KR20160041178A - Apparatus for guiding transportation and apparatus for transferring substrate - Google Patents

Apparatus for guiding transportation and apparatus for transferring substrate Download PDF

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Publication number
KR20160041178A
KR20160041178A KR1020140134599A KR20140134599A KR20160041178A KR 20160041178 A KR20160041178 A KR 20160041178A KR 1020140134599 A KR1020140134599 A KR 1020140134599A KR 20140134599 A KR20140134599 A KR 20140134599A KR 20160041178 A KR20160041178 A KR 20160041178A
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KR
South Korea
Prior art keywords
guide member
travel guide
traveling
travel
substrate
Prior art date
Application number
KR1020140134599A
Other languages
Korean (ko)
Inventor
김태현
김종욱
김상현
Original Assignee
현대중공업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대중공업 주식회사 filed Critical 현대중공업 주식회사
Priority to KR1020140134599A priority Critical patent/KR20160041178A/en
Publication of KR20160041178A publication Critical patent/KR20160041178A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/48—Wear protection or indication features
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a traveling frame which is installed along a traveling direction for moving an object; A first travel guide member for guiding the running direction of the object and a second travel guide member connected to the first travel guide member, the travel guide unit being coupled to the travel frame, The first travel guide member includes a first inclined portion that is formed to be reduced in size toward the second travel guide member, and the first inclined portion is formed to be reduced in size toward the second travel guide member To a guide apparatus for a substrate transfer apparatus and a substrate transfer apparatus including the same.
According to the present invention, when the traveling base passes a position where a step is formed between the first travel guide member and the second travel guide member, the substrate is prevented from being detached from the transfer arm by an external force such as vibration, Can be prevented.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a transfer guide apparatus and a substrate transfer apparatus including the transfer guide apparatus.

The present invention relates to a substrate transfer apparatus for transferring a substrate.

Display devices, solar cells, semiconductor devices, etc. (hereinafter referred to as "electronic components") are manufactured through various processes. Such a manufacturing process is performed using a substrate for manufacturing the electronic component. For example, the manufacturing process may include a deposition process for depositing a thin film of a conductor, a semiconductor, a dielectric material or the like on a substrate, an etching process for forming a deposited thin film in a predetermined pattern, and the like. These manufacturing processes are performed in a process chamber that performs the process. The substrate transfer apparatus is for transferring the substrate between the process chambers.

1 is a schematic perspective view showing a substrate transfer apparatus according to the prior art.

1, the substrate transfer apparatus 1 includes a transfer arm 10 for supporting a substrate S, a lifting unit 20 for lifting and lowering the transfer arm 10, And a traveling unit 40 for moving the pivot unit 30. The traveling unit 40 includes a traveling unit 30 for rotating the traveling unit 30,

The transfer arm 10 transfers the substrate S as the substrate S moves in the horizontal direction while supporting the substrate S. The transfer arm 10 includes a supporting hand 11 for supporting the substrate S, a arm unit 12 for horizontally conveying the supporting hand 11, and an arm unit 12 And an arm base 13 to which the elevating portion 20 is coupled to the other side.

The elevating portion 20 moves the conveying arm 10 in the vertical direction along the elevation guide portion 21a. The lifting and lowering part 20 lifts the arm 11 and the supporting hand 11 coupled to the arm base 30 by moving the arm base 13 up and down. The elevating unit 20 includes a first elevating unit 21 to which the elevating guide unit 21a is coupled and a second elevating unit 21 having one side coupled to the first elevating unit 21 and the other side coupled to the conveying arm 10 And a second lifting unit (22).

The swivel part (30) rotates the lifting part (20). The pivot portion 30 is rotatably coupled to the running base 50. [ The swivel part 30 rotates the substrate S supported by the transfer arm 10 by rotating the elevation part 20 about a rotation axis.

The traveling unit 40 moves the swing unit 30 in a traveling direction for transporting the substrate S. The traveling unit 40 moves the pivoting unit 30 in the traveling direction so as to move the transfer arm 10 and the elevating unit 20. The traveling section 40 includes a traveling frame 41, a traveling guide section 42, and a traveling base 43.

The travel guide unit 42 includes a first travel guide member 42a coupled to the travel frame 41 and a second travel guide member 42b connected to the first travel guide member 42a.

