135-9773 九、發明說明 【發明所屬之技術領域】 本發明，是關於使用壓縮空氣等之流體，使對象物上 浮的上浮式裝置及一面使之上浮一面進行搬運的上浮式搬 運裝置。 【先前技術】 使用壓縮空氣等之流體，一面使對象物上浮而一面進 行搬運的上浮式搬運裝置已被提案有數個。此等之上浮式 搬運裝置，在典型上，爲具備有：具備可使空氣等流體通 過之噴嘴的上浮式裝置。噴出於上浮式裝置與對象物之間 的空氣等流體產生壓力，對象物藉由此壓力而上浮，並受 到由搬運裝置產生的驅動力而被搬運。關連之技術，係揭 示於日本特開2006-182563號公報。 【發明內容】 本發明的目的’是在於提供一種將位於噴出孔之開口 周圍之流體的流動予以安定化，因而有助於讓對象物所承 受的浮力安定之上浮式裝置以及上浮式搬運裝置。 本發明之第1態樣，是在於提供一種藉由流體以使具 有下表面之對象物上浮的上浮式裝置。上述上浮式裝置， 具備有：具備有平面狀之上表面的基部以及噴出孔，該噴 出孔，是被構成爲：於上述上表面具備有開口部地形成於 上述基部；並藉由內周以及外周所劃分，該內周係至少在 -4- 135-9778 上述上表面附近朝向上述開口部所包圍之區域的內側傾斜 ’該外周係具有與上述內周平行的面以及鄰接於上述上表 面而沒有與上述內周平行的緣面；且於上述區域與上述對 象物的上述下表面之間，產生使上述流體形成均等壓力的 空間。 本發明之第2態樣，是在於提供一種藉由流體用以使 具有下表面之對象物上浮並予以搬運之上浮式搬運裝置。 φ 上述上浮式搬運裝置，具備有：上浮式裝置、流體供給裝 置、以及搬運裝置，上述上浮式裝置，具備有：具備有平 面狀之上表面的基部、以及噴出孔，上述噴出孔，是被構 成爲：於上述上表面具備有開口部地形成於上述基部：並 藉由內周以及外周所劃分，該內周係至少在上述上表面附 近朝向上述開口部所包圍之區域的內側傾斜，該外周係具 有與上述內周平行的面以及鄰接於上述上表面而沒有與上 述內周平行的緣面；且於上述區域與上述對象物的上述下 φ 表面之間，產生使上述流體形成均等壓力的空間’上述流 體供給裝置，是用以給予上述流體壓力並將之供給至上述 噴出孔，上述搬運裝置，是用以搬運上述對象物。 較佳爲，上述緣面爲鉛直。或者較佳爲，上述緣面相 對於上述區域爲朝向外側傾斜。 【實施方式】 參照圖面說明本發明之實施形態於以下。於本專利說 明書、申請專利範圍以及圖面所說明之前方、後方、左方 -5- 1359778 、以及右方，係於圖面中分別以標記爲ff、 R之方向來定義。有關此定義是爲了說明上 明並非受此所限定》 依據本發明之實施形態的上浮式搬運裝 讓對象物w上浮於垂直方向並搬運於水平 例如後方FR )的裝置。作爲對象物w者， 面狀之比較薄的物體，例如，適合於L C D ( φ 所用的玻璃基板等之薄板。對象物W，並不 性爲平面狀才可以，只要其下表面之至少一 即可。爲了使其上浮，故例如利用諸如空氣 對象物W，若爲LCD所用之薄的玻璃 在無塵環境下搬運之物品時，上述上浮式搬: 使用在無塵室內等之無塵環境下。 上浮式搬運裝置1，如第1圖所示，係 於前後方向的基台3、在基台3上於前後方 φ 裝置5、以及在基台3上於前後方向及左右 列的複數個上浮式裝置21。於上浮式裝置 有圖示出之供給壓縮空氣的空氣供給裝置來 流體之流體供給裝置。也可以利用氮氣或氬 、或是液體等其他流體來取代壓縮空氣。 搬運裝置5,在基台3上的左端及右端 有於對象物W的搬運方向成列的複數個輥子 ，分別經由旋轉軸7s與蝸輪11 一體地連結 架9旋轉自如地被支持。將基台3貫通於前 FR、L、以及 的方便，本發 置1，是用以 之搬運方向（ 係整體性爲平 液晶顯示器） 是非得要整體 部分爲平面狀 等流體。 基板等之必須 重裝置1則要 具備有：延伸 向成列的搬運 方向之兩方成 2 1，連結著沒 作爲用以供給 氣等其他氣體 附近，分別具 7。各輥子7 著，並藉由托 後方向之方式 -6- 135-9778 地具備有一對驅動軸13，各驅動軸13具備有能夠驅動地 與各蝸輪11齒合的蝸桿15。於各驅動軸13的前端，經由 聯軸器等可驅動地連結於馬達17的輸出軸17s。藉此，各 輥子7’受到馬達17的驅動力，而成爲能夠以相同的旋轉 速度旋轉。如第2圖所示，上述各輥子7的上端部，僅比 上述上浮式裝置21的上表面些微地突出於上方地，以對 齊於單一平面上之方式來配置。對象物W，即使在呈上浮 | 的狀態下，如第2圖所示，也可以接觸於須接受到驅動力 的輥子7。 馬達17並不需要有一對’兩驅動軸13也可以經由鏈 條等之適切的結合手段而連結於單一的馬達。又，也可以 將能夠驅動的夾持器（clamper)或輸送帶等之搬運手段 應用在搬運裝置5中來取代輕子。 參照第3圖至第5圖，各個上浮式裝置21，係具備有 基部23’各基部23’是夾介托架25而固定於基台3上。 φ 各基部23，係於其內側，劃分有：使由空氣供給裝置所供 給的壓縮空氣暫時性通過的氣室（chamber) 27。 基部23,於其上部的中央，具備有：可覆蓋氣室27 之矩形的島構件3丨。基部23,更進一步地具備有：下部 外廓構件29、以及固定於其上的上部外廓構件33。下部 及上部外廓構件29、33，係包圍著島構件31，並於其間 ，留有與氣室27連通並能使壓縮空氣通過的間隙。於以 下，將下部及上部外廓構件29、3 3及島構件3丨所劃分出 的該間隙，稱之爲噴出孔3 7。 1359778 如第3圖所示，噴出孔37之朝向上浮式裝置21之上 表面的開口’爲矩形的環狀。亦即，如第3圖至第5圖所 示，噴出孔37之整體爲連通於上述矩形之環狀開口的狹 縫。於噴出孔37之上浮式裝置21的上表面附近，是藉由 :藉由島構件31所形成的內周31a、以及藉由上部外廓構 件33所形成的外周33a與緣面39，所劃分。內周31a是 朝向開口部包圍的區域（朝向內側）傾斜。外周33a雖是 φ 與內周31a平行地傾斜，不過於外周33a鄰接於上表面的 緣面39並非平行’而是大致地鉛直。外周33a，相對於內 周31a沒有正確地平行亦可，以具備有適當的角度亦可。 緣面39’在製作之難易上雖以平面爲佳，不過爲曲面亦可 。或是，緣面3 9，如第6圖至第7圖所示地，朝向外側傾 斜亦可。 噴出孔3 7 ’如上所述，至少具有部分性地朝向內側傾 斜部分。通過具有朝向內側傾斜之噴出孔的壓縮空氣，壓 Φ 縮空氣的流量愈多則使對象物W上浮的高度也愈高。因 此，呈環狀傾斜於內側的噴出孔3 7，經由壓縮空氣的流量 控制，可提供對於對象物W之上浮高度的控制性。雖然 傾斜愈大則此一傾向愈爲顯著，不過由於太大的話上部外 廓構件35在製作上會有困難，所以傾斜期望在例如45。， 但並非限定於此。 噴出孔37,並不限定爲矩形的環狀，也可以是橢圓形 的環狀、或是環的一部分被閉塞的形狀、或爲其他各種形 狀。島構件3 1，以具備：可將噴出孔3 7的寬幅予以均等 -8- 1359778 化，之於其傾斜的外周31a面上，具有同一高度的; 突起35 θ 較佳爲：島構件31的上表面與外廓構件29的上 ，以成爲單一平面之方式對齊。又較佳爲：複數個上 裝置21 ’其上述已對齊的上表面彼此更進—步地以成 一平面之方式對齊。此等，係有利於將對象物W的 高度予以安定化。 各上浮式裝置21的各氣室27，是藉由沒有圖示 配管而相互地連通，然後也連通於空氣供給裝置。空 給裝置’經由配管並能夠控制地將壓縮空氣供給至各 式裝置21。作爲空氣供給裝置，雖以具備有：電氣性 連於換流器電源的送風機馬達、以及藉由送風機馬達 動的送風機’爲適切，’但並非受此所限定。