JPH10160629A - Inspection system for liquid crystal panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance inspection efficiency of a liquid crystal panel contained in a tray by providing a separator/container for separating a liquid crystal panel from a tray and containing a liquid crystal panel in a tray, a tray transfer mechanism and a panel transfer mechanism. SOLUTION: A tray 12 containing a liquid crystal panel is transferred from a tray port 20 to a separating/containing position by means of a tray transfer mechanism 24 and then the liquid crystal panel is separated by a separator/ container. The separated liquid crystal panel is transferred by a panel transfer mechanism 28 to an inspection stage where lighting inspection is performed by means of a probe unit 30. Upon finishing the inspection, the liquid crystal panel is transferred by a panel transfer mechanism 28 to the separating/ containing position and contained in the tray 12 by means of the separator/ container. The tray 12 containing the tested liquid crystal panel is transferred by the tray transfer mechanism 24 to a specific tray port 20. Since separation and containing of the liquid crystal panel and delivery of the liquid crystal panel to the inspection stage are carried out automatically, inspection efficiency is enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an apparatus for inspecting the quality of a liquid crystal panel.

[0002]

2. Description of the Related Art As a device for performing a lighting test, that is, a lighting test of a liquid crystal display panel, that is, a liquid crystal panel, a liquid crystal panel to be inspected is manually arranged on an inspection stage arranged in an inspection station (for example, see Japanese Patent Application Laid-Open No. Hei 1-1)
No. 24740), and a liquid crystal display panel which is manually arranged in an automatic loading apparatus and the liquid crystal display panel is re-transferred to an inspection stage arranged in an inspection station (for example, Japanese Patent Application Laid-Open No. 5-134227). .

[0003] However, the inspection efficiency of the conventional inspection apparatus is low because the liquid crystal panel is manually delivered to the inspection stage or the automatic loading apparatus. In particular, in the case of a liquid crystal panel housed in a tray, the liquid crystal panel is manually removed from the tray, and the liquid crystal panel is manually placed on an inspection stage or an automatic loading device. The inspection efficiency is very poor because the liquid crystal panel has to be removed from the loading device and stored in the tray by hand.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to increase the inspection efficiency of a liquid crystal panel stored in a tray.

[0005]

An inspection apparatus according to the present invention comprises at least one tray port for storing a plurality of trays accommodating a liquid crystal panel, and a separate storage position for separating the liquid crystal panel from the tray and storing the liquid crystal panel in the tray. , A tray transport means for transferring a tray from the tray port to the separation storage means and vice versa, one or more inspection stages for receiving the liquid crystal panel, and a liquid crystal panel from the separation storage means to the inspection stage. Conversely, it includes a panel transport means for moving the liquid crystal panel and a probe unit arranged at an inspection position for inspecting the liquid crystal panel.

The tray accommodating the liquid crystal panel is transported from the tray port to a separate storage position by the tray transport means, and the liquid crystal panel is separated by the separate storage means. The separated liquid crystal panel is moved to the inspection stage by the panel transport means, and is subjected to lighting inspection by the probe unit at the inspection position. When the inspection is completed, the liquid crystal panel is moved to the separation and storage position by the panel transfer means and stored in the tray by the separation and storage means. The tray containing the inspected liquid crystal panel is transferred to a predetermined tray port by the tray transport means.

According to the present invention, a separating and storing means for separating a liquid crystal panel from a tray and storing the liquid crystal panel in the tray, a tray conveying means for transferring the tray from the tray port to the separating and storing means and vice versa, Panel transport means for transferring from the storage means to the inspection stage and vice versa, so that separation and storage of the liquid crystal panel with respect to the tray,
Delivery of the liquid crystal panel to the inspection stage is performed automatically, and as a result, the inspection efficiency of the liquid crystal panel stored in the tray is increased.

In a preferred embodiment, the inspection stage is capable of adjusting the position of the liquid crystal panel with respect to the probe unit, and has a panel delivery position for transferring the liquid crystal panel between the panel transport means and the inspection stage, and an inspection position. And can be moved to. Further, the inspection stage includes a chuck top or a work table which grips the liquid crystal panel in a suitable manner such as vacuum suction so that the liquid crystal panel can be released, and a backlight unit which is arranged in the work table and illuminates the liquid crystal panel from the back. including.

[0009] The image processing apparatus may further include one or more cameras disposed at the inspection position to image the alignment marks formed on the liquid crystal panel. With this configuration, the liquid crystal panel can be moved with respect to the probe unit by the inspection stage based on the output signal of the camera, thereby adjusting the position of the liquid crystal panel with respect to the probe unit.

In the case where the liquid crystal panel is transferred between the panel transport means and the inspection stage at a panel transfer position other than the inspection position, at least one of the liquid crystal panels disposed at the panel transfer position to image a registration mark. May be further included. With this configuration, the liquid crystal panel can be moved by the inspection stage based on the output signal of the camera, and the position of the liquid crystal panel with respect to the inspection stage can be adjusted at the panel transfer position. As a result, the liquid crystal panel can be moved relative to the probe unit. The position can be adjusted at the panel transfer position.

[0011] A coarse adjustment means may be provided at a transfer position of the liquid crystal panel between the panel conveyance means and the inspection stage so as to adjust a position of the liquid crystal panel with respect to the panel conveyance means. With this configuration, when the liquid crystal panel is moved to the inspection stage, the position of the liquid crystal panel with respect to the panel transport means can be adjusted so that the alignment mark is within the field of view of the camera.

[0012] The panel transport means includes at least one arm for transferring a liquid crystal panel to the separation and storage means and the inspection stage, and the arm for transferring the liquid crystal panel from the separation and storage means to the inspection stage and vice versa. And an arm drive mechanism for moving the arm.

[0013] The panel transfer means is movable in the left-right direction, and the panel transfer position is provided on one side and the other side in the movement direction of the panel transfer means with respect to the inspection position. And an inspection stage movable to the inspection position, and an inspection stage movable to the other panel delivery position and the inspection position. Thus, while the liquid crystal panel on one inspection stage is being inspected, the processing of the liquid crystal panel that has been inspected and the preparation of the next liquid crystal panel to be inspected can be performed by the other inspection stage. , Inspection efficiency will be higher.