Here, the substrate transfer device 1 according to the related art should be connected so that the first travel guide member 42a and the second travel guide member 42b are exactly aligned. However, due to various reasons such as machining errors of the first travel guide member 42a and the second travel guide member 42b, the first travel guide member 42a and the second travel guide member 42b The first and second travel guide members 42a and 42b are not connected to each other so that the first and second travel guide members 42a and 42b are correctly aligned.

Therefore, the substrate transfer apparatus 1 according to the prior art has the following problems.

First, since the first travel guide member 42a and the second travel guide member 42b are not correctly connected to each other, the substrate transport apparatus according to the related art can not be connected to the first travel guide member 42a and the second travel guide member 42b, A step is formed between the two travel guide members 42b. Accordingly, when the traveling base 43 passes the position where the stepped portion is formed, the substrate transfer device 1 according to the related art is disadvantageous in that the substrate S is detached from the transfer arm 10 due to external force such as vibration, There is a problem of raising the process cost.

Secondly, in the substrate transfer device 1 according to the related art, the running base 43 passes through a position where a step is formed between the first travel guide member 42a and the second travel guide member 42b, Friction occurs between the running base 43 and the travel guide portion 42 at a position where the guide portion 42 is formed. Accordingly, the substrate transfer apparatus 1 according to the related art is configured such that as the friction between the travel base 43 and the travel guide unit 42 occurs, the travel base 43 or the travel guide unit 42, There is a problem that it takes a lot of time and cost to repair the travel base 43 and the travel guide 42.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to prevent an external force from being applied to a traveling base as the traveling base passes a position where a step is formed between a first travel guide member and a second travel guide member And a substrate transfer apparatus including the same.

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a transfer guide apparatus capable of minimizing friction generated between a running base and a travel guide unit, and a substrate transfer apparatus including the same.

In order to solve the above-described problems, the present invention can include the following configuration.

A guide device for a substrate transfer apparatus according to the present invention includes: a traveling frame installed along a traveling direction for moving an object; A traveling guide unit coupled to the traveling frame, the traveling guide unit including a first traveling guide member for guiding the traveling direction of the object and a second traveling guide member connected to the first traveling guide member; And a travel guide block movably coupled to the travel guide portion to move along the travel guide portion, wherein the first travel guide member includes a first inclination portion formed to be reduced in size toward the second travel guide member, .

According to the guide apparatus for a substrate transfer apparatus according to the present invention, the travel guide member includes a second slope portion formed to be reduced in size toward the first travel guide member.

According to the guide apparatus for a substrate transfer apparatus according to the present invention, the first inclined portion is formed to be reduced in size as it goes toward the second travel guide member so that its outer surface forms a curved surface.

According to the guide apparatus for a substrate transfer apparatus according to the present invention, the travel guide member includes a third travel guide member coupled to the traveling frame, and a fourth travel guide member connected to the third travel guide member; The first travel guide member may be configured such that the first connecting portion connected to the second travel guide member is formed at a different position from the second connecting portion connected to the third travel guide member and the fourth travel guide member, And is connected to the guide member.

According to the guide apparatus for a substrate transfer apparatus according to the present invention, the traveling frame includes a first traveling frame installed along a traveling direction and a second traveling frame connected to the first traveling frame, And a joint connected to the second traveling frame is connected to the second traveling frame so as to be formed at a position different from the first connecting portion connected to the first traveling guide member and the second traveling guide member .

According to the guide apparatus for a substrate transfer apparatus according to the present invention, the travel guide member includes a third travel guide member coupled to the traveling frame, and a fourth travel guide member connected to the third travel guide member; And the third travel guide member is connected to the fourth travel guide member such that the second connection portion connected to the fourth travel guide member is formed at a position different from the joint portion.

According to the guide device for a substrate transfer device according to the present invention, the first travel frame, the second travel guide member, the third travel guide member, the second travel guide member, And the fourth travel guide member are coupled to each other.

A substrate transfer apparatus according to the present invention includes: a transfer arm for transferring a substrate; A lifting unit for lifting the transfer arm such that a height at which the transfer arm is positioned is changed; A swivel portion for rotating the elevating portion so that a direction of the transfer arm is changed; And a guide device according to any one of claims 1 to 7 for guiding a traveling direction for transporting the transfer arm.

According to the present invention, the following effects can be obtained.

