CN103802120A - Hand for conveying substrate and method for conveying substrate - Google Patents
Hand for conveying substrate and method for conveying substrate Download PDFInfo
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- CN103802120A CN103802120A CN201310565625.8A CN201310565625A CN103802120A CN 103802120 A CN103802120 A CN 103802120A CN 201310565625 A CN201310565625 A CN 201310565625A CN 103802120 A CN103802120 A CN 103802120A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
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Abstract
The invention relates to a hand for conveying a substrate and a method for conveying the substrate. The hand for conveying a substrate comprises a first pair of substrate bearing components in parallel arrangement; a driving part which drives the first pair of substrate bearing components to conduct parallel movement towards a direction where the pair of substrate bearing components approach to each other and towards a direction where the pair of substrate bearing components are far away from each other; a second pair of substrate bearing components which are arranged in parallel and vertical to the longitudinal direction of the first pair of substrate bearing components; a parallel connecting rod component which connects the first pair of substrate bearing components and the second pair of substrate bearing components and which enables the second pair of substrate bearing components to conduct parallel movement towards the approaching/departing direction through the parallel movement and linking of the first pair of substrate bearing components towards the approaching/departing direction; first retaining parts which are disposed along the longitudinal direction of the first pair of substrate bearing components and retain the edge part of the lower surface of the substrate; second retaining parts which are disposed along the longitudinal direction of the second pair of substrate bearing components and retain the edge part of the lower surface of the substrate.
Description
Technical field
The present invention relates to substrate manipulator for conveying and substrate carrying method.
Background technology
In patent documentation 1, disclose for the edge on 4 limits of the lower surface of supporting glass substrate and carry the substrate manipulator for conveying of glass substrate.
Aforesaid substrate manipulator for conveying is installed the manipulator installation portion that is installed on automatic conveying device with plate by manipulator.In addition, the arm of substrate manipulator for conveying is made up of near the articulate many members of mode of the size of parallel with limit portion separately the outside of the limit portion with at glass substrate and applicable glass substrate.Above-mentioned member has lightweight and high rigidization concurrently, is made up of the square tube material of hollow.In addition, on above-mentioned member, be provided with the substrate grasping portion for the edge of the lower surface of supporting glass substrate.
Patent documentation: Japanese kokai publication hei 11-254374 communique
Summary of the invention
the problem that invention will solve
But the arm of disclosed substrate manipulator for conveying, due to multiple members are joined together to formation, therefore can not change size (plotted by multiple members overlook rectangular space) in patent documentation 1.Therefore, generation can not utilize the adsorbent pad of patent documentation 1 to process the such problem of glass substrate of the size different from the size that can support.
In order to utilize 1 stylobate plate manipulator for conveying to process the different glass substrate of size, multiple drive divisions need to be set, the plurality of drive division supports respectively the multiple members that form arm for can move freely, and each member is moved independently.But if each member is equipped with above-mentioned member supporting is the guiding elements that moves freely, is provided with multiple drive divisions, can produce so substrate manipulator for conveying becomes heavy thing and is such problem that maximizes.
The present invention makes in view of such situation, and its object is to provide substrate manipulator for conveying and the substrate carrying method that can change accordingly with the size of substrate self size and small-sized and light weight.
for the scheme of dealing with problems
A technical scheme of the present invention in order to achieve the above object, provides a kind of substrate manipulator for conveying, and this substrate manipulator for conveying comprises: the 1st pair of supporting member for substrate, their configured in parallel; Drive division, its for make above-mentioned the 1st pair of supporting member for substrate to direction close to each other and mutually away from direction parallel; The 2nd pair of supporting member for substrate, they are configured in parallel in the direction vertical with the longitudinally of above-mentioned the 1st pair of supporting member for substrate; Parallel rod member, it is for linking up above-mentioned the 1st pair of supporting member for substrate and above-mentioned the 2nd pair of supporting member for substrate, and parallel in above-mentioned direction close to each other of this parallel rod member and above-mentioned the 1st pair of supporting member for substrate interlock and make above-mentioned the 2nd pair of supporting member for substrate to direction parallel close to each other, and this parallel rod member and above-mentioned the 1st pair of supporting member for substrate above-mentioned mutually away from direction on parallel interlock and make above-mentioned the 2nd pair of supporting member for substrate to mutual away from direction parallel; The 1st maintaining part, its longitudinally along above-mentioned the 1st pair of supporting member for substrate arranges multiple, and for keeping the edge of lower surface of substrate; And the 2nd maintaining part, its longitudinally along above-mentioned the 2nd pair of supporting member for substrate arranges multiple, and for keeping the edge of lower surface of substrate.
Adopt a technical scheme of the present invention, when utilizing drive division to make the 1st pair of supporting member for substrate to direction close to each other flatly when parallel, the 2nd pair of supporting member for substrate by parallel rod member and this action in linkage to flatly parallel of direction close to each other.With this action on the contrary, when utilize drive division make the 1st pair of supporting member for substrate to mutually away from direction flatly when parallel, the 2nd pair of supporting member for substrate by parallel rod member and this action in linkage to mutual away from flatly parallel of direction.
; adopt a technical scheme of the present invention, by the size of the 1st pair of supporting member for substrate and the 2nd pair of coffin that supporting member for substrate plots, can carry out stepless adjustment till full-size plays minimum dimension for the size of the coffin that keeps substrate.Therefore, adopt the substrate manipulator for conveying of a technical scheme of the present invention, can change accordingly with the size of substrate the size of this substrate manipulator for conveying.In addition, for drive division, owing to only need arranging 1 for driving the drive division of the 1st pair of supporting member for substrate, therefore can provide the substrate manipulator for conveying of small-sized and light weight.
