JP3365781B2 - Board appearance inspection device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting the appearance of a substrate such as a wafer or a liquid crystal glass plate.

[0002]

2. Description of the Related Art Conventionally, an apparatus of this type has been shown in FIG.
A device as schematically shown in FIG. In such a device, the take-out arm 6 is inserted in parallel into the space between the plurality of substrates 4 arranged on the carrier 2 by a drive mechanism (not shown), and the take-out arm 6 holds the substrates 4 by suction. The take-out arm 6 is pulled out from the carrier 2 and the substrate 4 is moved to the inspection area 8.
When reaching the inspection area 8, the take-out arm 6 is moved to the visual inspection device 1
The substrate 4 is lowered in the 0 direction and the substrate 4 is held by the holding unit 1 of the visual inspection device 10.
Transfer to 2. The substrate 4 transferred to the holding unit 12
Are sucked and held by the holding portion 12, and are oscillated by rotation. As a result, the substrate 4 is given a three-dimensional movement,
A visual inspection is performed by the operator. Such a visual inspection device 10 has a configuration disclosed in, for example, Japanese Patent Publication No. 2-62950.

FIG. 12 shows the internal structure of the visual inspection apparatus 10. As shown in FIG. 12, the visual inspection device 10 includes a case 11, a holding portion 12 capable of holding the substrate 4 (see FIG. 11) by suction, and a first shaft 14 rotatably supporting the holding portion 12. And a support arm 16 for rotatably supporting the base end side of the first shaft 14,
A stand portion 18 that pivotally supports the base end of the support arm 16.
A second shaft 20 that gives the stand portion 18 a rotational movement in the horizontal direction; a rack 22 that holds the stand portion 18; and a guide 24 that vertically moves the rack 22.

According to such a visual inspection device 10, first, when the holding portion 12 is rotated while the substrate 4 (see FIG. 11) is suction-held, the first motor 26 is used to rotate the first portion.
The shaft 14 of is rotated. Further, when changing the direction of the substrate 4 (see FIG. 11), the rack 22 is lowered along the guide 24. By this lowering of the rack 22, the holding portion 12 is rotated in the arrow S direction around the first pivot point 28, and the orientation of the substrate is changed. Next, when changing the relative position of the substrate 4 with respect to the case 11, the second motor 3
The second shaft 20 is rotated through 0. As a result, the substrate 4 is revolved along the outer peripheral surface of the case 11.

[0005]

However, most of the conventional appearance inspection apparatuses are for taking out the substrate 4 from the carrier 2 (that is, the takeout arm 6) and for visually inspecting the substrate 4. Inspection means (that is, visual inspection device 10)
And are configured independently. This is because it is necessary to give not only a swinging motion to the substrate 4 but also a rotating motion, so that the substrate 4 has to be a separate structure.

The substrate 4, especially the glass substrate for liquid crystal,
The accuracy is one rank lower than that of a general wafer, and the size of the substrate is approximately 400 x 350 mm.
If the device is configured to perform the rotational movement, not only the structure of the device becomes complicated, but also the device becomes large. For this reason,
It is uneconomical due to increased manufacturing cost. In addition, the conventional device requires a transfer mechanism for the substrate 4 in addition to the take-out means and the inspection means, which makes the structure complicated and increases the size of the device. Furthermore, since the time required for transfer is required, the inspection efficiency is reduced. Also, since the transfer process is added to the transition from the extraction process to the inspection process,
For example, the probability that the substrate 4 that requires high accuracy will be damaged is also increased.

The present invention has been made in order to eliminate such an adverse effect, and its purpose is a simple and compact structure, and it is possible to shorten the time required for the inspection and to inspect the substrate safely and surely. To provide a simple board appearance inspection device.

[0008]

In order to solve such a problem, a substrate visual inspection apparatus according to the present invention includes a storage unit for storing a plurality of substrates and a substrate selected from the storage units by suction. A suction holding arm to be conveyed, a moving means for moving the suction holding arm between the storage part and a visual observation position separated from the storage part, and the suction holding arm swinging in a predetermined direction from a horizontal state at the visual observation position. A first rotating mechanism for rotating the substrate in the plane of the suction holding arm at the visual observation position; and a second rotating mechanism for rotating the substrate at the visual observation position by the suction holding arm. And a light source for visual observation that illuminates the surface from above.