空氣供給 ，亦可以具備：適宜讀取對象物W之資訊的讀取裝 或是控制空氣流量的控制器等。 當從空氣供給裝置將壓縮空氣朝向各氣室27供 ，從各噴出孔37噴出壓縮空氣。所噴出的壓縮空氣 弟3圖至第5圖所不’在島構件31的上表面與對象 的下表面之間，於噴出孔3 7之開口所包圍住的空間 成使上述壓縮空氣產生均等壓力的空間S。藉由在具 等壓力之空間S所支撐，對上述對象物W施予浮力 上浮。另一方面，藉由驅動一對的馬達17，使一對的 軸13同步地旋轉。藉由蝸輪11與蝸桿15的咬合， 軸13的旋轉傳動給各輥子7。藉由接觸於旋轉的輥子 [數個 .表面 浮式 ，爲單 上浮 出的 氣供 上浮 地接 所驅 裝置 置、 給時 ，如 物W ，形 有均 使之 驅動 驅動 135.9778 於上浮式搬運裝置1上所搬來的對象物W，在上浮的狀態 下被搬運。 噴出孔37，係由於如上述般地具有至少部分性地朝向 內側傾斜，故壓縮空氣亦朝向內側噴出。另一方面，從空 間S會產生朝向外側的流動。兩者之流動，因相互相反， 故成爲在噴出孔之開口緣部導致流動紊亂的原因。在本實 施形態中’噴出孔3 7的開口，是藉由沒有朝向內側傾斜 φ 的緣面39去掉邊緣，所以噴出的壓縮空氣部分性地被引 導至外側。此流動，由於是與從空間S朝向外側的流動相 整合，所以不易產生流動的紊亂。如是設計，是使空間S 中的壓力安定，因此有助於讓對象物所承受的浮力安定。 以上參照適合於本發明之實施形態進行了說明，但本 發明並不受上述實施形態所限定。具有本技術領域之通常 技術者，可依據上述所揭示的內容，藉由對實施形態之修 正乃至於變形來實施本發明。 [產業上之可利用性] 本發明，提供一種將位於噴出孔之開口周圍之流體的 流動予以安定化’因而有助於讓對象物所承受的浮力安定 之上浮式裝置及上浮式搬運裝置。 【圖式簡單說明】 第1圖’是本發明之實施形態之上浮式搬運裝置的部 分平面圖》 -10- 1359778 第2圖’是沿著第1圖之II-II線截取後的部分斷面 圖。 胃3圖’是上述上浮式搬運裝置具備有上浮式裝置的 平面圖。 第4圖，是沿著第3圖之IV-IV線截取後的部分斷面 圖。 胃5圖’是沿著第3圖之V-V線截取後的部分斷面圖 〇 胃6圖’本發明之另一實施形態之上浮式裝置的平面 圖。 第7圖’是沿著第6圖之VII-VII線截取後的部分斷 面圖。 【主要元件符號說明】 1 :上浮式搬運裝置 3 :基台 5 :搬運裝置 7 :輥子 7s :旋轉軸 9、25 :托架 1 1 :蝸輪 1 3 :驅動軸 1 5 :蝸桿 1 7 :馬達 -11 - 1359778 17s :輸出軸 2 1 :上浮式裝置 23 :基部 27 :氣室 29 :下部外廓構件 3 1 :島構件 3 1 a :內周135-9773 EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a floating type transport apparatus that uses a fluid such as compressed air to float an object and a floating transport apparatus that transports the surface while floating. [Prior Art] A floating transport device that uses a fluid such as compressed air to transport an object while floating is proposed. The above-described floating transport apparatus is typically provided with a floating apparatus including a nozzle through which a fluid such as air can pass. The fluid ejected from the air between the floating device and the object generates pressure, and the object is lifted by the pressure and is carried by the driving force generated by the conveying device. The related technology is disclosed in Japanese Laid-Open Patent Publication No. 2006-182563. SUMMARY OF THE INVENTION An object of the present invention is to provide a floating apparatus and an upper floating type conveying apparatus which are capable of stabilizing the flow of a fluid located around an opening of a discharge hole, thereby contributing to the buoyancy of the object. According to a first aspect of the present invention, there is provided a floating apparatus which is provided by a fluid to float an object having a lower surface. The floating device includes a base portion having a planar upper surface and a discharge hole, and the discharge hole is formed in the base portion including an opening portion on the upper surface, and is configured by the inner circumference and According to the outer circumference, the inner circumference is inclined at least in the vicinity of the upper surface of the -4-135-9778 toward the inner side of the region surrounded by the opening portion. The outer circumference has a surface parallel to the inner circumference and adjacent to the upper surface. There is no rim surface parallel to the inner circumference; and between the above-mentioned area and the lower surface