KR20100068620A - Apparatus and method for cleaning adhesive chuck - Google Patents

Abstract

PURPOSE: An apparatus and a method for cleaning an adhesive chuck are provided to reduce a cleaning time by automatically removing the particles which are attached to the adhesive part of an adhesive chuck. CONSTITUTION: An adhesion chuck(40) comprises a plate-shaped plate(41) and an adhesive part(42) which is installed on one side of the plate. An adhesive pad(80) has relatively great adhesion, compared to the adhesion of the adhesive part. The adhesive pad comprises a plate-shaped(81) and an adhesive layer(82). An elastic layer is interposed between the plate and the adhesive layer. A mobile unit(90) detaches the adhesive pad from the adhesive part.

Description

Adhesion chuck cleaning device and method {APPARATUS AND METHOD FOR CLEANING ADHESIVE CHUCK}

The present invention relates to a cleaning apparatus for removing particles attached to an adhesive chuck.

In the manufacturing process of various flat panel displays (FPDs) such as liquid crystal displays (LCDs) and plasma displays (PDPs), chucks are attached to support an array substrate or a color filter substrate in which thin film transistors (TFTs) are formed in a matrix form. This is used.

In general, an electrostatic chuck (ESC) is used as a chuck for supporting a substrate. However, since the electrostatic chuck has to continuously supply power to attach the substrate, power consumption is large and the substrate is absorbed by static electricity. In this case, stains may occur on the liquid crystal display panel due to the residual static electricity due to the pattern of the electrode, and there may be a problem that safety problems may occur due to accumulation of electrostatic force.

Recently, in order to solve the problems caused by the electrostatic chuck, the adhesive member made of a material having an adhesive property is installed on a plate having a flat plate shape, and the substrate is attached and supported by using the adhesive force of the adhesive member. Adhesive chuck has been applied to replace the existing electrostatic chuck.

On the other hand, in the manufacturing process of the flat panel display, the substrate goes through several steps, and in this process, fine particles may be attached to the surface of the substrate. It can be attached to the adhesive member. When particles are attached to the adhesive member of the adhesive chuck, the adhesive force of the adhesive chuck may be reduced due to the loss of the performance of the adhesive member, and various errors may occur in the process of attaching the substrate to the adhesive chuck due to the decrease in the adhesive force. . Therefore, in order to prevent such an error from occurring, a cleaning process of periodically removing particles adhering to the adhesive member of the adhesive chuck is performed.

However, since the conventional cleaning process of the adhesive chuck is made by the operator's manual work, it takes a considerable time. Accordingly, the manufacturing efficiency of the flat panel display panel is reduced, and the manufacturing cost of the flat panel display panel is increased due to the cost of labor costs. There was a problem.

The present invention is to solve the problems of the prior art, an object of the present invention to provide a cleaning device of the substrate bonding apparatus that can automatically remove the particles attached to the adhesive member of the adhesive chuck.

In addition, another object of the present invention is to provide an adhesive chuck cleaning apparatus and method of a substrate bonding apparatus which can confirm whether the arrangement of the adhesive members is adhered correctly from the attachment shape of the particles attached to and removed from the cleaning apparatus. .

Adhesive chuck cleaning apparatus according to the present invention for achieving the above object, the adhesive means having a greater adhesive force than the adhesive force of the adhesive member of the adhesive chuck to which the substrate is attached, and the adhesive means is attached to the adhesive member by attaching the adhesive means to the adhesive member It may be configured to include a mobile unit for attaching a particle to the adhesive means and by removing the adhesive means from the adhesive member to remove the particles attached to the adhesive member from the adhesive member.

The adhesive means may include a flat plate and an adhesive layer formed on at least one surface of the plate. Here, when the adhesive means is attached to the adhesive member of the adhesive chuck between the plate and the adhesive layer, it is preferable that the elastic layer is interposed so as to absorb the force to increase the degree of adhesion between the adhesive layer and the adhesive member.

In addition, the adhesive means may include a flat plate and a plurality of adhesive protrusions provided on the plate and having a surface corresponding to the adhesive surface of the adhesive member and arranged to match the installation position of the adhesive member. . Here, it is preferable that the elastic member is interposed between the plate and the adhesive protrusion so as to increase the degree of adhesion between the adhesive protrusion and the adhesive member.

On the other hand, the moving unit, the first moving portion for moving the adhesive means in a direction parallel to the adhesive surface of the adhesive member, and the agent for moving the adhesive means in the direction in which the adhesive means is attached to the adhesive member and in the direction of detachment from the adhesive member; It may be configured to include two moving parts.

