JP2019188629A - Laminate production apparatus and method of producing laminate using the same - Google Patents

Abstract

To provide a method that enables applying pressing force that extends facially to an overlapped part among laminate constituent members and preventing an air bubble from entering the overlapped part, when obtaining a curved laminate by integrally overlapping the laminate constituent members with each other, each of the laminate constituent members being a transparent thin plate such as a glass thin plate or a sheet to be overlapped onto the transparent thin plate.SOLUTION: A method of producing a laminate of this invention includes: using a curved-surface transparent thin plate 1 or a sheet body 2 to be overlapped onto the curved-surface transparent thin plate as each of laminate constituent members; sandwiching the plural laminate constituent members in a curved state in an area of a wide-surface sandwiching surface under a decompressed environment between a convex body 22 and a laminate receiver 27 that are positioned vertically in a laminate production apparatus A; applying pressing force that extends facially to an overlapped part of the laminate constituent members; and evenly laminating the overlapped part so as to prevent an air bubble from entering the overlapped part.SELECTED DRAWING: Figure 5

Description

  Conventionally, a bonding apparatus is shown in Patent Document 1 as an apparatus for bonding a glass substrate such as a liquid crystal substrate or a plasma display substrate and a flat functional sheet such as a polarizing sheet or an antireflection film. The laminating apparatus in this document includes an upper suction plate provided with an upper suction table that holds the glass substrate in a curved shape, and a lower suction device provided with a plurality of lower suction tables that hold the functional sheet in a curved shape. And a board.

  In this bonding apparatus, the upper suction plate and the lower suction plate are arranged facing each other up and down, so that the curved functional sheet and the curved functional sheet are opposed to each other at a constant interval. I try to arrange it.

  Furthermore, this laminating apparatus has a laminating roller that pushes up a functional sheet held on a plurality of lower adsorption platforms of the lower adsorption board from below and presses it on one side of the glass substrate to which an adhesive has been applied in advance. The lower suction table descends sequentially prior to the movement of the bonding roller, and the bonding roller moves up and down along the curved shape of the glass substrate while one side of the facing portion between the glass substrate and the functional sheet. A point that moves from one side to the other side in one direction is shown.

Japanese Patent No. 6022425

  In the bonding apparatus, as described above, the curved functional sheet and the curved functional sheet are disposed opposite to each other, and the bonding roller presses the functional sheet to the adhesive coating surface side of the glass substrate. Further, the glass substrate and the functional sheet are bonded together by moving in one direction while moving up and down along the curved shape of the glass substrate.

  However, when the functional sheet is pressed against the glass substrate, the form in which the pressing force is applied from the laminating roller is a substantially linear narrow range, and the laminating roller moves while moving up and down. , The overlapping part of the glass substrate and the functional sheet is difficult to be evenly bonded, and in order to evenly bond the overlapping part of the glass substrate and the functional sheet, the control of the raising and lowering and movement of the bonding roller is very It has a problem of becoming complicated.

  Therefore, in view of the above circumstances, the present invention is configured such that a transparent thin plate such as a glass thin plate or a functional sheet or the like stacked on the transparent thin plate is used as a laminated member, and these laminated members are overlapped to be integrated. When obtaining a laminated body, the laminated body constituting member is placed in a state where the laminated body constituting member is positioned in a curved state on the sandwiched surface of the wide surface positioned up and down, and the laminated body constituting member is sandwiched between the wide sandwiched surface portions. The object is to apply a pressing force as a surface to the overlapping part of the body constituent members and prevent bubbles from being mixed, and to obtain a laminate in which the overlapping part is uniformly bonded It is.

(Invention of Claim 1)
The present invention has been made in consideration of the above problems, and is a laminate of a curved transparent thin plate having a curved shape with a cross-sectional convex downward, and a deformable sheet that is superposed on one side of the curved transparent thin plate. As a component,
An upper stage that can be moved up and down and a lower stage that can be moved up and down below the upper stage sandwiched and formed a plurality of laminated components including the curved transparent thin plate and the sheet member do it,
A laminated body manufacturing apparatus for closely adhering overlapping laminated body constituent members by pressing against the superposed state object of the upper stage and the lower stage,

  It has a loading / unloading opening, and the upper stage and the lower stage are vertically opposed so as to be separated from each other in the chamber. A vacuum chamber for reducing the pressure in the chamber when performing

  An air impervious film, which is located on the lower surface of the upper stage, is attached to the lower surface side of the upper stage with a convex base material that is located on the lower surface of the upper stage and has a convex curved surface convex downward corresponding to the curved shape of the curved transparent thin plate A convex body that is covered with a material and has a convex curved surface that is convex downward corresponding to the curved surface shape of the curved transparent thin plate;

  The laminate which is made of a slightly adhesive rubber disposed in the peripheral portion of the convex body, and which is overlapped along the convex curved surface portion of the convex body by sticking to a laminate constituting member which is superimposed on the convex body from below. Holding means for holding the body component member in a state corresponding to the curved surface shape of the curved transparent thin plate and detachably holding the body component member;

  It moves to the inside and outside of the chamber through the loading / unloading opening of the vacuum chamber, and holds the laminate constituting member made of the sheet body on the upper surface side which is the upper stage side by electrostatic adsorption between the upper stage and the lower stage. A deformable sheet-like electrostatic chuck that is loaded and positioned on the lower surface of the convex body by sandwiching the laminate constituting member made of the sheet body with the convex body by lowering the upper stage;

  Moves into and out of the chamber through the loading / unloading opening of the vacuum chamber, and is positioned below the electrostatic chuck for loading the laminate constituting member composed of the sheet body between the upper stage and the lower stage. Rolling toward the portion corresponding to the holding means in the electrostatic chuck according to the convex curved surface shape of the convex body while pressing the electrostatic chuck that sandwiches the laminate constituting member made of the sheet body from below with the convex body A pair of pressure rollers that contact the holding means with the laminate constituting member made of the sheet body that has been moved along the convex body; and

  Between the upper stage and the electrostatic chuck that is superimposed on the upper stage from below, a laminate constituting member that is held by the holding means and is formed of a sheet is positioned along the convex body. Air is sucked from the space between the upper stage and the electrostatic chuck, and the laminate constituting member made of the sheet is stuck to the holding means by the electrostatic chuck pressed against the upper stage side by the suction. Vacuum suction means for holding

A laminate constituting member that is located on the upper surface of the lower stage, is formed in a concave curved surface that is convex downward corresponding to the curved surface shape of the curved transparent thin plate, and is disposed between the upper stage and the lower stage The present invention provides a laminate manufacturing apparatus comprising a laminate receiver that sandwiches the sheet body and the curved transparent thin plate between the convex bodies and solves the above problems.

(Invention of Claim 2)
In the invention described above, the pressing of the upper stage and the lower stage against the superposed state in the reduced pressure environment is such that the convex body located on the lower surface of the upper stage receives the atmospheric pressure introduced from the outside of the chamber and receives the superposition. It is good that it is supposed to be formed by pressing the mating state object.

(Invention of Claim 3)
According to another aspect of the present invention, there is provided a laminate manufacturing apparatus according to claim 1 or 2, wherein a deformable transparent sensor sheet is formed on the concave curved surface side of a curved transparent thin plate having a curved shape with a sectional shape convex downward. A sheet-like electronic component of an information display panel such as a flexible display sheet, which has a sheet body covered on both sides with a protective film and a transparent optical adhesive film that can be deformed. A laminated body in which a sheet body of a sheet-like electronic component is laminated on the concave curved surface side of the curved transparent thin plate by alternately overlapping the sheet body while removing the protective film on the overlapping side. A method of manufacturing

A curved transparent thin plate is allowed to enter between the upper stage and the lower stage in the laminate manufacturing apparatus, and the curved transparent thin plate is placed on the laminate receiver of the lower stage as a laminate receiving mounting member having a curved surface shape. After the curved transparent thin plate mounting step, the attachment step of the sheet body for bonding and the attachment step of the sheet body of the sheet-like electronic component are alternately performed,

The attachment process of the sheet body for bonding is as follows:
Between the upper stage and the lower stage of the multilayer body manufacturing apparatus, an electrostatic chuck that electrostatically adsorbs a non-bonded sheet for bonding enters, and the bonding is performed below the upper stage convex body. Step A-01 for positioning the sheet body for alignment and positioning a pair of pressure rollers on the lower surface side of the electrostatic chuck;

  The upper body descends and the convex body descending together with the upper stage pushes down the bonding sheet body and the electrostatic chuck, and each of the pressure rollers is bonded to the lowering convex body. While pressing the electrostatic chuck that sandwiches the sheet body from below, the electrostatic chuck rolls in a direction opposite to the convex lower end corresponding portion of the electrostatic chuck toward the holding means corresponding portion of the electrostatic chuck, and the sticking is performed. A step A-02 for bringing the sheet member for alignment into contact with the convex holding means along the convex curved surface portion of the convex body;

  Under the state where the space between the lowered upper stage and the electrostatic chuck overlapping the upper stage is a closed space, the vacuum suction means in the laminate manufacturing apparatus causes a gap between the upper stage and the electrostatic chuck. Air is sucked from the space, and the sheet body for bonding is adhered to the holding means by an electrostatic chuck pressed against the upper stage side by this suction, and the sheet body for bonding is bonded by the holding means. Step A-03 for maintaining the curved shape corresponding to the curved shape of the curved transparent thin plate;

  After the upper stage where the sheet body for bonding is detachably attached to the convex body side rises, and the electrostatic chuck and the pressure roller separated from the upper stage are retracted from between the upper stage and the lower stage Step A-04 for removing the protective film on the lower surface side of the bonding sheet located on the convex body side;

  After the upper stage and the lower stage are brought close to each other and the inside of the vacuum chamber is depressurized, the shape is maintained between the upper stage and the lower stage between the upper stage and the lower stage and the convex body side in a reduced pressure environment. Sandwiching and holding the stacked state object composed of the bonding sheet body, and pressing the bonding sheet body toward the laminate receiving and placing member with the convex body to overlap the bonding Step A-05 for bonding the sheet body for use and the laminate receiving mounting member;

  Step A-06 for releasing the vacuum chamber from the atmosphere after releasing the pressure on the sheet body for bonding by the convex body and returning the inside of the vacuum chamber to an atmospheric pressure environment;

The upper and lower stages are separated from each other in the vertical direction, and when the upper stage is raised, the sheet for bonding is separated from the convex body to the laminate receiving side, and the uppermost layer is attached to the laminate receiver. Forming a laminated body receiving and mounting member having the lowermost layer as a curved transparent thin plate, and laminating the laminated sheet from the laminating sheet body located at the uppermost layer of the laminated body receiving and mounting member The protective film opposite to the curved transparent thin plate side of the sheet body is removed, and the uppermost layer is used as a bonding sheet body, and the lowermost layer is a curved transparent thin plate, corresponding to the curved shape of the curved transparent thin plate. Forming a laminate, step A-07;
And consists of

The attachment process of the sheet body of the sheet-like electronic component is:
Between the upper stage and the lower stage, an electrostatic chuck that electrostatically attracts the sheet body of the sheet-like electronic component that is in an unbonded state enters, and the sheet-like electronic component is placed below the convex body of the upper stage. Step B-01 for positioning the sheet body and positioning the pair of pressure rollers on the lower surface side of the electrostatic chuck;

  When the upper stage descends and the convex body descending together with the upper stage pushes down the sheet body and the electrostatic chuck of the sheet-like electronic component, each of the pressure rollers forms a sheet-like electron with the descending convex body. While pressing the electrostatic chuck that sandwiches the sheet of the component from below, the electrostatic chuck rolls in the opposite direction from the portion corresponding to the lower end of the convex body toward the holding means corresponding portion of the electrostatic chuck. The step B-02 of bringing the sheet body of the sheet-like electronic component into contact with the convex holding means along the convex curved surface portion of the convex body;

  In a state where the space between the lowered upper stage and the electrostatic chuck that overlaps the upper stage is a closed space, the vacuum suction means in the laminate manufacturing apparatus causes a gap between the upper stage and the electrostatic chuck. The sheet body of the sheet-like electronic component is attached to the holding means by an electrostatic chuck that sucks air from the space and is pressed against the upper stage by this suction, and the sheet of the sheet-like electronic component is held by the holding means. Step B-03 for maintaining the shape of the body in a curved surface shape corresponding to the curved surface shape of the curved transparent thin plate;

  The upper stage in which the sheet body of the sheet-like electronic component is detachably attached to the convex body side is raised, and the electrostatic chuck and the pressure roller separated from the upper stage are retracted from between the upper stage and the lower stage. Later, step B-04 to remove the protective film on the lower surface side of the sheet body of the sheet-like electronic component located on the convex body side;

  After the upper stage and the lower stage are brought close to each other and the inside of the vacuum chamber is depressurized, it is formed through the attachment process of the bonding sheet body between the upper stage and the lower stage in a reduced pressure environment. The laminated body receiving and placing member that is a laminated body and the sheet body of the sheet-like electronic component are sandwiched and held, and the sheet body of the sheet-like electronic member is pressed to the laminated body receiving and placing member side by the convex body Then, the step B-05 of bonding the sheet body of the sheet-like electronic component and the laminated body receiving mounting member that overlap each other,

  Releasing the pressure on the sheet body of the sheet-like electronic component by the convex body, returning the inside of the vacuum chamber to an atmospheric pressure environment, and then releasing the vacuum chamber to the atmosphere;

The upper stage and the lower stage are separated from each other in the vertical direction, and by raising the upper stage, the sheet body of the sheet-like electronic component is separated from the convex body to the laminated body receiving side, and the uppermost layer is formed into a sheet form on the laminated body receiver. From the sheet body of the sheet-like electronic component located on the uppermost layer in the laminate receiving and mounting member, forming a laminated body receiving and mounting member having the lowermost layer as a curved transparent thin plate as a sheet body of the electronic component, The protective film opposite to the curved transparent thin plate side of the sheet body of the sheet-like electronic component is removed so that the uppermost layer is the sheet body of the sheet-like electronic component and the lowermost layer is the curved transparent thin plate, and the curved shape of the curved transparent thin plate The method of manufacturing a laminated body is characterized by comprising the step B-07 of forming a laminated body corresponding to the above, and providing the method of manufacturing the laminated body to solve the above-mentioned problem is there.

(Invention of Claim 4)
In the invention described above, the sheet body of the sheet-like electronic component is provided with a printed circuit board on which electronic elements are mounted on a side portion of the sheet body via a flexible printed wiring board having flexibility. And
Electrostatic chucking of the electrostatic chuck in step B-01 is performed on the sheet body, flexible printed wiring board, and printed board of the sheet-like electronic component,
In the step B-03, the flexible printed wiring board and the printed board can be attached to the holding means by an electrostatic chuck pressed against the upper stage side by the suction.

