CN101715421A - Levitation transportation device - Google Patents
Levitation transportation device Download PDFInfo
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- CN101715421A CN101715421A CN200880021730A CN200880021730A CN101715421A CN 101715421 A CN101715421 A CN 101715421A CN 200880021730 A CN200880021730 A CN 200880021730A CN 200880021730 A CN200880021730 A CN 200880021730A CN 101715421 A CN101715421 A CN 101715421A
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- China
- Prior art keywords
- fluid
- hoverheight
- control
- floating carrier
- levitation
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Abstract
A levitation transportation device for transporting an object having a lower surface while levitating it by fluid. The levitation transportation device has one or more bases, a fluid supply device, a reading device, a control device, and a transportation device. The one or more bases each have, formed in it, a chamber through which the fluid passes and further each have a flat upper surface and a nozzle that communicates with the chamber and jets the fluid. The nozzle is formed to have its opening in the upper surface, is arranged so as to create, between that region of the upper surface which is surrounded by the opening and the lower surface of the object, a space in which the fluid has uniform pressure, and tilts at least near the upper surface toward the inside of the region. The fluid supply device pressurizes the fluid and supplies the pressurized fluid to the chamber. The reading device reads information selected from a group consisting of the levitation heights of the object and the type of the object. The control device controls the fluid supply device in order to adjust the levitation height according to the information read by the reading device. The transportation device transports the object.
Description
Technical field
The fluid that the present invention relates to use pressurized air etc. is while the floating carrier that makes object suspend and carry.
Background technology
Disclose in the prior art the multiple floating carrier of carrying when by the fluid that uses pressurized air etc. object being suspended is arranged.These floating carriers possess levitation device typically, and this levitation device has the nozzle that the fluid that makes air etc. passes through.The fluid generation pressure of the air that sprays between levitation device and object etc., object suspends by this pressure, and accepts the propulsive effort of feedway and be transferred.Correlation technique is recorded in Japanese Patent Application Publication communique 2006-182563 number.
Existing floating carrier for want of changes the ability of controlled object thing hoverheight, thereby because object shape or character, worries that object and levitation device etc. contact.
Summary of the invention
The object of the present invention is to provide and a kind ofly can prevent the floating carrier that object contacts with levitation device by the height of controlled object thing.
First scheme of the present invention provides a kind of floating carrier, is used for the object with lower surface is suspended and carrying by fluid, and described floating carrier has:
More than one base portion, divide the cell that described fluid passes through, and have plane upper surface and squit hole respectively, this squit hole forms at described upper surface has peristome, and be configured to and between the described lower surface of the zone of the described upper surface that described peristome surrounds and described object, form the space that makes described fluid generation uniform pressure, at least near described upper surface to the inner inclination in described zone, be used for being communicated with and spray described fluid with described cell;
Fluid supply apparatus is supplied with described fluid thereby described fluid exerted pressure to described cell;
Reading device reads the information of selecting from the group that kind constituted by the hoverheight of described object, described object;
Control setup is controlled described fluid supply apparatus, and the feasible described information that is read with described reading device is regulated described hoverheight accordingly;
Feedway is used to carry described object.
Be preferably, described control setup has treater, and described treater is controlled as described hoverheight is carried out for fixing controlled reset described.
Perhaps be preferably, described control setup has:
Memory storage, be used to store a plurality of kinds and respectively with the cooresponding a plurality of control laws of described kind;
Treater reads in described a plurality of control law one by the described information that will be read and described a plurality of varietal checks of being stored, and carries out described control accordingly with a described control law.
Description of drawings
Fig. 1 is the front elevation of expression according to the summary of the floating carrier of first embodiment of the invention.
Fig. 2 is the diagram of circuit of the control of the described floating carrier of expression.
Fig. 3 is the chart of relation of the suspension amount of the flow supplied with of expression and object.
Fig. 4 is the part birds-eye view of expression according to the floating carrier of the first embodiment of the invention or second embodiment.
Fig. 5 is the cutaway drawing of the V-V line of presentation graphs 4.
Fig. 6 is the birds-eye view of the expression levitation device that described floating carrier had.
Fig. 7 represents the cutaway drawing obtained along the VII-VII line of Fig. 6.
Fig. 8 is the cutaway drawing that expression obtains along the VIII-VIII line of Fig. 6.
Fig. 9 is the front elevation of summary of the floating carrier of expression second embodiment of the invention.
Figure 10 is the diagram of circuit of the control of the described floating carrier of expression.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the present invention are described.In this specification sheets, claims and accompanying drawing, the place ahead, rear, left and the right-hand direction that is defined as respectively in the drawings with FF, FR, L and R mark.These definition are only lifted for convenience of description, and the present invention is not limited to these contents.
