KR101158267B1 - A Floating Plate Being Used for A Substrate-Floating Unit, and A Substrate-Floating Unit, A Substrate-Transferring Device and A Coating Apparatus Having the Same - Google Patents

Abstract

The present invention discloses a floating plate for use in a substrate floating unit, and a substrate floating unit, a substrate transfer device and a coating apparatus having the same.

The floating plate used in the substrate floating unit according to an embodiment of the present invention includes an upper plate in which a plurality of air ejection openings and a plurality of air intake openings are formed; An intermediate plate formed with an air supply passage for supplying air through the plurality of air ejection openings and an air intake passage for sucking air through the plurality of air intake openings, the intermediate plate being fastened to maintain an airtight state with the upper plate; And a lower plate fastened to maintain the airtight state with the intermediate plate, wherein the plurality of air ejecting holes are respectively connected to the first nozzle part and the first nozzle part provided on the upper part of the upper plate. Each of the plurality of air inlets may include a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and a second vacuum pocket connected to the second nozzle portion. Characterized in that consists of.

Description

Floating Plate Being Used for A Substrate-Floating Unit, and A Substrate-Floating Unit, A Substrate-Transferring Device and A Coating Apparatus Having the Same}

The present invention provides a floating plate used in a substrate floating unit for coating a substrate for manufacturing a flat panel display (hereinafter referred to as "FPD") such as a PDP panel or an LCD panel in a floating manner, and a substrate floating unit having the same. And a substrate transfer device and a coating device.

More specifically, the present invention provides a rapid increase in vacuum area or pressure drop area by connecting the vacuum pockets of a plurality of air inlets formed on the floating plate used in the substrate floating unit to each other or providing additional grooves around the vacuum pockets. A floating plate used in a substrate floating unit capable of preventing a temperature drop of a substrate due to a pressure drop, and thus minimizing or preventing occurrence of stains on the substrate, and a substrate floating unit, a substrate transfer device, and a coating device having the same.

In addition, the present invention provides a substrate floating unit capable of minimizing or preventing the occurrence of stains on the substrate by supplying super dry air having been dehumidified to the floating plate of the substrate floating unit, thereby maintaining a uniform temperature of the substrate. A floating plate for use in, and a substrate floating unit, a substrate transfer device and a coating device having the same.

In addition, the present invention by controlling the temperature of the air supplied from the outside using the air conditioner equal to the internal temperature of the clean room, the substrate floating unit capable of minimizing or preventing the occurrence of stains on the substrate to maintain a uniform temperature, And a substrate transfer device and a coating device having the same.

In general, the manufacture of FPD requires the application of a coating liquid on a work piece, such as a glass substrate (hereinafter referred to as a "substrate"), for which a nozzle dispenser or slit die (hereinafter referred to as nozzle dispenser and A coating apparatus with a slit die collectively referred to as a "nozzle apparatus" is used. Such a coating apparatus performs a coating operation of various coating liquids while positioning a substrate on a stage and moving a nozzle apparatus attached to a gantry in a horizontal direction. Examples of the coating operation of the coating liquid include forming photoresist (PR), black matrix (BM), column space (CS), and the like on the LCD panel substrate when manufacturing the LCD panel. The coating liquid can be applied. In the case of manufacturing a PDP panel, a coating liquid may be applied to form a dielectric, a lower dielectric, and a partition on a PDP panel substrate.

However, in the above-described conventional technology, since the nozzle is installed on the substrate after the substrate is placed on the stage and the stage is moved to the coating position, the gantry to which the nozzle apparatus is mounted and the gantry to which the nozzle apparatus is attached move on the substrate. Precise drive of the device becomes difficult and complex.

As a way to solve the problems of the above-described conventional nozzle movement coating apparatus, a floating substrate transfer apparatus for applying a coating liquid to the surface of the substrate while floating and transporting the substrate through the injection or spraying and suction of air is provided. Proposed.

FIG. 1A is a schematic perspective view of a resist coating apparatus for applying a substrate transfer apparatus of a conventional method, and FIG. 1B is a schematic configuration diagram of a substrate transfer apparatus of a conventional floating method shown in FIG. 1A. 1B is an enlarged cross-sectional view of an essential part of the suction unit of the conventional floating substrate transfer apparatus shown in FIG. 1B, and FIG. 1D is a schematic cross-sectional view of another embodiment of the floating substrate transfer apparatus according to the related art illustrated in FIG. 1A. Such a resist coating processing apparatus to which the substrate transfer apparatus according to the prior art shown in FIGS. 1A to 1D is applied is, for example, of July 20, 2006, by Tokyo Electron Co., Ltd. It is disclosed in detail in Korean Patent Application Publication No. 10-2007-0011153 filed with the name of Korean Patent Application No. 10-2006-0067297 published on January 24, 2007.

1A to 1C, the resist coating apparatus 20 of the prior art sprays and sucks gas (eg, air) (hereinafter referred to as “air”) from a surface to raise the substrate G to another height. An injury stage 22 which rises to the ground; A nozzle device 23 arranged above the floating stage 22 to supply, for example, a resist liquid R to the surface of the substrate G; A plurality of substrate support members 24 for suction-removably supporting both side ends of the substrate G, respectively; Moving means 28 (eg, a linear motor) for moving the slider 26 along the guide rails 25 arranged parallel to each other on both sides of the floating stage 22; And a connecting means 27 which connects the substrate supporting member 24 and the slider 26 and is displaceable to follow the floating height of the substrate G.

