KR102451485B1 - Display panel floating stage device having a foreign materia storage space in the intake line - Google Patents

Abstract

The present invention relates to a display panel floating stage device having a foreign material storage space in an intake line, which has an effect of reducing manufacturing costs. To this end, the display panel floating stage device having a foreign material storage space in an intake line comprises: a top plate in which a plurality of alternation patterns of a plurality of air supply holes and vacuum holes are formed for a display panel to stably float; a vacuum synchronization plate coupled onto a bottom surface of the top plate, and formed with a plurality of channels in which the plurality of air supply holes and the vacuum holes are interconnected; a plurality of pressure maintaining plates which are coupled onto a bottom surface of the vacuum synchronization plate and are formed with a pressure maintaining hole interconnected with each channel; a first bottom plate which is coupled onto a bottom surface of the pressure maintaining plate and blows out vacuum pressure to the pressure maintaining hole interconnected with each vacuum hole; a second bottom plate which is coupled onto a bottom surface of the first bottom plate and blows out air supply pressure to the pressure maintaining hole interconnected with each air supply hole; and a manifold which is coupled onto a bottom surface of the second bottom plate and supplies vacuum pressure and air supply pressure to the first bottom plate or the second bottom plate.

Description

Display panel floating stage device having a space for accommodating foreign substances in the intake line

The present invention relates to a display panel floating stage device having a foreign material accommodating space in an intake line, and more particularly, by synchronizing a plurality of vacuum holes into one through a synchronization line of a vacuum synchronization plate, the hole processing of the vacuum line is reduced by 1/2 or more In addition, each synchronization line has a partition wall formed between the hole-processed upper hole and uses it as a space to adhere foreign substances such as particles or chemicals, thereby preventing the vacuum negative pressure from being lowered and cleaning the vacuum line. Due to this, it relates to a display panel floating stage device having a foreign material accommodating space in an intake line so that the stop of the equipment can be delayed.

In general, looking at the configuration of flat panel displays used in TVs, monitors, mobile phones, etc., a grid pattern is formed on a transparent display panel, there is a backlight behind them, there is a liquid crystal between them, and a color filter is placed in front of the display panel. do.

By the electric signal applied to the grid pattern, the liquid crystal can block or pass light at a specific position, and a display device in this way is called an 'LCD'. In some cases, organic materials are used instead of liquid crystals, and since these organic materials emit light by themselves when they receive an electric signal, there is no need for a backlight.

A lot of processes go through until the flat panel display device (FPD) as described above is made. In this process, the display panel is repeatedly moved and inspected. The method of moving the display panel differs depending on the process characteristics. For simple transfer, a roller, index, or robot arm is used. However, since precise transfer is required in the inspection process, non-contact transfer is recommended. Common, non-contact conveying devices include pneumatic and floating stages.

Looking at some characteristics that the levitation stage should have, a small amount of air as small as possible should constantly flow out under an appropriate pressure, and the flowed air should be inhaled without clogging.

In recent years, as the size of the display increases, the corresponding precision also increases, and accordingly, the panel transport precision is also required to be high.

At this time, if the display panel is shaken when it is moved, the image coming into the camera is not good and the quality of defect inspection is reduced.

That is, when vertical shaking of the display panel occurs, the display panel, which is a subject, is out of focus of the lens, and thus a satisfactory inspection image cannot be obtained, which causes deterioration of inspection ability.

Here, when the display panel moves, it is the levitation stage that is most closely related to the degree of shaking up and down. If the amount of air coming out through the floating stage is not constant or if the air flow is not smooth, the display panel will shake.

The reason can be seen as the pressure and volume change between the levitation stage and the display panel.

Therefore, it is most important to minimize the amount of air while maintaining an appropriate pressure in the flotation stage and to allow the air to escape well.

The above-mentioned appropriate pressure is a pressure having a resistive force such that the display panel does not contact the levitation stage. When the pressure is low, the conveying precision is improved, but the possibility of contact with the levitation stage is high.