When the running base passes a position where a step is formed between the first travel guide member and the second travel guide member as a step is generated between the first travel guide member and the second travel guide member, It is possible to prevent the substrate from being detached from the transfer arm, thereby preventing the substrate from being broken.

According to the present invention, it is possible to reduce the time and cost required for repairing the traveling base and the traveling guide portion as the traveling base or the traveling guide portion is rubbed by preventing friction between the traveling base and the traveling guide portion.

1 is a schematic perspective view showing a conventional substrate transfer apparatus,
2 is a schematic perspective view showing a substrate transfer apparatus according to the present invention,
3 or 4 is a front view for explaining a travel guide unit in the substrate transfer apparatus of FIG. 2,
5 is a plan view for explaining a travel guide unit in the substrate transfer apparatus of FIG.

It should be noted that, in the specification of the present invention, the same reference numerals as in the drawings denote the same elements, but they are numbered as much as possible even if they are shown in different drawings.

Meanwhile, the meaning of the terms described in the present specification should be understood as follows.

The word " first, "" second," and the like, used to distinguish one element from another, are to be understood to include plural representations unless the context clearly dictates otherwise. The scope of the right should not be limited by these terms.

It should be understood that the terms "comprises" or "having" does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

It should be understood that the term "at least one" includes all possible combinations from one or more related items. For example, the meaning of "at least one of the first item, the second item and the third item" means not only the first item, the second item or the third item, but also the second item and the second item among the first item, Means any combination of items that can be presented from more than one.

Hereinafter, preferred embodiments of the substrate transfer apparatus according to the present invention will be described in detail with reference to the accompanying drawings. Since the guide device for the substrate transfer device according to the present invention is included in the substrate transfer device according to the present invention, the substrate transfer device according to the present invention will be described with reference to preferred embodiments.

2 is a schematic perspective view showing a substrate transfer apparatus according to the present invention, and FIG. 3 or FIG. 4 is a schematic perspective view showing a substrate transfer apparatus according to the prior art, Fig. 5 is a plan view for explaining the travel guide portion in the substrate transfer apparatus of Fig. 2; Fig.

2 to 5, a substrate transfer apparatus 100 according to the present invention includes a transfer arm 120 for transferring a substrate S, a transfer arm 120 for transferring the substrate S, A turning unit 140 for rotating the elevating unit 130 so that the direction of the conveying arm 120 is changed and a moving direction for moving the conveying arm 120, And a guiding device 200 for guiding the guiding member.

As the guide arm 200 is moved along the guide unit 200, a step is formed at a connected position of the guide unit 200, the transfer arm 120 is moved to a position where the step is generated The substrate 110 may be separated from the transfer arm 120 by an external force such as vibration.

In order to prevent this, in the substrate transfer apparatus according to the present invention, the guide apparatus 200 is configured to prevent an external force such as vibration from being transmitted to the transfer arm 120 during the movement of the transfer arm 120 May be connected to form a curved surface. The substrate transfer apparatus 100 according to the present invention prevents transfer of external force such as vibration to the transfer arm 120 while the transfer arm 120 is moving, It is possible to prevent the detachable member 110 from being detached.

Therefore, the substrate transfer apparatus 100 according to the present invention can achieve the following operational effects.

First, the substrate transfer apparatus 100 according to the present invention is capable of preventing external force such as vibration from being transmitted to the transfer arm 120 during movement of the transfer arm 120 by the step of the guide device 200 have. Accordingly, the substrate transfer apparatus 100 according to the present invention can prevent the substrate 110 from being detached from the transfer arm 120 by shaking the transfer arm 120 with an external force such as vibration . Accordingly, the substrate transfer apparatus 100 according to the present invention can prevent the substrate 110 from being damaged in moving the substrate 110 as the substrate 110 is separated from the transfer arm 120, can do.

The substrate transfer apparatus 100 according to the present invention can prevent the guide apparatus 200 from generating friction by reducing a step generated in the guide apparatus 200. [ Accordingly, the substrate transfer device 100 according to the present invention can prevent the guide device 200 from generating friction, thereby increasing the replacement period of the guide device 200. Therefore, the substrate transfer apparatus 100 according to the present invention can reduce the time and cost required for repairing the guide device 200. [

Hereinafter, the conveyance arm 120, the elevation part 130, the pivot part 140, and the guide device 200 will be described in detail with reference to the accompanying drawings.

