CN103802120B - Substrate manipulator for conveying and substrate carrying method - Google Patents
Substrate manipulator for conveying and substrate carrying method Download PDFInfo
- Publication number
- CN103802120B CN103802120B CN201310565625.8A CN201310565625A CN103802120B CN 103802120 B CN103802120 B CN 103802120B CN 201310565625 A CN201310565625 A CN 201310565625A CN 103802120 B CN103802120 B CN 103802120B
- Authority
- CN
- China
- Prior art keywords
- substrate
- mentioned
- supporting member
- pair
- manipulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
The present invention relates to substrate manipulator for conveying and substrate carrying method.This substrate manipulator for conveying comprises: the 1st pair of supporting member for substrate of configured in parallel; Drive division, make the 1st pair of supporting member for substrate in a direction close to each other and mutually away from direction move in parallel; The 2nd pair of supporting member for substrate of configured in parallel on the direction vertical with the longitudinally of the 1st pair of supporting member for substrate; Parallel rod component, links the 1st pair of supporting member for substrate and the 2nd pair of supporting member for substrate, and with the 1st pair of supporting member for substrate close/away from direction move in parallel link make the 2nd pair of supporting member for substrate to close/away from direction move in parallel; 1st maintaining part, the longitudinally along the 1st pair of supporting member for substrate arranges multiple, keeps the edge of the lower surface of substrate; With the 2nd maintaining part, the longitudinally along the 2nd pair of supporting member for substrate arranges multiple, keeps the edge of the lower surface of substrate.
Description
Technical field
The present invention relates to substrate manipulator for conveying and substrate carrying method.
Background technology
In patent document 1, disclose the edge on 4 limits of the lower surface for support glass substrate and carry the substrate manipulator for conveying of glass substrate.
Aforesaid substrate manipulator for conveying is installed on the manipulator installation portion of automatic conveying device by manipulator installation plate.In addition, the arm of substrate manipulator for conveying is formed by with the articulate many components of the mode of the size of parallel with respective edge near the outside of the edge of glass substrate and applicable glass substrate.Above-mentioned component has lightweight and high rigidization concurrently, is made up of the square tube material of hollow.In addition, above-mentioned component is provided with the substrate grasping portion of the edge of the lower surface for support glass substrate.
Patent document: Japanese Unexamined Patent Publication 11-254374 publication
Summary of the invention
the problem that invention will solve
But the arm of substrate manipulator for conveying disclosed in patent document 1, due to multiple component is joined together formation, therefore can not change size (what plotted by multiple component overlooks rectangular space).Therefore, the problem that the glass substrate of the size that the adsorbent pad process of patent document 1 can not be utilized different from the size that can support is such is produced.
In order to utilize the glass substrate that 1 stylobate plate manipulator for conveying process size is different, need to arrange multiple drive division, the multiple components forming arm support as can move freely by the plurality of drive division respectively, and each component is moved independently.But, if to each component be equipped with above-mentioned member supporting be move freely guiding elements, be provided with multiple drive division, so can produce substrate manipulator for conveying becomes heavy thing and in the such problem of maximizing.
The present invention makes in view of such situation, its object is to provide can change self size accordingly and small-sized and the substrate manipulator for conveying of light weight and substrate carrying method with the size of substrate.
for the scheme of dealing with problems
A technical scheme of the present invention in order to achieve the above object, provides a kind of substrate manipulator for conveying, and this substrate manipulator for conveying comprises: the 1st pair of supporting member for substrate, their configured in parallel; Drive division, its for make above-mentioned 1st pair of supporting member for substrate in a direction close to each other and mutually away from direction move in parallel; 2nd pair of supporting member for substrate, their configured in parallel on the direction vertical with the longitudinally of above-mentioned 1st pair of supporting member for substrate; Parallel rod component, it is for linking up above-mentioned 1st pair of supporting member for substrate and above-mentioned 2nd pair of supporting member for substrate, and this parallel rod component and above-mentioned 1st pair of supporting member for substrate moving in parallel on above-mentioned direction close to each other are linked and make above-mentioned 2nd pair of supporting member for substrate move in parallel in a direction close to each other, and this parallel rod component and above-mentioned 1st pair of supporting member for substrate above-mentioned mutually away from direction on move in parallel and link and above-mentioned 2nd pair of supporting member for substrate is moved in parallel in the direction away from each other; 1st maintaining part, its longitudinally along above-mentioned 1st pair of supporting member for substrate arranges multiple, and for keeping the edge of the lower surface of substrate; And the 2nd maintaining part, its longitudinally along above-mentioned 2nd pair of supporting member for substrate arranges multiple, and for keeping the edge of the lower surface of substrate.
Adopt a technical scheme of the present invention, when utilizing drive division to make the 1st pair of supporting member for substrate flatly move in parallel in a direction close to each other, the 2nd pair of supporting member for substrate flatly moves in parallel in linkage in a direction close to each other by parallel rod component and this action.With this action on the contrary, when utilizing drive division to make the 1st pair of supporting member for substrate flatly move in parallel in the direction away from each other, the 2nd pair of supporting member for substrate flatly moves in parallel in linkage in the direction away from each other by parallel rod component and this action.
Namely, adopt a technical scheme of the present invention, by the 1st pair of supporting member for substrate and the 2nd pair of coffin that supporting member for substrate plots size, namely till keeping the size of the coffin of substrate can play minimum dimension from full-size, carry out stepless changing.Therefore, adopt the substrate manipulator for conveying of a technical scheme of the present invention, the size of this substrate manipulator for conveying can be changed accordingly with the size of substrate.In addition, for drive division, due to 1 only need be arranged for driving the drive division of the 1st pair of supporting member for substrate, therefore, it is possible to provide small-sized and the substrate manipulator for conveying of light weight.
Substrate is the 1st maintaining part and the maintenance of the 2nd maintaining part of the substrate manipulator for conveying of the size of this substrate by adjusted.
Preferably, above-mentioned drive division comprises a technical scheme of the present invention: guiding elements, its make for guiding above-mentioned 1st pair of supporting member for substrate above-mentioned 1st pair of supporting member for substrate in a direction close to each other and mutually away from direction move freely; Drive source, its make for transmitting power to the above-mentioned 1st pair of supporting member for substrate above-mentioned 1st pair of supporting member for substrate to above-mentioned direction close to each other and above-mentioned mutually away from direction move in parallel; And supporting member, above-mentioned guiding elements and above-mentioned drive source are installed on this supporting member.
