JPH11254374A - Substrate carrying hand, substrate carrying method, and device and method for manufacturing color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the generation of dry spots which cause a performance problem on a substrate coated surface so as to stably carry the substrate after coating by providing a hand with an arm disposed in the outside more than a substrate peripheral edge and a substrate gripping part attached to the arm for gripping the substrate peripheral edge. SOLUTION: The arm part of a substrate carrying hand 20 is composed of members A21, B22, C23, D24 and E25 joined in the vicinity of the outside of the peripheral edge part of a substrate 200 so as to be in parallel with the end sides thereof and match the size of the substrate. A substrate gripping member 40 is attached to the members A to C21 to 23, and grips both ends of each of substrate end sides 200A, B and C and three places in the center. Also, with respect to the substrate end side 200D, the substrate gripping members 40 are arranged in two places of each of the members D24 and E25. A gripping place is a substrate peripheral edge in the range of 0.25 L of both ends of the substrate end side of a length L. All the substrate gripping members 40 grip the substrate peripheral edge within 20 mm from the substrate end side. Thus, the generation of dry spots is limited in the very small area of the substrate peripheral edge.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used, for example, in the field of manufacturing color filters for color liquid crystal displays, printed circuit boards, etc. More specifically, a coating liquid is applied to the surface of a plate-like work such as a glass substrate. The present invention relates to a substrate transfer hand, a method of transferring a substrate, and a device and a method of manufacturing a color filter, which are used as a means for transferring the substrate to a drying device.

[0002]

2. Description of the Related Art The production process of the above color filter includes:
There is a process of applying black, red, blue, and green pastes to be pixels on the glass substrate, a resist solution, and an overcoating agent that finally gives smoothness to the coating film surface. In these steps, an automatic transfer device capable of holding the glass substrate with a substrate transfer hand and moving it horizontally, rotationally, and vertically is used for loading and unloading the glass substrate into and out of the coating apparatus.

[0003] Conventionally, a substrate transfer hand used has a suction member that vacuum-adsorbs the back surface of a substrate on a thin arm, as described in Japanese Patent Application Laid-Open No. 9-69548. This holds the glass substrate firmly, so that it can rotate, go straight,
Even if the lifting and lowering movement is performed, the substrate can be stably transported without shifting from the holding position.

[0004]

When the above-described substrate transfer hand is used to transfer a coated glass substrate to a drying device, after the portion in contact with the glass substrate is dried, the color is changed by the shape of the suction member. Inconveniences such as darkening and disappearance of the coating film become transparent occur. Further, in extreme cases, the outer shape of the arm that does not contact the glass substrate on the back side of the coating surface may be transferred to the coating film. Although the cause of the occurrence of the uneven drying is not clear, it seems that the slight difference in the temperature of the member on the back surface of the coating causes the fluidity and the drying speed of the applied liquid to be different from those of other parts.

The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to stabilize a coated substrate without causing drying spots which are a problem in product performance on the coated surface of the substrate. It is an object of the present invention to provide a substrate transfer hand, a substrate transfer method, a color filter manufacturing apparatus, and a manufacturing method, which are capable of transferring a substrate.

[0006]

According to a first aspect of the present invention, there is provided a substrate transfer hand which is attached to a tip of an automatic transfer device, grips a plate-like substrate, and transfers the inside of a space. The hand includes an arm disposed outside the peripheral edge of the substrate, and a substrate gripping portion attached to the arm and gripping the peripheral edge of the substrate.

[0007] Here, the substrate gripping portion may be disposed on the periphery of the four sides of the substrate, or the edge of the substrate having a length L may be provided at the end opposite to the mounting portion of the substrate transporting hand with the automatic transport device. It is preferable to grip the peripheral edge of the substrate within a range of 0.25 L from both ends of the substrate, or to arrange the substrate gripping portion within 20 mm from the edge of the substrate.

Preferably, the arm is made of a hollow material such as a square pipe.

Further, the substrate holding portion includes a guide member for correcting a displacement of the substrate when the substrate transport hand receives the substrate and guiding the substrate to a predetermined position, and a member facing the end surface of the substrate. Is preferred.

[0010] Further, the substrate holding portion has a diameter of 0.05 mm or more.
It is preferable that the substrate holding portion is constituted by a pin-shaped member having a diameter of 10 mm, and that the substrate holding portion can be arranged so as to be movable in parallel with the edge of the substrate or can be driven in a direction in which the edge is separated from the edge of the substrate toward the edge of the substrate.

