CN105329642B - Substrate position offset detection and bearing calibration and the control method of substrate conveying system - Google Patents
Substrate position offset detection and bearing calibration and the control method of substrate conveying system Download PDFInfo
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- CN105329642B CN105329642B CN201510761073.7A CN201510761073A CN105329642B CN 105329642 B CN105329642 B CN 105329642B CN 201510761073 A CN201510761073 A CN 201510761073A CN 105329642 B CN105329642 B CN 105329642B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The invention discloses a kind of substrate position offset detection and the control method of bearing calibration and substrate conveying system, to improve handling efficiency, above-mentioned detection and bearing calibration are included when the end effector in substrate conveying system is mobile to substrate to be handled according to default first move and is not contacted with substrate to be handled, first noncontacting proximity sensor and the second noncontacting proximity sensor gather the information of the first edge of substrate to be handled in real time, and judge the first noncontacting proximity sensor and the second noncontacting proximity sensor whether and meanwhile collect the information of first edge, it is if non-concurrent, the angle value that the time difference of the signal fed back after first edge is calculated between first edge and two noncontacting proximity sensor lines is detected respectively according to two noncontacting proximity sensors, and rotated about the axis thereof according to angle value control machine human body.Other above-mentioned detection and bearing calibration also include the output control end effector amount of movement detected according to the 3rd noncontacting proximity sensor.
Description
Technical field
The present invention relates to display device preparing technical field, more particularly to a kind of substrate position offset detection and correction side
The control method of method and substrate conveying system.
Background technology
In substrate class product, such as production process of glass, liquid crystal panel, semiconductor crystal wafer, substrate is generally placed
In the container operated for production equipment, according to the requirement of different production processes, substrate can be between different production equipments
It is transported through, this transhipment work is typically to be completed by handling system.
During production and transportation, because the reason such as vibration equipment or misoperation, substrate may go out in a reservoir
Now different degrees of position skew, when so substrate is removed out of container using handling system, substrate is at the end of handling system
Position on the actuator of end can shift, if corrected not in time, bad product quality or even substrate or equipment can be caused to damage
The serious consequence such as bad.
But in detection of the prior art and bearing calibration, it can not realize and detect and correct, it is necessary to which substrate is picked up in real time
It could judge whether it offsets after taking, if offsetting, it is necessary to adjust the amount of movement of end effector, capturing substrate, school again
Positive process is cumbersome, greatly reduces handling efficiency and production efficiency.
The content of the invention
It is an object of the invention to provide substrate position offset detection and bearing calibration and the control method of substrate conveying system,
To improve handling efficiency and production efficiency.
To reach above-mentioned purpose, the invention provides following technical scheme：
The invention provides a kind of substrate position offset detection and bearing calibration, including：
When the end effector in substrate conveying system is mobile to substrate to be handled according to default first move and
When not contacted with substrate to be handled, the first noncontacting proximity sensor and the second noncontacting proximity sensor gather substrate to be handled in real time
First edge information, wherein：Between first noncontacting proximity sensor and the second noncontacting proximity sensor and robot body
Distance it is equal, there is setpoint distance between first noncontacting proximity sensor and second noncontacting proximity sensor；
When the first noncontacting proximity sensor and the second noncontacting proximity sensor detect the first edge of substrate to be handled
Information when, control the end effector stop motion, and judge first noncontacting proximity sensor and second non-contact
Whether formula sensor collects the information of first edge simultaneously, if first noncontacting proximity sensor and the second contactless biography
During the information that sensor is non-concurrent to collect first edge, according to first noncontacting proximity sensor and described second contactless
Sensor detects the time difference of the signal fed back after the first edge and the mobile speed of default end effector respectively
Setpoint distance between degree, first noncontacting proximity sensor and second noncontacting proximity sensor, obtain described waiting to remove
Transport the angle between the first edge of substrate and first noncontacting proximity sensor and the line of the second noncontacting proximity sensor
Value, and control the robot body of the substrate conveying system to rotate about the axis thereof according to the angle value.
Substrate position offset detection provided by the invention and bearing calibration, can is previously detected base before carrying substrate
Whether plate offsets, and can correction offset in the handling process, specifically：When the end effector in substrate conveying system
It is mobile to substrate to be handled according to default first move and when not contacted with substrate to be handled, the first non-contact sensor
Device and the second noncontacting proximity sensor gather the information of the first edge of substrate to be handled in real time；When the first noncontacting proximity sensor
When detecting the information of the first edge of substrate to be handled with the second noncontacting proximity sensor, the end effector is controlled to stop
Only move, and judge the first noncontacting proximity sensor and the second noncontacting proximity sensor whether and meanwhile collect the letter of first edge
Breath, if the first noncontacting proximity sensor and the second noncontacting proximity sensor it is non-concurrent collect first edge information when, root
Detect the time of the signal fed back after first edge respectively according to the first noncontacting proximity sensor and the second noncontacting proximity sensor
Between difference and the translational speed of default end effector, the first noncontacting proximity sensor and the second noncontacting proximity sensor
Setpoint distance, obtain the first edge of substrate to be handled and the first noncontacting proximity sensor and the second noncontacting proximity sensor
Angle value between line, and rotated about the axis thereof according to the robot body of angle value control base board handling system.