The arm driving mechanism is a mechanism for causing the arm to reciprocate in the left-right direction, reciprocate in the up-down direction, and angular rotation about an axis extending in the up-down direction. The storage means is arranged on the side opposite to the inspection position with respect to the movement path of the panel transfer means,
The tray port may be arranged on one side and the other side in the moving direction of the panel transporting means with respect to the separation and storage means. As a result, the separation and storage position is on the side opposite to the panel transfer position and the inspection position with respect to the moving path of the panel transport means, so that the efficiency of transporting the liquid crystal panel by the panel transport means and the inspection stage is improved. Is more improved.

The tray transport means includes at least a pair of tray catchers for releasably gripping the corresponding edge of the tray, and a first for moving the tray catchers in a direction away from each other to grip and release the tray.
A moving mechanism for vertically moving the tray catcher to transfer the tray to and from the tray port, and a second moving mechanism for moving the tray from the tray port to the separating and storing means or vice versa. A third moving mechanism for moving the tray catcher to a position where the tray port is disposed and a position where the separation and storage unit is disposed can be provided.

Further, the apparatus includes unit support means arranged at the inspection position to support the probe unit,
The unit supporting means includes a base plate attached to the inspection position of the main body frame supporting the inspection stage, and a slide base attached to the base plate so as to be movable in the front-rear direction, and the probe unit is detachably attached. A slide base, wherein the slide base is selectively movable between a first position for placing the probe unit at the inspection position and a second position for placing the probe unit outside the body frame. be able to. Accordingly, the probe unit can be replaced while the slide base is pulled out of the main body frame, and the replacement operation of the probe unit is facilitated.

[0017] The separating and storing means may include a plurality of columns extending in the vertical direction in parallel with each other at intervals and having a receiving portion for receiving an upper portion inserted into the tray and a lower surface of the tray. . Thus, the liquid crystal panel can be separated from and stored in the tray with a simple mechanism by raising and lowering the tray with respect to the column.

Further, a camera disposed at a panel transfer position for transferring a liquid crystal panel between the panel transport means and the inspection stage so as to image an identification code formed on the liquid crystal panel can be included. . Thus, the identification number can be decoded based on the output signal of the camera, and the inspection result of the corresponding liquid crystal panel can be stored in the memory using the identification code.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 5, an inspection apparatus 10 performs a lighting test of a rectangular liquid crystal display panel, that is, a liquid crystal panel 14 housed in a tray 12 having a rectangular planar shape. It is used as a device for checking the quality.

The tray 12 is, as shown in FIGS.
A box-shaped main portion 12a forming a shallow recess and a flange portion 12b around the main portion form a shallow dish. The main body 12a has a plurality of protrusions 16 protruding toward the recess.
Is provided on the bottom surface, and the liquid crystal panel 14 is prevented from moving in the recess by coming into contact with these projections 16. The tray 12 also has through holes 18 at locations corresponding to each corner of the rectangle. The liquid crystal panel 14 has alignment marks at two adjacent corners spaced apart from each other, and has an identification code assigned to each liquid crystal panel at another corner.

The inspection device 10 includes a plurality of tray storage devices 2.
0, a separation container 22 for separating the liquid crystal panel 14 from the tray 12 and storing it in the tray, a tray transport mechanism 24 for transferring the tray from the tray storage device 20 to the separation storage device 22 and vice versa, A pair of receiving inspection stages 26, a panel transport mechanism 28 for transferring the liquid crystal panel from the separation container 22 to the inspection stage 26, and vice versa;
A probe unit 30 used for inspection of the liquid crystal panel, an alignment device 32 arranged at a panel transfer position between the panel transport mechanism 28 and each inspection stage 26, and an imaging unit 3 for imaging the liquid crystal panel transported to the inspection position
4, a first camera 36 for imaging the alignment mark of the liquid crystal panel at the panel transfer position, and a second camera 36 for imaging the identification code of the liquid crystal panel at each panel transfer position.
Camera 38, two third cameras 40 that image the alignment marks on the liquid crystal panel at the inspection position, and a unit support mechanism 42 that supports the probe unit 30. These are arranged on the housing of the inspection apparatus 10, that is, the main body frame 44.

As shown in FIGS. 9 to 12, each tray storage device 20 is a tray port for storing a plurality of trays 12 in a stacked state. In each tray storage device 20, a flat base member 50 is horizontally arranged, and a support post 52 and a plurality of shafts 54 are attached to the base member 50 at intervals in the horizontal direction so as to extend upward and parallel to each other. A top member 56 is horizontally attached to the upper end of the support 52 and the shaft 54, and an intermediate base, that is, a plate member 58 is horizontally supported by the main body frame 44 between the base member 50 and the top member 56.

The column 52 and the shaft 54 extend through the plate member 58. The top member 56 is connected to the tray 12.
The storage space of the tray 12 extends in an L-shape so as to avoid the storage space. The strut 52 and the shaft 54 are arranged on the side and the front of the storage space of the tray 12, respectively. The plate member 58 is a member different from the main body frame 44 in the illustrated example, but may be a horizontal portion of the main body frame 44.

The shaft 54 is a linear shaft received by a plate member 58 so as to be able to move up and down, and the plate member 58 receives the shaft 54 by a ball bush 60. Therefore, the lifting and lowering of the plate-shaped member 58 becomes smooth and stable.

The tray receiver 62 is disposed so as to be two-dimensionally movable in a horizontal plane by a plurality of ball seats 64 disposed on the plate-shaped member 58, and receives a plurality of trays in an overlapping state. Therefore, the tray receiver 62 functions as a floating table. In the illustrated example, the tray 12 is placed directly on the tray receiver 62. But,
The tray 12 may be placed on the tray receiver 62 via a pallet used for an arm portion (ie, a fork portion) of a tray transport machine such as a forklift, or the tray receiver itself may be a pallet.

