CN101148225A - Transfer loading device - Google Patents
Transfer loading device Download PDFInfo
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- CN101148225A CN101148225A CNA2007101531277A CN200710153127A CN101148225A CN 101148225 A CN101148225 A CN 101148225A CN A2007101531277 A CNA2007101531277 A CN A2007101531277A CN 200710153127 A CN200710153127 A CN 200710153127A CN 101148225 A CN101148225 A CN 101148225A
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- arm
- transfer
- shifting apparatus
- sliding part
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
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- Condensed Matter Physics & Semiconductors (AREA)
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
A transfer loading device capable of transferring loading corresponding to large workpiece and avoiding particulate generating problem at the same time are provided in the present invention. A transfer loading device (30) installs base end sides of base end side arm (2) of a pair of free arms (4) composed of base end side arm (2) and front end side arm (3) separately on the base platform (1) running freely, having a transfer loading arm (5) leading the front end sides a pair of front end side arms (3) to run mutually and connect freely, having a sliding part (20) leading the base platform (1) to slide along transfer loading direction.
Description
Technical field
The present invention relates in the delivery system of conveying workpieces (being called " object conveyor thing ") etc., use, make the workpiece shifting apparatus that straight line moves in same horizontal surface by multiarticulate arm.
Background technology
In the factory that makes semiconductor substrate or LCD panel etc., because the tabular blank (semiconductor wafer or glass board) as its blank is implemented the processing of multiple operation on different positions, so the delivery system that the workpiece as the object conveyor thing of accommodating the pallet etc. of this tabular blank is carried in clean room must be arranged.In this delivery system, use and make the workpiece shifting apparatus that straight line moves in same horizontal surface by multiarticulate arm.
Like this, using the shifting apparatus (being also referred to as " SCARA type arm " (having the human arm SelectiveCompliance Assembly Robot Arm that puts together machines that selects compliance)) of multiarticulate arm type in clean room is because the generation of the particulate of pollution dust free room is less.
Figure 12 is the such shifting apparatus of expression, and as the front elevation of an example of the shifting apparatus of background technology of the present invention.This shifting apparatus is documented in the patent documentation 1.
This shifting apparatus 100 has: a pair of base station 101; Rotation is installed in a pair of cardinal extremity side arm 102 on this a pair of base station 101 freely respectively; Be rotatably installed in a pair of front end side arm 103 on the front end separately of this a pair of cardinal extremity side arm 102; With rotation freely will this a pair of front end side arm the transporting arms 105 of front binding.
Each base station 101 is symmetrical in cardinal extremity side arm 102 line of centers of this base station 101 and rotates driving synchronously, thus, this shifting apparatus 100 can make transporting arms 105 state that the dummy line of long and two-short dash line is represented from figure move to the state shown in the solid line along symmetrical center line direction straight line.
On transporting arms 105, be provided with a pair of control arm 106 of controlling workpiece W.Thus, this shifting apparatus 100 is brought into play the transfer function that in its straight line moving range workpiece is grasped, moves, unloads.
But, in this shifting apparatus 100, under workpiece W is small-sized, weight-saving situation, can not become problem, but maximize for workpiece W, the elongated and transfer weight of transfer distance also increases.Corresponding therewith, the length of each arm is elongated, requires the intensity as beam, and textural at multi-joint arm if transfer distance or transfer weight become big, then is difficult to correspondence, and hope can be resolved.
[patent documentation 1] Japanese kokai publication hei 6-156632 communique (Fig. 1)
Summary of the invention
The present invention makes in order to address the above problem, purpose provide a kind of in the problem of avoiding particulate to take place, can with the cooresponding shifting apparatus that carries out transfer of workpiece that maximizes.
In addition, in the present invention, the transfer object of shifting apparatus is called the transfer thing, as the object conveyor thing of delivery system or be called workpiece, but indication is all identical with identical transfer thing.
Technical scheme 2 described shifting apparatus are subordinated to technical scheme 1, it is characterized in that having in mounting under the situation of transfer thing, Yi Bian keep above-mentioned transporting arms to be in the state of position of readiness, Yi Bian above-mentioned base station is slided by above-mentioned sliding part.