(Invention of Claim 5)
Furthermore, another invention is a laminate manufacturing apparatus according to claim 1 or 2, wherein a deformable transparent sensor sheet is formed on the convex curved surface side of a curved transparent thin plate having a curved shape with a cross-sectional shape convex downward. A sheet-like electronic component of an information display panel such as a flexible display sheet, which has a sheet body covered on both sides with a protective film and a transparent optical adhesive film that can be deformed. A laminated body in which a sheet body and a sheet body of a sheet-like electronic component are laminated on the convex curved surface side of the curved transparent thin plate by alternately overlapping the sheet body while removing the protective film on the overlapping side. A method of manufacturing

A curved transparent thin plate is inserted between the upper stage and the lower stage in the laminate manufacturing apparatus, the curved transparent thin plate is placed on the laminate receiver of the lower stage, and the curved transparent is placed between the upper stage and the lower stage. The thin plate is sandwiched and held, attached to the convex holding means along the convex curved surface part of the convex body, the upper stage and the lower stage are separated, and the curved transparent thin plate whose shape is maintained is placed on the convex side After the curved transparent thin plate mounting step that is held by the holding means as the convex underlaying member that is positioned, the step of mounting the sheet body for bonding and the step of mounting the sheet body of the sheet-like electronic component are alternately performed. To do,

The attachment process of the sheet body for bonding is as follows:
Between the upper stage and the lower stage of the laminate manufacturing apparatus, an electrostatic chuck that electrostatically adsorbs the sheet body for bonding in an unbonded state by removing the protective film on the overlapping side enters, Step C-01 for positioning the sheet member for bonding below the convex body of the upper stage and positioning a pair of pressure rollers on the lower surface side of the electrostatic chuck;

  Close the carry-in / out opening and depressurize the inside of the vacuum chamber, and in this depressurized environment, the upper stage descends and the convex body descends while holding the convex lower stacking member together with the upper stage, An electrostatic chuck that presses down the sheet body for bonding and the electrostatic chuck, and each of the pressure rollers sandwiches the convex lower stacking member and the sheet body for bonding with the descending convex body. While pressing from the bottom, the electrostatic chuck rolls in a direction opposite to the convex lower end corresponding part to the convex side end corresponding part of the electrostatic chuck toward the convex side end corresponding part, and the bonding sheet is moved below the convex Step C- for maintaining the shape of the laminating sheet body in a curved surface shape corresponding to the curved surface shape of the curved transparent thin plate by closely contacting the convex lower layer overlapping member along the convex curved surface portion of the overlapping member And 2,

  Returning the inside of the vacuum chamber to atmospheric pressure, opening the loading / unloading opening to release the atmosphere, separating the upper stage and the lower stage from each other, and retracting the electrostatic chuck and the pressure roller Step C- 03,

  After bringing the upper stage and the lower stage close to each other and closing the loading / unloading opening to decompress the inside of the vacuum chamber, the shape is maintained on the convex body side between the upper stage and the lower stage in a decompressed environment. And sandwiching and holding the superposed state object composed of the projecting lower layer stacking member and the sheet body for laminating in close contact with the projecting lower layer stacking member, Step C-04 in which the superposed state member composed of a member and a sheet body for bonding is pressed to the laminated body receiving side of the lower stage to bond the overlapping convex lower member and the sheet body for bonding together. When,

  Step C-05 for releasing the pressure applied to the superposed object by the convex body and returning the inside of the vacuum chamber to an atmospheric pressure environment and then releasing the vacuum chamber to the atmosphere;

The upper stage and the lower stage are separated from each other in the vertical direction, and the laminate receiver is separated from the superposed product on the convex body side by raising the upper stage, and the uppermost layer is a curved transparent thin plate on the convex body. A convex lower layer member having a lower layer as a sheet body for bonding is formed, and the curved surface of the bonding sheet body is formed from the bonding sheet member positioned in the lowermost layer of the convex lower layer member. The step of removing the protective film opposite to the transparent thin plate side to form a laminate corresponding to the curved shape of the curved transparent thin plate with the uppermost layer being a curved transparent thin plate and the lowermost layer being a sheet body for bonding C-06,

The attachment step of the sheet body of the sheet-like electronic component is performed with respect to the convex lower layered member formed of a laminate in which the lowermost layer is formed in the attachment step of the attachment sheet body and the lowermost layer is the attachment sheet body. Is performed,
Between the upper stage and the lower stage, the protective film on the overlapping side is removed, and an electrostatic chuck that electrostatically adsorbs the sheet body of the sheet-like electronic component that is in an unbonded state enters and is used for the bonding The sheet body of the sheet-like electronic component is positioned below the laminated body that is held by the convex body of the upper stage through the sheet body attaching step, and the pair of pressure rollers on the lower surface side of the electrostatic chuck Step D-01 for positioning

  Close the carry-in / out opening and depressurize the inside of the vacuum chamber, and in this depressurized environment, the upper stage descends and the convex body descends while holding the convex lower stacking member together with the upper stage, An electrostatic chuck that presses down the sheet body for bonding and the electrostatic chuck, and each of the pressure rollers sandwiches the convex lower stacking member and the sheet body of the sheet-like electronic component with the descending convex body. While pressing from below, the sheet of the sheet-like electronic component rolls and moves in a direction opposite to the convex lower end corresponding part of the electrostatic chuck toward the convex corresponding end of the electrostatic chuck. The sheet body of the sheet-like electronic component is kept in the curved surface shape corresponding to the curved surface shape of the curved transparent thin plate by closely contacting the convex body layered member along the portion of the curved surface shape of the below body member. And step D-02,

  Returning the inside of the vacuum chamber to atmospheric pressure, opening the loading / unloading opening to release the atmosphere, separating the upper stage and the lower stage from each other, and retracting the electrostatic chuck and the pressure roller Step D- 03,

  After bringing the upper stage and the lower stage close to each other and closing the loading / unloading opening to decompress the inside of the vacuum chamber, the shape is maintained on the convex body side between the upper stage and the lower stage in a decompressed environment. An overlapping state object composed of the convex lower stacking member and the sheet electronic component sheet member in close contact with the convex lower stacking member is sandwiched and held, and the convex body A step of pressing the overlapped member formed of a stack member and a sheet body of a sheet-like electronic component against the laminate receiving side of the lower stage, and bonding the overlapped convex lower stack member and the sheet body of the sheet-like electronic component together D-04,

  Step D-05 for releasing the pressure on the superposed state by the convex body and returning the inside of the vacuum chamber to an atmospheric pressure environment and then releasing the vacuum chamber to the atmosphere;

The upper stage and the lower stage are separated from each other in the vertical direction, and the laminate receiver is separated from the superposed product on the convex body side by raising the upper stage, and the uppermost layer is a curved transparent thin plate on the convex body. A convex lower stack member having a lower layer as a sheet body of a sheet-like electronic component is formed, and the sheet-like electronic component sheet is formed from the sheet body of the sheet-like electronic component located in the lowermost layer of the convex lower stack member. Remove the protective film opposite the curved transparent thin plate side of the body, the uppermost layer is a curved transparent thin plate, and the lowermost layer is a sheet body of a sheet-like electronic component, corresponding to the curved shape of the curved transparent thin plate Step D-06 is a method for manufacturing a laminate, and the method for manufacturing the laminate is provided to solve the above-mentioned problems.

(Invention of Claim 6)
In the invention described above, the sheet body of the sheet-like electronic component is provided with a printed circuit board on which electronic elements are mounted on a side portion of the sheet body via a flexible printed wiring board having flexibility. And
The electrostatic chucking of the electrostatic chuck in step D-01 is performed on the sheet body, the flexible printed wiring board, and the printed board of the sheet-like electronic component,
In step D-02, the flexible printed wiring board and the printed board can be attached to the holding means by an electrostatic chuck pressed against the upper stage by the pressure roller.

  According to the present invention, a sheet body for laminating or a sheet body of a sheet-like electronic article is pushed up from below the electrostatic chuck with a pressure roller while being electrostatically attracted to the electrostatic chuck, and the pressure roller is By rolling and moving, the shape corresponding to the curved surface shape of the curved transparent thin plate is maintained, and the sheet body is superposed on the curved transparent thin plate while maintaining the shape corresponding to the curved surface state of the curved transparent thin plate. Yes.

  Then, the curved transparent thin plate and the multi-layer sheet are sandwiched between the upper stage convex body and the lower stage laminate receiver, and the pressing force is applied by the convex body corresponding to the curved surface shape of the curved transparent thin plate. Therefore, it is assumed that the laminated members that overlap each other including the curved transparent thin plate are bonded to each other with a wide surface pressure of the convex body.

  Furthermore, since the overlapping laminate members are pressed and bonded together under a reduced pressure environment, the overlapping laminate components can be bonded evenly and uniformly so that bubbles do not enter. There is an excellent effect of being able to.

  Further, according to the laminate manufacturing apparatus of the present invention, on the convex side of the upper stage, the laminate constituting member composed of the curved transparent thin plate or the deformable sheet superposed on the curved transparent thin plate is held in a shape-maintained state. Therefore, with a single laminated body manufacturing device, a laminated body in which a transparent sensor sheet or flexible display sheet is arranged on the concave curved surface side of the curved transparent thin plate, and a transparent sensor sheet or flexible on the concave curved surface side of the curved transparent thin plate. Any of the laminates provided with a display sheet or the like can be manufactured.

  For this reason, a dedicated manufacturing device for manufacturing a laminate in which a transparent sensor sheet and a flexible display sheet are arranged on the concave curved surface side of the curved transparent thin plate, and a transparent sensor sheet and a flexible display sheet are arranged on the convex curved surface side of the curved transparent thin plate. Therefore, there is no need to prepare a dedicated manufacturing apparatus for manufacturing the laminated body to be manufactured, and an excellent effect that the equipment cost and the like can be greatly reduced is achieved.

The curved transparent thin board is shown, (a) is explanatory drawing which shows a curved transparent thin board in a perspective view, (b) is explanatory drawing which shows a cross-sectional shape. It shows a laminate constituting member, (a) is an explanatory view schematically showing a sheet body for bonding in cross section, (b) is an explanatory view schematically showing a sensor sheet body in cross section, (c) is It is explanatory drawing which shows a display sheet body roughly in a cross section. It is explanatory drawing which shows the vacuum bonding part and sheet | seat body preparation part in a laminated body manufacturing apparatus. It is explanatory drawing which shows schematically the structure of an electrostatic chuck in a cross section. It is explanatory drawing which shows a vacuum chamber and the upper stage and lower stage which were distribute | arranged in the chamber. The air-impermeable film material is shown, (a) is an explanatory view schematically showing attachment of the air-impermeable film material, and (b) is an explanatory view showing the arrangement of the holding means in the air-impermeable film material. . It is explanatory drawing which shows the state which sends a curved transparent thin plate to a vacuum chamber in the case of arrangement | positioning of the laminated body structural member to the concave curved surface side of a curved transparent thin plate in a laminated body manufacturing method. It is explanatory drawing which shows the state which entered the curved transparent thin board between the upper stage and the lower stage. It is explanatory drawing which shows the state which mounted the curved transparent thin board in the laminated body receiver. It is explanatory drawing which shows the state before sending an imaging camera into a vacuum chamber. It is explanatory drawing which shows the state which made the imaging camera approach between the upper stage and the lower stage. It is explanatory drawing which shows the state which arrange | positions the sheet body for bonding to an electrostatic chuck. It is explanatory drawing which shows the state which electrostatically adsorbed the sheet | seat body for bonding of an electrostatic chuck. It is explanatory drawing which shows approach of an electrostatic chuck and a pressure roller. It is explanatory drawing which shows the position alignment of the sheet | seat body for bonding. It is explanatory drawing which shows the state which retracted the imaging camera. It is explanatory drawing which shows the state which the lowest end of the convex body contact | connected the sheet body for bonding. It is explanatory drawing which shows the state which a pair of pressure roller rolls and moves, accompanied by the upward press. It is explanatory drawing which shows the state which a pair of pressure roller reached to the holding means corresponding | compatible part of an electrostatic chuck. It is explanatory drawing which shows the state which a pair of pressure roller moved to the outer side from the corresponding part of the edge part of the sheet | seat body for bonding. It is explanatory drawing which shows the state which vacuum-adsorbed and stuck the sheet body for bonding on the holding means. It is explanatory drawing which shows the state which isolate | separated the sheet body for bonding from the electrostatic chuck by the raise of an upper stage. It is explanatory drawing which shows the state which retracted the pressure roller and the electrostatic chuck. It is explanatory drawing which shows the state which removes the protective film of a lower surface from the sheet | seat body for bonding. It is explanatory drawing which shows the state which raised the lower stage which mounted the curved transparent thin board. It is explanatory drawing which shows the state which closed the vacuum chamber. It is explanatory drawing which shows the state which the sheet | seat body for bonding and a curved transparent thin board adjoin. It is explanatory drawing which shows the state which overlap | superposed and bonded together the sheet | seat body for bonding, and a curved transparent thin board. It is explanatory drawing which shows the press to the sheet | seat body for bonding by a convex body. It is explanatory drawing which shows the state which open | released the vacuum chamber to air | atmosphere. It is explanatory drawing which shows the state which released | separated the sheet body for bonding from a convex body. It is explanatory drawing which shows the state which returned the upper stage and the lower stage to the standby position after isolation | separation of the sheet | seat body for bonding. It is explanatory drawing which shows the state which removes a protective film from the laminated body by which the sheet | seat body for bonding and the curved transparent thin board were bonded together. It is explanatory drawing which shows the state in which the laminated body by which the sheet body for bonding and the curved transparent thin board were bonded together is formed with the laminated body receiver. It is explanatory drawing which shows approach of the electrostatic chuck and pressure roller which electrostatically attracted the sensor sheet | seat body. It is explanatory drawing which shows the state which the lowest end of the convex body contact | connected the sensor sheet | seat body. It is explanatory drawing which shows the state which a pair of pressure roller reached | attained the holding means corresponding | compatible part of the electrostatic chuck which electrostatically adsorbs a sensor sheet | seat body. It is explanatory drawing which shows the state which a pair of pressure roller moved to the outer side from the corresponding part of the side part of a sensor sheet | seat body. It is explanatory drawing which shows the state which vacuum-adsorbed and stuck the sensor sheet body to the holding means. It is explanatory drawing which shows the state which retracted the pressure roller and the electrostatic chuck in the attachment process of a sensor sheet | seat body. It is explanatory drawing which shows the state which raised the lower stage which mounted the laminated body receiving mounting member. It is explanatory drawing which shows the state which accumulated and bonded the sensor sheet | seat body and the laminated body receiving mounting member. It is explanatory drawing which shows the press to the sensor sheet body by a convex body. It is explanatory drawing which shows the state which open | released the vacuum chamber to air | atmosphere at the attachment process of a sensor sheet | seat body. It is explanatory drawing which shows the state which returned the upper stage and the lower stage to the stand-by position after separation of a sensor sheet body. It is explanatory drawing which shows the state in which the laminated body by which the sensor sheet body and the curved transparent thin board were bonded together is formed with the laminated body receptacle. It is explanatory drawing which shows the state in which the laminated body which passed through the attachment process of the sheet body for the 2nd bonding is formed with the laminated body receiver. It is explanatory drawing which shows the state by which the laminated body which passed through the attachment process of the sheet | seat body of the sheet-like electronic component of the 2nd time is formed with the laminated body receiver. It is explanatory drawing which shows the state which pinched | interposed the curved transparent thin board with the upper stage and the lower stage in the case of arrangement | positioning of the laminated body structural member to the convex-curved surface side of a curved transparent thin board in a laminated body manufacturing method. It is explanatory drawing which shows the state which raised the upper stage holding a curved transparent thin board. It is explanatory drawing which shows the state which made the electrostatic chuck and pressure roller which arranged the sheet | seat body for bonding approached in the vacuum chamber. It is explanatory drawing which shows the state which made the lowermost end of the curved transparent thin plate which is a convex body lower member contact the sheet body for bonding. It is explanatory drawing which shows the state which bonded the sheet | seat for bonding to the curved-surface transparent thin plate which is a convex-body overlapping member. It is explanatory drawing which shows the state which open | released the vacuum chamber to air | atmosphere. It is explanatory drawing which shows the state which raises an upper stage. It is explanatory drawing which shows the state which retracted the electrostatic chuck and the pressure roller. It is explanatory drawing which shows the state which closed the vacuum chamber and decompressed. It is explanatory drawing which shows the state by which the curved transparent thin plate and the sheet body for bonding are pinched and hold | maintained. It is explanatory drawing which shows the state which bonded together the curved transparent thin board and the sheet body for bonding by the press of a convex body. It is explanatory drawing which shows the state which the superimposition state thing of the lower surface side of a convex body isolate | separates from a laminated body receiver. It is explanatory drawing which shows the state which removes a protective film from the piled-up state thing of the lower surface side of a convex body, and forms a convex body lower pile member. It is explanatory drawing which shows the state which made the electrostatic chuck and pressure roller which arranged the sensor sheet | seat body approached in the vacuum chamber. It is explanatory drawing which shows the state which made the lowermost end of a convex body lower pile member contact the sensor sheet | seat body. It is explanatory drawing which shows the state which bonded the sensor sheet body to the sheet body for bonding of the lowermost layer of a convex body lower member. It is explanatory drawing which shows the state which bonded together the convex body lower member and the sensor sheet body by the press of a convex body. It is explanatory drawing which shows the state which removes a protective film from the piled-up state thing of the lower surface side of a convex body, and forms a convex body lower pile member. It is explanatory drawing which shows the state which removes a protective film from the piled-up state thing which passed through the attachment process of the sheet body for the 2nd bonding, and forms a laminated body. It is explanatory drawing which shows the state which removes a protective film from the piled-up state thing which passed through the attachment process of the sheet body of the 2nd sheet-like electronic component, and forms a laminated body. It is explanatory drawing which shows the state which the electrostatic chuck electrostatically adsorbed the sheet | seat body of the sheet-like electronic component which has a flexible printed wiring board and a printed circuit board. This shows a state where the sheet body of the sheet-like electronic component is held on the convex body side. (A) is a method in which the flexible printed wiring board and the printed circuit board are attached to the holding means in a method of superimposing on the concave curved surface side of the curved transparent thin plate. The explanatory view which shows the state currently hold | maintained in the state seen from the lower part, (b) is a method of superimposing on the convex curved surface side of a curved transparent thin board, and a flexible printed wiring board and a printed circuit board are stuck to a holding means. It is explanatory drawing shown in the state which looked at the form hold | maintained from the downward direction.

