CN106313858A

CN106313858A - Bonding device manufacturing apparatus and bonding device manufacturing method

Info

Publication number: CN106313858A
Application number: CN201610509484.1A
Authority: CN
Inventors: 大谷义和
Original assignee: Shin Etsu Engineering Co Ltd
Current assignee: Shin Etsu Engineering Co Ltd
Priority date: 2015-07-01
Filing date: 2016-06-30
Publication date: 2017-01-11
Anticipated expiration: 2036-06-30
Also published as: KR20170004864A; TWI699582B; TW201702702A; CN106313858B

Abstract

A bonding device manufacturing apparatus and a bonding device manufacturing method are provided; the apparatus for manufacturing a bonding device which removes partial strain remaining on a lower workpiece and vacuum-bonds it to an upper workpiece in a smooth state. The upper holding member has a holding portion in which the upper workpiece remains unmovable; the lower holding member includes a floating portion provided with a mechanism for generating a separation pressure and a proximal pressure in a reverse direction from the lower workpiece, and a contact holding portion provided with a mechanism for adjusting the separation pressure and the proximity pressure. The control portion maintains the balance of the separation pressure and the proximity pressure of the floating portion with respect to the lower side holding member, and the lower work piece is supported from the lower side chuck surface in a non-contact manner. The contact portion is switched from the floating portion so that the proximity pressure is gradually increased in the separation pressure, and the lower work piece is brought into contact with the lower side chuck surface. The upper and lower holding members or either of the two holding members are moved closer to each other by the elevating drive section, and the upper workpieces held by the holding portions on the upper chuck surface are overlapped with the lower workpieces.

Description

The manufacture device of abutted equipment and manufacture method

Technical field

The present invention relates to one show relative to such as liquid crystal display (LCD), organic el display (OLED), plasma The flat faced displays (FPD) such as device (PDP), flexible display or sensor device or such as board-like in touch surface FPD or 3D (3 Dimension) plate workpiece (substrate) such as the Liquid Crystal Module such as display or e-book (LCM) or flexible printed circuit (FPC), patch Close manufacture device and the patch of the abutted equipment of another plate workpieces (substrate) such as contact panel, coverslip, coverlay or FPD The manufacture method of conjunction equipment.

Background technology

In the past, as manufacture device and the manufacture method of this abutted equipment, just like infrabasal plate overlapping device, i.e. along setting It is placed in upper board keeper and the through hole of lower board keeper, by the handing-over lifter pin of upper board and lower board It is set to move up and down, when under atmospheric pressure moving into, the upside that will carry out keeping and transporting by the arm of conveying machine people Substrate and lower board are to be utilized respectively up and down in the way of the surface of upper board keeper and lower board keeper is prominent The upside lifter pin of movement and downside lifter pin receive.Then, upside lifter pin and downside lifter pin move to opposite direction, by upper Side substrate and lower board are handover to surface (such as, the referenced patent of upper board keeper and lower board keeper respectively Document 1).

Especially, in lower board, upside is element surface, hence with the face on the downside of the arm vac sorb of conveying machine people And transport, do not interfering the position downside lifter pin vac sorb lower board by rising of this arm, from conveying machine The arm of people is handover to downside lifter pin.Afterwards, from downside lifter pin, lower board being handover to lower board keeper, vacuum is inhaled Random structure carries out action, by lower board vac sorb to lower board keeper.

Now, on lower board keeper, equalization is provided with multiple (such as 4) lifter pin through hole, and downside lifter pin leads to Cross elevating mechanism to rise from through hole and receive lower board, decline and lower board is handover to lower board keeper, it After, downside lifter pin declines further and stops at the position of readiness specified.

After joining upper board and lower board further, upper board keeper and lower board keeper are close to moving Dynamic, after being set to vacuum state in Dewar vessel between the two, overlapping upper board and lower board, fix between the two temporarily Sealing material, after becoming atmospheric pressure in Dewar vessel, by lifter pin, upper board and the lower board of laminating are handover to The arm of conveying machine people, and take out of from Dewar vessel.

Patent documentation 1: Japanese Unexamined Patent Publication 2002-229471 publication

But, in the manufacture device of this conventional abutted equipment, upper board and use in the laminating of lower board The surface opening of lower board keeper and depression have multiple lifter pin through hole and groove etc., a therefore part for lower board Decline because its deadweight, and locality is flexible and bend to concavo-convex, remaining because this locality is stretched the stress caused Fit with upper board under state.

The local stress produced in lower board before this laminating finally becomes the residual stress of substrate after fitting, Not only affect Anawgy accuracy, there is a problem in that, i.e. between upper board and lower board, produce bubble and reduce quality, Cause decrease in yield.

And, there are the following problems, and the holding part of the lower board of i.e. based on conveying machine people arm is locality line Shape rather than whole of lower board, and the holding part of the lower board of vac sorb based on downside lifter pin is local Property point-like rather than whole of lower board, therefore, under this hold mode, lower board because its deadweight and locality stretch And bend to concavo-convex.That is, the situation that lower board is handover to downside lifter pin from the arm of conveying machine people is also become respectively Occur when keeping stretches the stress-retained main cause in lower board caused because of locality, makes Anawgy accuracy further Decline and the problem of decrease in yield.

Further, there is a problem in that, i.e. in lower board, the arm of conveying machine people or downside lifter pin are contacted Position is attached with between the foreign bodies such as impurity, and other positions generation inequality, it is impossible to high accuracy laminating.

Especially, in LCD in recent years etc., substrate tends to maximize, slimming, general G8 (2200 × 2500mm) size The thickness of liquid crystal glass substrate become the thickness of 0.2mm, G11 (3000 × 3320mm) sized liquid crystal glass substrate and become 0.5mm, is very easy to flexural deformation.Further, for 4k × 2k plate or the plate such as fine plate and 3D technology from various visual angles, it is desirable to high Fine plate, requires the precision that bit errors is below 2 μm degree of TFT substrate and colour filtering chip basic board for whole plate face.

On the other hand, the fiducial marker position of the para-position carrying out laminating apparatus with the camera confirming its mark position is not Carrying out in the whole face of substrate, even if being typically the liquid crystal glass substrate of G8 size, also carrying out at 4 to 8 at its end position Alignment about place.

Therefore, if the center of glass substrate remains local stress, then utilize camera to carry out indicating the end of para-position On position, although position deviation is considerably less, but on the center of glass substrate, compared with end position at substrate each other Relative position deviation becomes big, and the precision controlling the bit errors of the liquid crystal glass substrate of G8 size at submicron is the most tired Difficult.

Summary of the invention

In order to realize this problem, the manufacture device of abutted equipment involved in the present invention is as follows, in laminating space Upside workpiece is maintained at upside holding member and downside workpiece is maintained at downside holding member, by described upside maintaining part Part and described downside holding member are relatively close to mobile, fit described upside workpiece and described downside workpiece, described abutted equipment Manufacture device be characterised by possessing: described upside holding member, be configured at described laminating space and have installation freely Keep the upside card card of described upside workpiece；Described downside holding member, is configured at described laminating space and has installation certainly Keep as described in the smooth downside card card of downside workpiece；Lifting drive division, make described upside holding member or described under In the holding member of side any one or both be relatively close to mobile come overlapping described upside workpiece and described downside workpiece；And control Portion processed, does not carry out action control, described upside to described upside card card, described downside card card and described elevation actuating part Holding member has described upside workpiece and is retained as irremovable maintaining part, and described downside holding member has: float portion, Possess between the workpiece of described downside, produce reciprocal separating pressure and the mechanism close to pressure respectively；And contact keeps Portion, possesses the described separating pressure of adjustment and the described mechanism close to pressure, and described control portion is carried out as follows control, relative to described Downside holding member makes to float the described separating pressure in portion and the described balance close to pressure, institute described in the workpiece holding of described downside State downside workpiece be supported by non-contactly in the way of from the chuck edema over the face of described downside, from described float portion switch to described in connect Touch maintaining part, make described close to pressure compare described separating pressure be gradually increased and described downside workpiece touched be maintained at described Downside card card, by described lifting drive division make any one in described upside holding member or described downside holding member or Both is relatively close to mobile, by described maintaining part be maintained at the described upside workpiece of described upside card card with described under Side workpiece is overlapping.

