JP2013056390A - Robot hand and robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate a tooling change.SOLUTION: A left hand 9L and a right hand 9R respectively mounted to a left arm 6L and a right arm 6R include: three forks 12 that can place a liquid crystal glass substrate W thereon; a pair of fixing members 15 disposed in the fork 12 while being spaced apart from each other in a longitudinal direction of the fork 12; and a pair of guide members 13 respectively disposed between the pair of fixing members 15 and regulating the movement in a longitudinal direction of the liquid crystal glass substrate W placed on the forks 12. At least one of the pair of guide members 13 is configured so that a longitudinal position of the fork 12 is selectively set in a plurality of positions.

Description

  The embodiment of the disclosure relates to a robot hand for transporting an object and a robot including the robot hand.

  Conventionally, a robot hand for conveying an object is known (see, for example, Patent Document 1). This prior art robot hand (substrate transfer hand) is attached to a hand attachment portion of a robot (automatic transfer device) via a hand attachment plate. And the arm distribute | arranged to the outer side from the peripheral part of the target object (board | substrate), and the board | substrate holding part attached to this arm and holding the peripheral part of a target object are provided.

  The base material gripping material of the substrate gripping portion is composed of a guide member (grip base material), a guide for moving and guiding the guide member, and a support pin for supporting the back surface of the object. The guide member can move in the longitudinal direction of the arm along a guide fixed to the arm, and is fixed by a bolt screw at a desired position. The guide member includes a substrate guide portion and a substrate facing portion. The board guide unit guides the object to a portion surrounded by the board facing part even when the position of the object is slightly shifted when the object is received. The board-facing portion is disposed so as to face the end surface of the object held on the support pin via a predetermined gap, and prevents the object from being displaced.

JP-A-11-254374

  The robot hand according to the above prior art can change the support position of the object by changing the fixing position of the guide member by the bolt screw, and therefore can be used in an environment in which objects having different dimensions are conveyed. As described above, when the robot hand for transporting an object is used in an environment for transporting objects having different dimensions, each time the dimension of the object to be transported is changed, a predetermined gap is set between the object and the object. Therefore, it is necessary to change the position of the guide member so as to face each other. Generally, during teaching, the guide member is set at a fixed position for each dimension of the object and a mark is recorded, and when the dimension of the object to be conveyed is changed, the guide member is recorded at the time of teaching. The arrangement is changed by arranging and fixing so as to coincide with the mark. For this reason, it takes time to change the setup, and it cannot be said that the workability is good.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a robot hand and a robot capable of easily changing the setup.

  In order to solve the above-described problem, according to one aspect of the present invention, there is provided a robot hand for transporting an object, which is provided in a robot arm, and at least one fork on which the object can be placed; A pair of first fixing members arranged apart from each other in the longitudinal direction of the fork and a movement of the object placed between the pair of first fixing members and placed on the fork in the longitudinal direction A pair of first guide members for regulating at least one of the pair of first guide members, wherein a longitudinal position of the fork can be selectively set to a plurality of positions. Hands are applied.

  According to the robot hand and the robot of the present invention, the setup change can be easily performed.

1 is a perspective view illustrating an overall configuration of a robot according to an embodiment. It is explanatory drawing for demonstrating a setup change in case the liquid crystal glass substrate with the largest dimension is made into conveyance object. It is sectional drawing equivalent to the III-III cross section in FIG. It is explanatory drawing for demonstrating a setup change in case the liquid crystal glass substrate with the 2nd largest dimension is made into conveyance object. It is sectional drawing equivalent to the VV cross section in FIG. It is explanatory drawing for demonstrating a setup change in case the liquid crystal glass substrate with the smallest dimension is made into a conveyance object. It is sectional drawing equivalent to the VII-VII cross section in FIG. It is explanatory drawing for demonstrating setup change in the modification which arrange | positions a guide member also to the transversal direction of a fork when the liquid crystal glass substrate with the largest dimension is made into a conveyance object. It is sectional drawing equivalent to the IX-IX cross section in FIG. It is explanatory drawing for demonstrating a setup change in case the liquid crystal glass substrate with the 2nd largest dimension is made into conveyance object. It is sectional drawing equivalent to the XI-XI cross section in FIG. It is explanatory drawing for demonstrating a setup change in case the liquid crystal glass substrate with the smallest dimension is made into a conveyance object. It is sectional drawing equivalent to the XIII-XIII cross section in FIG.

  Hereinafter, an embodiment will be described with reference to the drawings.

  As shown in FIG. 1, the robot 1 of this embodiment is an articulated robot that transports a thin plate-like liquid crystal glass substrate W (object) stored in a cassette (not shown) to a predetermined area. The robot 1 includes a traveling carriage 2 capable of traveling in a predetermined direction, a fixed base 3 attached to the traveling carriage 2, an elevating arm 4, a horizontal base 5, and a left connected to the horizontal base 5 in a symmetrical structure. It has an arm 6L and a right arm 6R. The traveling carriage 2 is not always necessary, and the robot may be fixed to a gantry or the like.

  The elevating arm 4 has a first elevating link 4a whose tip is connected to the fixed base 3, and a second elevating link 4b whose tip is connected to the horizontal base 5, and the first elevating link 4a is the first. The second pivot link 4b pivots about the second pivot axis 8, and the horizontal base 5, left arm 6L, and right arm 6R arranged above the lift arm 4 move up and down. Move.

  The horizontal base 5 turns around the third turning shaft 20 to turn the left arm 6L and the right arm 6R in the horizontal direction.

  The left arm 6L includes a first left link 6La connected to the horizontal base 5, and a second left link 6Lb provided with a left hand 9L at the tip for transporting the liquid crystal glass substrate W. The left link 6La turns around the third turning axis 10L, and the second left link 6Lb turns around the fourth turning axis 11L, thereby moving the left hand 9L forward and backward.

  The right arm 6R includes a first right link 6Ra connected to the horizontal base 5, and a second right link 6Rb provided with a right hand 9R for transporting the liquid crystal glass substrate W at the tip. The right link 6Ra turns around the third turning axis 10R, and the second right link 6Rb turns around the fourth turning axis 11R, thereby moving the right hand 9R forward and backward.

