonding process, any one court in upside holding member 1 or downside holding member 2 is made by lifting driving portion 3 Be relatively close to movement to another to Z-direction, or make upside holding member 1 and downside holding member 2 the two each other to Z-direction It is relatively close to movement.As a result, after the decompression of the fitting space S 1 based on decompression driving portion 6a terminates, make upside workpiece W1 Make workpiece each other to Z-direction across the sealing material or the enclosed overlapping material or directly between each other with downside workpiece W2 Overlapping.
According to the manufacturing device A of abutted equipment W involved in this embodiments of the present invention and manufacturing method, it is being based on In the moving in etc. of conveying machine people, though downside workpiece W2 remain because locality it is flexible caused by stress, can also be by floating Portion 22 non-contactly supports downside workpiece W2 in a manner of floating from downside chuck face 21.Release downside workpiece W2's as a result, Local stress, downside workpiece W2 become the smooth state along the smooth downside chuck face 21 of downside holding member 2.
Then, the downside workpiece W2 of smooth state is made to contact and be protected with downside chuck face 21 by contacting maintaining part 21a It holds as that can not move.
Later, lifting driving portion 3 by control unit 7 make upside holding member 1 or downside holding member 2 in one or this Two are relatively close to movement.The downside workpiece W2 of smooth state is maintained at upside chuck face 11 with by maintaining part 11a as a result, Upside workpiece W1 can be without being overlapped in positional deviation.
Therefore, the local stress for remaining in downside workpiece W2 can be removed and be bonded with smooth state with upside workpiece W1.
As a result, with lower board holder surface opening recess have multiple lift pins through hole or slot etc. with Past holder is compared, and the surface with downside holding member 2 does not have the recess of lifter pin through hole or slot etc. and smooth Downside chuck face 21, therefore a part of downside workpiece W2 will not occur locality is stretched and it is concavo-convex to bend to due to its self weight The case where.Thereby, it is possible to improve the Anawgy accuracy of upside workpiece W1 and downside workpiece W2.At the same time, even rigidity is lower Ultra-thin plate workpiece (substrate), can also prevent binding face between upside workpiece W1 and downside workpiece W2 from generating bubble, It can carry out not having bladdery uniform fitting.
Moreover, the arm or downside lifter pin of conveying machine people can not contact plate workpiece (substrate) and carry out plate workpiece The conveying of (substrate).Therefore, it can prevent from adhering to the foreign matters such as impurity because of the arm or downside lifter pin of contact conveying machine people, no Unevenness is generated between meeting and other positions, is able to carry out highly uniform fitting.
As its concrete example, even if being bonded the liquid crystal glass with a thickness of 0.2mm of G8 size using existing alignment method Glass substrate can also improve the bit errors of upside workpiece W1 and downside workpiece W2 to sub-micrometer precision, it can be achieved that yield rate Raising.
In particular, be preferably provided at least move in downside workpiece W2 to fitting space S 1 move in component 4, upside holding member 1 And downside holding member 2 is provided to the inside of pressure-variable chamber 6, chamber 6 has and makes to move in opening and closing that component 4 passes through going out freely Entrance 61.
At this point, opening the entrance 61 of chamber 6 under air atmosphere, downside workpiece W2 is moved in down by moving in component 4 The downside chuck face 21 of side holding member 2.Later, in the state of closing entrance 61 and being depressurized to chamber 6, pass through So that upside any one of holding member 1 or downside holding member 2 or the two is relatively close to movement, under reduced atmosphere, puts down The downside workpiece W2 of sliding state is Chong Die with upside workpiece W1.
