JPH0529445A - Positioning apparatus for substrate - Google Patents

Abstract

PURPOSE:To provide a substrate-positioning apparatus wherein it is possible to simply and quickly comply with a change in a substrate diameter. CONSTITUTION:A group of abutment pins 2 on one pair of substrate alignment members 1 which are moved so as to be approached and separated relatively by a definite distance are installed on a circular line which corresponds to a maximum-diameter substrate Wa to be handled; fitting alignment plates 3 which are used to position a small-diameter substrate Wb are fitted to and mounted on, so as to be detachable, the required abutment pins 2 on the individual substrate alignment members 1. A plurality of abutment parts 7 which abut on the outer circumferential edge of the small-diameter substrate Wb are formed respectively at faced end edges of both fitting alignment plates 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for performing positioning alignment when various kinds of processing are performed on a substrate such as a semiconductor substrate.

[0002]

2. Description of the Related Art The construction of a substrate positioning device of this type will be described with reference to FIGS. In the figure, reference numeral 1 is a pair of substrate matching members arranged so as to face each other so as to move toward and away from each other by a fixed distance.
A plurality of contact pins 2 are provided on the upper surface of each of them. A substrate mounting arm 8 that can be raised and lowered is provided between both substrate matching members 1, and a plurality of support pins 9 for mounting and supporting the substrate W that has been carried in are provided on the upper surface of the substrate mounting arm 8.
Is erected. When the substrate W is mounted on the support pins 9 of the substrate mounting arm 8 in the raised position, the substrate mounting arm 8 descends to a predetermined position. After that, the substrate aligning member 1 relatively moves closer to each other, and the contact pins 2 contact the outer peripheral edge of the substrate W to finely move the substrate W in the horizontal direction, thereby positioning the substrate W.

[0003]

However, the above-mentioned conventional device has the following problems. That is, according to the conventional apparatus, when the size of the substrate W to be processed changes, the substrate alignment member 1 screwed and fixed to the apparatus is removed, and then the pin arrangement corresponding to the new substrate W is provided. The board matching member 1 of must be fixed with screws,
There is a problem that it takes time to remove and replace the substrate supporting member 1 using a tool, and the processing efficiency of the apparatus is lowered due to the suspension of operation during the replacement.

The present invention has been made in view of the above circumstances, and can easily and quickly respond to a change in the size of a target substrate without using a tool. The purpose is to provide.

[0005]

In order to achieve the above object, the present invention has the following constitution. That is, according to the present invention, a plurality of contact pins are provided on the upper surfaces of a pair of substrate matching members that relatively move toward and away from each other by a fixed distance,
In a board positioning device for positioning a board by causing the board matching members to move relatively toward each other and the contact pins to contact the outer peripheral edge of the board, the contact pins on the board matching members are provided. The groups are respectively provided at the positions corresponding to the shape of the board having the largest diameter to be positioned, and the fitting matching plates that are positioned and fitted by the at least two contact pins on both the board matching members are removable. A plurality of abutting portions that are mounted and abut on the outer peripheral edge of the board having a diameter smaller than that of the board having the maximum diameter are provided on both of the fitting matching plates.

[0006]

The operation of the present invention is as follows. That is,
According to the present invention, the substrate having the largest diameter is positioned by moving the substrate matching member relatively close to each other without fitting the fitting matching plate. On the other hand, when the diameter of the target substrate is small, after fitting the fitting matching plate prepared in advance to the contact pin on the substrate matching member,
The small-diameter substrate is positioned by moving the fitting-matching plate together with the substrate-matching member and bringing the contact portion formed on the fitting-matching plate into contact with the outer peripheral edge of the small-diameter substrate.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the substrate positioning apparatus according to the present invention will be described below with reference to FIGS. The substrate positioning apparatus according to the present embodiment is provided with a substrate matching member 1 arranged opposite to each other and a substrate mounting arm (not shown) between the both substrate matching members 1 as in the above-described conventional apparatus, and a driving unit (not shown). The substrate matching members 1 are moved toward and away from each other by constant strokes La and Lb, respectively, and the substrate Wa mounted on the support pins erected on the substrate mounting arm is moved.
The substrate Wa is moved to a predetermined center P by abutting the abutment pin 2 on the substrate Wa.
It is for centering and positioning on top.