Technical scheme 3 described shifting apparatus are subordinated to technical scheme 2, it is characterized in that, under the situation that does not have mounting transfer thing, carry out moving of above-mentioned transporting arms and moving based on the above-mentioned base station of above-mentioned sliding part simultaneously.
The invention effect:
According to technical scheme 1 described shifting apparatus, because the base end side of a pair of free arm that will be respectively be made of two arms rotates and is installed on the base station freely, possess the front of above-mentioned a pair of free arm is rotated the transporting arms that links freely mutually, possesses the sliding part that above-mentioned base station is slided along the transfer direction, so can shorten the stroke of transporting arms, the transfer of the transfer thing that can maximize.
In addition, can not invade beyond the transporting arms part and with the transfer of transfer thing in the mounting zone of transfer thing etc., can prevent to place other transfer things in mounting zone because of particle contamination from the shifting apparatus generation.
According to technical scheme 2 described shifting apparatus, except the effect of technical scheme 1, owing to have under the situation of transfer thing in mounting, be in transporting arms under the state of position of readiness, by sliding part base station is slided, so can also the exercise load load-carrying of attenuative effect on the bearing of sliding part, can make bearing durable.
According to technical scheme 3 described shifting apparatus, except the effect of technical scheme 2, because under the situation that does not have mounting transfer thing, carry out simultaneously based on moving of the transfer thing of transporting arms and moving based on the base station of sliding part, so loading more after a little while, transporting arms and transfer thing are moved quickly, can the time under reach.
Description of drawings
Fig. 1 (a) is the front elevation of an example of expression shifting apparatus of the present invention, and Fig. 1 (b) is the lateral plan of Fig. 1 (a).
Fig. 2 is the figure of sliding part of the shifting apparatus of presentation graphs 1, and Fig. 2 (a) is its front elevation, and Fig. 2 (b) is the lateral plan of Fig. 2 (a).
Fig. 3 is the transfer arm of shifting apparatus of presentation graphs 1 and the timer-operated time diagram of action of sliding part, the time diagram of Fig. 3 (a) when being load, the time diagram of Fig. 3 (b) when being zero load.
Fig. 4 is the figure along the manner of execution of the time diagram of Fig. 3 of the shifting apparatus of presentation graphs 1 successively.
Fig. 5 is the figure along the manner of execution of the time diagram of Fig. 3 of the shifting apparatus of presentation graphs 1 successively.
Fig. 6 is the figure along the manner of execution of the time diagram of Fig. 3 of the shifting apparatus of presentation graphs 1 successively.
Fig. 7 is the figure along the manner of execution of the time diagram of Fig. 3 of the shifting apparatus of presentation graphs 1 successively.
Fig. 8 is the figure along the manner of execution of the time diagram of Fig. 3 of the shifting apparatus of presentation graphs 1 successively.
Fig. 9 is the figure along the manner of execution of the time diagram of Fig. 3 of the shifting apparatus of presentation graphs 1 successively.
Figure 10 is the figure along the manner of execution of the time diagram of Fig. 3 of the shifting apparatus of presentation graphs 1 successively.
Figure 11 is the stereoscopic figure of an example of the delivery system of the expression shifting apparatus that possesses Fig. 1.
Figure 12 is the front elevation of expression as the shifting apparatus of background technology of the present invention.
The specific embodiment
Below, utilize accompanying drawing that embodiments of the present invention (embodiment) are described.
Fig. 1 (a) is the front elevation of an example of expression shifting apparatus of the present invention, and Fig. 1 (b) is the lateral plan of Fig. 1 (a).
This shifting apparatus 30 is in the factory of Production Example such as semiconductor substrate or LCD panel etc., for its tabular blank (semiconductor wafer or glass board) is implemented various processed in clean room, with the pallet that respectively contains this tabular blank of a slice as the object conveyor thing be workpiece W, the device that under one or multistage stacked state, uses during transfer.