It can be seen that substrate position offset detection provided by the invention and bearing calibration, can be detected and correction substrate in real time
Position, improve the handling efficiency and production efficiency of substrate.
In some optional embodiments, aforesaid substrate position offset detection and bearing calibration also include：
When the angle value is more than default angle reference value, alarm signal and/or the control board carrying are produced
System stalls.When avoiding rotary end effector, end effector collides with filling the container of substrate.
In some optional embodiments, aforesaid substrate position offset detection and bearing calibration also include：
After controlling the robot body of the substrate conveying system to rotate about the axis thereof according to the angle value, described in control
End effector continues to move to substrate to be handled, when simultaneously the first noncontacting proximity sensor and the second noncontacting proximity sensor are examined
When measuring the information of the first edge of substrate to be handled, end effector stop motion again is controlled, and treated described in pickup
Carrying substrate, and control the robot body to drive substrate to be handled thereon to rotate about the axis thereof to initial angle.
In some optional embodiments, aforesaid substrate position offset detection and bearing calibration also include：
When the first distance is more than second distance, adjusted according to first distance and the difference of the second distance default
The second move, and control the end effector to drive base to be handled thereon according to the second move after adjustment
Plate moves to the robot body；
When the first distance is less than second distance, adjusted according to first distance and the difference of the second distance default
The second move, and control the end effector to drive base to be handled thereon according to the second move after adjustment
Plate moves to the robot body, or controls the end effector to move according to first distance and the difference of second distance
Move to preset stopping position, and the base to be handled of the end effector drive thereon is controlled according to default second move
Plate moves to the robot body, wherein：First distance drives substrate to be handled thereon for the robot body
Rotate about the axis thereof to initial angle, between the actual stop position of the end effector and the robot body away from
It is the distance between preset stopping position of the end effector and described robot body from, the second distance, it is described
Preset stopping position is end effector according to the stop position after the default first move movement.
In some optional embodiments, aforesaid substrate position offset detection and bearing calibration also include：
If first noncontacting proximity sensor and the second noncontacting proximity sensor are the letter for collecting first edge simultaneously
During breath, the substrate to be handled is picked up.
In some optional embodiments, aforesaid substrate position offset detection and bearing calibration also include：
When the 3rd distance is more than second distance, adjusted according to the 3rd distance and the difference of the second distance default
The second move, and control the end effector to drive base to be handled thereon according to the second move after adjustment
Plate moves to the robot body；
When the 3rd distance is less than second distance, adjusted according to the 3rd distance and the difference of the second distance default
The second move, and control the end effector to drive base to be handled thereon according to the second move after adjustment
Plate moves to the robot body, or controls the end effector to move according to the 3rd distance and the difference of second distance
Move to preset stopping position, and the base to be handled of the end effector drive thereon is controlled according to default second move
Plate moves to the robot body, wherein：3rd distance non-connects for first non-contact sensor and described second
Touch sensor when collecting the information of first edge simultaneously, end effector actual stop position and the robot body it
Between distance, the second distance for the end effector preset stopping position and the robot body between away from
From the preset stopping position is end effector according to the stop position after the default first move movement.
In some optional embodiments, aforesaid substrate position offset detection and bearing calibration also include：
When the substrate to be handled of end effector drive thereon moves to the robot body, positioned at the machine
The 3rd noncontacting proximity sensor on device human body detects the second edge of the substrate to be handled and the described 3rd contactless
The 4th range information between the midpoint of sensor, wherein：The first edge and the second edge are vertically arranged；
According to the 4th range information adjust it is set in advance, for controlling the end effector prolonging along trunnion axis
Stretch the 3rd move of the distance of direction movement.Allow handling system by board carrying to setting opening position.
It is described according to first noncontacting proximity sensor and described second non-contact in some optional embodiments
The translational speed of the time difference of the signal of formula sensor feedback and default end effector, the first contactless biography
Setpoint distance between sensor and second noncontacting proximity sensor, obtain the first edge of the substrate to be handled with it is described
Angle value between the line of first noncontacting proximity sensor and the second noncontacting proximity sensor specifically includes：
According to formula a=arctan (v × T/L), the angle value is obtained, wherein：A is angle, and v is the default end
The translational speed of actuator is held, T is the time difference, and L is first noncontacting proximity sensor and the second non-contact sensor
Setpoint distance between device.
Present invention also offers a kind of control method of substrate conveying system, including：Substrate position described in any of the above-described
Offset detection and bearing calibration are put, handling efficiency and production efficiency can be improved.
Brief description of the drawings
Fig. 1 is the flow chart of substrate position offset detection provided in an embodiment of the present invention and bearing calibration；
Fig. 2 a~2d are the skew schematic diagram of substrate；
Fig. 3 is another flow chart of substrate position offset detection provided in an embodiment of the present invention and bearing calibration；
Fig. 4 is the structural representation of substrate position offset detection provided in an embodiment of the present invention and means for correcting.
Reference：
1- substrate 11- first edges to be handled
12- second edges the first noncontacting proximity sensors of 21-
The noncontacting proximity sensors of the second noncontacting proximity sensors of 22- 23- the 3rd
3- line 4- trunnion axis
5- robot body 6- end effectors
7- controller 8- warning devices
9- predeterminated position lines
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of patent protection of the present invention.
