JP4373494B1 - Vacuum bonding equipment - Google Patents

Abstract

The flexible sheet is expanded while being held in a certain shape.
Gas supply means (3) for supplying gas toward the flexible sheet (1) into the first space (S1) formed behind the flexible sheet (1), and these flexible sheets (1) ) And the gas supply means (3), and a ventilation member (4) disposed so as to cover the entire surface of the flexible sheet (1). The gas supply means (4) Even if there is a partial bias in the gas supplied to the ventilation member (4) by the gas supply means (3) by providing the pressure distribution means (4a) for distributing and passing the gas from 3) While the gas from the gas supply means (3) passes through the pressure distribution means (4a) of the ventilation member (4), it is distributed at a preset ratio, and the pressure based on the passage ratio is flexible. It acts on each part of the sheet (1) to expand and deform.
[Selection] Figure 1

Description

The present invention relates to a glass substrate used for a flat panel display (FPD) such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP), and a flexible display, or polarized light adhered to the surface thereof. The present invention relates to a vacuum laminating apparatus for laminating two plate-shaped workpieces made of a plate or the like by a vacuum laminating method while suppressing mixing of bubbles between the two plate-shaped workpieces.
Specifically, a flexible sheet made of an elastic material and a smooth member are provided in parallel, and are arranged between the flexible sheet and the smooth member due to a difference in atmospheric pressure between two spaces formed by sandwiching the flexible sheet. The present invention relates to a vacuum laminating apparatus that pressurizes and bonds the two plate-like workpieces in a vacuum state.

  Conventionally, this type of vacuum laminating apparatus and vacuum laminating method includes an elastic mat that presses an upper glass substrate of an LCD cell disposed on the upper surface of a glass surface plate toward the lower glass substrate with compressed air from above, A cylindrical clamp that supports the mat, an elastic mat, an O-ring for forming a sealed space with a glass surface plate, a vacuum source for evacuating the sealed space, and a UV that cures the sealant between the glass substrates. A vacuum or heat source is provided, the sealed space is evacuated from the vacuum source, and compressed air is sent from the compressed fluid supply means to another sealed space formed behind the elastic mat, and the back pressure of the elastic mat is Is slightly higher than the ambient pressure of the glass substrate, the elastic mat expands and deforms and pressurizes the upper glass substrate toward the lower glass substrate. The sealant between the glass substrates are those cured with the UV lamp or a heat source (for example, see Patent Document 1).

Japanese Patent Laid-Open No. 10-3083 (page 2-3, FIG. 1)

However, in such a conventional vacuum laminating apparatus, the compressed air is directly sent from the compressed fluid supply means to the sealed space partitioned by the elastic mat to increase the back pressure of the elastic mat. Compressed air sent toward each part of the elastic mat is subject to partial deviation in the amount of compressed air that hits each part of the elastic mat if the arrangement position of the compressed fluid supply means or its momentum changes. When a general bias occurs, the entire elastic mat is distorted and expands, and there is a possibility that unevenness is partially generated.
When partial irregularities occur in the expanded shape of the elastic mat in this manner, there is a problem that the surface pressure on the glass substrate is also biased, and the two glass substrates that are bonded together vary.
In addition, instead of laminating glass substrates for liquid crystal displays, for example, when two substrates are laminated via a resin material as in a vacuum heat laminating apparatus or an organic light emitting display, the expansion of the elastic mat as described above is performed. When partial unevenness is generated in the shape, there is a problem that air mixed between both substrates easily remains in the bonding process.

  An object of the present invention is to inflate a flexible sheet while maintaining a certain shape.

In order to achieve the above-described object, the present invention provides a gas supply means for supplying a gas toward the first space formed behind the flexible sheet, the flexible sheet, A ventilation member disposed so as to cover the entire surface of the flexible sheet between the gas supply means, and this ventilation member is provided with pressure distribution means for distributing and passing the gas from the gas supply means , As the pressure distribution means, the opening area gradually increases from the central part of the ventilation member facing the sheet central part of the flexible sheet toward the peripheral part of the ventilation member facing the sheet peripheral part of the flexible sheet. A plurality of through holes are formed so as to be smaller.
Further, in addition to the above-described features, the through holes of the pressure distribution means are arranged so that the respective opening areas are reduced concentrically around the central portion of the ventilation member.