First embodiment
According to the floating carrier 1 of first embodiment of the invention,, be to be used to make object W device to horizontal feed direction (for example rear FR) conveying after vertical direction suspends as Fig. 1 and shown in Figure 4.As object W, be preferably and all be plane relatively thinner object, for example the thin plate of the glass substrate of LCD (Liquid Crystal Display (LCD)) usefulness etc.Object W need not all to be plane, and at least a portion of a need object W lower surface is plane and gets final product.For object W is suspended, utilize for example such fluid of air.
Object W need use under the cleaning ambient that described floating carrier 1 can wait in the clean room under the situation of the article of carrying under the dustfree environment of thin glass substrate that LCD uses etc.
As Fig. 1, Fig. 4 and shown in Figure 5, floating carrier 1 possesses: the base station 3 of direction extension forwards, backwards; Form the feedway 5 of row at base station 3 upper edge fore-and-aft directions; And a plurality of levitation devices 7 that form row in two directions of base station 3 upper edge fore-and-aft directions and left and right directions.On levitation device 7, be connected with as being used to supply with the fluid supply apparatus of fluid and supply with compressed-air actuated gas supply device 9.Also can utilize other fluids of other gases of nitrogen or argon gas etc. or liquid etc., replace pressurized air.
Motor 21 need not to be provided with a pair of, and the suitable bindiny mechanism that also can be two axle drive shafts 17 by chain etc. is connected with single motor.And, also can be that conveying mechanism with drivable clamper (Network ラ Application パ) or belt conveyer etc. is applied to feedway 5 and replaces roller.
With reference to Fig. 3～Fig. 5, each levitation device 7 has base portion 25, and each base portion 25 is fixed on the base station 3 by carriage 27.Each base portion 25 side within it marks off cell 29, and this cell 29 is used to make from gas supply device 9 compressed and supplied air and temporarily passes through.
With reference to Fig. 6～Fig. 8, squit hole 39 is rectangular apertures.At squit hole 39, the part of being surrounded by the periphery of the interior week of bottom peripheral components 31 and island shape parts 33 is in the state that approximate vertical erects.On the other hand, interior all 35a of top peripheral components 35 are to inner inclination, at the cooresponding with it top 33a of the periphery of island shape parts 33 also to inner inclination.
For the above-mentioned inclination of top 33a and interior all 35a, in squit hole 39, the part of being divided by top 33a and interior all 35a, be that squit hole 39 is to inner inclination near the upper surface of levitation device 7.Almost not towards under the in-to-in bevelled situation, be under the vertical situation, shown in the comparative example of Fig. 3, if compressed-air actuated flow for more than to a certain degree, then the height of object W suspension relies on compressed-air actuated flow hardly.Even promptly control compressed-air actuated flow, also be difficult to the hoverheight of controlled object thing W.Be under the situation more than 0 ° towards the in-to-in inclination angle, particularly under the situation more than 45 °, shown in the embodiment of Fig. 3, the compressed-air actuated flow hoverheight of multi-object thing W more is high more.Therefore, ring-type and hoverheight controlled of object W is provided by compressed-air actuated flow control towards the squit hole 39 of inner inclination.This tendency is big more and obvious more along with tilting, but can cause the making difficulty of top peripheral components 35 when excessive because this tilts, so the inclination angle is preferably for example 45 °, but is not limited to this.
Be preferably, the upper surface of island shape parts 33 and the upper surface of top peripheral components 35 are aligned to the mono-plane.And, being preferably, a plurality of levitation devices 7 are aligned to, and make the described upper surface that has alignd further form single plane each other.These help stablizing object W hoverheight.
With reference to Fig. 4, each cell 29 of each levitation device 7 is interconnected by pipe arrangement 41, and is communicated with gas supply device 9.
Gas supply device 9 possesses supply ventilating fan 43, by pipe arrangement 41 pressurized air is offered each levitation device 7.Supply ventilating fan 43 utilizes the supply ventilating fan motor 45 that is electrically connected with inverter power supply 47 controllably to drive, and the compressed and supplied charge air is controlled.Also can utilize any mechanism of the may command compressed air require of compressor with control cock etc., replace supply ventilating fan 43.
