JP4490066B2 - Display panel inspection device - Google Patents

Description

  The present invention relates to an apparatus for inspecting a display panel such as a liquid crystal display panel.

  Definition of terms: In the present invention, one direction and the other direction in a plane parallel to the display panel received by the inspection apparatus are referred to as an X direction and a Y direction, respectively, and a direction orthogonal to the X direction and the Y direction (display The direction perpendicular to the panel is called the Z direction.

  In general, a device for inspecting a display panel uses a delivery position (panel set unit) for delivering the panel to the inspection device and an inspection stage for the purpose of preventing damage to the probe for energization and an inspection stage. The inspection position is provided separately, and an uninspected panel is transferred from the delivery position to the inspection position, and an inspected panel is conveyed from the inspection position to the delivery position.

  As one of this type of inspection apparatus, there is one that uses two transport mechanisms (carriers) to move the panel from the delivery position to the inspection position and vice versa (Patent Document 1).

Japanese Patent Laid-Open No. 11-14957

  In this inspection apparatus, each transport mechanism connects a pair of sliders moved in the Y direction in a state spaced from each other in the Y direction, and two holders are spaced from each slider in the X direction and on the other side. It arrange | positions in the state which protrudes toward a slider.

  In such a carrier, the gripping of the panel is carried out jointly by the holders of both sliders by moving both sliders in the direction of approaching each other. On the other hand, the release of the gripping is performed by moving both sliders away from each other and separating the holders of both sliders from the panel.

  However, in the conventional inspection apparatus, only a pair of opposed edges of the panel is gripped, so when inspecting a large panel, the panel is bent in the central region in the slider separation direction, and as a result, the panel May be impossible to transport or damage the panel.

  An object of the present invention is to enable a large panel to be stably conveyed without being damaged.

An inspection apparatus according to the present invention includes an inspection stage that receives a rectangular display panel, and a transport device that transports the display panel to the inspection stage. The transport device includes at least one carrier that transports the display panel while releasably supporting the display panel at both edges in the X direction and both edges in the Y direction. The carrier is supported at a distance in the X direction by a carrier base, a pair of support arms that are supported by the carrier base at a distance in the Y direction and extends in the X direction, and at least one support arm, A pair of X arms extending toward the other support arm, an X holder provided in each X arm to support the edge in the X direction of the display panel, and a counterpart supported by each support arm A Y arm extending toward the support arm, a Y holder provided on the Y arm to support the edge of the display panel in the Y direction, and the X arm relatively away from each other. An X moving mechanism for moving the Y arm, and a Y moving mechanism for moving the supporting arm relatively in a direction away from each other.

When the panel is supported at four edges corresponding to the four sides of the rectangle, the curvature of the panel in the X direction central region and the curvature of the panel in the Y direction central region are large in the Y direction edge. It is prevented to each other by the support and the support of the X-direction edge. As a result, a large panel can be stably conveyed without being damaged.

  The carrier abuts against a plurality of positions spaced in the Y direction at each edge in the X direction and a plurality of positions spaced in the X direction at each edge in the Y direction so that the panel can be released. And can be transported. By doing so, the support of the panel is stabilized.

The carrier is supported by the other support arm at an interval in the X direction, and extends to the one support arm, and another pair of X arms provided to each other pair of X arms. An X holder can be provided. By doing so, the support of the panel is further stabilized.

The one and other Y holders may be located between the pair of X arms and the other pair of X arms in the X direction, respectively.

Each of the pair of X holders and the other pair of X holders is spaced in the Y direction. The plurality of Y holders are provided in each Y arm at intervals in the X direction. By doing so, the support of the panel becomes more stable.

  One of the X moving mechanism and the Y moving mechanism may be supported by the other.

  One of the X movement mechanism and the Y movement mechanism includes a first drive source, a first pulley rotated by the first drive source, and the first pulley to the other of the Y direction and the X direction. A second pulley having an interval, and a belt hung on the first and second pulleys to which one of the X arm and the Y arm is connected, the X moving mechanism and the The other of the Y moving mechanisms is a second driving source and a ball screw rotated by the second driving source, extending in one of the Y direction and the X direction, and at two locations in one of the X direction and the Y direction. And a nut screwed into each screw portion and connected to the other of the X arm and the Y arm.

