CN105329642A - Base plate position deviation detecting and correcting method and control method for base plate carrying system - Google Patents
Base plate position deviation detecting and correcting method and control method for base plate carrying system Download PDFInfo
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- CN105329642A CN105329642A CN201510761073.7A CN201510761073A CN105329642A CN 105329642 A CN105329642 A CN 105329642A CN 201510761073 A CN201510761073 A CN 201510761073A CN 105329642 A CN105329642 A CN 105329642A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- Condensed Matter Physics & Semiconductors (AREA)
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The invention discloses a base plate position deviation detecting and correcting method and a control method of a base plate carrying system. The base plate position deviation detecting and correcting method and the control method of the base plate carrying system are used for improving the carrying efficiency. The detecting and correcting method includes the steps that when an end effector in the base plate carrying system moves towards a base plate to be carried according to a first moving instruction and does not make contact with the base plate to be carried, a first non-contact type sensor and a second non-contact type sensor collect information of the first edge of the base plate to be carried in real time, and whether the first non-contact type sensor and the second non-contact type sensor collect the information of the first edge at the same time or not is judged; and if not, the value of the included angle between the first edge and the connecting line of the two non-contact type sensors is obtained through calculation according to the time difference of signals fed back after the two non-contact type sensors detect the first edge, and a robot body is controlled to rotate around the axis of the robot body according to the value of the included angle. In addition, the detecting and correcting method further includes the step that the amount of movement of the end effector is controlled according to a detection result of a third non-contact type sensor.
Description
Technical field
The present invention relates to read out instrument preparing technical field, particularly relate to the control method of a kind of substrate position offset detection and calibrating method and substrate conveying system.
Background technology
At substrate series products, in production process as glass, liquid crystal panel, semiconductor crystal wafer etc., substrate is placed in the container for the production of equipment operating usually, according to the requirement of different production process, substrate can be transported between different production facilitiess, and this transhipment work has normally been come by handling system.
In production and transportation, because the reason such as vibration equipment or misoperation, position skew in various degree may be there is in a reservoir in substrate, when substrate shifts out by such employing handling system in container, the position of substrate on the end-effector of handling system can offset, if corrected not in time, the bad serious consequence such as even substrate or device damage etc. of product design can be caused.
But, in detection of the prior art and calibrating method, cannot realize detecting and correcting in real time, need could judge whether it has skew by after substrate pickup, if there is skew, needs the amount of movement adjusting end-effector, again capture substrate, trimming process comparatively bothers, and greatly reduces handling efficiency and production efficiency.
Summary of the invention
The object of this invention is to provide the control method of substrate position offset detection and calibrating method and substrate conveying system, in order to improve handling efficiency and production efficiency.
For achieving the above object, the invention provides following technical scheme:
The invention provides a kind of substrate position offset detection and calibrating method, comprising:
When the end-effector in substrate conveying system according to preset the first move to substrate to be handled move and not with substrate contacts to be handled time, the information at the first edge of the first noncontacting proximity sensor and the second noncontacting proximity sensor Real-time Collection substrate to be handled, wherein: the first noncontacting proximity sensor is equal with the distance between robot body with the second noncontacting proximity sensor, between described first noncontacting proximity sensor and described second noncontacting proximity sensor, there is setpoint distance;
When the first noncontacting proximity sensor and the second noncontacting proximity sensor all detect the information at the first edge of substrate to be handled, control described end-effector stop motion, and judge whether described first noncontacting proximity sensor and the second noncontacting proximity sensor collect the information at the first edge simultaneously, if when described first noncontacting proximity sensor and the second noncontacting proximity sensor non-concurrent collect the information at the first edge, the time difference of the signal fed back after described first edge being detected respectively according to described first noncontacting proximity sensor and described second noncontacting proximity sensor, and the moving velocity of the end-effector preset, setpoint distance between described first noncontacting proximity sensor and described second noncontacting proximity sensor, obtain the angle value between the first edge of described substrate to be handled and described first noncontacting proximity sensor and the line of the second noncontacting proximity sensor, and rotate around its axis according to the robot body that described angle value controls described substrate conveying system.
Substrate position offset detection provided by the invention and calibrating method, before carrying substrate, just can detect whether substrate has skew in advance, and can in handling process correction offset, concrete: when the end-effector in substrate conveying system according to the first move preset to substrate to be handled move and not with substrate contacts to be handled time, the information at the first edge of the first noncontacting proximity sensor and the second noncontacting proximity sensor Real-time Collection substrate to be handled, when the first noncontacting proximity sensor and the second noncontacting proximity sensor all detect the information at the first edge of substrate to be handled, control described end-effector stop motion, and judge whether the first noncontacting proximity sensor and the second noncontacting proximity sensor collect the information at the first edge simultaneously, if when the first noncontacting proximity sensor and the second noncontacting proximity sensor non-concurrent collect the information at the first edge, the time difference of the signal fed back after then the first edge being detected respectively according to the first noncontacting proximity sensor and the second noncontacting proximity sensor, and the moving velocity of the end-effector preset, setpoint distance between first noncontacting proximity sensor and the second noncontacting proximity sensor, obtain the angle value between the first edge of substrate to be handled and the line of the first noncontacting proximity sensor and the second noncontacting proximity sensor, and rotate around its axis according to the robot body of angle value control substrate conveying system.
