JP2018112727A - Work-piece bonding device, and work-piece bonding method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To uniformly deliver a film-like work-piece in a state where a functional part of the work-piece is stretched out relative to a holding plane regardless of a size of the work-piece.SOLUTION: A work-piece conveyance device comprises: a plurality of hand members 1 that has a plurality of clamp parts 1a detachably sandwiching at least one set of opposing sides; a hand driving mechanism that causes the plurality of hand parts 1 to move from a reception position of a work-piece W toward a delivery position thereof relative to a holding plane via an intermediate position; and a control unit that controls to operate a drive source of the plurality of clamp parts 1a and the hand driving mechanism, respectively. The control unit controls so as to cause: the plurality of clamp parts 1a to move in a sandwiching direction of the opposing sides at the reception position; in a state where the plurality of clamp parts 1a have been moved in the sandwiching direction, the plurality of hand members 1 to move toward the intermediate position where a rear surface of the work-piece W is arranged at an interval in a direction going across the holding plane from the reception position; at least one set of the opposing sides of the work-piece W to move from the intermediate position to the reception position beyond an extension line of the holding plane; and the plurality of clamp parts 1a to move in a sandwich-releasing direction at the reception position.SELECTED DRAWING: Figure 3

Description

The present invention allows a film substrate such as a flexible display such as a flexible liquid crystal display (LCD) or a flexible organic EL display (OLED), or a film workpiece such as a cover film used for a flat panel display (FPD) to be detachable. The present invention relates to a work transfer device that holds and transfers, and a work transfer method.
The present invention relates to a workpiece laminating apparatus in which a workpiece conveying device is incorporated and the film workpieces are bonded to each other or a film workpiece and a plate-shaped workpiece such as a glass substrate are bonded, and a workpiece bonding method using the workpiece conveying method. Regarding the method.

Conventionally, as this kind of work conveyance device and workpiece bonding device, a lower stage in a vacuum chamber that supports a web film on which a CF pattern is formed, a sheet conveyance device that supplies a sheet film on which a TFT pattern is formed, The sheet conveying apparatus includes an alignment laminating apparatus including a supply hand that supplies the sheet film to the upper stage in the vacuum chamber and a hand drive mechanism that moves the supply hand (see, for example, Patent Document 1). ).
In Patent Document 1, the sheet film is sucked from the supply hand to the upper stage by a vacuum suction method, and the sheet film is switched from the vacuum suction method to the electrostatic chuck and held in accordance with the reduced pressure in the vacuum chamber. After the TFT pattern and the CF pattern of the web film are aligned, the upper stage is moved toward the lower stage, and the web film and the sheet film are bonded together.
More specifically, the supply hand includes a frame-shaped holding member that holds the peripheral edge of the sheet film, and an inflow hole that allows gas to flow into the space surrounded by the holding member. Holes are provided at predetermined intervals, and the peripheral edge of the sheet film is adsorbed to the frame-shaped holding member. After the sheet film is adsorbed, gas is introduced from the inflow hole, the sheet film is bent so that the center part thereof is convex, and the supply hand is inverted so that the sheet film faces the upper stage. Next, the supply hand is moved closer to the upper stage, and the sheet film is attracted to the upper stage from the center where the sheet film is convex toward the outer periphery.

JP 2009-265265 A

In such a conventional workpiece transfer device and workpiece bonding device, the sheet film swelled in a convex shape due to the inflow of gas is adsorbed to the upper stage from the center toward the outer periphery, so that the surface of the upper stage is Therefore, the sheet film is delivered without causing wrinkles.
However, it is difficult to control the bulging shape of the sheet film by gas repeatedly, and especially when the size of the sheet film is increased, the amount of bulging also increases, which makes it extremely difficult to control. The bulging shape of the sheet film is partially loosened due to slight changes such as a slight change in airflow. For this reason, as the size of the sheet film increases, the sheet film is likely to be wrinkled when the sheet film is transferred to the surface of the upper stage, and the functional part such as the TFT pattern comes into contact with the supply hand, etc. There has been a problem of damaging functional parts such as TFT patterns.
Furthermore, in order to inflate the sheet film reliably, the frame-shaped holding member needs to have a completely sealed structure. Therefore, when the size of the sheet film increases, the total weight of the supply hand including the holding member is increased accordingly. Becomes very heavy. In this case, it is necessary to increase the size of the hand drive mechanism for moving the supply hand, but there is a limit to this, and there is a possibility that the sheet film cannot be conveyed depending on the size. Accordingly, there is a problem that it is not suitable for manufacturing a large display device.
In addition, because the bulging shape of the sheet film is unstable, the sheet film is likely to be misaligned during delivery of the sheet film to the surface of the upper stage. I can't. Thereby, the alignment accuracy of the sheet film is deteriorated, and there is a problem that a part of the product becomes defective when a large display device is manufactured.

In order to solve such a problem, a workpiece transfer device according to the present invention is a workpiece transfer device that receives and holds a substantially rectangular film-shaped workpiece having a functional portion formed on the surface thereof, and transfers the workpiece to a holding surface. A plurality of hand members having a plurality of clamping portions that detachably sandwich at least one pair of opposite sides of the workpiece, and the plurality of hand members are moved from the receiving position of the workpiece toward the delivery position with respect to the holding surface through an intermediate position. A hand drive mechanism, and a control unit that controls the operation of the drive sources of the plurality of sandwiching units and the hand drive mechanism, respectively, and the control unit sandwiches the plurality of sandwiching units at the receiving position. The plurality of hand members are moved from the receiving position to the back surface of the workpiece in a state where the plurality of clamping portions are moved in the clamping direction. Moving toward the intermediate position that is spaced apart in the direction intersecting the holding surface, and moving from the intermediate position toward the delivery position where at least one pair of opposite sides of the workpiece exceeds the extension line of the holding surface And it is controlled to move the plurality of clamping parts in the clamping release direction at the delivery position.
Further, in order to solve such a problem, the work conveying method according to the present invention is a work conveying method in which a substantially rectangular film-shaped work having a functional portion formed on the surface is received and held and transferred to the holding surface for delivery. A clamping step of sandwiching at least one pair of opposite sides of the workpiece at a receiving position by sandwiching portions of a plurality of hand members; and a state in which at least the pair of opposite sides of the workpiece is sandwiched by the sandwiching portion. A first transfer step of moving a plurality of hand members from the receiving position toward an intermediate position where the back surface of the workpiece is spaced apart in a direction intersecting the holding surface; and at least the workpiece by the clamping portion An extension line of the holding surface is extended from the intermediate position to the direction intersecting the holding surface with the pair of opposite sides being sandwiched. A second transfer step in which the back surface of the work is brought into pressure contact with the holding surface, and the holding of the plurality of hand members at the transfer position after the holding of the work by the holding surface is completed. And a clamping release step of releasing the clamping of at least the set of opposite sides of the workpiece by the section.