The above-mentioned floating stage 22 has a loading area 22a and a nozzle apparatus 23 having a plurality of liftable lift pins 28a for lowering and lowering the substrate G carried by a transfer arm (not shown). ) And a coating area 22b that maintains a constant distance (eg, 100 to 150 um) between the substrate G and a plurality of liftable lift pins for elevating the substrate G to be transferred to a subsequent process ( And an unloading area 22c having 28b).

In addition, the above-mentioned floating stage 22 is formed with the porous member 50 made of stainless steel or aluminum, for example which has a some air supply port (air injection port), and the air member is comprised by the porous member 50. And a plurality of air inlets 52 which are hermetically partitioned from the porous section 51. The air inlet 52 has a coating portion 52b on the inner surface of the hole portion 52a drilled into the porous portion 51 or is inserted into the hole portion 52a drilled into the porous portion 51, for example, a synthetic resin. A first tube 52c. The plurality of air intake ports 52 are arranged in an inclined shape with respect to the conveyance direction (X direction) of the substrate G and the direction orthogonal to the conveyance direction (Y direction). The diameters of the plurality of air intakes 52 range, for example, from 1 mm to 3 mm.

On the other hand, in the coating area 22b, the first accumulator (reducing the pulsation) and the air supply passage 53 provided on the lower surface of the porous member 50 in the porous portion (that is, the plurality of air supply ports) of the porous member 50 ( An air supply means 55 (for example, a compressor) is connected via 54A, and the plurality of air intake ports 52 are configured to reduce the bypass flow path 56 and the pulsation provided on the lower surface of the porous member 50. The suction means 57 (for example, a vacuum pump) is connected via 2 accumulator 54B. The air supply passage 53 and the bypass passage 56 are formed by hole portions provided in the plurality of plates 60a to 60e stacked.

By simultaneously driving the compressor 55 and the vacuum pump 57 in the floating stage 22 as described above, air is formed in the porous portion 51 of the porous member 50 via the air supply flow passage 53. The plurality of air supply ports receive the pressure loss and are dispersed and sprayed upwards, and are sucked through the bypass flow passage 56 from the plurality of air intake ports 52. In this manner, the substrate G is transferred from the loading area 22a to the coating area 22b by the drive of the linear motor 28 in the floating manner onto the floating stage 22 to be coated and then unloaded area 22c. Is transferred to). In this case, the plurality of air inlets 52 are inclined in a direction in which the substrate G is conveyed (X direction) and in a direction orthogonal to the conveyance direction (Y direction) to reduce the difference in temperature distribution on the substrate G being conveyed. Generation of streaks (stains) in the coating liquid formed on the substrate G can be suppressed.

Referring to FIG. 1D, the floating stage 22B includes a surface plate 80 having a plurality of large diameter holes 81 and a large diameter hole 81 having a first space 91 on the lower surface of the surface plate 80. Stage consisting of a middle plate 82 having a small diameter hole 83 installed just below the bottom plate), and a lower play 84 installed with a second space 92 on the lower surface of the middle plate 82. It consists of the main body and the porous body 86 which has a some small hole 71 aligned with the stage main body, and is fastened to the small diameter hole 83 by airtight and a fitting method. Either of the first space 91 or the second space 92 (eg, the first space 91) is connected to the compressor 55 which is an air supply means, and the other (eg, the second space 91). The space 92 is connected to a vacuum pump 57 which is a suction means.

The above-described porous body 86 is an example of the inside of the large diameter hole 86 provided in the middle plate 82 and the large diameter head 86a fastened by fitting in the large diameter hole 81 provided in the surface plate 80. An approximately T-shaped corner portion 86b, which is fastened in an airtight manner via an O-ring 88, for example. The diameter of the large diameter hole 81 is approximately 20 mm, the diameter of the small diameter hole is approximately approximately 5 mm, and the average diameter of the plurality of small holes 71 formed in the porous body 86 is approximately 0.1 μm to 100 μm. Has a range.

Moreover, in the supply line 75 which connects the 1st space 91 and the compressor 55, the 1st accumulator 54A is connected to the discharge side of the compressor 55, and the 2nd space 92 and the vacuum pump are connected. In the suction pipe line 76 connecting the 57, a second accumulator 54B is connected to the suction side of the vacuum pump 57.

In the above-mentioned floating stage 22B shown in FIG. 1D, the plurality of small holes formed in the porous body 86 through the first space 91 by air is driven by simultaneously driving the compressor 55 and the vacuum pump 57 ( The air is sucked through the second space 92 from the plurality of small holes 71 formed in the porous body 80 while being dispersed and supplied (sprayed) upon receiving the pressure loss. In this case, the coating may be performed while balancing the amount of air supplied and air sucked, while maintaining the height of the substrate G uniformly.

The above-mentioned floating stage 22 and the floating coating apparatus 20 having the same can solve most of the disadvantages of the nozzle moving coating apparatus in that the substrate G is moved in the floating manner. That the advantage is achieved.

However, the following problems still arise in the above-mentioned floating coating apparatus 20 according to the prior art.