Adopt a technical scheme of the present invention, guiding elements and drive source are installed on the support members.Therefore, become such structure: the 1st pair of supporting member for substrate is installed on supporting member by guiding elements, the 2nd pair of supporting member for substrate by parallel rod member supporting in the 1st pair of supporting member for substrate.Thus can reduce owing to making the 1st pair of supporting member for substrate and the 2nd pair of supporting member for substrate with the material of light weight the weight load that supporting member bears, be therefore preferred.In addition, because the 1st pair of supporting member for substrate and the 2nd pair of supporting member for substrate are used for supporting substrates, therefore the 1st pair of supporting member for substrate and the 2nd pair of supporting member for substrate preferably make with the material with high rigidity.As material, can light weight be illustrated and the higher CFRP(carbonfiberreinforcedplastic of rigidity: carbon fibre reinforced plastic), aluminium alloy or titanium alloy.
Adopt a technical scheme of the present invention, when the power transmission in the future self-driven source is to the 1st pair of supporting member for substrate, the 1st pair of directed component of supporting member for substrate guide and in a direction close to each other and mutually away from direction move in parallel.Thus, the 1st pair of supporting member for substrate is relative to supporting member action swimmingly.
As guiding elements, preferred LM(LinearMotion: rectilinear motion) guide (registration mark), as drive source, preferred servo motor and feed screw component.Feed screw component comprises a pair nut portions and carves a pair screw rod being provided with opposite threads separately.The nut portions of the side in a pair nut portions is installed on the 1st supporting member for substrate of side, the nut portions of opposite side is installed on the 1st supporting member for substrate of opposite side.And, make the screw flight of side be matched with the nut portions of side, make the screw flight of opposite side be matched with the nut portions of opposite side.Thus, if utilize servo motor to make a pair screw rod rotate to forward direction and reverse directions, then utilize the feeding effect of feed screw component make the 1st pair of supporting member for substrate in a direction close to each other and mutually away from direction move in parallel.
A technical scheme of the present invention preferably, is linked with for making aforesaid substrate manipulator for conveying move to the transfer unit of delivery position from the receiving position of aforesaid substrate at above-mentioned drive division.
Adopt a technical scheme of the present invention, owing to being linked with transfer unit on the supporting member of substrate manipulator for conveying, therefore, it is possible to utilize transfer unit that substrate manipulator for conveying is moved to delivery position from the receiving position of substrate.As transfer unit, preferred SCARA(selectivecomplianceAssemblyRobotArm, compliance is selected to put together machines arm) the horizontal articulated robot such as robot.
A technical scheme of the present invention preferably, is provided with for adsorbing the adsorption element keeping aforesaid substrate in above-mentioned 1st maintaining part and above-mentioned 2nd maintaining part.
Adopt a technical scheme of the present invention, due to the edge that adsorption element can be utilized reliably to keep the lower surface of substrate, therefore, it is possible to stably conveying substrate.
A technical scheme of the present invention preferably, is coated with resin liquid at the upper surface of aforesaid substrate, and the edge of the lower surface of aforesaid substrate is kept by above-mentioned 1st maintaining part and above-mentioned 2nd maintaining part.
Adopt a technical scheme of the present invention, remain on owing to utilizing substrate manipulator for conveying the edge that upper surface is coated with the lower surface of the substrate of resin liquid, therefore, it is possible to not with above-mentioned resin liquid conveying substrate contiguously.
A technical scheme of the present invention preferably, is provided with the abutting member for abutting with the lower surface of aforesaid substrate at above-mentioned drive division.
Adopt a technical scheme of the present invention, make abutting member be connected to the lower surface of substrate and supporting substrates.By abutting member is arranged at substrate manipulator for conveying, even substrate with also can suppressing the flexure of the substrate conveying substrate that size is larger.From the flexure this point of substrate can be suppressed to consider, the abutted position that the lower surface of abutting member and substrate abuts against is the central portion of substrate, position near central portion or along the concentric circles centered by central portion is preferred.Above-mentioned central portion refers to the position of centre of gravity of substrate.
Preferably, above-mentioned abutting member comprises the arm member that extends out from above-mentioned drive division and is located at said arm component and pin-shaped member for abutting with the lower surface of aforesaid substrate a technical scheme of the present invention.
Adopt a technical scheme of the present invention, by arm member, the pin-shaped member being used for abutting against with the lower surface of substrate can be configured at abutted position.
Preferably, above-mentioned pin-shaped member is arranged at said arm component to utilize Lift Part relative to the mode that said arm component is freely elevated to a technical scheme of the present invention.
Adopt a technical scheme of the present invention, before utilizing the edge of the 1st maintaining part of substrate manipulator for conveying and the lower surface of the 2nd maintaining part supporting substrates, make pin-shaped member standby at down position in advance, pin-shaped member is not conflicted with the lower surface of substrate.Then, after utilizing the edge of the lower surface of the 1st maintaining part and the 2nd maintaining part supporting substrates, make pin-shaped member rise and utilize the lower surface of pin-shaped member supporting substrates.Thereby, it is possible to prevent the damage of the substrate caused because of above-mentioned conflict.
Preferably, said arm component is arranged at above-mentioned drive division to utilize Lift Part relative to the mode that above-mentioned drive division is freely elevated to a technical scheme of the present invention.
Adopt a technical scheme of the present invention, before the edge of the lower surface of the 1st maintaining part and the 2nd maintaining part supporting substrates that utilize substrate manipulator for conveying, make arm member standby at down position in advance, pin-shaped member is not conflicted with the lower surface of substrate.Then, after utilizing the edge of the lower surface of the 1st maintaining part and the 2nd maintaining part supporting substrates, make arm member rise and utilize the lower surface of pin-shaped member supporting substrates.Thereby, it is possible to prevent the damage of the substrate caused because of above-mentioned conflict.
A technical scheme of the present invention provides a kind of substrate carrying method, and this substrate carrying method uses substrate manipulator for conveying of the present invention by substrate from the drying section being used for being delivered in the coated portion of the upper surface application of resin of aforesaid substrate the above-mentioned resin drying of the upper surface for making to be coated on aforesaid substrate.
Adopt a technical scheme of the present invention, use 1 stylobate plate manipulator for conveying substrates different for size can be delivered to drying section from coated portion.
the effect of invention
As described above, adopt the present invention, can provide and can change self size accordingly and small-sized and the substrate manipulator for conveying of light weight and substrate carrying method with the size of substrate.
Accompanying drawing explanation
Fig. 1 is the top view of the substrate manipulator for conveying of the 1st embodiment.
Fig. 2 is the top view utilizing substrate manipulator for conveying to keep glass substrate.
Fig. 3 is the sectional view of the A-A line along Fig. 1 of drive division.