It is explanatory drawing which shows the whole structure of the workpiece conveyance apparatus which concerns on embodiment of this invention, (a) is a vertical front view which shows the clamping process of a workpiece conveyance method, (b) is a top view of the process. It is explanatory drawing which shows the operation state of the workpiece | work bonding apparatus which concerns on embodiment of this invention, (a) is a reduction | decrease vertical front view which shows the 1st transfer process of a workpiece conveyance method, (b) is a reduction | decrease vertical side surface of the same process. FIG. (A) is a reduction | decrease vertical front view which shows the 2nd transfer process of a workpiece conveyance method, (b) is a reduction | decrease vertical side view of the same process. (A) is a reduction | decrease vertical front view which shows the clamping cancellation | release process of a workpiece conveyance method, (b) is a reduction | decrease vertical side view of the same process. (A) is a reduction | decrease vertical front view which shows the 1st transfer process of a workpiece conveyance method, (b) is a reduction | decrease vertical side view of the same process. (A) is a reduction | decrease vertical front view which shows the 2nd transfer process of a workpiece conveyance method, (b) is a reduction | decrease vertical side view of the same process. (A) is a reduction | decrease vertical front view which shows the clamping cancellation | release process of a workpiece conveyance method, (b) is a reduction | decrease vertical side view of the same process. (A) is a reduction | decrease vertical front view which shows the bonding process of a workpiece | work bonding method, (b) is a reduction | decrease vertical side view of the same process. (A) is a reduction | decrease vertical front view which shows the carrying-out process of a workpiece | work bonding method, (b) is a reduction | decrease vertical side view of the same process. (A) is a reduction | decrease vertical front view which shows the carrying-out process of a workpiece | work bonding method, (b) is a reduction | decrease vertical side view of the same process. (A) is a reduction | decrease vertical front view which shows the carrying-out process of a workpiece | work bonding method, (b) is a reduction | decrease vertical side view of the same process. It is explanatory drawing which shows the operation state at the time of applying the workpiece conveyance apparatus which concerns on embodiment of this invention to a storage, (a) is a reduction | decrease longitudinal front view which shows the 1st transfer process of a workpiece conveyance method, (b) is the 1st. It is the reduction | decrease longitudinal front view which shows one transfer process, (c) is the reduction | decrease longitudinal front view which shows a clamping cancellation | release process.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
As shown in FIGS. 1 to 12, the work transfer device A according to the embodiment of the present invention is a film-like work W made of a film substrate (plastic film) such as a flexible display, a cover film such as a flat panel display, or the like. Is a single-wafer type film transporting device that receives and holds detachable, transports it toward a smooth holding surface h, and the like.
The film-like workpiece W is formed in a rectangle (a quadrangle having a right angle including a rectangle and a square) larger than the size of the holding surface h described later, or a shape similar to this (substantially rectangular). In either one of the front surface Wa and the rear surface Wb of the workpiece W, a functional portion (not shown) such as a TFT pattern or a CF pattern is formed in the central active area excluding the outer peripheral portion. In the case of the illustrated example, the surface on which the functional part is formed is the surface Wa.
The work W has two pairs of opposite sides Wc and Wd which are opposed to each other, and is supplied so that one of the opposite sides Wc and Wd faces a plurality of hand members 1 described later.
The holding surface h is formed in a rectangle smaller than the size of the workpiece W or a substantially rectangular shape similar to the rectangle, and has a chuck mechanism which will be described later in order to hold the workpiece W in a detachable manner.

The workpiece bonding apparatus B according to the embodiment of the present invention is a manufacturing apparatus for a bonding device D including a flexible display such as a liquid crystal display (LCD) or an organic EL display (OLED), a flat panel display, or the like. A first workpiece W1 and a second workpiece W2 constituting the bonding device D toward the workpiece bonding apparatus B are supplied by the workpiece transfer apparatus A.
The workpiece laminating apparatus B holds the first workpiece W1 on the first stage 11 and holds the second workpiece W2 on the second stage 12, and the first stage 11 and the second stage 12 move relative to each other. The one workpiece W1 and the second workpiece W2 are aligned and bonded with high accuracy.
More specifically, as shown in FIGS. 2 to 11, the workpiece bonding apparatus B is configured to hold the first stage 11 on which the first workpiece W <b> 1 is held and the second workpiece W <b> 2 facing the first stage 11. The second stage 12, the contact / separation drive unit 21 that relatively moves one or both of the first stage 11 and the second stage 12, and one of the first stage 11 and the second stage 12. Alternatively, an alignment driving unit 22 that relatively adjusts and moves both in a direction crossing the facing direction is provided as a main component.
Either the first workpiece W1 or the second workpiece W2 or both the first workpiece W1 and the second workpiece W2 are film-like workpieces W. When only one of the first workpiece W1 and the second workpiece W2 is a film-like workpiece W, the other of the first workpiece W1 or the second workpiece W2 is a plate-like workpiece such as a glass substrate.
Either the first stage 11 or the second stage 12 or both the first stage 11 and the second stage 12 have a holding surface h that holds either one or both of the first work W1 and the second work W2. Have.
The holding surface h is provided with a chuck mechanism 13 that detachably holds the first workpiece W1 and the second workpiece W2. As the chuck mechanism 13, a vacuum chucking chuck, an electrostatic chuck, an adhesive chuck, or the like is used. It is preferable to use a suction chuck and an electrostatic chuck in combination.
The first stage 11 and the second stage 12 are normally arranged so as to face each other in the vertical direction, and the first work W1 and the second work W2 are attached by the upper first stage 11 and the lower second stage 12. The combined direction is hereinafter referred to as “Z direction”. The directions along the first workpiece W1 and the second workpiece W2 that intersect with the Z direction are hereinafter referred to as “XY directions” and “XYθ directions”.