Further, it is preferable that the substrate holding portion has a suction member for holding the substrate by suction.

The apparatus for manufacturing a color filter according to the present invention further comprises the step of:
It is characterized in that it is used as a means for transferring the substrate to a drying device for drying the substrate.

In the method of transferring a substrate according to the present invention, a liquid is applied to the surface of a plate-like substrate, and a substrate transfer hand attached to the tip of an automatic transfer device grips the substrate and transfers it to the next step. The transport method is characterized in that a substrate having a surface coated with a liquid is gripped and transported at a peripheral portion thereof.

Here, it is preferable that the substrate having the surface coated with the liquid is gripped and transported at four peripheral edges, or that the gripper is transported within 20 mm from the edge of the substrate.

Further, a method of manufacturing a color filter according to the present invention is characterized in that a color filter is manufactured using the above-described method of transporting a substrate.

According to the substrate transfer hand of the present invention described above, the arm can be disposed outside the peripheral edge of the substrate and only the peripheral portion of the substrate can be gripped by the substrate gripping member attached to the arm. In addition, it is possible to prevent the occurrence of dry spots on the required coating film surface of the color filter product portion described above, and to reduce the deflection of the substrate by gripping a predetermined area of the four sides of the substrate peripheral portion.

Further, since a lightweight and high rigidity can be achieved by using a hollow material such as a square pipe for the arm, vibration and the like at the time of transfer can be reduced to improve the positional accuracy, and high-speed transfer becomes possible.

Further, it is possible to correct the deviation of the substrate from the gripping position when the substrate is received by the guide member, to guide the substrate to a predetermined position, and to prevent the positional deviation of the substrate being conveyed by the member facing the substrate end surface. Thus, stable transfer and transfer of the substrate can be performed.

Further, according to the substrate transfer method of the present invention described above, in the substrate transfer step after the formation of a wet coating surface on the substrate, the substrate is gripped and transferred at the peripheral portion to reduce the substrate deflection. In addition, it is possible to prevent the occurrence of dry spots on the coating film surface inside the product.

According to the color filter manufacturing apparatus and method of the present invention described above, since the substrate transfer hand and the transfer method of the present invention are used, a high-quality color filter having no dry spots on the coating film surface can be obtained. Can be manufactured.

[0021]

Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic perspective view showing a state in which the substrate transfer hand of the present invention is mounted on an automatic transfer device. FIG. 2 is an enlarged side view of the substrate holding portion, and FIG. 3 is an enlarged plan view of the substrate holding portion. is there.

The substrate transfer hand 20 is an automatic transfer device 10
Is attached via a hand mounting plate 29 to the hand mounting portion. Further, the arm portion of the substrate transfer hand 20 has members A21, member B22, member C23, member D24, which are joined in the vicinity of the outer periphery of the substrate 200 so as to be parallel to the respective end sides and conform to the size of the substrate. It is composed of a member E25. Each of the members A to E has a hollow square pipe shape for both weight reduction and high rigidity. The connection between the above-mentioned members and the automatic transfer device 10 is made by a member A2.
This is performed by the hand mounting plate 29 via the members F26, G27, and H28 joined to 1.

The joining between these members is performed by welding, fitting joint, and an angle member 30 for positioning reinforcement.
Is used to increase the rigidity of the joint and suppress vibration during substrate transfer.

The material of each of the above members is preferably an aluminum alloy, a titanium alloy, an FRP material, a resin material using carbon fiber as a reinforcing material, and the like, which are relatively light and have high rigidity. These members are more preferably hollow members, but may be solid members.

Further, the substrate gripping portion is constituted by attaching the substrate gripping material 40 to the members A to E21 to 25 around the substrate 200.
It is preferable to arrange the four sides of 00. This is because the deflection of the substrate is reduced, the flow of the liquid on the application surface during transportation is prevented, and the coating film thickness can be kept uniform.

More specifically, the substrate holding member 40 is made up of members A to C
21 to 23, the substrate edges 200A, 200B,
With respect to 200C, it is configured to be able to grip three places of both ends and the center. Also, the substrate edge 200D
In contrast, the substrate gripping member 40 is connected to the member D24 and the member E25.
Are arranged in two places. It is preferable that the gripping portion is an edge of the substrate having a length L, and the peripheral edge of the substrate in a range of 0.25 L at both ends. This is because, by disposing the arm member within a range of 0.5 L at the center of the substrate edge 200D, when the substrate transfer hand 10 goes straight on the downstream substrate mounting table 110, interference with the lift pins 101 can be prevented. At the same time, the four sides of the substrate can be gripped to reduce the deflection of the substrate.

