CN102673939B - Floating transportation device - Google Patents
Floating transportation device Download PDFInfo
- Publication number
- CN102673939B CN102673939B CN201210150843.0A CN201210150843A CN102673939B CN 102673939 B CN102673939 B CN 102673939B CN 201210150843 A CN201210150843 A CN 201210150843A CN 102673939 B CN102673939 B CN 102673939B
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- CN
- China
- Prior art keywords
- mentioned
- float
- summit
- anvil roll
- aforesaid substrate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Abstract
The present invention discloses and make it float and the floating transportation device carried to the second end from first end for passing through to the fluid that the object with lower surface is exerted pressure.This floating transportation device is used for making it float by the fluid of exerting pressure to the object with lower surface and carrying to the second end from first end, possess: leave compartment of terrain from first end to the second end and multiple float-up devices in column are set, these devices possess plane upper surface and the squit hole for ejecting fluid respectively, to have the mode of altitude datum between upper surface and the lower surface of object, float from squit hole ejecting fluid to make object; Anvil roll, has summit and can contact object thing rotatable on summit, and this anvil roll is adjusted to: summit projects upwards from the upper surface of float-up device, and, from the upper surface of float-up device to the height on summit lower than altitude datum; And for the feedway of conveying object.
Description
The divisional application that the present invention is application number is 200910163948.8, denomination of invention is " floating transportation device ", the applying date is the patent application on June 8th, 2009.
Technical field
The present invention relates to fluids such as utilizing pressurized air makes object float while the floating transportation device carried it.
Background technology
Propose several floating transportation device while fluids such as utilizing pressurized air makes object float, it carried.These floating transportation devices possess multiple float-up device usually, and these devices possess the squit hole that fluids such as making air passes through respectively.The fluid exerts pressure such as the air sprayed between float-up device and object, object is floated by this pressure, and receives the propulsive effort of feedway generation and be transferred.Relevant technology is disclosed in Japanese Patent Application 2006-324510 publication.
Summary of the invention
Object, when moving from a float-up device to another float-up device, particularly when object is for being easy to bend, can worry that the front end of another float-up device can be collided in the front end of object.The object of the present invention is to provide a kind of floating transportation device, even if reach certain in the levitation height of object, this device still can avoid the problem of the front end crash float-up device of object to occur.
According to a first aspect of the invention, provide for by making it float and the floating transportation device carried to the second end from first end to the fluid that the object with lower surface is exerted pressure.This floating transportation device is used for making it float by the fluid of exerting pressure to the object with lower surface and carrying to the second end from first end, possess: leave compartment of terrain from first end to the second end and multiple float-up devices in column are set, these devices possess plane upper surface and the squit hole for spraying above-mentioned fluid respectively, to have the mode of altitude datum between above-mentioned upper surface and the above-mentioned lower surface of above-mentioned object, spray above-mentioned fluid from above-mentioned squit hole and float to make above-mentioned object; Anvil roll, there is summit and above-mentioned object can be contacted on above-mentioned summit also rotatably, this anvil roll is adjusted to: above-mentioned summit projects upwards from the above-mentioned upper surface of above-mentioned float-up device, and, from the above-mentioned upper surface of above-mentioned float-up device to the height on above-mentioned summit lower than said reference height; And for carrying the feedway of above-mentioned object.
Above-mentioned anvil roll preferably adjoins the end of above-mentioned second side of above-mentioned float-up device.
Centroclinal preferably at least to above-mentioned float-up device near above-mentioned upper surface of above-mentioned squit hole.
Accompanying drawing explanation
Fig. 1 is the partial top view of the floating transportation device relating to the embodiment of the present invention.
Fig. 2 is the part sectional view along II-II line in Fig. 1.
Fig. 3 is the part sectional view along III-III line in Fig. 1.
Fig. 4 is the birds-eye view of the float-up device relating to above-described embodiment.
Fig. 5 is the longitudinal sectional view of the above-mentioned float-up device along V-V line in Fig. 4, which show the state that object is floated.
Fig. 6 is the transverse cross-sectional view of the above-mentioned float-up device along VI-VI line in Fig. 4, which show the state that object is floated.
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.For the scope of whole specification sheets, claim and accompanying drawing, in the accompanying drawings, respectively front, rear, left side and right side are defined as FF, FR, L and R.The object of this definition is to be convenient to illustrate, the present invention need not be confined to this.
