KR20170004864A - Bonding device manufacturing apparatus and bonding device manufacturing method - Google Patents

Abstract

A lower work is bonded to an upper work in a smooth state that residual partial distortion is removed. An upper maintenance member has a maintenance unit maintained to prevent the upper work from moving. A lower maintenance member includes a floating part having a means for generating a separation pressure and an approach pressure between the lower maintenance member and the lower work in an opposite direction, and a contact maintenance part having a means for controlling the separation pressure and the approach pressure. A control part controls the balance between the separation pressure and the approach pressure of the floating part with respect to the lower maintenance member, such that the lower work is supported in a non-contact type, thereby floating from a low bonding surface. When the floating part switches to the contact maintenance part and the separation pressure is slowly increased rather than the approach pressure, the lower work makes contact with the lower bonding surface. When an elevation driving part moves the upper and/or lower maintenance member to be closed to each other, the upper work maintained on the upper bonding surface by the maintenance part overlaps the lower work.

Description

TECHNICAL FIELD [0001] The present invention relates to a manufacturing apparatus and a manufacturing method of a bonding device,

The present invention can be applied to a flat panel display (FPD) or sensor device such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP), a flexible display, Such as a touch panel, a cover glass, a cover film, or an FPD, to a plate-like work (substrate) such as a liquid crystal module (LCM) or a flexible printed wiring board (FPC) Substrate), and a method of manufacturing an integration device.

Conventionally, as a manufacturing apparatus and a manufacturing method of this type of bonding device, lift pins for transferring the upper substrate and the lower substrate are provided so as to be vertically movable along the through holes provided in the upper substrate holder and the lower substrate holder respectively , The upper substrate and the lower substrate held and held by the arms of the carrier robot are moved upward and downward by the upper side lift pins and the lower side lift pins so as to protrude from the surfaces of the upper substrate holder and the lower substrate holder at the time of carry- . Thereafter, the upper lift pin and the lower lift pin move in opposite directions to transfer the upper substrate and the lower substrate to the upper surface of the upper substrate holder and the lower substrate holder, respectively (see, for example, Patent Document 1 ).

Particularly, since the lower side of the lower substrate is the element surface, the lower side of the substrate is vacuum-absorbed by the lower lift pin which is conveyed while being vacuum-absorbed by the arm of the carrier robot and raised at a position not interfering with the arm, And transferred from the arm of the robot to the lower lift pin. Thereafter, the lower substrate is transferred from the lower lift pin to the lower substrate holding port, and the vacuum adsorption mechanism operates to vacuum-adsorb the lower substrate to the lower substrate holding port.

At this time, a plurality of (for example, four) through-holes for the lift pins are uniformly provided in the lower substrate holding port, and the lower lift pins are lifted from the through holes by the lift mechanism to receive the lower substrate, To the lower substrate holding port, and then the lower side lift pin is further lowered to stop at a predetermined standby position.

After the transfer of the upper substrate and the lower substrate, the upper substrate holder and the lower substrate holder are moved to approach each other, the vacuum container between them is evacuated, and then the upper substrate and the lower substrate are superimposed to each other, After the vacuum container is at atmospheric pressure temporarily, the upper substrate and the lower substrate bonded to each other are transferred to the arm of the transport robot by the lift pins and taken out from the vacuum container.

Patent Document 1: JP-A-2002-229471

However, in such a conventional apparatus for producing an aligning device, since the through holes or grooves for the plurality of lift pins are recessed and opened on the surface of the lower substrate holding tool used for bonding the upper substrate and the lower substrate, Is partially pressed and contracted by its own weight to warp into a concavo-convex shape, and the distortions due to the partial elongation and shrinkage are remnantly adhered to the upper substrate.

The partial distortion generated on the lower substrate before the bonding causes the residual distortion of the substrate after the final bonding, affecting the bonding accuracy, and bubbles are generated between the upper substrate and the lower substrate, , There was a problem that the yield deteriorated.

In addition, the maintenance position of the lower substrate by the arm of the carrier robot is partially linear rather than the entire surface of the lower substrate, and the maintenance position of the lower substrate by vacuum adsorption of the lower lift pin is the entire surface of the lower substrate The lower substrate is partially expanded and contracted by its own weight to be bent into the concavo-convex shape in these holding states. That is, the transfer of the lower substrate from the arm of the carrier robot to the lower lift pin also causes the distortion due to partial elongation and shrinkage during the retention to remain on the lower substrate, resulting in a further lowering of the coupling accuracy, There was a problem.

In addition, there is also a problem in that foreign matter such as debris is attached to a portion of the lower substrate where the arm of the transfer robot comes into contact with the lower lift pin, and unevenness occurs with other portions, there was.

Particularly in recent LCDs, the substrate tends to become larger and thinner. In general, a liquid crystal glass substrate having a size of G8 (2200 x 2500 mm) has a thickness of 0.2 mm and a thickness of G11 (3000 x 3320 mm) Was 0.5 mm, and it was easy to bend and deform. In addition, it is required to have a high precision for the panel such as a 4k × 2k panel, a high definition panel and a 3D technology of a multi-view field. The alignment error between the TFT substrate and the color filter substrate is 2 μm or less Precision is required for the entire panel surface.

On the other hand, the reference mark position for performing alignment of the bonding apparatus and the camera for confirming the mark position are not made on the entire surface of the substrate, and even if it is a G8 size liquid crystal glass substrate, Alignment of about eight positions is performed from the position.

Therefore, if the partial distortion is left at the center position of the glass substrate, the positional deviation is small at the end position where the camera is to be aligned with the mark, but the relative positional deviation between the substrates at the center position of the glass substrate It is very difficult to make the alignment error of the glass substrate for liquid crystal of G8 size to a submicron accuracy.

In order to achieve the above object, an apparatus for manufacturing an alignment device according to the present invention is characterized in that the upper work is held by the upper holding member in the bonding space and the lower work is held by the lower holding member, And the upper work is detachably held by the upper work and the upper work is detachably held by the upper work, The lower holding member having a holding member, a lower holding member disposed on the coupling space and having a smooth lower side surface on which the lower work is detachably held, and a lower holding member having one of the upper holding member and the lower holding member, The upper work and the lower work being overlapped with each other, Wherein the upper holding member has a holding portion in which the upper work is held in an unmovable state, and the lower holding member holds the upper holding portion in a state in which the upper holding portion is in contact with the lower holding portion, A floating portion provided with a means for generating a separation pressure and an approaching pressure in the opposite direction between the upper work and the lower work and a contact holding portion provided with means for adjusting the spacing pressure and the approaching pressure, Wherein the control unit controls the lower work to balance the separation pressure and the approach pressure of the lifting unit with respect to the lower holding member so that the lower work is floated from the lower side, The contact pressure is changed to the contact holding portion so that the approach pressure is gradually increased higher than the separation pressure, Wherein the upper work and the lower work are held in contact with each other so that the upper and lower workpieces are relatively moved by either the upper holding member or the lower holding member, So that the lower work is overlapped.