Inverter power supply 47 is connected with controller 53.Controller 53 has the treater of memory storage and so-called CPU, and dynamically control is used for the supply ventilating fan control part 55 of the frequency of control change device power supply 47.And controller 53 is electrically connected with laser length meter 49 described later, with reference to the hoverheight that is read.Memory device stores has target hoverheight and program, and this program constitutes control supply ventilating fan control part 55 so that the hoverheight of object W is consistent with the target hoverheight.Controller 53 is according to the hoverheight that is read and utilize described program, and the frequency control by inverter power supply 47 comes supply ventilating fan 43 is carried out controlled reset, thereby makes hoverheight reach certain value.
Levitation device 1 further has laser length meter 49, and described laser length meter 49 is fixed on appropriate location on the base station 3 by supporting arm 51.Laser length meter 49 constitutes the hoverheight that reads as the object W of the information of object W.Also can utilize suitable determinator to read hoverheight, replace laser length meter.
If utilize the driving of supply ventilating fan motor 45 to supply with pressurized air, then from each squit hole 39 ejection pressurized air to the cell 29 of a plurality of levitation devices 7.The pressurized air that is sprayed such as Fig. 6～shown in Figure 8 between the lower surface of the upper surface of island shape parts 33 and object W and the space that surrounds of the opening of squit hole 39, produce the space S that makes described pressurized air generation uniform pressure.By by the space S support with uniform pressure, described object is endowed buoyancy and suspends.On the other hand, by driving a pair of motor 21 a pair of axle drive shaft 17 is synchronously rotated.By the engagement of worm gear 15 and worm screw 19, the rotation of axle drive shaft 17 is passed to each roller 11.Contact by the roller 11 with rotation, the object W that moves on the floating carrier 1 is transferred under the state that suspends.
Floating carrier 1 is because of having the combination of levitation device 7, gas supply device 9, so the hoverheight that can come controlled object thing W by compressed-air actuated flow control, wherein, described levitation device 7 has to inner bevelled squit hole 39, and it is the controlled reset of fixing that described gas supply device 9 makes hoverheight.
That is, with reference to Fig. 2, the conveying (S11) of floating carrier 1 beginning object W, the hoverheight (S12) of laser length meter 49 detected object thing W.Controller 53 makes hoverheight reach the controlled reset of frequency of the inverter power supply 47 of object height and control supply ventilating fan 43 (S13) according to the hoverheight of the object W that is read.Say so in more detail and dynamically carry out following control, promptly, the control that under the situation of the hoverheight that is read, improves frequency, under the situation of the hoverheight that is read, reduce the control of frequency greater than the target hoverheight less than the target hoverheight.Because the high more just feasible more compressed-air actuated flow of supply ventilating fan 43 that utilizes of frequency increases, and hoverheight is improved.
In course of conveying, object W will be when a levitation device moves on on other levitation devices of adjacency, owing between two levitation devices, be applied to the buoyancy deficiency of object W, thereby worry because the shape of object W or character and contact with any levitation device.In this case,, can carry out the control of the hoverheight of pre-sizing according to the levitation device 1 of present embodiment, thus the problem that can avoid object W to contact with levitation device.Otherwise under the little situation of the worry of contact, the output of may command supply ventilating fan 43 realizes power saving.
Second embodiment
The floating carrier 57 of second embodiment of the invention is to be used for the device to horizontal feed direction (for example rear FR) conveying after vertical direction suspends with object W as Fig. 9 and shown in Figure 4.Wherein, base station 3, feedway 5, the identical parts of levitation device 7 applicable and above-mentioned first embodiments, the therefore detailed description of omitting this part.
Air transporting arrangement 59 has supply ventilating fan 61, can compressed-air supply be arrived each levitation device 7 by pipe arrangement 41.Utilize the supply ventilating fan motor 63 that is electrically connected with inverter power supply 65 controllably to drive supply ventilating fan 61.
Inverter power supply 65 is connected with controller 71.Controller 71 has memory storage 73, input part 75, treater 77 and supply ventilating fan control part 79.Memory storage 73 store a plurality of kinds, respectively with cooresponding a plurality of control laws of each kind and the program that is used to drive treater 77.Input part 75 constitutes the kind information conversion that will utilize code reader 67 described later to be read and is treater 77 available digital datas, so that be input to treater 77.Treater 77 constitutes and can read the control corresponding rule from a plurality of control laws by a plurality of varietal checks that kind information and memory storage 73 are stored.Treater 77 constitutes according to a described control law that is read and controls supply ventilating fan control part 79.Promptly, controller 71 is according to the kind information that is read and utilize described program, based on the control law that adapts to kind, the frequency control by inverter power supply 65 comes supply ventilating fan 61 is controlled.
Control law is meant the control law by the compressed air require of each kind defined, can be certain value, also can be through the time value that changes.And, also can comprise the information relevant with delivery speed.
Floating carrier 57 also has code reader 67, and described code reader 67 is fixed on the suitable position of base station 3 by supporting arm 69.Code reader 67 constitutes and can read the kind information relevant code subsidiary with object W.Code can use bar code, two-dimension code or other any performances, and code reader 67 uses the code that is applicable to available performance.
Floating carrier 57 is because of having the combination of levitation device 7 and gas supply device 59, can come the hoverheight of controlled object thing W by compressed-air actuated flow control, wherein, described levitation device 7 has to inner bevelled squit hole 39, and described gas supply device 59 and kind information is Be Controlled accordingly.Described control is performed according to the control law that is fit to kind.
Promptly, with reference to Figure 10, before the conveying of beginning object W, code reader 67 reads the code (S21) of kind information, input part 75 is code digitization (S22), with digitalisation kind information input processor 77.A plurality of kinds that treater 77 is stored by the kind information that will be read and memory storage 73 contrast selects specific drive condition (S23).Treater 77 is further controlled supply ventilating fan 61 (S24), the hoverheight of controlled plant thing W thus based on described drive condition.Then, the conveying (S25) of floating carrier 57 beginning object W.Be not limited to foregoing from the context of step S21～step S24 and step S25.
In course of conveying,, also may there be the problem that contacts with any levitation device with character owing to the shape of object W even it is enough to be applied to the lift force of object W.Can prevent the hoverheight that contacts and this is decided to be control law if investigate in advance according to the shape of object or character, and store the combination of kind information and control law into memory storage 73, suspend and object conveyor thing W when then the floating carrier 57 of present embodiment can prevent to contact based on control law.Otherwise under the little situation of the possibility of contact, the output that can control supply ventilating fan 61 realizes power saving.
Above-mentioned first embodiment and second embodiment can carry out appropriate combination.Promptly, floating carrier can be constituted when object W being suspended and make this hoverheight reach the dynamic control of certain value based on control law.
Above reference preferred implementation of the present invention is illustrated, but the present invention is not limited to the content of above-mentioned embodiment.Personnel with present technique field ordinary skill can implement the present invention by modification or distortion to embodiment based on above-mentioned disclosure.
Utilizability on the industry
A kind of floating carrier by the hoverheight of object being controlled prevent that object from contacting with levitation device etc. is provided.
Claims (3)
1. a floating carrier is used for by fluid the object with lower surface being suspended and conveying, it is characterized in that having:
More than one base portion, divide the cell that described fluid passes through, and have the upper surface and the squit hole that are plane respectively, this squit hole forms at described upper surface has peristome, and be configured to and can between the described lower surface of the zone of the described upper surface that described peristome surrounds and described object, form the space that makes described fluid produce uniform pressure, at least near described upper surface to the inner inclination in described zone, be used for being communicated with and spray described fluid with described cell;
Fluid supply apparatus is supplied with described fluid thereby described fluid exerted pressure to described cell;
Reading device reads the information of selecting from the group that kind constituted by the hoverheight of described object, described object;
Control setup is controlled described fluid supply apparatus, makes to regulate described hoverheight accordingly with the described information of utilizing described reading device to read; And
Feedway is used to carry described object.
2. floating carrier according to claim 1 is characterized in that,
Described control setup possesses treater, and described treater is controlled as described hoverheight is carried out for fixing controlled reset described.