  The inspection apparatus further includes a panel set unit spaced from the inspection stage in the X direction, and the carrier delivers the display panel to the inspection stage and the panel set unit. Good. In addition, the transport device can include two of the carriers.

  The transport apparatus may further include a support base that supports the two carriers so as to be individually movable, and two carrier driving mechanisms that individually move the two carriers.

  1 to 3, the inspection device 10 is a lighting inspection device for a display panel 12 having a rectangular shape. In the illustrated example, the panel 12 includes a plurality of electrodes on each of three rectangular sides (two corresponding short sides and one long side). The electrodes provided on each side are spaced in the direction of the side (that is, the longitudinal direction of the side) and extend in a direction perpendicular to the side.

  The inspection apparatus 10 accommodates various devices for lighting inspection in a housing 14 made of a plurality of long members and a plurality of plate members. The upper part of the front surface of the inspection apparatus 10 is an inclined surface 16 that recedes toward the rear side as it goes upward. The plate-like member forming the inclined surface 16 acts as a plate-like main body base 18.

  In the illustrated example, in FIG. 1, the left-right direction is the X direction, and the diagonally up-down direction is the Y direction. The Z direction is a direction perpendicular to the panel 12 received obliquely by the inspection apparatus 10.

  The inspection device 10 includes a panel set unit that delivers the panel 12 to the inspection device 10 and an inspection unit that inspects the display panel 12. The main body base 18 is formed with rectangular openings 20 and 22 larger than the panel 12 at locations corresponding to the panel setting portion and the inspection portion, respectively.

  In the panel set portion, a delivery stage 24 that receives the panel 12 at an angle and two sets of pushers 26 that pre-align the received panel 12 are arranged. On the other hand, an inspection stage 28 (see FIG. 3) that receives the panel 12 at an angle and a probe device 30 that acts as an electrical connection device are disposed in the inspection section.

  In the delivery stage 24, a panel receiver 32 formed of a plurality of long members is assembled to the Z stage 34 so as to receive the panel 12 at an angle. The panel receiver 32 is moved in the Z direction by the Z stage 34 when the panel 12 is delivered.

  The pushers 26 spaced in the X direction are arranged on a long member extending in the X direction so as to be movable away from each other (X direction), and are moved in the X direction by a moving mechanism (not shown). On the other hand, the pushers 26 spaced in the Y direction are arranged on a long member extending in the Y direction so as to be movable away from each other (Y direction), and are moved in the Y direction by a moving mechanism (not shown). The

  The panel 12 is disposed between the pushers 26 in a state where the pushers 26 are separated from each other, and each pair of the pushers 26 is moved in the direction in which the pushers 26 come together to be moved with respect to the delivery stage 24 to be inspected. The device 10 is pre-aligned.

  The uninspected panel 12 is placed on the delivery stage 24 by hand or by a detachable robot, pre-aligned by the pusher 26 in the delivery stage 24, and then transported to the inspection stage 28 by the transport device 36 (see FIG. 1). Lighting inspection is performed in the inspection unit.

  In the illustrated example, the lighting inspection is a visual lighting inspection by an operator's visual observation, but may be an automatic lighting inspection using a video camera, an image processing apparatus, or the like (not shown).

  The inspected panel 12 is transported from the inspection stage 28 to the delivery stage 24 by the transport device 36, and then removed from the delivery stage 24 by a hand or a detachable robot and stored in a storage cassette.

  The inspection stage 28 has the panel suction surface opposed to the opening 22 so that the panel 12 is received obliquely upward by the panel suction surface of the chuck top 38.

  The chuck top 38 has a plurality of suction grooves on the panel suction surface for vacuum suction of the panel 12, and has a backlight unit for illuminating the panel 12 from the back side.