Also, if the pressure is too high, depending on the design, it may cause deformation of the floating stage in the long term. Therefore, it is important to maintain an appropriate pressure by analyzing the display panel, inspection precision, and process well.

In addition, even if the appropriate pressure is reached, if the air flow rate is large, the influence of turbulence during air blowing increases and the display panel may shake. Also, as much air cannot escape quickly, partial air stagnation occurs, resulting in a change in the gap between the display panel and the levitation stage. This phenomenon also reduces the stability of the injury, so it is difficult to obtain a good examination image.

A resistor is needed to reduce the airflow. The resistor serves to create a pressure and control the amount of air at the same time. Therefore, it can be said that the resistor is the most important technical element in the levitation stage.

Furthermore, even if an appropriate pressure is formed and the air flow rate is small, it is difficult to stably transport the display panel if there is no intake air.

The part that is generally neglected in designing the levitation stage is the intake part. Intake is just as important as the resistor.

No matter how little air is released, it will accumulate on the injury stage over time. If there is no intake, the display panel moves in an umbrella shape, making it difficult to obtain a high-quality sword image. Therefore, it is essential to secure a flow path that can quickly inhale the air flowing from the bottom of the flotation stage.

Meanwhile, the display panel may apply a photosensitive coating solution to form a photoresist (PR), a black matrix (BM), a column space (CS), and the like.

In addition, when manufacturing a PDP panel, a coating solution or a photosensitive coating solution may be applied to form an upper dielectric, a lower dielectric, and a barrier rib on the PDP panel substrate.

However, there is a problem that the photosensitive coating solution adheres to the inside of the vacuum hole of the levitation stage and clogging occurs.

Due to these problems, after replacing the new flotation stage, the production line must be restarted by measuring the leveling and flotation amount, which takes about 2 days.

Republic of Korea Patent Registration No. 10-1179736

The present invention has been devised in view of the above problems, and a first object of the present invention is to synchronize a plurality of vacuum holes into one through a synchronization line, thereby reducing the hole processing of the vacuum line to 1/2 or more. An object of the present invention is to provide a display panel floating stage device having a foreign material accommodating space on the line.

A second object of the present invention is to prevent a decrease in the vacuum negative pressure of the vacuum hole by using it as a space to adhere foreign substances such as particles or chemical liquid through a synchronization line that synchronizes a plurality of vacuum holes into one. An object of the present invention is to provide a display panel floating stage device having a foreign material accommodating space in one intake line so that the equipment can be stopped.

According to a feature for achieving the above object, the first invention relates to a display panel floating stage device having a foreign material accommodating space in the intake line, for this purpose, a plurality of air supply holes and A top plate in which a plurality of vacuum holes are formed in an alternating pattern; and a vacuum synchronization plate coupled to a bottom surface of the top plate and having a plurality of channels communicating with each of the air supply holes and the vacuum holes are formed; and the vacuum synchronization plate A plurality of pressure maintaining plates coupled to the bottom surface and having pressure maintaining holes communicating with each channel are formed; A first bottom plate; and a second bottom plate coupled to the lower surface of the first bottom plate and branching the air supply pressure to a pressure holding hole common to each air supply hole; and a second bottom plate coupled to the lower surface of the second bottom plate A synchronization line for synchronizing a plurality of vacuum holes adjacent to each other in a diagonal direction, each channel of the vacuum synchronization plate being made including; a manifold for supplying vacuum pressure and air supply pressure to the first bottom plate or the second bottom plate. and an air supply pressure maintaining hole communicating with the air supply hole, wherein the vacuum synchronization plate further includes a communication hole connected to each of the synchronization lines via a connection groove, wherein the communication hole is a pressure maintaining hole of the pressure maintaining plate It communicates with, and each synchronization line is characterized in that it is configured to be used as a space for adhering particles or chemical liquid by a partition wall formed through a connection groove and a communication hole.