The suction holding arm moves linearly with respect to the storage portion, and a position where the substrate is pulled out from the storage portion is set as the visual observation position.

The first rotation mechanism has a rotation direction sensor for monitoring the rotation state of the suction holding arm, and drives and controls the suction holding arm in the forward and reverse directions within a predetermined angle.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A substrate appearance inspection apparatus according to an embodiment of the present invention will be described below with reference to FIGS.

As shown in FIG. 1, the substrate visual inspection device 32 of the present embodiment is arranged at the rear of the inspection device main body 34 and is capable of accommodating a plurality of substrates 36 (for example, liquid crystal glass substrates, wafers). The device 38, the inspection device 40 for visually inspecting the substrate 36, and the inspection device main body 34 are arranged in front of the device 38.
The operation unit 128 for operating the inspection device 40 is provided.

As shown in FIG. 2, the accommodating device 38 includes a carrier 42 in which a plurality of substrates 36 can be arranged side by side in a vertical direction at a predetermined interval, a holding table 44 for holding the carrier 42, and a carrier 44 for holding the carrier 42. An elevating mechanism 46, which is provided on each side of the holding table 44 and vertically moves the holding table 44, is provided.

As shown in FIGS. 2 to 4, the lifting mechanism 4
6 is a guide rod 4 for guiding the holding table 44 in the vertical direction.
8, a lifting force transmission rod 50 that transmits vertical lifting force to the holding table 44, and a drive mechanism 52 that drives the lifting force transmission rod 50. The drive mechanism 52 is
A first servo motor 54 provided in the inspection device main body 34 on the side of the lifting force transmission rod 50, and a pair of transmission belts 56 for transmitting the driving force of the first servo motor 54 to the pair of lifting force transmission rods 50, for example. And are equipped with.

Therefore, when the first servomotor 54 is driven in the forward and reverse directions at a predetermined angle, the driving force is transmitted to the lifting force transmission rod 48 via the transmission belt 56.
As a result, the holding table 44 is vertically moved up and down along the guide rod 48 to move the carrier 42 up and down by a predetermined amount.

Further, as shown in FIGS. 3 to 8, the inspection apparatus 40 includes a plurality of substrates 36 housed in a carrier 42.
A substantially concave suction holding arm 58 having a thickness that can be inserted into a mutual space, a rotation mechanism 60 that rotatably holds this suction holding arm 58, and a suction mechanism that is disposed on both sides of the suction holding arm 58. A guide mechanism 62 for guiding the mechanism 60 in the direction of the carrier 42 (that is, behind the inspection device body 34).

The suction holding arm 58 has a substantially concave shape and has a thickness such that the suction holding arm 58 can be inserted into the space between the plurality of substrates 36 housed in the carrier 42. Further, the upper surface of the suction holding arm 58 is processed into a flat shape so that the back surface of the substrate 36 can be stably held without being damaged.
Three suction mechanisms 64 connected to a suction pump (not shown) are provided on the upper surface of the suction holding arm 58. Specifically, each of the suction mechanisms 64 is provided at the tip of a pair of protrusions 66 extending to the tip side of the suction holding arm 58 (that is, the carrier 42 side).
The remaining one is provided in the central portion between both base end portions of these protrusions 66. Each of these suction mechanisms 64 has a
A first suction passage 59 formed on the back surface side of the suction holding arm 58 is connected for communication. This first suction passage 59
Is a second suction passage 9 provided on a rotary shaft 68 described later.
0 to the suction pump. Such a suction mechanism 66 is configured to be able to suck the back surface of the substrate 36 by suction force from a suction pump when sucking and holding the back surface of the substrate 36. In this way, by applying the suction force, the substrate 36 is stably and reliably suction-held on the suction-holding arm 58. Therefore, even if the suction holding arm 58 is rotated, the substrate 36 does not slide down from the suction holding arm 58.

