JPH11216691A - Frog-leg type robot, treatment apparatus and treatment method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To ensure a large stroke equivalent to that of a scalar type robot by providing an error correction mechanism on a wrist part to allow the wrist part to smoothly pass a singular point. SOLUTION: Even when an error is generated in the length of upper arms 13a, 13b and forward arms 7a, 7b due to the difference in local thermal expansion, the error is absorbed by an error correction mechanism 2 to correct the distance between a wrist member 2b and a wrist member 2a which are turnably supported by a shaft member 6b for wrist which is implanted on a tip part of the forward arms 7a, 7b. The wrist part 1a can smoothly pass the position where the wrist part is aligned with drive shafts 14a, 14b on one straight line (referred to as the singular point) without generating any impact. A large stroke can be realized for a hand 1 without generating any impact.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a frog-leg type robot capable of transporting a substrate to be processed, such as a semiconductor wafer or a glass substrate for a flat panel display, and a frog-leg type robot provided with a frog-leg type robot. The present invention relates to a processing apparatus and a processing method for performing.

[0002]

2. Description of the Related Art Robots are used to transport semiconductor wafers and flat panel displays between and within apparatuses. For a conventional wafer or glass substrate, a scalar robot or a direct-acting robot has usually been used.

[0003]

In the above-mentioned conventional SCARA type robot, the shoulder joint of the upper arm is driven by a motor, while the elbow joint and the wrist joint are driven via a belt. Therefore, the front-back and left-right forces applied to the hand are received by the belt inside the arm, which affects the straightness and acceleration / deceleration of the hand, and the vertical force applied to the hand is a direction that twists the joint of the arm. , So the payload cannot be increased. Also, with conventional linear motion robots, taking a large stroke increases the minimum turning radius, increases the weight of the mechanism, tilts the hand, and generates foreign matter from the stage timing belt or ball screw. It becomes a problem.

[0004] An object of the present invention is to solve the above-mentioned problems of the prior art, so that the wrist portion can smoothly pass a singular point and a large stroke can be obtained without enlarging the arm mechanism (arm). To provide a frog-leg type robot. Another object of the present invention is to provide a frog-leg type robot capable of transporting a large substrate to be processed such as a wafer or a glass substrate having a large payload with a large stroke. Another object of the present invention is to increase the size of the transfer chamber by installing a frog-leg type robot capable of transferring a large substrate to be processed such as a wafer or a glass substrate with a large stroke in the transfer chamber. Another object of the present invention is to provide a processing apparatus which can efficiently and stably load and unload a substrate to be processed into and out of a processing chamber, thereby realizing a compact processing apparatus. Another object of the present invention is to increase the size of the transfer chamber by installing a frog-leg type robot capable of transferring a large substrate to be processed such as a wafer or a glass substrate with a large stroke in the transfer chamber. It is an object of the present invention to provide a processing method in which a substrate to be processed can be efficiently and stably carried into and out of a processing chamber and processing reliability is improved.

[0005]

In order to achieve the above object, the present invention relates to a frog-leg type robot having an arm mechanism in which a shoulder joint is coaxial and a wrist joint is offset. A mechanism is provided so that the wrist can pass through the singular point smoothly.

Further, according to the present invention, there is provided a first and second shoulder joint rotation drive shaft rotatably supported on the shoulder portion with the same axis, and a pivotal support side of the first shoulder joint rotation drive shaft. Fixed first
The upper arm, a second upper arm having a pivot side fixed to the second shoulder joint rotation drive shaft, and a first elbow joint shaft member provided at a swing end of the first upper arm. The first movably connected
A forearm, a second forearm rotatably connected to a second elbow joint shaft member provided at a swing end of the second upper arm, and the first shoulder joint rotation drive shaft or A second rotationally connecting the second rotating member for the shoulder joint fixed to the first upper arm and the second rotating member for the elbow joint fixed to the second forearm on the second elbow joint axis. A second power transmission mechanism, a first shoulder joint rotation member fixed to the second shoulder joint rotation drive shaft or the second upper arm, and a first forearm on the first elbow joint shaft. A first power transmission mechanism for rotatably connecting the fixed first elbow joint rotating member;
A first wrist member rotatably connected to a first wrist shaft member provided at the tip of the forearm, and a second wrist shaft member provided at the tip of the second forearm Error correction mechanism configured to slidably connect a second wrist member rotatably connected to a first wrist shaft and to correct a distance between the first wrist shaft and the second wrist shaft. And a hand attached to the first wrist member or the second wrist member in the error correction mechanism, wherein the length of the first upper arm is substantially equal to the length of the second upper arm, The length of the first forearm and the length of the second forearm are substantially equal to each other, and the first and second shoulder joint rotation drive shafts are synchronized with each other by a rotation drive source to at least synchronize with each other. A frog-leg type b characterized by being configured to rotate in the opposite direction Tsu is a door.