Therefore, can be bonded under vacuum the downside workpiece W2 of the smooth state for eliminating remaining local stress with Upside workpiece W1.
As a result, the workpiece W2 and upside workpiece W1 on the downside of fitting under vacuum or reduced atmosphere close to vacuum, therefore energy Enough it is reliably prevented the faying surface that air is mixed into upside workpiece W1 and downside workpiece W2 from fitting space S 1.Thereby, it is possible to prevent Due to bubble enter upside workpiece W1 and downside workpiece W2 faying surface and locality occur the non-uniform situation of specified gap, energy Enough make the abutted equipment W of higher quality.
Float conveying unit 43 also, it is preferred that moving in component 4 and having, at least smooth is moved in a manner of face 41 floats by from it Non-contactly conveying downside workpiece W2.
At this point, being transported when at least being moved in downside workpiece W2 to downside holding member 2 by moving in component 4 using floating Portion 43 is non-contactly to transport downside workpiece W2 from smooth the moving in for moving in component 4 in a manner of face 41 floats.Downside work as a result, Local stress will not be generated in a part of part W2, downside workpiece W2 is handover to downside holding with smooth (emersion) state that floats The downside chuck face 21 of component 2.
Therefore, the local stress for remaining in downside workpiece W2 can be removed and further with smoother state and upside work Part W1 fitting.
As a result, the vacuum suction with arm or lifter pin by conveying machine people is remained in a part of lower board The previous situation joined in the state of local stress is compared, and is not necessarily to conveying machine people or lifter pin, therefore can be actually Without conveying downside workpiece W2 in the state of bumps.Even if downside workpiece W2 is maintained at the smooth of downside holding member 2 as a result, Downside chuck face 21, locality stress will not also remain completely, when the workpiece W1 and downside workpiece W2 of fitting upside, can be realized Uniform and high-precision fitting in binding face.
Moreover, being difficult to transport the glass or plastics with a thickness of several 10um according to moving in based on previous conveying machine people Film can not especially transport the thin base of the large size such as G8 size.But removing based on the downside workpiece W2 for floating conveying unit 4b Enter, can be realized and directly move in without using conveying machine people or lifter pin, it can without using the bracket or fixture of auxiliary It is enough to be directly bonded slim substrate with high precision each other.
[embodiment 1]
Then, various embodiments of the present invention are illustrated with reference to the accompanying drawings.
As shown in Fig. 1 (a), Fig. 1 (b)~Fig. 4 (a), Fig. 4 (b), abutted equipment W involved in the embodiment of the present invention 1 In manufacturing device A, component 4 is moved in using what workpiece above-mentioned was floated conveying and floats conveying mode, and is provided with workpiece Positioning guiding element, rather than the robot above-mentioned based on conveying machine people transports mode.
If describing in detail, move in component 4 have conveying guiding element 44, in based on the work transporting for floating conveying unit 43 with it is upper Side workpiece W1 and downside workpiece W2 contact, edge and the direction intersected based on the work transporting direction (X-direction) for floating conveying unit 43 (Y-direction) is limited.
It is preferred that conveying guiding element 44 with become the side Y that intersects of the X-direction based on the work transporting direction for floating conveying unit 43 It is multiple across the interval configuration for the width dimensions for being roughly equivalent to upside workpiece W1 and downside workpiece W2 upwards.
In the case where configuring multiple conveying guiding elements 44, when being preferably based on the work transporting for floating conveying unit 43, lead conveying To the direction (Y-direction) intersected with work transporting direction (X-direction) close to movement, workpiece is removed for any one of part 44 or the two When standby other than sending, make to transport any one of guiding element 44 or the two separate mobile.