In addition, here, as the example that is fit to use shifting apparatus, represented in clean room, to carry the situation of the pallet that contains the tabular blank, but shifting apparatus of the present invention is not limited to this, generally can use under the situation with other positions of object conveyor transfer to the same plane.
Shifting apparatus 30 of the present invention, the base end side of the cardinal extremity side arm 2 of a pair of free arm 4 that will be made of two arms (cardinal extremity side arm 2, front end side arm 3) rotates and is installed in freely on the base station 1, and possesses the front of the front end side arm 3 of a pair of free arm 4 is rotated the transporting arms 5 that links freely mutually.In addition, possesses the sliding part 20 that base station 1 is slided along the transfer direction.
Drive for a pair of cardinal extremity side arm 2 being rotated symmetrically synchronously with line of centers respectively, transporting arms 5 straight line on this symmetrical center line direction is moved on this point by a pair of base station 1, identical with the shifting apparatus 100 of background technology shown in Figure 12, so detailed.
Here, so-called symmetrical center line, be meant mid point at the line at the axle center that links base station 1, with the line of the line quadrature that links this center, Fig. 1 (b) is the longitudinal section with shifting apparatus 30 vertical profiles at this symmetrical center line place.
Each above-mentioned a pair of base station 1, cardinal extremity side arm 2, front end side arm 3 (they are collectively referred to as work " free arm 4 "), transporting arms 5 are called arm transfer portion 10 together.In addition, sometimes this arm transfer portion 10 or shifting apparatus 30 are called " SCARA type arm ".
Shifting apparatus 30 is except each above-mentioned one, also possess and make arm transfer portion 10 integral body (this direction is the direction of transfer workpiece W along above-mentioned symmetrical center line direction, so be also referred to as " transfer direction ") sliding part 20 that slides, as mentioned above, with this point as basic feature.The sliding part 20 of load bearing arm transfer portion 10 is positioned on the rotating part 40, and arm transfer portion 10 can rotate with sliding part 20.
On the bay-lift 50 that this rotating part 40 is conceptually represented with long and two-short dash line in the figure by mounting, arm transfer portion 10 and sliding part 20 (being shifting apparatus 30) and rotating part 40 can liftings.
Here, the feature of this shifting apparatus 30 is to possess the integral body of this arm transfer portion 10 of mounting, the sliding part 20 that it is moved along transfer direction straight line below arm transfer portion 10.
Promptly, in order to reach transfer distance as target, utilize the transfer of sliding part 20 and the transfer of arm transfer portion 10, as described later, arm transfer portion 10 is arranged on the top, particularly have only its transporting arms 5 to be positioned at top as the workpiece W of transfer object, the sliding part 20 that is in the below be not positioned at workpiece W the top or near.
Promptly, according to this shifting apparatus 30, for the top of transfer thing or near, move by making particulate produce less arm transfer portion 10, below the transfer thing and away from the position, move by sliding part 20, can be in the burden that alleviates arm transfer portion 10, reach transfer distance on the whole as target, maximization that can corresponding workpiece W, and can reduce the influence of particulate.For this effect, utilize Fig. 3～Figure 10 to illustrate in greater detail in the back.
In the present invention, in arm transfer portion 10 self, also has feature.The transporting arms 5 of arm transfer portion 10 possesses the lower surface 5b of the upper surface 5a that constitutes transfer face, arm, as the base end part 5d of the cardinal extremity of arm and a pair of holding arm 5e that in the transfer face of keeping 5a, stretches out to the front side of transfer direction from base end part 5d.
It is characterized in that the lower surface 5b of this transporting arms 5 supports the front end side arm 3 of this transporting arms 5 freely than rotation upper surface 3a leans on the below.That is, transporting arms 5 is designed to, and it is not interfered on above-below direction with respect to front end side arm 3.
More particularly, the result who obtains the height of transporting arms 5 like this on the direction of interfering with front end side arm 3 sides is, the upper surface of transporting arms 5 (transfer face 5a) is in the roughly the same upper-lower position of the upper surface 3a of the front end side arm 3 of free arm 4 or slightly by the position of top.That is, can make the height of transfer face of shifting apparatus 30 lower as far as possible.