Further, in the method of manufacturing the coupling device according to the present invention, the upper work is held by the upper holding member and the lower work is held by the lower holding member in the conjugate space, and the lower work is held by the lower holding member And the lower work is held on a smooth lower side surface of the lower holding member so that the lower work is held on the lower side surface of the upper holding member, And a laminating step of laminating the upper work and the lower work by relative movement of either one of the upper holding member or the lower holding member or both of the upper holding member and the lower holding member, And the lower holding member is supported by the lifting portion on the lower side The upper and lower workpieces are held in contact with each other in a noncontact manner so that the lower workpiece is lifted from the lower cervical surface, and then the approaching pressure is lower than the separation pressure And the lower work is brought into contact with the lower side surface to be immovable so that the upper work and the lower work overlap each other.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view showing an overall configuration of an apparatus for manufacturing an alignment device according to an embodiment of the present invention, wherein (a) is a longitudinal end elevation view at the time of transferring an upper work, and (b) is a longitudinal end elevation view at the time of upper work transfer;
Fig. 2 is an explanatory view of the same, wherein (a) is a longitudinal end elevational view at the time of lower work carrying-in and (b) is a longitudinal front elevational view at the time of superposition.
Fig. 3 is an explanatory view of the same; Fig. 3 (a) is a longitudinal top view after bonding, and Fig. 3 (b) is a front elevational view of a terminal at the time of carrying out the coupling device;
Fig. 4 is an explanatory view of the same, and Fig. 4 (a) is a transverse plan view of Fig. 2 (a) and Fig. 4 (b) is a transverse plan view of Fig.
Fig. 5 is an explanatory view showing a modified example of the apparatus for producing an alignment device according to the embodiment of the present invention, wherein (a) is a longitudinal end elevation view at the time of transferring the upper work and (b) is a longitudinal end elevation at the time of upper work transfer.
Fig. 6 is an explanatory view of the same. Fig. 6 (a) is a longitudinal top view at the time of lower work carry-in, and Fig. 6 (b) is a longitudinal front elevational view at the time of superposition.
Fig. 7 is an explanatory diagram of the same; Fig. 7 (a) is a longitudinal top view after bonding, and Fig. 7 (b) is a longitudinal front elevational view at the time of carrying out the coupling device.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

The manufacturing apparatus A and the manufacturing method of the binding device W according to the embodiment of the present invention are the same as the manufacturing apparatus A of the binding apparatus W of the first embodiment except that the upper holding member 1 and the lower holding member 2 are opposed to each other to hold the upper workpiece W1 on the upper holding member 1 and the lower workpiece W2 on the lower holding member 2. [ Thereafter, the upper work W1 and the lower work W2 are overlapped with each other in the atmospheric or reduced-pressure atmosphere by moving either the upper holding member 1 or the lower holding member 2, As shown in Fig.

It is also preferable that the upper work W1 and the lower work W2 are engaged after the relative positioning of the upper work W1 and the lower work W2 is completed. It is preferable that the upper work W1 and the lower work W2 are bonded in a vacuum atmosphere in the bonding space S1 in which the pressure reduction is adjustable.

Particularly, the overlapping of the work in the conjugate space S1 is carried out by bringing the upper work W1 and the lower work W2 into the bonding space S1 and bringing the upper work W1 and the lower work W2 into contact with the upper holding member 1 and the lower holding member 2, Respectively. It should be noted that it is also possible to continuously produce a plurality of conjugate devices W by carrying out the above-described operations after the conjugate device W having been subjected to the fusion in the conjugate space S1 is taken out of the conjugate space S1 desirable.

In this case, the production apparatus A for producing the binding device W according to the embodiment of the present invention becomes a vacuum workpiece binding apparatus for producing the binding device W.

More specifically, an apparatus A for manufacturing an aligning device W according to an embodiment of the present invention includes an upper holding member 1 disposed in the conjugate space S1 and holding the upper work W1, A lower holding member 2 disposed in the space S1 for holding the lower work W2 and a lower holding member 2 for moving the upper holding member 1 or the lower holding member 2 so as to move relative to each other And a lifting drive section 3 for superimposing the upper work W1 and the lower work W2.

In addition to this, a carry-in member 4 for carrying at least the lower work W2 toward the conjugate space S1 and the conjugate device W for which the fusion is completed are carried out from the conjugate space S1 toward the outer space S2 The transfer member 5 and the chamber 6 in which the bonding space S1 is formed and the upper holding member 1, the lower holding member 2, the elevation driving unit 3, the carrying member 4, 5, and the like, respectively.

As shown in Figs. 1 to 7, the upper work W1 and the lower work W2 are arranged so as to face each other in the vertical direction, and are arranged in a direction in which the upper work W1 and the lower work W2 are superimposed , I.e., the work kneading direction is referred to as "Z direction ". The direction along the concave surface of the upper work W1 and the lower work W2 intersecting with the Z direction is hereinafter referred to as "XY direction".

The fusing device W is a thin plate-like structure body in which a plurality of component parts such as an FPD and a sensor device are integrally mounted.

As a specific example of the coupling device W, in the case of the examples shown in Figs. 1 to 7, the upper work W1 is a rectangular thin plate made of LCM, FPC or the like. The lower workpiece W2 is a rectangular thin plate made of a touch panel thinner than the upper workpiece W1 or a cover glass or a cover film and is adhered to cover the upper workpiece W1 to constitute an FPD or a sensor device .

It is preferable that a sealing material (not shown) is applied to one or both of the concave surfaces of the upper work W1 and the lower work W2 by a constant amount discharge nozzle such as a dispenser. As this sealing material, it is preferable to use a photo-curing type adhesive such as UV-curable optical transparent resin (OCR) which absorbs light energy such as ultraviolet rays and proceeds to polymerize and cures to exhibit adhesiveness.

A sealing material (not shown) such as a liquid crystal is filled in the space surrounded by the sealing material.

Although not shown in the other examples, the upper work W1 thinner than the lower work W2 may be bonded, or instead of the photo-curable adhesive as the sealing material, a thermosetting adhesive agent Or a two-liquid mixed curing type adhesive or the like may be used, or the work pieces may be directly bonded or changed without including the sealing material or the sealing material.

The upper holding member 1 and the lower holding member 2 are constituted by a plate or the like formed in a flat plate shape having a thickness such that it is not deformed by a rigid body such as metal or ceramics, (11) and a smooth lower side surface (21) facing each other.

The upper holding member 1 and the lower holding member 2 are provided such that the upper ridge surface 11 and the lower ridge surface 21 are parallel to each other in the conjugate space S1.

The upper barrel surface 11 of the upper holding member 1 has a holding portion 11a on which the upper work W1 carried by the carry-in member 4 to be described later is detachably and non-movably held.

As the holding portion 11a of the upper cervical surface 11, a suction force by negative pressure suction, an adhesive force by an adhesive material, an electrostatic attraction force, or a combination thereof are used. The upper workpiece W1 can be prevented from being deformed even if the bonding space S1 is reduced to a vacuum by disposing the upper workpiece W1 in a plane shape over substantially the entire upper surface 11 of the upper surface 11, So as not to fall down.