In the case shown in FIGS. 2 to 11 as specific examples of the workpiece bonding apparatus B, both the first workpiece W1 and the second workpiece W2 are film-shaped workpieces in order to produce a flexible display or the like as the bonding device D. W. The first workpiece W1 is held with respect to the holding surface h of the upper first stage 11 such that the surface Wa faces downward, and the second workpiece W2 is held with respect to the holding surface h of the lower second stage 12. The surface Wa is held so as to face upward.
The first stage 11 and the second stage 12 are disposed inside the vacuum chamber 30 and are held on the first workpiece W1 held on the holding surface h of the first stage 11 and the holding surface h of the second stage 12. It is preferable that the second workpiece W2 thus bonded is bonded. In the vacuum chamber 30, a depressurized bonding space S is formed, and in a reduced pressure atmosphere, the first work W 1 held on the holding surface h on the first stage 11 and the holding surface h on the second stage 12. The second workpiece W2 held on the upper side is superposed.
The vacuum chamber 30 includes a decompression drive source 30a such as a vacuum pump or a compressor, and the bonding space S can be adjusted from an atmospheric atmosphere to a decompressed atmosphere having a predetermined degree of vacuum. In particular, after the first workpiece W1 and the second workpiece W2 are bonded together, the bonding space S is returned to the air atmosphere, so that an internal pressure and a pressure difference in the sealing space of the bonding device D are generated. It is preferable to pressurize device D evenly to a predetermined gap.
Further, the vacuum chamber 30 is configured to be openable and closable in whole or in part so that the first workpiece W1 and the second workpiece W2 can be taken in and out of the bonding space S. A workpiece transfer device A is provided.
In the case of the illustrated example, an entrance / exit 31 is opened in a part of the vacuum chamber 30, and the work transfer device A is movably disposed through the entrance / exit 31. It is sealed.
Although not shown in the drawings as another example, the vacuum chamber 30 can be divided into a plurality of parts and can be freely opened and closed as described in Japanese Patent Application Laid-Open No. 2009-265265.

On the other hand, the workpiece transfer apparatus A according to the embodiment of the present invention includes a plurality of hand members 1 provided along at least one pair of opposite sides Wc of the two sets of opposite sides Wc and Wd in the workpiece W, and a plurality of hand members 1. As a main component. The hand drive mechanism 2 moves the head toward the holding surface h, and the control unit 3 controls the operation of the hand drive mechanism 2 and the like.
The hand member 1 is formed in a strip shape along the substantially entire length of each side Wc, Wd in the workpiece W.
The plurality of hand members 1 are formed in a substantially parallel shape along a pair of opposite sides Wc in the workpiece W, are formed in a square frame shape along two sets of opposite sides Wc and Wd, or are continuous three. It is formed in a U shape along the side (a set of opposite sides Wc and one side Wd between both).
The plurality of hand members 1 are provided with a plurality of sandwiching portions 1a for sandwiching the opposite sides Wc and Wd in the thickness direction (Z direction), and the workpiece W is held (suspended) by the plurality of sandwiching portions 1a.
In particular, when the plurality of hand members 1 are formed in a substantially parallel shape or a U-shape, the plurality of hand members 1 are held in order to hold the workpiece W in a uniform suspended state or a uniform tension state as a whole. It is preferable to be able to adjust and move, for example, by supporting one end side opposed to each other in a swingable manner in the width direction (X direction) of the workpiece W.

The plurality of sandwiching portions 1a are arranged with a longer interval than the dimension of the holding surface h in the width direction (either the X direction or the Y direction or both).
The intervals between the plurality of sandwiching portions 1a are preferably fixedly arranged so that the central portion We is suspended from at least one pair of opposite sides Wc in the workpiece W.
Although not shown in the drawings as another example, the plurality of holding portions 1a are arranged so as to be movable toward or away from each other in the width direction (X direction) of the holding surface h in conjunction with the transfer of the workpiece W to the holding surface h. Or to adjust the overall suspension state and tension state of the workpiece W, the plurality of clamping portions 1a can be arranged so as to be movable so as to approach or isolate in the width direction (X direction) of the workpiece W. It is.
The plurality of sandwiching portions 1a preferably have a movable portion 1c that faces and abuts either one of the front surface Wa and the rear surface Wb or both the front surface Wa and the rear surface Wb on each side Wc, Wd of the workpiece W.
The movable portion 1c is supported by the drive source 1b so as to be movable in the thickness direction (Z direction) of the workpiece W.
The drive source 1b is composed of a rotary drive unit such as a rotary actuator, and its operation is controlled by a control unit 3 to be described later. It is preferable that the drive source 1b is attached to the base end of the movable part 1c, and the distal end side of the movable part 1c is rotated in the Z direction to be opened and closed.
Furthermore, it is preferable that a pressing means (not shown) for constantly urging the movable part 1c in the closing direction is provided in each of the plurality of sandwiching portions 1a to prevent the workpiece W from falling off. As these pressing means, it is preferable to use a permanent magnet, for example.
In addition, it is preferable that anti-slip means (not shown) is provided on the workpiece contact surfaces of the plurality of sandwiching portions 1a to prevent the workpiece W from falling off. As this anti-slip means, it is preferable to use an elastically deformable cushioning material made of, for example, urethane resin or silicone resin.

In the case shown in FIGS. 1 to 12 as specific examples of the plurality of hand members 1, two of the plurality of hand members 1 are arranged substantially parallel to each other along a pair of opposite sides Wc of the workpiece W. As the movable portion 1c of the plurality of sandwiching portions 1a, a rotating piece is brought into contact with the back surface Wb of the pair of opposite sides Wc so as to be freely opened and closed, and immovable on the opposite side across the pair of opposite sides Wc. A stationary part 1d is provided.
By connecting the connecting pieces 1e and 1f across the two substantially parallel hand members 1 and assembling them in a frame shape, the interval between the plurality of sandwiching portions 1a is set to a pair of opposite sides Wc of the workpiece W. It is fixedly arranged in a state where the central portion We is suspended. For this reason, the workpiece W is suspended in a curved surface in which the central portion We is lower than the pair of opposite sides Wc that are sandwiched (sandwiched) by the plurality of sandwiching portions 1a.
Although not shown in the drawings as other examples, the plurality of hand members 1 have a rectangular frame shape in which two pairs of opposite sides Wc and Wd are sandwiched, or three sides Wc, which are continuous by removing any one of the connecting pieces 1e and 1f. It can be changed to a U-shape that sandwiches Wd, or a pair of movable parts 1c can be brought into contact with both the front surface Wa and the rear surface Wb at each side Wc, Wd without providing the stationary part 1d. It is.