The present invention having the above-described features includes a gas supply means for supplying gas to the first space formed behind the flexible sheet, and the flexible sheet and the gas supply means. A ventilation member disposed so as to cover the entire surface of the flexible sheet, and the ventilation member is provided with pressure distribution means for distributing and passing the gas from the gas supply means, thereby supplying gas. Even if the gas supplied to the ventilation member by the means is partially biased, the gas from the gas supply means is distributed at a preset ratio while passing through the pressure distribution means of the ventilation member. The pressure based on the passage ratio acts on each part of the flexible sheet to expand and deform.
Therefore, the flexible sheet can be expanded while being held in a certain shape.
As a result, there is partial unevenness in the expanded shape of the flexible sheet compared to the conventional one in which compressed air is directly sent from the compressed fluid supply means to the sealed space partitioned by the elastic mat to increase the back pressure of the elastic mat. Therefore, the surface pressure applied to the plate-like workpieces can be controlled to be constant, whereby the two plate-like workpieces bonded together can be made uniform without variation.

Further, as the pressure distribution means, the opening area gradually increases from the central part of the ventilation member facing the sheet central part of the flexible sheet toward the peripheral part of the ventilation member facing the sheet peripheral part of the flexible sheet. Having perforated in a plurality of through holes so as to reduce the pressing force against the flexible sheet from the through-hole of the ventilation member is sequentially decreased toward the sheet periphery from the central portion of the sheet, first sheet central portion plate It abuts against the work and presses, and then sequentially abuts and presses toward the periphery of the sheet.
Therefore, the bubbles of both plate-like workpieces can be pushed out toward the periphery with a simple structure.
As a result, air bubbles mixed between both substrates in the bonding process can be removed due to the partial unevenness generated in the expanded shape of the elastic mat, making it possible to remove bubbles and improve quality significantly. To do.

In addition, when the through holes of the pressure distribution means are arranged so that the respective opening areas are reduced concentrically around the central portion of the ventilation member, the flexible sheet expands and deforms into a substantially spherical shape.
Therefore, it is possible to reliably expel bubbles from the center toward the periphery.

It is a vertical front view which shows one Example of the vacuum bonding apparatus of this invention, (a) shows the state before pressurization, (b) has shown the state at the time of pressurization. FIG. 2 is an enlarged cross-sectional plan view taken along line (2)-(2) in FIG. It is a vertical front view which shows the other Example of the vacuum bonding apparatus of this invention, (a) shows the state before pressurization, (b) has shown the state at the time of pressurization.

  As shown in FIGS. 1 to 3, the embodiment of the vacuum bonding apparatus according to the present invention is provided with a flexible sheet 1 and a smooth member 2 so that their opposing surfaces are arranged in a smooth and parallel manner. Between the sheet 1 and the smooth member 2, for example, two plate-like workpieces A and B carried in from outside by a workpiece transfer means (not shown) such as a transfer robot are sandwiched between the flexible sheet 1. Are pressed by a pressure difference between the two first spaces S1 and the second space S2 and bonded together in a vacuum state, and the bonded plate-like workpieces A and B are smoothed with the flexible sheet 1 by a workpiece conveying means. It is carried out from between the members 2 to the outside.

  And in 1st space S1 formed behind the flexible sheet | seat 1, the gas supply means 3 which supplies gas toward this flexible sheet | seat 1, and these flexible sheet | seats 1 and gas supply means 3 of A ventilation member 4 disposed so as to cover the entire surface of the flexible sheet 1 between them, and this ventilation member 4 is provided with pressure distribution means 4a for distributing and passing the gas from the gas supply means 3, When the gas from the gas supply means 3 passes through the pressure distribution means 4a of the ventilation member 4, it is distributed at a preset ratio, and the pressure based on the passage ratio is applied to each location of the flexible sheet 1. It acts to expand and deform into a predetermined shape.

The flexible sheet 1 is formed into a sheet shape with an elastic material having excellent heat resistance such as fluorine rubber and silicon rubber.
The smooth member 2 is formed in a flat plate shape with a rigid material, or formed in a sheet shape with an elastic material.

