CN103159028B - Floating transfer unit - Google Patents
Floating transfer unit Download PDFInfo
- Publication number
- CN103159028B CN103159028B CN201210524588.1A CN201210524588A CN103159028B CN 103159028 B CN103159028 B CN 103159028B CN 201210524588 A CN201210524588 A CN 201210524588A CN 103159028 B CN103159028 B CN 103159028B
- Authority
- CN
- China
- Prior art keywords
- framework
- suspension conveying
- sidepiece
- conveying unit
- cavity portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/04—Conveying the articles in carriers having a cross-section approximating that of the pipe or tube; Tube mail systems
- B65G51/18—Adaptations of pipes or tubes; Pipe or tube joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G53/00—Conveying materials in bulk through troughs, pipes or tubes by floating the materials or by flow of gas, liquid or foam
- B65G53/04—Conveying materials in bulk pneumatically through pipes or tubes; Air slides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H5/00—Feeding articles separated from piles; Feeding articles to machines
- B65H5/22—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
Abstract
The invention provides a floating transfer unit, which can inhibit complication of a whole structure. The floating transfer unit (10) comprises: frames (40A-40C), wherein a plurality of frames are assembled, and a top wall (42) forms a continuous floating transfer way (36) and has chambers in the internal part; a plurality of air injecting holes (54), which are formed on the top wall (42) and are communicated with the chambers; connecting members, which are arranged on side part of the frames (40A-40C), connects each frame, and enables the air to circulate in adjacent chambers; and a first air supplying case (88) and a second air supplying case (100), which are arranged on the frames at two end parts of the floating transfer way (36), and sends air supplied by a pipe (34) to the chambers.
Description
Technical field
The present invention relates to suspension conveying unit.
Background technology
The technology that in the past a kind of known Japanese Unexamined Patent Publication 2008-7319 publications are recorded, i.e. along workpiece conveying direction simultaneously
The multiple suspension conveying units being connected with air service tank respectively of row ground configuration, as being monolithically fabricated suspension conveying unit.
The content of the invention
But, during using said structure, with suspension conveying unit（Framework）Quantity air service tank is correspondingly set
（That is, gas supply member）, so overall structure becomes complicated.
The present invention in view of the foregoing, its objective is to provide the suspension conveying unit that can suppress complicated integral structure.
The suspension conveying unit of the 1st aspect of the present invention has：Framework, it is assembled multiple, is made up of continuously roof
Suspension conveying road surface, and internally there is cavity portion；Multiple gas squit holes, are formed on the roof, and with the cavity
Portion connects；Connecting elements, is arranged on the sidepiece of the framework, connects each framework, and can make gas adjacent
Circulation in the cavity portion；Gas supply member, is arranged in framework described at least one, will be supplied by gas supply device
Gas supply to the cavity portion.
According to the structure, as long as from gas supply device at least one gas supply member supply gas, it becomes possible to Jing
The cavity portion of each framework is supplied gas to by connecting elements, thus it is possible to from being formed as each of continuous suspension conveying road surface
The gas squit hole of roof sprays gas, suspension conveying workpiece.Thus, it is not necessary to which gas supply is set according to the quantity of framework
Component, can suppress integrally-built complication.
In the suspension conveying unit of second method of the present invention, the connecting elements in first method has：Lower side joint
Conjunction portion, it has from a sidepiece of framework lower section and extends out, while extend to the width of the framework, and to
The open lower slot in top；Upper side engagement portion, it extends out from another sidepiece top of the framework, while to described
The width of framework extends, and upper slot open downwards, and the upper side engagement portion engages with the lower slot, institute
State lower side engagement portion to engage with the upper slot.
Above-mentioned " width of framework " refers to the conveying direction with workpiece（The continuous direction on suspension conveying road surface）Intersect
Direction.
According to the structure, extend out from the sidepiece lower section of framework and under the top opening of downward side engagement portion
Slot and the upper slot for extending out from the other side of adjacent framework top and upwards the lower section of side engagement portion opens
Engaging, is thus connected each framework.Therefore, it is possible to when each framework is connected, the conveying direction and framework of workpiece be limited exactly
The position of short transverse.
In the suspension conveying unit of the 3rd aspect of the present invention, the connecting elements in second method has：Lug,
Stretch out in the direction that direction intersects with the lower slot on its sidepiece from the framework；Recess, by recessed in the frame
Another sidepiece top of body, and for lug engaging.
According to the structure, the lug stretched out to the direction i.e. conveying direction of workpiece intersected with lower slot and recess card
Close, thus framework is connected each other.Therefore, when each framework is connected, the position of the width of framework can exactly be limited.
In the suspension conveying unit of the 4th aspect of the present invention, in any one mode of first method ~ Third Way
Multiple described framework include the shape or size framework different from other frameworks.
According to the structure, the track or size on suspension conveying road surface can be freely adjusted according to the layout of factory.
In the suspension conveying unit of the 5th aspect of the present invention, in any one mode of first method ~ fourth way
Multiple described framework include overlooking trapezoidal and can be in the side and other frameworks for connecting the trapezoidal upper bottom and going to the bottom
The framework for being assembled.