The hand drive mechanism 2 includes a drive unit 2a such as an actuator that reciprocates a plurality of hand members 1 in the XY and Z directions from the receiving position P1 of the workpiece W to the delivery position P3 with respect to the holding surface h through the intermediate position P2. And the operation is controlled by the control unit 3 described later.
The workpiece W receiving position P <b> 1 refers to a location where an apparatus or the like serving as a conveyance source is disposed in order to supply the film-shaped workpiece W toward a conveyance destination such as the workpiece bonding apparatus B. As a specific example of the equipment that is the transfer source, there is a storage C such as a work stocker that temporarily stores a plurality of works W. The storage C will be described later.
The intermediate position P2 is arranged such that the back surface Wb of the workpiece W sandwiched by the sandwiching portions 1a of the plurality of hand members 1 is separated by a predetermined interval in the direction intersecting the holding surface h (Z direction).
The delivery position P3 is arranged so that the pair of opposite sides Wc of the workpiece W sandwiched by the clamping portions 1a of the plurality of hand members 1 cross the extension line of the holding surface h in the direction intersecting the holding surface h (Z direction). Is done.

The control unit 3 includes not only the driving source 1b of the clamping unit 1a and the driving unit 2a of the hand driving mechanism 2, but also the driving source (not shown) of the chuck mechanism 13 provided on the holding surface h, the contacting / separating driving unit 21, and the alignment unit. The controller is also electrically connected to the drive unit 22, the decompression drive source 30 a of the vacuum chamber 30, the drive source 32 a of the open / close door 32, and the like.
The contact / separation drive unit 21 includes an actuator that reciprocates either the first stage 11 or the second stage 12 or both the first stage 11 and the second stage 12 in the Z direction.
The alignment drive unit 22 includes an actuator that adjusts and moves either the first stage 11 or the second stage 12 or both the first stage 11 and the second stage 12 in the XY direction or the XYθ direction.
The controller serving as the control unit 3 sequentially controls the operation at a preset timing in accordance with a preset program in its control circuit (not shown).

And the work set method which receives the workpiece | work W received in the control circuit of the control part 3, and hold | maintains so that attachment or detachment is possible, and transfers to the smooth holding surface h in the state with which the workpiece | work W was hold | maintained, and bonding The workpiece bonding method for producing the device D will be described.
The workpiece conveyance method according to the embodiment of the present invention includes a clamping step of clamping a pair of opposite sides Wc of the workpiece W by the clamping portions 1a of the plurality of hand members 1 at the receiving position P1, and a plurality of hand members 1 from the receiving position P1. At the first transfer step for moving toward the intermediate position P2, the second transfer step for moving the plurality of hand members 1 from the intermediate position P2 toward the transfer position P3, and at the transfer position P3 after the holding of the workpiece W by the holding surface h is completed. And a pinching release step of releasing pinching of the pair of opposite sides Wc of the workpiece W by the pinching portions 1a of the plurality of hand members 1 as a main step.

In the clamping step, as shown in FIGS. 1A and 1B, the control unit 3 operates the driving source 1b of the clamping unit 1a at the receiving position P1, and the clamping unit 1a (movable part 1c) moves in the clamping direction. Moving.
For this reason, in the plurality of hand members 1, the plurality of sandwiching portions 1 a (movable parts 1 c) sandwich a pair of opposite sides Wc that are arranged so that the workpiece W is spaced at least longer than the width dimension of the holding surface h. Keep it in a non-detachable state.
In the first transfer step, as shown in FIGS. 2A and 2B and FIGS. 5A and 5B, the control unit 3 operates the drive unit 2a of the hand drive mechanism 2 so that a plurality of hands are operated. The member 1 moves from the receiving position P1 toward the intermediate position P2 in one or both of the Y direction and the X direction.
For this reason, the workpiece | work W hold | maintained between both with the some clamping part 1a is transferred from the receiving position P1 to the intermediate position P2, and the back surface Wb of the workpiece | work W opposes and separates the holding surface h in the Z direction.

In the second transfer step, as shown in FIGS. 3A and 3B and FIGS. 6A and 6B, the control unit 3 operates the driving unit 2a of the hand driving mechanism 2 so that a plurality of hands are operated. The plurality of sandwiching portions 1a together with the member 1 change in the Z direction from the intermediate position P2 to the delivery position P3, and move to the delivery position P3 beyond the holding surface h beyond the extension line of the holding surface h.
For this reason, the workpiece W held across the plurality of sandwiching portions 1a is moved from the intermediate position P2 to at least a pair of opposite sides Wc beyond the extension line of the holding surface h to the delivery position P3 on the far side of the holding surface h. Be transported.
As a result, at least one set of opposite sides Wc is pulled in the Z direction toward the back side of the holding surface h in the workpiece W, so that the central portion We of the back surface Wb of the workpiece W approaches the holding surface h, and the holding surface h As a result, the workpiece W is stretched as a whole.
In this state, the chuck mechanism 13 of the holding surface h is operated, and the central portion We of the back surface Wb of the workpiece W is held immovably with respect to the holding surface h.
In particular, when the size of the workpiece W is increased, as shown in FIGS. 3A and 3B and FIGS. 6A and 6B, at least one set of the workpiece W is held by a plurality of clamping portions 1a. If the central part We is held in a curved shape rather than the opposite side Wc, the central part We of the back surface Wb may not smoothly approach the holding surface h due to the gravity of the workpiece W.
Therefore, in such a case, the plurality of sandwiching portions 1a are moved apart in the width direction (X direction) of the workpiece W, and the pair of opposite sides Wc and the central portion We are stretched so as to have substantially the same height. It is preferable to make it a state. Thereby, the center part We of the back surface Wb of the workpiece | work W can be forced to approach with respect to the holding surface h.
For this reason, even if the chuck mechanism 13 is a vacuum chucking chuck or the like, the central portion We of the back surface Wb of the workpiece W can be reliably sucked and held.