Further, it is preferable that all the substrate holding members 40 hold the peripheral portion of the substrate within 20 mm from the edge of the substrate.
This is because the area where the dry spots occur is limited to a minute area on the periphery of the substrate, and the area of the product section is widened.

2 and 3, the enlarged substrate gripping material 40 includes a gripping base material 41, a guide 42 for moving and guiding the same, and support pins 43 for supporting the back surface of the substrate 200.
It is composed of Here, the holding base material 41 is a member A to
The arm 50 can be moved in the longitudinal direction of the square pipe-shaped arm 50 along the guide 42 fixed to the square pipe-shaped arm 50 used in E, and is fixed at a desired position by the Holt screw 47.
As a result, the support position of the substrate can be changed, and a character portion such as an alignment mark can be avoided.
The guide 42 is formed in a plate shape, and is fixed to a square pipe-shaped arm 50 by a bolt, so that the gripping base material 41 can be slidably moved along the guide.

The holding base material 41 has a substrate guide portion 44.
And the substrate facing portion 45. The substrate guide portion 45 is inclined so as to approach the square pipe 50 as it goes upward, and even if the position of the substrate is slightly shifted when receiving the substrate, the substrate guide portion 45 is surrounded by the substrate facing portion 45 along this inclination. The substrate can be guided to the part. Further, the substrate facing portion 45 is arranged so as to be able to contact the substrate end surface gripped on the support pins 43. When the substrate moves straight, rises and rotates, and a predetermined inertia force is applied to the substrate, a predetermined value is obtained. Prevents the substrate from shifting from the position. The gap between the substrate end surface and the substrate facing portion 45 is preferably 0.05 mm to 10 mm, particularly 0.05 mm
It is preferable to set it to ２2 mm.

The support pins 43 support the rear surface of the substrate. If this support position is within 20 mm from the edge of the substrate, no drying spots will be formed on the portions not in contact with the support pins. it can. In addition, even if the coating liquid protruding from the edge of the substrate adheres to the substrate facing portion 45 while the substrate is being conveyed and flows downward along the substrate facing portion 45, the substrate is supported by the support pins 43. Mounting surface 46
Since the lift-up is further performed, there is no possibility that the coating liquid is transferred to the back surface of the substrate to cause inconvenience in the subsequent steps. The shape of the tip surface of the support pin 43 may be any shape such as a triangle, a quadrangle, a trapezoid, and a rhombus.

As described above, since the holding base material 41 and the support pins 43 come into contact with the substrate and the coating liquid may adhere thereto, the material is preferably resin so as not to damage the glass substrate. Further, a material having good chemical resistance even when the coating liquid adheres is selected, but polyethylene, polypropylene, Teflon, PEEK material, etc. are preferable in consideration of chemical resistance and abrasion resistance. Further, the substrate may be held by the support pin mounting surface 46 instead of the support pin 43.

Next, another embodiment will be described. 4 is a schematic perspective view of a substrate transfer hand 120 provided with a vacuum line and a suction member, FIG. 5 is an enlarged side view of a substrate holding unit, and FIG. 6 is an enlarged plan view of the substrate holding unit.

Here, a suction holding member 140 having a substrate suction surface 151 for suctioning a peripheral portion of the substrate is attached to the members 162 and 163 of the substrate transfer hand 120 shown in FIG. And the like. The vacuum line 150 is further connected to a suction source such as a vacuum pump (not shown).

Referring to FIGS. 5 and 6, a suction hole 155 is provided in the substrate suction surface 151, which is connected to the vacuum line 150 via the vacuum passage 152. The information is transmitted to the suction surface 151. By suctioning the peripheral portion of the substrate by the substrate suction surface 151, the gripping state of the substrate changes from point contact to surface contact, so that the deflection of the substrate can be reduced. The pressure during substrate adsorption is preferably 0.1 Torr to 700 Torr.
10 Torr to 400 Torr is desirable.

This implementation means is used in the case where the substrate transfer hand 20 shown in FIG. 1 cannot be used for receiving and transferring a substrate when the member D24 and the member E25 at the distal end of the substrate transfer hand 20 are obstructed. This is particularly effective as a means for reducing the deflection of the substrate. If the deflection can be reduced, the coating liquid can be prevented from flowing into the center of the substrate from the periphery of the coating surface during the transfer of the substrate, and the film thickness at the center of the substrate can be prevented from being greater than other portions. It is possible to provide a high-quality product having a uniform thickness distribution.