On the other hand, if the front end side arm 3 of such transporting arms 5 and free arm 4 becomes the position relation of interfering up and down,, can become the situation of transporting arms 5 and the part collision of the covering up and down (か ぶ Ru) of front end side arm 3 then according to the rotatable phase of free arm 4.
So, in this shifting apparatus 30, the root portion of transporting arms 5, promptly with the part of front end side arm 3 collision on, be provided with the 5c of the portion that dodges such shown in Fig. 1 (a), that to anti-link direction arm portion is along inclined direction dodged from the mutual connecting part of transporting arms 5 and front end side arm 3.
Fig. 1 (a) expression makes arm transfer portion 10 retreat maximum states with respect to the transfer direction, and by the 5c of the portion that dodges of transporting arms 5, it is approaching that transporting arms 5 is become with front end side arm 3 as can be known, but state that mutually can butt has been avoided collision.
Under the situation that does not have interference up and down between transporting arms 5 and the front end side arm 3, transporting arms 5 can retreat to right (direction of retreat) from the state of this Fig. 1 (a) again, become the position of 0 degree up to symmetrical center line (perhaps transfer direction) angulation with cardinal extremity side arm 2 and front end side arm 3, but in shifting apparatus 30 of the present invention, be state up to Fig. 1 (a).
But, under the state of Fig. 1 (a), very little with symmetrical center line (the perhaps transfer direction) angulation of cardinal extremity side arm 2 and front end side arm 3, the distance that can retreat into this angle and become 0 degree is very little distance as a whole, and inventor of the present invention thinks that the advantage of as far as possible avoiding the transfer face of shifting apparatus 30 by the loss of this very little distance is prior on industry.
Fig. 2 is the figure of sliding part of the shifting apparatus of presentation graphs 1, and Fig. 2 (a) is its front elevation, and Fig. 2 (b) is the lateral plan of Fig. 2 (a).In addition, give identical label and omit repeat specification for the part that has illustrated before this.
This sliding part 20 has: the known straight line that pair of right and left ground is provided with moves guide 11; The sliding frame 12 of this pair of straight-moving guide 11 is set; Be located at the straight line that is arranged at the pair of right and left on the sliding frame 12 move on the midway location of guide 11, known straight line moves driver train 13; Be located at straight line and move block 14 on the two ends of guide 11.
Straight line moves guide 11 and possesses orbit portion 11b that forms straight line path and the moving body 11a that straight line moves on this orbit portion 11b.In this embodiment, one-sided orbit portion b is provided with three moving body 11a.
Straight line moves driver train 13 and uses the structure that has made up threaded shaft and negative thread in this embodiment, but in addition, has made up the structure, linear motor of tooth bar and miniature gears etc., so long as it is just passable to produce the structure of the propulsive effort that straight line moves, kind without limits.But, under the situation about in clean room, using, the least possible structure of generation of preferred particulate.
Move at the pair of right and left straight line on 6 moving body 11a of total of guide 11, be fixed with the base station 1 of arm transfer portion 10, in addition, this base station 1 is subjected to straight line and moves the linear drives power of driver train 13 and slide on its length direction center, and its two ends of moving are subjected to block 14 brakings.
In such structure, this sliding part 20 with arm transfer portion 10 mountings thereon, can and the straight line of arm transfer portion 10 self move independently, make on the transfer arm 10 that straight line moves between predetermined distance.
Utilize Fig. 3 the manner of execution of shifting apparatus 30 with structure as described above and action effect is described and to confirm to Figure 10.
Fig. 3 is the transfer arm of shifting apparatus of presentation graphs 1 and the timer-operated time diagram of action of sliding part, the time diagram of Fig. 3 (a) when being load, the time diagram of Fig. 3 (b) when being zero load.
In these two time diagrams, transverse axis is represented time t, the longitudinal axis represent respectively arm transfer portion 10 transporting arms 5 independent transfer direction movement speed v 1, based on the movement speed v 2 of the transfer direction of the base station 1 of the arm transfer portion 10 of sliding part 20, be positioned in the actual movement speed v 3 of transfer direction of the transporting arms 5 of the arm transfer portion 10 on the base station 1.