The 1st maintaining part and the 2nd maintaining part of the substrate manipulator for conveying of the size that substrate is this substrate by adjusted keep.
Preferably, above-mentioned drive division comprises a technical scheme of the present invention: guiding elements, its make for guiding above-mentioned the 1st pair of supporting member for substrate above-mentioned the 1st pair of supporting member for substrate to direction close to each other and mutually away from direction move freely; Drive source, its for make to above-mentioned the 1st pair of supporting member for substrate transferring power above-mentioned the 1st pair of supporting member for substrate to above-mentioned direction close to each other and above-mentioned mutually away from direction parallel; And supporting member, above-mentioned guiding elements and above-mentioned drive source are installed on this supporting member.
Adopt a technical scheme of the present invention, guiding elements and drive source are installed on supporting member.Therefore, become such structure: the 1st pair of supporting member for substrate is installed on supporting member by guiding elements, the 2nd pair of supporting member for substrate by parallel rod member supporting in the 1st pair of supporting member for substrate.Thereby, because material the 1st pair of supporting member for substrate of making and the 2nd pair of supporting member for substrate with light weight can reduce the weight load that supporting member is born, be therefore preferred.In addition, because the 1st pair of supporting member for substrate and the 2nd pair of supporting member for substrate are for supporting substrates, therefore the 1st pair of supporting member for substrate and the 2nd pair of supporting member for substrate are preferably made with the material with high rigidity.As material, can illustrate the CFRP(carbon fiber reinforced plastic that light weight and rigidity are higher: carbon fibre reinforced plastic), aluminium alloy or titanium alloy.
Adopt a technical scheme of the present invention, in the time that in the future the power in self-driven source is passed to the 1st pair of supporting member for substrate, the 1st pair of directed member guiding of supporting member for substrate and to direction close to each other and mutually away from direction parallel.Thus, the 1st pair of supporting member for substrate moves swimmingly with respect to supporting member.
As guiding elements, preferably LM(Linear Motion: rectilinear motion) guiding (registration mark), as drive source, preferably servo motor and feed screw member.Feed screw member comprises a pair of nut portions and carves separately a pair of screw rod that is provided with opposite threads.The nut portions of the side in a pair of nut portions is installed on to the 1st supporting member for substrate of a side, the nut portions of opposite side is installed on to the 1st supporting member for substrate of opposite side.And, make the screw flight of a side be matched with the nut portions of a side, make the screw flight of opposite side be matched with the nut portions of opposite side.Thus, if utilize servo motor to make a pair of screw rod to the rotation of forward direction and reverse directions, utilize the feeding effect of feed screw member make the 1st pair of supporting member for substrate to direction close to each other and mutually away from direction parallel.
A technical scheme of the present invention preferably, is linked with for making aforesaid substrate manipulator for conveying move to the transfer unit of delivery position from the receiving position of aforesaid substrate at above-mentioned drive division.
Adopt a technical scheme of the present invention, owing to being linked with transfer unit on the supporting member at substrate manipulator for conveying, therefore can utilize transfer unit that substrate manipulator for conveying is moved to delivery position from the receiving position of substrate.As transfer unit, preferably SCARA(selective compliance Assembly Robot Arm, select the compliance arm that puts together machines) the horizontal articulated robot such as robot.
A technical scheme of the present invention preferably, is provided with in above-mentioned the 1st maintaining part and above-mentioned the 2nd maintaining part the adsorption element that keeps aforesaid substrate for adsorbing.
Adopt a technical scheme of the present invention, due to the edge that can utilize adsorption element to keep reliably the lower surface of substrate, therefore conveying substrate stably.
A technical scheme of the present invention preferably, is coated with resin liquid at the upper surface of aforesaid substrate, and the edge of the lower surface of aforesaid substrate is kept by above-mentioned the 1st maintaining part and above-mentioned the 2nd maintaining part.
Adopt a technical scheme of the present invention, owing to utilizing substrate manipulator for conveying to remain on upper surface to be coated with the edge of the lower surface of the substrate of resin liquid, therefore can be not and above-mentioned resin liquid conveying substrate contiguously.
A technical scheme of the present invention preferably, above-mentioned drive division be provided with for the abutting member of the lower surface butt of aforesaid substrate.
Adopt a technical scheme of the present invention, make abutting member be connected to the lower surface of substrate and supporting substrates.By abutting member being arranged to substrate manipulator for conveying, even the larger substrate of size also can suppress the deflection ground conveying substrate of substrate.Consider from the deflection this point that can suppress substrate, central portion that the butt position that the lower surface of abutting member and substrate connects is substrate, central portion is neighbouring or be preferred along the position of the concentric circles centered by central portion.Above-mentioned central portion refers to the position of centre of gravity of substrate.
A technical scheme of the present invention preferably, above-mentioned abutting member comprise the arm member that extends out from above-mentioned drive division and be located at above-mentioned arm member and for the pin-shaped member of the lower surface butt of aforesaid substrate.
Adopt a technical scheme of the present invention, can will be disposed at butt position for the pin-shaped member connecting with the lower surface of substrate by arm member.
Preferably, above-mentioned pin-shaped member is to utilize Lift Part to be arranged at above-mentioned arm member with respect to the mode of above-mentioned arm member free lifting for a technical scheme of the present invention.
Adopt a technical scheme of the present invention, before utilizing the edge of the 1st maintaining part of substrate manipulator for conveying and the lower surface of the 2nd maintaining part supporting substrates, make in advance pin-shaped member in down position standby, pin-shaped member is not conflicted with the lower surface of substrate.Then,, after utilizing the edge of lower surface of the 1st maintaining part and the 2nd maintaining part supporting substrates, make pin-shaped member increase and utilize the lower surface of pin-shaped member supporting substrate.Thus, can prevent the damage of the substrate causing because of above-mentioned conflict.