  The inspection stage 28 is a three-dimensional (X, Y, and Z) stage 40 that moves the panel 12 received obliquely upward in two directions X and Y parallel to the panel 12 and a Z direction perpendicular to the received panel 12. , 42 and 44, and a θ stage 46 that rotates angularly about an axis extending in the Z direction.

  The inspection stage 28 receives the panel 12 from the transfer device 36 with the chuck top 38 lowered, and raises the chuck top 38 when the panel 12 is inspected. The inspection stage 28 waits with the chuck top 38 lowered after the panel 12 is transferred to the transfer device 36.

  The probe device 30 includes four base members 48 individually corresponding to virtual rectangular sides, three probe units 50 individually arranged on the three base members 48, and a probe unit 50 for the electrodes of the panel 12. And a moving mechanism (not shown) for individually moving the three base members 48 along the corresponding side (that is, in the longitudinal direction of the side).

  Each base member 48 has a plate shape elongated in the longitudinal direction of the corresponding side, and is supported on the back side of the main body base 18 so that a part thereof is exposed to the opening 22. Adjacent base members 48 are spaced so as not to abut.

  The probe unit 50 is disposed on a pair of opposing base members 48 and one base member 48 adjacent to the base members 48. On the other hand, the moving mechanism is provided on another pair of opposing base members 48 and one base member 48 adjacent to those base members 48.

  The base member 48 not connected to the moving mechanism is supported and supported on the main body base 18 by a spacer (not shown) and a plurality of stoppers (not shown) such as bolts. .

  Each remaining base member 48 is attached to and supported by the main body base 18 so as to be movable in the longitudinal direction of the corresponding side by a guide mechanism (not shown) such as a linear guide.

  Each probe unit 50 includes a long plate-like probe base 52 attached to a corresponding base member 48 so as to extend in the longitudinal direction thereof, a plurality of probe blocks 54 disposed on the probe base 52, and a probe block 54. And a plurality of probes 56 arranged.

  The probe base 52 is firmly attached by a plurality of screw members (not shown) to the outer side of the edge that is the central side (that is, the tip side) of the rectangle among the edges in the width direction of the base member 48. .

  Each probe block 54 is firmly attached by a plurality of screw members (not shown) to the outside of the edge portion on the distal end side in the width direction of the probe base 52. Each probe 56 is attached to the lower surface of the distal end portion of the probe block 54 with appropriate means with the distal end side protruding forward.

  As each moving mechanism for the base member 48, a general mechanism including a motor attached to the main body base 18, a lead screw rotated by the motor, and a lead nut screwed to the lead screw can be used. .

  Each probe 56 is pressed against the electrode of the panel 12 by raising the chuck top 38 when the panel 12 conveyed to the inspection stage 28 is inspected. In that state, the panel 12 is energized through the electrodes.

  As shown in FIGS. 4 to 10, the transfer device 36 is disposed on the frame 60 attached to the back side of the main body base 18, movable in the X direction, and spaced in the X direction. A pair of carriers 62 and 64 and a pair of carrier moving mechanisms 66 and 68 for individually moving the carriers 62 and 64 in the X direction are provided.

  In the frame 60, four long members 70 are coupled in a rectangular shape, and two guide rails 72 and 74 are opposed to each other in the Y direction so that they extend in the X direction at intervals in the Y direction. It is attached to each of the long members.

  Guides 76 and 78 movably fitted to the guide rails 72 and 74 are attached to both ends of the carriers 62 and 64, respectively. For this reason, the carrier 62 is movably supported by the frame 60 via the guide rail 72 and the guide 76, and the carrier 64 is movably supported by the frame 60 via the guide rail 74 and the guide 78.

  As shown in FIGS. 6 to 8, one of the carriers 62 and 64 has a carrier base 80 extending in the Y direction at an interval in the Z direction, as shown in FIGS. 6 to 8, and a guide rail 72 (74) and a guide 76 (78). Thus, a pair of support arms 82 that are supported by the frame 60 so as to be movable in the X direction and extend in the X direction at intervals in the Y direction are arranged on the carrier base 80 so as to be movable in the Y direction.