Visible, substrate position offset detection provided by the invention and calibrating method, can detect the position with correction substrate in real time, improves handling efficiency and the production efficiency of substrate.
In some optional embodiments, aforesaid substrate position offset detection and calibrating method also comprise:
When described angle value is greater than default angle reference value, produces warning signal and/or control described substrate conveying system and quit work.When avoiding rotary end effector, end-effector collides with the container of dress substrate.
In some optional embodiments, aforesaid substrate position offset detection and calibrating method also comprise:
The robot body of described substrate conveying system is controlled after its axis rotates according to described angle value, control described end-effector to continue to move to substrate to be handled, when the first noncontacting proximity sensor and the second noncontacting proximity sensor detect the information at the first edge of substrate to be handled simultaneously, control the stop motion again of described end-effector, and pick up described substrate to be handled, and control described robot body and drive substrate to be handled on it to rotate to initial angle around its axis.
In some optional embodiments, aforesaid substrate position offset detection and calibrating method also comprise:
When the first distance is greater than second distance, the second move that the difference adjustment of second distance is preset according to described first Distance geometry, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move after adjustment;
When the first distance is less than second distance, the second move that the difference adjustment of second distance is preset according to described first Distance geometry, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move after adjustment, or control described end-effector according to the difference of described first Distance geometry second distance and move to preset stopping position, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move preset, wherein: described first distance is that described robot body drives the substrate to be handled on it to rotate to initial angle around its axis, distance between the actual stop position of described end-effector and described robot body, described second distance is the distance between the preset stopping position of described end-effector and described robot body, described preset stopping position is the stop position after end-effector moves according to described the first default move.
In some optional embodiments, aforesaid substrate position offset detection and calibrating method also comprise:
If when described first noncontacting proximity sensor and the second noncontacting proximity sensor are the information collecting the first edge simultaneously, pick up described substrate to be handled.
In some optional embodiments, aforesaid substrate position offset detection and calibrating method also comprise:
When the 3rd distance is greater than second distance, the second move that the difference adjustment of second distance is preset according to described 3rd Distance geometry, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move after adjustment;
When the 3rd distance is less than second distance, the second move that the difference adjustment of second distance is preset according to described 3rd Distance geometry, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move after adjustment, or control described end-effector according to the difference of described 3rd Distance geometry second distance and move to preset stopping position, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move preset, wherein: the described 3rd apart from when collecting the information at the first edge for described first non-contact sensor and described second non-contact sensor simultaneously, distance between the actual stop position of end-effector and described robot body, described second distance is the distance between the preset stopping position of described end-effector and described robot body, described preset stopping position is the stop position after end-effector moves according to described the first default move.
In some optional embodiments, aforesaid substrate position offset detection and calibrating method also comprise:
When described end-effector drives the substrate to be handled on it to move to described robot body, the 3rd noncontacting proximity sensor on described robot body detects the 4th range information between the second edge of described substrate to be handled and the mid point of described 3rd noncontacting proximity sensor, wherein: described first edge and described second edge-perpendicular are arranged;
According to described 4th range information adjustment preset, for controlling three move of described end-effector along the distance of the bearing of trend movement of horizontal shaft.Make handling system can by board carrying to setting position.
In some optional embodiments, described according to described first noncontacting proximity sensor and described second noncontacting proximity sensor feedback signal time difference and preset the moving velocity of end-effector, the setpoint distance between described first noncontacting proximity sensor and described second noncontacting proximity sensor, the angle value obtained between the first edge of described substrate to be handled and described first noncontacting proximity sensor and the line of the second noncontacting proximity sensor specifically comprises:
According to formula a=arctan (v × T/L), obtain described angle value, wherein: a is angle, v is the moving velocity of described default end-effector, T is the described time difference, and L is the setpoint distance between described first noncontacting proximity sensor and the second noncontacting proximity sensor.
Present invention also offers a kind of control method of substrate conveying system, comprising: the substrate position offset detection described in above-mentioned any one and calibrating method, handling efficiency and production efficiency can be improved.
