CN112476431B - Substrate transfer robot control method, device, system, apparatus, and medium - Google Patents

Substrate transfer robot control method, device, system, apparatus, and medium Download PDF

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Publication number
CN112476431B
CN112476431B CN202011204211.9A CN202011204211A CN112476431B CN 112476431 B CN112476431 B CN 112476431B CN 202011204211 A CN202011204211 A CN 202011204211A CN 112476431 B CN112476431 B CN 112476431B
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substrate
target
size
robot
determining
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CN112476431A (en
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苏喜然
王广炎
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Hefei Sineva Intelligent Machine Co Ltd
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Hefei Sineva Intelligent Machine Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

The invention discloses a control method, a device, a system, equipment and a medium of a substrate conveying robot, wherein in the method, a first target interval between mechanical fingers when the substrate conveying robot conveys a target substrate is determined according to the target size of the target substrate after transfer carried in a received transfer instruction and the corresponding relation between the pre-stored size and the interval; determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production conversion and a preset alignment mode; according to the distance variation and the reference teaching data of the substrate carrying robot for carrying the reference substrate, the target teaching data of the substrate carrying robot for carrying the target substrate is determined, so that the substrate carrying robot can be automatically adjusted, a large amount of time and manpower resources are saved, the production conversion efficiency is improved, and the production progress of new products is accelerated.

Description

Substrate transfer robot control method, device, system, apparatus, and medium
Technical Field
The present invention relates to the field of robotics, and in particular, to a method, an apparatus, a system, a device, and a medium for controlling a substrate transfer robot.
Background
In a production type enterprise, when the market sale condition of a certain product is poor, the production is often changed, namely, a production line for producing a certain product is adjusted to produce other products.
Particularly, in a panel production enterprise, a large number of substrate carrying robots are usually used in each panel production line, and in order to improve production efficiency and productivity, the panel production enterprise can continuously adopt substrates of one specification to produce panels of the same specification in a certain production period, but along with the change of market environment and customer requirements, the panel production enterprise needs to carry out production conversion, namely, adopt substrates of another specification to produce panels of corresponding specification on the panel production line.
When the production line is changed, the substrate carrying robots need to be adjusted correspondingly according to the specifications of the substrates after the production line is changed, the conventional adjustment mode is that each substrate carrying robot of the panel production line is taught again and the distance between the mechanical fingers is adjusted manually one by one, but because a large number of substrate carrying robots are arranged on the production line, the manual adjustment mode consumes a large amount of time and labor, the production line is low in production efficiency, and the production schedule of new products is reduced.
Disclosure of Invention
The embodiment of the invention provides a control method, a device, a system, equipment and a medium of a substrate conveying robot, which are used for solving the problems that the existing manual adjustment mode consumes a large amount of time and labor, the production conversion efficiency is low and the production progress of a new product is slow.
The embodiment of the invention provides a control method of a substrate conveying robot, which comprises the following steps:
determining a first target interval between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and the corresponding relation between the size and the interval which are stored in advance;
determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production conversion and a preset alignment mode;
and determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate.
Further, the determining, according to the target size of the target substrate after transfer carried in the received transfer instruction and the correspondence between the size and the pitch stored in advance, a first target pitch between the robot fingers when the substrate transfer robot transfers the target substrate includes:
judging whether the target size exists in the corresponding relation between the size and the distance which are stored in advance;
and if so, determining the space corresponding to the target size as a first target space.
Further, if there is no first target pitch corresponding to the target size, the method further includes:
and sending out prompt information that the first target distance does not exist.
Further, the method further comprises:
and receiving an input second target interval, and correspondingly storing the target size and the second target interval in a pre-stored corresponding relation between the size and the interval.
Further, if there is no first target pitch corresponding to the target size, the method further includes:
if the number of the corresponding relations which are stored in advance reaches a set threshold value, determining a linear relation between the width and the distance according to the corresponding relations between the size and the distance which are stored in advance;
and determining a first target distance between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size and the linear relation.
Further, the determining the distance variation of the substrate transfer robot for transferring the substrate according to the target size, the pre-stored reference size of the reference substrate before transfer, and a preset alignment mode includes:
if the preset alignment mode is a substrate front end alignment mode, determining that the distance variation of the substrate carrying robot for carrying the substrate is 0;
if the preset alignment mode is a substrate center alignment mode, determining that half of the difference value between the target size and the reference size is the distance variation amount;
and if the preset alignment mode is a substrate rear end alignment mode, determining the difference value between the target size and the reference size as the distance variation.
Further, the determining target teaching data for the substrate transport robot to transport the target substrate based on the distance variation and reference teaching data for the substrate transport robot to transport the reference substrate may include:
determining each sum value of the distance variation and each position according to the distance variation and the position of each track point in the reference teaching data of the reference substrate conveyed by the substrate conveying robot;
and determining each sum as each target position of each target track point in target teaching data of the target substrate carried by the substrate carrying robot.
Further, the method further comprises:
and controlling the substrate conveying robot to convey each target substrate according to the target teaching data.
Accordingly, an embodiment of the present invention provides a substrate transfer robot control apparatus, including:
the first determining module is used for determining a first target interval between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and the corresponding relation between the size and the interval which are stored in advance;
the second determining module is used for determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production conversion and a preset alignment mode; and determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate.
Further, the first determining module is specifically configured to determine whether the target size exists in a pre-stored correspondence between the size and the distance;
and if so, determining the space corresponding to the target size as a first target space.
Further, the apparatus further comprises:
and the output module is used for sending out prompt information that the first target interval does not exist if the first target interval corresponding to the target size does not exist.
Further, the apparatus further comprises:
and the receiving module is specifically used for receiving the input second target interval and correspondingly storing the target size and the second target interval in the corresponding relationship between the pre-stored size and the interval.
Further, the first determining module is specifically configured to determine, if there is no first target interval corresponding to the target size, a linear relationship between the width and the interval according to a pre-stored correspondence between the size and the interval if the number of the pre-stored correspondence reaches a set threshold; and determining a first target distance between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size and the linear relation.