  The guide 76 (78) is attached to the end of the carrier base 80. The carrier base 80 includes a guide rail 84 that extends parallel to the Y direction. A guide 86 movably fitted to the guide rail 84 is attached to one end of the support arm 82. Therefore, each support arm 82 is supported by the carrier base 80 in a cantilever shape.

  A pair of X arms 88 are assembled to each support arm 82 at intervals in the X direction, and a Y arm 90 is attached to each support arm 82. Both the X arm 88 and the Y arm 90 extend from the support arm 82 toward the center in the Y direction, and are supported by the support arm 82 in a cantilever shape.

  Each X arm 88 is assembled to each support arm 82 so as to be movable in a direction away from each other (X direction) with an interval in the X direction by appropriate coupling means 92 such as a linear guide.

  Each X arm 88 includes an X holder 94 at the tip. On the other hand, the Y arm 90 includes a pair of Y holders 96 at the distal end with an interval in the X direction. Both the X holder 94 and the Y holder 96 jointly support the panel 12 by contacting the edge of the panel 12 in the X direction and the edge of the panel 12 in the Y direction, respectively.

  Each of the X holder 94 and the Y holder 96 may be supported by holding the panel 12 between opposing holders, or supported by locking the panel 12 to a locking piece. Further, it may be supported by receiving the panel 12 on the receiving side.

  In each of the carrier moving mechanisms 66 and 68, a ball screw 100 extending in the X direction is rotatably supported by the frame 60, and a nut (not shown) that engages with the ball screw 100 is attached to the carrier base 80. The ball screw 100 is rotated by a carrier motor 104.

  The motors 104 and 104 of the carrier moving mechanisms 66 and 68 are rotated in synchronization with each other in opposite directions. Thereby, both the carriers 62 and 64 are individually moved from the delivery stage 24 to the inspection stage 28 or vice versa.

  In each arm, the Y arms 90 and 90 are first moved in the Y direction in synchronization by the Y moving mechanisms 108 and 108. Next, the X arms 88 and 88 are moved in synchronization with the X direction by the X moving mechanisms 106 and 106, respectively.

  Each X moving mechanism 106 includes an X drive source 110 that can be rotated reversely like a motor, a first pulley 112 that is rotated by the X drive source 110, and a second pulley that is spaced from the first pulley 112 in the X direction. Pulley 114 and an endless belt 116 hung on the first and second pulleys 112 and 114.

  The upper X arm 88 is attached to the upper portion of the endless belt 116, and the lower X arm 88 is attached to the lower portion of the endless belt 116. For this reason, both X arms 88 and 88 are moved in the opposite direction when the X drive source 110 is rotated in one direction, and are moved away from each other when the X drive source 110 is rotated in the other direction. Thereby, both X arms 88 and 88 hold and release the panel 12.

  The Y moving mechanism 108 includes a Y drive source 120 that can be rotated reversely like a motor, and screw portions 122a and 122b that are rotated around an axis extending in the Y direction by the Y drive source 120 and that are opposite to each other in two directions in the Y direction. A ball screw 122 and a nut 124 screwed into each of the screw portions 122a and 112b.

  In the illustrated example, the ball screw 122 has a threaded rod 122a and 122b coupled to each other by a coupling tool 122c, and is supported by the carrier base 80 so as to be rotatable about an axis extending in the Y direction. . Each nut 124 is attached to the support arm 82.

  Linear guides can be used as the guide rails 72, 74, 84 and the guides 76, 78 and 78, 86.

  In the inspection apparatus 10, while inspecting the panel at the inspection stage 28, the placement of the inspected panel on the delivery stage 24 by the carrier 62 (or 64), the removal of the inspected panel from the delivery stage 24, Arrangement of the uninspected panel 12 on the delivery stage 24, pre-alignment of the uninspected panel, and delivery of the uninspected panel to the carrier 62 (or 64) are performed.