Floating transportation device is for for making object W vertically float and the device carried it along horizontal feed direction (such as, from the direction of front FF rearward FR).As object W, preferably entirety is plane thinner object, such as, and the thin plates such as the glass substrate of LCD (Liquid Crystal Display).Object W differs and is decided to be integral planar shape, its lower surface be plane at least partially.In order to float, such as, the fluid as air can be utilized.
Object W be LCD must carry under clean environment with thin glass substrate etc. object time, use above-mentioned floating transportation device 1 under clean environment in clean room etc.
Below, with reference to Fig. 1 ~ 6, first embodiment of the present invention is described.The floating transportation device 1 of present embodiment as depicted in figs. 1 and 2, possess extend longitudinally base station 3, on base station 3 longitudinally in row configuration feedway 5, on base station 3 longitudinally and horizontal both direction leave compartment of terrain respectively in row configuration multiple float-up devices 21.Show the front end (the second end) of floating transportation device 1 on the right side of Fig. 1, rear end (first end) is positioned at outside the visual field on the left of Fig. 1.From the such as rear end (first end) of floating transportation device 1 towards front end (the second end) conveying object W.Although not shown, be used in the compressed-air actuated air feeder of supply and be connected with float-up device 21.Also can replace pressurized air and use other pressurized gas such as nitrogen or argon, or, other pressurized fluid such as liquid.
Feedway 5 has along the throughput direction of object W multiple rollers 7 arranged in columns respectively near the left end and right-hand member of base station 3.Each roller 7 is connected as a single entity respectively by turning cylinder 7s and worm gear 11, and is supported rotatably by bracket 9.Possess a pair axle drive shaft 13 in the mode longitudinally running through base station 3, each axle drive shaft 13 is provided with the worm screw 15 that can engage with each worm gear 11 with driving.In the front end of each axle drive shaft 13 by the output shaft 17s of the connecting motor 17 rotationally such as coupler.Therefore, each roller 7 receives the propulsive effort of motor 17, and rotates with identical velocity of rotation.As shown in Figure 3, the upper end of each roller 7 above-mentioned is outstanding to the slightly top of the upper surface of above-mentioned float-up device 21, and configures in mode consistent on single.Even if object W is under the state of floating, still as shown in Figure 3, roller 7 is contacted in order to receive propulsive effort.
Motor 17 is not necessarily a pair, and two axle drive shafts 13 also can be connected with single motor by applicable combining device such as chains.In addition, also can replace motor and the feedways such as drivable clamper or driving band are used for feedway 5.
With reference to Fig. 4,5 and 6, each float-up device 21 is equipped with base portion 23, and each base portion 23 is fixed on base station 3 by bracket 25.Each base portion 23 marks off the chamber 27 temporarily passed through from the pressurized air of air feeder supply within it.
Base portion 23 at an upper portion thereof central authorities is provided with the peripheral components 29,33 covering rectangle island shape parts 31 above chamber 27, surround island shape parts.The upper surface of island shape parts 31 is approximate horizontal plane.The upper surface of the upper surface Ying Yu island shape parts 31 of the top peripheral parts 33 in peripheral components forms single plane, and has consistent height with above-mentioned plane.
The inside face of peripheral components 29,33 is almost parallel with the side of the island shape parts 31 containing inclined-plane 31a.The inside face 33a of top peripheral parts 33 tilts along inclined-plane 31a, centroclinal to float-up device 21.The inside face of the peripheral components 29,33 containing inclined-plane 33a marks off with the side of the island shape parts 31 containing inclined-plane 31a the gap with clean width having and be communicated with chamber 27, and this gap is as the pressurized air in pilot chamber 27 and the squit hole 37 that sprays upward and working.As shown in Figure 4, squit hole 37 is rectangular ring to the opening of the upper surface of float-up device 21.
As mentioned above, because the upper surface of 31a, 33a Shi Xiang island, inclined-plane shape parts 31 is centroclinal, therefore, squit hole 37 is at least near the upper surface of float-up device 21, and the center (to the inside) to the upper surface of float-up device 21 tilts.Although wish that tilting is such as 45
.but, should not be limited to this.
Squit hole 37 is not limited only to this, also can adopt other various shapes such as the shape of a part for elliptical annular or closed-loop.Island shape parts 31 reach even for making the width of squit hole 37, the surface of the periphery 31a that also can tilt at it is provided with and has mutually level multiple protruding 35.
Preferably the upper surface of multiple float-up device 21 forms single plane each other.It is conducive to the levitation height of stable object W.