The plate-shaped member 58 has a notch 6 that allows the arm of the transporting machine to pass through for the delivery of the tray 12.
6. The protective cover 68 is provided below the plate-shaped member 58 so as to prevent a member below the plate-shaped member 58 from colliding with an arm of the transporting machine. The tray receiver 62 has a U-shape corresponding to the notch 66, and is installed so as to open to the rear.

The plate member 58, the tray receiver 62, and the ball seat 64 function as receiving means for receiving a plurality of trays 12 in a stacked state. The plurality of trays 12 received by the receiving means are provided with a pair of elongated tray holders 70 extending vertically through two-dimensionally movable through a through hole 58a formed in the plate member 58 in a horizontal plane. Thereby, the opposing corners are releasably gripped from the outside.

The tray retainer 70 is an L-shaped member having a concave groove having an L-shaped cross-section corresponding to the planar shape of the corner of the tray, and is movable on the base member 50 in a direction away from each other. A pair of slide stages 72 arranged in
Attached to.

The slide stage 72 has a pair of connecting links 7 connected to the slide stage 72 so as to be pivotable.
4, a central link 76 pivotally connected to the two links 74, and a drive mechanism 78 for bending and extending the links 74 and 76, are moved in a direction away from each other. The center link 76 is pivotally attached to the base member 50.

After receiving the tray from the transporting machine into the tray receiver 62, the tray holders 70 are moved in directions approaching each other. As a result, the tray retainer 70 comes into contact with the outer edge of the opposite corner of the tray 12 transferred to the tray receiver 62, and grips the tray 12. In addition, the tray holder 70 is largely separated when the tray is received by the tray receiver 62 by the transporting machine and when the stored tray is removed from the tray receiver 62 by the transporting machine, and the tray 12 is released.

When the tray presser 70 is moved in the direction opposite to each other, the tray presser 70 pushes the tray 12 toward the center of the storage space to displace the tray 12. For this reason, even if the posture and position of the tray 12 transferred to the tray receiver 62 are incorrect, the tray is automatically aligned to the correct posture and position only by grasping the tray 12 with the tray retainer 70, and the Stored in state. This facilitates the transfer of the tray 12 by the transport machine.

The posture and position of the tray 12 when the plurality of trays 12 are transferred to the tray receiver 62 in a stacked state are adjusted by displacing the tray receiver 62 in the storage space of the tray. At this time, since the tray receiver 62 is received by the ball seat 64, the displacement of the tray receiver 62 becomes smooth and stable.

The height position of the tray 12 on the tray receiver 62 depends on the number of trays 12 stacked on the tray receiver 62. Therefore, the height position of the tray holder 70 is
An elevating mechanism, that is, a height adjusting mechanism adjusts at least a part of the uppermost tray to be above the top member 56.

The height adjusting mechanism includes, in addition to the pair of shafts 54 described above, a rack 80 having an upper end and a lower end coupled to the top member 56 and the base member 50, respectively, and extending in the vertical direction. Gear 82 and a gear drive mechanism 84 for rotating the pinion gear
And The pinion gear 82 is attached to an output shaft of a gear drive mechanism 84, and the gear drive mechanism 84 is rotatably supported by the plate member 58.

When the pinion gear 82 is rotated by the gear drive mechanism 84 in a state of being engaged with the rack 80, the base member 50, the support 52, the shaft 54, the top member 56, the slide stage 72, the links 74, 76, and the drive mechanism 78.
And the rack 80 are integrally raised or lowered, and the tray holder 70 is raised or lowered. The vertical movement of these members and the operation of the height adjustment mechanism at this time are determined by the support 52
And the shaft 54 includes the base member 50 and the top member 56.
Since it is connected to and firmly configured, it is smooth and stable.

Each tray storage device 20 is disposed on the main body frame 44 such that the opening of the cutout 66 is on the rear side. For this reason, the delivery of the tray 12 to the tray storage device 20 by the transport machine is performed on the rear side of the inspection measure 10.

The tray 12 containing the untested liquid crystal panel is gripped by the tray transport mechanism 24 from the uppermost tray, and transported to the separating and storing position by the separating and storing unit 22. Further, the tray containing the inspected liquid crystal panels is stacked on the uppermost tray. The height position of the tray retainer 70 is adjusted each time the tray is transferred by the tray transport mechanism 24 such that the height position of the uppermost tray is at least above the top member 56. This allows
Delivery of the tray to the tray storage device 20 by the tray transport mechanism 24 is facilitated.

According to the tray storage device 20, the opposing corners of the transferred tray 12 are provided with a pair of tray holders 70 each having a concave groove having a sectional shape corresponding to the planar shape of the corner.
Therefore, the plurality of trays 12 can be reliably stored in a correct position and in a correct posture with a small number of tray pressers 70. However, two pairs of tray holders may be provided, or a plurality of tray holders having other cross-sectional shapes or a plurality of tray holders having no groove may be used.

In the illustrated example, the tray holder 70 is moved up and down with respect to the plate member 58 and the tray 12, but the plate member 58 and the tray 12 may be moved up and down with respect to the tray holder 70. May be relatively displaced vertically. Instead of using a pair of tray holders, two pairs of tray holders may be used to push the four sides of the tray toward the center.

In the illustrated example, as shown in FIGS. 3 and 5, four tray storage devices 20 are provided at the rear of the inspection device 10 at right and left intervals and two at the left and right sides of the separation container 22. Are arranged in groups. Of the pair of tray storage devices, one tray storage device is used for a tray containing an untested liquid crystal panel, and the other tray storage device is used for a tray containing a tested liquid crystal panel. Used for However, at least one tray storage device may be used for a tray containing a defective liquid crystal panel, or a tray storage device for such a tray may be further provided.

As shown in FIGS. 3 and 5 to 8, the separation container 22 includes a plurality of columns 86 extending vertically in parallel with each other at intervals. The support column 86 has a small-diameter upper portion 86a inserted into the tray 12, a large-diameter lower portion 86b, and a receiving portion 86c that receives the lower surface of the tray 12. The receiving portion 86c is a step formed by the upper portion 86a and the lower portion 86b, but may be another portion such as a flange or a convex portion.