In the clamping release process, as shown in FIGS. 4A, 4B and 7A, 7B, after the holding of the workpiece W with respect to the holding surface h is completed, the control unit 3 holds the clamping unit at the delivery position P3. The drive source 1b of 1a is operated, and the clamping part 1a (movable part 1c) moves in the clamping release direction opposite to the clamping direction.
For this reason, the clamping part 1a (movable part 1c) each opens one set of opposite sides Wc of the workpiece | work W, and the workpiece | work W is handed over to the holding surface h in the stretched state.
Further, as a subsequent process of the clamping release process, the control unit 3 operates the drive unit 2a of the hand drive mechanism 2, and the plurality of hand members 1 pass from the delivery position P3 to the reception position P1 via the intermediate position P2. Reversely move in one or both of the direction and the X direction, and return to the initial state.

In the workpiece bonding method according to the embodiment of the present invention, the first workpiece W1 and the second workpiece W2 conveyed by the workpiece conveyance method described above are held and received on the holding surfaces h of the first stage 11 and the second stage 12. A passing workpiece holding step, a laminating step in which the first workpiece W1 and the second workpiece W2 are overlapped by the relative movement of the first stage 11 and the second stage 12, and the relative relationship between the first stage 11 and the second stage 12; And an alignment step of aligning the first workpiece W1 and the second workpiece W2 by a typical adjustment movement.
Furthermore, it is preferable to include the carrying-out process which removes and transfers the bonding device D in which bonding was completed from the 1st stage 11 or the 2nd stage 12 with the workpiece | work conveyance method mentioned above.
When a specific example of the workpiece holding step is shown in FIGS. 2A, 2B to 7A, 7B, the film is first transferred to the holding surface h of the first stage 11 by the aforementioned workpiece transfer method. After the first workpiece W <b> 1 is transferred, the control unit 3 operates the drive source of the chuck mechanism 13 including an adsorption chuck, an electrostatic chuck, or an adhesive chuck, so that the first work W <b> 1 is moved relative to the holding surface h of the first stage 11. The back surface Wb of one work W1 is delivered while being immovable. Next, after the film-like second workpiece W2 is transferred to the holding surface h of the second stage 12 by the above-described workpiece transfer method, the second workpiece W2 is moved to the holding surface h of the second stage 12 by the chuck mechanism 13. The rear surface Wb is delivered while being immovable.
Although not shown in the drawings as other examples, the film-like first workpiece W1 or the second workpiece transferred by the above-described workpiece conveyance method with respect to the holding surface h of either the first stage 11 or the second stage 12. It is also possible to deliver W2 and deliver a plate-like workpiece such as a glass substrate to the other holding surface h of the first stage 11 or the second stage 12 by a transfer robot or the like.

In the bonding step, as shown in FIGS. 8A and 8B, the control unit 3 operates the contact / separation drive unit 21 to either the first stage 11 or the second stage 12, or Both the first stage 11 and the second stage 12 relatively move in the Z direction.
For this reason, the surface Wa of the first workpiece W1 held on the first stage 11 and the surface Wa of the second workpiece W2 held on the second stage 12 are overlapped in the Z direction with a sealing material (not shown) or the like interposed therebetween. The
At this time, when the first stage 11 and the second stage 12 are disposed inside the vacuum chamber 30, the control unit 3 operates the drive source 32a of the door 32 as a pre-process of the bonding process. The bonding space S is sealed. In addition to this, when the controller 3 operates the decompression drive source 30a of the vacuum chamber 30 to depressurize the bonding space S from the atmospheric atmosphere and reach a decompressed atmosphere having a predetermined degree of vacuum, the first work W1 and The second workpiece W2 is overlapped.
Further, the alignment step is performed substantially simultaneously with the superposition, that is, immediately before the bonding of the surfaces Wa of the first workpiece W1 and the second workpiece W2 is completed.
In the alignment step, the controller 3 operates the contact / separation drive unit 21 to adjust and move either the first stage 11 or the second stage 12 relative to the other in the XY direction or the XYθ direction.
For this reason, the relative positioning of the first workpiece W1 and the second workpiece W2 is performed with high accuracy. After this alignment is completed, the operation is controlled so that the overlapping of the first workpiece W1 and the second workpiece W2 by the contact / separation drive unit 21 is completed.

In the carrying-out process, as shown in FIGS. 9 (a) (b) to 11 (a) (b), the bonding device D is transferred by the above-described work transfer method. The operation control of the drive unit 21 and the like is reversed from the operation control described above.
First, in a state where the bonding process is completed, the control unit 3 stops the operation of the chuck mechanism 13 provided on the holding surface h of the upper first stage 11.
For this reason, the first workpiece W1 can be peeled from the holding surface h of the upper first stage 11.
Next, as shown in FIGS. 9A and 9B, the control unit 3 operates the contact / separation drive unit 21 in the reverse direction, so that either the first stage 11 or the second stage 12 is operated. Alternatively, both the first stage 11 and the second stage 12 move relatively apart in the Z direction.
For this reason, the bonding device D is left in the state of being placed on the lower second stage 12.
At this time, when the first stage 11 and the second stage 12 are disposed in the vacuum chamber 30, the control unit 3 opens the drive source 32 a of the open / close door 32, and the bonding space S becomes the entrance / exit 31. Through the atmosphere.

Following this, similarly to the above-described work transfer method, the control unit 3 operates the drive unit 2a of the hand drive mechanism 2, and the plurality of hand members 1 are bonded to the bonding device D on the second stage 12 from the initial state. Moving in the Y direction and / or the X direction.
At this time, the pair of opposite sides Wc in which the first workpiece W1 and the second workpiece W2 overlap in the bonding device D protrude from the second stage 12 in the Y direction as shown in FIG. Hangs down. For this reason, the movable part 1c of the clamping part 1a is opened in the plurality of hand members 1, and the front end thereof extends beyond the extension line of the holding surface h of the second stage 12, and is located on the back side (downward) from the front end of the opposite side Wc. It is located.
Thereafter, as shown in FIGS. 10A and 10B, the control unit 3 operates the drive source 1b of the clamping unit 1a, and the movable part 1c of the clamping unit 1a moves in the clamping direction.
Thereby, the movable site | part 1c of the clamping part 1a pinches | interposes one set of opposite sides Wc of the bonding device D of the bonding device D hanging down from the holding surface h of the 2nd stage 12, respectively, and hold | maintains so that it cannot fall off.
Subsequently, as shown in FIGS. 11A and 11B, the control unit 3 operates the drive unit 2a of the hand drive mechanism 2 so that the plurality of hand members 1 are separated from the holding surface h in the Z direction. To move.
Thereby, the some hand member 1 receives the bonding device D from the 2nd stage 12, and the bonding device D is hold | maintained over the several clamping part 1a. For this reason, after that, even if the plurality of hand members 1 are moved in either one or both of the Y direction and the X direction by the drive unit 2a of the hand drive mechanism 2, the bonding device D of the second stage 12 It becomes possible to carry out toward the collection | recovery position of the bonding device D, without contacting the holding surface h.

