KR101112011B1 - Transfer equipment - Google Patents

Abstract

An object of the present invention is to provide a transfer apparatus capable of transferring a workpiece corresponding to an enlarged workpiece while avoiding the problem of particle generation.

To this end, the transfer device 30 is the proximal end of the proximal side arm 2 of the pair of free arms 4, each of which is composed of two arms (proximal side arm 2 and distal end side arm 3). To the base 1 so as to be rotatable, and having a transfer arm 5 in which the tip side of the tip side arm 3 is rotatably connected to each other, and sliding the base 1 in the feed direction. The part 20 was provided.

Conveying device

Description

Transport device {TRANSFER EQUIPMENT}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for a conveying system for conveying a work (hereinafter referred to as a "conveying object"), and relates to a conveying device for linearly moving a work piece by an articulated arm in a horizontal plane.

In a factory that manufactures a semiconductor substrate or a liquid crystal display panel, a large number of process steps are performed at different positions on the flat material (semiconductor wafer or glass plate) to be the material, so that the object to be transported such as a tray containing the flat material The conveying system which conveys a phosphorus workpiece in a clean room is essential. In this conveying system, the conveying apparatus which linearly moves a workpiece in the same horizontal plane by the arm of a multiple joint is used.

In this way, a multi-arm arm transfer device (also referred to as a "scalar arm") is used in the clean room because particles generated to contaminate the clean room are less likely to occur.

Fig. 12 is a front view showing an example of a transfer apparatus as such a transfer apparatus, which is the background art of the present invention. This transfer apparatus is described in Patent Document 1.

The conveying apparatus 100 includes a pair of bases 101, a pair of proximal arms 102 rotatably attached to each of the pair of bases 101, and a pair of proximal arms ( 102) A pair of tip side arms 103 rotatably attached to each tip and a transfer arm 105 rotatably connected the tip side of the pair of tip side arms are provided.

Each base 101 drives the proximal arm 102 in synchronous rotation with the centerline symmetry of the base 101, whereby the transfer device 100 chains the transfer arm 105 in the drawing. The linear movement can be performed in the symmetric centerline direction from the state shown by the imaginary line of a line to the state shown by the solid line.

The transfer arm 105 is provided with a pair of gripping arms 106 for holding the work W. FIG. Therefore, this conveying apparatus 100 exhibits the conveying function of gripping, moving, and lowering the workpiece | work W within the linear movement range.

However, in this conveying apparatus 100, when the workpiece | work W is small and light, it does not have much problem, but when the workpiece | work W becomes large, a conveyance distance becomes long and a conveyance weight also increases. In response to this, the length of each arm is increased, the strength of the girders is required, and in view of the structure of the articulated arm, it is difficult to cope with the increase of the conveying distance and the conveying weight, and a solution has been desired.

[Patent Document 1] Japanese Unexamined Patent Application Publication No. 6-156632 (Fig. 1)

An object of the present invention is to provide a conveying apparatus capable of conveying a workpiece that is enlarged in size while avoiding the problem of particle generation.

The transfer apparatus according to claim 1 is rotatably attached to a base of a pair of free arms, each of which is composed of two arms, and a mutually rotatable movement of the tip ends of the pair of free arms. It is provided with the transfer arm connected so that it is possible, and it characterized by including the slide part which slides the said base to a conveyance direction.

In addition, in this invention, although the object of conveyance of a conveying apparatus is called a conveyed thing, or the same conveyed object is called a workpiece as a conveyance object in a conveyance system, it means the same thing.

The conveying apparatus of Claim 2 is subordinated to Claim 1, It is characterized by sliding the said base by the said slide part in the state which the said transfer arm is in a standby position, when carrying a conveyed object.

The conveying apparatus according to claim 3 is dependent on claim 2, and when the conveying article is not loaded, the conveying article is moved by the conveying arm and the base by the slide unit. do.