  The left hand 9L and the right hand 9R are arranged with their vertical positions shifted (in this example, the left hand 9L is arranged on the upper side and the right hand 9R is arranged on the lower side). It has the same structure and has three forks 12 on which the liquid crystal glass substrate W can be placed. The number of forks 12 is not limited to three as in this example, but may be one, two, or four or more.

  Each of the left arm 6L and the right arm 6R (hereinafter collectively referred to as “arm 6”) corresponds to the robot arm described in the claims. Each of the left hand 9L and the right hand 9R (hereinafter collectively referred to as “hand 9”) corresponds to the robot hand described in the claims.

  The robot 1 basically configured as described above moves the hand 9 forward by swinging the arm 6, and moves the hand 9 upward by driving the lifting arm 4 upward to move the inside of the cassette. The liquid crystal glass substrate W is placed on the fork 12. Thereafter, by swinging the arm 6, the hand 9 is moved rearward, and the horizontal base 5 is turned, thereby turning the arm 6 in the horizontal direction. Then, by swinging the arm 6, the hand 9 is moved forward, and the lifting arm 4 is driven downward to move the hand 9 downward, and the liquid crystal glass substrate W placed on the fork 12 is moved. Place in a predetermined area. As described above, the robot 1 transports the liquid crystal glass substrate W stored in the cassette to a predetermined area.

  Here, in this embodiment, three types of liquid crystal glass substrates W having different dimensions are prepared as objects to be transported by the robot 1. In this example, the liquid crystal glass substrate W1 having the largest dimension (for example, 730 × 920) (see FIGS. 2 and 3 described later) and the liquid crystal glass substrate W2 having the second largest dimension (for example, 680 × 880) (described later). 4 and FIG. 5) and a liquid crystal glass substrate W3 (see FIG. 6 and FIG. 7 described later) having the smallest dimension (for example, 620 × 750) are prepared. The fork 12 can place any of these three types of liquid crystal glass substrates W1 to W3.

  Although not shown in FIG. 1, the liquid crystal glass substrate W placed on the fork 12 is prevented from shifting in the longitudinal direction of the fork 12 (hereinafter referred to as “fork longitudinal direction” as appropriate) ( In order to restrict the movement of the liquid crystal glass substrate W placed on the fork 12 in the longitudinal direction of the fork 12), the liquid crystal glass substrate W placed on the fork 12 is respectively viewed from both ends in the longitudinal direction of the fork. A pair of guide members 13 (first guide members; see FIG. 2 and the like to be described later) are fixed so as to face each other with a predetermined gap (for example, a clearance of 0.5 mm). Therefore, every time the size of the liquid crystal glass substrate W to be transported is changed, the change of the fixing position of the guide member 13 is changed so as to face the liquid crystal glass substrate W in the longitudinal direction of the fork with a predetermined gap. Done. The clearance needs to be set sufficiently smaller than the dimension of the liquid crystal glass substrate W. If the clearance is too large, the liquid crystal glass substrate W moves greatly between the pair of guide members 13, which causes inconvenience such as an impact on the liquid crystal glass substrate W. On the other hand, if the clearance is too small, the tolerance of the liquid crystal glass substrate W and the change with time of the machinery such as the robot 1 are not allowed, and the liquid crystal glass substrate W may not fit between the pair of guide members 13.

  Here, before explaining the setup change, the three forks 12 provided in the left hand 9L and the right hand 9R will be described.

  2 to 7, the three forks 12 provided in the left hand 9L and the right hand 9R have the same structure as each other, and are arranged at two positions separated from each other in the longitudinal direction of the fork and on the upper surface along the longitudinal direction of the fork. A liquid crystal glass substrate W that has a plurality of screw holes 12a, 12b, 12c, 12d, 12e, and 12f that are provided with holes 14 and that are erected on the upper surface along the fork longitudinal direction. Each has a plurality of pins 12g that support. In addition, a pair of fixing members 15 (first fixing members) are disposed apart from each other in the fork longitudinal direction at the two positions corresponding to the fork longitudinal direction on each fork 12. More specifically, the pair of fixing members 15 is a predetermined position along the longitudinal direction of the fork set according to the apparatus reference of the robot 1 on each fork 12 (hereinafter referred to as “predetermined longitudinal position” as appropriate). Respectively).

  In this example, the pair of fixing members 15 has a long hole 15a (first insertion hole) formed in a long hole shape along the longitudinal direction of the fork for inserting the screw 14 and fastening it to the screw hole 12a on the fork 12. In FIG. 2, two screws 14 are inserted into the respective long holes 15a and fastened to the respective screw holes 12a, thereby being fixed at the predetermined longitudinal positions. The “long hole shape” means the shape of a hole provided such that the dimension in the major axis direction is larger than the dimension in the minor axis direction. Each of the long holes 15a is set so that the length of the fork 12 in the short direction is longer than the shaft portion of the screw 14 and shorter than the head of the screw 14, and the length in the longitudinal direction of the fork 12 is set. , At least longer than the length in the short direction.

  The pair of fixing members 15 is not changed in fixing position even when the setup is changed, that is, the transport target is fixed at the same position in any case of the liquid crystal glass substrates W1 to W3. Each of the guide members 13 is disposed between a pair of fixing members 15 fixed at the predetermined longitudinal position, and the fixing position is set with reference to the fixing members 15. Specifically, each of the pair of guide members 13 includes a plurality of fork longitudinal positions along the fork longitudinal direction between the pair of fixing members 15 fixed at the predetermined longitudinal position. The position can be selectively set.

  In the example shown in FIGS. 2 to 8, two screws that are inserted into the long holes 15 a of the fixing member 15 and fastened to the screw holes 12 a on the fork 12 to fasten the fixing member 15 and the fork 12. 14 is equivalent to the 1st fastening member as described in a claim, and each screw hole 12a to which these two screws 14 are fastened is equivalent to the 1st fastening hole as described in a claim.

  Hereinafter, the setup change will be described.

  First, the case where the liquid crystal glass substrate W1 having the largest dimension among the three types of liquid crystal glass substrates W1 to W3 is to be transported will be described with reference to FIGS.

  As shown in FIGS. 2 and 3, when the liquid crystal glass substrate W1 is to be conveyed, a pair of fixing members 15 and a pair of guide members are provided on each fork 12 provided in the left hand 9L and the right hand 9R. 13 are arranged. As described above, the pair of fixing members 15 are fixed to the predetermined longitudinal positions, respectively.