The transfer arm 120 transfers the object 110 such as the substrate S or the like. The transfer arm 120 supports the substrate S and is rotatably coupled to the elevating unit 130. The transfer arm 120 may be folded or unfolded by a driving unit (not shown) to transfer the substrate S in a direction perpendicular to the elevating path of the elevating unit 130.

The elevating unit 130 elevates the transfer arm 120 such that the height at which the transfer arm 120 is positioned is changed. The substrate S supported by the transfer arm 120 can be transferred along the lifting path of the transfer arm 120 by moving the transfer arm 120 up and down.

The guide device 200 guides the traveling direction of the traveling base 250 for transporting the transportation arm 120. The traveling base 250 moves along the guide device 200 so that the object 110 such as the substrate S supported by the transfer arm 120 can be moved along the guide device 200 have. The guide device 200 includes a traveling frame 210 installed along a traveling direction for moving an object 110 such as a substrate S and a traveling guide unit 220 for guiding the traveling direction of the substrate S And a travel guide block 240 movably coupled to the travel guide unit 220 so as to move along the travel guide unit 220.

The traveling frame 210 is installed along a traveling direction in which the object 110 such as the substrate S moves. The travel guide unit 220 is coupled to the traveling frame 210. Accordingly, the transfer arm 110 can transfer the object 110 such as the substrate S along the travel guide unit 220 coupled to the traveling frame 210.

The travel guide unit 220 is coupled to the traveling frame 210. The travel guide unit 220 is coupled to the travel base 230 to which the transfer arm 120 is coupled. The object 110 such as the substrate S is moved along the traveling direction by moving the traveling base 230 along the travel guide unit 220. [ The travel guide unit 220 may be an LM guide. The travel guide unit 220 includes a first travel guide member 221 for guiding the traveling direction of the object 110 such as the substrate S and a second travel guide member 221 for guiding the traveling direction of the object 110, And a travel guide member (222).

The first travel guide member 221 is coupled to the traveling frame 210. The first travel guide member 221 is coupled to the traveling frame 210 such that one side of the first travel guide member 221 is in contact with the second travel guide member 222. The first travel guide member 221 includes a first inclined portion 221a whose one end is formed to be smaller in size toward the second travel guide member 222. The first inclined portion 221a is formed to be reduced in size toward the second travel guide member 222 so that the outer surface thereof is curved. Accordingly, one side of the first travel guide member 221 may have a spherical shape. When the first inclined portion 221a is formed in the first travel guide member 221, the traveling direction of the traveling base 230 is changed from the second traveling guide member 222 to the first traveling guide member 221 In the first direction. Accordingly, even if a step is formed at a position where the first travel guide member 221 and the second travel guide member 222 are in contact with each other, the substrate transfer apparatus 100 according to the present invention can prevent the travel base 230 And moves in the first direction along the inclination of the first inclined portion 221a. Therefore, the substrate transfer apparatus 100 according to the present invention can prevent the object 110 such as the substrate S supported by the transfer arm 120 from being transferred to the transfer arm 120 120 and is prevented from being broken.

The second travel guide member 222 is coupled to the traveling frame 210 so as to be in contact with the first travel guide member 221. The second travel guide member 222 includes a second inclined portion 222a having one side reduced in size as the first travel guide member 221 is advanced. The first travel guide member 221 and the second travel guide member 222 are disposed on the traveling frame 210 so that the first slope portion 221a and the second slope portion 222a face each other, Lt; / RTI > The second inclined portion 222a is formed to be reduced in size toward the first travel guide member 221 so that the outer surface thereof is curved. Accordingly, one side of the second travel guide member 222 may have a spherical shape. When the second inclined portion 222a is formed in the second travel guide member 222, the running direction of the running base 230 is changed from the first travel guide member 221 to the second travel guide member 222 In the second direction. Accordingly, even if a step is formed at a position where the first travel guide member 221 and the second travel guide member 222 are in contact with each other, the substrate transfer apparatus 100 according to the present invention can prevent the travel base 230 And moves in the second direction along the inclination of the second inclined portion 222a. Therefore, the substrate transfer apparatus 100 according to the present invention can prevent the object 110 such as the substrate S supported by the transfer arm 120 from being transferred to the transfer arm 120 120 and is prevented from being broken.