In example shown in Fig. 1 (a), Fig. 1 (b)~Fig. 4 (a), Fig. 4 (b), conveying guiding element 44 is a pair of guide rails.Make by floating Play the end of upside workpiece W1 and downside workpiece W2 that conveying unit 43 is non-contactly transported with the state floated from face of moving in 41 It is directly or indirectly contacted respectively with a pair of conveying guiding element 44.Upside workpiece W1 and downside workpiece W2 will not be to Y-direction position as a result, Deviate, and is directed to the fixation position in the downside chuck face 21 of downside holding member 2.
In the case where illustrated example, lead the end of upside workpiece W1 and downside workpiece W2 with a pair for becoming conveying guiding element 44 The medial surface of rail distinguishes sliding contact.
Also, although not shown as other examples, but following various changes can be carried out, i.e., by becoming conveying guiding element 44 Medial surface configuration roller etc. the rotary bodies of guide rail reduce the frictional resistance with workpiece, or the medial surface pair from one of guide rail The gas of workpiece blowing pressurized air etc. pushes workpiece to the medial surface of another guide rail, or adding as conveying guiding element 44 will The limiter that workpiece is positioned to X-direction.
The downside chuck face 21 of downside holding member 2 have with using move in component 4 float conveying unit 43 move in it is upper Side workpiece W1 and downside workpiece W2 is contacted and is determined along what work transporting direction (X-direction) and crisscross (Y-direction) was limited Position guiding element 23.
Guiding element 23 is positioned from the guide rail 23a configured along Y-direction a pair the and limiter 23b etc. for positioning workpiece to X-direction It constitutes.
Preferably a pair of guide rail 23a move in component 4 based on the work transporting for floating conveying unit 43 when, removed respectively to workpiece Send crisscross (Y-direction) in direction (X-direction) close to movement, when standby other than work transporting, makes its distinguish separate mobile, And it is standby in the position for the movement for not interfering the upside holding member 1 based on lifting driving portion 3.
In example shown in Fig. 1 (a), Fig. 1 (b)~Fig. 4 (a), Fig. 4 (b), make to equally constitute with the guide rail of conveying guiding element 44 A pair of guide rails 23a and upside workpiece W1 non-contactly transported by the state to float from face of moving in 41 that floats conveying unit 43 With the end directly or indirectly contact respectively of downside workpiece W2.Upside workpiece W1 and downside workpiece W2 will not be to Y-direction position as a result, Deviation is set, and is directed to the fixation position in the downside chuck face 21 of downside holding member 2.
Limiter 23b is prominent or falls into downside chuck face 21 is arranged in freely, is connect by the X-direction front end face with workpiece Touching is to position.
According to the manufacturing device A of abutted equipment W involved in this embodiment of the present invention 1, by floating conveying unit 43 At least by downside workpiece W2 from moving in when moving in face 41 and floating conveying to downside holding member 2 of component 4, with conveying guiding element 44 and Positioning guiding element 23 successively contacts, and is positioned along the direction (Y-direction) intersected with work transporting direction (X-direction).
Therefore, downside workpiece W2 can accurately be floated to conveying to the specified position on downside holding member 2.
As a result, having the advantage that, the Anawgy accuracy of upside workpiece W1 and downside workpiece W2 can be improved, and make Make the abutted equipment W of higher quality.
Also, in the manufacturing method of abutted equipment W involved in the embodiment of the present invention 1, as the bonding process Process afterwards, the abutted equipment W including terminating the fitting of upside workpiece W1 and downside workpiece W2 are empty from fitting using component 5 is moved out Between S1 to what external space S 2 moved out move out process.
