201024195 六、發明說明 【發明所屬之技術領域】 本發明，是關於在使玻璃基板等之基板上浮的狀態下 往搬運方向進行搬運的上浮式搬運裝置、以及利用空氣等 之氣體的壓力使基板上浮的上浮式單元。 【先前技術】 近年，在無塵搬運領域，對於上浮式搬運裝置有著各 種的開發，作爲上浮式搬運裝置之先前技術有後述之專利 文獻1所示者。 此先前技術之上浮式搬運裝置，係具備有支撐框，於 該支撐框，設有將基板往搬運方向進行搬運的搬運單元》 又，於支撐框，設置有：沿著搬運方向以及與該搬運方向 正交的搬運寬幅方向而設並利用空氣壓力使基板上浮的複 數個上浮式單元。於各上浮式單元的上表面，形成有噴出 〇 空氣的噴嘴。在此，各上浮式單元，係連通於風扇等之空 氣供給源。 因此，藉由空氣供給源，將空氣供給至各上浮式單元 內部再從各上浮式單元的噴嘴使空氣噴出，並且使搬運單 元適切地動作。藉此，藉由上浮式搬運裝置使基板在上浮 的狀態下，而能夠將基板朝向搬運方向進行搬運。 [專利文獻1]日本特開2006- 1 82563號公報 【發明內容】 -5- 201024195 [發明所要解決之問題] 一般而言，爲了充分地確保複數個上浮式單元的上浮 性能，也就是上浮式搬運裝置整體的上浮性能，必須將鄰 接（adjacent)之上浮式單元之間隙的上側部分（上部間 ' 隙）予以縮窄。 今後，作爲搬運對象之基板有日益大型化的傾向。在 搬運大型化的基板時，若縮窄鄰接之上浮式單元的上部間 隙時，於鄰接之上浮式單元間所形成之通路的斷面積也會 @ 變小，使得從上浮式單元之噴嘴所噴出之空氣難以逃逸至 基板的外側。因此，從下方作用於基板中央部之空氣的壓 力會變得較高，以中央部（基板之中央部）隆起之方式使 得基板變形。伴隨於此，基板的端部下沈，容易使得基板 的端部與上浮式單元等干涉而產生基板的損傷。 亦即，要充分地確保上浮式搬運裝置整體的上浮性能 之同時又要搬運大型化之基板之情況時，是具有難以避免 基板之端部與上浮式單元等的干涉，而難以抑制基板損傷 〇 的問題。 本發明的目的，是在於提供一種可以解決前述的問 題，具有嶄新構成的上浮式搬運裝置及上浮式單元。 [發明解決問題之技術手段] 本發明之第1特徵，爲在使基板上浮的狀態下，將基 板朝向搬運方向進行搬運的上浮式搬運裝置，係具備有： 支撐框、及設置於上述支撐框，將基板朝向搬運方向進行 -6 - 201024195 搬運的搬運單元、及沿著上述搬運方向及正交於上述搬運 方向的搬運寬幅方向地設置於上述支撐框，並利用氣體壓 力使基板上浮的複數個上浮式單元。上述上浮式單元，係 分別具備有：於上表面形成有可噴出氣體之噴嘴的上浮式 單元本體、以及設置在該上浮式單元本體的下表面，且其 內部與上述上浮式單元本體之內部連通的上浮式單元腳。 上述上浮式單元腳之上述搬運方向的最大外形尺寸，是比 φ 上述上浮式單元本體之上述搬運方向的最大外形尺寸還 小。各上浮式單元腳爲連通於供給氣體之氣體供給源。 又，於本案之申請專利範圍及專利說明書中，所謂 「設置」，不僅包含直接性的設置之情形，亦包含夾介托 架等之另外構件而間接性的設置之情形。又，所謂「氣 體」，是包含空氣、Μ氣、氮氣等等。 根據第1特徵，藉由上述氣體供給源，將氣體分別供 給至各上浮式單元腳的內部，然後使空氣分別從各上浮式 Φ 單元本體的上述噴嘴噴出，並且使上述搬運單元適切地動 作。藉此，可以使基板在呈上浮的狀態下，將基板朝搬運 方向進行搬運（上述上浮式搬運裝置的一般性作用）。 各上浮式單元，由於具備有：上述上浮式單元本體、 以及設置在上述上浮式單元本體的下表面，且上述搬運方 向的最大外形尺寸比上述上浮式單元本體之上述搬運方向 之最大外形尺寸還小的上述上浮式單元腳，因此，即使將 鄰接於上述搬運方向之上述上浮式單元本體的間隔〔亦 即，鄰接於上述搬運方向之上述上浮式單元之間隙的上側 201024195 部分（上部間隙）〕予以縮窄，也能夠擴開鄰接於上述搬 運方向之上述上浮式單元腳的間隔。因此，可以較大地確 保：鄰接於上述搬運方向上之上浮式單元間所形成之通路 的斷面積，使得從複數個上述上浮式單元本體（上浮式單 ' 元）之上述噴嘴所噴出的空氣可易於逃逸至基板的外側 (上述上浮式搬運裝置之特有的作用）。 本發明的第2特徵，爲利用氣體壓力使基板上浮的上 浮式單元，係具備有：於上表面形成有噴出氣體之噴嘴的 @ 上浮式單元本體、以及設置在上述上浮式單元本體的下表 面，其內部與上述上浮式單元本體之內部連通的上浮式單 元腳。上述上浮式單元腳在單元長度方向的最大外形尺寸 是比上述上浮式單元本體在上述單元長度方向的最大外形 尺寸還小。 根據第2特徵，準備複數個上述上浮式單元，當成構 成要素使用在第1特徵之上述上浮式搬運裝置中時，係可 達成與上述上浮式搬運裝置之特有的作用相同之作用。 @ [發明效果] 根據本發明，即使將鄰接於上述搬運方向之上述上浮 式單元的上部間隙予以縮窄，也能夠較大地確保：上述通 路的斷面積，使得從複數個上述上浮式單元的上述噴嘴所 噴出的空氣可易於逃逸至基板的外側。因此，對於要一面 充分地確保上述上浮式搬運裝置的上浮性能，同時進行大 型化基板搬運之情形時，可以一面高度地保持基板的平坦 -8- 201024195 度，同時避免基板之端部與上浮式單元等之干涉，充分地 抑制基板的損傷。 【實施方式】 (第1實施形態） 對於本發明之第1實施形態，乃參照第1圖至第5圖 說明之。第1圖，是沿著第2圖之I-Ι線的圖面。第2 圖，是第1實施形態之此上浮式搬運裝置的部分平面圖。 第3圖，是沿著第2圖之III-III線的圖面。第4圖，是 顯示第2圖中之箭頭方向觀察部分IV的圖面。第5圖 (a)，是第1實施形態之該上浮式單元的平面圖。第5 圖（b)，是第1實施形態之此上浮式單元的正面圖。 又，在圖面中，分別以「FF」表示爲前方向、以「FR」 表示爲後方向、以「L」表示爲左方向，以「R」表币爲 右方向。 φ 如第2圖至第4圖所示，第1實施形態之上浮式搬運 裝置1，例如是在使玻璃基板等之基板w上浮的狀態下， 將基板W朝向搬運方向（前後方向）進行搬運的裝置， 並具備有延伸於前後方向的支撐框3。支撐框3，係具備 有：延伸於前後方向的支撐台5、及一體地設置於該支撐 台5下側的複數個支柱7、以及連結複數個支柱7的複數 個補強構件9。 於支撐台5，設有將基板W朝向搬運方向進行搬運的 搬運單元11 (請參照第4圖）。以下說明該搬運單元11 -9 - 201024195 的具體 如 近，夾 板W 運滾子 4圖） 17。又 地分別 係具有 21。於 轉的搬 器等而 著。 又 而以1 個搬運 具備有 單元也 如 左右方 空氣的 於前後 取入空 室 25 構成。 第2圖所示，於支撐台5的左端緣附近及右端緣附 介托架15於前後方向隔以間隔設置有用來支撐基 之端緣部之複數個能夠旋轉的搬運滾子（靠左的搬 13以及靠右的搬運滾子13)(請參照第2圖及第 。於各搬運滾子13的旋轉軸，一體地設有蝸輪 ，於支撐台5的左右端緣，透過軸承等而能夠旋轉 設有延伸於前後方向的驅動軸19。各驅動軸19， φ :可與具有對應關係的蝸輪17齒合的複數個蝸桿 支撐台5的左右前端，分別設有使各驅動軸19旋 運馬達23。各搬運馬達23的輸出軸，是透過聯結 與具有對應關係之驅動軸19的前端一體地聯結 ，取代以兩個搬運馬達23使2根驅動軸19旋轉， 個搬運馬達來使之旋轉也可以。又，取代具有複數 滾子13及搬運馬達23等之搬運單元11，而使用 ❹ 夾持基板W端部而移動於前後方向之夾頭的搬運 可以。 第1圖至第3圖所示，於支撐台5，設有：延伸於 向（正交於搬運方向之搬運寬幅方向），且可容納 複數個腔室25。複數個腔室25，係隔以間隔並排 方向（搬運方向）。各腔室25，係於下側具有可 氣的複數個取入口 27(請參照第1圖）。於各腔 的上表面，形成有複數個貫通孔29(請參照第1 -10- 201024195 圖）。於各取入口 27，夾介托架33安裝有將空氣供給至 腔室25內部的風扇（空氣供給源之一例）31。又，在鄰 接於前後方向之腔室25之間，形成有延伸於左右方向， 且朝地面B側呈開口的開口部35。 於各貫通孔29，設置有利用空氣壓力使基板w上浮 的上浮式單元37。亦即，於支撐台5，複數個上浮式單元 37是夾介複數個腔室25沿著前後方向及左右方向而設 φ 置。以下說明各上浮式單元37的具體構成。 如第1圖及第5圖（a) 、（b)所示，各上浮式單元 37’具備有中空之矩形的上浮式單元本體39。於各上浮 式單元本體39的上表面，形成有噴出空氣之狹縫狀的噴 嘴41。又，各噴嘴41，是與上浮式單元本體39的內部連 通，如日本特開2006- 1 82563號公報所示，相對於垂直方 向是朝向單元中心側（上浮式單元37的中心側）傾斜 (請參照第5圖（b))。又，取代狹縫狀的噴嘴41，由 • 孔狀的複數個噴嘴來形成也可以。 於各上浮式單元本體39的下表面中央，一體地形成 有中空之圓筒形的上浮式單元腳43。各上浮式單元腳43 的下端，係一體地連結於貫通孔29的周緣部。