Further, according to the present invention, in the frog-leg type robot, the lengths of the first and second upper arms are L.
_1, when the length of the first and second forearm was L _2,
Wrist and compensable formed such that the distance 2L ₃ satisfies the following equation (1) of the relationship between the first wrist axis and shaft for the second wrist by the error correction mechanism, The first and second upper arms and the first and second forearms are configured to be able to pass through a singular point where they overlap on a straight line. L ₃ = L ₁ −L ₂ (Equation 1) Further, in the frog-leg type robot, the present invention provides the first and second elbow joints with the radius R of the first and second shoulder joint rotating members. The rotation member is configured to be at least twice the radius r.

The present invention also relates to the frog-leg type robot, wherein a relationship between a radius R of the first and second rotating members for the shoulder joint and a radius r of the first and second rotating members for the elbow joint is provided. Are formed so as to satisfy the following (Equation 2). Here, θ indicates the inclination angle of the upper arm (shoulder joint) from the straight line where the upper arm and the forearm overlap.

R / r = (θ + cos ~ ¹ ｛(L ₁ cos θ−L ₁ + L ₂ ) / L ₂ }] / θ (Equation 2) Further, in the frog-leg type robot, the shoulder may be It is characterized in that it can be turned.
Also, the present invention provides the frog-leg type robot, wherein the rotary drive source is composed of two, and the rotational output of each rotary drive source is rotationally connected to each of the first and second shoulder joint rotary drive shafts. It is characterized by comprising. Further, the present invention provides the frog-leg type robot, wherein the rotary drive source is constituted by two of which are arranged on the same axis, and the rotational output of each rotary drive source is converted into a first and a second shoulder joint rotary drive. It is characterized by being configured to be rotatably connected to each of the shafts.

Further, according to the present invention, in the frog-leg type robot, the rotary drive source is constituted by one, and the rotational output of the rotary drive source is applied to each of the first and second shoulder joint rotary drive shafts. And a rotary connection mechanism for performing a rotary connection.

Further, the present invention provides a first and second shoulder joint rotation drive shaft rotatably supported on the shoulder with the same axis, and a shaft support side of the first shoulder joint rotation drive shaft. Fixed first
The upper arm, a second upper arm having a pivot side fixed to the second shoulder joint rotation drive shaft, and a first elbow joint shaft member provided at a swing end of the first upper arm. The first movably connected
A forearm, a second forearm rotatably connected to a second elbow joint shaft member provided at a swing end of the second upper arm, and the first shoulder joint rotation drive shaft or A second rotationally connecting the second rotating member for the shoulder joint fixed to the first upper arm and the second rotating member for the elbow joint fixed to the second forearm on the second elbow joint axis. A second power transmission mechanism, a first shoulder joint rotation member fixed to the second shoulder joint rotation drive shaft or the second upper arm, and a first forearm on the first elbow joint shaft. A first power transmission mechanism for rotatably connecting the fixed first elbow joint rotating member;
A wrist to which a distance is changeably connected between a tip of the forearm and a tip of the second forearm and to which a hand is attached, the length of the first upper arm and the second upper arm And the length of the first forearm and the length of the second forearm are substantially equal, and the first drive shaft and the second shoulder joint are driven by a rotary drive source. A frog-leg type robot characterized in that the drive shaft and the drive shaft are configured to be driven to rotate in at least opposite directions in synchronization with each other.

Further, the present invention provides the frog-leg type robot, wherein the wrist is configured to be able to pass through a singular point where the first and second upper arms and the first and second forearms overlap on a straight line. It is characterized by. Further, the present invention is a processing apparatus in which a load lock chamber and a plurality of processing chambers are arranged around a transfer chamber, and wherein the transfer chamber includes the frogling type robot. is there. In particular, the rotation drive source is placed in a sealed state in the transfer room,
It is configured to be placed outside the transfer chamber. Further, the present invention provides a substrate to be processed in a load lock chamber,
A transporting chamber connected from the load lock chamber to a transporting chamber connected to the transporting chamber via a gate using the frogling type robot according to any one of claims 1 to 8, wherein the processing chamber is connected to the processing chamber. Is a processing method for performing processing on a substrate to be processed carried in.