Preferably, above-mentioned arm member is to utilize Lift Part to be arranged at above-mentioned drive division with respect to the mode of above-mentioned drive division free lifting for a technical scheme of the present invention.
Adopt a technical scheme of the present invention, before utilizing the edge of the 1st maintaining part of substrate manipulator for conveying and the lower surface of the 2nd maintaining part supporting substrates, make in advance arm member in down position standby, pin-shaped member is not conflicted with the lower surface of substrate.Then,, after utilizing the edge of lower surface of the 1st maintaining part and the 2nd maintaining part supporting substrates, make arm member increase and utilize the lower surface of pin-shaped member supporting substrate.Thus, can prevent the damage of the substrate causing because of above-mentioned conflict.
A technical scheme of the present invention provides a kind of substrate carrying method, and this substrate carrying method uses substrate manipulator for conveying of the present invention substrate to be delivered to the drying section of the above-mentioned resin drying for making the upper surface that is coated on aforesaid substrate from the coated portion of the upper surface application of resin at aforesaid substrate.
Adopt a technical scheme of the present invention, use 1 stylobate plate manipulator for conveying substrates different size can be delivered to drying section from coated portion.
the effect of invention
As described above, adopt the present invention, substrate manipulator for conveying and the substrate carrying method that can change accordingly with the size of substrate self size and small-sized and light weight can be provided.
Accompanying drawing explanation
Fig. 1 is the top view of the substrate manipulator for conveying of the 1st embodiment.
Fig. 2 utilizes substrate manipulator for conveying to keep the top view of glass substrate.
Fig. 3 is the cutaway view of the A-A line along Fig. 1 of drive division.
Fig. 4 is the top view that maintains the substrate manipulator for conveying of the glass substrate less than the glass substrate size shown in Fig. 1.
Fig. 5 is the top view that maintains the substrate manipulator for conveying of the glass substrate less than the glass substrate size shown in Fig. 4.
Fig. 6 A is the stereogram that represents the structure of coated portion.
Fig. 6 B is the key diagram that substrate manipulator for conveying is positioned at the top position of the glass substrate from substrate-placing platform rises.
Fig. 6 C utilizes substrate manipulator for conveying to keep the key diagram of glass substrate in coated portion.
Fig. 7 represents to make the glass substrate keeping in coated portion to move to the key diagram of the form of drying section.
Fig. 8 is the amplification view that represents the action of adsorbent pad to glass substrate.
Fig. 9 A is the amplification view that disposes cylindrical body around the adsorbent pad of Fig. 8.
Fig. 9 B is the amplification view of adsorbent pad in the presentation graphs 9A action to glass substrate.
Figure 10 is the top view of the substrate manipulator for conveying of the 2nd embodiment.
Figure 11 is the side view of the substrate manipulator for conveying of the 2nd embodiment.
Figure 12 A utilizes cylinder to make resilient key be positioned at the key diagram of down position.
Figure 12 B utilizes cylinder to make resilient key be positioned at the key diagram of lifting position.
Figure 13 A makes the lifter pin of coated portion rise and make glass substrate be positioned at the side view of receiving position.
Figure 13 B makes substrate manipulator for conveying move to the side view of the receiving position of glass substrate.
Figure 13 C utilizes the maintaining part of supporting member for substrate to keep the side view of the edge of the lower surface of glass substrate.
Figure 13 D rises resilient key and is connected to the side view of the lower surface of glass substrate.
Figure 13 E makes the mobile side view of substrate manipulator for conveying rising.
Figure 13 F makes the side view that lifter pin decline is mobile and substrate manipulator for conveying is moved in the horizontal direction.
Figure 14 A makes glass substrate move to the side view of the delivery position of drying section.
Figure 14 B is the be dried side view of steady pin supporting of portion of the lower surface of glass substrate.
Figure 14 C declines and the side view kept out of the way from the lower surface of glass substrate resilient key.
Figure 14 D be make supporting member for substrate to mutually away from the direction side view that moves and make it increase after mobile.
Figure 14 E is the side view that the arm member of abutting member is slided after moving along linearity in the horizontal direction.
Figure 15 A is the side view that the arm member of abutting member is positioned at down position.
Figure 15 B is the side view that the arm member of abutting member is positioned at lifting position.
description of reference numerals
G, G1, G2, G3 ... glass substrate, 10 ... substrate manipulator for conveying, 12 ... manipulator installation plate, 14 ... horizontal articulated robot, 16 ... arm, 18, 20 ... supporting member for substrate, 22 ... drive division, 24, 26 ... supporting member for substrate, 28 ... parallel rod member, 30 ... connecting rod, 32, 34 ... maintaining part 36 ... adsorbent pad, 38 ... guiding elements, 40 ... drive source, 42 ... guide rail, 44 ... slide block, 46 ... servo motor, 48 ... screw rod, 50 ... nut, 52 ... belt wheel, 54 ... band, 56 ... belt wheel, 58 ... space, 60 ... coated portion, 62 ... drying section, 64 ... mould is coated with machine, 66 ... substrate-placing platform, 68 ... lifter pin, 70 ... resin liquid, 72 ... oven frame, 74 ... steady pin, 76 ... attract path, 78 ... central opening portion, 80 ... cylindrical body, 82 ... ring-type upper surface, 100 ... substrate manipulator for conveying, 102 ... abutting member, 104 ... arm member, 106 ... resilient key, 108 ... cylinder, 110 ... piston, 112 ... cylinder body, 114 ... peristome, 116 ... fixing with pin, 118 ... lowering or hoisting gear.