It is described to move out in process, by move out component 5 move out with float conveying unit 53 by abutted equipment W from downside keep The downside chuck face 21 of component 2 is moved out with float state to external space S 2 towards the face 51 that moves out for moving out component 5.
Float conveying mode move out component 5 move out face 51 with move in the same manner as component 4, have with floating from the face of moving out 51 The mode risen non-contactly supports the moving out with floating portion 51a of abutted equipment W.It moves out with the ejection for floating portion's 51a using gas Power or ultrasonic wave power etc., are formed with to Z-direction with the opposed space of the downside workpiece W2 of abutted equipment W in the face of moving out 51 and move out use Air film 51b, and it is configured to the state for keeping abutted equipment W to float from the face of moving out 51.
According to the manufacturing method of abutted equipment W involved in this embodiment of the present invention 1, the upside in fitting space S 1 After being bonded of workpiece W1 and downside workpiece W2 terminates, to float from the state that face 51 floats that moves out for moving out component 5 and move out patch Close the abutted equipment W terminated.
Therefore, though especially downside workpiece W2 be the laminal substrate as film, the upside workpiece W1 being bonded and Downside workpiece W2 will not locality it is flexible and the two relative position is deviateed or generates stress, and the precision when keeping fitting It is moved out under state.
Therefore, higher position precision the abutted equipment W for the downside workpiece W2 for being bonded film-form can be kept to be bonded State move out.
As a result, higher quality can be made compared with the previous method moved out by conveying machine people or lifter pin Abutted equipment W.
[embodiment 2]
As shown in Fig. 5 (a), Fig. 5 (b)~Fig. 7 (a), Fig. 7 (b), abutted equipment W involved in the embodiment of the present invention 2 In manufacturing device A, as the connecting mechanism 12 of upside holding member 1, by upside holding member 1 or downside holding member 2 Any one or the two be relatively close to movement, upside workpiece W1 is handover to the structure and FIG. 1 to FIG. 4 in upside chuck face 11 Shown in embodiment 1 it is different.Structure in addition to this is identical as embodiment 1 shown in FIG. 1 to FIG. 4.
If describing in detail, in embodiment 2, as the connecting mechanism 12 of upside holding member 1, instead of shown in FIG. 1 to FIG. 3 Lifter pin 12b makes upside holding member 1 and downside holding member 2 by going up and down driving portion 3 as shown in Fig. 5 (b) and Fig. 6 (a) It is relatively close to movement, portion 22 will be floated in a manner of floating from downside chuck face 21 non-contactly downside holding member 2 The upside workpiece W1 holding float state being kept is handover to the maintaining part 11a in upside chuck face 11 with planar.
Also, it is preferred that the maintaining part 11a for becoming the upside chuck face 11 of handover destination is configured to by being inhaled based on negative pressure Adsorption capacity and adhesion strength or the electrostatic adsorption force combination drawn, keep the smooth planar along upside chuck face 11 for upside workpiece W1 Structure, rather than shown in FIG. 1 to FIG. 3 as lifter pin 12b locality keep.
Control unit 7 when the handover of upside workpiece W1, makes upside holding member by going up and down driving portion 3 shown in Fig. 5 (b) Any of 1 or downside holding member 2 approach movement towards another.As a result, with the maintaining part 11a in upside chuck face 11 with Carrying out action control by way of floating the non-fitting plane-plane contact for the upside workpiece W1 that portion 22 floats from downside chuck face 21.
After the upside chuck face 11 of upside holding member 1 and upside workpiece W1 face contact, it is switched to based on maintaining part 11a Workpiece keep, upside workpiece W1 can be joined.
Then, as shown in the double dot dash line of Fig. 5 (b) and Fig. 6 (a), by go up and down driving portion 3 make upside holding member 1 or For any of downside holding member 2 from another separate mobile, thus, it is possible to move in subsequent downside workpiece W2.