It should be noted that：Following default first move, the second move and the 3rd moves mentioned
For：Operating personnel are conveyed to the control instruction of substrate conveying system before substrate is moved, wherein the first movement set in advance
The distance for controlling end effector to be moved to substrate to be handled is instructed, the second move set in advance is used to control end
End actuator drives the distance that substrate to be handled thereon moves to robot body, and the 3rd move set in advance is used for
The distance for controlling bearing of trend of the end effector along trunnion axis to move.
As shown in Fig. 1 and Fig. 2 a~2d, wherein：Fig. 1 is substrate position offset detection provided in an embodiment of the present invention and school
The flow chart of correction method, Fig. 2 a~2d are the skew schematic diagram of substrate；
The invention provides a kind of substrate position offset detection and bearing calibration, including：
Step S101：When the end effector 6 in substrate conveying system according to default first move to be handled
When substrate 1 is moved and do not contacted with substrate 1 to be handled, the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are real
When gather substrate 1 to be handled first edge 11 information, wherein：First noncontacting proximity sensor 21 and the second contactless biography
The distance between the robot body 5 of sensor 22 is equal, the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor
There is setpoint distance L between 22；
Step S102：When the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 detect base to be handled
During the information of the first edge 11 of plate 1, the stop motion of end effector 6 is controlled, and judge the He of the first noncontacting proximity sensor 21
Whether the second noncontacting proximity sensor 22 collects the information of first edge 11 simultaneously, in the case of a kind of：If first is contactless
It is contactless according to two during the information that the noncontacting proximity sensor 22 of sensor 21 and second is non-concurrent to collect first edge 11
Sensor (the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22) feeds back after detecting first edge 11 respectively
Signal time difference and the translational speed of default end effector, the first noncontacting proximity sensor 21 and second non-connect
Setpoint distance L between touch sensor 22, the first edge 11 and two non-contact sensors of substrate 1 to be handled is calculated
Angle value between the line 3 of device (the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22), and according to angle
Value control machine human body rotates about the axis thereof.Angle a in above-mentioned angle such as Fig. 2 a.
Substrate position offset detection provided by the invention and bearing calibration, can, which is previously detected, before carrying substrate treats
Whether carrying substrate 1 offsets, and can correction offset in the handling process, specifically：When the end in substrate conveying system
When end actuator is moved to substrate 1 to be handled according to default first move and do not contacted with substrate 1 to be handled, first is non-
The noncontacting proximity sensor 22 of touch sensor 21 and second gathers the information of the first edge 11 of substrate 1 to be handled in real time；When
First noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 detect the letter of the first edge 11 of substrate 1 to be handled
During breath, the stop motion of end effector 6 is controlled, and judge the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22
Whether the information of first edge 11 is collected simultaneously, if the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are non-
When collecting the information of first edge 11 simultaneously, divided according to the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22
The time difference of the signal fed back after first edge 11 and the translational speed of default end effector, first non-are not detected
Setpoint distance L between the noncontacting proximity sensor 22 of touch sensor 21 and second, obtains the first edge of substrate 1 to be handled
11 and first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 line 3 between angle value a, and according to angle
Value a control machines human body 5 rotates about the axis thereof a angles.
It can be seen that substrate position offset detection provided by the invention and bearing calibration, can be detected and correction substrate in real time
Position, improve the handling efficiency and production efficiency of substrate.
In addition, substrate position offset detection provided by the invention and bearing calibration, can improve and carry precision and efficiency.
Further, aforesaid substrate position offset detection and bearing calibration also include：
When angle value is more than default angle reference value, produces alarm signal and/or control base board handling system stops
Work.When avoiding the end effector from rotating, end effector and fill the container of substrate and collide.
Further, aforesaid substrate position offset detection and bearing calibration also include：
After being rotated about the axis thereof according to the robot body of angle value control base board handling system, end effector 6 is controlled
Continue to move to substrate 1 to be handled, when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are detected simultaneously by
During the information of the first edge of substrate to be handled, the stop motion again of end effector 6 is controlled, and picks up substrate 1 to be handled, and
Control machine human body drives substrate to be handled 1 thereon to rotate about the axis thereof to initial angle.
Aforesaid substrate position offset detection and bearing calibration also include：
When the first distance is more than second distance, moved according to the first distance and the difference of second distance adjustment default second
Dynamic instruction, and substrate to be handled 1 thereon is driven to robot according to the second move control end effector 6 after adjustment
Body 5 moves；
When the first distance is less than second distance, moved according to the first distance and the difference of second distance adjustment default second
Dynamic instruction, and substrate to be handled 1 thereon is driven to robot according to the second move control end effector 6 after adjustment
Body 5 moves, or is moved to preset stopping position according to the first distance and the difference of second distance control end effector 6, and
End effector 6 is controlled to drive substrate to be handled 1 thereon to be moved to robot body 5 according to default second move；
It should be noted that：Wherein：First distance drives substrate to be handled thereon to be revolved around its axis for robot body
After going to initial angle, the distance between the actual stop position of end effector and robot body, second distance is end
Actuator according to preset stopping position and the distance between robot body, preset stopping position be end effector according to pre-
If the first move movement after stop position.
