CN201694655U - Substrate handling apparatus - Google Patents

Abstract

The utility model discloses a substrate handling equipment, including support frame, drive mechanism, slide mechanism and lifting support: the lower surface of the supporting frame is provided with a roller; the lifting support comprises a lifting part which is arranged in parallel and corresponds to the support frame and a bearing part which is formed by bending the upper end of the lifting part backwards and vertically relative to the support frame, a rack is vertically arranged on one side of the lifting part which is opposite to the support frame, and a first supporting block and a second supporting block are respectively arranged on the front side and the rear side of the upper surface of the bearing part so as to form a bearing area for bearing the substrate; the transmission mechanism comprises a first transmission assembly, a second transmission assembly, a fixed seat arranged on the support frame and a transmission shaft which penetrates through the fixed seat and is fixedly connected with the first transmission assembly and the second transmission assembly, the first transmission assembly comprises a handle, a worm and a worm wheel meshed with the worm, and the second transmission assembly comprises a rack and a gear meshed with the rack; the sliding mechanism comprises a guide rail arranged on the support frame and a sliding block arranged on the lifting support and in sliding clamping connection with the guide rail.

Description

Substrate handling equipment

technical field

The utility model relates to a loading and unloading device, in particular to a substrate loading and unloading device for loading and unloading a substrate of a flat panel display device.

Background technique

With the development of society and the advancement of science and technology, flat panel display devices, which are terminal display devices for various video signals and computer data information, are more and more deeply involved in people's lives. Flat panel display devices have the advantages of thin and light, the whole machine can be made portable, low voltage, no X-ray radiation, no flickering, no static electricity, low power consumption, battery-powered, long life, etc. It is a microelectronic technology , liquid crystal display technology and other integrated technologies are mainly used in terminal products such as notebook computers, desktop computers, large-screen color TVs, mobile communications, digital cameras, and digital video cameras.

Existing flat-panel display devices mainly include three types: plasma display PDP, organic light-emitting display OLED, and thin-film transistor liquid crystal display TFT-LCD. Among them, TFT-LCD and PDP are mainly used in medium and large display technologies, while OLED is mainly used in Among small and medium display technologies, these three types of flat panel displays have their own advantages for different market demands. As the technology of flat panel display devices gradually matures, the demand for flat panel display devices is increasing. Therefore, in the production process of flat panel display devices, the requirements for the production efficiency of each link are also getting higher and higher. Usually, in the manufacturing process of PDP, OLED and TFT-LCD, sheet structures such as substrates are transported between different process modules or equipment. In order to improve production efficiency, multiple substrates are generally loaded in a basket device first. In, and then through a smooth, efficient loading and unloading equipment to load, handle and unload the basket to achieve the transfer of substrates. At present, the loading, handling and unloading of baskets are generally operated by robots. However, when using robots for loading, handling and unloading operations, more complex positioning and detection systems are needed to cooperate to achieve accurate loading and unloading of baskets, and Its handling range will also be limited.

Therefore, it is necessary to provide an improved substrate loading and unloading device to overcome the above defects.

Utility model content

The purpose of this utility model is to provide a substrate loading and unloading equipment, the positioning of the substrate loading and unloading equipment is simple, flexible and has high positioning accuracy, so that the operation of loading and unloading the substrate using the substrate loading and unloading equipment is convenient, fast and efficient. It is safe and reliable, and at the same time, the use of the substrate loading and unloading equipment to carry substrates is not limited by the range.