Here, respectively with identical under situation about moving, the relation of movement speed v 1+ movement speed v 2=movement speed v 3 is set up.
Concrete manner of execution for arm transfer portion 10, sliding part 20 utilizes Fig. 4 to describe to Figure 10, utilizes above-mentioned two time diagrams that the unique point of the manner of execution of shifting apparatus 30 is described here.
During＜load 〉
On the transporting arms 5 of arm transfer portion 10, carry under the situation of workpiece W, the time diagram during according to the load of Fig. 3 (a), at first, only sliding part 20 actions, the arm transfer portion 10 of readiness for action is quickened, keep certain speed, if approach to slide terminal point then slow down and stop (speed v 2).
During this period, 10 ones in arm transfer portion is failure to actuate, and begins the acceleration of transporting arms 5 accordingly with moment that sliding part 20 reduces speed now, reach certain speed in its moment that finishes of slowing down, keep this certain speed,, then slow down and stop (speed v 1) if approach maximum elongation.
As a result, the movement speed v 3 of the reality of transporting arms 5 becomes the epimere of the figure of Fig. 3 (a).
That is, during load, in shifting apparatus 30 of the present invention, be in transporting arms 5 under the state of position of readiness, base station 1 slided, on the other hand, when transporting arms 5 actions, sliding part 20 is stopped by sliding part 20.
In addition, under loading condition,, regulate the timing of mutual acceleration and deceleration, keep certain speed in order the workpiece W as the transfer thing not to be applied vibration as far as possible.
Under the maximum situation of arm transfer portion 10 elongations, the load that is positioned in the workpiece W on the transporting arms 5 acts on the sliding part 20 by base station 1 as the moment of maximum, but be under the state of position of readiness in such transporting arms 5, act on the moment minimum that the load of the workpiece W on the sliding part 20 brings, if under this state, make sliding part 20 actions, then can reduce the exercise load load-carrying on the bearing that acts on this sliding part 20, make bearing durable.
During＜zero load 〉
On the transporting arms 5 of arm transfer portion 10, do not carry under the situation of workpiece W, time diagram during according to Fig. 3 (b) unloaded, arm transfer portion 10 moves simultaneously with sliding part 20, after the speed v 2 of the sliding part 20 that moves of FEFO predetermined distance became zero, the speed v 1 of the transporting arms 5 of arm transfer portion 10 became zero.
As a result, it is such that the movement speed v 3 of the reality of transporting arms 5 becomes the epimere of figure of Fig. 3 (b).
That is, under the situation of the zero load that does not have mounting transfer thing, carry out simultaneously based on transporting arms 5 free arm 4 (arm transfer portion 10) move and based on the moving of the base station 1 of sliding part 20, can high-speed mobile.
In the case, because workpiece W is not positioned on the transporting arms 5, so do not need to consider based on the influence of the moment of the load of this workpiece W to sliding part 20, because both move simultaneously, institute is so that transporting arms 5 is mobile quickly, as with Fig. 3 (a) and Fig. 3 (b) more as can be known, be used for realizing also can shortening as the time of reaching of moving of the transfer distance of target.
In addition, if investigate from the drive source A of actuating arm transfer portion 10, the aspect of power efficiency that drives the drive source B of sliding part 20, then as this shifting apparatus 30, with under the situation as other drive source A, B separately, identical drive source A, B and drive both simultaneously when using with single movement can make the movement speed v 3 of transporting arms 5 become both movement speed v 1, the high-revolving speed after the v2 addition.
On the other hand, in order to realize the movement speed v 3 after the identical addition, for example, if the drive source C only by actuating arm transfer portion 10 carries out, then the required power of drive source C need be for the power after the power addition of drive source A, B.But, in the case, owing to when load, need move with low speed more, so become the relatively poor state of power efficiency of the bigger power that does not all use drive source C.
