CN101715422A - Levitation device and levitation transportation device - Google Patents

Levitation device and levitation transportation device Download PDF

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Publication number
CN101715422A
CN101715422A CN200880021740A CN200880021740A CN101715422A CN 101715422 A CN101715422 A CN 101715422A CN 200880021740 A CN200880021740 A CN 200880021740A CN 200880021740 A CN200880021740 A CN 200880021740A CN 101715422 A CN101715422 A CN 101715422A
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CN
China
Prior art keywords
fluid
levitation
squit hole
base portion
levitation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN200880021740A
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Chinese (zh)
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CN101715422B (en
Inventor
平田贤辅
田中刈入
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IHI Corp
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IHI Corp
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Filing date
Publication date
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Publication of CN101715422A publication Critical patent/CN101715422A/en
Application granted granted Critical
Publication of CN101715422B publication Critical patent/CN101715422B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)

Abstract

A levitation transportation device for transporting an object having a lower surface while levitating it by fluid. The levitation transportation device has a levitation device, a fluid supply device, and a transportation device. The levitation device includes a base having a flat upper surface and also includes a nozzle formed to have its opening in the upper surface. The nozzle is demarcated by an inner periphery tilting at least near the upper surface toward the inside of a region surrounded by the opening, and also demarcated by an outer periphery having a surface parallel to the inner periphery and also having an edge surface adjacent to the upper surface and not parallel to the upper surface. Further, the nozzle is constructed so as to form, between the region and the lower surface of the object, a space in which the fluid has uniform pressure. The fluid supply device pressurizes the fluid and supplies the pressurized fluid to the nozzle. The transportation device transports the object.