According to the structure, by the number for changing the framework for overlooking trapezoidal, suspension conveying road can be more freely adjusted
The track in face.
In the suspension conveying unit of the 6th aspect of the present invention, in any one mode of first method ~ the 5th mode
The suspension conveying unit have：Pedestal, for loading the framework；Projecting piece, from the side for being provided with the connecting elements
The sidepiece of the different framework in portion extends out, and is fixed on the pedestal.
According to the structure, because framework is fixed on pedestal by projecting piece, so when each framework is connected, can press down
Framework dislocation processed, making the connection of each framework becomes easy.
In the suspension conveying unit of the 7th aspect of the present invention, in any one mode of second method ~ the 6th mode
The gas supply member be the hollow part engaged with the lower side engagement portion or the upper side engagement portion, the hollow bulb
Part has：Gas supply port, for hollow bulb supply gas；Connected entrance, make the cavity portion of the framework and it is described in
Empty portion's connection.
According to the structure, because hollow part engages with lower side engagement portion or upper side engagement portion, it is possible to by hollow bulb
Part is configured in the both ends on continuous suspension conveying road surface.Thereby, it is possible to make gas spread from the both ends on suspension conveying road surface
To the cavity portion of the framework of central part, and the spray volume of gas from gas squit hole can be suppressed on suspension conveying road surface
Arbitrarily end or central part are reduced.
It is described in any one mode of the first ~ seven mode in the suspension conveying unit of the 8th aspect of the present invention
Connecting elements is chimeric with the connector being formed on the sidepiece of the adjacent framework respectively, connects the adjacent cavity portion
Logical connecting tube.
According to the structure, as long as due to making connecting tube be fitted together to the connector of the sidepiece of adjacent framework respectively, institute
Become easy with the manufacture of framework.
The effect of invention
Because the present invention adopts said structure, it is possible to providing, the suspension conveying list of integrally-built complication can be suppressed
Unit.
Description of the drawings
Fig. 1 is the axonometric chart of the floating carrier for representing the suspension conveying unit for assembling first embodiment.
Fig. 2 is the side view of the floating carrier for representing the suspension conveying unit for assembling first embodiment.
Fig. 3 is the top view of the floating carrier for representing the suspension conveying unit for assembling first embodiment.
Fig. 4 is the overall perspective view of the suspension conveying unit of first embodiment.
Fig. 5 is the side partial cross-sectional of the suspension conveying unit of first embodiment.
Fig. 6（A）-（B）It is to represent one of the connecting structure of each framework of suspension conveying unit for constituting first embodiment
The axonometric chart of example.
Fig. 7（A）-（B）Be represent constitute first embodiment suspension conveying unit each framework connecting structure its
The axonometric chart of his example.
Fig. 8 is the side partial cross-sectional of the suspension conveying unit of second embodiment.
Fig. 9（A）-（B）It is the figure of the variation of the suspension conveying unit for representing first embodiment.
Figure 10（A）-（B）It is the figure of other variations of the suspension conveying unit for representing first embodiment.
Specific embodiment
Hereinafter, the suspension conveying unit of embodiments of the present invention is illustrated referring to the drawings.It should be noted that in figure
In, the part with identical or corresponding function（Element）Mark identical symbol is simultaneously suitably omitted the description.
＜ first embodiments ＞
Fig. 1 ~ Fig. 3 shows the floating carrier 12 of the suspension conveying unit 10 for assembling present embodiment.
The floating carrier 12 has between the end by two curvilinear guide rails 14 of pars intermedia and connection guide rail 14
Two cross members 16 be configured to the assembling framework 18 of long frame-shaped.The assembling framework 18 is bearing in the base of frame-like by pillar 20
The top of seat frame frame 22.Castor 24 and braking parts 26 be installed in the bottom of base framework 22, floating carrier 12 can be
Movably arrange in operating area.
In addition, set up between two guide rails 14 having support plate 28.At the two ends in the direction of cross member 16 of support plate 28
Portion lower section is each configured with compressor 30.On the other hand, multiple pedestals 32 are fixed with along guide rail 14 on support plate 28.And,
The suspension conveying unit 10 of 3 row first embodiments has been loaded along guide rail 14 on each pedestal 32.These suspension conveying units 10
Details be explained below, barotropic gas is supplied via pipe 34 from compressor 30, and by the gas from each suspension conveying list
The suspension conveying road surface 36 of unit 10 sprays upward and makes glass substrate P suspend.It should be noted that from the supply of compressor 30
Gas is not limited to the gases such as the noble gases such as air, or nitrogen, argon, helium, carbon dioxide.
And, it is equipped with Linear conveying appliance 38 in two guide rails 14 a guide rail 14.In the conveyer device 38
It is upper that there are multiple vacuum cups 39, by the lower surface clamping of glass substrate P suspended on suspension conveying road surface 36, and along arrow
Direction D is conveyed（Hereinafter direction of arrow D is referred to as into conveying direction D）.Glass substrate P of conveying is suspended in each suspension conveying unit
10 top maintains suspended state, and is exposed by exposure component (not shown) in this condition, forms the circuit for specifying
Pattern.