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In the fourth invention, in the first invention, each pressure holding hole of the pressure holding plate is composed of a pressure holding chamber and a passage having a relatively smaller inner diameter than the pressure holding chamber, and the air supply pressure holding hole of the vacuum synchronizing plate is air supply It is characterized in that it is composed of a pressure holding chamber and an air supply passage having a relatively smaller inner diameter than the supply air pressure holding chamber.

In the fifth invention, in the fourth invention, any one of the pressure maintaining plates is characterized in that the pressure holding chamber in communication with the vacuum hole is extended and extended without a passage.

In the sixth invention, in the first invention, the first bottom plate has a vacuum furnace formed in parallel at a predetermined interval to supply vacuum pressure to the respective vacuum holes, and a plurality of tree-shape on both sides in the longitudinal direction of each vacuum furnace. It is characterized in that the branched first branch passage communicating with the vacuum hole is formed.

In the seventh invention, in the first invention, the second bottom plate has a supply passage formed in parallel at a predetermined interval to supply air supply pressure to the air supply hole, and a plurality of branches in a tree shape on both sides in the longitudinal direction of each air supply passage. It is characterized in that a second branch passage communicating with the air supply hole is formed.

In the eighth invention, in the first invention, the top plate is characterized in that only the air supply holes are arranged at regular intervals without a vacuum hole along the side lateral sides of the first row.

According to the display panel floating stage device having a foreign material accommodating space in the intake line of the present invention, by synchronizing a plurality of vacuum holes into one through the synchronization line of the vacuum synchronization plate, the hole processing of the vacuum line is reduced to 1/2 or more, thereby reducing the manufacturing cost. There is a saving effect.

In addition, it is possible to prevent the negative pressure of the vacuum hole from being lowered by using it as a space to adhere foreign substances such as particles or chemical liquid through the synchronization line, so that the equipment can be maintained for a long time without the downtime due to the cleaning of the vacuum line. .

In addition, there is an effect that the display panel can be stably floated without shaking because the vacuum pressure and the air supply pressure do not change even in the portion with and without resistance of the floating display panel.

In addition, there is an effect of stably maintaining the flatness of the display panel by allowing only supply pressure to be sprayed without vacuum pressure on both sides of the display panel where sagging occurs.

1 is a perspective view of a display panel floating stage device having a foreign material accommodating space in an intake line according to the present invention;
Figure 2 is a bottom perspective view of Figure 1,
3 is an exploded perspective view of a display panel floating stage device having a foreign material accommodating space in the intake line according to the present invention;
4 is a plan view of the vacuum synchronization plate extracted from FIG. 3;
5 is a plan view showing the first bottom plate extracted from FIG. 3;
6 is a plan view showing the second bottom plate extracted from FIG. 3;
Fig. 7 is a perspective view showing the manifold taken from Fig. 3;
8 is a projection view showing the connection state of the first and second bottom plates, the manifold and the socket block according to the present invention;
9 is an edited cross-sectional view showing the operating state of the supply air pressure and vacuum pressure of the display panel floating stage device having a foreign material accommodation space in the intake line of the present invention;
10 is an enlarged view showing the moving state of the vacuum pressure extracted from FIG.
11 is an enlarged view showing the movement state of the air supply pressure extracted in FIG.

The following objects, other objects, features and advantages of the present invention will be readily understood through the following preferred embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms.

Rather, the embodiments introduced herein are provided so that the disclosed subject matter may be thorough and complete, and that the spirit of the present invention may be sufficiently conveyed to those skilled in the art.

The embodiments described and illustrated herein also include complementary embodiments thereof.

In this specification, the singular also includes the plural, unless specifically stated otherwise in the phrase. As used herein, the terms 'comprise' and/or 'comprising' do not exclude the presence or addition of one or more other components.

Hereinafter, the present invention will be described in detail with reference to the drawings. In describing the specific embodiments below, various specific contents have been prepared to more specifically explain and help the understanding of the invention. However, a reader having enough knowledge in this field to understand the present invention may recognize that it can be used without these various specific details. In some cases, it is mentioned in advance that parts which are commonly known and not largely related to the invention in describing the invention are not described in order to avoid confusion in describing the invention.

