KR101763620B1

KR101763620B1 - Apparatus for cleaning nozzle and paste dispenser having the same

Info

Publication number: KR101763620B1
Application number: KR1020100130555A
Authority: KR
Inventors: 이병권; 박학철; 김용일
Original assignee: 주식회사 탑 엔지니어링
Priority date: 2010-12-20
Filing date: 2010-12-20
Publication date: 2017-08-02
Also published as: CN102553845A; TW201242672A; KR20120069141A; CN102553845B

Abstract

The present invention relates to a nozzle cleaning apparatus capable of automatically cleaning nozzles, such as a paste dispenser for applying a paste on a substrate, a liquid crystal coating apparatus for applying liquid crystal on a substrate, and the like. The nozzle cleaning apparatus according to the present invention can automatically perform the process of cleaning the nozzle, thereby improving the efficiency of the process.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a paste dispenser having a nozzle cleaning device and a nozzle cleaning device,

The present invention relates to a nozzle cleaning apparatus for automatically cleaning a nozzle and a paste dispenser equipped with the nozzle cleaning apparatus.

In general, a flat panel display (FPD) is thinner and lighter than a television or a monitor using a cathode ray tube. As a flat panel display, a liquid crystal display (LCD), a plasma display panel (PDP), a field emission display (FED), an organic light emitting diode (OLED) .

Among them, a liquid crystal display is a display device that can display a desired image by individually supplying data signals according to image information to liquid crystal cells arranged in a matrix form to adjust light transmittance of liquid crystal cells. Liquid crystal displays are widely used because they are thin and light, and have low power consumption and low operating voltage. A method of manufacturing a liquid crystal panel generally used in such a liquid crystal display will be described below.

First, a color filter and a common electrode are formed on an upper substrate, and a thin film transistor (TFT) and a pixel electrode are formed on a lower substrate corresponding to the upper substrate. Subsequently, the alignment film is applied to the substrates, and then the alignment film is rubbed to provide a pre-tilt angle and alignment direction to the liquid crystal molecules in the liquid crystal layer to be formed therebetween.

A paste pattern is formed by applying a paste to at least one of the substrates in a predetermined pattern so as to maintain the space between the substrates and to prevent the liquid crystal from leaking to the outside and to seal between the substrates, Thereby forming a liquid crystal panel.

In manufacturing such a liquid crystal panel, a paste dispenser is used to form a paste pattern on a substrate. The paste dispenser includes a stage on which a substrate is mounted, a dispensing head unit mounted with a nozzle communicating with a syringe and a syringe accommodating the paste, and a dispensing head unit supporting frame supporting the dispensing head unit .

Such a paste dispenser forms a paste pattern on a substrate while changing a relative position between the nozzle and the substrate. That is, the paste dispenser moves the nozzle and / or the substrate in the X-axis direction and the Y-axis direction while controlling the gap between the nozzle and the substrate to be constant by moving the nozzle mounted on the dispensing head unit up and down in the Z- And the paste is discharged from the nozzles onto the substrate to form a paste pattern.

In the process of forming the paste pattern on the substrate by discharging the paste from the nozzle, the paste may adhere to the periphery of the discharge port of the nozzle. When the paste is adhered to the periphery of the discharge port of the nozzle, There is a problem that the discharge of the ink droplets does not progress smoothly. Accordingly, it is required to confirm whether or not the paste is adhered to the periphery of the discharge port of the nozzle during the process of forming the paste pattern on the substrate, and to remove the adhered paste.

However, in the conventional case, when the operator confirms that the paste is attached to the nozzle while observing the nozzle with the naked eye, and then the paste is attached to the nozzle, the operator manually wipes the nozzle by hand and removes the paste attached to the nozzle. It takes a lot of time to clean the nozzle, which results in a reduction in the efficiency of the process.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a paste dispenser having a nozzle cleaning device and a nozzle cleaning device capable of improving the efficiency of a process by automatically performing cleaning of the nozzle, To provide.

According to an aspect of the present invention for attaining the above object, there is provided a nozzle cleaning apparatus comprising: a pair of pressing members provided at positions at which a nozzle can be accessed; and a pair of pressing members moving in a direction And a cleaning tape supply device for supplying a cleaning tape between the pair of pressure members.

The nozzle cleaning apparatus and the paste dispenser including the nozzle cleaning apparatus according to the present invention can automatically perform the process of cleaning the nozzle, thereby improving the efficiency of the process.