Hereinafter, the concrete structure of the suspension conveying unit 10 of first embodiment is illustrated.
As shown in figure 4, each suspension conveying unit 10 have mutually different various frameworks 40A, 40B of shape or size,
40C.Framework 40A top view is square, and framework 40B top view is rectangle, and framework 40C top view is trapezoidal.
In present embodiment, trapezoidal upper bottom and go to the bottom as arc-shaped, so as to framework 40C top view is in sector.
Various frameworks 40A ~ 40C is assembled with of the same race or different types of each framework, and by various frameworks 40A ~ 40C's
Roof 42 constitutes continuous suspension conveying road surface 36.Now, framework 40C is trapezoidal by connecting（It is fan-shaped）Upper bottom and the side gone to the bottom
Any one in side and other frameworks 40A ~ 40C is assembled, and can make the track on suspension conveying road surface 36 with bending to the right
Or the mode of bending to the left changes.It is for being assembled without between framework is particularly limited to but defeated in the suspension shown in Fig. 3 topmosts
Send on road surface 36, from conveying direction D（The continuous direction on suspension conveying road surface 36）Side start, according to framework 40A, 40B,
The order of 40B, 40C, 40C, 40B, 40C, 40C, 40C, 40C, 40B assembles each framework.
As shown in figure 5, various frameworks 40A ~ 40C internally has cavity portion 44.Constitute the various frameworks of the cavity portion 44
The diapire of 40A ~ 40C is opened, and is closed by tabular lid 46.Specifically, constitute cavity portion 44 various frameworks 40A ~
Screwed hole 48 is formed with around the diapire of 40C, screwed hole 50 is also formed with the lid 46 relative with the screwed hole 48, from below
Screw 52 is screwed into into these screwed holes 48,50, thus, the diapire release position of the various frameworks 40A ~ 40C of cavity portion 44 is constituted
46 closings can be covered.
Multiple gas connected with cavity portion 44 are formed with the roof 42 of various frameworks 40A ~ 40C relative with the lid 46
Body squit hole 54.Each cylindrical form of gas squit hole 54, is equably configured in roof 42 overall.
On one sidepiece 56A of the conveying direction D in various frameworks 40A ~ 40C, it is formed with two and connects with cavity portion 44
Logical embedded hole 58（One of hole is not shown in Figure 5）.In addition, the conveying direction D's in various frameworks 40A ~ 40C is another
One sidepiece 56B（More particularly, it is the sidepiece of upper side engagement portion 70 described later）On, two are formed with adjacent another
The chimeric pipe 60 that the embedded hole 58 of framework 40A ~ 40C is fitted together to and connects with cavity portion 44（One of pipe is not shown in Figure 5）.
The diameter O-ring 61 more slightly smaller than the external diameter of chimeric pipe 60 is provided with the hole wall of embedded hole 58, so that gas is not from chimeric pipe
60 and the chimeric place of embedded hole 58 spill.
And, connecting elements 62 is formed with both sides 56A, 56B of the conveying direction D in various frameworks 40A ~ 40C,
Connect each framework, and make chimeric pipe 60 chimeric with embedded hole 58, thereby, it is possible to realize that the gas in adjacent cavities portion 44 circulates.
Specifically, such as Fig. 6（A）, Fig. 6（B）, Fig. 7（A）And Fig. 7（B）Shown, connecting elements 62 has lower side engagement portion
66, there is the lower side engagement portion 66 the sidepiece 56A lower sections from various frameworks 40A ~ 40C to extend out, to various frames
The width of body 40A ~ 40C（The direction orthogonal with conveying direction D）Extend, and lower slot 64 open upward.In addition,
Connecting elements 62 has upper side engagement portion 70, and the upper side engagement portion 70 has another side from various frameworks 40A ~ 40C
56B tops in portion extend out, and extend to the width of various frameworks 40A ~ 40C, and upper slot 68 open downwards.
And, the front end for for example making chimeric pipe 60 is connected to embedded hole 58 from oblique upper, and to the same of chimeric direction press-in
When be also pressed into downwards, upper side engagement portion 70 engages with lower slot 64, and lower side engagement portion 66 engages with upper slot 68, thus
Various frameworks 40A ~ 40C is connected each other.
In addition, connecting elements 62 has：Lug 72, the top center of from various frameworks 40A ~ 40C a sidepiece 56A
Portion is to the direction intersected with lower slot 64（Conveying direction D）Stretch out；Recess 74, it is recessed another in various frameworks 40A ~ 40C
The top center portion of one sidepiece 56B, and engage for lug 72.
And, the both sides of the recess 74 in upper side engagement portion 70 are formed with up and down through the screw thread of upper side engagement portion 70
Hole 76, in the lower side engagement portion 66 relative with the screwed hole 76 screwed hole 78 is also formed with, and screw 80 is screwed into into this from top
A little screwed holes 76,78, thus, each framework of fixation.