Accompanying drawing explanation
The diagram of circuit of the substrate position offset detection that Fig. 1 provides for the embodiment of the present invention and calibrating method;
Fig. 2 a ~ 2d is the skew schematic diagram of substrate;
The another kind of diagram of circuit of the substrate position offset detection that Fig. 3 provides for the embodiment of the present invention and calibrating method;
The structural representation of the substrate position offset detection that Fig. 4 provides for the embodiment of the present invention and correct equipment.
Reference numeral:
1-substrate 11-first to be handled edge
12-second edge 21-first noncontacting proximity sensor
22-second noncontacting proximity sensor 23-the 3rd noncontacting proximity sensor
3-line 4-horizontal shaft
5-robot body 6-end-effector
7-controller 8-warning device
9-predeterminated position line
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of patent protection of the present invention.
It should be noted that: following the first move preset mentioned, second move and the 3rd move are: operating personal is before substrate is moved, flow to the control command of substrate conveying system, the first move wherein preset is for controlling the distance of end-effector to substrate movement to be handled, the second move preset drives the substrate to be handled on it to the distance of robot body movement for controlling end-effector, the 3rd move preset is for controlling the distance of end-effector along the bearing of trend movement of horizontal shaft.
As shown in Fig. 1 and Fig. 2 a ~ 2d, wherein: the diagram of circuit of the substrate position offset detection that Fig. 1 provides for the embodiment of the present invention and calibrating method, Fig. 2 a ~ 2d is the skew schematic diagram of substrate;
The invention provides a kind of substrate position offset detection and calibrating method, comprising:
Step S101: when the end-effector 6 in substrate conveying system moves according to the first move preset to substrate 1 to be handled and do not contact with substrate 1 to be handled, the information at the first edge 11 of the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 Real-time Collection substrate 1 to be handled, wherein: the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 equal with the distance between robot body 5, between the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, there is setpoint distance L;
Step S102: when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 all detect the information at the first edge 11 of substrate 1 to be handled, control end-effector 6 stop motion, and judge whether the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 collect the information at the first edge 11 simultaneously, in a kind of situation: if when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 non-concurrent collect the information at the first edge 11, the time difference of the signal fed back after the first edge 11 being detected respectively according to two noncontacting proximity sensors (first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22), and the moving velocity of the end-effector preset, setpoint distance L between first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, calculate the angle value between the first edge 11 of substrate 1 to be handled and the line 3 of two noncontacting proximity sensors (first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22), and rotate around its axis according to angle value control machine human body.Above-mentioned angle is as the angle a in Fig. 2 a.
Substrate position offset detection provided by the invention and calibrating method, before carrying substrate, just can detect whether substrate 1 to be handled has skew in advance, and can in handling process correction offset, concrete: when the end-effector in substrate conveying system moves according to the first move preset to substrate 1 to be handled and does not contact with substrate 1 to be handled, the information at the first edge 11 of the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 Real-time Collection substrate 1 to be handled, when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 all detect the information at the first edge 11 of substrate 1 to be handled, control end-effector 6 stop motion, and judge whether the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 collect the information at the first edge 11 simultaneously, if when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 non-concurrent collect the information at the first edge 11, the time difference of the signal fed back after the first edge 11 being detected respectively according to the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, and the moving velocity of the end-effector preset, setpoint distance L between first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, obtain the first edge 11 of substrate 1 to be handled and the angle value a between the first noncontacting proximity sensor 21 and the line 3 of the second noncontacting proximity sensor 22, and rotate a angle according to angle value a control machine human body 5 around its axis.
Visible, substrate position offset detection provided by the invention and calibrating method, can detect the position with correction substrate in real time, improves handling efficiency and the production efficiency of substrate.
In addition, substrate position offset detection provided by the invention and calibrating method, can improve carrying precision and efficiency.
Further, aforesaid substrate position offset detection and calibrating method also comprise:
When angle value is greater than default angle reference value, generation warning signal and/or control substrate conveying system quit work.When avoiding end-effector to rotate, end-effector collides with the container of dress substrate.
Further, aforesaid substrate position offset detection and calibrating method also comprise:
The robot body of substrate conveying system is controlled after its axis rotates according to angle value, control end-effector 6 to continue to move to substrate 1 to be handled, when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 detect the information at the first edge of substrate to be handled simultaneously, control end-effector 6 stop motion again, and pick up substrate 1 to be handled, and control machine human body drives the substrate to be handled 1 on it to rotate to initial angle around its axis.
