JP4217370B2 - Substrate transfer device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an improvement of a substrate transfer apparatus suitable for transferring a flat panel display represented by a liquid crystal substrate.
[0002]
[Prior art]
In recent years, research and development of electronic devices has been remarkable, and in combination with the advancement and development of information technology (IT) via networks, a wide variety of model products have been provided.
[0003]
In particular, with the progress of research and development of semiconductor technology, electronic devices and the like are becoming lighter, thinner, and smaller, and communication devices equipped with computers are becoming increasingly mobile.
[0004]
In television receivers and the like, liquid crystal displays composed of high definition, thin and large screens have come to be used in place of color CRTs due to advances in liquid crystal panel manufacturing technology and the like.
[0005]
FIG. 4 shows a part of the manufacturing process of the liquid crystal display. A storage shelf (magazine) 1 stores a large number of (glass) substrates 2 in which TFTs (thin film transistors) are arranged in a matrix. 2 are sequentially taken out one by one by a scalar type take-out robot 3 and placed on the relay table 4.
[0006]
The substrate 2 on the relay table 4 is transported to the adhesive material pasting device 6 via the first substrate transporting device 5 configured in a linear form, where the substrate 2 is applied to the electrode portion 2a of the substrate 2 as shown in FIG. An anisotropic conductive tape (film) 6a is affixed. The substrate 2 on which the anisotropic conductive tape 6a is stuck on the electrode portion 2a is conveyed to a temporary pressure bonding apparatus (not shown) by the second linear substrate conveyance device 7 as well. In the provisional pressure bonding apparatus, as shown in FIG. 5, electronic components 8 such as LSI made of TCP (tape carrier package) are sequentially thermocompression bonded while being positioned on the anisotropic conductive tape 6a. After that, after a plurality of electronic components 8 are fixed together by thermocompression bonding by a main crimping device (not shown), a liquid crystal display panel is manufactured through connection of a circuit board or the like common to each electronic component 8 by a circuit board mounting device. Is done.
[0007]
In addition, since the scanning electrode and the data electrode are formed in a matrix shape in the vertical and horizontal directions on the rectangular substrate 2, as shown in FIG. Each of the electronic components 8 needs to be mounted. For this reason, the substrate 2 is placed on, for example, an XY-θ table and sequentially subjected to a rotational driving operation.
[0008]
Of course, in the transfer operation of the substrate 2 by the take-out robot 3 and the first and second substrate transfer devices 5 and 7, there is interference or contact between adjacent devices due to program control by a control device (not shown). Controlled to be avoided.
[0009]
Therefore, the first substrate transfer device 5 is configured as shown in FIGS.
[0010]
That is, FIG. 6 is an enlarged front view of the first substrate transfer device 5, and FIG. 7 is a right side view thereof. As shown in the drawing, a support cross beam 52 is fixed to the upper part of the base 51, and this support is shown. The horizontal beam 52 hangs and fixes a ball screw mechanism 53 below.
[0011]
In the ball screw mechanism 53, the ball screw 53b is rotated by driving of the DC motor 53a, and the transport arm 54 screwed to the ball screw 53b is moved in the longitudinal direction (the left-right direction in the drawing) while being guided by the guide beam 53c. It is configured to be free.
[0012]
A vertically moving cylinder 55 is attached and fixed to the linearly movable transfer arm 54, and a suction support plate 56 is fixedly provided at the lower end portion of the plunger 55 a of the vertically moving cylinder 55.
[0013]
FIG. 8 is an enlarged plan view of the direction of the arrow as viewed from the AA plane of FIG. 6. The suction support plate 56 has a rectangular shape, and one suction pad 57 (571) is provided at one corner (corner). ) Is fixed with its suction surface facing downward. Further, elongated guide slits 56a, 56b, and 56c are provided in three directions starting from the one corner of the suction support plate 56, that is, in the orthogonal direction of X and Y in the drawing, and in the diagonal direction therebetween. 56a, 56b, and 56c are provided with other suction pads 57 (572, 573, 574) that are movable in the longitudinal direction.
[0014]
The three suction pads 57 (572, 573, 574) that can be moved while being guided by the guide slits 56a, 56b, 56c have the same structure, and the direction of the arrow from the BB line in FIG. As shown in the cross-sectional view of FIG. 9 and the cross-sectional view of FIG. 10 as viewed in the direction of the arrow from the CC line in FIG. 9, for example, the suction pad 572 adjusts and moves along the slit 56a. It is configured to be fixed by a bolt 57a at the position.
[0015]
Therefore, the substrate 2 sucked and transported by the first substrate transporting device 5 is formed by four suction pads 57 (571 to 574) aligned with the four corner positions of the substrate 2 as shown by broken lines in FIG. It is sucked and held, and conveyed and moved in response to the operations of the vertical movement cylinder 55 and the DC motor 53a.