With reference to Fig. 1 ~ Fig. 3, multiple float-up device 21 forms row in the mode that the rear end of a float-up device 21 (end of the first side) is relative with the front end (end of the second side) of other float-up device 21.Each float-up device 21 possesses anvil roll 39 in the mode adjacent with its front end (end of the second side).By bracket 41, anvil roll 39 can rotate from the direction of first end to second.Although anvil roll 39 can freely rotate, also can be out of shape it, so that the same with roller 7, receive the propulsive effort of motor 17 and rotate.In this case, roller 7 preferably has identical circumferential velocity with anvil roll 39.The summit of anvil roll 39 should be installed in mode outstanding upward above float-up device 21.And then, in particular range described after it is adjusted to highly in advance.
Each chamber 27 of each float-up device 21 is interconnected by not shown pipe arrangement, and then is communicated with the air feeder of outside.Pressurized air, by pipe arrangement, is controllably supplied to each float-up device 21 by air feeder.As air feeder, although preferably possess the blower motor that is electrically connected with transformer frequency response and by the blowing engine that blower motor drives, should not be limited to this.Air feeder also can possess the reading device of the information being suitable for reading object thing W or control the controller etc. of charge air.
When supplying pressurized air from air feeder to each chamber 27, spray pressurized air from each ejiction opening 37.As shown in Fig. 2,5,6, the pressurized air of ejection, between the upper surface and the lower surface of object W of island shape parts 31, in the space that the opening of squit hole 37 surrounds, produces the space S that above-mentioned pressurized air produces uniform pressure.Having in the space S of uniform pressure by being supported in, above-mentioned object W applying buoyancy and makes it float.Now, by suitably adjusting charge air or pressure, between the upper surface of float-up device 21 and the lower surface of object W, form certain altitude.Using this height as altitude datum time, adjust the height of anvil roll in advance to make the summit of anvil roll 39 lower than altitude datum.
Under the state that object W floats, by driving a pair motor 17, thus a pair driven roller 13 rotates simultaneously.By engaging of worm gear 11 and worm screw 15, the rotation of axle drive shaft 13 is passed to each roller 7.By the roller 7 that contact is rotated, the object W sent on floating transportation device 1 is transferred under the state of floating.
With reference to Fig. 2, when from figure, on a float-up device 21 shown in left side, in figure, another float-up device 21 shown in right side moves object W, buoyancy is not temporarily born in the front end of object W.If when object W is pliable material, then can worry that the front end of object W is sagging from the front end (end of the second side) of a float-up device 21, and collide with the rear end (end of the first side) of another float-up device 21.But according to the present embodiment, sagging object W is supported due to the apexes contact with anvil roll 39, therefore, avoids the problem of colliding with other float-up device 21 and occurs.In addition, because the summit of anvil roll 39 is lower than altitude datum, therefore, when object W is not sagging, object W can not contact anvil roll 39.Even if the levitation height of object is not high especially, the front end of object also can not contact other float-up device 21 and not contact anvil roll 39.Therefore, compared with the levitation height collision free float-up device 21 by improving object, consider it is favourable from catabiotic viewpoint.
Because the anvil roll 39 adjacent with front end (end of the second side) can fully support object W, therefore, in rear end (end of the first side) not the device that must prevent from colliding.Or, rear end also can possess retrogressing more downward than upper surface step surface or can the collision prevention device of roller etc. of contact object thing.
Although describe the present invention with reference to preferred forms, the present invention should not be limited to above-mentioned embodiment.According to the content disclosed above, those of ordinary skill in the art can implement the present invention by the amendment of embodiment or distortion.
Industrial applicibility
Even if the levitation height providing object reaches certain, the floating transportation device that the problem of the front end crash float-up device of object occurs still can be avoided.