Here, the first moving part is provided with a rail extending in parallel with the adhesive surface of the adhesive member, the frame is movable to the rail, the adhesive means is connected, and the first drive for moving the frame along the rail. It may be configured to include a device, the second moving portion is installed in the frame and is connected to the adhesive means includes a second driving device for moving the adhesive means in the direction in which the adhesive means is attached to the adhesive member and the direction of detachment from the adhesive member Can be configured.

In addition, the pressure-sensitive adhesive layer is formed on both sides of the pressure-sensitive adhesive means, the first moving portion is a rail extending parallel to the pressure-sensitive adhesive surface of the pressure-sensitive adhesive member, the frame is installed to be movable along the rail on the rail, and the pressure-sensitive adhesive means, It may be configured to include a first driving device for moving the frame along the rail, the second moving portion is detachable from the pair of adhesive chuck and the direction in which both sides of the adhesive means is attached to the pair of adhesive chucks respectively It may be configured to include a second drive device for moving in the direction.

In the adhesive chuck cleaning method according to the present invention, a first step of transferring an adhesive means having a large adhesive force adjacent to the adhesive member of the adhesive chuck in comparison with the adhesive force of the adhesive member of the adhesive chuck to which the substrate is attached, and attaching the adhesive means to the adhesive member And a third step of attaching the particles attached to the adhesive member to the adhesive means, and a third step of detaching the particles attached to the adhesive member from the adhesive member by detaching the adhesive means from the adhesive member. .

Here, the adhesive chuck cleaning method may further comprise a fourth step of measuring the arrangement of the adhesive member from the pattern of the particles attached to the adhesive means.

The adhesive chuck cleaning apparatus according to the present invention can easily remove particles attached to the adhesive member of the adhesive chuck by attaching the adhesive pad to the adhesive member of the adhesive chuck or detaching from the adhesive member. Compared to manually removing the attached particles, the time required can be significantly reduced. Therefore, by reducing the time to remove the particles, it is possible to increase the time that the flat panel display panel manufacturing apparatus is put into the manufacturing process, thereby improving the manufacturing efficiency of the flat panel display panel.

Hereinafter, an adhesive chuck cleaning apparatus according to the present invention will be described with reference to the accompanying drawings.

The adhesive chuck cleaning apparatus according to the present invention may be applied to various apparatuses such as a substrate bonding apparatus or a substrate conveying apparatus including an adhesive chuck for attaching and supporting a substrate in a manufacturing process of a flat panel display (FPD). In the embodiment of the present invention will be described with an adhesive chuck cleaning device for removing foreign matters such as particles that are applied to the adhesive chuck of the substrate bonding apparatus attached to the adhesive chuck.

The substrate bonding device is a device for bonding a liquid crystal display panel used in a liquid crystal display (LCD). A typical example of a liquid crystal display panel is a TFT-LCD panel, which includes an array substrate in which a plurality of thin film transistors (TFTs) are formed in a matrix, and a color filter substrate in which a color filter or a light shielding film is formed. It has a shape of spaced apart and joined to face each other. The liquid crystal is injected between the array substrate and the color filter substrate before the array substrate and the color filter substrate are bonded, encapsulated, or encapsulated. The liquid crystal display panel is manufactured through the above process.

The substrate bonding apparatus includes two chucks arranged in the chamber to face each other, attaching the array substrate and the color filter substrate to the two chucks, and forming the inside of the chamber in a vacuum atmosphere, and then array substrate and the color filter. The substrate is pressed to perform an operation of attaching the array substrate and the color filter substrate.

As shown in FIG. 1, the substrate bonding apparatus includes a first chamber 10 on which the first substrate S1 is seated, a second chamber 20 on which the second substrate S2 is seated, and a first chamber. It may be configured to include a lifting device 30 connected to (10) to raise and lower the first chamber (10). The first chamber 10 and the second chamber 20 may be provided with an adhesive chuck 40 to which the first substrate S1 and the second substrate S2 are attached. Here, in FIG. 1, the substrate bonding apparatus is provided with a pair of adhesive chucks 40 installed in the first chamber 10 and the second chamber 20 so that the adhesive surfaces thereof face each other, but the first chamber The adhesive chuck 40 may be installed only in either the 10 or the second chamber 20.

The adhesive chuck 40 may include a plate-shaped platen 41 and an adhesive member 42 provided on one surface of the platen 41. A plurality of penetrations through which the lift pins pressurizing the substrates S1 and S2 pass or air is injected into the surface plate 41 so that the substrates S1 and S2 attached to the adhesive member 42 can be peeled off from the adhesive chuck. Holes may be formed. The adhesive member 42 is made of an adhesive material such as silicone, acrylic, or fluorine, and may be disposed in a matrix form on one surface of the surface plate 41.

