KR20110000204A - A stamp separating apparatus - Google Patents

Abstract

PURPOSE: A stamp separating device is provided to prevent the abnormal deformation and damage of the stamp by properly tilting a first separation holder. CONSTITUTION: A substrate(G) attached to a stamp is loaded on a stage(2). The stage is comprised of a planar vacuum chuck including a loading surface corresponding to a substrate area. A first separation holder(4) is separated from the substrate by lifting the edge of the stamp. A second separation holder(6) is separated from the substrate by lifting the center of the stamp. A tilting unit(10) tilts the first separation holder.

Description

Stamp separating apparatus {a stamp separating apparatus}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for imprinting a substrate for a flat panel display device, and more particularly, relates to a stamp separation device that can easily separate an imprint stamp bonded to a substrate from a substrate.

Among the methods for patterning various functional patterns on the substrate side of a flat panel display element, an imprint operation method is widely known, and an imprint apparatus having a flat stamp is mainly used.

Briefly describing the structure of the imprint apparatus, a chamber portion, a stage disposed inside the chamber portion and coated with a chemical liquid (for example, an etching resist) is placed, a stamp disposed above the stage, and the stage It comprises a holder for holding the stamp to be bonded to or detached from the substrate placed on.

That is, the imprint apparatus is bonded to the substrate in a conventional manner (eg, dropping) while holding the upper surface of the stamp with a holder, and then separated by pulling up the stamp bonded to the substrate again using the holder. You can proceed with the imprint.

And before removing a stamp from a board | substrate, the process of hardening | curing the chemical | medical solution of a board | substrate is performed in the state which became between the joining surfaces by a conventional method.

Therefore, it is possible to simply pattern various functional patterns on the chemical liquid layer of the substrate in an imprint manner while sequentially adhering, curing, and separating processes as described above.

According to such an imprint operation method, it is very important to stably separate the stamp from the substrate while the substrate and the stamp are bonded and cured. That is, it is known that the adhesive force of the chemical liquid acts between the substrate and the bonding surface of the stamp, so that a large resistance force is generated when the stamp is separated.

Recently, to solve this problem, for example, a method of dividing the entire surface of the stamp into two places, separating the edge portion first (primary separation), and then separating the middle portion (secondary separation) has been proposed. .

However, this separation method requires a cut at the boundary between the part of the stamp (the edge of the stamp) and the unfixed part (the center of the stamp) of the entire area of the stamp when lifting the edge of the stamp into the holders. Bend out easily can occur easily.

Therefore, when the stamp is separated, the shape of the stamp is abnormally deformed and can be easily damaged, thereby resulting in a problem that the durability of the stamp is lowered early and the life is shortened.

Moreover, these problems are difficult to adequately cope with imprinting of large-area substrates because the larger the size of the stamp and the substrate, the greater the adhesive force acting between the mating surfaces.

In addition, the method of simultaneously adhering and separating in the imprint apparatus is difficult to improve the work yield of the imprint process because the time required for the separation operation is excessive.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems occurring in the prior art,

SUMMARY OF THE INVENTION An object of the present invention is to provide a stamp separating device that can be easily removed while reducing the damage of the stamp, especially when separating the bonded state of the substrate and the stamp.

In order to realize the object of the present invention as described above,

A stage on which the substrate in a state of being bonded with the stamp is placed;

First separating holders disposed above the stage and formed to be separated from the substrate by lifting an edge portion of the entire surface of the stamp;

Second separation holders formed to be separated from the substrate while lifting a central portion of the entire surface of the stamp;

Tilting means for tilting the first separating holders to lift the edge portion of the stamp by tilting the first separating holders;

It provides a stamp separator comprising a.

Since the present invention has a first separation holder and a second separation holder formed to divide the entire surface of the stamp to be separated, for example, by lifting the edge portion of the entire surface of the stamp first to separate (primary) After removing, the center of the stamp can be lifted and removed (secondary separation).

In particular, the present invention is provided with a tilting means corresponding to the first separation holders, for example, so as to minimize the separation resistance due to the adhesive force acting on the bonding surface of the substrate and the stamp when separating the edge of the stamp. The separation operation can be performed by appropriately tilting the first separation holders and peeling them while pulling the edge portion of the stamp laterally.

In addition, since the first separation holders can be properly tilted so that the boundary point is not bent in a stepped state when separating the whole surface of the stamp into two places, the life of the stamp may be shortened as the stamp is abnormally deformed or damaged. Can be prevented.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

The embodiments of the present invention will be described by those skilled in the art to which the present invention is applicable.