Fig. 4 is the top view of the substrate manipulator for conveying maintaining the glass substrate less than the glass substrate size shown in Fig. 1.
Fig. 5 is the top view of the substrate manipulator for conveying maintaining the glass substrate less than the glass substrate size shown in Fig. 4.
Fig. 6 A is the stereogram of the structure representing coated portion.
Fig. 6 B is the key diagram that substrate manipulator for conveying is positioned at the top position of the glass substrate after rising from substrate-placing platform.
Fig. 6 C is the key diagram utilizing substrate manipulator for conveying to keep glass substrate in coated portion.
Fig. 7 represents the key diagram making the glass substrate kept in coated portion move to the form of drying section.
Fig. 8 represents the amplification view of adsorbent pad to the action of glass substrate.
Fig. 9 A is the amplification view being configured with cylindrical body around the adsorbent pad of Fig. 8.
Fig. 9 B represents the amplification view of the adsorbent pad in Fig. 9 A to the action of glass substrate.
Figure 10 is the top view of the substrate manipulator for conveying of the 2nd embodiment.
Figure 11 is the side view of the substrate manipulator for conveying of the 2nd embodiment.
Figure 12 A utilizes cylinder to make resilient key be positioned at the key diagram of down position.
Figure 12 B utilizes cylinder to make resilient key be positioned at the key diagram of lifting position.
Figure 13 A makes the lifter pin of coated portion rise and make glass substrate be positioned at the side view of receiving position.
Figure 13 B is the side view making substrate manipulator for conveying move to the receiving position of glass substrate.
Figure 13 C is the side view utilizing the maintaining part of supporting member for substrate to keep the edge of the lower surface of glass substrate.
Figure 13 D makes resilient key rise and be connected to the side view of the lower surface of glass substrate.
Figure 13 E is the side view making substrate manipulator for conveying rising movement.
Figure 13 F is the side view making lifter pin decline mobile and make the movement in the horizontal direction of substrate manipulator for conveying.
Figure 14 A is the side view making glass substrate move to the delivery position of drying section.
Figure 14 B is the side view of the steady pin supporting in the dried portion of lower surface of glass substrate.
Figure 14 C is side view resilient key being declined and keeps out of the way from the lower surface of glass substrate.
Figure 14 D makes supporting member for substrate move in the direction away from each other and makes its side view after moving that rises.
Figure 14 E be make the arm member of abutting member in the horizontal direction linearly shape carry out sliding mobile after side view.
Figure 15 A is the side view that the arm member of abutting member is positioned at down position.
Figure 15 B is the side view that the arm member of abutting member is positioned at lifting position.
description of reference numerals
G, G1, G2, G3 ... glass substrate, 10 ... substrate manipulator for conveying, 12 ... manipulator installation plate, 14 ... horizontal articulated robot, 16 ... arm, 18, 20 ... supporting member for substrate, 22 ... drive division, 24, 26 ... supporting member for substrate, 28 ... parallel rod component, 30 ... connecting rod, 32, 34 ... maintaining part 36 ... adsorbent pad, 38 ... guiding elements, 40 ... drive source, 42 ... guide rail, 44 ... slide block, 46 ... servo motor, 48 ... screw rod, 50 ... nut, 52 ... belt wheel, 54 ... band, 56 ... belt wheel, 58 ... space, 60 ... coated portion, 62 ... drying section, 64 ... mould is coated with machine, 66 ... substrate-placing platform, 68 ... lifter pin, 70 ... resin liquid, 72 ... oven frame, 74 ... steady pin, 76 ... attract path, 78 ... central portion, 80 ... cylindrical body, 82 ... ring-type upper surface, 100 ... substrate manipulator for conveying, 102 ... abutting member, 104 ... arm member, 106 ... resilient key, 108 ... cylinder, 110 ... piston, 112 ... cylinder body, 114 ... opening portion, 116 ... fixing pin, 118 ... lowering or hoisting gear.
Detailed description of the invention
Below, with reference to the accompanying drawings the preferred embodiment of substrate manipulator for conveying of the present invention and substrate carrying method is described.
(structure of substrate manipulator for conveying 10)
Fig. 1 is the top view of the substrate manipulator for conveying 10 of the 1st embodiment, represents that the manipulator installation plate (supporting member) 12 of substrate manipulator for conveying 10 is installed on horizontal articulated robot (such as SCARA(SelectiveComplianceAssemblyRobotArm) robot of schematic diagram: transfer unit) form on the top of the arm 16 of 14.That is, manipulator installation plate 12 is linked to horizontal articulated robot 14 by arm 16.In addition, expression utilizes substrate manipulator for conveying 10 to keep the form of overlooking before rectangular glass substrate G1 in FIG.Fig. 2 is the top view utilizing substrate manipulator for conveying 10 to keep glass substrate G1.The surface (upper surface and lower surface) of glass substrate G1 remains horizontal direction by substrate manipulator for conveying 10.
Substrate manipulator for conveying 10 shown in Fig. 1, Fig. 2 comprises: a pair supporting member for substrate (the 1st pair of supporting member for substrate) 18,20, and they are in the horizontal direction relative to the throughput direction configured in parallel of glass substrate G1; Drive division 22, its for make a pair supporting member for substrate 18,20 in a direction close to each other and mutually away from direction move in parallel; A pair supporting member for substrate (the 2nd pair of supporting member for substrate) 24,26, their configured in parallel in the horizontal direction and on the direction vertical with the longitudinally of a pair supporting member for substrate 18,20.Supporting member for substrate 18,20 is tabular and the equal identical construct of length, and supporting member for substrate 24,26 is also like this.
In addition, substrate manipulator for conveying 10 has at supporting member for substrate 24,26 respective two ends the parallel rod component 28,28 supporting member for substrate 18,20 and supporting member for substrate 24,26 linked up ...This parallel rod component 28,28 ... there is following function: the moving in parallel and link and supporting member for substrate 24,26 is moved in parallel in a direction close to each other in a direction close to each other of they and supporting member for substrate 18,20, and with the moving in parallel and link and supporting member for substrate 24,26 is moved in parallel in the direction away from each other in the direction away from each other of supporting member for substrate 18,20.
Parallel rod component 28 has 2 connecting rods 30,30 of configured in parallel, and one end of 2 connecting rods 30,30 is linked to supporting member for substrate 18(supporting member for substrate 20 by bearing (not shown) in the mode of freely rotating in the horizontal direction).In addition, the other end of 2 connecting rods 30,30 is linked to supporting member for substrate 24(supporting member for substrate 26 by bearing (not shown) in the mode of freely rotating in the horizontal direction).Adopt this connecting structure, parallel rod component 28 has above-mentioned functions.