  The pair of guide members 13 includes a flat plate portion 131 in which a pad 131 a that supports the liquid crystal glass substrate W placed on the fork 12 is erected at the upper end portion on the liquid crystal glass substrate W side, and a pad 131 a on the flat plate portion 131. Further, the guide member 132 is fixed on the fixing member 15 side by screws 16. The flat plate portion 131 is formed in a long hole shape along the longitudinal direction of the fork, and is a long hole 131b (second insertion hole) through which the screw 14 is inserted and fastened to any of the screw holes 12b to 12f on the fork 12. In this example, there are two. Each of the long holes 131b is set such that the length of the fork 12 in the short direction is longer than the shaft portion of the screw 14 and shorter than the head of the screw 14, and the length in the longitudinal direction of the fork 12 is set. , At least longer than the length in the short direction.

  When the liquid crystal glass substrate W1 is to be transported, first, the pair of guide members 13 are respectively disposed between the pair of fixing members 15 fixed at the predetermined longitudinal position. Specifically, the pair of guide members 13 are respectively disposed such that the surface of the flat plate portion 131 opposite to the liquid crystal glass substrate W1 abuts against and contacts the surface of the closer fixing member 15 on the liquid crystal glass substrate W1 side. Is done. In this state, the two screws 14 are inserted into the long holes 131b and fastened to the screw holes 12b and 12c, so that the pair of guide members 13 are respectively fixed on the forks 12. As described above, the guide member 13 has a predetermined end face of the guide portion 132 in the longitudinal direction of the fork 12 with respect to the end face of the liquid crystal glass substrate W1 placed on the fork 12 among a plurality of positions between the pair of fixing members 15. Is fixed at a position closer to the liquid crystal glass substrate W1 than the fixing member 15 on the fork 12 so as to face each other through the gap.

  In the example shown in FIGS. 2 and 3, the liquid crystal of the flat plate portion 131 of the pair of guide members 13 that abuts on the liquid crystal glass substrate W1 side surface of the pair of fixing members 15 arranged at the predetermined longitudinal position. The surface opposite to the glass substrate W1 corresponds to the first contact surface described in the claims. Further, the two screws 14 inserted through the respective long holes 131b of the flat plate portion 131 of the guide member 13 and fastened to the screw holes 12b and 12c on the fork 12 to fasten the guide member 13 and the fork 12 are claimed. The screw holes 12b and 12c to which the two screws 14 are fastened correspond to the second fastening holes described in the claims.

  By performing the setup change as described above, the end surface of the liquid crystal glass substrate W1 to be transported is passed through a predetermined gap from both ends of the end surfaces of the guide portions 132 of the pair of guide members 13 in the fork longitudinal direction. Are placed on the fork 12 while being supported by the pin 12g on the fork 12 and the pad 131a on the flat plate portion 131 of the guide member 13.

  Next, the case where the liquid crystal glass substrate W2 having the second largest size among the above three types of liquid crystal glass substrates W1 to W3 is to be transported will be described with reference to FIGS.

  As shown in FIGS. 4 and 5, when the liquid crystal glass substrate W2 is to be transported, a pair of fixing members 15 and a liquid crystal glass substrate W1 are provided on each fork 12 provided in the left hand 9L and the right hand 9R. Two types of intermediate members 17A (see FIGS. 4 and 5) and a pair of intermediate members 17B (see FIGS. 6 and 7 to be described later) prepared in accordance with the dimensions of W3 and having different fork longitudinal dimensions. ), A pair of intermediate members 17A having a small fork longitudinal dimension and a pair of guide members 13 are respectively disposed. In the example shown in FIGS. 4 and 5, the intermediate member 17 </ b> A corresponds to the first intermediate member described in the claims. As described above, the pair of fixing members 15 are fixed to the predetermined longitudinal positions, respectively.

  The pair of intermediate members 17 </ b> A has a long hole 17 </ b> Aa (third insertion) that is formed in a long hole shape along the longitudinal direction of the fork and is inserted into the screw hole 12 b to 12 d on the fork 12. In this example, there is one hole). The long hole 17Aa is set such that the length of the fork 12 in the short direction is longer than the shaft portion of the screw 14 and shorter than the head of the screw 14, and the length in the fork longitudinal direction is at least It is set longer than the length in the short direction.

  When the liquid crystal glass substrate W2 is to be transported, first, the pair of intermediate members 17A are respectively disposed between the pair of fixing members 15 fixed at the predetermined longitudinal position. Specifically, the pair of intermediate members 17A are arranged so that the surfaces on the side opposite to the liquid crystal glass substrate W2 come into contact with and contact the surface on the liquid crystal glass substrate W2 side of the closer fixing member 15. In this state, the pair of intermediate members 17A is fixed on the fork 12 by the screw 14 being inserted into the long hole 17Aa and fastened to the screw hole 12b. Thereafter, the pair of guide members 13 are respectively disposed between the pair of intermediate members 17 </ b> A fixed on the fork 12. Specifically, the pair of guide members 13 are arranged such that the surface of the flat plate portion 131 opposite to the liquid crystal glass substrate W2 comes into contact with and contacts the surface of the closer intermediate member 17A on the liquid crystal glass substrate W2 side. Is done. In this state, the two screws 14 are inserted into the long holes 131b and fastened to the screw holes 12c and 12d, so that the pair of guide members 13 are fixed on the forks 12, respectively. As described above, the intermediate member 17A is fixed between the fixing member 15 on the fork 12 and the guide member 13 closer to the fixing member 15, and the guide member 13 has a plurality of positions between the pair of fixing members 15. Among them, the liquid crystal is fixed by the fixing member 15 on the fork 12 so that the end surface of the guide part 132 faces the end surface of the liquid crystal glass substrate W2 placed on the fork 12 with a predetermined gap in the longitudinal direction of the fork. It is fixed at a position on the glass substrate W2.

  In the example shown in FIGS. 4 and 5, the liquid crystal glass substrate W2 of the pair of intermediate members 17A that contacts the surfaces of the pair of fixing members 15 disposed at the predetermined longitudinal position on the liquid crystal glass substrate W2 side. The opposite surface corresponds to the second contact surface described in the claims. Further, the liquid crystal glass substrate W2 side of the pair of intermediate members 17A fixed on the fork 12 so that the surface opposite to the liquid crystal glass substrate W2 is in contact with the surface of the pair of fixing members 15 on the liquid crystal glass substrate W2 side. The surface opposite to the liquid crystal glass substrate W2 of the pair of guide members 13 in contact with the surface corresponds to the third contact surface described in the claims. Furthermore, the two screws 14 inserted through the respective long holes 131b of the flat plate portion 131 of the guide member 13 and fastened to the screw holes 12c and 12d on the fork 12 to fasten the guide member 13 and the fork 12 are claimed. The screw holes 12c and 12d to which these two screws 14 are fastened correspond to the second fastening holes described in the claims. Still further, the screw 14 inserted through the long hole 17Aa of the intermediate member 17A and fastened to the screw hole 12b on the fork 12 to fasten the intermediate member 17A and the fork 12 is the third fastening according to the claims. The screw hole 12b to which the screw 14 is fastened corresponds to the third fastening hole described in the claims.

  By performing the setup change as described above, the end surface of the liquid crystal glass substrate W2 to be transported is passed through a predetermined gap from both ends in the fork longitudinal direction of the end surfaces of the guide portions 132 of the pair of guide members 13, respectively. Are placed on the fork 12 while being supported by the pin 12g on the fork 12 and the pad 131a on the flat plate portion 131 of the guide member 13.

  Next, the case where the liquid crystal glass substrate W3 having the smallest dimension among the above three types of liquid crystal glass substrates W1 to W3 is to be transported will be described with reference to FIGS.

  As shown in FIGS. 6 and 7, when the liquid crystal glass substrate W3 is to be transported, on each fork 12 provided in the left hand 9L and the right hand 9R, a pair of fixing members 15 and the above two types of fixing members 15 are provided. Among the pair of intermediate members 17A and the pair of intermediate members 17B, a pair of intermediate members 17B having a large fork longitudinal dimension and a pair of guide members 13 are respectively disposed. In the example shown in FIGS. 6 and 7, the intermediate member 17B corresponds to a first intermediate member described in the claims. As described above, the pair of fixing members 15 are fixed to the predetermined longitudinal positions, respectively.

  The pair of intermediate members 17 </ b> B has a long hole 17 </ b> Ba (third insertion hole) through which two screws 14 formed in a long hole shape along the longitudinal direction of the fork are inserted and fastened to the screw holes 12 c and 12 d on the fork 12. ) In this example. The long hole 17Ba is set such that the length of the fork 12 in the short direction is longer than the shaft portion of the screw 14 and shorter than the head of the screw 14, and the length in the fork longitudinal direction is at least It is set longer than the length in the short direction.

  When the liquid crystal glass substrate W3 is to be transported, first, the pair of intermediate members 17B are respectively disposed between the pair of fixed members 15 fixed at the predetermined longitudinal position. Specifically, the pair of intermediate members 17B are respectively arranged such that the surface opposite to the liquid crystal glass substrate W3 abuts against and contacts the surface of the closer fixing member 15 on the liquid crystal glass substrate W3 side. In this state, the two screws 14 are inserted into the long holes 17Ba and fastened to the screw holes 12c and 12d, so that the pair of intermediate members 17B are fixed on the forks 12, respectively. Thereafter, the pair of guide members 13 are respectively disposed between the pair of intermediate members 17B fixed on the fork 12. Specifically, the pair of guide members 13 are arranged so that the surface of the flat plate portion 131 opposite to the liquid crystal glass substrate W3 abuts against and contacts the surface of the closer intermediate member 17B on the liquid crystal glass substrate W3 side. Is done. In this state, the two screws 14 are inserted into the long holes 131 b and fastened to the screw holes 12 e and 12 f, whereby the pair of guide members 13 are respectively fixed on the fork 12. As described above, the intermediate member 17B is fixed between the fixing member 15 on the fork 12 and the guide member 13 closer to the fixing member 15, and the guide member 13 has a plurality of positions between the pair of fixing members 15. Among them, the liquid crystal is fixed by the fixing member 15 on the fork 12 so that the end surface of the guide portion 132 faces the end surface of the liquid crystal glass substrate W3 placed on the fork 12 with a predetermined gap in the longitudinal direction of the fork. It is fixed at a position on the glass substrate W3 side.

  In the example shown in FIGS. 6 and 7, the liquid crystal glass substrate W3 of the pair of intermediate members 17B that abuts the surfaces on the liquid crystal glass substrate W3 side of the pair of fixing members 15 arranged at the predetermined longitudinal position. The opposite surface corresponds to the second contact surface described in the claims. Further, the liquid crystal glass substrate W3 side of the pair of intermediate members 17B fixed on the fork 12 so that the surface opposite to the liquid crystal glass substrate W3 abuts the surface of the pair of fixing members 15 on the liquid crystal glass substrate W3 side. The surfaces on the opposite side of the pair of guide members 13 that are in contact with the liquid crystal glass substrate W3 correspond to the third contact surfaces described in the claims. Furthermore, the two screws 14 inserted through the respective long holes 131b of the flat plate portion 131 of the guide member 13 and fastened to the screw holes 12e and 12f on the fork 12 to fasten the guide member 13 and the fork 12 are claimed. The screw holes 12e and 12f to which these two screws 14 are fastened correspond to the second fastening holes described in the claims. Furthermore, the two screws 14 inserted through the long hole 17Ba of the intermediate member 17B and fastened to the screw holes 12c and 12d on the fork 12 to fasten the intermediate member 17B and the fork 12 are described in the claims. The screw holes 12c and 12d to which the two screws 14 are fastened correspond to the third fastening hole described in the claims.

  By performing the setup change as described above, the end surface of the liquid crystal glass substrate W3 to be transported is passed through a predetermined gap from both ends in the fork longitudinal direction of the end surfaces of the guide portions 132 of the pair of guide members 13, respectively. Are placed on the fork 12 while being supported by the pin 12g on the fork 12 and the pad 131a on the flat plate portion 131 of the guide member 13.

  As described above, the robot 1 according to the present embodiment includes the left hand 6L and the right arm 9R on the left arm 6L and the right arm 6R, and the liquid crystal glass substrate W is formed using the left hand 9L and the right hand 9R. Transport.

  Here, in general, as a method of transporting the liquid crystal glass substrate W, a suction method of transporting the liquid crystal glass substrate W while being vacuum-sucked by an appropriate suction member provided in the hand, or a liquid crystal glass substrate on a fork provided in the hand There is a non-adsorption method in which W is carried while being placed. In the case of the suction method, the liquid crystal glass substrate W can be transported while preventing the positional deviation of the liquid crystal glass substrate W by moving the hand while the liquid crystal glass substrate W is vacuum-sucked by the suction member. There is a possibility that the liquid crystal glass substrate W bends or spots are generated on the coating layer formed on the suction surface of the liquid crystal glass substrate W. In the case of the non-adsorption method, the fork is moved to the lower side of the liquid crystal glass substrate W, then the fork is lifted and the liquid crystal glass substrate W is placed on the fork, and the hand is moved in that state, thereby liquid crystal glass The substrate W is transferred. In the case of such a non-adsorption method, generally, the liquid crystal glass substrate W placed on the fork is opposed to the liquid crystal glass substrate W with a predetermined gap in the longitudinal direction on the fork in order to prevent displacement. Thus, a pair of guide members are arranged. By using a hand in which a pair of guide members are arranged on the fork, the liquid crystal glass substrate W can be transported while preventing the liquid crystal glass substrate W placed on the fork from being displaced.

  Here, there may be a case where a robot having a hand having a pair of guide members arranged on the fork at the tip of the arm is used in an environment for transporting liquid crystal glass substrates W having different dimensions. In this case, every time the dimension of the liquid crystal glass substrate W to be transported is changed, it is necessary to change the position of the guide member so as to face the liquid crystal glass substrate W with a predetermined gap. . In general, at the time of teaching, the guide member is set for each dimension of the liquid crystal glass substrate W, a mark is recorded and the guide member is changed when the dimension of the liquid crystal glass substrate W to be transported is changed. The arrangement is changed by arranging and fixing the mark so as to match the mark recorded at the time of teaching. For this reason, it takes time to change the setup, and it cannot be said that the workability is good.

  Therefore, in the present embodiment, the left hand 9L and the right hand 9R include three forks 12 on which the liquid crystal glass substrate W can be placed, and a pair of fixing members 15 that are disposed apart from each other in the longitudinal direction of the forks on the forks 12. And a pair of guide members 13. The pair of guide members 13 are respectively disposed between the pair of fixing members 15, and restrict the movement of the liquid crystal glass substrate W placed on the fork 12 in the longitudinal direction of the fork. Each of the pair of guide members 13 is configured such that the fork longitudinal position on the fork 12 can be selectively set at a plurality of positions between the pair of fixing members 15. Accordingly, even when the liquid crystal glass substrates W having different dimensions are transported, the fixing position of the guide member 13 can be set on the basis of the fixing member 15 disposed on the fork 12, so that the setup change can be easily performed. It can be carried out. Further, for each dimension of the liquid crystal glass substrate W, a hand in which the guide member 13 is arranged on the fork 12 so as to have a predetermined gap with the liquid crystal glass substrate W is prepared, and the liquid crystal glass substrate W is conveyed. When doing, compared with the case where a hand is changed according to the dimension of the liquid crystal glass substrate W used as conveyance object, while being able to reduce cost significantly, workability | operativity can be improved.

  In the present embodiment, in particular, the pair of guide members 13 includes a pair of fixing members 15 in which the surface of the flat plate portion 131 opposite to the liquid crystal glass substrate W1 is fixed at a predetermined longitudinal position on the fork 12. The liquid crystal glass substrate W1 is disposed so as to abut against and contact the surface on the liquid crystal glass substrate W1 side (see FIGS. 2 and 3). Further, the pair of guide members 13 are arranged such that the surfaces of the flat plate portion 131 opposite to the liquid crystal glass substrates W2 and W3 abut against the surfaces of the intermediate members 17A and 17B on the liquid crystal glass substrates W2 and W3 side, respectively. Is arranged (see FIGS. 4 to 7). The guide member 13 is arranged to abut against the fixing member 15 fixed on the fork 12, or the guide member 13 is arranged to abut against the fixing member 15 fixed on the fork 12 and fixed on the fork 12. The guide member 13 can be easily disposed so as to face the liquid crystal glass substrate W placed on the fork 12 with a predetermined gap in the longitudinal direction of the fork 12 by being disposed in contact with the intermediate members 17A and 17B. And it can arrange reliably.

  In the present embodiment, in particular, the fixing member 15, the guide member 13, and the intermediate members 17A and 17B are formed in a long hole shape along the longitudinal direction of the fork, the long hole 15a, the long hole 131b, and the long hole 17Aa. , 17Ba. Thereby, the assembling property at the time of fixing the fixing member 15, the guide member 13, and the intermediate members 17A and 17B on the fork 12 can be improved.

  The embodiment is not limited to the above contents, and various modifications can be made without departing from the spirit and technical idea of the embodiment. Hereinafter, such modifications will be described.

(1) When the guide member is also arranged in the short direction of the fork In FIGS. 8 to 13, the left hand 9 </ b> L and the right hand 9 </ b> R of the present modification have five forks on which the liquid crystal glass substrate W can be placed. 112A, 112B, 112C, 112D, 112E. Note that the number of forks 112 is not limited to five as in this example, but may be one, two, or four or more. Forks 112A to 112E (hereinafter collectively referred to as “forks 112” where appropriate) can mount any of the three types of liquid crystal glass substrates W1 to W3 described above.

  Further, in this modification, the liquid crystal glass substrate W placed on the fork 112 is prevented from shifting in the short direction of the fork 112 (hereinafter referred to as “fork short direction” as appropriate) (on the fork 112 Of the five forks 112A to 112E, on the first fork 112A and on the fifth fork 112E, on the fork 112. Prepared according to the dimensions of the liquid crystal glass substrates W1 to W3 so as to face each other through a predetermined gap (for example, a clearance of 0.5 mm) from both ends of the liquid crystal glass substrate W placed on the fork in the lateral direction of the fork. Three types of guide members 113A (see FIGS. 8 and 9) and a pair of guide members 113B (see FIG. Referring 0 and 11), and one of the pair of guide members 113C (see FIGS. 12 and 13) is adapted to be fixed. Therefore, every time the size of the liquid crystal glass substrate W to be transported is changed, the change of the type of the guide member 113 is performed so that the liquid crystal glass substrate W faces the liquid crystal glass substrate W with a predetermined gap in the short fork direction. Done.

  The first fork 112A and the fifth fork 112E are symmetrical to each other, and are provided with holes in three positions at an appropriate gap along the longitudinal direction of the fork and on the upper surface along the lateral direction of the fork. A plurality of screw holes 112a, 112b, and 112c to which the screw 114 is fastened are provided. Further, at the three positions corresponding to the fork longitudinal direction on the forks 112A and 112E, one or the other of the pair of fixing members 115 (second fixing members) is disposed between the two forks 112A and 112E in the fork short direction. They are arranged away from each other. That is, one of the pair of fixing members 115 is disposed at the three positions on the fork 112A, and the other of the pair of fixing members 115 is disposed at the three positions on the fork 112E. More specifically, the pair of fixing members 115 are arranged at predetermined positions on the forks 112A and 112E along the fork short direction set according to the apparatus standard of the robot 1 (hereinafter referred to as “predetermined short direction as appropriate”). Each of which is referred to as a “position”).

  In this example, the pair of fixing members 115 have long holes 115a formed in a long hole shape along the short direction of the fork and through which the screw 114 is inserted and fastened to the screw hole 112a on the fork 112A or the fork 112E. Two screws 114 are inserted into the respective long holes 115a and fastened to the respective screw holes 112a, thereby being fixed at the predetermined short-side positions. Each long hole 115a is set such that the length in the longitudinal direction of the fork is longer than the shaft portion of the screw 114 and shorter than the head portion of the screw 114, and the length in the short direction of the fork is at least It is set longer than the length in the longitudinal direction. Further, the fixing positions of the pair of fixing members 115 are not changed even when the setup is changed, that is, the conveyance target is fixed at the same position regardless of the liquid crystal glass substrates W1 to W3.

  Of the five forks 112A to 112E, the second fork 112B and the fourth fork 112D have substantially the same structure as the fork 12 in the above embodiment, and the dimensions of the liquid crystal glass substrate W to be transported. Is changed to change the fixing position of the guide member 13 so as to face the liquid crystal glass substrate W with a predetermined gap in the longitudinal direction of the fork (see FIGS. 2 to 7). reference).

  In addition, among the five forks 112A to 112E, the third fork 112C has a plurality of pins 112Ca that support the liquid crystal glass substrate W and are erected on the upper surface along the fork longitudinal direction.

  Hereinafter, the setup change will be described.

  First, the case where the liquid crystal glass substrate W1 having the largest dimension among the three types of liquid crystal glass substrates W1 to W3 is to be transported will be described with reference to FIGS.

  As shown in FIGS. 8 and 9, when the liquid crystal glass substrate W1 is to be transported, a pair of left and right forks 112A and 9R provided on the left hand 9L and the right hand 9R have a pair of One or the other of the fixing members 115 and one of the pair of guide members 113A having the smallest dimension in the fork short direction among the three types of the pair of guide members 113A, the pair of guide members 113B, and the pair of guide members 113C. Or the other is arranged. In the example shown in FIGS. 8 and 9, the guide member 113A corresponds to the second guide member described in the claims. As described above, the pair of fixing members 115 are respectively fixed at the predetermined short-side positions.

  The pair of guide members 113A includes a flat plate portion 231A in which a pad 231a for supporting the liquid crystal glass substrate W placed on the fork 112 is erected at the upper end portion on the liquid crystal glass substrate W side, and a pad 231a on the flat plate portion 231A. The guide member 232 is fixed on the fixing member 115 side by screws 116. In this example, the flat plate portion 231A has long holes 231Aa that are formed in a long hole shape along the fork short direction and are inserted into the screw holes 112b and 112c on the fork 112A or the fork 112E. I have two. Each long hole 231Aa is set such that the length in the longitudinal direction of the fork is longer than the shaft portion of the screw 114 and shorter than the head portion of the screw 114, and the length in the short direction of the fork is at least It is set longer than the length in the longitudinal direction.

  When the liquid crystal glass substrate W1 is to be transported, first, the pair of guide members 113A are respectively disposed between the pair of fixing members 115 fixed at the predetermined short-side direction position. Specifically, the pair of guide members 113A are arranged so that the surface of the flat plate portion 231A opposite to the liquid crystal glass substrate W1 abuts against and contacts the surface of the closer fixing member 115 on the liquid crystal glass substrate W1 side. Is done. In this state, the two screws 114 are inserted into the long holes 231Aa and fastened to the screw holes 112b and 112c, whereby the pair of guide members 113A are fixed on the forks 112A and 112E, respectively. As described above, the guide member 113A is configured so that the end surface of the guide portion 232 faces the end surface of the liquid crystal glass substrate W1 placed on the fork 112 with a predetermined gap in the fork short direction. The fixing member 115 on 112E is fixed at a position closer to the liquid crystal glass substrate W1 side.

  In the example shown in FIGS. 8 and 9, the liquid crystal glass substrate W1 of the pair of guide members 113A that abuts the surfaces on the liquid crystal glass substrate W1 side of the pair of fixing members 115 disposed at the predetermined short-side position. The surface on the opposite side corresponds to the fourth contact surface described in the claims.

  By performing the setup change as described above and the setup change (see FIGS. 2 and 3) for changing the fixing position of the guide member 13 on the forks 112B and 112D, the liquid crystal glass substrate W1 to be transported is also performed. The fork transverse direction end faces of the pair of guide members 113A end faces of the guide portions 232 face each other from both ends in the fork transverse direction with a predetermined gap, and the fork longitudinal side end faces A pad 231a on the flat plate portion 231A of the guide member 113A on the forks 112A and 112E so as to face each other through a predetermined gap from both ends in the longitudinal direction of the forks in the end face of the guide portion 132 of the pair of guide members 13; The pin 12g on the forks 112B and 112D and the pad 131a on the flat plate portion 131 of the guide member 13, While supported on the pins 112Ca on 112C is placed on the fork 112.

  Next, the case where the liquid crystal glass substrate W2 having the second largest dimension among the above three types of liquid crystal glass substrates W1 to W3 is to be transported will be described with reference to FIGS.

  As shown in FIGS. 10 and 11, when the liquid crystal glass substrate W2 is to be transported, a pair of left and right forks 112A and 9R provided on the left hand 9L and the right hand 9R have a pair of One or the other of the fixing members 115 and the pair of guide members 113B having the second smallest fork transverse dimension among the three types of the pair of guide members 113A, the pair of guide members 113B, and the pair of guide members 113C. One or the other of each is arranged. In the example shown in FIGS. 10 and 11, the guide member 113 </ b> B corresponds to the second guide member described in the claims. As described above, the pair of fixing members 115 are respectively fixed at the predetermined short-side positions.

  The pair of guide members 113B includes a flat plate portion 231B in which a pad 231a for supporting the liquid crystal glass substrate W placed on the fork 112 is erected on the upper end portion on the liquid crystal glass substrate W side, and a pad 231a on the flat plate portion 231B. The guide member 232 is fixed on the fixing member 115 side by screws 116. In this example, the flat plate portion 231B has a long hole 231Ba formed in a long hole shape along the fork short direction and inserted into the screw hole 112b or 112c on the fork 112A or the fork 112E. I have two. Each of the long holes 231Ba is set so that the length in the longitudinal direction of the fork is longer than the shaft portion of the screw 114 and shorter than the head portion of the screw 114, and the length in the short direction of the fork is at least It is set longer than the length in the longitudinal direction.

  When the liquid crystal glass substrate W2 is to be transported, first, the pair of guide members 113B are respectively disposed between the pair of fixed members 115 fixed at the predetermined short-side position. Specifically, the pair of guide members 113B are arranged such that the surface of the flat plate portion 231B opposite to the liquid crystal glass substrate W2 abuts against and contacts the surface of the closer fixing member 115 on the liquid crystal glass substrate W2 side. Is done. In this state, the two screws 114 are inserted into the long holes 231Ba and fastened to the screw holes 112b and 112c, whereby the pair of guide members 113B are fixed on the forks 112A and 112E, respectively. As described above, the guide member 113B is configured so that the end surface of the guide portion 232 faces the end surface of the liquid crystal glass substrate W2 placed on the fork 112 with a predetermined gap in the fork short direction. It is fixed at a position on the liquid crystal glass substrate W2 side from the fixing member 115 on 112E.

  In the example shown in FIGS. 10 and 11, the liquid crystal glass substrate W2 of the pair of guide members 113B that abuts the surfaces on the liquid crystal glass substrate W2 side of the pair of fixing members 115 arranged in the predetermined short-side direction position. The surface on the opposite side corresponds to the fourth contact surface described in the claims.

  As described above, the liquid crystal glass substrate W2 to be transported is obtained by performing the replacement of the setup and changing the fixing position of the guide member 13 on the forks 112B and 112D (see FIGS. 4 and 5). The fork transverse direction end faces of the pair of guide members 113B end faces of the guide portions 232 face each other from both ends in the fork transverse direction with a predetermined gap, and the fork longitudinal direction end faces The pads 231a on the flat plate portion 231B of the guide member 113B on the forks 112A and 112E so as to face each other through a predetermined gap from both ends in the fork longitudinal direction of the end surfaces of the guide portions 132 of the pair of guide members 13; The pin 12g on the forks 112B and 112D and the pad 131a on the flat plate portion 131 of the guide member 13, While supported on the pins 112Ca on 112C is placed on the fork 112.

  Next, the case where the liquid crystal glass substrate W3 having the smallest dimension among the above three types of liquid crystal glass substrates W1 to W3 is to be transported will be described with reference to FIGS.

  As shown in FIGS. 12 and 13, when the liquid crystal glass substrate W3 is to be transported, a pair of left and right forks 112A and 9R provided on the left hand 9L and the right hand 9R have a pair of One or the other of the fixing members 115 and one of the pair of guide members 113C having the largest dimension in the fork short direction among the three types of the pair of guide members 113A, the pair of guide members 113B, and the pair of guide members 113C. Or the other is arranged. In the example shown in FIGS. 12 and 13, the guide member 113C corresponds to the second guide member described in the claims. As described above, the pair of fixing members 115 are respectively fixed at the predetermined short-side positions.

  The pair of guide members 113C includes a flat plate portion 231C and a guide portion 232 fixed by screws 116 on the fixing member 115 side on the flat plate portion 231C. In this example, the flat plate portion 231C has a long hole 231Ca that is formed in a long hole shape along the fork short direction and is inserted into the screw hole 112b or 112c on the fork 112A or the fork 112E. I have two. Each of the long holes 231Ca is set so that the length in the longitudinal direction of the fork is longer than the shaft portion of the screw 114 and shorter than the head portion of the screw 114, and the length in the short direction of the fork is at least It is set longer than the length in the longitudinal direction.

  When the liquid crystal glass substrate W3 is to be transported, first, the pair of guide members 113C are respectively disposed between the pair of fixing members 115 fixed at the predetermined short-side position. Specifically, the pair of guide members 113C are respectively arranged such that the surface of the flat plate portion 231C opposite to the liquid crystal glass substrate W3 abuts against and contacts the surface of the closer fixing member 115 on the liquid crystal glass substrate W3 side. Is done. In this state, the two screws 114 are inserted into the long holes 231Ca and fastened to the screw holes 112b and 112c, whereby the pair of guide members 113C are fixed on the forks 112A and 112E, respectively. As described above, the guide member 113C is configured so that the end surface of the guide portion 232 faces the end surface of the liquid crystal glass substrate W3 placed on the fork 112 with a predetermined gap in the fork short direction. It is fixed at a position on the liquid crystal glass substrate W3 side from the fixing member 115 on 112E.

  In the example shown in FIGS. 12 and 13, the liquid crystal glass substrate W3 of the pair of guide members 113C that abuts on the liquid crystal glass substrate W3 side surfaces of the pair of fixing members 115 arranged at the predetermined short-side direction position. The surface on the opposite side corresponds to the fourth contact surface described in the claims.