As shown in Figures 2 to 4, the cleaning apparatus according to the first embodiment of the present invention, the adhesive pad 80 is composed of a material having a greater adhesive force than the adhesive force of the adhesive member 42, Particles (P) attached to the adhesive chuck 40 may be configured to include a moving unit 90 for moving the adhesive pad 80 to contact the adhesive chuck 40 to be attached to the adhesive pad 80.

The adhesive pad 80 may be formed in a flat plate shape having an area corresponding to the area of the adhesive chuck 40, that is, the area in which the plurality of adhesive members 42 are disposed. The adhesive pad 80 may include a flat plate 81 and an adhesive layer 82 attached or coated to one surface of the plate 81 and made of a large material as compared with the adhesive force of the adhesive member 42. have.

5 and 6, the adhesive pad 80 is attached to the adhesive member 42 and then removed by attaching particles P attached to the adhesive member 42 while being spaced apart from the adhesive member 42. It will play a role.

In addition, another function of the adhesive pad 80 is that it can measure that the adhesive member 42 is constantly aligned. That is, as shown in FIG. 7, when the adhesive pad 80 is attached to the adhesive member 42 and then detached, the particles that are attached to the adhesive member 42 are attached to the adhesive layer 82 of the adhesive pad 80. (P) is attached, the particles (P) attached on the adhesive pad 80 forms a pattern corresponding to the arrangement of the adhesive member 42. Here, when the height of the adhesive member 42 is constant, the pattern formed by the particles P attached on the adhesive pad 80 is constant, but when the height of the adhesive member 42 is not constant, the adhesive pad ( The pattern formed by the particles P attached on 80 may not be constant. That is, when any one of the plurality of adhesive members 42 is lower than the height of the other adhesive members 42, the particles P attached to the adhesive members 42 having low heights are not attached to the adhesive pads 80. Without remaining attached to the adhesive member 42. Therefore, it is easy to determine whether the height of the adhesive member 42 is constant from the shape of the particles P attached on the adhesive pad 80. In addition, since the distance (D) and the angle (A) of the pattern formed by the particles (P) attached on the adhesive pad 80 is determined by the interval and angle between the plurality of adhesive members 42, the adhesive pad 80 It is possible to determine whether the plurality of adhesive members 42 are arranged at intervals meeting the set criteria from the pattern of the particles P attached on the). In addition, since the diameter (d) of the shape formed by the particle (P) represents the diameter of the adhesive member 42, it is possible to determine whether the adhesive member (42) is damaged from the diameter (d) of the shape formed by the particle (P). Can be. Thus, whether the height of the adhesive member 42 is constant from the shape of the particle P attached on the adhesive pad 80, and whether the plurality of adhesive members 42 are arranged at intervals meeting the set criteria. In addition, since the adhesive member 42 may be determined to be damaged, and the adhesive member 42 which is low in height, damaged, or is not disposed at intervals meeting the standard can be easily found and corrected or replaced, It is possible to prevent a process error caused by a decrease in the adhesive force of the adhesive chuck 40. On the other hand, as a method of analyzing the pattern of the particles (P) attached on the adhesive pad 80 may be applied to a variety of methods, such as a method performed by the naked eye or by using a camera after the image analysis method. .

As another example of the adhesive pad 80 of the cleaning apparatus according to the present invention, as shown in FIG. 8, the adhesive pad 80 has a flat plate-like plate 81 having an area corresponding to that of the adhesive chuck 40. ), Which is made of a material having a greater adhesive force than that of the adhesive member 42, is attached to one surface of the plate 81, has a surface corresponding to the adhesive surface of the adhesive member 42, and an installation position of the adhesive member 42. It may be composed of a plurality of adhesive projections 83 are arranged and aligned to match. In this case, since the adhesive protrusions 83 are disposed in the shape corresponding to the shape of the adhesive member 42 and the number of the adhesive members 42, the particles P attached to the adhesive member 42 are removed. In order to reduce the amount of the adhesive material required for this purpose, the material cost can be reduced as compared with the case where the adhesive layer 82 is formed in the entire area of the adhesive pad 80.

