TW201534400A - Coating apparatus - Google Patents

Abstract

A coating apparatus according to the present invention includes: a coater which includes a spray unit which has multiple nozzles arranged on a substrate to spray a coating agent; and a coating feeder which horizontally moves the coater in X-axis and Y-axis directions. The multiple nozzles are arranged to be separated mutually by being arranged in X-axis and Y-axis directions. Positions of the different axis directions of the multiple nozzles, arranged in any one axis direction between the X-axis and Y-axis, are different mutually. In the arrangement of the multiple nozzles forming the spray unit by embodiments of the present invention, the positions of the multiple nozzles which are arranged in any one axis direction between the X-axis and the Y-axis are different from positions of nozzles in the other axis. Thereby multiple dotted drops do not overlap each other as in the past when a coating agent is discharged from each of the multiple nozzles and is dotted on a substrate.

Description

Coating device

The present invention relates to a coating apparatus, and more particularly to a coating apparatus which can improve the quality of a coating film.

A functional coating film such as an anti-fingerprint film is coated on a cover glass or a window of an electronic product such as a mobile phone, an MP3, or a display device. Among them, a coating agent for forming an anti-fingerprint film mainly uses a fluorine-based substance.

A coating device for forming a functional coating film on a substrate such as a cover glass or a window, or a coating device for forming a functional coating film on the substrate, may be coated by spraying a solid fluorine coating agent. A dry coating method and a wet coating method of spraying a liquid fluorine coating agent.

The dry coating apparatus is a method of depositing a solid fluorine coating agent onto a surface of a substrate by a chemical vapor deposition (CVD) method in a vacuum atmosphere. Since the chemical vapor deposition method is carried out in a vacuum chamber, there are limitations in that the process is difficult to implement, and the problem of low productivity is caused.

Compared with the dry coating method, the wet coating method has a low process cost and is easy to realize batch coating for a large-area substrate, and has the advantages of high price competitiveness and good productivity compared to the dry method. As disclosed in Korean Laid-Open Patent Publication No. 2012-0120031.

The wet coating apparatus comprises: a conveyor for conveying the tray on which the substrate is placed in the direction of the coating process; a plasma processing machine disposed on the conveying path of the substrate; a coating agent spraying portion and an oven. Among them, the substrate is transported in the direction of the substrate process by the conveyor, and after the plasma surface treatment is performed on the lower side of the plasma processor, the coating agent is sprayed onto the surface while the lower side of the coating agent ejecting portion. Thereafter, it is conveyed to the oven by means of a conveyor to complete the drying process.

On the one hand, in the wet coating method, as described above, the coating is completed while transporting the substrate by means of a conveyor. However, since the conveyor conveys the substrate at a constant constant speed, it is difficult to change the process conditions or to control the speed in each process section. Moreover, the conveyor will spontaneously vibrate due to its driving operation, and the vibration of the conveyor will be transmitted to the substrate. This may become a factor in which the coating agent is unevenly coated on the substrate, thereby causing a problem that the quality of the coating film is lowered.

Further, the coating spray portion has a plurality of nozzles, and as shown in Fig. 15, a plurality of nozzles 512 are spaced apart so as to be aligned in one direction. More specifically, a plurality of nozzles 512 are arranged side by side in the X-axis direction, and at this time, the positions of the plurality of nozzles 512 in the Y-axis direction are the same. Further, when the coating agent is dotting from the plurality of nozzles 512 to the substrate, the dropping point D dropped on the substrate is substantially hemispherical. At this time, the dropping point D of the hemispherical shape is dripped in a shape whose height gradually decreases from the center portion to the peripheral edge. When the substrate S is coated in this state, a coating film having a non-uniform thickness is formed. On the other hand, in order to form a coating film with a uniform thickness on the substrate S, as shown in Fig. 16, a plurality of nozzles 512 are disposed so that the dispensing ranges between adjacent nozzles 512 overlap. More specifically, for the dropping point D which is dispensed from the two nozzles 512, respectively, the nozzle 512 is disposed such that the edges of the dropping point D can overlap each other.

However, in this case, the ejection pressure of each of the nozzles 512 affects the dripping of the adjacent nozzles 512, resulting in uneven formation of the coating film, thereby becoming another factor for deteriorating the quality of the coating film.

Prior art literature

Patent literature

Patent Document 1: Korean Open Patent 2012-0120031

The present invention provides a coating apparatus which can improve the quality of a coating film and can shorten the coating time.

Further, the present invention provides a coating apparatus which can easily adjust the conveying speed of the substrate and can uniformly control the coating amount of the coating liquid.

The coating apparatus according to the present invention comprises: a coating machine having a spraying unit provided with a plurality of nozzles for spraying a coating agent onto the substrate; and a coating conveyor for causing the coating machine to move along the X-axis and the Y-axis The direction is horizontally moved, and a plurality of nozzles are arranged along the X-axis and the Y-axis direction, and are spaced apart from each other, and the positions of the plurality of nozzles arranged along one of the X-axis and the Y-axis are different from each other in the other axial direction. .

A coating apparatus according to the present invention includes: a substrate conveyor having a guide rail and a substrate conveying portion, wherein the guide rail extends in a direction of a coating process for forming a coating film on the substrate, and a substrate is disposed on an upper portion of the substrate conveying portion, and Moving along the guide rail in the direction of the coating process; the plasma processor is disposed in the direction of the coating process and performing plasma surface treatment on the substrate; and the coating machine is spaced from the plasma processor in the path of the coating process Provided with a spray unit, the spray unit is provided with a plurality of nozzles that spray a coating agent onto the substrate.

The coating apparatus of the present invention comprises: a coating machine having a spraying unit, the spraying unit is provided with a plurality of nozzles for spraying a coating agent onto the substrate, and the plurality of nozzles are arranged along the X-axis and the Y-axis direction and are spaced apart from each other Provided such that a coating line formed by a plurality of nozzles arranged in one of the X-axis and Y-axis directions is coated with at least one nozzle disposed in the other of the X-axis and Y-axis directions The coating line is formed in an overlapping manner along one of the X-axis and Y-axis directions, and a plurality of nozzles arranged in the other of the X-axis and Y-axis directions are along one of the X-axis and the Y-axis directions The positions of the directions are different from each other.

The method includes a substrate conveyor, a guide rail and a substrate conveying portion, wherein the guide rail extends along a coating process for forming a coating film on the substrate, and a substrate is disposed on the upper portion of the substrate conveying portion, and the coating process is performed along the guide rail. The direction movement is performed; and the plasma processing machine is disposed on the direction path of the coating process, and performs plasma surface treatment on the substrate, and the ejection unit is disposed on the path of the coating process from the plasma processing machine.

a coating line formed by a plurality of nozzles arranged in one of the X-axis and Y-axis directions, and a coating line coated by at least one nozzle disposed in the other of the X-axis and Y-axis directions. Formed in an overlapping manner along one of the X-axis and Y-axis directions, and a plurality of nozzles arranged in the other of the X-axis and Y-axis directions along one of the X-axis and Y-axis directions The locations are different from each other.

Including: coating conveyor, the coating machine moves horizontally along the X-axis and Y-axis directions, and a plurality of nozzles are arranged along the X-axis and the Y-axis direction, and are arranged at intervals, along the X-axis and the Y-axis The positions of the plurality of nozzles arranged in one axial direction are different from each other in the other axial direction.

a coating line formed by a plurality of nozzles arranged in one of the X-axis and Y-axis directions, and a coating line coated by at least one nozzle disposed in the other of the X-axis and Y-axis directions Formed in an overlapping manner along one of the X-axis and Y-axis directions, and a plurality of nozzles arranged in the other of the X-axis and Y-axis directions along one of the X-axis and Y-axis directions The locations are different from each other.

The coating conveyor is arranged to horizontally move the coating machine along the X-axis and the Y-axis direction, including the substrate conveyor, having a guide rail and a substrate conveying portion, and the guide rail is oriented along a coating process for forming a coating film on the substrate. Extending, a substrate is disposed on an upper portion of the substrate transporting portion, and moves along a guide rail in a direction of a coating process; and a plasma processing machine is disposed on the directional path of the coating process, and performs plasma surface treatment on the substrate, and is coated The laminator is placed on the path of the coating process at a distance from the plasma processor.

When a plurality of coating agents are dispensed from a plurality of nozzles and a plurality of coating agents are dispensed on the substrate, the plurality of formed dropping points are spaced apart from each other, and the plurality of nozzles arranged along the X-axis direction are in the Y-axis direction. The locations are different from each other.

The ejecting unit ejects the coating agent onto the substrate while horizontally moving in the X-axis direction, and a coating line is formed on the substrate, and the coating line is formed by dropping dots successively discharged from a plurality of nozzles and continuously dripped, and each of them It is formed to extend in the X-axis direction, and is disposed such that at least a part of the coating line coated from each nozzle and at least one of the coating lines coated from the other nozzles spaced apart from each other in the X-axis direction are disposed. One is formed in an overlapping manner along the Y-axis direction, and the positions of the plurality of nozzles arranged in the X-axis direction are different from each other in the Y-axis direction.

The plurality of nozzles arranged in the X-axis direction are disposed so as to be different from each other in the Y-axis direction such that the overlapping area of the coating line in the Y-axis direction is 35% to 45%.

The distance between the center of one nozzle and the center of the other nozzle disposed at mutually different positions in the X-axis direction and adjacently arranged in the Y-axis direction is 1.3 to 1.7 times the overlap area.

The invention includes a plurality of nozzle groups respectively having a plurality of nozzles arranged along the Y-axis direction and spaced apart, the plurality of nozzle groups being arranged along the X-axis direction and spaced apart from each other, and the plurality of nozzle groups arranged along the X-axis direction are in the Y The positions in the axial direction are different from each other.

A plurality of nozzle groups are arranged in a zigzag shape.

A plurality of nozzle groups are disposed such that a part of a nozzle-coated coating line from two nozzle groups arranged to be spaced apart from each other along the X-axis direction is overlapped with each other in the Y-axis direction.

The substrate conveyor includes: a first substrate conveyor having a first rail and a first substrate conveying portion, wherein the first rail extends from a region where the substrate on which the coating film is to be formed is introduced to a position where the ejection unit is located, first a substrate is disposed at an upper portion of the substrate conveying portion and is horizontally movable along the first rail; and a second substrate conveyor has a second rail and at least one substrate conveying portion, and the second rail is taken out from the substrate on which the coating film is formed The area extends toward the position of the plasma processing machine, and the upper portion of the at least one substrate conveying portion is provided with the substrate and is horizontally movable along the second rail.

