CN109132548B - Glass substrate overturning and loading device and glass substrate processing system - Google Patents

Glass substrate overturning and loading device and glass substrate processing system Download PDF

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Publication number
CN109132548B
CN109132548B CN201811046174.6A CN201811046174A CN109132548B CN 109132548 B CN109132548 B CN 109132548B CN 201811046174 A CN201811046174 A CN 201811046174A CN 109132548 B CN109132548 B CN 109132548B
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glass substrate
air
loading device
platform
overturning
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CN109132548A (en
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李�远
李学锋
郑权
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Nippon Electric Glass Co Ltd
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Tunghsu Group Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model relates to a glass substrate upset is gone up piece device and glass substrate processing system, this glass substrate upset is gone up piece device including base (1) of injecing the reference surface, articulate in upset conveying platform (2) of base (1) and setting are in drive arrangement (3) on base (1), drive arrangement (3) with upset conveying platform (2) transmission is connected, in order to drive upset conveying platform (2) rotate around its articulated shaft (4), upset conveying platform (2) include air supporting mechanism and conveying mechanism, air supporting mechanism is used for with the interval membrane below the glass substrate blows to the glass substrate is in order to paste tightly on the glass substrate, conveying mechanism is used for carrying the laminating together the glass substrate with the interval membrane. The glass substrate overturning and loading device and the glass substrate processing system can solve the problem that a robot cannot carry a glass substrate and a spacer film simultaneously when loading the glass substrate.

Description

Glass substrate overturning and loading device and glass substrate processing system
Technical Field
The disclosure relates to the field of glass substrate production equipment, in particular to a glass substrate overturning and loading device and a glass substrate processing system.
Background
During the production of glass substrates, semi-finished glass substrates are generally transported between production workshops using a-type frames, and a spacer film is generally laid between adjacent glass substrates to protect the glass substrates. Before scribing and breaking off, the glass substrate needs to be transferred from the A-shaped frame to the conveyor belt, namely, the glass substrate needs to be turned from a vertical state to a horizontal state to complete loading. In the scribing and breaking step, since the spacer film is required to protect the glass substrate in order to prevent the glass substrate from being scratched by the generated glass cullet, the spacer film is required to be laminated together with the glass substrate in the laminating step. However, since the spacer film and the glass substrate are not connected to each other, the spacer film cannot be sucked by the robot since the spacer film is sucked only by the upper plate by the cantilever robot, and therefore the spacer film cannot be carried by the robot together with the glass substrate and cannot enter the scribing and breaking step together with the glass substrate.
Therefore, a new sheet loading device is needed to solve the problem of loading the glass substrate together with the spacer film.
Disclosure of Invention
The purpose of this disclosure is to provide a glass substrate upset loading attachment and glass substrate system of processing, this glass substrate upset loading attachment and glass substrate system can solve the glass substrate and separate the problem of piece together with the barrier film.
In order to achieve the above object, the present disclosure provides a glass substrate turnover loading device, which includes a base defining a reference surface, a turnover conveying platform hinged to the base, and a driving device disposed on the base, wherein the driving device is in transmission connection with the turnover conveying platform to drive the turnover conveying platform to rotate around a hinge shaft thereof, the turnover conveying platform includes an air floating mechanism and a conveying mechanism, the air floating mechanism is used for blowing a spacer film below the glass substrate to be attached to the glass substrate, and the conveying mechanism is used for conveying the glass substrate and the spacer film attached together.
Optionally, the turnover conveying platform comprises a platform body, one side of the platform body is used for placing the glass substrate and the spacer film, and the other side of the platform body is provided with a mounting seat so as to be hinged to the base through a hinge shaft.
Optionally, the platform body includes a back plate and a face plate which are opposite to each other, the mounting seat is disposed on the back plate, the air floating mechanism includes an air floating cavity formed in the platform body, a plurality of air floating holes disposed on the face plate and communicated with the air floating cavity, and an air inlet disposed on the back plate and communicated with the air floating cavity, and the air inlet is used for being connected with an air source device.