As another example of the adhesive pad 80 of the cleaning apparatus according to the present invention, as shown in FIG. 9, the adhesive pad 80 may include an elastic layer between the plate 81 and the adhesive layer 82. 84 may be provided, and as shown in FIG. 10, the adhesive pad 80 may include an elastic member 85 interposed between the plate 81 and the adhesive protrusion 83. In order to reduce the material cost of the elastic member 85, the elastic member 85 may be formed with the same width as the width of the adhesive projection (83). By such a configuration, when the adhesive pad 80 is moved to the adhesive chuck 40 to be in close contact with the adhesive member 42, the elastic layer 84 or the elastic member 85 absorbs a predetermined force. Accordingly, since the degree of adhesion between the adhesive pad 80 and the adhesive member 42 can be increased, the particles P attached to the adhesive member 42 can be easily attached and removed by the adhesive pad 80. .

The moving unit 90 includes a first moving part 91 for moving the adhesive pad 80 in a direction parallel to the adhesive surface of the adhesive member 42 so as to be adjacent to the adhesive chuck 40, and the adhesive pad 80. It may be configured to include a second moving unit 92 to move in the direction in which the adhesive pad 80 is attached to the adhesive member 42 and the adhesive pad 80 is detached from the adhesive member 42.

The first moving part 91 may move along the rail 911 to the rail 911 extending parallel to one surface of the adhesive chuck 40 on which the adhesive member 42 is disposed, and to the rail 911. And a first driving device 913 installed and connected to the adhesive pad 80, and a first driving device 913 connected to the frame 912 to move the frame 912 along the rail 911. . A rack gear 914 may be installed on the rail 911, and the first driving device 913 may include a pinion gear 915 having a screw thread engaged with the rack gear 914 on an outer circumferential surface thereof, and a frame 912. Rotation shaft 916 is installed to be rotatable and connected to the pinion gear 915, and a rotation motor 917 installed on the frame 912 and connected to the rotation shaft 916 to rotate the rotation shaft 916, Can be configured. Meanwhile, at least one idle gear 918 may be installed around the pinion gear 915 to be engaged with the rack gear 914 and rotate to support the frame 912.

The second moving unit 92 is installed on the frame 912 and connected to the adhesive pad 80 to move the second driving device 921 to move the adhesive pad 80 in the direction to be attached to the adhesive chuck 40. It can be configured to include. As the second driving device 921, a hydraulic cylinder or a pneumatic cylinder may be applied.

Hereinafter, an operation process of the adhesive chuck cleaning apparatus according to the first embodiment of the present invention configured as described above will be described.

First, when it is required to remove the foreign matter of the adhesive member 42 of the adhesive chuck 40, by operating the lifting device 30 to lift the first chamber 10, the first chamber 10 and the second The chambers 20 are spaced apart from each other.

In addition, a frame in which a rail 911 is installed between the first chamber 10 and the second chamber 20, and the adhesive pad 80, the first moving part 91, and the second moving part 92 are assembled. 912 is seated on rail 911 such that pinion gear 915 meshes with rack gear 914.

At this time, when the rotary motor 917 is operated, the frame 912 is the first chamber 10 and the second chamber 20 along the rail 911 by the interaction of the rack gear 914 and the pinion gear 915. ), The adhesive pad 80 is moved to a position adjacent to the adhesive member 42 of the adhesive chuck 40.

When the adhesive pad 80 is moved to the adhesive chuck 40 and the left and right positions of the adhesive pad 80 and the adhesive member 42 are aligned, the operation of the rotating motor 917 is stopped. At this time, by operating the cylinder 921 to move the adhesive pad 80 to the upper side to attach to the adhesive member 42, and then again to move the adhesive pad 80 to the lower side to detach from the adhesive member 42, Particles P attached to the adhesive member 42 are attached to the adhesive layer 82 of the adhesive pad 80 having a large adhesive force as compared with the adhesive force of 42, and are removed from the adhesive member 42. Attaching and detaching the adhesive pad 80 and the adhesive member 42 may be repeatedly performed several times to completely remove the particles P attached to the adhesive member 42.

When the attachment and detachment operation of the adhesive pad 80 and the adhesive member 42 is completed, the adhesive pad 80 is lowered, and the adhesive pad 80 is moved along the rail 911 to allow the first chamber 10 and After deviating from between the second chamber 20, the frame 912 to which the adhesive pad 80, the first moving part 91, and the second moving part 92 are assembled is removed from the rail 911. When the rail 911 is removed from the substrate bonding apparatus, the process of removing the particles P attached to the adhesive member 42 of the adhesive chuck 40 is completed.