又，各上 浮式單元腳43的內部，是連通於腔室25的內部。各上浮 式單元腳43，是夾介腔室25而與風扇31連通。 各上浮式單元腳43之前後方向（單元長度方向）的 最大外形尺寸，是被設成比上浮式單元本體39之前後方 向的最大外形尺寸還小。各上浮式單元37，其由側面觀 -11 - 201024195 察之形狀（側視形狀）是藉由上浮式單元本體39與上浮 式單元腳43以呈T字型之方式所構成（請參照第3 圖）。又，各上浮式單元腳43的左右方向（單元寬幅方 向）的最大外形尺寸，亦被設成比上浮式單元本體39之 左右方向的最大外形尺寸還小。各上浮式單元37，正面 觀察之形狀（正視形狀）亦藉由上浮式單元本體39與上 浮式單元腳43以呈T字型之方式所構成（請參照第4圖 及第5圖（b))。 ❿ 接著，說明本發明之第1實施形態的作用與效果。 利用複數個風扇31使空氣被供給至各腔室25的內 部，藉此使空氣被供給至各上浮式單元腳43的內部，然 後使空氣從各上浮式單元本體39的噴嘴41噴出。又，藉 由兩個搬運馬達23的驅動使兩根驅動軸19同步旋轉，藉 由蝸輪17與蝸桿21的嚙合使複數個左右搬運滾子13朝 向一方向旋轉。藉此，在利用上浮式搬運裝置1使基板W 上浮的狀態下，可以將基板W朝前後方向（前方向或是 〇 後方向）搬運（上浮式搬運裝置1的一般性作用）。 上浮式搬運裝置1，除了前述之一般性作用之外，亦 可達成以下的作用。各上浮式單元37，係具備有：上浮 式單元本體39、以及設置於上浮式單元本體39之下表面 中央，且最大外形尺寸（前後方向及左右方向的最大外形 尺寸）比上浮式單元本體39的最大外形尺寸還小的上浮 式單元腳43，側視形狀及正視形狀是藉由上浮式單元本 體39與上浮式單元腳43以呈T字型之方式所構成。因 -12- 201024195 此，即使縮窄鄰接之上浮式單元本體39(鄰接於前後方 向之上浮式單元本體39，鄰接於左右方向之上浮式單元 本體39)之間隔〔亦即，鄰接之上浮式單元37之間隙的 上側部分（上部間隙）〕，也能夠擴開鄰接之上浮式單元 腳43之間隔。因此，可以較大地確保：於鄰接之上浮式 單元37間所形成之通路p (請參照第丨、3、4圖及第5 圖（b))的斷面積，使得從複數個上浮式單元本體39 φ (上浮式單元37)之噴嘴41所噴出的空氣可易於逃逸至 基板W的外側（上浮式搬運裝置1之特有的作用）。 因此，依據第1實施形態，即使縮窄鄰接之上浮式單 元37的上部間隙，也可以較大地確保通路P的斷面積， 使得從複數個上浮式單元37之噴嘴41所噴出的空氣可易 於逃逸至基板W的外側。因此，對於需要充分地確保上 浮式搬運裝置1之上浮性能之同時又要搬運大型化之基板 W的情況時，能夠一面高度保持基板W的平坦度，同時 ❹ 避免基板W之端部（包含前端部）與上浮式單元37等之 干涉，充分地抑制基板W的損傷。 (第2實施形態） 對於本發明之第2實施形態，乃參照第6圖至第8圖 說明之。 第6圖，是第2實施形態之該上浮式搬運裝置的部分 平面圖。第7圖，是沿著第6圖中之VII-VII線的圖面。 第8圖（a)，是第7圖中之箭頭觀察部VIII的放大圖。 -13- 201024195 第8圖（b)，是第8圖（a)的側面圖。又，在圖面中， 分別以「FF」表示爲前方向，以「FR」表示爲後方向， 以「L」表示爲左方向，以「R」表示爲右方向。 如第6圖及第7圖所示，第2實施形態之該上浮式搬 運裝置45，是在使基板W上浮的狀態下，將基板W朝向 搬運方向（前後方向）進行搬運的裝置，具有與第1實施 形態之該上浮式搬運裝置1大致相同的構成。以下，對於 上浮式搬運裝置45之具體的構成中，說明與上浮式搬運 0 裝置1之構成不同的部分。又，上浮式搬運裝置45中之 複數個構成要素當中，對於與上浮式搬運裝置1之構成要 素相對應者，在圖中標示同一符號並省略該等之說明。 於鄰接於前後方向之上浮式單元37間，設置有斷面 爲C字型之合成樹脂製的遮蔽板47。遮蔽板47，是藉由 射出成型所製作者。又，遮蔽板47的上表面，是位在與 上浮式單元本體39的上表面大致相同高度的位置，或是 位在比上浮式單元本體39的上表面僅僅稍低的高度位 〇 置。遮蔽板47的厚度，爲上浮式單元本體39之高度的 1/10以下（具體而言，在第2實施形態中爲3.0mm以 下）°在此，若是遮蔽板47的厚度超過上浮式單元本體 39之高度的1/10時，就會導致難以較大地確保在鄰接於 前後方向之上浮式單元37間所形成之通路P的斷面積。 於遮蔽板47的兩緣部（前後緣部），分別形成有卡 合爪47s。卡合爪47s，是能夠卡合在：於上浮式單元本 體39所形成的卡合溝39g。亦即，遮蔽板47，是利用使 • 14 - 201024195 卡合爪47s與卡合溝39g卡合、或是解除卡合爪47s與卡 合溝39g的卡合狀態，而能夠對於上浮式單元37裝卸地 構成。 又，在鄰接於左右方向（搬運寬幅方向）之上浮式單 元3 7間也是可以設置遮蔽板。 並且，依據第2實施形態，加乘上第1實施形態的作 用及效果，可以達到如下的作用及效果。 φ 由於在鄰接於前後方向之上浮式單元37間設置遮蔽 板47，遮蔽板47的厚度爲上浮式單元本體39之高度的 1/10以下，所以可以一面較大地確保：在鄰接於前後方向 之上浮式單元37間所形成之通路P的斷面積，同時在鄰 接於前後方向之上浮式單元37間，可以充分地發揮基板 W的上浮力。詳細而言，基板W的前端部在搬運方向上 從上游側的上浮式單元3 7移行至下一個下游側上浮式單 元3 7時，可以抑制基板W之前端側的撓曲。又，所謂基 〇 板W的前端部從上游側的上浮式單元37移行至下一個下 游側上浮式單元37，是意指基板W的前端部從上游側之 上浮式單元37的上方區域往下一個下游側上浮式單元37 的上方區域移動。 又，由於遮蔽板47相對於上浮式單元37爲可以裝 卸，所以藉由預先準備長度（左右方向的長度）不同的複 數種遮蔽板47，可以因應基板W的大小等來調節鄰接於 前後方向之上浮式單元37間之基板W的上浮力。 因此，當基板W的前端部從搬運方向上游側之上浮 -15- 201024195 式單元37移行至下一個下游側上浮式單元37時，由於基 板W之前端側的撓曲受到抑制，所以無論基板W之大 小，皆可迴避基板W的前端部與上浮式單元37等的干 涉，更加充分地抑制基板W的損傷。特別是，由於因應 基板W之大小等，可以調節鄰接於前後方向之上浮式單 元37間之基板W的上浮力，所以可以更加提高前述的效 果。 又，本發明，並非僅限於前述之實施形態者，除此之 外，是能夠以各種的形態來實施。又，於本發明所包含的 權利範圍，並不受此等之實施形態所限定。 【圖式簡單說明】 第1圖，是沿著第2圖中之I-Ι線的圖面。 第2圖，是第1實施形態之該上浮式搬運裝置的部分 平面圖。 第3圖’是沿著第2圖中之III-III線的圖面。 Φ 第4圖，是顯示第2圖中之箭頭觀察部IV的圖面。 第5圖（a)，是第1實施形態之該上浮式單元的平 面圖；第5圖（b) ’是本發明之第1實施形態之該上浮 式單元的正面圖。 第6圖’是第2實施形態之該上浮式搬運裝置的部分 平面圖。 第7圖’是沿著第6圖中之VII-VII線的圖面。 第8圖（a)，是第7圖中之箭頭觀察部VIII的放大 -16- 201024195 圖 8 第 圖 圖 8 第 是 圖 面 側 的 W路板浮 元 要 主 明 說[Technical Field] The present invention relates to a floating transport apparatus that transports a substrate such as a glass substrate in a transport direction, and a substrate that is lifted by pressure of a gas such as air. The floating unit. [Prior Art] In the field of dust-free transportation, various developments have been made for the floating transport apparatus, and the prior art of the floating transport apparatus has been described in Patent Document 1 which will be described later. In the prior art, the floating transport apparatus includes a support frame, and the support frame is provided with a transport unit for transporting the substrate in the transport direction. Further, the support frame is provided along