And substrate manipulator for conveying 10 comprises maintaining part (the 1st maintaining part) 32,32 ... with maintaining part (the 2nd maintaining part) 34,34 ...Maintaining part 32 is provided with multiple along the edge facing with supporting member for substrate 20 of supporting member for substrate 18 and the edge facing with supporting member for substrate 18 of supporting member for substrate 20 with being separated with predetermined distance, keeps the edge of the lower surface of glass substrate G1 as shown in Figure 2.As shown in Figure 1, maintaining part 34 is provided with multiple along the edge facing with supporting member for substrate 26 of supporting member for substrate 24 and the edge facing with supporting member for substrate 24 of supporting member for substrate 26 with being separated with predetermined distance, keeps the edge of the lower surface of glass substrate G1 as shown in Figure 2.In addition, from can stably carry this point of glass substrate G1 to consider, preferably, as shown in Figure 1, the adsorbent pad 36(adsorption element of vacuum is set in maintaining part 32,34), utilize adsorbent pad 36 to adsorb the edge of the lower surface keeping glass substrate G1.Set forth below about adsorbent pad 36.
Drive division 22 comprises: guiding elements 38,38, its make for guiding supporting member for substrate 18,20 supporting member for substrate 18,20 in a direction close to each other and mutually away from direction move freely; And drive source 40, its to supporting member for substrate 18,20 transmit power and make supporting member for substrate 18,20 to above-mentioned direction close to each other and above-mentioned mutually away from direction move in parallel.And guiding elements 38,38 and drive source 40 are equipped on manipulator installation plate 12 and form drive division 22.
Fig. 3 is the sectional view along the A-A line in Fig. 1, represents the structure of guiding elements 38.
As guiding elements 38, adopt LM(LinearMotion: rectilinear motion) guide (registration mark), comprise pair of guide rails 42,42 and be embedded in the slide block 44,44 of guide rail 42,42 in the mode be free to slide.Guide rail 42,42 is along the parallel upper surface being fixed on manipulator installation plate 12 of moving direction of supporting member for substrate 18,20, and it is also like this that slide block 44,44 is fixed on supporting member for substrate 18(supporting member for substrate 20) lower surface.
On the other hand, the drive source 40 shown in Fig. 1 comprises: servo motor 46, arranged coaxial and be carved with a pair screw rod 48,48 and the nut 50 shown in Fig. 3 of opposite threads respectively.In addition, as shown in Figure 1, drive source 40 comprises belt wheel 52, band 54 and the belt wheel 56 for the torque of servo motor 46 being transmitted to a pair screw rod 48,48.That is, belt wheel 52 is installed on the rotating shaft of servo motor 46, and belt wheel 56 is installed on the longitudinally central portion of a pair screw rod 48,48, and band 54 is set up in these belt wheels 52,56.
In addition, as shown in Figure 3, nut 50 to be fixed on supporting member for substrate 18(supporting member for substrate 20 also like this) the slide block 44 of lower surface and slide block 44 between pars intermedia.On this nut 50, threaded engagement has the screw rod 48 laid abreast with guide rail 42.That is, as the travel mechanism of the supporting member for substrate 18,20 driven by drive source 40, the feed screw component be made up of screw rod 48 and nut 50 is adopted.
Therefore, adopt drive division 22, if utilize servo motor 46 to make a pair screw rod 48,48 rotate to forward direction and reverse directions, then utilize carve separately the feeding effect be provided with between a pair screw rod 48,48 of opposite threads and nut 50,50 make supporting member for substrate 18,20 in a direction close to each other and mutually away from direction move in parallel.In addition, supporting member for substrate 18,20 is owing to being guided by guiding elements 38,38, and therefore supporting member for substrate 18,20 moves swimmingly relative to manipulator installation plate 12.
On the other hand, drive division 22 is such structures: supporting member for substrate 18,20 is by guiding elements 38,38 cantilever support in manipulator installation plate 12, and supporting member for substrate 24,26 is by parallel rod component 28,28 ... be supported on supporting member for substrate 18,20.
Thus, owing to can reduce the weight load that manipulator installation plate 12 bears with the material of light weight making supporting member for substrate 18,20,24,26, be therefore preferred.In addition, because supporting member for substrate 18,20,24,26 is for support glass substrate G1, therefore supporting member for substrate 18,20,24,26 preferably makes with the material with high rigidity.According to above-mentioned viewpoint, supporting member for substrate 18,20,24,26 is preferably light weight and the higher CFRP(carbonfiberreinforcedplastic of rigidity: carbon fibre reinforced plastic) system, aluminum alloy or titanium alloys.
Next, be described with the effect of the substrate manipulator for conveying 10 of above-mentioned such the 1st embodiment formed.
(elemental motion of substrate manipulator for conveying 10)
When utilizing drive division 22 to make supporting member for substrate 18,20 flatly move in parallel in a direction close to each other, supporting member for substrate 24,26 is by parallel rod component 28,28 ... flatly move in parallel in a direction close to each other in linkage with this action.With this action on the contrary, when utilizing drive division 22 to make supporting member for substrate 18,20 flatly move in parallel in the direction away from each other, supporting member for substrate 24,26 is by parallel rod component 28,28 ... flatly move in parallel in the direction away from each other in linkage with this action.
(the maintenance actions of substrate manipulator for conveying 10 couples of glass substrate G1)
First, as shown in Figure 1, drive division 22 is utilized to expand the interval of supporting member for substrate 18,20 to greatest extent.That is, the rectangular space 58 of overlooking plotted by supporting member for substrate 18,20,24,26 is extended to full-size, utilizes horizontal articulated robot 14 to make substrate manipulator for conveying 10 move glass substrate G1 is entered in this space 58.In addition, the drive division 22 with manipulator installation plate 12 is connected with horizontal articulated robot 14 by arm 16.
Next, utilize drive division 22 that supporting member for substrate 18,20 is flatly moved in parallel in a direction close to each other, and then supporting member for substrate 24,26 is flatly moved in parallel in a direction close to each other.Thus, as shown in Figure 2, all maintaining parts 32,32 ..., 34,34 ... enter the edge of the lower surface of glass substrate G1, the edge of lower surface is by maintaining part 32,32 ..., 34,34 ... supporting.By this action, glass substrate G1 is kept by substrate manipulator for conveying 10.In addition, servo motor 46 is utilized to control the amount of movement of supporting member for substrate 18,20 to make this amount of movement corresponding with the size of glass substrate G1.