The specific embodiment
Below, with reference to the accompanying drawings the preferred embodiment of substrate manipulator for conveying of the present invention and substrate carrying method is described.
(structure of substrate manipulator for conveying 10)
Fig. 1 is the top view of the substrate manipulator for conveying 10 of the 1st embodiment, represents that the manipulator of substrate manipulator for conveying 10 is installed the robot of horizontal articulated robot (for example SCARA(Selective Compliance Assembly Robot Arm) that is installed on schematic diagram with plate (supporting member) 12: transfer unit) form on the top of 14 arm 16., manipulator installation is linked to horizontal articulated robot 14 with plate 12 by arm 16.In addition, in Fig. 1, represent to utilize substrate manipulator for conveying 10 to keep overlooking the form before rectangular glass substrate G1.Fig. 2 utilizes substrate manipulator for conveying 10 to keep the top view of glass substrate G1.The surface (upper surface and lower surface) of glass substrate G1 remains horizontal direction by substrate manipulator for conveying 10.
Substrate manipulator for conveying 10 shown in Fig. 1, Fig. 2 comprises: a pair of supporting member for substrate (the 1st pair of supporting member for substrate) 18,20, and they are in the horizontal direction with respect to the throughput direction configured in parallel of glass substrate G1; Drive division 22, its for make a pair of supporting member for substrate 18,20 to direction close to each other and mutually away from direction parallel; A pair of supporting member for substrate (the 2nd pair of supporting member for substrate) 24,26, their configured in parallel in the horizontal direction and in the direction vertical with the longitudinally of a pair of supporting member for substrate 18,20.Supporting member for substrate 18,20 is identical construct tabular and equal in length, and supporting member for substrate 24,26 is also like this.
In addition, substrate manipulator for conveying 10 has the parallel rod member 28,28 that supporting member for substrate 18,20 and supporting member for substrate 24,26 are linked up at supporting member for substrate 24,26 two ends separately ...This parallel rod member 28,28 ... there is following function: the interlock of the parallel to direction close to each other of they and supporting member for substrate 18,20 and make supporting member for substrate 24,26 to direction parallel close to each other, and with supporting member for substrate 18,20 to mutually away from direction parallel interlock and make supporting member for substrate 24,26 to mutually away from direction parallel.
One end that parallel rod member 28 has 30,30,2 connecting rods 30,30 of 2 connecting rods of configured in parallel is linked to supporting member for substrate 18(supporting member for substrate 20 by bearing (not shown) in the mode of freely rotating in the horizontal direction).In addition, the other end of 2 connecting rods 30,30 is linked to supporting member for substrate 24(supporting member for substrate 26 by bearing (not shown) in the mode of freely rotating in the horizontal direction).Adopt this connecting structure, parallel rod member 28 has above-mentioned functions.
And substrate manipulator for conveying 10 comprises maintaining part (the 1st maintaining part) 32,32 ... and maintaining part (the 2nd maintaining part) 34,34 ...Maintaining part 32 is separated with predetermined distance and is provided with multiple along the limit portion facing mutually with supporting member for substrate 18 of the limit portion facing mutually with supporting member for substrate 20 of supporting member for substrate 18 and supporting member for substrate 20, the edge that keeps as shown in Figure 2 the lower surface of glass substrate G1.As shown in Figure 1, maintaining part 34 is separated with predetermined distance and is provided with multiple along the limit portion facing mutually with supporting member for substrate 24 of the limit portion facing mutually with supporting member for substrate 26 of supporting member for substrate 24 and supporting member for substrate 26, the edge that keeps as shown in Figure 2 the lower surface of glass substrate G1.In addition, from can stably carrying this point of glass substrate G1 to consider, preferably, as shown in Figure 1, the adsorbent pad 36(adsorption element of vacuum is set in maintaining part 32,34), the edge that utilizes adsorbent pad 36 absorption to keep the lower surface of glass substrate G1.Set forth below about adsorbent pad 36.
Fig. 3 is the cutaway view along the A-A line in Fig. 1, represents the structure of guiding elements 38.
As guiding elements 38, adopt LM(Linear Motion: rectilinear motion) guiding (registration mark), comprise pair of guide rails 42,42 and be embedded in the slide block 44,44 of guide rail 42,42 in the mode being free to slide. Guide rail 42,42 is installed the upper surface with plate 12 along the parallel manipulator that is fixed on of the moving direction of supporting member for substrate 18,20, and it is also like this that slide block 44,44 is fixed on supporting member for substrate 18(supporting member for substrate 20) lower surface.
On the other hand, the drive source 40 shown in Fig. 1 comprises: servo motor 46, arranged coaxial and be carved with respectively the nut 50 shown in a pair of screw rod 48,48 and Fig. 3 of opposite threads.In addition, as shown in Figure 1, drive source 40 comprises belt wheel 52 for the torque of servo motor 46 is transmitted to a pair of screw rod 48,48, be with 54 and belt wheel 56.That is, belt wheel 52 is installed on the rotating shaft of servo motor 46, and belt wheel 56 is installed on the longitudinally central portion of a pair of screw rod 48,48, is with 54 to be set up in these belt wheels 52,56.
In addition, as shown in Figure 3, it is also like this that nut 50 is fixed on supporting member for substrate 18(supporting member for substrate 20) slide block 44 and the slide block 44 of lower surface between pars intermedia.On this nut 50, threaded engagement has the screw rod 48 of laying abreast with guide rail 42.,, as the travel mechanism of the supporting member for substrate 18,20 being driven by drive source 40, adopt the feed screw member being formed by screw rod 48 and nut 50.