1 is a perspective view illustrating a paste dispenser equipped with a nozzle cleaning apparatus according to a first embodiment of the present invention.
Fig. 2 is a perspective view showing the dispensing head unit of the paste dispenser of Fig. 1;
FIGS. 3 and 4 are perspective views of a paste dispenser in which the installation position of the nozzle cleaning apparatus of FIG. 1 is different.
5 is a perspective view of the nozzle cleaning apparatus of FIG.
Fig. 6 is a perspective view showing a pair of pressing members, a moving device, and a rotating device of the nozzle cleaning device of Fig. 5;
Fig. 7 is a perspective view showing the cleaning tape feeding apparatus of the nozzle cleaning apparatus of Fig. 5;
Fig. 8 is a schematic view showing the rotation sensing device of the cleaning tape supply device of Fig. 7;
FIGS. 9 to 12 are schematic views sequentially illustrating a process of cleaning the nozzles using the nozzle cleaning apparatus of FIG. 5. FIG.
13 is a schematic view showing an example of a process of cleaning a nozzle using the nozzle cleaning apparatus of FIG.
14 is a perspective view illustrating a nozzle cleaning apparatus according to a second embodiment of the present invention.
15 and 16 are schematic diagrams showing the process of cleaning the nozzle using the nozzle cleaning apparatus of FIG.

Hereinafter, a preferred embodiment of a paste dispenser having a nozzle cleaning apparatus and a nozzle cleaning apparatus according to the present invention will be described with reference to the accompanying drawings.

1 to 4, a paste dispenser according to a first embodiment of the present invention includes a frame 10, a stage 20 mounted on the frame 10 on which the substrate S is mounted, A pair of guide rails 30 provided on both sides of the stage 20 and extending in the Y axis direction and two ends of the guide rails 30 supported on the pair of guide rails 30, A nozzle 53 and a displacement sensor 54 which are installed in the dispensing head unit support frame 40 so as to be movable in the X axis direction and through which the paste is discharged, A nozzle cleaning apparatus 60 for cleaning the nozzles 53, and a control unit (not shown) for controlling the operation of applying the paste and the operation of the nozzle cleaning apparatus 60 .

An X-axis table 21 for moving the stage 20 in the X-axis direction and a Y-axis table 22 for moving the stage 20 in the Y-axis direction may be provided on the frame 10. Accordingly, the stage 20 can be moved in the X-axis direction and the Y-axis direction by the X-axis table 21 and the Y-axis table 22. Of course, only one of the X-axis table 21 and the Y-axis table 22 is applied, and the configuration in which the stage 20 is moved in only one of the X-axis direction and the Y-axis direction can be applied.

At both ends of the dispensing head unit support frame 40, a mover 41 connected to the guide rail 30 may be installed. The dispensing head unit support frame 40 can be moved in the longitudinal direction of the guide rail 30, that is, the Y axis direction, by the interaction of the guide rail 30 and the mover 41. [ Accordingly, the dispensing head unit 50 can be moved in the Y-axis direction by the movement of the dispensing head unit support frame 40 in the Y-axis direction.

The dispensing head unit support frame 40 may be provided with a head movement guide 42 disposed in the X axis direction and connected to the head movement guide 42 of the head support 40 A head moving device 51 may be provided. The dispensing head unit 50 can be moved in the longitudinal direction of the head support 40, that is, the X-axis direction, by the interaction of the head movement guide 42 and the head moving device 51. [

In this manner, the dispensing head unit 50 can be moved in the X-axis direction and / or the Y-axis direction according to the XY machine coordinate system defined by the X-axis and the Y-axis.

2, the dispensing head unit 50 includes a syringe 52 filled with a paste, a nozzle 53 communicating with the syringe 52 and discharging the paste, a nozzle 53 connected to the nozzle 53, And a Y-axis driving unit 55 for moving the nozzle 53 and the displacement sensor 54 in the Y-axis direction. The Y-axis driving unit 55 includes a displacement sensor 54 for measuring the distance between the nozzle 53 and the substrate S, And a Z-axis driving unit 56 for moving the nozzle 53 and the displacement sensor 54 in the Z-axis direction.