The rotating mechanism 60 extends in the front-back direction of the inspection device main body 34 (that is, the direction connecting the operating portion 128 and the carrier 42), and the extended end thereof is located at the central portion of the suction holding arm 58 on the rear end side. A rotary shaft 68 that is connected and fixed and that rotates the suction holding arm 58, and a rotary shaft 68 that is orthogonal to the rotary shaft 68 and that protrudes on both sides of the rotary shaft 68 are rotatable. , A supporting member 7 for rotatably supporting the rotating shaft 68
0, and the shaft portion 7 protruding from both sides of the support member 70.
2 is rotatably supported, and the support member 70 is moved in the front-back direction (that is, the carrier 42 by a guide mechanism 62 described later).
And a guide member 74 for moving the guide member 74 toward or away from the guide member 74.

As shown in FIG. 5, the rotating shaft 68 is rotatably incorporated in the supporting member 70 by the bearing mechanism 76, and the second servo motor 78 is provided at the rear end of the rotating shaft 68 via the driving force transmitting mechanism. It is connected. Specifically, the drive force transmission mechanism includes a first pulley 80 attached to the rear end of the rotary shaft 68, a second pulley 84 attached to the drive shaft 82 of the second servomotor 78, and Are connected to each other by a belt 86. A second suction passage 90, which is connected to the first suction passage 59 extending from the suction mechanism 64, is formed inside the rotary shaft 68.

The second servomotor 78 has a first
The transmission 88 of the first transmission 88 is connected.
A desired rotational movement can be given to the suction holding arm 58 by controlling the. Further, a first rotation direction sensor 92 for monitoring the rotation state of the suction holding arm 58 is attached to the support member 70.

In such a structure, when the second servomotor 78 is driven in the forward and reverse directions at a predetermined angle, the driving force is transmitted to the rotary shaft 68 via the driving force transmission mechanism. As a result, the suction holding arm 58 connected and fixed to the extended end of the rotation shaft 68 is rotated within a predetermined angle in the direction indicated by the arrow A in FIGS. 4 and 6.

Further, as shown in FIG. 3, FIG. 7 and FIG.
The support member 70 is orthogonal to the rotating shaft 68 described above,
The inspection device main body 34 extends in the left-right direction. At both ends of such a support member 70, integrally projecting shaft portions 72 (only the shaft portion 72 on the right side of the inspection device body 34 is shown in an enlarged manner in FIGS. 7 and 8) are provided. There is. Each of these shafts 72 is rotatably supported by a guide member 74 that is moved in the front-rear direction (that is, in the direction toward or away from the carrier 42) by a guide mechanism 62 described later.

In particular, as shown in FIG. 3, a third pulley 94 (only the right side portion is shown in FIG. 3) is attached to the shaft portion 72. In parallel with the third pulley 94, a third pulley
The servo motor 96 is provided in the guide member 74.
The drive shaft 98 of the third servomotor 96 is provided with a fourth pulley 100.
The 0 and the third pulley 94 are connected to each other by a belt 102. Therefore, when the third servomotor 96 is driven in the forward and reverse directions at a predetermined angle, its driving force is the third pulley 94 via the fourth pulley 100 and the belt 102.
Is transmitted to the shaft 72 to rotate the shaft 72. As a result, the support member 70 is rotated, and the suction holding arm 58 is rotated within the predetermined angle in the direction indicated by the arrow B in FIG. The guide member 74 is provided with a second rotation direction sensor 93 that monitors the rotation state of the support member 70.