Therefore, adopt drive division 22, if utilize servo motor 46 to make a pair of screw rod 48,48 to the rotation of forward direction and reverse directions, utilize the feeding effect of carving separately between a pair of screw rod 48,48 and the nut 50,50 that is provided with opposite threads make supporting member for substrate 18,20 to direction close to each other and mutual away from direction parallel.In addition, supporting member for substrate 18,20 is owing to being guided by 38,38 of guiding elements, and therefore supporting member for substrate 18,20 moves with plate 12 swimmingly with respect to manipulator installation.
On the other hand, drive division 22 is such structures: supporting member for substrate 18,20 is installed with plate 12 in manipulator by guiding elements 38,38 cantilever support, and supporting member for substrate 24,26 is by parallel rod member 28,28 ... be supported on supporting member for substrate 18,20.
Thereby, because the material making supporting member for substrate 18,20,24,26 with light weight can reduce manipulator, the weight load of being born with plate 12 is installed, be therefore preferred.In addition, because supporting member for substrate 18,20,24,26 is for supporting glass substrate G1, therefore supporting member for substrate 18,20,24,26 is preferably made with the material with high rigidity.According to above-mentioned viewpoint, supporting member for substrate 18,20,24,26 is light weight and the higher CFRP(carbon fiber reinforced plastic of rigidity preferably: carbon fibre reinforced plastic) system, aluminium alloy system or titanium alloys.
Next, the effect of the substrate manipulator for conveying 10 with above-mentioned such the 1st embodiment forming is described.
(elemental motion of substrate manipulator for conveying 10)
When utilizing drive division 22 to make supporting member for substrate 18,20 to direction close to each other flatly when parallel, supporting member for substrate 24,26 is by parallel rod member 28,28 ... with this action in linkage to flatly parallel of direction close to each other.With this action on the contrary, when utilize drive division 22 make supporting member for substrate 18,20 to mutually away from direction flatly when parallel, supporting member for substrate 24,26 is by parallel rod member 28,28 ... with this action in linkage to mutually away from flatly parallel of direction.
(the maintenance action of substrate manipulator for conveying 10 to glass substrate G1)
First, as shown in Figure 1, utilize drive division 22 to expand to greatest extent the interval of supporting member for substrate 18,20.That is, the rectangular space 58 of overlooking being plotted by supporting member for substrate 18,20,24,26 is extended to full-size, utilizes horizontal articulated robot 14 that substrate manipulator for conveying 10 is moved so that glass substrate G1 enters in this space 58.In addition, having manipulator installs and is connected by arm 16 and horizontal articulated robot 14 with the drive division 22 of plate 12.
Next, utilize drive division 22 to make supporting member for substrate 18,20 to flatly parallel of direction close to each other, and then make supporting member for substrate 24,26 to flatly parallel of direction close to each other.Thus, as shown in Figure 2, all maintaining parts 32,32 ..., 34,34 ... enter the edge of the lower surface of glass substrate G1, the edge of lower surface is by maintaining part 32,32 ..., 34,34 ... supporting.By this action, glass substrate G1 is kept by substrate manipulator for conveying 10.In addition, utilize servo motor 46 to control the amount of movement of supporting member for substrate 18,20 so that this amount of movement is corresponding with the size of glass substrate G1.
For the substrate manipulator for conveying 10 of the 1st embodiment, the size in the space 58 being plotted by supporting member for substrate 18,20,24,26 can be carried out stepless adjustment till playing minimum dimension (not shown) from the full-size shown in Fig. 1.
Therefore, adopt substrate manipulator for conveying 10, can change accordingly with the size of glass substrate the size of substrate manipulator for conveying 10.That is to say, as shown in Figure 4, substrate manipulator for conveying 10 also can keep than glass substrate G1(with reference to Fig. 1, Fig. 2) glass substrate G2 that size is little, as shown in Figure 5, substrate manipulator for conveying 10 also can keep than glass substrate G2(with reference to Fig. 4) glass substrate G3 that size is little.In addition, because 22 need of drive division of substrate manipulator for conveying 10 have 1 for driving the drive division of supporting member for substrate 18,20, therefore become the substrate manipulator for conveying 10 of small-sized and light weight.
(being carried the carrying method of glass substrate by substrate manipulator for conveying 10)
60 places, coated portion (receiving position of substrate) that Fig. 6 A, Fig. 6 B, Fig. 6 C are illustrated in resin liquid utilize substrate manipulator for conveying 10 to keep the form of glass substrate G.Fig. 7 represents to utilize the horizontal articulated robot 14 of Fig. 1 the glass substrate G keeping in coated portion 60 to be delivered to the form of drying section (delivery position of substrate) 62.
As shown in Figure 6A, coated portion 60 comprises that mould is coated with machine 64 and substrate-placing platform 66.In addition, as shown in Fig. 6 B, Fig. 6 C, on substrate-placing platform 66, be provided with many lifter pins 68,68 ..., these many lifter pins 68,68 ... can the outstanding and retraction with respect to the upper surface of substrate-placing platform 66.
In the coated portion 60 of Fig. 6 A, glass substrate G loads in substrate-placing platform 66, utilizes mould to be coated with the upper surface application of resin liquid 70 of machine 64 at glass substrate G.When the coating of resin liquid 70 is complete, mould is coated with machine 64 and retreats to position, side from the top position of substrate-placing platform 66, and as shown in Figure 6B, lifter pin 68,68 ... outstanding from the upper surface of substrate-placing platform 66.Thus, utilize lifter pin 68,68 ... head on the lower surface of glass substrate G and make glass substrate G increase from substrate-placing platform 66.Afterwards, as shown in Figure 6B, the substrate manipulator for conveying 10 that utilizes the horizontal articulated robot 14 of Fig. 1 to move is positioned at the top position of glass substrate G.Afterwards, substrate manipulator for conveying 10 declines and moves to the position that can keep glass substrate G, and afterwards, the drive division 22 of substrate manipulator for conveying 10 is driven, and glass substrate G is kept by substrate manipulator for conveying 10 as Fig. 6 C.