In example shown in Fig. 5 (a), Fig. 5 (b)~Fig. 7 (a), Fig. 7 (b), the opening and closing driving portion 62 of chamber 6 and lifting are driven Dynamic portion 3 is made of a driving source.The tegmental wall 63 of chamber 6 is used close to movement to bottom wall 64 with driving portion 62 by opening and closing Entrance 61 (input path 61a) carries out shutoff operation, substantially simultaneously with this, makes upside chuck face 11 by going up and down driving portion 3 The non-of maintaining part 11a and upside workpiece W1 is bonded plane-plane contact and is kept.Upside workpiece W1 is as a result, with from downside chuck face 21 states floated are handover to the maintaining part 11a in upside chuck face 11.
Also, as other although not shown but it is also possible to be the opening and closing of chamber 6 driving portion 62 and lifting driving portion 3 It is made of driving source independent, the pass with the entrance 61 (input path 61a) of the chamber 6 based on opening and closing driving portion 62 Closed operation is unrelated, by go up and down driving portion 3 make upside holding member 1 close to be moved to the maintaining part 11a in upside chuck face 11 with The position of the non-fitting plane-plane contact of the upside workpiece W1 floated from downside chuck face 21.
According to the manufacturing device A of abutted equipment W involved in this embodiment of the present invention 2 and manufacturing method, under utilization The portion 22 that floats of side holding member 2 keeps the upside workpiece W1 for floating (emersion) holding from downside chuck face 21 under float state The upside chuck face 11 of upside holding member 1 is handover to planar.
Therefore, upside workpiece W1 can be handover to upside holding member 1 in the state of absolutely not local stress Upside chuck face 11.
As a result, having the following advantages that, the Anawgy accuracy of upside workpiece W1 and downside workpiece W2 can be improved, and make more The abutted equipment W of high-quality.
Moreover, the connecting mechanism 12 as upside holding member 1, also has the following advantages that, as shown in FIG. 1 to 3 like that By running through the tegmental wall 63 of chamber 6, compared with using the embodiment 1 of the lifter pin 12b moved freely to Z-direction, without in chamber The seal members such as o-ring are set between the tegmental wall 63 and lifter pin 12b of room 6, the knot of connecting mechanism 12 and chamber 6 can be simplified Structure.
In addition, will move in by moving in component 4 using connecting mechanism 12 in the preceding implementation form shown and (float conveying) and is upper Side workpiece W1 is handover to the upside chuck face 11 of upside holding member 1, and being remained using maintaining part 11a can not move, but not It is defined in this, can also be changed to connecting mechanism 12 and maintaining part 11a in upside holding member 1 aforementioned float portion and contact Maintaining part.
At this point, upside holding member 1 includes and floats portion, has and generate opposite direction respectively between the workpiece W1 of upside Separating pressure and mechanism close to pressure；And contact maintaining part, have adjustment separating pressure and the mechanism close to pressure.
Even if as a result, due to move in component 4 it is equal and caused by workpiece W1 residual in upside is flexible because of locality stress, lead to It crosses and floats portion non-contactly bearing upside workpiece W1 in a manner of floating from upside chuck face 11.Therefore, upside workpiece has been released The local stress of W1, upside workpiece W1 become the smooth state along the smooth upside chuck face 11 of upside holding member 1.It connects , so that the upside workpiece W1 of smooth state is contacted and is remained and can not move with upside chuck face 11 by contacting maintaining part.Cause This, can remove the local stress for remaining in upside workpiece W1 and be maintained at upside chuck face 11 with smooth state.
Also, in the preceding embodiment shown, as moving in component 4 and moving out component 5, float the floating of conveying using by workpiece Conveying mode is played, but not limited to this, can also will move in component 4 or move out one in component 5 or the two are changed to Robot transports mode or conveyer belt transports mode.