Here, the contact pin group 2 is provided along a predetermined circular line so as to face the substrate Wa having the largest diameter to be handled, and when positioning the substrate Wa, a fitting described later is performed. The substrate matching member 1 is operated with the matching plate 3 removed. On the other hand, when positioning the substrate Wb having a smaller diameter than the substrate Wa, a fitting matching plate 3 made of, for example, plastic is used as an auxiliary jig as shown in FIGS. 1 to 4.

The fitting and matching plate 3 is mounted and mounted on each substrate matching member 1, and has a single hole 4 that closely fits the one contact pin 2 at the end, and the other. End contact pin 2
On the other hand, the elongated hole 5 that is tightly fitted in the front-rear direction (the moving direction of the substrate alignment member) and has the flexibility in the lateral direction, and the recess 6 that is loosely fitted in the contact pin 2 in the middle. And a single hole 4
The fitting matching plate 3 is fitted and mounted on each substrate matching member 1 in a fixed posture by using the long holes 5.

The opposing edges of each fitting matching plate 3 are cut out in a circular arc shape having a diameter slightly larger than the target small diameter substrate Wb, and a convex contact portion 7 is formed on the edge 3a.
When a plurality of substrate alignment members 1 are moved toward each other by the strokes La and Lb, the contact portions 7 are formed.
The group abuts on the outer peripheral edge of the small-diameter substrate Wb to align the substrate Wb on the center P.

When handling a substrate Wc having a smaller diameter, as shown in FIG. 5, another fitting matching plate 3 having a contact portion 7 corresponding to the outer shape of the substrate Wc is applied to the substrate matching member 1. The contact pin 2 is fitted and mounted, and the same positioning as described above is performed.

In the above-described embodiment, a protrusion is formed on the edge 3a of the arcuate cutout of the fitting matching plate 3 as the contact portion 7 for contacting the fitting matching plate 3 with the outer peripheral edge of the small-diameter substrate. However, this may be one in which a contact pin along the outer shape of the small-diameter substrate is arranged on the upper surface of the fitting matching plate 3.

[0013]

As is apparent from the above description, according to the present invention, it is possible to easily and quickly deal with substrates of various sizes simply by attaching and detaching the fitting matching plate to and from the substrate matching member without using a tool. The time during which the processing is interrupted due to the specification change becomes extremely short, and the processing efficiency of various devices having this kind of positioning mechanism can be improved.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of a main part of an embodiment of a substrate positioning apparatus according to the present invention.

FIG. 2 is a plan view showing a positioning processing state using a fitting matching plate.

FIG. 3 is a vertical sectional side view showing a mounting state of a fitting matching plate.

FIG. 4 is a vertical sectional front view showing a mounting state of a fitting matching plate.

FIG. 5 is a plan view showing a state in which a substrate having a smaller diameter is positioned.

FIG. 6 is a plan view of a conventional device.

FIG. 7 is a side view of a conventional device.

[Explanation of symbols]

 1 ... Board matching member 2 ... Contact pin 3 ... Fitting matching plate 7 ... Contact part

Claims (1)

Claim: What is claimed is: 1. A plurality of abutting pins are provided on the upper surfaces of a pair of substrate matching members that relatively move toward and away from each other by a fixed distance, and the two substrate matching members are relatively arranged. By approaching and contacting the contact pins with the outer peripheral edge of the substrate,
In the board positioning device for positioning the board, the contact pin groups on the board matching members are respectively provided at positions corresponding to the shape of the board having the largest diameter to be positioned, and on the board matching members. A plurality of fitting matching plates that are positionally fitted by at least two abutting pins are removably mounted, and a plurality of abutting matching plates that come into contact with the outer peripheral edge of a substrate having a diameter smaller than the substrate having the largest diameter are provided. A board positioning device comprising a contact portion.