Promptly, be divided into arm transfer portion 10 and sliding part 20 if will be used for carrying out the travel mechanism of transfer like this, in separately, possess suitable drive source A, B, then can make both drive source actions and action individually simultaneously respectively, the mode of using increases, and in the drive source A, the B that use effectively separately, can realize independent irrealizable high-speed mobile.
Then, utilize Fig. 4, the concrete manner of execution of arm transfer portion 10, sliding part 20 is described to Figure 10.
Under the state of Fig. 1, the moving direction of shifting apparatus 30 and mounting have the length direction of bay-lift 50 of this shifting apparatus 30 consistent.Here, if make sliding part 20 and shifting apparatus 30 left-hand revolutions 90 degree, then become the state of Fig. 4 by rotating part 40.
Want mounting want transfer workpiece W the mounting place as by Figure 11 described later, be located at along the both sides of the driving path of the length direction of bay-lift 50, in case be positioned on the shifting apparatus 30, then be initially located in the move loading action of the workpiece W (Fig. 1) of readiness for action from the state of this Fig. 4.The time diagram of the motion of shifting apparatus 30 thereafter during along the load of Fig. 3 (a) carries out.
In Fig. 5, only the sliding part 20 of shifting apparatus 30 moves at Fig. 4, and arm transfer portion 10 is failure to actuate.That is, in the maximum states (readiness for action) of stepping back of the free arm 4 of keeping arm transfer portion 10, arm transfer portion 10 whole slips become the state of Fig. 5.
During transfer is during this period moved, arm transfer portion 10 is states that mounting has the load of workpiece W, but be to step back maximum readiness for actions, be minimum state in the moment that acts on for load on the sliding part 20 because of this workpiece W, as mentioned above, can reduce the exercise load load-carrying on the bearing that acts on sliding part 20, can make bearing durable.
Then, in Fig. 9, have only 10 actions of arm transfer portion at Fig. 5, the transporting arms 5 of its front is advanced under the state that is carrying workpiece W successively.In addition, during this period,,, not exercise load, so its influence is less so be static based on the influence of the moment of the load that is carried on the workpiece W on the transporting arms 5 because sliding part 20 is static yet.
Here, in Fig. 9, cardinal extremity side arm 2 and front end side arm 3 are 180 degree (perhaps both are parastate) with transfer direction angulation, free arm 4 becomes the state of full extension, under this state, bay-lift 50 descends, shifting apparatus 30 with workpiece W mounting to purpose mounting place.
After workpiece W was unloaded, shifting apparatus 30 became unloaded state, and in the case, shown in the time diagram of Fig. 3 (b), (speed (v2) is moved simultaneously, and transporting arms 5 is retreated at high speed with sliding part 20 in arm transfer portion 10 (speed v 1).
That is,, transporting arms 5 is moved quickly in zero load, when on transporting arms 5, not loading, can the time under reach.
Figure 10 represents this figure of process midway, if transporting arms 5 retreats into maximum going-back position, then becomes the state of Fig. 4.But, be the state that does not have workpiece W in the case.
In addition, the indicate workpiece mounting zone ZW of mounting workpiece W of Fig. 8, label ZW shown in Figure 9, label ZS represents the conveyor zones ZS that uses for conveying workpieces W, and the boundary line BZ with the long and two-short dash line of thick line represents with the border of these workpiece mountings zone ZW and conveyor zones ZS.
Here, as mentioned above, in shifting apparatus 30 of the present invention, the higher sliding part 20 of possibility that particulate produces is in than boundary line BZ to the position that conveyor zones ZS side retreats significantly, can reduce the influence of particulate to the workpiece W that is in workpiece mounting zone ZW as far as possible.
On the other hand, are multi-joint arm structures to the arm transfer portion 10 that workpiece mounting zone ZW invades, do not have the generation of particulate, and can suppress to be in the pollution of the workpiece W of this part as far as possible.
In addition, the single-piece transfer of shifting apparatus 30 distance be transfer with the transfer distance of arm transfer portion 10 and sliding part 20 distance after apart from total, can realize longer transfer distance on the whole.