  When the inspection is completed, an uninspected panel on the delivery stage 24 side is held by one carrier 62 (or 64), and an inspected panel on the inspection stage 28 side is held by the other carrier 64 (or 62). Are conveyed to the inspection stage 28 and the delivery stage 24, respectively.

  The uninspected and inspected panels are transported by the carriers 62 and 64 by rotating the carrier moving mechanisms 66 and 68 in opposite directions, respectively.

  The gripping of the panel 12 by the carriers 62 and 64 is performed by rotating the X drive sources 110 and 110 and the Y drive source 120 in one direction, and as shown in FIG. 9A, the X holders 94 and 94 and the Y holders 96 and 96. Is moved in the direction in which they are brought together, thereby allowing the holders 94, 94, 96, 96 to support the edge of the panel 12.

  The conveyance of the panel 12 by the carriers 62 and 64 is performed by moving the X holder 94 and the Y holder 96 at a plurality of positions spaced in the Y direction at each edge in the X direction and at a distance in the X direction at each edge in the Y direction. It is performed in a state where the panel 12 is releasably supported by being brought into contact with a plurality of locations. For this reason, the support of the panel 12 is stabilized.

  The panel 12 is released by rotating the X drive source 110, 110 and the Y drive source 120 in the other direction, and separating the X holder 94, 94 and the Y holder 96, 96 from each other as shown in FIG. It is done by moving to.

  When the panel 12 is supported at four edges corresponding to the four sides of the rectangle as in the inspection apparatus 10, even in the case of a large panel, the curve of the panel in the X direction central region and the Y direction central region The curvature of the panels is prevented from mutual by supporting the Y-direction edge and supporting the X-direction edge. As a result, a large panel can be stably conveyed without being damaged.

  Referring to FIG. 10, the holder 130 shown in FIG. 10A has an L-shaped holder piece 132 in which the L-shaped recess is on the panel support side and the X-arm is on the panel locking side. 88 or Y arm 90, a fall prevention piece 134 for preventing the panel 12 from dropping is provided on the panel locking side of the holder piece 132, and an elastic block 136 that contacts the panel 12 is provided with an L-shaped recess in the holder piece 132. It is attached to.

  In the holder 140 shown in FIG. 10B, the U-shaped holder piece 142 is attached to the X arm 88 or the Y arm 90 so that the U-shaped recess is on the panel support side, thereby preventing the panel 12 from falling. A pair of fall prevention pieces 144 are provided on the panel support side of the holder piece 142 at intervals in the Z direction, and an elastic block 146 that contacts the panel 12 is attached to the U-shaped recess of the holder piece 142.

  In the holder 150 shown in FIG. 10C, a cube-shaped holder piece 152 is attached to the X arm 88 or the Y arm 90, and an elastic block 156 that contacts the panel 12 is attached to the panel support side of the holder piece 142.

  The thickness dimension (dimension in the direction perpendicular to the paper surface) of the fall prevention pieces 134 and 144 is smaller than that of the holder pieces 132 and 142, respectively. The elastic blocks 136, 146, 156 are made of a rubber material such as urethane rubber. The holders 94 and 96 used in the embodiment shown in FIGS.

  The holders 130, 140, and 150 are all supported by bringing the edge of the panel 12 into contact with the elastic blocks 136, 146, and 156 and frictionally engaging the panel 12 with the elastic blocks 136, 146, and 156. To do. However, other types of holders may be used, such as a holder that supports the panel 12 by receiving it on the receiving piece.

  The transport device 36 may use one carrier 62 or 64. Further, in the case of an inspection apparatus in which the delivery stage 24 is arranged on both sides in the X direction with respect to the inspection stage 28, the panel is transported to one delivery stage and the inspection stage, and to the other delivery stage and the inspection stage. The conveyance apparatus provided with the carrier may be sufficient.

