WO2009004859A1 - Levitation device and levitation transportation device - Google Patents

Levitation device and levitation transportation device Download PDF

Info

Publication number
WO2009004859A1
WO2009004859A1 PCT/JP2008/058625 JP2008058625W WO2009004859A1 WO 2009004859 A1 WO2009004859 A1 WO 2009004859A1 JP 2008058625 W JP2008058625 W JP 2008058625W WO 2009004859 A1 WO2009004859 A1 WO 2009004859A1
Authority
WO
WIPO (PCT)
Prior art keywords
levitation
fluid
nozzle
transportation device
transportation
Prior art date
Application number
PCT/JP2008/058625
Other languages
French (fr)
Japanese (ja)
Inventor
Kensuke Hirata
Kai Tanaka
Original Assignee
Ihi Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation filed Critical Ihi Corporation
Priority to CN200880021740.6A priority Critical patent/CN101715422B/en
Publication of WO2009004859A1 publication Critical patent/WO2009004859A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)

Abstract

A levitation transportation device for transporting an object having a lower surface while levitating it by fluid. The levitation transportation device has a levitation device, a fluid supply device, and a transportation device. The levitation device includes a base having a flat upper surface and also includes a nozzle formed to have its opening in the upper surface. The nozzle is demarcated by an inner periphery tilting at least near the upper surface toward the inside of a region surrounded by the opening, and also demarcated by an outer periphery having a surface parallel to the inner periphery and also having an edge surface adjacent to the upper surface and not parallel to the upper surface. Further, the nozzle is constructed so as to form, between the region and the lower surface of the object, a space in which the fluid has uniform pressure. The fluid supply device pressurizes the fluid and supplies the pressurized fluid to the nozzle. The transportation device transports the object.
PCT/JP2008/058625 2007-06-29 2008-05-09 Levitation device and levitation transportation device WO2009004859A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200880021740.6A CN101715422B (en) 2007-06-29 2008-05-09 Levitation device and levitation transportation device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-173433 2007-06-29
JP2007173433A JP5396695B2 (en) 2007-06-29 2007-06-29 Levitation unit and levitating transfer device

Publications (1)

Publication Number Publication Date
WO2009004859A1 true WO2009004859A1 (en) 2009-01-08

Family

ID=40225916

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058625 WO2009004859A1 (en) 2007-06-29 2008-05-09 Levitation device and levitation transportation device

Country Status (5)

Country Link
JP (1) JP5396695B2 (en)
KR (1) KR20100018613A (en)
CN (1) CN101715422B (en)
TW (1) TW200918427A (en)
WO (1) WO2009004859A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102484089A (en) * 2009-06-29 2012-05-30 英泰克普拉斯有限公司 Flat plate precision floating system

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5879680B2 (en) * 2010-11-05 2016-03-08 株式会社Ihi Non-contact type electrostatic chuck
JP5790121B2 (en) * 2011-04-26 2015-10-07 株式会社Ihi Levitation transfer device
CN102785940A (en) * 2012-08-15 2012-11-21 吉林大学 Ultrasonic/air flotation hybrid noncontact automatic transporter
CN206705256U (en) * 2016-11-01 2017-12-05 昆山高艺泽机械设备有限公司 A kind of air-flotation type induction system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (en) * 1998-03-19 1999-10-05 Toray Eng Co Ltd Air flow conveying cell
JP2006182563A (en) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd Floating device and carrying device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005075496A (en) * 2003-08-28 2005-03-24 Murata Mach Ltd Levitation conveyance device
JP4501713B2 (en) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 Air levitation transfer device
CN1966371B (en) * 2005-11-14 2012-08-15 株式会社Ihi Floating device and carrying device
KR101213991B1 (en) * 2005-12-16 2012-12-20 엘아이지에이디피 주식회사 Substrate conveyer and substrate conveying method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (en) * 1998-03-19 1999-10-05 Toray Eng Co Ltd Air flow conveying cell
JP2006182563A (en) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd Floating device and carrying device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102484089A (en) * 2009-06-29 2012-05-30 英泰克普拉斯有限公司 Flat plate precision floating system

Also Published As

Publication number Publication date
CN101715422B (en) 2013-03-27
KR20100018613A (en) 2010-02-17
JP5396695B2 (en) 2014-01-22
JP2009012875A (en) 2009-01-22
TWI359778B (en) 2012-03-11
CN101715422A (en) 2010-05-26
TW200918427A (en) 2009-05-01

Similar Documents

Publication Publication Date Title
USD612135S1 (en) Footwear
USD610009S1 (en) Container
USD629889S1 (en) Inhaler
USD629504S1 (en) Inhaler
USD611504S1 (en) Pump cover
USD622041S1 (en) Footwear
USD616760S1 (en) Packaging container
USD540194S1 (en) Container
USD613194S1 (en) Laser level
USD650677S1 (en) Container base
USD621723S1 (en) Beverage container
USD622145S1 (en) Container body
USD601436S1 (en) Container body
USD607754S1 (en) Container body
USD654161S1 (en) Roof vent and sealing element therefor
USD629861S1 (en) Slide
USD607536S1 (en) Container for transportation of liquids
USD623943S1 (en) Seal for containers
USD584456S1 (en) Helmet liner cell
USD666873S1 (en) Can-shaped container
USD594857S1 (en) Antenna
USD610165S1 (en) Pump liner component
USD648218S1 (en) Packaging container with surface ornamentation
MX2010001089A (en) Support with a double resting surface for cups and other containers in - machines for-the production of beverages.
USD672239S1 (en) Extendable pour spout

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880021740.6

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08764271

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20107000547

Country of ref document: KR

Kind code of ref document: A

122 Ep: pct application non-entry in european phase

Ref document number: 08764271

Country of ref document: EP

Kind code of ref document: A1