Further, the second determining module is specifically configured to determine that a distance variation of the substrate transport robot for transporting the substrate is 0 if the preset alignment mode is a substrate front end alignment mode; if the preset alignment mode is a substrate center alignment mode, determining that half of the difference value between the target size and the reference size is the distance variation amount; and if the preset alignment mode is a substrate rear end alignment mode, determining the difference value between the target size and the reference size as the distance variation.
Further, the second determining module is specifically further configured to determine, according to the distance variation and a position of each trace point in reference teaching data of the substrate transport robot for transporting the reference substrate, each sum of the distance variation and each position;
and determining each sum as each target position of each target track point in target teaching data of the target substrate carried by the substrate carrying robot.
Further, the apparatus further comprises:
and the control module is specifically used for controlling the substrate conveying robot to convey each target substrate according to the target teaching data.
Accordingly, an embodiment of the present invention provides a substrate transfer robot control system, which includes any one of the control devices of the substrate transfer robot, a substrate transfer robot, and a server that sends a transfer instruction.
Accordingly, an embodiment of the present invention provides an electronic device, which includes a processor and a memory, wherein the memory is used for storing program instructions, and the processor is used for implementing the steps of any one of the above-mentioned methods for controlling a substrate transfer robot when executing a computer program stored in the memory.
Accordingly, an embodiment of the present invention provides a computer-readable storage medium storing a computer program which, when executed by a processor, implements the steps of any one of the above-described methods for controlling a substrate transfer robot.
The embodiment of the invention provides a control method, a device, a system, equipment and a medium of a substrate conveying robot, wherein in the method, a first target distance between mechanical fingers when the substrate conveying robot conveys a target substrate is determined according to the target size of the target substrate after transfer carried in a received transfer instruction and the corresponding relation between the pre-stored size and the distance; determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production conversion and a preset alignment mode; and determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate. According to the embodiment of the invention, the first target distance between the mechanical fingers of the substrate carrying robot after the production transfer and the target teaching data of the target substrate carrying robot can be determined according to the target size of the target substrate after the production transfer, so that the substrate carrying robot can be automatically adjusted, a large amount of time and manpower resources are saved, the production transfer efficiency is improved, and the production schedule of new products is accelerated.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
Fig. 1 is a process diagram of a substrate transfer robot control method according to an embodiment of the present invention;
fig. 2 is a schematic view of a robot finger of a substrate transfer robot according to an embodiment of the present invention;
FIG. 3a is a schematic view of the reference substrate before the substrate transfer robot transfers the substrate for transfer;
FIG. 3b is a schematic view of the target substrate after the substrate transfer robot transfers the target substrate;
FIG. 4a is a schematic view of the reference substrate before the substrate transfer robot transfers the substrate for transfer;
FIG. 4b is a schematic view of the target substrate after the substrate transfer robot transfers the target substrate;
FIG. 5a is a schematic view of the reference substrate before the substrate transfer robot transfers the substrate for transfer;
FIG. 5b is a schematic view of the target substrate after the substrate transfer robot transfers the target substrate;
fig. 6 is a schematic diagram illustrating an embodiment of the present invention for determining a first target distance between fingers when a substrate transfer robot transfers a target substrate;
fig. 7 is a schematic diagram illustrating a process of determining a target pitch for a substrate transfer robot to transfer a target substrate according to an embodiment of the present invention;
fig. 8 is a process diagram of a control method of a substrate transfer robot according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of a control device of a substrate transfer robot according to an embodiment of the present invention;
fig. 10 is a schematic structural diagram of a substrate transfer robot control system according to an embodiment of the present invention;
fig. 11 is a schematic structural diagram of an electronic device according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to improve the production conversion efficiency and save time and human resources, the embodiment of the invention provides a control method, a device, a system, equipment and a medium for a substrate conveying robot.
Example 1:
fig. 1 is a schematic diagram of a control process of a substrate transfer robot according to an embodiment of the present invention, where the process includes the following steps:
s101: and determining a first target spacing between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and the corresponding relation between the size and the spacing stored in advance.
The control method of the substrate conveying robot provided by the embodiment of the invention is applied to electronic equipment, and the electronic equipment can be control equipment of the substrate conveying robot, such as intelligent terminals, PCs, tablet computers, servers and other equipment; the substrate transfer robot itself may be used.
In the embodiment of the invention, when a panel production line adopts a substrate with another specification to produce a panel with a corresponding specification, a production transfer instruction is generated and sent to the electronic equipment, and the electronic equipment receives the production transfer instruction. The transfer instruction is that the substrate transfer robot is adjusted from a reference substrate before transfer to a target substrate after transfer. The transfer instruction is sent to the electronic device by other devices, and the electronic device determines target teaching data and a target distance between the mechanical fingers when the target substrate is conveyed after receiving the transfer instruction.
When the electronic equipment receives the production transferring instruction, the target substrate is conveyed by the robot for controlling the substrate conveying, and because the size of the reference substrate before production transferring is different from that of the target substrate after production transferring, the picking and placing process is stable when the substrate conveying robot conveys the target substrate after production transferring, the target substrate cannot be damaged, and the first target distance between the mechanical arms when the substrate conveying robot conveys the target substrate is determined according to the target size of the target substrate after production transferring carried in the received production transferring instruction, so that the mechanical arms can stably and reliably support and lift the target substrate.
The substrate carrying robot comprises a mechanical arm with adjustable finger spacing, each finger of the mechanical arm is provided with a driving motor, and the spacing between fingers of the mechanical arm can be flexibly adjusted according to requirements.