Effect of the Invention

According to the conveying apparatus of Claim 1, the base end side of a pair of free arm which consists of two arms is rotatably attached to a base, and the front end side of the pair of free arms is mutually rotatable. Since the transfer arm which was connected was provided, and the slide part which slides the said base in the conveyance direction is provided, the stroke of a transfer arm can be shortened and the conveyance of the conveyed material which becomes large can be carried out.

In addition, the conveyed material can be conveyed without penetrating a portion other than the conveying arm, etc., in the loading area of the conveyed material, and contamination of the separate conveyed material placed in the loading area can be prevented by particles generated from the conveying device.

According to the transfer apparatus according to claim 2, in addition to the effect of claim 1, when the transfer object is being loaded, the slide is pushed by the slide unit in a state where the transfer arm is in the standby position. The bearing can be used for a long time by reducing the load.

According to the transfer apparatus of claim 3, in addition to the effect of claim 2, when the transfer object is not loaded, the transfer of the transfer object by the transfer arm and the movement of the base by the slide unit are simultaneously performed. In this case, it is possible to shorten the operation time by moving the transfer arm and the workpiece faster.

EMBODIMENT OF THE INVENTION Below, embodiment (example) of this invention is described using drawing.

1 (a) is a front view showing an example of the transfer apparatus of the present invention, and FIG. 1 (b) is a side view of FIG. 1 (a).

The transfer device 30 is, for example, a factory for manufacturing a semiconductor substrate, a liquid crystal display panel, or the like, and the flat plate material (semiconductor wafer or glass plate) is subjected to various processing in the clean room to perform the flat plate. It is used when conveying the tray which accommodated one shape raw material one by one as the workpiece | work W which is a conveyance object, in the state of stacking one or multiple steps.

In addition, although the case where the tray which accommodated the flat plate-shaped raw material is conveyed in the clean room as an example in which a conveying apparatus is used preferably here is shown, the conveying apparatus of this invention is not limited to this, Generally conveyance object It can be used when transferring to another position on the same plane.

The transfer device 30 of the present invention expects the proximal end side of the proximal end arm 2 of the pair of free arms 4 composed of two arms (proximal side arm 2 and distal side arm 3). The transfer arm 5 is provided in (1) so that rotation is possible, and the tip side of the tip side arm 3 of the pair of free arms 4 was connected so that mutual rotation was possible. Moreover, the slide part 20 which slides the base 1 in a conveyance direction is provided.

The pair of bases 1 synchronously rotates each of the pair of proximal arms 2 in a symmetrical centerline manner, so that the transfer arm 5 moves linearly in the symmetrical centerline direction. Since it is the same as that of the conveyance apparatus 100, a detailed description is abbreviate | omitted.

Here, the symmetric center line means a line orthogonal to the line connecting this axis center in the midpoint of the line connecting the axis center of the base 1, and FIG. 1 (b) terminates the transfer device 30 with this symmetry center line. One longitudinal section view.

Each of the pair of bases 1, the proximal side arm 2, the proximal side arm 3 (collectively referred to as the "free arm 4"), and the transfer arm 5, the arm transfer unit ( It is called 10). In addition, this arm transfer part 10 or the transfer apparatus 30 may be called "scalar arm."

In addition to the above-mentioned parts, the conveying apparatus 30 slides the whole arm conveying part 10 in the said symmetric centerline direction (it is also called a "conveying direction", since this direction is also a direction which conveys the workpiece | work W).) A slide section 20 is provided, and this point is a basic feature as described above.

The slide unit 20 on which the arm transfer unit 10 is mounted is mounted on the rotating unit 40, and the arm transfer unit 10 and the slide unit 20 are rotatable.

This rotating part 40 is mounted on the platform 50 conceptually shown by the dashed-dotted line in this figure, and the arm conveyance part 10 and the slide part 20 (namely, the conveying apparatus 30), and a rotating part 40 is able to move up and down.