And the manufacture method of abutted equipment involved in the present invention is following method, by upside workpiece in laminating space Be maintained at upside holding member and downside workpiece is maintained at downside holding member, by described upside holding member with described under Side holding member is relatively close to mobile, fit described upside workpiece and described downside workpiece, the manufacture method of described abutted equipment It is characterised by, including: keep operation, described upside workpiece is maintained at the upside card card of described upside holding member, will Described downside workpiece is maintained at the smooth downside card card of described downside holding member；And bonding process, by making on described In side holding member or described downside holding member any one or both be relatively close to mobile come overlapping described upside workpiece And described downside workpiece, in described holding operation, make described downside workpiece keep by floating relative to described downside holding member Separating pressure that the portion of rising produces to opposite direction between the workpiece of described downside respectively and close to the balance of pressure, with under described The mode that side chuck edema over the face rises supports described downside workpiece non-contactly, then, makes described close to pressure by contact maintaining part Compare described separating pressure to be gradually increased, make described downside workpiece contact and remain cannot move with described downside card card, In described bonding process, overlapping described upside workpiece and described downside workpiece.

Accompanying drawing explanation

Fig. 1 is the integrally-built explanation manufacturing device representing the abutted equipment involved by embodiments of the present invention Figure, Fig. 1 (a) is upside workpiece vertical section front view when moving into, and Fig. 1 (b) is the vertical section front view during work delivery of upside.

Fig. 2 is the integrally-built explanation manufacturing device representing the abutted equipment involved by embodiments of the present invention Figure, Fig. 2 (a) is downside workpiece vertical section front view when moving into, vertical section front view when Fig. 2 (b) is overlap.

Fig. 3 is the integrally-built explanation manufacturing device representing the abutted equipment involved by embodiments of the present invention Figure, Fig. 3 (a) is the vertical section front view after laminating, and Fig. 3 (b) is abutted equipment vertical section front view when taking out of.

Fig. 4 is the integrally-built explanation manufacturing device representing the abutted equipment involved by embodiments of the present invention Figure, Fig. 4 (a) is the cross-sectional top view of Fig. 2 (a), and Fig. 4 (b) is the cross-sectional top view of Fig. 3 (b).

Fig. 5 is the explanatory diagram of the variation manufacturing device representing the abutted equipment involved by embodiments of the present invention, Fig. 5 (a) is upside workpiece vertical section front view when moving into, and Fig. 5 (b) is the vertical section front view during work delivery of upside.

Fig. 6 is the explanatory diagram of the variation manufacturing device representing the abutted equipment involved by embodiments of the present invention, Fig. 6 (a) is downside workpiece vertical section front view when moving into, vertical section front view when Fig. 6 (b) is overlap.

Fig. 7 is the explanatory diagram of the variation manufacturing device representing the abutted equipment involved by embodiments of the present invention, Fig. 7 (a) is the vertical section front view after laminating, and Fig. 7 (b) is abutted equipment vertical section front view when taking out of.

The manufacture device of A-abutted equipment, holding member on the upside of 1-, card card on the upside of 11-, 11a-maintaining part, protect on the downside of 2- Holding parts, card card on the downside of 21-, 21a-contacts maintaining part, and 22-floats portion, and 23-positions guiding element, and 3-lifts drive division, and 4-moves into Parts, 41-moves into face, and 43-floats conveying unit, and 44-transports guiding element, and 5-takes out of parts, and 51-takes out of face, 6-chamber, and 61-comes in and goes out Mouthful, 7-control portion, S1-fits space, S2-space outerpace, workpiece on the upside of W1-, workpiece on the downside of W2-, W-abutted equipment.

Detailed description of the invention

Hereinafter, with reference to the accompanying drawings embodiments of the present invention are described in detail.

As shown in Fig. 1～Fig. 7, the manufacture device A of the abutted equipment W involved by embodiments of the present invention and manufacture method In, upside holding member 1 is arranged opposite with downside holding member 2 in laminating space S 1, upside workpiece W1 is maintained at upside and protects Hold parts 1, downside workpiece W2 is maintained at downside holding member 2.Afterwards, by making upside holding member 1 or downside maintaining part Any one or both relative movement in part 2, under air atmosphere or reduced atmosphere, upside workpiece W1 and downside workpiece W2 weight Folded, with gap laminating (bonding) of regulation.

And, in the laminating of this workpiece, preferably after upside workpiece W1 terminates relative to para-position with downside workpiece W2, carry out The laminating of upside workpiece W1 and downside workpiece W2.In the laminating of this workpiece, preferably can adjust the laminating space S 1 of decompression with Workpiece W1 and downside workpiece W2 on the upside of vacuum laminating.

Especially, in the laminating of the workpiece of laminating space S 1, preferably by upside workpiece W1 and downside workpiece W2 to laminating sky Between S1 move into, and be handover to respectively upside holding member 1 keep with downside holding member 2.Further, preferably at laminating sky Between the abutted equipment W terminated that fits in S1 taken out of from laminating space S 1, afterwards, by repeating aforementioned activities, make many continuously Individual abutted equipment W.

Now, the manufacture device A of the abutted equipment W involved by embodiments of the present invention becomes for making abutted equipment The vacuum workpiece laminating apparatus of W.

If describing in detail, the manufacture device A of the abutted equipment W involved by embodiments of the present invention wants as main composition Part possesses: upside holding member 1, is configured at laminating space S 1 and keeps upside workpiece W1；Downside holding member 2, is configured at patch Close space S 1 and keep downside workpiece W2；Lifting drive division 3, makes any one in upside holding member 1 or downside holding member 2 Or both moves and workpiece W1 and downside workpiece W2 on the upside of overlap in the way of being relatively close to or separating.

In addition, it is preferably provided with: move into parts 4, at least moves into downside workpiece W2 to laminating space S 1；Take out of parts 5, Abutted equipment W laminating terminated takes out of to outside space S 2 from laminating space S 1；Chamber 6, is formed with laminating space S 1；And control Portion 7 processed, to upside holding member 1, downside holding member 2, lifting drive division 3, moves into parts 4 and takes out of parts 5 etc. and enter respectively Row action control.

It addition, as shown in Fig. 1～Fig. 7, upside workpiece W1 and downside workpiece W2 is typically configured to the most opposed, I.e. workpiece laminating direction, direction overlapping with downside workpiece W2 for upside workpiece W1 is referred to as " Z-direction ".To intersect along with Z-direction Upside workpiece W1 and downside workpiece W2 binding face direction be referred to as " XY direction ".

Abutted equipment W is the laminal structure that multiple component parts such as such as FPD or sensor device etc. is assembled integrally Body.

In the case of the concrete such as example shown in Fig. 1～Fig. 7 of abutted equipment W, upside workpiece W1 be by LCM or The rectangular thin plate that FPC etc. are constituted.Downside workpiece W2 is by the contact panel thinner than upside workpiece W1 or coverslip or coverlay etc. The rectangular thin plate constituted, by bond by the way of workpiece W1 on the upside of covering, constituting FPD or sensor device etc..

Preferably by quantitative discharge nozzles such as point gum machines, sealing material (not shown) is applied to upside workpiece W1 and downside work In the binding face being made up of face etc. on part W2 any one or both.As this sealing material, it is preferably used by absorbing purple The light energy of outside line etc. carries out overlapping and solidifies and manifest the photocuring of UV curable optical clear resin (OCR) etc. of caking property Type binding agent.

The space surrounded by described sealing material is filled with the inclosure material (not shown) of liquid crystal etc..