the transport direction and the transport A plurality of floating units that are disposed in the direction of the width of the orthogonal direction and that use the air pressure to float the substrate. A nozzle for ejecting xenon air is formed on the upper surface of each of the floating units. Here, each of the floating units is connected to an air supply source such as a fan. Therefore, air is supplied to the inside of each of the floating units by the air supply source, and air is ejected from the nozzles of the respective floating units, and the transport unit is appropriately operated. Thereby, the substrate can be transported in the conveyance direction by the floating conveyance device in a state where the substrate is floated. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2006- 1 82563 [Description of the Invention] -5 - 201024195 [Problems to be Solved by the Invention] In general, in order to sufficiently ensure the floating performance of a plurality of floating units, that is, floating type The upper floating performance of the conveying device as a whole must narrow the upper portion (upper gap) of the gap of the floating unit above. In the future, there is a tendency for substrates to be transported to become larger. When the large-sized substrate is transported, when the upper gap of the floating unit is narrowed, the area of the passage formed between the adjacent floating units is also reduced to be smaller, so that the nozzle is ejected from the nozzle of the floating unit. The air is difficult to escape to the outside of the substrate. Therefore, the pressure of the air acting on the central portion of the substrate from the lower side becomes higher, and the substrate is deformed so that the central portion (the central portion of the substrate) is swelled. Along with this, the end portion of the substrate sinks, and the end portion of the substrate easily interferes with the floating unit or the like to cause damage of the substrate. In other words, in order to sufficiently ensure the floating performance of the entire floating transport apparatus and to transport a large-sized substrate, it is difficult to avoid interference between the end portion of the substrate and the floating unit, and it is difficult to suppress substrate damage. The problem. SUMMARY OF THE INVENTION An object of the present invention is to provide an upper floating type transport apparatus and a floating type unit which can solve the aforementioned problems and have a novel configuration. [Technical means for solving the problem] The first aspect of the present invention provides a floating transport apparatus that transports a substrate in a transport direction while floating a substrate, and includes: a support frame and a support frame; a transport unit that transports the substrate in the transport direction -6 - 201024195, and a transport unit that is disposed in the support frame along the transport direction and the transport width direction orthogonal to the transport direction, and that is used to lift the substrate by gas pressure Up floating unit. The floating unit is provided with a floating unit body having a nozzle capable of ejecting a gas on an upper surface thereof, and a lower surface provided on the upper unit of the floating unit, and an inner portion thereof communicates with an interior of the floating unit body. The upper unit foot. The maximum outer dimension of the floating unit foot in the conveyance direction is smaller than the maximum outer dimension of the upper floating unit body in the conveyance direction. Each of the floating unit legs is a gas supply source that is connected to the supply gas. Further, in the patent application scope and the patent specification of the present application, the "setting" includes