Here, the characteristic of this conveying apparatus 30 is the one provided with the slide part 20 which loads this arm conveyance part 10 whole below the arm conveyance part 10, and linearly moves to a conveyance direction.

That is, in order to achieve the target conveyance distance, both the conveyance by the slide part 20 and the conveyance by the arm conveyance part 10 are used, and as mentioned later, the arm conveyance part 10 is installed above and especially the Only the transfer arm 5 is located above the workpiece W to be transferred, and the slide portion 20 below is not positioned above or near the workpiece W.

That is, according to this conveying apparatus 30, it moves to the arm conveyance part 10 with few particle generation about the upper part and the vicinity of a conveyed object, and moves to the slide part 20 in the lower and far position of a conveyed object, and the arm conveyance part ( While reducing the burden of 10), it is possible to achieve a target feed distance as a whole, to cope with an increase in the size of the work W, and to reduce the influence of particles. This effect will be described later in more detail with reference to FIGS. 3 to 10.

In the present invention, the arm transfer section 10 itself is also characterized. The transfer arm 5 of the arm transfer section 10 has an upper end 5a constituting the transfer surface, a lower end 5b of the arm, a base end 5d serving as the base of the arm, and a base end while maintaining the transfer surface 5a. A pair of flat plate arms 5e extending from 5d to the conveying direction front side are provided.

The lower surface 5b of this transfer arm 5 is characterized by being lower than the upper surface 3a of the tip side arm 3 which rotatably supports the transfer arm 5. That is, the transfer arm 5 is provided so that it may interfere with the front-end arm 3 in the up-down direction.

More specifically, in this way, as a result of obtaining the height of the transfer arm 5 in the direction interfering with the tip arm 3 side, the upper surface (the transfer surface 5a) of the transfer arm 5 is the free arm. The up-and-down position which is substantially the same as the upper surface 3a of the front end side arm 3 of (4), and is barely in the upper position. That is, the height of the conveyance surface of the conveyance apparatus 30 can be made as low as possible.

On the other hand, if such a transfer arm 5 and the tip arm 3 of the free arm 4 are in a positional relationship in which the top arm interferes with each other up and down, the feed arm 5 and the tip end depending on the rotational phase of the free arm 4. The part which overlaps the upper and lower sides of the side arm 3 will be in a situation which collides.

Therefore, in this transfer apparatus 30, the transfer arm 5 and the tip as shown in FIG. 1 (a) are shown at a portion which collides with the tip side arm 3 as the root portion of the transfer arm 5. The relief part 5c is provided by cutting off the arm part in the diagonal direction from the mutual connection part of the side arm 3 in anti-connection direction.

1 (a) shows the state in which the arm transfer section 10 is most retracted in the transfer direction, the transfer arm 5 and the tip side arm 3 are driven by the relief portion 5c of the transfer arm 5. It was found that they were in close proximity but not in contact with each other, and were avoiding collisions.

When there is no up and down interference between the transfer arm 5 and the tip arm 3, from the state of FIG. 1 (a), the transfer arm 5 is further proximal to the base arm 2 in the right direction (retraction direction). And retractable to a position where the angle formed by the symmetrical center line (or the conveying direction) of the tip side arm 3 becomes 0 degrees, but in the conveying apparatus 30 of the present invention, up to the state of FIG.

However, in the state of FIG. 1 (a), the angle between the proximal arm 2 and the distal end arm 3 forms a slight angle with the symmetric centerline (or the feeding direction), and retreats until the angle becomes O degree. The distance which can be seen is a little distance from the whole, and the inventor of this invention considered that the advantage of lowering the conveyance surface of the conveying apparatus 30 as much as possible more than industrially rather than the loss of this slight distance.

FIG. 2 shows a slide part of the conveying apparatus of FIG. 1, FIG. 2 (a) is a front view thereof, and FIG. 2 (b) is a side view of FIG. 2 (a). In addition, about the part demonstrated already from now on, the same code | symbol is attached | subjected and the duplicate description is abbreviate | omitted.