Further, since the vacuum line 150 is arranged outside the substrate, the coating surface including the peripheral portion of the substrate other than the substrate gripping portion does not have drying spots due to the influence of the vacuum line, and has a high quality coating. A film surface is obtained.

Further, another embodiment will be described.
FIG. 7 shows a substrate transfer hand 220 provided with a mechanism capable of moving the substrate gripping member 240 to and away from the edge of the substrate to the peripheral edge of the substrate.
It is a schematic perspective view of. FIG. 8 is an enlarged side view of the substrate holding member 240.

The substrate transfer hand 220 shown in FIG. 7 has members 221 to 224 so as to surround all edges.
A substrate gripping member 240 is attached to each member, so that a central portion and both end portions can be gripped with respect to all substrate edges.

Referring to FIG. 8, a substrate gripping member driving device 2 that performs a linear motion such as an air cylinder is provided on the substrate gripping member 240.
50 are connected. At the time of receiving and transferring the substrate, the substrate gripping material driving device 250 is operated to move the substrate gripping material 240 from the arm 50 side to the direction in which the substrate gripping material is separated from the peripheral portion of the substrate (the direction of the arrow). The standby position of the substrate gripping material 250 when the substrate is not gripped may be any location as long as it is outside the edge of the substrate. It may be. Further, the member for gripping the substrate may be the above-described pin-shaped member or a suction member.

According to the substrate transfer hand of the present embodiment, the substrate holding member 240 is held on the suction table 102 where the substrate 200 is to be received. The substrate 200 and the substrate holding member 24
0 never touches. Thereafter, if the substrate holding member 240 is protruded and the substrate transfer hand 220 is raised, the substrate can be received, and the next transfer operation can be performed. Therefore, before the substrate 200 is lifted by the lift pins 101, the substrate transfer hand 220 is
Can be made to stand by immediately above the suction table 102 on which the substrate is placed, so that the time for moving the substrate transfer hand 220 forward can be omitted, and the tact time can be improved.

Further, the substrate transporting hand 220 can arrange the substrate gripping member 240 at a position where the deflection of the substrate is minimized without being affected by the position of the lift pins 101 with respect to the substrate edge 200D. Further, since the structure of the hand frame can be closed as shown in FIG. 7, the rigidity of the substrate transfer hand 220 can be improved.

Next, a transfer method using the substrate transfer hand of the present invention will be described with reference to FIG. Here, as an example, a transfer process from applying a coating liquid on a substrate to transporting the substrate to a drying unit will be described. First, after the application step is completed, the substrate 200 having the upper surface coated with the liquid with a predetermined film thickness is lifted by the lift pins 101 of the upstream substrate mounting table 100. In this state, the automatic transfer device 10 is driven to move the substrate holding portion 40 of the substrate transfer hand 20 straight to a predetermined position below the substrate 200 and stop. Next, by raising the substrate transfer hand 20, the substrate 200 is gripped by the substrate gripping member 40 of the substrate transfer hand 20.

If the substrate transfer hand 120 provided with the vacuum line shown in FIG. 4 is used, the substrate transfer hand 120 is raised while operating a means for reducing the vacuum line or vacuum to a vacuum line such as a vacuum pump. Then, the substrate 200 is supported and suctioned by the substrate suction surface 151 in FIG.

In the substrate receiving operation, the substrate is guided to a predetermined position by the substrate guide portion 144 even if the position of the substrate is slightly shifted.

Next, the substrate transfer hand 120 that has completed the substrate receiving operation is rotated and moved straight by the automatic transfer device 10, and the lift pins 1 of the downstream substrate mounting table 110 are connected to the drying process.
11 is transported onto the substrate 11. After the substrate is moved to a predetermined position and stopped, the substrate transfer hand 20 is lowered,
The substrate 200 is transferred onto the lift pins 111. When the substrate transfer hand 120 having a vacuum line is used, the substrate transfer hand 120 is lowered after the suction is released. After the delivery of the substrate 200, the substrate transport hand 120
Retreats and returns to the origin position of the above series of operations.

A transfer method using a substrate transfer hand according to another embodiment of the present invention will be described with reference to FIGS. 7 and 8. First, the automatic transfer device 10 is driven to move the lower part of the substrate receiving position. Substrate transfer hand 2 to a predetermined position
Keep 20 straight. At this time, the substrate holding material 240 is on the arm 50 side, and after the coated substrate 200 is lifted by the lift pins 101 on the upstream substrate mounting table 100, the substrate holding material driving device 250 is driven to drive the substrate holding material 240 Is moved to the periphery of the substrate. Then, the substrate transfer hand 220 is raised to grip the substrate 200.