The upper holding member 1 holds the upper work W1 carried by the carry-in member 4 to be described later from the lower raster surface 21 to the upper raster surface 11, And a transfer mechanism 12 for transferring the image data to the image forming apparatus. The transfer mechanism 12 is constituted by a lift pin or other structural body and is provided with a transfer drive part 12 for approaching and holding the upper work W1 carried by the carry-in member 4 to be described later, (12a).

1 to 3, a lift pin 12b movable in the Z direction is used as a specific example of the transmitting mechanism 12, and as shown in Fig. 1 (b), the lowered lift pin 12b (Upper surface) of the upper work W1 is detachably held by suction. Thereafter, as shown in Fig. 2A, the lift pin 12b is raised by the operation of the transfer driving portion 12a, and the nip surface of the upper work W1 is brought into contact with the upper rough surface 11 . At the same time, it is switched to the work holding by the holding portion 11a, and the upper work W1 can be transmitted.

In the illustrated example, a plurality of lift pins 12b are arranged at predetermined intervals in the X and Y directions, their distal ends are integrated by a connecting member 12c, and all of the lift pins 12b are connected to each other via a connecting member 12c And the lift pin 12b is reciprocally movable in the Z direction.

As another example, it is also possible to replace the transfer mechanism 12 with another structure instead of the lift pin 12b.

The smooth lower side surface 21 of the lower holding member 2 is supported by a lifting portion 21 for supporting the lower work W2 carried by the carry-in member 4, which will be described later, (22a) and a contact holding portion (21a) which is in contact with the lower cervical surface (21) to be detachable and nonmovable.

For the lifting portion 22 of the lower cervical surface 21, an output of gas or an ultrasonic force is used. The lifting portion 22 is provided on the opposite side of the lower work surface W2 in the opposite space between the lower side surface 21 and the lower side work W2 so as to be spaced apart from the lower side surface 21 toward the lower work W2 side, W2 to the lower caster surface 21 side at the same time. That is, the lifting portion 22 is provided with a means for generating a separation pressure and an approaching pressure so that a balance between the separation pressure and the approaching pressure is set so that Z (Z) is provided between the lower cervical surface 21 and the lower work W2 And an air film 22a is formed in the lower cervical surface 21 so that the lower work W2 floats from the lower cervical surface 21 in a noncontact state.

As a specific example of the lifting portion 22, in the case of the example shown in Figs. 1 to 7, a plate-like porous layer 22b made of a porous material is laminated on the surface of the lower side 21. The gas is jetted from the whole of the porous layer 22b toward the lower work W2 so as to generate the above described separation pressure and to generate negative pressure from a small number of suction holes (not shown) provided in the porous layer 22b, And the approach pressure is generated by suction.

As the contact holding portion 21a, an attraction force or an electrostatic attraction force by negative pressure suction or a combination thereof is used. The contact holding portion 21a is provided with a means for adjusting the balance of the separation pressure and the approaching pressure by the lifting portion 22. [ More specifically, the contact holding section 21a adjusts the balance of the separation pressure and the approaching pressure by the lifting section 22 in the control section 7, which will be described later, so that the approaching pressure gradually increases . As a result, the thickness of the air film 22a becomes gradually thinner, and the nested surface of the lower workpiece W2 smoothly lands on the surface of the lower cage surface 21 so that the lower workpiece W2 can not move .

As a concrete example of the contact holding portion 21a, in the case of the example shown in Figs. 1 to 7, the flow rate of the gas ejected from the entire porous layer 22b toward the lower work W2 is gradually decreased, And at the same time, the negative pressure suction is maintained or increased from a small number of the intake holes formed in the porous layer 22b.

Although not shown as another example, plate-like small note rods are integrally laminated on the surface of the lower cervical surface 21 instead of the porous layer 22b, and air on the surface of the small note rod is ultrasonically It is possible to change the pressure to generate the above-mentioned pressure difference by generating the above-mentioned approach pressure by sucking negative pressure from a small number of intake holes formed in the small note rod.

Either one of the upper holding member 1 or the lower holding member 2 or both of the upper holding member 1 and the lower holding member 2 are supported so as to be movable in the Z direction, 3 to move the upper holding member 1 and the lower holding member 2 relative to each other or away from each other.

The lifting drive section 3 is constituted by an actuator or the like. The elevation drive unit 3 is configured to move the upper work W1 and the lower work W2 to the upper surface side so as to overlap each other through the seal material applied to one or both of them by the control unit 7 The operation control is performed so that either one of the member 1 and the lower holding member 2 or both of them move relatively to each other in the Z direction.

In the example shown in Figs. 1 to 7 as the specific example of the lifting drive section 3, the upper holding member 1 is lowered toward the lower holding member 2. [

Alternatively, instead of the upper side holding member 1, the lower side holding member 2 may be raised or both the upper side holding member 1 and the lower side holding member 2 may be moved closer to each other Or the upper holding member 1 is rotated and inverted to face the lower holding member 2 in the Z direction and then either one or both of the upper holding member 1 and the lower holding member 2 is moved in the Z direction It is also possible to move or change the relative approach.

The carrying member 4 is a carrying mechanism for bringing the upper work W1 and the lower work W2 from the outer space S2 toward the bonding space S1.

As the carry member 4, there are a float transport system in which the upper work W1 and the lower work W2 are caused to float from the smooth carry-in surface 41 in a noncontact manner, and a float transport system in which the upper work W1 A robot conveying system for conveying the upper work W1 and the lower work W2 and a conveyor conveying system for conveying the upper work W1 and the lower work W2 by a conveying conveyor (not shown). The float conveying system, the robot conveying system, the conveyor conveying system, and the like are used to convey the transfer surface 41 or the conveying robot, the conveying conveyor, and the like from the external space S2 toward the conjugate space S1, And a driving unit 42 for driving.

Particularly, when the carry-in member 4 is of the floating transfer type, the smooth carry-in surface 41 and the upward movement of the upper work W1 and the lower work W2, It is preferable to have the carry section 43.

The carry-in drive part 42 of the carry-in member 4 is constituted by an actuator or the like. The carrying-in drive unit 42 drives the carrying surface 41, the carrying robot, the carrying conveyor, and the like to the lower holding member 41, and the lower holding member 42, when the upper work W1 and the lower work W2 are carried by the control unit 7 And moves in the X direction or the Y direction toward the lower caster surface 21 of the main body 2. After the upper work W1 and the lower work W2 are carried in, the carrying surface 41 or the carrying robot or the carrying conveyor is moved from the lower side surface 21 of the lower holding member 2 in the X direction or the Y direction .

The smooth carry-in surface 41 of the carry-in conveying type carry-in member 4 is supported so as to be capable of reciprocating in the X direction or the Y direction crossing the Z direction, and the upper work W1 and the lower work W2 lifted from the carry-in surface 41 so as to be movable in a non-contact manner.