In the first embodiment of the present invention, the adhesive pad 80 is mounted on the rail 911 to move the adhesive pad 80 to the adhesive member 42, and the adhesive pad 80 is operated by the operation of the rack gear 914 and the pinion gear 915. The first moving part 91 for moving the 80 and the second moving part 92 for moving the adhesive pad 80 in the vertical direction by the operation of the cylinder 921 are presented. However, the present invention is not limited to such a configuration, and the first moving part 91 and the second moving part 92 are provided with a transfer mechanism using a ball screw, a mover and a stator, and an electron of the mover and the stator. The adhesive pad 80 is attached to the adhesive member 42 and re-adhered, such as a transfer mechanism for linearly moving the adhesive pad 80 using a miracle interaction, a linear transfer mechanism using a belt, or a two-axis transfer mechanism using a robot. Various configurations for moving the adhesive pad 80 to be detached from the member 42 may be applied.

On the other hand, in the first embodiment of the present invention, the adhesive pad 80 is moved upwards to clean the adhesive chuck 40 installed in the first chamber 10, but the adhesive to the second chamber 20 is proposed. When the chuck 40 is installed, a configuration in which the adhesive pad 80 is moved downward may be applied to clean the adhesive chuck 40 of the second chamber 20.

In the adhesive chuck cleaning apparatus according to the first embodiment of the present invention, the adhesive pad 80 is automatically adhered to the adhesive member 42 of the adhesive chuck 40 or adhered to the adhesive member 42 by being detached from the adhesive member 42. Since the particles P attached to the adhesive member 42 of the chuck 40 can be easily removed, the time required for the removal of the particles P attached to the adhesive chuck 40 by manual operation by an operator is reduced. It can be greatly reduced. Therefore, since the time for removing the particles P can be reduced, the time required for the flat panel display panel manufacturing apparatus to be put into the manufacturing process can be increased, and thus, the manufacturing efficiency of the flat panel display panel can be improved. .

Hereinafter, an adhesive chuck cleaning apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 11 and 12. The same parts as those described in the first embodiment of the present invention will be denoted by the same reference numerals and detailed description thereof will be omitted.

As illustrated in FIGS. 11 and 12, the adhesive cleaning apparatus according to the second embodiment of the present invention includes an adhesive pad 80 having an adhesive layer 82 applied or adhered to both upper and lower surfaces thereof, and an adhesive. The pad 80 is moved upward and downward to attach to the adhesive member 42 of the adhesive chuck 40 of the first chamber 10 and the second chamber 20, and then detached from the adhesive member 42. It may be configured to include a second moving unit 92.

The second moving part 92 has a pair of supports 922 fixed to the frame 912 and extended in the vertical direction, and both sides of the adhesive pad 80 are fixed, and the slides are supported on the support 922 in the vertical direction. A guide member 923 that is possibly connected, a timing belt 924 embedded in the support 922 and connected to the guide member 923, a gear 925 engaged with the timing belt 924, and a gear 925. It may be configured to include a rotating motor 926 to rotate.

The support 922 has a slot 928 extending in the longitudinal direction of the support 922 so that the connecting member 927 connecting the guide member 923 and the timing belt 924 can be slidably inserted in the vertical direction. Can be formed.

The guide member 923 is formed to surround a portion of the circumference of the support 922 to serve to guide the adhesive pad 80 to be moved in the longitudinal direction of the support 922.

The gear 925 may be installed at both ends of the timing belt 924. As shown in the drawing, one gear 925 is provided at one end of the timing belt 924, and the timing at the other end of the timing belt 924 is shown. A configuration in which an idle gear 929 is installed to maintain the tension of the belt 924 may be applied.

By such a configuration, when the rotary motor 926 is operated, the adhesive pad 80 may be moved up and down based on the rail 911 according to the rotation direction of the rotary motor 926. Therefore, when the adhesive chuck 40 is provided in both the first chamber 10 and the second chamber 20, the adhesive layer 82 provided on the upper side of the adhesive pad 80 is the first chamber 10. Attached to and detached from the adhesive chuck 40, the particles P attached to the adhesive chuck 40 of the first chamber 10 can be removed, and the adhesive layer provided on the lower side of the adhesive pad 80. While 82 is attached and detached to the adhesive chuck 40 of the second chamber 20, the particles P attached to the adhesive chuck 40 of the second chamber 20 may be removed. Therefore, the adhesive chuck cleaning apparatus according to the second embodiment of the present invention can simultaneously perform the cleaning operation of the adhesive chuck 40 provided in the first chamber 10 and the second chamber 20, There is an effect that can reduce the time to remove the particle (P).