Claims (6)

1. a kind of manufacturing device of abutted equipment, in fitting space upside workpiece is maintained at upside holding member and by downside Workpiece is maintained at downside holding member, is relatively close to movement by the upside holding member and the downside holding member, pastes The upside workpiece and the downside workpiece are closed, the manufacturing device of the abutted equipment is characterized in that having:
The upside holding member, the upside for being configured at the fitting space and there is installation to keep the upside workpiece freely Chuck face；
The downside holding member is configured at the fitting space and there is installation to keep the smooth of the downside workpiece freely Downside chuck face；
Driving portion is gone up and down, any one of the upside holding member or the downside holding member or the two are relatively close to Movement is to be overlapped the upside workpiece and the downside workpiece；And
Control unit does not carry out action control to upside chuck face, downside chuck face and the elevation actuating part,
There is the upside holding member upside workpiece to be maintained as irremovable maintaining part,
The downside holding member, which includes, floats portion, has the separation for generating opposite direction respectively between the downside workpiece Pressure and mechanism close to pressure；And contact maintaining part, have and adjust the separating pressure and the mechanism close to pressure,
The control unit is controlled as follows: float described in holding portion the separating pressure and the balance close to pressure, Institute is non-contactly supported relative to the downside holding member in such a way that the downside workpiece floats from downside chuck face State downside workpiece, float portion from described and be switched to the contact maintaining part, make it is described close to pressure compared to the separating pressure by The cumulative downside workpiece, which is contacted, is maintained at downside chuck face, protects the upside by the lifting driving portion It holds any one of component or the downside holding member or the two is relatively close to movement, be maintained at by the maintaining part The upside workpiece in upside chuck face is Chong Die with the downside workpiece.
2. the manufacturing device of abutted equipment according to claim 1, which is characterized in that
The manufacturing device of the abutted equipment has the component of moving in that the downside workpiece is at least moved in the fitting space, institute Holding member and the downside holding member are provided to the inside of the chamber of pressure-variable on the upside of stating, and the chamber is described with making Move in the entrance being opened and closed freely that component passes through.
3. the manufacturing device of abutted equipment according to claim 2, which is characterized in that
It is described move in component and have from its smooth face of moving at least non-contactly transported in such a way that the downside workpiece floats Float conveying unit.
4. the manufacturing device of abutted equipment according to claim 3, which is characterized in that
It is described move in component have at least contacted simultaneously with the downside workpiece in based on the work transporting for floating conveying unit Along the conveying guiding element limited with the direction intersected based on the work transporting direction for floating conveying unit, the downside is kept The downside chuck face of component has and is at least moved in the downside workpiece that component is moved in by described and contacted and remove along workpiece Send direction and the crisscross positioning guiding element limited.
5. a kind of manufacturing method of abutted equipment, in fitting space upside workpiece is maintained at upside holding member and by downside Workpiece is maintained at downside holding member, is relatively close to movement by the upside holding member and the downside holding member, pastes The upside workpiece and the downside workpiece are closed, the manufacturing method of the abutted equipment is characterised by comprising:
Process is kept, the upside workpiece is maintained to the upside chuck face of the upside holding member, by the downside workpiece It is maintained at the smooth downside chuck face of the downside holding member；And
Bonding process, by being connected to each other any one of the upside holding member or the downside holding member or the two It is close mobile to be overlapped the upside workpiece and the downside workpiece,
In the holding process, the separation pressure generated respectively to opposite direction between the downside workpiece by floating portion is kept Power and balance close to pressure are kept in such a way that the downside workpiece floats from downside chuck face relative to the downside Component non-contactly supports the downside workpiece, then, by contact maintaining part make it is described close to pressure compared to the separation pressure Power is gradually increased, and is made the downside workpiece and the downside chuck face contact and is remained and can not move,
In the bonding process, it is overlapped the upside workpiece and the downside workpiece.
6. the manufacturing method of abutted equipment according to claim 5 characterized by comprising
Process is moved out, the abutted equipment that the fitting of the upside workpiece and the downside workpiece is terminated is by moving out component It is moved out from the fitting space to exterior space,
It is moved out in process described, to keep moving out the abutted equipment from the state that the face of moving out for moving out component floats To the exterior space.
CN201610509484.1A 2015-07-01 2016-06-30 The manufacturing device and manufacturing method of abutted equipment Expired - Fee Related CN106313858B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2015132728A JP5877264B1 (en) 2015-07-01 2015-07-01 Bonding device manufacturing apparatus and manufacturing method
JP2015-132728 2015-07-01
JP2015-146419 2015-07-24
JP2015146419A JP6049820B1 (en) 2015-07-24 2015-07-24 Bonding device manufacturing apparatus and manufacturing method