The displacement sensor 54 includes a light emitting portion 541 for emitting a laser beam and a light receiving portion 542 for receiving a laser beam reflected by the substrate S and spaced apart from the light emitting portion 541 by a predetermined distance, An electric signal corresponding to the imaging position of the laser beam emitted from the light source 541 and reflected on the substrate S and then imaged on the light receiving unit 542 is output to the control unit to measure the interval between the substrate S and the nozzle 53 Role.

A cross-sectional area sensor 57 for measuring the cross-sectional area of the paste pattern P formed on the substrate S may be installed in the dispensing head unit 50. [ The cross-sectional area sensor 57 measures the cross-sectional area of the paste pattern P by continuously discharging the laser to the substrate S and scanning the paste pattern P. The data on the cross-sectional area of the paste pattern P measured from the cross-sectional area sensor 57 can be used to determine whether or not the paste pattern P is defective.

Further, the dispensing head unit 50 may be provided with an image pickup device 58 provided so as to face the substrate S at a position adjacent to the nozzle 53. When the nozzle 53 is moved by the movement of the head support 40 in the Y axis direction and the movement of the dispensing head unit 50 in the X axis direction, As shown in FIG.

The nozzle cleaning device 60 may be detachably attached to the paste dispenser. 1, the nozzle cleaning apparatus 60 may be installed on the stage 20 and may be mounted on an X-axis table 21 for moving the stage 20, as shown in Fig. 3 And may be installed on the frame 10, as shown in Fig. As described above, with respect to the mounting position of the nozzle cleaning apparatus 60 in the paste dispenser, the movement of the dispensing head unit 50 in the X axis direction or the Y axis direction, or in the X axis direction or the Y axis direction of the stage 20 The mounting position of the nozzle cleaning device 60 in the paste dispenser is not limited as long as the nozzle 53 is within the range in which the nozzle 53 can approach the nozzle cleaning device 60. [ Of course, a configuration may be adopted in which a separate moving mechanism is provided in the nozzle cleaning device 60 and the nozzle cleaning device 60 is moved to approach the nozzle 53 mounted on the dispensing head unit 50. [

5 to 7, the nozzle cleaning apparatus 60 includes a support 61 on which the respective components are supported, a pair of pressing members 62 provided at positions where the nozzles 53 can be accessed, A moving device 63 for moving the pair of pressing members 62 in a direction adjacent to and in a direction away from each other, a rotating device 64 for rotating the pair of pressing members 62, A cleaning tape supply device 66 for supplying a cleaning tape 65 to the nozzle 53 and a pair of pressing members 62 for supplying the cleaning tape 65 to the nozzles 53, And a guiding unit 67 for guiding the pressure between the pressing members 62.

The pair of pressing members 62 may be formed so that the mutually opposing surfaces form a vertical plane, and a cushion member 621 is preferably attached to the mutually facing surfaces of the pair of pressing members 62. The cushion member 621 serves to closely adhere the cleaning tape 65 to the nozzle 53 when the pair of pressing members 62 press the cleaning tape 65 to the nozzle 53 can do.

The moving device 63 may be an actuator that is connected to the pair of pressing members 62 and moves the pair of pressing members 62 in a direction adjacent to each other and a direction in which the pair of pressing members 62 are spaced apart from each other. However, the present invention is not limited to this configuration, and a configuration may be adopted in which the moving device 63 is connected to only one pressing member 62 of the pair of pressing members 62, Or a linear motion mechanism for moving at least one of the pair of pressing members 62 such as an actuator including a cylinder operated by air pressure, a linear motor, or a ball screw device may be applied.

The rotating device 64 is connected to a supporting member 641 that is linearly movably provided to the pair of pressing members 62 to rotate the supporting member 641. As the rotating device 64, a rotating mechanism such as an electric motor may be applied.

The cleaning tape 65 may be formed of a material having a predetermined tension and a property of attaching the paste. To the cleaning tape 65, for example, a substance made of a component capable of dissolving a paste such as acetone may be attached.