In the substrate transfer apparatus 100 according to the present invention, the first inclined surface 221a of the first travel guide member 221 and the second inclined surface 222a of the second travel guide member 222 are in contact with each other The surfaces of the first travel guide member 221 and the second travel guide member 222 that are in contact with each other are curved so that friction between the travel base 230 and the travel guide unit 220 can be minimized have. Accordingly, the substrate transfer apparatus 100 according to the present invention can reduce the time and cost required for repairing the damaged travel base 230 and the travel guide unit 220.

The substrate transfer apparatus 100 according to the present invention is configured such that the first travel guide member 221 and the second travel guide member 222 Is coupled to the traveling frame 210. Accordingly, the substrate transfer device 100 according to the present invention is configured such that the first inclined portion 221a and the second inclined portion 222a are mutually abutted with each other so that the first travel guide member 221, A slant occurs at a position where the member 222 contacts. Therefore, the substrate transfer apparatus 100 according to the present invention can transfer the object 110 such as the substrate S, as compared with the case where only one of the first inclined portion 221a and the second inclined portion 222a is formed, Can be transferred regardless of the first direction or the second direction.

The travel guide block 240 is movably coupled to the travel guide unit 220 to move along the travel guide unit 220. The running base 230 is coupled to the running guide block 240. The travel guide block 240 moves along the travel guide portion 220 so that the object 110 such as the traveling base 230, the transfer arm 120, and the substrate S And is moved by the travel guide block 240. The travel guide block 240 may be an LM block.

In the related art, in the process of transporting the object 110 such as the substrate S, the traveling base 230 is moved in the traveling direction by a load of the transportation arm 120, the elevation portion 130, (Different) direction. The traveling frame 210 and the traveling guide unit 220 are rotated by the traveling base 230 so that unnecessary work for repairing the traveling frame 210 and the traveling guide unit 220, There is a problem that occurs.

In order to solve this problem, the traveling frame 210 of the substrate transfer apparatus 100 according to the present invention includes a first traveling frame 211 installed along the traveling direction, and a second traveling frame 211 connected to the first traveling frame 211 And a second traveling frame 212.

The travel guide member 220 includes a third travel guide member 223 coupled to the travel frame 212 and a fourth travel guide member 224 connected to the third travel guide member 223, .

The first traveling frame 211 is installed along the traveling direction for moving the object 110 such as the substrate S. The first travel guide member 221 and the third travel guide member 223 are coupled to the first travel frame 211.

The second traveling frame 212 is installed along the traveling direction so as to be connected to the first traveling frame 211. The second travel guide member 222 and the fourth travel guide member 224 are coupled to the second travel frame 211.

The first inclined portion 221a may be formed in the third travel guide portion 223 and the second inclined portion 222a may be formed in the fourth travel guide portion 224. [ The substrate transport apparatus 100 according to the present invention is configured such that the driving base 250 moves along the first travel guide member 221, the second travel guide member 222, the third travel guide member 223, And the fourth travel guide member 224, it is possible to prevent the traveling base 250 from being shaken by an external force such as vibration.

The joint portion 261 to which the first traveling frame 211 and the second traveling frame 212 are connected and the first traveling guide member 221 and the second traveling guide member 222 are connected to each other The second connection portions 263 to which the first connection portion 262, the third travel guide member 223 and the fourth travel guide member 224 are connected are formed at different positions from each other.

That is, the first travel guide member 261, the second travel guide member 262, the second travel guide member 261, the second travel guide member 262, The third travel guide member 263, and the fourth travel guide member 244 are engaged. The substrate transfer apparatus 100 according to the present invention is configured such that the first and second connection portions 262 and 263 are located at the position of the joint portion 261, 230 can affect only one of the first traveling frame 211 or the second traveling frame 212. [0054] Therefore, in the substrate transfer apparatus 100 according to the present invention, only one of the first traveling frame 211 or the second traveling frame 212 is tilted by a load transmitted by the traveling base 230, Compared with the case where both the first traveling frame 211 and the second traveling frame 212 are different from each other, only the traveling frame 210 that is out of the first traveling frame 211 or the second traveling frame 212 The time required for repairing the traveling frame 210 can be shortened.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Will be clear to those who have knowledge of.