By the way, the workpiece conveyance apparatus A which concerns on embodiment of this invention is not limited only to supplying the film-shaped workpiece | work W toward the workpiece | work bonding apparatus B, It is possible to use it other than that.
As an example, a case where a film-like work W is applied to a storage C such as a work stocker will be described.
In the case shown in FIGS. 12A to 12C as specific examples of the storage C, the film-like workpiece W is transferred to the shelf C1 of the storage C and delivered in the same manner as the above-described workpiece transfer method. Yes.
In FIG. 12A, the plurality of hand members 1 are moved from the receiving position (not shown) toward the intermediate position P2 as in the first transfer step of the workpiece transfer method described above.
Thereby, the back surface Wb of the workpiece | work W hold | maintained over the several clamping part 1a leaves | separates and faces the shelf board C1 of a conveyance destination in the Z direction.
In FIG. 12B, the plurality of hand members 1 are moved in the Z direction from the intermediate position P2 to the delivery position P3, as in the second transfer step of the workpiece transfer method described above.
For this reason, the workpiece W held across the plurality of sandwiching portions 1a has a pair of opposite sides Wc transferred from the intermediate position P2 to the delivery position P3, and the shelf W exceeds the extension line of the surface of the shelf C1. It is transferred to the back side from C1. As a result, the pair of opposite sides Wc of the workpiece W is further pulled in a state where the back surface Wb of the workpiece W is in contact with the surface of the shelf plate C1.
In FIG. 12 (c), the clamping part 1a (movable part 1c) is moved in the clamping release direction opposite to the clamping direction, in the same way as the clamping release process of the workpiece transfer method described above.
For this reason, the clamping part 1a (movable part 1c) each opens one set of opposite sides Wc of the workpiece | work W, and the workpiece | work W is handed over to the shelf board C1 in the stretched state.
Moreover, although not illustrated as another example, the workpiece W placed on the shelf C1 of the storage C can be held in a plurality of holding portions by operating the order of FIGS. 12A to 12C in reverse. It can be received (1a) and moved (carried in) toward the first stage 11 and the second stage 12 of the workpiece bonding apparatus B.

According to the workpiece transfer apparatus A and the workpiece transfer method according to the embodiment of the present invention, the plurality of holding portions 1a of the plurality of hand members 1 are operated by the operation of the driving sources 1b of the plurality of holding portions 1a at the receiving position P1. Each of them moves in the sandwiching direction to hold the pair of opposite sides Wc of the workpiece W so that they cannot fall off.
Thereafter, the plurality of hand members 1 are moved from the receiving position P1 to the intermediate position P2 by the operation of the hand driving mechanism 2, and the back surface Wb of the workpiece W held by the plurality of clamping portions 1a intersects the holding surface h (Z Direction).
Following this, the plurality of hand members 1 are moved from the intermediate position P2 to the delivery position P3 by the operation of the hand drive mechanism 2, and a pair of opposite sides Wc held by the plurality of clamping portions 1a are formed on the holding surface h. It is transported over the extension line.
Thereby, the back surface Wb of the workpiece W approaches the holding surface h, and the workpiece W is stretched as a whole along the holding surface h.
Subsequently, after the workpiece W is held by the holding surface h, the plurality of holding portions 1a of the plurality of hand members 1 are respectively moved in the pinching release direction by the operation of the driving sources 1b of the plurality of holding portions 1a at the delivery position P3. Move to open a pair of opposite sides Wc of the workpiece W.
As a result, the workpiece W is delivered with the workpiece W stretched against the holding surface h.
Therefore, the film-like workpiece W can be uniformly delivered to the holding surface h while the functional portion is stretched regardless of the size.
As a result, even if the film-like workpiece W is larger than the conventional one in which the sheet film swelled in a convex shape by the inflow of gas is adsorbed to the upper stage from the central portion toward the outer periphery, the delivery to the holding surface h is performed. At this time, wrinkles are not generated in the film-like workpiece W, and the high-quality delivery can be realized without damaging the functional parts such as the TFT pattern and the CF pattern on the surface Wf.
Furthermore, since it is not necessary to have a completely sealed structure, even if the film-like workpiece W is enlarged, the weight of the plurality of hand members 1 including the plurality of sandwiching portions 1a is not significantly increased. The mechanism 2 does not need to be enlarged. This makes it possible to easily manufacture a high-precision bonding device D with submicron accuracy such as a large flexible display.

In particular, it is preferable to fix and arrange the plurality of sandwiching portions 1a at intervals at which the central portion We is suspended from the pair of opposite sides Wc of the workpiece W.
In this case, since the plurality of sandwiching portions 1a are fixed so as not to move at a predetermined interval, the workpiece W is not deformed during the transfer of the workpiece W, and the workpiece W is not vibrated or displaced.
Therefore, the film-like workpiece W can be stably delivered to the holding surface h with a simple structure.
As a result, high-quality delivery of the film-like workpiece W can be realized, and a high-precision bonding device D with submicron accuracy can be more easily manufactured.

Further, according to the workpiece bonding apparatus B and the workpiece bonding method according to the embodiment of the present invention, the film transferred by the workpiece transfer apparatus A with respect to the holding surface h of the first stage 11 and the second stage 12. The first workpiece W1 and the second workpiece W2 are delivered.
Therefore, the first workpiece W1 and the second workpiece W2 can be delivered uniformly and accurately to the first stage 11 and the second stage 12 while being stretched regardless of the size.
As a result, since the bulging shape of the sheet film is unstable, the sheet film can be displaced with respect to the first stage 11 and the second stage 12 as compared with the conventional one in which the sheet film is likely to be displaced when the sheet film is delivered to the surface of the upper stage. Thus, the first workpiece W1 and the second workpiece W2 can be accurately delivered. In particular, even in the case of bonding that requires submicron accuracy, it is possible to bond the surfaces in a uniform state. For this reason, the highly accurate bonding device D of submicron precision can be manufactured.