The slide portion 20 includes a known linear movement guide means 11 provided in a pair of right and left, a slide frame 12 provided with the pair of linear movement guide means 11, and the slide frame 12. It is provided with the well-known linear movement drive means 13 provided in the intermediate position of the pair of left and right linear movement guide means 11 installed in the stopper 14, and the stopper 14 provided in the both ends of the linear movement guide means 11. As shown in FIG.

The linear movement guide means 11 is provided with the rail part 11b which forms a linear path, and the moving body 11a which linearly moves on this rail part 11b. In this example, three moving bodies 11a are provided in the rail part b on one side.

In this example, the linear movement drive means 13 is a combination of a screw shaft and a female screw. However, the linear movement drive means 13 may be any type as long as it generates a linear movement drive force such as a combination of a rack and a pinion and a linear motor. However, when used in a clean room, it is good that the generation of particles is as small as possible.

The base 1 of the transfer arm part 10 is fixed on the six movable bodies 11a of a pair of left and right linear movement guide means 11, and this base 1 is a straight line in the longitudinal center position. The slide is subjected to the linear driving force by the movement driving means 13, and both ends of the movement are restrained by the stopper 14.

In such a configuration, the slide portion 20 can load the transfer arm portion 10 thereon and move the transfer arm portion 10 linearly for a predetermined distance independently of the linear movement by the transfer arm portion itself. have.

By the way, the operation | movement form of the transfer apparatus 30 which has a structure and an effect as mentioned above is demonstrated and demonstrated using FIGS.

3 is a timing chart showing operation timings of the transfer arm portion and the slide portion of the transfer apparatus of FIG. 1, FIG. 3 (a) is a timing chart at the time of dropping, and FIG. 3 (b) is at the time of emptying. Timing chart.

In these two timing charts, the horizontal axis represents the time t, the vertical axis represents the moving speed v1 in the feed direction of the feed arm 5 of the feed arm 10 alone, and the feed arm part by the slide unit 20 ( 10, the moving speed v2 of the transfer direction of the base 1, and the actual moving speed v3 of the transfer direction of the transfer arm 5 of the transfer arm part 10 mounted to the base 1 are shown.

Here, when each moves in the same direction, the relationship of the moving speed v1 + the moving speed v2 = the moving speed v3 is established.

Although the specific operation form of the transfer arm 10 and the slide part 20 is demonstrated using FIGS. 4-10, the characteristic point of the operation form of the transfer apparatus 30 is demonstrated here using these two timing charts. do.

<Delivery> When the workpiece W is loaded on the transfer arm 5 of the transfer arm 10, first, only the slide unit 20 is operated in the standby state according to the timing chart at the dropping time in FIG. The feed arm 10 is accelerated, maintained at a constant speed, and decelerated and stopped when approaching the slide end point (speed v2).

During this time, the transfer arm 10 does not operate, and the acceleration of the transfer arm 5 starts at the time when the slide unit 20 starts deceleration, and reaches a constant speed at the end of the deceleration, It maintains a constant speed, and when it reaches near maximum extension, it decelerates and stops (speed v1).

As a result, the actual moving speed v3 of the transfer arm 5 becomes as the uppermost part of the chart of FIG. 3 (a).

In other words, in the conveying device 30 of the present invention, the slide 1 slides the base 1 by the slide unit 20 while the conveying arm 5 is in the standby position, while the conveying arm 5 is operated. At the time, the slide unit 20 is stopped.

In addition, in the dripping state, in order not to vibrate the workpiece | work W which is a conveyed object as much as possible, the timing of mutual acceleration / deceleration is adjusted and it maintains a constant speed.

When the transfer arm 10 is fully extended, the load of the workpiece W loaded on the transfer arm 5 acts on the slide unit 20 through the base 1 as the greatest moment, but the transfer arm ( In the state where 5) is in the standby position, the moment due to the load of the work W acting on the slide portion 20 is minimal, and when the slide portion 20 is operated in that state, the bearing of the slide portion 20 It can reduce the load of moving load and make the bearing last longer.

