KR101434169B1 - An apparatus for Moving and Floating the Substrate by Air Blowing Type - Google Patents

An apparatus for Moving and Floating the Substrate by Air Blowing Type Download PDF

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Publication number
KR101434169B1
KR101434169B1 KR1020140014241A KR20140014241A KR101434169B1 KR 101434169 B1 KR101434169 B1 KR 101434169B1 KR 1020140014241 A KR1020140014241 A KR 1020140014241A KR 20140014241 A KR20140014241 A KR 20140014241A KR 101434169 B1 KR101434169 B1 KR 101434169B1
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KR
South Korea
Prior art keywords
air
substrate
base plate
air supply
exhaust
Prior art date
Application number
KR1020140014241A
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Korean (ko)
Inventor
류용덕
오세훈
Original Assignee
디아이티 주식회사
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Priority to KR1020140014241A priority Critical patent/KR101434169B1/en
Application granted granted Critical
Publication of KR101434169B1 publication Critical patent/KR101434169B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Abstract

Provided is an apparatus for floating and transferring an air blowing type substrate. The apparatus for floating and transferring a substrate in one direction includes at least one base plate arranged in a transferring direction of the substrate; an air discharging unit which has a plurality of air supply lines formed to penetrate the inside of a body of the base plate to be aligned with the transferring direction of the substrate and a plurality of nozzle holes formed to penetrate an upper surface of the base plate to communicate with the air supply lines to discharge air in order to float the substrate; an air emitting unit which has a plurality of exhaust lines formed to penetrate the inside of the body of the base plate to be arranged between adjacent air supply lines and a plurality of exhaust holes formed to penetrate the upper side of the base plate to communicate with the exhaust lines in order to emit air colliding against the substrate to the outside; and an air supplying unit having an air block which is disposed at a lower side of the base plate and has a plurality of air supply holes corresponding to and communicating with the air supply lines to supply air to the air supply lines of which both ends are sealed.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an air blowing type substrate floating and transfer device,

More particularly, the present invention relates to an apparatus for lifting a substrate while lifting a thin substrate to a predetermined height while minimizing bending strain by air discharged upward from the bottom, The present invention relates to an air blowing type substrate lifting and conveying device capable of supplying an air blowing type substrate.

Generally, a process for manufacturing a flat panel display such as a liquid crystal display device, a plasma display panel, a field emission display device, and a light emitting display device Various processes are performed on a plate material (hereinafter referred to as a substrate) having a thin thickness of a glass material.

That is, a coating process for uniformly applying a chemical solution such as a resist solution to a surface of the substrate, a cohesive process for adhering a substrate coated with a chemical solution, and an inspection process for inspecting defects such as scratches and stains occurring on the surface of the substrate .

Korean Patent Laid-Open Publication No. 10-2011-0077682 discloses a transfer stage in which a plurality of unit transfer units are arranged so that a loader arm is introduced into a transfer stage, and an auxiliary air There is provided a substrate transfer apparatus for transferring a substrate by lifting an auxiliary air injection unit when the substrate is loaded in the loader arm and then retracted after the substrate is loaded in the loader arm, and a transfer method using the substrate transfer apparatus.

However, in such a conventional apparatus, since the auxiliary air unit is installed between the transfer stages adjacent to each other so as to be movable up and down, and the loader arm for loading the substrate, which is the object to be transferred, must be provided so as to be movable up and down and forward and backward. There is a problem that it is difficult to transfer the substrate having a complicated structure and a thin thickness in one direction without deflection due to its own weight.

 In addition, separation and disassembly and reassembly are troublesome in changing the shape of the equipment in accordance with the variation of the width of the substrate having various width sizes, and there is a limit in improving the productivity of the work.

In addition to this, there is a problem that the substrate is moved upwards to raise the substrate and hit the lower surface of the substrate, and then the substrate is shaken by air blown to both sides.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a method and apparatus for lifting a uniformly raised height without deflection of a substrate by upwardly discharged air, An air floating type substrate which can be easily disassembled and reassembled according to the width of the substrate, which is the object to be transported, and which can prevent the substrate from being shaken by an air flow structure that discharges upwardly discharged air to the outside, Device.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention, unless further departing from the spirit and scope of the invention as defined by the appended claims. It will be possible.