Further, as other examples although not shown but it also may change as follows, i.e. fit thinner than downside workpiece W2 upper Side workpiece W1, or use the thermohardening type binding agent or the mixing cured type of two liquid overlapped and solidify by the inspiration row of thermal energy Binding agents etc. are as described sealing material thus replace light-cured type binding agent, or do not comprise described sealing material or described inclosure material And directly fit workpiece each other.

Upside holding member 1 and downside holding member 2 such as will not be answered because of the steel body of metal or pottery etc. by being formed as The flat surface plates of the thickness that power (bending) deforms etc. are constituted, and have card card on the upside of the most opposed these 11 with smooth downside card card 21.

Upside holding member 1 and downside holding member 2 are arranged to upside card card 11 with downside card card 21 at laminating sky Between S1 parallel to each other.

The upside card card 11 of upside holding member 1 has maintaining part 11a, is removed by described later in described maintaining part 11a Enter the upside workpiece W1 that parts 4 move into be retained as installing freely and cannot move.

As maintaining part 11a of upside card card 11, use absorption affinity based on vacuum suction or based on adhering to the viscous of material Attached power or electrostatic adsorption force or these combination etc..It is configured to by these being configured to throughout the most whole upside card card 11 Planar or be distributed multiple respectively in whole upside card card 11, even if laminating space S 1 be depressurized to vacuum, it is possible to no Upside workpiece W1 is made to drop and continue to keep.

Also, it is preferred that upside holding member 1 is in addition to upside card card 11, also has and moved into by aftermentioned for holding Upside workpiece W1 that parts 4 are moved into also is handover to the connecting mechanism 12 of upside card card 11 from downside described later card card 21.Hand over Connection mechanism 12 is made up of lifter pin or other structures, and has for moving into, with by described later, the upside workpiece that parts 4 are moved into W1 is close and carries out keeping and is handover to the handing-over drive division 12a of upside card card 11.

As the concrete example of connecting mechanism 12, in the case of example as shown in FIG. 1 to 3, use and move certainly to Z-direction As lifter pin 12b, as shown in Fig. 1 (b), decline lifter pin 12b front end face install freely absorption keep on the upside of work The non-binding face (above) of part W1.Afterwards, as shown in Fig. 2 (a), made on lifter pin 12b by the action of handing-over drive division 12a Rise, and make the non-binding face of upside workpiece W1 contact with upside card card 11.Meanwhile, switch to based on maintaining part 11a Workpiece keeps, it is possible to carry out the handing-over of upside workpiece W1.

In the case of illustrated example, lifter pin 12b is multiple by the configuration of every predetermined distance along XY direction, utilizes connecting member 12c Making the integration of these ends, all of lifter pin 12b is configured to by handing-over drive division 12a via connecting member 12c to Z side To moving back and forth freely.

Further, as other examples, it is also possible to connecting mechanism 12 is changed to other structures, thus replaces lifter pin 12b.

The smooth downside card card 21 of downside holding member 2 has: floats portion 22, parts 4 of moving into described later moves into Downside workpiece W2 support non-contactly as moving in the mode floated from downside card card 21；And contact maintaining part 21a, Contact and remain installation freely and cannot move with downside card card 21.

The portion 22 that floats of downside card card 21 uses the ejection power of gas or ultrasonic wave power etc..Float portion 22 to be configured to, Opposed space between downside card card 21 and the non-binding face of downside workpiece W2, produces from card card 21 side, downside the most simultaneously Separating pressure to workpiece W2 side, downside and opposite to that from card card 21 side, downside workpiece W2 lateral downside close to pressure. That is, float portion 22 and possess generation separating pressure and the mechanism close to pressure, by keeping described separating pressure and described close to pressure The balance of power, between downside card card 21 and downside workpiece W2 to Z-direction formed air film 22a, on the downside of maintenance workpiece W2 from The contactless state that downside card card 21 floats.

As floating the concrete example in portion 22, in the case of the example as shown in Fig. 1～Fig. 7, the plate being made up of porous material The porous layer 22b stratification of shape is in the surface of downside card card 21.By spraying to downside workpiece W2 from whole porous layer 22b Gas and while producing described separating pressure, by from the small multiple suction holes (not shown) being opened in porous layer 22b Carry out vacuum suction and produce described close to pressure.

Contact maintaining part 21a uses absorption affinity based on vacuum suction or electrostatic adsorption force or these combination etc..Contact Maintaining part 21a possesses adjustment based on described separating pressure and the mechanism of the described balance close to pressure floating portion 22.If in detail Illustrating, contact maintaining part 21a is adjusted based on floating the described separating pressure in portion 22 and described close pressure by control portion 7 described later The balance of power, by compared with described separating pressure described be gradually increased close to pressure in the way of carry out action control.Thus, air The thickness of film 22a is the most thinning, and the non-binding face of downside workpiece W2 successfully arrives the surface of downside card card 21, by described Close to pressure contact keep on the downside of workpiece W2 and make it to move.

As the concrete example of contact maintaining part 21a, in the case of the example as shown in Fig. 1～Fig. 7, gradually decrease from whole The flow of the gas that porous layer 22b sprays to downside workpiece W2 and while suppressing described separating pressure, maintain or increase from opening It is located at the vacuum suction that the small multiple described suction hole of porous layer 22b is carried out.

Further, as other examples although not shown but it also may change as follows, i.e. on the surface one of downside card card 21 The ultrasonic probe of body stacking tabular replaces porous layer 22b, is carried out the air on the surface of ultrasonic probe based on super by energising The periodic compression of sound wave releases with compression, while thus producing described separating pressure, by from being opened in ultrasonic probe Small multiple suction holes carry out vacuum suction and produce described close to pressure.

And, any one or upside holding member 1 and downside in upside holding member 1 or downside holding member 2 keep Parts 2 the two is movably supported by Z-direction, makes upside holding member 1 and downside maintaining part by lifting drive division 3 Part 2 moves in the way of being relatively close to or separating.

Lifting drive division 3 is made up of actuator etc..Lifting drive division 3 is carried out as follows action control by control portion 7 described later System, i.e. make in upside holding member 1 or downside holding member 2 any one or both be relatively close to Z-direction mobile, with Make upside workpiece W1 and downside workpiece W2 via coated in these binding faces or the two described sealing material each other Overlapping.

As the concrete example of lifting drive division 3, in the case of the example as described in Fig. 1～Fig. 7, make upside holding member 1 Decline to downside holding member 2.

Further, as other examples although not shown but it also may change as follows, i.e. make downside holding member 2 rise Holding member 1 on the upside of replacement, or make upside holding member 1 and the movement closer to each other of downside holding member 2 the two, or make upside Holding member 1 in rotary moving and invert and opposed with downside holding member 2 towards Z-direction, make afterwards on the upside of holding member 1 or under In side holding member 2 any one or both be relatively close to Z-direction mobile.

Moving into parts 4 is that the workpiece moving into upside workpiece W1 and downside workpiece W2 to laminating space S 1 from space outerpace S2 is removed Enter to use transport mechanism.

As moving into parts 4, have in the way of the move into face 41 smooth from it floats and transport upside workpiece W1 non-contactly With the floating conveyance mode, utilize workpiece W1 and downside workpiece W2 on the upside of conveying machine people (not shown) conveyance of downside workpiece W2 Robot transports mode, utilizes workpiece W1 and downside workpiece W2 conveyer belt conveyance mode etc. on the upside of conveyer (not shown) conveyance. These float conveyance mode or robot transports and has in mode or conveyer belt conveyance mode etc. from space outerpace S2 to laminating sky Between S1 make face of moving into 41 or described conveying machine people or described conveyer etc. by close to or separation in the way of move move into driving Dynamic portion 42.

Especially, when moving into parts 4 for floating conveyance mode, preferably there is smooth face of moving into 41 and with upside workpiece W1 and Downside workpiece W2 floats conveying unit 43 from move into that the state that face 41 floats transports non-contactly.

