JP3648143B2 - Annealing window drive - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an annealing window driving device, and in particular, a pair of annealing windows can be used alternately, and the height of the vertical movement mechanism of the annealing window is reduced to make it thin, thereby facilitating multiple positioning with respect to the opening of the annealing window. In addition, the present invention relates to a novel improvement for facilitating attachment / detachment to / from a moving frame.
[0002]
[Prior art]
For example, FIGS. 6 to 8 have been adopted as this type of annealing window driving device conventionally used.
That is, in the configuration shown in FIGS. 6 and 7, the annealing window 1 made of glass or the like is moved horizontally with respect to the elongated opening 3 of the vacuum chamber cover 2 and moved up and down to bring the annealing window 1 into the vacuum chamber cover. A vertical movement mechanism 5 is disclosed in which it is pressed against and closely adhered to a seal 4 composed of two O-rings.
Up and down air cylinders 8 are connected to an annealing window frame 7 that holds the annealing window 1 via a fixed piece 6, and a linear member on the vacuum chamber cover 2 is disposed below the rod 9 of each up and down air cylinder 8. A moving body 11 that engages with the guide 10 is provided.
Therefore, in the case of the above-described configuration, in the state where the rod 9 of each of the upper and lower air cylinders 8 is extended and the gap D is maintained, the movable body 11 can be pitch-fed (intermittent feed) by a linear actuator such as a cylinder (not shown). The plurality of sections 1 a to 1 e of the annealing window 1 can be made to correspond to the opening 3 sequentially.
Further, by operating the rod 9 of each of the upper and lower air cylinders 8 in a state in which the predetermined section corresponds to the opening 3, the gap D between the annealing window 1 and the surface of the opening 3 is the same. The annealing window 1 descends and the annealing window 1 and the opening 3 are intimately joined.
In the above-described state, the liquid crystal panel (not shown) in the vacuum chamber is irradiated with laser light from the atmosphere side, whereby the liquid crystal panel is annealed, and impurities on the liquid crystal panel are blown away by heat, so that the annealing window 1 It adheres to the back surface of the first section 1a. When this adhesion increases, the annealing window 1 is moved in the horizontal direction by one section 1a, and the section 1b having no adhesion of dirt is positioned at a position corresponding to the opening 3. Thereafter, every time dirt is deposited, the annealing window 1 is intermittently pitched and moved horizontally in order to correspond to the next sections 1c, 1d, and 1e.
[0003]
Next, in the conventional configuration shown in FIG. 8, the annealing window frame 7 having the annealing window 1 is attached to the moving frame 21 by a plurality of fixing screws 20, and the moving frame 21 is attached to the frame body 24, the servo motor 22, and the ball screw 23. It is comprised so that pitch feed can be carried out horizontally.
The frame body 24 is provided with a pair of upper and lower cylinders 25 and a sensor 26. After detecting the correspondence between the annealing window 1 and the opening shown in FIG. As a result, the annealing window 1 is pressed against and closely adhered to the opening.
[0004]
[Problems to be solved by the invention]
Since the conventional annealing window driving device is configured as described above, the following problems exist.
That is, since the conventional annealing window vertical movement apparatus directly uses the stroke of the air cylinder for vertical driving, it is extremely difficult to reduce the height dimension of the vertical movement mechanism.
In addition, the lock holding force due to the vertical movement needs to be determined by the thrust of the air cylinder, and it is difficult to sufficiently maintain the close contact between the annealing window and the opening.
In addition, since the conventional pitch feed mechanism of the annealing window uses a pitch feed mechanism using a ball screw, a ball screw, a servo motor, a controller, a sensor, and the like are necessary, and cost reduction is extremely difficult.
[0005]
The present invention has been made to solve the above-described problems, and in particular, a pair of annealing windows can be used alternately, the height of the vertical movement mechanism of the annealing window is suppressed, and a plurality of annealing windows are opened. It is an object of the present invention to provide an annealing window drive device that facilitates positioning of the annealing window and facilitates attachment / detachment of the annealing window to / from the moving frame.