  The flexible sheet 1 and the smooth member 2 are assembled in an openable and closable room, and the internal pressure of the first space S1 formed behind the flexible sheet 1 and the opposite smooth member 2 are disposed. The internal pressure of the second space S2 is adjustable.

  As a specific example thereof, the openable and closable chamber is a pair of chambers 5a and 5b provided so as to be openable and closable in a direction approaching or separating from each other, and a flexible sheet so as to cover the opening of one of the chambers 5a. 1 is disposed, and the smooth member 1 is disposed inside the other chamber 5b, and an annular seal portion 5c such as an O-ring is provided between the opening edges of the chambers 5a and 5b. The region surrounded by the flexible sheet 1 and the other chamber 5b is preferably the second space S2.

Further, vent paths 5d and 5e communicating with the outside of the chambers 5a and 5b are opened in the first space S1 and the second space S2, and the first space S1 and the second space S2 pass through the vent paths 5d and 5e. By inhaling gas such as air from the inside of the space S2 to the outside of the chambers 5a and 5b, a predetermined vacuum state is obtained, and by supplying air to the spaces S1 and S2 from the outside of the chambers 5a and 5b, the first space The internal pressure of S1 and the second space S2 can be adjusted, for example, to return to the same state as the ambient pressure (atmospheric pressure).
In particular, the gas supply means 3 is provided as a mechanism for supplying a gas such as compressed air from the outside of the chamber 5a through the air passage 5d opened in the first space S1.

  A control source (not shown), which will be described later, is electrically connected to a drive source (not shown) of the gas supply means 3, and the chambers 5a and 5b are closed by controlling the operation based on the control means. Later, a gas such as compressed air is supplied from the outside of the chamber 5a to the first space S1 through the ventilation path 5d.

Moreover, it is preferable to open a plurality of through holes in the ventilation member 4 as the pressure distribution means 4a.
The plurality of through holes extend from the central portion 4 b of the ventilation member 4 facing the sheet central portion 1 a of the flexible sheet 1 to the peripheral portion of the ventilation member 4 facing the sheet peripheral portion 1 b of the flexible sheet 1. It is preferable that the opening area is gradually reduced toward 4c, and the opening area is concentrically reduced around the central portion 4b of the ventilation member 4.
Embodiments of the present invention will be described below with reference to the drawings.

  In the first embodiment, as shown in FIGS. 1 (a) to 1 (b) and FIG. 2, the flexible sheet 1 is disposed so as to cover the opening of the chamber 5a disposed above, and disposed below. A platen made of a rigid material is disposed as the smooth member 2 inside the chamber 5b. When the upper and lower chambers 5a and 5b are opened, the plate-like workpieces A and B are aligned in advance and temporarily fixed. In addition, a case is a vacuum laminating apparatus in which a pair of glass substrates and the like are carried in to pressurize both of them and heat and cure the sealing material C interposed therebetween.

  The flexible sheet 1 itself or the ventilation member 4 provided behind the flexible sheet 1 is provided with a heating element 6, and the heating element 7 is also provided on the surface plate of the smooth member 2, so that it has a plate shape. After loading the workpieces A and B, the upper and lower chambers 5a and 5b are closed, and the loaded two plate-like workpieces A and B are loaded with the internal pressure of the first space S1 formed behind the flexible sheet 1. The heating elements 6 and 7 are caused to generate heat substantially at the same time as the internal pressure of the second space S2 is increased, so that the flexible sheet 1 and the smooth surface 2a above the platen 2 The temperature is raised to the curing temperature.

  In the illustrated example, as shown in FIG. 2, the flexible sheet 1 is formed in a rectangular shape, and a frame 1c formed in a frame shape with, for example, metal or the like is integrally fixed to the outer periphery thereof. By connecting 1c to the opening edge of the upper chamber 5a, the entire flexible sheet 1 is stretched, and the opening edge of the lower chambers 5a and 5b facing the lower surface of the frame 1c has, for example, an O-ring or the like The annular seal portion 5c is arranged.

  Although not shown as another example, the outer peripheral edge of the flexible sheet 2 made of an elastic material without providing the frame 1c is connected to the opening edge of the upper chamber 5a, or the annular seal portion 5c is connected to the opening of the upper chamber 5a. It is also possible to arrange it so that it cannot fall off the edge.