In another case, when the end effector 6 in substrate conveying system moves to substrate 1 to be handled and not with waiting to remove
When transporting the contact of substrate 1, the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 gather substrate 1 to be handled in real time
The information of first edge 11, wherein：First noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 with robot sheet
The distance between body 5 is equal, has setpoint distance between the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22
L；
When the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 detect the first of substrate 1 to be handled
During the information at edge 11, the stop motion of end effector 6 is controlled, and judge that the first noncontacting proximity sensor 21 and second is non-contact
Whether formula sensor 22 collects the information of first edge 11 simultaneously, is connect if first noncontacting proximity sensor 21 and second is non-
When touch sensor 22 is collects the information of first edge simultaneously, the substrate to be handled is picked up.
Further, as shown in Fig. 2 b and Fig. 2 c, aforesaid substrate position offset detection and bearing calibration also include：
It should be noted that：Wherein：3rd distance is adopted simultaneously for the first non-contact sensor and the second non-contact sensor
When collecting the information of first edge, the distance between the actual stop position of end effector 6 and robot body, second distance
The distance between preset stopping position and robot body for end effector, preset stopping position be end effector according to
Stop position after default first move movement；
Such as Fig. 2 b, there is distance H1, wherein H1 to produce between the first edge 11 and predeterminated position line 9 of substrate 1 to be handled
The reason for be：End effector during pickup substrate to be handled is begun to move into according to the default first instruction, hold by end
Row device is first moved to preset stopping position (i.e. end effector is moved to preset stopping position) according to the default first instruction, this
When the first noncontacting proximity sensor 21 and the second non-contact sensor 22 do not collect the first edge 11 of substrate 1 to be handled
Information；It will continue to move to the direction of substrate 1 to be handled for this end effector 6, until the first non-contact sensor 21 and the
When two non-contact sensors 22 collect the information of first edge 11, end effector 6 is by stop motion (i.e. end effector
It is moved to actual stop position), and substrate 1 to be handled is picked up, therefore the actual stop position and preset stopping of end effector
Difference, as H1 (H1 is due to that the 3rd distance is more than caused by second distance), base provided by the invention will be produced between position
In Board position offset detection and bearing calibration, default second will be adjusted according to H1 (the 3rd distance and the difference of second distance) and moved
Dynamic instruction, and substrate to be handled 1 thereon is driven to robot according to the second move control end effector 6 after adjustment
Body moves；
In Fig. 2 c, there is distance H2, wherein H2 productions between the first edge 11 and predeterminated position line 9 of substrate 1 to be handled
The reason for raw is：End effector according to the default first instruction during pickup substrate to be handled is begun to move into, and first
The non-contact sensor 22 of noncontacting proximity sensor 21 and second collects the information of the first edge 11 of substrate 1 to be handled, this
When end effector 6 by stop motion (end effector is moved to actual stop position), and pick up substrate 1 to be handled, and
When end effector stops, end effector 6 does not move according to default first move also and completes (i.e. end effector
When being also not moved to preset stopping position, end effector stop motion), thus the actual stop position of end effector with
Difference, as H2 (H2 is due to that the 3rd distance is less than caused by second distance), the present invention will be produced between preset stopping position
In the substrate position offset detection of offer and bearing calibration, it will be adjusted according to H2 (the 3rd distance and second distance) difference default
The second move, and according to the second move control end effector after adjustment drive substrate to be handled thereon to
Robot body moves, or controls end effector to be moved to preset stopping according to H2 (the 3rd distance and second distance) difference
Position, and control end effector to drive substrate to be handled thereon to be moved to robot body according to default second move
It is dynamic.
In the case of any of the above-described, as shown in Figure 2 d, when substrate 1 to be handled has offset w as shown in Figure 2 d, more enter
One step, aforesaid substrate position offset detection and bearing calibration also include：
When the substrate to be handled of end effector drive thereon moves to robot body, on robot body
3rd noncontacting proximity sensor is detected between the midpoint of the noncontacting proximity sensor 23 of second edge 12 and the 3rd of substrate to be handled
The 4th range information (w), the projection of the midpoint of the 3rd noncontacting proximity sensor 23 on end effector 6 is located at base to be handled
In the second edge 12 in the preset stopping region (i.e. normal place) of plate 1, wherein：First edge 11 and second edge 12 are vertically set
Put；
Bearing of trend set in advance, for controlling end effector along trunnion axis is adjusted according to the 4th range information to move
3rd move of dynamic distance.The result detected according to the 3rd noncontacting proximity sensor, control end effector edge are horizontal
The amount of the bearing of trend movement of axle so that the opening position that handling system can be by board carrying to setting.
Bearing of trend of the above-mentioned control end effector along trunnion axis moves specifically：It can be used to drive end by control
The first driving means of actuator movement are held, can also be by controlling driving robot sheet to realize the movement of end effector
Second drive device of body movement, to realize by the mobile movement and then drive end effector of robot body.
In above-mentioned steps S102：The signal fed back according to the first noncontacting proximity sensor and the second noncontacting proximity sensor
The translational speed of time difference and default end effector, the first noncontacting proximity sensor and the second noncontacting proximity sensor
Between setpoint distance, obtain the first edge of substrate to be handled and the first noncontacting proximity sensor and the second non-contact sensor
Angle value between the line 3 of device specifically includes：
According to formula a=arctan (v × T/L), angle value is obtained, wherein：A is angle, and v is default end effector
Translational speed, T is the time difference, setpoint distances of the L between the first noncontacting proximity sensor and the second noncontacting proximity sensor.