Move into moving into of parts 4 to be made up of actuator etc. with drive division 42.Move into drive division 42 by control described later Portion 7 is carried out as follows action control, when i.e. moving into upside workpiece W1 and downside workpiece W2, makes face of moving into 41 or described conveying machine people Or described conveyer etc. to the downside card card 21 of downside holding member 2 to X-direction or Y-direction etc. close to mobile.Move into upside After workpiece W1 and downside workpiece W2, make face of moving into 41 or described conveying machine people or described conveyer etc. from downside holding member The downside card card 21 of 2 is to the separate mobile such as X-direction or Y-direction.

And, float conveyance mode moves in parts 4, and smooth face of moving into 41 is supported to the X intersected with Z-direction Direction or Y-direction etc. move back and forth freely, and have make upside workpiece W1 and downside workpiece W2 with from moving into the side that face 41 floats Formula supports non-contactly to be moved into floating portion 41a for can move.

Move into floating the ejection power of portion 41a use gas or ultrasonic wave power etc., moving into face 41 and downside workpiece W2's Opposed space between non-binding face, produce the most simultaneously from move into workpiece W2 side, lateral downside, face 41 separating pressure and and this On the contrary from downside workpiece W2 laterally move into side, face 41 close to pressure.It is configured to by keeping these separating pressures and close to pressure The balance of power, forms air film 41b to Z-direction moving between face 41 and downside workpiece W2, and on the downside of holding, workpiece W2 is from moving into The state that face 41 floats.

As moving into floating portion 41a of use gas ejection power, there is " Bernouilly type " and " porous type ".

In " Bernouilly type ", keep upside work non-contactly by the pressure differential of the air film 41b of negative pressure Yu air atmosphere Part W1 and downside workpiece W2.If describing in detail, in " Bernouilly type ", by giving vent to anger from moving into lateral downside, face 41 workpiece W2 side spray Body and the air film 41b of negative pressure that formed and the pressure differential of air atmosphere, move downside workpiece W2 to face of moving into 41 side.As it does so, If the narrower intervals of the air film 41b of negative pressure and pressure steeply rises, then push away downside workpiece W2, and keep air film 41b's Pressure equalizes.Thus, need to spray substantial amounts of gas when keeping non-contactly.

And in " porous type ", by spraying gas from whole porous layer to downside workpiece W2, produce described separating pressure While, produce described close to pressure by carrying out vacuum suction from the multiple suction holes (not shown) being opened in porous layer.

Accordingly, as moving into the concrete example floating portion 41a, as shown in Fig. 1～Fig. 7, compared with described " Bernouilly type ", The moment ejection flow preferably employing gas at least can form air film 41b between upside workpiece W1 and downside workpiece W2, And can make upside workpiece W1 and downside workpiece W2 from move into face 41 float described in " porous type ".

Float moving in parts 4 of conveyance mode, float conveying unit 43 have holding with by move into float portion 41a from Move into upside workpiece W1 and the operating mechanism (not shown) etc. of downside workpiece W2 that the mode that face 41 floats is supported by non-contactly.

This operating mechanism uses actuator etc., and is configured to movably be supported by along the XY direction moving into face 41.

And, operating mechanism has by workpiece W1 and downside workpiece W2 on the upside of the overall holdings such as attraction or local holding The chuck segment (not shown) of the end of side workpiece W1 and downside workpiece W2.Operating mechanism is configured to float (floating from moving into face 41 Go out) state to X-direction or Y-direction etc. move and be handover to downside holding member 2 downside card card 21.

As moving into the concrete example of parts 4, in the case of the example as shown in Fig. 1～Fig. 7, by moving into drive division 42 Make face of moving into 41 close mobile to X-direction towards the downside card card 21 of downside holding member 2.By floating conveying unit 43 by upper Side workpiece W1 and downside workpiece W2 floats conveyance successively to X-direction, moves into the downside card card 21 of downside holding member 2.

Further, as other examples although not shown but it also may change as follows, i.e. will be based on moving into drive division 42 The moving direction in face of moving into 41 and the direction of moving into of upside workpiece W1 and downside workpiece W2 be changed to the direction beyond X-direction, Or do not make upside workpiece W1 and downside workpiece W2 from move into face 41 float and utilize move into parts 4 to laminating space S 1 move into, or Use the conducts such as described conveying machine people or described conveyer to move into parts 4, thus replace floating conveyance mode.

Taking out of parts 5 is that the workpiece that abutted equipment W laminating terminated from laminating space S 1 takes out of to outside space S 2 is removed Go out to use transport mechanism.

As taking out of parts 5, have in the same manner as moving into parts 4 in the way of floating from the face of taking out of 51 and transport patch non-contactly The robot floating conveyance mode, utilizing conveying machine people (not shown) to transport abutted equipment W of conjunction equipment W transports mode, profit Conveyer belt conveyance mode etc. with conveyer (not shown) conveyance abutted equipment W.These float conveyance mode or robot conveyance Mode or conveyer belt conveyance mode etc. have from space outerpace S2 to laminating space S 1 make the face of taking out of 51 or conveying machine people with What mode that is close or that separate moved takes out of with drive division 52.

Especially, when taking out of parts 5 for floating conveyance mode, preferably there is the smooth face that takes out of 51 and with from the face of taking out of 51 The mode floated transports the taking out of with floating conveying unit 53 of abutted equipment W non-contactly.

Take out of taking out of of parts 5 to be made up of actuator etc. with drive division 52.Take out of with drive division 52 by control described later Portion 7 is carried out as follows action control, i.e. after the laminating of upside workpiece W1 and downside workpiece W2, will take out of face 51 or described transporter Device people or described conveyer etc. are close mobile to X-direction or Y-direction etc. towards the downside card card 21 of downside holding member 2.Remove After going out abutted equipment W, make the face of taking out of 51 or described conveying machine people or described conveyer etc. from the downside of downside holding member 2 Card card 21 is to the separate mobile such as X-direction or Y-direction.

As taking out of the concrete example of parts 5, in the case of the example as shown in Fig. 1～Fig. 7, by taking out of with drive division 52 Make the face of taking out of 51 close mobile towards the downside card card 21 of downside holding member 2 to X-direction from space outerpace S2.By taking out of With floating conveying unit 53, abutted equipment W is floated conveyance from the downside card card 21 of downside holding member 2, towards the face of taking out of 51 with Point-blank take out of with moving into direction.

Further, as other examples although not shown but it also may change as follows, will be based on taking out of with drive division 52 The direction that takes out of of the moving direction and abutted equipment W that take out of face 51 is changed to the direction beyond X-direction, or will be based on moving into parts The workpiece of 4 is moved into direction and is taken out of direction based on the workpiece taking out of parts 5 and bend to predetermined angular to XY θ direction, maybe will move into Parts 4 are integrated with taking out of parts 5 and move into the opposite direction in direction to workpiece and take out of, or are changed to not make abutted equipment W from removing Appear 51 to float and utilize and take out of parts 5 and take out of, or use described conveying machine people or described conveyer etc. as taking out of parts 5, thus replace floating conveyance mode.

Further, preferably laminating space S 1 is formed at the inside of pressure-variable chamber 6, divides space outerpace by the wall of chamber 6 S2, the laminating space S 1 in chamber 6 is equipped with upside holding member 1 and downside holding member 2.

Chamber 6 has: gateway 61, by moving into parts 4 and taking out of parts 5 and make upside workpiece W1 and downside workpiece W2 lead to Cross；Opening and closing drive division 62, opening and closing gateway 61；And pressure use drive division 6a, by for pressing the space S 1 of fitting Compressors etc. are constituted.

