CN101711217A - Levitation device and levitation transportation device - Google Patents

Levitation device and levitation transportation device Download PDF

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Publication number
CN101711217A
CN101711217A CN200880021700A CN200880021700A CN101711217A CN 101711217 A CN101711217 A CN 101711217A CN 200880021700 A CN200880021700 A CN 200880021700A CN 200880021700 A CN200880021700 A CN 200880021700A CN 101711217 A CN101711217 A CN 101711217A
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CN
China
Prior art keywords
fluid
cell
board
levitation
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200880021700A
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Chinese (zh)
Inventor
水野智夫
田中刈入
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Publication of CN101711217A publication Critical patent/CN101711217A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Advancing Webs (AREA)

Abstract

A levitation transportation device for transporting an object with a lower surface while levitating the object by fluid. The levitation transportation device has a levitation device, a fluid supply device, and a transportation device. The levitation device has a plate and a frame member. The plate has a base by which a chamber through which the fluid passes is defined, an upper surface, and one or more nozzles communicating with the chamber and opened in the upper surface, and the plate is placed to cover the chamber. The frame member has an inner surface converging toward the upper end of the frame member and is placed above the plate such that the inner surface and the upper surface of the plate surround a cavity communicating with the nozzles and open upward. The fluid supply device supplies the fluid to the chamber after pressurizing it. The transportation device transports the object.