1. The plurality of air inlets 52 formed in the floating stage 22 have a cylindrical size of considerably larger diameter sizes (1 mm to 3 mm or 5 mm). Therefore, when air is sucked in through the plurality of air inlets 52 of large size, a sudden pressure drop occurs. This sudden pressure drop lowers the ambient temperature to generate a temperature distribution deviation on the substrate G.

2. The temperature distribution variation causes staining in the coating liquid applied on the substrate G by the nozzle device 23.

3. Staining causes defects of the substrate G and the final product (PDP or LCD, etc.), and the expensive substrate G must be discarded, thereby increasing the overall manufacturing cost and manufacturing time.

The present invention is to solve the above-mentioned problems of the prior art, the present invention is to connect the vacuum pockets of the plurality of air inlet formed on the floating plate used in the substrate floating unit to each other or to provide an additional groove around the vacuum pocket A floating plate used in a substrate floating unit capable of increasing the vacuum area or the pressure drop area to prevent temperature drop of the substrate due to a sudden pressure drop, and thereby minimizing or preventing the occurrence of stains on the substrate, and a substrate floating unit having the same; It is for providing a substrate transfer apparatus and a coating apparatus.

In addition, the present invention provides a substrate floating unit capable of minimizing or preventing the occurrence of stains on the substrate by supplying super dry air having been dehumidified to the floating plate of the substrate floating unit, thereby maintaining a uniform temperature of the substrate. To provide a floating plate, and a substrate floating unit, a substrate transfer device and a coating device having the same.

In addition, the present invention by controlling the temperature of the air supplied from the outside using the air conditioner equal to the internal temperature of the clean room, to maintain a uniform temperature to the substrate floating unit that can minimize or prevent the occurrence of stains on the substrate To provide a floating plate to be used, and a substrate floating unit, a substrate transfer device and a coating device having the same.

According to a first aspect of the present invention, there is provided a floating plate for use in a substrate floating unit, comprising: an upper plate having a plurality of air ejection openings and a plurality of air intake openings; An intermediate plate formed with an air supply flow path for supplying air through the plurality of air blowing holes and an air intake flow path for sucking air through the plurality of air intake ports, the intermediate plate being fastened to maintain an airtight state with the upper plate; And a lower plate fastened to maintain the airtight state with the intermediate plate, wherein the plurality of air ejecting holes are respectively connected to the first nozzle part and the first nozzle part provided on the upper part of the upper plate. Each of the plurality of air inlets may include a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and a second vacuum pocket connected to the second nozzle portion. Characterized in that consists of.

According to a second aspect of the present invention, there is provided a substrate floating unit comprising: an upper plate on which a plurality of air blowing holes and a plurality of air suction holes are formed; An intermediate plate formed with an air supply passage for supplying air through the plurality of air ejection openings and an air intake passage for sucking air through the plurality of air intake openings, the intermediate plate being fastened to maintain an airtight state with the upper plate; A lower plate fastened to keep the intermediate plate in an airtight state; An air supply unit supplying air to the plurality of air ejecting ports through the air supply passage; And a vacuum pumping unit configured to suck air from the plurality of air inlets through the air intake passages, wherein each of the plurality of air outlets includes a first nozzle unit and the first nozzle unit provided on an upper portion of the upper plate. And a plurality of air inlets, each of which comprises a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and the second nozzle portion. And a second vacuum pocket to be connected.

According to a third aspect of the present invention, there is provided a substrate transfer apparatus, comprising: a substrate floating unit comprising a loading area portion providing a loading area, a coating area portion providing a coating area, and an unloading area portion providing an unloading area; And a plurality of substrate supporting members for detachably suctioning both side ends of the substrate, a pair of sliders on which the substrate is mounted in a vacuum suction manner, and the pair of sliders are movable. And a substrate transfer unit comprising a pair of linear motion guides, wherein the substrate floating unit comprises: an upper plate on which a plurality of air ejection openings and a plurality of air intake openings are formed; An intermediate plate formed with an air supply passage for supplying air through the plurality of air ejection openings and an air intake passage for sucking air through the plurality of air intake openings, the intermediate plate being fastened to maintain an airtight state with the upper plate; A lower plate fastened to keep the intermediate plate in an airtight state; An air supply unit supplying air to the plurality of air ejecting ports through the air supply passage; And a vacuum pumping unit configured to suck air from the plurality of air inlets through the air intake passages, wherein each of the plurality of air outlets includes a first nozzle unit and the first nozzle unit provided on an upper portion of the upper plate. And a plurality of air inlets, each of which comprises a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and the second nozzle portion. And a second vacuum pocket to be connected.

According to a fourth aspect of the present invention, there is provided a coating apparatus, comprising: a substrate floating unit comprising a loading area portion providing a loading area, a coating area portion providing a coating area, and an unloading area portion providing an unloading area; A substrate transfer device for mounting and transferring the substrate by a vacuum suction method; A nozzle device provided on the coating area and configured to apply a coating liquid onto the substrate; And a gantry on which the nozzle device is mounted, wherein the substrate floating unit includes: an upper plate on which a plurality of air ejecting openings and a plurality of air inlet openings are formed; An intermediate plate formed with an air supply passage for supplying air through the plurality of air ejection openings and an air intake passage for sucking air through the plurality of air intake openings, the intermediate plate being fastened to maintain an airtight state with the upper plate; A lower plate fastened to keep the intermediate plate in an airtight state; An air supply unit supplying air to the plurality of air ejecting ports through the air supply passage; And a vacuum pumping unit configured to suck air from the plurality of air inlets through the air intake passages, wherein each of the plurality of air outlets includes a first nozzle unit and the first nozzle unit provided on an upper portion of the upper plate. And a plurality of air inlets, each of which comprises a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and the second nozzle portion. And a second vacuum pocket to be connected.