not only a direct setting but also an indirect setting of another member such as a tray. Also, the term "gas" includes air, helium, nitrogen, and the like. According to the first aspect, the gas is supplied to the inside of each of the floating unit legs by the gas supply source, and then the air is ejected from the nozzles of the respective floating Φ unit bodies, and the transport unit is appropriately operated. Thereby, the substrate can be transported in the transport direction in a state of being lifted up (the general action of the above-described floating transport apparatus). Each of the floating unit includes: the floating unit body; and a lower surface of the floating unit body, wherein a maximum outer dimension of the transport direction is larger than a maximum outer dimension of the transport unit of the floating unit body Since the above-mentioned floating unit foot is small, the interval of the upper floating unit body adjacent to the conveyance direction is obtained (that is, the upper side 201024195 portion (upper gap) adjacent to the gap of the floating unit in the conveyance direction) By narrowing it, it is also possible to expand the interval of the above-mentioned floating unit legs adjacent to the conveyance direction. Therefore, it is possible to largely ensure that the area of the passage formed by the passage formed between the floating units in the above-described conveying direction is such that the air ejected from the nozzles of the plurality of floating unit bodies (the floating single unit) can be It is easy to escape to the outside of the substrate (the unique function of the above floating transport device). According to a second aspect of the present invention, a floating unit that floats a substrate by a gas pressure is provided with an @up floating unit body in which a nozzle for ejecting a gas is formed on an upper surface, and a lower surface provided on the upper unit of the floating unit a floating unit foot that communicates with the interior of the floating unit body. The maximum outer dimension of the above-mentioned floating unit foot in the longitudinal direction of the unit is smaller than the maximum outer shape of the above-mentioned floating unit body in the longitudinal direction of the unit. According to the second feature, a plurality of the above-described floating units are prepared, and when the constituent elements are used in the above-described floating transport apparatus of the first feature, the same functions as those of the above-described floating transport apparatus can be achieved. [Effect of the Invention] According to the present invention, even if the upper gap of the floating unit adjacent to the conveyance direction is narrowed, it is possible to largely ensure the sectional area of the passage so that the plurality of the above-described floating units are The air ejected from the nozzle can easily escape to the outside of the substrate. Therefore, in order to sufficiently ensure the floating performance of the floating transport apparatus and to carry out large-scale substrate transportation, it is possible to highly maintain the flatness of the substrate -8 - 201024195 degrees while avoiding the end portion of the substrate and the floating type. Interference of cells or the like sufficiently suppresses damage of the substrate. [Embodiment] (First Embodiment) A first embodiment of the present invention will be described with reference to Figs. 1 to 5 . Fig. 1 is a view along the I-Ι line of Fig. 2. Fig. 2 is a partial plan view showing the floating transport apparatus of the first embodiment. Fig. 3 is a view taken along line III-III of Fig. 2. Fig. 4 is a view showing the observation portion IV in the direction of the arrow in Fig. 2. Fig. 5 (a) is a plan view