As described above, according to the above configuration,
Since the upper and lower arms of the arm receive the front and rear and left and right forces applied to the hand in a distributed manner, the straightness is high, acceleration and deceleration can be increased, and the load capacity can be increased. The present invention can be applied to the transfer of a large substrate to be processed, and a large stroke similar to that of the SCARA robot can be obtained without increasing the size of the arm mechanism. Further, according to the above configuration, the hand can be moved forward and backward by rotating the first and second shoulder joint rotation drive shafts in opposite phases, and the hand can be turned by rotating the same in phase. During the forward and backward movements, the positions and postures of all the arms are always kept symmetrical, and the wrist can smoothly pass through the singular point, and a large stroke equivalent to that of the SCARA robot can be secured. Further, according to the above configuration, even if a partial thermal expansion of the arm or a variation in processing accuracy of the arm length occurs, the correction is automatically performed between the right and left wrist axes, and the singular point of the wrist can be smoothly changed. By passing through, a large stroke can be secured.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a frog-leg type robot according to the present invention will be described with reference to the drawings. First, a first embodiment of a frog-leg type robot according to the present invention in which the rotation axis of the shoulder is coaxial is shown in FIGS.
This will be described with reference to FIG. FIG. 1 is a perspective view showing a first embodiment of a frog-leg type robot according to the present invention in which the rotation axis of the shoulder is coaxial. FIG. 2 is a partial front sectional view of FIG. Reference numeral 40 denotes a frog-leg type robot.
Reference numeral 1 denotes a hand having a wrist 1a for mounting and gripping a large substrate to be processed such as a wafer or glass. The error correction mechanism 2 is rotatably supported on a shaft member (for example, a shaft) 6a for a wrist implanted at the tip of the forearm 7a.
Two linear rails 2d that engage with each of the two linear guides 2c attached to the lower surface of the wrist 1a of the hand 1
Is rotatably supported by a wrist member 2a formed on the upper surface and a wrist shaft member (for example, a shaft) 6b implanted at the tip of the forearm 7b, and the wrist portion 1a of the hand 1 is fixed to the upper surface. Wrist member 2b, wrist member 2a and wrist member 2b
And a tension spring 2e and a compression spring 2f attached so as to maintain a desired distance between the wrist member 2a and the wrist member 2b. The distance to the wrist member 2a can be corrected (adjustable). That is, by engaging each of the two linear guides 2c attached to the lower surface of the wrist portion 1a of the hand 1 with the two linear rails 2d formed on the upper surface of the wrist member 2a, the wrist member 2b and the wrist member are engaged. The distance to the hand 2a can be corrected (adjustable), and the posture of the hand 1 can be kept constant. Forearm 7a
Is fixed to a shaft-like member 9a for an elbow joint rotatably supported at the tip of the upper arm 13a. The elbow joint rotating member 12a such as a pulley or a sprocket wheel is attached to the elbow joint shaft member 9a. The forearm 7b is fixed to a shaft-like member 9b for elbow joint rotatably supported at the tip of the upper arm 13b. The elbow joint rotating member 12b such as a pulley or a sprocket wheel is attached to the elbow joint shaft member 9b.

The upper arm 13a is fixed to one shoulder joint rotation drive shaft 14a of a double rotation shaft rotatably supported by a bearing 21 mounted on a base 22a. Further, a shoulder joint rotating member 17b formed of a pulley, a sprocket wheel, and the like, for rotating the forearm 7b,
It is fixed to the upper surface of the upper arm 13a. The upper arm 13b is fixed to the other shoulder joint rotation drive shaft 14b of the double rotation shaft rotatably supported by the bearing 21 attached to the base 22a. Further, a shoulder joint rotating member 17a formed of a pulley, a sprocket wheel, or the like, for rotating the forearm 7a is provided with the other shoulder joint rotating drive shaft 1 described above.
4b. The shoulder rotating member 17a and the elbow rotating member 12a are connected by suspending a power transmission mechanism 11a such as a belt or a chain. The rotation member 17b for the shoulder joint and the rotation member 12b for the elbow joint are connected by suspending a power transmission mechanism 11b such as a belt or a chain.

Each of the concentric double shoulder joint rotation drive shafts 14a and 14b is, for example, two coaxial motors (rotation drive sources) 28a concentrically mounted on a base 22a as shown in FIG. , 28b. Further, as shown in FIG. 3, the length of the upper arms 13a and 13b is L ₁ , the length of the forearms 7a and 7b is L ₂ , and the shafts 6a and 6b
Is 2L ₃ , the following equation (3) is obtained. This relationship is because, as shown in FIG. 4B, it is necessary to pass through a singular point (a point where the upper arms 13a and 13b and the forearms 7a and 7b overlap on a straight line 24). L ₁ = L ₂ + L ₃
(Equation 3) From the relationship shown in FIG. 3, the inclination angle of each upper arm 13a, 13b with respect to the straight line 24 is θ, the angle formed by each upper arm 13a, 13b with each of the forearms 7a, 7b is θ ₂ , Each forearm 7a, 7b
When the inclination angle was set to theta _a to will have the relationship of the equation (1), the following equation (4) relationship.

Θ _a = cos ~ ¹ ((L ₁ cos θ−L ₃ ) / L ₂ ) = cos ¹ ((L ₁ (cos θ−1) + L ₂ ) / L ₂ ) (Equation 4) The relationship between the radius r of the rotating members for joints 12a and 12b and the radius R of the rotating members 17a and 17b for shoulder joints has the following (Equation 5). R / r = θ ₂ / θ = (θ _a + θ) / θ ≠ 2 (Equation 5) The radius R of the shoulder joint rotating members 17a and 17b is related to the radius r of the elbow joint rotating members 12a and 12b. , Is expressed only by the inclination angle θ of each of the upper arms 13a and 13b with respect to the straight line 24.