The support columns 86 have their upper ends disposed on the liquid crystal panel 1.
It is arranged on the main body frame 44 so as to be located at a corner of a quadrangle smaller than four. Through hole 18 in tray 12
Receives the upper part 86a of each support 86, but the lower part 86a
b is not accepted.

Tray 12 containing liquid crystal panel 12
First, as shown in FIG. 7, the tray 86 is transported to the separated storage position by the tray transport mechanism 24 so that the upper portion 86a of each column 86 is received in the through hole 18. Then, as shown in FIG. It is lowered until it contacts the part 86c. As a result, the tray 12 is lowered while the liquid crystal panel 14 is placed on the upper end of the column 86, so that the liquid crystal panel 14 is separated from the tray 12 and moved to the panel transfer position to the inspection stage 26 by the panel transport mechanism 28. Conveyed.

On the other hand, when the tray 12 is lifted from the position shown in FIG. 8 by the tray transport mechanism 24 in a state where the liquid crystal panel 14 is placed on the upper portion 86a of the column 86, the tray 12 Since the liquid crystal panel 14 is raised, the liquid crystal panel 14 placed on the upper portion 86a of the support column 86 is stored in the tray 12 as shown in FIG. As a result, the tray 1 containing the inspected liquid crystal panel 14
2 is returned to a predetermined tray storage device 20 by the tray transport mechanism 24.

According to the separation container 22, the small-diameter upper portion 86
a and a plurality of columns 86 having a large-diameter lower portion 86b and a receiving portion 86c for receiving the lower surface of the tray 12, the liquid crystal is formed by simply raising and lowering the tray despite its simple structure. Panels can be separated and stored.

As shown in FIGS. 4, 5 and 7, the tray transport mechanism 24 includes a pair of tray catchers 90 for releasably holding the corresponding edges of the tray 12, and the tray catchers 90 are separated from each other. A first moving mechanism 92 for moving the tray 12 in the direction to grip and release the tray 12,
The tray catcher 90 is moved up and down to move the tray storage device 20.
Moving mechanism 94 for transferring the tray 12 to the
And a third moving mechanism for moving the tray catcher 90 to the storage position by the tray storage device 20 and the separation and storage position by the separation storage device 22 to transfer the tray 12 from the tray storage device 20 to the separation storage device 22 or vice versa. 96.

The first moving mechanism 92 includes a support portion 92a for supporting the tray catcher 90 movably in the left-right direction (X direction) and a driving mechanism 92b for moving the tray catcher 90 in the left-right direction. The second moving mechanism 94
A support unit 94a that supports the first moving mechanism 92 and a drive mechanism 94b that moves the support unit 94a up and down are provided. The third moving mechanism 96 includes a supporting portion 96a that supports the second moving mechanism 94, and a driving mechanism 96b that moves the supporting portion 96a in the left-right direction.

A reciprocating mechanism such as an air cylinder can be used as the driving mechanism 92b. As the driving mechanism 94b, a reciprocating mechanism using a lead screw or a timing belt rotated by a motor can be used. As the drive mechanism 96b, a guide rail attached to the main body frame 44 so as to extend in the left-right direction, and a reciprocating mechanism including a carrier or the like movably on the guide rail in the left-right direction can be used. However, any drive mechanism may be another reciprocating mechanism.

When the tray 12 on the tray storage device 20 is gripped, the tray transport mechanism 24 moves the tray catcher 9
When the tray catcher 90 is moved far above the predetermined tray position with the tray catcher 90 largely separated, the tray catcher 90 is moved toward the predetermined height. Move to As a result, the uppermost tray 12 of the predetermined tray storage device 20 is gripped by the tray catcher 90.

On the other hand, when releasing the tray held by the tray catcher 90, the tray transport mechanism 24
Is moved above a predetermined tray storage device 20 or separation container 22 with the tray catcher 90 raised,
The tray catcher 90 is lowered to a predetermined height position, and in this state, the tray catcher 90 is moved in a direction far away. As a result, the grasped tray can be transferred to a predetermined tray storage device 20 or separation storage device 22.

As shown in FIGS. 2 to 4, the inspection stage 2
Reference numeral 6 is movable to a common inspection position where inspection is performed using the probe unit 30 and a panel delivery position provided for each inspection stage 26. The panel transfer position is a position at which the liquid crystal panel 14 is transferred between the inspection stage 26 and the panel transport mechanism 28, and is formed on the left and right sides with respect to the inspection position. Each inspection stage 26
It is movable to an inspection position and a corresponding delivery position.

Each inspection stage 26 includes a work table 100 for holding a liquid crystal panel, and a first table for rotating the work table 100 angularly about an axis extending in the vertical direction.
Stage 102, a second θ stage 104 that rotates the work table 100 approximately 180 degrees around an axis extending in the vertical direction, a Z stage 106 that moves the work table 100 up and down, and a work table 100 in the front-rear direction (Y (Y direction), and an X stage 110 for moving the worktable 100 in the left-right direction (X direction).

Work table 100, θ stage 102
And 104, Z stage 106 and Y stage 1
08 is the θ stages 102 and 104, and Z
The stage is supported by a stage, a Y stage, and an X stage 110. In the illustrated embodiment, each inspection stage 26 is moved by the X stage 110 to an inspection position and a panel delivery position. However, inspection stage 2
6 may be moved to the inspection position and the panel delivery position by another mechanism.

When the orientation of the liquid crystal panel received by the inspection stage 26 is opposite, the θ stage 104 rotates the work table 100 by 180 degrees to change the orientation of the liquid crystal panel to the correct orientation. Whether or not the orientation of the liquid crystal panel is correct should be confirmed by determining whether or not the alignment mark of the liquid crystal panel has been imaged by the camera 36 in the inspection circuit based on the output signal of the camera 36. Can be.

The work table 100 has the shape of a box that opens upward, has a chuck function for releasably adsorbing the liquid crystal panel 14, and further has a backlight unit that illuminates the liquid crystal panel 14 from behind. (Not shown) is housed inside. Stages 102, 104,
106, 108 and 110 are work tables 100
And a drive mechanism for displacing.