[0006]
[Means for Solving the Problems]
An annealing window driving apparatus according to the present invention moves an opening of an annealing window having an annealing window made of a transparent plate through a horizontal movement mechanism so as to correspond to the opening of a vacuum chamber cover, while the opening is attached to the moving frame. In the annealing window driving device in which the annealing window is moved up and down by a vertical movement mechanism so that the annealing window is in close contact with the opening, the vertical movement mechanism engages with the annealing window frame and is movable up and down. Positioned on the vacuum chamber cover side to guide the reciprocating movement of the elevating holder, the cam guide having a cam hole engaged with the cam follower of the elevating holder and reciprocating in the horizontal direction by a linear actuator for vertical movement Linear actuator for vertical movement Axial eta is Ri parallel to the longitudinal direction der of the cam guide, before Symbol linear guide arrangement is provided the height via the height adjustment screw on the vacuum chamber cover to a floating plate which is variable It is.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of an annealing window driving apparatus according to the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected and demonstrated to a part the same as that of a prior art example, or an equivalent part.
In FIG. 1, reference numerals 1 and 1A denote annealing windows made of a transparent plate such as heat-resistant tempered glass. The annealing windows 1 and 1A have a rectangular annealing window frame 7 having a plurality of fixing pieces 6 and handles 7a. , 7A.
[0008]
The annealing window frames 7 and 7A are detachably provided on a pair of moving frames 21 and 21A provided on the pair of linear guides 30 and 31 so as to reciprocate along the horizontal direction H.
A pair of roller bearings 32 is provided at one end of the annealing window frames 7 and 7A, and a pair of inclined portions 33 is formed at one end of the moving frames 21 and 21A. It is configured to engage with each inclined portion 33.
Therefore, when the annealing window frames 7 and 7A are in close contact with the moving frames 21 and 21A, the annealing window frames 7 and 7A with respect to the moving frames 21 and 21A are slid by sliding the roller bearings 32 on the inclined portions 33. Mounting positioning and loading are made easy and reliable.
Further, when the annealing window frames 7 and 7A are detached from the moving frames 21 and 21A, the handle 7a opposite to the position where the roller bearing 32 is provided is lifted upward and pulled out along the direction X. Then, the roller bearing 32 can slide on the inclined portion 33 and can be smoothly separated.
[0009]
The annealing windows 1 and 1A and the moving frames 21 and 21A are arranged in a pair at both end positions of the guide rails 30 and 31, and the length of the vacuum chamber cover 2 of the vacuum chamber 36 shown in FIG. The annealing windows 1 and 1A are arranged symmetrically on both sides with the narrow opening 3 as the center.
[0010]
The moving frames 21 and 21A are connected to horizontal moving mechanisms 41 and 41A via L-shaped connecting members 40 and 40A. The horizontal moving mechanisms 41 and 41A are arranged in parallel with each other. Linear actuators 42, 42A and second moving linear actuators 43, 43A. When the first rods 44, 44A of the first moving linear actuators 42, 42A extend, the second moving linear actuators 43, 43A After moving together with the connecting members 40, 40A, after this moved position, only the second rods 45, 45A of the second moving linear actuators 43, 43A extend independently and send air through an electromagnetic valve (not shown). To move the pitch (intermittent movement).
By this pitch movement, the sections 1a to 1e of the annealing windows 1 and 1A are configured to sequentially correspond to the openings 3.
[0011]
Next, as shown in FIG. 5, the horizontal movement mechanisms 41 and 41A are provided with sensor dogs 200 and 200A at the corners of the connection members 40 and 40A, respectively, and the positions of the sensor dogs 200 and 200A. Is detected by the position sensors S1 to S5, so that the absolute position of each annealing window 1, 1A can be detected.
[0012]
In the recess 70 of the vacuum chamber cover 2 of the vacuum chamber 36 having the opening 3, as shown in FIGS. 2 to 4, a floating plate 71 is provided by a height adjusting screw 72 so that the height can be adjusted. A linear guide 73 provided on the floating plate 71 is configured such that a longitudinal cam guide 75 having an inclined cam hole 74 can reciprocate along the horizontal direction H.