  Next, the present invention will be described in detail based on the illustrated embodiment. The laminate manufacturing apparatus of the present invention manufactures, for example, a curved display panel portion of a device having an information display function as a laminate.

(Laminate component-curved transparent thin plate, FIG. 1)
FIG. 1A and FIG. 1B show a curved transparent thin plate 1 which is one of the laminated body components in a laminated body as a curved display panel portion, and will be described in the following embodiments. The transparent thin plate 1 is made of a thin glass plate having a curved surface shape whose cross-sectional shape is convex downward.

(Laminated body component-sheet body)
In addition to the curved transparent thin plate 1, there are a deformable sheet body 2 that is laminated in a plurality of layers on one side of the curved transparent thin plate 1 as a laminate constituting member of the laminated body that is a curved display panel portion. At the time when the laminated body is formed, the cross-sectional shape of each sheet body 2 is also a curved surface shape corresponding to the curved surface shape of the curved transparent thin plate 1. It is a form of a simple sheet.

(Sheet for bonding, FIG. 2 (a))
As one of the sheet bodies 2, there is a sheet body 3 for bonding. This bonding sheet 3 itself is also a laminated component that is bonded to the curved transparent thin plate 1 that is a laminated component, and is positioned between the curved transparent thin plate 1 and a sheet 2 described later. The members are prepared as members that are bonded to each other and are positioned between the overlapping sheet bodies 2 and play a role of bonding them together. That is, in the laminated body which consists of a several laminated body structural member of the curved transparent thin plate 1 and the sheet | seat body 2, the laminated body structural member which overlaps is bonded together.

  The sheet body 3 for bonding is shown in cross section in FIG. As illustrated, the sheet body 3 for bonding is obtained by covering both surfaces of the transparent optical adhesive film 3a with protective films 3b.

  Further, as the other sheet body 2, a sensor sheet body 4 in which both surfaces of a transparent sensor sheet are covered with a protective film, and a flexible display sheet having an information display function such as a flexible organic EL sheet and a flexible liquid crystal sheet are covered with a protective film. There is a display sheet body 5.

(Sensor sheet body, FIG. 2 (b))
FIG. 2B shows the sensor sheet body 4 in cross section. As illustrated, the sensor sheet body 4 is obtained by covering both surfaces of a transparent sensor sheet 4a with a protective film 4b.

(Display sheet body, FIG. 2 (c))
The display sheet body 5 is shown in section in FIG. As shown in the drawing, the display sheet body 5 is obtained by covering both surfaces of a flexible display sheet 5a with protective films 5b.

(Laminate manufacturing apparatus, Fig. 3)
The laminated body manufacturing apparatus A of the present invention sandwiches and forms an overlapping state object composed of a plurality of laminated body constituent members including the curved transparent thin plate 1 and the sheet body 2, and applies a pressing force to the overlapping state object. In addition, the laminated members constituting the laminated members are bonded to each other, and the attachment of the bonding sheet member and the sheet of the sensor sheet member 4 and the display sheet member 5 in the display panel portion are performed. The laminated body is manufactured by alternately attaching the sheet bodies of the shaped electronic components.

  As schematically shown in FIG. 3, the laminate manufacturing apparatus A includes a vacuum bonding unit 6 and a sheet body 2 that is arranged in parallel to the vacuum bonding unit 6 and is fed into the vacuum bonding unit 6. And a sheet body preparation unit 7 for preparing the sheet.

  In the vacuum bonding part 6, a mechanism for superposing the curved transparent thin plate 1 and the sheet body 2 is located. As one of the main components of this mechanism, first, as shown in FIG. An upper stage 8 that can be moved to the upper stage 8 and a lower stage 9 that can also be moved vertically below the upper stage 8 are provided. The upper stage 8 and the lower stage 9 provide the curved transparent thin plate and the sheet body. Are formed by sandwiching a superposed product composed of a plurality of laminated body constituent members.

  The vacuum bonding section 6 is provided with a vacuum chamber 11 having an opening / closing opening 10 that can be opened and closed, and the upper stage 8 and the lower stage 9 are located in the chamber of the vacuum chamber 11. The upper stage 8 and the lower stage 9 are vertically opposed so as to be separated from each other.

  The vacuum bonding unit 6 has an electrostatic chuck 12 provided so as to move to the inside and outside of the chamber through the loading / unloading opening 10 of the vacuum chamber 11 and to be positioned also on the sheet body preparation unit 7. Is provided.

  Further, as shown in FIG. 3, the pair moves to the inside and outside of the chamber through the loading / unloading opening 10 of the vacuum chamber 11, and is located between the upper stage 8 and the lower stage 9 and below the electrostatic chuck 12. A pressure roller 13 is provided. In FIG. 3, an electrostatic chuck and a pressure roller, which will be described later, are illustrated in both the vacuum bonding unit 6 and the sheet body preparation unit 7 for ease of explanation.

(Electrostatic chuck, Fig. 4)
The electrostatic chuck 12 holds the laminated member constituting the sheet body 2 in the sheet body preparation unit 7 on the upper surface side which is the upper stage 8 side by electrostatic adsorption. And it moves from the sheet | seat body preparation part 7 to the vacuum bonding part 6, and carries the laminated body structural member which consists of the sheet | seat body 2 which is electrostatically adsorbed between the upper stage 8 and the lower stage 9, It is provided so that the laminated body structural member may be located under the below-mentioned convex body in the stage 8. FIG.

  FIG. 4 shows the structure of the electrostatic chuck 12 in cross section. As shown in FIG. 4, the energizing circuit 14 having a comb-like pattern made of copper foil is covered with a polyimide film layer 15 from above and below. In addition, a flexible sheet-like material having a layer structure in which the upper and lower sides are covered with a rubber base material layer 16 and the peripheral portion is supported by an electrostatic chuck folder 17 is used.

  Thus, the main part of the electrostatic chuck 12 electrostatically attracts the sheet body 2 (the sheet body 3 for bonding, the sensor sheet body 4 for the sheet-like electronic component, and the display sheet body 5 for the sheet-like electronic component). The sheet-like material to be held is made flexible and deformable.

  And the sheet | seat body 2 is inserted | pinched between the below-mentioned convex body in the upper stage 8, the curved transparent thin plate currently hold | maintained at this convex body side, and a laminated body (refer the below-mentioned manufacturing method), and upwards in that state The electrostatic chuck 12 is deformed by receiving the pushing-up force and the like, and the laminated member constituting the sheet body 2 that is electrostatically attracted is sandwiched and pressed to the convex body side to be positioned.

(Pressure roller)
As described above, the pair of pressure rollers 13 is located below the electrostatic chuck 12 and moves in and out of the chamber together with the electrostatic chuck 12. And after the laminated body structural member which consists of the sheet | seat body 2 electrostatically adsorbed by the electrostatic chuck 12 is positioned, each of this pressurization roller 13 pinches | interposes the said laminated body structural member with the upper stage 8 side. The electrostatic chuck 12 is provided so as to roll and move in opposite directions while pressing the electrostatic chuck 12 from below.

  Then, after a predetermined operation in the vacuum chamber 11 is performed after the electrostatic chuck 12 is rolled up while being pushed up from below, the electrostatic chuck 12 is returned to a flat form below the electrostatic chuck 12. In a state where they are close to each other or in contact with each other, they return to the standby position, and retreat out of the vacuum chamber 11 together with the electrostatic chuck 12.

(Upper stage, Fig. 5)
FIG. 5 shows the inside of the vacuum chamber 11 in which the upper stage 8 and the lower stage 9 are arranged more specifically. The upper stage 8 itself is formed in a substantially plate shape as a base.

  At the center of the lower surface of the upper stage 8, a convex base material 20 is arranged so as to be movable up and down so as to cover a recess 19 formed by projecting the center of the lower surface of the stage base 18 upward. ing. Further, an air-impermeable film material 21 made of an air bag sheet material or the like is attached to the lower surface side of the stage base 18 in the upper stage 8, and the air-impermeable film material 21 is made dense on the lower surface of the convex substrate 20. It is piled up. The periphery of the air-impermeable film material 21 is attached so as to be in close contact with the stage base 18.

(Convex substrate)
The convex substrate 20 is an article having at least an outer surface formed of a hard member, and the shape of the lower surface of the convex substrate 20 is convex downward corresponding to the curved shape of the curved transparent thin plate 1. Convex curved surface.

(Convex)
Then, the lower surface of the convex substrate 20 is densely covered with the air-impermeable film material 21, so that a convex body 22 having a convex convex curved surface shape corresponding to the curved surface shape of the curved transparent thin plate 1 is formed. The convex body 22 is disposed on the lower surface of the upper stage 8 so as to correspond to the lower stage 9.

(Convex pressure controller)
A convex body pressure control unit 23 is provided so as to correspond to the convex substrate 21 while facing the recess 19 and made of a pipe that feeds air from a supply source (not shown) outside the vacuum chamber 11. The convex pressure control unit 23 can apply a downward pressing force to the convex body 22 via the convex base material 20. That is, the convex body 22 can generate a pressing force toward the lower stage 9 side.

(Use of atmospheric pressure)
The method in which the convex body pressure control unit 23 applies a pressing force to the convex body 22 is performed under the control of the convex body pressure control unit 23 from outside the chamber when the inside of the vacuum chamber 11 is in a reduced pressure state. In this method, the atmospheric pressure is sent to the recess 19 through the convex body pressure controller 23 and atmospheric pressure is used as the pressing force. The method for applying the pressing force is not particularly limited, and there is a method for generating the pressing force by sending compressed air to the recess 19 under the control of the convex body pressure control unit 23. In the embodiment described below, it is described that atmospheric pressure is used as a pressing force through the convex body pressure control unit 23 under the control of the convex body pressure control unit 23.

(Vacuum suction means)
A vacuum suction means 24 comprising a pipe outside the region where the convex body 22 is formed and penetrating the air-impermeable membrane material 21 and facing the suction port in a space below the position of the membrane material is provided around the convex body 22. Is provided.

  The vacuum suction means 24 is configured to press the electrostatic chuck 12 superimposed on the lower surface side of the upper stage 8 to the upper stage 8 side at atmospheric pressure (when the vacuum chamber is open to the atmosphere) as necessary. The air can be extracted from the closed space formed by the air-impermeable film material 21 and the electrostatic chuck 12 by the operation of the suction source (not shown).

  Reinforcing plates 25 are attached above and below the peripheral portion of the air-impermeable member 21 through which the pipe portion of the vacuum suction means 24 passes. The upper reinforcing plate 25 is in close contact with the stage base 18. Further, when the electrostatic chuck 12 overlaps the lower surface side of the upper stage 8, the electrostatic chuck folder 17 and the lower reinforcing plate 25 are provided so as to be closely joined.

(Lower stage)
In the lower stage 9 which is oppositely arranged below the upper stage 8 and is movable up and down like the upper stage 8 which is movable up and down, the upper surface of the stage base 26 of the lower stage 9 is recessed. A laminated body receiver 27 is provided.

(Laminate receiver)
The laminated body receiver 27 is formed in a concave curved surface convex downward corresponding to the curved surface shape of the curved transparent thin plate 1, and the curved transparent sheet 1 can be placed on the laminated body receiver 27. Further, a laminate constituting member disposed between the upper stage 8 and the lower stage 9, for example, a sheet body 2 (a sheet body for bonding, a sheet body of a sheet-like electronic component) and the curved transparent thin plate 1, This is the portion sandwiched between the convex bodies 22. Then, when a pressing force is applied from the convex body 22 side of the upper stage 8 to the overlapped object in which a plurality of stacked structure members overlap, the stacked structure members are supported by supporting the overlapped object. It is the part that works to make it join closely.

(Electrostatic chuck support)
There is an electrostatic chuck support 28 in the chamber of the vacuum chamber 11, and when the electrostatic chuck 12 electrostatically attracting the sheet body 2 is fed into the vacuum chamber 11, the portion of the electrostatic chuck folder 17 is placed in the static chamber. The electrostatic chuck 12 is placed on the electric chuck support 28 so that the electrostatic chuck 12 is positioned between the upper stage 8 and the lower stage 9. ing.

(Holding means, FIG. 5, FIG. 6 (a) (b))
In FIG. 5, reference numeral 29 denotes a holding means made of slightly adhesive rubber. The holding means 29 is disposed in the peripheral portion of the convex body 22 including a part of the lower reinforcing plate 25, and has a weak adhesive force to the curved transparent thin plate 1 and the sheet body 2 stacked on the convex body 22 from below. It adheres. And the holding means 29 respond | corresponds to the curved-surface shape of the curved transparent thin board 1 the laminated body structural member (curved transparent thin plate 1 or the said sheet | seat body 2) which overlaps along the convex-curved-shaped part of the convex body 22 by the said adhesion. The shape is maintained in such a state that it is detachably held.

  In addition, the holding means 29 is attached to the protective film portion of the sheet body 2 covered with the protective film so that the sheet body 2 can be attached and detached while being positioned on the lower surface side of the convex body 22. In some cases, the strength when the protective means 29 peels from the protective film is set smaller than the peel strength of the protective film on the sheet body 2, and the sheet body 2 is separated from the convex body 22. The protective film of the sheet body 2 is also separated from the holding means 29.