Hereinafter, the display panel floating stage device having a foreign material receiving space in the intake line according to the present invention will be described in detail together with the accompanying drawings.

1 is a perspective view of a display panel floating stage device having a foreign material receiving space in an intake line according to the present invention, FIG. 2 is a bottom perspective view of FIG. 1, and FIG. 3 is a display having a foreign material receiving space in an intake line according to the present invention An exploded perspective view of the panel floating stage device, FIG. 4 is a plan view of the vacuum synchronization plate extracted from FIG. 3 , FIG. 5 is a plan view showing the first bottom plate extracted from FIG. 3 , and FIG. 2 is a plan view showing the bottom plate, FIG. 7 is a perspective view showing the manifold extracted from FIG. 3, and FIG. 8 is a projection view showing the connection state of the first and second bottom plates, the manifold and the socket block according to the present invention. , Figure 9 is an edited cross-sectional view showing the operating state of the supply air pressure and vacuum pressure of the display panel floating stage device having a foreign material receiving space in the intake line of the present invention, Figure 10 is the movement state of the vacuum pressure extracted in Figure 9 It is an enlarged view showing, and FIG. 11 is an enlarged view showing the movement state of the air supply pressure extracted in FIG.

1 to 11, the present invention synchronizes a plurality of vacuum holes into one through a synchronization line, thereby reducing the hole processing of the vacuum line to 1/2 or more, and also with particles or chemicals through the synchronization line. By using it as a storage space to store the same foreign material, it is possible to prevent the negative pressure of the vacuum hole from being lowered, and the vacuum pressure and air supply pressure do not change even in areas with and without resistance of the display panel, so that the display panel can be moved without shaking. A display panel floating stage device having a foreign material accommodating space in an intake line that stably floats the display panel and allows only supply air pressure to be sprayed without vacuum pressure on both sides of the display panel where sagging occurs to stably maintain the flatness of the display panel (100) is about.

The display panel floating stage device 100 having a foreign material accommodating space in the intake line of the present invention is largely composed of six parts, which are a top plate 10, a vacuum synchronization plate 20, and a pressure maintenance plate 30. And, the first and second bottom plates 40 and 50 and the manifold 60 are sequentially stacked and coupled.

As shown in FIG. 1 , the top plate 10 has a structure in which a plurality of air supply holes 11 and vacuum holes 12 are formed in an alternating pattern in order to stably float the display panel 200 .

At this time, the air supply pressure generated in the air supply hole 11 is relatively larger than the vacuum pressure generated in the vacuum hole 12 , so that the display panel 200 can float.

The vacuum synchronization plate 20 is coupled to the bottom surface of the top plate 10, as shown in FIGS. 4, 9 and 10, a plurality of channels 21 through which the air supply hole 11 and the vacuum hole 12 communicate with each other. ) is a structure in which many are formed.

Here, the vacuum synchronization plate 20 has a structure in which a synchronization line 211 for synchronizing the plurality of vacuum holes 12 into one is further formed.

In more detail, each channel 21 of the vacuum synchronization plate 20 maintains a plurality of synchronization lines 211 for synchronizing a plurality of vacuum holes 12 into one, and a supply pressure in communication with the air supply hole 11 . Consists of a hole 212 .

Here, the synchronization line 211 connects two vacuum holes 12 adjacent to each other in a diagonal direction because the vacuum holes 12 formed in the top plate 10 are formed in an alternating pattern with the air supply holes 11. made to be synchronized.

That is, the synchronization line 211 is formed by machining a hole in a diagonal direction in order to synchronize the air supply hole 11 and the alternating vacuum hole 12 .

Through this, the vacuum line hole processing of the pressure maintaining plate 30 and the first and second bottom plates 40 and 50, which are in communication with the vacuum hole 12, can be reduced to 1/2 or more, thereby reducing the manufacturing cost. is provided

At this time, the synchronization line 211 may be configured to synchronize three or four or five or six vacuum holes 12 as one in another embodiment.