  Further, a circular through-hole having a different diameter as the pressure distribution means 4a is opened in the ventilation member 4 at appropriate intervals, and the through-hole having the largest diameter is arranged in the central portion 4b of the ventilation member 4, and then the periphery. The diameter is gradually reduced toward the portion 4c, and the respective diameters are concentrically reduced around the central portion 4b of the ventilation member 4.

  Although not illustrated as another example, the density of the opening positions of the through holes without changing the opening area of each through hole without changing the pressure distribution means 4a to another shape such as a rectangle, a polygon or an ellipse. However, by arranging the ventilation member 4 so as to gradually decrease from the central part 4b to the peripheral part 4c, the total opening area of these through holes is directed from the central part 4b to the peripheral part 4c. It is also possible to make it gradually smaller.

Next, a vacuum bonding method using such a vacuum bonding apparatus will be described in the order of steps.
First, as shown by a two-dot chain line in FIG. 1A, when the upper and lower chambers 5a and 5b are moved apart in the vertical direction and opened, they are accurately aligned and temporarily fixed by the work conveying means from the outside in the previous process. The two plate-like workpieces A and B are carried into a predetermined position between the flexible sheet 1 and the surface plate of the smooth member 2.

  In this state, suction is started from the first space S1 already formed behind the flexible sheet 1 through the ventilation path 5d, whereby the upper surface (back surface) of the flexible sheet 1 is placed on the ventilation member 4. The flexible sheet 1 is kept in close contact with the lower surface so as not to hang down due to gravity.

After the plate-like workpieces A and B are carried in, the upper and lower chambers 5a and 5b start to move as shown by the solid lines in FIG. 1A, and the upper and lower chambers 5a and 5b move the annular seal portion 5c. Is blocked through.
Suction is started through the ventilation path 5e from the second space S2 in which the plate-like workpieces A and B are placed after the closing or immediately before, and a predetermined degree of vacuum is obtained.

  Thereafter, as shown in FIG. 1 (b), the gas supply means 3 is operated to supply gas such as compressed air to the first space S1 through the ventilation path 5d, and the internal pressure rises between the second space S2. As the pressure difference occurs, the gas flows into the upper surface (back surface) of the flexible sheet 1 through a plurality of through holes corresponding to the pressure distribution means 4 a of the ventilation member 4.

At this time, the plurality of through holes of the pressure distribution means 4a are arranged so that the opening area gradually decreases from the central part 4b of the ventilation member 4 toward the peripheral part 4c. Even if there is a partial bias in the gas supplied toward the gas, a ratio set in advance while the gas from the gas supply means 3 passes through the through holes of the pressure distribution means 4a of the ventilation member 4. The pressure based on the passage ratio acts on each part of the flexible sheet 1 and expands and deforms.
Thereby, the flexible sheet 1 expands while being held in a certain shape.

  In the illustrated example, as shown in FIG. 2, the through holes of the pressure distribution means 4 a are arranged so that the respective opening areas are reduced concentrically around the central portion 4 b of the ventilation member 4. As shown by the solid line in (b), the flexible sheet 1 expands and deforms into a substantially spherical shape. First, the sheet center portion 1a of the flexible sheet 1 abuts against and presses against the center portion of the upper plate-like workpiece A. From there, as shown by the two-dot chain line in FIG.

Thereby, even if bubbles are mixed between the plate-like workpieces A and B, the bubbles are pushed out from the center of the workpiece toward the peripheral portion, and the entire flexible sheet 1 that can be elastically deformed is plate-like. The workpieces A and B are pressed toward the smooth surface 2a above the smooth member 2, and the plate-like workpieces A and B are uniformly pressed along the smooth surface 2a.
At this time, the heating element 6 provided on the flexible sheet 1 itself or the ventilation member 4 and the heating element 7 provided on the surface plate of the smoothing member 2 are heated, and between the plate-like workpieces A and B. The interposed sealing material C is heated and cured.
Thereby, the plate-like workpieces A and B are bonded together in a vacuum state, and bubbles remaining between them can be removed.

After such a bonding process is completed, the second space S2 is opened to the atmosphere, and the upper and lower chambers 5a and 5b are moved away from each other while releasing the expansion and deformation of the flexible sheet 1 by suction from the first space S1. Is started, and the plate-like workpieces A and B that have been pasted together are carried out by the workpiece conveying means.
Thereafter, the above-described operation is repeated.