Like this, according to shifting apparatus 30 of the present invention,, in the problem of avoiding particulate to produce, can carry out transfer corresponding to the workpiece that maximizes though be repeat specification.
Figure 11 is the stereoscopic figure of an example of the delivery system of the expression shifting apparatus that possesses Fig. 1.
This delivery system shown in Figure 11 80 also possesses jacking system 60 that makes these bay-lift 50 liftings and the driving car 70 that this jacking system 60 is set except the shifting apparatus 30, rotating part 40 and the bay-lift 50 that have illustrated, possess arm transfer portion 10 and sliding part 20.
Above driving car 70, on the front and back end of travel direction, stand and be provided with a pair of jacking system 60, be provided with lift drive mechanism (not shown) within it in the portion, make bay-lift 50 liftings that are provided with in the mode that is erected between a pair of jacking system 60 thus.
Driving car 70 possesses the wheel 61 on four jiaos that are located at driving car framework 67, and jacking system 60, bay-lift 50, shifting apparatus 30 are moved along driving path 62 straight lines.
Workpiece is positioned on the transfer arm 5 of shifting apparatus 30, forward-reverse (arrow P 1) under the effect of the arm transfer portion 10 of shifting apparatus 30, forward-reverse under the effect of sliding part 20 (arrow P 2), rotation (arrow P 3) under the effect of rotating part 40.
In addition, workpiece by mounting under the state of shifting apparatus 30, oscilaltion (arrow P 4) under the effect of bay-lift 50 of this shifting apparatus 30 of carrying, in addition, travelling of driving car 70 by having carried the jacking system 60 that makes bay-lift 50 liftings, and move (arrow P 5) with linearity.
Shifting apparatus 30 is carrying under the state of workpiece on its position of readiness, can be on bay-lift 50 transporting arms from figure 5 front end towards rotate to 180 degree on the contrary towards.
Therefore, according to this delivery system 80, workpiece can be transported to the B place from the A place of the differing heights of the diverse location of the both sides of its driving path 62, in the case, shifting apparatus 30 of the present invention guarantees that by the combination of multiarticulate arm transfer portion 10 and sliding part 20 particulate produces less transfer, and can carry out the transfer corresponding to the maximization of workpiece, its effect also spreads all over the integral body of delivery system 80.
More than, in embodiment, understand concrete example of the present invention in detail, but these only are illustrations, do not limit claims.The technology of in claims, putting down in writing, be in the technical scope of present patent application invention, as throughout suitably the record, comprise with above illustrative embodiment carry out various distortion, after changing embodiment or their combination.
Industrial applicibility
Shifting apparatus of the present invention not only can obtain in requiring the problem of avoiding particulate to produce Use, and can require corresponding maximization workpiece to carry out obtaining in the industrial field of transfer should With.
Claims (3)
1. shifting apparatus is characterized in that possessing:
The a pair of free arm that constitutes by two arms respectively;
Being used for the cardinal extremity side arm of above-mentioned a pair of free arm is that the base station of installing is freely rotated at the center with the cardinal extremity of above-mentioned base end side arm respectively;
Being used for the front end side arm of above-mentioned a pair of free arm is that the transporting arms of installing is freely rotated at the center with the front end of above-mentioned front arm respectively; And
The sliding part that above-mentioned base station is slided along the transfer direction.
2. shifting apparatus as claimed in claim 1 is characterized in that, has in mounting under the situation of transfer thing, Yi Bian keep above-mentioned transporting arms to be in the state of position of readiness, Yi Bian above-mentioned base station is slided by above-mentioned sliding part.