As shown in figure 3, Fig. 3 is substrate position offset detection provided in an embodiment of the present invention and bearing calibration another kind flow
Figure.Substrate position offset detection provided by the invention and bearing calibration, specifically：
Substrate position offset detection provided by the invention and bearing calibration, specifically：
Step A：
Step SA401：Board carrying work starts；
Step SA402：Robot body is moved to precalculated position, end effector according to default first move to
Substrate movement to be handled；
Step SA403：When the end effector in substrate conveying system according to default first move to be handled
Substrate is mobile and when not contacted with substrate to be handled, the first noncontacting proximity sensor and the second noncontacting proximity sensor gather in real time
The information of the first edge of substrate to be handled, when the first noncontacting proximity sensor and the second noncontacting proximity sensor are detected and treated
During the information of the first edge of carrying substrate, controller control end effector stop motion；
Step SA404：Controller judge the first noncontacting proximity sensor and the second noncontacting proximity sensor whether and meanwhile adopt
Collect the information of first edge；If when different, step SA405 is performed, SA411 is performed if simultaneously；
Step SA405：The signal that controller feeds back according to the first noncontacting proximity sensor and the second noncontacting proximity sensor
Time difference, and the translational speed of default end effector, the first noncontacting proximity sensor and the second non-contact sensor
Setpoint distance between device, obtain the first edge and the first noncontacting proximity sensor and the second contactless biography of substrate to be handled
Angle value a between the line 3 of sensor；
Step SA406：Rotation offset degree is judged whether within interference allowed band, and controller is by angle a and in advance
The angle reference value θ of setting0It is compared, if actual shifts angle a ＞ θ0, then illustrate the degrees of offset of substrate beyond dry
The scope of permission is related to, step SA407 is performed, if deviation angle a ＜ θ0, then step SA408 is performed；
Step SA407：Controller terminates the action of this board carrying, and sends alarm signal, waits operating personnel's investigation
Failure；
Step SA408：Rotated about the axis thereof according to the robot body of angle value a control base board handling systems, control end
End actuator continues to move to substrate to be handled, when simultaneously the first noncontacting proximity sensor and the second noncontacting proximity sensor detect
To the first edge of substrate to be handled information when, control end effector stop motion again, and pick up substrate to be handled, and
The substrate to be handled of control machine human body drive thereon returns to initial angle around its own axle rotation compensation angle-a；
Step SA409：The controller of robot judges that substrate whether there is moving along the telescopic direction of end effector
Skew, if there is the skew, then step SA410 is performed, if there is no the skew, then perform step SB；
Step SA410：Default second move is adjusted according to the first distance and the difference of second distance, performed afterwards
Step SB；
Step SA411：Pick up substrate to be handled；
Step SA412：The controller of robot judges that substrate whether there is moving along the telescopic direction of end effector
Skew, if there is the skew, then step SA413 is performed, if there is no the skew, then perform step SB；
Step SA413：Default second move is adjusted according to the 3rd distance and the difference of second distance, performed afterwards
Step SB；
Step SB：
Step SB401：3rd noncontacting proximity sensor device detects the second edge 12 of substrate to be handled, detects the second side
The 4th range information w between the midpoint of the noncontacting proximity sensor of edge 12 and the 3rd, and signal is transmitted back to controller.
Step SB402：Moving partially along trunnion axis bearing of trend whether there is according to the 4th Distance Judgment substrate to be handled
Move, if there is the skew, perform step SB403, if there is no skew, perform step SB404；
Step SB403：Adjust the 3rd move of the distance that bearing of trend of the end effector along trunnion axis moves；
Step SB404：Robot body is moved to the region to be placed for placing substrate；
Step SB405：End effector of robot places substrate；
Step SB406：Board carrying terminates.
So far, whole board carrying process terminates, and transfer robot is completed to substrate position during substrate is picked and placeed
Put the detection and correction of skew.
Present invention also offers a kind of control method of substrate conveying system, including：Substrate position described in any of the above-described
Offset detection and bearing calibration are put, handling efficiency and production efficiency can be improved.
Based on same inventive concept, present invention also offers a kind of substrate position offset detection and means for correcting, such as Fig. 4 institutes
Show, Fig. 4 is the structural representation of substrate position offset detection provided in an embodiment of the present invention and means for correcting；It is provided by the invention
Substrate position offset detection and means for correcting, including：
The first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 being arranged on end effector 6, work as base
End effector 6 in plate handling system moved according to default first move to substrate 1 to be handled and not with it is to be handled
When substrate 1 contacts, the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are used to gather substrate 1 to be handled in real time
First edge 11 information, wherein：First noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 and robot sheet
The distance between body 5 is equal, has setpoint distance between the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22
L；
Controller 7, for detecting when the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 and waiting to remove
When transporting the information of the first edge 11 of substrate 1, the stop motion of end effector 6 is controlled, and judge the first noncontacting proximity sensor
21 and second noncontacting proximity sensor 22 whether collect the information of first edge 11 simultaneously, in the case of a kind of：If first non-connects
During the information that the noncontacting proximity sensor 22 of touch sensor 21 and second is non-concurrent to collect first edge 11, non-connect according to first
The noncontacting proximity sensor 22 of touch sensor 21 and second detect respectively the signal fed back after first edge 11 time difference, with
And between the translational speed of default end effector, the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22
Setpoint distance L, obtain the noncontacting proximity sensor 21 of first edge 11 and first and the second non-contact sensor of substrate 1 to be handled
Angle value between the line 3 of device 22, and rotated about the axis thereof according to angle value control machine human body.Above-mentioned angle such as Fig. 2 a
In angle a.