In addition, in the width of the various frameworks 40A ~ 40C different from sidepiece 56A, 56B for being provided with connecting elements 62
On sidepiece, the projecting piece 82 extended out from the sidepiece is provided with.The screwed hole 84 for running through up and down is formed with projecting piece 82,
Screwed hole (not shown) is also formed with pedestal 32 that is relative with the screwed hole 84 and loading various frameworks 40A ~ 40C, from upper
Screw 86 is screwed into these screwed holes by side, and thus, projecting piece 82 is fixed on pedestal 32.
As shown in Fig. 6 A, Fig. 6 B, in framework 40A positioned at the one end of the conveying direction D on suspension conveying road surface 36, if
It is equipped with to supply via the barotropic gas that pipe 34 is supplied to from compressor 30 to the first air of the cavity portion 44 of framework 40A and supplies
Case 88.
The first air service tank 88 is formed as chimeric with the lower slot 64 of the lower side engagement portion 66 in framework 40A and enters
The shape of row connection, and internally it is formed with hollow bulb 88A.In the first air service tank 88, in the lower side joint with framework 40A
The relative position of the screwed hole 78 in conjunction portion 66, is formed with up and down through the screwed hole 90 of the first air service tank 88.And, pass through
Screw 92 is screwed into into these screwed holes 78,90 from top, thus, be connected the first air service tank 88 and framework 40A.
In addition, the sidepiece in the width of the first air service tank 88 is formed with connecting tube 34 and supplies to hollow bulb 88A
To the gas supply port 94 of gas.And, in the sidepiece of the framework 40A side of the first air service tank 88, it is formed with two and frame
The chimeric pipe 96 that the embedded hole 58 of body 40A is fitted together to and connects with the cavity portion 44 of framework 40A.Between these chimeric pipes 96,
In the top center portion of the first air service tank 88, it is arranged with when chimeric pipe 96 is chimeric with embedded hole 58 for the convex of framework 40A
The recess 98 of the engaging of piece 72.
The first air service tank 88 with more than is identical, in the other end of the conveying direction D positioned at suspension conveying road surface 36
In framework 40B in portion, as shown in Fig. 4 and Fig. 7, be provided with by from compressor 30 via the barotropic gas that pipe 34 is supplied to supply to
Second air service tank 100 of the cavity portion 44 of framework 40B.
The second air service tank 100 be formed as it is chimeric with the upper slot 68 of the upper side engagement portion 70 in framework 40B and
The shape being attached（Specifically, with lower slot 64 and lower side engagement portion 66）, and internally it is formed with hollow bulb
100A.In the second air service tank 100, in the position relative with the screwed hole 76 of the upper side engagement portion 70 of framework 40B, shape
Into there is screwed hole 102.And, screw 80 is screwed into into these screwed holes 76,102 from top, thus, second air that is connected is supplied
To case 100 and framework 40B.
In addition, the sidepiece in the width of the second air service tank 100 is formed with connecting tube 34 and supplies to the second air
To the gas supply port 104 of the hollow bulb 100A supply gas of case 100.And, in framework 40B of the second air service tank 100
The sidepiece of side, is formed with two embedded holes that are chimeric with the chimeric pipe 60 of framework 40B and connecting with the cavity portion 44 of framework 40B
106.Lug 108 is extended between these embedded holes 106, it is from the top center portion of the second air service tank 100 to under
The direction that slot 64 intersects（Conveying direction D）Stretch out, and when chimeric pipe 60 is chimeric with embedded hole 106, with framework 40B
Recess 74 engages.
Hereinafter, the effect to the suspension conveying unit 10 of the first embodiment of the present invention is illustrated.
Supply from two compressors 30 to hollow bulb 88A, 100A of the first air service tank 88 and the second air service tank 100
To barotropic gas（Such as 0.1 ~ 400kPa）.
The gas supplied to the hollow bulb 88A of the first air service tank 88 is sent to the sky of framework 40A via chimeric pipe 96
Chamber portion 44, successively via connecting elements 62（Chimeric pipe 60）It is sent to the cavity portion 44 of various frameworks 40B ~ 40C.Similarly,
The gas supplied to the hollow bulb 100A of the second air service tank 100 is transmitted via the embedded hole 106 of the second air service tank 100
To the cavity portion 44 of framework 40B, successively via connecting elements 62（Chimeric pipe 60）It is sent to the cavity of various frameworks 40A ~ 40C
Portion 44.Thus, gas spreads to the cavity portion 44 of various frameworks 40A ~ 40C, and from the gas squit hole of various frameworks 40A ~ 40C
54 spray upward.That is, gas sprays from the substantially entire surface on suspension conveying road surface 36, so that glass substrate P is outstanding
Float without there is warpage such that it is able to suspension conveying road surface 36（Roof 42）Non-contactly conveyed.Blocked with sucker 39
Glass substrate P of the tight suspension is simultaneously conveyed along conveying direction D by conveyer device 38 to it.