7, the cleaning tape supply device 66 includes a first reel 661 to which a cleaning tape 65 is wound and a cleaning tape 65 on which the nozzle 53 is wiped, A pair of first shafts 663 rotatably mounted on the support 61 and detachably connected to the first reel 661 and a pair of second shafts 663 rotatably supported on the support 61, A pair of second shafts 664 installed so as to be able to detachably connect the second reel 662 and a second shaft 664 connected to the first shaft 663 to maintain tension of the cleaning tape 65 An apparatus 665, and a drive motor 666 for rotating the second shaft 664. [

A rotation preventing protrusion 663a may protrude from the first shaft 663 to prevent the first reel 661 from rotating arbitrarily in the first axis 663, A rotation preventing groove 661a into which the preventing protrusion 663a is inserted can be formed. Likewise, a rotation preventing protrusion 664a may protrude from the second shaft 664 and a second reel 662 may protrude from the second shaft 664 to prevent the second reel 662 from being arbitrarily rotated. A rotation preventing groove 662a into which the rotation preventing protrusion 664a is inserted may be formed.

The tension holding device 665 is connected to the pair of first shafts 663 and is connected to the first shaft 663 in a direction opposite to the direction in which the first shaft 663 is rotated when the cleaning tape 65 is supplied, And a motor for applying a rotational force. The tension holding device 665 can maintain the tension of the cleaning tape 65 constant by keeping the torque acting on the first shaft 663 constant.

The driving motor 666 may be connected to both the pair of second shafts 664 but the driving motor 666 is connected to only one of the pair of second shafts 664 and the pair of second shafts 664 May be connected to each other by a transmission belt 667 and a pair of second shafts 664 may be rotated by a single driving motor 666. [

As shown in FIG. 8, at least one of the pair of second shafts 664 may be provided with a rotation sensing device 668 sensing the rotation of the second shaft 664. The rotation sensing device 668 is formed, for example, on at least one of the pair of second shafts 664 and rotates together with the second shaft 664 and extends from the periphery of the second shaft 664 A rotating member 664b having at least one slot 664a and a light emitting unit 664c and a light receiving unit 664d disposed at one side and the other side of the rotating member 664b. The rotation sensing device 668 senses whether or not the light emitted from the light emitting portion 664c passes through the slot 664a of the rotary member 664b and passes through the slot 664a to determine whether the second shaft 664 rotates, And measures the amount of rotation. However, the present invention is not limited to the above-described configuration and may be applied to various types of motors such as an encoder capable of being connected to the driving motor 666 by a rotation sensing device 668, Configuration can be applied. The control unit may use data relating to the rotation of the second shaft 664 measured by the rotation sensing device 668 to control the tension retention device 665 to operate so that the rotation of the cleaning tape 65 The magnitude of the tension can be maintained in a preset optimum range.

The guide unit 67 may be configured to include a light receiving sensor 671 provided at a portion adjacent to the pair of pressing members 62. [ The light receiving sensor 671 receives the laser beam emitted from the light emitting portion 541 of the displacement sensor 54 and detects the distance between the nozzle 53 and the displacement sensor 54 based on the interval between the predetermined nozzle 53 and the displacement sensor 54 And serves to guide the nozzle 53 so as to be precisely positioned between the pair of pressing members 64. [

Further, the guide unit 67 may be configured to include a reference member 672 disposed at a portion adjacent to the pair of pressing members 62. This reference member 672 can be picked up by the image pickup device 58 mounted on the dispensing head unit 50 and the control unit can pick up an image picked up by the image pickup device 58 and a predetermined nozzle 53, And guiding the nozzle 53 so that the nozzle 53 can be precisely positioned between the pair of pressing members 62 based on the interval between the devices 58. [ In the reference member 672, a cross mark or a straight mark recognition mark may be formed.

Here, the guide unit 67 may be configured to include at least one of the light receiving sensor 671 or the reference member 672. [ Such a guide unit 66 aligns the nozzle 53 and the pair of pressing members 62 so that the nozzle 53 can be accurately moved between the pair of pressing members 62 without colliding with other components Role.

Hereinafter, the operation of the nozzle cleaning apparatus 60 of the paste dispenser according to the first embodiment of the present invention will be described.

In the process of applying the paste onto the substrate S, the paste may be adhered to the discharge port of the nozzle 53 and its periphery. In order to remove the paste, the control unit may control to clean the nozzle 53 at regular intervals . The cleaning operation of the nozzle 53 may be performed at a predetermined time, for example, before or after the substrate S is transferred to the paste dispenser, The paste may be applied at any time during the application of the paste.