Substrate position offset detection provided by the invention and means for correcting, can, which is previously detected, before carrying substrate treats
Whether carrying substrate 1 offsets, and can correction offset in the handling process, specifically：When the end in substrate conveying system
When end actuator is moved to substrate 1 to be handled according to default first move and do not contacted with substrate 1 to be handled, first is non-
The noncontacting proximity sensor 22 of touch sensor 21 and second gathers the information of the first edge 11 of substrate 1 to be handled in real time；When
First noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 detect the letter of the first edge 11 of substrate 1 to be handled
During breath, the stop motion of end effector 6 is controlled, and judge the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22
Whether the information of first edge 11 is collected simultaneously, if the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 are non-
When collecting the information of first edge 11 simultaneously, divided according to the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22
The time difference of the signal fed back after first edge 11 and the translational speed of default end effector, first non-are not detected
Setpoint distance L between the noncontacting proximity sensor 22 of touch sensor 21 and second, obtains the first edge of substrate 1 to be handled
11 and first noncontacting proximity sensor 21 and the second noncontacting proximity sensor 22 line 3 between angle value, and according to angle
Value control machine human body 5 rotates about the axis thereof.
It can be seen that substrate position offset detection provided by the invention and means for correcting, can be detected and correction substrate in real time
Position, improve the handling efficiency and production efficiency of substrate.
In addition, substrate position offset detection provided by the invention and means for correcting, can improve and carry precision and efficiency.
Further, aforesaid substrate handling system also includes：Warning device 8,
Controller 7 is additionally operable to when angle value is more than zero and is more than angle reference value set in advance, outputting alarm signal
And/or control handling system is stopped；
Warning device 8 produces alarm according to alarm signal.When avoiding the rotation of end effector 6, end effector 6 and dress base
The container of plate collides.
Further, controller 7 is additionally operable to：
When the first distance is more than second distance, moved according to the first distance and the difference of second distance adjustment default second
Dynamic instruction, and substrate to be handled 1 thereon is driven to robot according to the second move control end effector 6 after adjustment
Body 5 moves；
When the first distance is less than second distance, moved according to the first distance and the difference of second distance adjustment default second
Dynamic instruction, and substrate to be handled 1 thereon is driven to robot according to the second move control end effector 6 after adjustment
Body 5 moves, or is moved to preset stopping position according to the first distance and the difference of second distance control end effector 6, and
End effector 6 is controlled to drive substrate to be handled 1 thereon to be moved to robot body 5 according to default second move；
It should be noted that：Wherein：First distance drives substrate to be handled thereon to be revolved around its axis for robot body
After going to initial angle, the distance between the actual stop position of end effector and robot body, second distance is end
The distance between the preset stopping position of actuator and robot body, preset stopping position are end effector according to default
Stop position after first move movement.
In another case, controller 7 is additionally operable to：If the first noncontacting proximity sensor 21 and the second noncontacting proximity sensor
22 be when collecting the information of first edge simultaneously, to pick up the substrate to be handled.
Further, as shown in figs. 2 b and 2 c, controller noted above is additionally operable to：
It should be noted that：Wherein：3rd distance is adopted simultaneously for the first non-contact sensor and the second non-contact sensor
When collecting the information of first edge, the distance between the actual stop position of end effector 6 and robot body, second distance
The distance between preset stopping position and robot body for end effector, preset stopping position be end effector according to
Stop position after default first move movement；
Such as Fig. 2 b, there is distance H1, wherein H1 to produce between the first edge 11 and predeterminated position line 9 of substrate 1 to be handled
The reason for be：End effector during pickup substrate to be handled is begun to move into according to the default first instruction, hold by end
Row device is first moved to preset stopping position (i.e. end effector is moved to preset stopping position) according to the default first instruction, this
When the first noncontacting proximity sensor 21 and the second non-contact sensor 22 do not collect the first edge 11 of substrate 1 to be handled
Information；It will continue to move to the direction of substrate 1 to be handled for this end effector 6, until the first non-contact sensor 21 and the
When two non-contact sensors 22 collect the information of first edge 11, end effector 6 is by stop motion (i.e. end effector
It is moved to actual stop position), and substrate 1 to be handled is picked up, therefore the actual stop position and preset stopping of end effector
Difference, as H1 (H1 is due to that the 3rd distance is more than caused by second distance), base provided by the invention will be produced between position
In Board position offset detection and bearing calibration, default second will be adjusted according to H1 (the 3rd distance and the difference of second distance) and moved
Dynamic instruction, and substrate to be handled 1 thereon is driven to robot according to the second move control end effector 6 after adjustment
Body moves；
In Fig. 2 c, there is distance H2, wherein H2 productions between the first edge 11 and predeterminated position line 9 of substrate 1 to be handled
The reason for raw is：End effector according to the default first instruction during pickup substrate to be handled is begun to move into, and first
The non-contact sensor 22 of noncontacting proximity sensor 21 and second collects the information of the first edge 11 of substrate 1 to be handled, this
When end effector 6 by stop motion (end effector is moved to actual stop position), and pick up substrate 1 to be handled, and
When end effector stops, end effector 6 does not move according to default first move also and completes (i.e. end effector
When being also not moved to preset stopping position, end effector stop motion), thus the actual stop position of end effector with
Difference, as H2 (H2 is due to that the 3rd distance is less than caused by second distance), the present invention will be produced between preset stopping position
In the substrate position offset detection of offer and bearing calibration, it will be adjusted according to H2 (the 3rd distance and second distance) difference default
The second move, and according to the second move control end effector after adjustment drive substrate to be handled thereon to
Robot body moves, or controls end effector to be moved to preset stopping according to H2 (the 3rd distance and second distance) difference
Position, and control end effector to drive substrate to be handled thereon to be moved to robot body according to default second move
It is dynamic.