And, in upside holding member 1 or downside holding member 2 any one or both possess detection be labeled in advance Position detection parts (not shown) such as mark on the workpiece W1 and downside workpiece W2 of upside or the camera in corner etc. and make upside keep Any one in parts 1 or downside holding member 2 is relative to another to the para-position of XY θ direction relative movement with drive division (not Diagram).Gone out portion by described position and make described para-position drive division action according to output, by make upside holding member 1 and under Side holding member 2, to XY θ direction relative movement, makes upside workpiece W1 and downside workpiece W2 para-position on XY θ direction.

If describing in detail, under air atmosphere, by moving into parts 4 from space outerpace S2 to the laminating space in chamber 6 S1 moves into upside workpiece W1 and downside workpiece W2 respectively, carries out upside workpiece W1 and downside workpiece in the laminating space S 1 pressed through The para-position on XY θ direction is carried out while the overlap of W2.Afterwards, under air atmosphere, by taking out of parts 5 by upside workpiece The abutted equipment W that the laminating of W1 and downside workpiece W2 terminates takes out of to outside space S 2 from laminating space S 1.

As the concrete example of chamber 6, in the case of the example as shown in Fig. 1～Fig. 7, it is configured to be equipped with in chamber 6 The tegmental wall 63 of upside holding member 1 can be split to Z-direction relative to the diapire 64 being equipped with downside holding member 2.By with The mode being relatively close to Z-direction or separate moves back and forth, and laminating space S 1 is configured to opening and closing freely and becomes sealing structure.Logical Cross opening and closing drive division 62 make the tegmental wall 63 of chamber 6 from diapire 64 to Z-direction separate time, make input path as gateway 61 61a with take out of road 61b opening while, make upside holding member 1 move with downside holding member 2 relative separation.

It is thus possible to it is enough with an opening and closing drive division 62 driving source to be constituted chamber 6 and lifting drive division 3.

And, downside holding member 2 is movably supported by XY θ direction relative to the diapire 64 of chamber 6, downside work Part W2 by the action of described para-position drive division and via downside holding member 2 be maintained at the upper of upside holding member 1 Side workpiece W1 para-position on XY θ direction.

Further, as other examples although not shown but it also may change as follows, i.e. divided by making to Z-direction Any one in chamber 6 is configured to opening and closing freely and becomes sealing structure, or the part at chamber 6 towards another reversion Opening and closing door freely is set, and is configured to laminating space S 1 opening and closing and freely and becomes sealing structure, thus replace the segmentation of chamber 6 Formula, or utilize different driving sources to constitute opening and closing drive division 62 and the lifting drive division 3 of chamber 6, or make upside holding member 1 Downside workpiece W2 para-position on XY θ direction of upside workpiece W1 and downside holding member 2.

Control portion 7 is maintaining part 11a with upside holding member 1, the handing-over drive division 12a of connecting mechanism 12, downside Holding member 2 float portion 22, lifting drive division 3, move into moving into drive division 42 and floating conveying unit 43, take out of of parts 4 The taking out of with drive division 52 and take out of with floating the controller that conveying unit 53 is electrically connected of parts 5.And, control portion 7 also with Opening and closing drive division 62 and the described transformation drive division of chamber 6, it is used for making upside workpiece W1 and downside workpiece W2 to XY θ direction The described para-position drive division of relative movement, make the electrical connections such as the curing mechanism that described sealing material solidifies.

Become the controller in control portion 7 according to being pre-set in the program of its control circuit (not shown), to preset Time point carry out action control the most respectively.

If describing in detail, such as shown in Fig. 1 (a) or Fig. 5 (a), control portion 7 is carried out as follows action control, i.e. the going out of chamber 6 Entrance 61 (input path 61a) carries out opening operation by opening and closing drive division 62 (lifting drive division 3), makes the patch in chamber 6 Close space S 1 and become air atmosphere.

In this case, control portion 7 is carried out as follows action control, i.e. makes with drive division 42 by moving into moving into of parts 4 Move into the downside card card 21 close to downside holding member 2 such as face 41 or conveying machine people, by floating conveying unit 43 or conveyance Robots etc. make upside workpiece W1 be removed towards the downside card card 21 under air atmosphere by gateway 61 (input path 61a) Enter.

Afterwards, as shown in Fig. 1 (b) or Fig. 5 (b), control portion 7 is carried out as follows action control, i.e. by connecting mechanism 12 Upside workpiece W1 is handover to the upside card card 11 of upside holding member 1 by handing-over drive division 12a, utilizes maintaining part 11a to protect Hold as moving.

Then, as shown in Fig. 2 (a) or Fig. 6 (a), control portion 7 is carried out as follows action control, i.e. by floating conveying unit 43 Or conveying machine people etc. makes downside workpiece W2 utilize conveyance guiding element 44 to pass through while space outerpace S2 carries out position limitation Entrance 61 (input path 61a) is moved into towards the downside card card 21 under air atmosphere.

Now, upside workpiece W1 and downside work are made even with any one floated in conveying unit 43 or conveying machine people etc. Part W2 moves into the downside card card 21 to downside holding member 2, is also carried out as follows action control, i.e. upside workpiece W1 and downside work Part W2 first passes through and floats portion 22 and be supported to non-contactly to move in the way of floating from smooth downside card card 21.

It follows that be carried out as follows action control, i.e. from float portion 22 switch to contact maintaining part 21a, downside workpiece W2 with Downside card card 21 contacts and is retained as moving.

Afterwards, as shown in Fig. 2 (b) or Fig. 6 (b), control portion 7 is carried out as follows action control, and the gateway 61 of chamber 6 (is removed Enter path 61a) carry out shutoff operation by opening and closing drive division 62 (lifting drive division 3), started by pressure drive division 6a Laminating space S 1 in chamber 6 is reduced pressure.

With this substantially simultaneously, lifting drive division 3 is utilized to make upside holding member 1 and downside holding member 2 be relatively close to move Dynamic.It is carried out as follows control at this time point, i.e. makes upside holding member 1 or downside holding member by described para-position drive division Any one in 2 to the whole movement of XY θ, carries out the para-position (alignment) of upside workpiece W1 and downside workpiece W2 relative to another.

After this para-position terminates, control portion 7 is carried out as follows control, i.e. utilizes lifting drive division 3 to make the upper of upside holding member 1 The downside card card 21 of side card card 11 and downside holding member 2, further to movement, is maintained at the upper of upside card card 11 Side workpiece W1 with contact the downside workpiece W2 being maintained at downside card card 21 among each other to Z-direction across described sealing material and Described inclosure overlapping material.

At the end of aforesaid para-position, it is carried out as follows control, i.e. utilizes pressure drive division 6a laminating space S 1 to be decompressed to Vacuum or the atmosphere of calming the anger close to vacuum, make upside workpiece W1 overlapping to Z-direction with downside workpiece W2 under vacuum.

Then, as shown in Fig. 3 (a) or Fig. 7 (a), control portion 7 is carried out as follows action control, and the gateway 61 of chamber 6 (is removed Outlet 61b) carry out opening operation by opening and closing drive division 62 (lifting drive division 3), make the laminating space S 1 in chamber 6 with outer Headroom S2 connects and becomes air atmosphere.

Therefore, by atmospheric pressure, upside workpiece W1 is flattened into specified gap with downside workpiece W2 and become abutted equipment W.

Afterwards, as shown in Fig. 3 (b) or Fig. 7 (b), control portion 7 makes to take out of with drive division 52 by taking out of taking out of of parts 5 Face 51 or conveying machine people etc. are close to the downside card card 21 of downside holding member 2.Afterwards, it is carried out as follows action control, the most logical Crossing to take out of makes abutted equipment W (be taken out of by gateway 61 from downside card card 21 with floating conveying unit 53 or conveying machine people etc. Road 61b) taken out of to outside space S 2.

And, the program of the control circuit being set in control portion 7 is illustrated as the manufacture method of abutted equipment W.