Description

Levitation device and floating carrier
Technical field
The present invention relates to a kind ofly use fluid such as pressurized air to make levitation device that object suspends and the floating carrier of object conveyor thing when suspending.
Background technology
Disclosed the multiple floating carrier of when fluids such as using pressurized air suspends object, carrying in the prior art.These floating carriers typically have the levitation device that has been equipped with the squit hole that fluids such as can making air passes through.The fluids such as air that spray between levitation device and object produce pressure, and object suspends by this pressure, and are subjected to the propulsive effort of feedway and are transferred.Correlation technique is recorded in Japanese Patent Application Publication communique 2006-182563 number.
Summary of the invention
The objective of the invention is to, provide that a kind of requirement to precision is lower, structure is simpler and produce the levitation device and the floating carrier of uniform pressure.
According to a first aspect of the invention, provide a kind of levitation device that makes object suspension by fluid with lower surface.Described levitation device has: base portion, and it marks off the cell that described fluid passes through; Board, it has upper surface, be communicated with described cell and of described upper surface open with top nozzle, and be configured to cover described cell; And housing parts, it has the inside face that narrows down to the upper end, and is configured in the top of described board, makes the described upper surface of described inside face and described board surround to be communicated with described nozzle and the space of open sky upward.
According to a second aspect of the invention, provide a kind of floating carrier, it suspends the object with lower surface by fluid and carries, and described floating carrier has levitation device, fluid supply apparatus and feedway.Described levitation device has: base portion, and it marks off the cell that described fluid passes through; Board, it has upper surface, be communicated with described cell and of described upper surface open with top nozzle, and be configured to cover described cell; And housing parts, it has the inside face that narrows down to the upper end, and is configured in the top of described board, makes the described upper surface of described inside face and described board surround to be communicated with described nozzle and the space of the sky of opening upward.Described fluid supply apparatus exerts pressure to supply with described fluid to described cell to described fluid.Described feedway is used to carry described object.
Be preferably, described nozzle comprises from by any through hole of selecting circular port, rectangular opening and the group that the slit constituted, and described through hole is along from being arranged by devices spaced apart ground around the arbitrary shape of selecting oblong, the group that ellipse and Long Circle constituted.
Description of drawings
Fig. 1 is the partial top view of the floating carrier of embodiments of the present invention.
Fig. 2 is the part sectional view of obtaining along the II-II line of Fig. 1.
Fig. 3 is the cutaway view that the levitation device of embodiments of the present invention is laterally cut open.
Fig. 4 is the cutaway view that described levitation device is vertically cut open.
Fig. 5 is the birds-eye view with the board of the cooresponding described levitation device of V-V line of Fig. 3.
Fig. 6 is the birds-eye view with the board of the cooresponding variation of V-V line of Fig. 3.
Fig. 7 is the cutaway view of the levitation device of another embodiment.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the present invention are described.In this specification sheets, claims and accompanying drawing, the place ahead, rear, left and the right-hand direction of coming mark in the drawings with FF, FR, L and R that is defined as respectively.These define only for convenience of explanation, and the present invention is not limited to this.
The floating carrier 1 of embodiments of the present invention is to go up the device of carrying in horizontal feed direction (for example rear FR) after being used to object W is suspended in vertical direction.As object W, be preferably whole be plane thin object, for example thin plates such as glass substrate of LCD (Liquid Crystal Display (LCD)) usefulness.Object W may not need whole for plane, and at least a portion of its lower surface is plane getting final product.For object W is suspended, for example utilize fluids such as air.
At object W is that the thin glass substrate used of LCD etc. need can wait in dust free room and use described floating carrier 1 under the dustfree environment under the situation of the article of carrying under the dustfree environment.
As shown in Figure 1, floating carrier 1 possesses base station 3 that direction forwards, backwards extends, forms the feedway 5 of row at base station 3 upper edge fore-and-aft directions, forms a plurality of levitation devices 21 of row in two directions of base station 3 upper edge fore-and-aft directions and left and right directions.On levitation device 21,, be connected with the compressed-air actuated air feeder of not shown supply as the fluid supply apparatus that is used to supply with fluid.Can utilize other fluids such as other gases such as nitrogen or argon gas or liquid to replace pressurized air.
Feedway 5 near the left end and right-hand member on the base station 3, has a plurality of rollers 7 that form row on the throughput direction of object W respectively.Each roller 7 is situated between respectively and is connected with worm gear 11 integratedly by S. A. 7s, can be supported by support 9 with rotating freely.Have a pair of axle drive shaft 13 in the mode that runs through base station 3 on fore-and-aft direction, each axle drive shaft 13 has with drivable mode and each worm gear 11 engaged worm 15.At the front end of each axle drive shaft 13, be situated between and connected the output shaft 17s of motor 17 by coupler etc. in the mode that can drive.Thus, each roller 7 is accepted the propulsive effort of motor 17, rotates with same rotational speed.As shown in Figure 2, the upper end of described each roller 7 is configured to more outstanding a little upward than the upper surface of described levitation device 21, and alignment on single.As shown in Figure 2, even object W is in suspended state, also can contact with the roller 7 that should be subjected to propulsive effort.
Motor 17 need not to be provided with a pair of, and two axle drive shafts 13 also can be situated between and are connected with single motor by suitable bindiny mechanisms such as chains.And, also can replace roller, and conveying mechanisms such as drivable clamper or band conveyor are applied to feedway 5.
With reference to Fig. 3 and Fig. 4, each levitation device 21 has base portion 23, and each base portion 23 is situated between and is fixed on the base station 3 by support 25.Each base portion 23 side within it marks off the cell 27 that temporarily passes through from air feeder compressed and supplied air.Cell 27 has opening at an upper portion thereof, and flat board 29 covers this opening.Above board 29, relatively be fixed with housing parts 33 with base portion 23.Housing parts 33 can be as shown in the figure and base portion 23 between clamping board 29, also can be directly and base portion 23 butts.
Board 29 have with cell 27 communicatively thereon surface opening and a plurality of nozzles 31.Nozzle 31 is the circular port of arranging on every side along rectangular as shown in Figure 5.Also can use other shapes such as ellipse or Long Circle and replace oblong.The slit that also can use rectangular opening or perforation as shown in Figure 6 replaces circular port.As Fig. 5 and shown in Figure 6, from directly over observe, compare with the upper opening of the housing parts of representing with long and two-short dash line in the drawings 33, preferably nozzle 31 is arranged in the outside, compare with the lower end of the inside face of housing parts 33, preferably nozzle 31 is arranged in the inboard.That is, on horizontal plane, in the orthogonal projection zone of the inside face of housing parts 33, be arranged with nozzle 31.Thus, at first collide the inside face of housing parts 33, and be directed to the top along inside face from the pressurized air of nozzle 31 ejection.Perhaps, can be with nozzle 31 respectively to the inside face of housing parts 33 or to inner inclination.This all helps pressure gas applied makes described pressure gas trend towards the in-to-in application force.
Return Fig. 3 and Fig. 4, housing parts 33 has lower end and upper end, is the oblong housing that upper and lower opening communicates with each other, wherein, described lower end have opening and with board 29 (perhaps base portion 23) butt, described upper end is by forming to the top upper surface open that is roughly the plane.Its inside face 33a tilts, and narrows down towards the upper end.That is, its lower end and board 29 (perhaps base portion 23) butt, thus, the upper surface of inside face 33a and board 29 surrounds the space of the open sky in top, and the pressurized air that sprays from described nozzle 31 sprays upward by this space.At this moment, pressurized air is subjected to the inside face 33a guiding that the top narrows down, and trends towards internally being subjected to application force.Towards in-to-in pressurized air stream, cause between the lower surface of housing parts 33 and object W, producing uniform pressure.The inclination angle is big more should tendency obvious more, but because the inclination angle can cause the making difficulty of housing parts 33 when excessive, so the inclination angle is preferably for example 45 °, but is not limited to this.
It is desirable to a plurality of levitation devices 21 is aligned in the mode that the top upper surface of housing parts 33 forms the mono-plane each other.This helps making the hoverheight of object W stable.Board 29 is not limited to tabular, also can roughly have projection 35 in central authorities as shown in Figure 7.In order to keep the space of the sky that housing parts 33 surrounded, it is the lowest that the height of projection 35 cans be compared to housing parts 33 most.
Each cell 27 of each levitation device 21 is interconnected by not shown pipe arrangement, and then is communicated with air feeder.Air feeder is situated between and controllably supplies with pressurized air to each levitation device 21 by pipe arrangement.Air feeder preferably has the supply ventilating fan motor that is electrically connected with inverter power supply and passes through the driven supply ventilating fan of supply ventilating fan motor, but is not limited to this.Air feeder also can have the suitable reading device of the information of reading object thing W, the controller of control air flow etc.
When from air feeder when each cell 27 is supplied with pressurized airs, from each nozzle 31 ejection pressurized air.As Fig. 3, Fig. 4 and shown in Figure 7, in the space of the pressurized air that is sprayed between the lower surface of space that housing parts 33 is divided and object W, generate the space S that described pressurized air produces uniform pressure.The supporting of the space S by having uniform pressure, described object W is subjected to buoyancy and suspends.On the other hand, by driving a pair of motor 17, a pair of axle drive shaft 13 rotates synchronously.By the engagement of worm gear 11 and worm screw 15, the rotation of axle drive shaft 13 is passed to each roller 7.Contact by the roller 7 with rotation, the object W that is moved into floating carrier 1 is transferred under the state that suspends.
Present embodiment, can not need by the island parts with surround the such squit hole of narrow gap that the housing parts of island parts marks off, and only form the space S that produces uniform pressure by housing parts with the inside face that narrows down upward.Utilizing under the situation in slit, becoming evenly in order to make its width, island parts and housing parts both sides need very high working accuracy, perhaps must precision keep both sides' position relation.Present embodiment need not so high working accuracy, and need not to use island parts itself.
Abovely describe the present invention, but the present invention is not limited to above-mentioned embodiment with reference to preferred implementation.Based on above-mentioned disclosure, have the modification that the personnel of present technique field ordinary skill can be by embodiment or implement the present invention.
Utilizability on the industry
The invention provides lower to the requirement of precision, structure is simpler, and realizes levitation device and the floating carrier of the generation of uniform pressure.