Description

Levitation device and floating carrier
Technical field
The present invention relates to a kind ofly use fluid such as pressurized air to make levitation device that object suspends and the floating carrier of object conveyor thing when suspending.
Background technology
The floating carrier of some object conveyor things when fluids such as using pressurized air suspends object is disclosed in the prior art.These floating carriers generally comprise the levitation device with squit hole that fluids such as can making air passes through.The fluids such as air that spray between levitation device and object produce pressure, and object suspends by this pressure, and are subjected to the propulsive effort of feedway and are transferred.Correlation technique is recorded in Japanese Patent Application Publication communique 2006-182563 number.
Summary of the invention
The objective of the invention is to, provide a kind of and make flowing of the parameatal fluid of squit hole stable, thus stable levitation device and the floating carrier of the buoyancy that object is subjected to.
First mode of the present invention provides a kind of levitation device that makes the object suspension with lower surface by fluid.Described levitation device has: base portion, and it has plane upper surface; And squit hole, in order to have peristome at described upper surface and to be formed on the described base portion, by interior week and periphery dividing out, in described week at least near described upper surface towards the inner inclination of described peristome area surrounded, described periphery have with described in Zhou Pinghang face and adjacent with described upper surface and not with described in the edge surface of Zhou Pinghang, between the described lower surface of described zone and described object, form the space that makes described fluid produce uniform pressure.
The present invention's second mode provides a kind of suspends the object with lower surface by fluid, then to its floating carrier of carrying.Floating carrier has levitation device, fluid supply apparatus and feedway, described levitation device has base portion and squit hole, described base portion has plane upper surface, described squit hole is in order to have peristome at described upper surface and to be formed on the described base portion, by interior week and periphery dividing out, in described week at least near described upper surface towards the inner inclination of described peristome area surrounded, described periphery have with described in Zhou Pinghang face and adjacent with described upper surface and not with described in the edge surface of Zhou Pinghang, between the described lower surface of described zone and described object, form the space that makes described fluid produce uniform pressure, described fluid supply apparatus is exerted pressure to described fluid, supply with described fluid to described squit hole, described feedway is used to carry described object.
It is vertical to be preferably described edge surface.Perhaps be preferably described edge surface with respect to described zone towards outer inclination.
Description of drawings
Fig. 1 is the partial plan of the floating carrier of embodiment of the present invention.
Fig. 2 is the cutaway drawing of obtaining along the II-II line of Fig. 1.
Fig. 3 is the birds-eye view of the levitation device that has of described floating carrier.
Fig. 4 is the cutaway drawing of obtaining along the IV-IV line of Fig. 3.
Fig. 5 is the cutaway drawing of obtaining along the V-V line of Fig. 3.
Fig. 6 is the birds-eye view of the levitation device of another embodiment of the present invention.
Fig. 7 is the cutaway drawing of obtaining along the VII-VII line of Fig. 6.
The specific embodiment
Followingly embodiments of the present invention are described with reference to accompanying drawing.In this specification sheets, claims and accompanying drawing, with the place ahead, rear, left and the right-hand direction that is defined as respectively in the drawings with FF, FR, L and R mark.These definition only are for convenience of description, and the present invention is not limited to these contents.
The floating carrier 1 of embodiment of the present invention is to be used to make object W to suspend in vertical direction, then the device of carrying on horizontal feed direction (for example rear FR).As object W, be preferably integral body and be plane relatively thinner object, for example thin plates such as glass substrate of LCD (Liquid Crystal Display (LCD)) usefulness.Object W need not all to be plane, and at least a portion of a need object W lower surface is plane and gets final product.For object W is suspended, for example utilize fluids such as air.
At object W be thin glass substrate of being used for LCD etc. need under dustfree environment, carry article the time, described floating carrier 1 can use under dustfree environments such as dust free room.
As shown in Figure 1, floating carrier 1 has base station 3 that direction forwards, backwards stretches out, forms the feedway 5 of row at base station upper edge fore-and-aft direction, forms a plurality of levitation devices 21 of row at the both direction of base station 3 upper edge fore-and-aft directions and left and right directions.On levitation device 21, be connected with and supply with not shown compressed-air actuated gas supply device, be used as being used to supply with the fluid supply apparatus of fluid.Can utilize other gases such as nitrogen or argon gas or utilize other fluid such as liquid to replace pressurized air.
Feedway 5 has a plurality of rollers 7 that form row on the throughput direction of object W respectively near the left end of base station 3 and right-hand member.Each roller 7 is connected with worm gear 11 one via S. A. 7s respectively, and rotation is freely by support 9 supportings.Run through base station 3 ground and have a pair of axle drive shaft 13 on fore-and-aft direction, each axle drive shaft 13 has and each worm gear 11 engaged worm 15 drivingly.At the front end of each axle drive shaft 13, can be connected drivingly with the output shaft 17s of electrical motor 17 via coupler etc.So, each roller 7 is subjected to the propulsive effort of electrical motor 17 and is rotated with identical rotating speed.As shown in Figure 2, the upper end that is configured to described each roller 7 is outstanding a little upward from the upper surface of described levitation device 21, and alignment on single.Even object W is in suspended state, also as shown in Figure 2, can contact with roller 7 in order to be activated power.