As shown in Figure 2 d, when substrate 1 to be handled has offset w as shown in Figure 2 c, aforesaid substrate handling system is also
Including：
The 3rd noncontacting proximity sensor 23 being arranged on robot body 5, when end effector 6 drive thereon wait to remove
Fortune substrate to robot body 5 move when, the second edge 12 and machine of the 3rd noncontacting proximity sensor detection substrate to be handled
The 4th range information (w) between the midpoint of human body 5, the midpoint of the 3rd noncontacting proximity sensor 23 is on end effector 6
Projection positioned at substrate 1 to be handled preset stopping region (i.e. normal place) first edge on, wherein：First edge and
Two edge-perpendiculars are set；
Controller 7 be additionally operable to according to the 4th range information adjust it is set in advance, for controlling end effector 6 along level
3rd move of the distance of the bearing of trend movement of axle 4.
Optionally, the above-mentioned noncontacting proximity sensor 22 of first noncontacting proximity sensor 21 and second is optoelectronic switch sensing
Device.
Optionally, the 3rd noncontacting proximity sensor 23 is laser length measurement sensor.
To sum up, controller will be according to whether angled skew, performs different subsequent control steps, i.e., according to two kinds of feelings
Condition performs difference in functionality.
Present invention also offers a kind of substrate conveying system, including：Trunnion axis 4, and can be along level on trunnion axis 4
The robot body 5 of the bearing of trend of axle 4 movement, is connected, the end effector for picking up substrate to be handled with robot body 5
6, end effector 6 is scalable, and robot body 5 is rotatable and the end effector 6 that extends perpendicularly to of its rotary shaft is stretched
Contracting direction and the bearing of trend of trunnion axis 4；Also include the substrate position offset detection and means for correcting described in any of the above-described,
Due to aforesaid substrate position offset detection and means for correcting, the position with correction substrate can be detected in real time, improves removing for substrate
Transport efficiency and production efficiency.Therefore substrate conveying system provided by the invention has preferable handling efficiency.
Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the present invention to the present invention
God and scope.So, if these modifications and variations of the present invention belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising including these changes and modification.
Claims (9)
1. a kind of substrate position offset detection and bearing calibration, it is characterised in that including：
When the end effector in substrate conveying system is mobile to substrate to be handled according to default first move and not with
During substrate to be handled contact, the first noncontacting proximity sensor and the second noncontacting proximity sensor gather the of substrate to be handled in real time
The information at one edge, wherein：Between first noncontacting proximity sensor and the second noncontacting proximity sensor and robot body away from
From equal, there is setpoint distance between first noncontacting proximity sensor and second noncontacting proximity sensor；
When the first noncontacting proximity sensor and the second noncontacting proximity sensor detect the letter of the first edge of substrate to be handled
During breath, the end effector stop motion is controlled, and judges first noncontacting proximity sensor and the second contactless biography
Whether sensor collects the information of first edge simultaneously, if first noncontacting proximity sensor and the second noncontacting proximity sensor
It is non-concurrent collect first edge information when, according to first noncontacting proximity sensor and second non-contact sensor
Device detect respectively the time difference of the signal fed back after the first edge and the translational speed of default end effector,
Setpoint distance between first noncontacting proximity sensor and second noncontacting proximity sensor, obtain the base to be handled
Angle value between the first edge of plate and first noncontacting proximity sensor and the line of the second noncontacting proximity sensor, and
The robot body for controlling the substrate conveying system according to the angle value rotates about the axis thereof.
2. substrate position offset detection as claimed in claim 1 and bearing calibration, it is characterised in that when the angle value
When zero, aforesaid substrate position offset detection and bearing calibration also include：
When the angle value is more than default angle reference value, alarm signal and/or the control substrate conveying system are produced
It is stopped.
3. substrate position offset detection as claimed in claim 1 and bearing calibration, it is characterised in that also include：
After controlling the robot body of the substrate conveying system to rotate about the axis thereof according to the angle value, the end is controlled
Actuator continues to move to substrate to be handled, when the first noncontacting proximity sensor and the second noncontacting proximity sensor are detected simultaneously by
During the information of the first edge of substrate to be handled, end effector stop motion again is controlled, and is picked up described to be handled
Substrate, and control the robot body to drive substrate to be handled thereon to rotate about the axis thereof to initial angle.