The glass substrate G being kept by substrate manipulator for conveying 10 is delivered to the drying section 62 of Fig. 7 by horizontal articulated robot 14 and is loaded in the many steady pins 74,74 of the upper surface of the outstanding oven frame 72 that is arranged on drying section 62 ...Afterwards, utilize supporting member for substrate 18,20 that drive division 22 makes substrate manipulator for conveying 10 to mutually away from direction move.Thus, substrate manipulator for conveying 10 is disengaged the maintenance of glass substrate G.Afterwards, utilize horizontal articulated robot 14 to make substrate manipulator for conveying 10 move near the position of the coated portion 60 of Fig. 6 A, in this position standby until keep the action of ensuing glass substrate G to start.
Adopt the carrying method of above-mentioned glass substrate G, due to the maintaining part 32,32 by substrate manipulator for conveying 10 ..., 34,34 ... the edge that keeps being coated with on upper surface the lower surface of the glass substrate G of resin liquid 70, therefore can not be delivered to drying section 62 by glass substrate G from coated portion 60 with resin liquid 70 contiguously.In addition, use 1 stylobate plate manipulator for conveying 10 glass substrates different size can be delivered to drying section 62 from coated portion 60.In addition, the shape of the steady pin 74 shown in the lifter pin 68 shown in Fig. 6 C and Fig. 7 is not limited to cylindric, can be also that upper end is the cone shape of tip shape.
(form of adsorbent pad 36)
Fig. 8 is the amplification view of the adsorbent pad 36 that has of maintaining part 32,34.Adsorbent pad 36 is resin or rubber system, is the annular component with the central opening portion 78 being connected with attraction path 76.Adsorbent pad 36 is adsorbed in the edge of the lower surface of glass substrate G, thereby glass substrate G is held in substrate manipulator for conveying 10 reliably.
There is strain because of the weight of glass substrate G in the adsorbent pad 36 shown in Fig. 8.Due to the strain of adsorbent pad 36, glass substrate G is kept by the state with deflection, and glass substrate G can be damaged because of this deflection sometimes.
This bad in order to prevent, amplification profile is as shown in Figure 9 A such, and the cylindrical body around adsorbent pad 36 80 is disposed to maintaining part 32,34.If adsorbent pad 36 is pressed and strain occurs by glass substrate G in the time that absorption keeps glass substrate G, the edge of the lower surface of glass substrate G is connected to the ring-type upper surface 82 of cylindrical body 80.Thus, as shown in Figure 9 B, the edge of the lower surface of glass substrate G is held in substrate manipulator for conveying 10 with the state, the state that has suppressed deflection of the ring-type upper surface 82 of pressing and be connected to the cylindrical body 80 with rigidity, therefore can prevent the breakage causing because of deflection.
(structure of substrate manipulator for conveying 100)
Figure 10 is the top view of the substrate manipulator for conveying 100 of the 2nd embodiment, Figure 11 is the side view of substrate manipulator for conveying 100, to marking identical Reference numeral with the same or similar member of substrate manipulator for conveying 10 of the 1st embodiment, the description thereof will be omitted.
As shown in Figure 10, Figure 11, substrate manipulator for conveying 100 has the abutting member 102 for connecting with the lower surface of glass substrate G1.This abutting member 102 comprises: arm member 104, and the manipulator that its base end part cantilever support has in drive division 22 is installed the lower surface with plate 12; And 2 resilient keys (pin-shaped member) 106,106, they are located near the top of arm member 104 and for connecting with the lower surface of glass substrate G1.
The above-mentioned base end part of the arm member 104 extending out from drive division 22 is fixed on manipulator installs the longitudinally central portion with plate 12, and be arranged in parallel with supporting member for substrate 18,20.In addition, as shown in figure 11, arm member 104 is disposed at than supporting member for substrate 20(18,24,26) on the lower with aforesaid substrate supporting member 20(18,24,26) apart from the position of ormal weight.
Figure 12 A, Figure 12 B represent to make the cylinder (Lift Part) 108 of resilient key 106 with respect to the upper surface lifting moving of arm member 104.That is, Figure 12 A represents that the piston 110 of cylinder 108 is positioned at the state of down position by cylinder body 112, and Figure 12 B represents that the piston 110 of cylinder 108 is positioned at the state of lifting position by cylinder body 112.
(being carried the carrying method of glass substrate by substrate manipulator for conveying 100)
Figure 13 A～Figure 13 F represents to utilize substrate manipulator for conveying 100 to keep and carries in coated portion 60 to be coated with resin liquid 70(with reference to Fig. 6 A) the step of glass substrate G1.
Figure 13 A is the lifter pin 68,68 that makes coated portion 60 ... rise and make glass substrate G1 be positioned at the side view of the top position (receiving position) of substrate-placing platform 66.
Figure 13 B utilizes horizontal articulated robot 14 to make substrate manipulator for conveying 100 move to the side view of the receiving position of glass substrate G1.As shown in the drawing, supporting member for substrate 20(18,24,26) in the standby of the top position of glass substrate G1.In addition, the arm member 104 of abutting member 102 not with the lifter pin 68,68 of coated portion 60 ... insert interferingly the lower position of the lower surface that is disposed at glass substrate G1.In addition, in the time that arm member 104 carries out above-mentioned insertion, resilient key 106,106 do not conflict with the lower surface of glass substrate G1 in the down position standby shown in Figure 12 A.