[0013]
The cam hole 74 is engaged with a pin-shaped cam follower 78 of an elevating holder 77 held on a holder guide 76, and the cam guide 75 is moved horizontally by the operation of the rod 81 of the vertical actuators 80 and 80A. By moving in the direction H, the elevating holder 77 can be moved up and down along the vertical direction V by the cam lead, that is, the elevating holder stroke amount S along the cam hole 74. The vertical movement linear actuators 80 and 80A are arranged such that their axial directions are arranged in parallel with the longitudinal directions of the cam guide 75 and the lifting holder 77, so that the thickness in the height direction becomes thinner than the conventional one. Has been. The annealing window frame 7 is configured to float by the spring 90 from the moving frame 21 over a stroke amount S that moves up and down by the elevating holder 77.
[0014]
The groove 82 of the elevating holder 77 is configured so that the handle 7a of the annealing window 7 is engaged, and the vertical movement of the elevating holder 77 creates a gap D between the opening 3 of the annealing window 1 and 1A. The contact or gap D can be formed without it.
Therefore, the above-mentioned lifting holder 77, cam follower 78, cam hole 74, cam guide 75 and vertical movement linear actuators 80, 80A constitute the vertical movement mechanisms 100, 100A for moving the annealing window 1, 1A up and down. . The vertical movement mechanism 100A is configured in the same manner as the vertical movement mechanism 100 described above.
[0015]
At the end of each of the vertical movement mechanisms 100, 100A, there are five corresponding to each of the sections 1a-1e of the annealing window 1, 1A (however, this number can be changed if the number of sections is changed). Position sensors S _{1 to} S ₅ are provided, and the positions of the rods 45 and 45A corresponding to the sections 1a to 1e are detected by the position sensors S _{1 to} S ₅ to position the rods 45 and 45A. Is going.
[0016]
Next, the operation will be described. First, since the annealing windows 1 and 1A are provided in a pair on the left and right with respect to the opening 3, as described in the prior art, one of the annealing windows 1 corresponds to the opening 3 and a laser for a liquid crystal panel (not shown). during after an annealing treatment by light returns an annealing window 1 spent in the first retracted position T _1, then that annealing process described above in association with other anneal window 1A in the opening 3 Further, it is assumed that the annealing windows 1A are used alternately by exchanging the annealing windows 1 used so far.
[0017]
Therefore, when moving the movable frame 21 having an annealing window 1 by the first movement linear actuator 42 of the horizontal movement mechanism 41, as shown in FIG. 5, when the annealing window 1 is positioned at the standby position T ₁ The tip of the rod 44 of the first moving linear actuator 42 is at position X, and the tip of the rod 45 of the second moving linear actuator 43 is at position a.
[0018]
In the state described above, the annealing window 1 is moved to the opening 3 side, and in the state (initial position) where the first section 1a of the annealing window 1 corresponds to the opening 3 in FIG. 5, the rod 44 of the first moving linear actuator 42. The tip is at position Y, and the tip of the rod 45 of the second moving linear actuator 43 is at position a.
Next, in a state where the second section 1 b of the annealing window 1 corresponds to the opening 3, the tip of the rod 44 of the first moving linear actuator 42 remains at the position Y, and the rod 45 of the second moving linear actuator 43. The tip is at position b.
Furthermore, in order for the third, fourth, and fifth sections 1c, 1d, and 1e of the annealing window 1 to sequentially correspond to the opening 3, only the rod 45 of the second moving linear actuator 43 is positioned at positions c and d. , E are sequentially pitch-moved (intermittent movement) and extended. The positions a to e are detected by the position sensors S _{1 to} S ₅ , and the operation of the second moving linear actuator 43 is controlled.
[0019]
As described above, after the annealing window 1 is sequentially positioned with respect to the positions 1a to 1e, the annealing window 1 is brought into close contact with the opening 3 by using the vertical movement mechanism 100 and the liquid crystal panel is annealed. Returns the annealing window 1 to the original retracted position T ₁ via the horizontal moving mechanism 41 and, at the same time, moves the other annealing window 1A to the retracted position T ₂ using the other horizontal moving mechanism 41A by the same operation as described above. The annealing process using the first section 1a is started in correspondence with the opening 3.
[0020]
In the above-described state, the anneal window 1 that has returned to the retracted position T ₁ is detached from the moving frame 21 by pulling the handle 7a of the anneal window frame 7 in the pull-out direction X, and is replaced with a new anneal window frame 1. 7 is easily mounted on the moving frame 21 by sliding the roller bearing 32 to the inclined portion 33, and the replacement of the annealing window 1 is completed.