Optionally, the glass substrate turning and loading device comprises an air feed pipe which is arranged on the base and extends outwards perpendicular to the reference surface, and the air feed pipe is communicated with the air inlet to provide high-pressure air flow for the air floating cavity when the turning and conveying platform rotates to be parallel to the reference surface.
Optionally, the air delivery pipe is provided with a seal to provide air tightness when the air delivery pipe is in communication with the air inlet.
Optionally, the end of the air feed pipe is provided with a limiting structure to stop the platform body so as to prevent the overturning conveying platform from rotating continuously.
Optionally, the conveying and conveying mechanism includes a plurality of conveyor belt devices, the conveyor belt devices are arranged on the platform body in parallel at intervals, and an opening is arranged on the platform body, so that the conveyor belt on one side of the conveyor belt devices is exposed from the panel and is higher than the panel.
Optionally, the air floating mechanism includes a plurality of air inlets, and the air inlets are disposed on two sides of each conveyor belt device.
Optionally, the conveyor belt device includes two support plates parallel to each other, a driving wheel, a driven wheel, a conveyor belt, and a belt guide rail, the two support plates are fixed to the platform body, the driving wheel and the driven wheel are rotatably connected between the two support plates at two ends, and the conveyor belt is sleeved on the driving wheel and the driven wheel and supported by the belt guide rail.
Optionally, the platform body is provided with a stop member to prevent the glass substrate from sliding off when the turnover conveying platform forms an included angle with the reference surface.
Optionally, the base is provided with a column, a bearing seat is arranged at the tail end of the column, and the hinge shaft is mounted on the bearing seat.
Optionally, the driving device is connected with the mounting seat through a link mechanism.
Optionally, the drive device is designed as an electric motor.
Optionally, the glass substrate turning and loading device includes a limiting member disposed on the base and extending perpendicularly to the reference surface to prevent the turning and conveying platform from continuing to rotate when the turning and conveying platform rotates to be parallel to the reference surface.
On the basis of the technical scheme, the glass substrate processing system comprises the glass substrate overturning and loading device in the technical scheme.
Through the technical scheme, the glass substrate overturning and loading device provided by the disclosure drives the overturning and conveying platform to rotate through the driving device, so that the glass substrate can be overturned from an included angle (for example, about 85 degrees) between the glass substrate and the reference surface to be parallel to the reference surface, and the glass substrate is adjusted to be in a loading posture; the flexible spacing film can be blown to the glass substrate through the air floatation mechanism so as to be attached to the glass substrate tightly; the glass substrate and the spacer film which are bonded together can be conveyed out together by the conveying mechanism, for example, to a breaking-off process. The glass substrate overturning and loading device can enable the spacing film to be attached to the glass substrate and then the glass substrate to be overturned and conveyed to a processing station of a scribing and breaking process, so that the glass substrate in the breaking process is protected by the spacing film and is not scratched. The glass substrate processing system provided by the present disclosure includes the above glass substrate turning and loading device, has the same technical effect as the glass substrate turning and loading device, and is not repeated herein in order to avoid unnecessary repetition.
Additional features and advantages of the disclosure will be set forth in the detailed description which follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure and are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure without limiting the disclosure. In the drawings:
FIG. 1 is a schematic view of a glass substrate inverting and loading device according to an embodiment of the present disclosure, wherein an included angle α is formed between the inverting and transporting platform and a reference plane;
FIG. 2 is a schematic view of another embodiment of the present disclosure showing an angle α between the turn-over transfer platform and the datum plane of the glass substrate turn-over loading apparatus;
FIG. 3 is a schematic structural view of a turn-over transfer platform of the glass substrate turn-over loading device in parallel with a reference plane according to the embodiment of the present disclosure;
FIG. 4 is a schematic structural diagram of a conveying mechanism of a glass substrate turnover loading device in an embodiment of the disclosure.