(Range in which holding means is provided)
6A schematically shows a state in which the air impermeable film material 21 is attached to the lower surface of the upper stage 8, and FIG. 6B shows the area of the holding means 29 on the plane of the air impermeable film material 21. Is shown schematically. In addition, except the part currently hold | maintained at the reinforcement board 25, it will represent the shape of the convex part of a convex base | substrate.

  As shown in the plane of FIG. 6B, the air impermeable membrane material 21 includes the entire plane including the portion where the reinforcing plate 25 is positioned as a vacuum suction region. The electrostatic chuck 12 is overlapped from below the air impermeable film material 21 so that the folder 17 faces the reinforcing plate 25, and air between the electrostatic chuck 12 and the air impermeable film material 21 is removed. At this time, the electrostatic chuck 12 is densely overlapped with the air-impermeable film material 21.

  Further, with the position near the center side of the air-impermeable film material 21 from the peripheral portion of the air-impermeable film material 21 as a boundary, the layer surrounded by the boundary is obtained by the laminate manufacturing apparatus. A device effective area 30 corresponding to the curved surface device effective screen area of the body is used.

  Further, on the outside of the device effective region 30, there is a slightly adhesive region 31 formed by attaching the slightly adhesive rubber at a position including the inner peripheral portion of the reinforcing plate 25 attached along the side portion of the air impermeable membrane material 21. As described above, the holding means 29 is formed with the peripheral portion of the convex body 22 as the slight adhesion region 31.

(Upper stage and lower stage support stays)
The upper stage 8 is supported so as to move up and down by a support stay 32 penetrating the housing wall (top surface side) of the vacuum chamber 11 also serving as a pipe portion of the convex body pressure control unit 23. The lower stage 9 is also supported by a support stay 33 connected to the stage base 26 and penetrating the housing wall (bottom surface side) of the vacuum chamber 11 so as to be movable up and down.

<Method for producing laminate>
In the present invention, when manufacturing a laminate, the curved transparent thin plate 1, the deformable bonding sheet 3 superimposed on one side of the curved transparent thin plate 1, and sheet-like electronic materials such as a sensor sheet and a display sheet. Each of the component sheet bodies is used as a laminate constituting member, and a laminate is produced by stacking a plurality of laminate constituting members by the laminate producing apparatus A. And when manufacturing a laminated body, there exist the method of superimposing on the concave curved surface side of a curved transparent thin board, and the method of superimposing on the convex curved surface side.

<Bonding to the concave curved surface side of the curved transparent thin plate>
First, on the concave curved surface side of the curved transparent thin plate 1, a sheet body (sensor sheet body 4, display sheet body 5) which is a sheet-like electronic component of an information display panel and is covered with a protective film, and both surfaces are protective films. The sheet-like electronic component sheet is laminated on the concave curved surface side of the curved transparent thin plate 1 by alternately stacking the laminated sheet bodies 3 covered with the sheet member 3 while removing the protective film on the overlapping side. A method for producing a laminated body in which the body is laminated in a plurality of layers will be described.

(Curved transparent thin plate mounting process)
In this method, a curved transparent thin plate is inserted between an upper stage and a lower stage in a laminated body manufacturing apparatus, and the curved transparent thin plate is used as a laminated body receiving mounting member that exhibits a curved shape on the laminated body receiver of the lower stage. After the curved transparent thin plate placement process for placing the sheet material, the attaching process for attaching the sheet body and the attaching process for the sheet body of the sheet-like electronic component are alternately performed.

(Placement of curved transparent thin plate, FIGS. 7 to 9)
As shown in FIGS. 7, 8, and 9, the curved transparent thin plate 1 passes through the loading / unloading opening 10 so that the lower side is a convex curved surface, and the upper stage 8 and the lower stage 9 that are spaced apart from each other are in the standby position. The laminated body receiver of the lower stage 9 that has a concave curved surface shape that protrudes downward corresponding to the curved surface shape of the curved transparent thin plate 1 after entering between the upper stage 8 and the lower stage 9. 27, the curved transparent thin plate 1 is lowered and placed. Operations such as entering, lowering, and placing of the curved transparent thin plate 1 are performed by a manipulator (not shown).

(Position confirmation of curved transparent thin plate, FIG. 10, FIG. 11)
After placing on the curved transparent thin plate 1, the imaging camera 34 for alignment is entered between the upper stage 8 and the lower stage 9 from the outside of the vacuum chamber 11, and the curved surface is transparent with the imaging camera 34 stopped at a predetermined position. The position of the thin plate 1 is confirmed, and the position of the curved transparent thin plate 1 is stored. The stored position of the curved transparent thin plate 1 is provided as a reference for subsequent superposition. If it is confirmed that the curved transparent thin plate 1 is placed at an appropriate position and the position of the curved transparent thin plate 1 is stored, the imaging camera retreats to the outside of the vacuum chamber.

(Attaching process of sheet body for bonding)
(Sheet loading, step A-01, FIGS. 12 to 16)
In the attaching process of the sheet body for bonding, first, the electrostatic chuck 12 stands by in the sheet body preparation unit 7. As a laminate constituting member that is first stacked on the curved transparent thin plate 1, a sheet member 3 for bonding whose upper and lower surfaces are covered with a protective film 3b as shown in FIG. 12 is placed on the upper surface of the electrostatic chuck 12. Put. And as shown in FIG. 13, the sheet | seat body 3 for bonding is hold | maintained to the upper surface (surface used as the upper stage side) of the electrostatic chuck 12 by electrostatic adsorption.

  Between the upper stage 8 and the lower stage 9, the electrostatic chuck 12 that electrostatically attracts the sheet 3 for bonding enters, and the electrostatic chuck folder 17 is placed on the electrostatic chuck support base 28 so as to be electrostatic. The chuck 12 is supported, and the bonding sheet 3 is positioned below the convex body 22. Further, as the electrostatic chuck 12 enters, the pair of pressure rollers 13 and 13 enter so as to be located on the lower surface side of the electrostatic chuck 12 and corresponding to the lowest end portion of the convex body 22. Yes. (Fig. 14)

(Positioning of the sheet for bonding)
Next, as shown in FIG. 15, the upper stage 8 is lowered to a position where there is some space between the bonding sheet body 3 and the imaging camera is interposed between the convex body 22 and the bonding sheet body 3. 34, the X-axis adjustment, the Y-axis adjustment, and the θ adjustment of the electrostatic chuck folder 17 are performed based on the image data projected by the imaging camera 34 as in the case of the curved transparent thin plate 1, and the reference The sheet body 3 for bonding is aligned with respect to (the position of the curved transparent thin plate). (Fig. 15)

  After aligning the bonding sheet 3, the imaging camera 34 is retracted to the outside of the vacuum chamber 11. (Fig. 16)

(Pressing of the pressure roller from below the electrostatic chuck, Step A-02, FIGS. 17 to 20)
Next, the upper stage 8 is lowered and the pressure rollers 13 and 13 are pushed up from the lower surface side of the electrostatic chuck 12. First, the upper stage 8 is lowered, and the lowermost portion of the convex body 22 descending together with the upper stage 8 comes into contact with the protective film 3b of the sheet body 3 for bonding on the upper surface of the electrostatic chuck 12 (see FIG. 17), the convex body 22 is further lowered, and the sheet body 3 for bonding and the electrostatic chuck 12 are pushed down.

  Corresponding to the lowermost portion of the convex body 22 on the lower surface of the electrostatic chuck 12 when the pressing of the bonding sheet 3 and the electrostatic chuck 12 by the lowermost portion of the convex body 22 starts. The pair of pressure rollers 13, 13 arranged at the position where the electrostatic chuck 12 is pressed presses the electrostatic chuck 12 from below, and the convex curved surface of the convex body 22 is bent from the portion corresponding to the convex lower end of the electrostatic chuck 12. Roll along in the opposite direction to each other. The direction in which each of the pressure rollers 13, 13 rolls is directed to the holding means corresponding portion of the electrostatic chuck 12 in the direction in which the pressure roller 13 is separated, and the pressure rollers 13, 13 roll to the holding means corresponding portion. (FIGS. 18 and 19)

  Each of the pressure rollers 13, 13 rolls while pressing the electrostatic chuck 12 from below, so that the bonding sheet 3 electrostatically attracted to the electrostatic chuck 12 is formed on the lower surface of the convex body 22. It is deformed to bend along the convex curved surface. Then, as shown in FIG. 19, when the pressure rollers 13 reach the holding means corresponding portion of the electrostatic chuck 12, the sheet body 3 for bonding comes into contact with the holding means 29. And as shown in FIG. 20, the pressure rollers 13 and 13 move to the location corresponding to an outer side position from the edge part which opposes the pressure roller rolling movement direction of the sheet body 3 for bonding.

  In this step, the explanation about the point that the pressure rollers 13 and 13 reach the holding means corresponding part and the sheet body 3 for bonding contacts the holding means 29 is as described above. It is described that the sides facing the rolling movement direction of the pressure rollers 13, 13 are in contact with the holding means 29 provided in the peripheral area of the convex body 22.

  On the other hand, the side portions of the bonding sheet 3 along the rolling movement direction of the pressure rollers 13 and 13 are in contact with the holding means 29 when the pressure rollers 13 and 13 roll and move. That is, the holding means 29 in a portion along the rolling movement direction of the pressure roller is in a portion exhibiting the convex curved surface shape of the convex body 22.

  The length of each pressure roller 13 is sufficiently longer than the width perpendicular to the direction in which the pressure roller rolls in the arrangement pattern of the holding means 29. And the point which the side part of the sheet | seat body 3 for bonding along the rolling movement direction of the pressure rollers 13 and 13 contacts the holding means 29 when the pressure rollers 13 and 13 roll move is another step. The same applies to the case where the laminate constituting member contacts the holding means 29.

(Maintaining shape of sheet for bonding, step A-03, FIG. 21)
The upper stage 8 that has undergone the above steps is in a lowered state, and the reinforcing plate 25 and the electrostatic chuck folder 17 in the periphery of the air impermeable film material 21 are closely joined. A space between the air-impermeable film material 21 of the upper stage 8 and the electrostatic chuck 12 in the lowered state is thereby formed as a closed space 35.

  When the space between the air impermeable membrane material 21 and the electrostatic chuck 12 is closed, air is sucked from the closed space 35 by the vacuum suction means 24 in the laminate manufacturing apparatus A. The sheet 3 for bonding is detachably attached to the holding means 29 by the electrostatic chuck 12 pressed against the upper stage 8 side (air impermeable film material 21 side) by this suction. Since the bonding sheet body 3 overlaps the convex curved surface portion of the convex body 22, the holding means 29 has a curved surface shape corresponding to the curved surface shape of the curved transparent thin plate 1. Maintain shape.

(Separation of sheet body for bonding from electrostatic chuck, Step A-04, FIGS. 22 to 24)
After the operation of the above-described step of holding the bonding sheet 3 on the holding means 29 is completed, the upper stage 8 is raised in a state where the bonding sheet 3 is positioned on the convex body 22 side. 8 and the electrostatic chuck 12 are separated. Then, the electrostatic chuck 12 and the pressure rollers 13 and 13 are retracted from between the upper stage 8 and the lower stage 9 that are in the standby positions and moved to the outside of the vacuum chamber 11. Thereafter, the protective film 3 b on the lower surface side of the sheet body 3 for bonding is peeled and removed, and is taken out of the vacuum chamber 11. (FIGS. 23 and 24)

(Lamination of sheet body for laminating and laminate receiving mounting member, Step A-05, FIGS. 25 to 29)
By removing the protective film 3b in the above step, the transparent optical adhesive film 3a is exposed on the lower surface side of the sheet body 3 for bonding. Further, as shown in FIG. 25, the lower stage 9 where the laminated body receiving placement member exists in the laminated body receiver 27, that is, the lower stage 9 where the curved transparent thin plate 1 is placed on the laminated body receiver 27 is raised. Then, it is stopped at a predetermined height position where sandwiched objects are sandwiched and formed.

  Next, as shown in FIG. 26, the loading / unloading opening 10 is closed, and the inside of the chamber is decompressed by a vacuum pump 36 that is connected to the vacuum chamber 11 and draws air in the chamber when necessary.

  The upper stage 8 is lowered under a reduced pressure environment in the chamber, and the concave curved surface portion of the curved transparent thin plate 1 serving as a laminated body receiving member and the curved surface shape of the curved transparent thin plate 1 are formed on the convex body 22. The shape of the corresponding curved surface is maintained, and the transparent optical adhesive film 3a portion of the bonding sheet 3 exposed by the transparent optical adhesive film 3a is brought closer. (Fig. 27)

  The upper stage 8 continues to descend, and the concave curved surface portion of the curved transparent thin plate 1 and the transparent optical adhesive film 3a portion of the sheet body 3 for bonding are joined to form the convex body 22 and the laminate receiver 27. In between, the superposed state object a consisting of the sheet body 3 for bonding and the curved transparent thin plate 1 is sandwiched and held. (Fig. 28)

  Further, when the superposed state object “a” is sandwiched and held, the convex body pressure control unit 23 functions to cause the convex base material 20 to face the recess 19. A pressing force 37 is applied to push 20 downward. In this way, the convex body 22 performs pressure bonding to press the laminating sheet 3 against the curved transparent thin plate 1 side with the pressing force 37, so that the overlapping laminating sheet 3 and the curved transparent thin plate 1 are securely attached. Paste to. (Fig. 29)

(Release of pressing force of convex body, step A-06, FIG. 30)
After the step of pressing the overlapped product a with the convex body 22 and bonding the sheet 3 for bonding to the curved transparent thin plate 1 in the overlapped product a, the pressing force is applied. The operation of the convex body pressure control unit 23 is stopped, thereby releasing the pressing of the convex body 22 against the sheet body 3 for bonding, and the laminating sheet body 3 and the curved transparent thin plate 1 are overlapped. The state object a is returned to the state of being sandwiched and held between the convex body 22 and the laminate receiver 27.

  Thereafter, the vacuum pump 36 is stopped, the inside of the vacuum chamber 11 is returned to the atmospheric pressure environment, and the loading / unloading opening 10 is opened to open the vacuum chamber 11 to the atmosphere. (Fig. 30)

(Formation of laminated body in which sheets for bonding are bonded together, Step A-07, FIGS. 31 to 34)
After releasing the atmosphere in the above step, the upper stage 8 is raised by a predetermined amount. As the upper stage 8 rises, the sheet body 3 for bonding is separated from the convex body 22 to the laminated body receiver 27 side (the curved transparent thin plate 1 side). (Fig. 31)

  Compared to the force for bonding the transparent optical adhesive film 3a and the protective film 3b on the upper surface side thereof in the bonding sheet 3 and the force for bonding the transparent optical adhesive film 3a and the curved transparent thin plate 1 to each other. Because the force with which the slightly adhesive rubber of the holding means 29 holds the protective film 3b on the upper surface side of the sheet body 3 for bonding is small, the upper stage 8 after being released to the atmosphere is raised by a predetermined amount. When this occurs, the bonding sheet 3 is reliably separated from the holding means 29.

  As described above, the upper stage 8 is raised by a predetermined amount, and the movement of the bonding sheet 3 to the curved transparent thin plate 1 side is confirmed. Thereafter, the upper stage 8 and the lower stage 9 are operated so as to be separated from each other, and each is returned to the standby position.