As shown in FIGS. 1 to 4, the panel transport mechanism 28 includes a panel transport robot 112 and a liquid crystal panel 14.
And a pair of transfer arms 114 supported by the robot 112 to transfer the transfer robot, and an X stage 116 for moving the transfer robot 112 in the left-right direction (X direction). The transfer robot 112 can move between the tray storage device 20 and the separation and storage position, the panel delivery position, and the inspection position over the substantially entire length range of the inspection device 10 in the left-right direction.

The robot 112 includes a rotating mechanism for simultaneously rotating the two arms 114 about an axis extending in the vertical direction or angularly for each arm, a lifting mechanism for raising and lowering the two arms 114 simultaneously or for each arm, 114
Is moved in the front-rear direction (Y direction) for each arm 114.
And a stage. In the following description, it is assumed that the rotation mechanism and the elevating mechanism respectively rotate and elevate both arms 114 at the same time.

The arm 114 is formed of a bifurcated plate member, and is horizontally supported by a rotating mechanism of the robot 112 with a vertical interval. Each arm 11
Numeral 4 has a groove for vacuum suction, and thus releasably sucks the liquid crystal panel 14.

The X stage 116 has a moving mechanism for moving the robot 112 in the left and right directions, and is arranged on the main body frame 44. The robot 112 moves the inspected or untested liquid crystal panel to one of the arms 1
14, with the other arm 114 being empty, the X-stage 116 moves the tray storage device 20 and the separation and storage position, and both the panel transfer position and the inspection position in the left-right direction. You.

When transferring the liquid crystal panel 14 to the separation container 22, the robot 112
Of uninspected liquid crystal panel from the company and separation container 2
The transfer of the inspected liquid crystal panel to No. 2 is performed in that order or vice versa.

When an untested liquid crystal panel is received from the separation container 22, the robot 112 first moves the X stage 11
6, the arm is displaced to the side of the separation container 22, then both arms are displaced to the side of the separation container 22, and then the empty arm is advanced to the side of the separation container 22 to move the empty arm as shown in FIG. Is moved between the liquid crystal panel 14 and the tray 12 placed on the separation container 22, and then the empty arm is raised as shown in FIG.

As a result, the uninspected liquid crystal panel placed on the support 86 is transferred from the separation container 22 to the arm, and the arm is retracted with the received liquid crystal panel being sucked. During the delivery of the untested liquid crystal panel at the separated storage position, the arm on which the tested liquid crystal panel is placed is retracted from the separation storage device 22. Both arms 11
When the arm 4 is rotated for each arm, the arm on which the inspected liquid crystal panel is placed may be displaced to the side opposite to the side of the separation container 22.

When transferring the inspected liquid crystal panel to the separation container 22, the robot 112 first moves the arm on which the inspected liquid crystal panel is mounted above the separation container 22, and then moves the arm. The tested liquid crystal panel is placed on the support 86 by lowering it slightly below the upper end of the support 86,
Next, the arm is retracted from the separation container 22. During this time, the other arm is retracted from the separation container 22. When both arms 114 are rotated for each arm, the other arm may be displaced to the side opposite to the side of the separation container 22.

The panel transport mechanism 28 operates when delivering the liquid crystal panel 14 to the inspection stage in the same manner as when delivering the liquid crystal panel to the separation and storage unit 22. However, when the liquid crystal panel 14 is transferred to the inspection stage 26, the alignment device 32 performs rough alignment of the liquid crystal panel with respect to the arm 114, and transfers the liquid crystal panel to the inspection stage 26 that is moving to the liquid crystal panel transfer position.

When the transfer of the liquid crystal panel to the separation container 22 is completed, the panel transport mechanism 28 moves to the panel transfer position with respect to the inspection stage 26 on which the inspected liquid crystal panel is mounted, and the liquid crystal panel with respect to the inspection stage 26 is moved. Is completed, the apparatus moves to the installation position of the separation container 22 on which the untested liquid crystal panel is placed. During this time, the inspection of the liquid crystal panel mounted on another inspection stage 26 is performed.

As shown in FIGS. 13 and 14, the alignment device 32 has a rectangular alignment base 120.
And at least two sets of abutting members 122 that are moved in directions that are close to and away from each other to adjust the position of the liquid crystal panel 14;
At least two sets of support mechanisms 124 provided for each set of contact members 122, at least two sets of moving mechanisms 126 provided for each set of support mechanisms 124, and provided for each set of contact members 122 And sensing means 128.

The alignment base 120 is formed of a plate-like member having a rectangular opening larger than the liquid crystal panel 14, and is attached to the main body frame in parallel with the liquid crystal panel 14 transported to the panel transfer position. It has four side portions corresponding to the sides of the rectangle.

The contact member 122 is a roller in the illustrated example, but may be another member. Each support mechanism 124
Supports the contact member 122 so as to be rotatable around an axis intersecting with the liquid crystal panel 14. Each moving mechanism 126 displaces the support mechanism 124 in a direction in which the support mechanism 124 is shifted toward and away from each other, and displaces the contact member 122 in the same direction. Each sensing means 128
It senses that the contact member 122 has approached a predetermined position.

Each support mechanism 124 arranges a pair of long sliders 130 so as to be movable toward and away from opposing sides of the alignment base 120, and attaches an L-shaped bracket 132 to each slider. 130 is attached to the center in the longitudinal direction. Both ends of each of the sliders 130 are attached to the sides of the alignment base 120 by the sliders 13.
Guide 13 screwed so as to extend in the direction of movement 0
4 received. Each bracket 132 is screwed to the slider 130 so as to extend downward from the slider 130 and then extend horizontally inward.

As shown in FIG. 14, one bracket 132 has two extending portions 136 extending from the end of the horizontally extending portion in a direction perpendicular to the moving direction of the bracket. Contact member 12 at the tip of
2 is rotatably supported around an axis extending in the vertical direction. The other bracket 132 supports the contact member 122 at a portion extending horizontally so as to be rotatable around an axis extending vertically.