Further, as shown in FIGS. 7 and 8, cylindrical projections 104 are provided on both surfaces of the support member 70 on the opposite side of the shaft 72, respectively. Convex portion 10
A torsion spring 106 is wound around the coil 4. One end of the torsion spring 106 abuts on a first abutting portion 108 provided on the support member 70, and the other end abuts on a second abutting portion 110 provided on a guide member 74 described later. Has been done. Therefore, the support member 70 is always maintained in a state of being biased upward by the torsion spring 106. As a result, the suction holding arm 58 supported by the support member 70 via the rotating shaft 68 is always maintained horizontally. Further, since the torsion spring 106 is biased in this way, for example, the output for rotating the suction holding arm 58 upward in the direction indicated by the arrow B in FIG. 4 is sufficient with low output. As a result, the load applied to the third servo motor 96 during driving can be reduced and the starting output can be set weak. That is, a small motor will suffice, resulting in a compact device.

Further, as shown in FIG. 3, FIG. 7 and FIG.
The guide mechanism 62 that moves the guide member 74 in the front-rear direction of the inspection device body 34 is provided on both sides of the suction holding arm 58 from the front side of the inspection device body 34 to the rear side (that is, the operation unit 1).
28, the guides 112 are arranged in parallel to each other toward the carrier 42, the conveying belts 114 are arranged below the guides 112 and parallel to the guides 112, and the conveying belts 114 are driven. And a fourth servo motor 116. The transport belts 114 are respectively stretched over a pair of fifth pulleys 113 provided in front of the inspection apparatus body 34 and a pair of sixth pulleys 115 provided in the rear.

The guides 112 are respectively inserted into guide holes (not shown) formed in the guide member 74. Further, the outer peripheral surface of the transport belt 114 is a guide member 74.
Is arranged so as to come into contact with the lower end surface of the guide belt 74, and the contact portion is fastened to each other by a bolt 118 (see FIG. 8) screwed from the inside of the conveyor belt 114 to the lower end surface of the guide member 74. In addition, the fourth servomotor 11
At the tip of the drive shaft 120 extended from both sides of 6, respectively,
The attached seventh pulley 122 is connected to the pair of fifth pulleys 113 via a belt (not shown). As a result, when the fourth servo motor 116 is driven in the forward and reverse directions at a predetermined angle, the driving force is transmitted to the fifth pulley 113 via the seventh pulley 122 and a belt (not shown), The transport belt 114 is moved in the forward and reverse directions. As a result, the guide member 74 is moved in the front-rear direction of the inspection device main body 34 (that is, the direction toward or away from the carrier 42) in accordance with the moving direction of the transport belt 114. Therefore, the carrier 4 of the suction holding arm 58
It becomes possible to insert and remove to 2. Next, the operation of the board appearance inspection device 32 of the present embodiment will be described with reference to FIGS.