Aforesaid substrate position offset detection and calibrating method also comprise:
When the first distance is greater than second distance, according to the second move that the difference adjustment of the first Distance geometry second distance is preset, and the substrate to be handled 1 on it is driven to move to robot body 5 according to the second move control end-effector 6 after adjustment;
When the first distance is less than second distance, according to the second move that the difference adjustment of the first Distance geometry second distance is preset, and drive the substrate to be handled 1 on it to move to robot body 5 according to the second move control end-effector 6 after adjustment, or move to preset stopping position according to the difference control end-effector 6 of the first Distance geometry second distance, and the substrate to be handled 1 on it is driven to move to robot body 5 according to the second move control end-effector 6 preset;
It should be noted that: wherein: the first distance drives substrate to be handled on it distance around the rotation of its axis to initial angle, between the actual stop position of end-effector and robot body for robot body, second distance be end-effector according to preset stopping position and robot body between distance, preset stopping position is the stop position after end-effector moves according to the first move preset.
In another kind of situation, when the end-effector 6 in substrate conveying system moves to substrate 1 to be handled and does not contact with substrate 1 to be handled, the information at the first edge 11 of the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 Real-time Collection substrate 1 to be handled, wherein: the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 equal with the distance between robot body 5, between the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, there is setpoint distance L;
When the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 all detect the information at the first edge 11 of substrate 1 to be handled, control end-effector 6 stop motion, and judge whether the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 collect the information at the first edge 11 simultaneously, if when described first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are the information collecting the first edge, pick up described substrate to be handled simultaneously.
Further, as shown in Fig. 2 b and Fig. 2 c, aforesaid substrate position offset detection and calibrating method also comprise:
It should be noted that: wherein: the 3rd distance is the distance between the first non-contact sensor and the second non-contact sensor when simultaneously collecting the information at the first edge, the actual stop position of end-effector 6 and robot body, second distance is the distance between the preset stopping position of end-effector and robot body, and preset stopping position is the stop position after end-effector moves according to the first move preset;
As Fig. 2 b, between first edge 11 of substrate 1 to be handled and predeterminated position line 9, there is distance H1, wherein H1 Producing reason is: end-effector is starting according to the first instruction preset to move in pickup substrate process to be handled, end-effector first moves to preset stopping position (namely end-effector moves to preset stopping position) according to the first instruction preset, and now the first noncontacting proximity sensor 21 and the second non-contact sensor 22 all do not collect the information at the first edge 11 of substrate 1 to be handled, continuation is moved to the direction of substrate 1 to be handled by end-effector 6 for this reason, until when the first non-contact sensor 21 and the second non-contact sensor 22 all collect the information at the first edge 11, end-effector 6 is by stop motion (namely end-effector moves to actual stop position), and pick up substrate 1 to be handled, therefore difference will be produced between the actual stop position of end-effector and preset stopping position, be H1 (H1 produces because the 3rd distance is greater than second distance), in substrate position offset detection provided by the invention and calibrating method, the second move will preset according to H1 (difference of the 3rd Distance geometry second distance) adjustment, and drive the substrate to be handled 1 on it to move to robot body according to the second move control end-effector 6 after adjustment,
As in Fig. 2 c, between first edge 11 of substrate 1 to be handled and predeterminated position line 9, there is distance H2, wherein H2 Producing reason is: end-effector is starting according to the first instruction preset to move in pickup substrate process to be handled, first noncontacting proximity sensor 21 and the second non-contact sensor 22 all collect the information at the first edge 11 of substrate 1 to be handled, now end-effector 6 is by stop motion (namely end-effector moves to actual stop position), and pick up substrate 1 to be handled, and when end-effector stops, end-effector 6 has not also moved (when namely end-effector does not also move to preset stopping position according to the first move preset, end-effector is stop motion), therefore difference will be produced between the actual stop position of end-effector and preset stopping position, be H2 (H2 produces because the 3rd distance is less than second distance), in substrate position offset detection provided by the invention and calibrating method, the second move will preset according to the difference adjustment of H2 (the 3rd Distance geometry second distance), and drive the substrate to be handled on it to move to robot body according to the second move control end-effector after adjustment, or move to preset stopping position according to the difference control end-effector of H2 (the 3rd Distance geometry second distance), and drive the substrate to be handled on it to move to robot body according to the second move control end-effector preset.
In above-mentioned arbitrary situation, as shown in Figure 2 d, when substrate 1 to be handled exists side-play amount w as shown in Figure 2 d, further, aforesaid substrate position offset detection and calibrating method also comprise:
When end-effector drives the substrate to be handled on it to move to robot body, the 3rd noncontacting proximity sensor on robot body detects the 4th range information (w) between the second edge 12 of substrate to be handled and the mid point of the 3rd noncontacting proximity sensor 23, the projection of mid point on end-effector 6 of the 3rd noncontacting proximity sensor 23 is positioned on second edge 12 in the preset stopping region (i.e. normal place) of substrate 1 to be handled, wherein: the first edge 11 is vertical with the second edge 12 to be arranged;
According to the 4th range information adjustment preset, for controlling three move of end-effector along the distance of the bearing of trend movement of horizontal shaft.According to the result that the 3rd noncontacting proximity sensor detects, control end-effector along the amount of the bearing of trend movement of horizontal shaft, make handling system can by board carrying to the position set.