R = r · (cos ~ ¹ ((L ₁ cos θ−L ₃ ) / L ₂ ) + θ) / θ = r · (cos ~ ¹ ((L ₁ (cos θ−1) + L ₂ ) / L ₂ ) + Θ) / θ (Equation 6) Therefore, for example, when the elbow joint rotating members 12a and 12b are formed in a circular shape with a radius r, the shoulder joint rotating member 17
The radius R of the upper arm 13 with respect to the straight line 24
In order to satisfy the above expression (6) according to the inclination angle θ of a and 13b, the cam shape approximates a circular shape. In addition,
Elbow joint rotary member 12a, shoulder joint rotary member 17a with respect to the radius r of the 12b, the ratio R / r of the radius R of 17b is temporarily in the L ₁ about 2m, about 1.7m and L _2, about the L ₃ 30cm
In this case, even if the inclination angle θ changes from about + 60 ° to −60 °, the change falls within the range of 2 to 2.1 at most. When the joint rotating members 17a and 17b are formed in a circular shape having a radius R, the elbow joint rotating members 12a and 12b
In order to satisfy the above equation (5) in accordance with the inclination angle θ of each of the upper arms 13a and 13b with respect to the straight line 24, the radius r of the cam becomes a circular shape.

However, the error correction mechanism 2
Since the distance between the wrist shaft member 6a and the wrist shaft member 6b can be changed, the elbow joint rotation member 12a,
The radius r of the joint 12b and the radius R of the joint rotating members 17a and 17b are both constant, and both are formed in a circular shape.
/ R can be set to a desired value within the range of 2 to 2.1. That is, the upper arm 13a is fixed to one shoulder joint rotation drive shaft 14a concentrically installed on the shoulder 22a,
The power transmission mechanism 11a connects between the shoulder joint rotation member 17a and the elbow joint rotation member 12a fixed to the one shoulder joint rotation drive shaft 14a so that no slip occurs, and the other shoulder joint rotation is used. The upper arm 13b is fixed to the drive shaft 14b, and no slip occurs between the shoulder joint rotation member 17b fixed to the other shoulder joint rotation drive shaft 14b and the elbow joint rotation member 12b by the power transmission mechanism 11b. The upper arms 13a, 13b and the forearm 7a,
7b. Power transmission mechanism 11
When a and 11b are constituted by belts, for example, the rotating members 17a, 17b, 12a, 12
b can be prevented from occurring.

The power transmission mechanisms 11a and 11b, the rotation members 17a and 17b for the shoulder joint, and the rotation member 12 for the elbow joint
a and 12b are provided on both the left and right sides so that the right and left upper arms 13a and 13b and the forearms 7a and 7b can be moved back and forth in synchronization with each other.
a and 6b keep the same interval and can be moved synchronously. That is, via the state shown in FIG.
The front-back operation of the hand 1 between the state shown in FIG. 4A and the state shown in FIG.
8b, the shoulder joint drive shafts 14a and 14b are inverted at the same speed and acceleration while being synchronized. Thus, in a frog-leg type robot, for example,
Even if an error occurs in the length of the upper arms 13a, 13b and the forearms 7a, 7b due to a partial difference in thermal expansion or the like, the error is absorbed by the error correction mechanism 2 and FIG.
The wrist 1a shown in (b) can smoothly pass through a position (called a singular point) where the drive shafts 14a and 14b overlap with each other in a straight line without generating an impact.
It is possible to realize a large stroke from the state shown in FIG. 4A to the state shown in FIG.

That is, (1) arm length (upper arm 13a,
13b of length L ₁ and the forearm 7a, the distance 2L ₃ between the length L ₂ and wrist shaft-like member 6a and wrist shaft-like member 6b of 7b) satisfies the relation of the equation (3) , Rotating shafts (joint axes) 6a, 6b, 9 connecting the links constituting the arm
a, 9b, 14a, and 14b are installed vertically to the link, and (2) the error correction mechanism 2 absorbs errors such as the length of the arm, and the arm detects a singular point. If the condition that the arm can pass and the condition (3) that the arm is synchronized with the coaxial motors 28a and 28b so that the arm is accurately aligned when the arm passes the singular point are satisfied, The frog-leg type robot moves the hand 1 gripping a large substrate to be processed such as a wafer or glass from the state shown in FIG.
It can be conveyed with a large stroke to the state shown in FIG.

In particular, between the wrist shaft member 6a and the wrist shaft member 6b, the length can be corrected in a direction perpendicular to the traveling direction of the hand 1 and in the horizontal direction, and twisting in other directions. By providing an error correction mechanism 2 that is constrained by two linear guides 2c so that no misalignment occurs and is centered by elastic bodies 2e and 2f such as springs and rubbers, a partial difference in thermal expansion occurs in the arm. Therefore, even if a slight change occurs in the length of the arm, the length is automatically corrected at the wrist 1a. Also, even if a force acts on the wrist 1a when the hand 1 advances or turns, the power transmission mechanism The substrate 1 and the like can be transported by the hand 1 while suppressing the load on the substrates 11a and 11b. Also, the coaxial motors 28a, 28
b to drive the shoulder joint drive shafts 14a, 14b.
Of the upper arms 13a, 13a with respect to the base (shoulder) 22a.
b and the turning motion of the forearms 7a and 7b can be realized.