In order to achieve the above object, the utility model provides a substrate loading and unloading equipment, which includes a support frame, a transmission mechanism, a sliding mechanism and a lifting bracket for carrying the substrate: the lower surface of the support frame is uniform Rollers are distributed, and the rollers drive the supporting frame to move; the lifting frame includes a lifting part and a bearing part, and the lifting part is arranged parallel to the supporting frame in the vertical direction, and the bearing part is controlled by the lifting part. The upper end of the upper part is vertically bent backward relative to the support frame, and the side of the lifting part opposite to the support frame is vertically provided with a rack, and the front and rear sides of the upper surface of the bearing part are respectively extended upward to form The first support block and the second support block, the first support block and the second support block form a bearing area, and the substrate is fixedly carried in the bearing area; the transmission mechanism includes a first transmission assembly, The second transmission assembly, the fixing seat provided on the support frame, and the transmission shaft passing through the fixing seat and fixedly connected to the first transmission assembly and the second transmission assembly at both ends, the first transmission assembly includes A handle passing through the support frame and pivotally connected with the support frame, a worm screw fixedly connected to one end of the handle, and a worm wheel fixedly connected to one end of the transmission shaft and meshed with the worm screw, the second transmission The assembly includes the rack and a gear fixedly connected to the other end of the transmission shaft and meshed with the rack; the sliding mechanism includes a guide rail and a device arranged on the support frame parallel to the rack The slider on the lifting part of the lifting bracket and slidably engaged with the guide rail rotates the handle, so that the lifting bracket realizes the lifting movement in the vertical direction under the cooperation of the gear and the rack.

Preferably, the top surface of the first support block is provided with a first concave surface, the top surface of the second support block is provided with a second concave surface, and the first concave surface and the second concave surface are oppositely arranged to form the bearing area, the substrate is fixedly carried in the carrying area.

Preferably, a positioning pin is provided in the middle of the first concave surface, and the positioning pin positions the substrate in the left-right direction.

Preferably, guide rollers are respectively provided on the left and right sides of the lower surface of the bearing part, and the outer tangent of the guide rollers exceeds the left and right edges of the lower surface of the bearing part.

Preferably, the support frame has a vertical bending structure, the support frame includes a vertical part and a horizontal part, the vertical part and the lifting part are parallel and correspondingly arranged in the vertical direction, and the horizontal part is vertically connected to the The lower end of the vertical part and the end of the horizontal part are provided with a shock absorber, the upper end of the vertical part is provided with the fixed seat, and the fixed seat is pierced with the transmission shaft, and the two ends of the transmission shaft The ends are respectively fixedly connected with the worm wheel and the gear.

Preferably, the vertical part is provided with a guide rail parallel to the rack, and the lifting part is provided with a slider slidingly engaged with the guide rail.

Preferably, the lifting part includes upper and lower side arms and left and right side arms arranged oppositely, the upper, lower, left and right side arms enclose a first rectangular space, and the carrying part is controlled by the lifting The upper side arm of the part extends horizontally backward relative to the vertical part of the support frame, and the rack is vertically arranged between the upper and lower side arms and accommodated in the first rectangular space, facing away from the Limiting blocks are provided in the middle of one side of the left and right side arms of the vertical portion.

Preferably, the upper surface of the horizontal part is provided with a lower limit block, and the vertical part is provided with an upper limit block, the lower limit block is set corresponding to the position directly below the lower side arm, and the upper limit block One end of the upper limit block is fixed on the vertical part, and the other end of the upper limit block passes through the first rectangular space and is located directly above the lower side arm.

Preferably, the rollers are universal rollers and the universal rollers are evenly distributed on the lower surface of the horizontal part.

Preferably, a handle is further included, and the handle is provided on the vertical portion and located on the same side as the free end of the handle.

Compared with the prior art, the utility model adopts the substrate loading and unloading equipment to load, transport and unload the substrate. The substrate loading and unloading equipment realizes the lifting and lowering of the support through the cooperative rotation of the worm and the worm wheel and the cooperative rotation of the rack and the gear. Lifting, and then realizing the loading and unloading of the substrate carried on the lifting bracket, since the worm, worm gear, rack and gear are driven by the handle, the positioning of the substrate loading and unloading equipment is simple and flexible, And because the worm and worm wheel have self-locking function and the lifting precision of the rack and gear is high, it is convenient, fast, safe and reliable to use the substrate loading and unloading equipment to load and unload the substrate; In addition, the substrate loading and unloading device realizes the transportation of the substrate through the rollers, so the use of the substrate loading and unloading device to transport the substrate is not limited in scope.

The utility model will become clearer through the following description in conjunction with the accompanying drawings, which are used to explain the embodiments of the utility model.

Description of drawings

Fig. 1 is a structural schematic diagram of a specific embodiment of the substrate loading and unloading device of the present invention.

FIG. 2 is a structural schematic view of the substrate loading and unloading device shown in FIG. 1 from another angle.

FIG. 3 is an enlarged view of the structure of part A shown in FIG. 2 .

FIG. 4 is a schematic structural view of the lifting support of the substrate loading and unloading device shown in FIG. 1 in a lowered state.

FIG. 5 is a schematic structural view of the lifting support of the substrate loading and unloading device shown in FIG. 1 in a raised state.

Fig. 6 is a structural schematic diagram of the substrate loading and unloading equipment entering the trough platform of the present invention.

Fig. 7 is a structural schematic diagram of another embodiment of the substrate loading and unloading device of the present invention.

Detailed ways

Embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements.

Referring to Figures 1-2, in a specific embodiment of the present invention, the substrate loading and unloading device 1 includes a support frame 10, a transmission mechanism 30, a sliding mechanism 40 and a lifting bracket for carrying substrates (not shown in the figure) 20. Specifically, rollers 110 are evenly distributed on the lower surface of the support frame 10, and the rollers 110 drive the movement of the support frame 10; The supporting frame 10 is arranged in parallel in the vertical direction, and the bearing part 22 is formed by bending the upper end of the lifting part 21 vertically backward relative to the supporting frame 10. The lifting part opposite to the supporting frame 10 21 is vertically provided with a rack 321, and the front and rear sides of the upper surface of the bearing part 22 extend upwards respectively to form a first support block 221 and a second support block 222, and the first support block 221 and the second support block 221 Two supporting blocks 222 form a loading area, and the substrate is fixedly carried in the loading area; the transmission mechanism 30 includes a first transmission assembly, a second transmission assembly, a fixed seat 33 arranged on the support frame 10 and The transmission shaft 34 passing through the fixed seat 33 and fixedly connected to the first transmission assembly and the second transmission assembly at both ends, the first transmission assembly includes passing through the support frame 10 and connecting with the support frame 10 A pivoted handle 311, a worm 312 fixedly connected to one end of the handle 311 and a worm wheel 313 fixedly connected to one end of the transmission shaft 34 and meshed with the worm 312, the second transmission assembly includes the rack 321 and a gear 322 fixedly connected to the other end of the transmission shaft 34 and meshed with the rack 321; the sliding mechanism 40 includes a guide rail 41 arranged on the support frame 10 and parallel to the rack 321 And the slider 42 that is arranged on the lifting part 21 of the lifting bracket 20 and is slidably engaged with the guide rail 41, rotates the handle 311, so that the lifting bracket 20 is positioned between the gear 322 and the rack 321 Cooperate to realize the lifting movement in the vertical direction. In this embodiment, the rollers 110 are universal rollers and the universal rollers are evenly distributed on the lower surface of the horizontal part 12, and the universal stopper wheels are used to make the substrate loading and unloading equipment 1 stop smoothly. The direction of the substrate handling device 1 can be easily controlled when it is placed and moved.

3 and 6, the top surface 221a of the first support block 221 is provided with a first concave surface 221b, and a first side surface 221c is formed between the first concave surface 221b and the top surface 221a of the first support block 221. The top surface 222a of the second support block 222 is provided with a second concave surface 222b, and a second side surface 222c is formed between the second concave surface 222b and the top surface 222a of the second support block 222 . The first concave surface 221b and the second concave surface 222b are arranged opposite to each other and form the loading area. When loading, a number of substrates are first loaded in a basket device 5, and then the basket device 5 is fixedly loaded on the loading area. Inside. Specifically, the basket device 5 is carried on the first concave surface 221b and the second concave surface 222b and is limited by the first side surface 221c and the second side surface 222c so as to realize the front and back of the substrate. Positioning in direction. In this embodiment, the middle part of the second concave surface 222b is provided with a positioning pin 223, and the positioning pin 223 is used to cooperate with the basket device 5 for positioning, so as to realize the positioning of the substrate in the left and right direction. .

In this embodiment, guide rollers 224 are respectively provided on the left and right sides of the lower surface of the bearing part 22, and the guide rollers 224 are used to guide the substrate loading and unloading equipment 1 to enter and receive the basket device flexibly and quickly. 5 in the groove 61 of the trough platform 6, so in design, the outer tangent of the guide roller 224 exceeds the left and right side edges of the lower surface of the bearing part 22, and the left and right rows of the guide roller 224 The distance between the outer tangent lines is narrower than the width of the groove 61, so that the operator can quickly and easily push the substrate handling device 1 into the groove 61 of the grooved platform 6, so as to perform unloading or loading Operation of the basket device 5.

Referring to Figures 1-2 and Figures 4-5, the support frame 10 has a vertical bending structure, the support frame 10 includes a vertical part 11 and a horizontal part 12, and the vertical part 11 and the lifting part 21 are in the vertical direction Correspondingly arranged in parallel, the horizontal part 12 is vertically connected to the lower end of the vertical part 11 and the end of the horizontal part 12 is provided with a shock absorber 120, and the upper end of the vertical part 11 is provided with the fixing seat 33, The transmission shaft 34 is pierced on the fixing base 33 , and the two ends of the transmission shaft 34 are respectively fixedly connected to the worm wheel 313 and the gear 322 . The shock absorbing block 120 is arranged at the end of the horizontal part 12 to prevent the support frame 10 from directly colliding with other equipment, and play the role of shock absorption and buffering. In this embodiment, the left and right widths of the horizontal portion 12 can be determined according to the width of the body base of the next module equipment that the substrate loading and unloading equipment 1 needs to contact.

Specifically, the lifting part 21 includes upper and lower side arms 211, 213 and left and right side arms 212, 214 oppositely arranged, and the upper, lower, left and right side arms 211, 213, 212, 214 enclose In the first rectangular space 200, the carrying part 22 is formed by the upper side arm 211 of the lifting part 21 extending horizontally backward relative to the vertical part 11 of the support frame 10, and the rack 321 is vertically arranged on the upper, Between the lower side arms 211, 213 and accommodated in the first rectangular space 200, the middle part of one side of the left and right side arms 212, 214 of the lifting part 20 facing away from the vertical part 11 is provided with a limiter. The position block 23, the limit block 23 is used to maintain the distance between the lifting support 20 and other equipment, so as to prevent the two from being damaged due to collision.

More specifically, the vertical portion 11 includes first, third side arms 111, 113 and second, fourth side arms 112, 114 oppositely arranged, and the first, third, second, and fourth side arms 111, 113, 112, 114 are respectively parallel to the upper, lower, left and right side arms 211, 213, 212, 214 of the lifting part 21, and the first, third, second and fourth sides The arms 111, 113, 112, 114 enclose the second rectangular space 100, the horizontal portion 12 is formed by the horizontal extension of the third side arm 113 and the extending direction of the horizontal portion 12 is the same as the extending direction of the carrying portion 22 Similarly, one end of the fixing seat 33 is fixed on the lower surface of the first side arm 111 , and the other end extends toward the second rectangular space 100 . In this embodiment, the substrate loading and unloading device 1 further includes a worm seat 13, the upper end of the worm seat 13 is fixed on the outer surface (not shown) of the first side arm 111, and the outer surface is the same as On the opposite side of the lifting part 21 of the lifting bracket 20 , the lower end of the worm seat 13 extends downwards, and the handle 311 passes through the lower end of the worm seat 13 and is pivotally connected with the worm seat 13 . In this embodiment, a handle 14 is also included, and the handle 14 is arranged on the outer surfaces of the second and fourth side arms 112, 114, and the setting of the handle 14 is convenient for the user to operate the substrate loading and unloading equipment 1.

Specifically, the upper surface of the horizontal portion 12 is provided with a lower limit block 15, and the fourth side arm 114 of the vertical portion 11 is provided with an upper limit block 16, and the lower limit block 15 corresponds to the lower arm 213. The position directly below is set, one end of the upper limit block 16 is fixed on the fourth side arm 114 of the vertical part 11, and the other end of the upper limit block 16 passes through the first rectangular space 200 and is located at directly above the lower side arm 213 . The setting of the upper and lower limit blocks 15, 16 enables the substrate loading and unloading equipment 1 to move up and down smoothly and limit the position in a certain stroke.

In this embodiment, the guide rail 41 is vertically arranged on the inner surface (not shown) of the second side arm 112 of the vertical part 11, and the inner surface is opposite to the lifting part 21 of the lifting bracket 20. On the side, the left arm 212 of the lifting part 21 is provided with a sliding block 42 that slides and engages with the guide rail 41 . Referring to Fig. 7, in another embodiment 2 of the present utility model, the guide rails 41 are vertically provided on the inner sides of the second side arm 112 and the fourth side arm 114 of the vertical part 11, respectively, and the lifting The left and right side arms 212 , 214 of the part 21 are respectively provided with sliders 42 that are slidably engaged with the guide rail 41 .

The working principle of the substrate loading and unloading device 1 of the present invention in a specific embodiment will be described in detail below in conjunction with FIGS. 1-6 :

When it is necessary to unload the basket device 5 on the substrate loading and unloading equipment 1, the operator first fixes the basket device 5 on the first concave surface 221b and the second concave surface 222b by using the positioning pins 223 to form a on the loading area, while the front and rear positions of the basket device 5 are just fixed by the first side 221c of the first support block 221 and the second side 222c of the second support block 222; then push the handle 14 to make the loading The substrate loading and unloading equipment 1 with the basket device 5 arrives outside the door of the equipment where the trough platform 6 receiving the basket device 5 is located, opens the door, and then drives the worm by rotating the free end of the handle 311 312 rotates, and then the worm 312 rotates to drive the worm wheel 313 to rotate, the worm wheel 313 transmits the rotational power to the gear 322 through the transmission shaft 34 to make the gear 322 rotate, and the gear 322 pushes the gear The bar 321 moves up and down, so that the lifting bracket 20 does lifting movement; when the lifting bracket 20 rises so that the bottom surface of the basket device 5 is higher than the stopper 62 on the surface of the trough platform 6, push the handle 14, so that the substrate loading and unloading equipment 1 enters the groove 61 along the inner wall of the groove 61 of the groove platform 6 through the guide roller 224, when the limit block 23 touches the groove When the lower side plate of the door outer frame where the platform 6 is located, the positioning of the substrate loading and unloading equipment 1 in the unloading area is completed; then, the handle 311 is rotated to lower the lifting bracket 20 until the basket device 5 is completely positioned in the stopper 62 of the trough platform 6, at this time, the inspection unit 64 on the support plate 63 of the trough platform 6 detects that the basket device 5 has been placed and sends a signal to an external display system (not shown); finally, the operator rotates the handle 311 to lower the elevating bracket 20 to disengage from the basket device 5, and pulls the handle 14 to allow the substrate handling device 1 to pass through the The guiding effect of the guide rollers 224 leaves the equipment where the trough platform 6 is located. Similarly, the working process of loading the basket device 5 onto the substrate loading and unloading device 1 is opposite to the above-mentioned unloading process, so it will not be described in detail here.

As mentioned above, the utility model adopts the substrate loading and unloading equipment 1 to load, transport and unload the substrate. The lifting of the lifting bracket 20, and then realize the loading and unloading of the substrate carried on the lifting bracket 20, because the worm 312, the worm wheel 313, the rack 321, and the gear 322 are driven by the handle 311, so the The positioning of the substrate loading and unloading equipment 1 is simple and flexible, and since the worm 312 and the worm wheel 313 have self-locking functions and the lifting precision of the rack 321 and the gear 322 is high, the substrate loading and unloading equipment 1 is used to adjust the positioning of the substrate loading and unloading equipment 1. The loading and unloading of the substrate is convenient, fast, safe and reliable; in addition, the substrate loading and unloading device 1 realizes the handling of the substrate through the rollers 110, so the substrate loading and unloading device 1 is used to The substrate is not limited in scope when it is handled.

It can be seen that the substrate loading and unloading equipment 1 of the present utility model is not only applied to loading, transporting and unloading the substrate of the flat panel display device, but also can be used for loading, transporting and unloading of the sheet structure required in the production process of the flat panel display device. This is achieved with the substrate handling device 1 described above.

The utility model has been described above in conjunction with the best embodiments, but the utility model is not limited to the above-disclosed embodiments, but should cover various modifications and equivalent combinations based on the essence of the utility model.

Claims (10)

1. substrate handling equipment is characterized in that, comprise bracing frame, transmission device, slide mechanism and are used for the lifting support of carrying substrates:

The lower surface of support frame as described above is evenly distributed with roller, and described roller drives the support frame as described above motion;

Described lifting support comprises lifting unit and supporting part, described lifting unit is parallel corresponding setting with support frame as described above in vertical direction, described supporting part vertically is bent to form backward by the relative support frame as described above in the upper end of described lifting unit, the vertical tooth bar that is provided with of one side of the described lifting unit relative with support frame as described above, the both sides, front and back of the upper surface of described supporting part extend upward respectively and form first back-up block and second back-up block, described first back-up block and described second back-up block form supporting region, and described substrate fixedly is carried in the described supporting region;

Described transmission device comprises first transmission component, second transmission component, be located at the permanent seat on the support frame as described above and pass described permanent seat and the transmission shaft of two ends difference described first transmission component of captive joint and second transmission component, described first transmission component comprises the handle that passes support frame as described above and articulate with support frame as described above, the worm screw of one end of the described handle of captive joint and be fixedly connected on described transmission shaft an end and with the worm gear of described worm mesh, described second transmission component comprise described tooth bar and be fixedly connected on described transmission shaft the other end and with described tooth bar gears in mesh;

Described slide mechanism comprise be located on the support frame as described above and the guide rail parallel with described tooth bar and be located on the lifting unit of described lifting support and with the slide block of described guide rail slip clamping, rotate described handle, thereby make described lifting support in the dipping and heaving that realizes under the cooperation of described gear and tooth bar on the vertical direction.

2. substrate handling equipment as claimed in claim 1, it is characterized in that, the end face of described first back-up block offers first concave surface, the end face of described second back-up block offers second concave surface, described first concave surface and second concave surface are oppositely arranged and form described supporting region, and described substrate fixedly is carried in the described supporting region.

3. substrate handling equipment as claimed in claim 2 is characterized in that the middle part of described second concave surface is provided with locating dowel pin, and described locating dowel pin positions described substrate on left and right directions.

4. substrate handling equipment as claimed in claim 3 is characterized in that the left and right sides of the lower surface of described supporting part is respectively equipped with guide roller, and the outer tangent line of described guide roller exceeds the edge, the left and right sides of the lower surface of described supporting part.

5. substrate handling equipment as claimed in claim 1, it is characterized in that, support frame as described above is vertical bending structure, support frame as described above comprises vertical component effect and horizontal part, described vertical component effect is parallel corresponding setting with described lifting unit in vertical direction, described horizontal part is vertically connected at the lower end of described vertical component effect and the end of described horizontal part is provided with snubber block, the upper end of described vertical component effect is provided with described permanent seat, be equipped with described transmission shaft on the described permanent seat, the two ends of described transmission shaft are described worm gear of captive joint and gear respectively.

6. substrate handling equipment as claimed in claim 5 is characterized in that, described vertical component effect is provided with the guide rail parallel with described tooth bar, and described lifting unit is provided with the slide block with described guide rail slip clamping.

7. substrate handling equipment as claimed in claim 6, it is characterized in that, described lifting unit comprises upper and lower side arm and the left and right side arm that is oppositely arranged, described upper and lower, left and right side arm surrounds first rectangular space, described supporting part by the vertical component effect of the relative support frame as described above of last side arm of described lifting unit backward horizontal-extending form, described tooth bar is vertical between the described upper and lower side arm and is contained in described first rectangular space, and the middle part of a side of the described left and right side arm of described vertical component effect is equipped with limiting stopper dorsad.

8. substrate handling equipment as claimed in claim 7, it is characterized in that, the upper surface of described horizontal part is provided with lower position block, described vertical component effect is provided with upper limit position block, position under the corresponding described side arm down of described lower position block is provided with, one end of described upper limit position block is fixed on the described vertical component effect, the other end of described upper limit position block pass described first rectangular space and be positioned at described down side arm directly over.

9. substrate handling equipment as claimed in claim 5 is characterized in that, described roller is the lower surface that universal rolling wheel and described universal rolling wheel are uniformly distributed in described horizontal part.

10. substrate handling equipment as claimed in claim 5 is characterized in that, also comprise handle, and described handle is located on the described vertical component effect and is positioned at the same side with the free end of described handle.

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