Above-mentioned control end-effector moves concrete along the bearing of trend of horizontal shaft: can by controlling the first actuating device for driving end-effector movement, to realize the movement of end-effector, also can by controlling the second actuating device of drive machines human body movement, to realize the movement being moved and then drive end-effector by robot body.
In above-mentioned steps S102: according to the first noncontacting proximity sensor and the second noncontacting proximity sensor feedback signal time difference and preset the moving velocity of end-effector, the setpoint distance between the first noncontacting proximity sensor and the second noncontacting proximity sensor, the angle value obtained between the first edge of substrate to be handled and the line 3 of the first noncontacting proximity sensor and the second noncontacting proximity sensor specifically comprises:
According to formula a=arctan (v × T/L), obtain angle value, wherein: a is angle, v is the moving velocity of default end-effector, and T is the time difference, and L is the setpoint distance between the first noncontacting proximity sensor and the second noncontacting proximity sensor.
As shown in Figure 3, the substrate position offset detection that provides for the embodiment of the present invention of Fig. 3 and the another kind of diagram of circuit of calibrating method.Substrate position offset detection provided by the invention and calibrating method, concrete:
Substrate position offset detection provided by the invention and calibrating method, concrete:
Steps A:
Step SA401: board carrying work starts;
Step SA402: robot body moves to desired location, end-effector moves to substrate to be handled according to the first move preset;
Step SA403: when the end-effector in substrate conveying system according to preset the first move to substrate to be handled move and not with substrate contacts to be handled time, the information at the first edge of the first noncontacting proximity sensor and the second noncontacting proximity sensor Real-time Collection substrate to be handled, when the first noncontacting proximity sensor and the second noncontacting proximity sensor all detect the information at the first edge of substrate to be handled, controller controls end-effector stop motion;
Step SA404: controller judges whether the first noncontacting proximity sensor and the second noncontacting proximity sensor collect the information at the first edge simultaneously; If time different, then perform step SA405, if simultaneously, perform SA411;
Step SA405: the time difference of the signal that controller feeds back according to the first noncontacting proximity sensor and the second noncontacting proximity sensor, and the moving velocity of end-effector, the setpoint distance between the first noncontacting proximity sensor and the second noncontacting proximity sensor preset, obtain the angle value a between the first edge of substrate to be handled and the line 3 of the first noncontacting proximity sensor and the second noncontacting proximity sensor;
Step SA406: judge whether rotation offset degree is interfering within allowed band, and controller is by angle a and the angle reference value θ preset
0compare, if actual shifts angle a > is θ
0, then illustrate that the degrees of offset of substrate is beyond interfering the scope allowed, and performs step SA407, if deviation angle a < is θ
0, then step SA408 is performed;
Step SA407: controller stops this board carrying action, and sends alerting signal, waits for operating personal investigation fault;
Step SA408: the robot body controlling substrate conveying system according to angle value a rotates around its axis, control end-effector to continue to move to substrate to be handled, when the first noncontacting proximity sensor and the second noncontacting proximity sensor detect the information at the first edge of substrate to be handled simultaneously, control end-effector stop motion again, and pick up substrate to be handled, and control machine human body drives substrate to be handled on it around himself axle rotation compensation angle-a, gets back to initial angle;
Step SA409: the controller of robot judges whether substrate exists the mobile skew of the telescopic direction along end-effector, if there is this skew, then performs step SA410, if there is no this skew, then performs step SB;
Step SA410: the second move preset according to the difference adjustment of the first Distance geometry second distance, performs step SB afterwards;
Step SA411: pick up substrate to be handled;
Step SA412: the controller of robot judges whether substrate exists the mobile skew of the telescopic direction along end-effector, if there is this skew, then performs step SA413, if there is no this skew, then performs step SB;
Step SA413: the second move preset according to the difference adjustment of the 3rd Distance geometry second distance, performs step SB afterwards;
Step SB:
Step SB401: the three noncontacting proximity sensor device detects the second edge 12 of substrate to be handled, the 4th range information w between the mid point detecting the second edge 12 and the 3rd noncontacting proximity sensor, and signal is transmitted back to controller.
Step SB402: whether there is the mobile skew along horizontal shaft bearing of trend according to the 4th Distance Judgment substrate to be handled, if there is this skew, perform step SB403, if there is no offset, perform step SB404;
Step SB403: adjustment end-effector is along the 3rd move of the distance of the bearing of trend movement of horizontal shaft;
Step SB404: robot body moves to the region to be placed of placing substrate;
Step SB405: end effector of robot places substrate;
Step SB406: board carrying terminates.
So far, whole board carrying process terminates, and transfer robot, in the process picking and placeing substrate, completes the detection to substrate position skew and correction.