The following advantages are achieved in the floating plate used in the substrate floating unit of the present invention, and the substrate floating unit, the substrate transfer apparatus, and the coating apparatus having the same.

1. The vacuum pockets of the plurality of air inlets formed on the floating plate are connected to each other or additional grooves are provided around the vacuum pockets to increase the vacuum area or the pressure drop area to uniformly distribute the temperature distribution of the substrate due to the sudden pressure drop. All.

2. Dehumidified super dry air is supplied to the floating plate, allowing the substrate to maintain a uniform temperature.

3. Since the temperature of the air supplied from the outside is controlled to be the same as the temperature inside the clean room, the substrate can be kept at a uniform temperature.

4. Staining on the substrate is minimized or prevented by maintaining a uniform temperature distribution of the substrate.

5. Minimization of defects on substrates and end products (such as PDPs or LCDs) is minimized, which significantly reduces overall manufacturing costs and manufacturing time.

Further advantages of the present invention will become apparent from the following description with reference to the accompanying drawings.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings.

Figure 2a is a plan view of a substrate floating unit, a substrate transfer apparatus and a coating apparatus having the same according to an embodiment of the present invention, Figure 2b is a substrate floating unit, and a substrate transfer having the same according to an embodiment of the present invention Side view of the device and coating device.

2A and 2B, a substrate floating unit 276 according to an embodiment of the present invention may include a loading area portion 276a providing a loading area M1 and a coating area providing a coating area M3. Section 276b, and an unloading region portion 276c providing an unloading region M5. The loading region 276a is formed of a plurality of floating plate pieces P which are extended in the direction in which the substrate G travels and are spaced apart from each other. Unlike the coating area 276b and the unloading area 276c, the loading area 276a is formed of a plurality of floating plate pieces P provided spaced apart from each other, so that a space S exists. In the separation space S, a plurality of substrate centering units (not shown) and a plurality of gap sensors (not shown) which are components of the coating apparatus 240 may be positioned. When the plurality of gap sensors are left and right gap sensors, the left and right gap sensors preset a left and right vertical reference point (zero point) of the coating area portion 276b, and the nozzle device 278 is a left and right vertical reference point preset by the left and right gap sensor. From the coating liquid at a specific height (coating height). In addition, a plurality of gap sensors may optionally include a central gap sensor (not shown), which is centered downward by self weight as the nozzle device 278 is used for a long time. Monitor the amount of warpage.

2C is a schematic plan view of a substrate floating unit according to an embodiment of the present invention, and FIG. 2D is a detailed configuration of a substrate floating unit and a plurality of substrates formed on the substrate floating unit according to an embodiment of the present invention. Fig. 1 is a schematic cross sectional view for explaining the air ejection port and the plurality of air intake ports and their operation relations.

Referring to FIGS. 2C and 2D together with FIGS. 2A and 2B, in the substrate floating unit 276 according to an embodiment of the present invention, the loading area 276a includes a plurality of air ejecting holes 288 and is coated. The area portion 276b includes a plurality of air blowing holes 288 and a plurality of air intake ports 290, and the unloading area portion 276c includes a plurality of air blowing holes 288. The plurality of air blowers 288 are connected to the air supply unit 255 (eg, a compressor), and the plurality of air inlets 290 are connected to the vacuum pumping unit 257.

Only a plurality of air blowing holes 288 are formed on the loading area portion 276a and the unloading area portion 276c of the substrate floating unit 276 according to the exemplary embodiment of the present invention. In addition, on the coating area 276b, the plurality of air blowing holes 288 and the plurality of air intake holes 290 are alternately arranged at regular inclination angles with respect to the transfer direction of the substrate G, respectively. However, one of ordinary skill in the art will appreciate that a plurality of air inlets 290 may be selectively formed on the loading region 276a and the unloading region 276c of the substrate floating unit 276 of the present invention. .

Hereinafter, specific configurations and operations of the floating plate 280 and the substrate floating unit 276 according to an embodiment of the present invention will be described in detail.

Referring back to FIGS. 2C and 2D together with FIGS. 2A and 2B, the floating plate 280 according to the embodiment of the present invention has a plurality of air outlets 288 and a plurality of air inlets 290 formed thereon. Plate 222; An air supply flow path 256 for supplying air through the plurality of air blowing holes 288 and an air suction flow path 258 for sucking air through the plurality of air intake ports 290 are formed, and the upper plate An intermediate plate 224 fastened to maintain hermeticity with 222; And a lower plate 226 fastened to the airtight state with the intermediate plate 224.