In addition, each of the synchronization lines 211 is arranged to alternate with the pressure retaining hole 31 of the pressure retaining plate 30 to be described later. 214) may be configured to communicate with the pressure holding hole 31 of the pressure holding plate 30 by processing the hole 213 connected through the medium.

At this time, as shown in FIG. 10 , a partition wall 211a is formed between each of the synchronization lines 211 and the upper bore 213 in which the holes are machined. It can be used as a space to adhere foreign substances.

And since a connection groove 214 is formed in the upper portion of the partition wall 211a, foreign substances such as particles or chemical are adhered to the synchronization line 211, and then suction air is introduced into the upper chamber 213 through the connection groove 214. is made to be induced.

Since each of the synchronization lines 211 described above is used as a space for adhering foreign substances such as particles or chemicals based on a large volume, it is possible to prevent the vacuum negative pressure from being lowered.

In addition, the sound pressure of the vacuum hole 12 is lowered through each of the synchronization lines 211 to prevent the floating amount of the display panel 200 from being unbalanced, and also to delay the stop of the facility due to the cleaning of the vacuum line. .

In addition, since the hole processing of the vacuum line is reduced by half through the synchronization line 211 , the air supply pressure generated in the air supply hole 11 is relatively larger than the vacuum pressure generated in the vacuum hole 12 , so the display panel (200) It is possible to provide a structure that can be floated.

In addition, the air supply pressure holding hole is in communication with the air supply hole, and is composed of an air supply pressure holding chamber (212a) and an air supply passage (212b) having a relatively smaller inner diameter than the supply air pressure holding chamber (212a). It functions to keep it constant.

The air supply pressure maintaining hole 212 has the same function as the pressure maintaining hole 31 of the pressure maintaining plate 30 to be described later.

As shown in FIGS. 9 to 11 , the pressure maintaining plate 30 is coupled to the bottom surface of the vacuum synchronization plate 20 to form a pressure maintaining hole 31 communicating with each channel 21 .

In more detail, each pressure holding hole 31 of the pressure holding plate 30 has a structure in common with the upper hole 213 and the air supply pressure maintaining hole 212 of the vacuum synchronization plate 20 .

The pressure maintaining plate 30 functions to constantly maintain the air supply pressure sprayed from the air supply hole 11 of the top plate 10 and the vacuum negative pressure sucked from the vacuum hole 12 .

Here, the pressure holding hole 31 of the pressure holding plate 30 is composed of a pressure holding chamber 311 and a passage 312 having a relatively smaller inner diameter than the pressure holding chamber 311 .

In the above, the pressure holding chamber 311 communicating with the air supply hole 11 and the air supply pressure maintaining hole 212 functions as a so-called resistor to generate a vortex in the supplied air to lower the pressure.

In addition, the passage 312 functions to reduce the flow rate of the air whose pressure is lowered by the pressure holding chamber 311 .

Accordingly, the air supply amount and the air supply pressure of the air discharged through the air supply hole 11 can be constantly maintained while passing through the pressure maintaining hole 31 of the pressure maintaining plate 30 in multiple stages.

On the other hand, the pressure holding hole 31 connected to the upper hole 213 of the vacuum synchronization plate 20 can prevent the vacuum pressure from increasing through the pressure holding chamber 311, and the passage 312 reduces the intake air amount. Allows you to adjust the amount of air supplied.

At this time, the passage 312 communicating with the communication hole 213 has a larger inner diameter than the passage 312 of the pressure maintaining hole 31 connected to the supply air pressure maintaining hole 212, so as to balance the intake amount compared to the supply air amount. made to fit

In addition, any one of the pressure maintaining plate 30 may be configured such that the pressure maintaining chamber 311 communicating with the vacuum hole 12 is extended without the passage 312 . This is to increase the amount of air sucked in by the vacuum, since the resistance of the vacuum pressure is greater, so as to balance the intake amount compared to the supply air amount.