Present invention also offers a kind of control method of substrate conveying system, comprising: the substrate position offset detection described in above-mentioned any one and calibrating method, handling efficiency and production efficiency can be improved.
Based on same inventive concept, present invention also offers a kind of substrate position offset detection and correct equipment, as shown in Figure 4, the structural representation of the substrate position offset detection that Fig. 4 provides for the embodiment of the present invention and correct equipment; Substrate position offset detection provided by the invention and correct equipment, comprising:
Be arranged at the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 on end-effector 6, when the end-effector 6 in substrate conveying system moves according to the first move preset to substrate 1 to be handled and does not contact with substrate 1 to be handled, first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are for the information at the first edge 11 of Real-time Collection substrate 1 to be handled, wherein: the first noncontacting proximity sensor 21 is equal with the distance between robot body 5 with the second noncontacting proximity sensor 22, between first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, there is setpoint distance L,
Controller 7, for when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 all detect the information at the first edge 11 of substrate 1 to be handled, control end-effector 6 stop motion, and judge whether the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 collect the information at the first edge 11 simultaneously, in a kind of situation: if when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 non-concurrent collect the information at the first edge 11, the time difference of the signal fed back after the first edge 11 being detected respectively according to the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, and the moving velocity of the end-effector preset, setpoint distance L between first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, obtain the first edge 11 of substrate 1 to be handled and the angle value between the first noncontacting proximity sensor 21 and the line 3 of the second noncontacting proximity sensor 22, and rotate around its axis according to angle value control machine human body.Above-mentioned angle is as the angle a in Fig. 2 a.
Substrate position offset detection provided by the invention and correct equipment, before carrying substrate, just can detect whether substrate 1 to be handled has skew in advance, and can in handling process correction offset, concrete: when the end-effector in substrate conveying system moves according to the first move preset to substrate 1 to be handled and does not contact with substrate 1 to be handled, the information at the first edge 11 of the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 Real-time Collection substrate 1 to be handled, when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 all detect the information at the first edge 11 of substrate 1 to be handled, control end-effector 6 stop motion, and judge whether the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 collect the information at the first edge 11 simultaneously, if when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 non-concurrent collect the information at the first edge 11, the time difference of the signal fed back after the first edge 11 being detected respectively according to the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, and the moving velocity of the end-effector preset, setpoint distance L between first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22, obtain the first edge 11 of substrate 1 to be handled and the angle value between the first noncontacting proximity sensor 21 and the line 3 of the second noncontacting proximity sensor 22, and rotate around its axis according to angle value control machine human body 5.
Visible, substrate position offset detection provided by the invention and correct equipment, can detect the position with correction substrate in real time, improves handling efficiency and the production efficiency of substrate.
In addition, substrate position offset detection provided by the invention and correct equipment, can improve carrying precision and efficiency.
Further, aforesaid substrate handling system also comprises: warning device 8,
When controller 7 is also for being greater than zero when angle value and being greater than the angle reference value preset, outputting alarm signal and/or control handling system quit work;
Warning device 8 produces alarm according to warning signal.When avoiding end-effector 6 to rotate, end-effector 6 collides with the container of dress substrate.
Further, controller 7 also for:
When the first distance is greater than second distance, according to the second move that the difference adjustment of the first Distance geometry second distance is preset, and the substrate to be handled 1 on it is driven to move to robot body 5 according to the second move control end-effector 6 after adjustment;
When the first distance is less than second distance, according to the second move that the difference adjustment of the first Distance geometry second distance is preset, and drive the substrate to be handled 1 on it to move to robot body 5 according to the second move control end-effector 6 after adjustment, or move to preset stopping position according to the difference control end-effector 6 of the first Distance geometry second distance, and the substrate to be handled 1 on it is driven to move to robot body 5 according to the second move control end-effector 6 preset;
It should be noted that: wherein: the first distance drives substrate to be handled on it distance around the rotation of its axis to initial angle, between the actual stop position of end-effector and robot body for robot body, second distance is the distance between the preset stopping position of end-effector and robot body, and preset stopping position is the stop position after end-effector moves according to the first move preset.
In another kind of situation, controller 7 also for: if when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are the information collecting the first edge, pick up described substrate to be handled simultaneously.