of the object, a space for forming an equal pressure of the fluid is generated. According to a second aspect of the present invention, there is provided a floating transport apparatus for transporting an object having a lower surface by a fluid and transporting the same. φ The above-described floating transport apparatus includes: a floating apparatus, a fluid supply apparatus, and a transport apparatus, and the floating apparatus includes a base having a planar upper surface and a discharge hole, and the discharge hole is The base portion is formed on the upper surface by the opening portion, and is defined by an inner circumference and an outer circumference, and the inner circumference is inclined toward an inner side of a region surrounded by the opening portion at least in the vicinity of the upper surface. The outer periphery has a surface parallel to the inner circumference and an edge surface adjacent to the upper surface and not parallel to the inner circumference; and between the region and the lower surface φ of the object, an equal pressure is formed between the fluid The space 'the fluid supply device is for supplying the fluid pressure to the discharge hole, and the transfer device is for transporting the object. Preferably, the edge surface is vertical. Alternatively, it is preferable that the edge surface is inclined outward toward the region. [Embodiment] Embodiments of the present invention will be described below with reference to the drawings. The front, rear, left -5 - 1359778, and right side of the patent specification, the patent application scope, and the drawings are defined by the directions indicated as ff and R, respectively. This definition is for the purpose of illustrating that the floating transport apparatus according to the embodiment of the present invention floats in the vertical direction and is transported to a horizontal position such as the rear FR. As the object w, a thin object having a flat surface is suitable, for example, for a thin plate such as a glass substrate used for φ. The object W is not planar, as long as at least one of its lower surface is In order to make it float up, for example, when the thin glass used for the LCD is transported in a dust-free environment, for example, the above floating type is used: it is used in a dust-free environment such as a clean room. As shown in Fig. 1, the floating transport apparatus 1 is a plurality of bases 3 in the front-rear direction, a front-rear φ device 5 on the base 3, and a plurality of rows on the base 3 in the front-rear direction and the left-right direction. The floating device 21 is a fluid supply device for supplying a compressed air supply device to the floating device. The compressed air may be replaced by nitrogen or argon or other fluid such as a liquid. In the left end and the right end of the base 3, a plurality of rollers arranged in the conveying direction of the object W are rotatably supported by the connecting frame 9 integrally with the worm wheel 11 via the rotating shaft 7s. The base 3 is passed through the front. FR L, and the convenience, the hair is set to 1, is used for the