First, the first servomotor 54 is driven in the forward direction so that the lower surface of the substrate 36 to be inspected is set to a position slightly higher than the upper surface of the suction holding arm 58.
The carrier 42 is lowered by a predetermined amount. When the carrier 42 is set, the first servo motor 54 stops. At this time, a pair of the first and second carriers 42 arranged on both sides of the carrier 42, respectively.
The alignment member 130 (see FIG. 1) is extended to press both edges of the set substrate 36 against each other. As a result,
For example, the substrate 3 which is misaligned while the carrier 42 is descending
6 positions are arranged. Next, the fourth servomotor 11
6 drives in the forward direction to move the guide member 74 toward the carrier 42 via the transport belt 114. When the suction holding arm 58 is inserted into the carrier 42 by a prescribed amount, the fourth servomotor 116 stops. Next, the first servomotor 54 is driven in the forward direction, and the carrier 42 is lowered until the upper surface of the suction holding arm 58 contacts the back surface of the target substrate 36. Adsorption holding arm 5
When the upper surface of 8 contacts the rear surface of the substrate 36, the first servomotor 54 stops. At this time, a suction pump (not shown) operates to suck the back surface of the substrate 36 by the suction mechanism 64. With the suction pump operating, the fourth servomotor 116 is driven in the opposite direction to move the conveyor belt 114 in the direction in which the guide member 74 separates from the carrier 42. With the movement of the guide member 74, the support member 70
Is moved and the suction holding arm 58 holds the substrate 36 by suction.
Are pulled out from the carrier 42. When the substrate 36 is separated from the carrier 42, the fourth servo motor 116 stops. At this time, the third servo motor 96 is driven in the forward direction by a prescribed amount to rotate the support member 70. As a result, the tip end side of the suction holding arm 58 is lifted, and the substrate 36 is tilted. When the substrate 36 is tilted by the prescribed amount, the third servomotor 96 stops. At this time, light (for example, green light) is emitted from the pair of light sources 124 arranged on the upper portion of the inspection device body 34. The light emitted from the light source 124 is applied to the substrate 36 via the reflecting mirror 126. With the light illuminated,
The second servomotor 78 drives in the forward and reverse directions by a prescribed amount to rotate the rotary shaft 68 in the forward and reverse directions. As a result, the substrate 36 sucked and held by the suction holding arm 58 is
It is rotated in the direction indicated by arrow A in FIGS. 4 and 6. Of the reflected light reflected from the upper surface of the rotating substrate 36, the reflected light reflected from the damaged portion has different optical characteristics from other reflected light. If there are scratches, the scratches diffusely reflect the light and inform the location. As a result, an observer standing on the side of the operation unit 128 can confirm the damaged portion by the change in the reflected light. When the visual inspection is completed, the second servo motor 78 stops. Next, the third servomotor 96 is driven in the opposite direction to rotate the support member 70. As a result, the suction holding arm 58 is returned to the horizontal state.
When the suction holding arm 58 becomes horizontal, the third servo motor stops. At this time, the second alignment member 133 (see FIG. 1) is extended and presses both edges of the substrate 36 suction-held by the suction-holding arm 58 against each other. As a result, for example, the substrate 36 whose position is displaced during the visual inspection is aligned with the initial position. Next, the fourth servomotor 116 is driven in the forward direction to move the conveyor belt 1
The guide member 74 is moved toward the carrier 42 via 14. When the substrate 36 is completely inserted into the carrier 42, the fourth servo motor 116 stops and the suction pump stops at the same time. At this time, the first servomotor 54
Drives a little in the opposite direction to raise the holding table 44 slightly via the lifting force transmission rod 50. As a result, the upper surface of the suction holding arm 58 is separated from the lower surface of the substrate 36. Therefore, the inspected substrate 36 is stored in the carrier 42. Next, the fourth servo motor 116 is driven in the opposite direction to move the guide member 74 in the direction of the operation portion 128 (see FIG. 1) via the transport belt 114. This guide member 7
4, the suction holding arm 58 moves the carrier 42.
Pulled out of. At this time, the first servomotor 54
Is driven in the positive direction to lower the carrier 42 by a predetermined amount so that the lower surface of the next substrate 36 to be inspected is set to a position slightly higher than the upper surface of the suction holding arm 58. By sequentially repeating such steps, the carrier 42
A visual inspection is performed on the substrate 36 stored in.

Unlike the conventional apparatus, the board appearance inspecting apparatus of the present embodiment does not have a board appearance inspecting apparatus as a separate body but rotates the apparatus for taking out the board from the carrier and the board. It is configured integrally with a device for inspecting the appearance. As a result, the structure of the device is simple and compact, and the device can be provided at a low price. Further, since the step of transferring the substrate to the inspection device is eliminated, the time required for the visual inspection can be shortened and the substrate is not damaged. Furthermore, even if the substrate shifts during external observation, the substrate is prevented from coming into contact with the carrier and being damaged by aligning the substrate with the initial position by the second alignment member before carrying it into the carrier. it can.

The present invention is not limited to the above-mentioned embodiment. For example, the rotating mechanism 60 can be configured as shown in FIG. The rotation mechanism according to this modification includes a first rotation member 135 and a second rotation member 137, and their respective rotation axes are orthogonal to each other. Specifically, the first holding member 139 is interposed between the first rotating member 135 and the second rotating member 137. The first rotating member 135 is rotated in the arrow X direction with respect to the first holding member 139. Also, the first
Holding member 139 and second rotating member 137 are fastened to each other, and the second rotating member 137 rotates in the direction of arrow Y with respect to the second holding member 141 arranged on the lower surface thereof. Be moved.