Specifically, in order to determine a first target distance between the fingers when the substrate transfer robot transfers the target substrate, the transfer instruction carries a target size of the target substrate after the transfer, the electronic device further pre-stores a corresponding relationship between the size and the distance, wherein the size in the corresponding relationship is a size of a substrate of a corresponding specification of a panel produced by a panel production line which is pre-stored, and the distance in the corresponding relationship is a distance between the fingers when the substrate transfer robot transfers the substrate of the size. The electronic device may determine, according to the target size of the transferred target substrate carried in the received transfer instruction and the correspondence between the pre-stored size and the pitch, a pitch corresponding to the target size in the correspondence, and determine the pitch corresponding to the target size as a first target pitch between the robot fingers when the substrate transfer robot transfers the target substrate.
S102: and determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production transfer and a preset alignment mode.
In order to control the substrate transfer robot to transfer the target substrate, the position of the substrate transfer robot before and after the transfer and the position of the substrate transfer robot for placing and placing the target substrate are not changed, and only the size of the reference substrate before the transfer is different from that of the target substrate after the transfer, so that only the distance between the rotation center of the substrate transfer robot and the center of the robot holder is changed before and after the transfer.
The sizes of the reference substrate before production conversion and the target substrate after production conversion are determined, but when the substrate placing modes are different alignment modes, the distance variation of the distance between the rotation center of the substrate conveying robot and the center of the manipulator fixing seat is different. Therefore, in the embodiment of the present invention, the electronic device is further preset with an alignment mode, in which the reference substrate and the target substrate are placed at different positions of the robot to ensure that the reference substrate and the target substrate are aligned. The alignment method comprises the following steps: a substrate front end alignment mode, a substrate center alignment mode, and a substrate back end alignment mode.
In order to determine the distance variation of the distance between the rotation center of the substrate transport robot and the center of the manipulator fixing seat, the transfer instruction also carries the alignment mode of the target substrate after the transfer operation, and the electronic equipment determines the distance variation of the distance between the rotation center of the substrate transport robot and the center of the manipulator fixing seat in the alignment mode according to the alignment mode carried in the received transfer instruction.
S103: and determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate.
In order to realize the substrate transportation, namely the process that the substrate transportation robot takes out the substrate from a container provided with the substrate and then places the substrate into another container on the production line, the position of each track point in the motion track of the substrate transportation robot for transporting the substrate needs to be determined, the motion track of the substrate transportation robot for transporting the substrate is teaching data, and the substrate transportation robot can transport the substrate according to the teaching data.
The reference teaching data is a movement track of the substrate conveying robot when the substrate conveying robot conveys a reference substrate before production transfer, and the reference teaching data comprises position data of each track point in the movement track of the substrate conveying robot.
In the embodiment of the present invention, after the distance variation is determined, since the position of the substrate transfer robot before and after the transfer and the placement position of the substrate transfer robot for placing and placing the target substrate are not changed, only the size of the reference substrate before the transfer is different from that of the target substrate after the transfer, and the electronic device stores the reference teaching data of the reference substrate transferred by the substrate transfer robot, the electronic device can determine the target teaching data of the target substrate transferred by the substrate transfer robot based on the influence of the distance variation on the teaching data on the basis of the reference teaching data of the reference substrate before the transfer.
According to the embodiment of the invention, the first target distance between the mechanical fingers of the substrate carrying robot after the production transfer and the target teaching data of the target substrate carrying robot can be determined according to the target size of the target substrate after the production transfer, so that the substrate carrying robot can be automatically adjusted, a large amount of time and labor are saved, the production transfer efficiency is improved, and the production schedule of new products is accelerated.
Example 2:
in order to determine the first target distance between the robot fingers when the substrate transfer robot transfers the target substrate, in an embodiment of the present invention, in addition to the above-described embodiment, the determining the first target distance between the robot fingers when the substrate transfer robot transfers the target substrate based on the target size of the target substrate after transfer carried in the received transfer instruction and the correspondence between the size and the distance stored in advance includes:
judging whether the target size exists in the corresponding relation between the size and the distance which are stored in advance;
and if so, determining the space corresponding to the target size as a first target space.
In order to determine a first target pitch between the fingers when the substrate transfer robot transfers a target substrate, in an embodiment of the present invention, the electronic device stores a correspondence relationship between a size and a pitch in advance, and determines whether or not the target size is present in the correspondence relationship based on a target size of the target substrate after transfer.
Specifically, the dimensions include a substrate length and a substrate width, the substrate length is a substrate dimension in a direction in which a robot arm of the substrate transfer robot takes and places the substrate, and the substrate width is a substrate dimension in a direction perpendicular to the direction in which the robot arm of the substrate transfer robot takes and places the substrate.
Therefore, the electronic device determines whether the target size exists in the corresponding relationship, and may determine whether the target substrate length of the target size is the same as the substrate length of a certain size stored in the corresponding relationship, and whether the target substrate width of the target size is the same as the substrate width of the certain size, and if it is determined that the target substrate length of the target size is the same as the substrate length of the certain size, and the target substrate width of the target size is the same as the substrate width of the certain size, it is determined that the target size exists in the corresponding relationship.
Further, since the pitch between the fingers when the substrate transfer robot transfers the target substrate is related only to the target substrate width of the target substrate, the correspondence relationship between the size and the pitch stored in advance is substantially the correspondence relationship between the substrate width and the pitch in the size, and the electronic device may determine whether or not the target size is present in the correspondence relationship, or may determine whether or not only the target substrate width of the target size is the same as the substrate width of the size in the correspondence relationship, and may determine that the target size is present in the correspondence relationship if the target substrate width of the target size is the same as the substrate width of a certain size in the correspondence relationship.
And if the target size exists in the corresponding relation, determining the space corresponding to the target size in the corresponding relation as a first target space between the mechanical fingers when the substrate conveying robot conveys the target substrate.
Fig. 2 is a diagram illustrating a finger space adjustable manipulator according to an embodiment of the present invention, as shown in fig. 2, the manipulator includes fingers 1, fingers 2, fingers 3, and fingers 4, where a distance between every two adjacent fingers is a space between the fingers, and the space between every two adjacent fingers can be adjusted.
On the basis of the foregoing embodiments, in an embodiment of the present invention, if there is no first target pitch corresponding to the target size, the method further includes:
and sending out prompt information that the first target distance does not exist.
If the target size does not exist in the corresponding relation, in order to accurately determine the distance between the mechanical fingers when the substrate conveying robot conveys the target substrate, so that the picking and placing process of the substrate conveying robot when the substrate conveying robot conveys the target substrate is stable, the target substrate is not damaged, and the electronic equipment sends out prompt information that the first target distance corresponding to the target size does not exist in the corresponding relation.
The prompt message may be a voice prompt message, a text prompt message, or a voice prompt message and a text prompt message, which is not limited in this embodiment of the present invention.
In order to more accurately determine the distance between the mechanical fingers when the substrate transfer robot transfers the target substrate, on the basis of the above embodiments, in an embodiment of the present invention, the method further includes:
and receiving an input second target interval, and correspondingly storing the target size and the second target interval in a pre-stored corresponding relation between the size and the interval.
And after sending the prompt message, the electronic equipment receives an input second target interval, wherein the second target interval is an interval between the mechanical fingers when the target substrate is conveyed by the manually determined substrate conveying robot, and in order to determine a second target interval between the mechanical fingers corresponding to the target size in the later production transfer, the electronic equipment correspondingly stores the target size and the second target interval in a corresponding relationship between the size and the interval, which are stored in advance.
Example 3:
in order to automatically determine the first target pitch between the robot fingers when the substrate transfer robot transfers the target substrate when the first target pitch corresponding to the target size does not exist in the correspondence relationship, in the embodiments of the present invention based on the above embodiments, if the first target pitch corresponding to the target size does not exist, the method further includes:
if the number of the corresponding relations which are stored in advance reaches a set threshold value, determining a linear relation between the width and the distance according to the corresponding relations between the size and the distance which are stored in advance;
and determining a first target distance between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size and the linear relation.
When the first target interval corresponding to the target size does not exist in the correspondence between the size and the interval pre-stored in the electronic device, in order to automatically determine the first target interval corresponding to the target size, the electronic device may further determine whether the number of the pre-stored correspondence reaches a set threshold.
And if the number of the pre-stored corresponding relations is determined to reach the set threshold, determining that the electronic equipment can automatically determine the first target distance corresponding to the target size. The set threshold is preset, and may be set to be larger if it is desired to improve the accuracy of the first target pitch corresponding to the determined target size, and may be set to be smaller if it is desired to improve the robustness of the first target pitch corresponding to the automatically determined target size.
In order to automatically determine the first target pitch corresponding to the target dimension, the electronic device determines the coordinate point of each correspondence relationship by using the substrate width as a coordinate value of a horizontal axis in a preset coordinate system and using the pitch as a coordinate value of a vertical axis in the preset coordinate system based on the substrate width and the pitch of the dimension stored in the correspondence relationship, since the pitch between the fingers when the substrate transfer robot transfers the target substrate is related only to the target substrate width of the target substrate, the electronic device determines the coordinate point of each correspondence relationship.
According to the determined coordinate points, all the coordinate points are fitted by adopting a fitting algorithm in the prior art, and the linear relation between the width and the distance is determined.
And according to the target size and the determined linear relation between the width and the space, the electronic equipment substitutes the substrate width value in the target size into the linear relation, so as to determine a first target space between the mechanical fingers when the substrate conveying robot conveys the target substrate.
Example 4:
in order to determine the distance variation when the substrate transfer robot transfers the substrate, in the embodiments of the present invention, on the basis of the target size, the pre-stored reference size of the reference substrate before transfer, and the preset alignment method, the determining the distance variation when the substrate transfer robot transfers the substrate includes:
if the preset alignment mode is a substrate front end alignment mode, determining that the distance variation of the substrate carrying robot for carrying the substrate is 0;
if the preset alignment mode is a substrate center alignment mode, determining that half of the difference value between the target size and the reference size is the distance variation amount;
and if the preset alignment mode is a substrate rear end alignment mode, determining the difference value between the target size and the reference size as the distance variation.
In the embodiment of the present invention, since the preset alignment modes include a substrate front end alignment mode, a substrate center alignment mode, and a substrate rear end alignment mode, in order to determine the distance variation amount of the distance between the rotation center of the substrate transfer robot and the center of the robot holder when the substrate transfer robot transfers the substrate before and after the transfer in each alignment mode, the electronic device stores the reference dimension of the reference substrate before the transfer in advance.
When the preset alignment mode is a substrate front end alignment mode, in order to ensure the stability of the substrate conveying process, the length of the fingers of the manipulator is longer than that of the conveyed substrate, and the reference substrate and the target substrate are aligned with the front end of the manipulator on the manipulator, so that when the alignment mode between the target substrate and the reference substrate is the substrate front end alignment mode, the length change of the reference substrate and the target substrate does not cause the position change of the center of the fixed seat of the manipulator, and the distance change quantity of the distance between the rotation center of the substrate conveying robot and the center of the fixed seat of the manipulator when the substrate conveying robot conveys the substrate before and after production transfer is determined to be 0.
Specifically, fig. 3a is a schematic diagram of the reference substrate before the substrate transfer robot transfers the substrate before the transfer, and L in fig. 3abeforeIndicates the substrate length of the reference substrate, Rhand_beforeF is a distance between the center of rotation of the substrate transfer robot and the center of the robot holder at a locus point when the substrate transfer robot transfers a reference substratebeforeTwo dotted lines indicating the pitch between the fingers when the substrate transfer robot transfers a reference substrate are the horizontal axis reference center line and the vertical axis reference center line of the positioning rotation center position, respectively.
FIG. 3b is a schematic view of the substrate transfer robot transferring a transferred target substrate, L in FIG. 3bafterRepresents a target substrate length of the target substrate, Rhand_afterIndicating a distance between a center of rotation of the substrate transfer robot and a center of the robot holder on a track point of a target substrate to be transferred by the substrate transfer robot, FafterTwo dotted lines indicating the pitch between the fingers when the substrate transfer robot transfers a target substrate are the horizontal axis reference center line and the vertical axis reference center line of the positioning rotation center position, respectively.