In addition, the substrate floating unit 276 according to an embodiment of the present invention includes a top plate 222 in which a plurality of air ejection openings 288 and a plurality of air intake openings 290 are formed; An air supply flow path 256 for supplying air through the plurality of air blowing holes 288 and an air suction flow path 258 for sucking air through the plurality of air intake ports 290 are formed, and the upper plate An intermediate plate 224 fastened to maintain hermeticity with 222; A lower plate 226 fastened to the airtight state with the intermediate plate 224; An air supply unit 255 for supplying air to the plurality of air ejecting ports 288 through the air supply flow path 256; An air suction flow path 258 for sucking air through the plurality of air suction ports 290; And a vacuum pumping unit 257 that sucks air from the plurality of air inlets 290 through the air intake passage 258. The substrate floating unit 276 according to an embodiment of the present invention may include the first and second air supply accumulators 254a1 and 254b1 provided between the air supply flow path 256 and the air supply unit 255, and the First and second air intake accumulators 254a2 and 254b2 may be further provided between the air intake passage 258 and the vacuum pumping unit 257. Each of the first and second air supply accumulators 254a1 and 254b1 has a function of a buffer to control the air from being rapidly supplied to the plurality of air outlets 288, and also the first and second air intakes. The accumulators 254a2 and 254b2 each have a function of a buffer that adjusts the air so as not to be sucked rapidly from the plurality of air inlets 290. In addition, the upper plate 222 and the middle plate 224 are fastened by the plurality of first fastening members 250, and the middle plate 224 and the lower plate 226 are fastened to the plurality of second fastening members 252 by the first and second fastening members 252. Is fastened by Reference numeral 253 denotes an O-ring.

The plurality of air blowing holes 288 used in the floating plate 280 and the substrate floating unit 276 according to an embodiment of the present invention are respectively provided with a first nozzle portion 281 provided on an upper portion of the upper plate 222. A first air pocket 285 connected to the first nozzle part 281, and each of the plurality of air inlets 290 is provided on an upper portion of the upper plate 222. A second nozzle part 293 is connected to the first vacuum pocket 291, and a second vacuum pocket 295 is connected to the second nozzle part 293. The first air pocket 285 is connected to the air supply flow path 256 through a manifold 289 formed in the intermediate plate 224. In addition, the second vacuum pocket 295 is connected to the air suction passage 258 through the first and second manifolds 297 and 299 formed in the intermediate plate 224.

The diameter of the above-mentioned first nozzle portion 281 is approximately 0.1 mm, and the diameter of the first air pocket 285 is approximately 3 to 3.5 mm. On the other hand, the diameters of the first and second vacuum pockets 291 and 295 are approximately 3 to 3.5 mm, and the diameter of the second nozzle portion 293 is approximately 0.1 mm. In the present invention, in particular, the diameters of the first and second vacuum pockets 291 and 295 constituting the plurality of air intake ports 290 are formed to be considerably larger than the diameters of the second nozzle portions 293 through the plurality of air intake ports 290. When air is sucked in, a sudden pressure drop is prevented.

2E schematically illustrates a plan view and a cross-sectional view of a structure of a first vacuum pocket of a plurality of air inlets arranged in an inclined direction and a cavity connecting them in a floating plate and a substrate floating unit according to an embodiment of the present invention; Figure is shown.

Referring to FIG. 2E together with FIGS. 2A to 2D, in the injury plate 280 and the substrate floating unit 276 according to an embodiment of the present invention, a series of a plurality of air inlets 290 arranged in an inclined direction may be used. A cavity 202 may be further provided to connect the first vacuum pocket 291 in the horizontal direction, respectively. This cavity 202 increases the vacuum area of the first vacuum pocket 291 to relieve the vacuum speed so that air is not sucked up rapidly. Thus, such a sudden drop in pressure by the cavity 202 is further prevented.

FIG. 2F is a schematic top view of a plurality of grooves provided around a first vacuum pocket of a plurality of air inlets in a floating plate and a substrate floating unit according to an embodiment of the present invention.

Referring to FIG. 2F together with FIGS. 2A to 2D, each of the first vacuum pockets 291 of the plurality of air inlets 290 may be used in the floating plate 280 and the substrate floating unit 276 according to an embodiment of the present invention. A plurality of grooves 204 may be further provided around the radial direction. The plurality of grooves 204 increase the pressure drop area of the first vacuum pocket 291 to relieve the vacuum speed so that air is not sucked rapidly. Therefore, the sudden drop in pressure is further prevented by the plurality of grooves 204.

In the embodiment of FIG. 2F, a plurality of grooves 204 are illustrated as being provided in the radial direction, but those skilled in the art will fully understand that a plurality of grooves 204 may be provided, for example, in the radial direction. Could be.

FIG. 2G schematically illustrates a substrate floating unit according to an exemplary embodiment of the present invention illustrated in FIG. 2D having a moisture removing device for removing moisture of external air supplied to the air supply unit.

Referring to FIG. 2G, in the substrate floating unit 276 of the present invention, external air is supplied to the plurality of air ejecting ports 288 through the air supply unit 255. Such external air typically uses Clean Dry Air (CDA). However, even with this CDA, traces of moisture may remain in the air. Therefore, when the moisture-containing CDA is introduced into the air supply unit 255 and then supplied through the plurality of air blowing holes 288, the temperature of the substrate G is lowered due to moisture, and thus the temperature of the entire substrate G is reduced. Non-uniform distribution may cause staining of the coating liquid.

Accordingly, the substrate floating unit 276 of the present invention may further include a separate moisture removing device 260 connected to the air supply unit 255, as shown in FIG. 2G. The moisture removing device 260 removes moisture in the CDA supplied from the outside to allow super dry air to flow into the air supply unit 255, thereby preventing the occurrence of temperature non-uniformity of the substrate G due to moisture. It can prevent or minimize the cause of staining of the coating liquid.