Description of the reference numerals
1-base, 11-column, 12-bearing seat, 2-turnover conveying platform, 21-air inlet, 22-conveying belt device, 221-supporting plate, 222-driving wheel, 223-driven wheel, 224-conveying belt, 225-belt guide rail, 23-platform body, 231-back plate, 232-panel, 233-stop piece, 24-mounting seat, 3-driving device, 4-articulated shaft, 5-air supply pipe, 51-sealing piece, 52-general pipeline, 61-first swing arm, 62-connecting rod, 63-second swing arm and 7-speed reducer.
Detailed Description
The following detailed description of specific embodiments of the present disclosure is provided in connection with the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present disclosure, are given by way of illustration and explanation only, not limitation.
In the present disclosure, unless otherwise specified, the use of directional words such as "inner and outer" is intended to refer to the inner and outer relative to the inherent profile of the respective component part; the terms "first," "second," and the like, as used in this disclosure, are intended to distinguish one element from another, and not necessarily for sequential or importance. Furthermore, in the following description, in the drawings, like reference numerals in different drawings denote like elements.
According to the specific embodiment of the present disclosure, a glass substrate turnover loading device is provided, and as shown in fig. 1 and fig. 2, the device includes a base 1 defining a reference surface, a turnover conveying platform 2 hinged to the base 1, and a driving device 3 disposed on the base 1, the driving device 3 is in transmission connection with the turnover conveying platform 2 to drive the turnover conveying platform 2 to rotate around a hinge shaft 4 thereof, the turnover conveying platform 2 includes an air floating mechanism and a conveying mechanism, the air floating mechanism is used for blowing a space film below a glass substrate to the glass substrate to be attached to the glass substrate, and the conveying mechanism is used for conveying the glass substrate and the space film attached together.
Through the technical scheme, the glass substrate overturning and loading device provided by the disclosure drives the overturning and conveying platform 2 to rotate through the driving device 3, so that the glass substrate can be overturned from an included angle (for example, about 85 degrees) between the glass substrate and the reference surface to be parallel to the reference surface, and the glass substrate is adjusted to be in a loading posture; the flexible spacing film can be blown to the glass substrate through the air floatation mechanism so as to be attached to the glass substrate tightly; the glass substrate and the spacer film which are bonded together can be conveyed out together by the conveying mechanism, for example, to a breaking-off process. The glass substrate overturning and loading device can enable the spacing film to be attached to the glass substrate and then the glass substrate to be overturned and conveyed to a processing station of a scribing and breaking process, so that the glass substrate in the breaking process is protected by the spacing film and is not scratched.
Alternatively, referring to fig. 1 and 2, the turn-over transfer platform 2 includes a platform body 23, one side of the platform body 23 is used for placing the glass substrate and the spacing film, and the other side is provided with a mounting seat 24 (for example, four mounting seats 24 may be provided to make the connection between the turn-over transfer platform 2 and the hinge shaft 4 more stable and facilitate the hinge of the link mechanism in the following text) so as to be hinged with the base 1 through the hinge shaft 4. the turn-over transfer platform 2 can rotate around the hinge shaft 4 until the platform body 23 and the datum plane have an included angle α (when α takes 80 ° -85 °, the state may be a first working position of the glass substrate turn-over loading device), or until the platform body 23 and the datum plane are approximately parallel (when the state may be a second working position of the glass substrate turn-over loading device, where "approximately parallel" is intended to express a state of not being strictly parallel, for example, α may also be referred to be parallel when it is not more than 5 °).
In the specific embodiments provided by the present disclosure, the platform body 23 may be configured in any suitable manner. Alternatively, referring to fig. 1 and 2, the platform body 23 includes a back plate 231 and a face plate 232 opposite to each other, the mounting seat 24 is disposed on the back plate 231, and the air floating mechanism includes an air floating cavity formed in the platform body 23, a plurality of air floating holes disposed on the face plate 232 and communicated with the air floating cavity, and an air inlet 21 disposed on the back plate 231 and communicated with the air floating cavity, the air inlet 21 being configured to be connected to an air supply device. Based on this kind of structure, the high pressure draught that air supply unit provided can get into hollow air supporting chamber through air inlet 21, and the rethread blows out with the air supporting hole of air supporting chamber intercommunication, blows flexible compartment membrane to glass substrate for the compartment membrane can laminate glass substrate, prevents that compartment membrane and panel 232 contact from appearing buckling or situations such as the card is pause.