<Notice> When the workpiece W is not mounted in the transfer arm 5 of the transfer arm 10, according to the timing chart of the unload of FIG. 3 (b), the transfer arm 10 and the slide part The speed v1 of the transfer arm 5 of the transfer arm portion 10 becomes zero after the speed v2 of the slide portion 20 which operates 20 simultaneously and ends the movement of the predetermined distance in front is zero. have.

As a result, the actual moving speed v3 of the transfer arm 5 becomes as the uppermost end of the chart of FIG. 3 (b).

That is, in the case of the unloaded load, the movement of the transfer arm 5 by the free arm 4 (the transfer arm portion 10) and the movement of the base 1 by the slide portion 20 are simultaneously performed. High speed movement is made possible.

In this case, since the work W is not mounted on the transfer arm 5, it is not necessary to consider the influence of the moment on the slide portion 20 by the load of the work W, and since both are operated simultaneously, the transfer arm ( By moving 5) faster, the time for achieving the movement of the target transfer distance can also be shortened as can be seen by comparing FIG. 3 (a) with FIG. 3 (b).

Moreover, when it considers from the point of the power efficiency of the drive source A which drives the conveyance arm part 10, and the drive source B which drives the slide part 20, like this conveying apparatus 30, each drive source ( In the case of A and B, by simultaneously driving both while using the same drive source A and B at the time of operating separately, the moving speed v3 of the transfer arm 5 is set to both moving speeds v1 and v2. ) Can be made high speed.

On the other hand, even when achieving the same added moving speed v3, for example, if the power source C is to be driven only by the driving source C for driving the transfer arm 10, the power required for the driving source C is the power of the driving sources A and B. It is necessary to add. In this case, however, it is necessary to move at a lower speed at the time of dripping, so that the power efficiency without a large use of the large power of the drive source C is in a bad state.

That is, in this way, if the transfer means for transfer is divided into the transfer arm 10 and the slide unit 20, and each of the appropriate drive source (A, B) is provided, both drive sources are operated independently to each other, It is possible to operate at the same time, increasing the form of use, and at the same time using each of the drive sources A and B effectively, it is possible to achieve high-speed movement that cannot be reached alone.

Then, the specific operation form of the transfer arm part 10 and the slide part 20 is demonstrated using FIGS. 4-10.

In the state of FIG. 1, the conveyance direction of the conveying apparatus 30 is equal to the longitudinal direction of the lifting platform 50 in which this conveying apparatus 30 is mounted. Here, when the slide unit 20 and the conveying device 30 is rotated 90 degrees counterclockwise by the rotating unit 40 is in the state of FIG.

The loading place to which the workpiece | work W to be conveyed is to be loaded is provided in the both sides of the traveling path along the longitudinal direction of the platform 50 as mentioned later in FIG. 11, and once it is loaded in the conveying apparatus 30, , The transfer operation of the workpiece W (FIG. 1) that was in the standby state is started from the state of this FIG. 4. The movement of the transfer apparatus 30 after this is according to the timing chart at the time of dripping of FIG.

4 to 5, only the slide unit 20 of the transfer device 30 operates so that the transfer arm unit 10 does not operate. That is, the whole transfer arm part 10 slides into the state of FIG. 5, maintaining the maximum retracted state (standby state) of the free arm 4 of the transfer arm part 10. As shown in FIG.

In the transfer movement during this time, the transfer arm 10 is in a dripping state in which the workpiece W is loaded, but is in a standby state in which it is retracted at the maximum, and a moment acting on the slide unit 20 by the load of the workpiece W. Is the minimum state, and as described above, the moving load load applied to the bearing of the slide portion 20 is reduced, so that the bearing can be used for a long time.