The first substrate conveying portion houses the substrate introduced to form the coating film to move in the direction of the plasma processing machine, and the first substrate conveyor includes: a first horizontal driving portion to be connected to the first substrate conveying portion Providing a driving force for horizontally moving the first substrate conveying portion along the first rail; and a first power source connected to the first horizontal driving portion to rotate the first horizontal driving portion, the first horizontal driving The part is a ball screw.

The first substrate transporting portion includes: a pair of moving blocks disposed to be respectively mounted on the pair of first rails, and capable of horizontally moving along the pair of first rails; the substrate mounting table is mounted on the upper side of the moving block, A substrate is placed on the upper portion, and a lifting and lowering drive unit is connected to the substrate mounting table to raise and lower the substrate mounting table.

The substrate mounting table is lifted and lowered by the elevation driving portion in the substrate introduction region into which the substrate is introduced to form the coating film, so that the substrate introduced into the substrate introduction region is placed on the substrate mounting table.

The present invention includes a substrate transfer portion that is disposed on a horizontal movement path of the first substrate transfer portion, supports a substrate that is moved from the first substrate transfer portion to transfer the substrate to the substrate transfer portion of the second substrate conveyor, and a coating support The portion is disposed on a moving path of the second substrate conveyor, and a substrate is disposed on the upper portion to perform a coating process.

The second substrate conveyor includes: a second substrate conveying portion, the substrate supported on the substrate transmitting portion is disposed to move in the direction of the spraying unit; and the third substrate conveying portion is disposed on the second rail The front side of the two substrate conveying portion is horizontally moved along the second guiding rail to thereby position the substrate supported by the coating support portion to move toward the substrate lead-out area; the fixing strip is connected to the second substrate conveying portion and the third substrate conveying portion Provided in a manner between the portions; the second horizontal driving portion is disposed to be connected to any one of the second substrate conveying portion and the third substrate conveying portion, and the second substrate conveying portion and the third substrate conveying portion are provided along a driving force for horizontal movement of the second rail; and a second power source connected to the second horizontal driving portion to rotate the second horizontal driving portion.

The second horizontal drive portion is a ball screw.

The second substrate transporting portion and the third substrate transporting portion include: moving blocks that are respectively mounted on the pair of second rails and are horizontally movable along the pair of second rails; the substrate mounting table is mounted on the moving block On the upper side, a substrate is placed on the upper portion; and the elevation drive unit is connected to the substrate mounting table to raise and lower the substrate mounting table.

On the lower side of the substrate supported on the substrate transfer portion, the substrate mounting table of the second substrate transfer portion is lifted and lowered by the elevation drive portion of the second substrate transfer portion to place the substrate supported on the substrate transfer portion a substrate mounting table on the second substrate transporting portion; and a lower surface of the substrate supported by the coating support portion, the substrate mounting table of the third substrate transporting portion is lifted and lowered by the elevation driving portion of the third substrate transporting portion The substrate supported on the coating support portion is disposed on the substrate mounting table of the third substrate conveying portion.

The coating conveyor includes: a first guide member located on an upper side of the coating support portion and horizontally moving the spray unit along the X-axis direction; and a second guide member connected to both ends of the first guide member The Y-axis direction is extended to horizontally move the first guide and the ejection unit in the Y-axis direction.

The plurality of nozzles respectively include: a coating agent supply tube connected to a syringe pump that supplies a coating agent from the coating agent tank; a gas supply tube that is connected to a flow rate control portion that supplies gas from the gas tank; and a check valve, There is a blocking member and a spring for blocking the backflow of the coating agent or gas between the plurality of nozzles and the coating agent supply tube, and the spring is connected to the blocking member.

According to the embodiment of the present invention, when a plurality of nozzles constituting the ejection unit are arranged, the positions of the plurality of nozzles arranged along one of the X-axis and the Y-axis in the other axial direction are different from each other. Thus, when the coating agent is discharged from a plurality of nozzles and dotting to the substrate, the plurality of dropping points of the dispensing do not overlap as in the past.

Further, when the coating agent is sprayed in such a manner that the coating unit is horizontally moved in the X-axis direction and the coating agent is sprayed from the plurality of nozzles, the dropping points respectively discharged from the plurality of nozzles are continuously applied and coated. A line shape extending along the X-axis direction. At this time, the coating line to be sprayed by the respective nozzles overlaps the plurality of coating lines in the Y-axis direction. Thereby, when the ejection unit is moved once in the X-axis direction, the coating film is uniformly formed in one region, and the effect of improving the quality of the coating film is further obtained.

In the present invention, a syringe pump is used as means for supplying a coating agent to the nozzle, whereby the amount of injection of the coating agent can be accurately controlled, and the flow of the gas supplied to the nozzle can be controlled by the flow rate control unit (MFC). the amount. Therefore, there is an advantage that the spray angle and particle size of the coating agent can be easily controlled.

Further, by providing a check valve on the coating agent supply pipe for supplying the coating agent to the nozzle, it is possible to prevent the coating agent from flowing from the coating agent supply pipe when the coating agent cannot be ejected from the nozzle, thereby preventing the The outside of the nozzle is naturally dropped, or the coating agent remaining in the nozzle is returned to the coating agent supply pipe.

Hereinafter, embodiments of the present invention will be described in detail. However, the present invention is not limited to the embodiments disclosed in the following, but can be implemented in various different forms, and the present embodiment is merely for making the disclosure of the present invention more comprehensive, and has a general knowledge in the technical field. The scope of the invention is more fully understood.

The present invention is a coating apparatus which sprays a coating agent onto a surface of a substrate to form a coating film. As a more specific example, the coating apparatus of the embodiment of the present invention sprays the surface of a glass substrate of a cover glass or a window for an electronic product such as a mobile phone, an MP3, a display device, or the like. A device for a functional membrane (or functional membrane). Further, the functional film sprayed on the surface of the substrate may be an anti-fingerprint film, and the coating agent for forming an anti-fingerprint (ANTI-FINGERPRINT) coating film may be a fluorine-based liquid material. That is, the coating device according to the present invention can be a device for forming an anti-fingerprint coating film over a surface on which a fingerprint can be formed.

Fig. 1 is a schematic view showing a significant portion of a coating apparatus according to an embodiment of the present invention in a modular manner. Fig. 2 is a perspective view showing a coating apparatus according to an embodiment of the present invention. Fig. 3 is a schematic view showing a significant portion of a coater according to an embodiment of the present invention in a modular manner. Fig. 4 is a cross-sectional view showing a check valve according to an embodiment of the present invention. Fig. 5 is a perspective view showing a spray unit according to an embodiment of the present invention. For convenience of explanation, the drawings in which a plurality of second supply pipes and a plurality of gas supply pipes respectively connected to a plurality of nozzles are omitted are illustrated. Fig. 6 is a plan view showing the arrangement structure of a plurality of nozzles according to the first embodiment of the present invention and the dropping points which are dotting from the plurality of nozzles to the substrate, respectively. Fig. 7 is a plan view showing an arrangement structure of a plurality of nozzles according to a modification of the first embodiment and a dropping point which is dotting from the plurality of nozzles to the substrate. Fig. 8 is a plan view showing a configuration of a plurality of nozzles according to a first embodiment of the present invention and a part of a coating line coated by a plurality of nozzles. Fig. 9 is a plan view showing an arrangement structure of a plurality of nozzles and a dropping point which is dotting from a plurality of nozzles to a substrate according to a second embodiment of the present invention. Fig. 10 is a plan view showing a configuration of a plurality of nozzles according to a second embodiment of the present invention and a part of a coating line coated by a plurality of nozzles. 11 to 13 are perspective views for explaining the operation of the coating apparatus according to the embodiment of the present invention. Fig. 14 is a schematic view showing the horizontal movement of the ejection unit according to an embodiment of the present invention in a patterning manner.

Hereinafter, regarding the front and rear descriptions, the direction in which the substrate is transported for coating or the direction in which the coating is applied is referred to as the front side, and the opposite direction is referred to as the rear side.

Referring to Figures 1 and 2, a coating apparatus according to an embodiment of the present invention includes a table 1000 for performing a coating operation on an upper portion thereof, a plasma processing machine 2000, and a coating process disposed on an upper portion of the table 1000. On the path of the substrate, the surface of the substrate S is processed by generating a plasma; the coating machine 3000 is disposed along the front of the plasma processing machine 2000 in the direction of the coating process, and has a coating agent for spraying the substrate S. The spraying unit 3100; the coating conveyor 7000 moves the coating machine 3000 horizontally along the X-axis and the Y-axis direction; the substrate conveyor 6000 is disposed at the upper portion of the table 1000, and transports the substrate S such that the substrate S passes the plasma Processor 2000 and coating machine 3000. Moreover, although not shown, an oven may be further included, and the oven is disposed outside the table 1000 for drying the substrate S on which the coating is completed, and the oven may be, for example, a hot air or an infrared drying oven ( Dry oven).

The plasma processor 2000 is used to pre-treat the coated surface of the substrate S, for example, the upper surface of the substrate S, before the coating, and the plasma processing machine 2000 according to the embodiment is a means for treating the surface of the substrate S with atmospheric pressure plasma. The plasma processor 2000 is disposed on the upper portion of the table 1000, and the wall or surface that faces or discharges the plasma toward the substrate S is spaced apart from the upper surface of the table 1000 by a predetermined distance. That is, the plasma processing machine 2000 is provided to be spaced apart from the upper portion of the table 1000 by a predetermined distance. Thereby, the substrate S is transported to the lower side of the plasma processing machine 2000 by the substrate conveyor 6000, and plasma processing is sequentially performed.

The coater 3000 forms a functional film such as an anti-fingerprint film by spraying a coating agent onto the surface of the substrate S which is surface-treated by the plasma processor 2000. As shown in FIGS. 1 to 3, the coater 3000 includes a spray unit 3100 having a plurality of nozzles 3120 for spraying a coating agent onto the substrate S, and a plurality of syringe pumps 3200, respectively, and a plurality of The nozzles 3120 are connected; the coating agent tank 3300 stores a coating agent; the gas tank 3400 stores a gas for supplying to the plurality of nozzles 3120, respectively; and the first coating agent supply tube 3500 is used for respectively connecting the coating agent a tank 3300 and a plurality of syringe pumps 3200; a plurality of second coating agent supply tubes 3600 for respectively connecting a plurality of syringe pumps 3200 and a plurality of nozzles 3120 in a one-to-one manner; the check valves 3700 are disposed in the plurality of a second coating agent supply pipe 3600; a plurality of gas supply pipes 3800 for respectively connecting the gas tank 3400 and the plurality of nozzles 3120; a flow control unit (MFC) 3900, which is disposed in each gas supply pipe 3800, for The flow rate of the gas supplied to the nozzle 3120 is controlled.