In embodiments of the present disclosure, the connection between the air inlet 21 and the air supply device may be configured in any suitable manner. Alternatively, as shown in fig. 1, an air feed pipe 5 extending perpendicularly to the reference surface is provided on the base 1, and when the turn-over transfer platform 2 is rotated to be parallel to the reference surface, the air feed pipe 5 communicates with the air inlet 21 to supply high-pressure air to the air flotation chamber. The air source device is communicated with the air feed pipe 5 so as to provide high-pressure airflow for the air floating mechanism through the air feed pipe 5. In addition, the air inlet 21 can also be directly communicated with the air source device through an external hose, as long as the high-pressure air flow can be provided for the air floatation mechanism through the air inlet 21, the specific connection mode between the air inlet 21 and the air source device is not limited in the disclosure.
Wherein the air feed pipe 5 may be provided with a sealing member 51 to provide airtightness when the air feed pipe 5 communicates with the air inlet 21. The sealing member 51 is provided at the distal end of the air feed pipe 5 to close a gap between the distal end of the air feed pipe 5 and the air inlet 21 when the air feed pipe 5 communicates with the air inlet 21, thereby ensuring airtightness.
Wherein, the end of the air feeding pipe 5 may be provided with a limiting structure to stop the platform body 23 and further prevent the overturning conveying platform 2 from continuing to rotate. The stopper structure may be constructed in a stepped structure formed on the outer wall of the air feed pipe 5 and having a diameter greater than the diameter of the air inlet 21, in which case, when the turn-over transferring platform 2 is rotated to be parallel to the reference surface, the portion of the back plate 231 around the air inlet 21 can be stopped on the stepped structure, thereby preventing the turn-over transferring platform 2 from being excessively rotated and simultaneously preventing the distal end of the air feed pipe 5 from being inserted into the air inlet 21. It should be noted that, the present disclosure is not limited to a specific configuration of the limiting structure as long as the limiting structure can stop the platform body 23 when the turnover conveying platform 2 rotates to be level with the reference plane.
In particular embodiments of the present disclosure, the transport mechanism may be configured in any suitable manner. Alternatively, referring to fig. 2, the conveying mechanism may include a plurality of conveyor belt devices 22, the conveyor belt devices 22 being arranged in parallel on the platform body 23 at intervals, and an opening being provided on the platform body 23 so that the conveyor belt 224 on one side of the conveyor belt device 22 is exposed from the panel 232 and is higher than the panel 232, thereby being capable of carrying and conveying the glass substrate. The conveyor belt devices 22 arranged in parallel can enable the stress of the glass substrate to be more uniform in the conveying process, and the conveyor belt 224 is higher than the panel 232 and can ensure that the space film and the glass substrate which are attached together cannot contact the panel 232, so that space film wrinkles and glass substrate scratches caused by friction between the glass substrate and the panel 232 in the conveying process are avoided.
In this case, the air floating mechanism may include a plurality of air inlets 21, and as shown in fig. 1, the air inlets 22 are disposed on both sides of each conveyor belt device 22, so that the flexible spacer films on both sides of the conveyor belt devices 22 can receive the same air buoyancy, thereby ensuring that the whole spacer film can be smoothly attached to the glass substrate. One air supply pipe 5 is provided for each air inlet 21, and a plurality of air supply pipes 5 may be connected in parallel to a main pipe 52 for supplying air, and connected to an air supply device through the main pipe 52. To prevent the manifold 52 from rotating or shifting, the manifold 52 may be fixed to the base 1.
In the specific embodiments provided by the present disclosure, the conveyor means 22 may be configured in any suitable manner. Alternatively, referring to fig. 4, the conveyor belt device 22 includes two support plates 221 parallel to each other, a driving pulley 222, a driven pulley 223, a conveyor belt 224, and a belt guide 225, the two support plates 221 are fixed to the platform body 23, the driving pulley 222 and the driven pulley 223 are at both ends of the support plates 221 and rotatably connected between the two support plates 221, and the conveyor belt 224 is fitted over the driving pulley 222 and the driven pulley 223 and supported by the belt guide 225. Wherein the belt guide 225 has opposite side surfaces fixedly connected to the two support plates 221, respectively, and a top surface for supporting the conveyor belt 224, and the driving wheel 222 is driven by a driving member (not shown) to drive the driven wheel 223 and the conveyor belt 224 to move under the effect of static friction force to convey the spacer film and the glass substrate bonded together.