[0016]
Each suction pad 57 is connected to a vacuum source such as an unillustrated intake pump having an electromagnetic valve via a pipe 57b, and these pipes 57b become large as the substrate 2 moves in the left-right direction. to be dumped. However, the pipe 57b and the like are configured to move by being guided by a caterpillar guide 52a provided between the transfer arm 54 and the support lateral beam 52 so as not to be damaged by the swinging operation. The first substrate transfer device 5 has been described above, but the second substrate transfer device 7 is configured in the same manner.
[0017]
[Problems to be solved by the invention]
As described above, in the conventional substrate transport apparatus, the suction pad 57 attached to the suction support plate 56 has three suction positions so that the suction position can be changed according to the shape and size of the substrate 2. The guide slits 56a, 56b, and 56c are respectively guided and configured to be movable and fixed.
[0018]
However, in the conventional apparatus, one of the three suction pads 57 (suction pad 574) moves only along the guide slit 56c formed at a predetermined angle (on the diagonal line). Accordingly, the suction pads 57 are supported at positions deviated from the four corners of the substrate 2 in which the length-to-width ratio of the rectangular substrate 2 is different and the diagonal line does not coincide with the length direction of the guide slit 56c. In particular, the suction support conveyance on the large substrate 2 becomes unstable. The unstable adsorption support of the substrate 2 has been an obstacle to increasing the speed and efficiency of the liquid crystal panel manufacturing process.
[0019]
SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transport apparatus that can flexibly cope with various shapes and sizes of substrates, and can support the substrate reliably and accurately, and can stably transport the substrate. .
[0020]
[Means for Solving the Problems]
The present invention relates to a substrate transport apparatus configured to suck and transport a substrate by a plurality of suction pads attached to a transport arm, a frame framed in a rectangular shape by rail members, and the frame A beam rail that is passed between the opposing rail members and is movable in the longitudinal direction of the rail member, and a plurality of suction pads provided along the beam rail so as to be movable in the longitudinal direction. Features.
[0021]
As described above, the beam rails are passed between the opposing rail members of the rectangular frame, and a plurality of suction pads are movably provided on the beam rails. Therefore, the suction pads are accurately attached to a substrate having an arbitrary shape and size. Therefore, it is possible to stabilize the suction conveyance of the substrate.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of a substrate transfer apparatus according to the present invention will be described in detail with reference to FIGS. The same components as those of the conventional substrate transfer apparatus shown in FIGS. 4 to 10 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0023]
That is, FIG. 1 is a front view showing an embodiment of a substrate transfer apparatus according to the present invention, and FIG. 2 is a plan view as seen from the direction of the arrow from the line AA in FIG.
[0024]
In the apparatus shown in FIG. 1, a vertical movement cylinder 55 is attached and fixed to the transport arm 54, and a frame 59 is attached and fixed to a lower end portion of the plunger 55a via a support column 58a of a framed connection mechanism 58. .
[0025]
As shown in the enlarged view of the plane of FIG. 2, the frame 59 is constructed by assembling a rectangular shape by connecting four long rail members 59a by a connecting tool 59b. Three beam rails 59c are provided between the rail members 59a and 59a (left and right rail members in FIG. 2).
[0026]
As shown in the enlarged cross-sectional view of FIG. 3 as viewed in the direction of the arrow from the BB line of FIG. 2, the beam rail 59c is formed as a concave body that is bent so that both ends of the cross-section are opposed to the inside. The suction pad 57 (57e) is configured to be able to be fixed by a bolt 59d at an arbitrary position while freely moving its position in the longitudinal direction of the beam rail 59c.
[0027]
The four rail members 59a constituting the frame 59 also have the same cross-sectional structure as that of the beam rail 59c, and each beam rail member 59c has a longitudinal direction of the rail member 59a by bolts 59d at both ends. It can be positioned and fixed appropriately while moving freely in the direction.
[0028]
Therefore, according to this embodiment, the suction pad 57 can be attached to each rail member 59a so as to be movable in the longitudinal direction and fixed at any position by the bolt 59d.
[0029]
Each suction pad 57e is configured to be connected to a vacuum source such as an intake pump for each predetermined group. Specifically, a set of four suction pads 57e corresponding to the substrate 2 indicated by broken lines in FIG. 2 and a total of six suction pads including the four suction pads 57e and attached to the three beam rails 59c. A total of 14 suction pads 57e attached to two groups, three beam rails 59c and four rail members 59a are made into three groups, and the suction pads 57e can be connected to a vacuum source for each group. To do. Here, the connection switching between each pair of suction pads 57e and the vacuum source may be performed using an electromagnetic switching valve or the like. Thereby, even when the dimensions of the substrate 2 are changed, only the suction pads 57e necessary for suction of the substrate 2 can be connected to the vacuum source, so that the vacuum pressure from the vacuum source can be effectively used. it can.