On the other hand, in the second embodiment of the present invention in the configuration of the second moving unit 92 for moving the adhesive pad 80 in the vertical direction, the timing belt 924 and the timing belt (connected to the adhesive pad 80) Although a configuration to which the rotary motor 926 for rotating the 924 is applied is presented, the present invention is not limited thereto, and is provided with a moving mechanism using a ball screw, a hydraulic cylinder or a pneumatic cylinder, and a movable and stator. Various configurations for moving the adhesive pad 80 in a vertical direction, such as a transfer mechanism using electromagnetic interaction of the ruler and the stator, or a transfer mechanism using a robot, may be applied.

Hereinafter, an adhesive chuck cleaning apparatus according to a third exemplary embodiment of the present invention will be described with reference to FIGS. 13 to 15. The same parts as those in the first and second embodiments described above are denoted by the same reference numerals, and detailed description thereof will be omitted.

As shown in Figure 13, the adhesive chuck cleaning apparatus according to the third embodiment of the present invention, the adhesive roller 70 made of a material having a greater adhesive force than the adhesive force of the adhesive member 42 of the adhesive chuck 40 And, the moving unit 90 for contacting the adhesive roller 70 to the adhesive chuck 40 so that the particles P attached to the adhesive member 42 of the adhesive chuck 40 are attached to the adhesive roller 70. It may be configured to include).

The adhesive roller 70 may be connected to the mobile unit 90 through a support 71 for rotatably supporting the adhesive roller 70, and the mobile unit 90 may be the first and second embodiments described above. As described in the embodiment, the first roller 91 moves the adhesive roller 70 to be adjacent to the adhesive chuck 40, and the first roller 91 is moved to be adjacent to the adhesive chuck 40 by the first moving member 92. It may be configured to include a second moving unit 92 for moving the adhesive roller 80 to be attached and detached with the adhesive member 42.

As described above, as the mobile unit 90, a two-axis transfer mechanism such as a ball screw, a linear motor, a belt connection structure, or a robot may be applied. When the configuration shown in the first embodiment is applied, the cylinder 921 is applied. May be connected to the support 71.

Referring to Figure 14, the operation of the adhesive chuck cleaning apparatus according to a third embodiment of the present invention will be described.

First, the rail 911 is installed between the first chamber 10 and the second chamber 20, and the adhesive roller 70, the first moving part 91, and the second moving part 92 are assembled. When the frame 912 is seated on the rail 911 such that the pinion gear 915 is engaged with the rack gear 914, and then the rotary motor 917 is operated, the frame 912 follows the rail 911. By moving between the first chamber 10 and the second chamber 20, the pressure-sensitive adhesive roller 70 is moved to a position adjacent to the pressure-sensitive adhesive member 42 of the pressure-sensitive chuck 40.

When the adhesive roller 70 is moved to a position adjacent to the adhesive chuck 40, the operation of the rotating motor 917 is stopped. At this time, the cylinder 921 is operated to attach the adhesive roller 70 to the adhesive member 42, and the rotating motor 917 is again mounted while the outer circumferential surface of the adhesive roller 70 is in close contact with the adhesive member 42. In operation, the adhesive roller 70 is rotated at the same time as it moves in a direction parallel to the surface of the adhesive chuck 40, whereby the particles P attached to the adhesive member 42 are separated from the adhesive member 42. It is removed from the adhesive member 42 while being attached to the outer circumferential surface of the adhesive roller 70 having a large adhesive force relative to the adhesive force. Such movement in the direction parallel to the surface of the adhesive chuck 40 of the adhesive roller 70 may be repeatedly performed in the forward and reverse directions so that the particles (P) attached to the adhesive member 42 can be completely removed. have. On the other hand, as described above, when the adhesive roller 70 is moved in the horizontal direction and then rises in the vertical direction, the rotation motor 917 may be stopped on the way, but the adhesive roller 70 is moved in the horizontal direction. At the same time, when rising in the vertical direction, the rotary motor 917 may not be stopped.

When the particles P attached to the adhesive member 42 are attached to the adhesive roller 70 by the movement and rotation of the adhesive roller 70 in the horizontal direction, the adhesive roller 70 is lowered and the adhesive roller is lowered. After moving the 70 along the rail 911 so as to deviate from between the first chamber 10 and the second chamber 20, the adhesive roller 70, the first moving part 91, and the second movement are moved. When the frame 912 having the portion 92 assembled therein is removed from the rail 911, and the rail 911 is removed from the substrate bonding device, the particles P adhered to the adhesive member 42 of the adhesive chuck 40. The process of removing it is complete.