As described above, according to the frog-leg type robot according to the present invention, the upper arm 13a, 13b constituting the arm applies the force acting in the traveling direction of the hand 1 and in the direction perpendicular to the traveling direction. And forearms 7a, 7b
, The linearity is high and the acceleration / deceleration can be increased. In addition, since the upper and lower forces acting on the hand 1 are also received by the left and right upper arms 13a and 7a and the upper arm 13b and forearm 7b, the torsion is small, and the fall by own weight can be reduced, and as a result, the load capacity can be increased. In addition, since everything except the error correction mechanism 2 is constituted by a rotational motion, the generation of foreign matter can be suppressed to a low level.
Further, according to the frog-leg type robot according to the present invention, the error correction mechanism 2 absorbs errors such as the length of the arm and the arm can smoothly pass through the singular point. In addition, a large stroke can be realized without shifting or dropping the substrate to be processed to be gripped without generating an impact.

Next, a second embodiment of a frog-leg type robot according to the present invention in which the rotation axis of the shoulder is coaxial will be described with reference to FIG. FIG. 5 is a second view of a frog-leg type robot according to the present invention in which the rotation axis of the shoulder is made coaxial.
It is a front partial sectional view showing an embodiment. The second embodiment differs from the first embodiment in that the vertical relationship between the upper arm 13a and the upper arm 13b is reversed. Therefore, the upper arm 13a is fixed to the inner shoulder joint drive shaft 14a together with the rotating member 17b, and the upper arm 13b is fixed to the outer shoulder joint drive shaft 14b together with the rotating member 17a. As described above, also in the second embodiment, the same operation and effect as in the first embodiment can be obtained.

Next, the shoulder joint drive shafts 14a, 14b
An example in which each of them is driven to rotate will be described.

[0026]

Embodiment 1 A first embodiment shown in FIGS. 2 and 5 has two motors 28 coaxially arranged below a base 22a.
a, 28b is output to the shoulder joint drive shaft 1
4a and 14b are directly connected. In the case of the first embodiment, it is necessary to output the rotation output of the lower motors 28a, 28b through the axis of the upper motors 28b, 28a, and a special motor is used as the upper motors 28b, 28a. Must be used. Each motor 2
An encoder (not shown) for detecting a rotation angle and a rotation speed detector (not shown) for detecting a rotation speed are attached to the rotation shafts 8a and 28b. The control drive unit (not shown) is configured to control the rotation angles of the shoulder joint drive shafts 14a and 14b detected by the encoders and the shoulder joint drive shafts 14a and 14b detected by the rotational speed detectors. Based on the rotation speed, the motors 28a and 28b are synchronized at the same speed and acceleration at the same speed and acceleration to execute the inversion drive control to move the hand 1 back and forth with a large stroke, and Conveys substrates and the like. Also,
The control drive unit (not shown) is provided with a drive shaft 14a for each shoulder joint detected from each encoder and a rotation angle of each drive shaft 14a, 14b for each shoulder joint detected from each rotational speed detector.
a, 14b, each motor 28a, 2b
Rotation control is performed on the hand 1 by performing rotation drive control in the same direction while synchronizing with the hand 8b to change the transport direction.

[0027]

Embodiment 2 In the second embodiment, as shown in FIG. 6, a motor 29a for driving and controlling the rotation drive shaft 14a for the shoulder joint and a motor 29b for driving and controlling the rotation drive shaft 14b for the shoulder joint are different from each other. It is disposed above the base 22a. That is, the rotation output of the motor 29a is coupled to the rotation drive shaft 14a for the shoulder joint by a rotation transmission mechanism 30a such as a gear, and the rotation output of the motor 29b is transmitted to the rotation transmission mechanism 3 such as a gear.
0b to the shoulder joint rotary drive shaft 14b. Naturally, by controlling the driving of each of the two motors 29a and 29b and inverting each of the shoulder joint drive shafts 14a and 14b while synchronizing at the same speed and acceleration, as shown in FIG. The back and forth movement can be performed. In addition, by driving and controlling each of the two motors 29a and 29b to rotate the shoulder joint drive shafts 14a and 14b in the same direction while also synchronizing,
Arm (upper arm 13a, 13b) for base (shoulder) 22a
And the turning operation of the forearms 7a, 7b) can be realized. As described above, in the second embodiment, it is not necessary to arrange the motors coaxially, and it is possible to use ordinary motors 29a and 29b.

An encoder (not shown) for detecting a rotation angle and a rotation speed detector (not shown) for detecting a rotation speed are attached to the rotation shafts of the motors 29a and 29b. Then, the control drive device (not shown) controls each shoulder joint drive shaft 14a, 1
The motors 29a and 29b are driven and controlled in the same manner as in the first embodiment based on the rotation angle of the drive shaft 4b and the rotation speed of the drive shafts 14a and 14b for the shoulder joints detected from the rotation speed detectors.

[0029]

Embodiment 3 In the third embodiment, as shown in FIG. 7, by controlling the drive of the arm drive motor 23, the shoulder joint drive shafts 14a and 14b are synchronized at the same speed and acceleration. While turning the hand 1 as shown in FIG.
Is performed, and the turning motor 24 is driven to control the turning table 24 to turn, thereby performing the turning operation of the arm.