  By separating the upper stage 8 and the lower stage 9, a laminated body receiving and mounting member b having the uppermost layer as the bonding sheet 3 and the lowermost layer as the curved transparent thin plate 1 is formed on the laminated body receiver 27. Will be. (Fig. 32)

  Next, it is opposite to the curved transparent thin plate 1 side from the sheet 3 for bonding on the laminate receiving and placing member b which is placed on the laminate receiving 27 of the lower stage 9. The protective film 3b is removed. (Fig. 33)

  Thereby, the laminate c corresponding to the curved surface shape of the curved transparent thin plate with the transparent optical adhesive film 3a exposed and the uppermost layer as the sheet body 3 for bonding and the lowermost layer as the curved transparent thin plate 1, The laminate receiver 27 is used. (Fig. 34)

(Sensor sheet body (sheet-like electronic component) mounting process)
Next, the sensor sheet body 4 which is a sheet-like electronic component is attached to the laminate c formed through the attachment process of the bonding sheet body, and a laminate body newly having the sensor sheet body 4 is formed. It becomes the attachment process of the sensor sheet body for doing.

  In addition, when attaching the sensor sheet body 4 which is a kind of the sheet body 2, the operation procedure of the laminate manufacturing apparatus A is the above-described step of attaching the sheet body for bonding in Steps A-01 to A-07. Same as the case.

(Sending the sensor sheet, Step B-01, FIG. 35)
Even in the attaching process of the sensor sheet body, first, as the laminate constituting member to be overlaid on the laminate c, the sensor sheet body 4 whose upper and lower surfaces shown in FIG. It is carried above the electrostatic chuck 12 waiting in the body preparation unit 7. Then, the sensor sheet body 4 is held on the upper surface of the electrostatic chuck 12 by electrostatic adsorption.

  An electrostatic chuck 12 electrostatically attracting the sensor sheet body 4 enters between the upper stage 8 and the lower stage 9, and the electrostatic chuck holder 17 is placed on the electrostatic chuck support base 28 to support the electrostatic chuck 12. The sensor sheet body 4 is positioned below the convex body 22. The pressure rollers 13 and 13 are also the same as in the attachment process of the sheet body for bonding, and are located on the lower surface side of the electrostatic chuck 12 and corresponding to the lowermost portion of the convex body 22. A pair of pressure rollers 13, 13 enters. (Fig. 35)

(Alignment of sensor sheet body)
Next, the alignment of the sensor sheet body 4 positioned on the electrostatic chuck 12 is performed by the bonding sheet body shown in FIG. 15 in the step A-01 of the attachment process of the bonding sheet body 3 described above. This is the same as the operation of the alignment of No. 3. The X-axis of the electrostatic chuck folder 17 is lowered based on the image data projected by the imaging camera 34 that is moved down to a position where the upper stage 8 is spaced from the sensor sheet body 4 by a certain distance. Adjustment, Y-axis adjustment, and θ adjustment are performed to align the sensor sheet body 4. (The illustration for positioning the sensor sheet is omitted.)

  After aligning the sensor sheet body 4, the imaging camera 34 is retracted to the outside of the vacuum chamber 11.

(Pressing of the pressure roller from under the electrostatic chuck, Step B-02, FIGS. 36 to 38)
Next, the upper stage 8 is lowered and the pressure rollers 13 and 13 are pushed up from the lower surface side of the electrostatic chuck 12. First, the upper stage 8 is lowered, and the lowermost portion of the convex body 22 descending together with the upper stage 8 comes into contact with the protective film 4b of the sensor sheet body 4 on the upper surface of the electrostatic chuck 12 (FIG. 36). Further, the convex body 22 continues to descend, and the sensor sheet body 4 and the electrostatic chuck 12 are pushed down.

  Similar to the movement in step A-02 of the attaching process of the sheet member 3 for bonding, the pair of pressure rollers 13 and 13 press the electrostatic chuck 12 from below while the electrostatic chuck 12 Rolling from the portion corresponding to the lower end of the convex body in opposite directions. Each of the pressure rollers 13, 13 rolls to the holding means corresponding portion in the electrostatic chuck 12. (Fig. 37)

  Each of the pressure rollers 13 and 13 rolls while pressing the electrostatic chuck 12 from below, so that the sensor sheet body 4 electrostatically attracted to the electrostatic chuck 12 has a convex curved shape on the lower surface of the convex body 22. Deforms to bend along the part. Then, as shown in FIG. 37, when the pressure rollers 13, 13 reach the holding means corresponding portion of the electrostatic chuck 12, the sensor sheet body 4 comes into contact with the holding means 29. And as shown in FIG. 38, the pressurization rollers 13 and 13 move to the location corresponding to an outer side position from the side part which opposes the pressurization roller rolling movement direction of the sensor sheet | seat body 4. As shown in FIG.

  As described above, the side portions of the sensor sheet body 4 are in contact with the holding means 29 by the rolling movement of the pressure rollers 13 and 13.

(Maintenance of sensor sheet shape, step B-03, FIG. 39)
The upper stage 8 that has undergone the above steps is in a lowered state, and the reinforcing plate 25 and the electrostatic chuck folder 17 in the periphery of the air impermeable film material 21 are closely joined. A space between the air-impermeable film material 21 of the upper stage 8 and the electrostatic chuck 12 in the lowered state is thereby formed as a closed space 35.

  When the space between the air impermeable film material 21 and the electrostatic chuck 12 is closed, air is sucked from the closed space 35 by the vacuum suction means 24 in the laminate manufacturing apparatus A. The side portion of the sensor sheet body 4 is detachably attached to the holding means 29 by the electrostatic chuck 12 pressed against the upper stage 8 side (air impermeable film material 21 side) by this suction.

  Similarly to the case of Step A-03, the sensor sheet 4 is overlapped with the convex curved portion of the convex body 22 by the rolling movement of the pressure rollers 13 and 13 and the pressing by the electrostatic chuck 12. The holding means 29 maintains the shape of the sensor sheet 4 in a curved shape corresponding to the curved shape of the curved transparent thin plate 1.

(Separation of sensor sheet body from electrostatic chuck, Step B-04, FIG. 40)
After the operation of Step B-03 for holding the sensor sheet body 4 on the holding means 29 is completed, the upper stage 8 is raised with the sensor sheet body 4 positioned on the convex body 22 side, The electric chuck 12 is separated. Then, the electrostatic chuck 12 and the pressure rollers 13 and 13 are retracted from between the upper stage 8 and the lower stage 9 that are in the standby positions and moved to the outside of the vacuum chamber 11. Thereafter, the protective film 4 b on the lower surface side of the sensor sheet body 4 is peeled and removed, and is taken out of the vacuum chamber 11. (Fig. 40)

(Bonding of sensor sheet body and laminate receiving mounting member, Step B-05, FIGS. 41 to 43)
By removing the protective film 4b on the lower surface side of the sensor sheet body 4 in the above steps, the transparent sensor sheet 4a is exposed on the lower surface side of the sensor sheet body 4. Further, the lower stage 9 in which the laminated body receiving mounting member b (the laminated body in which the sheet body 3 for bonding is bonded to the curved transparent thin plate 1) is present is raised on the stacked body receiver 27 so that the stacked state is obtained. It stops at a predetermined height position where the object is sandwiched. (Fig. 41)

  Next, the loading / unloading opening 10 of the vacuum chamber 11 is closed, and the vacuum pump 36 connected to the vacuum chamber 11 is operated to decompress the inside of the chamber.

  The upper stage 8 is lowered in a reduced pressure environment in the chamber, and a concave curved surface portion of the laminated body receiving mounting member b (a concave curved surface portion of the bonding sheet body 3) and a convex surface 22 are curved. The portion of the transparent sensor sheet 4a of the sensor sheet body 4 that is maintained in a curved shape corresponding to the curved shape of the transparent thin plate 1 is brought closer.

  By continuing the lowering of the upper stage 8, the concave-curved surface portion of the laminate receiving and mounting member b and the transparent sensor sheet 4 a are joined, and a sensor is formed between the convex 22 and the laminate receiver 27. The superposed state object a composed of the sheet body 4 and the laminated body receiving mounting member b is sandwiched and held. (Fig. 42)

  Further, when the superposed state object a is sandwiched and held, the convex base material 20 is formed on the convex base material 20 at a portion facing the recess 19 by the action of the convex body pressure control unit 23. A pressing force 37 is applied to push down toward the bottom. As a result, the convex body 22 presses and compresses the sensor sheet body 4 toward the laminated body receiving and mounting member b side with the pressing force 37, and the overlapping sensor sheet 4 and the sheet body 3 for bonding are securely attached. to paste together. (Fig. 43)

(Release of pressing force of convex body, Step B-06, FIG. 44)
Operation of the convex body pressure control unit 23 for applying a pressing force after the above-described step of pressing the superposed state object a with the convex body 22 to bond the sensor sheet body 4 and the sheet body 3 for bonding together. And the pressing of the convex body 22 on the sensor sheet body 4 is thereby released, and the superposed state object a of the sensor sheet body 4 and the multilayer body receiving mounting member b is replaced with the convex body 22 and the multilayer body receiver. 27 to return to the state of being sandwiched and held.

  Thereafter, the vacuum pump unit 36 is stopped, the inside of the vacuum chamber 11 is returned to the atmospheric pressure environment, and the loading / unloading opening 10 is opened to open the vacuum chamber 11 to the atmosphere. (Fig. 44)

(Formation of laminate with sensor sheet bonded together, Step B-07, FIG. 45, FIG. 46)
After releasing the atmosphere in the above step, the upper stage 8 is raised by a predetermined amount, and the sensor sheet 4 is separated from the convex body 22 to the laminated body receiver 27 side.

  The force of joining the transparent sensor sheet 4a and the protective film 4b on the upper surface side in the sensor sheet body 4 and the sheet body 3 for bonding on the curved transparent thin plate 1 side are joined together. Since the force with which the slightly sticky rubber of the holding means 29 holds the protective film 4b on the upper surface side of the sensor sheet body 4 is smaller than the force that is held, the upper stage 8 after being released into the atmosphere is raised by a predetermined amount. The sensor sheet body 4 is reliably separated from the holding means 29.

  In addition, when the holding means 29 holds the laminated body structural member arrange | positioned at the convex body 22 side, the protective film which the laminated body structural member has does not peel carelessly within the laminated body structural member It is adjusted to have adhesive strength. Of course, the adhesive strength of the slightly adhesive rubber itself constituting the holding means 29 does not change in the attaching process of the bonding sheet, the attaching process of the sensor sheet, and the subsequent processes.

  As described above, the upper stage 8 is raised by a predetermined amount, and the movement of the sensor sheet body 4 toward the laminated body receiving placement member b side is confirmed. Thereafter, the upper stage 8 and the lower stage 9 are operated so as to be separated from each other, and each is returned to the standby position.

  Due to the separation between the upper stage 8 and the lower stage 9, the laminate receiver 27 is newly formed on the laminate receiver 27 with the uppermost layer as the sensor sheet 4 and the lowermost layer as the curved transparent thin plate 1. It will be.

  Next, the protective film opposite to the curved transparent thin plate 1 side from the sensor sheet body 4 in the laminated body receiving and placing member b in a state of being placed on the laminated body receiver 27 of the lower stage 9. Remove 4b.

  As a result, the transparent sensor sheet 4a is exposed so that the uppermost layer is the sensor sheet body 4 and the lowermost layer is the curved transparent thin plate 1, and the laminated body c corresponding to the curved shape of the curved transparent thin plate is the laminated body receiver 27. Formed with. (Fig. 46)

(Second step of attaching the sheet for bonding, see steps A-01 to 07, FIG. 47)
For laminating to attach the sheet body 3 for bonding to the laminated body c formed through the sensor sheet attaching process and to form a laminated body newly having the sheet body 3 for bonding. It becomes the attachment process of the sheet body.

  In addition, after forming the laminated body c which has the said sensor sheet body 4, operation | movement of the laminated body manufacturing apparatus A for bonding the sheet | seat 3 for bonding to this laminated body c is step A-01- mentioned above. Since this is the same as the operation in 07, description of each stage in the attachment process of the second bonding sheet is omitted.

  As shown in FIG. 47, a transparent optical fiber is obtained by performing the same attachment process as that in steps A-01 to 07 on the laminate c having the uppermost layer as the sensor sheet 4. A laminated body c corresponding to the curved shape of the curved transparent thin plate with the adhesive film 3a exposed and the uppermost layer being the sheet 3 for bonding and the lowermost layer being the curved transparent thin plate 1 is a laminated body receiver 27. It is formed.

  From the curved transparent thin plate 1 side, the layer structure of the laminated body c obtained by bonding the second bonding sheet 3 is the curved transparent thin plate 1 and the bonding sheet 3 (transparent optical adhesive film). The sensor sheet body 4 (transparent sensor sheet) and the sheet body 3 for bonding (transparent optical adhesive film) are laminated in order.

(Display sheet body (sheet-like electronic component) mounting step, see steps B-01 to 07, FIG. 48)
The display sheet body 5 made of a flexible display sheet is attached to the laminated body c formed through the attachment process of the second bonding sheet body, and the display sheet body 5 is replaced with a new uppermost layer (curved surface transparent). This is a process of attaching a sheet body of a sheet-like electronic component for forming a laminate having the opposite side of the thin plate.

  When attaching the display sheet body 5 which is a kind of the sheet body 2, the operation procedure of the laminate manufacturing apparatus A is the same as that in the sensor sheet body attaching process in steps B-01 to 07 described above. Since this is the second step of attaching the sheet-like electronic component, the description of each stage in the display sheet attaching step will be omitted.

  As shown in FIG. 48, the laminate c having the uppermost display sheet body 5 is subjected to the same sheet-like electronic component attachment process as that in Steps B-01 to 07, so that a flexible structure is obtained. A laminate c corresponding to the curved shape of the curved transparent thin plate is newly formed by the laminate receiver 27 with the display sheet 5a exposed and the uppermost layer being the display sheet body 5 and the lowermost layer being the curved transparent thin plate 1. Is done.

  From the curved transparent thin plate 1 side, the laminated structure c to which the display sheet 5 is bonded is composed of the curved transparent thin plate 1, the bonding sheet 3 (transparent optical adhesive film), and the sensor sheet 4 ( A transparent sensor sheet), a sheet body 3 for bonding (transparent optical adhesive film), and a display sheet body 5 (flexible display sheet) are sequentially stacked.

<Lamination on the curved surface side of the curved transparent thin plate>
Next, on the convex curved surface side of the curved transparent thin plate 1, the sheet body of the electronic sheet (sensor sheet body 4, display sheet body 5) and the sheet body 3 for bonding are overlaid on the protective film. A method of manufacturing a laminate in which sheets of the sheet-like electronic component are laminated in a plurality of layers on the convex curved surface side of the curved transparent thin plate 1 will be described.

(Curved surface transparent thin plate mounting process)
In the manufacturing method of the laminated body in which the sheet body 2 is bonded to the concave curved surface side of the curved transparent thin plate 1, the curved transparent thin plate 1 is placed at an appropriate position on the laminated body receiver 27 of the lower stage 9 as described above. Yes. And in the method of bonding the sheet body 2 to the convex curved surface side of the curved transparent thin plate 1 and manufacturing the laminate, after the curved transparent thin plate is placed on the upper stage side after the curved transparent thin plate placing step, The attachment process of the sheet body for bonding and the attachment process of the sheet body of the sheet-like electronic component are performed alternately.

  In addition, since the point which mounts the curved-surface transparent thin plate 1 in the appropriate position on the laminated body receiver 27 is the same as the curved-surface transparent thin-plate mounting process, description of the point is abbreviate | omitted.