After the substrate transfer operation, the substrate transfer hand 220 is rotated and moved straight by the automatic transfer device 10, and the lift pins 111 of the downstream substrate mounting table 110 are connected to the drying process.
The substrate 200 is transported thereon. After the substrate moves to a predetermined position and stops, the substrate transfer hand 220 is lowered,
The substrate 200 is transferred onto the lift pins 111. Substrate 20
After the transfer of 0, the substrate gripping material driving device 250 is driven to move the substrate gripping material 240 to the arm 50 side. Further, the substrate transport hand 220 is
Is raised, and the upper side of the substrate 200 is retracted, and returns to the origin position of the above-described series of operations.

The hand for transferring a substrate according to the present invention is effective for transferring a substrate having a surface coated with a liquid. It is desirable to use it as a transporting means to the drying process after applying the sheet.

[0050]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A substrate transfer hand is set to 20 × 20 × t2 (m
m) using an aluminum square pipe of 620 × 720
It was manufactured so that four sides of a glass substrate of a size could be gripped. Here, the support pins for supporting the substrate have φ
Using a 2 mm polypropylene pin, a position 10 mm from all the edges of the substrate was gripped. Further, the substrate gripping material is gripped at three positions on each of the substrate edges 200A, 200B, and 200C shown in FIG. 1, and the gripping position is such that each substrate edge is divided into 1: 9: 9: 1. Further, at the substrate edge 200D, four positions of 5: 18: 55: 18: 5 were gripped by the substrate gripping material. All the substrate holding members were arranged so as to be movable by -5 to +5 mm in the longitudinal direction of the attached member. 620 × 72 by the above gripping point arrangement
The maximum deflection when holding a 0 × t 0.7 mm substrate is 1.
7 mm.

Next, a substrate coated with a green paste for color filter having a concentration of 6% and a viscosity of 23 cp so as to have a wet film thickness of 32 μm was put into a drying apparatus with this hand to a drying apparatus.
Transported in seconds and dried.

The thickness after drying was 1.9 μm. When the coated surface was further dried, there were only traces of contact with the substrate holding material at the peripheral edge of the substrate, and there was no dry spot in a necessary area on the product. Furthermore, the distribution width of the coating film thickness is below the allowable value of 0.1 μm,
No adverse effects due to deflection

[0053]

As described above, when the substrate transfer hand of the present invention is used to transfer a substrate having a wet coating surface, the substrate gripping material attached to the arm disposed outside the peripheral portion of the substrate can be used. Since the peripheral portion of the substrate is gripped, a good coating film without dry spots is obtained on the product coating portion at the center of the substrate, which contributes to the improvement of product quality and productivity.

Further, since a hollow material such as a square pipe is used for the arm portion of the substrate transfer hand, a high-performance substrate transfer hand that is lightweight and has little deflection can be provided, and high-speed substrate handling becomes possible. , Productivity can be improved.

In addition, since a member facing the end face of the substrate and a guide member for guiding the substrate at a predetermined position when the hand receives the substrate are provided, it is possible to correct the positional deviation of the substrate at the time of receiving the substrate and to perform the predetermined operation. In addition to guiding the substrate to the position, it is possible to prevent the displacement of the substrate during transfer. This makes it possible to reliably transfer and transfer the substrate, eliminate troubles caused by the transfer and transfer process, and contribute to improving productivity.

Further, when the substrate is φ0.05 mm to φ10 mm
, The contact area between the substrate and the substrate gripping material can be reduced, and drying unevenness on the peripheral edge of the substrate can be minimized, thereby contributing to an improvement in yield.

Further, according to the transfer method using the substrate transfer device of the present invention, drying spots can be suppressed only at the end of the substrate. A highly accurate coating film surface can be formed.

Further, according to the color filter manufacturing apparatus and the manufacturing method of the present invention, a high quality color filter can be manufactured with high productivity.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a substrate transfer hand according to an embodiment of the present invention when attached to an automatic transfer device.

FIG. 2 is an enlarged side view of the substrate holding unit of FIG.

FIG. 3 is an enlarged plan view of the substrate holding unit of FIG. 2;

FIG. 4 is a schematic perspective view showing another embodiment of the substrate transfer hand of the present invention.