For the substrate manipulator for conveying 10 of the 1st embodiment, the size in the space 58 plotted by supporting member for substrate 18,20,24,26 can carry out stepless changing till playing minimum dimension (not shown) from the full-size shown in Fig. 1.
Therefore, adopt substrate manipulator for conveying 10, the size of substrate manipulator for conveying 10 can be changed accordingly with the size of glass substrate.That is, as shown in Figure 4, substrate manipulator for conveying 10 also can keep than glass substrate G1(with reference to Fig. 1, Fig. 2) glass substrate G2 that size is little, as shown in Figure 5, substrate manipulator for conveying 10 also can keep than glass substrate G2(with reference to Fig. 4) glass substrate G3 that size is little.In addition, drive division 22 need due to substrate manipulator for conveying 10 have 1 for driving the drive division of supporting member for substrate 18,20, therefore become small-sized and the substrate manipulator for conveying 10 of light weight.
(being carried the carrying method of glass substrate by substrate manipulator for conveying 10)
Fig. 6 A, Fig. 6 B, Fig. 6 C represent and utilize substrate manipulator for conveying 10 to keep the form of glass substrate G at coated portion (receiving position of substrate) 60 places of resin liquid.Fig. 7 represents the form utilizing the horizontal articulated robot 14 of Fig. 1 the glass substrate G kept in coated portion 60 to be delivered to drying section (delivery position of substrate) 62.
As shown in Figure 6A, coated portion 60 comprises mould painting machine 64 and substrate-placing platform 66.In addition, as shown in Fig. 6 B, Fig. 6 C, substrate-placing platform 66 is provided with many lifter pins 68,68 ..., these many lifter pins 68,68 ... can the outstanding and retraction relative to the upper surface of substrate-placing platform 66.
In the coated portion 60 of Fig. 6 A, glass substrate G is placed in substrate-placing platform 66, utilizes mould to be coated with the upper surface application of resin liquid 70 of machine 64 at glass substrate G.When the coating of resin liquid 70 is complete, mould is coated with machine 64 and retreats to position, side from the top position of substrate-placing platform 66, and as shown in Figure 6B, lifter pin 68,68 ... give prominence to from the upper surface of substrate-placing platform 66.Thus, lifter pin 68,68 is utilized ... head on the lower surface of glass substrate G and make glass substrate G increase from substrate-placing platform 66.Afterwards, as shown in Figure 6B, the substrate manipulator for conveying 10 utilizing the horizontal articulated robot 14 of Fig. 1 to move is positioned at the top position of glass substrate G.Afterwards, substrate manipulator for conveying 10 declines and moves to the position that can keep glass substrate G, and afterwards, the drive division 22 of substrate manipulator for conveying 10 is driven, and glass substrate G is kept by substrate manipulator for conveying 10 as Fig. 6 C.
The glass substrate G kept by substrate manipulator for conveying 10 is delivered to the drying section 62 of Fig. 7 by horizontal articulated robot 14 and is placed in the many steady pins 74,74 of the upper surface of the projecting oven frame 72 at drying section 62 ...Afterwards, utilize drive division 22 that the supporting member for substrate 18,20 of substrate manipulator for conveying 10 is moved in the direction away from each other.Thus, the maintenance of substrate manipulator for conveying 10 couples of glass substrate G is removed.Afterwards, horizontal articulated robot 14 is utilized to make substrate manipulator for conveying 10 move to the neighbouring position of the coated portion 60 of Fig. 6 A, standby until keep the action of ensuing glass substrate G to start in this position.
Adopt the carrying method of above-mentioned glass substrate G, due to the maintaining part 32,32 by substrate manipulator for conveying 10 ..., 34,34 ... keep edge upper surface being coated with the lower surface of the glass substrate G of resin liquid 70, therefore, it is possible to contiguously glass substrate G is not delivered to drying section 62 from coated portion 60 with resin liquid 70.In addition, 1 stylobate plate manipulator for conveying 10 is used glass substrates different for size can be delivered to drying section 62 from coated portion 60.In addition, the shape of the lifter pin 68 shown in Fig. 6 C and the steady pin shown in Fig. 7 74 is not limited to cylindric, the cone shape of also can be upper end be tip shape.
(form of adsorbent pad 36)
Fig. 8 is the amplification view of the adsorbent pad 36 that maintaining part 32,34 has.Adsorbent pad 36 is resin-made or rubber system, is to have the annular component with the central portion 78 attracting path 76 to be connected.Adsorbent pad 36 is adsorbed in the edge of the lower surface of glass substrate G, thus glass substrate G is reliably held in substrate manipulator for conveying 10.
Elastic deformation is there is in the adsorbent pad 36 shown in Fig. 8 because of the weight of glass substrate G.Due to the elastic deformation of adsorbent pad 36, glass substrate G is kept by with the state of flexure, and glass substrate G can be damaged because of this flexure sometimes.
This bad in order to prevent, amplification profile is as shown in Figure 9 A such, and the cylindrical body 80 around adsorbent pad 36 is configured at maintaining part 32,34.If adsorbent pad 36 is pressed by glass substrate G when adsorbing and keeping glass substrate G and elastic deformation occurs, then the edge of the lower surface of glass substrate G is connected to the ring-type upper surface 82 of cylindrical body 80.Thus, as shown in Figure 9 B, the edge of the lower surface of glass substrate G with press and be connected to the ring-type upper surface 82 of the cylindrical body 80 with rigidity state, namely inhibit the state of flexure to be held in substrate manipulator for conveying 10, therefore, it is possible to prevent because bending the breakage caused.
(structure of substrate manipulator for conveying 100)
Figure 10 is the top view of the substrate manipulator for conveying 100 of the 2nd embodiment, Figure 11 is the side view of substrate manipulator for conveying 100, mark identical Reference numeral to the same or similar component of substrate manipulator for conveying 10 of the 1st embodiment, the description thereof will be omitted.
As shown in Figure 10, Figure 11, substrate manipulator for conveying 100 has the abutting member 102 for abutting against with the lower surface of glass substrate G1.This abutting member 102 comprises: arm member 104, the lower surface of the manipulator installation plate 12 that its base end part cantilever support has in drive division 22; And 2 resilient keys (pin-shaped member) 106,106, near the top that they are located at arm member 104 and for abutting against with the lower surface of glass substrate G1.
The above-mentioned base end part of the arm member 104 extended out from drive division 22 is fixed on the longitudinally central portion of manipulator installation plate 12, and be arranged in parallel with supporting member for substrate 18,20.In addition, as shown in figure 11, arm member 104 is configured at than supporting member for substrate 20(18,24,26) on the lower with aforesaid substrate supporting member 20(18,24,26) distance ormal weight position.