A rotating mechanism according to another modification is shown in FIG.
As shown in 0, a suction holding unit 1 capable of holding a substrate (not shown) by suction and rotatable in either direction of arrow E
43, a first support member 145 that rotatably supports the suction holding portion 143 and is rotatable in the arrow F direction, and a first support member 145 that rotatably supports the first support member 145 and in the arrow G direction. And a second support member 147 that is rotatable. It should be noted that three suction mechanisms are provided on the surface of the suction holder 143, and the suction force of a suction means (not shown) surely sucks and holds the substrate on the suction holder 143. According to such a rotation mechanism, the suction-held substrate is rotated while being rotated in the directions orthogonal to each other.

[0031]

EFFECTS OF THE INVENTION The board appearance inspecting apparatus of the present invention inspects the appearance by rotating the apparatus for removing the board and the board without separating the board appearance inspecting apparatus from the conventional apparatus. And a device for doing so are integrated. As a result, the structure of the device is simple and compact, and the device can be provided at a low price. Further, since the step of transferring the substrate to the inspection device is eliminated, the time required for the visual inspection can be shortened and the substrate is not damaged.

[Brief description of drawings]

FIG. 1 is a perspective view showing an entire board appearance inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a rear view of the board appearance inspection device shown in FIG.

FIG. 3 is a plan view of the board appearance inspection device shown in FIG.

FIG. 4 is a side view of the board appearance inspection device shown in FIG. 1.

5 is an enlarged cross-sectional view of a portion of a rotating shaft that is connected and fixed to a suction holding arm that is the configuration of the substrate visual inspection apparatus shown in FIG.

FIG. 6 is a front view of an upper portion of the board appearance inspection device shown in FIG.

7 is a view showing a state in which one of the shaft portions integrally projected on both sides of the support member which is the configuration of the board appearance inspection device shown in FIG. 1 is rotatably supported by the guide member. The partial expanded sectional view shown.

FIG. 8 is a diagram showing a portion of the shaft portion shown in FIG.
The side view which shows the state in which the guide member is fastened to the conveyance belt.

FIG. 9 is a perspective view showing a modified example of the rotating mechanism that is the configuration of the substrate visual inspection apparatus of the present invention.

FIG. 10 is a perspective view showing another modification of the rotating mechanism that is the configuration of the substrate visual inspection apparatus of the present invention.

FIG. 11 is a diagram schematically showing only the main configuration of the configuration of a conventional board appearance inspection device.

12 is a cross-sectional view showing the configuration of the visual inspection device in the configuration shown in FIG.

[Explanation of symbols]

36 ... Substrate, 40 ... Inspection device, 42 ... Carrier, 58 ...
Adsorption holding arm, 60 ... Rotation mechanism, 62 ... Guide mechanism.

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-236149 (JP, A) JP-A-4-315948 (JP, A) JP-A-63-111638 (JP, A) Actual Kaihei 2- 36043 (JP, U) (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01L 21/66 G01N 21/956 H01L 21/68

Claims (3)

(57) [Claims] 1. A storage unit for storing a plurality of substrates, a suction holding arm for holding and transporting a substrate selected from the storage unit, a suction observation arm for observing the storage unit and a visual observation position separated from the storage unit. A moving means for moving the suction holding arm in a predetermined direction from a horizontal state at the visual observation position in a predetermined direction; and a plane in the suction holding arm at the visual observation position. A substrate visual inspection apparatus comprising: a second rotating mechanism that rotates the substrate; and a visual observation light source that illuminates the surface of the substrate that is arranged at the visual observation position by the suction holding arm from above. . 2. The suction holding arm linearly moves with respect to the storage portion, and the position where the substrate is pulled out from the storage portion is set as the visual observation position. Substrate visual inspection device. 3. The first rotation mechanism has a rotation direction sensor for monitoring a rotation state of the suction holding arm, and drives and controls the suction holding arm in forward and reverse directions within a predetermined angle. The board appearance inspection apparatus according to claim 1, wherein: