JP4417432B1 - Work transfer device and vacuum bonding method - Google Patents

Work transfer device and vacuum bonding method Download PDF

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JP4417432B1
JP4417432B1 JP2009519079A JP2009519079A JP4417432B1 JP 4417432 B1 JP4417432 B1 JP 4417432B1 JP 2009519079 A JP2009519079 A JP 2009519079A JP 2009519079 A JP2009519079 A JP 2009519079A JP 4417432 B1 JP4417432 B1 JP 4417432B1
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plate
flexible sheet
workpiece
work
workpieces
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JPWO2010095215A1 (en
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道也 横田
豊 今川
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Shin Etsu Engineering Co Ltd
Shinko Engineering Co Ltd
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Shinko Engineering Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Abstract

可撓性シートの部分褶曲のみでワーク搬送手段との板状ワークの受渡しを容易に行う。
ワーク保持テーブル(５ｂ，８)に設けられる可撓性シート(２)の一部を、板状ワーク(Ａ，Ｂ)へ向け部分的に押圧する押圧手段(４)と、この押圧手段(４)で可撓性シート(２)を押圧して部分的に褶曲させ、この部分褶曲部(２ｂ)がワーク搬送手段(３)で搬送される板状ワーク(Ａ，Ｂ)に届くように作動制御する制御手段(６)を備えることにより、ワーク搬入時には、ワーク搬送手段(３)で搬入された少なくとも板状ワーク(Ｂ)に、可撓性シート(２)の部分褶曲部(２ｂ)が当接し支持されて受け取り可能となり、またワーク搬出時には、貼り合わせた両板状ワーク(Ａ，Ｂ)が、該部分褶曲部(２ｂ)でワーク搬送手段(３)のワーク搬出開始位置まで押送されて受渡し可能となる。
【選択図】図１The plate-like workpiece is easily transferred to and from the workpiece conveying means only by the partial bending of the flexible sheet.
A pressing means (4) for partially pressing a part of the flexible sheet (2) provided on the work holding table (5b, 8) toward the plate-like work (A, B), and the pressing means (4 ), The flexible sheet (2) is pressed and partially bent, and the partially bent portion (2b) is operated so as to reach the plate-like workpiece (A, B) conveyed by the workpiece conveying means (3). By providing the control means (6) for controlling, at the time of the work loading, at least the plate-like work (B) carried in by the work carrying means (3), the partial bent portion (2b) of the flexible sheet (2) is provided. The two plate-like workpieces (A, B) that are bonded together are pushed to the workpiece unloading start position of the workpiece conveying means (3) at the partially bent portion (2b) when the workpiece is unloaded. Can be delivered.
[Selection] Figure 1

Description

本発明は、例えば液晶ディスプレイ（ＬＣＤ）や有機ＥＬディスプレイ（ＯＬＥＤ）やプラズマディスプレイ（ＰＤＰ）やフレキシブルディスプレイなどのフラットパネルディスプレイ（ＦＰＤ）に用いられるガラス製基板、又はそれらの表面に接着される偏光板などからなる二枚の板状ワークを、真空ラミネート法により、これら両板状ワーク間への気泡の混入を抑制しながら貼り合わせる真空貼り合わせ装置などに用いられるワーク搬送装置、及び、それを使用した真空貼り合わせ方法に関する。
詳しくは、ワーク搬送手段で搬入・搬出される板状ワークをワーク保持テーブルに受け渡すワーク搬送装置及び真空貼り合わせ方法に関する。The present invention relates to a glass substrate used for a flat panel display (FPD) such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP), and a flexible display, or polarized light adhered to the surface thereof. A workpiece transfer device used for a vacuum laminating apparatus or the like for laminating two plate-like workpieces made of plates or the like by vacuum laminating while suppressing the mixing of bubbles between these two plate-like workpieces, and The present invention relates to the vacuum bonding method used.
More specifically, the present invention relates to a work transfer device and a vacuum bonding method for transferring a plate-like work carried in and out by a work transfer means to a work holding table.

従来、この種のワーク搬送装置及び真空貼り合わせ方法としては、上下一対の定盤の開口を閉鎖するように可撓性の薄板が張設固定され、これら薄板の間に密閉空間が形成され、前もって位置合せし且つ仮止めされた２枚１組のガラス基板を、前記一対の可撓性の薄板で挟着して、該ガラス基板が密閉空間内に保持され、この密閉空間内の減圧により大気圧が作用して前記ガラス基板を加圧し、前記可撓性の薄板に備えられた発熱体の通電により発熱して、ガラス基板間に介在されたシール材を加熱し、加圧して硬化させるものがある（例えば、特許文献１参照）。
また、二枚のガラス製基板を基板搬送用ロボットにより定盤の基板保持面へ向けて搬入し、該定盤を貫通して昇降移動自在に複数配置されるリフトピンにより、搬入されたガラス製基板を空中で受け取って前記定盤の基板保持面にセットし、また貼り合わせが完了した両ガラス製基板は、前記基板保持面から前記リフトピンで持ち上げ、これを前記基板搬送用ロボットにより空中で受け取って搬出するものがある（例えば、特許文献２参照）。Conventionally, as this type of work transfer device and vacuum bonding method, a flexible thin plate is stretched and fixed so as to close the openings of a pair of upper and lower surface plates, and a sealed space is formed between these thin plates, A pair of glass substrates, which are aligned and temporarily fixed in advance, are sandwiched between the pair of flexible thin plates, and the glass substrates are held in a sealed space. Atmospheric pressure acts to pressurize the glass substrate, and heat is generated by energization of a heating element provided on the flexible thin plate to heat and pressurize and cure the sealing material interposed between the glass substrates. There are some (see, for example, Patent Document 1).
In addition, two glass substrates are carried toward the substrate holding surface of the surface plate by the substrate transfer robot, and the glass substrates are carried in by lift pins that are arranged through the surface plate so as to be movable up and down. The glass substrates that have been bonded together are lifted by the lift pins from the substrate holding surface and received by the substrate transfer robot in the air. Some are carried out (see, for example, Patent Document 2).

特開平０８−１３６９３７号公報（第３−４頁、図７−８）JP 08-136937 A (page 3-4, FIG. 7-8) 特開２００５−１７５１５号公報（第４−９頁、図１−２）Japanese Patent Laying-Open No. 2005-17515 (page 4-9, FIG. 1-2)

しかし乍ら、上述した特許文献１の場合には、ガラス基板と対向する面全体が可撓性の薄板で密閉状に覆われるため、特許文献２のように基板搬送用ロボットとリフトピンを用いて板状ワークの受渡しが行われるようにすると、リフトピンが可撓性の薄板を貫通して昇降しなければならず、可撓性の薄板に複雑なシール機構を取り付けなければならない等、密閉空間を形成することが困難になるという問題があった。
このような問題点を解決するため、リフトピンを使わずに基板搬送用ロボットのみで可撓性の薄板の上面に対してガラス基板を受け渡すには、ガラス基板の上面を吸着保持するか、又はガラス基板の対向する側面を挟持することが考えられる。
しかし、前もって位置合せし且つ仮止めされた２枚１組のガラス基板の上面を吸着保持した場合には、位置ズレが発生し易くなるという問題があり、またガラス基板の対向する側面を挟持する場合には、確実に挟持するための複雑な機構が基板搬送用ロボットに必要になって製造コストが高くなるという問題があった。However, in the case of Patent Document 1 described above, the entire surface facing the glass substrate is hermetically covered with a flexible thin plate. Therefore, as in Patent Document 2, a robot for transporting the substrate and lift pins are used. When the plate-shaped workpiece is delivered, the lift pin must go up and down through the flexible thin plate, and a complicated sealing mechanism must be attached to the flexible thin plate. There was a problem that it was difficult to form.
In order to solve such a problem, in order to deliver the glass substrate to the upper surface of the flexible thin plate using only the substrate transfer robot without using the lift pin, the upper surface of the glass substrate is sucked and held, or It is conceivable to sandwich the opposing side surfaces of the glass substrate.
However, when the upper surfaces of a set of two glass substrates that have been aligned and temporarily fixed are sucked and held, there is a problem that misalignment is likely to occur, and the opposite side surfaces of the glass substrate are sandwiched. In such a case, there is a problem that a complicated mechanism for securely holding the substrate is required for the substrate transfer robot, and the manufacturing cost is increased.

本発明は、可撓性シートの部分褶曲のみでワーク搬送手段との板状ワークの受渡しを容易に行うことを目的としたものである。  An object of the present invention is to facilitate delivery of a plate-shaped workpiece to and from a workpiece conveying means only by partial folding of a flexible sheet.

前述した目的を達成するために、本発明は、ワーク保持テーブルに設けられる可撓性シートと、この可撓性シートの一部を前記板状ワークへ向け部分的に押圧し部分的に褶曲させて部分褶曲部を形成する押圧手段と、この押圧手段を作動制御して前記可撓性シートの部分褶曲部が前記ワーク搬送手段で搬送される前記板状ワークに届くようにする制御部とを備え、前記可撓性シートは、前記板状ワークが搬入・搬出される第一空間と前記押圧手段が設けられる第二空間とを隔離するように配置され、前記制御部は、ワーク搬入時には、前記ワーク搬送手段で搬入された前記板状ワークに、前記可撓性シートの部分褶曲部を当接させて支持し、ワーク搬出時には、前記板状ワークを前記可撓性シートの部分褶曲部で前記ワーク搬送手段によるワーク搬出開始位置まで押送するように、前記押圧手段を作動制御したことを特徴とするものである。
前述した特徴に加えて、前記押圧手段の先端部を前記可撓性シートへ向けて突出するように湾曲形成したことを特徴とする。
さらに前述した特徴に加えて、前記可撓性シートの前記押圧手段と対向する部分に裏打板を部分的に固着したことを特徴とする。
さらに前述した特徴に加えて、前記可撓性シートと前記裏打板に亘って通気孔を貫通開穿し、該通気孔を通して前記板状ワークが前記可撓性シートに対し移動不能に吸着保持される吸引チャックを設けたことを特徴とする。
また前述したワーク搬送装置を真空チャンバ内に配置し、この真空チャンバの内部に前記ワーク搬送手段で二枚の前記板状ワークを搬送し、前記可撓性シートを挟んで形成される二つの空間の気圧差により、前記両板状ワークを真空状態にて貼り合わせた後に、これら貼り合わされた両板状ワークを前記ワーク搬送手段で前記真空チャンバの外部へ搬送することを特徴とする。 In order to achieve the above-described object, the present invention provides a flexible sheet provided on a work holding table, and a part of the flexible sheet is partially pressed toward the plate-shaped work to be partially bent. A pressing means for forming a partially bent portion, and a control portion for controlling the operation of the pressing means so that the partially bent portion of the flexible sheet reaches the plate-like workpiece conveyed by the workpiece conveying means. wherein the flexible sheet, the plate-shaped workpiece is first space and said pressing means is loading and unloading are arranged so as to separate the second space provided, wherein, at the time of workpiece loading, The plate-shaped work carried in by the work conveying means is supported by contacting the partial bent portion of the flexible sheet, and when the work is unloaded, the plate-like work is supported by the partial bent portion of the flexible sheet. The workpiece conveying means As pusher to click unloading starting position, it is characterized in that controls the operation of the said pressing means.
In addition to the above-described features, the tip of the pressing means is curved so as to protrude toward the flexible sheet.
Further, in addition to the above-described features, a backing plate is partially fixed to a portion of the flexible sheet facing the pressing means.
Further, in addition to the above-described features, a vent hole is penetrated through the flexible sheet and the backing plate, and the plate-like work is sucked and held against the flexible sheet through the vent hole. A suction chuck is provided .
Further, the above-described workpiece transfer device is disposed in a vacuum chamber, and two spaces formed by sandwiching the flexible sheet by transferring the two plate-like workpieces into the vacuum chamber by the workpiece transfer means. After the two plate-like workpieces are bonded together in a vacuum state due to the difference in atmospheric pressure, the bonded plate-like workpieces are transferred to the outside of the vacuum chamber by the workpiece transfer means.

前述した特徴を有する本発明は、ワーク保持テーブルに設けられる可撓性シートの一部を、板状ワークへ向け部分的に押圧する押圧手段と、この押圧手段で可撓性シートを押圧して部分的に褶曲させ、この部分褶曲部がワーク搬送手段で搬送される板状ワークに届くように作動制御する制御部を備えることにより、ワーク搬入時には、ワーク搬送手段で搬入された少なくとも板状ワークに、可撓性シートの部分褶曲部が当接し支持されて受け取り可能となり、またワーク搬出時には、貼り合わせた両板状ワークが、該部分褶曲部でワーク搬送手段のワーク搬出開始位置まで押送されて受渡し可能となる。
したがって、可撓性シートの部分褶曲のみでワーク搬送手段との板状ワークの受渡しを容易に行うことができる。
その結果、従来のようにリフトピンを使わずに、可撓性シートに対して板状ワークの搬入・搬出を確実に行えるとともに、板状ワークを確実に挟持するための複雑な機構も必要としないから製造コストの低減化も図れる。 In the present invention having the above-described characteristics, a part of the flexible sheet provided on the work holding table is partially pressed toward the plate-like work, and the flexible sheet is pressed by the pressing means. At least a plate-like work carried by the work conveying means is provided at the time of loading the work by providing a control part that is partially bent and controlled so that the partial bent part reaches the plate-like work conveyed by the work conveying means. In addition, the partially bent portion of the flexible sheet abuts and is supported so that it can be received, and when the workpiece is unloaded, the bonded plate-like workpieces are pushed to the workpiece unloading start position of the workpiece conveying means at the partially bent portion. Can be delivered.
Therefore, the plate-shaped workpiece can be easily transferred to and from the workpiece conveying means only by partial folding of the flexible sheet.
As a result, the plate-like workpiece can be reliably carried in and out of the flexible sheet without using a lift pin as in the prior art, and a complicated mechanism for securely holding the plate-like workpiece is not required. Therefore, the manufacturing cost can be reduced.

さらに、押圧手段の先端部を可撓性シートへ向けて突出するように湾曲形成した場合には、押圧手段の湾曲した先端部が可撓性シートに当接した際に、この先端部の湾曲面に沿って褶曲する。
したがって、押圧手段の当接にて破れることなく可撓性シートを確実に弾性変形させることができる。Further, when the tip of the pressing means is curved so as to protrude toward the flexible sheet, the tip of the tip is bent when the curved tip of the pressing means comes into contact with the flexible sheet. Fold along the surface.
Therefore, the flexible sheet can be reliably elastically deformed without being broken by the contact of the pressing means.

さらに、可撓性シートの押圧手段と対向する部分に裏打板を部分的に固着した場合には、可撓性シートに押圧手段の先端部が裏打板を介して当接し、該可撓性シートが褶曲する。
したがって、押圧手段の当接にて破れることなく可撓性シートを確実に弾性変形させることができる。Further, when the backing plate is partially fixed to the portion of the flexible sheet facing the pressing means, the leading end of the pressing means comes into contact with the flexible sheet via the backing plate, and the flexible sheet Folds.
Therefore, the flexible sheet can be reliably elastically deformed without being broken by the contact of the pressing means.

さらに、可撓性シートと裏打板に亘って通気孔を貫通開穿した場合には、可撓性シートに開穿した通気孔が、該可撓性シートの弾性変形に伴って広がらないようにするとともに、該通気孔を通してそれと接する板状ワークのみ又は貼り合わされた二枚の板状ワークが可撓性シート２に対して移動不能に吸着保持される。
したがって、可撓性シートに対する板状ワークの位置ズレを防止することができる。Further, when the vent hole is penetrated through the flexible sheet and the backing plate, the vent hole opened in the flexible sheet is prevented from expanding due to elastic deformation of the flexible sheet. At the same time, only the plate-like workpieces that are in contact with it or the two plate-like workpieces bonded together through the vent holes are adsorbed and held on the flexible sheet 2 so that they cannot move.
Therefore, the position shift of the plate-shaped workpiece with respect to the flexible sheet can be prevented.

また、ワーク搬送装置を真空チャンバ内に配置し、この真空チャンバの内部に前記ワーク搬送手段で二枚の前記板状ワークを搬送し、前記可撓性シートを挟んで形成される二つの空間の気圧差により、前記両板状ワークを真空状態にて貼り合わせた後に、これら貼り合わされた両板状ワークを前記ワーク搬送手段で前記真空チャンバの外部へ搬送する場合には、ワーク搬入時には、ワーク搬送手段で搬入された二枚の板状ワークのどちらか一方に、可撓性シートの部分褶曲部が当接し支持されて受け取り可能となり、またワーク搬出時には、貼り合わせた両板状ワークが、該部分褶曲部でワーク搬送手段によるワーク搬出開始位置まで押送されて受渡し可能となる。
したがって、可撓性シートの部分褶曲のみでワーク搬送手段との板状ワークの受渡しを容易に行うことができる。
その結果、従来のようにリフトピンを使わずに可撓性シートにより密閉空間を形成しつつ、可撓性シートに対して板状ワークの搬入・搬出を確実に行えるとともに、板状ワークを確実に挟持するための複雑な機構も必要としないから製造コストの低減化も図れる。Further, a work transfer device is disposed in the vacuum chamber, and the two plate-like works are transferred into the vacuum chamber by the work transfer means, and two spaces formed between the flexible sheets are provided. When the two plate-like workpieces are bonded together in a vacuum state due to an atmospheric pressure difference, the bonded plate-like workpieces are transferred to the outside of the vacuum chamber by the workpiece transfer means. Either one of the two plate-like workpieces carried by the conveying means is supported by the partial curved portion of the flexible sheet in contact with and supported, and when the workpiece is unloaded, the two plate-like workpieces bonded together are The partially bent portion is pushed to the workpiece unloading start position by the workpiece conveying means and can be delivered.
Therefore, the plate-shaped workpiece can be easily transferred to and from the workpiece conveying means only by partial folding of the flexible sheet.
As a result, while the sealed space is formed by the flexible sheet without using the lift pins as in the prior art, the plate-shaped workpiece can be reliably carried in and out of the flexible sheet, and the plate-shaped workpiece can be reliably Since a complicated mechanism for clamping is not required, the manufacturing cost can be reduced.

本発明のワーク搬送装置及び真空貼り合わせ方法の一実施例を示す縦断正面図であり、（ａ）がワーク搬入時を示し、（ｂ）がワーク受渡し後を示し、（ｃ）が真空チャンバ閉塞後を示している。It is a vertical front view which shows one Example of the workpiece conveyance apparatus and vacuum bonding method of this invention, (a) shows the time of workpiece | work carrying in, (b) shows after workpiece delivery, (c) is a vacuum chamber obstruction | occlusion Shows the back. 図１（ｂ）の（２）−（２）線に沿える横断平面図である。It is a cross-sectional plan view which follows the (2)-(2) line | wire of FIG.1 (b). 押圧手段の一例を示す部分拡大縦断正面図である。It is a partial expansion vertical front view which shows an example of a press means. 加熱圧着時を示す縦断正面図である。It is a vertical front view which shows the time of thermocompression bonding. 真空チャンバ開放前を示す縦断正面図である。It is a vertical front view which shows the vacuum chamber before opening. 真空チャンバ開放後を示す縦断正面図である。It is a vertical front view which shows the vacuum chamber after opening. ワーク搬出時を示す縦断正面図である。It is a vertical front view which shows the time of work carrying-out. 本発明のワーク搬送装置及び真空貼り合わせ方法の他の実施例を示す縦断正面図であり、（ａ）がワーク受渡し後を示し、（ｂ）がワーク搬出時を示している。It is a vertical front view which shows the other Example of the workpiece conveyance apparatus and vacuum bonding method of this invention, (a) shows after workpiece | work delivery, (b) has shown the time of workpiece | work carrying-out. 可撓性シートの変形例を示す部分拡大縦断正面図である。It is a partial expansion longitudinal section front view showing a modification of a flexible sheet.

本発明のワーク搬送装置の実施形態は、ワーク保持テーブルに設けられる可撓性シートと、この可撓性シートの一部を板状ワークへ向け部分的に押圧する押圧手段と、この押圧手段を作動制御する制御部とを備え、この制御部は、前記押圧手段で前記可撓性シートを押圧して部分的に褶曲させ、この部分褶曲部が前記ワーク搬送手段で搬送される前記板状ワークに届くようにしている。  An embodiment of the workpiece transfer device of the present invention includes a flexible sheet provided on a workpiece holding table, a pressing unit that partially presses a part of the flexible sheet toward a plate-shaped workpiece, and the pressing unit. A control unit that controls the operation, and the control unit presses the flexible sheet by the pressing unit to partially bend the plate-shaped workpiece, and the partial bent unit is transported by the work transporting unit. To reach.

このワーク搬送装置を使用する真空貼り合わせ方法の実施形態は、図１〜図９に示す如く、対向面が平滑で平行に配置される平滑部材１及び可撓性シート２と、これら平滑部材１及び可撓性シート２の間に二枚の板状ワークＡ，Ｂを搬送するワーク搬送手段３とを備え、このワーク搬送手段３で外部から平滑部材１と可撓性シート２の間に搬入された二枚の板状ワークＡ，Ｂを、該可撓性シート２を挟んで形成される二つの第一空間Ｓ１及び第二空間Ｓ２の気圧差により加圧して真空状態で貼り合わせ、この貼り合わされた両板状ワークＡ，Ｂを、ワーク搬送手段３で平滑部材１及び可撓性シート２の間から外部へ搬出している。  As shown in FIG. 1 to FIG. 9, the embodiment of the vacuum bonding method using this work conveying apparatus includes a smooth member 1 and a flexible sheet 2 whose facing surfaces are smooth and arranged in parallel, and these smooth members 1. And a workpiece conveying means 3 for conveying two plate-like workpieces A and B between the flexible sheet 2, and the workpiece conveying means 3 carries in between the smooth member 1 and the flexible sheet 2 from the outside. The two plate-like workpieces A and B thus formed are pressed in a vacuum state by applying a pressure difference between the two first spaces S1 and the second space S2 formed with the flexible sheet 2 interposed therebetween. The bonded plate-like works A and B are carried out from between the smoothing member 1 and the flexible sheet 2 to the outside by the work conveying means 3.

そして、可撓性シート２の背後に形成される第二空間Ｓ２には、該可撓性シート２の一部を板状ワークＡ，Ｂへ向け部分的に押圧する押圧手段４を設け、この押圧手段４を後述する制御部６で作動制御することにより、該可撓性シート２を板状ワークＡ，Ｂへ向け部分的に褶曲させ、この部分褶曲部２ｂがワーク搬送手段３で搬送される板状ワークＡ，Ｂに届くような配置として、ワーク搬入時には、ワーク搬送手段３で搬入された板状ワークＡ，Ｂに、可撓性シート２の部分褶曲部２ｂを当接させて支持し、またワーク搬出時には、貼り合わせた両板状ワークＡ，Ｂを、該部分褶曲部２ｂでワーク搬送手段３によるワーク搬出開始位置まで押送するようにしている。  The second space S2 formed behind the flexible sheet 2 is provided with pressing means 4 for partially pressing a part of the flexible sheet 2 toward the plate-like workpieces A and B. By controlling the operation of the pressing means 4 by a control unit 6 described later, the flexible sheet 2 is partially bent toward the plate-like workpieces A and B, and the partial bent portion 2b is conveyed by the workpiece conveying means 3. In order to reach the plate-like workpieces A and B, when the workpiece is carried in, the plate-like workpieces A and B carried in by the workpiece conveyance means 3 are supported by contacting the partially bent portion 2b of the flexible sheet 2 At the time of unloading the workpiece, the bonded plate-like workpieces A and B are pushed to the workpiece unloading start position by the workpiece conveying means 3 by the partial curved portion 2b.

平滑部材１は、剛性材料で平板状に形成されるか又は弾性材料でシート状に形成される。
可撓性シート２は、例えばフッ素ゴムやシリコンゴムなどの耐熱性に優れた弾性材料でシート状に形成される。
この可撓性シート２のワーク対向部２ａにおいて押圧手段４の先端部４ａと対向する部分には、必要に応じて裏打板２ｃを部分的に固着することにより、該押圧手段４の先端部４ａが当接する箇所の強度をアップして破れ難くすることが好ましい。The smooth member 1 is formed in a flat plate shape with a rigid material, or formed into a sheet shape with an elastic material.
The flexible sheet 2 is formed into a sheet shape with an elastic material having excellent heat resistance such as fluorine rubber or silicon rubber.
In the work facing portion 2a of the flexible sheet 2, a backing plate 2c is partially fixed to a portion facing the tip portion 4a of the pressing means 4 as necessary, whereby the tip portion 4a of the pressing means 4 is secured. It is preferable to increase the strength of the place where the abuts and make it difficult to break.

これら平滑部材１及び可撓性シート２は、開閉可能な室内に組み付けられて、平滑部材１が配置される第一空間Ｓ１の内圧と、それと逆の可撓性シート２の背後に形成される第二空間Ｓ２の内圧を夫々調整自在にしている。  The smooth member 1 and the flexible sheet 2 are assembled in an openable / closable room, and are formed behind the internal pressure of the first space S1 in which the smooth member 1 is disposed and the flexible sheet 2 opposite thereto. The internal pressure of the second space S2 is adjustable.

その具体例としては、開閉可能な室が、互い接近又は離隔される方向へ開閉移動自在に設けられる一対の真空チャンバ５ａ，５ｂであり、その一方の真空チャンバ５ａの内部に平滑部材１を配置し、他方の真空チャンバ５ｂの開口を覆うように可撓性シート２が配置されるとともに、これら真空チャンバ５ａ，５ｂの開口縁の間には、例えばＯリングなどの環状シール部５ｃを設け、その閉動時において、可撓性シート２と一方の真空チャンバ５ａとで囲まれる領域を第一空間Ｓ１とすることが好ましい。  As a specific example thereof, the openable and closable chambers are a pair of vacuum chambers 5a and 5b provided to be openable and closable in a direction approaching or separating from each other, and the smooth member 1 is disposed in one of the vacuum chambers 5a. The flexible sheet 2 is disposed so as to cover the opening of the other vacuum chamber 5b, and an annular seal portion 5c such as an O-ring is provided between the opening edges of the vacuum chambers 5a and 5b. At the time of the closing movement, a region surrounded by the flexible sheet 2 and the one vacuum chamber 5a is preferably set as the first space S1.

さらに、これら第一空間Ｓ１及び第二空間Ｓ２には、真空チャンバ５ａ，５ｂの外部と連通する通気路５ｄ，５ｅを開設して、それらの内外へ気体を出し入れする圧力調整部５ｆが夫々設けられ、各空間Ｓ１，Ｓ２から真空チャンバ５ａ，５ｂの外部へ吸気することにより所定の真空状態にし、また真空チャンバ５ａ，５ｂの外部から各空間Ｓ１，Ｓ２へ給気することにより、周囲気圧（大気圧）と同じ状態に戻すことが好ましい。  Further, in the first space S1 and the second space S2, vent passages 5d and 5e communicating with the outside of the vacuum chambers 5a and 5b are provided, and pressure adjusting portions 5f for taking gas into and out of them are respectively provided. A predetermined vacuum state is obtained by sucking the spaces S1 and S2 to the outside of the vacuum chambers 5a and 5b, and by supplying air to the spaces S1 and S2 from the outside of the vacuum chambers 5a and 5b, the ambient pressure ( It is preferable to return to the same state as the atmospheric pressure.

ワーク搬送手段３は、例えば搬送ロボットなどからなり、二枚の板状ワークＡ，Ｂの底面、即ち下方に位置する板状ワークＢの底面をすくい上げて保持する受け渡し用ハンド３ａを備えることが好ましい。  The workpiece transfer means 3 is composed of, for example, a transfer robot, and preferably includes a delivery hand 3a that scoops up and holds the bottom surfaces of the two plate workpieces A and B, that is, the bottom surface of the plate workpiece B positioned below. .

押圧手段４の具体例としては、可撓性シート２と接触する先端部４ａと、それを往復移動させる駆動源４ｂとを有し、この先端部４ａを、ワーク搬送手段３により搬送される板状ワークＡ，Ｂを支える受け渡し用ハンド３ａの動作位置と干渉しないように配置している。
この先端部４ａの形状は、該可撓性シート２に向けて突出するように断面円弧状に湾曲形成することにより、該先端部４ａが可撓性シート２に当接した時に、その湾曲面に沿って褶曲させ、この当接箇所に孔が空き難くすることが好ましい。As a specific example of the pressing means 4, there is a tip portion 4 a that comes into contact with the flexible sheet 2 and a drive source 4 b that reciprocates the tip portion 4 a, and this tip portion 4 a is a plate that is transported by the work transport means 3 Are arranged so as not to interfere with the operating position of the hand 3a for supporting the workpieces A and B.
The shape of the tip 4a is curved in a circular arc shape so as to protrude toward the flexible sheet 2, so that when the tip 4a comes into contact with the flexible sheet 2, its curved surface It is preferable to bend along the line and make it difficult to make a hole at the contact point.

また、押圧手段４の駆動源４ｂには、後述する制御部６が電気的に接続され、この制御部６に基づいて作動制御することにより、先端部４ａで可撓性シート２を押圧せず平滑となるように配置される待機位置と、先端部４ａを可撓性シート２へ向け最も移動し、該可撓性シート２のワーク対向部２ａを部分的に押圧して弾性変形させ、ワーク搬送手段３で搬送される板状ワークＡ，Ｂに届くように配置される動作位置とに亘って、往復動させる。  Further, a control unit 6 to be described later is electrically connected to the drive source 4b of the pressing unit 4, and the flexible sheet 2 is not pressed by the distal end portion 4a by controlling the operation based on the control unit 6. The standby position arranged so as to be smooth, and the tip part 4a is moved most toward the flexible sheet 2, and the workpiece facing part 2a of the flexible sheet 2 is partially pressed to be elastically deformed. It is reciprocated over the operation position arranged so as to reach the plate-like workpieces A and B conveyed by the conveying means 3.

この制御部６は、押圧手段４の駆動源４ｂだけでなく、上述したワーク搬送手段３の駆動源（図示しない）、通気路５ｄ，５ｆに配管接続される圧力調整部５ｆ、真空チャンバ５ａ，５ｂの開閉用駆動源５ｇなどにも電気的に接続され、ワーク搬送手段３により板状ワークＡ，Ｂが搬入された直後と、第一空間Ｓ１及び第二空間Ｓ２の気圧差により両板状ワークＡ，Ｂが貼り合わされた直後のみ、押圧手段４の先端部４ａを待機位置から動作位置まで移動させ、ワーク搬送手段３とのワーク受渡し後は、動作位置から逆移動させて待機位置に戻すようにしている。
以下、本発明の各実施例を図面に基づいて説明する。The control unit 6 includes not only the driving source 4b of the pressing unit 4 but also the driving source (not shown) of the workpiece conveying unit 3 described above, the pressure adjusting unit 5f connected to the ventilation paths 5d and 5f, the vacuum chamber 5a, Both the plate-like workpieces A and B are electrically connected to the open / close drive source 5g of 5b and the plate-like workpieces A and B are loaded by the workpiece conveying means 3 and the two plate-like shapes due to the pressure difference between the first space S1 and the second space S2. Only after the workpieces A and B are pasted together, the tip 4a of the pressing means 4 is moved from the standby position to the operating position, and after the workpiece is transferred to the workpiece conveying means 3, it is moved backward from the operating position and returned to the standby position. I am doing so.
Embodiments of the present invention will be described below with reference to the drawings.

この実施例１は、図１〜図７に示す如く、本発明のワーク搬送装置を使用した真空貼り合わせ方法が、前記平滑部材１として剛性材料からなる定盤を、上方に配置される前記真空チャンバ５ａの内部に配置し、下方に配置される前記真空チャンバ５ｂの開口を覆うように前記可撓性シート２が配置され、これら上下真空チャンバ５ａ，５ｂの開放時に、前記板状ワークＡ，Ｂとして、前もって位置合せし且つ仮止めされた二枚１組のガラス基板などを搬入することで、これら両者を加圧しつつ、両者間に介在されたシール材Ｃを加熱して硬化させる真空ラミネート装置に使用した場合を示すものである。  In the first embodiment, as shown in FIGS. 1 to 7, the vacuum laminating method using the work conveying device of the present invention is the vacuum in which a surface plate made of a rigid material is disposed as the smooth member 1. The flexible sheet 2 is disposed inside the chamber 5a and covers the opening of the vacuum chamber 5b disposed below. When the upper and lower vacuum chambers 5a and 5b are opened, the plate-like workpiece A, B is a vacuum laminate in which a pair of glass substrates, which are aligned and temporarily fixed in advance, are carried in, and the sealing material C interposed between the two is heated and cured while being pressurized. The case where it uses for an apparatus is shown.

定盤１には、図１（ａ）〜（ｃ）に示す如く、発熱体７が備えられ、可撓性シート２の背後にも発熱体８が配設され、これら発熱体７，８は前記制御部６により作動制御され、板状ワークＡ，Ｂの搬入後に上下真空チャンバ５ａ，５ｂを閉塞し、可撓性シート２の背後に形成される前記第二空間Ｓ２の内圧を、搬入した二枚の板状ワークＡ，Ｂが載置される前記第一空間Ｓ１の内圧よりも高くするのと略同時に該発熱体７，８を発熱させて、定盤１の下方の平滑面１ａと可撓性シート２が、シール材Ｃの硬化温度まで温度上昇するようにしている。  As shown in FIGS. 1A to 1C, the surface plate 1 is provided with a heating element 7, and a heating element 8 is also provided behind the flexible sheet 2. The operation is controlled by the control unit 6, the upper and lower vacuum chambers 5 a and 5 b are closed after loading the plate-like workpieces A and B, and the internal pressure of the second space S 2 formed behind the flexible sheet 2 is loaded. The heating elements 7 and 8 are heated substantially at the same time as the internal pressure of the first space S1 on which the two plate-like workpieces A and B are placed, and the smooth surface 1a below the surface plate 1 is heated. The flexible sheet 2 is configured to increase in temperature to the curing temperature of the sealing material C.

図示例では、図２に示す如く、可撓性シート２が矩形状に形成され、その外周には、例えば金属などで額縁状に形成された枠体２ｄが一体的に固着され、この枠体２ｄを下真空チャンバ５ｂの開口縁に連結することで、該可撓性シート２全体が張架され、この枠体２ｄの上面には、例えばＯリングなどの環状シール部５ｃを配置している。
その他の例として図示しないが、枠体２ｃを設けずに弾性材料からなる可撓性シート２の外周縁を、下真空チャンバ５ｂの開口縁に連結したり、環状シール部５ｃを上真空チャンバ５ａの開口縁に対して脱落不能に配置することも可能である。In the illustrated example, as shown in FIG. 2, the flexible sheet 2 is formed in a rectangular shape, and a frame 2d formed in a frame shape with, for example, metal is integrally fixed to the outer periphery thereof. By connecting 2d to the opening edge of the lower vacuum chamber 5b, the entire flexible sheet 2 is stretched, and an annular seal portion 5c such as an O-ring is disposed on the upper surface of the frame 2d. .
Although not shown as another example, the outer peripheral edge of the flexible sheet 2 made of an elastic material without the frame 2c is connected to the opening edge of the lower vacuum chamber 5b, or the annular seal portion 5c is connected to the upper vacuum chamber 5a. It is also possible to arrange it so that it cannot fall off with respect to the opening edge.

さらに、押圧手段４の先端部４ａは、板状ワークＡ，Ｂの一辺の略全長近くまで延びるように形成され、他辺の方向へ適宜間隔を空けて複数配置されている。
これら押圧手段４の先端部４ａには、図３に示す如く、例えば板状又は棒状などに形成される支持部４ｃを連設し、この支持部４ｃは、発熱体８に開穿される通孔８ａを貫通して上下方向へ昇降自在に支持され、下真空チャンバ５ｂの底壁を気密状に貫通して外部へ突出し、その周囲には前記駆動源４ｂを配設している。Furthermore, the front end part 4a of the pressing means 4 is formed so as to extend to substantially the entire length of one side of the plate-like workpieces A and B, and a plurality of tip parts 4a are arranged at appropriate intervals in the direction of the other side.
As shown in FIG. 3, a support portion 4 c formed in a plate shape or a rod shape, for example, is connected to the distal end portion 4 a of the pressing means 4, and the support portion 4 c is opened through the heating element 8. The hole 8a passes through the hole 8a and is supported so as to be movable up and down. The bottom wall of the lower vacuum chamber 5b is airtightly protruded to the outside, and the drive source 4b is disposed around the bottom.

図示例では、押圧手段４の先端部４ａを、支持部４ｃの幅寸法よりも遙かに大きな断面半円形状に形成し、この支持部４ｃ及び駆動源４ｂがロッドレスレスシリンダである場合を示しているが、その他の構造の駆動源４ｂを使用することも可能である。
また、押圧手段４の先端部４ａと対向する可撓性シート２のワーク対向部２ａの裏面には、剛性材料又は弾性材料でシート状に形成される裏打板２ｃを固着して強度アップを図っている。In the illustrated example, the tip 4a of the pressing means 4 is formed in a semicircular cross section that is much larger than the width of the support 4c, and the support 4c and the drive source 4b are rodlessless cylinders. Although shown, it is also possible to use a drive source 4b of another structure.
Further, a backing plate 2c formed in a sheet shape with a rigid material or an elastic material is fixed to the back surface of the workpiece facing portion 2a of the flexible sheet 2 facing the tip portion 4a of the pressing means 4 to increase the strength. ing.

その他の例として図示しないが、押圧手段４の先端部４ａと対向する可撓性シート２のワーク対向部２ａの裏面部分のみを部分的に肉厚に形成して、箇所の強度アップを図ることも可能である。
さらに、押圧手段４の先端部４ａを断面円弧状に湾曲形成せず、略平滑な先端面を裏打板２ｃに突き当てたり、裏打板２ｃを設けず、可撓性シート２のワーク対向部２ａの裏面に直接突き当てることも可能である。Although not shown as another example, only the back surface portion of the workpiece facing portion 2a of the flexible sheet 2 facing the tip portion 4a of the pressing means 4 is partially thickened to increase the strength of the portion. Is also possible.
Further, the tip portion 4a of the pressing means 4 is not curved in a cross-sectional arc shape, the substantially smooth tip surface is abutted against the backing plate 2c, or the backing plate 2c is not provided, and the workpiece facing portion 2a of the flexible sheet 2 is provided. It is also possible to directly hit the back side of the.

次に、斯かるワーク搬送装置を用いた真空貼り合わせ方法について工程順に従って説明する。
先ず、図１（ａ）に示す如く、上下真空チャンバ５ａ，５ｂが上下方向へ離隔移動した開放時に、その外部からワーク搬送手段３により、前工程で正確に位置合わせされて仮止めされた二枚の板状ワークＡ，Ｂが、平滑部材１の定盤及び可撓性シート２の間の所定位置に搬入され、該ワーク搬送手段３の受け渡し用ハンド３ａで、可撓性シート２と接触することなく空中に支えられる。Next, a vacuum bonding method using such a workpiece transfer device will be described in the order of steps.
First, as shown in FIG. 1 (a), when the upper and lower vacuum chambers 5a and 5b are opened apart from each other in the vertical direction, they are accurately aligned and temporarily fixed by the work transfer means 3 from the outside in the previous process. The plate-like workpieces A and B are carried into a predetermined position between the surface plate of the smooth member 1 and the flexible sheet 2, and come into contact with the flexible sheet 2 with the hand 3 a for delivery of the workpiece conveying means 3. It is supported in the air without doing.

この状態で、複数箇所に配置された押圧手段４の先端部４ａが夫々上昇開始して、該板状ワークＡ，Ｂと対向する可撓性シート２のワーク対向部２ａの複数箇所に突き当たり、そのまま上方へ押圧する。
それにより、可撓性シート２のワーク対向部２ａにおいて、各押圧手段４の先端部４ａで押圧する部分のみが、ワーク搬送手段３の受け渡し用ハンド３ａと干渉しないように部分的に褶曲して、それらの頂点部分が下方の板状ワークＢの底面に夫々当接する。In this state, the tip portions 4a of the pressing means 4 arranged at a plurality of locations start to rise, and hit the plurality of locations of the workpiece facing portions 2a of the flexible sheet 2 facing the plate-like workpieces A and B, Press upward as it is.
Thereby, in the workpiece facing portion 2 a of the flexible sheet 2, only the portion pressed by the tip portion 4 a of each pressing means 4 is partially bent so as not to interfere with the delivery hand 3 a of the workpiece conveying means 3. These apex portions are in contact with the bottom surface of the lower plate-like workpiece B, respectively.

その結果、これら部分褶曲部２ｂの頂点部分で板状ワークＡ，Ｂが支えられ、可撓性シート２の部分褶曲部２ｂを除いた箇所と、下方の板状ワークＢとの間には隙間Ｓ３が空き、ワーク搬送手段３の受け渡し用ハンド３ａを外されても板状ワークＡ，Ｂは落下しない。  As a result, the plate-like workpieces A and B are supported at the apex portions of the partial bent portions 2b, and there is a gap between the portion excluding the partial bent portion 2b of the flexible sheet 2 and the lower plate-like workpiece B. Even if S3 is empty and the delivery hand 3a of the workpiece transport means 3 is removed, the plate-like workpieces A and B do not fall.

その後、各押圧手段４の先端部４ａが下降開始して、下方の板状ワークＢの支持状態を保ちながら、各部分褶曲部２ｂを徐々に消滅させ、図１（ｂ）に示す如く、可撓性シート２の全体が平滑に戻る。
それにより、可撓性シート２の部分褶曲のみでワーク搬送手段３から板状ワークＡ，Ｂを該可撓性シート２上に受け取って搬入工程が完了する。Thereafter, the tip end portion 4a of each pressing means 4 starts to descend, and the respective bent portions 2b are gradually disappeared while maintaining the supporting state of the lower plate-like workpiece B. As shown in FIG. The entire flexible sheet 2 returns to smooth.
Thereby, the plate-like workpieces A and B are received on the flexible sheet 2 from the workpiece conveying means 3 only by partial folding of the flexible sheet 2, and the carrying-in process is completed.

この状態では、圧力調整部５ｆが作動して、既に可撓性シート２の背後に形成される第二空間Ｓ２から通気路５ｅを通って吸引が開始されており、上述した板状ワークＡ，Ｂの受渡しの完了を確認したところで、上下真空チャンバ５ａ，５ｂの開閉用駆動源５ｇにより、それらの接近移動が開始される。  In this state, the pressure adjusting unit 5f is activated, and suction is started from the second space S2 already formed behind the flexible sheet 2 through the ventilation path 5e. Upon confirming the completion of the delivery of B, the close movement of the upper and lower vacuum chambers 5a and 5b is started by the open / close drive source 5g.

これに続いて、図１（ｃ）に示す如く、上下真空チャンバ５ａ，５ｂが環状シール部５ｃを介して閉塞されると、圧力調整部５ｆにより、平滑部材１の定盤が配置される第一空間Ｓ１から通気路５ｄを通って吸引が開始され、所定の真空度にするとともに、この平滑部材１の定盤に備えられた発熱体７と、可撓性シート２の背後に配設された発熱体８が加熱される。  Subsequently, as shown in FIG. 1 (c), when the upper and lower vacuum chambers 5a and 5b are closed through the annular seal portion 5c, the pressure adjusting portion 5f is used to place the surface plate of the smooth member 1. Suction is started from one space S1 through the ventilation path 5d, and a predetermined degree of vacuum is set. The heating element 7 provided on the surface plate of the smooth member 1 and the flexible sheet 2 are disposed behind the flexible sheet 2. The heated heating element 8 is heated.

その後、図４に示す如く、圧力調整部５ｆにより第二空間Ｓ２への給気が開始されて、第一空間Ｓ１との間に気圧差が発生する。
それにより、弾性変形可能な可撓性シート２が板状ワークＡ，Ｂを挟んで平滑部材１の下方の平滑面１ａへ向け押圧され、該平滑面１ａに沿って板状ワークＡ，Ｂを均一に加圧する。After that, as shown in FIG. 4, the pressure adjustment unit 5f starts supplying air to the second space S2, and an atmospheric pressure difference is generated between the first space S1.
Thereby, the elastically deformable flexible sheet 2 is pressed toward the smooth surface 1a below the smooth member 1 with the plate-like workpieces A and B interposed therebetween, and the plate-like workpieces A and B are moved along the smooth surface 1a. Apply pressure evenly.

これと同時に、平滑部材１の定盤に備えられた発熱体７と、可撓性シート２の背後に配設された発熱体８で、板状ワークＡ，Ｂの間に介在されたシール材Ｃを加熱して硬化させる。
それにより、板状ワークＡ，Ｂが真空状に貼り合わされて、両者間に気泡が混入しない。At the same time, the sealing material interposed between the plate-like workpieces A and B by the heating element 7 provided on the surface plate of the smooth member 1 and the heating element 8 disposed behind the flexible sheet 2. C is heated and cured.
Thereby, the plate-like workpieces A and B are bonded together in a vacuum state, and bubbles are not mixed between them.

このような貼り合わせ工程が完了した後は、図５に示す如く、圧力調整部５ｆにより第一空間Ｓ１が大気開放され、第二空間Ｓ２から吸引して可撓性シート２の膨張変形を解除しつつ、上下真空チャンバ５ａ，５ｂの離隔移動が開始される。  After such a bonding process is completed, as shown in FIG. 5, the first space S1 is opened to the atmosphere by the pressure adjusting unit 5f, and the expansion deformation of the flexible sheet 2 is released by suction from the second space S2. However, the separation movement of the upper and lower vacuum chambers 5a and 5b is started.

その後、図６に示す如く、上下真空チャンバ５ａ，５ｂの開放が完了すると、各記押圧手段４の先端部４ａが夫々上昇開始されて、図７に示す如く、可撓性シート２のワーク対向部２ａの複数箇所に突き当たり、そのまま上方へ押圧して部分的に褶曲する。
それにより、貼り合わせが完了した板状ワークＡ，Ｂを水平状に支えながら持ち上げて空中で支持し、この支持状態を保ちつつ可撓性シート２の部分褶曲部２ｂを除いた箇所と、下方の板状ワークＢとの間には隙間Ｓ３が空く。Thereafter, as shown in FIG. 6, when the opening of the upper and lower vacuum chambers 5a and 5b is completed, the leading end 4a of each pressing means 4 starts to rise, and as shown in FIG. 7, the flexible sheet 2 faces the workpiece. It hits a plurality of portions of the portion 2a, and is pressed upward as it is to bend partially.
As a result, the plate-like workpieces A and B that have been bonded together are lifted and supported in the air while being supported horizontally, and a portion excluding the partially bent portion 2b of the flexible sheet 2 while maintaining this supporting state, and below A gap S3 is left between the plate-like workpiece B and the plate-like workpiece B.

この支持状態で、該隙間Ｓ３にワーク搬送手段３の受け渡し用ハンド３ａを挿入すれば、可撓性シート２の部分褶曲部２ｂと干渉しないため、板状ワークＡ，Ｂを落下させずにすくい上げられ、該ワーク搬送手段３の受け渡し用ハンド３ａでそのまま上下真空チャンバ５ａ，５ｂの外部へ搬出される。
その結果、可撓性シート２の部分褶曲のみでその上から板状ワークＡ，Ｂをワーク搬送手段３に受け渡して搬出される。
それ以降は上述した作動が繰り返される。In this supported state, if the hand 3a for transferring the workpiece conveying means 3 is inserted into the gap S3, it does not interfere with the partially bent portion 2b of the flexible sheet 2, so that the plate-like workpieces A and B are picked up without dropping. Then, the workpiece is transferred to the outside of the upper and lower vacuum chambers 5a and 5b by the delivery hand 3a of the workpiece transfer means 3 as it is.
As a result, the plate-like workpieces A and B are transferred to the workpiece conveying means 3 and carried out from only the partial curvature of the flexible sheet 2.
Thereafter, the above-described operation is repeated.

この実施例２は、図８（ａ）（ｂ）に示す如く、本発明の真空貼り合わせ方法を前記真空ラミネート装置に代えて、前記平滑部材１の定盤と前記可撓性シート２とに、前記ワーク搬送手段３で搬入される二枚の板状ワークＡ，Ｂを夫々着脱自在に保持するワーク保持手段（図示しない）を設け、これらに保持された板状ワークＡ，Ｂを相互に位置合わせし、両者間を所定のギャップまで潰して貼り合わせる液晶ディスプレーなどの真空基板貼り合わせ装置に使用した構成が、前記図１〜図７に示した実施例１とは異なり、それ以外の構成は図１〜図７に示した実施例１と同じものである。  In this Example 2, as shown in FIGS. 8A and 8B, the vacuum laminating method of the present invention is replaced with the vacuum laminator, and the surface plate of the smooth member 1 and the flexible sheet 2 are used. , A work holding means (not shown) for detachably holding the two plate-like works A and B carried by the work conveying means 3 is provided, and the plate-like works A and B held by these are mutually attached. Unlike the first embodiment shown in FIGS. 1 to 7, the configuration used for the vacuum substrate bonding apparatus such as a liquid crystal display that is aligned and crushed and bonded to a predetermined gap between the two is different from the first embodiment shown in FIGS. These are the same as those of the first embodiment shown in FIGS.

図示例では、上下真空チャンバ５ａ，５ｂのどちらか一方又は両方を水平（ＸＹθ）方向へ移動自在に配置し、平滑部材１の下方の平滑面１ａに上方の板状ワークＡを保持し、可撓性シート２上に下方の板状ワークＢを保持した後、その周囲の第一空間Ｓ１が所定の真空度に達してから、上下真空チャンバ５ａ，５ｂを相対的にＸＹθ方向へ調整移動させることにより、両板状ワークＡ，Ｂ同士の位置合わせとして粗合わせと微合わせが順次行われる。  In the illustrated example, either one or both of the upper and lower vacuum chambers 5a and 5b are arranged so as to be movable in the horizontal (XYθ) direction, and the upper plate-like workpiece A is held on the smooth surface 1a below the smooth member 1 to allow After holding the lower plate-like workpiece B on the flexible sheet 2, the upper and lower vacuum chambers 5a and 5b are relatively adjusted and moved in the XYθ direction after the surrounding first space S1 reaches a predetermined degree of vacuum. Thus, rough alignment and fine alignment are sequentially performed as the alignment between the two plate-like workpieces A and B.

その後、平滑部材１の下方の平滑面１ａから上方の板状ワークＡが剥離され、真空中でシール材Ｃを介して下方の板状ワークＢ上に重ね合わせた後、これらが収容される第一空間Ｓ１を大気開放することにより、両板状ワークＡ，Ｂの内外に生じる気圧差で両板状ワークＡ，Ｂの間を所定のギャップまで加圧し、この加圧状態でシール材Ｃを硬化させて接着している。  Thereafter, the upper plate-like workpiece A is peeled off from the lower smooth surface 1a of the smooth member 1, and after being superposed on the lower plate-like workpiece B via the sealing material C in a vacuum, these are accommodated. By opening one space S1 to the atmosphere, the pressure difference between both plate-like workpieces A and B is pressurized to a predetermined gap between the plate-like workpieces A and B, and the sealing material C is applied in this pressurized state. It is cured and bonded.

それにより、図８（ａ）（ｂ）に示す実施例２は、ワーク搬送手段３によって外部から搬入された下方の板状ワークＢを可撓性シート２上へ受け渡す際には、上述した実施例１と同様に、前記制御部６による押圧手段４の作動制御で、可撓性シート２のワーク対向部２ａの複数箇所を部分的に褶曲し、これら部分褶曲部２ｂの頂点部分を下方の板状ワークＢへ向け突出し当接させて支えるとともに、この支持状態を保ちながら該部分褶曲部２ｂを徐々に消滅させることにより、図８（ａ）に示す如く、可撓性シート２の部分褶曲のみでワーク搬送手段３から下方の板状ワークＢを該可撓性シート２上に受け取って搬入工程を完了させることができる。  Accordingly, in the second embodiment shown in FIGS. 8A and 8B, when the lower plate-like work B carried in from the outside by the work conveying means 3 is transferred onto the flexible sheet 2, it is described above. Similar to the first embodiment, by the operation control of the pressing means 4 by the control unit 6, a plurality of portions of the workpiece facing portion 2a of the flexible sheet 2 are partially bent, and the apex portions of these partial bent portions 2b are lowered. A portion of the flexible sheet 2 as shown in FIG. 8 (a) is obtained by projecting toward the plate-like workpiece B and supporting it by abutting and gradually disappearing the bent portion 2b while maintaining this supporting state. The plate-like workpiece B below from the workpiece conveying means 3 can be received on the flexible sheet 2 only by folding and the carrying-in process can be completed.

さらに、貼り合わせが完了した両板状ワークＡ，Ｂをワーク搬送手段３によって外部へ搬出する際には、上述した実施例１と同様に、図８（ｂ）に示す如く、前記制御部６による押圧手段４の作動制御で、可撓性シート２のワーク対向部２ａの複数箇所を部分的に褶曲し、これら部分褶曲部２ｂの頂点部分で板状ワークＡ，Ｂを支えながら突出させることにより、可撓性シート２の部分褶曲のみでその上から板状ワークＡ，Ｂをワーク搬送手段３に受け渡して搬出することができる。  Further, when the two plate-like workpieces A and B that have been pasted together are carried out by the workpiece conveying means 3, as in the first embodiment described above, as shown in FIG. By the operation control of the pressing means 4 by the above, a plurality of portions of the workpiece facing portion 2a of the flexible sheet 2 are partially bent, and the plate-like workpieces A and B are projected while being supported at the apex portions of these partial bent portions 2b. Thus, the plate-like workpieces A and B can be transferred to the workpiece conveying means 3 and carried out from only the partial curvature of the flexible sheet 2.

また、ワーク保持手段としては、静電チャックや吸引チャックや粘着チャック又はそれらの組み合わせなどが用いられる。
可撓性シート２のワーク対向部２ａに吸引チャックを設ける場合には、例えば図９に示す如く、この吸引チャックが配置される箇所に前記裏打板２ｃを固着して、これら可撓性シート２のワーク対向部２ａと裏打板２ｃに亘って通気孔２ｅを貫通開穿し、この通気孔２ｅに真空路２ｆを配管することにより、可撓性シート２に開穿した通気孔２ｅが、該可撓性シート２の弾性変形に伴って広がらないようにするとともに、該通気孔２ｅを通して板状ワークＢ又は貼り合わされた二枚の板状ワークＡ，Ｂが可撓性シート２に対して移動不能に吸着保持されるようにすることが好ましい。As the work holding means, an electrostatic chuck, a suction chuck, an adhesive chuck, or a combination thereof is used.
In the case where a suction chuck is provided at the workpiece facing portion 2a of the flexible sheet 2, for example, as shown in FIG. 9, the backing plate 2c is fixed to a place where the suction chuck is disposed, and these flexible sheets 2 are fixed. A vent hole 2e is opened through the workpiece facing portion 2a and the backing plate 2c, and a vacuum passage 2f is piped through the vent hole 2e. The flexible sheet 2 is prevented from spreading due to elastic deformation, and the plate-like workpiece B or the two plate-like workpieces A and B bonded together move with respect to the flexible sheet 2 through the vent 2e. It is preferable to make it impossible to adsorb and hold.

それにより、可撓性シート２の漏れを防止しつつ該可撓性シート２に対する板状ワークＡ，Ｂの位置ズレを防止できるという利点がある。  Thereby, there is an advantage that the displacement of the plate-like workpieces A and B with respect to the flexible sheet 2 can be prevented while preventing the flexible sheet 2 from leaking.

なお、前示実施例では、本発明のワーク搬送装置を使用した真空貼り合わせ方法として真空ラミネート装置や液晶ディスプレーなどの真空基板貼り合わせ装置の場合を説明したが、これに限定されず、搬入された二枚の板状ワークＡ，Ｂが可撓性シート２を用いて真空状に貼り合わされるものであれば、他の装置であっても良い。
さらに、押圧手段４の具体例として、可撓性シート２と接触する先端部４ａを往復移動させたが、これに限定されず、例えは圧縮空気などの流体を用いて、可撓性シート２の一部を押圧し部分的に褶曲させても良い。In the previous embodiment, the case of a vacuum laminating apparatus such as a vacuum laminating apparatus or a liquid crystal display has been described as a vacuum laminating method using the work conveying apparatus of the present invention. Other apparatuses may be used as long as the two plate-like workpieces A and B are bonded together in a vacuum using the flexible sheet 2.
Furthermore, as a specific example of the pressing means 4, the tip portion 4 a in contact with the flexible sheet 2 is reciprocated. However, the present invention is not limited to this, and for example, the flexible sheet 2 is made using a fluid such as compressed air. It is also possible to partially curl and partially bend.

Ａ，Ｂ 板状ワーク Ｃ シール材
Ｓ１，Ｓ２ 空間 Ｓ３ 隙間
１ 平滑部材（定盤） １ａ 平滑面
２ 可撓性シート ２ａ ワーク対向部
２ｂ 部分褶曲部 ２ｃ 裏打板
２ｄ 枠体 ２ｅ 通気孔
２ｆ 真空路 ３ ワーク搬送手段
３ａ 受け渡し用ハンド ４ 押圧手段
４ａ 先端部 ４ｂ 駆動源
４ｃ 支持部 ５ａ，５ｂ 真空チャンバ
５ｃ 環状シール部 ５ｄ，５ｅ 通気路
５ｆ 圧力調整部 ５ｇ 開閉用駆動源
６ 制御部 ７，８ 発熱体A, B Plate-like work C Sealing material S1, S2 Space S3 Clearance 1 Smooth member (surface plate) 1a Smooth surface 2 Flexible sheet 2a Workpiece facing part 2b Partial bent part 2c Backing plate 2d Frame body 2e Vent hole 2f Vacuum path 3 Work conveying means 3a Hand for delivery 4 Pressing means 4a Tip 4b Drive source 4c Support part 5a, 5b Vacuum chamber 5c Annular seal part 5d, 5e Ventilation path 5f Pressure adjustment part 5g Opening / closing drive source 6 Control part 7, 8 Heat generation body

Claims (5)

ワーク搬送手段で搬入・搬出される板状ワークをワーク保持テーブルに受け渡すワーク搬送装置であって、
前記ワーク保持テーブルに設けられる可撓性シートと、この可撓性シートの一部を前記板状ワークへ向け部分的に押圧し部分的に褶曲させて部分褶曲部を形成する押圧手段と、この押圧手段を作動制御して前記可撓性シートの部分褶曲部が前記ワーク搬送手段で搬送される前記板状ワークに届くようにする制御部とを備え、
前記可撓性シートは、前記板状ワークが搬入・搬出される第一空間と前記押圧手段が設けられる第二空間とを隔離するように配置され、
前記制御部は、ワーク搬入時には、前記ワーク搬送手段で搬入された前記板状ワークに、前記可撓性シートの部分褶曲部を当接させて支持し、ワーク搬出時には、前記板状ワークを前記可撓性シートの部分褶曲部で前記ワーク搬送手段によるワーク搬出開始位置まで押送するように、前記押圧手段を作動制御したことを特徴とするワーク搬送装置。A workpiece transfer device for transferring a plate-shaped workpiece carried in / out by a workpiece transfer means to a workpiece holding table,
A flexible sheet provided on the work holding table; and a pressing unit that partially presses a part of the flexible sheet toward the plate-like work and partially bends to form a partially bent portion; and A control unit that controls the operation of the pressing unit so that the partially bent portion of the flexible sheet reaches the plate-like workpiece conveyed by the workpiece conveying unit;
The flexible sheet is disposed so as to isolate a first space in which the plate-like work is carried in and out and a second space in which the pressing means is provided,
The control unit supports the plate-shaped work carried in by the work conveying means by bringing the bent portion of the flexible sheet into contact with and supports the plate-like work when the work is carried in, and the work is carried out when the work is carried out. The work conveying apparatus characterized in that the pressing means is controlled to be pushed to a work unloading start position by the work conveying means at a partially bent portion of the flexible sheet. 前記押圧手段の先端部を前記可撓性シートへ向けて突出するように湾曲形成した請求項１記載のワーク搬送装置。  The workpiece conveying apparatus according to claim 1, wherein a tip end portion of the pressing means is curved so as to protrude toward the flexible sheet. 前記可撓性シートの前記押圧手段と対向する部分に裏打板を部分的に固着した請求項１記載のワーク搬送装置。  The workpiece conveying apparatus according to claim 1, wherein a backing plate is partially fixed to a portion of the flexible sheet facing the pressing means. 前記可撓性シートと前記裏打板に亘って通気孔を貫通開穿し、該通気孔を通して前記板状ワークが前記可撓性シートに対し移動不能に吸着保持される吸引チャックを設けた請求項３記載のワーク搬送装置。 A suction chuck is provided that penetrates and opens a vent hole between the flexible sheet and the backing plate, and through which the plate-like work is adsorbed and held on the flexible sheet so as not to move. 3. The workpiece transfer apparatus according to 3. 請求項１〜４の何れか一つに記載のワーク搬送装置を真空チャンバ内に配置し、この真空チャンバの内部に前記ワーク搬送手段で二枚の前記板状ワークを搬送し、前記可撓性シートを挟んで形成される二つの空間の気圧差により、前記両板状ワークを真空状態にて貼り合わせた後に、これら貼り合わされた両板状ワークを前記ワーク搬送手段で前記真空チャンバの外部へ搬送することを特徴とする真空貼り合わせ方法。The workpiece transfer device according to any one of claims 1 to 4 is disposed in a vacuum chamber, and the two plate-like workpieces are transferred into the vacuum chamber by the workpiece transfer means, and the flexibility After the two plate-like workpieces are bonded together in a vacuum state due to the pressure difference between the two spaces formed between the sheets, the bonded plate-like workpieces are moved outside the vacuum chamber by the workpiece transfer means. A vacuum bonding method characterized by transporting.
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