As shown in Fig. 3, the syringe pump 3200 includes a syringe body 3210 having an internal space, and a rod 3220 for performing forward/backward movement within the syringe body 3210. According to this syringe pump 3200, when the rod 3220 shown in part (b) of Fig. 3 is retracted, the syringe body 3210 and the first coating agent supply tube 3500 are in communication with each other, and the coating agent of the coating agent tank 3300 is applied. The first coating agent supply tube 3500 is supplied into the syringe main body 3210. Thereafter, as shown in part (c) of FIG. 3, when the rod 3220 is advanced, the syringe body 3210 and the second coating agent supply tube 3600 are in communication with each other, and the coating agent inside the syringe body 3210 is directed to the syringe body 3210. The outside is discharged and moved to the nozzle 3120 through the second coating agent supply pipe 3600.

The check valve 3700 supplies the coating agent supplied from the syringe pump 3200 to the nozzle 3120 by controlling the communication between the second coating agent supply pipe 3600 and the nozzle 3120, preventing the coating agent residue or the gas from flowing back at the end of the coating. . As shown in Fig. 4, such a check valve 3700 has an internal space including: a body 3710 provided with an inflow port 3711h for allowing a coating agent to flow in, and a discharge port 3712h for discharging the coating agent toward the nozzle 3120. The blocking member 3720 is disposed inside the body 3710 and movable along the inflow port 3711h and the discharge port 3712h; and the spring 3730 is disposed inside the body 3710, one end is connected to the blocking member 3720, and the other end is connected to the discharge port 3712h. The inner walls of the perimeter are connected. The blocking member 3720 has a large diameter compared to the inflow port 3711h and the discharge port 3712h, and its shape may be, for example, a cluster shape or a spherical shape.

Hereinafter, the operation of such a check valve 3700 will be briefly explained. First, by bringing the syringe pump 3200 and the second coating agent supply tube 3600 into communication, the coating agent of the syringe pump 3200 is conveyed in the direction of the nozzle 3120. At this time, the force which is conveyed toward the nozzle 3120 by the coating agent, as shown in part (a) of Fig. 4, the blocking member 3720 which blocks the inlet 3711h moves to the lower side, and opens the inlet 3711h by means of application. The spring 3730 contracts in the direction of the discharge port 3712h by the force of the blocking member 3720. Thereby, the coating agent passes through the inside of the main body 3710 of the check valve 3700, is discharged through the discharge port 3712h, and is supplied to the nozzle 3120. At this time, when the gas is supplied to the inside of the nozzle 3120 by the gas supply pipe 3800, The coating agent is discharged from the nozzle 3120 and ejected onto the substrate S. Conversely, when the coating process is completed, the operation of the syringe pump 3200 and the gas supply will be stopped. At this time, since there is no force applied in the direction of the spring 3730, as shown in part (b) of Fig. 4, the spring 3730 is attempted to return to the original elastic force by the spring 3730, and the spring 3730 is relaxed toward the blocking member 3720. Thereby, the blocking member 3720 supported by the spring 3730 moves toward the inflow port 3711h and blocks the inflow port 3711h. Thereby, in a state in which the syringe pump 3200 and the gas supply are stopped in order to stop the coating step, the coating agent and the gas remaining in the nozzle 3120 can be blocked from flowing back toward the syringe pump 3200.

As shown in FIG. 5, the spraying unit 3100 includes: a plurality of nozzles 3120 for spraying a coating agent onto the surface of the substrate S; and a nozzle supporting portion 3110 for fixedly supporting the plurality of nozzles 3120 along the coating conveyor 7000 moves horizontally. The nozzle support portion 3110 includes a fixing member 3111 extending in the up-and-down direction and connected to the coating conveyor 7000, and a nozzle supporting member 3112 connected to the lower portion of the fixing member 3111 to fix a plurality of nozzles 3120. The plurality of nozzles 3120 are spaced apart from each other. Of course, the nozzle support portion 3110 is not limited to the shape and configuration, and a plurality of nozzles 3120 may be provided, or may be variously modified so as to be connectable to the coating conveyor 7000.

Further, the injection unit 3100 can be moved in the Z-axis direction, that is, can be moved up and down. To this end, the fixing member 3111 may be provided with an elevation driving means for moving up or down along the Z-axis direction.

As shown in FIG. 5, a plurality of injection nozzles 3120 are fixedly disposed so as to penetrate the nozzle support member 3112 in the vertical direction, and are provided at intervals. Further, as shown in FIG. 3, each of the plurality of nozzles 3120 is connected to the second coating agent supply pipe 3600 and the gas supply pipe 3800. Thus, with the operation of the syringe pump 3200, the coating agent is supplied to the nozzle 3120 by the second coating agent supply tube 3600, and the coating agent in the nozzle 3120 is supplied by the gas supplied from the gas supply tube 3800 to the nozzle 3120. The substrate S is ejected.

The coating conveyor 7000 is a means for horizontally moving the coater 3000 along the X-axis and Y-axis directions. Referring to FIG. 2, the first coating guide 7100 is included in the direction of the coating process to the plasma. The front side of the processor 2000 is spaced apart and extends along a direction intersecting the conveying direction of the substrate S; a pair of second coating rails 7200 are respectively disposed at both ends of the first coating rail 7100 along the substrate S. The conveying direction or the extending direction of the substrate conveyor 6000 is extended; the supporting portion 7300 is disposed to connect the upper portion of the table 1000 and the second coating rail 7200, and supports the second coating rail 7200; The coating moving block 7400 is disposed in such a manner as to connect the nozzle supporting portion 3110 and the first coating guide rail 7100, and moves horizontally along the first coating guide rail 7100; the second coating moving block 7500 is mounted on Both ends of the first coated rail 7100 are horizontally moved along the second coated rail 7200.

Wherein, the direction in which the first coating rail 7100 extends may be the X-axis direction, and the direction in which the second coating rail 7200 extends may be the Y-axis direction. Moreover, the first coated rail 7100 and the second coated rail 7200 may be, for example, linear guides. Thereby, the ejection unit 3100 horizontally moves in the X-axis direction along the first coating guide rail 7100, and horizontally moves in the Y-axis direction along the second coating guide rail 7200.

Hereinafter, the configuration of a plurality of nozzles according to the first embodiment of the present invention will be described. At this time, in order to explain the arrangement structure of the plurality of nozzles 3120 shown in FIGS. 6 and 8, a plurality of nozzle reference numerals are referred to as 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, and 3124c will be described.

Referring to FIGS. 6 and 8, a plurality of nozzles 3120 are arranged along the X-axis and Y-axis directions, and are arranged at intervals. For more specific illustration, the three nozzles are spaced apart from each other along the Y-axis direction at the same position in the X-axis direction, and the three nozzles thus arranged are referred to as "nozzle groups". The nozzle groups are arranged in the X-axis direction, for example, having four nozzle groups composed of three nozzles (hereinafter, the first nozzle group to the fourth nozzle group 3121, 3122, 3123, 3124), for convenience The three nozzles 3121a, 3121b, and 3121c of the first nozzle group 3121 are referred to as first to third nozzles 3121a, 3121b, and 3121c, respectively, and the three nozzles 3122a, 3122b, and 3122c of the second nozzle group 3122 are referred to as The fourth nozzle to the sixth nozzles 3122a, 3122b, and 3122c, the three nozzles 3123a, 3123b, and 3123c of the third nozzle group 3123 are referred to as the seventh nozzle to the ninth nozzles 3123a, 3123b, and 3123c, and the fourth nozzle group 3124 is The three nozzles 3124a, 3124b, 3124c are referred to as tenth to twelfth nozzles 3124a, 3124b, 3124c.

The first nozzle group to the fourth nozzle group 3121, 3122, 3123, 3124 are arranged alternately along the X-axis direction, and at this time, the first nozzle group to the fourth nozzle group 3121, 3122, 3123, 3124 are zigzag (zigzag) Morphological arrangement. In other words, the nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a constituting the first to fourth nozzle groups 3121, 3122, 3123, 3124, which are arranged along the X-axis direction, respectively. The positions of 3124b and 3124c are different in the Y-axis direction. More specifically, the first to third nozzles 3121a, 3121b, and 3121c of the first nozzle group 3121 and the fourth to sixth nozzles 3122a, 3122b, 3122c, and the third nozzle group 3123 of the second nozzle group 3122 are The tenth nozzle to the twelfth nozzles 3124a, 3124b, and 3124c of the seven nozzles to the ninth nozzles 3123a, 3123b, 3123c, and the fourth nozzle group 3124 are different from each other in the Y-axis direction. The first nozzle to the third nozzle of the first nozzle group 3121 will be described from the center (C) position of each of the nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c. 3121a, 3121b, 3121c, fourth to sixth nozzles 3122a, 3122b, 3122c of the second nozzle group 3122, and seventh to ninth nozzles 3123a, 3123b, 3123c, and fourth nozzle group 3124 of the third nozzle group 3123 The positions of the centers (C) in the Y-axis direction of the tenth to twelfth nozzles 3124a, 3124b, and 3124c are different from each other.

Therefore, the fourth to sixth nozzles constituting the second nozzle group 3122 are disposed at positions corresponding to the spaces between the first nozzles to the third nozzles 3121a, 3121b, and 3121c constituting the first nozzle group 3121. 3122a, 3122b, 3122c, at a position corresponding to a space between the fourth nozzle to the sixth nozzles 3122a, 3122b, 3122c constituting the second nozzle group 3122, a seventh nozzle configured to constitute the third nozzle group 3123 To the ninth nozzles 3123a, 3123b, 3123c. Similarly, at the position corresponding to the space between the seventh nozzle to the ninth nozzles 3123a, 3123b, and 3123c constituting the third nozzle group 3123, the tenth nozzle to the tenth for constituting the fourth nozzle group 3124 are disposed. Two nozzles 3124a, 3124b, 3124c. In this case, a more specific example will be described to configure the second nozzle at a position corresponding to the space between the first nozzle 3121a and the second nozzle 3121b constituting the first nozzle group 3121 in the X-axis direction. The fifth nozzle 3122b of the group 3122 has a sixth nozzle 3122c disposed at a position corresponding to the space between the second nozzle 3121b and the third nozzle 3121c in the X-axis direction, and the fourth nozzle 3122a is located at the tenth nozzle 3124a and the Between eleven nozzles 3124b.

Further, at a position corresponding to the space between the fourth nozzle 3122a and the fifth nozzle 3122b constituting the second nozzle group 3122 in the X-axis direction, a seventh nozzle 3123a for constituting the third nozzle group 3123 is disposed, The eight nozzles 3123b are located in the X-axis direction corresponding to the space between the fifth nozzle 3122b and the sixth nozzle 3122c, and the ninth nozzle 3123c is located between the second nozzle 3121b and the third nozzle 3121c.