showing the floating unit of the first embodiment. Fig. 5(b) is a front elevational view of the floating unit of the first embodiment. Further, in the drawing, "FF" indicates the front direction, "FR" indicates the rear direction, "L" indicates the left direction, and "R" indicates the right direction. φ As shown in FIG. 2 to FIG. 4, the floating conveyance device 1 of the first embodiment conveys the substrate W in the conveyance direction (front-rear direction) while floating the substrate w such as a glass substrate. The device has a support frame 3 extending in the front-rear direction. The support frame 3 includes a support base 5 extending in the front-rear direction, a plurality of support posts 7 integrally provided on the lower side of the support base 5, and a plurality of reinforcing members 9 connecting the plurality of support posts 7. The support base 5 is provided with a transport unit 11 that transports the substrate W in the transport direction (see Fig. 4). The details of the handling unit 11 -9 - 201024195 are as follows, and the clamping plate W is carried out by a roller. Also, there are 21 respectively. The transferer is waiting for the transfer. In addition, one transporting unit is provided with a unit such as left and right air, and the air chamber 25 is taken in front and rear. As shown in Fig. 2, in the vicinity of the left end edge of the support table 5 and the right end edge attachment bracket 15, a plurality of rotatable carrying rollers for supporting the end edge portion of the base are provided at intervals in the front-rear direction (leftward The transporting 13 and the right transporting roller 13) (Please refer to Fig. 2 and the above. The worm wheel is integrally provided with the rotating shaft of each of the transport rollers 13, and the left and right end edges of the support base 5 can be transmitted through bearings or the like. The drive shaft 19 extending in the front-rear direction is provided in rotation. Each of the drive shafts 19, φ: the left and right front ends of the plurality of worm support tables 5 that can be engaged with the worm wheel 17 having the corresponding relationship are respectively provided to rotate the drive shafts 19 The motor 23 has an output shaft of each of the transport motors 23 integrally coupled to the distal end of the drive shaft 19 having a corresponding relationship, and the two drive shafts 23 are rotated by the two transport motors 23, and the motor is rotated to be rotated. In addition, instead of the transport unit 11 including the plurality of rollers 13 and the transport motor 23, the transport of the chuck in the front-rear direction by sandwiching the end portion of the substrate W may be used. Fig. 1 to Fig. 3 Shown on the support table 5, provided with: The plurality of chambers 25 are accommodated in the direction of the width direction of the transport direction (orthogonal to the transport direction). The plurality of chambers 25 are spaced apart from each other (the transport direction). Each chamber 25 is attached to the lower side. There are a plurality of air inlets 27 (see Fig. 1). A plurality of through holes 29 are formed in the upper surface of each cavity (refer to the figure 1-10-201024195). The medium bracket 33 is provided with a fan (an example of an air supply source) 31 that supplies air to the inside of the chamber 25. Further, between the chambers 25 adjacent to the front-rear direction, a direction extending in the left-right direction and facing the ground B is formed. The opening 35 is open at the side. The through hole 29 is provided with a floating unit 37 that floats the substrate w by air pressure. That is, in the support table 5, a plurality of floating units 37 are interposed by a plurality of chambers. 