Further, as shown in figs. 2 b and 2 c, above-mentioned controller also for:
It should be noted that: wherein: the 3rd distance is the distance between the first non-contact sensor and the second non-contact sensor when simultaneously collecting the information at the first edge, the actual stop position of end-effector 6 and robot body, second distance is the distance between the preset stopping position of end-effector and robot body, and preset stopping position is the stop position after end-effector moves according to the first move preset;
As Fig. 2 b, between first edge 11 of substrate 1 to be handled and predeterminated position line 9, there is distance H1, wherein H1 Producing reason is: end-effector is starting according to the first instruction preset to move in pickup substrate process to be handled, end-effector first moves to preset stopping position (namely end-effector moves to preset stopping position) according to the first instruction preset, and now the first noncontacting proximity sensor 21 and the second non-contact sensor 22 all do not collect the information at the first edge 11 of substrate 1 to be handled, continuation is moved to the direction of substrate 1 to be handled by end-effector 6 for this reason, until when the first non-contact sensor 21 and the second non-contact sensor 22 all collect the information at the first edge 11, end-effector 6 is by stop motion (namely end-effector moves to actual stop position), and pick up substrate 1 to be handled, therefore difference will be produced between the actual stop position of end-effector and preset stopping position, be H1 (H1 produces because the 3rd distance is greater than second distance), in substrate position offset detection provided by the invention and calibrating method, the second move will preset according to H1 (difference of the 3rd Distance geometry second distance) adjustment, and drive the substrate to be handled 1 on it to move to robot body according to the second move control end-effector 6 after adjustment,
As in Fig. 2 c, between first edge 11 of substrate 1 to be handled and predeterminated position line 9, there is distance H2, wherein H2 Producing reason is: end-effector is starting according to the first instruction preset to move in pickup substrate process to be handled, first noncontacting proximity sensor 21 and the second non-contact sensor 22 all collect the information at the first edge 11 of substrate 1 to be handled, now end-effector 6 is by stop motion (namely end-effector moves to actual stop position), and pick up substrate 1 to be handled, and when end-effector stops, end-effector 6 has not also moved (when namely end-effector does not also move to preset stopping position according to the first move preset, end-effector is stop motion), therefore difference will be produced between the actual stop position of end-effector and preset stopping position, be H2 (H2 produces because the 3rd distance is less than second distance), in substrate position offset detection provided by the invention and calibrating method, the second move will preset according to the difference adjustment of H2 (the 3rd Distance geometry second distance), and drive the substrate to be handled on it to move to robot body according to the second move control end-effector after adjustment, or move to preset stopping position according to the difference control end-effector of H2 (the 3rd Distance geometry second distance), and drive the substrate to be handled on it to move to robot body according to the second move control end-effector preset.
As shown in Figure 2 d, when substrate 1 to be handled exists side-play amount w as shown in Figure 2 c, aforesaid substrate handling system also comprises:
Be arranged at the 3rd noncontacting proximity sensor 23 on robot body 5, when end-effector 6 drives the substrate to be handled on it to move to robot body 5,3rd noncontacting proximity sensor detects the 4th range information (w) between the second edge 12 of substrate to be handled and the mid point of robot body 5, the projection of mid point on end-effector 6 of the 3rd noncontacting proximity sensor 23 is positioned on first edge in preset stopping region (i.e. normal place) of substrate 1 to be handled, wherein: the first edge and the second edge-perpendicular are arranged;
Controller 7 also for according to the 4th range information adjustment preset, for controlling three move of end-effector 6 along the distance of the bearing of trend movement of horizontal shaft 4.
Optionally, above-mentioned first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are photoelectric switch sensor.
Optionally, the 3rd noncontacting proximity sensor 23 is laser length measurement sensor.
To sum up, controller will according to whether angled skew, perform different subsequent control steps, namely perform difference in functionalitys according to two kinds of situations.
Present invention also offers a kind of substrate conveying system, comprise: horizontal shaft 4, to be positioned on horizontal shaft 4 and can along the robot body 5 of horizontal shaft 4 bearing of trend movement, be connected with robot body 5, for picking up the end-effector 6 of substrate to be handled, end-effector 6 is scalable, and the rotatable and bearing of trend of its S. A. of robot body 5 is perpendicular to the bearing of trend of end-effector 6 telescopic direction and horizontal shaft 4; Also comprise the substrate position offset detection described in above-mentioned any one and correct equipment, due to aforesaid substrate position offset detection and correct equipment, the position with correction substrate can be detected in real time, improve handling efficiency and the production efficiency of substrate.Therefore substrate conveying system provided by the invention has good handling efficiency.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (9)
1. substrate position offset detection and a calibrating method, is characterized in that, comprising:
When the end-effector in substrate conveying system according to preset the first move to substrate to be handled move and not with substrate contacts to be handled time, the information at the first edge of the first noncontacting proximity sensor and the second noncontacting proximity sensor Real-time Collection substrate to be handled, wherein: the first noncontacting proximity sensor is equal with the distance between robot body with the second noncontacting proximity sensor, between described first noncontacting proximity sensor and described second noncontacting proximity sensor, there is setpoint distance;
When the first noncontacting proximity sensor and the second noncontacting proximity sensor all detect the information at the first edge of substrate to be handled, control described end-effector stop motion, and judge whether described first noncontacting proximity sensor and the second noncontacting proximity sensor collect the information at the first edge simultaneously, if when described first noncontacting proximity sensor and the second noncontacting proximity sensor non-concurrent collect the information at the first edge, the time difference of the signal fed back after described first edge being detected respectively according to described first noncontacting proximity sensor and described second noncontacting proximity sensor, and the moving velocity of the end-effector preset, setpoint distance between described first noncontacting proximity sensor and described second noncontacting proximity sensor, obtain the angle value between the first edge of described substrate to be handled and described first noncontacting proximity sensor and the line of the second noncontacting proximity sensor, and rotate around its axis according to the robot body that described angle value controls described substrate conveying system.