100: substrate transfer device S: substrate
110: object 120: transfer arm
130: lift portion 140:
200: guide device 210: traveling frame
211: first driving frame 212: second driving frame
220: travel guide portion 221: first travel guide member
221a: first inclined portion 222: second travel guide member
222a: second inclined portion 223: third travel guide member
224: fourth travel guide member 240: travel guide block
250: running base 261:
262: first connection part 263: second connection part

Claims (8)

A traveling frame installed along a traveling direction for moving an object;
A traveling guide unit coupled to the traveling frame, the traveling guide unit including a first traveling guide member for guiding the traveling direction of the object and a second traveling guide member connected to the first traveling guide member; And
And a travel guide block movably coupled to the travel guide portion to move along the travel guide portion,
Wherein the first travel guide member includes a first inclined portion formed to be reduced in size toward the second travel guide member. The method according to claim 1,
Wherein the second travel guide member includes a second inclined portion formed to be reduced in size toward the first travel guide member. The method according to claim 1,
Wherein the first inclined portion is formed to be reduced in size toward the second travel guide member so that the outer surface thereof is curved. The method according to claim 1,
Wherein the travel guide member includes a third travel guide member coupled to the traveling frame and a fourth travel guide member connected to the third travel guide member;
The first travel guide member may be configured such that the first connecting portion connected to the second travel guide member is formed at a different position from the second connecting portion connected to the third travel guide member and the fourth travel guide member, And the guide member is connected to the guide member. The method according to claim 1,
Wherein the traveling frame includes a first traveling frame installed along a traveling direction and a second traveling frame connected to the first traveling frame,
Wherein the first traveling frame has a joint portion connected to the second traveling frame so as to be formed at a position different from a first connecting portion connected to the first traveling guide member and the second traveling guide member, And the guide frame is connected to the traveling frame. 6. The method of claim 5,
Wherein the travel guide member includes a third travel guide member coupled to the traveling frame and a fourth travel guide member connected to the third travel guide member;
Wherein the third travel guide member is connected to the fourth travel guide member such that a second connection portion connected to the fourth travel guide member is formed at a position different from the joint portion. 6. The method of claim 5,
The first travel guide member, the second travel guide member, the third travel guide member, and the fourth travel guide member are coupled to the first travel frame so that the first connection portion and the second connection portion are positioned. To the substrate transfer device. A transfer arm for transferring the substrate;
A lifting unit for lifting the transfer arm such that a height at which the transfer arm is positioned is changed;
A swivel portion for rotating the elevating portion so that a direction of the transfer arm is changed; And
The substrate transfer device according to any one of claims 1 to 7, for guiding a traveling direction for transferring the transfer arm.
KR1020140134599A 2014-10-06 2014-10-06 Apparatus for guiding transportation and apparatus for transferring substrate KR20160041178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020140134599A KR20160041178A (en) 2014-10-06 2014-10-06 Apparatus for guiding transportation and apparatus for transferring substrate

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Application Number Priority Date Filing Date Title
KR1020140134599A KR20160041178A (en) 2014-10-06 2014-10-06 Apparatus for guiding transportation and apparatus for transferring substrate

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102313061B1 (en) * 2020-10-05 2021-10-18 주식회사 포스코 Apparatus for withdrawing coil
USD970042S1 (en) 2018-12-10 2022-11-15 Creative Design Group spolka z o.o. spolka komandytowa Booth
USD992761S1 (en) 2018-12-10 2023-07-18 Mute Spolka Z Ograniczona Odpowiedzialnoscia Booth
USD1012314S1 (en) 2018-12-10 2024-01-23 Mute Spolka Z Ograniczona Odpowiedzialnoscia Booth

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD970042S1 (en) 2018-12-10 2022-11-15 Creative Design Group spolka z o.o. spolka komandytowa Booth
USD992761S1 (en) 2018-12-10 2023-07-18 Mute Spolka Z Ograniczona Odpowiedzialnoscia Booth
USD1012314S1 (en) 2018-12-10 2024-01-23 Mute Spolka Z Ograniczona Odpowiedzialnoscia Booth
KR102313061B1 (en) * 2020-10-05 2021-10-18 주식회사 포스코 Apparatus for withdrawing coil

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N231 Notification of change of applicant
WITN Withdrawal due to no request for examination