Electrical motor 17 need not to be provided with a pair of, also can be that two axle drive shafts 13 are connected with the mono-electrical motor via suitable bindiny mechanisms such as chains.And, also can be used for feedway 5 to conveying mechanisms such as clamper that can drive or band conveyors and replace roller.
With reference to Fig. 3～Fig. 5, each levitation device 21 has base portion 23, and each base portion 23 is fixed on the base station 3 via support 25.Each base portion 23 side within it marks off cell 27, passes through this cell 27 from air feeder compressed and supplied air temporarily.
Base portion 23 central authorities at an upper portion thereof have the island parts 31 of the rectangle that covers cell 27.The external wall of upper portion parts 33 that base portion 23 also has bottom outer wall parts 29 and fixes on these bottom outer wall parts 29.Bottom and external wall of upper portion parts 29,33 are around island parts 31, leave to be communicated with cell 27 between it and can pass through compressed-air actuated gap.Following this gap that bottom and external wall of upper portion parts 29,33 and island parts 31 are marked off is called squit hole 37.
As shown in Figure 3, squit hole 37 is towards the rectangular ring-type of the opening of the upper surface of levitation device 21.That is, as Fig. 3～shown in Figure 5, whole squit hole 37 is the gaps that are communicated with the circular opening of described rectangle.In squit hole 37, divide by interior all 31a, periphery 33a and edge surface 39 near the upper surface of levitation device 21, interior all 31a are formed by island parts 31, and periphery 33a and edge surface 39 are formed by external wall of upper portion parts 33.Interior all 31a tilt towards peristome area surrounded (towards inside).Periphery 33a and interior all 31a tilt abreast, but in periphery 33a, the edge surface 39 adjacent with upper surface is not parallel, are roughly vertical.Periphery 33a for interior all 31a can inaccuracy ground parallel, can have suitable angle.Consider that from angle easy to make edge surface 39 is preferably the plane, but also curved surface.Perhaps, as Fig. 6～shown in Figure 7, edge surface 39 also can be outward-dipping.
As mentioned above, squit hole 37 at least a portion have towards in-to-in.Big more through having towards the compressed-air actuated flow of in-to-in bevelled squit hole, make object W suspend highly more.Therefore, ring-type and to inner bevelled squit hole 37 provides hoverheight controlled of object W via compressed-air actuated flow control.It is big more to tilt, and this tendency is obvious more, if but the conference of tilting causes the making difficulty of external wall of upper portion parts 33, so the inclination angle for example is preferably 45 °, but be not limited to this.
Squit hole 37 is not limited to the ring-type of rectangle, can also be oval-shaped ring-type, perhaps other various shapes such as shape of getting clogged of Huan a part.Island parts 31 are even for the width that makes squit hole 37, can possess the projection 35 of sustained height on the face of its bevelled periphery 31a.
Be preferably, the upper surface of the upper surface of island parts 31 and outer wall parts 29 aligns and forms the mono-plane.And, being preferably, a plurality of levitation devices 21 align in the mode that further forms single plane between the described upper surface that has alignd.This helps making object W hoverheight stable.
Each cell 27 of each levitation device 21 is interconnected by not shown pipe arrangement, further is communicated with air feeder.Air feeder is controllably supplied with pressurized air to each levitation device 21 via pipe arrangement.As air feeder, preferably have the supply ventilating fan electrical motor that is electrically connected with inverter power supply, by the electric motor driven supply ventilating fan of supply ventilating fan, but be not limited to this.Air feeder also can have the suitable reading device of the information that can read object W, the controller of control air flow etc.
When from air feeder when each cell 27 is supplied with pressurized airs, from each squit hole 37 ejection pressurized air.The pressurized air that is sprayed as Fig. 3～shown in Figure 5, between the lower surface of the upper surface of island parts 31 and object W, promptly in the space that opening surrounded of squit hole 37, generates the space S that makes described pressurized air produce uniform pressure.By supporting in the space S with uniform pressure, described thus object W is applied in buoyancy and suspends.On the other hand, by driving pair of motors 17 a pair of axle drive shaft 13 is rotated synchronously.By the engagement of worm gear 11 and worm screw 15, the rotation of axle drive shaft 13 is passed to each roller 7.Contact by the roller 7 with rotation, the object W that is transported on the floating carrier 1 is transferred under the state that suspends.
As mentioned above, squit hole 37 at least a portion have towards in-to-in, so also towards inside ejection pressurized air.On the other hand, form from space S towards exterior mobile.Because both flowing opposites, so become near the mobile reason that gets muddled that causes the squit hole edge of opening.In the present embodiment, by not obtaining the edge of squit hole 37 openings, thereby the part in the pressurized air of ejection is guided to the outside to inner bevelled edge surface 39.Should flow with from space S towards exterior mobile coupling, therefore be difficult to take place movement disorder.This helps making the pressure stability in the space S, and the buoyancy that object is subjected to is stable.
Abovely describe the present invention, but the present invention is not limited to the content of above-mentioned embodiment with reference to preferred implementation.Based on above-mentioned disclosure, have the personnel of present technique field ordinary skill, can be by embodiment being made amendment or being out of shape and implementing the present invention
Provide a kind of and make flowing of the parameatal fluid of squit hole stable, levitation device that the buoyancy that object is subjected to is stable and floating carrier.