Further, after the use of each section 1a~1e other annealing window 1A is completed, the reverse of the foregoing, the return anneal window 1A to the original standby position T _2, to correspond to the opening 3 an annealing window 1 again . Therefore, by repeating the above operation, the laser annealing process using the opening 3 can be performed without interruption. The linear actuators 42, 43, and 80 are all described as air cylinders, but linear motors can also be used.
[0021]
【The invention's effect】
Since the annealing window driving device according to the present invention is configured as described above, the following effects can be obtained. That is, since the vertical movement mechanism for moving the annealing window up and down with respect to the opening is constituted by the cam mechanism and the linear actuator arranged horizontally, the height of the apparatus can be reduced and the cam can be used. As a result, it is possible to use a small actuator for the vertical force generated from the annealing window without relying only on the actuator force as in the prior art.
Further, since the height of the floating plate on which the linear actuator, the cam and the like are placed can be adjusted, the height of the cam mechanism can be easily adjusted.
Even if the air source is stopped during a power failure, the cam guide and the lifting holder are locked via the cam, so that the annealing window can be prevented from moving up and down arbitrarily even in an emergency.
Further, since the horizontal movement mechanism for horizontally moving the annealing window is a linear actuator, it is significantly less expensive than a conventional drive system using a servo motor, a ball screw, or the like.
In addition, since the annealing window frame + annealing window can be attached to and detached from the moving frame via roller bearings and inclined parts, it is easy to install and can be easily removed by pulling the handle when detached. The attachment / detachment of the annealing window frame and the annealing window is greatly simplified as compared with the conventional mounting screw structure.
[Brief description of the drawings]
FIG. 1 is a plan view showing an annealing window driving apparatus according to the present invention.
FIG. 2 is a cross-sectional view taken along the line AA of FIG.
FIG. 3 is an enlarged detailed plan view of the main part of FIG. 1;
4 is a cross-sectional view taken along the line BB in FIG.
FIG. 5 is a plan configuration diagram illustrating in detail the operation of the horizontal movement mechanism of FIG. 1;
FIG. 6 is a plan view showing a conventional annealing window.
7 is a front sectional view of FIG. 6. FIG.
FIG. 8 is a plan configuration diagram showing a conventional horizontal movement mechanism of an annealing window.
[Explanation of symbols]
1, 1A Annealing window 2 Vacuum chamber cover 3 Opening 7, 7A Annealing window frame 21, 21A Moving frame 32 Roller bearing 33 Inclined portion 41, 41A Horizontal moving mechanism 42, 42A First moving linear actuator 43, 43A For second moving Linear actuators S _{1 to} S ₅ Position sensors T ₁ , T ₂ Retraction position H Horizontal direction 71 Floating plate 72 Height adjustment screw 73 Linear guide 74 Cam hole 75 Cam guide 78 Cam follower 80, 80A Vertical movement linear actuator 100, 100A Vertical movement mechanism

Claims (1)

With the annealing window frame (7, 7A) having the annealing window (1, 1A) made of a transparent plate attached to the moving frame (21, 21A), it corresponds to the opening (3) of the vacuum chamber cover (2). Is moved through a horizontal movement mechanism (41, 41A), a vertical movement mechanism (100, 100) so that the annealing window (1, 1A) is in close contact with the opening (3) at a position corresponding to the opening (3). In the annealing window driving device configured to move up and down at 100A), the up-and-down moving mechanism (100, 100A) engages with the annealing window frame (7, 7A), and an up-and-down holder (77) freely movable up and down, A cam guide (75) having a cam hole (74) that engages with a cam follower (78) of the elevating holder (77) and reciprocating in a horizontal direction (H) by a linear actuator for vertical movement (80, 80A); Linear guide located on the vacuum chamber cover (2) side to guide the reciprocation of the cam guide (75). It from the guide (73), parallel to the longitudinal direction der is, before Symbol linear guide (73), said vacuum chamber cover of the axial vertical motion linear actuator (80, 80A) is the cam guide (75) (2) An annealing window driving device characterized in that the annealing window driving device is provided on a floating plate (71) whose height is variable via a height adjusting screw (72).

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