The swivel 24 is supported on the base 22b so as to be swivelable about the shoulder joint drive shafts 14a and 14b.
The rotation output of the arm drive motor 23 attached to the lower surface of the swivel table 24 is rotationally connected to a gear 27a fixed to the shoulder joint drive shaft 14a. Further, the gear 27a meshes with a gear 27b fixed to a shaft 25 rotatably supported by the swivel 24. The gear 27a and the gear 27b have the same size. Further, a pulley 31a fixed to the shaft 25
The pulley 31b fixed to the shoulder joint drive shaft 14b is rotationally connected by, for example, a toothed belt 32 that does not slip. That is, the rotation coupling mechanism that mechanically rotationally couples the rotation output of the arm drive rotation drive source 23 to each of the shoulder joint drive shafts 14a and 14b includes a gear 27a and a gear 27.
b, shaft 25, pulley 31a, pulley 31b, and toothed belt 32. With this configuration, the arm drive motor 23 is driven and controlled, and each of the shoulder joint drive shafts 14a and 14b is reversed at the same speed and acceleration while mechanically synchronizing, as shown in FIG. Thus, the hand 1 can be moved back and forth. The turning operation of the entire arm is achieved by controlling the driving of the turning motor 20. The rotation output of the motor 20 is rotatably connected to the swivel base 24 via the turning speed reduction mechanism 19.

In the third embodiment, the motors 28a, 28b, 29a, and 29b are used as in the first and second embodiments when there is no interference with other mechanisms and no restrictions on the weight and the turning range.
This is effective when it is difficult to control the rotation of the arm by drive control with respect to. In the third embodiment, since the left and right arms are configured to be mechanically synchronized, the drive control of the arm driving motor 23 is facilitated. Control of the turning operation of the entire arm is also facilitated.

[0032]

Embodiment 4 In the fourth embodiment, as shown in FIG.
The rotation output of the arm drive motor 23 mounted on the swivel 24 is rotationally connected to a gear 27a fixed to the shoulder joint drive shaft 14a so that the same operation as that of the embodiment can be performed. Bevel gear 33a fixed to shoulder joint drive shaft 14a and bevel gear 3 fixed to shoulder joint drive shaft 14b
3b is rotatably connected via a bevel gear 34 rotatably supported by the swivel 24. That is, the rotation output of the arm drive rotary drive source 23 is transmitted to the shoulder joint drive shaft 14.
The rotary connection mechanism that mechanically rotationally connects to each of a and 14b includes a gear 27a, a bevel gear 33a, a bevel gear 33b, and a bevel gear 34. With this configuration, the arm drive motor 23 is drive-controlled to invert each of the shoulder joint drive shafts 14a and 14b at the same speed and acceleration while mechanically synchronizing, as shown in FIG. The hand 1 can be moved back and forth. The turning operation of the entire arm is achieved via the turning speed reduction mechanism 19 by controlling the drive of the motor 20.

The fourth embodiment also has no interference with other mechanisms and no restrictions on the weight and the turning range, and the motors 28a, 28b, 29a, 29b as in the first and second embodiments.
This is effective when it is difficult to control the rotation of the arm by drive control with respect to. Also, in the fourth embodiment, the left and right arms are configured to be mechanically synchronized, so that the drive control of the motor 23 is facilitated. Control of the turning operation of the entire arm is also facilitated.

A processing apparatus according to an embodiment to which the above-described frog-leg type robot 40 according to the present invention is applied will be described with reference to FIG. A processing apparatus 2 for performing an etching process, a film forming process, and the like on a large substrate to be processed such as a glass substrate for a TFT includes a transfer chamber 4 having a polygonal shape.
4, processing chambers 43a, 43b, 43c, 43d, 4
3e and 43f are arranged radially, and a load lock chamber 46 for loading and unloading a substrate 41 to be processed such as a larger wafer or glass substrate is provided. Between the load lock chamber 46 and the cassette 49 brought near the load lock chamber 46 by the transport means 50, the substrate 41 to be processed is transported by the atmospheric transport robot 48 to be loaded into and unloaded from the load lock chamber 46. . The frog-leg type robot 40 according to the present invention is installed in the transfer chamber 44 with the shoulder joint positioned at the center of the transfer chamber 44. Accordingly, in the frog-leg type robot 40, each of the shoulder joint drive shafts 14a and 14b is inverted while synchronizing at the same speed and acceleration, and the left and right arms are rotated in opposite directions to move the hand 1 back and forth. Thus, the load lock chamber 46 and the processing chambers 43a, 43b, 43c, 43d, 43e, 43f
The substrate 41 to be processed is carried in and out, and the direction of transport of the substrate 41 to each chamber is changed by turning the left and right arms. The frog-leg type robot 40 according to the present invention can smoothly pass through the singular point and take a large stroke.
Without increasing the size of the transfer chamber 44, the load lock chamber 46
And the processing chambers 43a, 43b, 43c, 43d, 43
It is possible to carry in and carry out the processing target substrate 41 to and from 43e and 43f without any trouble. Further, since it is not necessary to enlarge the transfer chamber 44, the process processing apparatus can be downsized, and the exhaust means for exhausting the inside of the transfer chamber 44 can be downsized. The motors 28a, 28b, 29a, 29b, 20, 2, which are driving systems in the frog leg type robot 40 according to the present invention.
3 is desirably installed outside the walls (22a, 24) forming the transfer chamber 44 from the viewpoint of safety.