The contact member 122 contacts the edge of the liquid crystal panel 14. In the illustrated example, one set of the contact members 122
Is perpendicular to the direction of movement of the other set of roller contact members in a plane parallel to the liquid crystal panel 14 on the arm 114, but the directions of movement may intersect at an angle other than 90 degrees. .

Each moving mechanism 126 engages a rack 138 corresponding to the slider 130 and connected to the slider 130 with a pinion gear 140.
Is reciprocated by a reciprocating mechanism 142 such as an air cylinder, thereby moving both racks 138 and moving the other slider 130.

The pinion gear 140 is supported by a connecting member 143 attached to the alignment base 120 so as to be rotatable around an axis extending in the horizontal direction. Both racks 138 are connected at one end to the end of the slider 130 so as to mesh with the opposite side of the pinion gear 140, and extend toward the center. Therefore, both racks 138 are synchronously moved in directions opposite to each other, whereby both sliders 130 are moved in directions that are close to and away from each other.

The slider 130 of one support mechanism 124
And one moving mechanism 126 are the alignment base 1
20. On the other hand, the slider 130 of the other support mechanism 124 and the other moving mechanism 126
Is disposed below the alignment base 120. Instead of moving one slider 130 by the reciprocating mechanism 142, one rack 138 may be moved by the reciprocating mechanism 142 or the pinion gear 14.
0 may be rotated by a rotation mechanism.

Each of the sensing means 128 is connected to one of the support mechanisms 12.
The mounting rail 144 extending in the moving direction of the mounting rail 144 is disposed on the alignment base 120, and the sensor 146 is mounted on the mounting rail 140.
The shutter 148 is connected to one of the support mechanisms 124 such that the shutter 148 is moved together with the one of the support mechanisms 124 and detected by the sensor 146.

As the sensor 146, an appropriate sensor such as an optical sensor having a light emitting element and a light receiving element, and a proximity sensor such as a reed switch can be used. The sensor 146 is attached to the mounting rail 144 by the screw member 150 so as to detect the shutter 148 when the contact member 122 contacts the edge of the liquid crystal panel 14 on the arm 114.

When performing alignment, with the liquid crystal panel released from the arm 114, the two reciprocating mechanisms 12
6 operate simultaneously. As a result, first, each support mechanism 12
Since the fourth slider 130 is moved in the direction toward each other and then in the direction away from each other, the contact member 122 and the shutter 148 are reciprocated.

The contact member 122 contacts the outer edge of the liquid crystal panel 14 by being moved toward the center. If the posture and position of the liquid crystal panel 14 with respect to the arm 114 are shifted, any one of the contact members 122 contacts the edge of the liquid crystal panel 14 before the other contact members. The position and the position of the liquid crystal panel 14 with respect to the arm 114 are corrected by being displaced and all the contact members 122 abutting against the edge of the liquid crystal panel 14.

When all the contact members 122 of the corresponding set come into contact with the edge of the liquid crystal panel 14, the shutter 148
It is sensed by the sensor 146, thereby stopping the corresponding reciprocating mechanism 126. Thereby, the possibility that the excessive pressing force acts on the liquid crystal panel is reduced, and the liquid crystal panel can be prevented from being damaged.

When both of the sensors 146 sense the shutter 148, the liquid crystal panel moves the alignment mark to the camera 36 when the liquid crystal panel is moved to the inspection stage at the delivery position.
The posture and the position are adjusted so as to enter the field of view, and as a result, the rough alignment ends. Thereafter, the reciprocating mechanism 126 operates in reverse, and the roller 122 and the slider 13
Move back 0.

The alignment device 32 includes a contact member 122
The present invention can be applied to alignment of liquid crystal panels of various sizes smaller than the maximum movement range. In addition, when the type (size) of the liquid crystal panel is changed, the position of the sensor 146 on the mounting rail 144 is changed so that the damage of the liquid crystal panel due to the rough alignment is reliably prevented. Can be. Further, when the contact member 122 is a roller, the frictional resistance between the roller and the liquid crystal panel caused by the relative movement between the roller and the liquid crystal panel is very small, so that the displacement of the liquid crystal panel with respect to the arm 114 is smooth.

In the illustrated embodiment, the mounting rail 144 and the sensor 146 of both sensing means are connected to the alignment base 12.
0, and is connected to a slider 130 disposed below the alignment base 120.
Is passed through a hole formed in the alignment base 120 to be detected by a sensor 146 disposed above the alignment base 120.
The work of changing the mounting position of the sensor 146 to the sensor 4 becomes easy.

As shown in FIG. 1 to FIG. 3, FIG. 15 and FIG. 16, the probe unit 30 has a rectangular plate-shaped probe base 160, and an L-shape attached to the probe base 160 by one or more screw members. And a plurality of probe blocks 162 in the shape of a circle. Probe base 160
Has a rectangular opening 164 similar to the liquid crystal panel 14 at the center. Each probe block 162 is attached to the upper surface of the probe base 160 at the other end so as to reach the lower side via the opening 164. Each probe block 162 has a plurality of probes (not shown) at one end. Each probe is connected to a test electric circuit by a cable (not shown).

As shown in FIGS. 2 and 4, the imaging unit 34 includes a television camera 170 for imaging the liquid crystal panel 14 moved to the inspection position from above, and a first camera movement for moving the camera 170 in the vertical direction. The camera includes a mechanism 172, a television camera 174 that captures an image of a contact portion between the liquid crystal panel and the probe, and a second camera moving mechanism 176 that moves the camera 174 in the front-back and left-right directions. The camera moving mechanisms 172 and 176 are attached to the body frame 44, and the cameras 170 and 17 respectively.
4 is supported downward.

The output signal of the camera 170 is supplied to an inspection electric circuit (not shown) for inspecting the quality of the liquid crystal display panel. The height position of the camera 170 is adjusted according to the type of the liquid crystal panel to be inspected by the operator controlling the camera moving mechanism 172 in advance. Camera 174
Is displayed on a monitor by an electric circuit for inspection in order to confirm the contact state between the liquid crystal panel and the probe. The position of the camera 174 in the left-right direction is adjusted by the second camera moving mechanism 176 to check the contact state between the liquid crystal panel and the probe.