The carry-in lifting portion 41a is provided in the opposite space of the non-interlocking surface of the carry-in surface 41 and the lower work W2 from the carry-in surface 41 side to the lower work W2 and, on the contrary, the approach pressure from the lower work W2 side to the carry-in surface 41 side are generated at the same time. An air film 41b is formed in the Z direction between the carry surface 41 and the lower work W2 by balancing the separation pressure and the approach pressure so that the lower work W2 is released from the carry surface 41 And is maintained in a state where there is a possibility.

As the carry-over part 41a using the minute output of the gas, there are "Bernoulli type" and "porous type ".

The "Bernoulli-type" holds the upper work W1 and the lower work W2 in a noncontact manner due to the pressure difference between the air film 41b of negative pressure and the atmosphere. Specifically, the "Bernoulli type" includes a negative pressure air film 41b formed by ejecting a gas from the carry-in side 41 side toward the lower work W2 side, (W2) is pulled toward the carrying surface 41 side. As a result, when the distance between the negative pressure air film 41b becomes narrow and the pressure rises suddenly, the lower work W2 is pressed and released, and the balanced pressure of the air film 41b is maintained. Thereby, a large amount of gas ejection is required at the time of non-contact holding.

In addition, the "porous type" is a structure in which a gas is blown from the whole of the porous layer toward the lower work W2 to generate the above-mentioned separation pressure, and at the same time, a negative pressure suction from a plurality of suction holes (not shown) Thereby generating the approach pressure.

As a result, as shown in Figs. 1 to 7, as a specific example of the carry-over lifting portion 41a, the momentary spouting flow rate of the gas is at least higher than that of the "Bernoulli type" It is preferable to adopt the above-mentioned "porous type" in which the air film 41b is formed between the work W1 and the work W2 and the upper work W1 and the lower work W2 can be floated from the carry-in surface 41. [

In the carry-on conveying type carry-in member 4, the float carry-over section 43 includes an upper work W1 and a lower work W2, which are held in a noncontact manner so as to be floated from the carry-in surface 41 by the carry- And a handling mechanism (not shown) for gripping the wafer W.

The handling mechanism is configured to be supported so as to be movable in the X and Y directions along the carrying surface 41 by using an actuator or the like.

The handling mechanism is configured to grip the upper workpiece W1 and the lower workpiece W2 by suction or the like or to hold the upper workpiece W1 and the lower workpiece W2 partially by a chuck portion (not shown) . The handling mechanism is configured to move in the X direction or the Y direction while lifting up from the carry-in surface 41 and to be transmitted to the lower cervical surface 21 of the lower holding member 2. [

1 to 7 as a concrete example of the carry member 4, the carry-in surface 41 is moved toward the lower caster surface 21 of the lower holding member 2 by the carry-in drive unit 42 in the X direction . The upper work W1 and the lower work W2 are lifted and conveyed in the X direction sequentially by the float conveying section 43 and carried to the lower side surface 21 of the lower holding member 2. [

It is also possible to change the moving direction of the carry-in side 41 by the carry-in drive unit 42 and the carry-in direction of the upper work W1 and the lower work W2 to other than the X direction, The upper work W1 and the lower work W2 are carried by the member 4 toward the conjugation space S1 without lifting the work W from the carry face 41 or by using the carrying member 4 as the carry member 4, It is also possible to use a robot or the above conveying conveyor or the like.

The carrying-out member 5 is a carrying mechanism for taking out the work from the bonding space S1 to the outside space S2.

As the carry-out member 5, there are provided a flotation transport system in which the bonding device W is not contacted so as to leave the folding device W from the carry-out surface 51 and a flip transport system in which the bonding device W , And a conveyor conveying system for conveying the binding device W by a conveying conveyor (not shown). The float conveying system, the robot conveying system, the conveyor conveying system, and the like are provided with a carry-out drive unit 52 for moving the carry-out surface 51 or the conveying robot toward or away from the external space S2 toward the conjugate space S1 I have.

Particularly, when the carry-out member 5 is of the flotation conveying type, a smooth take-out face 51 and a carry-out float carry-over conveying section 53 for carrying out contact so as to leave the conjugate device W from the take- .

The take-out drive unit 52 of the carry-out member 5 is constituted by an actuator or the like. After the upper work W1 and the lower work W2 are knocked by the control unit 7 to be described later, the carry-out drive unit 52 moves the carry-out surface 51 or the carrying robot or the conveying conveyor etc. to the lower holding member 2 in the X direction or the Y direction or the like. After the kneading device W is taken out, the carry-out surface 51 or the conveying robot, the conveying conveyor, and the like are moved away from the lower side surface 21 of the lower holding member 2 in the X direction or the Y direction.

1 to 7 as a concrete example of the carry-out member 5, the carry-out surface 51 is moved from the outer space S2 to the lower cervical surface of the lower holding member 2 21 in the X direction. The binding device W is lifted and conveyed from the lower side surface 21 of the lower holding member 2 by the lifting and carrying unit 53 and carried out in a straight line to the carrying surface 51.

It is also possible to change the moving direction of the carry-out surface 51 by the carry-out drive part 52 and the carry-out direction of the coupling device W to a direction other than the X direction, The workpiece carrying direction and the workpiece carrying-out direction by the carrying member 5 are bent at a predetermined angle in the XYθ direction or the carrying member 4 and the carrying member 5 are unified and taken out in the opposite direction to the work carrying direction, The joining device W is changed by the member 5 so as not to float from the take-out surface 51 or the take-out member 5 is changed to use the conveying robot or the conveying conveyor in place of the float conveying method It is also possible.

The bonding space S1 is formed inside the transformable chamber 6 and is separated from the outer space S2 by the wall of the chamber 6. The bonding space S1 in the chamber 6 It is preferable to arrange the member 1 and the lower holding member 2.

The chamber 6 is provided with an entrance 61 through which the upper work W1 and the lower work W2 pass by the carry member 4 and the carry-out member 5 and an opening and closing drive unit 62 for decompression, and a compressor or the like for decompressing the conjugate space S1.

One or both of the upper holding member 1 and the lower holding member 2 may be provided with a position detecting section such as a camera for detecting marks or corner portions previously displayed on the upper work W1 or the lower work W2, (Not shown) for moving the upper holding member 1 or the lower holding member 2 relative to the other in the XY &thetas; direction. The upper and lower workpieces W1 and W2 are operated by moving the upper holding member 1 and the lower holding member 2 relatively in the X and Y directions by operating the positioning drive unit based on the output from the position detecting unit, Are aligned in the XY &thetas; direction.

More specifically, the upper work W1 and the lower work W2 are carried into the bonding space S1 in the chamber 6 from the outer space S2 by the carry-in member 4 in the atmosphere, The upper work W1 and the lower work W2 are overlapped with each other in the decompressed bonding space S1 and the positioning in the XY &thetas; direction is performed. Thereafter, the kneading device W in which the upper work W1 and the lower work W2 are completely joined by the carry-out member 5 in the atmosphere is moved from the knocking space S1 to the outer space S2 I am taking it out.