Therefore, since the embodiments of the present invention can be modified in various other forms, the claims of the present invention are not limited to the embodiments described below.

1 is a view schematically showing the overall structure of a stamp separating apparatus according to an embodiment of the present invention, 2 denotes a stage.

The stage 2 has a structure capable of loading the substrate G in a state of being bonded to the stamp imprinting S.

That is, the stage 2 may have a loading surface L on the upper side, and may be disposed horizontally such that the loading surface L faces upward on the frame F as shown in FIG. 1.

Although not shown in the figure, a case (or cover) may be provided on the frame F in a state surrounding the stage 2. Then, it is possible to prevent the substrate G or the stamp S from being contaminated by external debris.

The stage S may use, for example, a plate-shaped vacuum chuck or an electrostatic chuck to fix the substrate G in a loading state or to release the fixing state.

Then, when performing the operation of separating the stamp (S) on the substrate (G) side can be easily held to the stage (2) so that the substrate (G) does not move.

The stamp separator according to an embodiment of the present invention includes first separating holders 4 and second separating holders 6.

The first and second separation holders 4 and 6 may be formed to separate the bonding state with the substrate G while lifting the stamp S from the side of the substrate G placed on the stage 2. do.

Referring back to FIG. 1, the first and second separation holders 4 and 6 may use, for example, a pin type adsorber having a vacuum adsorption unit H at a lower portion thereof.

Although not shown in the drawings, the adsorption unit H is operated to generate a vacuum adsorption force in a conventional manner to hold the stamp S with a vacuum adsorption force.

The first and second separation holders 4 and 6 are disposed on the frame F so that the entire surface of the stamp S can be divided and separated.

2 and 3 are views for explaining a preferred arrangement of the first and second separation holders 4 and 6.

That is, referring to FIG. 2, the first separating holders 4 are disposed to correspond to the left and right edges of the entire surface of the stamp S, and the second separating holders 6 are formed of a stamp ( It may be arranged to correspond to the middle portion of S).

In addition, referring to FIG. 3, the first separating holders 4 may be disposed to correspond to four edges of the stamp S. Referring to FIG.

The first and second separation holders 4 and 6 disposed as described above are disposed to hold the upper surface of the stamp S by the adsorption portion H disposed downward.

In addition, the first separation holder 4 and the second separation holder 6 are operated to be movable in the up and down directions by receiving power from the holder driving unit M. FIG.

Referring back to FIG. 1, the holder driving unit M may use, for example, conventional screw jacks J including the lifting screw J1 as a driving source.

That is, the screw jacks J are installed on the upper portion of the frame F, and the first and second separating holders 4 and 6 are separated from each other by the lifting screws J1. Can be connected to move in the direction.

For example, the first separating holders 4 may be set to be connected to the ends of the lifting screws J1 so as to be individually driven.

In addition, the second separation holders 6 are fixed to an upper part on a separate fixing plate J2 side, respectively, and the plurality of fixing plates J2 are moved in the up and down directions while moving with the lifting screw J1. Can be set to drive simultaneously.

Although not shown in the drawing, the screw jack J has a structure in which the power of the geared motor is transmitted by a conventional method (warm gear, bevel gear) so that the lifting screw J1 performs a linear movement. Not only is it suitable for transporting heavy materials, but also has a self-locking function to further improve operating safety.

Although not shown in the drawings, the first jack holder 4 or the second jack holder 6 is pushed or pulled in a normal manner by using a cylinder in addition to the screw jack J to move upward and downward. You can also

When the first separation holder 4 and the second separation holder 6 are separated from the substrate G, the stamp S adhered to the substrate G side may be removed. By dividing the whole surface of, it can be separated by two separation operations (primary separation and secondary separation).

Stamp separation device according to an embodiment of the present invention, may further comprise a fluid injection unit (8).

The fluid injector 8 is formed to inject a separation fluid W between the bonding surface of the substrate G and the stamp S.

Referring back to FIG. 1, the fluid injection part 8 may be composed of separation nozzles N capable of injecting the separation fluid W.

The separation nozzles N may be set on the frame F, for example, to allow fluid injection between the bonding surface of the substrate G and the stamp S apart from the stage 2. have.

As the separation fluid W, nitrogen gas or CDA (Clean Dried Air) may be used.

As such, the structure of injecting the separating fluid W with the separating nozzles N toward the bonding surface of the substrate G and the stamp S may be easily performed by those skilled in the art. The detailed description is omitted since it can be.