As a specific means for achieving the above object, the present invention provides an apparatus for lifting a substrate in one direction, the apparatus comprising: at least one base plate disposed along a transport direction of the substrate; And a plurality of air supply holes formed on an upper surface of the base plate so as to communicate with the air supply line and through which air is discharged, the plurality of air supply holes being formed in the body of the base plate, An air discharging part for raising the substrate; And a plurality of exhaust holes formed in the upper surface of the base plate so as to communicate with the exhaust line, wherein the plurality of exhaust holes are formed in the body of the base plate so as to be disposed between the adjacent air supply lines, An air discharging portion for discharging the air struck to the outside; And an air supply unit for supplying air to a plurality of air supply lines sealed at both ends by providing an air block on a lower surface of the base plate, the air supply unit including a plurality of air supply holes communicating with the plurality of air supply lines in a one- The present invention also provides an air floating type substrate floating and transferring apparatus.

Preferably, the nozzle hole is formed in a cone-shaped cross-sectional shape having an outer diameter increasing toward the upper portion so as to diffuse the air generating the flying force in the radial direction while hitting the substrate.

Preferably, the nozzle holes are connected to each other via connection grooves formed in the upper surface of the base plate.

Preferably, the transfer unit includes a transfer unit for transferring the substrate lifted by the upwardly discharged air through a nozzle hole communicated with the supply line in one direction, and the transfer unit may include a suction hole on the upper surface corresponding to the left and right lower surfaces of the substrate, And an adsorption block connected to the air suction line so as to generate a suction force to the adsorption hole, a moving plate detachably assembled to the upper surface of the adsorption plate to which the adsorption block is assembled, And a pair of left and right rails provided side by side on both sides of the base plate so that a guider of the linear motor provided on the base plate is slidably assembled.

Preferably, the base plate is divided or integrally formed into an upper base plate and a lower base plate which are vertically divided with respect to the center of the air supply line and the exhaust line.

Preferably, both ends of the exhaust line are connected to the suction line so that air suction through the exhaust hole can be performed more smoothly.

.

The present invention as described above has the following effects.

(1) Since the substrate can be uniformly lifted up to a predetermined height by the air discharged upward through the nozzle hole provided along the air supply line formed inside the body of the base platter without warping, and the floated substrate can be transferred in one direction It is possible to improve work productivity in which the substrate is floated and horizontally transported after fixing.

(2) An exhaust line is formed in the body of the base plate together with an air supply line, and an exhaust hole for discharging the air upwardly discharged to the substrate along the exhaust line to the outside. It is possible to minimize the ejection of the air that is struck to the side of the transfer part disposed on both sides of the substrate, thereby preventing the substrate from being shaken during the transfer of the substrate having a thin thickness, thereby ensuring stable transfer of the substrate. '

(3) By separating and reassembling a plurality of base plates having supply and exhaust lines in accordance with the width of the substrate, the equipment can be flexibly changed in accordance with the width of the substrate, which is the object to be transported. An effect that quick response can be obtained is obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an overall configuration diagram showing an air floating type substrate floating and transfer apparatus according to a preferred embodiment of the present invention. FIG.
2 is a plan view showing an air floating type substrate floating and transfer apparatus according to a preferred embodiment of the present invention.
3 is a front view of an air floating type substrate floating and conveying apparatus according to a preferred embodiment of the present invention as viewed from a conveying direction.
4 is a detailed view showing a base plate used in an air floating type substrate floating and transferring apparatus according to a preferred embodiment of the present invention.
FIG. 5 illustrates an air floating type substrate floating and transferring apparatus according to a preferred embodiment of the present invention,
(a) is a longitudinal sectional view taken along the air supply line, and
(b) is a vertical sectional view cut in a direction orthogonal to the air supply line.
FIG. 6 is a perspective view illustrating a transfer unit employed in a base plate employed in an air floating type substrate floating and transfer apparatus according to a preferred embodiment of the present invention.
7 is a block diagram showing another embodiment of a base plate used in an air floating type substrate floating and transfer apparatus according to a preferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, a detailed description of known functions and configurations incorporated herein will be omitted when it may obscure the subject matter of the present invention.

The same reference numerals are used for portions having similar functions and functions throughout the drawings.

In addition, in the entire specification, when a part is referred to as being 'connected' to another part, it may be referred to as 'indirectly connected' not only with 'directly connected' . Also, to include an element does not exclude other elements unless specifically stated otherwise, but may also include other elements.