Claims (6)

1. a levitation device suspends the object with lower surface by fluid, it is characterized in that,
Possess: base portion has plane upper surface; And
Squit hole, in order to have peristome at described upper surface and to be formed on the described base portion, by interior week and periphery dividing out, in described week at least near described upper surface towards the inner inclination of described peristome area surrounded, described periphery have with described in Zhou Pinghang face and adjacent with described upper surface and not with described in the edge surface of Zhou Pinghang, between the described lower surface of described zone and described object, form the space that makes described fluid produce uniform pressure.
2. levitation device according to claim 1 is characterized in that described edge surface is vertical.
3. levitation device according to claim 1 is characterized in that, described edge surface with respect to described zone towards outer inclination.
4. a floating carrier is carried it after the object with lower surface is suspended, and it is characterized in that possessing:
Levitation device has base portion and squit hole,
Described base portion has plane upper surface,
Described squit hole, in order to have peristome at described upper surface and to be formed on the described base portion, by interior week and periphery dividing out, in described week at least near described upper surface towards the inner inclination of described peristome area surrounded, described periphery have with described in Zhou Pinghang face and adjacent with described upper surface and not with described in the edge surface of Zhou Pinghang, between the described lower surface of described zone and described object, form the space that makes described fluid produce uniform pressure;
Fluid supply apparatus is exerted pressure to described fluid, supplies with described fluid to described squit hole; And
Feedway is used to carry described object.
5. floating carrier according to claim 4 is characterized in that described edge surface is vertical.
6. floating carrier according to claim 4 is characterized in that, described edge surface with respect to described zone towards outer inclination.
CN200880021740.6A 2007-06-29 2008-05-09 Levitation device and levitation transportation device Active CN101715422B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007173433A JP5396695B2 (en) 2007-06-29 2007-06-29 Levitation unit and levitating transfer device
JP173433/2007 2007-06-29
PCT/JP2008/058625 WO2009004859A1 (en) 2007-06-29 2008-05-09 Levitation device and levitation transportation device

Publications (2)

Publication Number Publication Date
CN101715422A true CN101715422A (en) 2010-05-26
CN101715422B CN101715422B (en) 2013-03-27

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JP (1) JP5396695B2 (en)
KR (1) KR20100018613A (en)
CN (1) CN101715422B (en)
TW (1) TW200918427A (en)
WO (1) WO2009004859A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102785940A (en) * 2012-08-15 2012-11-21 吉林大学 Ultrasonic/air flotation hybrid noncontact automatic transporter
CN106829482A (en) * 2016-11-01 2017-06-13 昆山高艺泽机械设备有限公司 A kind of air-flotation type induction system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101142959B1 (en) * 2009-06-29 2012-05-08 김영태 Precision plate flotation system
JP5879680B2 (en) * 2010-11-05 2016-03-08 株式会社Ihi Non-contact type electrostatic chuck
JP5790121B2 (en) * 2011-04-26 2015-10-07 株式会社Ihi Levitation transfer device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (en) * 1998-03-19 1999-10-05 Toray Eng Co Ltd Air flow conveying cell
JP2005075496A (en) * 2003-08-28 2005-03-24 Murata Mach Ltd Levitation conveyance device
JP4613800B2 (en) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ Levitation device and transfer device
JP4501713B2 (en) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 Air levitation transfer device
TW200800773A (en) * 2005-11-14 2008-01-01 Ishikawajima Harima Heavy Ind Floating device and carrying device
KR101213991B1 (en) * 2005-12-16 2012-12-20 엘아이지에이디피 주식회사 Substrate conveyer and substrate conveying method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102785940A (en) * 2012-08-15 2012-11-21 吉林大学 Ultrasonic/air flotation hybrid noncontact automatic transporter
CN106829482A (en) * 2016-11-01 2017-06-13 昆山高艺泽机械设备有限公司 A kind of air-flotation type induction system

Also Published As

Publication number Publication date
JP2009012875A (en) 2009-01-22
TWI359778B (en) 2012-03-11
WO2009004859A1 (en) 2009-01-08
CN101715422B (en) 2013-03-27
TW200918427A (en) 2009-05-01
JP5396695B2 (en) 2014-01-22
KR20100018613A (en) 2010-02-17

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