In addition, in the embodiment provided by the present disclosure, when the turnover conveying platform 2 rotates around the hinge shaft 4 until the platform body 23 has the included angle α with the reference plane, in order to prevent the glass substrate located at one side of the panel 232 from sliding off, a stopper 233 is provided on the platform body 23, and as shown in fig. 2 and 3, the stopper 233 is provided on the panel 232 and extends outward perpendicular to the panel 232.
Furthermore, in the particular embodiments provided by the present disclosure, drive device 3 may be configured in any suitable manner, and likewise, the drive connection between drive device 3 and mount 24 may be configured in any suitable manner. For example, the driving means 3 may be configured as a motor, and alternatively, as shown in fig. 3, the driving means 3 may be connected with the mounting seat 24 through a link mechanism, and a speed reducer 7 may be provided between the driving means 3 and the link mechanism in order to rotate the turn-over transfer platform 2 at a proper speed. Referring to fig. 3, the link mechanism may be a three-link mechanism including a first swing arm 61, a second swing arm 63, and a link 62, the first swing arm 61 being rotatably connected to the output shaft of the reducer 7, the second swing arm 63 being hinged to the mount 24, and both ends of the link 62 being hinged to the first swing arm 61 and the second swing arm 63, respectively. If this link mechanism is crank rocker mechanism, wherein first swing arm 61 is the crank, and second swing arm 63 is the rocker, then drive arrangement 3 carries out unidirectional rotation and just can guarantee that articulated shaft 4 drives upset conveying platform 2 and switches between first operating position and second operating position.
In order to avoid interference of the driving device 3 when the turnover conveying platform 2 is switched between the first working position and the second working position, an upright 11 is disposed on the base 1 to separate the turnover conveying platform 2 from the base 1, and optionally, as shown in fig. 1, a bearing seat 12 is disposed at a tail end of the upright 11, and the hinge shaft 4 is mounted on the bearing seat 12. The height of the upright 11 ensures that the air inlet 21 on the back plate 231 of the turnover conveying platform 2 can be just communicated with the air supply pipe 5 when the turnover conveying platform 2 connected to the hinge shaft 4 rotates to be parallel to the reference surface.
In addition, in other embodiments provided by the present disclosure, instead of preventing the inverted transfer platform 2 from being excessively rotated by the air supply pipe 5, a stopper extending outward perpendicular to the reference surface may be provided on the base 1 to prevent the inverted transfer platform 2 from continuing to rotate when the inverted transfer platform 2 is rotated to be parallel to the reference surface. The limiting member may be configured as a column-shaped structure fixedly connected to the base 1 and extending perpendicularly to the reference surface.
On the basis of the above technical scheme, the present disclosure further provides a glass substrate processing system, which includes the above glass substrate turning and loading device, and has the same technical effects as the glass substrate turning and loading device, and no further description is given here in order to avoid unnecessary repetition.
The preferred embodiments of the present disclosure are described in detail with reference to the accompanying drawings, however, the present disclosure is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present disclosure within the technical idea of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.
It should be noted that, in the foregoing embodiments, various features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, various combinations that are possible in the present disclosure are not described again.
In addition, any combination of various embodiments of the present disclosure may be made, and the same should be considered as the disclosure of the present disclosure, as long as it does not depart from the spirit of the present disclosure.