Subsequently, in FIGS. 5-9, only the arm conveyance part 10 operates, and the feed arm 5 of the front end side advances in order in the state which mounted the workpiece | work W. Then, as shown to FIG. In addition, since the slide part 20 is stopped during this time, the influence of the moment by the load of the workpiece | work W mounted on the feed arm 5 is also static, and since it is not a moving load, the influence is little.

Here, in FIG. 9, the angle formed between the proximal arm 2 and the distal end arm 3 and the conveying direction is 180 degrees (or both parallel states), and the free arm 4 is fully extended. In this state, the platform 50 descends and the transfer device 30 loads the work W at a desired loading place.

And after lowering the workpiece | work W, the conveying apparatus 30 will be in an empty state. In this case, as shown to the time chart of FIG. 3 (b), the arm conveyance part 10 (speed v1) And slide portion 20 (speed v2) operate simultaneously to retract feed arm 5 at high speed.

That is, under air load, when there is no load on the transfer arm 5, the transfer arm 5 can be moved faster and the operation time can be shortened.

FIG. 10 shows a process in the meantime, when the transfer arm 5 retracts to the maximum retracted position, the state of FIG. However, in that case, there is no work W.

In addition, the code | symbol ZW shown in FIG. 8, FIG. 9 represents the workpiece mounting area | region ZW which should load the workpiece | work W, and the code | symbol ZS represents the conveyance area | region ZS used for conveying the workpiece | work W, The boundary between these workpiece loading regions ZW and the conveying region ZS is indicated by the boundary line BZ of a two-dot chain line in a thick line.

Here, as mentioned above, in the conveying apparatus 30 of this invention, the slide part 20 which is highly likely to generate | occur | produce a particle | grain is the position which retreated largely to the conveyance area | region ZS side rather than the boundary line BZ, and a workpiece loading area | region The effect of particles on the workpiece (W) at (ZW) can be minimized.

On the other hand, the arm conveyance part 10 which penetrates into the workpiece loading area | region ZW is a multi-joint arm structure, particle generation is few and it can suppress the contamination of the workpiece | work W in this part as much as possible.

In addition, the conveyance distance of the whole conveying apparatus 30 is the sum of the conveyance distance of the arm conveyance part 10, and the conveyance distance of the slide part 20, and can achieve a longer conveyance distance as a whole.

In this way, according to the conveying apparatus 30 of this invention, although it repeats, the conveyance corresponding to the workpiece which is enlarged is attained, avoiding the problem of particle generation.

FIG. 11 is an external perspective view illustrating an example of a conveying system provided with the conveying device of FIG. 1. FIG.

The conveying system 80 shown in this FIG. 11 is the conveying apparatus 30 provided with the arm conveyance part 10 and the slide part 20 which were already demonstrated, the rotating part 40, and the platform 50, and this platform 50 The elevating device 60 for elevating) and the traveling cart 70 provided with the elevating device 60 are provided.

The elevating device 60 is provided on the traveling cart 70 in a pair of up and down ends in the travel direction, and a lifting drive means (not shown) is provided therein, whereby a pair of lifting devices 60 are provided. It raises and lowers the lifting platform 50 provided so that it may hang.

The upper frame 61 connects the ceiling portions of the pair of lifting devices 60 to form a rigid structure composed of the traveling cart 70, the pair of lifting devices 60, and the upper frame 61. .

The traveling trolley 70 has wheels 61 provided at four corners of the traveling trolley frame 67, and straightens the lifting device 60, the lifting platform 50, and the conveying device 30 along the traveling path 62. Move it.

The workpiece is loaded on the conveying arm 5 of the conveying device 30 and forward retracted by the arm conveying unit 10 of the conveying device 30 (arrow P1), and the receding forward by the slide unit 20 (arrow P2). ) And rotated by the rotating unit 40 (arrow P3).