FIG. 2H schematically illustrates that the substrate floating unit according to the exemplary embodiment of the present invention illustrated in FIG. 2D includes an air conditioner for controlling the temperature of external air supplied to the air supply unit to be the same as that of the clean room. to be.

Referring to FIG. 2H, in the substrate floating unit 276 of the present invention, external air is supplied to the plurality of air jet ports 288 through the air supply unit 255. The temperature of the external air may be different from the temperature of the clean room where the substrate floating unit 276 of the present invention, the substrate transfer device 284 and the coating device 240 having the same are located. In this case, when the external air is introduced into the air supply unit 255 and then supplied through the plurality of air ejecting ports 288, the temperature distribution of the entire substrate G is uneven due to the temperature difference between the external air and the temperature in the clean room. As a result, staining of the coating solution may occur.

Accordingly, the substrate floating unit 276 of the present invention may further include a separate air conditioner 262 connected to the air supply unit 255, as shown in FIG. 2H. The air conditioner 262 can minimize or eliminate the cause of the coating liquid by preventing the occurrence of temperature nonuniformity of the substrate (G) by precisely controlling the temperature of the outside air to match the temperature in the clean room.

Hereinafter, the configuration and operation of the substrate transfer device 284 and the coating device 240 according to an embodiment of the present invention will be described in detail.

Referring again to FIGS. 2A through 2H together with FIG. 1A, the substrate transfer apparatus 284 according to an embodiment of the present invention may include a loading region 276a and a coating region M3 that provide a loading region M1. A substrate floating unit 276 composed of a coating area portion 276b providing and an unloading area portion 276c providing the unloading region M5; And a plurality of substrate supporting members 24 (see FIG. 1A) for suction-removably supporting both side ends of the substrate G, and the substrate G is vacuum-adsorbed on the plurality of substrate supporting members 24. A substrate transfer unit 284a consisting of a pair of sliders 298 to be mounted and a pair of linear motion guides 296 to which the pair of sliders 298 are movably mounted, wherein the substrate The floating unit 276 uses a substrate floating unit 276 as shown in FIGS. 2C-2H.

In addition, the coating apparatus 240 according to an embodiment of the present invention includes the floating plate 280 and the substrate floating unit 276 of the present invention shown in Figs. 2A to 2H.

More specifically, the coating apparatus 240 according to the embodiment of the present invention includes a loading area portion 276a providing a loading area M1, a coating area portion 276b providing a coating area M3, and A substrate floating unit 276 composed of an unloading area portion 276c providing an unloading area M5; A substrate transfer device 284 for mounting and transporting the substrate G in a vacuum suction method; A nozzle device 278 provided on the coating region 276b and applying a coating liquid onto the substrate G; And a gantry 230 on which the nozzle device 278 is mounted.

Meanwhile, the coating apparatus 240 according to the exemplary embodiment of the present invention illustrated in FIGS. 2A and 2B further includes a nozzle refresh member 210 under the loading region 276a. Therefore, in the coating apparatus 240 according to the exemplary embodiment of the present invention, the nozzle apparatus 278 is transferred onto the nozzle refresh member 210 to perform cleaning. The nozzle refreshing member 210 includes a priming device 212 for cleaning the nozzle device 278 after the nozzle device 278 applies the coating solution every time, and a nozzle device after the nozzle device 278 applies the coating solution a plurality of times. Nozzle cleaning member 214 for cleaning 278. In the coating apparatus 240 according to the first embodiment of the present invention, since the nozzle apparatus 278 moves on the nozzle refresh member 210 by the gantry 230, the nozzle refresh member 210 unlike the prior art. ) Is not necessary to move a separate means for transferring the nozzle unit 278 below. Thus, the coating device 240 according to an embodiment of the present invention is achieved that the size is reduced, the operation is simplified.

The operation of the substrate transfer device 284 and the operation of the coating device 240 according to the embodiment of the present invention described above are shown in FIG. 1A except for the floating plate 280 and the substrate floating unit 276, respectively. It is substantially the same as the operation of the floating substrate transfer apparatus and the operation of the coating apparatus 20 according to the technique. Therefore, the detailed description of the operation of the substrate transfer device 284 and the operation of the coating device 240 according to an embodiment of the present invention will be omitted.

As described above, when the floating plate used in the substrate floating unit according to the present invention, and the substrate floating unit, the substrate transfer device and the coating apparatus having the same, the temperature of the substrate G can be kept uniform, the coating liquid The occurrence of spots is minimized or prevented.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

1A is a schematic perspective view of a resist coating processing apparatus to which a floating substrate transfer apparatus according to the prior art is applied.

FIG. 1B is a schematic configuration diagram of a conventional floating substrate transfer apparatus shown in FIG. 1A.

FIG. 1C is a cross-sectional view of an essential part and an enlarged cross-sectional view illustrating a suction part of the conventional floating substrate transfer apparatus illustrated in FIG. 1B.

FIG. 1D is a schematic cross-sectional view of yet another embodiment of a floating substrate transfer apparatus according to the prior art shown in FIG. 1A.

2A is a plan view of a substrate floating unit, and a substrate transfer apparatus and a coating apparatus including the same according to an embodiment of the present invention.

2B is a side view of a substrate floating unit, and a substrate transfer apparatus and a coating apparatus having the same according to an embodiment of the present invention.

2C is a schematic plan view of a substrate floating unit according to an embodiment of the present invention.

FIG. 2D is a schematic cross-sectional view for explaining a specific configuration of a substrate floating unit and a plurality of air blowing holes and a plurality of air inlets formed on the substrate floating unit according to an embodiment of the present invention, and an operation relationship thereof; FIG. to be.

FIG. 2E schematically illustrates a plan view and a cross-sectional view of a structure of a first vacuum pocket of a plurality of air inlets arranged in an inclined direction and a cavity connecting them in a floating plate and a substrate floating unit in accordance with an embodiment of the present invention; FIG. Figure is shown.

FIG. 2F is a schematic top view of a plurality of grooves provided around a first vacuum pocket of a plurality of air inlets in a floating plate and a substrate floating unit according to an embodiment of the present invention.

FIG. 2G schematically illustrates a substrate floating unit according to an exemplary embodiment of the present invention illustrated in FIG. 2D having a moisture removing device for removing moisture of external air supplied to the air supply unit.

FIG. 2H schematically illustrates that the substrate floating unit according to the exemplary embodiment of the present invention illustrated in FIG. 2D includes an air conditioner for controlling the temperature of external air supplied to the air supply unit to be the same as that of the clean room. to be.

Claims (23)

In the floating plate used for the substrate floating unit, An upper plate on which a plurality of air ejecting openings and a plurality of air inlet openings are formed; An intermediate plate formed with an air supply passage for supplying air through the plurality of air ejection openings and an air intake passage for sucking air through the plurality of air intake openings, the intermediate plate being fastened to maintain an airtight state with the upper plate; And A lower plate extending from the air supply flow path and the air suction flow path and fastened to maintain an airtight state with the intermediate plate; Including, The plurality of air blowing holes are each composed of a first nozzle portion provided on the upper portion of the upper plate and a first air pocket connected to the first nozzle portion, Each of the plurality of air inlets includes a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and a second vacuum pocket connected to the second nozzle portion. The air supply flow passage is connected to the plurality of air ejection ports through the lower plate, the intermediate plate, and the upper plate, The air intake passage is connected to the plurality of air intake ports through the lower plate, the intermediate plate, and the upper plate, The plurality of air ejection ports and the plurality of air intake ports are alternately arranged at a constant inclination angle with respect to the transport direction of the substrate, The floating plate further includes a cavity connecting the first vacuum pockets arranged at the predetermined inclination angle in a horizontal direction, respectively, or a plurality of recesses provided in a radial direction around each of the first vacuum pockets. Wound plate. The method of claim 1, The first air pocket is connected to the air supply passage through a manifold formed in the intermediate plate, The second vacuum pocket is connected to the air intake passage through first and second manifolds formed in the intermediate plate. Wound plate. The method of claim 1, The diameter of the first and second nozzle portion is 0.1 mm, The diameter of the first air pocket is 3 to 3.5 mm, The diameter of the first and second vacuum pockets is 3 to 3.5 mm Wound plate. delete delete In the substrate floating unit, An upper plate on which a plurality of air ejecting openings and a plurality of air inlet openings are formed; An intermediate plate formed with an air supply passage for supplying air through the plurality of air ejection openings and an air intake passage for sucking air through the plurality of air intake openings, the intermediate plate being fastened to maintain an airtight state with the upper plate; A lower plate extending from the air supply flow path and the air suction flow path, the lower plate being fastened to maintain an airtight state with the intermediate plate; An air supply unit supplying air to the plurality of air ejecting ports through the air supply passage; And A vacuum pumping unit that sucks air from the plurality of air inlets through the air intake passage / RTI > The plurality of air blowing holes are each composed of a first nozzle portion provided on the upper portion of the upper plate and a first air pocket connected to the first nozzle portion, Each of the plurality of air inlets includes a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and a second vacuum pocket connected to the second nozzle portion. The air supply flow passage is connected to the plurality of air ejection ports through the lower plate, the intermediate plate, and the upper plate, The air intake passage is connected to the plurality of air intake ports through the lower plate, the intermediate plate, and the upper plate, The plurality of air ejection ports and the plurality of air intake ports are alternately arranged at a constant inclination angle with respect to the transport direction of the substrate, The floating plate further includes a cavity connecting the first vacuum pockets arranged at the predetermined inclination angle in a horizontal direction, respectively, or a plurality of recesses provided in a radial direction around each of the first vacuum pockets. Substrate floating unit. The method according to claim 6, The substrate floating unit includes first and second air supply accumulators provided between the air supply flow path and the air supply unit, and first and second air intake accumulators provided between the air suction flow path and the vacuum pumping unit. Substrate floating unit further comprising. The method according to claim 6, The substrate floating unit A loading area portion providing a loading area, said loading area having said plurality of air jets and optionally said plurality of air intakes; A coating area providing a coating area, said coating area having said plurality of air ejection openings and said plurality of air intake openings; And An unloading region portion providing an unloading region, said unloading region having said plurality of air outlets and optionally said plurality of air inlets; Consisting of, The loading area portion is formed of a plurality of floating plate pieces which are provided to be spaced apart from each other and elongate in the direction in which the substrate proceeds. Substrate floating unit. The method according to claim 6, The first air pocket is connected to the air supply passage through a manifold formed in the intermediate plate, The second vacuum pocket is connected to the air intake passage through first and second manifolds formed in the intermediate plate. Substrate floating unit. delete delete The method according to any one of claims 6 to 9, The substrate floating unit is connected to the air supply unit and further includes a moisture removing device for removing moisture in the air supplied from the outside so that super dry air flows into the air supply unit. . The method according to any one of claims 6 to 9, The substrate floating unit is connected to the air supply unit and further comprises an air conditioner for precisely controlling the temperature of the external air to match the temperature in the clean room. In the substrate transfer apparatus, A substrate floating unit comprising a loading area portion providing a loading area, a coating area portion providing a coating area, and an unloading area portion providing an unloading area; And A plurality of substrate support members for detachably suction-supporting both side ends of the substrate, a pair of sliders on which the substrates are mounted in a vacuum suction manner, and the pair of sliders are movable; Substrate transfer unit consisting of a pair of linear motion guides mounted / RTI > The substrate floating unit An upper plate on which a plurality of air ejecting openings and a plurality of air inlet openings are formed; An intermediate plate formed with an air supply passage for supplying air through the plurality of air ejection openings and an air intake passage for sucking air through the plurality of air intake openings, the intermediate plate being fastened to maintain an airtight state with the upper plate; A lower plate extending from the air supply flow path and the air suction flow path, the lower plate being fastened to maintain an airtight state with the intermediate plate; An air supply unit supplying air to the plurality of air ejecting ports through the air supply passage; And A vacuum pumping unit that sucks air from the plurality of air inlets through the air intake passage / RTI > The plurality of air blowing holes are each composed of a first nozzle portion provided on the upper portion of the upper plate and a first air pocket connected to the first nozzle portion, Each of the plurality of air inlets includes a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and a second vacuum pocket connected to the second nozzle portion. The air supply flow passage is connected to the plurality of air ejection ports through the lower plate, the intermediate plate, and the upper plate, The air intake passage is connected to the plurality of air intake ports through the lower plate, the intermediate plate, and the upper plate, The plurality of air ejection ports and the plurality of air intake ports are alternately arranged at a constant inclination angle with respect to the transport direction of the substrate, The floating plate further includes a cavity connecting the first vacuum pockets arranged at the predetermined inclination angle in a horizontal direction, respectively, or a plurality of recesses provided in a radial direction around each of the first vacuum pockets. Substrate transfer device. 15. The method of claim 14, The substrate floating unit includes first and second air supply accumulators provided between the air supply flow path and the air supply unit, and first and second air intake accumulators provided between the air suction flow path and the vacuum pumping unit. Further comprising a substrate transfer device. 15. The method of claim 14, The first air pocket is connected to the air supply passage through a manifold formed in the intermediate plate, The second vacuum pocket is connected to the air intake passage through first and second manifolds formed in the intermediate plate. Substrate transfer device. delete delete In the coating apparatus, A substrate floating unit comprising a loading area portion providing a loading area, a coating area portion providing a coating area, and an unloading area portion providing an unloading area; A substrate transfer device for mounting and transferring the substrate by a vacuum suction method; A nozzle device provided on the coating area and configured to apply a coating liquid onto the substrate; And Gantry to which the nozzle device is mounted Including, The substrate floating unit An upper plate on which a plurality of air ejecting openings and a plurality of air inlet openings are formed; An intermediate plate formed with an air supply passage for supplying air through the plurality of air ejection openings and an air intake passage for sucking air through the plurality of air intake openings, the intermediate plate being fastened to maintain an airtight state with the upper plate; A lower plate extending from the air supply flow path and the air suction flow path, the lower plate being fastened to maintain an airtight state with the intermediate plate; An air supply unit supplying air to the plurality of air ejecting ports through the air supply passage; And A vacuum pumping unit that sucks air from the plurality of air inlets through the air intake passage / RTI > The plurality of air blowing holes are each composed of a first nozzle portion provided on the upper portion of the upper plate and a first air pocket connected to the first nozzle portion, Each of the plurality of air inlets includes a first vacuum pocket provided on an upper portion of the upper plate, a second nozzle portion connected to the first vacuum pocket, and a second vacuum pocket connected to the second nozzle portion. The air supply flow passage is connected to the plurality of air ejection ports through the lower plate, the intermediate plate, and the upper plate, The air intake passage is connected to the plurality of air intake ports through the lower plate, the intermediate plate, and the upper plate, The plurality of air ejection ports and the plurality of air intake ports are alternately arranged at a constant inclination angle with respect to the transport direction of the substrate, The floating plate further includes a cavity connecting the first vacuum pockets arranged at the predetermined inclination angle in a horizontal direction, respectively, or a plurality of recesses provided in a radial direction around each of the first vacuum pockets. Coating device. The method of claim 19, The substrate floating unit includes first and second air supply accumulators provided between the air supply flow path and the air supply unit, and first and second air intake accumulators provided between the air suction flow path and the vacuum pumping unit. Coating device further comprising. The method of claim 19, The first air pocket is connected to the air supply passage through a manifold formed in the intermediate plate, The second vacuum pocket is connected to the air intake passage through first and second manifolds formed in the intermediate plate. Coating device. delete delete

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