  The present invention can be applied not only to a liquid crystal display panel but also to an electrical connection device for other display panels such as a glass substrate and an organic EL. Further, the present invention can be applied not only to an apparatus for inspecting a display panel in an oblique state but also to other types of inspection apparatuses such as an apparatus for inspecting a display panel in an upward state.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

It is a front view which shows one Example of the test | inspection apparatus using the electrical connection apparatus which concerns on this invention. It is a front view of the inspection apparatus shown in FIG. It is sectional drawing obtained along the 3-3 line in FIG. It is a top view which shows one Example of the conveying apparatus used with the inspection apparatus shown in FIG. It is the figure which looked at the conveying apparatus shown in FIG. 4 in the 5-5 line direction. It is a perspective view which shows one Example of the carrier used with the conveying apparatus shown in FIG. It is a front view of the carrier shown in FIG. It is sectional drawing obtained along the 8-8 line in FIG. FIGS. 9A and 9B are diagrams for explaining the operation of the carrier shown in FIGS. 6 to 8, in which FIG. 6A shows a state where the panel is gripped, and FIG. 9B shows a state where the panel is released. It is a figure which shows the Example of the holder used with a conveying apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Display panel 18 Main body base 24 Delivery stage 28 Inspection stage 30 Probe card 36 Conveyance apparatus 38 Chuck top 60 Frame 62, 64 Carrier 66, 68 Carrier moving mechanism 72, 74, 84 Guide rail 76, 78, 86 Guide 80 carrier base 82 support arm 88 X arm 90 Y arm 98 coupling means 94 X holder 96 Y holder 100 ball screw 104 motor for carrier 106 X movement mechanism 108 Y movement mechanism 110 X drive source 112, 114 pulley 116 endless belt 120 Y drive Source 122 Ball screw 124 Nut 130, 140, 150 Holder

Claims (9)

An inspection stage that receives a rectangular display panel, and a transfer device that transfers the display panel to the inspection stage,
The transport device includes at least one carrier that transports the display panel so as to be releasably supported at both edges in the X direction and both edges in the Y direction.
The carrier is supported at a distance in the X direction by a carrier base, a pair of support arms that are supported by the carrier base at a distance in the Y direction and extends in the X direction, and at least one support arm, A pair of X arms extending toward the other support arm, an X holder provided in each X arm to support the edge in the X direction of the display panel, and a counterpart supported by each support arm A Y arm extending toward the support arm, a Y holder provided in each Y arm to support the edge of the display panel in the Y direction, and the X arm relatively away from each other. An inspection apparatus for a display panel, comprising: an X movement mechanism for moving; and a Y movement mechanism for relatively moving the support arm in a direction away from each other.   The carrier is supported by the other support arm at an interval in the X direction, and extends to the one support arm, and another pair of X arms provided to each other pair of X arms. The inspection apparatus according to claim 1, comprising an X holder.   The inspection apparatus according to claim 2, wherein the one and the other Y holders are respectively positioned between the pair of X arms and the other pair of X arms in the X direction.   The pair of X holders and the other pair of X holders are spaced apart in the Y direction, and a plurality of the Y holders are provided in each Y arm spaced in the X direction. 2. The inspection apparatus according to 2.   The inspection apparatus according to claim 1, wherein one of the X movement mechanism and the Y movement mechanism is supported by the other. One of the X movement mechanism and the Y movement mechanism includes a first drive source, a first pulley rotated by the first drive source, and the first pulley to the other of the X direction and the Y direction. A second pulley having an interval, and a belt hung on the first and second pulleys, wherein one of the X arm and the Y arm is connected,
The other of the X moving mechanism and the Y moving mechanism is a second driving source and a ball screw rotated by the second driving source, and extends in one of the Y direction and the X direction. The ball screw which has a thread part opposite in two places in one of directions, and a nut screwed into each thread part and connected to the other of the X arm and the Y arm. Or the inspection apparatus of 5.   The display panel further includes a panel set unit spaced in the X direction from the inspection stage, and the carrier delivers the display panel to the inspection stage and the panel set unit. The inspection device according to claim 1.   The inspection apparatus according to claim 7, wherein the transport device includes two of the carriers.   9. The inspection apparatus according to claim 6, 7 or 8, further comprising a support base that supports the two carriers so as to be individually movable, and two carrier driving mechanisms that individually move the two carriers. .

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