  As described above, the liquid crystal glass substrate W3 to be transported is obtained by performing the stage replacement and also performing the stage replacement (see FIGS. 6 and 7) for changing the fixing position of the guide member 13 on the forks 112B and 112D. The fork transverse direction end faces of the pair of guide members 113C end faces of the guide portions 232 face each other from both ends of the fork transverse direction with a predetermined gap, and the fork longitudinal direction end faces The pins 12g on the forks 112B and 112D and the pads on the flat plate portion 131 of the guide member 13 so that the end faces of the guide portions 132 of the pair of guide members 13 face each other with a predetermined gap from both ends in the fork longitudinal direction. It is mounted on the fork 112 while being supported by 131a and the pin 112Ca on the fork 112C.

  In the present modification, the pair of fixing members 115 disposed between the forks 112A and 112E and spaced apart from each other in the fork short direction and the pair of fixing members 115 are disposed on the forks 112A and 112E, respectively. And a pair of guide members 113A, 113B, 113C for restricting the movement of the liquid crystal glass substrate W in the fork short direction. The pair of guide members 113A, 113B, and 113C has the opposite surfaces of the flat plate portions 231A, 231B, and 231C to the liquid crystal glass substrates W1, W2, and W3 at predetermined short-side positions on the forks 112A and 112E. The pair of fixed members 115 are arranged so as to abut against and contact the surfaces of the liquid crystal glass substrates W1, W2, and W3. Thereby, the guide member 113 can be easily and reliably disposed so as to face the liquid crystal glass substrate W placed on the fork 112 in the fork short direction with a predetermined gap.

(2) Others In the above description, each of the pair of guide members 13 is configured such that the longitudinal position in the fork can be selectively set to a plurality of positions. However, the present invention is not limited to this, and only one of the pair of guide members 13 is configured. The fork longitudinal direction position may be selectively set at a plurality of positions.

  Moreover, although the case where three types of liquid crystal glass substrates W having different dimensions were prepared as the objects to be transported by the robot 1 was illustrated above, the present invention is not limited thereto, and two types of liquid crystal glass substrates W having different sizes are prepared. The present invention can also be applied when prepared, or when four or more types of liquid crystal glass substrates W having different dimensions are prepared.

  Furthermore, although the target object was the liquid crystal glass substrate W in the above, it is not restricted to this, A target object may be another thing (for example, semiconductor substrate etc.).

  In addition to those already described above, the methods according to the above-described embodiments and modifications may be used in appropriate combination.

  In addition, although not illustrated one by one, the above-mentioned embodiment and each modification are implemented with various modifications within a range not departing from the gist thereof.

1 Robot 6 Arm (Robot Arm)
6L left arm (robot arm)
6R Right arm (robot arm)
9 hands (robot hand)
9L left hand (robot hand)
9R Right hand (robot hand)
12 Forks 12a to f Screw holes 13 Guide member (first guide member)
14 screw 15 fixing member (first fixing member)
15a long hole (first insertion hole)
17A, B Intermediate member (first intermediate member)
17Aa, Ba Long hole (3rd insertion hole)
112 forks 112A to E forks 113A to C guide member (second guide member)
115 fixing member (second fixing member)
131b Long hole (second insertion hole)
W Liquid crystal glass substrate (object)
W1-3 Liquid crystal glass substrate (object)

Claims (7)

A robot hand provided on a robot arm for transporting an object,
At least one fork on which the object can be placed;
A pair of first fixing members disposed apart from each other in the longitudinal direction of the fork;
A pair of first guide members which are respectively disposed between the pair of first fixing members and restrict movement of the object placed on the fork in the longitudinal direction;
Have
At least one of the pair of first guide members is
A robot hand characterized in that a longitudinal position of the fork is configured to be selectively set at a plurality of positions. At least one of the pair of first guide members is
The robot hand according to claim 1, further comprising a first abutting surface that abuts on the first fixing member closer to the first guide member. The fork is
A first fastening hole in which a first fastening member for fastening the first fixing member and the fork is fastened;
A second fastening hole in which a second fastening member for fastening the first guide member and the fork is fastened;
Have
The first fixing member is
A first insertion hole for inserting the first fastening member and fastening the first fastening member to the first fastening hole;
The first guide member is
Having a second insertion hole for allowing the second fastening member to be inserted and fastened to the second fastening hole;
The first insertion hole and the second insertion hole are:
The robot hand according to claim 1, wherein the robot hand is formed in a long hole shape along the longitudinal direction. An intermediate member further provided with a second contact surface that is disposed between the first fixing member and the first guide member closer to the first fixing member and contacts the first fixing member. And
At least one of the pair of first guide members is
The robot hand according to any one of claims 1 to 3, further comprising a third abutting surface that abuts on the intermediate member that abuts on the first fixing member. The fork is
A first fastening hole in which a first fastening member for fastening the first fixing member and the fork is fastened;
A second fastening hole in which a second fastening member for fastening the first guide member and the fork is fastened;
A third fastening hole to which a third fastening member for fastening the intermediate member and the fork is fastened;
Have
The first fixing member is
A first insertion hole for inserting the first fastening member and fastening the first fastening member to the first fastening hole;
The first guide member is
Having a second insertion hole for allowing the second fastening member to be inserted and fastened to the second fastening hole;
The intermediate member is
Having a third insertion hole for allowing the third fastening member to be inserted and fastened to the third fastening hole;
The first insertion hole, the second insertion hole, and the third insertion hole are:
The robot hand according to claim 4, wherein the robot hand is formed in a long hole shape along the longitudinal direction. A pair of second fixing members disposed apart from each other in the short direction of the fork;
A pair of second guide members that are respectively disposed between the pair of second fixing members and restrict movement of the object placed on the fork in the lateral direction;
Have
At least one of the pair of second guide members is
The robot hand according to any one of claims 1 to 5, further comprising a fourth abutting surface that abuts the second fixing member closer to the second guide member. A robot provided with a robot arm and a robot hand provided on the robot arm,
The robot hand is
At least one fork on which the object can be placed;
A pair of first fixing members disposed apart from each other in the longitudinal direction of the fork;
A pair of first guide members which are respectively disposed between the pair of first fixing members and restrict movement of the object placed on the fork in the longitudinal direction;
Have
At least one of the pair of first guide members is
A longitudinal direction position of the fork is configured to be selectively set at a plurality of positions.

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