direction of transport (the overall is a flat liquid crystal display). It is necessary to have a whole part of the plane is a fluid such as a plane. The necessary heavy equipment 1 such as a substrate must have: In the vicinity of the two directions of the transport direction, the two are connected to each other in the vicinity of the other gas, such as gas supply, and each of the rollers 7 is 7 and is supported by the direction of the backing -6-135-9778. A pair of drive shafts 13 are provided, and each of the drive shafts 13 includes a worm 15 that is drivably coupled to each of the worm wheels 11. The output shaft 17s of the motor 17 are drivably coupled to the front end of each drive shaft 13 via a coupling or the like. Thereby, each of the rollers 7' is driven by the driving force of the motor 17, and is rotatable at the same rotational speed. As shown in Fig. 2, the upper end portions of the respective rollers 7 are only higher than the upper surface of the floating device 21. The microscopically protruded above the ground and arranged in a manner of being aligned on a single plane. The object W, even in the state of being uplifted, as shown in Fig. 2, can be contacted with the roller 7 to be subjected to the driving force. Motor 17 is not It is necessary to have a pair of 'two drive shafts 13' that can be connected to a single motor via a suitable coupling means such as a chain, etc. Further, a transporter such as a clamper or a conveyor belt can be applied to the transport device. Referring to Figures 3 to 5, each of the floating devices 21 is provided with a base portion 23', and the base portions 23' are fixed to the base 3 by the interposer brackets 25. φ Each base portion 23 The inner portion is divided into a chamber 27 for temporarily passing the compressed air supplied from the air supply device. The base portion 23 is provided at a center of the upper portion thereof with a rectangular shape covering the air chamber 27. The island member 3 is further provided with a lower outer member 29 and an upper outer member 33 fixed thereto. The lower and upper outer members 29, 33 surround the island member 31 with a gap therebetween that communicates with the air chamber 27 and allows compressed air to pass therethrough. Hereinafter, the gap defined by the lower and upper outer members 29, 33 and the island member 3 is referred to as a discharge hole 37. 1359778 As shown in Fig. 3, the opening '' of the discharge hole 37 facing the upper surface of the floating device 21 is a rectangular ring shape. That is, as shown in Figs. 3 to 5, the entire discharge hole 37 is a slit which communicates with the annular opening of the above-mentioned rectangle. The vicinity of the upper surface of the floating device 21 above the ejection hole 37 is divided by the inner circumference 31a formed by the island member 31 and the outer circumference 33a and the edge surface 39 formed by the upper outer member 33. . The inner circumference 31a is inclined toward the region (inwardly facing) surrounded by the opening portion. The outer circumference 33a is inclined such that φ is parallel to the inner circumference 31a, but the rim surface 39 adjacent to the upper surface on the outer circumference 33a is not parallel but substantially vertical. The outer circumference 33a may not be correctly parallel with respect to the inner circumference 31a, and may have an appropriate angle. The edge surface 39' is preferably a flat surface in terms of difficulty in production, but may be a curved surface. Alternatively, the rim face 3 9, as shown in Figs. 6 to 7, may be inclined toward the outside. The ejection holes 3 7 ' have at least partially inclined toward the inner side as described above. By the compressed air having the discharge holes inclined toward the inside, the higher the flow rate of the compressed air, the higher the height at which the object W floats. Therefore, the discharge hole 37 which is inclined in the inner side is controlled by the flow rate of the compressed air, and the controllability of the floating height above the object W can be provided. This tendency is more pronounced although the inclination is larger, but since the upper outer member 35 is too large in manufacturing, the inclination is desirably, for example, 45. , but not limited to this. The discharge hole 37 is not limited to a rectangular ring shape, and may have an elliptical ring shape, a shape in which a part of the ring is closed, or other various shapes. The island member 31 is provided with: the width of the discharge hole 37 can be equalized by -8 to 1359778, and the same height is formed on the inclined outer circumference 31a; the protrusion 35 θ is preferably: the island member 31 The upper surface is aligned with the upper portion of the outer member 29 in a single plane. Further preferably, the plurality of upper devices 21' have their aligned upper surfaces aligned further in a planar manner. These are advantageous for stabilizing the height of the object W. Each of the air cells 27 of each of the floating devices 21 communicates with each other by a pipe (not shown), and is also connected to the air supply device. The air supply device 'suppressably supplies compressed air to each of the devices 21 via piping. The air supply device is provided with a blower motor electrically connected to the power supply of the inverter and a blower ‘motorized by the blower motor,' which is not limited thereto. The air supply may include a reading device suitable for reading information of the object W or a controller for controlling the air flow rate. When compressed air is supplied from the air supply means to the respective air chambers 27, compressed air is ejected from the respective discharge holes 37. The compressed air that is ejected 3 to 5 is not between the upper surface of the island member 31 and the lower surface of the object, and the space enclosed by the opening of the ejection hole 37 is such that the compressed air generates equal pressure. Space S. The object W is buoyed upward by being supported by a space S having an equal pressure. On the other hand, the pair of shafts 13 are synchronously rotated by driving the pair of motors 17. By the engagement of the worm wheel 11 and the worm 15, the rotation of the shaft 13 is transmitted to the rollers 7. By contacting the rotating roller [several surface floating type, for the floating air to be supplied to the floating device, the feeding device, the object W, the driving device is driven to drive 135.9778 in the floating transport The object W carried in the apparatus 1 is transported in a floating state. Since the discharge hole 37 is inclined at least partially toward the inside as described above, the compressed air is also ejected toward the inside. On the other hand, a flow toward the outside is generated from the space S. Since the flow of the two is opposite to each other, it causes a flow disorder at the edge of the opening of the discharge hole. In the present embodiment, the opening of the ejection hole 37 is such that the edge is removed by the edge surface 39 which is not inclined toward the inner side, so that the discharged compressed air is partially guided to the outside. Since this flow is integrated with the flow from the space S toward the outside, the flow disturbance is less likely to occur. If it is designed, the pressure in the space S is stabilized, so it helps to stabilize the buoyancy of the object. The above description has been made with reference to the embodiments of the present invention, but the present invention is not limited to the above embodiments. The present invention can be implemented by a person skilled in the art, based on the above-described disclosure, by modification or modification of the embodiment. [Industrial Applicability] The present invention provides a configuration in which the flow of a fluid located around the opening of the discharge hole is stabilized, thereby contributing to the buoyancy of the object, and the floating device and the floating transport device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial plan view of a floating transport apparatus according to an embodiment of the present invention. -10- 1359778 Fig. 2 is a partial section taken along line II-II of Fig. 1. Figure. The stomach 3' is a plan view in which the above-described floating transport apparatus is provided with an upper floating apparatus. Fig. 4 is a partial cross-sectional view taken along line IV-IV of Fig. 3. Fig. 5 is a partial cross-sectional view taken along the line V-V of Fig. 3, and Fig. 6 is a plan view of the floating device of another embodiment of the present invention. Fig. 7' is a partial cross-sectional view taken along line VII-VII of Fig. 6. [Description of main component symbols] 1 : Floating transport device 3 : Abutment 5 : Transport device 7 : Roller 7s : Rotary shaft 9 , 25 : Bracket 1 1 : Worm gear 1 3 : Drive shaft 1 5 : Worm 1 7 : Motor -11 - 1359778 17s : Output shaft 2 1 : Floating device 23 : Base 27 : Air chamber 29 : Lower outer member 3 1 : Island member 3 1 a : Inner circumference
3 3 :上部外廓構件 33a :外周 35 :突起 3 7 :噴出孑L 39 :緣面 FF :前方 FR :後方 L :左方 R :右方 S:壓縮空氣爲均等壓力的空間 W :對象物 -12 -3 3 : Upper outer member 33a : outer circumference 35 : projection 3 7 : discharge 孑 L 39 : edge surface FF : front FR : rear L : left side R : right side S: compressed air is a space of equal pressure W : object -12 -