  In Example 2, as shown in FIGS. 3A and 3B, the vacuum laminating apparatus of the present invention replaces the vacuum laminating apparatus with the flexible sheet 1 and the surface plate of the smooth member 2. In addition, there is provided work holding means (not shown) for detachably holding the two plate-like works A and B carried in by the work conveying means, and the plate-like works A and B held by these are positioned mutually. Unlike the first embodiment shown in FIGS. 1 to 2, the configuration that is a vacuum substrate laminating apparatus such as a liquid crystal display, in which the two are crushed and pasted to a predetermined gap, and the other configurations are illustrated. 1 is the same as the first embodiment shown in FIG.

  As the work holding means, an electrostatic chuck, a suction chuck, an adhesive chuck, or a combination thereof is used.

  In the illustrated example, either one or both of the upper and lower chambers 5a and 5b are arranged so as to be movable in the horizontal (XYθ) direction, the upper plate-like workpiece A is held on the flexible sheet, and the upper portion of the smooth member 2 is After the lower plate-like workpiece B is held on the smooth surface 2a, the upper and lower chambers 5a and 5b are adjusted and moved relatively in the XYθ direction after the surrounding second space S2 reaches a predetermined degree of vacuum. Thus, rough alignment and fine alignment are sequentially performed as alignment between the two plate-like workpieces A and B.

  Thereafter, as described above, the flexible sheet 1 is inflated and deformed into a predetermined shape by the pressure difference between the first space S1 and the second space S2, and the upper plate-like workpiece A is placed in the vacuum via the sealing material C. The two plate-like workpieces A and B are overlapped on the lower plate-like workpiece B, and then the atmospheric pressure is generated inside and outside the two plate-like workpieces A and B by opening the second space S2 in which these are accommodated to the atmosphere. The space between B is pressurized to a predetermined gap, and the sealing material C is cured and bonded in this pressurized state.

  Accordingly, the second embodiment shown in FIGS. 3A and 3B can obtain the same operational effects as the first embodiment described above.

  In the above-described embodiment, the vacuum bonding apparatus and the vacuum bonding method of the present invention have been described with respect to a vacuum substrate bonding apparatus such as a vacuum laminating apparatus or a liquid crystal display. Other apparatuses may be used as long as the two plate-like workpieces A and B are bonded together in a vacuum state using the flexible sheet 1.

Explanation of symbols

A, B Plate-like work C Seal material S1, S2 Space 1 Flexible sheet 1a Sheet center part 1b Sheet peripheral part 1c Frame body 2 Smooth member (surface plate)
2a Smooth surface 3 Gas supply means 4 Ventilation member 4a Pressure distribution means 4b Central part 4c Peripheral part 5a, 5b Chamber 5c Annular seal part 5d, 5e Ventilation path 6, 7 Heating element

Claims (2)

A flexible sheet (1) made of an elastic material and a smooth member (2) are provided in parallel, and due to the pressure difference between the two spaces (S1, S2) formed between the flexible sheet (1), In a vacuum laminating apparatus in which two plate-like workpieces (A, B) disposed between a flexible sheet (1) and a smooth member (2) are pressed and bonded in a vacuum state.
Gas supply means (3) for supplying a gas to the first space (S1) formed behind the flexible sheet (1) toward the flexible sheet (1), and these flexible sheets ( 1) and a gas supply means (3), and a ventilation member (4) disposed so as to cover the entire surface of the flexible sheet (1). Pressure distribution means (4a) for distributing and passing the gas from the means (3) is provided, and as the pressure distribution means (4a), a ventilation member facing the sheet central portion (1a) of the flexible sheet (1) The opening area gradually decreases from the central portion (4b) of (4) toward the peripheral portion (4c) of the ventilation member (4) facing the peripheral portion (1b) of the flexible sheet (1). A vacuum bonding apparatus characterized in that a plurality of through holes are opened. The vacuum bonding according to claim 1, wherein the through holes of the pressure distribution means (4a) are arranged so that the respective opening areas are reduced concentrically around the central part (4a) of the ventilation member (4). apparatus.

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