The first and second cameras 36 and 38 are supported by a bracket 180 attached to the main body frame 44, and the third camera 40 is connected to the unit support mechanism 4
2 supported. First and third cameras 36, 4
The output signal of “0” is supplied to the inspection electric circuit in order to adjust the attitude and the position of the liquid crystal panel 14 with respect to the probe unit 30. The adjustment of the posture and the position of the liquid crystal panel 14 is performed by operating the inspection stage 26 by the inspection electric circuit and displacing the work table 100. The output signal of the second camera 38 is supplied to an electric circuit for inspection in order to decode the identification number of the liquid crystal panel to be inspected and store the inspection result of the liquid crystal panel corresponding to the identification number in the memory. .

As shown in FIGS. 15 and 16, the unit supporting mechanism 42 has a base plate 192 attached to the inspection position of the main body frame 44, and a plate-like member horizontally mounted on the base plate movably in the front-rear direction. And a slide base 194. Probe unit 30
Is mounted horizontally on a slide base 194 so as to be detachable by a plurality of screw members 196, and the alignment camera 40 is mounted on a base plate 192.

The base plate 192 has a pair of rails 19 that receive the slide base 194 movably in the front-rear direction.
8 When the slide base 194 is moved with respect to the base plate 192, the slide base is moved by a locking means (not shown) between a first position where the probe unit 30 is at the inspection position and a second position where the probe unit 30 is outside the main body frame 44. 194 is kept releasable. However, the slide base 194 does not have to be releasably maintained at the first position and not at the second position.

The base plate 192 and the slide base 194 respectively move the cameras 40, 170, and 17 when the slide base 194 is moved to the first position.
4 has openings 200 and 202 which do not prevent the imaging of the liquid crystal panel.

The slide base 194 is maintained at the first position during the inspection. On the other hand, the slide base 194
Is pulled out to the second position when the probe unit 30 is replaced and when the probe unit 30 is repaired or adjusted.
Is pushed into the position of. Therefore, the probe unit 3
Replacement, repair, and adjustment of 0 are facilitated.

At the time of inspection, the tray 12 is
By 4, it is conveyed from the tray storage device 20 to the separation and storage position, moved to the separation and storage device 22, and lowered to a predetermined height position. As a result, the untested liquid crystal panel 14 stored in the tray 12 is separated from the tray 12 as shown in FIG.

The separated liquid crystal panel 14 is received by one arm 114 of the panel transport mechanism 28. At this point, if the inspected liquid crystal panel is placed on the other arm, the inspected liquid crystal panel is transferred from the panel transport mechanism 28 to the separation and storage device 22, and the empty liquid remaining in the separation and storage device 22 is removed. After being stored in a tray, a predetermined tray storage device 20 is moved by the tray transport mechanism 24 together with the tray.
Moved to

The uninspected liquid crystal panel transferred to the panel transport mechanism 28 is transported from the separated storage position to the panel delivery position by the panel transport mechanism 28, and is roughly aligned with the arm 114 at the panel delivery position. At this point, if the inspected liquid crystal panel is placed on the inspection stage 26 that has been moved to the panel delivery position, the panel transport mechanism 28 transfers the inspected liquid crystal panel from the inspection stage 26 to the other arm 114. After receiving,
The untested liquid crystal panel is moved to an empty inspection stage 26.

In the rough alignment, the liquid crystal panel is the arm 1
The alignment is performed by the alignment mechanism 32 in a state of being released from. The rough alignment may be performed after the delivery of the inspected liquid crystal panel. When the delivery of the uninspected liquid crystal panel and the inspected liquid crystal panel is completed, the panel transport mechanism 28 is moved to the separated storage position for transporting and delivering the next liquid crystal panel.

The uninspected liquid crystal panel transferred to the inspection stage 26 is imaged by the cameras 36 and 38 with the alignment mark and the identification code formed thereon, and is precisely aligned using the output signal of the camera 36. You. The precise alignment is performed by moving the work table 100 of the inspection stage 26 by an appropriate stage. At this time, if the orientation of the liquid crystal panel is reversed, the inspection stage 26 rotates the work table 100 by 180 degrees to correct the liquid crystal panel to the correct orientation.

The lighting inspection of the liquid crystal panel mounted on the other inspection stage 26 is performed during the above. The other inspection stage is moved to the other panel delivery position and waits. Therefore, the inspection stage 26 on which the untested liquid crystal panel is placed is moved to the inspection position after the completion of the precision alignment.

At the inspection position, the liquid crystal panel which has not been inspected is imaged at the inspection position by the camera 40 and is precisely aligned using the output signal of the camera 40.
Probe unit 3 raised by inspection stage 26
Pressed to zero. Probe unit 30 and liquid crystal panel 1
The state of contact with 4 is imaged by the camera 174, and the quality of the contact is determined in the inspection electric circuit based on the output signal.

If the contact state is not correct, realignment is performed. The alignment is performed again by lowering the work table 100 and then using the appropriate stage of the inspection stage 26 based on the output signal of the camera 40.
00 is displaced. The displacement amount or the coordinate value of the work table is stored in the memory of the inspection electric circuit for the subsequent adjustment of the posture and position of the liquid crystal panel.

The above determination using the output signal of the camera 174 and the adjustment of the work table 100 are performed only at the first inspection of the liquid crystal panel. Therefore, the inspection time is reduced. However, they may be performed for one or more liquid crystal panels.

If the contact state is correct, the lighting inspection turns on the liquid crystal panel in a predetermined pattern and checks the state by the camera 1.
This is performed by taking an image at 70 and processing the output signal of the camera 170 in an electric circuit for inspection. The inspection result is stored in the memory of the inspection electric circuit together with the identification code of the liquid crystal panel.

When the inspection is completed, the inspection stage 26
It is returned to the original panel delivery position. During the inspection of the untested liquid crystal panel, the next liquid crystal panel is connected to the other inspection stage 26.
Be prepared for. The inspection electric circuit can be composed of, for example, a signal processing device such as a computer and an energizing device.