3. shifting apparatus as claimed in claim 2 is characterized in that, under the situation that does not have mounting transfer thing, carries out moving of above-mentioned transporting arms and moving based on the above-mentioned base station of above-mentioned sliding part simultaneously.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP255208/2006 | 2006-09-21 | ||
| JP2006255208A JP4363432B2 (en) | 2006-09-21 | 2006-09-21 | Transfer equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101148225A true CN101148225A (en) | 2008-03-26 |
| CN101148225B CN101148225B (en) | 2012-12-12 |
Family
ID=39248948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101531277A Expired - Fee Related CN101148225B (en) | 2006-09-21 | 2007-09-21 | Transfer loading device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4363432B2 (en) |
| KR (1) | KR101112011B1 (en) |
| CN (1) | CN101148225B (en) |
| TW (1) | TW200819373A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102398776A (en) * | 2010-08-05 | 2012-04-04 | 村田自动化机械有限公司 | Loading and unloading system |
| CN102795442A (en) * | 2012-09-06 | 2012-11-28 | 深圳市华星光电技术有限公司 | Automatic material transporting system |
| CN104470830A (en) * | 2012-08-31 | 2015-03-25 | 村田机械株式会社 | Transfer device |
| CN104986558A (en) * | 2015-07-10 | 2015-10-21 | 东莞市科隆威自动化设备有限公司 | Alternate transfer device for alternately transferring products between two double-line printing presses |
| CN106863897A (en) * | 2015-12-10 | 2017-06-20 | 会田工程技术有限公司 | The work transfer device of forcing press |
| CN107934327A (en) * | 2016-10-13 | 2018-04-20 | 株式会社大福 | Shifting apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5234328B2 (en) | 2008-04-11 | 2013-07-10 | 株式会社ダイフク | Goods storage equipment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06156632A (en) * | 1992-11-27 | 1994-06-03 | Murata Mach Ltd | Elevating base for crane |
| JPH11216691A (en) | 1998-02-03 | 1999-08-10 | Hitachi Ltd | Frog-leg type robot, treatment apparatus and treatment method |
| JP2000042952A (en) * | 1998-07-27 | 2000-02-15 | Hitachi Ltd | Conveyer device and conveying method |
| JP2003054705A (en) | 2001-08-07 | 2003-02-26 | Nippon Yusoki Co Ltd | Automatic warehouse system |
| KR100479494B1 (en) * | 2002-09-18 | 2005-03-30 | 삼성전자주식회사 | Board conveyance robot |
-
2006
- 2006-09-21 JP JP2006255208A patent/JP4363432B2/en not_active Expired - Fee Related
-
2007
- 2007-09-13 TW TW096134291A patent/TW200819373A/en not_active IP Right Cessation
- 2007-09-17 KR KR1020070094306A patent/KR101112011B1/en not_active IP Right Cessation
- 2007-09-21 CN CN2007101531277A patent/CN101148225B/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102398776A (en) * | 2010-08-05 | 2012-04-04 | 村田自动化机械有限公司 | Loading and unloading system |
| CN102398776B (en) * | 2010-08-05 | 2015-06-03 | 村田机械株式会社 | Supply/carry-out system |
| CN104470830A (en) * | 2012-08-31 | 2015-03-25 | 村田机械株式会社 | Transfer device |
| CN104470830B (en) * | 2012-08-31 | 2016-06-15 | 村田机械株式会社 | Shifting apparatus |
| CN102795442A (en) * | 2012-09-06 | 2012-11-28 | 深圳市华星光电技术有限公司 | Automatic material transporting system |
| CN104986558A (en) * | 2015-07-10 | 2015-10-21 | 东莞市科隆威自动化设备有限公司 | Alternate transfer device for alternately transferring products between two double-line printing presses |
| CN104986558B (en) * | 2015-07-10 | 2017-03-29 | 东莞市科隆威自动化设备有限公司 | The intersection shifting apparatus of two-wire printer interstitial chiasma transfer product |
| CN106863897A (en) * | 2015-12-10 | 2017-06-20 | 会田工程技术有限公司 | The work transfer device of forcing press |
| CN107934327A (en) * | 2016-10-13 | 2018-04-20 | 株式会社大福 | Shifting apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101148225B (en) | 2012-12-12 |
| KR20080027144A (en) | 2008-03-26 |
| JP2008074549A (en) | 2008-04-03 |
| TWI374108B (en) | 2012-10-11 |
| TW200819373A (en) | 2008-05-01 |
| KR101112011B1 (en) | 2012-02-24 |
| JP4363432B2 (en) | 2009-11-11 |
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