In the case where the alignment between the reference substrate in figure 3a and the target substrate in figure 3b is a front-end substrate alignment, the front end of the reference substrate carried by the substrate carrying robot is aligned with the front end of the target substrate to be carried, as shown in fig. 3a and 3b, the dotted line of the front end of the substrate is a front end alignment line, in order to conveniently take and place the substrate by the substrate conveying robot, the front end of the substrate is aligned with the front end of the manipulator when the substrate conveying robot conveys the substrate, in order to ensure the stability of the substrate conveying process, the length of the fingers of the mechanical arm is longer than that of the conveyed substrate, the reference substrate and the target substrate are aligned with the front end of the mechanical arm on the mechanical arm, therefore, in the substrate front end alignment mode, the length change of the reference substrate and the target substrate does not cause the position change of the center of the fixed seat of the manipulator, so the distance of the substrate conveying robot for conveying the substrate is changed.Quantity Rhand_offset＝0。
When the preset alignment mode is a substrate center alignment mode, because the reference substrate and the target substrate are both aligned with the front end of the manipulator, when the positions of the manipulators for carrying the target substrate and the reference substrate by the substrate carrying robot are the same, the front end of the target substrate is aligned with the front end of the reference substrate, and if the rear end of the target substrate is aligned with the rear end of the reference substrate, the position of the manipulator is moved along the direction of the mechanical fingers by a difference value of the length of the target substrate compared with the length of the reference substrate; if the center of the target substrate is aligned with the center of the reference substrate, the position of the robot may be moved by half the difference between the target substrate length and the reference substrate length in the direction of the robot fingers, so that when the preset alignment mode is the substrate center alignment mode, the half of the difference between the target substrate length and the reference substrate length is determined according to the target substrate length of the target size and the reference substrate length of the reference size, and the half of the difference is used as the distance variation.
Specifically, fig. 4a is a schematic diagram of the reference substrate before the substrate transfer robot transfers the substrate before the transfer, where L in fig. 4abeforeIndicates the substrate length of the reference substrate, Rhand_beforeIndicating a distance between a rotation center of the substrate transfer robot and a center of the robot holder at a track point when the substrate transfer robot transfers a reference substrate before the transfer, and FbeforeTwo dotted lines indicating the pitch between the fingers when the substrate transfer robot transfers a reference substrate are the horizontal axis reference center line and the vertical axis reference center line of the positioning rotation center position, respectively.
FIG. 4b is a schematic view of the substrate transfer robot transferring a transferred target substrate, L in FIG. 4bafterRepresents a target substrate length of the target substrate, Rhand_afterF is a distance between the center of rotation of the substrate transfer robot and the center of the robot holder at a locus point when the substrate transfer robot transfers a target substrateafterIndicating the time when the substrate transfer robot transfers the target substrateThe two dotted lines at the rotation center position of the substrate transfer robot are the horizontal axis reference center line and the vertical axis reference center line for positioning the rotation center position, respectively.
When the alignment between the reference substrate in fig. 4a and the target substrate in fig. 4b is the substrate center alignment, the center of the reference substrate carried by the substrate carrying robot is aligned with the center of the target substrate to be carried, and the broken line of the substrate center is the center alignment line as shown in fig. 4a and 4b, since the front end of the target substrate is aligned with the front end of the reference substrate when the positions of the manipulators for carrying the target substrate and the reference substrate by the substrate carrying robot are the same, and if the center of the target substrate is aligned with the center of the reference substrate, the position of the manipulator can be moved by half the difference between the target substrate length and the reference substrate length in the manipulator finger direction, the distance variation R of the substrate carried by the substrate carrying robot is the same as the reference substrate lengthhand_offset＝(Lafter-Lbefore)/2。
And when the preset alignment mode is a substrate rear end alignment mode, determining the difference value between the target size and the reference size as the distance variation. Specifically, when the substrate transfer robot transfers the target substrate and the reference substrate at the same position of the robot hand, the front end of the target substrate is aligned with the front end of the reference substrate, and the rear end of the target substrate is aligned with the rear end of the reference substrate, the position of the robot hand can be moved in the direction of the robot fingers by a difference between the target substrate length and the reference substrate length.
Specifically, fig. 5a is a schematic diagram of the reference substrate before the substrate transfer robot transfers the substrate before the transfer, where L in fig. 5abeforeIndicates the substrate length of the reference substrate, Rhand_beforeIndicating a rotation center of the substrate transfer robot and a robot arm holder on a track point when the substrate transfer robot transfers a reference substrateDistance between centers, FbeforeTwo dotted lines indicating the pitch between the fingers when the substrate transfer robot transfers a reference substrate are the horizontal axis reference center line and the vertical axis reference center line of the positioning rotation center position, respectively.
FIG. 5b is a schematic view of the substrate transfer robot transferring a transferred target substrate, L in FIG. 5bafterRepresents a target substrate length of the target substrate, Rhand_afterF is a distance between the center of rotation of the substrate transfer robot and the center of the robot holder at a locus point when the substrate transfer robot transfers a target substrateafterTwo dotted lines indicating the pitch between the fingers when the substrate transfer robot transfers a target substrate are the horizontal axis reference center line and the vertical axis reference center line of the positioning rotation center position, respectively.
When the alignment between the reference substrate in fig. 5a and the target substrate in fig. 5b is the rear end of the substrate, the rear end of the reference substrate carried by the substrate carrying robot is aligned with the rear end of the target substrate to be carried, and as shown in fig. 5a and 5b, the dotted line of the rear end of the substrate is the rear end alignment line, and since the front end of the target substrate is aligned with the front end of the reference substrate when the positions of the manipulators for carrying the target substrate and the reference substrate by the substrate carrying robot are the same, and the rear end of the target substrate is aligned with the rear end of the reference substrate, the positions of the manipulators can be moved in the direction of the fingers by the difference between the target substrate length and the reference substrate length, and thus the distance variation R of the substrate carried by the substrate carrying robot is the same as the reference substrate lengthhand_offset＝Lafter-Lbefore。
Example 5:
in order to determine target teaching data for a substrate transfer robot to transfer a target substrate, in the embodiments of the present invention, in addition to the above-described embodiments, the determining target teaching data for the substrate transfer robot to transfer the target substrate based on the distance variation and reference teaching data for the substrate transfer robot to transfer the reference substrate includes:
determining each sum value of the distance variation and each position according to the distance variation and the position of each track point in the reference teaching data of the reference substrate conveyed by the substrate conveying robot;
and determining each sum as each target position of each target track point in target teaching data of the target substrate carried by the substrate carrying robot.
In order to determine target teaching data of a substrate transfer robot for transferring a target substrate, in an embodiment of the present invention, the teaching data includes a position of each track point on a movement locus of the substrate transfer robot when transferring the substrate. Since the position of the substrate transfer robot before and after the transfer and the placement position of the substrate transfer robot for picking and placing the target substrate are not changed, only the size of the reference substrate before the transfer is different from that of the target substrate after the transfer, only the distance from the position of the track point to the rotation center of the substrate transfer robot is changed in the teaching data.
Therefore, after the electronic device determines the distance variation, each sum of each position and the distance variation is determined according to the distance variation and the position of each track point in the reference teaching data of the substrate carrying robot for carrying the reference substrate, and the determined sum is each target position of each target track point in the target teaching data of the substrate carrying robot for carrying the target substrate.
Specifically, when the alignment mode is a substrate front end alignment mode, on each track point when the substrate transfer robot transfers a target substrate after transferring, the distance R between the rotation center of the substrate transfer robot and the center of the manipulator fixing base is set to be equal to or smaller than the distance R between the rotation center of the substrate transfer robot and the center of the manipulator fixing basehand_after＝Rhand_before+Rhand_offsetWherein R ishand_offset＝0。
When the alignment mode is a substrate center alignment mode, on each track point when the substrate conveying robot conveys the target substrate after the transfer, the distance R between the rotation center of the substrate conveying robot and the center of the manipulator fixing seathand_after＝Rhand_before+Rhand_offsetWhich isIn Rhand_offset＝(Lafter-Lbefore)/2。
When the alignment mode is a substrate rear end alignment mode, on each track point when the substrate carrying robot carries the target substrate after the transfer, the distance R between the rotation center of the substrate carrying robot and the center of the manipulator fixing seathand_after＝Rhand_before+Rhand_offsetWherein R ishand_offset＝Lafter-Lbefore。
Example 6:
in order to control the carrying of each target substrate, on the basis of the above embodiments, in an embodiment of the present invention, the method further includes: and controlling the substrate conveying robot to convey each target substrate according to the target teaching data.
After the electronic device determines target teaching data of the substrate transfer robot for transferring the target substrate after transfer, the electronic device controls the substrate transfer robot to transfer each target substrate according to the determined target teaching data and the position of the substrate transfer robot when transferring the target substrate in the target teaching data.
Example 7:
a method for controlling a substrate transfer robot according to a specific embodiment will be described below:
fig. 6 is a schematic diagram illustrating a process of determining a first target distance between fingers when a substrate transfer robot transfers a target substrate according to an embodiment of the present invention, as shown in fig. 6, the process includes the following steps:
s601: the electronic equipment stores the corresponding relation between the size and the distance input by a user in advance through the PC terminal, wherein the corresponding relation is stored in a database of the electronic equipment.
S602: the electronic equipment receives the target size of the target substrate carried in the transfer instruction sent by the PLC equipment.
S603: and the electronic equipment determines a first target distance corresponding to the target size according to the received target size and a corresponding relation pre-stored in a database of the electronic equipment by using a finger distance adjusting algorithm module of the electronic equipment.
S604: the electronic equipment sends the first target distance to a mechanical finger distance adjusting drive motor of the substrate conveying robot, and controls the finger distance of the mechanical hand to be adjusted to the first target distance.
Fig. 7 is a schematic diagram of a process for determining a target pitch for a substrate transfer robot to transfer a target substrate according to an embodiment of the present invention, as shown in fig. 7, the process includes the following steps:
s701: the electronic device determines the distance variation of the substrate conveying robot for conveying the substrate according to the target size of the target substrate, the reference size of the reference substrate before production conversion, which is stored in advance, and a preset alignment mode.
S702: the electronic device determines target teaching data of a substrate transfer robot for transferring a target substrate based on the distance variation and reference teaching data of the substrate transfer robot for transferring the reference substrate.
Combining the above two determination processes, fig. 8 is a schematic process diagram of a control method of a substrate transfer robot according to an embodiment of the present invention, and as shown in fig. 8, the process includes the following steps:
s801: the electronic device receives the target substrate size transmitted by the PLC device.
S802: the finger space adjusting algorithm module of the electronic equipment determines a target space corresponding to the size of the target substrate according to the corresponding relation between the size and the space pre-stored in the database and the size of the target substrate.
S803: and the target teaching data generation algorithm module of the electronic equipment determines target teaching data of the substrate conveying robot for conveying the target substrate according to the pre-stored reference teaching data, the target size of the target substrate and the reference size of the reference substrate.
Example 8:
in addition to the above embodiments, fig. 9 is a schematic structural diagram of a control device of a substrate transfer robot according to an embodiment of the present invention, the device including:
a first determining module 901, configured to determine a first target interval between the mechanical fingers when the substrate transport robot transports the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and a correspondence between the pre-stored size and the interval;
a second determining module 902, configured to determine, according to the target size, a pre-stored reference size of a reference substrate before production conversion, and a preset alignment manner, a distance variation amount of the substrate transportation robot for transporting the substrate; and determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate.
Further, the first determining module is specifically configured to determine whether the target size exists in a pre-stored correspondence between the size and the distance;
and if so, determining the space corresponding to the target size as a first target space.
Further, the apparatus further comprises:
and the output module is used for sending out prompt information that the first target interval does not exist if the first target interval corresponding to the target size does not exist.
Further, the apparatus further comprises:
and the receiving module is specifically used for receiving the input second target interval and correspondingly storing the target size and the second target interval in the corresponding relationship between the pre-stored size and the interval.
Further, the first determining module is specifically configured to determine, if there is no first target interval corresponding to the target size, a linear relationship between the width and the interval according to a pre-stored correspondence between the size and the interval if the number of the pre-stored correspondence reaches a set threshold; and determining a first target distance between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size and the linear relation.
Further, the second determining module is specifically configured to determine that a distance variation of the substrate transport robot for transporting the substrate is 0 if the preset alignment mode is a substrate front end alignment mode; if the preset alignment mode is a substrate center alignment mode, determining that half of the difference value between the target size and the reference size is the distance variation amount; and if the preset alignment mode is a substrate rear end alignment mode, determining the difference value between the target size and the reference size as the distance variation.
Further, the second determining module is specifically further configured to determine, according to the distance variation and a position of each trace point in reference teaching data of the substrate transport robot for transporting the reference substrate, each sum of the distance variation and each position;
and determining each sum as each target position of each target track point in target teaching data of the target substrate carried by the substrate carrying robot.
Further, the apparatus further comprises:
and the control module is specifically used for controlling the substrate conveying robot to convey each target substrate according to the target teaching data.
Example 9:
on the basis of the above embodiments, fig. 10 is a schematic structural diagram of a control system of a substrate transfer robot according to an embodiment of the present invention, and as shown in fig. 10, the system includes a control device 1002, a substrate transfer robot 1003, and a server 1001 for transmitting a transfer instruction, which are described in the above embodiments.
The control device 1002 of the substrate transfer robot is specifically described in the above embodiments, and details are not repeated in the embodiments of the present invention; the substrate transfer robot 1003 and the server 1001 that transmits the transfer instruction are all devices in the prior art, and are not described in detail in the embodiment of the present invention.
Example 10:
fig. 11 is a schematic structural diagram of an electronic device according to an embodiment of the present invention, and on the basis of the foregoing embodiments, an electronic device according to an embodiment of the present invention is further provided, where the electronic device includes a processor 1101, a communication interface 1102, a memory 1103 and a communication bus 1104, where the processor 1101, the communication interface 1102 and the memory 1103 complete communication with each other through the communication bus 1104;
the memory 1103 has stored therein a computer program that, when executed by the processor 1101, causes the processor 1101 to perform the steps of:
determining a first target interval between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and the corresponding relation between the size and the interval which are stored in advance;
determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production conversion and a preset alignment mode;
and determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate.
Further, the specifically determining, by the processor 1101, a first target pitch between the robot fingers when the substrate transfer robot transfers the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and a correspondence between a size and a pitch stored in advance includes:
judging whether the target size exists in the corresponding relation between the size and the distance which are stored in advance;
and if so, determining the space corresponding to the target size as a first target space.
Further, the processor 1101 is specifically further configured to, if there is no first target interval corresponding to the target size, the method further includes:
and sending out prompt information that the first target distance does not exist.
Further, the processor 1101 is specifically further configured to receive an input second target interval, and correspondingly store the target size and the second target interval in a pre-stored correspondence relationship between the size and the interval.
Further, the processor 1101 is specifically further configured to, if there is no first target interval corresponding to the target size, the method further includes:
if the number of the corresponding relations which are stored in advance reaches a set threshold value, determining a linear relation between the width and the distance according to the corresponding relations between the size and the distance which are stored in advance;
and determining a first target distance between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size and the linear relation.
Further, the processor 1101 is specifically configured to determine the distance variation of the substrate transport robot for transporting the substrate according to the target size, a pre-stored reference size of the reference substrate before the transfer, and a preset alignment manner, and includes:
if the preset alignment mode is a substrate front end alignment mode, determining that the distance variation of the substrate carrying robot for carrying the substrate is 0;
if the preset alignment mode is a substrate center alignment mode, determining that half of the difference value between the target size and the reference size is the distance variation amount;
and if the preset alignment mode is a substrate rear end alignment mode, determining the difference value between the target size and the reference size as the distance variation.
Further, the processor 1101 is specifically configured to determine target teaching data for the substrate transport robot to transport the target substrate based on the distance variation and reference teaching data for the substrate transport robot to transport the reference substrate, and the determining includes:
determining each sum value of the distance variation and each position according to the distance variation and the position of each track point in the reference teaching data of the reference substrate conveyed by the substrate conveying robot;
and determining each sum as each target position of each target track point in target teaching data of the target substrate carried by the substrate carrying robot.
Further, the processor 1101 is specifically configured to control the substrate transport robot to transport each target substrate according to the target teaching data.
The communication bus mentioned in the electronic device may be a Peripheral Component Interconnect (PCI) bus, an Extended Industry Standard Architecture (EISA) bus, or the like. The communication bus may be divided into an address bus, a data bus, a control bus, etc. For ease of illustration, only one thick line is shown, but this does not mean that there is only one bus or one type of bus.
The communication interface 1102 is used for communication between the electronic apparatus and other apparatuses.
The Memory may include a Random Access Memory (RAM) or a Non-Volatile Memory (NVM), such as at least one disk Memory. Alternatively, the memory may be at least one memory device located remotely from the processor.
The Processor may be a general-purpose Processor, including a central processing unit, a Network Processor (NP), and the like; but may also be a Digital instruction processor (DSP), an application specific integrated circuit, a field programmable gate array or other programmable logic device, discrete gate or transistor logic, discrete hardware components, or the like.
Example 11:
on the basis of the foregoing embodiments, an embodiment of the present invention further provides a computer-readable storage medium, which stores a computer program, where the computer program is executed by a processor to perform the following steps:
determining a first target interval between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and the corresponding relation between the size and the interval which are stored in advance;
determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production conversion and a preset alignment mode;
and determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate.