The manufacture method of the abutted equipment W involved by embodiments of the present invention includes as master operation: keep operation, Upside workpiece W1 is maintained at the upside card card 11 of upside holding member 1 and downside workpiece W2 is maintained at downside maintaining part The smooth downside card card 21 of part 2；And bonding process, by any one in upside holding member 1 or downside holding member 2 Or both is relatively close to mobile, workpiece W1 and downside workpiece W2 on the upside of overlap.

In addition, as the front operation of holding operation, preferably include to move into operation, from space outerpace S2 to being configured at patch Upside card card 11 utilization of the upside holding member 1 closing space S 1 is moved into parts 4 and is moved into upside workpiece W1, to being configured at laminating Smooth downside card card 21 utilization of the downside holding member 2 of space S 1 is moved into parts 4 and is moved into downside workpiece W2.

And, keep in operation, relative to downside holding member 2, by floating portion 22 to float from downside card card 21 Mode non-contactly support utilize move into parts 4 be moved to fit space S 1 downside workpiece W2, then, used by pressure Before laminating space S 1 decompression is terminated by drive division 6a, downside workpiece W2 contact is made to be maintained at downside by contact maintaining part 21a Card card 21.

In bonding process, make any one court in upside holding member 1 or downside holding member 2 by lifting drive division 3 It is relatively close to Z-direction mobile to another, or makes upside holding member 1 and downside holding member 2 the two each other to Z-direction It is relatively close to mobile.Thus, after the pressure of laminating space S 1 based on pressure drive division 6a terminates, make upside workpiece W1 Across described sealing material or described inclosure overlapping material or workpiece is directly made each other to Z-direction among each other with downside workpiece W2 Overlapping.

Manufacture device A according to the abutted equipment W involved by this embodiments of the present invention and manufacture method, based on In the moving into etc. of conveying machine people, even if downside workpiece W2 remains because locality is stretched the stress caused, it is possible to by floating Portion 22 supports downside workpiece W2 from downside card card 21 in the way of floating non-contactly.Thus, released downside workpiece W2's Local stress, downside workpiece W2 becomes the smooth state of the smooth downside card card 21 along downside holding member 2.

Then, the downside workpiece W2 of smooth state is made to contact with downside card card 21 and be protected by contact maintaining part 21a Hold as moving.

Afterwards, lifting drive division 3 by control portion 7 make upside holding member 1 or downside holding member 2 in one or this Two are relatively close to mobile.Thus, the downside workpiece W2 of smooth state is maintained at upside card card 11 with by maintaining part 11a Upside workpiece W1 can be overlapping without deviation ground, position.

Remain in the local stress of downside workpiece W2 therefore, it is possible to remove and fit with upside workpiece W1 with smooth state.

Its result, with lower board keeper surface opening cave in have multiple lifter pin through hole or groove etc. with Past keeper is compared, and has the surface of downside holding member 2 and does not has the depression of lifter pin through hole or groove etc. and smooth Downside card card 21, thus without a part of workpiece W2 on the downside of occurring, because of its deadweight, locality is stretched and it is concavo-convex to bend to Situation.Thereby, it is possible to workpiece W1 and the Anawgy accuracy of downside workpiece W2 on the upside of Ti Gaoing.Meanwhile, even rigidity is relatively low Ultra-thin plate workpiece (substrate), it is also possible to prevent binding face between upside workpiece W1 and downside workpiece W2 from producing bubble, Can carry out not having alveolate uniform laminating.

And, the arm of conveying machine people or downside lifter pin can not contact plate workpiece (substrate) and carry out plate workpiece The conveyance of (substrate).Therefore, it is possible to prevent from adhering to the foreign bodies such as impurity, no because of arm or the downside lifter pin of contact conveying machine people Inequality is produced, it is possible to carry out highly uniform laminating between meeting and other positions.

As its concrete example, even with the liquid crystal glass that thickness is 0.2mm of existing alignment method laminating G8 size Glass substrate, it is also possible to the bit errors of upside workpiece W1 and downside workpiece W2 is improved to sub-micrometer precision, yield rate can be realized Raising.

Especially, be preferably provided with to laminating space S 1 at least move into downside workpiece W2 move into parts 4, upside holding member 1 And downside holding member 2 is provided to the inside of pressure-variable chamber 6, chamber 6 has makes to move into opening and closing that parts 4 pass through going out freely Entrance 61.

Now, under air atmosphere, open the gateway 61 of chamber 6, by moving into parts 4, downside workpiece W2 is moved into down The downside card card 21 of side holding member 2.Afterwards, when closing gateway 61 and chamber 6 having been carried out pressure, pass through Make in upside holding member 1 or downside holding member 2 any one or both be relatively close to mobile, under atmosphere of calming the anger, flat The downside workpiece W2 of sliding state is overlapping with upside workpiece W1.

Therefore, it is possible under vacuum laminating eliminate residual local stress smooth state downside workpiece W2 with Upside workpiece W1.

Its result, in vacuum or close to workpiece W2 and upside workpiece W1 on the downside of laminating under the atmosphere of calming the anger of vacuum, therefore can Enough it is reliably prevented air and is mixed into upside workpiece W1 and the faying surface of downside workpiece W2 from laminating space S 1.Thereby, it is possible to prevent Due to bubble enter on the upside of workpiece W1 and the faying surface of downside workpiece W2 and the uneven situation of locality generation specified gap, energy Enough make the abutted equipment W of higher quality.

Have float conveying unit 43 also, it is preferred that move into parts 4, at least in the way of move into face 41 smooth from it floats Workpiece W2 on the downside of conveyance non-contactly.

Now, by moving on the downside of parts 4 to major general, workpiece W2 is when downside holding member 2 is moved into, and utilization floats conveyance Portion 43 transports downside workpiece W2 in the way of floating from the smooth face of moving into 41 moving into parts 4 non-contactly.Thus, downside work Will not produce local stress in a part of part W2, downside workpiece W2 is handover to downside holding with smooth (emersion) state that floats The downside card card 21 of parts 2.

The local stress of downside workpiece W2 is remained in and with smoother state and upside work therefore, it is possible to remove further Part W1 fits.

Its result, remains a part of of lower board with by the arm of conveying machine people or the vac sorb of lifter pin Under the state of local stress, the conventional situation of handing-over is compared, it is not necessary to conveying machine people or lifter pin, therefore, it is possible to actually Do not has under irregular state workpiece W2 on the downside of transporting.Thus, even if downside workpiece W2 to be maintained at the smooth of downside holding member 2 Downside card card 21, locality stress will not remain the most completely, on the upside of laminating during workpiece W1 and downside workpiece W2, it is possible to realize Uniform and high-precision laminating in binding face.

And, move into according to based on conventional conveying machine people, be difficult to glass or plastics that conveyance thickness is several 10um Film, especially cannot transport the large-scale thin bases such as G8 size.But, based on the removing of downside workpiece W2 floating conveying unit 4b Entering, not using conveying machine people or lifter pin to be capable of directly moving into, even if not using the support of auxiliary or fixture also can Enough directly to fit slim substrate each other in high precision.

[embodiment 1]

Then, with reference to the accompanying drawings various embodiments of the present invention are illustrated.

As shown in Fig. 1 (a), Fig. 1 (b)～Fig. 4 (a), Fig. 4 (b), the abutted equipment W's involved by embodiments of the invention 1 Manufacturing in device A, that moves into that parts 4 have employed that aforesaid workpiece floated conveyance floats conveyance mode, and is provided with workpiece Location guiding element rather than aforesaid robot based on conveying machine people conveyance mode.

If describing in detail, moving into parts 4 and there is conveyance guiding element 44, based on float in the work transporting of conveying unit 43 with on Side workpiece W1 contacts with downside workpiece W2, edge and the direction intersected based on the work transporting direction (X-direction) floating conveying unit 43 (Y-direction) carries out spacing.

Preferably conveyance guiding element 44 with become the Y side that X-direction based on the work transporting direction floating conveying unit 43 is intersected Upwards the interval configuration across the width dimensions being roughly equivalent to upside workpiece W1 and downside workpiece W2 is multiple.