1 to 6, the air floating type substrate lifting and conveying apparatus 100 according to the preferred embodiment of the present invention includes a substrate S having a thin thickness, which is an object to be lifted and transferred, The air discharge unit 120, the air discharge unit 130, and the air supply unit 140 so as to allow the floated substrate to be horizontally conveyed in one direction safely while lifting the substrate 100 without bending deformation by the wing .

The base plate 110 may be formed of a substantially rectangular plate having a plurality of supports 112 disposed along the conveying direction of the substrate S and spaced apart from the bottom surface by a predetermined height.

These base plates 110 are arranged in a plurality of positions between the transfer parts 150 arranged to face each other at regular intervals, and the arrangement structure thereof can be variously changed according to the length and width size of the substrate S to be transferred have.

The air discharge unit 120 includes a plurality of air supply lines 122 and a plurality of air supply lines 122 so that the air can be discharged upward by a predetermined pressure to raise the substrate S to a predetermined height from the upper surface of the base plate 110. [ Nozzle holes 124. The nozzle holes 124 are formed in the nozzle holes.

The air supply line 122 is provided in the body of the base plate 110 having a certain thickness as an air supply passage having a substantially circular cross section formed in a longitudinal direction so as to be parallel to the conveying direction of the substrate S .

Both ends of the air supply line 122 exposed to both side ends of the base plate 110 may be sealed by a closing member 123 to prevent air from flowing out through the air supply line 122.

The closing member 123 may be formed of a plug member having a male threaded portion so as to be screwed with the female threaded portion formed on both inner peripheral surfaces of the air supply line 122.

The nozzle holes 124 are formed in the upper surface of the base plate 110 at predetermined intervals along the air supply lines so as to communicate with each other via a connection hole 124a substantially perpendicular to the air supply line 122 And the air supplied through the air supply line 122 is discharged upward so as to generate a levitation force to float the substrate S when air is supplied.

The nozzle hole 124 may be formed in a cone shape having a larger outer diameter toward the upper portion so as to diffuse the air generating the floating force in the radial direction while hitting the substrate S. [

In addition, the nozzle holes 124 adjacent to each other are preferably connected to each other via a connection groove 125 formed in the upper surface of the base plate 110.

The connection groove 125 is formed in the base plate 110 at the same time as air discharge through the exhaust hole 134 of the exhaust line 132, which will be described later, on the substrate floating due to the upward discharge through the nozzle hole 124 on the cone- And the air is exhausted from the space between the base plate and the substrate by the air that is constantly discharged in both directions on the substrate, The air layer can be uniformly maintained.

At the same time, in the process of applying a pressure to a certain area by the upwardly discharged air through the nozzle hole 124 to cause the air flow to be exhausted in both directions in the process of floating the substrate, It is possible to prevent the substrate and the base plate from being damaged by bringing the substrate into contact with the base plate by forming an air layer in a place where the pressure range of the nozzle hole 124 which is a discharge port is insufficient.

The air discharging unit 130 includes a plurality of exhaust lines 132 and a plurality of exhaust holes 134 so that the air bumped on the lower surface of the substrate can be guided to the outside so as to generate a levitation force to float the substrate. .

The exhaust line 132 is disposed in the body of the base plate so as to be disposed between the adjacent air supply lines 122. The air discharge passage 132 has a substantially circular cross- .

Both ends of the exhaust line 132 are exposed at both ends of the base plate to discharge the air flowing through the exhaust hole to both ends of the base plate.

The exhaust hole 134 is formed to pass through the upper surface of the base plate so as to communicate with the exhaust line 132 so that the air that has been ejected upward through the nozzle hole 124 and struck the substrate S, And can be discharged to the outside through both ends of the base plate which is not used.

Accordingly, in order to float the substrate S away from the base plate, the air bumped on the lower surface of the substrate is minimized to the side of the transfer unit 150 which sucks and transfers the upper side edges of the substrate, And the exhaust line to both ends of the base plate 110 to prevent turbulence between the substrate and the base plate. Therefore, in the process of lifting and transferring the substrate, the left and right edges of the substrate S It is possible to prevent a disturbing disturbance phenomenon, thereby making it possible to carry out the transfer operation of the substrate more stably.