Claims (1)
1. a floating transportation device, makes it float for passing through to the gas that the substrate with lower surface is exerted pressure and carries to the second end from first end, it is characterized in that possessing:
Floating transportation device body,
Leave from above-mentioned first end to above-mentioned second end that compartment of terrain configuration is in column to be overlooked as rectangular-shaped multiple float-up devices, these float-up devices are arranged at above-mentioned floating transportation device body along substrate throughput direction and the direction orthogonal with aforesaid substrate throughput direction, these float-up devices possess plane upper surface respectively and overlook as rectangular-shaped squit hole for what spray above-mentioned gas, above-mentioned upper surface forms above-mentioned squit hole respectively, to have the mode of altitude datum between above-mentioned upper surface and the above-mentioned lower surface of aforesaid substrate, float from above-mentioned squit hole ejection above-mentioned gas to make aforesaid substrate,
Anvil roll, there is summit and aforesaid substrate can be contacted on above-mentioned summit also rotatably, this anvil roll is adjusted to: above-mentioned summit projects upwards from the above-mentioned upper surface of above-mentioned float-up device, and, from the above-mentioned upper surface of above-mentioned float-up device to the height on above-mentioned summit lower than said reference height; And,
Be arranged at above-mentioned floating transportation device body, for the feedway to aforesaid substrate throughput direction conveying aforesaid substrate,
The upper surface of above-mentioned multiple float-up device forms single plane each other,
Above-mentioned anvil roll adjoins the end of the front of above-mentioned float-up device, along aforesaid substrate throughput direction between the above-mentioned float-up device of syntople, leading above-mentioned float-up device is provided with the above-mentioned anvil roll of the above-mentioned lower surface supporting aforesaid substrate rotationally, between the end face of above-mentioned anvil roll when overlooking in the downstream of leading above-mentioned float-up device and the part parallel with above-mentioned orthogonal directions in the downstream of the above-mentioned squit hole of leading above-mentioned float-up device
Above-mentioned squit hole at least near above-mentioned upper surface relative to centroclinal to above-mentioned float-up device of vertical direction.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-150957 | 2008-06-09 | ||
| JP2008150957A JP5422925B2 (en) | 2008-06-09 | 2008-06-09 | Levitation transfer device |
| CN200910163948A CN101633442A (en) | 2008-06-09 | 2009-06-08 | Floating transportation device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910163948A Division CN101633442A (en) | 2008-06-09 | 2009-06-08 | Floating transportation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102673939A CN102673939A (en) | 2012-09-19 |
| CN102673939B true CN102673939B (en) | 2015-11-04 |
Family
ID=41541200
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210150843.0A Active CN102673939B (en) | 2008-06-09 | 2009-06-08 | Floating transportation device |
| CN200910163948A Pending CN101633442A (en) | 2008-06-09 | 2009-06-08 | Floating transportation device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910163948A Pending CN101633442A (en) | 2008-06-09 | 2009-06-08 | Floating transportation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5422925B2 (en) |
| KR (1) | KR101049872B1 (en) |
| CN (2) | CN102673939B (en) |
| TW (1) | TW201010921A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5604940B2 (en) * | 2010-03-31 | 2014-10-15 | 株式会社Ｉｈｉ | Levitation transfer device |
| CN103159028B (en) * | 2011-12-09 | 2017-05-03 | 株式会社妙德 | Floating transfer unit |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001010724A (en) * | 1999-06-28 | 2001-01-16 | Watanabe Shoko:Kk | Floating carrier device |
| JP2004196482A (en) * | 2002-12-18 | 2004-07-15 | Maruyasu Kikai Kk | Roller conveyor |
| JP4626205B2 (en) * | 2004-07-28 | 2011-02-02 | シンフォニアテクノロジー株式会社 | Substrate delivery method and apparatus |
| JP4613800B2 (en) * | 2004-12-01 | 2011-01-19 | 株式会社Ｉｈｉ | Levitation device and transfer device |
| JP4780984B2 (en) * | 2005-03-18 | 2011-09-28 | オリンパス株式会社 | Substrate transfer device |
| JP4529794B2 (en) * | 2005-05-19 | 2010-08-25 | シンフォニアテクノロジー株式会社 | Gas levitation transfer device |
| CN101920849A (en) * | 2005-11-14 | 2010-12-22 | 株式会社Ihi | Levitation device and transfer device therewith |
| JP4842748B2 (en) * | 2006-09-22 | 2011-12-21 | オリンパス株式会社 | Substrate transfer system |
-
2008
- 2008-06-09 JP JP2008150957A patent/JP5422925B2/en active Active
-
2009
- 2009-06-05 TW TW098118735A patent/TW201010921A/en unknown
- 2009-06-08 CN CN201210150843.0A patent/CN102673939B/en active Active
- 2009-06-08 KR KR1020090050391A patent/KR101049872B1/en active IP Right Grant
- 2009-06-08 CN CN200910163948A patent/CN101633442A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| TW201010921A (en) | 2010-03-16 |
| TWI378066B (en) | 2012-12-01 |
| JP5422925B2 (en) | 2014-02-19 |
| JP2009292643A (en) | 2009-12-17 |
| CN101633442A (en) | 2010-01-27 |
| KR101049872B1 (en) | 2011-07-15 |
| KR20090127818A (en) | 2009-12-14 |
| CN102673939A (en) | 2012-09-19 |
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