A first reel 661 on which a cleaning tape 65 is wound is positioned on a first shaft 663 and a cleaning tape 65 is wound on a second shaft 664 to clean the nozzle 53. [ Two reels 662 are located. The cleaning tape 65 is disposed between the pair of pressing members 62 in a state in which a predetermined tension is maintained by the tension holding device 665. [ In this state, the nozzle 53 is moved between the pair of pressing members 62. [

At this time, when the light receiving sensor 671 is provided in the nozzle cleaning device 60 with the guide unit 67, the laser emitted from the light emitting portion 541 of the displacement sensor 54 mounted on the head unit 50 The position of the light receiving sensor 671 provided in the nozzle cleaning apparatus 60 is sensed and it is determined whether the nozzle 53 has moved to a position aligned with the pair of pressing members 62. Then, It is possible to move the nozzle 53 between the pair of pressing members 62 by moving the nozzle 50.

When the reference mark 672 is provided in the nozzle cleaning apparatus 60 by the guide unit 67, the reference mark 672 is picked up by the image pickup device 58 mounted on the head unit 50, The nozzle 53 is moved through the process of moving the head unit 50 such that the center of the reference mark 672 coincides with the center of the imaging while measuring whether the center of the reference mark 672 coincides with the imaging center of the imaging device 58. [ Can be moved between the pair of pressing members (62).

The Z-axis driving unit 56 of the dispensing head unit 50 is operated to move the nozzle 53 in the up-and-down direction in the process of moving the nozzle 53 to a position aligned with the pair of pressure members 62. [ . &Lt; / RTI >

9, when the nozzle 53 is positioned between the pair of pressing members 62, as shown in Fig. 10, by the operation of the moving device 63, the pair of pressing members 62 move in mutually adjacent directions, whereby the cleaning tape 65 is tightly adhered to the nozzle 53 as shown in Fig. 12, by the movement of the dispensing head unit 50, the nozzle 53 is moved in a direction perpendicular to the direction in which the pair of pressing members 62 are adjacent to each other. The paste attached to the periphery of the discharge port of the nozzle 53 is removed from the discharge port of the nozzle 53 while being attached to the cleaning tape 65. At this time, the nozzle 53 can move linearly repeatedly in a state of being in close contact with the cleaning tape 65. When the nozzle 53 passes between the pair of pressing members 62 while being in close contact with the cleaning tape 65, the pair of pressing members 62 are moved in the direction And the second shaft 664 is rotated by the operation of the drive motor 666 so that the cleaning tape 65 with the paste is wound on the second reel 662. As a result, A cleaning tape 65 to which a paste for cleaning the nozzles 53 is not attached is positioned between the nozzle 62 and the nozzle 62. As described above, when the cleaning process for the nozzle 53 is completed, the dispensing head unit 50 can be moved and returned to the application waiting position before the nozzle 53 applies the paste on the substrate S .

On the other hand, as shown in Fig. 13, the nozzle 53 is positioned between the pair of pressing members 62, and the pair of pressing members 62 are moved adjacent to each other, The pair of pressing members 62 can be rotated by the operation of the rotating device 64 in a state in which the pressing members 65 are in close contact with each other. The cleaning tape 65 is rotated along the periphery of the discharge port of the nozzle 53 in a state of being closely attached to the nozzle 53 by the rotation of the pair of pressing members 62. Therefore, It can be efficiently removed. The rotation of the pair of pressing members 62 can be repeatedly performed in the direction opposite to the one direction and the one direction. Further, the pair of pressing members 62 can be rotated at an angle exceeding 0 degree by one rotation or more than one rotation.

On the other hand, when the cleaning tape 65 wound around the first reel 661 is used, a new cleaning tape 65 can be replaced with a wound first reel 661.

The paste dispenser having the nozzle cleaning apparatus 60 and the nozzle cleaning apparatus 60 according to the first embodiment of the present invention as described above automatically performs the operation of removing the paste adhered to the nozzle 53 Therefore, the efficiency of the process can be improved as compared with the conventional case where the operator manually cleans the nozzle 53. Further, since the cleaning tape 65 with the paste removed by the cleaning tape supply device 66 is automatically exchanged, there is an effect that the nozzle 53 can be efficiently cleaned.

Hereinafter, a paste dispenser having a nozzle cleaning apparatus and a nozzle cleaning apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 14 to 16. FIG. The same reference numerals are given to the same parts as those described in the first embodiment of the present invention, and a detailed description thereof will be omitted.