Resilient key 106 is rubber system or resin-made, is the component that elasticity is connected to the lower surface of glass substrate G1.In addition, the abutted position that the lower surface of resilient key 106,106 and glass substrate G1 abuts against is near the central portion of glass substrate G1, central portion or along the position of concentric circles centered by central portion, is preferred from suppressing this some consideration of flexure of glass substrate G1.Above-mentioned central portion refers to the position of centre of gravity of glass substrate G1, and the resilient key 106,106 of Figure 10, Figure 11 is the example being configured near above-mentioned central portion or being configured to the concentric circles centered by above-mentioned central portion.In addition, the radical of resilient key 106 is not limited to 2, also can be more than 1 or 3.Abutting member 102 has arm member 104, thus resilient key 106,106 can be made to be configured at the position of the expectation on the longitudinally of arm member 104.
Figure 12 A, Figure 12 B represent the cylinder (Lift Part) 108 of the upper surface lifting moving making resilient key 106 relative to arm member 104.That is, Figure 12 A represents that the piston 110 of cylinder 108 is positioned at the state of down position by cylinder body 112, and Figure 12 B represents that the piston 110 of cylinder 108 is positioned at the state of lifting position by cylinder body 112.
Arm member 104 is configured to the tubulose of hollow, inserts be configured with cylinder body 112 in its opening portion 114.
(being carried the carrying method of glass substrate by substrate manipulator for conveying 100)
Figure 13 A ~ Figure 13 F represent to utilize substrate manipulator for conveying 100 to keep and carry to be coated with resin liquid 70(in coated portion 60 with reference to Fig. 6 A) the step of glass substrate G1.
Figure 13 A is the lifter pin 68,68 making coated portion 60 ... rise and make glass substrate G1 be positioned at the side view of the top position (receiving position) of substrate-placing platform 66.
Figure 13 B utilizes horizontal articulated robot 14 to make substrate manipulator for conveying 100 move to the side view of the receiving position of glass substrate G1.As shown in the drawing, supporting member for substrate 20(18,24,26) standby in the top position of glass substrate G1.In addition, the arm member 104 of abutting member 102 not with the lifter pin 68,68 of coated portion 60 ... insert the lower position being configured at the lower surface of glass substrate G1 interferingly.In addition, when arm member 104 carries out above-mentioned insertion, resilient key 106,106 do not conflict with the lower surface of glass substrate G1 the down position shown in Figure 12 A standby.
Figure 13 C is the side view of following state: from the state of Figure 13 B, utilize horizontal articulated robot 14 to make supporting member for substrate 20(18,24,26) decline mobile after, utilize drive division 22(with reference to Fig. 1) make supporting member for substrate 20(18,24,26) move in a direction close to each other and by maintaining part 32(34) keep the edge of the lower surface of glass substrate G1.
Figure 13 D utilizes cylinder 108(with reference to Figure 12 from the state of Figure 13 C) make resilient key 106,106 rise and be connected to the side view of the lower surface of glass substrate G1.Namely, utilize maintaining part 32(34) after the edge of the lower surface of support glass substrate G1, resilient key 106,106 is made to increase and by the lower surface of resilient key 106,106 support glass substrate G1, therefore, it is possible to prevent the damage of the glass substrate G1 caused because of above-mentioned conflict.In addition, the lower surface of resilient key 106 support glass substrate G1 also can be utilized under the prerequisite not making resilient key 106 be elevated, but from the viewpoint of avoiding above-mentioned conflict preferably to carry out lifting action.
Figure 13 E is the side view after utilizing horizontal articulated robot 14 to make substrate manipulator for conveying 100 rising mobile from the state of Figure 13 D.Thus, glass substrate G1 leaves lifter pin 68,68 ..., the edge maintained portion 32(34 of its lower surface) and supporting, and supported by resilient key 106,106 near its lower surface central portion.
Figure 13 F makes lifter pin 68,68 from the state of Figure 13 E ... decline mobile and after utilizing horizontal articulated robot 14 that substrate manipulator for conveying 100 is moved linearly in the horizontal direction side view.Afterwards, glass substrate G1 is delivered to drying section 62 as shown in Figure 7 by horizontal articulated robot 14.
Therefore, the situation of the larger glass substrate G1 of size adopts the substrate manipulator for conveying 100 with abutting member 102 near for the lower surface central portion of support glass substrate G1, even also can suppress the flexure of glass substrate G1 and glass substrate G1 is stably delivered to drying section 62 from coated portion 60.
Figure 14 A ~ Figure 14 E represents the steady pin 74, the 74 glass substrate G1 being delivered to drying section 62 being placed in drying section 62 ... on step.
Figure 14 A utilizes horizontal articulated robot 14 to make glass substrate G1 move to the side view of the delivery position of drying section 62.As shown in the drawing, the arm member 104 of the abutting member 102 of substrate manipulator for conveying 100 not with the steady pin 74,74 of drying section 62 ... insert the top being configured at oven frame 72 interferingly.
Figure 14 B utilizes horizontal articulated robot 14 to make supporting member for substrate 20(18,24,26 from the state of Figure 14 A) decline mobile and make the pin 74,74 that is fixed of glass substrate G1 ... the side view of supporting.
Figure 14 C utilizes cylinder 108(with reference to Figure 12 from the state of Figure 14 B) resilient key 106,106 is declined and side view after keeping out of the way from the lower surface of glass substrate G1.
Figure 14 D is the side view of following state: from the state of Figure 14 C, utilize drive division 22(with reference to Fig. 1) make supporting member for substrate 20(18,24,26) mobile in the direction away from each other after, utilize horizontal articulated robot 14 to make supporting member for substrate 20(18,24,26) rise mobile.Thus, glass substrate G1 is fixed pin 74,74 ... supporting.
Figure 14 E is the side view of following state: from the state of Figure 14 D, the arm member 104 utilizing horizontal articulated robot 14 to make abutting member 102 not with steady pin 74,74 ... linearly slip is mobile in the horizontal direction interferingly.Afterwards, substrate manipulator for conveying 100 is moved to the coated portion 60 shown in Figure 13 A by horizontal articulated robot 14.