[0030]
Each beam rail 59c needs to be movably connected to the rail member 59a by a bolt 59d. However, at both ends of the concave body in cross section, the beam rail 59c can be connected by cutting out the bottom part while leaving the upper side part. is there.
[0031]
As described above, in the substrate transfer apparatus according to the above-described embodiment, the plurality of suction pads 57 attached to the beam rail 59c are moved in a direction crossing the moving direction of the beam rail 59c and fixed at an arbitrary position. I can do it. Therefore, by attaching two suction pads 57 to at least a pair of beam rails 59c and 59c, respectively, as shown by broken lines in FIG. The substrate 2 can be adsorbed and held by positioning and fixing.
[0032]
However, for the large substrate 2, as shown in FIG. 2, a plurality of beam rails 59c (three in FIG. 2) are arranged side by side, and not only at the four corners but also at the intermediate position of each side. 57 can be arranged so that stable suction conveyance can be performed even on a large and heavy substrate 2.
[0033]
In this embodiment, the connecting mechanism 58 that connects the transport arm 54 and the frame 59 supports the frame 59 on the center line of the frame 59, that is, on the vertical line of the center of gravity as shown in FIG. Accordingly, the load is balanced with respect to the coupling mechanism 58 and the transfer arm 54, and the load is not uneven. Therefore, stable suction transfer of the substrate 2 can be realized.
[0034]
In the above-described embodiment, the transport arm 54 is configured so that the suction pad 57 can be transported in the vertical direction by the vertical motion cylinder 55, but the vertical motion cylinder 55 is omitted and the substrate 2 is placed. The table side may be configured to move up and down, and the transfer arm 54 may be configured to simply transfer the substrate 2 in the left-right direction.
[0035]
Further, although the substrate transfer apparatus has been described as having the transfer arm 54 attached to the ball screw mechanism and moving linearly in the left-right direction, the present invention is not necessarily limited thereto. For example, the transfer arm 54 may be a SCARA robot. It can also be replaced with a rotary transfer arm.
[0036]
As described above, the substrate transfer apparatus according to the present invention is capable of stable suction transfer in a flexible and accurate manner corresponding to substrates of different sizes and shapes, and is remarkable when applied to, for example, a liquid crystal panel production line. Can be effective.
[0037]
【The invention's effect】
As described above, according to the substrate transfer device of the present invention, the suction pad is movably provided on the beam rail that is passed to the framed frame, so that the suction holding can be flexibly performed in various shapes and sizes. Therefore, the substrate can be stably held and transported while being attracted and accurately, and the speed and efficiency of the substrate assembly manufacturing process can be realized.
[Brief description of the drawings]
FIG. 1 is a front view showing an embodiment of a substrate transfer apparatus according to the present invention.
2 is an enlarged cross-sectional view as seen from the direction of the arrow from the line AA in FIG. 1. FIG.
3 is an enlarged cross-sectional view of a main part when viewed in the direction of the arrow from the line BB in FIG.
FIG. 4 is a schematic configuration diagram showing a part of a liquid crystal display manufacturing process employing a conventional substrate transfer device.
5 is an explanatory view showing a state in which an anisotropic conductive tape 7 is stuck on an electrode of a substrate 2 and an electronic component 9 is positioned and placed on the anisotropic conductive tape 7 in the manufacturing process shown in FIG. 4; It is.
6 is a front view showing the first substrate transfer apparatus shown in FIG. 4; FIG.
7 is a right side view of the apparatus shown in FIG. 6. FIG.
FIG. 8 is an enlarged plan view of the device shown in FIG. 6 as viewed in the direction of the arrow from the line AA.
9 is an enlarged cross-sectional view of the device shown in FIG.
10 is a cross-sectional view of the apparatus shown in FIG.
[Explanation of symbols]
1 Storage shelf (magazine)
2 (Glass) substrate 3 Take-out robot 4 Relay table 5 First substrate transfer device 54 Transfer arm 57 Suction pad 58 Connection mechanism 59 Frame 59a Rail member 59c Beam rail 6 Adhesive sticking device 6a Anisotropic conductive tape 7 Second Substrate transfer device

Claims (3)

In a substrate transfer apparatus configured to suck and transfer a substrate by a plurality of suction pads attached to the transfer arm,
A frame framed in a rectangular shape by rail members;
A beam rail which is passed between the rail members facing each other of the frame and which can move in the longitudinal direction along the passed rail member and can be fixed at an arbitrary position;
A substrate transfer apparatus comprising: a plurality of suction pads provided so as to be movable in the longitudinal direction of the beam rail. 2. The substrate transfer apparatus according to claim 1, wherein a plurality of the beam rails are arranged in parallel between the opposed rail members. 3. The substrate transfer apparatus according to claim 1, wherein the transfer arm supports and fixes the frame on a vertical line of a frame center-of-gravity position via a coupling mechanism.

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