4. substrate position offset detection as claimed in claim 3 and bearing calibration, it is characterised in that also include：
When the first distance is more than second distance, default the is adjusted according to first distance and the difference of the second distance
Two moves, and according to the second move after adjustment control the end effector drive substrate to be handled thereon to
The robot body movement；
When the first distance is less than second distance, default the is adjusted according to first distance and the difference of the second distance
Two moves, and according to the second move after adjustment control the end effector drive substrate to be handled thereon to
The robot body movement, or control the end effector to be moved to according to first distance and the difference of second distance
Preset stopping position, and according to default second move control the end effector drive substrate to be handled thereon to
The robot body movement, wherein：First distance is the substrate to be handled of robot body drive thereon around it
Axis is rotated to initial angle, the distance between the actual stop position of the end effector and the robot body,
The second distance is the distance between preset stopping position and described robot body of the end effector, described to preset
Stop position is end effector according to the stop position after the default first move movement.
5. substrate position offset detection as claimed in claim 1 and bearing calibration, it is characterised in that also include：
If first noncontacting proximity sensor and the second noncontacting proximity sensor is collect the information of first edge simultaneously,
Pick up the substrate to be handled.
6. substrate position offset detection as claimed in claim 5 and bearing calibration, it is characterised in that also include：
When the 3rd distance is more than second distance, default the is adjusted according to the 3rd distance and the difference of the second distance
Two moves, and according to the second move after adjustment control the end effector drive substrate to be handled thereon to
The robot body movement；
When the 3rd distance is less than second distance, default the is adjusted according to the 3rd distance and the difference of the second distance
Two moves, and according to the second move after adjustment control the end effector drive substrate to be handled thereon to
The robot body movement, or control the end effector to be moved to according to the 3rd distance and the difference of second distance
Preset stopping position, and according to default second move control the end effector drive substrate to be handled thereon to
The robot body movement, wherein：3rd distance is first non-contact sensor and the second non-contact biography
Sensor collects the information of first edge simultaneously when, between the actual stop position of end effector and the robot body
Distance, preset stopping position and described robot body the distance between of the second distance for the end effector, institute
State the stop position after preset stopping position is moved for end effector according to default first move.
7. substrate position offset detection and bearing calibration as described in claim 4 or 6, it is characterised in that also include：
When the substrate to be handled of end effector drive thereon moves to the robot body, positioned at the robot
The 3rd noncontacting proximity sensor on body detects the second edge of the substrate to be handled and the 3rd non-contact sensor
The 4th range information between the midpoint of device, wherein：The first edge and the second edge are vertically arranged；
According to the 4th range information adjust it is set in advance, for controlling extension side of the end effector along trunnion axis
The 3rd move to mobile distance.
8. substrate position offset detection as claimed in claim 1 and bearing calibration, it is characterised in that described according to described first
The time difference and default end effector of noncontacting proximity sensor and the signal of second noncontacting proximity sensor feedback
Translational speed, the setpoint distance between first noncontacting proximity sensor and second noncontacting proximity sensor, obtain
The line of the first edge of the substrate to be handled and first noncontacting proximity sensor and the second noncontacting proximity sensor it
Between angle value specifically include：
According to formula a=arctan (v × T/L), the angle value is obtained, wherein：A is angle, and v is that the default end is held
The translational speed of row device, T are the time difference, L be first noncontacting proximity sensor and the second noncontacting proximity sensor it
Between setpoint distance.
A kind of 9. control method of substrate conveying system, it is characterised in that including：Base as described in any one of claim 1~8
Board position offset detection and bearing calibration.
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| CN201510761073.7A CN105329642B (en) | 2015-11-09 | 2015-11-09 | Substrate position offset detection and bearing calibration and the control method of substrate conveying system |
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| CN201510761073.7A CN105329642B (en) | 2015-11-09 | 2015-11-09 | Substrate position offset detection and bearing calibration and the control method of substrate conveying system |
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| CN105329642B true CN105329642B (en) | 2017-11-21 |
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| US10544022B2 (en) * | 2016-10-13 | 2020-01-28 | The Raymond Corporation | Handle position sensing systems and methods for a material handling vehicle |
| CN111843225A (en) * | 2020-06-16 | 2020-10-30 | 大族激光科技产业集团股份有限公司 | Automatic production line and laser marking production line |
| CN115112013B (en) * | 2021-05-07 | 2023-03-28 | 沈阳新松机器人自动化股份有限公司 | Sensor-based FPD manipulator dynamic glass deviation correction method |
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| JP3393955B2 (en) * | 1995-04-18 | 2003-04-07 | 株式会社ダイヘン | Hand for conveying thin plate-shaped work |
| JPH11254374A (en) * | 1998-03-10 | 1999-09-21 | Toray Ind Inc | Substrate carrying hand, substrate carrying method, and device and method for manufacturing color filter |
| JP3955499B2 (en) * | 2001-08-07 | 2007-08-08 | 日本電産サンキョー株式会社 | Hand positioning method and apparatus |
| JP2005187198A (en) * | 2003-12-26 | 2005-07-14 | Nippon Oil Corp | Member for conveyance made of carbon fiber reinforced metal composite material |
| CN203339131U (en) * | 2013-08-01 | 2013-12-11 | 北京京东方光电科技有限公司 | Substrate transporting device |
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Address after: 230013 Southwest District of Hefei City, Anhui Province Patentee after: Hefei xinyihua Intelligent Machine Co.,Ltd. Address before: 230013 Southwest District of Hefei City, Anhui Province Patentee before: HEFEI SINEVA INTELLIGENT MACHINE Co.,Ltd. |