And, in the above-described embodiment, utilize cylinder 108 to make resilient key 106 lifting moving, but be not limited to this.Such as, as shown in Figure 15 A, Figure 15 B, also by fixing pin 116, resilient key 106 can be fixed on arm member 104, and arm member 104 is arranged at the manipulator installation plate 12 that drive division 22 has by the mode utilizing lowering or hoisting gear (Lift Part) 118 to be freely elevated with arm member 104.That is, arm member 104 also can be set to utilize lowering or hoisting gear 118 to be freely elevated relative to drive division 22.As lowering or hoisting gear 118, LM can be illustrated and guide (registration mark) and feed screw device.In addition, the lifting action of the resilient key 106 that the lifting action of the arm member 104 carried out due to lowering or hoisting gear 118 carries out with cylinder 108 opportunity is identical for opportunity, and therefore at this, the description thereof will be omitted.
Above one embodiment of the present invention is illustrated, but the invention is not restricted to above-mentioned embodiment.Without departing from the scope of the invention, various distortion and displacement can be applied to above-mentioned embodiment.
The application is the application of the Japanese Patent application 2012-249179 based on application on November 13rd, 2012, and its content is introduced this description as reference.
utilizability in industry
In embodiments, as the conveying object of substrate manipulator for conveying 10,100 exemplified with glass substrate, but also can use the substrate manipulator for conveying 10,100 of embodiment for the plate body of the metal beyond glass substrate, resin-made etc.
For the glass substrate of the object conveyor as the 1st substrate manipulator for conveying 10, consider the breakage because deflecting across the glass substrate caused, thickness is more than 0.5mm preferably more.In addition, the size of the glass substrate in this situation preferably length is in length and breadth 500mm × 1500mm.
For the glass substrate of the object conveyor as the 2nd substrate manipulator for conveying 100, due to the flexure utilizing abutting member 102 to suppress glass substrate, even therefore thickness is less than 0.5mm(such as 0.2mm) glass substrate also can carry it.In addition, in this case, even length in length and breadth also can be carried it more than the glass substrate of 2400mm × 2100mm.
Claims (10)
1. a substrate manipulator for conveying, wherein,
This substrate manipulator for conveying comprises:
1st pair of supporting member for substrate, their configured in parallel;
Drive division, its for make above-mentioned 1st pair of supporting member for substrate in a direction close to each other and mutually away from direction move in parallel;
2nd pair of supporting member for substrate, their configured in parallel on the direction vertical with the longitudinally of above-mentioned 1st pair of supporting member for substrate;
Parallel rod component, it is for linking up above-mentioned 1st pair of supporting member for substrate and above-mentioned 2nd pair of supporting member for substrate, and this parallel rod component and above-mentioned 1st pair of supporting member for substrate moving in parallel on above-mentioned direction close to each other are linked and make above-mentioned 2nd pair of supporting member for substrate move in parallel in a direction close to each other, and this parallel rod component and above-mentioned 1st pair of supporting member for substrate above-mentioned mutually away from direction on move in parallel and link and above-mentioned 2nd pair of supporting member for substrate is moved in parallel in the direction away from each other;
1st maintaining part, its longitudinally along above-mentioned 1st pair of supporting member for substrate arranges multiple, and for keeping the edge of the lower surface of substrate; And
2nd maintaining part, its longitudinally along above-mentioned 2nd pair of supporting member for substrate arranges multiple, and for keeping the edge of the lower surface of substrate.
2. substrate manipulator for conveying according to claim 1, wherein,
Above-mentioned drive division comprises:
Guiding elements, its make for guiding above-mentioned 1st pair of supporting member for substrate above-mentioned 1st pair of supporting member for substrate in a direction close to each other and mutually away from direction move freely;
Drive source, its make for transmitting power to the above-mentioned 1st pair of supporting member for substrate above-mentioned 1st pair of supporting member for substrate to above-mentioned direction close to each other and above-mentioned mutually away from direction move in parallel; And
Supporting member, above-mentioned guiding elements and above-mentioned drive source are installed on this supporting member.
3. substrate manipulator for conveying according to claim 1 and 2, wherein,
Be linked with for making aforesaid substrate manipulator for conveying move to the transfer unit of delivery position from the receiving position of aforesaid substrate at above-mentioned drive division.
4. substrate manipulator for conveying according to claim 1 and 2, wherein
Be provided with for adsorbing the adsorption element keeping aforesaid substrate in above-mentioned 1st maintaining part and above-mentioned 2nd maintaining part.
5. substrate manipulator for conveying according to claim 1 and 2, wherein,
Be coated with resin liquid at the upper surface of aforesaid substrate, the edge of the lower surface of aforesaid substrate is kept by above-mentioned 1st maintaining part and above-mentioned 2nd maintaining part.
6. substrate manipulator for conveying according to claim 3, wherein,
The abutting member for abutting with the lower surface of aforesaid substrate is provided with at above-mentioned drive division.
7. substrate manipulator for conveying according to claim 6, wherein,
Above-mentioned abutting member comprises the arm member that extends out from above-mentioned drive division and is located at said arm component and pin-shaped member for abutting with the lower surface of aforesaid substrate.
8. substrate manipulator for conveying according to claim 7, wherein,
Above-mentioned pin-shaped member is arranged at said arm component to utilize Lift Part relative to the mode that said arm component is freely elevated.
9. substrate manipulator for conveying according to claim 7, wherein,
Said arm component is arranged at above-mentioned drive division to utilize Lift Part relative to the mode that above-mentioned drive division is freely elevated.