In addition, the workpiece is lifted up and down (arrow P4) by the lifting platform 50 on which the conveying device 30 is loaded in the state of being loaded on the conveying device 30, and the lifting device 60 which elevates the lifting table 50. ) Is moved in a straight line (arrow P5) by the traveling of the traveling trolley 70 which is loaded thereon.

The conveying apparatus 30 can rotate to the opposite direction 180 degrees from the direction of the front-end | tip of the feed arm 5 of the figure on the platform 50 with the workpiece loaded in the standby position.

Therefore, according to this conveying system 80, a workpiece can be conveyed from the point A to the point B of different heights at different positions on both sides of the traveling path 62. In that case, the conveying apparatus 30 of the present invention The combination of the articulated conveying arm 10 and the slide portion 20 ensures a low particle generation of the conveyance, and enables the conveyance corresponding to the enlargement of the workpiece, and the effect thereof is the conveying system 80. It affects the whole.

As mentioned above, although the specific example of this invention was described in detail in embodiment, these are only illustrations and do not limit the scope of a claim. The technology described in the claims, that is, the technical scope of the present invention includes various modifications, changes, or combinations of the above-described embodiments, as appropriately described in each section.

The conveying apparatus of the present invention can be used in an industrial field where it is desired to enable a conveyance corresponding to a larger workpiece while avoiding the problem of particle generation.

1 (a) is a front view showing an example of the transfer apparatus of the present invention, and FIG. 1 (b) is a side view of FIG. 1 (a).

FIG. 2 shows a slide part of the conveying apparatus of FIG. 1, FIG. 2 (a) is a front view thereof, and FIG. 2 (b) is a side view of FIG. 2 (a).

3 is a timing chart showing operation timings of the transfer arm and the slide unit of the transfer apparatus of FIG. 1, FIG. 3 (a) is a timing chart at dripping, and FIG. 3 (b) is a timing chart at unloading.

4 is a view showing in sequence the operating form according to the timing chart of FIG. 3 of the transfer device of FIG.

5 is a view showing in sequence the operation form according to the timing chart of FIG. 3 of the transfer device of FIG.

6 is a view showing in sequence the operating form according to the timing chart of FIG. 3 of the transfer device of FIG.

7 is a view showing in sequence the operating form according to the timing chart of FIG. 3 of the transfer device of FIG. 1.

8 is a view showing in sequence the operating form according to the timing chart of FIG. 3 of the transfer device of FIG.

9 is a view showing in sequence the operating form according to the timing chart of FIG. 3 of the transfer device of FIG.

10 is a view showing in sequence the operating form according to the timing chart of FIG. 3 of the transfer device of FIG.

FIG. 11 is an external perspective view illustrating an example of a conveying system provided with the conveying device of FIG. 1. FIG.

12 is a front view showing a conveying apparatus which is a background art of the present invention.

(Explanation of symbols for the main parts of the drawing)

1: expectation 2: proximal cancer

3: tip side arm 4: free arm

5: transfer arm 5c: relief part

10: arm transfer unit 20: slide unit

30: conveying device 40: rotating part

50: platform 60: lifting device

70: running cart 80: conveyance system

Claims (3)

A base arm of a pair of free arms consisting of two arms is rotatably attached to a base, and a transfer arm having a front end side of the pair of free arms rotatably connected to each other is provided. And a slide portion which slides in the conveying direction, and in order to lower the height of the conveying surface of the conveying arm, the conveying arm is provided so as to interfere in the vertical direction with respect to the distal end side of the free arm. The relief portion is provided by cutting the arm portion in an inclined direction in an anti-connection direction from a connection portion between the transfer arm and the tip arm, at a portion that is to collide with the tip arm as a root portion. Transfer device. The transfer apparatus according to claim 1, wherein when the transfer object is being loaded, the base is slid by the slide unit while the transfer arm is in a standby position. The transfer apparatus according to claim 2, wherein when the transfer object is not loaded, the transfer arm is moved by the transfer arm and the base is moved by the slide unit at the same time.

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