Hereinafter, the description of the specific arrangement of the other nozzles will be omitted, and as described above, the space between the plurality of nozzle groups for constituting the other nozzle groups in the X-axis direction is set.

When a plurality of nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c each discharge the coating agent and dotting or spraying onto the substrate S, as shown in FIG. As shown, it is dripped on the substrate S in a predetermined shape, for example, in the shape of a water drop, and the plurality of drop points D dispensed are respectively located at the positions of the respective nozzles on the substrate. That is, a plurality of dropping points D dropped onto the substrate S are arranged at intervals in the X-axis and Y-axis directions. At this time, the plurality of dropping points D arranged along the X-axis and the Y-axis direction do not overlap. This is because the plurality of nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c constituting the first to fourth nozzle groups 3121, 3122, 3123, 3124, respectively, are The position in the Y-axis direction or the center (C) position is different, and they are arranged in a zigzag shape.

If the ejection unit 3100 having the plurality of nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c having such an arrangement is along the X-axis direction by the coating conveyor 7000 When the horizontal movement is performed, a plurality of dropping points D are continuously applied onto the substrate S, and further coated into a line shape. Further, the diameter of the dropping point D which is dropped onto the substrate S by the respective nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c is larger than the respective nozzles 3121a, 3121b, 3121c, 3122a Diameter of 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c. Therefore, when the ejection unit 3100 is horizontally moved in the X-axis direction, a plurality of dropping points D are continuously formed along the X-axis direction to form a coating line, and as shown in Fig. 8, the coating line is along Partial overlap occurs in the Y-axis direction. For example, a partial region of the first coating line L1 sprayed by the first nozzle 3122a of the first nozzle group 3121 and a partial region of the seventh coating line L7 sprayed by the seventh nozzle 3123a of the third nozzle group 3123 The Y-axis direction overlaps, and the other partial region of the first coating line L1 overlaps with the partial region of the eleventh coating line L11 sprayed by the eleventh nozzle 3124b of the fourth nozzle group 3124 in the Y-axis direction. As another example, although not shown, a partial region of the second coating line that is sprayed by the second nozzle 3121b of the first nozzle group 3121 and an eighth region that is sprayed by the eighth nozzle 3123b of the third nozzle group 3123 Partial regions of the coating line overlap in the Y-axis direction, and other partial regions of the first coating line L1 and a partial region of the eleventh coating line L11 that is sprayed by the twelfth nozzle 124c of the fourth nozzle group 3124 are along Y The axis directions overlap. As a further example, a partial region of the fourth coating line sprayed by the fourth nozzle 3122a of the second nozzle group 3122 and a partial region of the seventh coating line sprayed by the seventh nozzle 3123a of the third nozzle group 3123 The Y-axis direction overlaps, and the other partial region of the fourth coating line overlaps with the partial region of the tenth coating line that is sprayed by the tenth nozzle 3124a of the fourth nozzle group 3124 in the Y-axis direction.

Hereinafter, the third coating line and the fifth coating which are respectively sprayed by the third nozzle 3121c, the fifth nozzle to the twelfth nozzle (3122b, 3122c, 3123a, 3124b, 3124c) are not described. a coating line in which the line to the twelfth coating line overlap, but in addition to the third coating line and the tenth coating line existing at both ends of the shaft in the third coating line, the fifth coating line to the twelfth coating line , respectively, overlap with the two coating lines along the Y-axis direction.

Thus, when the ejection unit 3100 is moved once in the X-axis direction, a uniform coating film can be formed for one region, and the effect of improving the quality of the coating film can be obtained.

As described above, in the present invention, a partial region of the coating line formed by spraying each of the nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c is along the X-axis At least one of the coating lines sprayed by the other nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c arranged in the direction interval is formed in an overlapping manner along the Y-axis direction. Preferably, the area of overlap between one coating line and the other coating line is from 35% to 45%, more preferably 40%, of the width of a coating line.

The overlapping area between such coating lines changes with a distance between one nozzle and the other nozzle which are adjacent in the Y-axis direction and disposed in mutually different X-axis directions. More specifically, such an area changes with a distance between the center of one nozzle and the center of the other nozzle which are adjacent to each other in the Y-axis direction and disposed in mutually different X-axis directions. Further, the width of the coating line sprayed by one nozzle varies depending on the inner diameter of the nozzle, the distance between the substrate and the nozzle, the viscosity of the coating agent, and the gas injection pressure.

Therefore, the width of the coating line will be described in a state in which the inner diameter of the nozzle, the distance between the substrate and the nozzle, the viscosity of the coating agent, and the gas injection pressure are set to predetermined values. For example, in the embodiment, the width (or the diameter of the dropping point) of the coating line formed on the substrate S is 12 to 13 times the inner diameter of the nozzle.

Further, the distance between the center of one nozzle adjacent to each other in the Y-axis direction and disposed in the mutually different X-axis directions and the center of the other nozzle is configured to be 1.3 times the width (or overlap area) of the overlap region (A) to 1.7 times, more preferably 1.5 times.

Referring to Fig. 8, the more detailed description, the distance (B) between the center of the first nozzle 3121a of the first nozzle group 3121 and the center of the eleventh nozzle 3124b of the fourth nozzle group 3124 is overlapped. The width (or overlap area) of the region (A) is 1.3 to 1.7 times, more preferably 1.5 times.

Thus, in the embodiment of the present invention, by adjusting the distance (B) between the center of one nozzle and the center of the other nozzle which are adjacent in the Y-axis direction and arranged in mutually different X-axis directions, The area of overlap between one coated line and the other coated line is from 35% to 45%, more preferably 40%, of the width of a coated line. As described above, the adjustment of the overlap area may vary depending on the inner diameter of the nozzle, the distance between the substrate and the nozzle, the viscosity of the coating agent, and the gas injection pressure. Therefore, if the inner diameter of the nozzle, the distance between the substrate and the nozzle, the viscosity of the coating agent, and the gas injection pressure are changed, the distance between the substrate and the nozzle is also adjacent to each other along the Y-axis direction. Further, the distance between the center of one nozzle disposed in the mutually different X-axis direction and the center of the other nozzle is changed.

Therefore, when the coating agent is dispensed, the dropping point D is not overlapped, and the overlapping coating line method is used, which is not affected by the adjacent nozzles, and can solve the height of the hemispherical shaped dropping point D from the central portion to the peripheral edge. The lower the problem, the more uniform the coating film can be formed for a region, so that the effect of improving the quality of the coating film is obtained.

In the first embodiment shown in Fig. 6, the arrangement in which the first nozzle group 3121, the second nozzle group 3122, the third nozzle group 3123, and the fourth nozzle group 3124 are sequentially performed is described. However, without being limited thereto, the order of the first to fourth nozzle groups 3121, 3122, 3123, 3124 may be changed. For example, as shown in FIG. 7, the first nozzle group 3121, the third nozzle group 3123, the second nozzle group 3122, and the fourth nozzle group 3124 may be arranged in this order. At this time, the distance between the first nozzle group 3121 and the third nozzle group 3123 according to the modification and the distance between the first nozzle group 3121 and the third nozzle group 3123 according to the first embodiment shown in FIG. 6 Similarly, no other nozzle groups are provided between the first nozzle group 3121 and the third nozzle group 3123. Also, the distance between the third nozzle group 3123 and the second nozzle group 3122 can be the same as the distance between the first nozzle group 3121 and the third nozzle group 3123, and the third nozzle group 3123 and the fourth nozzle group 3124 A second nozzle group 3122 is disposed therebetween. Thus, the magnitude of the ejection unit 3100 according to the modification in the X-axis direction is larger than that of the first embodiment, and is approximately twice.

The case where the ejection unit 3100 has the first to fourth nozzle groups 3121, 3122, 3123, and 3124 has been described above. Without being limited thereto, it is possible to have four nozzle groups 3121, 3122, 3123, 3124 below or above.

Also, as in the second embodiment shown in Fig. 9, two first nozzle groups to third nozzle groups 3121, 3122, 3123, 3124 may be provided. That is, the fifth to eighth nozzle groups 3125, 3126, 3127, and 3128 having the same arrangement configuration as the first to fourth nozzle groups 3121, 3122, 3123, and 3124 are arranged along the X-axis direction. The first to eighth nozzle groups 3121, 3122, 3123, 3124, 3125, 3126, 3127, 3128.

At this time, the eighth nozzle group to the twelfth nozzle group 3125, 3126, 3127, 3128 are arranged at intervals in the X-axis direction, and at this time, the eighth nozzle group to the twelfth nozzle group 3125, 3126, 3127 3128 is arranged in a zigzag arrangement. In other words, the nozzles 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, respectively, constituting the fifth to eighth nozzle groups 3125, 3126, 3127, 3128 arranged in the X-axis direction are formed. The positions of 3128b and 3128c are different in the Y-axis direction. More specifically, the thirteenth to thirteenth nozzles 3125a, 3125b, 3125c of the fifth nozzle group 3125 and the sixteenth to eighteenth nozzles 3126a, 3126b, 3126c, and the seventh nozzle group of the sixth nozzle group 3126 The twenty-second nozzle to the twenty-first nozzles 3127a, 3127b, 3127c, and the twenty-second nozzle to the twenty-fourth nozzles 3128a, 3128b, and 3128c of the eleventh nozzles 3127a, 3127b, and 3127c and the third nozzle group 3128 are different in position in the Y-axis direction. From the center (C) position of each of the nozzles 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, 3128b, 3128c, the thirteenth nozzle to the fifteenth nozzle of the fifth nozzle group 3125 The thirteenth nozzle to the eighteenth nozzles 3126a, 3126b, 3126c of the third nozzle group 3126, the thirteenth nozzle to the eleventh nozzles 3127a, 3127b, 3127c, and the eleventh nozzles 3127a, 3127b, 3127c, 3125a, 3125b, 3125c The twenty-second nozzle to the twenty-fourth nozzles 3128, 3128b, and 3128c of the eight nozzle group 3128 are different from each other in the center (C) position in the Y-axis direction.

Therefore, the thirteenth to twenty-fourth nozzles 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, 3128b, 3128c each discharge the coating agent and dotting onto the substrate S Alternatively, as shown in Fig. 9, the substrate S is dripped in a predetermined shape, for example, in the shape of a water drop, and a plurality of dropped dots D are respectively placed at positions of the respective nozzles on the substrate. That is, a plurality of dropping points D dropped onto the substrate S are arranged at intervals in the X-axis and Y-axis directions. At this time, the plurality of dropping points D arranged along the X-axis and the Y-axis direction do not overlap. This is because the plurality of nozzles 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, 3128b, 3128c constituting the fifth nozzle group to the eighth nozzle group 3125, 3126, 3127, 3128, respectively, are The positions in the Y-axis direction or the center (C) positions are different, and they are arranged in a zigzag shape so that the positions are different from each other.

Further, according to the second embodiment, the first to third nozzles 3121, 3121b, and 3121c constituting the first nozzle group 3121 and the thirteenth to fifteenth nozzles 3125a, 3125b, and 3125c constituting the fifth nozzle group 3125 are The positions in the Y-axis direction are the same, and the fourth to sixth nozzles 3122a, 3122b, and 3122c constituting the second nozzle group 3122 and the sixteenth to eighteenth nozzles 3126a, 3126b, and 3126c constituting the sixth nozzle group 3126 are in the Y The position in the axial direction is the same. Further, the positions of the seventh to ninth nozzles 3123a, 3123b, and 3123c constituting the third nozzle group 3123 and the nineteenth nozzle to the eleventh nozzles 3127a, 3127b, and 3127c constituting the seventh nozzle group 3127 are in the Y-axis direction. Similarly, the tenth to twelfth nozzles 3124a, 3124b, and 3124c constituting the fourth nozzle group 3124 and the twenty-second nozzle to the twenty-fourth nozzles 3128a, 3128b, and 3128c constituting the eighth nozzle group 3128 are in the Y-axis direction. The same location.

Thereby, a partial region of the first coating line L1 coated by the first nozzle 3121a of the first nozzle group 3121 overlaps with the seventh coating line L7 and the nineteenth coating line L19, and other regions of the first coating line L1 and the tenth A coating line L11 and a twenty-third coating line L23 overlap. Further, at the same time, the first coating line L1 overlaps with the entire area of the thirteenth coating line L13 sprayed by the thirteenth nozzle 3125a. Thus, in the second embodiment, in the coating line coated by one nozzle, in addition to the third coating line, the tenth coating line, the fifteenth coating line, and the twenty-second coating line existing at both ends of the Y-axis , overlapping with five coating lines, respectively. Therefore, when moving once along the X axis, the ejection unit 3100 according to the second embodiment can form a thicker coating film than the ejection unit 3100 according to the first embodiment, and, in order to form a coating of the same thickness The film has an effect of reducing the number of movements along the X axis.

The substrate conveyor 6000 is a means for transporting the substrate S in the process direction, and the substrate S is placed on the tray T, and the substrate conveyor 6000 transports the tray T. The substrate conveyor 6000 is substantially provided with support and is transported by the tray T. However, for convenience of explanation, the "substrate" will be described as an object.

The substrate conveyor 6000 is disposed at an upper portion of the table 1000 and is extended to transport the substrate S to the plasma processing machine 2000 and the ejection unit 3100. That is, the substrate conveyor 6000 extends over the upper portion of the table 1000, and extends from a region where the substrate S is introduced to a region where the substrate S that has completed the plasma surface treatment and the coating step is taken out to the outside of the table 1000.

The substrate conveyor 6000 includes a first substrate conveyor 4000 extending from a region where the substrate S is introduced to a front end of the ejection unit 3100, transporting the substrate S to pass through a lower side of the plasma processing machine 2000, and a second substrate conveyor 5000, The first substrate conveyor 4000 is extended to a region where the substrate S is taken out, and the substrate S is transported to pass through the lower side of the ejection unit 3100.

The first substrate conveyor 4000 includes a substrate introduction portion 4100 disposed at the rear of the plasma processing machine in the direction in which the coating process is performed, for temporarily supporting the introduced substrate S; the first horizontal driving portion 4200 is The introduced area extends to a region between the spraying units 3100; the first power source 4300 is connected to the first horizontal driving portion 4200 for operating the first horizontal driving portion 4200; a pair of first guiding rails 4400, along The two sides of the first horizontal driving portion 4200 are disposed in parallel; the first substrate conveying portion 4500 is disposed in connection with the first horizontal driving portion 4200 and the first rail 4400, and is driven by the driving of the first horizontal driving portion 4200. The horizontal movement is performed along the first rail 4400; the substrate transfer portion 4600 receives the substrate S that has completed the plasma processing from the first substrate transport portion 4500 and provides support.

The substrate introduction portion 4100 includes a pair of support members 4110 disposed side by side in the direction of both sides of the first horizontal drive portion 4200, and a plurality of rollers 4120 respectively provided to the pair of support members 4110 and having the tray T at the upper portion The tray is used to support the substrate S introduced for the coating. Among them, the tray T on which the substrate S is placed is placed on a plurality of rollers 4120.

The first horizontal driving portion 4200 is disposed between the pair of supporting members 4110, and one end thereof is connected to the first power source 4300. The first horizontal driving portion 4200 according to the embodiment is a ball screw, and the first power source 4300 may be a motor that rotates the ball screw.

The pair of first rails 4400 are respectively spaced apart from the two sides of the first horizontal driving portion 4200 and extend along the extending direction of the first horizontal driving portion 4200. Further, the pair of first rails 4400 are located between the pair of support members 4110 constituting the substrate introduction portion 4100. That is, the distance between the pair of first rails 4400 is smaller than the distance between the pair of support members 4400. The first rail 4400 according to an embodiment may be, for example, a linear guide.

The first substrate transporting portion 4500 is disposed on the upper portion of the substrate S and horizontally moved along the first rail 4400 to horizontally move the substrate S toward the lower side of the plasma processing machine 2000 that releases or radiates plasma. The first substrate transporting portion 4500 according to the embodiment includes a pair of moving blocks 4520 that are respectively mounted on the upper portions of the pair of first rails 4400 and slid; the substrate mounting table 4510 is located on the upper side of the pair of moving blocks 4520, and is placed for mounting on the upper side of the pair of moving blocks 4520 a tray T supporting the substrate S; a fixing member 4530 for connecting between the moving block 4520 and the substrate mounting table 4510; and a lifting driving portion 4540 disposed on the moving block 4520 and the substrate mounting table 4510 for the substrate mounting table 4510 Lifting.

The pair of moving blocks 4520 of the first substrate conveying portion 4500 include: a connecting member 4550 to be disposed on the upper side of the first rail 4400 in a direction extending corresponding to the first rail 4400, the extension length being shorter than the first rail 4400 for connecting between a pair of moving blocks 4520; and a horizontal moving member (not shown) for setting the connection between the connecting member 4550 and the first horizontal driving portion 4200, and along the first level The drive unit 4200 performs horizontal movement.

Of course, the connecting member 4550 and the first horizontal driving portion 4200 are not limited thereto, and various means capable of horizontally moving the moving block 4520 can be used.

The substrate mounting table 4510 of the first substrate transport unit 4500 is connected to the moving block 4520 by means of the elevation driving unit 4540 and the fixing member 4530 by means of plasma processing on the surface of the substrate S to cause the substrate S to be processed by the plasma processing machine 2000. Way to set. The substrate mounting table 4510 according to the embodiment is located on the upper side of the pair of moving blocks 4520, respectively.

Needless to say, the substrate mounting table 4510 is not limited to the above-described configuration and shape, and can be horizontally moved along the first rail 4400 by the moving block 4520, and various modifications can be made so that the substrate S is placed on the upper portion.

The elevation drive unit 4540 of the first substrate conveyance unit 4500 places the substrate on the substrate mounting table 4510, and lifts the substrate placement table 4510 in order to transfer the disposed substrate S to the substrate transfer portion 4600. The elevation drive portion 4540 according to an embodiment may be a combined structure of a cylinder and a piston.

The fixing member 4530 of the first substrate conveying portion 4500 functions as a guide for preventing the substrate mounting table 4510 from flowing to the left and right when the lifting/lowering driving unit 4540 is operated.

Of course, the elevation drive unit 4540 and the fixing member 4530 are not limited thereto, and various means capable of raising and lowering the substrate mounting table 4510 can be used.

The substrate transfer portion 4600 is disposed on the horizontal movement path of the first substrate transfer portion 4500, receives the plasma-treated substrate S, and provides temporary support. The substrate transfer portion 4600 includes a pair of support members 4610 that support the substrate S at the upper portion, and a fixing member 4620 that fixes the pair of support members 4610 to the upper portion of the table 1000, respectively. The pair of support members 4610 are respectively located outside the pair of first rails 4400, extend along the extending direction of the first rail 4400, and have a shorter length than the first rail 4400. At this time, the interval between the pair of supporting members 4610 is larger than the interval between the pair of substrate placing tables 4510 constituting the first substrate conveying portion 4500. That is, the support member 4610 of the substrate transfer portion 4600 is located on the opposite side than the substrate mounting table 4510 of the first substrate transport portion 4500.

The second substrate conveyor 5000 includes: a second horizontal driving portion 5200 extending from a region where the substrate S in which the coating process is completed is extended to a region between the plasma processing machines 2000; and a second power source 5300, and a second level The driving portion 5200 is connected and the second horizontal driving portion 5200 is operated; a pair of second rails 5400 are disposed in parallel along both sides of the second horizontal driving portion 5200; and the second substrate conveying portion 5500 is along the second The guide rail 5400 is transported; the third substrate transport unit 5800 is disposed in front of the second substrate transport unit 5500, and is disposed in connection with the second horizontal drive unit 5200 and the second guide rail 5400, and can be transported along the second guide rail 5400. a fixing strip 5700 for connecting the second substrate conveying portion 5500 and the third substrate conveying portion 5800, and a coating supporting portion 5600 for receiving the substrate S that completes the coating process from the second substrate conveying portion 5500 and providing support, and implementing the upper portion The substrate S coating step; the substrate lead-out portion 5900 is disposed in front of the coating conveyor 7000, and supports the substrate S having completed the coating to take the substrate S out.

The second horizontal driving portion 5200 is located in front of the plasma processing machine 2000 and extends from the coating conveyor 7000 to the substrate S lead-out area. Further, the second horizontal driving portion 5200 is located between the pair of second guide rails 5400 and extends in the direction in which the coating step is performed. The second horizontal driving portion 5200 according to the embodiment is a ball screw, and the second power source 5300 may be a motor that rotates the ball screw.

The pair of second rails 5400 are respectively spaced apart along both sides of the second horizontal driving portion 5200 and extend along the extending direction of the second horizontal driving portion 5200. The second rail 5400 according to the embodiment is, for example, a linear guide.

The substrate S is placed on the upper portion of the second substrate transport portion 5500, horizontally moved along the second rail 5400, and the substrate S is horizontally moved to the lower side of the ejection unit 3100. The second substrate conveying portion 5500 according to the embodiment has a structure similar to that of the aforementioned first substrate conveying portion 4500. That is, the second substrate transporting portion 5500 includes a pair of moving blocks 5520 that are respectively mounted on the upper portions of the pair of second rails 5400 and slid; the substrate mounting table 5510 is located on the upper side of the pair of moving blocks 5520, and is mounted for supporting the substrate. A tray T of S; a fixing member 5530 for connecting between the moving block 5520 and the substrate mounting table 5510; and a lifting drive portion 5540 disposed on the moving block 5520 and the substrate mounting table 5510 for lifting the substrate mounting table 5510.

The second substrate conveyance portion 5500 is connected to the third substrate conveyance portion 5800 via the fixing bar 5700, and is moved by the horizontal movement of the third substrate conveyance portion 5800.

The pair of moving blocks 5520 of the second substrate conveying portion 5500 includes a connecting member 5550 extending in a direction corresponding to the second rail 5400 on the upper side of the second rail 5400, the extending length being shorter than the second rail 5400 for connecting A pair of moving blocks 5520.

The connecting member 5550 includes a fixing strip 5700 that is coupled to the third substrate conveying portion 5800.

The connecting member 5550 and the fixing bar 5700 are not limited thereto, and various means capable of horizontally moving the moving block 5520 can be used.

The substrate mounting table 5510 of the second substrate transport unit 5500 is provided as a means for horizontally moving the substrate subjected to the plasma surface treatment to the coating machine 3000, and is connected to the moving block 5520 by the elevation driving unit 5540 and the fixing member 5530. . The substrate mounting table 5510 according to the embodiment is located on the upper side of the pair of moving blocks 5520, respectively.

Of course, the substrate mounting table 5510 is not limited to the above-described configuration and shape, and can be horizontally moved along the second rail 5400 by the moving block 5520, and various modifications can be made to place the substrate S on the upper portion.

The elevation drive unit 5540 of the second substrate conveyance unit 5500 places the substrate on the substrate mounting table 5510, and lifts the substrate placement table 5510 in order to transfer the disposed substrate S to the coating support portion 5600. The lift driving portion 5540 according to the embodiment may be a combined structure of a cylinder and a piston.

The fixing member 5530 of the second substrate conveying unit 5500 serves as a guide for preventing the substrate mounting table 5510 from flowing to the left and right when the lifting/lowering driving unit 5540 is operated.

Of course, the elevation drive unit 5540 and the fixing member 5530 are not limited thereto, and various means capable of raising and lowering the substrate mounting table 5510 can be used.

The coating support portion 5600 is disposed on the horizontal movement path of the second substrate conveying portion 5500 and the third substrate conveying portion 5800, receives the plasma-treated substrate S and provides temporary support. The coating support portion 5600 includes a pair of support members 5610 on which the substrate S is supported, and a fixing member 5620 that fixes the pair of support members 5610 to the upper portion of the table 1000, respectively. The pair of support members 5610 are respectively located outside the pair of second guide rails 5400, and extend along the extending direction of the second guide rail 5400, and have a shorter length than the second guide rail 5400. At this time, the interval between the pair of supporting members 5610 is larger than the interval between the pair of substrate placing tables 5510 constituting the second substrate conveying portion 5500. That is, the support member 5610 of the coating support portion 5600 is located on the opposite side than the substrate mounting table 5510 of the second substrate conveyance portion 5500.

The third substrate transporting portion 5800 moves along the second rail 5400 toward the lower side of the support member 5610 of the coating support portion 5600, and the substrate S supported on the coating support portion 5610 is placed on the upper portion, along the direction of the substrate lead portion 5900. Make horizontal movements. This third substrate conveying portion 5800 has the same structure as the first substrate conveying portion 4500. That is, the third substrate transfer portion 5800 includes a pair of moving blocks 5820 that are respectively mounted on the upper portions of the pair of second guide rails 5400 and slid; the substrate mounting table 5810 is located on the upper side of the pair of moving blocks 5820, and is mounted for supporting the substrate. A tray T of S; a fixing member 5830 for connecting between the moving block 5820 and the substrate mounting table 5810; and a lifting drive portion 5840 disposed on the moving block 5820 and the substrate mounting table 5810 for lifting the substrate mounting table 5810.

The pair of moving blocks 5820 of the third substrate transfer portion 5800 includes a connecting member 5850 extending in a direction corresponding to the second rail 5400 on the upper side of the second rail 5400, the extension length being shorter than the second rail 5400 for connection A pair of moving blocks 5820; and a horizontal moving member (not shown) are provided to connect the connecting member 5850 and the second horizontal driving portion 5200, and are horizontally arranged along the second horizontal driving portion 5200. mobile.

The connecting member 5850 includes a fixing strip 5700 that is coupled to the third substrate conveying portion 5800.

Of course, the connecting member 5850 and the fixing bar 5700 are not limited thereto, and various means capable of horizontally moving the moving block 5820 can be used.

The substrate mounting table 5810 of the third substrate transport unit 5800 is provided as a means for transporting the coated substrate, and is connected to the moving block 5820 by means of the elevation drive unit 5840 and the fixing member 5830. The substrate mounting tables 5810 according to the embodiment are respectively located on the upper side of the pair of moving blocks 5820.

Of course, the substrate mounting table 5810 is not limited to the above-described configuration and shape, and can be horizontally moved along the second rail 5400 by the moving block 5820, and various modifications can be made so that the substrate S is placed on the upper portion.

The elevation drive unit 5840 of the third substrate conveyance unit 5800 places the substrate S on the substrate placement table 5810, and lifts and lowers the substrate placement table 5810 in order to transfer the disposed substrate S to the substrate lead-out area. The lift drive portion 5840 of the embodiment may be a combined structure of a cylinder and a piston.

The fixing member 5830 of the third substrate conveying unit 5800 functions as a guide for preventing the substrate mounting table 5810 from flowing to the left and right when the lifting/lowering driving unit 5840 is operated.

Of course, the elevation drive unit 5840 and the fixing member 5830 are not limited thereto, and various means capable of raising and lowering the substrate mounting table 5810 can be used.

The substrate lead-out portion temporarily supports the substrate that is transported to the substrate lead-out region by the third substrate transport portion, and guides the substrate to the outside of the table. In addition, an oven may be provided outside the substrate lead-out portion, and the substrate taken out from the substrate lead-out portion may be placed in an oven to be dried. The substrate take-up portion includes: a pair of support members 5910 disposed side by side in the direction of both sides of the second guide rail 5400; a plurality of connecting strips 5920 each for connecting between the pair of support members 5910 to follow a pair of support members The extending direction of the 5910 is arranged to be spaced apart from each other; and a plurality of rollers 5930 are respectively mounted on the plurality of connecting bars 5920, and the tray is disposed at the upper portion.

Hereinafter, the operation of the coating apparatus according to the embodiment of the present invention will be described with reference to Figs. 1 to 13.

First, the substrate S on which the coating film is to be sprayed on the upper portion is placed on the tray T, and the tray T is placed on the plurality of rollers 4120 of the substrate introduction portion 4100. Then, the elevation drive unit 4540 of the first substrate conveyance unit 4500 is operated to raise the substrate mounting table 4510 so as to be positioned above the plurality of rollers 4120 of the substrate introduction portion 4100. Thereby, the tray T placed on the plurality of rollers 4120 of the substrate introduction portion 4100 is placed on the substrate mounting table 4510 of the first substrate conveyance portion 4500.

Then, the first horizontal drive unit 4400 is operated by the first power source 4300, and the first substrate transport unit 4500 is horizontally moved in the direction in which the coating process is performed. At this time, as shown in FIG. 11, the first substrate conveyance unit 4500 passes the lower side of the plasma processing machine 2000 and horizontally moves to the front of the plasma processing machine 2000 or the position of the substrate transfer portion 4600. More specifically, when the first horizontal driving portion 4200 is operated by the first power source 4300, the horizontal moving member connected to the connecting member 4550 of the first substrate conveying portion 4500 moves along the first horizontal driving portion 4200, thereby The moving block 4520 of the first substrate conveying portion 4500 moves with the first rail 4400. At this time, the first substrate conveying portion 4500 is horizontally moved so as to pass through the lower side of the plasma processing machine 2000, and is subjected to surface treatment by plasma released or radiated by the plasma processing machine 2000.

As described above, during the plasma treatment on the surface of one substrate S, first, the plasma-treated substrate S can be subjected to the coating process by the coater 3000 in a state where the substrate S is placed on the coating support portion 5600. Hereinafter, the coating process will be described in detail.

The substrate S that has been horizontally moved by the first substrate transport portion 4500 and has completed the plasma processing is in a state of being horizontally moved to the position of the substrate transfer portion 4600 located in front of the plasma processing machine 2000 as shown in FIG.

When the plasma treatment for the surface of one substrate S is finished, as shown in Fig. 12, the substrate S placed on the first substrate transport portion 4500 is placed in the substrate transfer portion 4600. Therefore, the substrate mounting table 4510 is lowered by the elevation driving portion 4540 of the first substrate conveying portion 4500 so as to be lower than the supporting member 4610 of the substrate transmitting portion 4600, and the substrate S is supported on the supporting member 4610 of the substrate transmitting portion 4600. .

Next, the second substrate transporting portion 5500 and the third substrate transporting portion 5800 are moved, and the substrate S placed on the substrate transmitting portion 4600 is moved, and as shown in FIG. 13, the substrate S is placed on the coating supporting portion 5600. The substrate S coated and placed on the coating support portion 5600 is placed on the substrate lead-out portion 5900. Therefore, as shown in Fig. 12, the second substrate transport unit 5500 and the third substrate transport unit 5800 are retracted, the second substrate transport unit 5500 is placed at the position of the substrate transfer unit 4600, and the third substrate transport unit 5800 is placed. The position of the coating support 5600. In order to operate the second substrate transfer unit 5500 and the third substrate transfer unit 5600, the second power source 5300 and the second horizontal drive unit 5200 are driven. Thereby, the horizontal moving member (not shown) connected to the connecting member 5850 of the third substrate conveying portion 5800 horizontally moves in the direction of the coating support portion 5600 along the second horizontal driving portion 5200. The moving block 5820 of the three-substrate conveying portion 5800 horizontally moves in the direction in which the coating support portion 5600 is located along the second rail 5400. Further, in the present invention, the third substrate conveying portion 5800 and the second substrate conveying portion 5500 are connected by the fixing bar 5700, and therefore, the force that the third substrate conveying portion 5800 is conveyed to the coating supporting portion 5600 passes through the fixing bar. 5700 is transmitted to the second substrate transfer unit 5500. Therefore, the second substrate transport portion 5500 horizontally moves toward the substrate transfer portion 4600 along the second rail 5400.

When the second substrate transporting portion 5500 is transported to the substrate transfer portion 4600 and the third substrate transport portion 5800 is transported to the coating support portion 5600, the substrate S is placed on the second substrate transport portion 5500 and the third substrate transport portion, respectively. 5800. For this reason, when the elevation driving portion 5540 of the second substrate conveying portion 5500 is operated and the substrate mounting table 5510 is positioned higher than the supporting member 4610 of the substrate transmitting portion 4600, the substrate S is placed on the substrate of the second substrate conveying portion 5500. Placed on the platform 5510. Further, when the elevation driving portion 5840 of the third substrate conveying portion 5800 is operated and the substrate mounting table 5810 is positioned higher than the supporting member 5610 of the coating supporting portion 5600, the substrate S is placed at the third substrate conveying portion 5800. The substrate is placed on the stage 5810.

Then, the second power source 5300 and the second horizontal drive unit 5200 are again operated in the reverse direction, the second substrate transport unit 5500 is horizontally moved to the position of the coating support portion 5600, and the third substrate transport unit 5800 is guided to the substrate lead-out portion. The position of the 5900 is moved horizontally. Thereafter, the second substrate mounting table 5510 and the substrate mounting table 5810 are lowered. As shown in FIG. 13, the substrate S of the second substrate mounting table 5110 is placed on the coating support portion 5600, and the substrate S of the third substrate mounting table 5810 is placed. It is placed on the substrate lead-out portion 5900. The substrate S placed on the substrate lead-out portion 5900 is moved outward by a plurality of rollers 5930 and then taken out. Further, the taken-out substrate S is moved to an oven located outside the table 1000 to be dried or naturally dried. Of course, the drying method is not limited thereto, and other ovens may be provided, and the coated substrate S can be dried in an oven after being conveyed to the oven by a human or other mechanism.

When the substrate S is placed on the coating support portion 5600, a coating agent is sprayed onto the surface of the substrate S by the coater 3000, for example, by spraying a fluorine-based coating agent for the anti-fingerprint film to form a coating film. More specifically, referring to Fig. 14, first, the ejecting unit 3100 is formed by ejecting a coating agent onto the surface of the substrate S while moving horizontally in the X-axis direction along the first coating guide rail 7100 of the coating conveyor 7000. Coating film. Thereafter, in order to convey the ejection unit 3100 to the next coating region, the ejection unit 3100 is moved along the second coating guide rail 7200 by a predetermined distance in the Y-axis direction. Then, the coating agent is sprayed onto the substrate S while moving horizontally along the first coating guide rail 7100 in the X-axis direction to form a coating film. That is, the spraying unit 3100 is horizontally moved along the first coating rail 7100 and the second coating rail 7200 to form a coating film, as shown in Fig. 14, the moving shape of the spraying unit 3100 can be in the shape of "ᄅ" Repeat.

The spraying unit has a plurality of nozzles 3120: 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c, as shown in FIGS. 6 and 8, the plural according to the first embodiment The nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c are disposed such that the position in the Y-axis direction or the position of the center (C) thereof is different. That is, the plurality of nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c constituting the first nozzle group to the fourth nozzle group 3121, 3122, 3123, 3124 are respectively on the Y axis. The positions of the directions or the positions of the centers (C) thereof are different, and are arranged in a zigzag shape so as to have mutually different positions. Therefore, when a plurality of nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c respectively discharge the coating agent and dotting to the substrate S, as shown in FIG. It is shown that the plurality of drop points D that are dispensed do not overlap.

Further, the coating unit 3100a, 3121b At this time, the plurality of nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, and 3124c are continuously sprayed with the dropping point D, and are further applied in a line shape extending in the X-axis direction. At this time, the coating lines sprayed by the respective nozzles 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c are sprayed by the third nozzle 3121c and the tenth nozzle 3124a. In addition to the coating line, the two coating lines are respectively overlapped in the Y-axis direction. Further, preferably, by spraying the ejection unit 3100 at a predetermined distance in the Y-axis direction, the coating line sprayed by the tenth nozzle 3124a newly formed along the X-axis direction and horizontally moved is along the X-axis. The coating lines sprayed by the third nozzle 3124a formed when the direction is moved once are overlapped, so that the coating lines sprayed by the third nozzles 3121c and the tenth nozzles 3124a are also overlapped with the two coating lines in the Y-axis direction. Thereby, when the ejection unit 3100 is moved once in the X-axis direction, a uniform coating film can be formed for one region, and the effect of improving the quality of the coating film can be obtained.

Drawing text

Figure 1:

3300: coating agent tank

3400: Gas tank

Figure 3:

3300: coating agent tank

3400: Gas tank

3300: coating agent tank

3300: coating agent tank

Figure 8:

Coating line overlap area

Figure 10:

Coating line overlap area

1000‧‧‧Workbench
2000‧‧‧plasma processor
3100‧‧‧Spray unit
3110‧‧‧Nozzle support
3111, 4530, 4620, 5530, 5620, 5830‧‧‧ fixed parts
3112‧‧‧Nozzle support parts
3120, 3121a, 3121b, 3121c, 3122a, 3122b, 3122c, 3123a, 3123b, 3123c, 3124a, 3124b, 3124c, 3125a, 3125b, 3125c, 3126a, 3126b, 3126c, 3127a, 3127b, 3127c, 3128a, 3128b, 3128c, 512‧‧‧ nozzle
3121, 3122, 3123, 3124, 3125, 3126, 3127, 3128‧‧‧ nozzle groups
3210‧‧‧Syringe body
3220‧‧‧ rod
3200‧‧‧Syringe pump
3300‧‧‧ Coating agent tank
3400‧‧‧ gas tank
3500, 3600‧‧‧ coating agent supply tube
3700‧‧‧ check valve
3710‧‧‧ Ontology
3711h‧‧‧flow entrance
3712h‧‧‧Export
3720‧‧‧Blocking parts
3730‧‧ Spring
3800‧‧‧ gas supply pipe
3900, MFC‧‧‧Flow Control Department
4000, 5000, 6000‧‧‧ substrate conveyor
4100‧‧‧Substrate introduction
4110, 4610, 5610, 5910‧‧‧ support parts
4120, 5930‧‧ ‧rollers
4200, 5200‧‧‧ horizontal drive department
4300, 5300‧‧‧ power source
4400, 5400‧‧‧ rails
4500, 5500, 5800‧‧‧ substrate transport department
4510, 5510, 5810‧‧‧ substrate mounting table
4520, 5520, 5820‧‧‧ moving blocks
4540, 5540, 5840‧‧‧ Lifting and driving department
4550, 5550, 5850‧‧‧ connecting parts
4600‧‧‧Substrate transfer department
5600‧‧‧Coated support
5700‧‧‧Fixed strip
5900‧‧‧Substrate lead-out
5920‧‧‧Connecting strip
7000‧‧‧Coating conveyor
7100, 7200‧‧‧ coated rail
7300‧‧‧Support
7400, 7500‧‧‧ coated moving blocks
A‧‧‧Overlapping area
B‧‧‧ separation distance
C‧‧‧ Center
D‧‧‧ drops
L1~L23‧‧‧ Coating line
S‧‧‧Substrate
T‧‧‧Tray
X‧‧‧X axis
Y‧‧‧Y axis

Fig. 1 is a schematic view showing a significant portion of a coating apparatus according to an embodiment of the present invention in a modular manner.

Fig. 2 is a perspective view showing a coating apparatus according to an embodiment of the present invention.

Fig. 3 is a schematic view showing a significant portion of a coater according to an embodiment of the present invention in a modular manner.

Fig. 4 is a cross-sectional view showing a check valve according to an embodiment of the present invention. Fig. 5 is a perspective view showing a spray unit according to an embodiment of the present invention.

For convenience of explanation, the drawings in which a plurality of second supply pipes and a plurality of gas supply pipes respectively connected to a plurality of nozzles are omitted are illustrated.

Fig. 6 is a plan view showing the arrangement structure of a plurality of nozzles according to the first embodiment of the present invention and the dropping points which are dotting from the plurality of nozzles to the substrate, respectively.

Fig. 7 is a plan view showing an arrangement structure of a plurality of nozzles according to a modification of the first embodiment and a dropping point which is dotting from the plurality of nozzles to the substrate.

Fig. 8 is a plan view showing a configuration of a plurality of nozzles according to a first embodiment of the present invention and a part of a coating line coated by a plurality of nozzles.

Fig. 9 is a plan view showing an arrangement structure of a plurality of nozzles and a dropping point which is dotting from a plurality of nozzles to a substrate according to a second embodiment of the present invention.

Fig. 10 is a plan view showing a configuration of a plurality of nozzles according to a second embodiment of the present invention and a part of a coating line coated by a plurality of nozzles.

11 to 13 are perspective views for explaining the operation of the coating apparatus according to the embodiment of the present invention.

Fig. 14 is a schematic view showing the horizontal movement of the ejection unit according to an embodiment of the present invention in a patterning manner.

Fig. 15 is a schematic view showing the overlapping of a plurality of conventional nozzle arrangement structures and dropping points by a plurality of nozzle arrangement structures.

2000‧‧‧plasma processor

3100‧‧‧Spray unit

3200‧‧‧Syringe pump

3300‧‧‧ Coating agent tank

3400‧‧‧ gas tank

3500‧‧‧First coating agent supply tube

3600‧‧‧Second coating agent supply tube

3700‧‧‧ check valve

3800‧‧‧ gas supply pipe

3900‧‧‧Flow Control Department

4400‧‧‧First rail

4500‧‧‧First substrate transport

4510‧‧‧Substrate placement table

4520‧‧‧moving block

5400‧‧‧Second rail

5500‧‧‧Second substrate conveying department

5510‧‧‧Substrate placement table

5520‧‧‧moving block

5530‧‧‧Fixed parts

MFC‧‧‧Flow Control Department

S‧‧‧Substrate

T‧‧‧Tray

Claims (25)

A coating apparatus comprising: a coating machine having a spraying unit provided with a plurality of nozzles for spraying a coating agent onto a substrate; and a coating conveyor for causing the coating machine to Horizontally moving in an X-axis and a Y-axis direction, the plurality of nozzles are arranged along the X-axis and the Y-axis direction, and are spaced apart from each other, and arranged along one of the X-axis and the Y-axis The positions of the plurality of nozzles in the other axial direction are different from each other. A coating device comprising: a substrate conveyor having a guide rail and a substrate conveying portion, the guide rail extending along a coating process for forming a coating film on a substrate, the substrate conveying portion The substrate is disposed on the upper portion and moves along the guide rail to the coating process; a plasma processing machine is disposed on the coating process to perform a directional path, and performs plasma surface treatment on the substrate; and a coating And spaced apart from the plasma processing machine in the path of the coating process, and having a spraying unit, the spraying unit is provided with a plurality of nozzles for spraying a coating agent onto the substrate, the substrate conveyor comprises: a substrate conveyor having a first guide rail and a first substrate conveying portion, the first guide rail extending from a region where the substrate on which the coating film is to be formed is introduced to a position where the injection unit is located, the first a substrate is disposed on an upper portion of the substrate conveying portion and is horizontally movable along the first rail; and a second substrate conveyor has a second rail and a substrate conveying portion that extends from a region where the substrate on which the coating film is drawn is directed to a position of the plasma processing machine, at least one of the substrate conveying portion is disposed on the substrate, and Horizontal movement along the second rail is possible. A coating apparatus comprising: a coating machine having a spraying unit, the spraying unit being provided with a plurality of nozzles for spraying a coating agent onto a substrate, the plurality of nozzles respectively along an X-axis and a The Y-axis directions are arranged and spaced apart from each other, and are disposed such that a coating line formed by the plurality of nozzles arranged along one of the X-axis and the Y-axis direction is disposed on the X-axis and the Y a coating line coated by at least one of the plurality of nozzles in the other axial direction of the axial direction is formed in an overlapping manner along an axial direction of the X-axis and the Y-axis direction, and along the X-axis and the Y The positions of the plurality of nozzles arranged in the other of the axial directions are different from each other along the one of the X-axis and the Y-axis direction. The coating device of claim 1, comprising: a substrate conveyor having a guide rail and a substrate conveying portion, the rail along a coating process for forming a coating film on the substrate Extending the direction, the substrate is disposed on the upper portion of the substrate transporting portion, and moves along the guide rail in the direction of the coating process; and a plasma processing machine is disposed on the directional path of the coating process, and The substrate is subjected to a plasma surface treatment, and the ejection unit is disposed on the path of the coating process from the plasma processing machine. The coating device of claim 4, wherein the coating device is disposed such that a plurality of nozzles are arranged by the plurality of nozzles arranged along one of the X-axis and the Y-axis direction a coating line coated by at least one of the plurality of nozzles in the other of the X-axis direction and the Y-axis direction is formed in an overlapping manner along an axial direction of the X-axis and the Y-axis direction, and is formed along the same The plurality of nozzles arranged in the other of the X-axis and the Y-axis direction are different from each other in the one-axis direction of the X-axis and the Y-axis direction. The coating device of claim 2, comprising: a coating conveyor for horizontally moving the coating machine along an X-axis and a Y-axis direction, the plurality of nozzles along the The X-axis and the Y-axis direction are arranged and spaced apart from each other, and the positions of the plurality of nozzles arranged along one of the X-axis and the Y-axis are different from each other in the other axial direction. The coating device of claim 6, wherein the coating device is disposed such that a plurality of nozzles are arranged by the plurality of nozzles arranged along one of the X-axis and the Y-axis direction a coating line coated by at least one of the plurality of nozzles in the other of the X-axis direction and the Y-axis direction is formed in an overlapping manner along an axial direction of the X-axis and the Y-axis direction, and is formed along the same The plurality of nozzles arranged in the other of the X-axis and the Y-axis direction are different from each other in the one-axis direction of the X-axis and the Y-axis direction. The coating device of claim 3, comprising: a coating conveyor for horizontally moving the coating machine along the X-axis and the Y-axis direction, wherein: The machine has a guide rail and a substrate conveying portion extending along a coating process for forming a coating film on the substrate, the substrate is disposed on the upper portion of the substrate conveying portion, and along the The guide rail moves in the direction of the coating process; and a plasma processing machine is disposed on the directional path of the coating process, and performs a plasma surface treatment on the substrate, wherein the coating machine performs the path on the coating process Plasma processor interval setting. The coating device according to any one of claims 1 to 8, wherein the coating device is configured to eject from the plurality of nozzles to dispense a plurality of the coating agents on the substrate, thereby The plurality of drop points formed are spaced apart from each other, and the positions of the plurality of nozzles arranged along the X-axis direction in the Y-axis direction are different from each other. The coating apparatus according to claim 9, wherein the spraying unit sprays the coating agent onto the substrate while horizontally moving along the X-axis direction, and the coating line is formed on the substrate. The coating line is formed by the plurality of dropping points respectively ejected from the plurality of nozzles and continuously dripped, and each formed in a manner extending along the X-axis direction, configured to be from the plurality of nozzles a portion of each of the coated coating lines is formed in an overlapping manner along at least one of the other coated coating lines of the plurality of nozzles spaced apart along the X-axis direction along the Y-axis direction. And the positions of the plurality of nozzles arranged along the X-axis direction in the Y-axis direction are different from each other. The coating device according to claim 10, wherein the plurality of nozzles arranged along the X-axis direction are disposed in such a manner that positions in the Y-axis direction are different from each other such that the coating line is along the same The overlap area in the Y-axis direction is 35% to 45%. The coating apparatus according to claim 11, wherein the center of one nozzle and the center of the other nozzle are disposed at mutually different positions in the X-axis direction and adjacent to each other along the Y-axis direction. The distance between the two is 1.3 to 1.7 times the overlap area. The coating device of claim 9, wherein the plurality of nozzle groups respectively have the plurality of nozzles arranged along the Y-axis direction and spaced apart, the plurality of nozzle groups along the X-axis The directions are arranged and spaced apart from each other, and the positions of the plurality of nozzle groups arranged along the X-axis direction are different from each other in the Y-axis direction. The coating device of claim 13, wherein the plurality of nozzle groups are arranged in a zigzag shape. The coating apparatus of claim 14, wherein the plurality of nozzle groups are disposed such that a space is disposed from one of the plurality of nozzle groups and respectively disposed along the X-axis direction A portion of the coating line coated by one of the plurality of nozzles of the plurality of nozzle groups overlaps each other along the Y-axis direction. The coating device according to any one of claims 2 to 4, wherein the substrate conveyor comprises: a first substrate conveyor having a first guide rail and a first a substrate transporting portion, the first guide rail is extended from a region where the substrate on which the coating film is to be formed is introduced to a position where the ejection unit is located, and the substrate is disposed at an upper portion of the first substrate transporting portion, and is capable of Horizontally moving along the first rail; and a second substrate conveyor having a second rail and at least one substrate transporting portion, the second rail being directed to the plasma from a region where the substrate forming the coating film is taken out The direction of the position of the processor extends, at least one of the upper portion of the substrate conveying portion is disposed with the substrate, and is horizontally movable along the second rail. The coating device of claim 16, wherein the first substrate transporting portion places the substrate introduced to form the coating film, thereby moving toward the plasma processing machine, the first The substrate conveyor includes: a first horizontal driving portion disposed in connection with the first substrate conveying portion, and a driving force for horizontally moving the first substrate conveying portion along the first guiding rail; and a first A power source is coupled to the first horizontal driving portion to rotate the first horizontal driving portion, and the first horizontal driving portion is a ball screw. The coating device of claim 17, wherein the first substrate conveying portion comprises: a moving block disposed to be respectively mounted on the first rail, and capable of being horizontal along the first rail Moving; a substrate mounting table mounted on the upper side of the moving block, the substrate is placed on the upper portion; and a lifting drive portion connected to the substrate mounting table to raise and lower the substrate mounting table. The coating apparatus according to claim 18, wherein the substrate mounting table is lifted in a substrate introduction region of the substrate for forming the coating film, and the lifting and lowering driving portion is used for lifting and lowering The substrate introduced into the substrate lead-in area is placed on the substrate mounting table. The coating device of claim 19, comprising: a substrate transfer portion disposed on a horizontal movement path of the first substrate transport portion, and the substrate transport portion for the second substrate conveyor The substrate is transferred to support the substrate moving from the first substrate conveying portion; and a coating support portion is disposed on the moving path of the second substrate conveyor, and the substrate is disposed on the upper portion to perform the coating process. The coating device of claim 20, wherein the second substrate conveyor comprises: a second substrate conveying portion, the substrate supported on the substrate transmitting portion is disposed to be sprayed thereto Moving in a direction of the unit; a third substrate conveying portion disposed on the second rail in front of the second substrate conveying portion and horizontally moving along the second rail to be supported and supported on the coating supporting portion The substrate is moved to a substrate lead-out area; a fixing strip is disposed to connect between the second substrate transport portion and the third substrate transport portion; a second horizontal driving portion, and the second Providing a connection between the substrate transporting portion and the third substrate transporting portion to provide a driving force capable of horizontally moving the second substrate transporting portion and the third substrate transporting portion along the second rail; and The second power source is connected to the second horizontal driving unit to rotate the second horizontal driving unit, and the second horizontal driving unit is a ball screw. The coating device of claim 21, wherein the second substrate conveying portion and the third substrate conveying portion comprise: a moving block disposed to be respectively mounted on the second rail, and capable of being along The second guide rail is horizontally moved; a substrate mounting table is mounted on the upper side of the moving block, the substrate is placed on the upper portion; and a lifting drive portion is connected to the substrate mounting table to cause the substrate mounting table to be lifted and lowered . The coating device of claim 22, wherein the lower substrate is supported on the substrate transfer portion, and the second substrate is supported by the elevation drive portion of the second substrate transfer portion The substrate mounting table of the conveying portion is raised and lowered to position the substrate supported on the substrate transmitting portion on the substrate mounting table of the second substrate conveying portion, and the lower side of the substrate supported on the coating supporting portion And the substrate mounting table of the third substrate conveying portion is lifted and lowered by the lifting and lowering driving portion of the third substrate conveying portion, so that the substrate supported by the coating supporting portion is disposed on the third substrate conveying portion The substrate is placed on the stage. The coating device of claim 20, wherein the coating conveyor comprises: a first guiding member located on an upper side of the coating support portion and causing the spraying unit to perform along the X-axis direction Moving horizontally; and a second guiding member connected to both ends of the first guiding member and extending in the Y-axis direction to horizontally move the first guiding member and the spraying unit along the Y-axis direction . The coating device of claim 9, wherein the plurality of nozzles respectively comprise: a coating agent supply tube connected to a syringe pump that supplies the coating agent from a coating agent tank; a gas supply pipe connected to a flow control unit that supplies a gas from a gas tank; and a check valve having a blocking member and a spring, the blocking member being supplied to the plurality of nozzles and the coating agent Between the tubes is used to block the return of the coating agent or the gas, the spring being connected to the blocking member.