[0035]

According to the present invention, the hand can be moved forward and backward by rotating the first and second shoulder joint rotation drive shafts in opposite phases. At this time, the positions and postures of all the arms are changed. The symmetrical state is always maintained, and the wrist portion can smoothly pass through the singular point, so that a frog-leg type robot capable of securing a large stroke equivalent to that of the scalar type robot can be realized. Also,
According to the present invention, the force acting on the hand in the front-rear
Since the upper arm and the forearm forming the arm are distributed and received, the straightness is high, the acceleration and deceleration can be increased, and the load capacity can be increased. As a result, the present invention can be applied to the transfer of a large substrate to be processed. Further, there is an effect that a frog-leg type robot capable of obtaining a large stroke similar to that of the SCARA type robot without increasing the size of the arm mechanism can be realized.

Further, according to the present invention, even if a partial thermal expansion of the arm or a variation in processing accuracy of the arm length occurs,
It is automatically corrected between the left and right wrist shaft-shaped members, so that the wrist portion can smoothly pass through the singular point and a frog-leg type robot capable of securing a large stroke can be realized. . According to the present invention,
By rotating the first and second shoulder joint rotation drive shafts in the same phase, the hand can be turned. As a result, there is an effect that a swivel table can be eliminated and a simple frog-leg type robot can be realized.

According to the present invention, a frog-leg type robot capable of transferring a large substrate to be processed, such as a wafer or a glass substrate, with a large stroke is installed in the transfer chamber to enlarge the transfer chamber. Thus, there is an effect that a processing apparatus can be efficiently and stably carried into and out of the processing chamber without being processed, thereby realizing a miniaturized processing apparatus. Further, according to the present invention, a frog-leg type robot capable of transporting a large substrate to be processed such as a wafer or a glass substrate with a large stroke is installed in a transport chamber without increasing the size of the transport chamber. The substrate to be processed can be efficiently and stably carried into and out of the processing chamber, so that the reliability of the processing can be improved.

[Brief description of the drawings]

FIG. 1 is a first view of a frog-leg type robot according to the present invention.
It is a perspective view which shows embodiment.

FIG. 2 is a partial front sectional view of FIG. 1;

FIG. 3 shows the relationship between the length of the arm mechanism of the frog leg type robot according to the present invention, the radius R of the shoulder joint rotating member and the radius r of the elbow joint rotating member for synchronizing the upper arm and the forearm. FIG. 4 is a diagram for explaining the relationship.

FIG. 4 is a diagram for explaining that a large stroke is given to the hand by the wrist passing through the singular point in the frog-leg type robot according to the present invention.

FIG. 5 is a front view showing a second embodiment including the first embodiment for driving two shoulder joint rotation drive shafts provided on the same axis in the frog-leg type robot according to the present invention. It is sectional drawing.

FIG. 6 is a front partial sectional view showing a second embodiment for driving two shoulder joint rotation drive shafts provided on the same axis in the frog-leg type robot according to the present invention.

FIG. 7 is a front partial sectional view showing a third embodiment for driving two shoulder joint rotation drive shafts provided on the same axis in the frog-leg type robot according to the present invention.

FIG. 8 is a front partial sectional view showing a fourth embodiment for driving two shoulder joint rotation drive shafts provided on the same axis in the frog leg type robot according to the present invention.

FIG. 9 is a perspective view showing an embodiment of a processing apparatus provided with a frog-leg type robot according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... hand, 1a ... wrist part, 2 ... error correction mechanism, 2a,
2b: wrist member, 2c: linear guide, 2d: linear rail, 2e: tension spring (elastic body), 2f: compression spring (elastic body), 6a, 6b: shaft member for wrist, 7a, 7b
... forearm, 9a, 9b ... shaft member for elbow joint, 11a, 11
b: power transmission mechanism, 12a, 12b: rotation member for elbow joint, 13a, 13b: upper arm, 14a, 14b: drive shaft for rotation of shoulder joint, 17a, 17b: rotation member for shoulder joint, 19 ...
Turning speed reduction mechanism, 20: turning motor, 21: bearing, 2
2a, 22b: base, 23: arm driving motor, 24
... Slewing table, 27a, 27b ... Gear, 28a, 28b ... Motor, 29a, 29b ... Motor, 31a, 31b ... Pulley, 32 ... Belt, 33a, 33b ... Bevel gear, 40 ... Frogleg robot, 41 ... Substrate, 42 ... processing apparatus, 43a, 43b, 43c, 44d, 43e, 4
3f: processing chamber, 44: transport chamber, 46: load lock chamber

Continued on the front page (72) Inventor Masahiro Tanaka 3300 Hayano, Mobara-shi, Chiba Electronic Device Division of Hitachi, Ltd. (72) Inventor Kunihiko Watanabe 3300, Hayano, Mobara-shi, Chiba Electronic Device, Hitachi Within the business division