25 is set to φ in the front-rear direction and the left-right direction. The specific configuration of each of the floating units 37 will be described below. As shown in Figs. 1 and 5 (a) and (b), each of the floating units 37' is provided. a hollow rectangular upper floating unit body 39. A nozzle 41 having a slit shape in which air is ejected is formed on the upper surface of the air surface 39. Further, each of the nozzles 41 communicates with the inside of the floating unit body 39, as shown in Japanese Laid-Open Patent Publication No. 2006-182563, as opposed to vertical. The direction is inclined toward the center side of the unit (the center side of the floating unit 37) (refer to Fig. 5(b)). Alternatively, instead of the slit-shaped nozzle 41, a plurality of nozzles may be formed. A hollow cylindrical floating unit foot 43 is integrally formed at the center of the lower surface of each of the floating unit main bodies 39. The lower end of each of the floating unit legs 43 is integrally coupled to the peripheral portion of the through hole 29. The inside of each floating unit leg 43 is connected to the inside of the chamber 25. Each of the floating unit legs 43 is a sandwich chamber 25 and communicates with the fan 31. The maximum outer dimension of each of the floating unit legs 43 in the front-rear direction (unit length direction) is set to be smaller than the maximum outer dimension in the front-rear direction of the floating unit body 39. Each of the floating unit 37, which is viewed from the side view -11 - 201024195 (side view shape), is formed in a T-shape by the floating unit body 39 and the floating unit unit 43 (please refer to the third type). Figure). Further, the maximum outer dimension of each of the floating unit legs 43 in the left-right direction (unit width direction) is also set to be smaller than the maximum outer dimension of the floating unit body 39 in the left-right direction. The shape of the upper floating unit 37 (front view shape) is also formed in a T-shape by the floating unit body 39 and the floating unit unit 43 (please refer to FIG. 4 and FIG. 5(b). ). Next, the action and effect of the first embodiment of the present invention will be described. Air is supplied to the inside of each of the chambers 25 by a plurality of fans 31, whereby air is supplied to the inside of each of the floating unit legs 43, and then air is ejected from the nozzles 41 of the respective floating unit bodies 39. Further, the two drive shafts 19 are synchronously rotated by the driving of the two transport motors 23, and the plurality of left and right transport rollers 13 are rotated in one direction by the meshing of the worm wheel 17 and the worm 21. By this, in the state in which the substrate W is floated by the floating transport apparatus 1, the substrate W can be transported in the front-rear direction (front direction or rearward direction) (the general action of the floating transport apparatus 1). The floating transport apparatus 1 can achieve the following effects in addition to the general effects described above. Each of the floating unit 37 includes a floating unit body 39 and a center disposed on the lower surface of the floating unit body 39, and the maximum outer dimensions (the maximum outer dimensions in the front-rear direction and the left-right direction) are higher than the floating unit body 39. The maximum outer size of the floating unit foot 43 is also small, and the side view shape and the front view shape are formed by the floating unit body 39 and the floating unit unit 43 in a T-shape. -12-201024195, even if the floating unit body 39 (adjacent to the floating unit body 39 in the front-rear direction, adjacent to the floating unit body 39 in the left-right direction) is narrowed (i.e., adjacent to the floating type) The upper portion (upper gap) of the gap of the unit 37 can also expand the space adjacent to the upper floating unit leg 43. Therefore, it is possible to largely ensure that the cross-sectional area of the via p (see FIGS. 3, 4, and 5 (b)) formed between the adjacent floating cells 37 is such that the plurality of floating unit bodies are The air ejected from the nozzle 41 of φ (the floating unit 37) can easily escape to the outside of the substrate W (the unique function of the floating transport device 1). Therefore, according to the first embodiment, even if the upper gap of the floating unit 37 is narrowed, the sectional area of the passage P can be largely ensured, so that the air ejected from the nozzles 41 of the plurality of floating units 37 can be easily escaped. To the outside of the substrate W. Therefore, in the case where it is necessary to sufficiently ensure the floating performance of the floating transport apparatus 1 while transporting the enlarged substrate W, it is possible to maintain the flatness of the substrate W while maintaining the end portion of the substrate W (including the front end). The part) interferes with the floating unit 37 or the like to sufficiently suppress the damage of the substrate W. (Second Embodiment) A second embodiment of the present invention will be described with reference to Figs. 6 to 8 . Fig. 6 is a partial plan view showing the floating transport apparatus of the second embodiment. Fig. 7 is a view along the line VII-VII in Fig. 6. Fig. 8(a) is an enlarged view of the arrow observing portion VIII in Fig. 7. -13- 201024195 Fig. 8(b) is a side view of Fig. 8(a). Further, in the drawing, "FF" indicates the front direction, "FR" indicates the rear direction, "L" indicates the left direction, and "R" indicates the right direction. As shown in FIG. 6 and FIG. 7 , the floating transport apparatus 45 according to the second embodiment is configured to transport the substrate W in the transport direction (front-rear direction) while the substrate W is being floated. The floating transport apparatus 1 of the first embodiment has substantially the same configuration. Hereinafter, in the specific configuration of the floating transport device 45, a portion different from the configuration of the floating transport 0 device 1 will be described. In the above-mentioned components of the floating transport apparatus 45, the same reference numerals are given to the components of the floating transport apparatus 1, and the description thereof is omitted. A shielding plate 47 made of a synthetic resin having a C-shaped cross section is provided between the floating units 37 adjacent to the front-rear direction. The shielding plate 47 is produced by injection molding. Further, the upper surface of the shielding plate 47 is located at substantially the same height as the upper surface of the floating unit body 39, or is located at a position slightly lower than the upper surface of the floating unit body 39. The thickness of the shielding plate 47 is 1/10 or less of the height of the floating unit main body 39 (specifically, 3.0 mm or less in the second embodiment). Here, if the thickness of the shielding plate 47 exceeds the floating unit body. At 1/10 of the height of 39, it is difficult to largely ensure the sectional area of the passage P formed between the floating units 37 adjacent to the front-rear direction. Engagement claws 47s are formed in both edge portions (front and rear edge portions) of the shield plate 47, respectively. The engaging claw 47s is engageable with the engaging groove 39g formed by the floating unit body 39. In other words, the shielding plate 47 can be engaged with the engaging groove 39g or the engaging claw 47s and the engaging groove 39g can be released from each other, and