More than, suspension conveying unit 10 according to the first embodiment of the invention, when from compressor 30 to the first air
During 88 and second air 100 supply gas of service tank of service tank, gas via connecting elements 62 be fed into various frameworks 40A ~
The cavity portion 44 of 40C, so, gas can be from the gas squit hole 54 of each roof 42 for becoming continuous suspension conveying road surface 36
Spray, suspension conveying glass substrate P.Thus, it is not necessary to which compressor 30 and sky are set according to the quantity of various frameworks 40A ~ 40C
Gas service tank 88,100, can suppress integrally-built complication.
In addition, when connecting various frameworks 40A ~ 40C, upper side engagement portion 70 engages with lower slot 64, lower side engagement portion 66
Engage with upper slot 68 such that it is able to the position of limit transport direction D exactly in various frameworks 40A ~ 40C.
And, when connecting various framework 40A ~ 40C, lug 72 engages with recess 74, so as to each with what conveying direction D intersected
The position for planting the width of framework 40A ~ 40C also can be limited exactly.
Further, since constituting the suspension of glass substrate P by the roof 42 of shape or various frameworks 40A ~ 40C of different sizes
Conveying road surface 36, it is possible to freely adjusting the track and size on suspension conveying road surface 36 according to the layout of factory.
And, various frameworks 40A ~ 40C include overlooking it is trapezoidal, the trapezoidal upper bottom and the side gone to the bottom can connected
Framework 40C of upper and other frameworks 40A ~ 40C assemblings, so as to pass through to change the number of framework 40C, can more freely adjust outstanding
The track on floating conveying road surface 36.Specifically, bottom and situation that the mutual angle in side gone to the bottom is such as 22.5 degree in connection
Under, as shown in figure 3, when being continuously connected two frameworks 40C, can be by 45 degree of the orbit modification on suspension conveying road surface 36, continuously
During ground 4 frameworks 40C of connection, can be by 90 degree of the orbit modification on suspension conveying road surface 36.
As long as in addition, the diapire of the cavity portion 44 for constituting various framework 40A ~ 40C is opened, and being covered closing, so as to
Open cavity portion 44 is formed, so, the manufacture of various frameworks 40A ~ 40C becomes easy.
It is additionally, since various frameworks 40A ~ 40C to be fixed on pedestal 32 by projecting piece 82, so connecting each other in framework
When connecing, various frameworks 40A ~ 40C dislocation can be suppressed, thus, the mutual connection of framework becomes easy.
Further, since the first air service tank 88 engages with lower side engagement portion 66, and the second air service tank 100 with it is upper
Side engagement portion 70 engages, it is possible to the first air service tank 88 and the second air service tank 100 are configured continuously suspending
The both ends on conveying road surface 36.Thereby, it is possible to make gas spread to centrally located portion from the both ends on suspension conveying road surface 36
The cavity portion 44 of framework 40B, 40C, and the spray volume of gas from gas squit hole 54 can be suppressed on suspension conveying road
Any end in face 36 or central part are reduced.
＜ second embodiments ＞
Hereinafter, the suspension conveying unit 110 of second embodiment of the present invention is illustrated.
As shown in figure 8, the suspension conveying unit 110 of second embodiment of the present invention is compared with first embodiment, frame
The structure of body 112 and the mutual method of attachment of framework 112 are different.
Specifically, suspension conveying unit 110 have the multiple frameworks 112 of form and dimension identical, framework 112 each other by
Assembling simultaneously constitutes continuous suspension conveying road surface 36 by the roof 114 of each framework 112.Each framework 112 is internal with cavity portion
116 rectangular flat shape framework, roof 114 is made up of the orifice plate 119 with gas squit hole 118.
In addition, each framework 112 by connecting tube 124 be connected, the connecting tube 124 respectively with along adjacent framework 112
The thickness of slab direction connector 122 that runs through and formed of side plate 120 be fitted together to, and connect adjacent cavity portion 116.In the connection
The periphery pars intermedia of pipe 124 is formed with convex portion 126, when connecting each framework 112 using connecting tube 124, each framework 112 and convex portion
126 abut, so as to limit the position of conveying direction D.In addition, between connecting tube 124 and connector 122, arranging close
Envelope part 128, so that gas is not escaped from gap.
It should be noted that on the side plate 120 positioned at the framework 112 at the both ends on suspension conveying road surface 36, to make
Gas does not form connector 122 not to outside effusion, or is closed with lid etc..Or, it is also possible to connected using sealing-plug blocking
Interface 122.In addition, in base wall panel 112A positioned at the framework 112 at the both ends on suspension conveying road surface 36, being formed with and pipe 34
Connection and to the gas supply port 112B of the supply gas of cavity portion 116.Additionally, orifice plate 119 or base wall panel 112A are led to side plate 120
Cross bonding agent or screw etc. to be fixed.Or, it is also possible to by the integrally formed orifice plate 119 of drawing processing and base wall panel 112A.
In addition, it is identical with first embodiment, in the width of the framework 112 different from the side plate 120 for being provided with connector 122
The sidepiece in direction, is provided with the projecting piece (not shown) extended out from the sidepiece.It is formed with what is run through up and down on projecting piece
Screwed hole, relative with the screwed hole and for loading the pedestal 32 of framework（With reference to Fig. 1）On be also formed with screwed hole, by from
Top inserts screws into these screwed holes, and thus projecting piece is fixed on pedestal.