  First, as described above, it is confirmed that the curved transparent thin plate 1 is in an appropriate position on the laminated body receiver 27 of the lower stage 9, and the position of the curved transparent thin plate 1 is stored using the imaging camera 34 and is used as a reference. After that, the upper stage 8 is lowered and the curved transparent thin plate 1 is sandwiched and held between the upper stage 8 and the lower stage 9.

(Attaching the curved transparent thin plate to the holding means, FIGS. 49 and 50)
By sandwiching and holding the curved transparent thin plate 1 between the upper stage 8 and the lower stage 9, the peripheral portion of the curved transparent thin plate 1 is bonded to the holding means 29 positioned at the peripheral portion of the convex body 22. Then, the vacuum suction means 24 is operated to draw the air between the air-impermeable membrane material 21 and the curved transparent thin plate 1 so that the curved transparent thin plate 1 is moved along the convex curved portion of the convex body 22 by atmospheric pressure. Then, it is stuck to the holding means 29. (Fig. 49)

  Then, the upper stage 8 is lifted and the upper stage 8 and the lower stage 9 are separated so that the curved transparent thin plate 1 whose shape has been maintained is held as the convex lower overlapping member d positioned on the convex body 22 side. Hold by means 29. Since the curved transparent thin plate 1 is held in a state in which an appropriate curved surface shape is maintained by the holding means 29, the operation of the vacuum suction means 24 is stopped before the gap between the upper stage 8 and the lower stage 9 is opened. Let

(Attaching process of sheet body for bonding)
(Carrying in a sheet body, step C-01, FIG. 51)
After the curved transparent thin plate attaching process is completed, the process proceeds to the attaching process of the sheet body for bonding. First, the sheet body 3 for bonding, which is in an unbonded state, is placed on the upper surface of the electrostatic chuck 12 and electrostatically adsorbed by the sheet body preparation unit 7. And the protective film 3b of the upper surface side of the sheet | seat body 3 for bonding is removed.

  Next, between the upper stage 8 and the lower stage 9, the electrostatic chuck 12 that electrostatically attracts the bonding sheet 3 enters, and the electrostatic chuck folder 17 is placed on the electrostatic chuck support base 28. Thus, the electrostatic chuck 12 is supported, and the sheet body 3 for bonding is positioned below the convex body 22. Further, as the electrostatic chuck 12 enters, the pair of pressure rollers 13 and 13 enter so as to be located on the lower surface side of the electrostatic chuck 12 and corresponding to the lowest end portion of the convex body 22. Yes. (Fig. 51)

(Positioning of the sheet for bonding)
Next, in the same manner as the alignment when the sheet body is bonded to the concave curved surface side of the curved transparent thin plate, the upper stage 8 is lowered to a position where a certain distance is left between the bonding sheet body 3 and the convex body. As in the case of the curved transparent thin plate 1, the electrostatic chuck folder 17 is moved based on the image data projected by the imaging camera 34 by inserting the imaging camera 34 between the body 22 and the sheet body 3 for bonding. X-axis adjustment, Y-axis adjustment, and θ adjustment are performed, and the position of the bonding sheet 3 is adjusted with respect to the reference. (See FIG. 15 for the imaging camera 34)

  After aligning the bonding sheet 3, the imaging camera 34 is retracted to the outside of the vacuum chamber 11.

(Pressing of the pressure roller from below the electrostatic chuck, Step C-02, FIG. 52, FIG. 53)
Next, the upper stage 8 is lowered and the pressure rollers 13 and 13 are pushed up from the lower surface side of the electrostatic chuck 12. The steps at this stage are almost the same as step A-02 in the method of bonding the sheet body to the concave curved surface side of the curved transparent thin plate 1, with the difference being that the inside of the vacuum chamber 11 is depressurized and the convex body 22 The curved transparent thin plate 1 is held on the side as the convex lower overlapping member d.

  First, the loading / unloading opening 10 is closed and the vacuum chamber 11 is decompressed. The upper stage 8 descends under this reduced pressure environment. The convex body 22 integral with the upper stage 8 is lowered, and the lowermost portion of the curved transparent thin plate 1 which is the convex lower layer overlapping member d on the convex body 22 side is the sheet for bonding the upper surface of the electrostatic chuck 12. The transparent optical adhesive film 3a of the body 3 is contacted (see FIG. 52), and the convex body 22 is further lowered to push down the bonding sheet body 3 and the electrostatic chuck 12.

  When the pressing of the laminated sheet 3 and the electrostatic chuck 12 by the lowermost portion of the curved transparent thin plate 1 starts, the pair of pressure rollers 13 and 13 press the electrostatic chuck 12 from below. However, the electrostatic chuck 12 rolls and moves in the opposite directions from the lower end corresponding portion of the convex body. Each of the pressure rollers 13 and 13 passes through the sheet body side corresponding portion of the electrostatic chuck 12 in the direction in which the pressure roller 13 is separated, and rolls to the holding means corresponding portion.

  Each of the pressure rollers 13, 13 rolls while pressing the electrostatic chuck 12 from below, so that the bonding sheet 3 electrostatically attracted to the electrostatic chuck 12 becomes a convex lower stacking member. While being deformed to bend along the convex curved surface portion of the lower surface of the curved transparent thin plate 1 defined as d, the curved transparent thin plate 1 contacts the convex curved surface portion. (Fig. 53)

  In this way, the sheet body 3 for bonding is brought into close contact with the curved transparent thin plate 1 along the convex curved surface portion of the curved transparent thin plate 1 which is a convex lower layer member, and the sheet body for bonding is attached. 3 is maintained in a curved shape corresponding to the curved shape of the curved transparent thin plate 1.

(Retraction of electrostatic chuck and pressure roller, Step C-03, FIGS. 54 to 56)
Next, after the inside of the vacuum chamber 11 is returned to the atmospheric pressure state, the loading / unloading opening 10 is opened to open the atmosphere (FIG. 54). Thereafter, the upper stage 8 is raised to separate the convex body 22 upward from the electrostatic chuck 12 (FIG. 55). Then, the upper stage 8 is stopped at the standby position, and the electrostatic chuck 12 and the pressure rollers 13 and 13 are retracted. (Fig. 56)

(Bonding of convex lower layer member and sheet member for bonding, Step C-04, FIGS. 57 to 59)
After the step C-03 in which the electrostatic chuck 12 and the pressure rollers 13 and 13 are retracted, the overlapping curved transparent thin plate 1 and the sheet body 3 for bonding are closely bonded.

  First, the upper stage 8 and the lower stage 9 are brought close to each other and the loading / unloading opening 10 is closed to decompress the inside of the vacuum chamber 11. (Fig. 57)

  Under the reduced pressure environment in the chamber where the degree of vacuum is increased, the lower stage 9 stops at a height position for receiving the superposed state, and the upper stage 8 descends toward the stopped lower stage 9. Then, between the upper stage 8 and the lower stage 9, the curved transparent thin plate 1 which is the convex lower overlapping member d whose shape is maintained on the convex body 22 side, and the bonded in close contact with the curved transparent thin plate 1 The overlapped state object a composed of the sheet body 3 is sandwiched and held. That is, the superposed state object a is sandwiched between the convex body 22 of the upper stage 8 and the laminated body receiver 27 of the lower stage 9. (Fig. 58)

  Next, similarly to the application of the pressing force that presses the sheet body 2 against the concave curved surface portion of the curved transparent thin plate 1, the convex body pressure control unit 23 operates to move downward through the convex base material 20. The pressing force is applied to the convex body 22. Therefore, the convex body 22 presses the superposed state object a composed of the curved transparent thin plate 1 (convex lower overlapping member d) and the sheet body 3 for bonding toward the laminated body receiver 27 side. The overlapping curved transparent thin plate 1 and the sheet body 3 for bonding are bonded together. (Fig. 59)

(Press release of convex body and release to atmosphere, Step C-05)
Next, the pressing of the superposed state a by the convex body 22 is released, and the inside of the vacuum chamber 11 is returned to the atmospheric pressure environment. Then, the loading / unloading opening 10 is opened to open the vacuum chamber 11 to the atmosphere.

(Formation of laminated body, Step C-06, FIG. 60, FIG. 61)
This step C-06 after the vacuum chamber 11 is opened to the atmosphere is the final stage of the attachment process of the bonding sheet 3. First, the upper stage 8 is raised and returned to the standby position, and the lower stage 9 is also lowered and returned to the standby position. In this way, the upper stage 8 and the lower stage 9 are separated from each other in the vertical direction, and as the upper stage 8 is raised, the superposed state object a is accompanied on the convex body 22 side, so that the laminate receiver 27 of the lower stage 9 The superposed state object a is separated. As a result, on the lower surface side of the convex body 22, a convex lower overlapping member d having the uppermost layer as the curved transparent thin plate 1 and the lowermost layer as the bonding sheet body 3 is formed. (Fig. 60)

  Originally, the sheet material 3 for bonding, which is the lowermost sheet material 2 in the superposed product a, has the protective film 3b located on the lower surface side even at the time of this step. Even when pressure is applied, the laminate receiver 27 does not adhere.

  Even in the final stage in each of the following attachment steps, the upper stage 8 and the lower stage 9 are separated from each other vertically. In each case, the lowermost sheet body of the overlapped material a is provided with a protective film on the lower surface. Thus, the superposed state object a does not stick to the lower stage 9. The convex lower overlapping member d formed on the convex body 22 side is held by the holding means 29 and is held while maintaining a shape corresponding to the curved surface shape of the convex body 22.

  Next, the protective film 3b opposite to the curved transparent thin plate 1 side of the laminating sheet body 3 is removed from the laminating sheet body 3 located in the lowermost layer of the convex lower overlapping member d. . As a result, the laminate c corresponding to the curved shape of the curved transparent thin plate 1 is formed with the uppermost layer being the curved transparent thin plate 1 and the lowermost layer being the sheet body 3 for bonding. (Fig. 61)

(Sensor sheet body (sheet-like electronic component) mounting process)
Next, the sensor sheet body 4 which is a sheet-like electronic component is attached to the laminated body c formed through the attachment process of the sheet body for bonding, and the laminated body which newly has this sensor sheet body 4 is formed. It becomes the attachment process of the sensor sheet body for.

  In addition, when attaching the sensor sheet body 4 which is a kind of the sheet body 2, the operation procedure of the laminated body manufacturing apparatus A is the same as that in the above-described step of attaching the sheet body for bonding in Step C.

(Carrying in sheet, step D-01, FIG. 62)
The attaching process of the sheet body of this sheet-like electronic component is a convex lower stacking member formed of a laminate c formed in the attaching process of the bonding sheet body and having the lowermost layer as the bonding sheet body 3. is performed on d. First, the sensor sheet body 4 in an unbonded state is placed on the upper surface of the electrostatic chuck 12 and electrostatically adsorbed by the sheet body preparation unit 7. Then, the protective film 4b on the upper surface side of the sensor sheet body 4 is removed.

  Next, the electrostatic chuck 12 that electrostatically attracts the sensor sheet body 4 enters between the upper stage 8 and the lower stage 9, and the electrostatic chuck folder 17 is placed on the electrostatic chuck support base 28 so as to be electrostatic. The chuck 12 is supported, and the sensor sheet body 4 is positioned below the convex body 22. Further, as the electrostatic chuck 12 enters, the pair of pressure rollers 13 and 13 enter so as to be located on the lower surface side of the electrostatic chuck 12 and corresponding to the lowest end portion of the convex body 22. Yes. (Fig. 62)

(Alignment of sensor sheet body)
Next, in the same manner as the alignment (step C-01) when the sheet body is bonded to the convex curved surface side of the curved transparent thin plate, the upper stage 8 is bonded to the lowermost layer of the convex lower stacking member d. 3 and the sensor sheet body 4 are lowered to a position where a certain space is left between them, and the imaging camera 34 enters between the bonding sheet body 3 and the sensor sheet body 4 on the convex body 22 side. As in the case of the curved transparent thin plate 1, the X-axis adjustment, Y-axis adjustment, and θ adjustment of the electrostatic chuck folder 17 are performed based on the image data displayed by the imaging camera 34, and the sensor sheet body 4 is aligned with the reference. To do. Note that the illustration of the operation of the imaging camera 34 in this step is omitted. (See Figure 15)

  After aligning the sensor sheet body 4, the imaging camera 34 is retracted to the outside of the vacuum chamber 11.

(Pressing the pressure roller from below the electrostatic chuck, Step D-02, FIG. 63, FIG. 64)
Next, the upper stage 8 is lowered and the pressure rollers 13 and 13 are pushed up from the lower surface side of the electrostatic chuck 12. The step at this stage is the same as Step C-02 in the method of bonding the sheet body to the convex curved surface side of the curved transparent thin plate 1.

  First, the loading / unloading opening 10 is closed and the vacuum chamber 11 is decompressed. The upper stage 8 descends under this reduced pressure environment. The convex body 22 integral with the upper stage 8 is lowered, and the lowermost portion of the bonding sheet 3 which is the lowermost layer of the convex lower stacking member d on the convex body 22 side is the upper surface of the electrostatic chuck 12. Then, the sensor sheet body 4 comes into contact with the transparent sensor sheet 4a, and the convex body 22 continues to descend, thereby pushing down the sensor sheet body 4 and the electrostatic chuck 12. (See Figure 63)

  When the sensor sheet body 4 and the electrostatic chuck 12 are pushed down by the lowermost portion of the convex lower overlapping member d, the pair of pressure rollers 13 and 13 are in a state of pressing the electrostatic chuck 12 from below. The electrostatic chuck 12 rolls in the opposite directions from the convex lower end corresponding portion. Each of the pressure rollers 13 and 13 passes through the sheet body side corresponding portion of the electrostatic chuck 12 in the direction in which the pressure roller 13 is separated, and rolls to the holding means corresponding portion.

  Each of the pressure rollers 13, 13 rolls while pressing the electrostatic chuck 12 from below, so that the sensor sheet body 4 electrostatically attracted to the electrostatic chuck 12 can be While deforming to bend along the convex curved surface portion of the lower surface of the laminating sheet body 3 which is the lower layer, the convex curved surface portion is contacted. (Fig. 64)

  In this way, the sensor sheet body 4 is brought into close contact with the bonding sheet body 3 along the convex curved surface portion of the bonding sheet body 3 which is the lowermost layer of the convex lower stacking member d. Then, the sensor sheet body 4 is maintained in a curved surface shape corresponding to the curved surface shape of the curved transparent thin plate 1.

(Retraction of electrostatic chuck and pressure roller, Step D-03)
Next, after the inside of the vacuum chamber 11 is returned to the atmospheric pressure state, the loading / unloading opening 10 is opened to open the atmosphere (FIG. 54). Thereafter, the upper stage 8 is raised to separate the convex body 22 upward from the electrostatic chuck 12 (FIG. 55). Then, the upper stage 8 is stopped at the standby position, and the electrostatic chuck 12 and the pressure rollers 13 and 13 are retracted. Illustration of the operation in this step is omitted. (See FIGS. 54 to 56)

(Bonding of convex lower member and sensor sheet, step D-04, FIG. 65)
After the step D-03 in which the electrostatic chuck 12 and the pressure rollers 13 and 13 are retracted, the overlapping sheet body 3 and the sensor sheet body 4 that overlap each other are closely bonded.

  First, the upper stage 8 and the lower stage 9 are brought close to each other and the loading / unloading opening 10 is closed to decompress the inside of the vacuum chamber 11.

  Under the reduced pressure environment in the chamber where the degree of vacuum is increased, the lower stage 9 stops at a height position for receiving the superposed state, and the upper stage 8 descends toward the stopped lower stage 9. Then, between the upper stage 8 and the lower stage 9, a convex lower layer member d whose shape is maintained on the convex body 22 side and a sensor sheet body in close contact with the lowermost layer of the convex lower layer member d 4 is sandwiched and held. That is, the superposed state object a is sandwiched between the convex body 22 of the upper stage 8 and the laminated body receiver 27 of the lower stage 9.

  Next, similarly to the application of the pressing force that presses the sheet body 2 against the convex curved surface portion of the curved transparent thin plate 1 described above, the convex body pressure control unit 23 operates to move downward through the convex base material 20. The facing pressing force acts on the convex body 22, and the convex body 22 presses the superposed state object “a” toward the laminated body receiver 27, so that the overlapping sheet body 3 and sensor sheet body 4 overlap. Are pasted together. (Fig. 65)

(Press release of convex body and release to atmosphere, Step D-05)
Next, the pressing of the superposed state a by the convex body 22 is released, and the inside of the vacuum chamber 11 is returned to the atmospheric pressure environment. Then, the loading / unloading opening 10 is opened to open the vacuum chamber 11 to the atmosphere.

(Formation of laminated body, step D-06, FIG. 66)
This step D-06 after the vacuum chamber 11 is opened to the atmosphere is the final stage of the attachment process of the sensor sheet body 4. First, the upper stage 8 is raised and returned to the standby position, and the lower stage 9 is also lowered and returned to the standby position. In this way, the upper stage 8 and the lower stage 9 are separated from each other in the vertical direction, and as the upper stage 8 is raised, the superposed state object a is accompanied on the convex body 22 side, so that the laminate receiver 27 of the lower stage 9 The superposed state object a is separated. As a result, the lower convex member d having the uppermost layer as the curved transparent thin plate 1 and the lowermost layer as the sensor sheet 4 is formed on the lower surface side of the convex body 22.

  Next, the protective film 4b opposite to the curved transparent thin plate 1 side of the sensor sheet body 4 is removed from the sensor sheet body 4 positioned at the lowermost layer of the convex lower overlapping member d. Thus, the laminate c corresponding to the curved surface shape of the curved transparent thin plate 1 is newly formed with the uppermost layer being the curved transparent thin plate 1 and the lowermost layer being the sensor sheet body 4. (Fig. 66)

(Second step of attaching the sheet for bonding, see steps C-01 to 06, FIG. 67)
As in the case of <bonding to the concave curved surface side of the curved transparent thin plate> described above, the bonding sheet body 3 is attached to the laminate c formed through the sensor sheet mounting step, and this bonding is performed. This is a process of attaching the sheet body for bonding to form a laminate having the sheet body 3 for bonding newly.

  In addition, after forming the laminated body c which has the said sensor sheet body 4, operation | movement of the laminated body manufacturing apparatus A for bonding the sheet body 3 for bonding to this laminated body c is the above-mentioned step C-01- Since this is the same as the operation in 06, description of each stage in the attachment process of the second bonding sheet is omitted.

  As shown in FIG. 67, a transparent optical fiber is obtained by performing the same process of attaching the sheet for bonding to the laminate c having the lowermost layer as the sensor sheet 4 as in the steps C-01 to 06. The laminate c corresponding to the curved shape of the curved transparent thin plate with the adhesive film 3a exposed and the lowermost layer being the sheet 3 for bonding and the uppermost layer being the curved transparent thin plate 1 is the lower surface of the convex body 22 Newly formed on the side.

  From the curved transparent thin plate 1 side, the layer structure of the laminated body c obtained by bonding the second bonding sheet 3 is the curved transparent thin plate 1 and the bonding sheet 3 (transparent optical adhesive film). The sensor sheet body 4 (transparent sensor sheet) and the sheet body 3 for bonding (transparent optical adhesive film) are laminated in order.

(Display sheet body (sheet-like electronic component) mounting step, see steps D-01 to 06, FIG. 68)
The display sheet body 5 made of a flexible display sheet is attached to the laminated body c formed through the attachment process of the second bonding sheet body, and the display sheet body 5 is formed into a new lowermost layer (curved transparent surface). This is a process of attaching a sheet body of a sheet-like electronic component for forming a laminate having the opposite side of the thin plate.

  When attaching the display sheet body 5 which is a kind of the sheet body 2, the operation procedure of the laminated body manufacturing apparatus A is the same as that in the sensor sheet body attaching process in steps D-01 to 06 described above. Since this is the second step of attaching the sheet-like electronic component, the description of each stage in the display sheet attaching step will be omitted.

  As shown in FIG. 68, the laminate c having the lowermost layer as the display sheet body 5 is subjected to the same sheet-like electronic component attachment process as that in steps D-01 to 06, so that the flexible structure is obtained. A laminate c corresponding to the curved surface shape of the curved transparent thin plate is newly provided on the lower surface side of the convex body 22 with the display sheet 5a exposed and the lowermost layer being the display sheet body 5 and the uppermost layer being the curved transparent thin plate 1. Formed.

  From the curved transparent thin plate 1 side, the laminated structure c to which the display sheet 5 is bonded is composed of the curved transparent thin plate 1, the bonding sheet 3 (transparent optical adhesive film), and the sensor sheet 4 ( A transparent sensor sheet), a sheet body 3 for bonding (transparent optical adhesive film), and a display sheet body 5 (flexible display sheet) are sequentially stacked.

(Flexible printed circuit boards and printed circuit boards)
In the drawing for explaining the attachment process of the sheet body of the sheet-like electronic component, the shape of the sheet body of the sheet-like electronic component is simplified for easy understanding. By the way, the sheet body of the sheet-like electronic component which is the sensor sheet body 4 or the display sheet body 5 is a flexible printed wiring board at the side of the sheet body at the time of the form of the laminated body component before the laminated body is manufactured. A printed circuit board on which electronic elements are mounted is provided. Therefore, when manufacturing a laminated body, the sheet body of a sheet-like electronic component is bonded together with a flexible printed wiring board and a printed circuit board on which electronic elements are mounted.

(Electrostatic adsorption of sheet body of sheet-like electronic components)
FIG. 69 more specifically shows a state in which the electrostatic chuck 12 electrostatically attracts the sensor sheet body 4 and the display sheet body 5. The sheet body 2 of the sheet-like electronic component of the sensor sheet body 4 or the display sheet body 5 shown in FIG. 69 has a flexible printed wiring board 38 connected to a side portion, and the sheet body of the flexible printed wiring board 38 A printed circuit board 39 on which electronic elements are mounted is connected to the side opposite to 2.

  Then, after the sensor sheet body 4 and the display sheet body 5 are placed on the upper surface of the electrostatic chuck 12 in the sheet body preparation unit 7, the electrostatic chuck 12 statically holds the sensor sheet body 4 and the display sheet body 5. When the electroadhesion is performed, the flexible printed wiring board 38 is electrostatically adsorbed and the printed circuit board 39 is also electrostatically adsorbed, and the entire sheet body 2 of the sheet-like electronic component is held by the electrostatic chuck 12. I am doing so.

  That is, the sensor sheet body 4 placed on the upper surface of the electrostatic chuck 12 is statically moved at the stage of (loading the sensor sheet body, step B-01) in the above-described <bonding to the concave curved surface side of the curved transparent thin plate>. While being electroadsorbed, the flexible printed wiring board 38 connected to the side portion of the sensor sheet body 4 and the printed circuit board 39 connected to the flexible printed wiring board 38 are electrostatically adsorbed.

  Further, the display sheet body 5 placed on the upper surface of the electrostatic chuck 12 is statically fixed at the stage of Step B-01 in the attaching process of the display sheet body 5 in the same <bonding to the concave curved surface side of the curved transparent thin plate>. While being electroadsorbed, the flexible printed wiring board 38 connected to the side portion of the display sheet body 5 and the printed circuit board 39 connected to the flexible printed wiring board 38 are electrostatically adsorbed.

  Furthermore, the sensor sheet body 4 placed on the upper surface of the electrostatic chuck 12 is statically moved at the stage of (loading the sensor sheet body, step D-01) in <Lamination to the convex curved surface side of the curved transparent thin plate> described above. While being electroadsorbed, the flexible printed wiring board 38 connected to the side portion of the sensor sheet body 4 and the printed circuit board 39 connected to the flexible printed wiring board 38 are electrostatically adsorbed.

  Further, the display sheet body 5 placed on the upper surface of the electrostatic chuck 12 is statically fixed at the stage of Step D-01 in the attaching process of the display sheet body 5 in the same <bonding to the convex curved surface side of the curved transparent thin plate>. While being electroadsorbed, the flexible printed wiring board 38 connected to the side portion of the display sheet body 5 and the printed circuit board 39 connected to the flexible printed wiring board 38 are electrostatically adsorbed.

(Arrangement on the convex side of a sheet body having a flexible printed wiring board and a printed board)
As described above, when the laminate is manufactured, the electrostatic chuck 12 electrostatically attracts the sensor sheet 4 and the display sheet 5 and holds the sensor sheet 4 and the display sheet 5. Then, the sensor sheet body 4 and the display sheet body 5 are formed on the curved transparent thin plate 1 by vacuum suction by operating the vacuum suction means 24 or by pushing up the pressure rollers 13 and 13 from the lower surface side of the electrostatic chuck 12. The shape is maintained corresponding to the curved surface shape.

  FIG. 70 shows a state in which the sheet body 2 of the sheet-like electronic component of the sensor sheet body 4 or the display sheet body 5 is held on the convex body 22 side, and FIG. 70 (a) shows a vacuum suction in step B-03. A state in which the flexible printed wiring board 38 and the printed circuit board 39 are attached to the holding means 29 by the electrostatic chuck 12 pressed against the lower surface side of the convex body 22 by the adsorption of the means 24 as viewed from below. Is shown.

  In FIG. 70B, in step D-02, the flexible printed wiring board 38 and the printed circuit board 39 are held by the holding means 29 by the electrostatic chuck 12 pressed against the lower surface side of the convex body 22 by the pressure rollers 13 and 13. Is shown in a state viewed from below.

  As shown in FIG. 70, the flexible printed wiring board 38 and the printed board 39 included in the sensor sheet body 4 and the display sheet body 5 are formed so as to correspond to the region of the holding means 29 of the convex body 22. In the state of being electrostatically attracted to the electrostatic chuck 12, it is subjected to the action of vacuum suction of the vacuum suction means 24 or the action of pushing up the pressure rollers 13 and 13 from the lower surface side of the electrostatic chuck 12. The holding means 29 is provided so as to detachably hold (stick) the flexible printed wiring board 38 and the printed board 39.

  Of course, the holding means 29 detachably holds the flexible printed wiring board 38 and the printed board 39 after the electrostatic chuck 12 is released in the same manner as the holding to the sheet 2 for bonding. Will continue. Therefore, when the electrostatic chuck 12 is retracted outside the vacuum jumper 11, the flexible printed wiring board 38 and the printed circuit board 39 can be reliably prevented from hanging down. is there.

  In the embodiment, the curved transparent thin plate has been described by taking a glass thin plate having a curved surface, but the present invention is not limited to the above-described embodiment, and the curved transparent thin plate can be used as another material, for example, It is also possible to employ a transparent synthetic resin thin plate.

DESCRIPTION OF SYMBOLS A ... Laminate manufacturing apparatus 1 ... Curved transparent thin plate 2 ... Sheet body 3 ... Sheet body 3a ... Transparent optical adhesive film 3b ... Protective film 4 ... Sensor sheet body 4a ... Transparent sensor sheet 4b ... Protective film 5 ... Display Sheet body 5a ... Flexible display sheet 5b ... Protective film 6 ... Vacuum bonding section 7 ... Sheet body preparation section 8 ... Upper stage 9 ... Lower stage 10 ... Opening / unloading opening 11 ... Vacuum chamber 12 ... Electrostatic chuck 13 ... Addition Pressure roller 14 ... Current-carrying circuit 15 ... Polyimide film layer 16 ... Rubber base material layer 17 ... Electrostatic chuck folder 18 ... Stage base 19 ... Recess 20 ... Convex base material 21 ... Air impermeable film material 22 ... Convex body 23 ... Convex body pressure controller 24 ... Vacuum suction means 25 ... Reinforcement plate 26 ... Stage base 27 ... Laminate receiver 28 ... Electrostatic chuck support 29 ... Holding means 30 ... Device effective area 31 ... Slight adhesion area 32 ... Support stay 33 ... Support stay 34 ... Imaging camera 35 ... Closed space 36 ... Vacuum pump 37 ... Pressing force 38 ... Flexible printed wiring Plate 39 ... Printed circuit board a ... Overlapping object b ... Laminated body receiving mounting member c ... Laminated body d ... Convex body lower overlapping member

Claims (6)