2. substrate position offset detection as claimed in claim 1 and calibrating method, it is characterized in that, when described angle value is not equal to zero, aforesaid substrate position offset detection and calibrating method also comprise:
When described angle value is greater than default angle reference value, produces warning signal and/or control described substrate conveying system and quit work.
3. substrate position offset detection as claimed in claim 1 and calibrating method, is characterized in that, also comprise:
The robot body of described substrate conveying system is controlled after its axis rotates according to described angle value, control described end-effector to continue to move to substrate to be handled, when the first noncontacting proximity sensor and the second noncontacting proximity sensor detect the information at the first edge of substrate to be handled simultaneously, control the stop motion again of described end-effector, and pick up described substrate to be handled, and control described robot body and drive substrate to be handled on it to rotate to initial angle around its axis.
4. substrate position offset detection as claimed in claim 3 and calibrating method, is characterized in that, also comprise:
When the first distance is greater than second distance, the second move that the difference adjustment of second distance is preset according to described first Distance geometry, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move after adjustment;
When the first distance is less than second distance, the second move that the difference adjustment of second distance is preset according to described first Distance geometry, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move after adjustment, or control described end-effector according to the difference of described first Distance geometry second distance and move to preset stopping position, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move preset, wherein: described first distance is that described robot body drives the substrate to be handled on it to rotate to initial angle around its axis, distance between the actual stop position of described end-effector and described robot body, described second distance is the distance between the preset stopping position of described end-effector and described robot body, described preset stopping position is the stop position after end-effector moves according to described the first default move.
5. substrate position offset detection as claimed in claim 1 and calibrating method, is characterized in that, also comprise:
If when described first noncontacting proximity sensor and the second noncontacting proximity sensor are the information collecting the first edge simultaneously, pick up described substrate to be handled.
6. substrate position offset detection as claimed in claim 5 and calibrating method, is characterized in that, also comprise:
When the 3rd distance is greater than second distance, the second move that the difference adjustment of second distance is preset according to described 3rd Distance geometry, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move after adjustment;
When the 3rd distance is less than second distance, the second move that the difference adjustment of second distance is preset according to described 3rd Distance geometry, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move after adjustment, or control described end-effector according to the difference of described 3rd Distance geometry second distance and move to preset stopping position, and control described end-effector drive the substrate to be handled on it to move to described robot body according to the second move preset, wherein: the described 3rd apart from when collecting the information at the first edge for described first non-contact sensor and described second non-contact sensor simultaneously, distance between the actual stop position of end-effector and described robot body, described second distance is the distance between the preset stopping position of described end-effector and described robot body, described preset stopping position is the stop position after end-effector moves according to described the first default move.
7. the substrate position offset detection as described in claim 4 or 6 and calibrating method, is characterized in that, also comprise:
When described end-effector drives the substrate to be handled on it to move to described robot body, the 3rd noncontacting proximity sensor on described robot body detects the 4th range information between the second edge of described substrate to be handled and the mid point of described 3rd noncontacting proximity sensor, wherein: described first edge and described second edge-perpendicular are arranged;
According to described 4th range information adjustment preset, for controlling three move of described end-effector along the distance of the bearing of trend movement of horizontal shaft.
8. substrate position offset detection as claimed in claim 1 and calibrating method, it is characterized in that, described according to described first noncontacting proximity sensor and described second noncontacting proximity sensor feedback signal time difference and preset the moving velocity of end-effector, the setpoint distance between described first noncontacting proximity sensor and described second noncontacting proximity sensor, the angle value obtained between the first edge of described substrate to be handled and described first noncontacting proximity sensor and the line of the second noncontacting proximity sensor specifically comprises:
According to formula a=arctan (v × T/L), obtain described angle value, wherein: a is angle, v is the moving velocity of described default end-effector, T is the described time difference, and L is the setpoint distance between described first noncontacting proximity sensor and the second noncontacting proximity sensor.
9. a control method for substrate conveying system, is characterized in that, comprising: the substrate position offset detection as described in any one of claim 1 ~ 8 and calibrating method.
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