Publications (2)

Publication Number Publication Date
CN106313858A CN106313858A (en) 2017-01-11
CN106313858B true CN106313858B (en) 2019-11-19

Family

ID=57725737

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610509484.1A Expired - Fee Related CN106313858B (en) 2015-07-01 2016-06-30 The manufacturing device and manufacturing method of abutted equipment

Country Status (3)

Country Link
KR (1) KR20170004864A (en)
CN (1) CN106313858B (en)
TW (1) TWI699582B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6896588B2 (en) * 2017-11-06 2021-06-30 株式会社Ｓｃｒｅｅｎホールディングス Board delivery system and board delivery method
CN111231481B (en) * 2020-02-24 2020-11-27 新昌县勤勉生物医药科技有限公司 Medical treatment detects accessory plant tissue paster equipment for thin slice processing
CN112976765A (en) * 2021-03-04 2021-06-18 广东德远科技股份有限公司 Glass laminating device of tempered glass and liquid crystal glass zero-laminating all-in-one machine
CN115352173B (en) * 2022-08-31 2024-01-05 佛山市华箭建材装饰有限公司 Cambered surface laminating equipment for multilayer glass

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1499299A (en) * 2002-10-25 2004-05-26 东京毅力科创株式会社 Substrate calibrating appts, its processing device and delivery appts.
CN101443899A (en) * 2006-05-09 2009-05-27 东京毅力科创株式会社 Substrate conveyance device and vertical heat treatment equipment
CN101801645A (en) * 2007-11-16 2010-08-11 株式会社爱发科 Bonding substrate manufacturing apparatus and bonding substrate manufacturing method
CN102157424A (en) * 2010-01-21 2011-08-17 东京毅力科创株式会社 Substrate conveying apparatus and substrate conveying method
CN102763209A (en) * 2010-02-17 2012-10-31 株式会社尼康 Transfer apparatus, transfer method, exposure apparatus, and device manufacturing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960032667A (en) * 1995-02-28 1996-09-17 김광호 Lead frame transfer method
JP4690572B2 (en) 2000-11-30 2011-06-01 キヤノンアネルバ株式会社 Substrate overlay device
JP2008185748A (en) * 2007-01-30 2008-08-14 Canon Anelva Corp Substrate overlapping device and fabrication method of display device
JP5873308B2 (en) * 2011-11-22 2016-03-01 住友化学株式会社 Film material bonding equipment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1499299A (en) * 2002-10-25 2004-05-26 东京毅力科创株式会社 Substrate calibrating appts, its processing device and delivery appts.
CN101443899A (en) * 2006-05-09 2009-05-27 东京毅力科创株式会社 Substrate conveyance device and vertical heat treatment equipment
CN101801645A (en) * 2007-11-16 2010-08-11 株式会社爱发科 Bonding substrate manufacturing apparatus and bonding substrate manufacturing method
CN102157424A (en) * 2010-01-21 2011-08-17 东京毅力科创株式会社 Substrate conveying apparatus and substrate conveying method
CN102763209A (en) * 2010-02-17 2012-10-31 株式会社尼康 Transfer apparatus, transfer method, exposure apparatus, and device manufacturing method

Also Published As

Publication number Publication date
CN106313858A (en) 2017-01-11
TWI699582B (en) 2020-07-21
TW201702702A (en) 2017-01-16
KR20170004864A (en) 2017-01-11

Similar Documents

Publication Publication Date Title
KR100858180B1 (en) Apparatus for fabricating bonded substrate
JP4876640B2 (en) Work conveying apparatus and work conveying method
CN106313858B (en) The manufacturing device and manufacturing method of abutted equipment
WO2012029110A1 (en) Display panel production method and production system therefor
JP5523646B1 (en) Bonding device manufacturing equipment
KR101247900B1 (en) Liquid crystal substrate bonding system
KR101245901B1 (en) Bonding apparatus and bonding system provided with same
JP4150041B2 (en) Bonded board manufacturing equipment
JP5996566B2 (en) Work chuck device, work laminating machine, and work laminating method
CN108602342A (en) It is bonded the vacuum forming apparatus of device
JP6049820B1 (en) Bonding device manufacturing apparatus and manufacturing method
JP5877264B1 (en) Bonding device manufacturing apparatus and manufacturing method
JP2011207606A (en) Substrate reversing device and substrate reversing method
JP4150042B2 (en) Bonded substrate manufacturing apparatus and bonded substrate manufacturing method
JP4118922B2 (en) Bonded substrate manufacturing apparatus and bonded substrate manufacturing method
KR20100104476A (en) Display panel align apparatus
JP2018112727A (en) Work-piece bonding device, and work-piece bonding method
JP2002023125A (en) Manufacturing device and manufacturing method of liquid crystal cell
CN108453957A (en) Work handling device and method, workpiece laminating apparatus and method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20191119