Claims (10)

[Claims] 1. A first and a second shoulder joint rotation drive shaft rotatably supported on a shoulder with the same axis, and a first shoulder joint fixed to the first shoulder joint rotation drive shaft. The upper arm, a second upper arm having a pivot side fixed to the second shoulder joint rotation drive shaft, and a first elbow joint shaft member provided at a swing end of the first upper arm. A first forearm movably connected, a second forearm rotatably connected to a second elbow joint shaft member provided at a swinging end of the second upper arm, and the second forearm; A first shoulder joint rotation drive shaft or a second upper arm fixed to the first upper arm
A second power transmission mechanism for rotationally connecting the shoulder rotation member and a second elbow rotation member fixed to a second forearm on the second elbow joint axis; and the second power transmission mechanism. A first shoulder joint rotation member fixed to the shoulder joint rotation drive shaft or the second upper arm, and a first elbow joint rotation member fixed to the first forearm on the first elbow joint shaft A first wrist member rotatably connected to a first wrist shaft member provided at a distal end of the first forearm, and a second wrist member rotatably connected to the first forearm. A first wrist shaft and a second wrist shaft are slidably connected to a second wrist member rotatably connected to a second wrist shaft member provided at the tip of the forearm. An error correction mechanism configured to correct the distance between the shaft and the first wrist member or the second error correction mechanism in the error correction mechanism; A hand attached to a wrist member, wherein the length of the first upper arm and the length of the second upper arm are substantially equal, and the length of the first forearm and the length of the second forearm are substantially equal to each other. Frog characterized in that the first shoulder joint rotation drive shaft and the second shoulder joint rotation drive shaft are driven to rotate at least in opposite directions in synchronization with each other by a rotation drive source. Leg type robot. 2. The first and second upper arms have a length of L ₁ ,
When the length of the first and second forearm was L _2, a relationship between the distance 2L ₃ is the following expression between the first and wrist axis and shaft for the second wrist by the error correction mechanism 2. A wrist part which is formed so as to be satisfactorily corrected so as to be able to pass through a singular point where the first and second upper arms and the first and second forearms overlap on a straight line. The frog-leg-shaped robot described. L ₃ = L ₁ −L ₂ 3. The method according to claim 1, wherein the radius R of the first and second shoulder joint rotating members is at least twice as large as the radius r of the first and second elbow joint rotating members. 2. The frog-leg type robot according to 1. 4. The frog-leg type robot according to claim 1, wherein said shoulder is configured to be pivotable. 5. A rotary drive source comprising two rotary drive sources, wherein a rotary output of each rotary drive source is rotatably connected to each of a first and a second shoulder joint rotary drive shaft. The frog-leg type robot according to claim 1. 6. A rotary coupling mechanism comprising a single rotational drive source, and a rotational coupling mechanism for mechanically rotationally coupling a rotational output of the rotational drive source to each of a first and a second shoulder joint rotational drive shaft. The frog-leg type robot according to claim 1, wherein 7. A first and second shoulder joint rotation drive shaft rotatably supported on the shoulder with the same axis, and a first shoulder joint fixed to the first shoulder joint rotation drive shaft. The upper arm, a second upper arm having a pivot side fixed to the second shoulder joint rotation drive shaft, and a first elbow joint shaft member provided at a swing end of the first upper arm. A first forearm movably connected, a second forearm rotatably connected to a second elbow joint shaft member provided at a swinging end of the second upper arm, and the second forearm; A first shoulder joint rotation drive shaft or a second upper arm fixed to the first upper arm
A second power transmission mechanism for rotationally connecting the shoulder rotation member and a second elbow rotation member fixed to a second forearm on the second elbow joint axis; and the second power transmission mechanism. A first shoulder joint rotation member fixed to the shoulder joint rotation drive shaft or the second upper arm, and a first elbow joint rotation member fixed to the first forearm on the first elbow joint shaft A first power transmission mechanism for rotatably connecting the first forearm and a wrist to which a distance is changeably connected between a distal end of the first forearm and a distal end of the second forearm, and to which a hand is attached. And the length of the first upper arm and the length of the second upper arm are substantially equal, and the length of the first forearm and the length of the second forearm are substantially equal. The first shoulder joint rotation drive shaft and the second shoulder joint rotation drive shaft are synchronized with each other to reduce Frog leg type robot also characterized by being configured to drive rotation in the opposite direction. 8. The frog leg according to claim 6, wherein the wrist portion is configured to be able to pass through a singular point where the first and second upper arms and the first and second forearms overlap on a straight line. Shaped robot. 9. A processing apparatus in which a load lock chamber and a plurality of processing chambers are arranged around a transfer chamber, wherein the transfer chamber is provided with the frogling type robot according to any one of claims 1 to 8. A processing device, characterized in that: 10. A substrate to be processed in a load lock chamber,
A transporting chamber connected from the load lock chamber to a transporting chamber connected to the transporting chamber via a gate using the frogling type robot according to any one of claims 1 to 8, wherein the processing chamber is connected to the processing chamber. A processing method for performing processing on the substrate to be processed carried in.