More than, suspension conveying unit 110 second embodiment of the invention, in the same manner as first embodiment,
Connect each framework 112 by making connecting tube 124 chimeric with connector 122 such that it is able to limit the width of framework 112
Or the position of short transverse.And, the position of the conveying direction D of framework 112 can be limited by the convex portion 126 of connecting tube 124.
If further, since connecting tube 124 is fitted together to respectively with the connector 122 of the sidepiece 120 of adjacent framework 112, so
The manufacture of framework 112 becomes easy.
＜ variations ＞
The present invention is described in detail by by specific embodiment, but the present invention is not limited by the embodiment,
Other various embodiments can be implemented in the scope of the present invention, this it will become apparent to those skilled in the art that
For example can appropriately combined above-mentioned multiple embodiments implemented.Alternatively, it is also possible to be combined as following variation.
For example, in the first embodiment, illustrate that each suspension conveying unit 10 has shape or size mutually different
Various frameworks 40A, 40B, the situation of 40C, but it is also possible to as second embodiment, with shape or the mutual identical of size
Multiple frameworks.
In addition, in this second embodiment, the form and dimension identical situation of multiple frameworks 112 is illustrated, but also may be used
Similarly to include the shape or size framework different with other frameworks from first embodiment.In addition, multiple frameworks 112 also may be used
With include overlooking in the same manner as first embodiment it is trapezoidal and can the side for connecting trapezoidal upper bottom and going to the bottom and other
The framework that framework is assembled.
In addition, the structure of framework is in addition to the structure illustrated in first embodiment and second embodiment, it is also possible to
Using Fig. 9（A）The structure of shown framework 130.Specifically, framework 130 internally have cavity portion 44, from the cavity portion
44 connect and are formed in the ejection gas of the gas squit hole (not shown) on roof.In the framework 130, it is provided with and other frames
Body 130 can make the connected entrance 132 of gas circulation in adjacent cavity portion 44 when connecting.In addition, at the both ends of framework 130
Roof and diapire on be provided with recess 134.And, a connecting plate 136 is entered in the recess 134 of adjacent framework 130, will
Screw 142 is screwed into a pair of screwed holes 138 for being formed on connecting plate 136 and relative with the screwed hole 138 is formed in recess
A pair of screwed holes 140 on 134, are thus connected adjacent each framework 130.
And, at least one framework 130（For example, positioned at suspension conveying road surface 36 conveying direction D one end（Ginseng
According to Fig. 1）Framework 130）On, it is provided with the cavity of the barotropic gas that will be supplied to via pipe 34 from compressor 30 to framework 130
The air service tank (not shown) of the supply of portion 44.
In addition, the structure of framework can adopt Fig. 9（B）The structure of shown framework 150.Specifically, including framework 150
Portion has cavity portion 44, and from connecting with the cavity portion 44 and being formed in the gas squit hole (not shown) on roof gas is sprayed.
In the framework 150, being provided with can make the company of gas circulation in adjacent cavity portion 44 when connecting with other frameworks 150
Port 151.In addition, framework 150 has：Jut 152, it is from the top wall portion of a sidepiece of the framework 150 to conveying direction D
Lateral process；Recess 154, it is formed in the top wall portion of the other side, embedding with the jut 152 of other adjacent frameworks 150
Close.In addition, being provided with recess 156 on the diapire at the both ends of framework 150.And, a connecting plate 158 enters adjacent frame
The recess 156 of body 150, screw 164 is screwed into a pair of screwed holes 160 for being formed on connecting plate 158 and with the screwed hole 160
Relative a pair of the screwed holes 162 being formed on recess 156, thus, connect adjacent each framework 150.
And, at least one framework 150（For example, positioned at suspension conveying road surface 36 conveying direction D one end（Ginseng
According to Fig. 1）Framework 150）On, it is provided with the cavity of the barotropic gas that will be supplied to via pipe 34 from compressor 30 to framework 150
The air service tank (not shown) of the supply of portion 44.
In addition, the structure of framework can also adopt Figure 10（A）And Figure 10（B）The structure of shown framework 170.It is concrete next
Say, framework 170 internally has cavity portion 44, spray from connecting with the cavity portion 44 and being formed in the gas (not shown) on roof
Portal ejection gas.In addition, framework 170 has：Cylindrical portion 172, is arranged on a sidepiece of the framework 170；Peristome 174,
The other side of the framework 170 is arranged on, and is connected with cavity portion 44, and for the cylindrical portion of other adjacent frameworks 170
172 are fitted together to.And, by the chimeric of these cylindrical portion 172 and peristome 174, cavity portion 44 is interconnected such that it is able to realize
The circulation of gas, and connect adjacent each framework 170.In addition, the cylindrical portion 172 also with positioned at the end of suspension conveying road surface 36
Framework 178 peristome 174 be fitted together to, be fed into cavity portion 44 via the connector 182 of the framework 178 being connected with pipe 34
Gas can be sent to the cavity portion 44 of each framework 170.