14, the nozzle cleaning apparatus 60 according to the second embodiment of the present invention includes an elevating unit 70 for raising or lowering a pair of pressing members 62, And a mobile unit (80) for moving the member (62). The elevating unit 70 may be an actuator including a cylinder operated by hydraulic pressure or pneumatic pressure that is connected to the supporting body 61 of the nozzle cleaning device 60 to raise or lower the supporting body 61, May be applied. The moving unit 80 may be an actuator, a linear motor or a ball screw device including a cylinder operated by hydraulic pressure or pneumatic pressure, which is connected to the supporting body 61 of the nozzle cleaning device 60 to move the supporting body 61 The same linear movement mechanism can be applied.

The elevating unit 70 or the moving unit 80 is configured such that the nozzle 53 is moved in the direction of approaching the nozzle cleaning device 60 by the movement of the dispensing head unit 50, It is possible to adjust the position in the vertical direction and the position in the horizontal direction of the pair of pressing members 62 so that they can be easily positioned at the correct positions of the pressing members 62. [

Particularly, the elevating unit 70 can operate in a state in which the pair of pressing members 62 move in the directions adjacent to each other with the nozzle 53 interposed therebetween and the cleaning tape 65 is in close contact with the nozzle 53 15 and 16, the cleaning tape 65 moves in the vertical direction along the outer circumferential surface of the nozzle 53 in a state of being in tight contact with the nozzle 53, It is possible to more efficiently remove the paste attached to the substrate. The lifting and lowering of the pair of pressing members 62 by the driving of the lifting unit 70 can be repeatedly performed.

The nozzle cleaning apparatus 60 according to the second embodiment of the present invention includes an elevating unit 70 for raising or lowering a pair of pressing members 62 and a moving unit 70 for moving the pair of pressing members 62 The nozzle 53 can be easily moved to the correct position between the pair of pressing members 62. Particularly by the operation of the elevating unit 70, The cleaning efficiency of the cleaning blade 53 can be improved.

The technical ideas described in the embodiments of the present invention can be performed independently of each other, and can be implemented in combination with each other. Although the nozzle cleaning apparatus according to the present invention is applied to a paste dispenser as described above, the nozzle cleaning apparatus according to the present invention can be applied to a paste dispenser, Or a liquid supply device for supplying a liquid such as an adhesive onto a substrate in a semiconductor manufacturing process.

50: dispensing head unit 53: nozzle
54: displacement sensor 58: imaging device
60: nozzle cleaning device 62: pressure member

Claims

A pair of pressure members installed at positions where the nozzle can be accessed;
A moving device for moving the pair of pressing members in a direction adjacent to and mutually spaced from each other;
A cleaning tape supply device for supplying a cleaning tape between the pair of pressure members; And
And a rotating device for rotating the pair of pressing members along the circumference of the discharge port of the nozzle.

The method according to claim 1,
Wherein the rotary device is connected to a support member that is movably installed so that the pair of pressing members are linearly moved to rotate the support member.

The method according to claim 1,
The cleaning tape supply device includes:
A first reel supplied with the cleaning tape wound thereon;
A second reel around which the cleaning tape wiping the nozzle is wound;
A first shaft to which the first reel is detachably connected;
A second shaft to which the second reel is detachably connected; And
And a driving motor for rotating the second shaft.

The method of claim 3,
And a rotation sensing device for sensing rotation of the second shaft is provided on the second shaft.

The method of claim 3,
Wherein the cleaning tape supply device further comprises a tension holding device connected to the first shaft to maintain the tension of the cleaning tape.

The method according to claim 1,
And a guide unit for guiding the nozzle between the pair of pressing members.

The method according to claim 6,
Wherein the guide unit comprises a light receiving sensor provided at a portion adjacent to the pair of pressing members so as to receive a laser beam emitted from a light emitting portion of a displacement sensor provided adjacent to the nozzle.

The method according to claim 6,
Wherein the guide unit includes a reference member disposed at a portion adjacent to the pair of pressing members so as to be picked up by an image pickup apparatus provided adjacent to the nozzle.

The method according to claim 1,
Further comprising an elevating unit for raising or lowering the pair of pressure members.

The method according to claim 1,
And a moving unit for moving the pair of pressing members.

A stage on which a substrate is mounted;
A dispensing head unit to which a nozzle through which the paste is discharged is mounted;
A dispensing head unit support frame having the dispensing head unit movably installed therein; And
A paste dispenser comprising a nozzle cleaning apparatus according to any one of claims 1 to 10.