Accordingly, the vacuum pressure and the intake amount sucked through the vacuum hole 12 can compensate for the vacuum line that is reduced to 1/2 or more due to the expansion in volume, and the vacuum pressure and the intake amount are also multi-staged through the pressure holding hole 31 . It can be kept constant over time.

Therefore, the top plate 10 does not change the vacuum pressure and the air supply pressure even in the portion where there is resistance and the portion where there is no resistance of the display panel 200 through the pressure maintaining plate 30, so that the display panel 200 is stable without shaking. can be injured by

The first bottom plate 40 is coupled to the bottom surface of the pressure maintaining plate 30 as shown in FIGS. 5, 9 and 10, and in the pressure holding hole 31 communicating with each of the vacuum holes 12. It functions to selectively supply vacuum pressure.

The first bottom plate 40 includes a vacuum furnace 41 formed in parallel at a predetermined interval in order to supply vacuum pressure to each vacuum hole 12, and a tree on both sides in the longitudinal direction of each vacuum furnace 41. It has a structure in which a first branch path 411 communicating with the vacuum hole 12 is formed by branching in a plurality of shapes.

Here, each of the first branch passages 411 selectively communicates with the pressure holding chamber 311 of the pressure holding hole 31 communicating with the vacuum hole 12 to suck air by vacuum negative pressure. .

In each vacuum path 41 of the first bottom plate 40 , a plurality of first connection paths 412 are formed separately from the first branch path 411 . A first through hole 413 for receiving air pressure is further formed.

At this time, as shown in FIG. 10 , the first through hole 413 extends to the second bottom plate 50 to deliver vacuum negative pressure for intake to the pressure maintaining plate 30 without interference of the second bottom plate 50 . done so that

In addition, the second bottom plate 50 is fixed to the lower surface of the first bottom plate 40 in order to supply air to the air supply hole 11 as shown in FIGS. 6, 9 and 11, and a predetermined interval is provided. It has a configuration including a supply passage 51 formed in parallel with each other, and a second branch passage 511 that is branched in a tree shape on both sides of the air supply passage 51 in the longitudinal direction.

Here, each of the second branch passages 511 is configured to selectively communicate with the pressure holding chamber 311 of the pressure holding hole 31 communicating with the air supply hole 11 to supply air for air supply.

In addition, a plurality of second connection passages 512 are formed in each supply passage 51 of the second bottom plate 50 separately from the second branch passage 511 . A second through hole 513 for receiving air pressure may be further formed.

As shown in FIG. 7 , the manifold 60 is coupled to the second bottom plate 50 to supply vacuum pressure and air supply pressure to the first bottom plate 40 or the second bottom plate 50 . .

One or a plurality of such manifolds 60 may be coupled, and as shown in FIG. 7 , the manifold 60 is fixed to the bottom surface of the second bottom plate 50 , and the air supply passage 51 of the first bottom plate 40 and , the second bottom plate 50 has a structure in which the supply air supply path 61 and the vacuum supply path 62, which are individually communicated with the vacuum path 41, are formed side by side in parallel.

Here, as shown in FIG. 11 , the air supply path 61 communicates with the second through holes 513 formed in each second connection path 512 of the second bottom plate 50 to each supply path 51 . It functions to supply air pressure.

And the vacuum supply path 62 communicates with the first through holes 413 formed in each first connection path 412 of the first bottom plate 40 so that vacuum pressure is supplied to each vacuum path 41 . function

Also, the lower surface of the manifold 60 further includes an air supply terminal hole 611 communicating with the air supply passage 61 and a vacuum terminal hole 621 communicating with the vacuum supply passage 62 .

At this time, the manifold 60 has the vacuum terminal hole 621 and the air supply terminal hole 611 has a socket block 70 for connecting the vacuum hose 71 and the air supply hose 72 to be combined. can

On the other hand, the display panel floating stage device 100 having a foreign material accommodating space in the intake line of the present invention is such that only supply air pressure is generated without vacuum pressure on both sides of the side of the display panel 200 in which sagging occurs, the flatness of the display panel 200 . It is designed to maintain the figure.