In addition, in the first embodiment, for the first air service tank 88 and the second air service tank 100 are configured
The both ends on continuous suspension conveying road surface 36（It is arranged in framework 40A, 40B at both ends）Situation be illustrated,
But the first air service tank 88 or the second air service tank 100 can also be arranged at least one framework.For example, it is also possible to
First air service tank 88 is only arranged on the one end on continuous suspension conveying road surface 36, it is also possible to only supply the first air
Case 88 is arranged on the pars intermedia on suspension conveying road surface 36.
In addition, illustrate the both sides 56A of the conveying direction D that connecting elements 62 is formed in various frameworks 40A ~ 40C,
The situation of 56B, but it is also possible to the both sides of the width being arranged in various frameworks 40A ~ 40C.Specifically, it is also possible to
One sidepiece of the width in various frameworks 40A ~ 40C arranges above-mentioned lower side engagement portion 66 and lug 72, and in various frameworks
The other side of width in 40A ~ 40C arranges above-mentioned upper side engagement portion 70 and recess 74.
In addition, to make the connection of connecting elements 62 become easy, chimeric pipe 60 can be made up of elastomers such as rubber.
In addition, in the first embodiment, suspension conveying unit 10 is loaded into the floating carrier comprising exposure component
In 12, but it is also possible in being fitted into the floating carrier 12 not comprising exposure component.
In addition, in the first embodiment, as being conveyed by suspension conveying unit 10 by conveying body, with glass substrate
It is illustrated as a example by P, but the invention is not restricted to this, for example, it is also possible to conveys beyond glass substrates P such as resin plate or metallic plate
By conveying body（Workpiece）.
Claims (14)
1. a kind of suspension conveying unit, it has：
Framework, it is assembled multiple, and continuous suspension conveying road surface is made up of roof, and internally has cavity portion；
Multiple gas squit holes, are formed on the roof, and connect with the cavity portion；
Connecting elements, is arranged on the sidepiece of the framework, connects each framework, and can make gas described in adjacent
Circulation in cavity portion；
Gas supply member, is arranged in framework described at least one, by the gas supplied by gas supply device supply to
The cavity portion,
The suspension conveying unit is characterised by,
The connecting elements has chimeric with the connector being formed on the sidepiece of the adjacent framework respectively, and makes adjacent
The connecting tube of the cavity portion connection.
2. suspension conveying unit as claimed in claim 1, it is characterised in that the framework includes that shape or size are mutually different
Multiple frameworks.
3. suspension conveying unit as claimed in claim 1, it is characterised in that multiple frameworks include overlooking trapezoidal, energy
Enough frameworks assembled with other frameworks in the side for connecting the trapezoidal upper bottom and go to the bottom.
4. suspension conveying unit as claimed in claim 1, it is characterised in that have：
Pedestal, for loading the framework；
Projecting piece, extends out from the sidepiece of the framework different from the sidepiece for being provided with the connecting elements, and is fixed on
On the pedestal.
5. a kind of suspension conveying unit, it has：
Framework, it is assembled multiple, and continuous suspension conveying road surface is made up of roof, and internally has cavity portion；
Multiple gas squit holes, are formed on the roof, and connect with the cavity portion；
Connecting elements, is arranged on the sidepiece of the framework, connects each framework, and can make gas described in adjacent
Circulation in cavity portion；
Gas supply member, is arranged in framework described at least one, by the gas supplied by gas supply device supply to
The cavity portion,
The suspension conveying unit is characterised by,
The connecting elements has：
Lower side engagement portion, it has from a sidepiece of framework lower section and extends out, while to the width side of the framework
To extension, and lower slot open upward；
Upper side engagement portion, it has from another sidepiece top of the framework and extends out, while to the width of the framework
Direction extends, and upper slot open downwards,
The upper side engagement portion engages with the lower slot, and the lower side engagement portion engages with the upper slot.
6. suspension conveying unit as claimed in claim 5, it is characterised in that
The connecting elements has：
Stretch out in lug, the direction that direction intersects with the lower slot on its sidepiece from the framework；
Recess, its by recessed above another sidepiece of the framework, and for the lug engaging.
7. the suspension conveying unit as described in claim 5 or 6, it is characterised in that the framework includes that shape or size are mutual
Different multiple frameworks.
8. the suspension conveying unit as described in claim 5 or 6, it is characterised in that multiple frameworks include overlooking it is trapezoidal,
The framework that can be assembled with other frameworks in the side for connecting the trapezoidal upper bottom and go to the bottom.
9. the suspension conveying unit as described in claim 5 or 6, it is characterised in that have：
Pedestal, for loading the framework；
Projecting piece, extends out from the sidepiece of the framework different from the sidepiece for being provided with the connecting elements, and is fixed on
On the pedestal.
10. the suspension conveying unit as described in claim 5 or 6, it is characterised in that the gas supply member is to be connected
The hollow part of the lower side engagement portion or the upper side engagement portion, the hollow part has：Gas supply port, in
Empty portion's supply gas；Connected entrance, the cavity portion for making the framework is connected with the hollow bulb.