Claims (12)

1. The glass substrate overturning and loading device is characterized by comprising a base (1) for limiting a reference surface, an overturning and conveying platform (2) hinged to the base (1) and a driving device (3) arranged on the base (1), wherein the driving device (3) is in transmission connection with the overturning and conveying platform (2) so as to drive the overturning and conveying platform (2) to rotate around a hinge shaft (4) of the overturning and conveying platform, the overturning and conveying platform (2) comprises an air floating mechanism and a conveying mechanism, the air floating mechanism is used for blowing a spacing film below the glass substrate to the glass substrate so as to be tightly attached to the glass substrate, and the conveying mechanism is used for conveying the glass substrate and the spacing film which are attached together,
the overturning conveying platform (2) comprises a platform body (23), one side of the platform body (23) is used for placing the glass substrate and the spacing film, the other side of the platform body is provided with a mounting seat (24) which is hinged with the base (1) through a hinged shaft (4),
the platform body (23) comprises a back plate (231) and a face plate (232) which are opposite, the mounting seat (24) is arranged on the back plate (231), the air floating mechanism comprises an air floating cavity formed in the platform body (23), a plurality of air floating holes which are arranged on the face plate (232) and communicated with the air floating cavity, and an air inlet (21) which is arranged on the back plate (231) and communicated with the air floating cavity, the air inlet (21) is used for being connected with an air source device,
the glass substrate overturning and loading device comprises an air feed pipe (5) which is arranged on the base (1) and extends outwards perpendicular to the reference surface, and when the overturning conveying platform (2) rotates to be parallel to the reference surface, the air feed pipe (5) is communicated with the air inlet (21) to provide high-pressure air flow for the air floating cavity.
2. The glass substrate roll-over loading device according to claim 1, wherein the air feed pipe (5) is provided with a sealing member (51) to provide airtightness when the air feed pipe (5) communicates with the air inlet (21).
3. The glass substrate turnover loading device of claim 1, wherein the end of the air supply pipe (5) is provided with a limiting structure to stop the platform body (23) so as to prevent the turnover conveying platform (2) from further rotating.
4. The glass substrate turning-over and loading device according to claim 1, wherein the conveying mechanism comprises a plurality of conveyor belt devices (22), the conveyor belt devices (22) are arranged on the platform body (23) in parallel at intervals, an opening is arranged on the platform body (23) so that the conveyor belt (224) on one side of the conveyor belt device (22) is exposed from the panel (232) and is higher than the panel (232).
5. The glass substrate turnover loading device of claim 4, wherein the air floating mechanism comprises a plurality of air inlets (21), and the air inlets (21) are arranged on both sides of each conveyor device (22).
6. The glass substrate turnover loading device according to claim 4, wherein the conveyor belt device (22) comprises two support plates (221) parallel to each other, a driving wheel (222), a driven wheel (223), a conveyor belt (224) and a belt guide rail (225), the two support plates (221) are fixed to the platform body (23), the driving wheel (222) and the driven wheel (223) are rotatably connected between the two support plates (221) at two ends, and the conveyor belt (224) is sleeved on the driving wheel (222) and the driven wheel (223) and supported by the belt guide rail (225).
7. The glass substrate turnover loading device of claim 1, wherein the platform body (23) is provided with a stopper (233) to prevent the glass substrate from sliding off when the turnover conveying platform (2) forms an angle with the reference plane.
8. The glass substrate turnover loading device of claim 1, wherein the base (1) is provided with a column (11), the end of the column (11) is provided with a bearing seat (12), and the hinge shaft (4) is mounted on the bearing seat (12).
9. The glass substrate turnover loading device according to claim 1, wherein the driving device (3) is connected with the mounting seat (24) through a link mechanism.
10. Glass substrate roll-over loading device according to claim 1, characterized in that the drive means (3) is configured as a motor.
11. The glass substrate turning and loading device according to claim 1, wherein the glass substrate turning and loading device comprises a limiting member disposed on the base (1) and extending perpendicularly to the reference surface to prevent the turning and conveying platform (2) from continuing to rotate when the turning and conveying platform (2) rotates to be parallel to the reference surface.
12. A glass substrate processing system comprising the glass substrate roll-over loading apparatus of any one of claims 1-11.
CN201811046174.6A 2018-09-07 2018-09-07 Glass substrate overturning and loading device and glass substrate processing system Active CN109132548B (en)

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