In the illustrated example in the previous embodiment, both the first work W1 and the second work W2 are film-like works W, and the case where a flexible display is produced as the bonding device D has been described. Without limitation, only one of the first workpiece W1 and the second workpiece W2 may be a film-like workpiece W.
In this case, the other of the first workpiece W1 or the second workpiece W2 becomes a plate-like workpiece such as a glass substrate, and the flat workpiece can be produced by bonding the film-like workpiece W and the plate-like workpiece together. Become.
Further, the workpiece W is held by the plurality of sandwiching portions 1a in a state where the central portion We is suspended in a curved shape rather than at least one pair of opposite sides Wc, and in the suspended state in the Z direction toward the holding surface h. Although it was moved, it is not limited to this, The workpiece | work W is hold | maintained in the state with which the pair of opposite side Wc and the center site | part We stretched | subjected substantially the same height by the some clamping part 1a, and this stretched state is maintained It may be moved in the Z direction toward the holding surface h.
In this case, in conjunction with the transfer of the workpiece W to the holding surface h, after the central portion We of the back surface Wb of the workpiece W comes into contact with the holding surface h, at least one pair of opposite sides Wc is held in the second transfer step. When moving over the extension line of the surface h to the delivery position P3 on the back side of the holding surface h, the distance between at least one pair of the opposite sides Wc and the plurality of sandwiching portions 1a is linked to the width direction of the holding surface h ( Move toward each other in the X direction). For this reason, the central portion We of the back surface Wb of the workpiece W is brought into pressure contact with the holding surface h so that the workpiece W is stretched as a whole, and the workpiece W is supported with respect to the holding surface h in the same manner as the curved suspended state described above. It can be handed over in the state of being stretched.

A Work conveying device 1 Hand member 1a Holding unit 1b Drive source 2 Hand drive mechanism 3 Control unit B Work bonding device 11 First stage 12 Second stage h Holding surface P1 Receiving position P2 Intermediate position P3 Delivery position W Work Wa Surface Wb Back side Wc One set of opposite sides We Center part W1 First work W2 Second work

Such problems workpiece bonding apparatus according to the present invention in order to solve the substantially rectangular film-like first work function of the display is formed on the surface is bonded in alignment with the second workpiece workpiece A bonding apparatus, an upper first stage having a downward holding surface on which the first workpiece is detachably held, and a lower side on which the second workpiece is held facing the first workpiece A second stage, a contact / separation drive unit that relatively moves one or both of the first stage and the second stage, and a plurality of detachably sandwiching at least one pair of opposite sides of the first work A plurality of hand members having a plurality of clamping portions, and the plurality of hand members are moved from the receiving position of the first workpiece toward the delivery position with respect to the holding surface through an intermediate position. A hand drive mechanism to be operated, a contact drive unit, a drive unit for the plurality of clamping units, and a control unit for controlling the operation of the hand drive mechanism, and the control unit at the receiving position. The holding part is moved in the holding direction of the opposite side, and the plurality of hand members are moved in the holding direction, and the back surface of the first workpiece intersects the holding surface from the receiving position. Moving toward the intermediate position spaced apart in the direction, and moving from the intermediate position toward the delivery position where at least one pair of opposite sides of the first work crosses an extension line of the holding surface. In a state where the work is pulled and the first work is stretched as a whole along the holding surface, the central portion of the back surface is held on the holding surface, and the plurality of pieces are provided at the delivery position. And controlling to move the release direction sandwiching the sandwiching member.
Further, in order to solve such a problem, the work laminating method according to the present invention transfers a substantially rectangular film-shaped first work having a display functional part formed on the surface, and the first work is detachable. a first stage of the upper to have a downward holding surface that is held in, the relative approach movement of the second stage to hold the second workpiece, bonded by aligning the second workpiece and the first workpiece A workpiece laminating method, wherein a clamping step of sandwiching at least one pair of opposite sides of the first workpiece by a clamping portion of a plurality of hand members at the receiving position, and at least the first workpiece by the plurality of clamping portions The plurality of hand members are separated from the receiving position in a direction in which the back surface of the first workpiece intersects the holding surface with the pair of opposite sides sandwiched therebetween. And moving the plurality of hand members from the intermediate position in a state in which at least the pair of opposite sides of the first workpiece is sandwiched by the clamping portion. The workpiece is pulled in a direction crossing the surface toward the transfer position beyond the extension line of the holding surface, and the first workpiece is entirely moved along the holding surface as the first workpiece is pulled. A second transfer step of holding the central portion of the back surface on the holding surface in a tensioned state, and the holding portions of the plurality of hand members at the delivery position after the holding of the first work by the holding surface is completed. And a clamping release step of releasing the clamping of at least the set of opposite sides of the first workpiece .

DESCRIPTION OF SYMBOLS A Work conveying apparatus 1 Hand member 1a Clamping part 1b Drive source 2 Hand drive mechanism 3 Control part B Work bonding apparatus 11 First stage 12 Second stage 13 Chuck mechanism
21 Contact / separation drive h Holding surface P1 Receiving position P2 Intermediate position P3 Delivery position W Work Wa Front Wb Back Wc One set of opposite sides We Central part W1 First work W2 Second work