11. suspension conveying units as claimed in claim 8, it is characterised in that the connecting elements have respectively be formed in
Connector on the sidepiece of the adjacent framework is fitted together to, and makes the connecting tube that the adjacent cavity portion connects.
12. suspension conveying units as claimed in claim 10, it is characterised in that the connecting elements have respectively be formed in
Connector on the sidepiece of the adjacent framework is fitted together to, and makes the connecting tube that the adjacent cavity portion connects.
13. suspension conveying units as claimed in claim 10, it is characterised in that the framework includes shape or size mutually not
Same multiple frameworks.
14. suspension conveying units as claimed in claim 10, it is characterised in that have：Pedestal, for loading the framework；
Projecting piece, extends out from the sidepiece of the framework different from the sidepiece for being provided with the connecting elements, and is fixed on described
On pedestal.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011269785 | 2011-12-09 | ||
| JP2011-269785 | 2011-12-09 | ||
| JP2012264401A JP2013139338A (en) | 2011-12-09 | 2012-12-03 | Levitation transfer unit |
| JP2012-264401 | 2012-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103159028A CN103159028A (en) | 2013-06-19 |
| CN103159028B true CN103159028B (en) | 2017-05-03 |
Family
ID=48582631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210524588.1A Expired - Fee Related CN103159028B (en) | 2011-12-09 | 2012-12-07 | Floating transfer unit |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20130065620A (en) |
| CN (1) | CN103159028B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103824792A (en) * | 2014-02-28 | 2014-05-28 | 上海和辉光电有限公司 | Storage cabinet and control method thereof |
| CN109277788B (en) * | 2018-09-10 | 2020-05-05 | 烟台石川密封科技股份有限公司 | Robot system with gasket taking and assembling functions |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101633442A (en) * | 2008-06-09 | 2010-01-27 | 株式会社Ihi | Floating transportation device |
| CN101857141A (en) * | 2009-04-07 | 2010-10-13 | 株式会社Ihi | Conveying direction converter and levitation transportation system |
| CN101905808A (en) * | 2009-06-02 | 2010-12-08 | 株式会社Ihi | Floating carrier and floating unit |
| CN102219116A (en) * | 2010-04-15 | 2011-10-19 | 株式会社太星技研 | Sheet glass conveying device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5047545B2 (en) * | 2006-06-30 | 2012-10-10 | 株式会社妙徳 | Levitation transport unit |
| JP2008074538A (en) * | 2006-09-21 | 2008-04-03 | Produce:Kk | Non-contact carrying device |
| JP2009161283A (en) * | 2007-12-28 | 2009-07-23 | Myotoku Ltd | Levitating unit and device |
-
2012
- 2012-12-07 CN CN201210524588.1A patent/CN103159028B/en not_active Expired - Fee Related
- 2012-12-07 KR KR1020120142231A patent/KR20130065620A/en not_active Application Discontinuation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101633442A (en) * | 2008-06-09 | 2010-01-27 | 株式会社Ihi | Floating transportation device |
| CN101857141A (en) * | 2009-04-07 | 2010-10-13 | 株式会社Ihi | Conveying direction converter and levitation transportation system |
| CN101905808A (en) * | 2009-06-02 | 2010-12-08 | 株式会社Ihi | Floating carrier and floating unit |
| CN102219116A (en) * | 2010-04-15 | 2011-10-19 | 株式会社太星技研 | Sheet glass conveying device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103159028A (en) | 2013-06-19 |
| KR20130065620A (en) | 2013-06-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104249898B (en) | The check device of article storage apparatus | |
| CN101506561B (en) | Integrated gas panel apparatus | |
| CN103159028B (en) | Floating transfer unit | |
| JP4814050B2 (en) | Levitation transport unit | |
| KR20120046084A (en) | Hand for transferring substrates and substrate transfer apparatus equipped therewith | |
| KR101497054B1 (en) | Substrate processing apparatus | |
| JP2008007319A (en) | Floating conveying unit | |
| TWI680927B (en) | Storage rack | |
| JP2008007319A5 (en) | ||
| JP2009073646A (en) | Floating method and floating unit | |
| TWI405031B (en) | Air stream conveying device | |
| KR20140127438A (en) | Substrate absorption device | |
| CN106684014A (en) | Substrate levitation transport device | |
| JP2010260715A (en) | Levitation unit and levitation device | |
| KR20130027159A (en) | Support bar of cassette for lcd glass and the assembling jig | |
| KR101474839B1 (en) | separation distance keeping type substrate aligning device | |
| KR102451485B1 (en) | Display panel floating stage device having a foreign materia storage space in the intake line | |
| CN117615980A (en) | Floating platform of display panel | |
| US8388296B2 (en) | Vertical carousel and vertical transportation method using the vertical carousel | |
| JP2009149389A (en) | Floating unit and device having the same | |
| CN211569380U (en) | Vacuum adsorption module | |
| CN101992154A (en) | Fluid spraying apparatus | |
| CN213401138U (en) | Flexible substrate bearing device | |
| TW201345817A (en) | Raising and conveying structure | |
| CN104245547B (en) | Conveyer device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170503 Termination date: 20171207 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |