KR101110020B1 - Apparatus for cleaning nozzle and paste dispenser having the same - Google Patents

Abstract

The present invention provides a nozzle cleaning apparatus capable of automatically cleaning a nozzle provided in a paste dispenser for applying paste onto a substrate, a liquid crystal coating apparatus for applying liquid crystal onto a substrate, or the like. Since the nozzle cleaning apparatus according to the present invention can automatically perform the process of cleaning the nozzle, there is an effect that can improve the efficiency of the process.

Nozzle, Cleaning, Cleaning Liquid

Description

Paste Dispenser with Nozzle Cleaner and Nozzle Cleaner {APPARATUS FOR CLEANING NOZZLE AND PASTE DISPENSER HAVING THE SAME}

The present invention relates to a paste dispenser equipped with a nozzle cleaner and a nozzle cleaner for automatically cleaning the nozzle.

In general, a flat panel display (FPD) is an image display device that is thinner and lighter than a television or a monitor employing a CRT. As flat panel displays, Liquid Crystal Display (LCD), Plasma Display Panel (PDP), Field Emission Display (FED), Organic Light Emitting Diodes (OLED), etc. It is used.

Among them, the liquid crystal display is a display device in which a desired image is displayed by individually supplying data signals according to image information to liquid crystal cells arranged in a matrix to adjust light transmittance of the liquid crystal cells. Liquid crystal displays are widely used because of their thinness, light weight, low power consumption and low operating voltage. The manufacturing method of the liquid crystal panel generally employed in such a liquid crystal display will be described as an example.

First, a color filter and a common electrode are formed on an upper glass substrate, and a thin film transistor (TFT) and a pixel electrode are formed on a lower glass substrate facing the upper glass substrate. Subsequently, after the alignment films are applied to the substrates, the alignment films are rubbed to provide a pretilt angle and an orientation direction to the liquid crystal molecules in the liquid crystal layer to be formed therebetween.

Then, paste is applied to a substrate in a predetermined pattern to form a paste pattern so as to maintain a gap between the substrates and to prevent leakage of liquid crystal to the outside and to seal the substrates, and then form a paste pattern between the substrates. After the liquid crystal layer is formed, a liquid crystal panel is manufactured.

In the manufacture of such a liquid crystal panel, a device called a paste dispenser is used to form a paste pattern on a substrate. The paste dispenser includes a stage on which a substrate is mounted, a head unit equipped with a nozzle through which paste is discharged, and a head support for supporting the head unit.

This paste dispenser forms a paste pattern from the nozzle to the substrate while varying the relative position between each nozzle and the substrate. That is, the paste dispenser moves the nozzles mounted on each head unit in the Z-axis direction up and down to control the gap between the nozzle and the substrate while controlling the nozzle and / or the substrate in the X-axis direction and the Y-axis direction. It moves horizontally and discharges a paste from a nozzle on a board | substrate to form a paste pattern.

In the process of discharging the paste from the nozzle to form a paste pattern on the substrate, the paste may be attached to the periphery of the discharge port of the nozzle. When the paste is attached to the periphery of the nozzle, the discharge port of the nozzle is blocked. There may be a problem that the ejection of the paste does not proceed smoothly. Therefore, in the process of forming the paste pattern on the substrate, it is necessary to check whether the paste is attached around the discharge port of the nozzle and to remove the pasted paste.

However, in the conventional case, when the paste is attached to the nozzle after the operator checks the nozzle with the naked eye, if the paste is attached to the nozzle, the operator manually removes the paste attached to the nozzle by manually cleaning the nozzle. In order to clean the nozzle, it takes a long time, and thus, there is a problem that the efficiency of the process is lowered.

The present invention is to solve the above problems of the prior art, the present invention provides a paste dispenser having a nozzle cleaning device and a nozzle cleaning device that can improve the efficiency of the process by performing the cleaning of the nozzle automatically There is.

The nozzle cleaning apparatus according to the present invention for achieving the above object, the cleaning member is installed in a position that can be in contact with the nozzle, a rotating unit for rotating the cleaning member, a cleaning liquid supply unit for supplying a cleaning liquid to the cleaning member And, it may be configured to include a gas injection unit for injecting gas toward the nozzle passing through the cleaning member.

In addition, the nozzle cleaning apparatus according to the present invention, the cleaning liquid containing portion having an opening that opens upwards, the cleaning liquid is accommodated therein and has an accommodation space into which the nozzle is inserted, and is installed adjacent to the cleaning liquid containing portion, the cleaning liquid containing portion It may be configured to include an ultrasonic cleaning unit consisting of an ultrasonic generator for generating ultrasonic vibration in the cleaning liquid contained in the.

Here, the nozzle cleaning apparatus according to the present invention is preferably configured to further include an imaging unit for imaging the discharge port of the nozzle. The image pickup unit includes a casing having an open portion to which the image pickup unit is opened upward, a light transmitting member provided in the opening portion of the casing, and made of a transparent material, a camera installed inside the casing, and supporting the camera. And it may be configured to include a support for moving the camera in the vertical direction, left and right direction and / or front and rear direction.

In addition, the nozzle cleaning apparatus according to the present invention preferably includes a guide unit for guiding the nozzle to align the nozzle with the nozzle cleaning apparatus. The guide unit may be configured to include a reference mark formed on the nozzle cleaning device to be picked up by a position recognition camera installed adjacent to the nozzle. In addition, the guide unit may be configured to include a light receiving sensor for receiving a laser light emitted from the light emitting portion of the laser displacement sensor installed adjacent to the nozzle.

The rotating unit for rotating the cleaning member is disposed adjacent to the drive motor, the drive shaft connected to the drive motor, the first magnet installed on the drive shaft, the first magnet of the drive shaft and when the first magnet is rotated It may be configured to include a second magnet is rotated by the generated magnetic force, and the driven shaft is installed and the second magnet is connected to the cleaning member. By this configuration, the drive motor, the drive shaft and the first magnet may be disposed in the first housing, the second magnet and the driven shaft may be disposed in a second housing partitioned from the first housing. .

The ultrasonic cleaning unit includes a gas supply unit for injecting gas to the opening side of the cleaning liquid accommodating part, a sensing unit installed at one side of the cleaning liquid accommodating part, and detecting whether the nozzle is inserted into the cleaning liquid accommodating part, and accommodated in the cleaning liquid accommodating part. It may be configured to further include a cleaning liquid circulation for circulating the cleaning liquid.

Meanwhile, the paste dispenser according to the present invention includes a stage on which a substrate is mounted, a head unit on which a nozzle for discharging paste is mounted, a head support on which the head unit is movable, and the nozzle are accessible. It may be configured to include a nozzle cleaning device disposed in position to clean the nozzle.

Here, the nozzle cleaning apparatus may be configured to include a cleaning unit for cleaning the nozzle using a cleaning liquid, and an imaging unit for imaging the nozzle to measure whether the paste is attached to the nozzle.

In addition, the cleaning unit may be configured to include a pair of cleaning members that rotate in opposite directions to each other.

In addition, the cleaning unit may be provided with an ultrasonic generator for generating ultrasonic vibration in the cleaning liquid.

The nozzle cleaning apparatus and paste dispenser having the same according to the present invention can automatically perform a process of measuring whether the paste is attached to the nozzle, cleaning the nozzle, and checking whether the paste has been completely removed from the nozzle. There is an effect to improve the efficiency of.

Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the nozzle cleaning apparatus of the paste dispenser according to the present invention.

1 to 4, the paste dispenser according to an embodiment of the present invention includes a frame 10, a stage 20 installed on the frame 10 and a substrate S mounted thereon, Both ends are supported on a pair of support movement guides 30 installed on both sides of the stage and extending in the Y-axis direction, and a pair of support movement guides 30 are installed on the stage 20 and are installed in the X-axis direction. An extended head support 40, a head unit 50 installed on the head support 40 so as to be movable in the X-axis direction, and equipped with a nozzle 53 and a laser displacement sensor 54 for discharging paste; And a control unit (not shown) for controlling the operation of applying the paste and the operation of the nozzle cleaning device 60 to clean the nozzle 53.

On the frame 10, an X-axis moving device 21 for moving the stage 20 in the X-axis direction may be installed, and a Y-axis moving device 22 for moving the stage 20 in the Y-axis direction is installed. Can be. That is, the Y-axis guide 221 of the Y-axis moving device 22 is installed on the frame 10, and the X-axis guide 211 of the X-axis moving device 21 is installed above the Y-axis moving device 22. The stage 20 may be seated on the X-axis guide 211. By such a configuration, the stage 20 may be guided by the X-axis guide 211 and moved in the X-axis direction, and the X-axis guide 211 is guided and moved by the Y-axis guide 221 to the Y-axis. Can be moved in a direction. On the other hand, the present invention is not limited to the configuration that the Y-axis guide 221 is installed on the upper portion of the frame 10 and the X-axis guide 211 is seated on the upper portion of the Y-axis guide 221, the frame 10 The X-axis guide 211 is installed on the upper portion and the configuration that the Y-axis guide 221 is seated on the upper portion of the X-axis guide 211 may be applied. Of course, only one of the X-axis moving device 21 and the X-axis guide 211 and the Y-axis moving device 22 and the Y-axis guide 221 is applied, so that the stage is in the X-axis direction and the Y-axis direction. A configuration that moves only in either direction can be applied.

Both ends of the head support 40 may be installed with a support for moving the support 41 is connected to the support guide movement guide (30). By the interaction of the support movement guide 30 and the support movement device 41, the head support 40 can be moved in the longitudinal direction of the support movement guide 30, that is, the Y-axis direction. Accordingly, the head unit 50 may be moved in the Y-axis direction by the movement of the head support 40 in the Y-axis direction.

The head support guide 40 may be installed in the head support 40 in the X-axis direction, and the head mover 51 may be connected to the head support guide 42 of the head support 40 in the head unit 50. ) Can be installed. By the interaction of the head moving guide 42 and the head moving device 51, the head unit 50 can be moved in the longitudinal direction of the head support 40, that is, the X axis direction.

As shown in FIG. 2, the head unit 50 is disposed adjacent to the syringe 52 in which the paste is filled, the nozzle 53 in communication with the syringe 52, and the paste is discharged. Laser displacement sensor 54 for measuring gap data between the nozzle 53 and the substrate S, and a Y-axis driving portion 55 for moving the nozzle 53 and the laser displacement sensor 54 in the Y-axis direction. , Z-axis driving unit 56 for moving the nozzle 53 and the laser displacement sensor 54 in the Z-axis direction can be configured.

The laser displacement sensor 54 is composed of a light emitting unit 541 for emitting a laser, and a light receiving unit 542 spaced apart from the light emitting unit 541 at a predetermined interval and receiving a laser beam reflected from the substrate S. An electric signal corresponding to an imaging position of a laser emitted from the unit 541 and reflected on the substrate S is output to the controller to measure gap data between the substrate S and the nozzle 53.

In addition, the head unit 50 may be provided with a cross-sectional area sensor 57 for measuring the cross-sectional area of the paste pattern (P) applied to the substrate (S). The cross-sectional area sensor 57 measures the cross-sectional area of the paste pattern P by continuously emitting a laser to the substrate S and scanning the paste pattern P. FIG. Data on the cross-sectional area of the paste pattern P measured by the cross-sectional area sensor 57 may be used to determine whether the paste pattern P is defective.

In addition, the head unit 50 may be provided with a position recognition camera 58 in a portion adjacent to the nozzle 53. When the nozzle 53 is moved by the movement of the head support 40 in the Y-axis direction and the movement of the head unit 50 in the X-axis direction, this position recognition camera 58 causes the It can be used to measure position.

On the other hand, the head unit 50 is connected to the nozzle 53 or the laser displacement sensor 54, at least one of the X-axis direction, Y-axis direction and Z-axis direction of the nozzle 53 and the laser displacement sensor 54 The configuration to adjust the relative position to the can be applied. By this structure, the installation position of the discharge port 531 of the nozzle 53 or the installation position of the laser displacement sensor 54 can be changed automatically.

The nozzle cleaner 60 may be detachably installed in the paste dispenser. As shown in FIG. 1, the nozzle cleaning device 60 may be installed on the stage 60, and as illustrated in FIG. 3, on the X-axis moving apparatus 21 for moving the stage 20. It may be installed in, and may be installed on the frame 10, as shown in FIG. In this way, in the X-axis or Y-axis direction of the head unit 50 or in the X-axis or Y-axis direction of the stage 20 with respect to the installation position of the nozzle cleaning device 60 to the paste dispenser. As a result, if the head unit 50 is within a range accessible by the nozzle cleaning device 60, the installation position of the nozzle cleaning device 60 to the paste dispenser is not limited. Of course, a separate moving mechanism may be installed in the nozzle cleaner 60, and the nozzle cleaner 60 may be moved to approach the head unit 50.

As shown in FIGS. 5 to 7, the nozzle cleaning device 60 rotates the pair of cleaning members 61 and the cleaning member 61 which are installed at positions where the nozzle 53 is in contact with the nozzle 53. A unit 62, a cleaning liquid supply unit 63 for supplying a cleaning liquid to the cleaning member 61, a gas injection unit 64 for injecting gas toward the nozzle 53 passing through the cleaning member 61, An imaging unit 65 for imaging the nozzle 53, a guide unit 66 for guiding the nozzle 53 to the cleaning member 61 to align the nozzle 53 with the cleaning member 61, and a cleaning member. It may be configured to include a paste removing member 67 is installed on one side of the 61 to remove the paste attached to the cleaning member (61).

The pair of cleaning members 61 may be composed of a cylindrical sponge or a brush formed to have a cylindrical shape. In the exemplary embodiment of the present invention, a configuration in which the pair of cleaning members 61 rotate about each Z axis is described, but the present invention is not limited to such a configuration, and only one cleaning member 61 is provided. Alternatively, the configuration in which the cleaning member 61 rotates about the X axis or the Y axis may be applied.

6 and 7, the rotation unit 62 includes a drive motor 621 accommodated in the housing 100, a drive shaft 622 connected to the drive motor 621 and rotated, A driven shaft 623 connected to the drive shaft 622 and serving as a center of rotation of one of the cleaning members 61a of the pair of cleaning members 61, and connected to the driven shaft 623, It may be configured to include a connecting shaft 624 is rotated in a direction opposite to the rotation direction and is the center of rotation of the other of the cleaning member 61b of the pair of cleaning members 61.

The drive shaft 622 and the driven shaft 623 may be connected via a power transmission mechanism such as a gear, but are preferably connected by a plurality of magnets 622a and 623a. That is, a first magnet 622a may be installed at an end of the drive shaft 622, and an end of the driven shaft 623 opposite to the drive shaft 622, that is, at a position adjacent to the first magnet 622a may be formed. Two magnets 623a may be installed. In this configuration, when the first magnet 622a installed on the drive shaft 622 is rotated, the second magnet 623a is formed by a magnetic force generated between the first magnet 622a and the second magnet 623a. The driven shaft 623 may be rotated by the rotation of the second magnet 623a. As such, since the drive shaft 622 and the driven shaft 623 are not directly mechanically connected, the space in which the drive shaft 622 is disposed and the space in which the driven shaft 623 is disposed may be divided. That is, the housing 100 may be partitioned into the first housing 101 and the second housing 102 by the partition wall 103, and the driving motor 621 and the driving shaft 622 in the first housing 101. ) May be disposed, and a driven shaft 623 may be disposed in the second housing 102. Therefore, since the paste or cleaning liquid removed by the cleaning member 61 can be prevented from flowing into the first housing 101, the driving motor 621 can be protected from the cleaning liquid or the paste contained in the cleaning liquid. .

In addition, the driven shaft 623 and the connecting shaft 624 may also be directly connected mechanically through a power transmission mechanism such as a gear, but may be connected through a magnet, such as the connection of the driving shaft 622 and the driven shaft 623. . That is, a third magnet 623b may be installed on the driven shaft 623, a fourth magnet 624b may be installed on the connecting shaft 624, and a third magnet 623b and a fourth magnet 624b. Rotation force of the driven shaft 623 may be transmitted to the connecting shaft 624 by the magnetic force of the). Such a configuration can smoothly transmit the rotational force even when a paste or a cleaning liquid exists between the driven shaft 623 and the connecting shaft 624.

Meanwhile, drain holes 102a and 102b may be formed in the second housing 102, and the cleaning liquid in the second housing 102 and the paste included in the cleaning liquid are discharged through the drain holes 102a and 102b. You can.

The cleaning liquid supply unit 63 includes a cleaning liquid supply source 631 provided adjacent to the nozzle cleaning device 60, a cleaning liquid nozzle 632 provided toward the cleaning member 61, a cleaning liquid supply source 631, and a cleaning liquid nozzle. It may be configured to include a cleaning liquid flow path 633 connecting the 632. By such a configuration, the cleaning solution supply source 631 is operated together with the rotation of the cleaning member 61 so that the cleaning solution can be supplied from the cleaning solution nozzle 632 to the cleaning member 61. The cleaning liquid is a component capable of dissolving the paste, and may be, for example, acetone.

The gas injection unit 64 includes a gas supply source 641 provided adjacent to the nozzle cleaning device 60, a gas injection nozzle 642 provided toward a position adjacent to the cleaning member 61, and a gas supply source 641. ) And a gas flow path 643 connecting the gas injection nozzle 642. By this configuration, when the nozzle 53 passes through the cleaning member 61, the gas supply source 641 is operated to inject gas from the gas injection nozzle 642 toward the nozzle 53. The cleaning liquid that may be attached to the nozzle 53 may be dried, and a fine size paste that may be attached to the nozzle 53 may be removed from the nozzle 53.

The imaging unit 65 includes a casing 652 having an opening 651 disposed adjacent to the housing 100 and opened upward, and provided at the opening 651 of the casing 652 and made of a transparent material. It may be configured to include a light transmitting member 653, a camera 654 installed in the casing 652, and a support 655 for supporting the camera 654. Such an imaging unit 65 may be used in the case where the nozzle 53 is located above the glass 653 to image the discharge port of the nozzle 53 to measure whether the paste is attached to the nozzle 53. The imaging unit 65 may be used when measuring whether the cleaning of the nozzle 53 is necessary before the cleaning of the nozzle 53, and measuring whether the nozzle 53 is properly cleaned after the cleaning of the nozzle 53. Can be used when On the other hand, the support 655 supporting the camera 654 may be installed in a structure that can be linearly moved in the vertical direction, left and right direction and / or front and rear direction, the camera 654 by the movement of the support 655 It can be linearly moved in the vertical direction, left and right direction and / or front and rear direction. By the support 655, the nozzle 53 and the camera 654 may be aligned with each other.

The guide unit 66 may be configured to include a light receiving sensor 661 installed at a portion adjacent to the cleaning member 61 and / or the imaging unit 65. The light receiving sensor 661 receives the laser light emitted from the light emitting unit 541 of the laser displacement sensor 54 to generate a nozzle based on a predetermined distance between the nozzle 53 and the laser displacement sensor 54. It serves to guide the nozzle 53 so that 53 is accurately positioned between the pair of cleaning members 61.

In addition, the guide unit 66 may include a reference mark 662 formed on a portion adjacent to the cleaning member 61 or the imaging unit 65. The reference mark 662 may be photographed by the position recognition camera 58 mounted on the head unit 50, and the control unit may be an image photographed by the position recognition camera 58, and a preset nozzle 53 and a position. The nozzle 53 guides the nozzle 53 so that the nozzle 53 can be accurately positioned between the pair of cleaning members 61 based on the distance between the recognition cameras 58.

Here, the guide unit 66 may be configured to include at least one of the light receiving sensor 661 or the reference mark 662. The guide unit 66 serves to align the nozzle 53 and the cleaning member 61 so that the nozzle 53 can be accurately moved between the pair of cleaning members 61 without colliding with other components. do.

The paste removing member 67 is provided on one side of the cleaning member 61 and is formed in a plate shape in which one end thereof is in contact with the cleaning member 61. The paste removing member 67 is removed from the nozzle 53 to remove the paste attached to the cleaning member 61 from the cleaning member 61.

Hereinafter, the operation of the nozzle cleaning device 60 of the paste dispenser according to the embodiment of the present invention configured as described above will be described.

In the process of applying the paste onto the substrate S, the paste may be attached to the discharge hole of the nozzle 53 and its surroundings. In order to remove the paste, the controller measures whether the paste is attached to the nozzle 53 at regular intervals. When the paste is attached to the nozzle 53, the nozzle cleaning device 60 is used to clean the nozzle 53. Here, before cleaning the nozzle 53, whether or not the paste is attached to the nozzle 53 can be measured in advance, but without going through the process of measuring in advance whether the paste is attached to the nozzle 53, at a predetermined cycle The nozzle 53 may be moved to the nozzle cleaner 60 to immediately clean the nozzle 53. In addition, the cleaning operation of the nozzle 53 may be performed at a predetermined time point, for example, before or after the substrate S is loaded into the paste dispenser, and the substrate S loaded into the paste dispenser. It can be carried out from time to time during the process of applying the paste on.

First, the process of measuring whether the paste is attached to the nozzle 53 using the nozzle cleaning device 60 will be described below.

In order to measure whether the paste is attached to the nozzle 53, the controller moves at least one of the head unit 50 and the nozzle cleaner 60 so that the nozzle 53 is the imaging unit 65 of the nozzle cleaner 60. Adjacent to). At this time, the support for moving the head unit (41) and the head moving device 51 for the movement of the head unit 50 can be operated, the nozzle cleaning device (60) to the stage 20 or the X-axis moving device 21 When installed, the X-axis moving device 21 or the Y-axis moving device 22 may be operated to move the nozzle cleaning device 60.

Then, the operation of aligning the nozzle 53 and the camera 654 of the imaging device 65 with each other is performed.

At this time, when the light receiving sensor 661 is provided in the nozzle cleaning device 60 as the guide unit 66, the laser light emitted from the light emitting unit 541 of the laser displacement sensor 54 mounted on the head unit 50. Detects the position received by the light receiving sensor 661 provided in the nozzle cleaning device 60, the light receiving position detected by the light receiving sensor 661 and the light emitting unit 541 and the nozzle of the preset laser displacement sensor 54 If the nozzle 53 is moved to a position aligned with the camera 654 based on the distance between the 53 and the nozzle 53 is not moved to a position aligned with the camera 654, By moving the head unit 50 to adjust the position of the nozzle 53 and the laser displacement sensor 54, the nozzle 53 and the camera 654 can be aligned with each other.

In addition, when the nozzle cleaning device 60 is provided with the reference mark 662 as the guide unit 66, the reference mark 662 is captured by the position recognition camera 58 mounted on the head unit 50. It is measured whether the center of the reference mark 662 that is taken coincides with the imaging center of the position recognition camera 58, and if the center of the captured reference mark 662 does not coincide with the imaging center, the head unit 50 is moved. The nozzle 53 and the camera 654 may be aligned with each other by a process of making the center of the captured reference mark 662 coincide with the image center.

In the process of aligning the nozzle 53 and the camera 654 with each other, the support 655 supporting the camera 654 is operated to finely align the nozzle 53 and the camera 654 to operate the camera 654. Can be moved in the up-down direction, left-right direction and / or front-back direction.

In addition, while the nozzle 53 and the camera 654 are aligned with each other, the Z-axis driving unit 56 of the head unit 50 may operate to displace the nozzle 53 in the vertical direction.

When the nozzle 53 and the camera 654 are aligned with each other through the above-described process, the camera 654 captures the discharge port of the nozzle 53, and the controller controls the nozzle 53 through the captured image. It is determined whether the paste is attached.

Then, when the control unit measures that the paste is attached to the nozzle 53 through the above process, or the process of cleaning the nozzle 53 at a predetermined time point during the process of applying the paste will be described as follows. same.

For the cleaning of the nozzle 53, first, the nozzle 53 is moved to a position aligned with the cleaning member 61 of the nozzle cleaning device 60.

At this time, when the light receiving sensor 661 is provided in the nozzle cleaning device 60 as the guide unit 66, the laser emitted from the light emitting unit 541 of the laser displacement sensor 54 mounted to the head unit 50. Detects the position received by the light receiving sensor 661 provided in the nozzle cleaning device 60, and measures whether the nozzle 53 is moved to a position aligned with the cleaning member 61, and the head unit 50 ), The nozzle 53 may be moved to a position aligned with the cleaning member 61.

In addition, when the nozzle cleaning device 60 is provided with the reference mark 662 as the guide unit 66, the reference mark 662 is captured by the position recognition camera 58 mounted on the head unit 50. While measuring whether the center of the reference mark 662 is matched with the imaging center of the position recognition camera 58, the nozzle (through the process of moving the head unit 50 so that the center of the reference mark 662 coincides with the imaging center) 53) can be moved to the position aligned with the cleaning member (61).

In addition, in the process of moving the nozzle 53 to the position aligned with the cleaning member 61, the Z-axis driving portion 56 of the head unit 50 is operated to displace the nozzle 53 in the vertical direction.

When the nozzle 53 is moved to the position aligned with the cleaning member 61 through the above-described process, the pair of cleaning members 61 rotate while the rotary unit 62 is operated, At the same time or sequentially, the cleaning liquid is supplied to the cleaning member 61 by the cleaning liquid supply unit 63.

Then, as the head unit 50 moves, the paste attached to the nozzle 53 while the nozzle 53 passes through the pair of cleaning members 61 is not affected by the chemical properties of the cleaning liquid and the rotation of the cleaning member 61. Is removed from the nozzle 53 by physical operation. In this case, the nozzle 53 may pass repeatedly between the pair of cleaning members 61.

When the nozzle 53 passes between the pair of cleaning members 61, gas is injected toward the nozzle 53 from the gas injection nozzle 642 of the gas injection unit 64, whereby the nozzle ( The cleaning liquid that can be attached to 53 can be dried, and a fine sized paste that can be attached to the nozzle 53 can be removed from the nozzle 53.

As described above, when the process of passing the nozzle 53 through the cleaning member 61 and the gas injection nozzle 642 is completed, the head unit 50 moves so that the nozzle 53 moves the paste onto the substrate S. It can be returned to the application stand-by position before application. In addition, the process of measuring whether the paste attached to the nozzle 53 is completely removed before the nozzle 53 returns to the application standby position can be performed.

In order to measure whether the paste attached to the nozzle 53 has been completely removed, the nozzle 53 is moved to a position aligned with the camera 654 of the imaging device 65. The above-described process may be performed to align the nozzle 53 and the camera 654.

As such, when the nozzle 53 and the camera 654 are aligned with each other, the controller photographs the nozzle 53, and analyzes the photographed image to analyze the captured image, and when the paste is not present in the nozzle 53, the head unit 50. To return the nozzle 53 to the application stand-by position.

However, if the paste is present in the nozzle 53 measured from the captured image, the nozzle 53 is moved to the cleaning member 61 to clean the nozzle 53 again, and the paste is applied to the nozzle 53. The process of measuring again whether is attached may be performed repeatedly.

The nozzle cleaning apparatus 60 and the paste dispenser having the same according to the embodiment of the present invention as described above measure whether the paste is attached to the nozzle 53, clean the nozzle 53, and the nozzle 53. The process of checking whether the paste has been completely removed from can be performed automatically. Therefore, compared with the conventional case where the operator checks the nozzle 53 and manually cleans the nozzle 53, the efficiency of the process can be significantly improved.

Hereinafter, the nozzle cleaning device 60 according to another embodiment of the present invention will be described with reference to FIGS. 8 and 9. The same parts as the parts described in the above-described embodiments of the present invention are denoted by the same reference numerals and detailed description thereof will be omitted.

8 and 9, the nozzle cleaning device according to another embodiment of the present invention, the cleaning member 61 and the cleaning member (60) in the nozzle cleaning device 60 in one embodiment of the present invention described above Omitting 61), the ultrasonic cleaning unit 70 may be provided.

As shown in FIG. 9, the ultrasonic cleaning unit 70 includes a cleaning liquid accommodating part having an opening 711 opening upward and a nozzle 53 inserted therein and an accommodation space 712 for accommodating the cleaning liquid. 71, the ultrasonic wave generator 72 which is provided around the cleaning liquid containing portion 71 and generates ultrasonic vibration in the cleaning liquid contained in the cleaning liquid containing portion 71, and the cleaning liquid contained in the cleaning liquid containing portion 71 is circulated. A cleaning liquid circulation portion 73, a gas supply portion 74 for injecting gas to the opening 711 side of the cleaning liquid containing portion 71, and an opening 711 side of the cleaning liquid containing portion 71 and a nozzle 53. It may be configured to include a detection unit (75) for detecting whether the insertion into the receiving space (712).

The cleaning liquid of a predetermined level is accommodated in the accommodation space 712 of the cleaning liquid accommodating part 71, and the cleaning liquid accommodated in the accommodation space 712 by the operation of the ultrasonic generator 72 may be vibrated by ultrasonic waves. When the nozzle 53 is inserted into the receiving space 712 of the cleaning liquid accommodating part 71 by such a configuration, the paste attached to the nozzle 53 may be removed from the nozzle 53 by ultrasonic vibration of the cleaning liquid and the cleaning liquid. have.

The cleaning solution circulation section 73 is connected between the cleaning solution supply 731 supplying the cleaning solution, and the cleaning solution supply 731 and the cleaning solution receiving section 71 so that the cleaning solution is supplied to the cleaning solution receiving section 71. Is connected between the cleaning liquid supply part 731 and the cleaning liquid accommodating part 71, and the cleaning liquid is discharged from the cleaning liquid accommodating part 71, the cleaning liquid discharge path 733, and the cleaning liquid supply part 731. It may be configured to include a filter 734 provided in between to filter the paste contained in the cleaning liquid discharged from the cleaning liquid containing part 71. The cleaning solution circulation unit 73 may be accommodated in the cleaning solution accommodating unit 71 so as to maintain a predetermined water level. In addition, the paste removed from the nozzle 53 may be removed from the cleaning liquid accommodating part 71 through the cleaning liquid discharge passage 733 together with the cleaning liquid, and the paste included in the cleaning liquid may be filtered out by the filter 734. Can be.

The gas supply part 74 includes a gas supply 741 for supplying gas, a gas supply nozzle 742 provided at an opening 711 side of the cleaning liquid accommodating part 71, a gas supply 741 and a gas supply nozzle ( It may be configured to include a gas supply passage 743 connecting the 742. With this configuration, the nozzle 53 is inserted into the receiving space 712 of the cleaning liquid accommodating part 71 so that the paste attached to the nozzle 53 is removed by ultrasonic vibration of the cleaning liquid and the cleaning liquid, and then the nozzle 53. When separated from the cleaning liquid accommodating part 71, the gas supply part 74 injects gas to the nozzle 53 through the gas supply nozzle 742. Therefore, the cleaning liquid which can be attached to the nozzle 53 after the cleaning of the nozzle 53 can be dried, and the fine size paste which can be attached to the nozzle 53 can be removed from the nozzle 53.

The sensing unit 75 may include a light emitting unit 751 and a light receiving unit 752 which are installed to face each other at the opening 711 side of the cleaning liquid accommodating unit 71. By such a configuration, it is detected whether the light emitted from the light emitting unit 751 is received by the light receiving unit 752 to detect whether the nozzle 53 is inserted into the receiving space 711 of the cleaning liquid accommodating unit 71. can do. The control unit detects that the nozzle 75 detects that the nozzle 53 is inserted into the receiving space 711 of the cleaning liquid accommodating part 71. The ultrasonic generator 72, the cleaning liquid circulation part 73, and the gas supply part ( 74 may be operated. Therefore, when the nozzle 53 is not inserted into the receiving space 711 of the cleaning liquid containing part 71, the ultrasonic generator 72, the cleaning liquid circulating part 73, and the gas supply part 74 operate unnecessarily. You can prevent it. On the other hand, the present invention is not limited to the detection unit 75 is provided on the opening 711 side of the cleaning liquid receiving portion 71, the detection unit 75 is a predetermined inside or outside of the cleaning liquid containing portion 71 Can be installed at the location.

Hereinafter, an operation of the nozzle cleaning device 60 of the paste dispenser according to another embodiment of the present invention configured as described above will be described.

In the process of applying the paste onto the substrate S, a cleaning process is performed to remove the paste attached to the nozzle 53 at a predetermined time or often after the substrate S is carried into or pasted into the paste dispenser. do. At this time, as described above, before the nozzle 53 is cleaned, whether the paste is attached to the nozzle 53 is measured in advance, and when the paste is attached to the nozzle 53, the process of cleaning the nozzle 53 is performed. You can do that. The method of measuring whether the paste is attached to the nozzle 53 may be applied to the same method as that described in the above-described embodiment of the present invention.

In order to clean the nozzle 53, the nozzle 53 is first moved to the position aligned with the cleaning liquid accommodating part 71 of the ultrasonic cleaning unit 70 of the nozzle cleaning device 60.

At this time, when the light receiving sensor 661 is provided in the nozzle cleaning device 60 as the guide unit 66, the laser emitted from the light emitting unit 541 of the laser displacement sensor 54 mounted to the head unit 50. Detects the position received by the light receiving sensor 661 provided in the nozzle cleaning device 60, and measures whether the nozzle 53 has been moved to a position aligned with the cleaning liquid accommodating portion 71 therefrom. 50 may be moved to move the nozzle 53 to a position aligned with the cleaning liquid accommodating part 71.

When the nozzle cleaning device 60 is provided with the reference mark 662 as the guide unit 66, the reference mark 662 is captured by the position recognition camera 58 mounted on the head unit 50. While measuring whether the center of the broken reference mark 662 coincides with the imaging center of the position recognition camera 58, the nozzle (through the process of moving the head unit 50 so that the center of the reference mark 662 coincides with the imaging center) 53) can be moved to the position aligned with the cleaning liquid receiving portion (71).

In addition, in the process of moving the nozzle 53 to a position aligned with the cleaning liquid accommodating part 71, the Z-axis driving part 56 of the head unit 50 may operate to displace the nozzle 53 in the vertical direction. .

When the nozzle 53 is moved to the position aligned with the cleaning liquid accommodating part 71 through the above process, the nozzle 53 is lowered to move the nozzle 53 into the accommodation space 711 of the cleaning liquid accommodating part 71. Inside). At this time, the Z-axis driving unit 56 provided in the head unit 50 may be operated to lower the nozzle 53.

When the nozzle 53 is lowered as described above, the detection unit 75 detects the insertion of the nozzle 53 into the accommodation space 711 of the cleaning liquid receiving unit 71, and the control unit includes an ultrasonic wave generator 72, The washing liquid circulation portion 73 and the gas supply portion 74 are operated. Therefore, the cleaning liquid is supplied into the cleaning liquid accommodating part 71 by the operation of the cleaning liquid circulation part 73, and ultrasonic vibration is generated in the cleaning liquid accommodated in the cleaning liquid accommodating part 71 by the operation of the ultrasonic generator 72. do. Therefore, the paste attached to the nozzle 53 inserted into the receiving space 711 of the cleaning liquid accommodating part 71 is removed from the nozzle 53 by the chemical characteristics of the components of the cleaning liquid and the physical characteristics of the ultrasonic vibration of the cleaning liquid. do. The cleaning liquid and the paste contained in the cleaning liquid are discharged from the cleaning liquid accommodating part 71 through the cleaning liquid discharge passage 733.

After the cleaning operation of the nozzle 53, the nozzle 53 is raised, and the gas injected from the gas supply nozzle 742 of the gas supply part 74 collides with the raised nozzle 53. The cleaning liquid that can be attached to the 53 can be dried, and a fine size paste that can be attached to the nozzle 53 can be removed from the nozzle 53.

Then, when the nozzle 53 is raised and separated from the cleaning liquid accommodating part 71, the head unit 50 moves to return to the application standby position before the nozzle 53 applies the paste onto the substrate S. have. In addition, the process of measuring whether the paste attached to the nozzle 53 is completely removed before the nozzle 53 returns to the application standby position can be performed.

In order to measure whether the paste attached to the nozzle 53 has been completely removed, the nozzle 53 is moved to a position aligned with the camera 654 of the imaging device 65. The above-described process may be performed to align the nozzle 53 and the camera 654.

As such, when the nozzle 53 and the camera 654 are aligned with each other, the controller photographs the nozzle 53, and analyzes the photographed image to analyze the captured image, and when the paste is not present in the nozzle 53, the head unit 50. To return the nozzle 53 to the application stand-by position.

However, in the case where the paste is present in the nozzle 53 measured from the captured image, the nozzle 53 is moved to the cleaning liquid accommodating part 71 and the nozzle 53 is cleaned again. The process of measuring again whether the paste is attached may be performed repeatedly.

Since the nozzle cleaning apparatus 60 and the paste dispenser having the same according to another embodiment of the present invention as described above can automatically perform the cleaning process of the nozzle 53, the efficiency of the process can be improved, the cleaning liquid Since ultrasonic nozzles can be generated to clean the nozzle 53, damage to the nozzle 53 can be prevented as compared with the direct physical action on the nozzle 53, and the paste attached to the nozzle 53 can be cleaned. It can be removed more efficiently.

Hereinafter, a nozzle cleaning apparatus according to still another exemplary embodiment of the present invention will be described with reference to FIGS. 10 and 11. The same parts as those described in the above-described embodiments of the present invention will be denoted by the same reference numerals and detailed description thereof will be omitted.

10 and 11, the nozzle cleaning device 60 according to another embodiment of the present invention includes a cleaning member 61 described in one embodiment of the present invention, and in another embodiment of the present invention. Ultrasonic cleaning unit 70 may be provided together.

Here, at least one of the cleaning member 61 or the ultrasonic cleaning unit 70 may be selectively operated in the cleaning process of the nozzle 53, and both the cleaning member 61 and the ultrasonic cleaning unit 70 operate together. can do.

Since the nozzle cleaning device 60 and the paste dispenser having the same according to another embodiment of the present invention as described above are provided with the cleaning member 61 and the ultrasonic cleaning unit 70, the nozzle cleaning device 60 is attached to the nozzle 53. The paste can be removed more efficiently.

The technical idea described in each embodiment of the present invention may be implemented independently, or may be implemented in combination with each other. In addition, in the above-described embodiment of the present invention, a case in which the nozzle cleaner is applied to the paste dispenser has been described as an example, but the nozzle cleaner according to the present invention may be applied to a paste dispenser, The present invention can also be applied to a liquid crystal coating device for applying liquid crystal or a liquid supply device for supplying a liquid such as an adhesive onto a substrate in a semiconductor manufacturing process.

1 is a perspective view illustrating a paste dispenser having a nozzle cleaner according to an embodiment of the present invention.

FIG. 2 is a perspective view illustrating a head unit of the paste dispenser of FIG. 1.

3 and 4 are perspective views of a paste dispenser showing an example of different installation positions of the nozzle cleaning device of FIG.

5 is a perspective view of the nozzle cleaning device of FIG. 1.

6 and 7 are cross-sectional views of the nozzle cleaner of FIG. 5.

8 is a perspective view of a nozzle cleaning device according to another embodiment of the present invention.

9 is a cross-sectional view of the nozzle cleaner of FIG. 8.

10 and 11 are perspective views of a nozzle cleaning device according to another embodiment of the present invention.

*** Explanation of symbols for main parts of drawing ***

50: head unit 53: nozzle

54: laser displacement sensor 58: position recognition camera

60: nozzle cleaning device 61: cleaning member

62: rotation unit 63: cleaning liquid supply unit

64: gas injection unit 65: imaging unit

66: guide unit 67: paste removing member

70: ultrasonic cleaning unit 71: cleaning liquid containing part

72: ultrasonic generator 73: cleaning solution circulation

74: gas supply unit 75: detection unit

Claims (17)

A cleaning member installed at a position in contact with the nozzle; A rotating unit for rotating the cleaning member; A cleaning liquid supply unit supplying a cleaning liquid to the cleaning member; And And a gas injection unit for injecting gas toward the nozzle that has passed through the cleaning member. A cleaning liquid containing part having an opening that is open upward and having a receiving space in which the cleaning liquid is received and the nozzle is inserted; And And an ultrasonic cleaning unit installed adjacent to the cleaning liquid containing part and configured to generate an ultrasonic vibration in the cleaning liquid contained in the cleaning liquid containing part. The method according to claim 1 or 2, And an imaging unit for imaging the discharge port of the nozzle. The method of claim 3, The imaging unit has a casing having an opening that opens to the upper side; A light transmitting member provided at an opening of the casing and made of a transparent material; A camera installed inside the casing; And And a support part for supporting the camera and moving the camera in a vertical direction, a horizontal direction and / or a front-rear direction. The method according to claim 1 or 2, And a guide unit for guiding the nozzle to align the nozzle with the nozzle cleaner. The method of claim 5, The guide unit, And a reference mark formed on the nozzle cleaning device so as to be picked up by a position recognition camera installed adjacent to the nozzle. The method of claim 5, The guide unit, And a light receiving sensor for receiving the laser light emitted from the light emitting unit of the laser displacement sensor installed adjacent to the nozzle. The method of claim 1, The rotating unit, Drive motor; A drive shaft connected to the drive motor; A first magnet installed on the drive shaft; A second magnet disposed adjacent to the first magnet of the driving shaft and rotated by a magnetic force generated when the first magnet rotates; And And a driven shaft on which the second magnet is installed and connected to the cleaning member. The method of claim 8, The drive motor, the drive shaft and the first magnet is disposed in the first housing, And the second magnet and the driven shaft are disposed in a second housing partitioned from the first housing. 3. The method of claim 2, The ultrasonic cleaning unit, the nozzle cleaning device, characterized in that further comprises a gas supply unit for injecting gas to the opening side of the cleaning liquid containing portion. 3. The method of claim 2, The ultrasonic cleaning unit, the nozzle cleaning device further comprises a detection unit is installed on one side of the cleaning liquid containing portion for detecting whether the nozzle is inserted into the cleaning liquid containing portion. 3. The method of claim 2, The ultrasonic cleaning unit, the nozzle cleaning device, characterized in that further comprises a cleaning liquid circulation unit for circulating the cleaning liquid contained in the cleaning liquid containing portion. A stage on which the substrate is mounted; A head unit to which a nozzle through which paste is discharged is mounted; A head support on which the head unit is installed to be movable; And A nozzle cleaning device disposed at an accessible position of the nozzle to clean the nozzle, The nozzle cleaning device, A cleaning member installed at a position where the nozzle is in contact with the nozzle; And Paste dispenser comprising a rotating unit for rotating the cleaning member. The method of claim 13, The nozzle cleaning device, A cleaning unit for cleaning the nozzle using a cleaning liquid; And Paste dispenser, characterized in that for imaging the nozzle to measure whether the paste is attached to the nozzle; The method of claim 13, The cleaning member is composed of a pair of cleaning members, The rotating unit is a paste dispenser, characterized in that for rotating the pair of cleaning member in a direction opposite to each other. The method of claim 14, The cleaning unit, the paste dispenser characterized in that it comprises an ultrasonic generator for generating ultrasonic vibration in the cleaning liquid. A stage on which the substrate is mounted; A head unit to which a nozzle through which paste is discharged is mounted; A head support on which the head unit is installed to be movable; And A paste dispenser comprising the nozzle cleaner of claim 1.

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