3. floating carrier according to claim 1 is characterized in that,
Described control setup has:
Memory storage, store a plurality of kinds and respectively with the cooresponding a plurality of control laws of described kind;
Treater reads in described a plurality of control law one by the described information that will be read and described a plurality of varietal checks of being stored, and carries out described control accordingly with a described control law.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007173446A JP2009012877A (en) | 2007-06-29 | 2007-06-29 | Float-carrying device |
| JP173446/2007 | 2007-06-29 | ||
| PCT/JP2008/058624 WO2009004858A1 (en) | 2007-06-29 | 2008-05-09 | Levitation transportation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101715421A true CN101715421A (en) | 2010-05-26 |
Family
ID=40225915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880021730A Pending CN101715421A (en) | 2007-06-29 | 2008-05-09 | Levitation transportation device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2009012877A (en) |
| KR (2) | KR101135000B1 (en) |
| CN (1) | CN101715421A (en) |
| TW (2) | TW200914350A (en) |
| WO (1) | WO2009004858A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102923480A (en) * | 2011-08-12 | 2013-02-13 | 大银微系统股份有限公司 | Pipeline integration structure of air-floating platform |
| WO2013139053A1 (en) * | 2012-03-23 | 2013-09-26 | 深圳市华星光电技术有限公司 | Extraction device of glass substrates |
| CN106938785A (en) * | 2017-02-28 | 2017-07-11 | 江苏科技大学 | A kind of glass substrate air-floating apparatus and detection method with shape changing detection function |
| CN114476681A (en) * | 2022-03-09 | 2022-05-13 | 河北泰晶新材料科技有限公司 | Material conveying system, material conveying method and storage medium |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5372824B2 (en) * | 2010-03-30 | 2013-12-18 | 大日本スクリーン製造株式会社 | Substrate processing apparatus and substrate processing method |
| JP5495065B2 (en) * | 2010-12-06 | 2014-05-21 | 株式会社ダイフク | Plate-shaped body transfer device |
| JP5582021B2 (en) * | 2010-12-22 | 2014-09-03 | 村田機械株式会社 | Article conveying device |
| TWI583608B (en) * | 2016-11-29 | 2017-05-21 | 盟立自動化股份有限公司 | Floating platform for transporting a plate member |
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| JP2006182563A (en) * | 2004-12-01 | 2006-07-13 | Ishikawajima Harima Heavy Ind Co Ltd | Floating device and carrying device |
| JP2007088201A (en) * | 2005-09-22 | 2007-04-05 | Tokyo Electron Ltd | Method and device for processing substrate |
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| JP4187366B2 (en) * | 1999-09-28 | 2008-11-26 | 株式会社トーショー | Powder supply device |
| JPWO2004088742A1 (en) * | 2003-03-28 | 2006-07-06 | 平田機工株式会社 | Substrate transfer system |
| AU2003304270A1 (en) * | 2003-07-04 | 2005-01-21 | Rorze Corporation | Transfer device, thin plate-like article transfer method, and thin plate-like article production system |
| JP2005075496A (en) * | 2003-08-28 | 2005-03-24 | Murata Mach Ltd | Levitation conveyance device |
| WO2006077629A1 (en) * | 2005-01-19 | 2006-07-27 | Mitsubishi Denki Kabushiki Kaisha | Positioning device and positioning method |
| TWI301119B (en) * | 2005-10-26 | 2008-09-21 | Ind Tech Res Inst | Substrate transportation apparatus |
| TW200800773A (en) * | 2005-11-14 | 2008-01-01 | Ishikawajima Harima Heavy Ind | Floating device and carrying device |
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2007
- 2007-06-29 JP JP2007173446A patent/JP2009012877A/en active Pending
-
2008
- 2008-05-09 WO PCT/JP2008/058624 patent/WO2009004858A1/en active Application Filing
- 2008-05-09 KR KR1020107000545A patent/KR101135000B1/en not_active IP Right Cessation
- 2008-05-09 CN CN200880021730A patent/CN101715421A/en active Pending
- 2008-05-09 KR KR1020127004006A patent/KR20120042990A/en active Search and Examination
- 2008-06-06 TW TW97121179A patent/TW200914350A/en not_active IP Right Cessation
- 2008-06-06 TW TW101118639A patent/TWI399331B/en not_active IP Right Cessation
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006182563A (en) * | 2004-12-01 | 2006-07-13 | Ishikawajima Harima Heavy Ind Co Ltd | Floating device and carrying device |
| JP2007088201A (en) * | 2005-09-22 | 2007-04-05 | Tokyo Electron Ltd | Method and device for processing substrate |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102923480A (en) * | 2011-08-12 | 2013-02-13 | 大银微系统股份有限公司 | Pipeline integration structure of air-floating platform |
| WO2013139053A1 (en) * | 2012-03-23 | 2013-09-26 | 深圳市华星光电技术有限公司 | Extraction device of glass substrates |
| CN106938785A (en) * | 2017-02-28 | 2017-07-11 | 江苏科技大学 | A kind of glass substrate air-floating apparatus and detection method with shape changing detection function |
| CN106938785B (en) * | 2017-02-28 | 2022-07-19 | 江苏科技大学 | Glass substrate air floatation device with deformation detection function and detection method |
| CN114476681A (en) * | 2022-03-09 | 2022-05-13 | 河北泰晶新材料科技有限公司 | Material conveying system, material conveying method and storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2009004858A1 (en) | 2009-01-08 |
| KR20100018611A (en) | 2010-02-17 |
| TW201242877A (en) | 2012-11-01 |
| TWI375650B (en) | 2012-11-01 |
| JP2009012877A (en) | 2009-01-22 |
| TW200914350A (en) | 2009-04-01 |
| KR20120042990A (en) | 2012-05-03 |
| KR101135000B1 (en) | 2012-04-09 |
| TWI399331B (en) | 2013-06-21 |
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