Figure 13 C is the side view of following state: from the state of Figure 13 B, utilize horizontal articulated robot 14 to make supporting member for substrate 20(18,24,26) decline mobile after, utilize drive division 22(with reference to Fig. 1) make supporting member for substrate 20(18,24,26) to direction close to each other move and by maintaining part 32(34) edge that keeps the lower surface of glass substrate G1.
Figure 13 D utilizes cylinder 108(with reference to Figure 12 from the state of Figure 13 C) make resilient key 106,106 increase and be connected to the side view of the lower surface of glass substrate G1.; utilize maintaining part 32(34) after the edge of the lower surface of supporting glass substrate G1; make resilient key 106,106 increase and by the lower surface of resilient key 106,106 supporting glass substrate G1, therefore can prevent the damage of the glass substrate G1 causing because of above-mentioned conflict.In addition, also can under the prerequisite that does not make resilient key 106 liftings, utilize the lower surface of resilient key 106 supporting glass substrate G1, but consider preferably to carry out lifting action from the viewpoint of avoiding above-mentioned conflict.
Figure 13 E is the side view that utilizes horizontal articulated robot 14 to make substrate manipulator for conveying 100 increase after moving from the state of Figure 13 D.Thus, glass substrate G1 leaves lifter pin 68,68 ..., the edge maintained portion 32(34 of its lower surface) and supporting, and supported by resilient key 106,106 near its lower surface central portion.
Figure 13 F makes lifter pin 68,68 from the state of Figure 13 E ... decline mobile and utilize horizontal articulated robot 14 to make the side view after substrate manipulator for conveying 100 moves linearly in the horizontal direction.Afterwards, glass substrate G1 is delivered to drying section 62 as shown in Figure 7 by horizontal articulated robot 14.
Therefore, employing has the substrate manipulator for conveying 100 near the abutting member 102 lower surface central portion of supporting glass substrate G1, even size also can suppress the deflection of glass substrate G1 and glass substrate G1 is stably delivered to drying section 62 from coated portion 60 compared with the situation of large glass substrate G1.
Figure 14 A～Figure 14 E represents the glass substrate G1 that is delivered to drying section 62 to load the steady pin 74,74 in drying section 62 ... on step.
Figure 14 A utilizes horizontal articulated robot 14 to make glass substrate G1 move to the side view of the delivery position of drying section 62.As shown in the drawing, the arm member 104 of the abutting member 102 of substrate manipulator for conveying 100 not with the steady pin 74,74 of drying section 62 ... insert interferingly the top that is disposed at oven frame 72.
Figure 14 B utilizes horizontal articulated robot 14 to make supporting member for substrate 20(18,24,26 from the state of Figure 14 A) decline mobile and make the pin 74,74 that is fixed of glass substrate G1 ... the side view of supporting.
Figure 14 C utilizes cylinder 108(with reference to Figure 12 from the state of Figure 14 B) resilient key 106,106 is declined and side view from the lower surface of glass substrate G1 is kept out of the way.
Figure 14 D is the side view of following state: from the state of Figure 14 C, utilize drive division 22(with reference to Fig. 1) make supporting member for substrate 20(18,24,26) to mutually away from direction move after, utilize horizontal articulated robot 14 to make supporting member for substrate 20(18,24,26) rise mobile.Thus, the glass substrate G1 pin 74,74 that is fixed ... supporting.
Figure 14 E is the side view of following state: from the state of Figure 14 D, utilize arm member 104 that horizontal articulated robot 14 makes abutting member 102 not with steady pin 74,74 ... linearly slip is moved in the horizontal direction interferingly.Afterwards, substrate manipulator for conveying 100 is moved to the coated portion 60 shown in Figure 13 A by horizontal articulated robot 14.
And, in the above-described embodiment, utilize cylinder 108 to make resilient key 106 lifting moving, but be not limited to this.For example, as shown in Figure 15 A, Figure 15 B, also can resilient key 106 be fixed on to arm member 104 with pin 116 by fixing, and the mode of utilizing lowering or hoisting gear (Lift Part) 118 free liftings with arm member 104 is arranged at by arm member 104 manipulator that drive division 22 had use plate 12 is installed., arm member 104 also can be set to utilize lowering or hoisting gear 118 with respect to drive division 22 free liftings.As lowering or hoisting gear 118, can illustrate LM guiding (registration mark) and feed screw device.In addition, the lifting action of the resilient key 106 that the lifting action of the arm member 104 carrying out due to lowering or hoisting gear 118 carries out with cylinder 108 opportunity is identical opportunity, and therefore at this, the description thereof will be omitted.
Above one embodiment of the present invention is illustrated, but the invention is not restricted to above-mentioned embodiment.Without departing from the scope of the invention, can apply various distortion and displacement to above-mentioned embodiment.
The application is the application of the Japanese Patent application 2012-249179 based on application on November 13rd, 2012, and its content is introduced to this description as reference.
utilizability in industry
In embodiment, exemplified with glass substrate, but also can use the substrate manipulator for conveying 10,100 of embodiment for the plate body of metal system, resin etc. beyond glass substrate as the conveying object of substrate manipulator for conveying 10,100.
For the glass substrate of the object conveyor as the 1st substrate manipulator for conveying 10, consider the breakage of the glass substrate too much causing because of deflection, thickness is preferably more than 0.5mm.In addition, the size of the glass substrate in this situation preferably length be in length and breadth 500mm × 1500mm.
For the glass substrate of the object conveyor as the 2nd substrate manipulator for conveying 100, owing to utilizing abutting member 102 to suppress the deflection of glass substrate, even therefore thickness is less than such as 0.2mm of 0.5mm() glass substrate also can carry it.In addition, in this case, even exceeding the glass substrate of 2400mm × 2100mm, length in length and breadth also can carry it.