FIG. 5 is an enlarged side view of the substrate suction unit of FIG. 4;

FIG. 6 is an enlarged plan view of the substrate suction unit of FIG.

FIG. 7 is a schematic perspective view showing still another embodiment of the substrate carrying hand of the present invention.

FIG. 8 is an enlarged side view of the substrate holding unit of FIG. 7;

[Explanation of symbols]

 10: Automatic transfer device 20: Hand for transferring a substrate of the present invention 21: Member A 22: Member B 23: Member C 24: Member D 25: Member E 26: Member F 27: Member G 28: Member H 29: Hand mounting Plate 30: Angle material 40: Board holding material 41: Holding base material 42, 142: Guide material 43: Support pin 44, 144: Board guide portion 45: Board facing portion 46: Support pin receiving surface 47: Screw 50: Arm 100 : Upstream substrate mounting table 101: lift pins 102: suction table 110: downstream substrate mounting table 111: lift pins 120: substrate transfer hand (with vacuum line) 140: suction holding member 150: vacuum line 151: substrate suction surface 152: vacuum passage 155: Suction hole 161, 162, 163: Member 200: Substrate 200A to 200D: Each substrate edge 220 Substrate conveying hand (with substrate gripping member drive mechanism) 221, 222, 223, 224: element 240: substrate gripping member 250: substrate gripping member driving device

Claims (17)

[Claims] A hand for transferring a substrate, which is attached to the tip of an automatic transfer device, grips a plate-like substrate, and transfers the substrate in a space, the hand is disposed outside the peripheral edge of the substrate, and is attached to the arm. And a substrate gripper for gripping the peripheral edge of the substrate. 2. The substrate transfer hand according to claim 1, wherein said substrate holding portion is disposed on a peripheral portion of four sides of the substrate. 3. An end portion of the substrate transfer hand opposite to an attachment portion of the substrate transfer hand with the automatic transfer device grips a peripheral portion of the substrate within a range of 0.25L from both ends of a substrate end length L. The substrate transfer hand according to claim 2, further comprising a substrate holding portion. 4. The substrate transfer hand according to claim 1, wherein said substrate holding portion is disposed within 20 mm from an edge of the substrate. 5. The substrate transfer hand according to claim 1, wherein said arm is made of a hollow material such as a square pipe. 6. The substrate gripping part further comprises a guide member for correcting a displacement of the substrate when the substrate transfer hand receives the substrate, and further guiding the substrate to a predetermined position. 6. The substrate transfer hand according to any one of 1 to 5. 7. The substrate transfer hand according to claim 1, wherein the substrate gripping portion includes a member facing an end surface of the substrate. 8. The method according to claim 1, wherein the substrate holding portion has a diameter of 0.05 to 10 mm.
The substrate transfer hand according to any one of claims 1 to 7, wherein the hand is configured by a pin-shaped member having a thickness of 1 mm. 9. The substrate transfer hand according to claim 1, wherein said substrate holding portion is movably arranged in parallel with an edge of the substrate. 10. The substrate transfer device according to claim 1, further comprising a mechanism for separating and contacting the substrate gripping portion from outside the substrate edge to the substrate peripheral portion. hand. 11. The apparatus according to claim 1, wherein said substrate gripping portion has a suction member for sucking and holding the substrate.
And the substrate transfer hand according to any one of 9, 9 and 10. 12. A color filter manufacturing apparatus which is used as a means for transferring a substrate coated with the substrate transfer hand according to any one of claims 1 to 11 to a drying device for drying. 13. After applying a liquid on the surface of the plate-like substrate,
In a transfer method of gripping the substrate with a substrate transfer hand attached to the tip of an automatic transfer device and transferring the substrate to the next process, the method is characterized in that the substrate is coated with a liquid on its surface and a peripheral portion of the substrate is gripped and transferred. Substrate transfer method. 14. The method according to claim 1, wherein four edges of the substrate coated with the liquid are gripped and transported.
4. The method for transporting a substrate according to 3. 15. The apparatus according to claim 13, wherein a substrate carrying hand other than a member for gripping a peripheral edge is disposed on a back side of the substrate having the liquid applied to the surface thereof.
Or the method of transferring a substrate according to 14. 16. The transfer of a substrate according to any one of claims 13 to 15, wherein the transfer of the substrate is performed with a grip portion of the substrate having a liquid applied to its surface set within 20 mm from a peripheral portion of the substrate. Method. 17. A method for manufacturing a color filter, comprising manufacturing a color filter using the method for transporting a substrate according to claim 13.