10. a substrate carrying method, wherein,
This substrate carrying method uses substrate manipulator for conveying according to any one of claim 3 ~ 9 by substrate from being used for the drying section being delivered to the above-mentioned resin drying of the upper surface for making to be coated on aforesaid substrate in the coated portion of the upper surface application of resin of aforesaid substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-249179 | 2012-11-13 | ||
| JP2012249179A JP5978937B2 (en) | 2012-11-13 | 2012-11-13 | Substrate transfer hand and substrate transfer method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103802120A CN103802120A (en) | 2014-05-21 |
| CN103802120B true CN103802120B (en) | 2016-04-27 |
Family
ID=50699744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310565625.8A Active CN103802120B (en) | 2012-11-13 | 2013-11-13 | Substrate manipulator for conveying and substrate carrying method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5978937B2 (en) |
| KR (1) | KR102062096B1 (en) |
| CN (1) | CN103802120B (en) |
| TW (1) | TWI586497B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102252776B1 (en) * | 2015-05-28 | 2021-05-17 | 현대중공업지주 주식회사 | Secondary transfer device of the robot |
| JP6607744B2 (en) * | 2015-09-04 | 2019-11-20 | リンテック株式会社 | Supply device and supply method |
| CN107611072A (en) * | 2017-07-27 | 2018-01-19 | 彩虹（合肥）液晶玻璃有限公司 | A kind of device and its method for turning for being used to overturn TFT-LCD glass substrates |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09199576A (en) * | 1996-01-12 | 1997-07-31 | Shinko Electric Co Ltd | Adjuster of pencil interval in pencil holder for holding pencils in semiconductor fabrication system |
| JPH1140939A (en) * | 1997-07-15 | 1999-02-12 | Toyota Motor Corp | Board transporting apparatus for flow soldering apparatus |
| JPH11254374A (en) * | 1998-03-10 | 1999-09-21 | Toray Ind Inc | Substrate carrying hand, substrate carrying method, and device and method for manufacturing color filter |
| US6642997B2 (en) * | 2000-06-26 | 2003-11-04 | Canon Kabushiki Kaisha | Substrate conveying system in exposure apparatus |
| CN1607169A (en) * | 2003-10-14 | 2005-04-20 | 三星电子株式会社 | Device for conveying liquid crystal display substrate |
| JP2010098126A (en) * | 2008-10-16 | 2010-04-30 | Tokyo Electron Ltd | Substrate transporting and processing apparatus |
| JP2010098125A (en) * | 2008-10-16 | 2010-04-30 | Tokyo Electron Ltd | Apparatus and method for transporting substrate |
| CN102157424A (en) * | 2010-01-21 | 2011-08-17 | 东京毅力科创株式会社 | Substrate conveying apparatus and substrate conveying method |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5815106Y2 (en) * | 1977-11-11 | 1983-03-26 | 松下電器産業株式会社 | Plate chuck device |
| JPH05100198A (en) * | 1991-10-08 | 1993-04-23 | Tokyo Electron Yamanashi Kk | Transporting arm |
| JPH0480121A (en) * | 1990-07-23 | 1992-03-13 | Sumitomo Heavy Ind Ltd | Chucking device |
| JP2935945B2 (en) * | 1993-06-15 | 1999-08-16 | ローム株式会社 | Clamping device for transfer mechanism of plate-like articles such as lead frames |
| JP3907745B2 (en) * | 1996-05-29 | 2007-04-18 | 大日本スクリーン製造株式会社 | Substrate transfer device |
| JP4770041B2 (en) * | 2001-03-26 | 2011-09-07 | 東レ株式会社 | Substrate transfer hand and color filter manufacturing equipment |
| JP4043029B2 (en) * | 2003-02-18 | 2008-02-06 | 東京エレクトロン株式会社 | Substrate transport apparatus and substrate processing apparatus |
| JP4490066B2 (en) * | 2003-09-18 | 2010-06-23 | 株式会社日本マイクロニクス | Display panel inspection device |
| JP2005191199A (en) * | 2003-12-25 | 2005-07-14 | Kyocera Corp | Arm and method for wafer conveyance |
| JP4791106B2 (en) * | 2005-08-30 | 2011-10-12 | オリンパス株式会社 | Stage equipment |
-
2012
- 2012-11-13 JP JP2012249179A patent/JP5978937B2/en active Active
-
2013
- 2013-11-13 KR KR1020130137374A patent/KR102062096B1/en active IP Right Grant
- 2013-11-13 TW TW102141328A patent/TWI586497B/en active
- 2013-11-13 CN CN201310565625.8A patent/CN103802120B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09199576A (en) * | 1996-01-12 | 1997-07-31 | Shinko Electric Co Ltd | Adjuster of pencil interval in pencil holder for holding pencils in semiconductor fabrication system |
| JPH1140939A (en) * | 1997-07-15 | 1999-02-12 | Toyota Motor Corp | Board transporting apparatus for flow soldering apparatus |
| JPH11254374A (en) * | 1998-03-10 | 1999-09-21 | Toray Ind Inc | Substrate carrying hand, substrate carrying method, and device and method for manufacturing color filter |
| US6642997B2 (en) * | 2000-06-26 | 2003-11-04 | Canon Kabushiki Kaisha | Substrate conveying system in exposure apparatus |
| CN1607169A (en) * | 2003-10-14 | 2005-04-20 | 三星电子株式会社 | Device for conveying liquid crystal display substrate |
| JP2010098126A (en) * | 2008-10-16 | 2010-04-30 | Tokyo Electron Ltd | Substrate transporting and processing apparatus |
| JP2010098125A (en) * | 2008-10-16 | 2010-04-30 | Tokyo Electron Ltd | Apparatus and method for transporting substrate |
| CN102157424A (en) * | 2010-01-21 | 2011-08-17 | 东京毅力科创株式会社 | Substrate conveying apparatus and substrate conveying method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI586497B (en) | 2017-06-11 |
| JP5978937B2 (en) | 2016-08-24 |
| KR20140061279A (en) | 2014-05-21 |
| JP2014099447A (en) | 2014-05-29 |
| KR102062096B1 (en) | 2020-01-03 |
| TW201424957A (en) | 2014-07-01 |
| CN103802120A (en) | 2014-05-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5259693B2 (en) | Workpiece transfer device | |
| CN102177003B (en) | Substrate transfer robot and system | |
| CN202296117U (en) | Conveying device with adjustable width | |
| CN103802120B (en) | Substrate manipulator for conveying and substrate carrying method | |
| CN103771113A (en) | Material conveying device | |
| CN108238427A (en) | Promote turnover device | |
| RU2355579C2 (en) | Conveyor for transportation of blanks in press | |
| CN109230399B (en) | Conveying device and conveying system | |
| CN205441968U (en) | Hand claw is got in support | |
| CN111300379A (en) | Servo transport guide rail assembly of truss | |
| CN104937708A (en) | End-effector device | |
| CN105151776A (en) | Mechanical arm | |
| JP3163939U (en) | Transport device | |
| CN211197811U (en) | Manipulator device and feeding machine | |
| CN110803533B (en) | Multi-joint robot destacking and packaging production line | |
| CN2866414Y (en) | Long-axis like components propulsion positioning mechanism | |
| KR100785606B1 (en) | Press panel automatic transportation device | |
| CN215046782U (en) | Building block transfer workbench | |
| JP6671119B2 (en) | Work transfer device | |
| CN109969728B (en) | High-efficiency material conveying method | |
| TWI509172B (en) | Transmission unit, variable pitch mechanism, variable distance device and its application equipment | |
| CN112047075A (en) | Lifting conveying device | |
| CN220316443U (en) | Jig circulating conveying mechanism | |
| JP5785289B2 (en) | Transport device | |
| CN219362426U (en) | Conveying and transferring device and conveying system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan, Japan Patentee after: AGC Corporation Address before: Tokyo, Japan, Japan Patentee before: Asahi Glass Co., Ltd. |