As a specific example of the chamber 6, in the case of the example shown in Fig. 1 to Fig. 7, the lid wall 63 in which the upper side holding member 1 is disposed in the chamber 6 is provided with the lower side holding member 2 And is configured to be divisible in the Z direction with respect to the bottom wall 64. And is reciprocated so as to approach or move relatively in the Z direction, whereby the kneading space S1 can be opened and closed, and the sealing structure is formed. When the lid wall 63 of the chamber 6 is separated from the bottom wall 64 in the Z direction by the opening and closing drive part 62 as the entrance opening 61, the entrance path 61a and the exit path 61b, The upper holding member 1 and the lower holding member 2 are relatively moved away from each other.

For this reason, it is also possible to constitute the opening and closing drive part 62 of the chamber 6 and the elevation driving part 3 as one driving source.

The lower holding member 2 is supported movably in the XY &thetas; direction with respect to the bottom wall 64 of the chamber 6, and the lower work (not shown) W2 are aligned in the XY &thetas; direction with respect to the upper workpiece W1 held by the upper holding member 1. [

Although not shown as another example, the chamber 6 can be opened and closed by inverting one of the chambers 6 divided in the Z direction to the other, or the chamber 6 may be configured to have a sealing structure. Alternatively, A door capable of being opened and closed can be provided on a part of the chamber 6 so that the kneading space S1 can be opened and closed and a sealing structure can be formed or the opening and closing drive part 62 and the elevation driving part 3 of the chamber 6 can be driven by another driving source Or the upper workpiece W1 of the upper holding member 1 can be aligned or changed in the XY? Direction with respect to the lower workpiece W2 of the lower holding member 2. [

The control unit 7 controls the holding unit 11a of the upper holding member 1, the transmitting driving unit 12a of the transmitting mechanism 12, the lifting unit 22 of the lower holding member 2, Out drive unit 52 of the carry-out member 5 and the carry-out float conveying unit 53 of the carry-out member 4, respectively, . The controller 7 also controls the opening and closing drive part 62 of the chamber 6 and the power supply driving part and the positioning work for moving the upper work W1 and the lower work W2 relative to each other in the XY & A driving unit, and a curing mechanism for curing the sealing material.

The controller serving as the control section 7 sequentially controls operations at predetermined timing in accordance with a preset program in its control circuit (not shown).

Specifically, as shown in Fig. 1 (a) or Fig. 5 (a), the control unit 7 controls the opening and closing drive unit 62 (the elevation driving unit 3) The entry port 61 (the inlet path 61a) is opened to control the operation to operate the bonding space S1 in the chamber 6 to become the atmospheric atmosphere.

In this state, the control unit 7 controls the carry-in surface 41 or the carrying robot to approach the lower cervical surface 21 of the lower holding member 2 by the carry-in drive unit 42 of the carry member 4 And the upper work W1 is controlled to be carried by the float return section 43 or the transfer robot through the entrance 61 (the entrance path 61a) toward the lower side 21 of the atmosphere.

Thereafter, as shown in Fig. 1 (b) or Fig. 5 (b), the control section 7 controls the upper work W1 by the transfer drive section 12a of the transfer mechanism 12, 1 to the upper cervical surface 11 and is controlled so as to be kept unmovable by the holding portion 11a.

Subsequently, as shown in Fig. 2 (a) or Fig. 6 (a), the control section 7 causes the lower work W2 to be transported from the outer space S2 by the float return section 43, And is controlled so as to be transported toward the lower caster surface 21 in the atmospheric environment through the entrance 61 (the entrance path 61a) while regulating the position by the guide 44. [

At this time, even if the upper work W1 and the lower work W2 are carried in toward the lower cervical surface 21 of the lower holding member 2 by any of the float return section 43 or the carrier robot, ) And the lower workpiece W2 are supported so as to be movable in a noncontact manner so that one end thereof floats from the lower caster surface 21 smooth by the lifting portion 22.

Next, the operation control is performed so that the contact portion 21a is switched from the lifting portion 22 and the lower work W2 is brought into contact with the lower cervical surface 21 so as to remain unmovable.

2 (b) and 6 (b), the control unit 7 controls the opening / closing drive unit 62 (the elevation driving unit 3) The inlet passage 61a is closed so that the decompression drive section 6a starts decompression of the bonding space S1 in the chamber 6. [

At substantially the same time, the upper holding member 1 and the lower holding member 2 are relatively moved by the lifting and lowering driving unit 3. At this timing, either one of the upper holding member 1 or the lower holding member 2 is adjusted and moved in the XY &thetas; direction relative to the other by the positioning driving unit so that the upper work W1 and the lower work W2 are aligned with each other.

After completion of the alignment, the control section 7 causes the elevating driving section 3 to further move the upper cervical surface 11 of the upper holding member 1 and the lower cervical surface 21 of the lower holding member 2, The upper workpiece W1 held on the upper cervical surface 11 and the lower workpiece W2 held in contact with the lower cervical surface 21 are controlled to overlap the seal material and the sealing material in the Z direction have.

At the time when the alignment is completed, the bonding space S1 is decompressed to a vacuum or a reduced-pressure atmosphere close to vacuum by the decompression driver 6a, and the upper work W1 and the lower work W2 Z direction, as shown in Fig.

3 (a) and Fig. 7 (a), the control unit 7 controls the opening / closing drive unit 62 (elevation driving unit 3) The outflow passage 61b) is opened so that the bonding space S1 in the chamber 6 is communicated with the outside space S2 so as to be in an atmospheric atmosphere.

Due to this, the upper work W1 and the lower work W2 are pressed to a predetermined gap by the atmospheric pressure to become a conjugate device W.

Thereafter, as shown in Fig. 3 (b) or Fig. 7 (b), the control unit 7 controls the carry-out surface 51 or the carrying robot or the like by the carrying out drive unit 52 of the carry- Toward the lower cervical surface (21) of the lower holding member (2). Thereafter, the kneading device W is moved from the lower cervical surface 21 through the entry / exit port 61 (carry-out path 61b) by the carry-out float lift conveyor 53 or the transportation robot, To be carried out by the user.

The program set in the control circuit of the control unit 7 will be described as a manufacturing method of the coupling device W. FIG.

The method of manufacturing the coupling device W according to the embodiment of the present invention is a method of holding the upper workpiece W1 on the upper side raster surface 11 of the upper side holding member 1, The upper work W1 and the lower work W2 are held by the holding step of holding the lower work W2 on the rack surface 21 and the relative approach movement of either one of the upper holding member 1 or the lower holding member 2, (W2) are overlapped with each other.

The upper work W1 is moved from the outer space S2 toward the upper side surface 11 of the upper side holding member 1 arranged in the conjugate space S1 by the carry member 4 And bringing the lower work W2 into the carry-in member 4 toward the smooth lower side surface 21 of the lower holding member 2 placed in the bonding space S1.