Claims (4)

1. a levitation device suspends the object with lower surface by fluid, it is characterized in that having:
Base portion, it marks off the cell that described fluid passes through;
Board, it has upper surface, be communicated with described cell and of described upper surface open with top nozzle, and be configured to cover described cell; And
Housing parts, it has the inside face that narrows down to the upper end, and is configured in the top of described board, makes the described upper surface of described inside face and described board surround to be communicated with described nozzle and the space of open sky upward.
2. levitation device according to claim 1, wherein,
Described nozzle comprises from by any through hole of selecting circular port, rectangular opening and the group that the slit constituted, and described through hole is along from being arranged by devices spaced apart ground around the arbitrary shape of selecting oblong, the group that ellipse and Long Circle constituted.
3. a floating carrier suspends the object with lower surface by fluid and carries, it is characterized in that,
Have levitation device, fluid supply apparatus and feedway,
Described levitation device has:
Base portion, it marks off the cell that described fluid passes through;
Board, it has upper surface, be communicated with described cell and of described upper surface open with top nozzle, and be configured to cover described cell; And
Housing parts, it has the inside face that narrows down to the upper end, and is configured in the top of described board, make the described upper surface of described inside face and described board surround to be communicated with and the space of the sky of opening upward with described nozzle,
Described fluid supply apparatus exerts pressure to supply with described fluid to described cell to described fluid,
Described feedway is used to carry described object.
4. floating carrier according to claim 3, wherein,
Described nozzle comprises from by any through hole of selecting circular port, rectangular opening and the group that the slit constituted, and described through hole is along from being arranged by devices spaced apart ground around the arbitrary shape of selecting oblong, the group that ellipse and Long Circle constituted.
CN200880021700A 2007-06-29 2008-06-03 Levitation device and levitation transportation device Pending CN101711217A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP173423/2007 2007-06-29
JP2007173423A JP2009012872A (en) 2007-06-29 2007-06-29 Floating unit and floating carrying device
PCT/JP2008/060181 WO2009004882A1 (en) 2007-06-29 2008-06-03 Levitation device and levitation transportation device

Publications (1)

Publication Number Publication Date
CN101711217A true CN101711217A (en) 2010-05-19

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Application Number Title Priority Date Filing Date
CN200880021700A Pending CN101711217A (en) 2007-06-29 2008-06-03 Levitation device and levitation transportation device

Country Status (5)

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JP (1) JP2009012872A (en)
KR (2) KR20100018612A (en)
CN (1) CN101711217A (en)
TW (1) TW200914352A (en)
WO (1) WO2009004882A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AR091068A1 (en) * 2012-05-16 2014-12-30 Altria Client Services Inc CIGARETTE WRAPPING DESIGN

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0447171Y2 (en) * 1985-07-03 1992-11-06
JPH0359926U (en) * 1989-10-13 1991-06-12
JP2000100896A (en) * 1998-09-21 2000-04-07 Rohm Co Ltd Method and device for carrying wafer
JP2001010724A (en) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk Floating carrier device
JP4613800B2 (en) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ Levitation device and transfer device

Also Published As

Publication number Publication date
JP2009012872A (en) 2009-01-22
TW200914352A (en) 2009-04-01
KR20100018612A (en) 2010-02-17
TWI355364B (en) 2012-01-01
WO2009004882A1 (en) 2009-01-08
KR20120005263U (en) 2012-07-18

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Application publication date: 20100519