The base plate 110, which is formed so as to pass through the air supply line 122 and the exhaust line 132 in parallel to each other in the direction of transport of the substrate, is formed as an integral unit of a substantially rectangular plate having a predetermined thickness, The base plate 110 is vertically divided into upper and lower parts based on the center of the air supply line and the exhaust line so as to more easily perform machining of the air supply line 122 and the exhaust line 132. [ And may be divided into an upper base plate 110a and a lower base plate 110b which are stacked and assembled.

Although the air supply line 122 and the exhaust line 132 are illustrated as being formed in a substantially circular cross section, the air supply line 122 and the exhaust line 132 may be formed in a polygonal cross section such as an ellipse or a square.

At both ends of the exhaust line 132 exposed at both side ends of the base plate 110, upward discharge is performed to float the substrate through the exhaust hole 134, It is preferable that the suction line is connected to the suction line 152a connected to the suction block 152 of the transfer unit 150, which will be described later.

The air supply unit 140 is connected to the air supply line 146 to supply the substrate floating air to the plurality of air supply lines 122 sealed by the closing members at both ends of the base plate, And an air block 142 detachably assembled to the lower surface of the airbag.

The air block 142 includes a plurality of air supply holes 144 formed in the base plate 110 so as to communicate with the connection holes 144a substantially perpendicular to the plurality of air supply lines.

The air block 142 in which the plurality of air supply holes 144 are formed is assembled to be in close contact with the lower surface of the base plate 110 via the O-ring member 145.

The air block 142 is provided on a lower surface of the base plate in a direction perpendicular to the air supply line so that air supply and air discharge through a plurality of nozzle holes formed at predetermined intervals along the air supply line can be performed simultaneously, Is a substantially rectangular parallelepiped block structure which is detachably assembled into a disposition groove formed at a predetermined interval in the transport direction.

Accordingly, when the substrate floating air is supplied from the outside through the air supply line 146 into the air block assembled to the lower surface of the base plate 110, the air supply hole 144 formed in the air block, The air is upwardly discharged through the nozzle hole 124 formed at the predetermined interval along the air supply line 122 and communicated with the air supply line 122, The base plate can be floated to a predetermined height so as to be spaced apart from the base plate by the air discharged upward.

And a transfer unit 150 for transferring the substrate S floated by the upwardly discharged air through the nozzle hole 124 communicated with the air supply line 122 provided in the base plate 110 in one direction .

6, a suction hole 151 is formed in the upper surface of the transfer unit 150 corresponding to the left and right lower surfaces of the substrate, and air is sucked into the suction hole 151 to generate a suction force. A suction plate 152 connected to the suction line 152a and a moving plate 154 detachably mounted on the upper surface of the suction plate 153 on which the suction block is assembled, And a pair of right and left rails 156 arranged side by side on both sides of the base plate 110 so that a guider 155 of the linear motor provided on the base plate 110 is slidably assembled.

The substrate S lifted up to a predetermined height from the base plate by the upwardly discharged air through the nozzle hole 124 of the air supply line passes through the air suction line 152a connected to the adsorption block 152, The left and right side edges of the lower surface are adsorbed and fixed by the air suction force transmitted to the lower surface 151.

In this state, when the guider of the linear motor provided on the moving plate 154 slides in one direction along the rail 156, the floating substrate S can be transported and transported stably in one direction in a post- will be.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. It will be apparent to those of ordinary skill in the art.

110: base plate
112: Support
120: Air discharge part
122: Supply line
123: Closing member
124: nozzle ball
125: connection groove
130:
132: Exhaust line
134: Exhaust hole
140:
142: air block
144; Air supply hole
146: Air supply line
150:
151: Adsorption hole
152: adsorption block
153: adsorption plate
154: moving plate
155: Guider
156: rail

Claims (6)

An apparatus for lifting a substrate and transporting the substrate in one direction,
At least one base plate disposed along the transport direction of the substrate;
And a plurality of air supply holes formed on an upper surface of the base plate so as to communicate with the air supply line and through which air is discharged, the plurality of air supply holes being formed in the body of the base plate, An air discharging part for raising the substrate;
And a plurality of exhaust holes formed in the upper surface of the base plate so as to communicate with the exhaust line, wherein the plurality of exhaust holes are formed in the body of the base plate so as to be disposed between the adjacent air supply lines, An air discharging portion for discharging the air struck to the outside; And
An air supply unit for supplying air to a plurality of air supply lines sealed at both ends by providing an air block on a lower surface of the base plate, the air supply unit including a plurality of air supply holes communicating with the plurality of air supply lines in a one- Lt; / RTI >
Wherein the nozzle holes are connected to each other via connection grooves formed on the upper surface of the base plate.
The method according to claim 1,
Wherein the nozzle hole is formed in a cone shape having an outer diameter increasing toward the upper portion so as to diffuse the air generating the floating force in the radial direction while colliding with the substrate. delete The method according to claim 1,
And a transfer unit for transferring the substrate lifted by the upwardly discharged air through the nozzle hole communicated with the air supply line in one direction,
Wherein the transfer unit includes an adsorption block having an adsorption hole formed on an upper surface thereof corresponding to lower left and right sides of the substrate and connected to an air suction line for generating a suction force in the adsorption hole, And a pair of right and left rails provided side by side on both sides of the base plate so that a guider of a linear motor provided on a lower surface of the moving plate is slidably assembled And the air floating type substrate floating and transferring device. The method according to any one of claims 1, 2, and 4,
Wherein the base plate is divided or integrally formed into an upper base plate and a lower base plate which are vertically divided with respect to the center of the air supply line and the exhaust line. The method according to any one of claims 1, 2, and 4,
And both ends of the exhaust line are connected to a suction line so as to smoothly perform air suction through the exhaust holes.
KR1020140014241A 2014-02-07 2014-02-07 An apparatus for Moving and Floating the Substrate by Air Blowing Type KR101434169B1 (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101677016B1 (en) * 2015-07-17 2016-11-18 디아이티 주식회사 Apparatus for Inspecting together with the Surface of Glass and Film
KR101735478B1 (en) * 2016-09-20 2017-05-15 (주)크래프터 Vacuum plate for thin film coating device of the large area
KR101876463B1 (en) 2017-06-14 2018-07-16 한국생산기술연구원 Levitation Module and Levitation Device Using Ultrasonic Generator
KR102272951B1 (en) * 2020-10-30 2021-07-05 서동현 antibiotics film board and antibiotics film coating device
CN113511517A (en) * 2021-05-20 2021-10-19 哈尔滨工业大学 Air-flotation transportation transition method
KR20210135827A (en) * 2020-05-06 2021-11-16 주식회사 티오에이치 Non-Contact Transfer device for Display panel

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004345744A (en) 2003-05-20 2004-12-09 Hitachi Zosen Corp Pneumatic floating device and pneumatic floating type carrier
KR20060109167A (en) * 2005-04-15 2006-10-19 엘지전자 주식회사 Unit of raising air for transfering flat panel display
JP2008007319A (en) 2006-06-30 2008-01-17 Myotoku Ltd Floating conveying unit
KR20110140053A (en) * 2010-06-24 2011-12-30 주식회사 나래나노텍 An improved floating stage and a substrate floating unit and a coating apparatus having the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004345744A (en) 2003-05-20 2004-12-09 Hitachi Zosen Corp Pneumatic floating device and pneumatic floating type carrier
KR20060109167A (en) * 2005-04-15 2006-10-19 엘지전자 주식회사 Unit of raising air for transfering flat panel display
JP2008007319A (en) 2006-06-30 2008-01-17 Myotoku Ltd Floating conveying unit
KR20110140053A (en) * 2010-06-24 2011-12-30 주식회사 나래나노텍 An improved floating stage and a substrate floating unit and a coating apparatus having the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101677016B1 (en) * 2015-07-17 2016-11-18 디아이티 주식회사 Apparatus for Inspecting together with the Surface of Glass and Film
KR101735478B1 (en) * 2016-09-20 2017-05-15 (주)크래프터 Vacuum plate for thin film coating device of the large area
KR101876463B1 (en) 2017-06-14 2018-07-16 한국생산기술연구원 Levitation Module and Levitation Device Using Ultrasonic Generator
KR20210135827A (en) * 2020-05-06 2021-11-16 주식회사 티오에이치 Non-Contact Transfer device for Display panel
KR102390540B1 (en) * 2020-05-06 2022-04-26 주식회사 티오에이치 Non-Contact Transfer device for Display panel
KR102272951B1 (en) * 2020-10-30 2021-07-05 서동현 antibiotics film board and antibiotics film coating device
CN113511517A (en) * 2021-05-20 2021-10-19 哈尔滨工业大学 Air-flotation transportation transition method

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