The holding step is carried out such that the lower work W2 carried into the bonding space S1 by the carry member 4 is lifted from the lower cervical surface 21 by the lifting portion 22 with respect to the lower holding member 2 And the lower work W2 is held in contact with the lower caster surface 21 by the contact holding portion 21a before the pressure reduction drive portion 6a completes the decompression of the conjugate space S1 have.

In the laminating step, either the upper holding member 1 or the lower holding member 2 is relatively moved toward the other in the Z direction by the lifting and lowering driving unit 3, or the upper holding member 1 and the lower holding member 2 Both of the holding members 2 are relatively moved toward each other in the Z direction. Thereby, after the decompression of the conjugate space S1 by the decompression drive part 6a is completed, the upper work W1 and the lower work W2 are held between the seal material and the sealing material so that the sealing material or the sealing material is sandwiched in the Z direction Or the work pieces are directly superimposed on each other.

According to the manufacturing apparatus (A) and the manufacturing method of the coupling device (W) according to the embodiment of the present invention, even if distortion due to partial expansion and contraction remains in the lower work (W2) So that the lower work W2 is lifted from the lower cervical surface 21 in the lifting portion 22 in a noncontact manner. This prevents the lower work W2 from being partially distorted and brings the lower work W2 into a smooth state along the smooth lower side surface 21 of the lower holding member 2. [

Subsequently, the lower workpiece W2 in a smoothed state is brought into contact with the lower cervical surface 21 by the contact holding portion 21a, so that the workpiece W2 can not move.

Thereafter, in the control unit 7, the elevation driving unit 3 moves one or both of the upper holding member 1 and the lower holding member 2 relatively to each other. Thereby, the lower workpiece W2 in the smoothed state and the upper workpiece W1 held by the holding portion 11a on the upper raster surface 11 can be superimposed without misalignment.

Therefore, partial strain remaining on the lower workpiece W2 can be removed, and the workpiece W1 can be bonded to the upper workpiece W1 in a smooth state.

As a result, as compared with the related art in which a plurality of through holes or grooves for lift pins are opened on the surface of the lower substrate holding tool, the lower holding member 2 can be smoothly formed without recessed portions such as through- A part of the lower workpiece W2 does not partially bend and contract due to its own weight and does not bend into the concavo-convex shape. As a result, the accuracy of fusion of the upper work W1 and the lower work W2 can be improved. At the same time, it is possible to prevent air bubbles from being generated on the coplanar surface between the upper work W1 and the lower work W2, even if the work is very thin, which has a small rigidity, .

Further, it is possible to carry the plate-like work (substrate) without bringing the arm of the carrying robot or the lower lift pin into contact with the plate-like work (substrate). This makes it possible to prevent foreign matter such as debris from being attached due to the contact of the arm of the carrying robot and the lower lift pin and to carry out highly uniform bonding without causing any unevenness with other parts.

As a specific example, even if a liquid crystal glass substrate having a thickness of G8 of 0.2 mm is adhered by a conventional aligning method, the alignment error between the upper work W1 and the lower work W2 is improved to sub- And the yield can be improved.

The upper holding member 1 and the lower holding member 2 are provided in the inside of the chamber 6 capable of being transformed And the chamber 6 preferably has an openable / closable entrance 61 through which the carry member 4 passes.

In this case, the entrance 61 of the chamber 6 is opened in the atmosphere and the lower work W2 is carried by the carry-in member 4 toward the lower cervical surface 21 of the lower holding member 2 . Thereafter, the entrance 61 is closed, and one or both of the upper holding member 1 and the lower holding member 2 is relatively moved in the state in which the chamber 6 is depressurized, The lower work W2 and the upper work W1 in the state are overlapped.

Therefore, the lower work W2 and the upper work W1 in the smoothed state where the remaining partial distortion is removed can be bonded in a vacuum atmosphere.

As a result, since the lower workpiece W2 and the upper workpiece W1 are bonded to each other in the reduced-pressure atmosphere close to vacuum or vacuum, air is supplied from the knocking space S1 to the superposed surface of the upper workpiece W1 and the lower workpiece W2 It is possible to reliably prevent contamination. As a result, bubbles enter the overlapping surfaces of the upper workpiece W1 and the lower workpiece W2 to prevent the predetermined gap from being partially uneven, and it becomes possible to manufacture a higher quality kneading device W. [

It is also preferable that the carry-in member (4) has a float return section (43) for carrying out in a noncontact manner so that at least the lower work (W2) is floated from the smooth carry-in surface (41).

In this case, when the lower work W2 is carried toward the lower holding member 2 by the carry member 4, the smooth carry-in surface 41 of the carry member 4 is moved to the float carry- So that the lower work W2 is floated. Thereby, part of the lower workpiece W2 is not partially distorted and the lower workpiece W2 is transferred to the lower side surface 21 of the lower holding member 2 in a smooth floating state.

Therefore, partial strain remaining in the lower workpiece W2 can be further removed, and the upper workpiece W1 can be bonded in a smoother state.

As a result, since the transfer robot and the lift pin are unnecessary compared with the conventional transfer robot in which partial distortion is partially transferred to a part of the lower substrate by vacuum suction of the arm or the lift pin of the transfer robot, the lower work W2 It can be carried in a substantially uneven state. Thus, even if the lower workpiece W2 is held on the smooth lower side surface 21 of the lower holding member 2, partial distortion is not completely left, and when the upper workpiece W1 and the lower workpiece W2 are engaged, So that the alignment can be uniformly performed with high accuracy.

Further, according to the conventional carrying robot, it is difficult to transport glass or plastic film having a thickness of several tens of um. In particular, in the case of a large thin substrate such as a G8 size, transportation is impossible. However, in the carrying-in of the lower work W2 by the float conveying section 4b, it is possible to realize direct carrying-in without using a conveying robot or a lift pin, and even if an auxiliary carrier or a jig is not used, Can be bonded with high accuracy.

Example  One

Next, each embodiment of the present invention will be described with reference to the drawings.

As shown in Figs. 1 (a), (b) to 4 (a) and 4 (b), the manufacturing apparatus A for producing the binding device W according to the first embodiment of the present invention is a device The present invention employs a float conveying method in which the above-described work is floated and conveyed, instead of the robot conveying method using one conveying robot, and a guide for positioning the work is provided.

The carrying member 4 is brought into contact with the upper work W1 and the lower work W2 during the work transport by the float transport section 43 and is brought into contact with the work transport direction X (Y direction) intersecting with the direction of the conveying direction (direction).

The conveying guide 44 has an interval substantially equivalent to the width dimension of the upper work W1 and the lower work W2 in the Y direction crossing the X direction which is the work carrying direction by the float conveying section 43 It is preferable to arrange a plurality of them.

When a plurality of conveying guides 44 are arranged, at the time of carrying the work by the float conveying section 43, any one or both of the conveying guides 44 are moved in the direction Y It is preferable to move one or both of the conveying guides 44 away from each other in the standby state other than the workpiece conveyance.

In the example shown in Figs. 1 (a) (b) to 4 (a) and 4 (b), the conveying guide 44 is a pair of guide rails. The end portions of the upper workpiece W1 and the lower workpiece W which float from the loading surface 41 and are brought into contact with each other by the floatation return section 43 are directly or indirectly contacted with the pair of the transport guides 44, I have to. Thereby, the upper workpiece W1 and the lower workpiece W2 are guided toward the fixed position of the lower side surface 21 of the lower holding member 2 without being displaced in the Y direction.

In the case of the illustrated example, the upper ends of the upper work W1 and the lower work W2 are in sliding contact with the inner side surfaces of the pair of guide rails serving as the transport guide 44, respectively.

Further, although not shown as another example, by arranging a rotating body such as a roller on the inner surface of the guide rail serving as the conveying guide 44, the frictional resistance with the work may be lowered, or from the inner side of one of the guide rails A gas such as compressed air is blown against the work and the work is pressed toward the inner side of the other guide rail or a stopper for positioning the work in the X direction by the transport guide 44 is added or various changes are possible .

The lower caster surface 21 of the lower holding member 2 abuts on the upper work W1 and the lower work W2 that are brought into the float conveying portion 43 of the carry member 4, And a positioning guide 23 for regulating the position in the cross direction (Y direction).

The positioning guide 23 is constituted by a pair of guide rails 23a arranged in the Y direction and a stopper 23b for positioning the work in the X direction.

The pair of guide rails 23a move toward each other in the cross direction (Y direction) in the workpiece conveying direction (X direction) at the time of carrying the workpiece by the float conveying section 43 of the carrying member 4, It is preferable that they are moved away from each other during stand-by operations other than the work transportation, and are made to stand by at a position where they do not interfere with the movement of the upper holding member 1 by the elevation driving unit 3. [

A pair of guide rails 23a configured in the same manner as the guide rails of the conveying guide 44 are supported by the float conveying section 43, Directly or indirectly, with the end portions of the upper workpiece W1 and the lower workpiece W which are floating from the carry-in surface 41 and are brought into contactless contact with each other. Thereby, the upper workpiece W1 and the lower workpiece W2 are guided toward the fixed position of the lower side surface 21 of the lower holding member 2 without being displaced in the Y direction.

The stopper 23b is provided so as to be protruded or immersed in the lower cervical surface 21 and positioned by touching the X-directional end face of the work.

According to the manufacturing apparatus A for producing the binding device W according to the first embodiment of the present invention, at least the lower work W2 is supported by the float conveying section 43 on the carry-in side 41 of the carry-in member 4 (Y direction) intersecting with the conveying guide 44 and the positioning guide 23 when the upper holding member 2 is lifted and conveyed from the lower holding member 2 to the lower holding member 2, do.

Therefore, the lower work W2 can be accurately floated to a predetermined position on the lower holding member 2. [

As a result, there is an advantage in that the precision of fusion of the upper work W1 and the lower work W2 is improved, and a higher quality fusing device W can be produced.

The manufacturing method of the coupling device W according to the first embodiment of the present invention is a manufacturing method of the coupling device W in which the upper and lower workpieces W1 and W2 are integrated And a carrying-out step of taking out the member 5 from the conjugate space S1 toward the external space S2.

The folding unit 5 of the carry-out member 5 moves the binding device W from the lower cervical surface 21 of the lower holding member 2 to the carry-out surface 5 51 to the outer space S2.

The carry-out surface 51 of the lifting and transporting type carry-out member 5 is provided with the carry-out lifting portion 51a for holding the binding device W in a noncontact manner such that the coupling device W is lifted from the carry- . The carry-out lifting section 51a uses a minute output of the gas or an ultrasonic force and is provided in the opposite space between the carry-out surface 51 and the lower work W2 of the coupling device W in the Z- Is formed so as to keep the state in which the conjugate device W floats from the carry-out surface 51.

According to the method of manufacturing the coupling device W according to the first embodiment of the present invention, after the upper work W1 and the lower work W2 are combined in the conjugate space S1, W is lifted from the carry-out surface 51 of the carry-out member 5 while being lifted.

Therefore, even if the lower work W2 is a thin plate substrate such as a film, the upper work W1 and the lower work W2, which are once joined together, partially expand and contract so that they are displaced relative to each other or distorted , And is carried out while maintaining the precision at the time of conjugation.

Therefore, the film-like lower workpiece W2 can be taken out while being combined with the high-precision positional accuracy

As a result, it is possible to manufacture a higher quality kneading device W as compared with the conventional method of carrying out by the carrying robot or the lift pin.

Example  2

As shown in Figs. 5 (a), 5 (b) and 7 (a) and 7 (b), the apparatus A for manufacturing the binding device W according to the second embodiment of the present invention is a device The configuration in which the upper workpiece W1 is transferred to the upper cervical surface 11 by either one of the upper holding member 1 or the lower holding member 2 or the relative approach movement of both of the upper holding member 1 and the lower holding member 2, Which is different from the first embodiment shown in Figs. 1 to 4. The other configurations are the same as those in the first embodiment shown in Figs.

More specifically, in the second embodiment, as the transmitting mechanism 12 of the upper holding member 1, instead of the lift pins 12b shown in Figs. 1 to 3, Figs. 5 (b) and 6 the upper side holding member 1 and the lower side holding member 2 are moved relative to each other by the lifting and lowering drive unit 3 so that the lower side surface of the lower side holding member 2 The upper workpiece W1 held in a noncontact state so as to float from the holding surface 11a of the upper side cervical surface 11 in a planar state while floating.

The holding portion 11a of the upper side cervical surface 11 to be the transfer destination is not limited to the partial holding like the lift pin 12b shown in Figs. 1 to 3 but is provided with a combination of the suction force by negative pressure suction and the adhesive force or electrostatic attraction force It is preferable to configure the upper workpiece W1 to have a smooth surface shape along the upper side surface 11.

The control unit 7 controls either the upper holding member 1 or the lower holding member 2 to move the other of the upper holding member 1 and the lower holding member 2 by the elevation driving unit 3 at the time of transmitting the upper work W1 shown in Fig. . Thereby, the holding portion 11a of the upper cervical surface 11 is controlled to be in surface contact with the nip surface of the upper work W1 floating from the lower cervical surface 21 by the lifting portion 22.

After the upper side surface 11 of the upper side holding member 1 comes into surface contact with the upper side workpiece W1, the upper side workpiece W1 is switched to the workpiece holding by the holding portion 11a so as to be able to transmit the upper side workpiece W1 .

Subsequently, as shown in the two-dot chain line in Fig. 5 (b) and Fig. 6 (a), either the upper holding member 1 or the lower holding member 2 is separated from the other So that the subsequent lower work W2 can be carried in.