To this end, in the top plate 10, as shown in FIG. 1, only the air supply holes 11 are arranged at regular intervals along the side lateral sides of the first row.

And in the supply passages 51 disposed on both sides of the air supply passages 51 of the second bottom plate 50 , the auxiliary air supply passages 52 are made to communicate with each of the air supply holes 11 .

A third through hole 521 for receiving air may be formed in the auxiliary air supply passage 52 of the second bottom plate 50 .

And the manifold 60 may be further formed with an auxiliary supply passage 63 for individually supplying air to the two auxiliary air supply passages (52).

In addition, the upper surface of the manifold 60 is also formed with two auxiliary terminal holes 631 in communication with the auxiliary supply path 63, and each of these two auxiliary terminal holes 631 can be individually supplied with air supply pressure. The auxiliary socket block 80 is coupled to each other.

Through this, the air supply holes 11 disposed in the first row on both sides of the top plate 10 can individually provide separate air supply pressure, so that in addition to the flatness of the display panel 200 , the display panel 200 . Depending on the size, the display panel 200 may serve as an air fence so that the display panel 200 is transported in a straight line.

The path of the air supply line and the vacuum line of the display panel floating stage device having a foreign material accommodation space in the intake line of the present invention described as above is as follows.

Referring to Figures 10 and 11,

Vacuum line: Vacuum tank (not shown) ← Socket block ← Manifold (Vacuum conduit hole ← Vacuum supply path) ← 1st bottom plate (1st connection path ← 1st through hole ← 1st branch path ← Vacuum path) ← Multiple Pressure holding plate (pressure holding hole: pressure holding chamber ← passage) ← vacuum sync plate (channel: top hole ← connection groove ← sync line) ← top plate (vacuum hole)

Air supply line: Compression tank (not shown) → Socket block → Manifold (Supply terminal hole → Supply air supply path) → 2nd bottom plate (2nd connection path → 2nd through hole → 2nd branch path-supply path) → Multiple Pressure holding plate (pressure holding chamber → passage) → vacuum synchronization plate (channel: supply air pressure holding hole: supply air pressure holding chamber → air supply passage) → top plate (supply hole)

Air supply line at the outer edge of the top plate: Compression tank (not shown) → Auxiliary socket block → Manifold (auxiliary terminal hole → Auxiliary supply path) → 2nd bottom plate (3rd hole → Auxiliary supply path) → Multiple pressure holding plates (Pressure holding chamber → Passage) → Vacuum sync plate (Channel: Supply air pressure holding hole: Supply air pressure holding chamber → Air supply path) → Top plate (Side outer air supply hole)

As described above, the display panel floating stage device having a foreign material accommodating space in the intake line of the present invention synchronizes a plurality of vacuum holes into one through the synchronization line of the vacuum synchronization plate to reduce the hole processing of the vacuum line to 1/2 or more. In addition, each synchronization line has a partition wall formed between the hole-processed upper hole and uses it as a space to adhere foreign substances such as particles or chemicals, thereby preventing the vacuum negative pressure from lowering and cleaning the vacuum line. There is a great feature that can delay the shutdown of equipment.

The embodiments described in this specification and the configurations shown in the drawings are only the most preferred embodiment of the present invention and do not represent all the technical spirit of the present invention, so various equivalents that can be substituted for them at the time of the present application It should be understood that there may be variations and examples.