According to the structure of the fluid injection part 8, the substrate G and the stamp S are bonded when the stamp S is separated by the first and second separation holders 4 and 6. The adhesive force of the chemical solution G1 (eg, etching resist) acting on the surface can be effectively removed using the injection pressure of the separation fluid W.

4 is a view for explaining the operation of the fluid injection section (8).

Referring to FIG. 4, for example, bonding of the substrate G and the stamp S in a state in which the edge portion of the stamp S is separated or separated from the substrate G with the first separation holders 4 is performed. The adhesive force of the chemical liquid may be removed by spraying the separation fluid W between the surfaces.

Therefore, when the fluid injection part 8 is provided as described above, the stamping force is reduced by reducing the separation resistance due to the adhesive force of the chemical liquid acting between these bonding surfaces when the stamp S is separated from the substrate G. (S) can be removed more easily.

And, although not shown in the drawing, for example, when the injection fluid for separation (W) in the separated gap in the state of lifting the edge portion of the stamp (S) with the first separation holder 4, the fluid pressure By pushing the center portion of the stamp (S) it can proceed to the separation (secondary separation) work in a more stable adsorption fixed state on the second separation holder (6) side.

On the other hand, the stamp separator according to an embodiment of the present invention, includes a tilting means (10).

The tilting means 10 is formed to tilt the first separation holder 4.

5 is a view for explaining the detailed structure of the tilting means (10).

In other words, the tilting means 10 may be configured as a transfer unit U1 having a transfer block B1 for enabling linear movement by, for example, pneumatic pressure.

The transfer unit U1 may be disposed between the first separating holder 4 and the screw jack J, and the main body is fixed to an end of the lifting screw J1 of the screw jack J, The transfer block B1 may be connected and fixed to an upper portion of the first separation holders 4.

In addition, the transfer unit U1 may be set to move the upper end of the first separation holder 4 to the left and right directions with the transfer block B1 based on FIG. 5.

According to this structure, the first separating holder 4 is tilted to separate the edge portion from the entire surface of the stamp S with the first separating holders 4 to further remove the substrate G from the substrate G. It can be easily separated.

6 is a view for explaining the operation of the tilting means (10).

That is, referring to FIG. 6, the transfer block B1 of the transfer unit U is moved to the left in the state where the edge portion of the entire surface of the stamp S is held by the first separation holders 4. .

Then, the upper part of the first separation holder 4 may move to the left along the transfer block B1, and the suction part H may be tilted. Therefore, it is possible to separate (primary separation) by peeling off the edge portion of the entire surface of the stamp S in the lateral direction.

As such, the separation method by tilting minimizes the separation resistance due to the adhesive force acting on the bonding surface, for example, as compared with the conventional separation method in which the stamp S is simply lifted up and separated from the substrate G. Can be.

In particular, when the separation operation is performed while the first separation holders 4 are tilted, their boundary points are divided when the entire surface of the stamp S is divided into an edge portion and a center portion and separated by two separation operations. While bending in the stepped state, it is possible to prevent the stamp S from being abnormally deformed or damaged.

Therefore, in the stamp separating apparatus according to the embodiment of the present invention, the first and second separating holders 4 in a state in which the substrate G bonded to the stamp S is placed on the side of the stage 2. , 6) can be easily separated from the substrate (G) by dividing the entire surface of the stamp (S) into two places.

7 and 8 are views for explaining the operation of separating the stamp using the stamp separator according to an embodiment of the present invention described above.

That is, referring to FIG. 7, the first separation holders 4 are tilted as shown in the state in which the edges are held in the entire surface of the stamp S with the first separation holders 4. .

Then, the edge portion of the entire surface of the stamp S is lifted from the substrate G by the tilting operation of the first separation holders 4 and separated (primary separation).

Then, as shown in FIG. 8, the second separation holders 6 are moved upward while the center portion of the entire surface of the stamp S is held by the second separation holders 6.

Then, the center portion of the entire surface of the stamp S moves along the second separation holder 6 and is separated from the substrate G (secondary separation), and the stamp S is performed by these two separation operations. The entire surface of) can be divided into two places and separated from the substrate (G).

As such, the method of separating the edge portion of the entire surface of the stamp (S) first, for example, compared to the method of separating while lifting the entire surface of the stamp (S) at once, the substrate (G) and the stamp (S) Even if the adhesive force of the chemical solution G1 acts between the bonding surfaces of the < RTI ID = 0.0 >), < / RTI >

In addition, the method of separating while pulling the edge portion of the stamp S in the lateral direction by the tilting operation of the first separating holder 4 may not only minimize the separation resistance of the stamp S, but in particular When separating the center portion and the edge portion of the stamp (S) by dividing their boundary point stepped can prevent the stamp (S) from being abnormally deformed or damaged.

9 is a view for explaining another structure of the tilting means (10). Compared to the above embodiment, the present embodiment has a difference in that the first separation holder 4 is tilted while being rotated by the driving of the rotation unit U2.

That is, referring to FIG. 9, the rotation unit U2 may use a rotary cylinder (or stepping motor) having a rotation shaft B2, and the main body is fixed to an end of the lifting screw J1, and the rotation shaft ( B2) may be connected and fixed to the upper portion of the first separating holder 4.

In addition, the first separation holder 4 has a hinge portion H1 formed above a suction portion H by a conventional method (eg, hinge pin coupling).

According to this structure, the first separation holder 4 can be tilted while generating and transmitting a rotational force to the rotation unit U2.

10 is a view for explaining the action by the other structure of the tilting means (10).

That is, as shown in FIG. 10, the first separation holder 4 is rotated by the rotation unit U2 while the edge portion of the stamp S is held by the first separation holder 4, as shown in FIG. 10. Rotate in the direction.

Then, the suction part (H) is peeled off while pulling the edge portion of the stamp (S) laterally from the substrate (G) by the hinge (H1) during the rotation of the first separation holder (4). Tilting is done in such a way that it can.

Therefore, it is possible to easily separate the edge portion of the stamp (S) from the substrate (G) by tilting the first separation holder (4) in the above-described rotation method.

In addition to the above-described structures, the tilting means 10 may tilt the first separating holders 4 by various power transmission methods, and it is natural that such a structure falls within the scope of the present invention.

1 is a view schematically showing the overall structure of a stamp separator according to an embodiment of the present invention.

2 and 3 are views for explaining a preferred arrangement of the holder for the first and second separation of the stamp separator according to an embodiment of the present invention.

4 is a view for explaining the detailed structure and operation of the fluid injection unit of the stamp separator according to an embodiment of the present invention.

5 and 6 are views for explaining the operation of the tilting means of the stamp separator according to an embodiment of the present invention.

7 and 8 are views for explaining the stamp separation operation using a stamp separation apparatus according to an embodiment of the present invention.

9 and 10 are views for explaining another structure and operation of the tilting means of the stamp separator according to an embodiment of the present invention.

[Description of Symbols for Main Parts of Drawing]

2: stage 4: first separation holder 6: second separation holder

8: fluid injection part 10: tilting means G: substrate

N: Separation nozzle W: Separation fluid

Claims (9)

A stage on which the substrate in a state of being bonded with the stamp is placed; First separating holders disposed above the stage and formed to be separated from the substrate by lifting an edge portion of the entire surface of the stamp; Second separation holders formed to be separated from the substrate while lifting a central portion of the entire surface of the stamp; Tilting means for tilting the first separating holders to lift the edge portion of the stamp by tilting the first separating holders; Stamp separator comprising a. The method according to claim 1, The stage, A stamp separator comprising a plate-shaped vacuum chuck having a loading surface corresponding to the substrate area. The method according to claim 1, The first separation holder and the second separation holder, Stamp separation device comprising a vacuum adsorber having an adsorption portion that can hold one surface of the stamp with a vacuum suction force. The method according to claim 1, The first separation holder, Stamp separator arranged to hold two or four edges on one side of the stamp. The method according to claim 1, The tilting means, A stamp separating device comprising a transfer unit having a transfer block for linear movement and set to tilt the first separating holders while transmitting power to the transfer block. The method according to claim 1, The tilting means, A stamp separating device comprising a rotating unit having a rotating shaft which rotates and is set to tilt the first separating holders while transmitting power to the rotating shaft. The method according to claim 1, The tilting means, The stamp separating apparatus is set to be peeled off by pulling the edge of the stamp in the lateral direction from the substrate by the tilting operation of the first separation holder. The method according to claim 1, The stamp separator is, Further comprising a fluid injection unit, The fluid injection unit, And a separation nozzle configured to inject separation fluid between the substrate and the bonding surface of the stamp. The method according to claim 8, The separation fluid, Stamp separator, characterized in that used in nitrogen gas or clean dry air (CDA).

Images