A curved transparent thin plate exhibiting a curved shape with a cross-sectional convex downward, and a deformable sheet that is superposed on one side of the curved transparent thin plate, are used as laminated members.
An upper stage that can be moved up and down and a lower stage that can be moved up and down below the upper stage sandwiched and formed a plurality of laminated components including the curved transparent thin plate and the sheet member do it,
A laminated body manufacturing apparatus for closely adhering overlapping laminated body constituent members by pressing against the superposed state object of the upper stage and the lower stage,
It has a loading / unloading opening, and the upper stage and the lower stage are vertically opposed so as to be separated from each other in the chamber. A vacuum chamber for reducing the pressure in the chamber when performing
An air impervious film, which is located on the lower surface of the upper stage, is attached to the lower surface side of the upper stage with a convex base material that is located on the lower surface of the upper stage and has a convex curved surface convex downward corresponding to the curved shape of the curved transparent thin plate A convex body that is covered with a material and has a convex curved surface that is convex downward corresponding to the curved surface shape of the curved transparent thin plate;
The laminate which is made of a slightly adhesive rubber disposed in the peripheral portion of the convex body, and which is overlapped along the convex curved surface portion of the convex body by sticking to a laminate constituting member which is superimposed on the convex body from below. Holding means for holding the body component member in a state corresponding to the curved surface shape of the curved transparent thin plate and detachably holding the body component member;
It moves to the inside and outside of the chamber through the loading / unloading opening of the vacuum chamber, and holds the laminate constituting member made of the sheet body on the upper surface side which is the upper stage side by electrostatic adsorption between the upper stage and the lower stage. A deformable sheet-like electrostatic chuck that is loaded and positioned on the lower surface of the convex body by sandwiching the laminate constituting member made of the sheet body with the convex body by lowering the upper stage;
Moves into and out of the chamber through the loading / unloading opening of the vacuum chamber, and is positioned below the electrostatic chuck for loading the laminate constituting member composed of the sheet body between the upper stage and the lower stage. Rolling toward the portion corresponding to the holding means in the electrostatic chuck according to the convex curved surface shape of the convex body while pressing the electrostatic chuck that sandwiches the laminate constituting member made of the sheet body from below with the convex body A pair of pressure rollers that contact the holding means with the laminate constituting member made of the sheet body that has been moved along the convex body; and
Between the upper stage and the electrostatic chuck that is superimposed on the upper stage from below, a laminate constituting member that is held by the holding means and is formed of a sheet is positioned along the convex body. Air is sucked from the space between the upper stage and the electrostatic chuck, and the laminate constituting member made of the sheet is stuck to the holding means by the electrostatic chuck pressed against the upper stage side by the suction. Vacuum suction means for holding
A laminate constituting member that is located on the upper surface of the lower stage, is formed in a concave curved surface that is convex downward corresponding to the curved surface shape of the curved transparent thin plate, and is disposed between the upper stage and the lower stage A laminate manufacturing apparatus, comprising: a laminate receiver that sandwiches the sheet body and the curved transparent thin plate between the convex body and the sheet body.   When the upper stage and the lower stage are pressed against the superposed object in a reduced pressure environment, the convex body located on the lower surface of the upper stage receives the atmospheric pressure introduced from outside the chamber and presses the superposed object. The laminated body manufacturing apparatus according to claim 1, which is formed by: 3. An information display panel such as a deformable transparent sensor sheet or flexible display sheet on the concave curved surface side of a curved transparent thin plate having a curved shape with a cross-sectional convex shape downward by the laminate manufacturing apparatus according to claim 1 or 2. A sheet-like electronic component of which both sides are covered with a protective film, and a laminating sheet body made of a deformable transparent optical adhesive film and covered on both sides with a protective film A method of manufacturing a laminate in which sheets of an electronic component are laminated in a plurality of layers on the concave curved surface side of a curved transparent thin plate while alternately superposing while removing the protective film,
A curved transparent thin plate is allowed to enter between the upper stage and the lower stage in the laminate manufacturing apparatus, and the curved transparent thin plate is placed on the laminate receiver of the lower stage as a laminate receiving mounting member having a curved surface shape. After the curved transparent thin plate mounting step, the attachment step of the sheet body for bonding and the attachment step of the sheet body of the sheet-like electronic component are alternately performed,
The attachment process of the sheet body for bonding is as follows:
Between the upper stage and the lower stage of the multilayer body manufacturing apparatus, an electrostatic chuck that electrostatically adsorbs a non-bonded sheet for bonding enters, and the bonding is performed below the upper stage convex body. Step A-01 for positioning the sheet body for alignment and positioning a pair of pressure rollers on the lower surface side of the electrostatic chuck;
The upper body descends and the convex body descending together with the upper stage pushes down the bonding sheet body and the electrostatic chuck, and each of the pressure rollers is bonded to the lowering convex body. While pressing the electrostatic chuck that sandwiches the sheet body from below, the electrostatic chuck rolls in a direction opposite to the convex lower end corresponding portion of the electrostatic chuck toward the holding means corresponding portion of the electrostatic chuck, and the sticking is performed. A step A-02 for bringing the sheet member for alignment into contact with the convex holding means along the convex curved surface portion of the convex body;
Under the state where the space between the lowered upper stage and the electrostatic chuck overlapping the upper stage is a closed space, the vacuum suction means in the laminate manufacturing apparatus causes a gap between the upper stage and the electrostatic chuck. Air is sucked from the space, and the sheet body for bonding is adhered to the holding means by an electrostatic chuck pressed against the upper stage side by this suction, and the sheet body for bonding is bonded by the holding means. Step A-03 for maintaining the curved shape corresponding to the curved shape of the curved transparent thin plate;
After the upper stage where the sheet body for bonding is detachably attached to the convex body side rises, and the electrostatic chuck and the pressure roller separated from the upper stage are retracted from between the upper stage and the lower stage Step A-04 for removing the protective film on the lower surface side of the bonding sheet located on the convex body side;
After the upper stage and the lower stage are brought close to each other and the inside of the vacuum chamber is depressurized, the shape is maintained between the upper stage and the lower stage between the upper stage and the lower stage and the convex body side in a reduced pressure environment. Sandwiching and holding the stacked state object composed of the bonding sheet body, and pressing the bonding sheet body toward the laminate receiving and placing member with the convex body to overlap the bonding Step A-05 for bonding the sheet body for use and the laminate receiving mounting member;
Step A-06 for releasing the vacuum chamber from the atmosphere after releasing the pressure on the sheet body for bonding by the convex body and returning the inside of the vacuum chamber to an atmospheric pressure environment;
The upper and lower stages are separated from each other in the vertical direction, and when the upper stage is raised, the sheet for bonding is separated from the convex body to the laminate receiving side, and the uppermost layer is attached to the laminate receiver. Forming a laminated body receiving and mounting member having the lowermost layer as a curved transparent thin plate, and laminating the laminated sheet from the laminating sheet body located at the uppermost layer of the laminated body receiving and mounting member The protective film opposite to the curved transparent thin plate side of the sheet body is removed, and the uppermost layer is used as a bonding sheet body, and the lowermost layer is a curved transparent thin plate, corresponding to the curved shape of the curved transparent thin plate. Forming a laminate, step A-07;
And consists of
The attachment process of the sheet body of the sheet-like electronic component is:
Between the upper stage and the lower stage, an electrostatic chuck that electrostatically attracts the sheet body of the sheet-like electronic component that is in an unbonded state enters, and the sheet-like electronic component is placed below the convex body of the upper stage. Step B-01 for positioning the sheet body and positioning the pair of pressure rollers on the lower surface side of the electrostatic chuck;
When the upper stage descends and the convex body descending together with the upper stage pushes down the sheet body and the electrostatic chuck of the sheet-like electronic component, each of the pressure rollers forms a sheet-like electron with the descending convex body. While pressing the electrostatic chuck that sandwiches the sheet of the component from below, the electrostatic chuck rolls in the opposite direction from the portion corresponding to the lower end of the convex body toward the holding means corresponding portion of the electrostatic chuck. The step B-02 of bringing the sheet body of the sheet-like electronic component into contact with the convex holding means along the convex curved surface portion of the convex body;
In a state where the space between the lowered upper stage and the electrostatic chuck that overlaps the upper stage is a closed space, the vacuum suction means in the laminate manufacturing apparatus causes a gap between the upper stage and the electrostatic chuck. The sheet body of the sheet-like electronic component is attached to the holding means by an electrostatic chuck that sucks air from the space and is pressed against the upper stage by this suction, and the sheet of the sheet-like electronic component is held by the holding means. Step B-03 for maintaining the shape of the body in a curved surface shape corresponding to the curved surface shape of the curved transparent thin plate;
The upper stage in which the sheet body of the sheet-like electronic component is detachably attached to the convex body side is raised, and the electrostatic chuck and the pressure roller separated from the upper stage are retracted from between the upper stage and the lower stage. Later, step B-04 to remove the protective film on the lower surface side of the sheet body of the sheet-like electronic component located on the convex body side;
After the upper stage and the lower stage are brought close to each other and the inside of the vacuum chamber is depressurized, it is formed through the attachment process of the bonding sheet body between the upper stage and the lower stage in a reduced pressure environment. The laminated body receiving and placing member that is a laminated body and the sheet body of the sheet-like electronic component are sandwiched and held, and the sheet body of the sheet-like electronic member is pressed to the laminated body receiving and placing member side by the convex body Then, the step B-05 of bonding the sheet body of the sheet-like electronic component and the laminated body receiving mounting member that overlap each other,
Releasing the pressure on the sheet body of the sheet-like electronic component by the convex body, returning the inside of the vacuum chamber to an atmospheric pressure environment, and then releasing the vacuum chamber to the atmosphere;
The upper stage and the lower stage are separated from each other in the vertical direction, and by raising the upper stage, the sheet body of the sheet-like electronic component is separated from the convex body to the laminated body receiving side, and the uppermost layer is formed into a sheet form on the laminated body receiver. From the sheet body of the sheet-like electronic component located on the uppermost layer in the laminate receiving and mounting member, forming a laminated body receiving and mounting member having the lowermost layer as a curved transparent thin plate as a sheet body of the electronic component, The protective film opposite to the curved transparent thin plate side of the sheet body of the sheet-like electronic component is removed so that the uppermost layer is the sheet body of the sheet-like electronic component and the lowermost layer is the curved transparent thin plate, and the curved shape of the curved transparent thin plate A step of forming a laminate corresponding to the above-mentioned step B-07. The sheet body of the sheet-like electronic component is provided with a printed board on which an electronic element is mounted on a side portion of the sheet body via a flexible printed wiring board having flexibility,
Electrostatic chucking of the electrostatic chuck in step B-01 is performed on the sheet body, flexible printed wiring board, and printed board of the sheet-like electronic component,
4. The laminate according to claim 3, wherein in step B-03, the flexible printed wiring board and the printed board are attached to the holding means by an electrostatic chuck pressed against the upper stage side by the adsorption. Method. 3. An information display panel such as a deformable transparent sensor sheet or flexible display sheet on the convex curved surface side of a curved transparent thin plate having a curved shape with a cross-sectional convex downward shape by the laminate manufacturing apparatus according to claim 1 or 2. A sheet-like electronic component of which both sides are covered with a protective film, and a laminating sheet body made of a deformable transparent optical adhesive film and covered on both sides with a protective film A method of manufacturing a laminate in which sheets of electronic sheet-like components are laminated in a plurality of layers on the convex curved surface side of the curved transparent thin plate while alternately removing while removing the protective film,
A curved transparent thin plate is inserted between the upper stage and the lower stage in the laminate manufacturing apparatus, the curved transparent thin plate is placed on the laminate receiver of the lower stage, and the curved transparent is placed between the upper stage and the lower stage. The thin plate is sandwiched and held, attached to the convex holding means along the convex curved surface part of the convex body, the upper stage and the lower stage are separated, and the curved transparent thin plate whose shape is maintained is placed on the convex side After the curved transparent thin plate mounting step that is held by the holding means as the convex underlaying member that is positioned, the step of mounting the sheet body for bonding and the step of mounting the sheet body of the sheet-like electronic component are alternately performed. To do,
The attachment process of the sheet body for bonding is as follows:
Between the upper stage and the lower stage of the laminate manufacturing apparatus, an electrostatic chuck that electrostatically adsorbs the sheet body for bonding in an unbonded state by removing the protective film on the overlapping side enters, Step C-01 for positioning the sheet member for bonding below the convex body of the upper stage and positioning a pair of pressure rollers on the lower surface side of the electrostatic chuck;
Close the carry-in / out opening and depressurize the inside of the vacuum chamber, and in this depressurized environment, the upper stage descends and the convex body descends while holding the convex lower stacking member together with the upper stage, An electrostatic chuck that presses down the sheet body for bonding and the electrostatic chuck, and each of the pressure rollers sandwiches the convex lower stacking member and the sheet body for bonding with the descending convex body. While pressing from the bottom, the electrostatic chuck rolls in a direction opposite to the convex lower end corresponding part to the convex side end corresponding part of the electrostatic chuck toward the convex side end corresponding part, and the bonding sheet is moved below the convex Step C- for maintaining the shape of the laminating sheet body in a curved surface shape corresponding to the curved surface shape of the curved transparent thin plate by closely contacting the convex lower layer overlapping member along the convex curved surface portion of the overlapping member And 2,
Returning the inside of the vacuum chamber to atmospheric pressure, opening the loading / unloading opening to release the atmosphere, separating the upper stage and the lower stage from each other, and retracting the electrostatic chuck and the pressure roller Step C- 03,
After bringing the upper stage and the lower stage close to each other and closing the loading / unloading opening to decompress the inside of the vacuum chamber, the shape is maintained on the convex body side between the upper stage and the lower stage in a decompressed environment. And sandwiching and holding the superposed state object composed of the projecting lower layer stacking member and the sheet body for laminating in close contact with the projecting lower layer stacking member, Step C-04 in which the superposed state member composed of a member and a sheet body for bonding is pressed to the laminated body receiving side of the lower stage to bond the overlapping convex lower member and the sheet body for bonding together. When,
Step C-05 for releasing the pressure applied to the superposed object by the convex body and returning the inside of the vacuum chamber to an atmospheric pressure environment and then releasing the vacuum chamber to the atmosphere;
The upper stage and the lower stage are separated from each other in the vertical direction, and the laminate receiver is separated from the superposed product on the convex body side by raising the upper stage, and the uppermost layer is a curved transparent thin plate on the convex body. A convex lower layer member having a lower layer as a sheet body for bonding is formed, and the curved surface of the bonding sheet body is formed from the bonding sheet member positioned in the lowermost layer of the convex lower layer member. The step of removing the protective film opposite to the transparent thin plate side to form a laminate corresponding to the curved shape of the curved transparent thin plate with the uppermost layer being a curved transparent thin plate and the lowermost layer being a sheet body for bonding C-06,
The attachment step of the sheet body of the sheet-like electronic component is performed with respect to the convex lower layered member formed of a laminate in which the lowermost layer is formed in the attachment step of the attachment sheet body and the lowermost layer is the attachment sheet body. Is performed,
Between the upper stage and the lower stage, the protective film on the overlapping side is removed, and an electrostatic chuck that electrostatically adsorbs the sheet body of the sheet-like electronic component that is in an unbonded state enters and is used for the bonding The sheet body of the sheet-like electronic component is positioned below the laminated body that is held by the convex body of the upper stage through the sheet body attaching step, and the pair of pressure rollers on the lower surface side of the electrostatic chuck Step D-01 for positioning
Close the carry-in / out opening and depressurize the inside of the vacuum chamber, and in this depressurized environment, the upper stage descends and the convex body descends while holding the convex lower stacking member together with the upper stage, An electrostatic chuck that presses down the sheet body for bonding and the electrostatic chuck, and each of the pressure rollers sandwiches the convex lower stacking member and the sheet body of the sheet-like electronic component with the descending convex body. While pressing from below, the sheet of the sheet-like electronic component rolls and moves in a direction opposite to the convex lower end corresponding part of the electrostatic chuck toward the convex corresponding end of the electrostatic chuck. The sheet body of the sheet-like electronic component is kept in the curved surface shape corresponding to the curved surface shape of the curved transparent thin plate by closely contacting the convex body layered member along the portion of the curved surface shape of the below body member. And step D-02,
Returning the inside of the vacuum chamber to atmospheric pressure, opening the loading / unloading opening to release the atmosphere, separating the upper stage and the lower stage from each other, and retracting the electrostatic chuck and the pressure roller Step D- 03,
After bringing the upper stage and the lower stage close to each other and closing the loading / unloading opening to decompress the inside of the vacuum chamber, the shape is maintained on the convex body side between the upper stage and the lower stage in a decompressed environment. An overlapping state object composed of the convex lower stacking member and the sheet electronic component sheet member in close contact with the convex lower stacking member is sandwiched and held, and the convex body A step of pressing the overlapped member formed of a stack member and a sheet body of a sheet-like electronic component against the laminate receiving side of the lower stage, and bonding the overlapped convex lower stack member and the sheet body of the sheet-like electronic component together D-04,
Step D-05 for releasing the pressure on the superposed state by the convex body and returning the inside of the vacuum chamber to an atmospheric pressure environment and then releasing the vacuum chamber to the atmosphere;
The upper stage and the lower stage are separated from each other in the vertical direction, and the laminate receiver is separated from the superposed product on the convex body side by raising the upper stage, and the uppermost layer is a curved transparent thin plate on the convex body. A convex lower stack member having a lower layer as a sheet body of a sheet-like electronic component is formed, and the sheet-like electronic component sheet is formed from the sheet body of the sheet-like electronic component located in the lowermost layer of the convex lower stack member. Remove the protective film opposite the curved transparent thin plate side of the body, the uppermost layer is a curved transparent thin plate, and the lowermost layer is a sheet body of a sheet-like electronic component, corresponding to the curved shape of the curved transparent thin plate And a step D-06 of forming a laminate. The sheet body of the sheet-like electronic component is provided with a printed board on which an electronic element is mounted on a side portion of the sheet body via a flexible printed wiring board having flexibility,
The electrostatic chucking of the electrostatic chuck in step D-01 is performed on the sheet body, the flexible printed wiring board, and the printed board of the sheet-like electronic component,
The laminate according to claim 5, wherein in step D-02, the flexible printed wiring board and the printed board are attached to the holding means by an electrostatic chuck pressed against the upper stage by the pressure roller. Manufacturing method.

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