10: top plate
11: air supply hole 12: vacuum hole
20: vacuum synchronous plate
21: channel 211: sync line
211a: bulkhead 212: air supply pressure holding hole
212a: supply air pressure maintenance chamber 212b: air supply passage
213: upper hole 214: connection groove
30: pressure retention plate
31: pressure holding hole 311: pressure holding chamber
312: passage
40: first bottom plate
41: vacuum furnace 411: first branch furnace
412: first connection road 413: first through hole
50: second bottom plate
51: supply air 511: second branch
512: second connection road 513: second through hole
52: auxiliary supply air 521: third hole
60: manifold 61: supply air supply path 611: air supply terminal hole
62: vacuum supply path 621: vacuum terminal hole
63: auxiliary supply path 631: auxiliary terminal hole
70: socket block 71: vacuum hose 72: air supply hose
80: auxiliary socket block
100: Display panel floating stage device having a foreign material receiving space in the intake line
200: display panel

Claims (8)

a top plate 10 in which a plurality of air supply holes 11 and vacuum holes 12 are formed in an alternating pattern in order to stably float the display panel 200;
a vacuum synchronization plate 20 coupled to the bottom surface of the top plate 10 and having a plurality of channels 21 communicating with each of the air supply holes 11 and the vacuum holes 12;
a plurality of pressure maintaining plates 30 coupled to the bottom surface of the vacuum synchronization plate 20 and having pressure maintaining holes 31 communicating with each channel 21;
a first bottom plate 40 coupled to the bottom surface of the pressure maintaining plate 30 and branching the vacuum pressure into the pressure maintaining holes 31 communicating with each of the vacuum holes 12 ;
a second bottom plate (50) coupled to a bottom surface of the first bottom plate (40) and branching air supply pressure to a pressure holding hole (31) that is in common with each of the air supply holes (11);
A manifold 60 coupled to the lower surface of the second bottom plate 50 to supply vacuum pressure and air supply pressure to the first bottom plate 40 or the second bottom plate 50;
Each channel 21 of the vacuum synchronization plate 20 has a synchronization line 211 that synchronizes a plurality of vacuum holes 12 adjacent to each other in a diagonal direction into one, and a supply air pressure in communication with the air supply hole 11 is maintained. Consists of a hole 212,
The vacuum synchronization plate 20 further includes a vertical hole 213 connected to each of the synchronization lines 211 and the connection groove 214 through the medium,
The communication hole 213 communicates with the pressure retention hole 31 of the pressure retention plate 30,
Each of the synchronization lines 211 is configured to be used as a space for adhering foreign substances such as particles or chemicals by the partition wall 211a formed between the upper openings 213 to accommodate foreign substances in the intake line. A display panel floating stage device having a space.
delete delete According to claim 1,
Each pressure holding hole 31 of the pressure holding plate 30 is composed of a pressure holding chamber 311 and a passage 312 having a relatively smaller inner diameter than the pressure holding chamber 311,
The air supply pressure maintaining hole 212 of the vacuum synchronization plate 20 is composed of an air supply pressure maintaining chamber 212a and an air supply passage 212b having a relatively smaller inner diameter than the supply air pressure maintaining chamber 212a. A display panel floating stage device having a foreign material accommodating space in the intake line.
5. The method of claim 4,
Any one of the pressure maintaining plate 30 is a display having a foreign material accommodating space in the intake line, characterized in that the pressure holding chamber 311 communicating with the vacuum hole 12 is extended without a passage 312 . Panel floating stage device.
According to claim 1,
The first bottom plate 40 includes a vacuum furnace 41 formed in parallel at a predetermined interval to supply vacuum pressure to each vacuum hole 12, and a tree on both sides in the longitudinal direction of each vacuum furnace 41. A display panel floating stage device having a foreign material accommodating space in the intake line, characterized in that a plurality of branches are branched in the form of a first branch passage 411 communicating with the vacuum hole 12 is formed.
According to claim 1,
The second bottom plate 50 has an air supply passage 51 formed in parallel at a predetermined interval to supply air pressure to the air supply hole 11, and a tree shape on both sides in the longitudinal direction of each air supply passage 51. Display panel floating stage device having a foreign material receiving space in the intake line, characterized in that a plurality of branched second branch passage (511) communicating with the air supply hole (11) is formed.
According to claim 1,
The top plate 10 is a display panel floating stage device having a foreign material accommodating space in the intake line, characterized in that only the air supply holes 11 without vacuum holes are arranged at regular intervals along the first row of side bars on both sides.

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