the floating unit 37 can be used for the floating unit 37. The loading and unloading structure. Further, a shielding plate may be provided between the floating units 37 in the vicinity of the left-right direction (transport width direction). Further, according to the second embodiment, by adding the effects and effects of the first embodiment, the following actions and effects can be obtained. φ Since the shielding plate 47 is provided between the floating units 37 adjacent to the front-rear direction, the thickness of the shielding plate 47 is 1/10 or less of the height of the floating unit body 39, so that it can be largely ensured to be adjacent to the front-rear direction. The cross-sectional area of the passage P formed between the floating units 37 and the floating unit 37 adjacent to the front-rear direction can sufficiently exhibit the buoyancy of the substrate W. Specifically, when the front end portion of the substrate W is moved from the upstream floating unit 37 to the next downstream floating device 3 in the conveyance direction, the deflection of the front end side of the substrate W can be suppressed. Further, the front end portion of the base sheet W is moved from the upstream floating unit 37 to the next downstream floating unit 37, which means that the front end portion of the substrate W is lowered from the upper side of the floating unit 37 on the upstream side. The upper area of one downstream side floating unit 37 moves. In addition, since the shielding plate 47 is detachable with respect to the floating unit 37, a plurality of types of shielding plates 47 having different lengths (longitudinal lengths in the left-right direction) are prepared in advance, and it is possible to adjust the adjacent to the front-rear direction in accordance with the size of the substrate W or the like. The buoyancy of the substrate W between the floating units 37. Therefore, when the front end portion of the substrate W is moved from the upstream side of the conveyance direction to the next downstream side floating unit 37, the deflection of the front end side of the substrate W is suppressed, regardless of the substrate W. The size of the substrate W can be avoided by interference between the tip end portion of the substrate W and the floating unit 37, and the damage of the substrate W can be more sufficiently suppressed. In particular, since the buoyancy of the substrate W adjacent to the floating unit 37 in the front-rear direction can be adjusted in accordance with the size of the substrate W or the like, the above-described effects can be further enhanced. Further, the present invention is not limited to the above-described embodiments, and can be implemented in various forms. Further, the scope of the invention is not limited by the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view along the I-Ι line in Fig. 2. Fig. 2 is a partial plan view showing the floating transport apparatus of the first embodiment. Fig. 3' is a view along the line III-III in Fig. 2. Φ Fig. 4 is a view showing the arrow observation portion IV in Fig. 2 . Fig. 5(a) is a plan view of the floating unit of the first embodiment, and Fig. 5(b) is a front view of the floating unit according to the first embodiment of the present invention. Fig. 6 is a partial plan view showing the floating transport apparatus of the second embodiment. Fig. 7' is a view along the line VII-VII in Fig. 6. Fig. 8(a) is an enlargement of the arrow observation portion VIII in Fig. 7 -16 - 201024195 Fig. 8 Fig. 8 Fig. 8 is the W-plate floating element on the side of the figure.
通基 p W 浮撐撐 上支支 置 裝 遲 搬 式框台 運室入通扇架浮浮嘴浮浮蔽 搬腔取貫風托上上噴上上遮 元 單 口孔 體 本 元元 單單 式式 置 腳裝 元運 單搬 式式板 -17-通基 p W 浮 撑 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上Foot-mounted, single transport single-handle plate-17-