On the other hand, the adhesive roller 70 may be composed of a cylindrical body 72, and an adhesive layer 73 provided in a manner that is applied or adhered to the outer periphery of the body 72, as shown in FIG. The elastic layer 74 may be provided between the outer circumference of the body 72 and the adhesive layer 73. When the adhesive roller 70 is moved to the adhesive chuck 40 by such a configuration and is in close contact with the adhesive member 42, the elastic layer 74 absorbs a predetermined force. Accordingly, the adhesive roller 70 ) And the adhesion of the pressure-sensitive adhesive member 42 can be increased, so that the particles P attached to the pressure-sensitive adhesive member 42 can be easily attached to and removed from the pressure-sensitive adhesive roller 70.

In the adhesive chuck cleaning apparatus according to the third embodiment of the present invention, the adhesive chuck 40 is automatically attached to the adhesive member 42 of the adhesive chuck 40 and then moved in a horizontal direction. Particles (P) attached to the adhesive member 42 of the can be easily removed, it is possible to significantly reduce the time compared to manually removing the particles (P) attached to the adhesive chuck 40 have. Therefore, since the time for removing the particles P can be shortened, the time required for the flat panel display manufacturing apparatus to be put into the manufacturing process can be increased, thereby improving the manufacturing efficiency of the flat panel display panel.

Hereinafter, an adhesive chuck cleaning apparatus according to a fourth embodiment of the present invention will be described with reference to FIGS. 16 and 17. The same parts as those in the first to third embodiments of the present invention described above are denoted by the same reference numerals and detailed description thereof will be omitted.

As shown in FIG. 16 and FIG. 17, in the adhesive cleaning apparatus according to the second embodiment of the present invention, the adhesive roller 70, the adhesive roller 70, and the first chamber 10 and the second chamber ( It may be configured to include a second moving unit 92 to move in the vertical direction to be attached to the adhesive member 42 of the adhesive chuck 40 of 20).

The second moving part 92 has a pair of supports 922 fixed to the frame 912 and extended in the vertical direction, and both sides of the adhesive roller 70 are fixed, and the slides are supported on the support 922 in the vertical direction. A guide member 923 which is possibly connected, a timing belt 924 embedded in the support 922 and connected to the guide member 923, a gear 925 engaged with the timing belt 924, and a gear ( It may be configured to include a rotary motor 926 for rotating the 925.

The support 922 has a slot 928 extending in the longitudinal direction of the support 922 so that the connecting member 927 connecting the guide member 923 and the timing belt 924 can be slidably inserted in the vertical direction. Can be formed.

The guide member 923 is formed to surround a part of the circumference of the support 922 to serve to guide the adhesive roller 70 to be moved in the longitudinal direction of the support 922.

The gear 925 may be installed at both ends of the timing belt 924. As shown in FIG. 14, one gear 925 is provided at one end of the timing belt 924, and A configuration in which an idle gear 929 is installed at the other end to maintain the tension of the timing belt 924 may be applied.

By such a configuration, when the rotary motor 926 is operated, the adhesive roller 70 may be moved up and down with respect to the rail 911 according to the rotation direction of the rotary motor 926. Therefore, when the adhesive chuck 40 is provided in both the first chamber 10 and the second chamber 20, the adhesive roller 70 is moved upward and thus the adhesive chuck 40 of the first chamber 10. After being attached to the rotating to the left and right direction can be removed particles (P) attached to the adhesive chuck 40 of the first chamber 10, the adhesive roller 70 is moved downward to the second chamber After being attached to the adhesive chuck 40 of 20, the particles P attached to the adhesive chuck 40 of the second chamber 20 may be removed while being rotated in a horizontal direction. Therefore, the adhesive chuck cleaning apparatus according to the second embodiment of the present invention can simultaneously perform the cleaning operation of the adhesive chuck 40 provided in the first chamber 10 and the second chamber 20, There is an effect that can reduce the time to remove the particle (P).

On the other hand, in order to move the adhesive roller 70 in the up and down direction, a transfer mechanism using a ball screw, a transfer mechanism using a hydraulic cylinder or a pneumatic cylinder, a mover and a stator are provided, and an electromagnetic interaction of the mover and the stator is used. Various configurations for moving the adhesive roller 70 in the vertical direction, such as a transfer mechanism or a transfer mechanism using a robot, may be applied.

Techniques presented in each embodiment of the present invention may be implemented independently, may be implemented in combination with each other.

1 is a cross-sectional view showing a substrate bonding apparatus.

2 is a cross-sectional view showing a state in which the adhesive chuck cleaning apparatus according to the first embodiment of the present invention is applied to the substrate bonding apparatus.

3 is a cross-sectional view of the side of the adhesive chuck cleaning apparatus of FIG. 2.

4 is a perspective view illustrating the sticky chuck cleaning device of FIG. 2.

5 and 6 is a state diagram showing the operation of the adhesive chuck cleaning apparatus of FIG.

FIG. 7 is a partially enlarged view illustrating an adhesive pad of the adhesive chuck cleaning apparatus of FIG. 2.

8 is a cross-sectional view illustrating another example of an adhesive pad of the adhesive chuck cleaning apparatus of FIG. 2.

FIG. 9 is a cross-sectional view illustrating another example of an adhesive pad of the adhesive chuck cleaning apparatus of FIG. 2.

FIG. 10 is a cross-sectional view illustrating another example of an adhesive pad of the adhesive chuck cleaning apparatus of FIG. 2.

11 is a perspective view showing a sticky chuck cleaning apparatus according to a second embodiment of the present invention.

12 is a cross-sectional view of a portion of the side surface of the sticky chuck cleaning apparatus of FIG. 11.

FIG. 13 is a perspective view illustrating an adhesive chuck cleaning apparatus according to a third exemplary embodiment of the present invention. FIG.

14 is a state diagram illustrating an operation of the adhesive chuck cleaning apparatus of FIG. 13.

15 is a partial cross-sectional view showing another example of the adhesive roller of the adhesive chuck cleaning apparatus of FIG. 13.

16 is a perspective view illustrating an adhesive chuck cleaning apparatus according to a fourth embodiment of the present invention.

17 is a perspective view illustrating a portion of the side surface of the adhesive chuck cleaning apparatus of FIG. 16.

*** Explanation of symbols for main parts of drawing ***

40: adhesive chuck 42: adhesive member

70: adhesive roller 80: adhesive pad

82: adhesive layer 83: adhesive projection

90: mobile unit P: particle

Claims (10)

In the cleaning apparatus of an adhesive chuck having an adhesive member to which a substrate is attached, Adhesive means having a large adhesive force compared to the adhesive force of the adhesive member; And The adhesive means is attached to the adhesive member so that the particles attached to the adhesive member are attached to the adhesive means, and the adhesive means is detached from the adhesive member so that the particles attached to the adhesive member are removed from the adhesive member. Adhesive chuck cleaning device comprising a moving unit to. The method of claim 1, The adhesive means, Flat plate; And Adhesive chuck cleaning device, characterized in that consisting of an adhesive layer formed on at least one surface of the plate. The method of claim 2, Adhesive chuck cleaning device, characterized in that the elastic layer is interposed between the plate and the adhesive layer. The method of claim 1, The adhesive means, Flat plate; And And a plurality of sticking protrusions provided on the plate and having a surface corresponding to the sticking surface of the sticking member and arranged to be aligned with the installation position of the sticking member. The method of claim 4, wherein Adhesive chuck cleaning device, characterized in that the elastic member is interposed between the plate and the adhesive projection. 6. The method according to any one of claims 1 to 5, The mobile unit, A first moving part which moves the adhesive means in a direction parallel to the adhesive surface of the adhesive member; And a second moving part to move the adhesive means in a direction in which the adhesive means is attached to the adhesive member and in a direction in which the adhesive means is detached from the adhesive member. The method of claim 6, The first moving part is provided with a rail extending parallel to the adhesive surface of the adhesive member, the rail is installed to be movable along the rail, the adhesive means is connected to the frame, and the frame is moved along the rail. Including a first driving device The second moving part is installed on the frame and is connected to the adhesive means includes a second driving device for moving the adhesive means in the direction in which the adhesive means is attached to the adhesive member and the direction detachable from the adhesive member Adhesive chuck cleaning device characterized in that. The method of claim 6, The adhesive layer is formed on both sides of the adhesive means, The first moving part is provided with a rail extending parallel to the adhesive surface of the adhesive member, the rail is installed to be movable along the rail, the adhesive means is connected to the frame, and the frame is moved along the rail. Including a first driving device And the second moving part includes a second driving device for moving the adhesive means in a direction in which both sides of the adhesive means are respectively attached to a pair of adhesive chucks and in a direction of detachment from the pair of adhesive chucks. Chuck cleaning device. A first step of transferring an adhesive means having a large adhesive force adjacent to the adhesive member of the adhesive chuck as compared with the adhesive force of the adhesive member of the adhesive chuck to which the substrate is attached; Attaching the adhesive means to the adhesive member to attach the particles attached to the adhesive member to the adhesive means; And And a third step of detaching the adhesive means from the adhesive member to remove particles attached to the adhesive member from the adhesive member. 10. The method of claim 9, And a fourth step of measuring an arrangement state of the adhesive member from a pattern of particles attached to the adhesive means.

Images