In the case of configuring multiple conveyance guiding element 44, when being preferably based on the work transporting floating conveying unit 43, conveyance is made to lead In part 44 any one or both to the direction (Y-direction) intersected with work transporting direction (X-direction) close to mobile, workpiece is removed During standby beyond sending, make any one or both separate mobile in conveyance guiding element 44.

In example shown in Fig. 1 (a), Fig. 1 (b)～Fig. 4 (a), Fig. 4 (b), conveyance guiding element 44 is pair of guide rails.Make by floating Play conveying unit 43 with from moving into upside workpiece W1 and the end of downside workpiece W2 that the state that face 41 floats is transported non-contactly Directly or indirectly contact respectively with a pair conveyance guiding element 44.Thus, upside workpiece W1 and downside workpiece W2 will not be to Y-direction position Deviation, and it is directed to the fixed position of the downside card card 21 of downside holding member 2.

In the case of illustrated example, the end of upside workpiece W1 and downside workpiece W2 is made to transport leading for a pair of guiding element 44 with becoming The sliding contact respectively of the medial surface of rail.

Further, as other examples although not shown, but following various change can be carried out, i.e. by becoming conveyance guiding element 44 The medial surface configuration rotary body such as roller of guide rail reduce the frictional resistance with workpiece, or the medial surface pair of a guide rail from which The gas of workpiece blowing pressurized air etc., pushes workpiece to the medial surface of another guide rail, or incites somebody to action as conveyance guiding element 44 is additional The stop that workpiece positions to X-direction.

The downside card card 21 of downside holding member 2 have with utilization move into parts 4 float that conveying unit 43 moves into upper Side workpiece W1 contacts with downside workpiece W2 and carries out spacing determining along work transporting direction (X-direction) and crisscross (Y-direction) Position guiding element 23.

Location guiding element 23 is by the guide rail 23a along a pair configuration of Y-direction and the stop 23b etc. that positioned to X-direction by workpiece Constitute.

Preferably a pair of guide rail 23a move into parts 4 based on when floating the work transporting of conveying unit 43, remove to workpiece respectively Send crisscross (Y-direction) in direction (X-direction) close to mobile, during standby beyond work transporting, make it be individually separated movement, And it is standby in the position of the movement not interfering upside holding member 1 based on lifting drive division 3.

In example shown in Fig. 1 (a), Fig. 1 (b)～Fig. 4 (a), Fig. 4 (b), make and transport what the guide rail of guiding element 44 equally constituted Pair of guide rails 23a with by floating conveying unit 43 with from moving into the upside workpiece W1 that the state that face 41 floats is transported non-contactly Directly or indirectly contact respectively with the end of downside workpiece W2.Thus, upside workpiece W1 and downside workpiece W2 will not be to Y-direction position Put deviation, and be directed to the fixed position of the downside card card 21 of downside holding member 2.

Stop 23b highlights or is absorbed in and is arranged on downside card card 21 freely, is connect by the X-direction front end face with workpiece Touch and position.

According to the manufacture device A of the abutted equipment W involved by this embodiments of the invention 1, by floating conveying unit 43 On the downside of major general workpiece W2 from the face of moving into 41 moving into parts 4 to downside holding member 2 float conveyance time, with conveyance guiding element 44 and Location guiding element 23 contacts successively, and the direction (Y-direction) that edge and work transporting direction (X-direction) are intersected positions.

Therefore, it is possible to downside workpiece W2 to be floated exactly the assigned position transported to downside holding member 2.

Its result, has the advantage that, it is possible to increase the Anawgy accuracy of upside workpiece W1 and downside workpiece W2, and makes Make the abutted equipment W of higher quality.

Further, in the manufacture method of the abutted equipment W involved by embodiments of the invention 1, as described bonding process Rear operation, takes out of parts 5 from laminating sky including being utilized by the abutted equipment W that the laminating of upside workpiece W1 and downside workpiece W2 terminates Between S1 take out of operation to what outside space S 2 took out of.

Described take out of in operation, abutted equipment W is kept from downside with floating conveying unit 53 by taking out of taking out of of parts 5 The downside card card 21 of parts 2 takes out of to outside space S 2 towards the face that takes out of 51 taking out of parts 5 with float state.

Float the face that takes out of 51 taking out of parts 5 of conveyance mode in the same manner as moving into parts 4, have to float from the face of taking out of 51 The mode risen supports the taking out of with floating portion 51a of abutted equipment W non-contactly.Take out of with the ejection floating portion 51a use gas Power or ultrasonic wave power etc., be formed to Z-direction in the opposed space of the face of taking out of 51 and the downside workpiece W2 of abutted equipment W and take out of use Air film 51b, and it is configured to the state keeping abutted equipment W to float from the face of taking out of 51.

According to the manufacture method of the abutted equipment W involved by this embodiments of the invention 1, upside in laminating space S 1 After the laminating of workpiece W1 and downside workpiece W2 terminates, float with the state floated from the face that takes out of 51 taking out of parts 5 and take out of patch Close the abutted equipment W terminated.

Therefore, even if especially downside workpiece W2 is laminal substrate as thin film, the upside workpiece W1 fitted with Downside workpiece W2 also will not locality stretch and both relative positions deviations or generation stress, and the precision when keeping laminating Taken out of under state.

Therefore, it is possible to by the abutted equipment W of the downside workpiece W2 of film like of having fitted to keep higher position precision laminating State take out of.

Its result, compared with the conventional method taken out of by conveying machine people or lifter pin, it is possible to make higher quality Abutted equipment W.

[embodiment 2]

As shown in Fig. 5 (a), Fig. 5 (b)～Fig. 7 (a), Fig. 7 (b), the abutted equipment W's involved by embodiments of the invention 2 Manufacture in device A, as the connecting mechanism 12 of upside holding member 1, by upside holding member 1 or downside holding member 2 Any one or both be relatively close to mobile, upside workpiece W1 is handover to structure and Fig. 1～Fig. 4 of upside card card 11 Shown embodiment 1 is different.Structure in addition is identical with the embodiment 1 shown in Fig. 1～Fig. 4.

If describing in detail, in embodiment 2, as the connecting mechanism 12 of upside holding member 1, replace shown in Fig. 1～Fig. 3 Lifter pin 12b, as shown in Fig. 5 (b) and Fig. 6 (a), makes upside holding member 1 and downside holding member 2 by lifting drive division 3 Be relatively close to mobile, by by downside holding member 2 float portion 22 with by the way of floating from downside card card 21 non-contactly The upside workpiece W1 being kept keeps float state to be handover to maintaining part 11a of upside card card 11 with planar.

Also, it is preferred that maintaining part 11a becoming the upside card card 11 of handing-over destination is configured to by inhaling based on negative pressure The absorption affinity drawn and adhesion or electrostatic adsorption force combine, and upside workpiece W1 keeps the smooth planar along upside card card 11 Structure rather than Fig. 1～Fig. 3 shown in locality as lifter pin 12b keep.

Control portion 7, when the handing-over of the upside workpiece W1 shown in Fig. 5 (b), makes upside holding member by lifting drive division 3 1 or downside holding member 2 in any one towards another close to mobile.Thus, with maintaining part 11a in chuck face, upside 11 with By float portion 22 from the non-laminating plane-plane contact of the upside workpiece W1 that downside card card 21 floats by the way of carry out action control.

After the upside card card 11 of upside holding member 1 contacts with workpiece W1 face, upside, switch to based on maintaining part 11a Workpiece keep, it is possible to workpiece W1 on the upside of handing-over.

Then, as shown in the double dot dash line of Fig. 5 (b) and Fig. 6 (a), by lifting drive division 3 make upside holding member 1 or Any one in the holding member 2 of downside, from another separate mobile, it is possible to move into follow-up downside workpiece W2.

In example shown in Fig. 5 (a), Fig. 5 (b)～Fig. 7 (a), Fig. 7 (b), the opening and closing drive division 62 of chamber 6 drives with lifting Dynamic portion 3 is made up of a driving source.The tegmental wall 63 being made chamber 6 by opening and closing drive division 62 is used to close movement of diapire 64 Entrance 61 (input path 61a) carries out shutoff operation, with this substantially simultaneously, makes upside card card 11 by lifting drive division 3 Maintaining part 11a keeps with the non-laminating plane-plane contact of upside workpiece W1.Thus, workpiece W1 in upside is with from downside card card 21 states floated are handover to maintaining part 11a of upside card card 11.

Further, as other examples although not shown but it also may be opening and closing drive division 62 and the lifting drive division 3 of chamber 6 It is made up of the most independent driving source, and based on the opening and closing pass of the gateway 61 (input path 61a) of the chamber 6 of drive division 62 Closed operation is unrelated, by lifting drive division 3 make upside holding member 1 close to mobile maintaining part 11a to chuck face, upside 11 with Position from the non-laminating plane-plane contact of the upside workpiece W1 that downside card card 21 floats.

Manufacture device A according to the abutted equipment W involved by this embodiments of the invention 2 and manufacture method, under utilization The portion 22 that floats of side holding member 2 makes to float the upside workpiece W1 holding float state that (emersion) keeps from downside card card 21 The upside card card 11 of upside holding member 1 it is handover to planar.

Therefore, it is possible to upside workpiece W1 to be handover to upside holding member 1 when entirely without local stress Upside card card 11.

Its result, has the advantage that, it is possible to increase the Anawgy accuracy of upside workpiece W1 and downside workpiece W2, and makes more The abutted equipment W of high-quality.

And, as the connecting mechanism 12 of upside holding member 1, also have the advantage that, as shown in FIG. 1 to 3 By running through the tegmental wall 63 of chamber 6, compared with utilizing the embodiment 1 moving lifter pin 12b freely to Z-direction, it is not necessary in chamber Between tegmental wall 63 and the lifter pin 12b of room 6, the seal members such as o-ring are set, it is possible to simplify connecting mechanism 12 and the knot of chamber 6 Structure.

It addition, in the front embodiment shown, utilize connecting mechanism 12 will move into the upper of (floating conveyance) by moving into parts 4 Side workpiece W1 is handover to the upside card card 11 of upside holding member 1, and utilizing maintaining part 11a to remain cannot move, but not It is defined in this, it is also possible to be changed to connecting mechanism 12 and maintaining part 11a aforementioned float portion and contact in upside holding member 1 Maintaining part.

Now, upside holding member 1 has: float portion, possess produce respectively between the workpiece W1 of upside reciprocal Separating pressure and the mechanism close to pressure；And contact maintaining part, possess adjustment separating pressure and the mechanism close to pressure.

Thus, even if the stress caused because locality is flexible in upside workpiece W1 residual owing to moving into parts 4 grade, logical Cross float portion support non-contactly in the way of floating from upside card card 11 upside workpiece W1.Therefore, upside workpiece has been released The local stress of W1, upside workpiece W1 becomes the smooth state of the smooth upside card card 11 along upside holding member 1.Connect , make the upside workpiece W1 of smooth state contact and remain cannot move with upside card card 11 by contact maintaining part.Cause This, it is possible to remove and remain in the local stress of upside workpiece W1 and be maintained at upside card card 11 with smooth state.

Further, in the front embodiment shown, as moving into parts 4 and taking out of parts 5, have employed and workpiece is floated the floating of conveyance Play conveyance mode, but be not limited to this, it is also possible to parts 4 or take out of in parts 5 one will be moved into or the two is changed to Robot conveyance mode or conveyer belt conveyance mode.

Claims

1. a manufacture device for abutted equipment, is maintained at upside holding member and by downside in laminating space by upside workpiece Workpiece is maintained at downside holding member, is relatively close to mobile by described upside holding member and described downside holding member, patch Closing described upside workpiece and described downside workpiece, the device that manufactures of described abutted equipment is characterised by possessing:

Described upside holding member, is configured at described laminating space and has to install and keep the upside of described upside workpiece freely Card card；

Described downside holding member, is configured at described laminating space and has to install and keep the smooth of described downside workpiece freely Downside card card；

Lifting drive division, make in described upside holding member or described downside holding member any one or both be relatively close to Mobile next overlapping described upside workpiece and described downside workpiece；And

Control portion, does not carry out action control to described upside card card, described downside card card and described elevation actuating part,

Described upside holding member has described upside workpiece and is retained as irremovable maintaining part,

Described downside holding member has: float portion, possesses and produces reciprocal separation respectively between the workpiece of described downside Pressure and the mechanism close to pressure；And contact maintaining part, possess the described separating pressure of adjustment and the described mechanism close to pressure,

Described control portion is carried out as follows control: float the described separating pressure in portion and the described balance close to pressure described in holding, Institute is supported non-contactly relative to described downside holding member in the way of described downside workpiece is from the chuck edema over the face of described downside State downside workpiece, float portion switch to described contact maintaining part from described, make described close to pressure compare described separating pressure by Cumulative big and described downside workpiece is touched is maintained at described downside card card, makes described upside protect by described lifting drive division Hold in parts or described downside holding member any one or both be relatively close to mobile, be maintained at by described maintaining part The described upside workpiece of described upside card card is overlapping with described downside workpiece.

The manufacture device of abutted equipment the most according to claim 1, it is characterised in that

The device that manufactures of described abutted equipment possesses the parts of moving at least moving into described downside workpiece to described laminating space, institute State upside holding member and described downside holding member be provided to the inside of chamber of pressure-variable, described chamber have make described Move into opening and closing that parts pass through gateway freely.

The manufacture device of abutted equipment the most according to claim 2, it is characterised in that

Described parts of moving into have and at least transport non-contactly in the way of described downside workpiece floats from its smooth face of moving into Float conveying unit.

The manufacture device of abutted equipment the most according to claim 3, it is characterised in that

Described parts of moving into have in based on the described work transporting floating conveying unit at least with described downside absorption surface also Carrying out spacing conveyance guiding element along with the direction intersected based on the described work transporting direction floating conveying unit, described downside keeps The described downside chuck mask of parts has and is at least moved into described downside absorption surface that parts move into by described and removed along workpiece Send direction and crisscross carry out spacing location guiding element.

5. a manufacture method for abutted equipment, is maintained at upside holding member and by downside in laminating space by upside workpiece Workpiece is maintained at downside holding member, is relatively close to mobile by described upside holding member and described downside holding member, patch Closing described upside workpiece and described downside workpiece, the manufacture method of described abutted equipment is characterised by, including:

Keep operation, described upside workpiece is maintained at the upside card card of described upside holding member, by described downside workpiece It is maintained at the smooth downside card card of described downside holding member；And

Bonding process, by make in described upside holding member or described downside holding member any one or both dock mutually Nearly mobile next overlapping described upside workpiece and described downside workpiece,

In described holding operation, holding separates pressure to opposite direction generation by floating portion between the workpiece of described downside respectively Power and the balance close to pressure, keep relative to described downside in the way of described downside workpiece is from the chuck edema over the face of described downside Parts support described downside workpiece non-contactly, then, make described compare close to pressure described separate pressure by contact maintaining part Power is gradually increased, and makes described downside workpiece contact and remain cannot move with described downside card card,

In described bonding process, overlapping described upside workpiece and described downside workpiece.

The manufacture method of abutted equipment the most according to claim 5, it is characterised in that including:

Taking out of operation, the described abutted equipment laminating of described upside workpiece and described downside workpiece terminated is by taking out of parts Take out of to space outerpace from described laminating space,

Take out of in operation described, with keep from described take out of parts take out of edema over the face state described abutted equipment is taken out of To described space outerpace.