In the example shown in Figs. 5 (a) to 5 (b) to 7 (a) and (b), the opening and closing drive part 62 and the elevation driving part 3 of the chamber 6 are constituted by one driving source. The opening and closing drive part 62 moves the lid wall 63 of the chamber 6 toward the bottom wall 64 so as to close the entrance 61 and the entrance passage 61a, The retaining portion 11a of the upper cervical surface 11 is held in surface contact with the nip surface of the upper work W1 by the retaining portion 3. Thereby, the upper work W1 is transferred from the lower side surface 21 to the holding portion 11a of the upper side surface 11 while floating.

Although not shown as another example, the opening and closing drive part 62 and the elevation driving part 3 of the chamber 6 are constituted by separate driving sources, and the opening and closing drive part 62 of the chamber 6, The upper holding member 1 and the holding portion 11a of the upper cervical surface 11 are separated from the lower cervical surface 21 by the lifting and lowering driving unit 3 regardless of the closing operation of the lower conveying path 61 It is also possible to move it to a position where it is in surface contact with the nip surface of the floating upper work W1.

According to the manufacturing apparatus (A) and manufacturing method of the coupling device W according to the second embodiment of the present invention, the lifting portion 22 of the lower holding member 2 lifts The upper work W1 held is lifted and transferred to the upper side surface 11 of the upper side holding member 1 in a planar shape.

Therefore, the upper workpiece W1 can be transferred to the upper side surface 11 of the upper holding member 1 without complete partial distortion.

As a result, there is an advantage in that the precision of fusion of the upper work W1 and the lower work W2 is improved, and a higher quality fusing device W can be produced.

1 to 3, the lift pin 12b movable in the Z direction is passed through the lid wall 63 of the chamber 6 as the transmitting mechanism 12 of the upper holding member 1, It is not necessary to provide a sealing member such as an O-ring between the lid wall 63 of the chamber 6 and the lift pin 12b in comparison with the first embodiment of the present invention, There is also an advantage in that the structure can be simplified.

In the above-described embodiment, the upper work W1 carried by the carry-in member 4 is transferred to the upper rough surface 11 of the upper holding member 1 by the transfer mechanism 12, The transfer mechanism 12 and the holding portion 11a of the upper holding member 1 may be changed to the above described lifting portion and contact holding portion.

In this case, the upper holding member 1 includes a lifting portion provided with a means for generating a separation pressure and an approaching pressure in the opposite direction between the upper work W1 and the upper work W1, and means for adjusting the separation pressure and the approach pressure As shown in Fig.

Thereby, even if the upper work W1 is partially distorted by stretching or shrinking due to the carry-in member 4 or the like, the upper work W1 is supported by the lifting portion in a noncontact manner so as to float from the upper side surface 11. As a result, partial distortion of the upper work W1 is prevented, and the upper work W1 is brought into a smoothed state along the smooth upper side surface 11 of the upper holding member 1. [ Subsequently, the upper workpiece W1 in a smoothed state is brought into contact with the upper cervical surface 11 by the contact holding portion, so that the upper workpiece W1 can not move. Therefore, it is possible to remove the partial distortion remaining in the upper workpiece W1 and to maintain the upper workpiece surface 11 in a smooth state.

In the above embodiment, the lifting and conveying system in which the work is floated and conveyed is adopted as the carry-in member 4 and the carry-out member 5. However, the present invention is not limited to this, One or both of them may be changed to a robot conveying system or a conveyor conveying system.

A: Manufacturing apparatus of a bonding device 1: Upper holding member
11: upper surface 11a:
2: lower side holding member 21: lower side surface
21a: contact holding portion 22:
23: Positioning guide 3:
4: Carrying member 41: Carrying surface
43: float conveying section 44: conveying guide
5: carry-out member 51: carry-out face
6: chamber 61: entrance
7: control unit S1: fusion space
S2: outer space W1: upper workpiece
W2: Lower work W: Alignment device

Claims (6)

The upper work is held on the upper holding member and the lower work is held on the lower holding member in the bonding space and the upper work and the lower work are bonded by the relative approach movement between the upper holding member and the lower holding member An apparatus for producing a bonding device,
An upper holding member disposed on the coupling space and having an upper back surface on which the upper work is detachably held;
A lower holding member disposed in the bonding space and having a smooth lower side surface on which the lower work is detachably held;
A lifting drive part for lifting both the upper workpiece and the lower workpiece by relatively moving either one of the upper holding member and the lower holding member,
And a control unit for controlling operations of the upper caster surface, the lower caster surface, and the elevation driving unit,
Wherein the upper holding member has a holding portion in which the upper work is held in a non-movable state,
Wherein the lower holding member includes a lifting portion provided with means for generating a separation pressure and an approaching pressure in the opposite direction from the lower work and a contact holding portion provided with means for adjusting the separation pressure and the approaching pressure Have,
Wherein the control unit controls the lower work to balance the separation pressure and the approach pressure of the lifting unit with respect to the lower holding member so that the lower work is floated from the lower side, And the lower work is held in contact with the lower raster surface so that the upper and lower holding members can be moved by either the upper holding member or the lower holding member, So that the upper work held by the holding portion and the lower work are overlapped with each other on the upper raster surface. 2. The apparatus according to claim 1, further comprising a carry-in member for carrying at least said lower work toward said bonding space, wherein said upper holding member and said lower holding member are disposed in a chamber capable of being transformed, Wherein the member has an openable / closable entrance through which the member passes. The apparatus according to claim 2, wherein the carry-in member has a lift-up conveying section that carries at least the lower work from the smooth carry-in surface so that the lower work is not contacted. The apparatus according to claim 3, characterized in that the carry-in member is disposed in a position (Y direction) intersecting with the work carrying direction (X direction) by the above-mentioned float conveying section at least during contact with the work Wherein the lower side surface of the lower holding member restrains position in at least a workpiece carrying direction (X direction) and an intersecting direction (Y direction) in contact with at least the lower workpiece carried by the carrying member Wherein the guide has a guide. The upper work is held on the upper holding member and the lower work is held on the lower holding member in the conjugation space and the upper work and the lower work are bonded by the relative approach movement between the upper holding member and the lower holding member A manufacturing method of a coupling device,
A holding step of holding the upper workpiece on an upper cervical surface of the upper holding member and holding the lower workpiece on a smooth lower cervical surface of the lower holding member,
And a cohesive step of overlapping the upper work and the lower work by either one of the upper holding member and the lower holding member or by a relative approach movement of both of the upper holding member and the lower holding member,
The holding step is performed such that the balance between the lower work and the lower work is balanced by the spacing pressure and the approach pressure generated in the opposite direction between the lower work and the lower work by the lifting portion, And the contact pressure is gradually increased by the contact holding portion with respect to the separation pressure so as to keep the lower work contacting with the lower side surface so as not to move,
Wherein the upper work and the lower work are overlapped with each other. 6. The method according to claim 5, further comprising a carrying-out step of carrying out the bonding device, which has completed the bonding of the upper workpiece and the lower workpiece, from the bonding space toward the outer space by the carrying member,
And in the carrying out step, the bonding device is carried out from the carry-out surface of the carry-out member to the outer space while being released from the carry-out surface of the carry-out member.

Images