In order to solve such a problem, a workpiece laminating apparatus according to the present invention is a workpiece in which a first workpiece having a substantially rectangular film shape, on which a functional portion of a display is formed, is aligned with a second workpiece. A bonding apparatus, an upper first stage having a downward holding surface on which the first workpiece is detachably held, and a lower side on which the second workpiece is held facing the first workpiece A second stage, a contact / separation drive unit that relatively moves one or both of the first stage and the second stage, and a plurality of detachably sandwiching at least one pair of opposite sides of the first work a plurality of hand members having a clamping portion of said plurality of hand members from receiving position of the first workpiece, away in the direction of the rear surface of the first workpiece intersects the holding surface Through an intermediate position to be disposed, the hand drive mechanism for moving toward the transfer position where extension plane Ru is arranged beyond the holding surface in a direction intersecting the holding surface, the connecting and disconnecting drive unit, said plurality A control unit for controlling the operation of the driving source of the clamping unit and the hand drive mechanism, respectively, and the control unit moves the plurality of clamping units in the sandwiching direction of the opposite sides at the receiving position. said plurality of hand member in a state in which the clamping portion is sandwiched moved in the direction to move toward the receiving position or et before Symbol intermediate position, at least the one pair of opposite sides of the first workpiece from the intermediate position of the holding surface Moving toward the delivery position beyond the extension line, pulling the first work, and with the first work generally stretched along the holding surface, Held in lifting surface, and controls to move the release direction sandwiching the plurality of holding portions in the delivery position.
Further, in order to solve such a problem, the work laminating method according to the present invention transfers a substantially rectangular film-shaped first work having a display functional part formed on the surface, and the first work is detachable. The first workpiece and the second workpiece are aligned and bonded together by the relative approach movement of the upper first stage having a downward holding surface held by the second stage and the second stage holding the second workpiece. A workpiece laminating method, wherein a clamping step of sandwiching at least one pair of opposite sides of the first workpiece by a clamping portion of a plurality of hand members at a receiving position, and at least the first workpiece by the plurality of clamping portions With the pair of opposite sides sandwiched, the plurality of hand members are separated from the receiving position in a direction in which the back surface of the first workpiece intersects the holding surface. And moving the plurality of hand members from the intermediate position in a state in which at least the pair of opposite sides of the first workpiece is sandwiched by the clamping portion. The workpiece is pulled by moving toward a delivery position disposed beyond the extended plane of the holding surface in a direction intersecting the surface, and the first workpiece is moved along the holding surface as the first workpiece is pulled. A second transfer step of holding the central portion of the back surface on the holding surface in a state of being stretched as a whole; and the holding of the plurality of hand members at the delivery position after the holding of the first workpiece by the holding surface is completed A clamping release step of releasing the clamping of at least the pair of opposite sides of the first workpiece by the section.

The hand drive mechanism 2 includes a drive unit 2a such as an actuator that reciprocates a plurality of hand members 1 in the XY and Z directions from the receiving position P1 of the workpiece W to the delivery position P3 with respect to the holding surface h through the intermediate position P2. And the operation is controlled by the control unit 3 described later.
The workpiece W receiving position P <b> 1 refers to a location where an apparatus or the like serving as a conveyance source is disposed in order to supply the film-shaped workpiece W toward a conveyance destination such as the workpiece bonding apparatus B. As a specific example of the equipment that is the transfer source, there is a storage C such as a work stocker that temporarily stores a plurality of works W. The storage C will be described later.
The intermediate position P2 is arranged such that the back surface Wb of the workpiece W sandwiched by the sandwiching portions 1a of the plurality of hand members 1 is separated by a predetermined interval in the direction intersecting the holding surface h (Z direction).
In the delivery position P3, an extension line (extension plane) of the holding surface h is set in a direction (Z direction) in which the pair of opposite sides Wc of the workpiece W sandwiched by the clamping portions 1a of the plurality of hand members 1 intersects the holding surface h (Z direction). It is arranged to exceed.

Claims (5)

A workpiece transfer device for receiving and holding a substantially rectangular film-shaped workpiece having a functional part formed on the surface and transferring it to a holding surface,
A plurality of hand members having a plurality of sandwiching portions for detachably sandwiching at least one pair of opposite sides of the workpiece;
A hand driving mechanism for moving the plurality of hand members from a receiving position of the workpiece toward a delivery position with respect to the holding surface via an intermediate position;
A control unit that controls the operation of the driving sources of the plurality of clamping units and the hand driving mechanism,
The control unit moves the plurality of clamping units at the receiving position in the clamping direction of the opposite side, and moves the plurality of hand members from the receiving position to the workpiece while the plurality of clamping units have moved in the clamping direction. The transfer position moves toward the intermediate position spaced apart in the direction intersecting the holding surface, and at least the pair of opposite sides of the workpiece exceeds the extension line of the holding surface from the intermediate position The workpiece transfer device is controlled so as to move in the direction of pinching and releasing the plurality of holding portions at the delivery position.   The work conveying apparatus according to claim 1, wherein the plurality of holding portions are fixedly arranged at an interval at which a central portion is suspended from at least the pair of opposite sides of the work. A workpiece laminating apparatus for aligning and laminating the first workpiece and the second workpiece by a relative approaching movement of a first stage holding the first workpiece and a second stage holding the second workpiece. ,
Either or both of the first work and the second work are formed in a substantially rectangular film shape,
Either one or both of the first stage and the second stage are held by either one or both of the first work and the second work transferred by the work transfer device according to claim 1 or 2. A workpiece laminating apparatus having a surface. It is a work conveying method for transferring and transferring to a holding surface while receiving and holding a substantially rectangular film-shaped work having a functional part formed on the surface,
A sandwiching step of sandwiching at least one pair of opposite sides of the workpiece by a sandwiching portion of a plurality of hand members at a receiving position;
An intermediate position where the plurality of hand members are arranged in a state in which the back surface of the workpiece intersects the holding surface in a direction intersecting the holding surface in a state where at least the pair of opposite sides of the workpiece is sandwiched by the clamping portion. A first transfer step to move toward
With the sandwiching portion sandwiching at least the pair of opposite sides of the workpiece, the plurality of hand members are directed from the intermediate position to a delivery position beyond the extension line of the holding surface in a direction intersecting the holding surface. A second transfer step of moving and pressing the back surface of the workpiece against the holding surface;
A holding release step of releasing at least the pair of opposite sides of the workpiece by the holding portions of the plurality of hand members at the delivery position after the holding of the workpiece by the holding surface is completed. Work transfer method. A workpiece laminating method for aligning and laminating the first workpiece and the second workpiece by a relative approaching movement of a first stage holding the first workpiece and a second stage holding the second workpiece, ,
Either one or both of said 1st workpiece | work and said 2nd workpiece | work formed in a substantially rectangular film shape are transferred with the workpiece conveyance method of Claim 4, and either of said 1st stage or 2nd stage A workpiece bonding method, wherein the workpiece is transferred to one or both of the holding surfaces.

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