As described above, the separation and storage of the liquid crystal panel with respect to the tray and the transfer of the liquid crystal panel to the inspection stage are automatically performed, and the inspection of the liquid crystal panel stored in the tray is efficiently performed.

The present invention is not limited to the above embodiment. For example, instead of maintaining the liquid crystal panel in a horizontal state at the inspection position, the liquid crystal panel may be maintained in a state of being inclined forward and downward.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of an inspection apparatus according to the present invention, in which an upper cover of a main body frame is removed.

FIG. 2 is a front view of the inspection device of FIG.

FIG. 3 is a sectional view taken along line 2- of FIG. 2;

FIG. 4 is a left side view of the inspection device of FIG. 2;

FIG. 5 is a rear view of the inspection device of FIG. 2;

FIG. 6 is a perspective view showing an embodiment of a tray and a separation container.

FIG. 7 is a view for explaining a state in which a liquid crystal panel is separated and stored in a tray by the separation and storage device of FIG. 6;

FIG. 8 is a view for explaining delivery of the liquid crystal panel between the separation container and the panel transport mechanism.

FIG. 9 is a plan view showing an embodiment of the tray storage device.

FIG. 10 is a front view of the tray storage device of FIG. 9;

FIG. 11 is a left side view of the tray storage device of FIG. 9;

FIG. 12 is a bottom view of the tray storage device of FIG. 9;

FIG. 13 is a perspective view showing an embodiment of the alignment apparatus.

FIG. 14 is a bottom view of the alignment apparatus of FIG.

FIG. 15 is a plan view showing one embodiment of a unit support mechanism.

16 is a cross-sectional view taken along line 16-16 in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Tray 14 Liquid crystal panel 20 Tray storage device (tray port) 22 Separation container 24 Tray transport mechanism 26 Inspection stage 28 Panel transport mechanism 30 Probe unit 32 Alignment apparatus 34 Imaging unit 36, 38, 40 Camera 42 Unit support mechanism 44 body frame 86 column 90 tray catcher 92 first moving mechanism 94 second moving mechanism 96 third moving mechanism 112 robot (arm driving mechanism) 114 arm 192 base plate 194 slide base

Claims (13)

[Claims] 1. One or more tray ports for storing a plurality of trays containing liquid crystal panels, separation and storage means for separating the liquid crystal panels from the trays and storing them in the trays, and separating and storing the trays from the tray ports. Tray transport means for transferring the liquid crystal panel to and from the reverse, one or more inspection stages for receiving the liquid crystal panel, panel transport means for transferring the liquid crystal panel from the separate storage means to the inspection stage and vice versa, and inspecting the liquid crystal panel. An inspection apparatus for a liquid crystal panel, comprising: a probe unit disposed at an inspection position. 2. The inspection apparatus according to claim 1, wherein the inspection stage is capable of adjusting a position of a liquid crystal panel with respect to the probe unit. 3. The inspection according to claim 2, wherein the inspection stage is movable to a panel delivery position for transferring a liquid crystal panel between the panel transport unit and the inspection stage, and the inspection position. apparatus. 4. The inspection apparatus according to claim 3, further comprising one or more cameras arranged at the inspection position to image an alignment mark formed on the liquid crystal panel. 5. The apparatus according to claim 2, further comprising one or more cameras disposed at a transfer position of a liquid crystal panel between the panel transporting unit and the inspection stage to image the mark. Inspection equipment. 6. The apparatus according to claim 1, further comprising a coarse adjusting unit disposed at a transfer position of the liquid crystal panel between the panel conveying unit and the inspection stage to adjust a position of the liquid crystal panel with respect to the panel conveying unit. The inspection device according to 4 or 5. 7. The panel transfer means includes an arm for transferring a liquid crystal panel to the separation and storage means and the inspection stage, and an arm for transferring the liquid crystal panel from the separation and storage means to the inspection stage and vice versa. The inspection device according to any one of claims 1 to 6, further comprising an arm driving mechanism that moves the arm. 8. The panel transfer means is movable in the left-right direction, and the panel delivery position is provided on one side and the other side in the movement direction of the panel transfer means with respect to the inspection position. The inspection apparatus according to claim 7, further comprising an inspection stage movable to one of the panel delivery positions and the inspection position, and an inspection stage movable to the other panel delivery position and the inspection position. 9. The arm driving mechanism is a mechanism for causing the arm to reciprocate in the front-rear direction, reciprocate in the up-down direction, and angular rotation about an axis extending in the up-down direction. The separating and storing means is disposed on the side opposite to the inspection position with respect to the moving path of the panel transporting means, and the tray port is provided on one side and the other in the moving direction of the panel transporting means with respect to the separating and storing means. 9. The inspection device according to claim 8, wherein the inspection device is arranged on the side. 10. The tray transporting means includes at least a pair of tray catchers that releasably grip a corresponding edge of a tray, and moves the tray catchers in a direction away from each other to grip and release the tray. A first moving mechanism, a second moving mechanism for vertically moving the tray catcher to transfer the tray, and a tray for moving the tray from the tray port to the separate storage means or vice versa. 2. A third moving mechanism for moving a catcher to a position where the tray port is disposed and a position where the separation and storage unit is disposed.
The inspection device according to any one of claims 9 to 9. 11. A base plate attached to the inspection position of a main body frame supporting the inspection stage, further comprising unit support means arranged at the inspection position to support the probe unit. And a slide base mounted on the base plate so as to be movable in the front-rear direction, the slide base being configured to removably mount the probe unit, wherein the slide base sets the probe unit at the inspection position. The inspection apparatus according to any one of claims 1 to 9, wherein the inspection apparatus is selectively movable to a position and a second position where the probe unit is placed outside the main body frame. 12. A camera disposed at a panel transfer position for transferring a liquid crystal panel between the panel transport means and the inspection stage so as to image an identification code formed on the liquid crystal panel. The inspection device according to claim 1. 13. The separating and accommodating means includes a plurality of columns extending in the vertical direction at intervals from each other and having a receiving portion for receiving an upper portion inserted into the tray and a lower surface of the tray. The inspection device according to any one of claims 1 to 12.