Further, the determining, according to the target size of the target substrate after transfer carried in the received transfer instruction and the correspondence between the size and the pitch stored in advance, a first target pitch between the robot fingers when the substrate transfer robot transfers the target substrate includes:
judging whether the target size exists in the corresponding relation between the size and the distance which are stored in advance;
and if so, determining the space corresponding to the target size as a first target space.
Further, if there is no first target pitch corresponding to the target size, the method further includes:
and sending out prompt information that the first target distance does not exist.
Further, the method further comprises:
and receiving an input second target interval, and correspondingly storing the target size and the second target interval in a pre-stored corresponding relation between the size and the interval.
Further, if there is no first target pitch corresponding to the target size, the method further includes:
if the number of the corresponding relations which are stored in advance reaches a set threshold value, determining a linear relation between the width and the distance according to the corresponding relations between the size and the distance which are stored in advance;
and determining a first target distance between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size and the linear relation.
Further, the determining the distance variation of the substrate transfer robot for transferring the substrate according to the target size, the pre-stored reference size of the reference substrate before transfer, and a preset alignment mode includes:
if the preset alignment mode is a substrate front end alignment mode, determining that the distance variation of the substrate carrying robot for carrying the substrate is 0;
if the preset alignment mode is a substrate center alignment mode, determining that half of the difference value between the target size and the reference size is the distance variation amount;
and if the preset alignment mode is a substrate rear end alignment mode, determining the difference value between the target size and the reference size as the distance variation.
Further, the determining target teaching data for the substrate transport robot to transport the target substrate based on the distance variation and reference teaching data for the substrate transport robot to transport the reference substrate may include:
determining each sum value of the distance variation and each position according to the distance variation and the position of each track point in the reference teaching data of the reference substrate conveyed by the substrate conveying robot;
and determining each sum as each target position of each target track point in target teaching data of the target substrate carried by the substrate carrying robot.
Further, the method further comprises:
and controlling the substrate conveying robot to convey each target substrate according to the target teaching data.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims (11)

1. A method of controlling a substrate transfer robot, the method comprising:
determining a first target interval between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and the corresponding relation between the size and the interval which are stored in advance;
determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production conversion and a preset alignment mode;
determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate;
wherein the determining, according to the target size of the target substrate after transfer carried in the received transfer instruction and the correspondence between the size and the pitch stored in advance, a first target pitch between the mechanical fingers when the substrate transfer robot transfers the target substrate includes:
judging whether the target size exists in the corresponding relation between the size and the distance which are stored in advance;
if the first target interval corresponding to the target size does not exist, if the number of the corresponding relations which are stored in advance reaches a set threshold value, determining a linear relation between the width and the interval according to the corresponding relations between the sizes and the intervals which are stored in advance; and determining a first target distance between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size and the linear relation.
2. The method of claim 1, further comprising:
and if a first target interval corresponding to the target size exists, determining the interval corresponding to the target size as the first target interval.
3. The method of claim 1, wherein if there is no first target pitch corresponding to the target size, the method further comprises:
and sending out prompt information that the first target distance does not exist.
4. The method of claim 3, further comprising:
and receiving an input second target interval, and correspondingly storing the target size and the second target interval in a pre-stored corresponding relation between the size and the interval.
5. The method of claim 1, wherein determining the distance variation of the substrate transfer robot for transferring the substrate according to the target dimension, a pre-stored reference dimension of the reference substrate before transfer, and a preset alignment mode comprises:
if the preset alignment mode is a substrate front end alignment mode, determining that the distance variation of the substrate carrying robot for carrying the substrate is 0;
if the preset alignment mode is a substrate center alignment mode, determining that half of the difference value between the target size and the reference size is the distance variation amount;
and if the preset alignment mode is a substrate rear end alignment mode, determining the difference value between the target size and the reference size as the distance variation.
6. The method of claim 5, wherein determining target teaching data for the substrate transport robot to transport the target substrate based on the distance variation and reference teaching data for the substrate transport robot to transport the reference substrate comprises:
determining each sum value of the distance variation and the position of each track point according to the distance variation and the position of each track point in the reference teaching data of the reference substrate conveyed by the substrate conveying robot;
and determining each sum as each target position of each target track point in target teaching data of the target substrate carried by the substrate carrying robot.
7. The method of claim 1 or 6, further comprising:
and controlling the substrate conveying robot to convey each target substrate according to the target teaching data.
8. A control device for a substrate transfer robot, the device comprising:
the first determining module is used for determining a first target interval between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size of the target substrate after transfer carried in the received transfer instruction and the corresponding relation between the size and the interval which are stored in advance;
the second determining module is used for determining the distance variation of the substrate conveying robot for conveying the substrate according to the target size, the pre-stored reference size of the reference substrate before production conversion and a preset alignment mode; determining target teaching data for the substrate conveying robot to convey the target substrate according to the distance variation and the reference teaching data for the substrate conveying robot to convey the reference substrate;
the first determining module is specifically configured to determine whether the target size exists in a pre-stored correspondence between the size and the distance; if the first target interval corresponding to the target size does not exist, if the number of the corresponding relations which are stored in advance reaches a set threshold value, determining a linear relation between the width and the interval according to the corresponding relations between the sizes and the intervals which are stored in advance; and determining a first target distance between the mechanical fingers when the substrate conveying robot conveys the target substrate according to the target size and the linear relation.
9. A substrate transfer robot control system characterized by comprising the control device of the substrate transfer robot according to claim 8, a substrate transfer robot, and a server that transmits a transfer instruction.
10. An electronic device, comprising a processor and a memory, wherein the memory stores program instructions, and the processor implements the steps of the method for controlling a substrate transfer robot according to any one of claims 1 to 7 when executing a computer program stored in the memory.
11. A computer-readable storage medium storing a computer program which, when executed by a processor, implements the steps of the method for controlling a substrate transfer robot according to any one of claims 1 to 7.
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