Claims (10)
1. a substrate manipulator for conveying, wherein,
This substrate manipulator for conveying comprises:
The 1st pair of supporting member for substrate, their configured in parallel;
Drive division, its for make above-mentioned the 1st pair of supporting member for substrate to direction close to each other and mutually away from direction parallel;
The 2nd pair of supporting member for substrate, they are configured in parallel in the direction vertical with the longitudinally of above-mentioned the 1st pair of supporting member for substrate;
Parallel rod member, it is for linking up above-mentioned the 1st pair of supporting member for substrate and above-mentioned the 2nd pair of supporting member for substrate, and parallel in above-mentioned direction close to each other of this parallel rod member and above-mentioned the 1st pair of supporting member for substrate interlock and make above-mentioned the 2nd pair of supporting member for substrate to direction parallel close to each other, and this parallel rod member and above-mentioned the 1st pair of supporting member for substrate above-mentioned mutually away from direction on parallel interlock and make above-mentioned the 2nd pair of supporting member for substrate to mutual away from direction parallel;
The 1st maintaining part, its longitudinally along above-mentioned the 1st pair of supporting member for substrate arranges multiple, and for keeping the edge of lower surface of substrate; And
The 2nd maintaining part, its longitudinally along above-mentioned the 2nd pair of supporting member for substrate arranges multiple, and for keeping the edge of lower surface of substrate.
2. substrate manipulator for conveying according to claim 1, wherein,
Above-mentioned drive division comprises:
Guiding elements, its make for guiding above-mentioned the 1st pair of supporting member for substrate above-mentioned the 1st pair of supporting member for substrate to direction close to each other and mutually away from direction move freely;
Drive source, its for make to above-mentioned the 1st pair of supporting member for substrate transferring power above-mentioned the 1st pair of supporting member for substrate to above-mentioned direction close to each other and above-mentioned mutually away from direction parallel; And
Supporting member, above-mentioned guiding elements and above-mentioned drive source are installed on this supporting member.
3. substrate manipulator for conveying according to claim 1 and 2, wherein,
Be linked with for making aforesaid substrate manipulator for conveying move to the transfer unit of delivery position from the receiving position of aforesaid substrate at above-mentioned drive division.
4. according to the substrate manipulator for conveying described in any one in claim 1～3, wherein
Be provided with in above-mentioned the 1st maintaining part and above-mentioned the 2nd maintaining part the adsorption element that keeps aforesaid substrate for adsorbing.
5. according to the substrate manipulator for conveying described in any one in claim 1～4, wherein,
Upper surface at aforesaid substrate is coated with resin liquid, and the edge of the lower surface of aforesaid substrate is kept by above-mentioned the 1st maintaining part and above-mentioned the 2nd maintaining part.
6. according to the substrate manipulator for conveying described in any one in claim 3～5, wherein,
Above-mentioned drive division be provided with for the abutting member of the lower surface butt of aforesaid substrate.
7. substrate manipulator for conveying according to claim 6, wherein,
Above-mentioned abutting member comprise the arm member that extends out from above-mentioned drive division and be located at above-mentioned arm member and for the pin-shaped member of the lower surface butt of aforesaid substrate.
8. substrate manipulator for conveying according to claim 7, wherein,
Above-mentioned pin-shaped member is to utilize Lift Part to be arranged at above-mentioned arm member with respect to the mode of above-mentioned arm member free lifting.
9. substrate manipulator for conveying according to claim 7, wherein,
Above-mentioned arm member is to utilize Lift Part to be arranged at above-mentioned drive division with respect to the mode of above-mentioned drive division free lifting.
10. a substrate carrying method, wherein,
Substrate manipulator for conveying in this substrate carrying method right to use requirement 3～9 described in any one is delivered to substrate the drying section of the above-mentioned resin drying for making the upper surface that is coated on aforesaid substrate from the coated portion of the upper surface application of resin at aforesaid substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-249179 | 2012-11-13 | ||
| JP2012249179A JP5978937B2 (en) | 2012-11-13 | 2012-11-13 | Substrate transfer hand and substrate transfer method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103802120A true CN103802120A (en) | 2014-05-21 |
| CN103802120B CN103802120B (en) | 2016-04-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310565625.8A Active CN103802120B (en) | 2012-11-13 | 2013-11-13 | Substrate manipulator for conveying and substrate carrying method |
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| JP (1) | JP5978937B2 (en) |
| KR (1) | KR102062096B1 (en) |
| CN (1) | CN103802120B (en) |
| TW (1) | TWI586497B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107611072A (en) * | 2017-07-27 | 2018-01-19 | 彩虹（合肥）液晶玻璃有限公司 | A kind of device and its method for turning for being used to overturn TFT-LCD glass substrates |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR102252776B1 (en) * | 2015-05-28 | 2021-05-17 | 현대중공업지주 주식회사 | Secondary transfer device of the robot |
| JP6607744B2 (en) * | 2015-09-04 | 2019-11-20 | リンテック株式会社 | Supply device and supply method |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI586497B (en) | 2017-06-11 |
| JP5978937B2 (en) | 2016-08-24 |
| KR20140061279A (en) | 2014-05-21 |
| JP2014099447A (en) | 2014-05-29 |
| KR102062096B1 (en) | 2020-01-03 |
| TW201424957A (en) | 2014-07-01 |
| CN103802120B (en) | 2016-04-27 |
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Address after: Tokyo, Japan, Japan Patentee after: AGC Corporation Address before: Tokyo, Japan, Japan Patentee before: Asahi Glass Co., Ltd. |